JP2008152930A - Image luminance adjustment method and system in transmission electron microscope - Google Patents

Image luminance adjustment method and system in transmission electron microscope Download PDF

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JP2008152930A
JP2008152930A JP2006336553A JP2006336553A JP2008152930A JP 2008152930 A JP2008152930 A JP 2008152930A JP 2006336553 A JP2006336553 A JP 2006336553A JP 2006336553 A JP2006336553 A JP 2006336553A JP 2008152930 A JP2008152930 A JP 2008152930A
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transmission electron
electron microscope
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optical conditions
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Yasushi Tsujiku
泰 都竹
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Jeol Ltd
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<P>PROBLEM TO BE SOLVED: To provide an image luminance adjustment method in a transmission electron microscope that enables the acquisition of image data at the optimum luminance with the same optical conditions as those of transmission electron microscopes, regarding an image luminance adjustment method and system in a transmission electron microscope. <P>SOLUTION: When observing a sample image, formed by a transmission electron microscope, with a camera 4 and if optical conditions of the transmission electron microscope are changed, luminance, obtained owing to the change of the optical conditions, of the sample image formed by the transmission electron microscope, is adjusted by changing a sensitivity of the camera 4 while using a correction value calculated from the optical conditions. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は透過電子顕微鏡における画像の輝度調整方法及びシステムに関し、更に詳しくは透過電子顕微鏡の倍率等を変化させた際に生じる輝度の変化をカメラの感度を調整することにより補正するようにした透過電子顕微鏡における画像の輝度調整方法及びシステムに関する。   The present invention relates to a method and system for adjusting the brightness of an image in a transmission electron microscope. More specifically, the present invention relates to a transmission in which a change in brightness caused by changing the magnification of the transmission electron microscope is corrected by adjusting the sensitivity of the camera. The present invention relates to an image brightness adjustment method and system in an electron microscope.

透過電子顕微鏡において、一般に電子線の照射は、試料の上に位置する照射レンズ系を制御し、拡大像は試料の下に位置する結像レンズ系で制御され、任意の倍率が設定される。従って、倍率を上げ高倍率にするほど大きな拡大像が得られるが、その一方で蛍光板上での電流密度は減少し、高倍率になるに従い、暗い画像しか得られなくなる。   In a transmission electron microscope, generally, irradiation of an electron beam controls an irradiation lens system positioned above a sample, and an enlarged image is controlled by an imaging lens system positioned below the sample, and an arbitrary magnification is set. Therefore, a larger magnified image can be obtained as the magnification is increased and the magnification is increased. On the other hand, the current density on the fluorescent screen is decreased, and only a dark image can be obtained as the magnification is increased.

また、同様に低倍率になるに従い、蛍光板上での電流密度は増加し、明かるい像が得られるようになる。特に、画像をＣＣＤカメラ等で観察している場合、急激な明るさの増加により受光素子を破壊するような場合がある。このため、オペレータがその倍率での最適な画像の明るさが得られるように、照射電流量を照射系レンズで注意深く調整し、観察を行なっている。   Similarly, as the magnification becomes lower, the current density on the fluorescent screen increases and a bright image can be obtained. In particular, when an image is observed with a CCD camera or the like, the light receiving element may be destroyed due to a sudden increase in brightness. For this reason, the operator carefully adjusts the amount of irradiation current with the irradiation system lens so that the optimum image brightness at that magnification can be obtained.

従来のこの種のシステムとしては、個体撮像カメラの感度を切り替える方法として、マトリクス状に個体撮像素子が配置されたイメージセンサの場合に、複数の感度補正手段を有する場合において、所定の設定感度に対して前記複数の感度補正手段の設定状態を記述したテーブルを設け、設定感度を示す入力を受けると、前記テーブルを参照して前記感度補正手段のそれぞれを、入力された設定感度に対して前記テーブルに記述されている設定状態とする技術が知られている（例えば特許文献１参照）。   As a conventional system of this type, as a method of switching the sensitivity of an individual imaging camera, in the case of an image sensor in which individual imaging elements are arranged in a matrix, when a plurality of sensitivity correction means are provided, a predetermined set sensitivity is obtained. On the other hand, when a table describing setting states of the plurality of sensitivity correction units is provided and an input indicating the setting sensitivity is received, each of the sensitivity correction units is referred to the table with respect to the input setting sensitivity. A technique for setting a state described in a table is known (see, for example, Patent Document 1).

