JP2008152924A - Electrode for surface plasma generation - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To realize an electrode for surface plasma generation capable of spraying plasma erected from a surface with a stable and strong force and arbitrarily changing the spraying direction. <P>SOLUTION: An electrode pair is constituted by arranging a rear face side electrode 5 on the rear side of the front surface side electrode 4 while pinching an insulator 2, the surface plasma is generated from the end edge of the surface electrode by applying an alternate current voltage to both electrodes, and the plasma erected from the surface is sprayed by making opposing surface plasmas collided. At that time, the surface plasma generated in the mutually opposing first electrode pair 6 and second electrode pair 8 and the surface plasma generated in the mutually opposing second electrode pair 7 and fourth electrode pair 9 cross and interfere with each other, and as a whole, the surface plasma is generated so as to revolve around the center point O. The plasma erected from the surface generated since these are collided is sprayed while revolving. By adjusting an applied voltage to the respective electrodes, the spraying direction can be changed. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an electrode for generating a surface plasma that is capable of changing the direction in which the plasma is ejected more powerfully when ejecting plasma rising from the surface using surface plasma generated parallel to the surface.

  Various actuators have been developed so far, but in recent years, actuators using surface plasma have attracted attention. For example, as shown in FIG. 8A, the surface plasma actuator is provided with a front-side electrode 72 and a back-side electrode 73 with an insulator 71 made of resin, ceramic or the like sandwiched between them, and an AC electric field is generated by an AC power source 74 on both electrodes. Then, the fact that a plasma jet 76 as surface plasma is generated from the edge 75 of the surface-side electrode 72 along the surface of the insulator 71 is utilized. In particular, since this surface plasma induces ambient gas to generate an induced airflow 77, studies have been made to effectively use this action.

  For example, the surface plasma generator 79 as described above is provided on the surface of the blade 78 as shown in FIG. 8D at a portion where the air flow is easily separated from the blade surface. The surface side electrode 72 is formed in one row on the surface of the wing. When such a surface plasma generator 79 is used, surface plasma is generated at the edge 75 of the surface-side electrode 72 according to the principle described above. As a result, the airflow flowing on the surface of the blade 78 is influenced by the principle of generation of the induced airflow, and it is possible to prevent peeling that tends to occur in this portion. In particular, such surface plasma only needs to form a thin film as a surface electrode on the blade surface, so there is little influence of air resistance etc. on the airflow flowing on the blade surface, and there is no mechanical working part. It is possible to operate stably without doing.

  In particular, as shown in FIG. 8A, the AC power supply 74 can be controlled by the control device 80, the gas velocity and temperature are detected by the sensor 81, and the control device 80 controls the AC power supply 74 by the signal. Thus, it is possible to prevent the generation of vortex flow corresponding to the conditions at that time. As a control signal at this time, for example, as shown in FIG. 9B, an AC pulse having a predetermined narrow width is output in 1/15 seconds in the illustrated example, and further in the illustrated example, 13/30 seconds thereafter. The same AC pulse is output after having stopped. When trying to generate a stronger plasma jet from such a controlled state, it can be dealt with by performing duty ratio control for increasing the pulse supply time as shown in FIG. 9C, for example.

  The surface plasma is currently studied to be used mainly as an actuator that operates as described above, but the characteristics of the surface plasma have become clearer in the course of the research. It has become clear that a peculiar plasma jet can be generated and that it can be used as an actuator in a wider field.

  That is, various plasma jets can be generated depending on the shape and arrangement of the surface-side electrode that generates the surface plasma. For example, as shown in FIGS. When the first surface side electrode 92 and the second surface side electrode 93 are arranged to face each other and a high electric field is generated between the back surface side electrode 94 provided on the back surface, the arrangement relationship between the front surface side electrode and the back surface side electrode Then, surface plasma similar to the above is generated in parallel to the surface from the edge of each surface side electrode facing each other. These plasma jets collide at the intermediate part of each electrode, and as shown in FIG. 9B, a plasma jet 95 rising from the surface of the insulator 91 is formed. At that time, an induced air flow 96 is generated in which the surrounding gas is guided substantially perpendicularly to the surface as shown in the figure.

