JP2008169904A - Flow amount detecting system for flow control valve - Google Patents

Flow amount detecting system for flow control valve Download PDF

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JP2008169904A
JP2008169904A JP2007003062A JP2007003062A JP2008169904A JP 2008169904 A JP2008169904 A JP 2008169904A JP 2007003062 A JP2007003062 A JP 2007003062A JP 2007003062 A JP2007003062 A JP 2007003062A JP 2008169904 A JP2008169904 A JP 2008169904A
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flow rate
flow
valve
control valve
valve opening
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Hiroaki Yoshimura
博明 吉村
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Chugoku Electric Power Co Inc
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Chugoku Electric Power Co Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To read a valve opening from a valve opening indicator and find a flow amount at a rough estimate from the valve opening and a flow amount property curve on specifications, thus solving problems in which troublesome work is required for checking a flow amount, as well as an accurate flow amount can not be grasped. <P>SOLUTION: This flow amount detecting system for a flow control valve 1 which controls the flow amount of fluid in a flow path 20 comprises: a valve opening detecting means 3 for detecting the valve opening of the flow control valve 1 and outputting a valve opening signal; a storage means 12 for storing the flow amount property of the flow control valve 1; and a flow amount calculating means 13 for calculating the flow amount of the fluid in the flow path 20 from the valve opening signal and the flow amount property. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、流量調節弁で調節する流路内の流体の流量を検出する流量調節弁の流量検出システムに関する。   The present invention relates to a flow rate detection system for a flow rate control valve that detects a flow rate of a fluid in a flow path that is controlled by a flow rate control valve.

従来、流路に設置される流量調節弁の弁開度の確認は、弁棒の位置又は開度指示装置によって行っている。一方、流体の流量は、流路に流量調節弁とは別に設置している流量発信器の指示で確認している。開度指示装置は、弁棒と共に移動する移動部材と、この移動部材の移動に伴って支点ピンを回動中心として回動し、弁棒の移動量を拡大して指示する指針と、この指針の回動量を弁体の開度に変換して読み取らせる開度指示目盛を設けたものが知られている(例えば、特許文献1参照)。   Conventionally, the valve opening degree of the flow control valve installed in the flow path is confirmed by the position of the valve rod or the opening degree indicating device. On the other hand, the flow rate of the fluid is confirmed by an instruction of a flow rate transmitter installed in the flow path separately from the flow rate control valve. The opening degree indicating device includes a moving member that moves together with the valve rod, a pointer that rotates around the fulcrum pin as the moving member moves to increase the amount of movement of the valve rod, and this pointer. There is known one provided with an opening instruction scale for converting the amount of rotation into the opening of the valve body and reading it (for example, see Patent Document 1).

実開平5−47661号公報Japanese Utility Model Publication No. 5-47661

しかし、流量発信器の設置していない場所での流量確認は、開度指示装置で弁開度を読み取り、読み取った弁開度と該当する弁の仕様書等に記載されている流量特性曲線から概算で流量を求める必要があった。このため、流量の確認作業が煩雑となるのみならず、流量などの使用状態によっては実際の流量特性が弁の仕様書等に記載されている流量特性曲線と相違する場合があり、正確な流量を把握できないという課題があった。   However, the flow rate confirmation in the place where the flow rate transmitter is not installed is based on the flow rate characteristic curve described in the valve opening and the corresponding valve specifications etc. The flow rate had to be calculated roughly. For this reason, not only is the flow rate confirmation work complicated, but the actual flow characteristics may differ from the flow characteristic curves described in the valve specifications depending on the usage conditions such as the flow rate. There was a problem of not being able to grasp.

そこで、本発明は、上記課題を解決するために、流路内の流体の流量を調節する流量調節弁において、前記流量調節弁の弁開度を検出して弁開度信号を出力する弁開度検出手段と、前記流量調節弁の流量特性を記憶する記憶手段と、前記弁開度信号と流量特性から前記流路内の流体の流量を算出する流量算出手段とからなる流量調節弁の流量検出システムを提供するものである。   Therefore, in order to solve the above problems, the present invention provides a valve opening that detects a valve opening of the flow rate adjusting valve and outputs a valve opening signal in a flow rate adjusting valve that adjusts the flow rate of the fluid in the flow path. The flow rate of the flow rate adjustment valve comprising: a degree detection means; a storage means for storing the flow rate characteristic of the flow rate control valve; A detection system is provided.