また、ビニング機能を有するＣＣＤカメラにおいて、見かけ上１画素当たりの光量を一定に保つ露出時間を求め、シャッタの制御を行なう技術が知られている（例えば特許文献２参照）。
特開平１１−１２２５４３号公報（段落００２０〜００２８、図１） 特開平１１−１２２５４０号公報（段落００１５〜００２６、図１、図３、図４） In addition, in a CCD camera having a binning function, a technique is known in which an exposure time for maintaining a constant amount of light per pixel is obtained to control a shutter (see, for example, Patent Document 2).
Japanese Patent Laid-Open No. 11-122543 (paragraphs 0020 to 0028, FIG. 1) Japanese Patent Laid-Open No. 11-122540 (paragraphs 0015 to 0026, FIGS. 1, 3, and 4)

従来の電子顕微鏡での一連の画像観察では、決められた倍率でのみ観察するわけではなく、最初に目的とする視野を探すために、低倍率での観察を行ない、目的とする視野を見つけた後は、中倍率で複数の目的物の中から最適なものを選択し、更に高倍率に上げて、目的とする観察を行なう。また、これらの操作を繰り返して観察を行なう。もちろん、倍率は上げるばかりではなく、逆に高倍率から低倍率への観察も行われる。   In a series of image observations with a conventional electron microscope, observation is not performed only at a predetermined magnification, but in order to find the target field of view first, observation was performed at a low magnification to find the target field of view. After that, an optimum object is selected from a plurality of objects at a medium magnification, and further increased to a higher magnification for a desired observation. Moreover, observation is performed by repeating these operations. Of course, not only the magnification is increased, but conversely, observation from a high magnification to a low magnification is also performed.

これらの倍率の変化に合わせ、いちいち試料への照射電子線の量を調整することはオペレータにとって極めて煩わしく、操作性を損なうと共に、ＣＣＤカメラの受光素子の破壊につながることとなる。また、特に試料への照射電子線の量の増加は、例えば試料がＤＮＡ等で代表される生体高分子等の試料である場合には、照射電子線による発熱や他の物理現象により、その構造が破壊されダメージを受け、観察の目的の用をなさなくなることもある。   It is extremely troublesome for the operator to adjust the amount of the electron beam irradiated to the sample in accordance with the change in magnification, and the operability is impaired and the light receiving element of the CCD camera is destroyed. In particular, the increase in the amount of irradiation electron beam to the sample is caused by the structure of the sample due to heat generated by the irradiation electron beam or other physical phenomenon when the sample is a sample such as a biopolymer represented by DNA. May be destroyed and damaged, making it unusable for observation purposes.

また、試料が結晶性試料、高分解能観察試料等の場合では、先の照射電子線の量を変えることは、試料を照射する電子線の照射角をも変えることにつながり、散乱電子線と透過電子線の干渉により情報が失われ、観察そのものが意味をなさない結果につながることがある。   In addition, when the sample is a crystalline sample, a high-resolution observation sample, etc., changing the amount of the irradiation electron beam leads to changing the irradiation angle of the electron beam that irradiates the sample, and the scattered electron beam and the transmission electron beam are transmitted. Information may be lost due to electron beam interference, and observation itself may lead to insignificant results.

従来技術では、光学条件の変更による輝度変化補正を行なうと、試料への電子線の照射量が変化する。電子線によって損傷を受けてしまう試料では、電子線の照射量を極力少なく調整し、これが変化しないように使用するため、光学条件の変更による輝度変化の補正を行なうことができない。また、そもそも、透過電子顕微鏡の機能の実行とは別の光学条件を変更してしまうため、得られる画像データに別の要因が含まれてしまい画像データの解釈に悪影響を及ぼしてしまう。   In the prior art, when the luminance change correction is performed by changing the optical conditions, the amount of electron beam irradiation to the sample changes. In a sample that is damaged by an electron beam, the amount of electron beam irradiation is adjusted to be as small as possible so that it does not change. Therefore, it is not possible to correct luminance changes due to changes in optical conditions. In the first place, since the optical conditions different from the execution of the function of the transmission electron microscope are changed, another factor is included in the obtained image data, which adversely affects the interpretation of the image data.