  In addition, for example, the surface-side electrode 98 is formed in a ring shape having a central opening 97 as shown in FIG. 10A or a rectangle having a central opening 97 as shown in FIG. When a high electric field is generated between the back surface side electrode 100 provided on the back surface of the surface side electrode 98 and the back surface side electrode 102, the center side from the edge on the center opening 97 side of the front surface side electrode 98 is directed toward the center. Thus, surface plasma 99 is generated parallel to the surface. The surface plasmas 99 collide with each other at the center, and a plasma jet 100 rising from the surface is formed. In addition, the induced airflow 101 is generated at a right angle to the surface by being induced by the plasma jet 100.

  As described above, various plasma jets can be generated depending on the shape and arrangement of the electrodes, and this can be used as various actuators in addition to performing the anti-separation action by controlling the vortex generation of the blade as described above. Can be considered.

The plasma actuator is described in detail in the following document.
Roth, JR, Sherman, DM, and Wilkinson, SP (1998) .Boundary layer flow control with a one atmosphere uniform glow discharge.AIAA Paper 98-0328, 36th Aerospace Sciences Meeting and Exhibit, Reno, Nevada. Corke, TC, Jumper, EJ, Post, ML, Orlov, D., and McLaughlin, TE (2002) .Application of weakly-ionized plasmas as wing flow-control devices.AIAA paper 2002-0350, 40th Aerospace Sciences Meeting & Exhibit , Reno, Nevada. Santhanakrishnan, A. and Jacob, JD (2006) .On plasma synthetic jet actuators.AIAA paper 2006-0317, 44th Aerospace Sciences Meeting, Reno, Nevada.

  In the plasma actuator using the surface plasma as described above, the plasma as shown in FIGS. 9 and 10 can be generated. However, in order to use this plasma in various fields, there are more various types. Generation of plasma is desired. In particular, as shown in FIG. 10, plasma that rises from the surface and is ejected as a whole can generate a large force, but if this plasma is generated more intensively, a larger force can be generated. In addition, the plasma shown in FIG. 10 can generate only a plasma in a direction substantially perpendicular to the surface. However, when used in a wider range of applications, it is desirable that the plasma ejection direction can be freely controlled.

  Therefore, according to the present invention, when plasma is generated in a direction rising from the surface using plasma generated in parallel with the surface, more powerful plasma can be ejected, and the direction of plasma ejection can be easily set to an arbitrary direction. The main object is to provide an electrode for generating surface plasma that can be changed.

  In order to solve the above problems, the surface plasma generation electrode according to the present invention uses an electrode pair in which a back side electrode is disposed on the back side of the front side electrode with an insulator interposed therebetween, and an AC voltage is applied to both electrodes. An electrode for generating surface plasma in a direction intersecting the facing surface plasma in the surface plasma generating electrode for generating surface plasma from the edge of the surface electrode and ejecting plasma rising from the surface by the facing surface plasma It is characterized in that a pair is arranged to turn the plasma rising from the surface.

  Another surface plasma generation electrode according to the present invention is characterized in that, in the surface plasma generation electrode, another opposing electrode pair is disposed so as to be orthogonal to the opposing electrode pair. To do.

  Another surface plasma generation electrode according to the present invention is the surface plasma generation electrode, wherein the surface plasma generation portion comprises a plurality of edges divided along the inner periphery of a ring-shaped electrode pair having an opening at the center. The plurality of edges are formed so as to be inclined with respect to the circumference of the ring by disposing the plurality of edges from the center direction of the ring.