また、本発明は、前記流量調節弁の上流側流路及び下流側流路に圧力計を設けてあり、前記圧力計で複数の弁開度における差圧を測定して前記流量調節弁の流量特性を求める流量特性作成手段を備えた請求項1に記載の流量調節弁の流量検出システムを提供するものである。   In the present invention, pressure gauges are provided in the upstream flow path and the downstream flow path of the flow rate control valve, and the differential pressure at a plurality of valve openings is measured with the pressure gauge to determine the flow rate of the flow rate control valve. The flow rate detection system for a flow rate control valve according to claim 1, further comprising a flow rate characteristic creation means for obtaining the characteristic.

また、本発明は、前記流量特性作成手段が複数の流量調節弁の流量特性を求めるようにした請求項2に記載の流量調節弁の流量検出システムを提供するものである。   The present invention also provides a flow rate detection valve flow rate detection system according to claim 2, wherein the flow rate characteristic creation means obtains flow rate characteristics of a plurality of flow rate control valves.

また、本発明は、前記流路内の流体の流量又は前記流量調節弁の流量特性を表示する表示手段を備えた請求項1乃至3の何れかに記載の流量調節弁の流量検出システムを提供するものである。   Further, the present invention provides a flow rate detection valve flow rate detection system according to any one of claims 1 to 3, further comprising display means for displaying a flow rate of the fluid in the flow path or a flow rate characteristic of the flow rate control valve. To do.

また、本発明は、前記弁開度信号に基づいて前記流量調節弁の弁開度を制御する制御手段を備えた請求項1乃至4の何れかに記載の流量調節弁の流量検出システムを提供するものである。   The present invention also provides a flow rate detection valve flow rate detection system according to any one of claims 1 to 4, further comprising control means for controlling the valve opening degree of the flow rate control valve based on the valve opening degree signal. To do.

本発明に係る流量調節弁の流量検出システムによれば、流路内の流体の流量を調節する流量調節弁において、前記流量調節弁の弁開度を検出して弁開度信号を出力する弁開度検出手段と、前記流量調節弁の流量特性を記憶する記憶手段と、前記弁開度信号と流量特性から前記流路内の流体の流量を算出する流量算出手段とからなる構成を有することにより、流路に流量発信器を設置していない場所においても、弁開度検出手段で検出した弁開度と流量特性曲線を対比することなく、弁開度信号から直ちに流路内の流体の流量を把握することができる。従って、流量を把握するために流路に流量発信器を設置する必要がなく、コストを低減することができる効果がある。   According to the flow rate detection system for a flow rate control valve according to the present invention, in the flow rate control valve that regulates the flow rate of the fluid in the flow path, the valve that detects the valve aperture of the flow rate control valve and outputs the valve aperture signal Opening detection means, storage means for storing the flow rate characteristics of the flow rate control valve, and flow rate calculation means for calculating the flow rate of the fluid in the flow path from the valve opening degree signal and the flow rate characteristics. Therefore, even in a place where a flow rate transmitter is not installed in the flow path, the flow rate of the fluid in the flow path is immediately determined from the valve opening degree signal without comparing the valve opening degree detected by the valve opening degree detecting means with the flow rate characteristic curve. The flow rate can be grasped. Therefore, it is not necessary to install a flow rate transmitter in the flow path in order to grasp the flow rate, and the cost can be reduced.

また、本発明は、前記流量調節弁の上流側流路及び下流側流路に圧力計を設けてあり、前記圧力計で複数の弁開度における差圧を測定して前記流量調節弁の流量特性を求める流量特性作成手段を備えた請求項1に記載の構成を有することにより、流量計を備えていない流路でも流量調節弁の前後の差圧から流量特性を求めることができる。また、実際の使用状態に合った流量調節弁の流量特性を求めることができ、この流量特性と弁開度信号から正確な流量を把握することができる効果がある。   In the present invention, pressure gauges are provided in the upstream flow path and the downstream flow path of the flow rate control valve, and the differential pressure at a plurality of valve openings is measured with the pressure gauge to determine the flow rate of the flow rate control valve. With the configuration according to claim 1 including the flow characteristic creation means for obtaining the characteristic, the flow characteristic can be obtained from the differential pressure before and after the flow control valve even in the flow path not equipped with the flow meter. Further, the flow rate characteristic of the flow rate control valve that matches the actual use state can be obtained, and an accurate flow rate can be grasped from the flow rate characteristic and the valve opening signal.