本発明はこのような課題に鑑みてなされたものであって、透過電子顕微鏡の機能の実行による光学条件の変更によって発生する画像の輝度の変化を、画像データを取得するカメラの感度を変更して補正することにより、それ以外の光学条件は同一のまま、最適な輝度で画像データを取得することができる透過電子顕微鏡における画像の輝度調整方法を提供することを目的としている。   The present invention has been made in view of such problems, and changes in the brightness of an image caused by a change in optical conditions due to the execution of a function of a transmission electron microscope are performed by changing the sensitivity of a camera that acquires image data. It is an object of the present invention to provide a method for adjusting the luminance of an image in a transmission electron microscope that can acquire image data with an optimum luminance while correcting the other optical conditions.

（１）請求項１記載の発明は、透過電子顕微鏡で作成した試料像をカメラで観察する場合において、透過電子顕微鏡の光学条件を変更した場合、当該光学条件の変更に伴って透過電子顕微鏡で作成した試料像の輝度を、前記光学条件から算出される補正値を用いてカメラの感度を変更することで調整する、ことを特徴とする。 (1) According to the first aspect of the present invention, when a sample image created with a transmission electron microscope is observed with a camera, the optical conditions of the transmission electron microscope are changed. The brightness of the created sample image is adjusted by changing the sensitivity of the camera using a correction value calculated from the optical conditions.

ここで、光学条件とは、加速電圧、電子線発生機構の設定、試料に電子線を照射する光学系の条件（スポットサイズ、α、ブライトネス、若しくは各レンズ（ＣＬ１，ＣＬ３、ＣＭ）に流す電流の設定値、絞り径）、拡大像を結像する光学系の条件（倍率、フォーカス、若しくは各レンズ（ＯＬ、ＩＬ、ＰＬ）に流す電流の設定値対物絞り径、制限絞り径）である。   Here, the optical conditions are the acceleration voltage, the setting of the electron beam generation mechanism, the conditions of the optical system that irradiates the sample with the electron beam (spot size, α, brightness, or current passed through each lens (CL1, CL3, CM). Set value, aperture diameter), and conditions of the optical system for forming an enlarged image (magnification, focus, or set value of the current passed through each lens (OL, IL, PL), objective aperture diameter, limit aperture diameter).

αは傾斜角をつけて試料上に照射した時の集束角をいい、ＣＬ１，ＣＬ３は集束レンズ、ＣＭは前記αを変更するレンズ、ＯＬは対物レンズ、ＩＬは拡大系レンズ、ＰＬは最終的な拡大系レンズである。また、カメラの感度とは、露出時間、読み出し回路のゲイン、オフセットである。
（２）請求項２記載の発明は、前記カメラとしてＣＣＤカメラを用いたことを特徴とする。
（３）請求項３記載の発明は、透過電子顕微鏡で作成した試料像をカメラで観察する場合において、透過電子顕微鏡の光学条件を変更した場合、当該光学条件の変更に伴って透過電子顕微鏡で作成した試料像の輝度を、前記光学条件から算出される補正値を用いてカメラの感度を変更することで調整する調整手段を設けたことを特徴とする。 α is the focusing angle when the sample is irradiated with a tilt angle, CL1 and CL3 are focusing lenses, CM is a lens that changes α, OL is an objective lens, IL is an enlargement lens, and PL is final. Magnifying lens. The camera sensitivity is exposure time, readout circuit gain, and offset.
(2) The invention described in claim 2 is characterized in that a CCD camera is used as the camera.
(3) According to the invention of claim 3, when the optical condition of the transmission electron microscope is changed when the sample image created by the transmission electron microscope is observed with a camera, the transmission electron microscope is changed along with the change of the optical condition. An adjustment means is provided for adjusting the brightness of the created sample image by changing the sensitivity of the camera using a correction value calculated from the optical conditions.