  In another surface plasma generation electrode according to the present invention, in the surface plasma generation electrode, surface plasma is generated from an opening side edge of a ring-shaped electrode pair in which an opening is formed in the center to the center side of the ring, and the ring A plurality of electrode pairs for generating surface plasma are arranged in a direction intersecting with the surface plasma toward the center side in the opening, and the directions of the surface plasma generated from the plurality of electrode pairs are arranged in opposite directions. In addition, the turning direction of the plasma rising from the surface is changed by selecting one of the plurality of electrode pairs and energizing.

  Another surface plasma generation electrode according to the present invention uses an electrode pair in which a back surface side electrode is disposed on the back side of a surface side electrode with an insulator interposed therebetween, and an AC voltage is applied to both electrodes to thereby form the surface electrode. In the surface plasma generating electrode that generates surface plasma from the edge and injects plasma rising from the surface by the facing surface plasma, the generation intensity of the facing surface plasma is varied, and the direction of the rising plasma from the surface is inclined. It is characterized by.

Another surface plasma generation electrode according to the present invention is the surface plasma generation electrode,
A back-side electrode having an outer peripheral radius smaller than the inner peripheral edge of the ring-shaped surface-side electrode having an opening at the center is disposed in the opening, and the outer peripheral edge of the back-side electrode is made a part of the inner peripheral edge of the front-side electrode. By selectively bringing them close, the generation intensity of the surface plasma generated from the inner periphery of the surface-side electrode is varied.

Another surface plasma generation electrode according to the present invention is the surface plasma generation electrode,
A ring-shaped electrode pair that forms an opening in the center is divided into a plurality of independent arc-shaped electrode pairs, which are arranged in a ring shape, and the amount of current applied to each arc-shaped electrode pair is adjusted. The generation intensity of the surface plasma generated from each arc-shaped electrode is made different.

Another surface plasma generation electrode according to the present invention is the surface plasma generation electrode,
The generation intensity of the facing surface plasma is varied, and the direction of the plasma rising from the surface is changed while turning.

  Since the present invention is configured as described above, the surface plasma generated from the electrode pair formed by disposing the front surface side electrode and the back surface side electrode across the insulator is collided to generate plasma in a direction rising from the surface. The plasma can be swirled to stably eject a plasma with a large force, the swirl direction can be changed, and the plasma injection direction can be arbitrarily changed. As a result, it can be widely used in the general field of fluid engineering, such as mixing and agitation promotion of gaseous fuel, and a fluid transportation system that does not use a fan.

  In the present invention, the problem that the plasma rising from the surface can be injected with a stable strong force and the injection direction is arbitrarily changed is an electrode pair formed by arranging a back side electrode on the back side of the front side electrode with an insulator interposed therebetween. In the surface plasma generating electrode for generating surface plasma from the edge of the surface electrode by applying an AC voltage to both electrodes and injecting plasma rising from the surface by the facing surface plasma, An electrode pair that generates surface plasma in a direction intersecting with each other is swung to give rise to the plasma rising from the surface, and an electrode pair in which a back side electrode is placed on the back side of the front side electrode with an insulator interposed therebetween. The surface plasma is generated from the edge of the surface electrode by applying an AC voltage to both electrodes, and is raised from the surface by the opposing surface plasma. In surface plasma generating electrode for injecting that plasma, with different source strengths of the opposing surface plasma was achieved by changing the direction of the plasma which rises from the surface.

  A first embodiment of the present invention is shown in FIG. In the surface plasma actuator 1 shown in the figure, as shown in FIG. 2B, the surface side electrode 4 forming the linear electrode edge 3 having the same aspect as that shown in FIG. A first electrode pair 6 is formed which is formed on the back surface side of the body 2 and includes the back surface side electrode 5 having the same mode as in FIG. 9. The center position of the first electrode pair 6 is shifted from the center point O of the surface plasma actuator 1 as illustrated.

