JP2008151919A - Reflective liquid crystal display element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To mask a peripheral region outside an image display region against read-out light that irradiates the peripheral region without inducing birefringence. <P>SOLUTION: A plurality of switching elements 12, an insulating film 13, a plurality of reflective pixel electrodes 15, a liquid crystal layer 18 sealing a liquid crystal 16, transparent electrodes 19, a first transparent substrate 20 are successively formed on a semiconductor substrate 11. A second transparent substrate 22 having an antireflection film 22 formed on one surface 21a and having an optical compensation material film 25 and a reflection film 26 successively layered in a peripheral region 24 outside an image display region 23 on the other surface 21b, is adhered to the first transparent substrate 20 with an adhesive 28. Further, when an optical compensation plate 30 is attached to above the second transparent substrate 22, the optical compensation material film 25 optically compensates the read-out light L to compensate the retardation amount in the liquid crystal 16 by the optical compensation plate 30. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a reflective liquid crystal display element having an optical compensation plate attached to the side where the readout light enters and exits, and an optical compensation material film and a reflective film are sequentially arranged on the outer peripheral region outside the region corresponding to the image display region. The present invention relates to a reflection type liquid crystal display element that can be formed by laminating and masking the outer peripheral area with an optical compensation material film and a reflection film with respect to readout light irradiated on the outer peripheral area.

  Recently, a projection type liquid crystal display device for displaying a video on a large screen, such as a high-definition video display typified by a high-vision broadcasting standard or a computer graphics SXGA standard, has been actively used.

  This type of projection type liquid crystal display device can be broadly divided into a transmission type liquid crystal display element using a transmission method and a reflection type liquid crystal display element using a reflection method. In the case of the former transmission type liquid crystal display element, Since the TFT (Thin Film Transistor) region provided in each pixel does not become a transmission region of a pixel that transmits light, the aperture ratio is small. A liquid crystal display element has attracted attention.

As an example of the above-described reflective liquid crystal display element, the outer peripheral area outside the image display area projected on the screen is surrounded by a uniform, clear and clear black area, and the black area and the image display area There is one that can realize a high-quality projection image without blurring at the boundary (for example, see Patent Document 1).
Japanese Patent Laid-Open No. 9-146075

FIG. 4 is a longitudinal sectional view showing a conventional reflective liquid crystal display element.
FIG. 5 is a plan view showing an example in which a minimum light intensity region such as a colored layer is provided in an outer peripheral region outside the image display region in a conventional reflective liquid crystal display element.

  The conventional reflective liquid crystal display element 100 shown in FIG. 4 and FIG. 5 is disclosed in the above-mentioned Patent Document 1 (Japanese Patent Laid-Open No. 9-146075). Briefly described.

  As shown in FIG. 4, in the conventional reflective liquid crystal display element 100, a semiconductor substrate 101, a plurality of switching elements 102 arranged in a matrix on the semiconductor substrate 101, and a plurality of switching elements 102 are covered. The formed insulating film 103, the plurality of reflective pixel electrodes 105 formed on the insulating film 103 and respectively connected to the plurality of switching elements 102 by the aluminum wiring 104, and a predetermined interval on the plurality of reflective pixel electrodes 105 A liquid crystal layer 107 in which a liquid crystal 106 is sealed in K, a transparent electrode 108 provided on the liquid crystal layer 107 so as to face the plurality of reflective pixel electrodes 105, the transparent electrode 108 is formed on the lower surface, and the readout light L And a transparent substrate 109 on which light enters and exits.

  In a projection type liquid crystal display device (not shown), the reflective liquid crystal display element 100 described above is used, the switching element 102 is operated in accordance with the image signal, and the reflective pixel electrode 105 and the transparent electrode connected to the switching element 102. By applying a voltage between the read light L and the light 108, the read light L incident from the transparent substrate 109 side is modulated in the liquid crystal layer 107 and reflected by the reflective pixel electrode 105, and then the image light by the read light L is transparent. The image is emitted from the substrate 109 side and displayed on the screen in an enlarged manner through a projection lens (not shown).

  Incidentally, as shown in FIG. 5, when the readout light L is irradiated to the transparent substrate 109 side of the reflective liquid crystal display element 100, not only the image display area 111 but also the outer peripheral area 112 outside the image layer display area 111. Also, the reading light L is irradiated.