（１）請求項１記載の発明によれば、透過電子顕微鏡の機能の実行による光学条件の変更によって発生する画像の輝度の変化を、画像データを取得するカメラの感度を変更して補正することにより、それ以外の光学条件は同一のまま、最適な輝度で画像データを取得することができる透過電子顕微鏡における画像の輝度調整方法を提供するができる。
（２）請求項２記載の発明によれば、カメラとしてＣＣＤカメラを用いることにより、解像度が高く、比較的安価なカメラを提供することができる。
（３）請求項１記載の発明によれば、透過電子顕微鏡の機能の実行による光学条件の変更によって発生する画像の輝度の変化を、画像データを取得するカメラの感度を変更して補正することにより、それ以外の光学条件は同一のまま、最適な輝度で画像データを取得することができる透過電子顕微鏡における画像の輝度調整システムを提供するができる。 (1) According to the first aspect of the present invention, the change in the brightness of the image caused by the change in the optical condition due to the execution of the function of the transmission electron microscope is corrected by changing the sensitivity of the camera that acquires the image data. Thus, it is possible to provide a method for adjusting the luminance of an image in a transmission electron microscope that can acquire image data with an optimum luminance while the other optical conditions are the same.
(2) According to the invention described in claim 2, by using a CCD camera as the camera, it is possible to provide a camera with high resolution and relatively low cost.
(3) According to the first aspect of the present invention, the change in the brightness of the image caused by the change in the optical condition due to the execution of the function of the transmission electron microscope is corrected by changing the sensitivity of the camera that acquires the image data. Thus, it is possible to provide an image brightness adjustment system in a transmission electron microscope that can acquire image data with an optimum brightness while the other optical conditions are the same.

以下、図面を参照して本発明の実施の形態を詳細に説明する。
本発明では、各種の機能のモード切り替えや倍率切り替えに伴う画像の明るさを試料上での電子線密度を変えることなく、ＣＣＤカメラの感度を制御することにより、最適な明るさの画像を得るものである。蛍光板若しくはＣＣＤカメラ上での画像の電流密度は、
（ａ）試料照射電流
（ｂ）電子線の試料透過率
（ｃ）透過電子線を拡大する結像レンズ
に依存する。 Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
In the present invention, an image with optimum brightness can be obtained by controlling the sensitivity of the CCD camera without changing the electron beam density on the sample with respect to the brightness of the image accompanying the mode switching or magnification switching of various functions. Is. The current density of the image on the fluorescent screen or CCD camera is
(A) Sample irradiation current (b) Sample transmittance of electron beam (c) Depends on the imaging lens for enlarging the transmitted electron beam.

ここで、（ａ）の試料照射電流密度は、
１）加速電圧
２）エミッション電流
３）スポットサイズ（照射系の各種レンズの励磁電流）
４）可動絞りの穴径
５）集束レンズ（ＣＬ）のフォーカス電流
の関数で一義的に決定することができる。例えば、加速電圧１００ＫＶ、エミッション電流１０μＡ、スポットサイズ４番、可動絞り穴径１００μｍφ、ＣＬフォーカス値３．４Ｖとすれば、試料上での電流密度は例えば、１０-10Ａ／ｃｍ2と与えられる。 Here, the sample irradiation current density of (a) is:
1) Acceleration voltage 2) Emission current 3) Spot size (Excitation current of various lenses in the irradiation system)
4) Hole diameter of the movable diaphragm 5) It can be uniquely determined by a function of the focus current of the focusing lens (CL). For example, if the acceleration voltage is 100 KV, the emission current is 10 μA, the spot size is No. 4, the movable aperture diameter is 100 μmφ, and the CL focus value is 3.4 V, the current density on the sample is given as 10 −10 A / cm 2 , for example. .

次に、（ｂ）の電子線の試料透過率は、試料の材質、厚さ等によるため決定は難しいが、透過電子顕微鏡である以上、透過電子線を１００％使用するこが前提である。次に、（ｃ）の結像レンズによる依存性は、倍率が１であれば、試料の照射電流密度がそのまま、蛍光板上での電流密度となる。従って、倍率が２倍となれば、画像の面積は４倍となり、蛍光板上での電流密度は試料上の電流密度の１／４となる。即ち、倍率の２乗に反比例した値となる。   Next, although the sample transmittance of the electron beam (b) is difficult to determine because of the material, thickness, etc. of the sample, it is premised that 100% of the transmitted electron beam is used as long as it is a transmission electron microscope. Next, the dependency of the imaging lens in (c) on the fluorescent screen is the same as the irradiation current density of the sample as long as the magnification is 1. Accordingly, if the magnification is doubled, the area of the image is four times, and the current density on the fluorescent screen is ¼ of the current density on the sample. That is, the value is inversely proportional to the square of the magnification.