  The four electrode pairs of the second electrode pair 7, the third electrode pair 8, and the fourth electrode pair 9 having the same structure as that of the first electrode pair 5 are shown at positions rotated by 90 degrees about the center point O. Arranged as shown in 1 (a). Further, all the front surface side electrodes 4 are connected by the wiring 10, and all the back surface side electrodes 5 are connected by the wiring 11, and between the wiring 9 of the front surface side electrode and the wiring 10 of the back surface side electrode, FIG. Similarly, an AC pulse is supplied from an AC power source (not shown). Thereby, surface plasma 12 is generated at right angles from the straight electrode edge 3 in each electrode pair. Those surface plasmas are bent by a perpendicular surface plasma 12 from adjacent electrode pairs.

  This action occurs in common for all electrode pairs. While being bent in this way, the surface plasma generated by the opposing electrode pair collides, and the plasma rising from the surface 13 of the insulator 2 is ejected according to the same principle as in FIG. At that time, as described above, each surface plasma is spouted at right angles while rotating around the center point O. As a result, the plasma spouted in the direction rising from the surface 13 as shown in FIG. It will be ejected while rotating. As a result, this plasma is stable as a whole and can generate a large force. In the above embodiment, an example in which four electrode pairs are used has been described, but any number of electrode pairs can be used.

  For example, the method shown in FIG. 2 can be used as the method of ejecting the plasma generated in the direction perpendicular to the surface while swirling as in the above embodiment. In the example shown in FIG. 2, the ring-shaped surface side electrode 14 having an annular shape is used as in FIG. 9, and one end portion 16 projects toward the center point O side of the ring at the center opening 15 side, and the other end portion 17. Are arranged on the outermost side, forming a circular arc surface and being shifted from the center direction, thereby forming a curved inclined electrode inclined with respect to the circumference of the ring. The back surface side electrode 18 on the back surface of the insulator is formed so as to correspond to the curved electrode edge 19. In the illustrated embodiment, five curved inclined electrode pairs 20 formed in this way are arranged at equal intervals.

  By using the curved inclined electrode pair 20 as described above, surface plasma in a direction shifted from the center point O as a whole is generated from each electrode. Therefore, when these surface plasmas collide with each other and eject plasma in a direction rising from the surface, they are ejected in a spiral shape as in FIG.

  Also in this embodiment, any number of the curved inclined electrode pairs 20 as described above can be used. In the above embodiment, the electrode edge is formed to be curved, but it may be formed linearly. Further, in addition to connecting these electrode pairs in a ring shape, the electrodes can be operated by being divided in the same manner as in the first embodiment and connected to each other by wiring.

  In the embodiment shown in FIG. 3, the ring-shaped electrode pair 24 composed of the ring-shaped front surface side electrode 22 and the rear surface side electrode 23 similar to FIG. 10 and a radial shape from the center point O within the central opening 25 are shown in FIG. Four linear electrode pairs (28 to 31) composed of the same front-side electrode 26 and back-side electrode 27 are arranged 90 degrees each. Among the four linear electrode pairs 26, for the electrode pair group facing the center point O as the center, the electrode edge 32 for plasma generation of the surface-side electrode is arranged symmetrically with respect to the center point O. To do.

  Similarly, the electrode edge 33 is arranged symmetrically with respect to the electrode pair group arranged at a position orthogonal to each other, but in the electrode group arranged at a position perpendicular to each other, the electrode edges face each other. Arrange as follows. Further, with respect to the electrode pair groups arranged at right angles to each other, any one of the electrode pair groups can be selected to be energized.

 In the plasma actuator configured as described above, for example, as shown in FIG. 3A, the second electrode pair 29 and the fourth electrode pair 31 are energized and the ring-shaped electrode pair 24 is also energized. As a result, a surface plasma 34 that is uniform in the center direction is generated from the ring-shaped electrode pair 24, and a tangential direction of a circle centering on the center point O from each electrode edge 33 in the second electrode pair 29 and the fourth electrode pair 31. A surface plasma 35 is generated. The surface plasma 34 in the direction of the center point O generated in the ring-shaped electrode pair 24 is bent counterclockwise in the figure by the surface plasma 35 in the tangential direction. As a result, the surface plasma generated in the ring-shaped electrode pair 24 is ejected in the direction perpendicular to the surface in the same manner as in FIG. 9, and as a result of being bent as described above, the ejected plasma is as shown in FIG. ) Is ejected spirally in the opposite direction.