  At this time, in the outer peripheral region 112, there are things that cause unevenness in reflectance such as irregularities of wiring patterns such as power supply lines and control signal lines, and boundary lines of the liquid crystal layer 107. As a result, the readout light L reflected by the outer peripheral area 112 outside the image layer display area 111 is projected onto the screen, causing a problem that the image quality is significantly reduced.

  In order to solve this, as shown in FIG. 5, in the conventional reflective liquid crystal display element 100, the light intensity controlled in the image display area 111 is set in the outer peripheral area 112 outside the image display area 111. For example, a minimum light intensity region 113 such as a colored layer showing a uniform light intensity equal to or lower than the minimum value is provided in a rectangular frame shape along the outer periphery of the image display region 111.

  The minimum light intensity region 113 described above is a colored layer made of, for example, an organic pigment, carbon, chromium oxide, or the like that can absorb the readout light L.

  Thus, it is disclosed that an image having no blur can be obtained at the boundary between an image display area displayed on a screen of a projection type liquid crystal display device (not shown) and its surrounding area.

  By the way, in the conventional reflective liquid crystal display element 100, as described above, the uniform light intensity equal to or less than the minimum value of the light intensity controlled in the image display area 111 is provided in the outer peripheral area 112 outside the image display area 111. The minimum light intensity region 113 such as a colored layer is provided in a rectangular frame shape along the outer periphery of the image display region 111, but the minimum light intensity region 113 such as the colored layer absorbs the readout light L. Since the image of the portion is displayed in black, it is a heat absorption type, and birefringence occurs in the transparent substrate 109 due to the thermal stress caused by this, and the polarization state changes, thereby causing uneven brightness in the projected image. May occur.

  Therefore, a reflection type liquid crystal display element is desired that can mask the outer peripheral area without any birefringence with respect to the readout light irradiated to the outer peripheral area outside the area corresponding to the image display area.

The present invention has been made in view of the above problems, and the invention according to claim 1 includes a plurality of reflective pixel electrodes formed in an image display region on a semiconductor substrate,
A first transparent substrate disposed opposite to the plurality of reflective pixel electrodes at a predetermined interval and having a transparent electrode on the plurality of reflective pixel electrodes;
A liquid crystal layer in which liquid crystal is sealed within the predetermined interval;
An optical compensation material film and a reflective layer, which are stacked in order on the side of the region corresponding to the image display region and on the side facing the first transparent substrate side where the transparent electrode is not formed. A second transparent substrate having a film and a side on which both films are laminated is bonded to the first transparent substrate via an adhesive;
An optical compensator disposed above the second transparent substrate and imparting a phase difference amount so as to correct a phase shift of light generated when reading light is transmitted and enters the liquid crystal layer;
The optical compensation material film transmits the read light that has passed through the optical compensation plate from the outer periphery of the image display region and reflected by the reflective film, and then emits the reflected light from the optical compensation plate. In contrast, the reflective liquid crystal display element is optically corrected so as to cancel out the phase difference applied to the optical compensator.

  According to the reflective liquid crystal display element of the present invention, in the reflective liquid crystal display element in which the optical compensator is attached to the side where the readout light enters and exits, the transparent electrode facing the plurality of reflective pixel electrodes with the liquid crystal layer interposed therebetween Leakage of readout light to the outer peripheral area outside the pixel display area while adhering the first transparent substrate and the second transparent substrate disposed above the first transparent substrate to ensure the substrate thickness In order to control light, an optical compensation material film and a reflective film are sequentially formed so as to surround the outside of the region corresponding to the image display region on the other surface facing the one surface on the second transparent substrate side. In addition, it is possible to defocus fine foreign substances on the antireflection film formed on the second transparent substrate, and the optical compensation material film having the aperture mask function and the reflection film are positioned close to the liquid crystal layer side. Placed Sufficient light-shielding effect due to be expected.

  Further, the readout light for each color light irradiated to the outer peripheral region through the optical compensation plate passes through the optical compensation material film formed on the other surface of the second transparent substrate without entering the liquid crystal layer. When reflected from the reflective film and emitted from the optical compensator, the aperture mask function to the external area is formed by the reflective film, so there is no absorption of the readout light and birefringence due to heat is unlikely to occur. In addition, the readout light reflected by the reflective film can be displayed in black with respect to the external region.