もちろん、結像系での制限視野絞りを挿入した場合、電子線解析の場合等での場合は、それに応じた変化となる。その場合のパラメータとして、
（ａ）画像の場合
倍率
制限絞り穴径
（ｂ）回折の場合
カメラ長
等がある。 Of course, when a limited field stop in the imaging system is inserted, in the case of electron beam analysis or the like, the change is made accordingly. As a parameter in that case,
(A) In case of image Magnification Limiting aperture diameter (b) In case of diffraction There are camera length and the like.

図１は本発明の一実施の形態を示す構成図である。図において、１は透過電子顕微鏡、３はコンピュータ、２は透過電子顕微鏡１とコンピュータ３との通信用ケーブル、４は透過電子像を撮すカメラである。前記コンピュータ３としては、例えばパソコンが用いられ、カメラ４としては、例えばＣＣＤカメラが用いられる。５はコンピュータ３からカメラに対して制御信号を送るための信号ケーブル、６はカメラ４からの映像信号をコンピュータ３に送る信号ケーブルである。７はコンピュータ３に各種の設定を行なう操作部、８はコンピュータ３内に設けられた各種情報を記憶する記憶装置である。操作部７としては、例えばキーボードとマウスが用いられ、記憶装置８としては、例えばフラッシュメモリが用いられる。このように構成されたシステムの動作を説明すれば、以下の通りである。   FIG. 1 is a block diagram showing an embodiment of the present invention. In the figure, 1 is a transmission electron microscope, 3 is a computer, 2 is a communication cable between the transmission electron microscope 1 and the computer 3, and 4 is a camera for taking a transmission electron image. As the computer 3, for example, a personal computer is used, and as the camera 4, for example, a CCD camera is used. 5 is a signal cable for sending a control signal from the computer 3 to the camera, and 6 is a signal cable for sending the video signal from the camera 4 to the computer 3. Reference numeral 7 denotes an operation unit for making various settings on the computer 3, and 8 denotes a storage device for storing various information provided in the computer 3. For example, a keyboard and a mouse are used as the operation unit 7, and a flash memory is used as the storage device 8, for example. The operation of the system configured as described above will be described as follows.

図２は本発明システムの動作の一例を示すフローチャートである。以下、このフローチャートに沿って、本発明の動作を説明する。動作の主体は、コンピュータ３である。
処理１（Ｓ１）装置の初期化
装置を起動すると、先ず装置（システム）の初期化を行なう。ここでは、保存された光学条件変更に連動したカメラ感度自動補正機能の設定条件をコンピュータ３の記憶装置８から読み込む。若し、保存された設定条件がない場合は、デフォルトの設定条件を利用する。
処理２（Ｓ２）装置の設定
必要があれば、光学条件変更に連動したカメラ感度自動補正機能の設定条件を操作部７からの入力により変更し、コンピュータ３の記憶装置８に保存する。前述したように、ここで保存された設定条件は次回の起動時に読み込まれる。
処理３（Ｓ３）光学条件変更前の画像データの輝度と、カメラ感度制御の設定値の記録
現在の光学条件での画像データの輝度と、カメラ感度制御の設定値をコンピュータ３の記憶装置８に記録しておく。
処理４（Ｓ４）光学条件の変更
ユーザからの操作部７の操作による透過電子顕微鏡の機能を実行することにより、光学条件が変更される。
処理５（Ｓ５）画像データの輝度変化量の計算
光学条件を変更したことに伴う、画像データの輝度変化量を計算する。ここで、画像データの輝度変化量とは、処理３で記録した画像データの輝度と、処理４で変更した光学条件での画像データの輝度との差分を表す。 FIG. 2 is a flowchart showing an example of the operation of the system of the present invention. The operation of the present invention will be described below along this flowchart. The subject of operation is the computer 3.
Process 1 (S1) Initialization of device When the device is activated, the device (system) is first initialized. Here, the stored setting condition of the camera sensitivity automatic correction function linked to the changed optical condition is read from the storage device 8 of the computer 3. If there is no saved setting condition, the default setting condition is used.
Process 2 (S2) Device Setting If necessary, the setting condition of the camera sensitivity automatic correction function linked to the optical condition change is changed by input from the operation unit 7 and stored in the storage device 8 of the computer 3. As described above, the setting conditions saved here are read at the next startup.
Process 3 (S3) Recording of the brightness of the image data before the change of the optical conditions and the set value of the camera sensitivity control The brightness of the image data under the current optical conditions and the set value of the camera sensitivity control are stored in the storage device 8 of the computer 3. Record it.
Process 4 (S4) Change of Optical Condition The optical condition is changed by executing the function of the transmission electron microscope by the operation of the operation unit 7 from the user.
Process 5 (S5) Calculation of luminance change amount of image data The luminance change amount of the image data accompanying the change of the optical condition is calculated. Here, the brightness change amount of the image data represents a difference between the brightness of the image data recorded in the process 3 and the brightness of the image data under the optical condition changed in the process 4.