また、本発明は、前記流量特性作成手段が複数の流量調節弁の流量特性を求めるようにした請求項2に記載の構成を有することにより、流量特性作成手段を複数の流量調節弁で共有することができ、構成を簡素化してコストを低減することができる効果がある。   Further, the present invention has the configuration according to claim 2, wherein the flow rate characteristic creating unit obtains the flow rate characteristics of a plurality of flow rate regulating valves, so that the flow rate characteristic creating unit is shared by the plurality of flow rate regulating valves. Therefore, there is an effect that the configuration can be simplified and the cost can be reduced.

また、本発明は、前記流路内の流体の流量又は前記流量調節弁の流量特性を表示する表示手段を備えた請求項1乃至3の何れかに記載の構成を有することにより、流路内の流体の流量又は流量調節弁の流量特性を視認することができ、流量特性から流量調節弁の形状等も把握することができる効果がある。   Moreover, this invention has the structure in any one of the Claims 1 thru | or 3 provided with the display means which displays the flow volume characteristic of the fluid in the said flow path, or the flow volume characteristic of the said flow control valve. The flow rate of the fluid or the flow rate characteristic of the flow rate control valve can be visually recognized, and the shape of the flow rate control valve can be grasped from the flow rate characteristic.

また、本発明は、前記弁開度信号に基づいて前記流量調節弁の弁開度を制御する制御手段を備えた請求項1乃至4の何れかに記載の構成を有することにより、流路に流量発信器を設置しなくても、弁開度信号のみに基づいて弁開度に対応する流体の流量を制御することができる効果がある。   Further, the present invention provides a flow path by having a configuration according to any one of claims 1 to 4 including a control unit that controls a valve opening degree of the flow rate control valve based on the valve opening signal. Even if a flow rate transmitter is not installed, there is an effect that the flow rate of the fluid corresponding to the valve opening degree can be controlled based only on the valve opening degree signal.

本発明の実施の形態を図示する実施例に基づいて説明する。
本発明に係る流量調節弁の流量検出システムは、流路20内の流体の流量を調節する流量調節弁1において、前記流量調節弁1の弁開度を検出して弁開度信号を出力する弁開度検出手段3と、前記流量調節弁1の流量特性を記憶する記憶手段12と、前記弁開度信号と流量特性から前記流路20内の流体の流量を算出する流量算出手段13とから構成してある。
Embodiments of the present invention will be described based on examples shown in the drawings.
The flow rate detection system of the flow rate control valve according to the present invention detects the valve opening degree of the flow rate control valve 1 and outputs a valve opening degree signal in the flow rate control valve 1 that regulates the flow rate of the fluid in the flow path 20. A valve opening degree detection means 3; a storage means 12 for storing the flow rate characteristics of the flow rate adjusting valve 1; a flow rate calculation means 13 for calculating the flow rate of the fluid in the flow path 20 from the valve opening degree signal and the flow rate characteristics; It is composed of

図1に示す実施例において、流量調節弁1はグローブ弁、ダイヤフラム弁等の調節弁であり、駆動部2で弁開度を調節して流路20内の流体の流量を調節することができるように構成してある。また、流量調節弁1には、制御弁の駆動量から弁開度を検出し、弁開度信号を出力する弁開度検出手段3を設けてある。   In the embodiment shown in FIG. 1, the flow control valve 1 is a control valve such as a globe valve or a diaphragm valve, and the flow rate of the fluid in the flow path 20 can be adjusted by adjusting the valve opening degree by the drive unit 2. It is constituted as follows. Further, the flow rate adjusting valve 1 is provided with valve opening degree detecting means 3 for detecting the valve opening degree from the driving amount of the control valve and outputting a valve opening degree signal.