  Further, the optical compensation material film optically compensates for the reflected light when the readout light transmitted through the optical compensation plate from the outer periphery of the image display region and reflected by the reflective film is emitted from the optical compensation plate. Since the optical compensation is performed so as to cancel out the phase difference applied to the plate, the outer peripheral area outside the image display area is not excessively corrected by the optical compensator for improving the contrast. Does not degrade the image quality of the area. As a result, the part corresponding to the outer peripheral area on the screen (not shown) is displayed in black without causing birefringence unlike the conventional example, so that the boundary between the image display area and the outer peripheral area is blurred on the screen. A high-quality projection image can be realized, and a projection image with good contrast can be realized by the optical compensator 30 in the image display area.

  Hereinafter, a reflective liquid crystal display device according to the present invention will be described in detail with reference to FIGS.

  FIGS. 1A and 1B are a top view and a longitudinal sectional view showing a reflective liquid crystal display device according to the present invention.

  The reflective liquid crystal display element 10 according to the present invention shown in FIGS. 1A and 1B is configured to be applicable to a general reflective projector.

  In the reflective liquid crystal display element 10, a p-type Si substrate such as single crystal silicon (or an n-type Si substrate) may be used as the base semiconductor substrate 11, and a dimension H on the semiconductor substrate 11 may be used. A plurality of switching elements 12 using MOSFETs (Metal Oxide Semiconductor Field Effect Transistors) are provided in a matrix in the row direction and the column direction in an image display region formed in a rectangular shape with a dimension V.

  In addition, at least one insulating film 13 is formed on the plurality of switching elements 12, and the plurality of reflective pixel electrodes 15 are respectively connected to the plurality of switching elements 12 via the aluminum wiring 14 on the insulating film 13. Is formed using a metal material having high reflectivity such as Al (aluminum).

  At this time, the plurality of reflective pixel electrodes 15 are also provided in a matrix in the row direction and the column direction corresponding to the plurality of switching elements 12, and one reflective pixel electrode 15 corresponds to one switching element 12. Each pixel is divided into a square shape.

  In addition, a liquid crystal layer 18 is provided above the plurality of reflective pixel electrodes 15 by enclosing the liquid crystal 16 in a predetermined interval K via an alignment film (not shown) and surrounding the inside in a rectangular shape by a seal member 17. ing.

  On the liquid crystal layer 18, a transparent electrode 19 having optical transparency is provided opposite to the plurality of reflective pixel electrodes 15 through an alignment film (not shown). The transparent electrode 19 is made of transparent alkali-free glass. A common electrode common to a plurality of pixels is formed on one surface (lower surface) of the first transparent substrate 20 using a substrate, a quartz substrate, or the like, without being divided for each pixel, and formed by ITO (Indium Tin Oxide) or the like. ing.

  Therefore, the predetermined interval K formed between the plurality of reflective pixel electrodes 15 and the transparent electrode 19 facing the plurality of reflective pixel electrodes 15 is called a cell gap. A liquid crystal layer 18 enclosing the liquid crystal 16 is provided.

  A second transparent substrate 21 using a transparent non-alkali glass substrate or a quartz substrate is disposed above the first transparent substrate 20 having the transparent electrode 19, and the second transparent substrate 21 is described below. After the films 22, 25, and 26 are formed, the films are bonded onto the first transparent substrate 20 with a transparent adhesive 28. At this time, a transparent surface is formed between the other surface (upper surface) opposite to one surface (lower surface) of the first transparent substrate 20 and the other surface (lower surface) 21b on the bonding surface side of the second transparent substrate 21. An adhesive 28 is filled to bond the substrates 20 and 21 together.

  In the second transparent substrate 21 described above, an antireflection film 22 that prevents reflection of the readout light L is formed on the entire surface (upper surface) 21a on which the readout light L enters and exits. The outer peripheral area 24 outside the area corresponding to the image display area 23 formed in a rectangular shape of dimension H × dimension V on the other face (lower face) 21b facing the one face (upper face) 21a and on the adhesive face side. In addition, the optical compensation material film 25 and the reflection film 26 which are the main parts of the present invention are stacked in the above order in a rectangular frame shape along the outer periphery of the image display region 23 with a width of, for example, about 1 mm to 3 mm. Has been.