  On the other hand, as shown in FIG. 3B, by energizing the electrode pair group including the first electrode pair 28 and the third electrode pair 30, and energizing the ring electrode pair 24, the ring electrode pair The surface plasma 35 ejected from 24 in the direction of the center point O is bent in the direction opposite to that shown in FIG. As a result, the plasma ejected in the direction rising from the surface is swirled in the opposite direction to the above. Thus, in the present embodiment, when the plasma ejected from the surface in a direction perpendicular to the surface is swirled, the swirling direction can be switched to an arbitrary direction. Therefore, when the actuator is operated by this swirl flow, a force for rotating in an arbitrary direction can be applied.

  In the embodiment shown in FIG. 4, the ring-shaped back surface side electrode 42 located on the center opening 41 side of the ring-shaped surface side electrode 40 is formed slightly smaller than the ring-shaped surface side electrode 40, and FIG. In the example, the ring-shaped back surface side electrode 42 is moved to the right side in the drawing, and thus the outer periphery of the ring-shaped back surface side electrode 42 at the portion on the right side in the drawing of the ring-shaped electrode edge 43 serving as the inner edge of the ring-shaped surface side electrode 40 Will be located directly below. On the other hand, the electrode edge 43 is separated from the outer periphery of the ring-shaped back surface side electrode 42 in the left part of the figure facing this part.

  With the electrode arrangement as described above, the surface plasma generated from the electrode edge 43 of the ring-shaped surface side electrode 40 toward the center point O is strong on the right side and weak on the left side as indicated by the arrows in the figure. As a result, in the example shown in FIG. 10, plasma is ejected in a direction substantially perpendicular to the surface, whereas in this embodiment, it is ejected in the direction of the arrow shown in the center of FIG. Become. This state is shown in FIG.

  On the other hand, as shown in FIG. 4 (c), the ring-shaped back surface side electrode 42 is moved to the left side in the drawing, and thereby the portion on the left side in the drawing among the ring-shaped electrode edge 43 that becomes the inner edge of the ring-shaped surface side electrode 40. Thus, the outer periphery of the ring-shaped back side electrode 42 is arranged so as to be located immediately below. On the other hand, the outer periphery of the electrode edge 43 is separated from the inner periphery of the ring-shaped back surface side electrode 42 in the right portion in the figure facing this portion.

  With the electrode arrangement as described above, the surface plasma generated from the electrode edge 43 of the ring-shaped surface side electrode 40 toward the center point O is strong on the left side in the drawing and weak on the right side as indicated by arrows in the drawing. As a result, plasma inclined in the direction opposite to that shown in FIG. 4A is ejected. This state is shown in FIG.

  Similarly, as shown in FIG. 4E, when the ring-shaped back surface side electrode 42 is arranged in the upward direction in the figure, plasma ejected with an inclination downward from the top in the figure can be obtained. Similarly, as shown in FIG. 4 (f), when the ring-shaped back surface side electrode 42 is arranged in the downward direction in the drawing, plasma ejected with an inclination from the bottom to the top in the drawing can be obtained. As a result, for example, when the ring-shaped front surface side electrode 40 is fixed and the ring-shaped rear surface side electrode 42 is moved in either direction, the plasma ejected from the surface is inclined from the moved side toward the other side. As a result, it is possible to obtain plasma ejected in an arbitrary direction. Note that the back side electrode may be fixed and the front side electrode may be movable.