図1に示すように、流量調節弁1の上流側及び下流側の流路20には圧力計4,4を設けてある。流量特性作成手段11は、圧力計4,4で複数の弁開度における差圧を測定して流量調節弁1の流量特性を求めることができるように構成してある。流量特性作成手段11は、流量調節弁1の弁容量係数(Cv値)と、流体の比重・温度と、流量調節弁1の前後の差圧から流体の流量を算出し、弁開度と流量の関係から流量調節弁1の流量特性を求めるようにしてある。流量特性作成手段11は、流体が液体である場合には、数1式から液体の流量を算出することができる。   As shown in FIG. 1, pressure gauges 4, 4 are provided in the upstream and downstream flow paths 20 of the flow control valve 1. The flow rate characteristic creating means 11 is configured such that the flow rate characteristics of the flow rate control valve 1 can be obtained by measuring differential pressures at a plurality of valve openings with the pressure gauges 4 and 4. The flow rate characteristic creating means 11 calculates the flow rate of the fluid from the valve capacity coefficient (Cv value) of the flow rate control valve 1, the specific gravity / temperature of the fluid, and the differential pressure before and after the flow rate control valve 1, and the valve opening and flow rate are calculated. From the relationship, the flow rate characteristic of the flow rate control valve 1 is obtained. When the fluid is a liquid, the flow rate characteristic creating means 11 can calculate the flow rate of the liquid from Equation (1).

Figure 2008169904
Figure 2008169904

図1に示す実施例において、流量特性作成手段11は、中央制御装置10に設けてあり、流路内に設置した複数の流量調節弁1の流量特性を求めることができるように構成してある。また、中央制御装置10には、記憶手段12を設けてあり、流量特性作成手段11で求めた流量調節弁1の流量特性を記憶することができるようにしてある。
なお、記憶手段12は、予め測定されて弁の仕様書等に記載された流量調節弁1の流量特性を記憶しておくことも勿論可能である。
In the embodiment shown in FIG. 1, the flow rate characteristic creating means 11 is provided in the central control device 10 and is configured so as to obtain the flow rate characteristics of a plurality of flow rate control valves 1 installed in the flow path. . In addition, the central control device 10 is provided with a storage means 12 so that the flow rate characteristics of the flow rate control valve 1 obtained by the flow rate characteristic creation means 11 can be stored.
Of course, the storage means 12 can also store the flow rate characteristics of the flow rate control valve 1 measured in advance and described in the valve specifications or the like.

また、中央制御装置10には、流量算出手段13を設けてある。流量算出手段13は、弁開度検出手段3から出力された弁開度信号と、記憶手段12に記憶された流量特性から流路20内の流体の流量を算出することができるように構成してある。流量特性は、流量調節弁1の弁体の形状等により、図2に示すように、リニア特性(図中の直線a)と、イコールパーセント特性(図中の曲線b)と、クイックオープン特性(図中の曲線c)に分類される。一般的に、流量制御用としてはリニア特性、イコールパーセント特性、又はこの中間の特性の調節弁が用いられ、弁開度から流量を算出することができる。   Further, the central controller 10 is provided with a flow rate calculation means 13. The flow rate calculation means 13 is configured to be able to calculate the flow rate of the fluid in the flow path 20 from the valve opening degree signal output from the valve opening degree detection means 3 and the flow rate characteristics stored in the storage means 12. It is. Depending on the shape of the valve body of the flow control valve 1, etc., as shown in FIG. 2, the flow characteristics are linear characteristics (straight line a), equal percent characteristics (curve b in the figure), quick open characteristics ( It is classified into curve c) in the figure. Generally, a control valve having a linear characteristic, an equal percent characteristic, or an intermediate characteristic is used for flow rate control, and the flow rate can be calculated from the valve opening.