  At this time, the optical compensation material film 25 is formed using, for example, a polymerizable liquid crystal material, while the reflective film 26 is formed using an aluminum alloy, silver alloy, or the like having high reflectivity. The compensation material film 25 and the reflective film 26 have an aperture mask function for the readout light irradiated to the outer peripheral region 24, which will be described in detail later.

  Then, after the antireflection film 22 is formed on one surface 21a of the second transparent substrate 21 and the optical compensation material film 25 and the reflection film 26 are stacked in this order on the other surface 21b, 2 The other surface 21 b side of the transparent substrate 21 is bonded onto the first transparent substrate 20 using a transparent adhesive 28.

  At this time, the reason for adhering the second transparent substrate 21 on the first transparent substrate 20 will be described. When a fine foreign matter is placed on the antireflection film 22 formed on the side on which the readout light L is incident. Since it is very close to the focal position, the image quality is degraded.

  Therefore, when the antireflection film 22 is temporarily formed on the first transparent substrate 20, it is necessary to increase the thickness of the first transparent substrate 20 in order to defocus fine foreign matters on the antireflection film 22. However, if only the first transparent substrate 20 is used and the thickness of the first transparent substrate 20 is increased, an aperture mask function for the outer peripheral region 24 is provided on the upper surface side of the first transparent substrate 20. In addition, since the readout light L is not necessarily incident on the image display area 23 as parallel light, leakage light due to the entrance / exit angle of the readout light L cannot be suppressed.

  For this reason, the first transparent substrate 20 and the second transparent substrate 21 are bonded to ensure the thickness of the substrate, while the antireflection film 22 for preventing the read light L from being reflected, and the read light L. By forming an optical compensation material film 25 and a reflective film 26 having an aperture mask function for controlling leakage light to the outer peripheral area 24 outside the image display area 23 on the second transparent substrate 21 side, Fine foreign substances on the antireflection film 22 formed on the second transparent substrate 21 can be defocused, and an optical compensation material film 25 and a reflection film 26 having an aperture mask function are provided on the liquid crystal layer 18 side. A sufficient light-shielding effect can be expected because it is arranged at a close position.

  Further, an optical compensation plate 30 is provided above the second transparent substrate 21 on the side where the readout light L enters and exits. The optical compensation plate 30 is attached to a frame (not shown) to which the reflective liquid crystal display element 10 is attached. It is supported. Then, the readout light L incident from the optical compensation plate 30 passes through the second transparent substrate 21 and the first transparent substrate 20 in order and enters the liquid crystal layer 18, and the readout light reflected by the plurality of pixel electrodes 15. Contrary to the above, image light is emitted from the optical compensator 30.

  Here, in general, in the reflection type liquid crystal display element, incident light from an oblique direction, or when the liquid crystal 16 is oriented in a certain direction, the liquid crystal 16 is slightly applied at an angle called a pretilt angle for the purpose of defining the direction. When creating a situation in which a voltage is applied to the image light, it is a major cause of reducing the contrast with respect to the image light by the readout light L. Therefore, in order to correct the influence of these and improve the contrast with respect to the image light by the readout light L, in the reflective liquid crystal display element 10 according to the present invention, the optical compensator 30 is attached to the input / output side of the readout light L. It has been.

  The optical compensation plate 30 described above functions as a retardation plate that gives a phase difference in the surface direction.

  When a reflective projector is configured with three reflective liquid crystal display elements 10 for each of R (red), G (green), and B (blue), or with one reflective liquid crystal display element 10 having an RGB filter. When a reflective projector is configured, the read light L for each color light corresponding to the R light having a wavelength of about 640 nm, the G light having a wavelength of about 550 nm, and the B light having a wavelength of about 450 nm is supplied to the optical compensator 30 and the second light. When light passes through the transparent substrate 21 and the first transparent substrate 20 in order and enters the liquid crystal 16 of the liquid crystal layer 18, the light generated when the read light L for each color light enters the liquid crystal 16 by the optical compensation plate 30. By applying a phase difference amount so as to correct the phase shift, optical compensation is performed on the liquid crystal 16 with respect to the readout light L for each color light. Note that the above-described phase shift is caused by the incident angle of the readout light L, the pretilt angle when the liquid crystal 16 is aligned, or the like.