  In addition to the method of the fourth embodiment, for example, a method as shown in FIG. That is, in the example shown in FIG. 5, the ring-shaped electrode pair is divided at the upper and lower portions in the figure, and the first arc shape on the left side in the figure consisting of the first arc-shaped surface side electrode 44 and the first arc-shaped back side electrode 45. An electrode pair 46 and a second arcuate electrode pair 49 on the right side in the figure, which is formed of a second arcuate surface side electrode 47 and a second arcuate backside electrode 48 formed symmetrically therewith, are formed. An AC pulse is supplied from the first power source 50 to the left first arc-shaped electrode pair 46 as shown in FIG. 5B, and a second arc-shaped electrode pair 49 on the right side is supplied with a second An AC pulse is similarly supplied from the power source 51, and the first power source 50 and the second power source 51 can control the energization amount by the energization control device 52.

  In the energization control device 52, for example, in the example shown in FIGS. 5A and 5B, the second power source 51 is made to have a unit time longer than that of the first power source 50, thereby making the second arc-shaped electrode pair. When the surface plasma from 49 is made stronger than the first arc-shaped electrode pair 46, the plasma rising from the surface caused by the collision of the surface plasma is ejected to the left in the figure. On the other hand, as shown in FIGS. 5C and 5D, when the energizing time of the first power source 50 is longer than that of the second power source 51 for a unit time, the surface plasma from the first arc-shaped electrode pair 46 is second. Plasma that is stronger than the surface plasma from the arc-shaped electrode pair 49 and rises from the surface is ejected in the right direction in the figure.

  Further, the inclination angles of these plasmas can be arbitrarily changed according to the energization ratio between the first power source and the second power source by the energization control device 52. In the example shown in the figure, an example in which the first power source and the second power source are independently controlled is shown for easy understanding of the present embodiment, but each arcuate electrode pair using one power source is shown. It can be carried out only by controlling the energization time per unit time of the AC pulse supplied to the. Further, by rotating the entire electrode shown in FIG. 5 within a range of 180 degrees, it is possible to inject plasma in an arbitrary direction by combining with the control.

  FIG. 6 shows an embodiment in which the direction of plasma rising from the surface can be arbitrarily controlled by the same method as the plasma generation control of the embodiment shown in FIG. In the embodiment shown in the figure, the ring-shaped electrode pair is subdivided in the circumferential direction, and in the illustrated example, an example is shown in which it is divided into eight. Similarly to the above, the apparatus shown in the figure includes an arcuate electrode pair composed of a pair of arcuate surface side electrode and arcuate backside electrode, and the energization control device 61 controls the energization amount to each electrode pair 53-60. To do.

  Thereby, for example, as shown in FIG. 6, by increasing the energizing time of the unit time of the arc-shaped electrode pair located on the right side, the surface plasma from the right side in the figure becomes stronger, and the plasma rising from the surface moves in the left direction in the figure. Inclined to. By performing such energization control, the plasma rising from the surface can be controlled in an arbitrary direction.

  In FIGS. 1 to 3, the method of imparting swirl to the plasma rising from the surface is described, and in FIGS. 4 to 6, the method of controlling the direction of the plasma rising from the surface has been described. The direction can be controlled while giving. That is, for example, as shown in FIG. 7, each electrode pair is made independent in the embodiment shown in FIG. 1, and the first electrode pair 62, the second electrode pair 63, and the third electrode are made as in the embodiment of FIG. The pair 64 and the fourth electrode pair 65 are disposed independently and facing each other as illustrated. The center of the surface plasma generated from each electrode pair is deviated from the entire center O as in the example shown in FIG.

  Each of the electrode pairs can be arbitrarily controlled in energization by the energization control device 66 in the same manner as in FIG. 6. In the example shown in FIG. 7, the surface plasma generated from the first electrode pair 62 is the strongest, and then the second The electrode pair 63 is used, and the plasma from the third electrode pair 64 and the fourth electrode pair 65 is set small. As a result, the plasma rising from the surface is tilted as shown in the figure and ejected while swirling. These injection directions and turning amounts can be arbitrarily set by energization control.

