JP2008138830A - Manifold valve - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a manifold valve which has two valves, in which one valve is so held that it cannot be opened and closed when the other valve cannot be opened and closed, and which is formed compact so that it can be easily installed in and removed from a pipe line. <P>SOLUTION: In this manifold valve, a main flow path and a branch flow path are formed integrally with each other, and a main flow path valve and a branch valve are formed integrally with each other. The main flow path valve and the branch valve are manually operated valves for opening and closing each flow path by rotating each handle. One of the main flow path valve and the branch valve comprises an interlock mechanism which opens and closes a flow passage by separating and pressing the valve element from and against the valve seat through a converting means for converting the rotating motion of the handle to the linear motion of the valve element, and when one of the main flow path valve and the branch valve is closed with the other opened, disables the rotation of the handle of one valve by the other valve. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a manifold valve used for switching the flow path of a piping line in various industrial fields such as chemical factories, semiconductor manufacturing, food, and biotechnology. More specifically, the present invention relates to a valve that can be opened and closed when one valve is openable. It is related with the manifold valve which can hold | maintain this valve so that opening / closing operation is impossible, and is easy to install in a piping line and removal.

  2. Description of the Related Art Conventionally, in a semiconductor manufacturing piping line, a piping comprising a main flow valve 102 for opening and closing a fluid flowing through the main flow passage 101 and a branch valve 104 for opening and closing a branch flow passage 103 branched from the main flow passage 101 as shown in FIG. When there is a structure and the flow of the main flow path 101 is stopped and the pipe line part 105 is replaced, the fluid staying in the pipe line is taken out from the branch flow path 103, and the fluid is scattered around. The parts could be replaced without any problems.

  However, in the conventional piping configuration, when the main flow path valve 102 is opened and fluid flows through the main flow path 101, the branch valve 104 needs to be closed, and the branch valve 104 is opened and fluid flows into the branch flow path 103. The main flow path valve 102 needs to be closed when flowing the flow, but there is a possibility that the handle of each of the valves 102 and 104 may be erroneously operated. For example, the main flow path valve 102 is closed as a corrosive fluid and the piping line is closed. If the main flow path valve 102 is accidentally opened when the part 105 is replaced, the fluid flowing through the main flow path 101 scatters to the outside, and a corrosive fluid is applied to the operator who replaces the part. There has been a problem that there is a fear that the scattered fluid may contaminate or corrode the surroundings of the piping line.

  In order to solve such a problem, it is necessary to have a configuration in which when one of the valves is opened and closed, the other valve cannot be operated. As a method for this, FIG. There was a valve opening / closing device as shown. The configuration is such that the first pipe 106 and the second pipe 107 that transport fluids having different properties are angularly displaced around an axis perpendicular to the pipe axis of each of the pipes 106 and 107, and the respective pipes 106 and 107. The first valve 116 having the first valve body 108 for opening and closing the flow path and the second valve 117 having the second valve body 109 are individually provided, and each of the pipes 106 and 107 is perpendicular to the axis. A first restricting member 114 and a second restricting member 115 having convex portions 110 and 112 and concave portions 111 and 113 in one plane are connected to each other, and one of any two restricting members 114 and 115 adjacent to each other. The concave portion 111 is formed so as to be retracted from the passage path in the angular displacement direction of the other convex portion 112, and the other concave portion 113 is retracted from the passage path in the angular displacement direction of the one convex portion 110. Formed on the other hand Fine other respective convex portions 110 and 112, was to be formed to protrude in the passage path of mutual angular displacement direction. The effect is that, in two pipes that individually transport fluids having different properties, the second restricting member is only in a state where the convex portion 112 of the second restricting member 115 is fitted in the concave portion 111 of the first restricting member 114. 115 can be operated, and the angular displacement operation of the first restricting member 114 is performed only when the convex portion 110 of the first restricting member 114 is fitted in the concave portion 113 of the second restricting member 115. Since it is possible to angularly displace only the regulating members 114 and 115 having the convex portions 110 and 112 fitted into the concave portions 111 and 113, it is possible to prevent a plurality of valve bodies from being simultaneously opened. It is possible to prevent erroneous operation of the regulating members 114 and 115.

JP 7-332535 A

  However, in the conventional valve opening / closing operation device, the first restriction member 114 provided on the first valve 116 and the second restriction member 115 provided on the second valve 117 are the first pipe line 106 and the second pipe line. 107, the pipe positions need to be finely adjusted to connect the pipes so that the convex parts 110, 112 and the concave parts 111, 113 fit into each other. In addition, when one of the valves is removed, there is a problem that it is difficult to remove because the other valve is in the way. Further, when used in a piping line of a semiconductor manufacturing apparatus or the like, the first restricting member 114 and the second restricting member 115 take up space and are not suitable for use in a narrow place, and the first valve 116 and the second valve 117 are balls. Since it is a rotary valve such as a valve or a cock, there is a problem that it is unsuitable for applications in which generation of particles is hated.