  At this time, the readout light L for each color light that passes through the optical compensation plate 30 and is irradiated to the outer peripheral region 24 is also optically compensated by the optical compensation plate 30 with different phase difference amounts, like the pixel display region 23. In this state, the light is incident on the second transparent substrate 21, so that the optical compensation material film 25 formed on the other surface 21 b of the second transparent substrate 21 is read from the outer periphery of the image display region 23 through the optical compensation plate 30. When the reflected light that has been transmitted through the light L and reflected by the reflective film 26 is emitted from the optical compensation plate 30, optical correction is performed so as to cancel out the phase difference applied to the optical compensation plate 30 with respect to the reflected light. ing.

  Here, as an example, a phase difference of λ / 4 is given to the readout light L for G light having a wavelength of about 550 nm by the optical compensation plate 30, so that the liquid crystal 16 in the liquid crystal layer 18 is formed by the optical compensation plate 30. The amount of phase difference caused by the pretilt due to the alignment of the liquid crystal 16 is about 20 nm to 25 nm when a general pretilt angle is set to 10 degrees.

  Accordingly, in the optical compensation material film 25 formed on the other surface 21b of the second transparent substrate 21, with respect to the slow axis of the liquid crystal 16, that is, the axis inclined by 5 to 10 ° with respect to the polarization axis. By providing a slow axis in the orthogonal direction, a phase difference amount in the reverse direction (about 20 nm to 25 nm) cancels out the phase difference amount (about 20 nm to 25 nm) to the liquid crystal 16 with respect to the readout light L for G light having a wavelength of about 550 nm. About 20 nm to 25 nm).

  Accordingly, the read light for each color light that passes through the optical compensation plate 30 and is applied to the outer peripheral region 24 does not enter the liquid crystal layer 18 and is formed on the other surface 21 b of the second transparent substrate 21. After passing through the film 25, when reflected from the reflection film 26 and emitted from the optical compensator 30, the aperture film function to the external region 24 is formed by the reflection film 26, so that the readout light for each color light is used. On the other hand, since there is no absorption and birefringence due to heat hardly occurs, the readout light for each color light reflected by the reflective film 26 can be displayed in black on the external region 24. Further, the readout light for each color light that passes through the optical compensation plate 30 and is irradiated on the outer peripheral region 24 is readout light so that the optical compensation material film 25 cancels out the phase difference amount to the liquid crystal 16 by the optical compensation plate 30. Therefore, the outer peripheral area 24 outside the image display area 23 is not excessively corrected by the optical compensator 30 for improving the contrast, and the image quality of the outer peripheral area 24 is improved. Do not drop. As a result, the portion corresponding to the outer peripheral region 24 on the screen (not shown) is displayed in black without birefringence unlike the conventional example, so that the boundary between the image display region and the outer peripheral region is blurred on the screen. A high-quality projection image with no contrast can be realized, and a projection image with good contrast can be realized by the optical compensator 30 in the image display area.

  Accordingly, a film is formed outside the image display area 23 on the other surface 21 b of the second transparent substrate 21, and passes through the optical compensation plate 30 by the optical compensation material film 25 and the reflective film 26 and is more than the image display area 23. Masking can be satisfactorily performed for the readout light L irradiated to the outer peripheral region 24.

The operation of the reflective liquid crystal display element 10 according to the present invention configured as described above will be described.
The switching element 12 is operated according to the image signal, and a voltage is applied between the reflective pixel electrode 15 connected to the switching element 12 and the transparent electrode 19, so that the readout light L incident from the optical compensation plate 30 side is applied. Among them, after the reading light L in the image display region 23 passes through the second transparent substrate 21 and the first transparent substrate 20 in order, it is optically modulated in the liquid crystal layer 18 and reflected by the reflective pixel electrode 15. Contrary to the above, the image light by the readout light L passes through the first transparent substrate 20 and the second transparent substrate 21 in order and is emitted from the optical compensator 30 side, and is imaged on the screen via a projection lens (not shown). Is enlarged and the readout light L applied to the outer peripheral area outside the image display area 23 is passed through the optical compensation material film 25 formed on the other surface 21b of the second transparent substrate 21. Reflecting by the reflective film 26 laminated on the optical compensation material film 25 and emitting it from the optical compensation plate 30, the part corresponding to the outer peripheral area outside the image display area is not birefringent on the screen (not shown). It is displayed well as a black rectangular frame.