図1に示すように、流量算出手段13には、流路20内の流体の流量及び流量調節弁1の流量特性を表示する表示手段としてモニタ15を設けてある。また、流量算出手段13には、各流量調節弁1の流量を表示する指示計16を設けてある。指示計16は、中央制御装置10に設置して集中管理することができ、又、各流量調節弁1の近くに設置して現場で流量を確認しながら弁開度を調節することも可能である。   As shown in FIG. 1, the flow rate calculation means 13 is provided with a monitor 15 as display means for displaying the flow rate of the fluid in the flow path 20 and the flow rate characteristics of the flow rate control valve 1. The flow rate calculation means 13 is provided with an indicator 16 for displaying the flow rate of each flow rate control valve 1. The indicator 16 can be centrally managed by being installed in the central control device 10, and can be installed near each flow control valve 1 to adjust the valve opening while checking the flow rate on site. is there.

図1に示すように、中央制御装置10には、弁開度検出手段3から出力される弁開度信号に基づいて流量調節弁1の弁開度を制御する制御手段14を設けることも可能である。制御手段14は、要求される流量に対応する弁開度と弁開度信号を比較し、一致しないときは一致するように駆動部2を駆動して弁開度を制御することができるようにしてある。   As shown in FIG. 1, the central control device 10 may be provided with a control means 14 that controls the valve opening degree of the flow rate control valve 1 based on the valve opening degree signal output from the valve opening degree detection means 3. It is. The control means 14 compares the valve opening degree corresponding to the required flow rate with the valve opening degree signal, and when it does not match, the driving unit 2 is driven so as to be matched so that the valve opening degree can be controlled. It is.

本発明に係る流量調節弁の流量検出システムの一実施例を示す構成図。The block diagram which shows one Example of the flow volume detection system of the flow regulating valve which concerns on this invention. 流量調節弁の流量特性を示す図。The figure which shows the flow volume characteristic of a flow control valve.

符号の説明Explanation of symbols

1 流量調節弁
2 駆動部
3 弁開度検出手段
4 圧力計
10 中央制御装置
11 流量特性作成手段
12 記憶手段
13 流量算出手段
14 制御手段
15 モニタ
16 指示計
20 流路
DESCRIPTION OF SYMBOLS 1 Flow control valve 2 Drive part 3 Valve opening degree detection means 4 Pressure gauge 10 Central controller 11 Flow characteristic preparation means 12 Storage means 13 Flow rate calculation means 14 Control means 15 Monitor 16 Indicator 20 Flow path

Claims (5)

流路内の流体の流量を調節する流量調節弁において、前記流量調節弁の弁開度を検出して弁開度信号を出力する弁開度検出手段と、前記流量調節弁の流量特性を記憶する記憶手段と、前記弁開度信号と流量特性から前記流路内の流体の流量を算出する流量算出手段とからなる流量調節弁の流量検出システム。   In a flow control valve for adjusting the flow rate of the fluid in the flow path, valve opening detection means for detecting the valve opening of the flow control valve and outputting a valve opening signal, and storing the flow characteristics of the flow control valve A flow rate detection valve flow rate detection system comprising: a storage unit configured to perform a flow rate calculation unit configured to calculate a flow rate of the fluid in the flow path from the valve opening signal and flow rate characteristics. 前記流量調節弁の上流側流路及び下流側流路に圧力計を設けてあり、前記圧力計で複数の弁開度における差圧を測定して前記流量調節弁の流量特性を求める流量特性作成手段を備えた請求項1に記載の流量調節弁の流量検出システム。   Pressure characteristics are provided in the upstream flow path and the downstream flow path of the flow control valve, and the flow characteristic creation for determining the flow characteristics of the flow control valve by measuring differential pressure at a plurality of valve openings with the pressure gauge The flow rate detection system for a flow rate control valve according to claim 1, further comprising means. 前記流量特性作成手段が複数の流量調節弁の流量特性を求めるようにした請求項2に記載の流量調節弁の流量検出システム。   The flow rate detection valve flow rate detection system according to claim 2, wherein the flow rate characteristic creation means obtains flow rate characteristics of a plurality of flow rate control valves. 前記流路内の流体の流量又は前記流量調節弁の流量特性を表示する表示手段を備えた請求項1乃至3の何れかに記載の流量調節弁の流量検出システム。   4. A flow rate detection valve flow rate detection system according to claim 1, further comprising display means for displaying a flow rate of the fluid in the flow path or a flow rate characteristic of the flow rate control valve. 前記弁開度信号に基づいて前記流量調節弁の弁開度を制御する制御手段を備えた請求項1乃至4の何れかに記載の流量調節弁の流量検出システム。   The flow rate detection valve flow rate detection system according to any one of claims 1 to 4, further comprising control means for controlling a valve opening degree of the flow rate adjustment valve based on the valve opening degree signal.
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JP5963149B2 (en) * 2011-03-24 2016-08-03 パナソニックIpマネジメント株式会社 Needle valve control system and fuel cell system
CN107131315A (en) * 2017-06-03 2017-09-05 华北水利水电大学 A kind of feed water valve and its method of supplying water
EP3067665B1 (en) 2011-06-02 2018-05-02 Linde Aktiengesellschaft A flow apparatus and monitoring system relating thereto
KR20200030538A (en) * 2017-09-25 2020-03-20 가부시키가이샤 후지킨 Valve device, adjustment information generation method, flow rate adjustment method, fluid control device, flow rate control method, semiconductor manufacturing device and semiconductor manufacturing method
JP2020159559A (en) * 2020-07-02 2020-10-01 株式会社不二工機 Flow rate adjustment valve
WO2021199836A1 (en) * 2020-03-30 2021-10-07 株式会社フジキン Valve system, diaphragm valve output monitoring method and output adjustment method, and semiconductor manufacturing device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04181082A (en) * 1990-11-15 1992-06-29 Tlv Co Ltd Regulating valve provided with flow rate meter function
JPH0694160A (en) * 1992-09-14 1994-04-05 Ishikawajima Harima Heavy Ind Co Ltd Diagnosing device for regulating valve
JP2002090189A (en) * 2000-09-18 2002-03-27 Toshiba Corp Flow characteristic measuring device and flow characteristic measuring method of valve