  The present invention has been made in view of the above-described problems of the prior art, and when one valve can be opened and closed, the other valve can be held in an inoperable state, and is compact and can be connected to a piping line. An object of the present invention is to provide a manifold valve that can be easily installed and removed.

A configuration of the manifold valve of the present invention for solving the above-described problems will be described.
The manifold valve of the present invention includes a main flow path, a branch flow path branched from the main flow path, a main flow path valve that opens and closes the main flow path, and a branch valve that opens and closes the branch flow path. A manifold valve in which the branch flow path, the main flow path valve, and the branch valve are integrated. The main flow path valve and the branch valve are each manually operated to open and close the flow path by rotating a handle. Either the main flow path valve or the branch valve is configured such that the valve body is separated and pressed against the valve seat via a conversion unit that converts the rotation of the handle into a linear motion of the valve body. Open and close the flow path, and when one of the main flow path valve and the branch valve is open and the other valve is closed, the one valve makes the handle of the other valve non-rotatable The first feature is that an interlock mechanism is provided.

  The manifold valve of the present invention is further characterized by further comprising a basic flow path, wherein the main flow path is branched from the basic flow path.

  The manifold valve of the present invention is a disc in which the interlock mechanism, the handle has an arc-shaped recess in a part of the outer periphery thereof, and a circular protrusion centered on the handle rotation center in the other part of the outer periphery. The distance between the rotation center axes of the two handles is smaller than the sum of the disc radii of the handles, and one of the main flow path valve and the branch valve is open. When the other valve is in a closed state, the circular convex portion of one handle faces the arc-shaped concave portion of the other handle with a certain gap and is fitted into the arc-shaped concave portion. Is the third feature.

  The manifold valve according to the present invention is characterized in that any one of the main flow path valve and the branch valve is a diaphragm valve.

  The present invention has the structure as described above, and the following excellent effects can be obtained.

(1) When one of the valves can be opened / closed, the other valve can be held incapable of being opened / closed.
(2) The main flow path valve and branch valve are provided integrally with the manifold valve structure, making it easy to connect to and remove from the piping line. In addition, the interlock mechanism is provided on the manifold valve, so when piping work There is no need to make delicate adjustments to the piping position to install the interlock mechanism.
(3) Since it is compactly formed, it can be used in a narrow place where the piping lines are dense, and the apparatus can be provided small in the piping in the apparatus.
(4) In addition to the parts required for the manifold valve, it is not necessary to add other parts for forming the interlock mechanism, and the interlock mechanism can be formed with a minimum number of parts, so that the assembly of the valve is easy. Manufacturing costs can be reduced.

  Hereinafter, the first embodiment of the present invention will be described with reference to the examples shown in the drawings, but the present invention is not limited to the examples. FIG. 1 is a longitudinal sectional view showing a manifold valve according to a first embodiment of the present invention in which a main flow path valve is in an open state and a branch valve is closed, and FIG. 2 is a state in which the main flow path valve in FIG. FIG. 3 is a longitudinal sectional view showing the manifold valve with the valve closed, and FIG. 3 is a longitudinal sectional view showing the manifold valve with the main flow path valve in FIG. 1 closed and the branch valve opened. FIG. 4 is a perspective view showing the configuration of the first cam and the second cam with the valve closed, and FIG. 5 is a perspective view showing the configuration of the first cam and the second cam with the valve open. 6 is a plan view of FIG. 1, FIG. 7 is a plan view of FIG. 2, and FIG. 8 is a plan view of FIG. FIG. 9 is a longitudinal sectional view showing a second embodiment of the present invention. FIG. 10 is a plan view of FIG. FIG. 11 is a schematic diagram showing a piping line using the second embodiment of the present invention.

  1 and 4, X is a main flow path valve, and Y is a branch valve. 1 is a main body having a first flow path 2 communicating with the first connection port 42 on the side surface, a second flow path 3 communicating with the second connection port 43, and a third flow path 4 communicating with the third connection port 44. In addition, a main passage valve valve chamber 5 and a branch valve valve chamber 6 are provided above. A valve seat 7 is formed at the center of the bottom surface of the main channel valve valve chamber 5, a first opening 8 communicating with the first channel 2 is provided at the center of the valve seat 7, and a second channel 3 is provided at the periphery of the bottom surface. The 2nd opening part 9 connected to is provided. A valve seat 10 is formed at the center of the bottom surface of the branch valve valve chamber 6, and a third opening 11 communicating with the second flow path 3 is provided at the center of the valve seat 10. A fourth opening 12 that communicates with the three flow paths 4 is provided. A pedestal for placing the manifold valve may be provided at the lower part of the main body 1.

  At this time, the flow path that flows from the first flow path 2 through the first opening 8, the main flow path valve valve chamber 5, and the second opening 9 to the second flow path 3 becomes the main flow path and branches from the third opening 11. A flow path that flows through the third flow path 4 through the valve valve chamber 6 and the fourth opening 12 becomes a branch flow path. The main body 1 is formed so that a main flow path valve X that opens and closes the main flow path on the main flow path valve valve chamber 5 side and a branch valve Y that opens and closes the branch flow path on the branch valve valve chamber 6 side are integrated. .