  Here, a manufacturing method of the reflective liquid crystal display element 10 according to the present invention will be described with reference to FIGS.

FIGS. 2A to 2G are process diagrams sequentially showing the manufacturing process on the second transparent substrate side in the reflective liquid crystal display element according to the present invention,
FIGS. 3A to 3D are process diagrams sequentially showing the process of bonding the second transparent substrate on the first transparent substrate on the semiconductor substrate side in the reflective liquid crystal display element according to the present invention.

  In describing the manufacturing process of the reflective liquid crystal display element 10 {FIG. 1 (a), (b)} according to the present invention, the manufacturing process on the second transparent substrate 21 side will be described first. As shown in FIG. 5, when the size of the reflective liquid crystal display element 10 is set to 0.7 inches, for example, the upper surface of the second transparent substrate 21 using an alkali-free glass substrate of approximately 13 mm × 23 mm (however, in this figure, the lower surface ) An antireflection film 22 is formed on the entire surface 21a.

  Next, as shown in FIG. 2B, the lower surface of the second transparent substrate 21 (however, the upper surface in this figure) 21b is larger than the region corresponding to the image display region 23 {FIG. 1A}. An optical compensation material film 25 is printed in a rectangular frame shape using a polymerizable liquid crystal material in the outer peripheral region 24 {FIG. 1 (a)}. At this time, the thickness of the optical compensation material film 25 is about 1 μm, and the optical compensation material film 25 is dried at room temperature (23 ° C. to 25 ° C.) for about 1 hour. Thereafter, the dried optical compensation material film 25 is irradiated with a lamp power of 250 W for 3 to 5 seconds using a UV irradiation apparatus capable of irradiating polarized light, thereby forming the optical compensation material film 25.

Next, as shown in FIG. 2C, on the optical compensation material film 25 formed on the other surface 21b of the second transparent substrate 21 and on the other surface 21b of the surrounding second transparent substrate 21, A reflective film 26 made of an aluminum thin film is formed by sputtering. At this time, the second transparent substrate 21 is placed in a holder (not shown) having an opening with the reflective film 26 on the lower surface, and is introduced into a sputtering apparatus (not shown). Then, the sputtering apparatus is evacuated until the initial degree of vacuum is 5E- ⁶ Torr or less, and argon gas is introduced into the chamber. At this time, it is necessary to adjust the flow rate of the argon gas so that the degree of vacuum in the chamber becomes about 3E ⁻³ Torr. The current value is adjusted so that a power of 500 W is applied to the aluminum target. At this time, the degree of vacuum and power must be set to values at which film peeling does not occur due to film formation stress. In consideration of the reflectance, the thickness of the reflective film 26 is determined so that the center value is 750 mm.

  Next, as shown in FIG. 2D, a photoresist 27 of a photosensitive material is applied on the reflective film 26 made of an aluminum thin film using a general semiconductor process.

  Next, as shown in FIG. 2E, the photoresist 27 is baked, exposed, and developed to remove portions other than those corresponding to the optical compensation material film 25 described above.

  Next, as shown in FIG. 2F, the reflective film 26 other than the portion where the photoresist 27 remains is removed by dry etching, and then the remaining photoresist is ashed with an oxygen plasma asher.

  Then, as shown in FIG. 2G, the antireflection film 22 is formed over the entire surface of one surface 21a of the second transparent substrate 21, and the image display region 23 is formed on the other surface 21b side. The optical compensation material film 25 and the reflective film 26 are laminated on the outer peripheral region 24 {FIG. 1 (a)} outside {FIG. 1 (a)} to form a rectangular frame, and the second transparent substrate 21. The manufacturing process is completed.

  Thereafter, as shown in FIG. 3A, a liquid crystal in which a plurality of switching elements 12, an insulating film 13, a plurality of reflective pixel electrodes 15, and a liquid crystal 16 are sealed on a semiconductor substrate 11 with a sealing member 17. The semiconductor substrate 11 in which the layer 18, the transparent electrode 19, and the first transparent substrate 20 are formed in the above order is prepared.