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04181082A (en) * 1990-11-15 1992-06-29 Tlv Co Ltd Regulating valve provided with flow rate meter function
JPH0694160A (en) * 1992-09-14 1994-04-05 Ishikawajima Harima Heavy Ind Co Ltd Diagnosing device for regulating valve
JP2002090189A (en) * 2000-09-18 2002-03-27 Toshiba Corp Flow characteristic measuring device and flow characteristic measuring method of valve

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5963149B2 (en) * 2011-03-24 2016-08-03 パナソニックIpマネジメント株式会社 Needle valve control system and fuel cell system
EP3067665B1 (en) 2011-06-02 2018-05-02 Linde Aktiengesellschaft A flow apparatus and monitoring system relating thereto
EP2715290B1 (en) 2011-06-02 2018-09-26 Linde Aktiengesellschaft A flow apparatus and monitoring system relating thereto
EP2715290B2 (en) 2011-06-02 2022-04-13 Linde GmbH A flow apparatus
CN107131315A (en) * 2017-06-03 2017-09-05 华北水利水电大学 A kind of feed water valve and its method of supplying water
KR20200030538A (en) * 2017-09-25 2020-03-20 가부시키가이샤 후지킨 Valve device, adjustment information generation method, flow rate adjustment method, fluid control device, flow rate control method, semiconductor manufacturing device and semiconductor manufacturing method
KR102259108B1 (en) 2017-09-25 2021-06-01 가부시키가이샤 후지킨 Valve apparatus, adjustment information generation method, flow rate adjustment method, fluid control apparatus, flow rate control method, semiconductor manufacturing apparatus and semiconductor manufacturing method
WO2021199836A1 (en) * 2020-03-30 2021-10-07 株式会社フジキン Valve system, diaphragm valve output monitoring method and output adjustment method, and semiconductor manufacturing device
US20230136494A1 (en) * 2020-03-30 2023-05-04 Fujikin Incorporated Valve system, output monitoring method and output adjusting method for diaphragm valve, and semiconductor manufacturing apparatus
TWI803838B (en) * 2020-03-30 2023-06-01 日商富士金股份有限公司 Valve system, output monitoring method and output adjustment method of diaphragm valve, semiconductor manufacturing device
JP2020159559A (en) * 2020-07-02 2020-10-01 株式会社不二工機 Flow rate adjustment valve
JP7050346B2 (en) 2020-07-02 2022-04-08 株式会社不二工機 Flow control valve

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