ここで、処理４で変更した光学条件で得られるべき画像データの輝度の算出方法には、以下に示す３つの方法がある。
１）光学設計より算出する方法
光学設計から、光学条件と画像データとの輝度との関係式を導出する。処理３で記録した光学条件変更前の画像データの輝度とこの関係式から算出する。
２）キャリブレーション法
予め、全ての光学条件とそれぞれの画像データの輝度を測定し、コンピュータ３の記憶装置８に記録しておく。記録しておいた処理３での光学条件での画像データの輝度と処理３で記録した画像データの輝度との差分を、記録しておいた処理４の光学条件での画像データの輝度から引いて算出する。
３）１）と２）の組み合わせ
予め測定して記録しておく画像データの輝度を、個数限定の特定の光学条件でコンピュータ３の記憶装置８に記録しておく。処理４で変更される光学条件が、画像データの輝度の記録がある光学条件の場合、２）の算出方法を用いて、画像データの輝度の記録がない光学条件の場合、１）の方法で算出する。
処理６（Ｓ６）カメラに設定する値の算出
処理５で算出した画像データの輝度変化量を実現できるように、カメラ感度制御（例：露光時間、読み出し回路のゲイン、オフセット）の設定値を算出する。この設定値が光学条件から算出される補正値である。この設定値は、処理３におけるカメラ感度制御の設定値と、カメラ感度制御の特性、処理５で算出した画像データの輝度変化量により算出される。
処理７（Ｓ７）カメラへの設定値の送信
処理６で算出したカメラ感度制御の設定値をカメラ４に信号ケーブル５から送信する。
処理８（Ｓ８）装置の停止
処理７でカメラ制御の設定値をカメラ４に送信した後、システム停止命令があるかどうかチェックする。ない場合には、処理３に戻り現在の光学条件での画像データの輝度と、カメラの設定値を記録する。ある場合には、装置（システム）の動作を停止する。 Here, there are the following three methods for calculating the luminance of the image data to be obtained under the optical conditions changed in the process 4.
1) Method of calculation from optical design A relational expression between optical conditions and luminance of image data is derived from the optical design. It is calculated from the luminance of the image data recorded in the process 3 before the optical condition change and this relational expression.
2) Calibration Method In advance, all optical conditions and the brightness of each image data are measured and recorded in the storage device 8 of the computer 3. The difference between the brightness of the image data under the recorded optical condition in the process 3 and the brightness of the image data recorded in the process 3 is subtracted from the brightness of the image data under the recorded optical condition of the process 4. To calculate.
3) Combination of 1) and 2) The brightness of image data to be measured and recorded in advance is recorded in the storage device 8 of the computer 3 under specific optical conditions limited in number. When the optical condition changed in the process 4 is an optical condition in which the luminance of the image data is recorded, and in the optical condition in which the luminance of the image data is not recorded using the calculation method of 2), the method of 1) is used. calculate.
Process 6 (S6) Calculation of the value to be set in the camera Calculates the set value of the camera sensitivity control (eg, exposure time, readout circuit gain, offset) so that the luminance change amount of the image data calculated in Process 5 can be realized. To do. This set value is a correction value calculated from the optical conditions. This set value is calculated from the set value of camera sensitivity control in process 3, the characteristic of camera sensitivity control, and the luminance change amount of the image data calculated in process 5.
Process 7 (S7) Transmission of Set Value to Camera The camera sensitivity control set value calculated in process 6 is transmitted from the signal cable 5 to the camera 4.
Process 8 (S8) Device Stop After transmitting the camera control setting value to the camera 4 in Process 7, it is checked whether there is a system stop command. If not, the process returns to process 3 to record the brightness of the image data under the current optical conditions and the set value of the camera. In some cases, the operation of the device (system) is stopped.