  Next, as shown in FIG. 3B, about 10 mg of a thermosetting silicon material, for example, is dropped as a transparent adhesive 28 on a substantially central portion on the first transparent substrate 20 provided on the semiconductor substrate 11 side. . In this case, when an alkali-free glass substrate or a quartz substrate is used for the first and second transparent substrates 20 and 21, the refractive index is about 1.45 to 1.52, so the visible light region of the transparent adhesive 28 It is desirable that the refractive index is included in between. In addition, in order to avoid birefringence due to stress exerted on the glass material by the shrinkage of the adhesive 28 after curing, it is important to select a material that has sufficient elasticity after curing and hardly generates birefringence.

  Next, as shown in FIG. 3C, a second transparent substrate 21 after film formation is prepared above the first transparent substrate 20 provided on the semiconductor substrate 11 side. After the film formation, the second transparent substrate 21 is formed with an antireflection film 22 on one surface 21a, and on the other surface 21b side, outside the image display region 23 {FIG. 1 (a)}. The optical compensation material film 25 and the reflection film 26 are laminated on the outer peripheral region 24 {FIG. 1A} to form a rectangular frame. Then, a transparent adhesive 28 in which the optical compensation material film 25 and the reflective film 26 formed on the other surface 21b of the second transparent substrate 21 are dropped on the first transparent substrate 20 provided on the semiconductor substrate 11 side, and Make them face each other.

  Thereafter, the other surface (upper surface) of the first transparent substrate 20 and the other surface (lower surface) 21b which is the bonding surface side of the second transparent substrate 21 are bonded by a transparent adhesive 28, whereby FIG. As shown in (d), the reflective liquid crystal display element 10 according to the present invention is completed. At this time, it is important to manage the gap between the first and second transparent substrates 20 and 21 so that the transparent adhesive 28 spreads evenly, and the reflective film in which the adhesive 28 is formed at least on the second transparent substrate 21. It is necessary to completely cover the inside of 26.

(A), (b) is the top view and longitudinal cross-sectional view which showed the reflection type liquid crystal display element based on this invention. (A)-(g) is process drawing which showed the manufacturing process by the side of a 2nd transparent substrate in order in the reflective liquid crystal display element which concerns on this invention. (A)-(d) is process drawing which showed the process of adhere | attaching a 2nd transparent substrate on the 1st transparent substrate by the side of a semiconductor substrate in the reflective liquid crystal display element which concerns on this invention. It is the longitudinal cross-sectional view which showed the conventional reflection type liquid crystal display element. In the conventional reflection type liquid crystal display element, it is the top view which showed the example which provided the minimum light intensity area | regions, such as a colored layer, in the surrounding area outside the image display area.

Explanation of symbols

10: Reflective liquid crystal display element according to the present invention,
11 ... Semiconductor substrate, 12 ... Switching element,
13 ... Insulating film, 14 ... Aluminum wiring, 15 ... Reflective pixel electrode,
16 ... liquid crystal, 17 ... sealing member, 18 ... liquid crystal layer,
19 ... Transparent electrode, 20 ... First transparent substrate,
21 ... 2nd transparent substrate, 21a ... One surface (upper surface), 21b ... The other surface (lower surface),
22 ... Antireflection film, 23 ... Image display area, 24 ... Outer peripheral area,
25 ... Optical compensation material film, 26 ... Reflective film, 27 ... Photoresist, 28 ... Transparent adhesive,
30: Optical compensator,
K: interval between liquid crystal layers, L: readout light.

Claims (1)

A plurality of reflective pixel electrodes formed in an image display region on a semiconductor substrate;
A first transparent substrate disposed opposite to the plurality of reflective pixel electrodes at a predetermined interval and having a transparent electrode on the plurality of reflective pixel electrodes;
A liquid crystal layer in which liquid crystal is sealed within the predetermined interval;
An optical compensation material film and a reflective layer, which are stacked in order on the side of the region corresponding to the image display region and on the side facing the first transparent substrate side where the transparent electrode is not formed. A second transparent substrate having a film and a side on which both films are laminated is bonded to the first transparent substrate via an adhesive;
An optical compensator disposed above the second transparent substrate and imparting a phase difference amount so as to correct a phase shift of light generated when reading light is transmitted and enters the liquid crystal layer;
The optical compensation material film transmits the reflected light that has passed through the optical compensation plate from the outer periphery of the image display region and reflected by the reflective film, and then reflects the reflected light. The reflective liquid crystal display element is optically corrected so as to cancel out the phase difference applied to the optical compensator.

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