  In the present invention, the plasma rising from the surface can be swung as described above, and can be tilted in any direction. Therefore, for example, for promoting mixing and stirring of gaseous fuel, fluid transport system without using a fan, etc. Can be widely used.

It is explanatory drawing of 1st Example of this invention. It is explanatory drawing of 2nd Example of this invention. It is explanatory drawing of 3rd Example of this invention. It is explanatory drawing of 4th Example of this invention. It is explanatory drawing of 5th Example of this invention. It is explanatory drawing of 6th Example of this invention. It is explanatory drawing of the 7th Example of this invention. It is explanatory drawing of a prior art example. It is explanatory drawing of the prior art example using a linear electrode. It is explanatory drawing of the prior art example using a ring-shaped electrode.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Surface plasma actuator 2 Insulator 3 Electrode edge 4 Surface side electrode 5 Back surface side electrode 6 1st electrode pair 7 2nd electrode pair 8 3rd electrode pair 9 4th electrode pair 10 Wiring 11 Wiring 12 Surface plasma 13 Surface

Claims (8)

Using an electrode pair in which a back side electrode is placed on the back side of a front side electrode with an insulator sandwiched between them, a surface plasma is generated from the edge of the surface electrode by applying an alternating voltage to both electrodes, and the opposing surface plasma In the surface plasma generation electrode that ejects plasma rising from the surface by
An electrode for generating a surface plasma, characterized in that an electrode pair for generating a surface plasma is arranged in a direction intersecting with the facing surface plasma to turn the plasma rising from the surface.   2. The surface plasma generating electrode according to claim 1, wherein another opposing electrode pair is disposed so as to be orthogonal to the opposing electrode pair.   A surface plasma generation part consisting of edges divided into a plurality of portions is formed along the inner periphery of a ring-shaped electrode pair having an opening in the center, and the orientation of the edges is shifted from the center direction of the ring. The surface plasma generating electrode according to claim 1, wherein the surface plasma generating electrode is disposed so as to be inclined with respect to the circumference of the ring. Surface plasma is generated from the opening side edge of the ring-shaped electrode pair having an opening at the center to the center side of the ring,
A plurality of electrode pairs for generating surface plasma in a direction intersecting with the surface plasma toward the center side in the opening of the ring;
It is arranged so that the direction of the surface plasma generated from the plurality of electrode pairs is reversed, and the direction of the plasma rising from the surface is changed by selecting one of the plurality of electrode pairs and energizing. 2. The surface plasma generating electrode according to claim 1, wherein Using an electrode pair in which a back side electrode is placed on the back side of a front side electrode with an insulator sandwiched between them, a surface plasma is generated from the edge of the surface electrode by applying an alternating voltage to both electrodes, and the opposing surface plasma In the surface plasma generation electrode that ejects plasma rising from the surface by
An electrode for generating surface plasma, wherein the generation intensity of the opposing surface plasmas is varied to incline the direction of plasma rising from the surface.   A back-side electrode having an outer peripheral radius smaller than the inner peripheral edge of the ring-shaped surface-side electrode having an opening at the center is disposed in the opening, and the outer peripheral edge of the back-side electrode is made a part of the inner peripheral edge of the front-side electrode. 6. The surface plasma generation electrode according to claim 5, wherein the generation intensity of the surface plasma generated from the inner peripheral edge of the surface side electrode is varied by being selectively brought close to each other.   A ring-shaped electrode pair that forms an opening in the center is divided into a plurality of independent arc-shaped electrode pairs, which are arranged in a ring shape, and the amount of current applied to each arc-shaped electrode pair is adjusted. 6. The surface plasma generation electrode according to claim 5, wherein the generation intensity of the surface plasma generated from each arc-shaped electrode is varied.    2. The surface plasma generating electrode according to claim 1, wherein the generation intensity of the facing surface plasma is varied and the direction of the plasma rising from the surface is changed while swirling.

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