以上のような一連の処理により、透過電子顕微鏡の機能の実行による光学条件の変更によって発生する画像の輝度の変化を、画像データを取得するカメラの感度を変更して補正することにより、それ以外の光学条件は同一のまま、最適な輝度で画像データを取得することができる透過電子顕微鏡における画像の輝度調整方法を提供するができる。   Through the series of processes as described above, changes in image brightness caused by changes in optical conditions due to execution of the transmission electron microscope function are corrected by changing the sensitivity of the camera that acquires the image data. It is possible to provide a method for adjusting the luminance of an image in a transmission electron microscope that can acquire image data with the optimum luminance while maintaining the same optical conditions.

上述の実施の形態では、カメラとしてＣＣＤカメラを用いた場合を例にとったが、本発明はこれに限るものではなく、その他の種類の輝度調整を行なうことができるカメラにも等しく適用することができる。   In the above-described embodiment, the case where a CCD camera is used as an example is taken as an example. However, the present invention is not limited to this, and the present invention is equally applicable to cameras capable of performing other types of brightness adjustment. Can do.

以上、詳細に説明したように、本発明によれば、透過電子顕微鏡の機能の実行による光学条件の変更によって発生する画像の輝度の変化を、画像データを取得するカメラの感度を変更して補正することにより、それ以外の光学条件は同一のまま、最適な輝度で画像データを取得することができる透過電子顕微鏡における画像の輝度調整方法を提供することができる。   As described above in detail, according to the present invention, the change in the brightness of the image caused by the change in the optical condition due to the execution of the function of the transmission electron microscope is corrected by changing the sensitivity of the camera that acquires the image data. By doing so, it is possible to provide a method for adjusting the luminance of an image in a transmission electron microscope that can acquire image data with optimum luminance while the other optical conditions are the same.

本発明の一実施の形態を示す構成図である。It is a block diagram which shows one embodiment of this invention. 本発明システムの動作の一例を示すフローチャートである。It is a flowchart which shows an example of operation | movement of this invention system.

符号の説明Explanation of symbols

１ 透過電子顕微鏡
２ 通信用ケーブル
３ コンピュータ
４ カメラ
５ 信号ケーブル
６ 信号ケーブル
７ 操作部 DESCRIPTION OF SYMBOLS 1 Transmission electron microscope 2 Communication cable 3 Computer 4 Camera 5 Signal cable 6 Signal cable 7 Operation part

Claims (3)

透過電子顕微鏡で得られた試料像をカメラで観察する場合において、
透過電子顕微鏡の光学条件を変更した場合、当該光学条件の変更に伴って透過電子顕微鏡で得られた試料像の輝度を、前記光学条件から算出される補正値を用いてカメラの感度を変更することで調整する、
ことを特徴とする透過電子顕微鏡における画像の輝度調整方法。 When observing a sample image obtained with a transmission electron microscope with a camera,
When the optical conditions of the transmission electron microscope are changed, the brightness of the sample image obtained by the transmission electron microscope is changed with the change of the optical conditions, and the sensitivity of the camera is changed using a correction value calculated from the optical conditions. Adjust by
A method for adjusting the luminance of an image in a transmission electron microscope. 前記カメラとしてＣＣＤカメラを用いたことを特徴とする請求項１記載の透過電子顕微鏡における画像の輝度調整方法。   The method of adjusting the luminance of an image in a transmission electron microscope according to claim 1, wherein a CCD camera is used as the camera. 透過電子顕微鏡で得られた試料像をカメラで観察する場合において、
透過電子顕微鏡の光学条件を変更した場合、当該光学条件の変更に伴って透過電子顕微鏡で得られた試料像の輝度を、前記光学条件から算出される補正値を用いてカメラの感度を変更することで調整する調整手段を設けたことを特徴とする透過電子顕微鏡における画像の輝度調整システム。 When observing a sample image obtained with a transmission electron microscope with a camera,
When the optical conditions of the transmission electron microscope are changed, the brightness of the sample image obtained by the transmission electron microscope is changed with the change of the optical conditions, and the sensitivity of the camera is changed using a correction value calculated from the optical conditions. An image brightness adjustment system in a transmission electron microscope, characterized in that an adjustment means for adjusting the image is provided.
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