First, the configuration of the main flow path valve X will be described.
Reference numeral 13 denotes a valve element disposed in the main flow path valve valve chamber 5, and a diaphragm 14 extending in the radial direction is integrally formed on the outer periphery of the valve element 13, and the peripheral edge of the diaphragm 14 is the main body 1. And fixed by a bonnet 15 described later. The valve body 13 is pressed against and separated from the valve seat 7 to block or open the fluid flow from the first flow path 2 to the second flow path 3, that is, the main flow path.

  Reference numeral 15 denotes a bonnet. A lower part of the bonnet is provided with a recessed part 16 opened on the bottom surface, and an upper part is provided with a through hole 17 communicating with the recessed part 16, and a lower surface is abutted and fixed to the main body 1.

  Reference numeral 18 denotes a stem, which is inserted into the recess 16 of the bonnet 15 so that the upper part protrudes from the through-hole 17 of the bonnet 15 and is movable up and down and not rotatable. The valve body 13 is screwed to the lower end portion of the stem 18, and the valve body 13 is held by sandwiching the spring 20 between the upper surface of the flange portion 19 provided at the lower portion and the ceiling surface of the recess 16 of the bonnet 15. It is energizing downward. An indicator 21 is provided at the upper end of the stem 18.

  Reference numeral 22 denotes a first cam. The first cam 22 includes a cylindrical portion 23 and a plate-like flange portion 24 formed at the lower portion of the cylindrical portion, and has two convex portions 25 on the upper surface at positions symmetrical to the cam shaft. The upper surface of the first cam 22 is provided so that the flat portion and the convex portion 25 form a smooth surface (see FIG. 5).

  A cylindrical second cam 26 has a flat portion 27 and a concave portion 28 corresponding to the convex portion 25 of the first cam 22 on the lower surface, and the concave portion 28 of the second cam 26 and the convex portion of the first cam 22. The lower surface of the second cam 26 and the upper surface of the first cam 22 are formed so as to come into surface contact with each other when 25 is engaged.

  The first cam 22 and the second cam 26 are disposed above the hood 15 with the upper portion of the stem 18 passing through the center. The second cam 26 and the stem 18 are integrated by fitting a joining pin 30 into a through hole 29 provided in the side surface of the second cam 26 and a through hole provided in the upper part of the stem 18.

  Reference numeral 31 denotes a disc-shaped handle, which includes a fitting portion 32 that is fitted and joined to the flange portion 24 of the first cam 22 at a lower portion, and a gap 33 that accommodates the upper portion of the first cam 22 and the second cam 26 therein. And a through hole 34 through which the indicator 21 at the upper end of the stem 18 passes is provided on the upper surface.

Next, the configuration of the branch valve Y will be described.
Reference numeral 35 denotes a valve element disposed in the branch valve valve chamber 6, and a diaphragm 36 extending in the radial direction is integrally formed on the outer periphery of the valve element 35, and the peripheral part of the diaphragm 36 is connected to the main body 1. It is clamped and fixed by a bonnet 37 described later. The valve body 35 is pressed against and separated from the valve seat 10 to block or open the fluid flow from the second flow path 3 to the third flow path 4, that is, the communication between the main flow path and the branch flow path.

  37 is a bonnet, 38 is a stem, 39 is a first cam, 40 is a second cam, and 41 is a handle. Since the structure of these branch valves is the same as that of the main flow path valve, description thereof is omitted.

Here, the structure of the handle 31 and the handle 41 will be described.
As shown in FIGS. 6 to 8, the distance between the rotation axes of the handle 31 and the handle 41 is set smaller than the sum of the radii of the handles 31, 41. An arcuate recess 45 having a radius slightly larger than the radius of the handle 41 around the rotation axis is provided, and a part of the outer periphery of the handle 41 is larger than the radius of the handle 31 around the rotation axis of the handle 31. An arcuate recess 46 having a slightly larger radius is also provided. Handles 47 and 48 are provided on the side surfaces of the handles 31 and 41 at positions opposite to the arcuate recesses 45 and 46. On the other outer periphery of the handles 31, 41, a circular convex portion centered on the handle rotation center is provided.

  Next, the operation of the first embodiment of the present invention will be described.

  First, the operation of the main flow path valve will be described. When the convex portion 25 of the first cam 22 and the concave portion 28 of the second cam 26 are engaged with each other (the state shown in FIG. 4), the valve element 13 is moved by the repulsive force of the spring 20. The main flow path valve is closed by being pressed against the valve seat 10, and the flow of fluid is blocked (the state shown in FIGS. 2 and 3). Next, when the handle 31 is rotated 90 degrees clockwise, the first cam 22 joined to the handle 31 is also rotated 90 degrees, and the convex portion 25 of the first cam 22 is disengaged from the concave portion 28 of the second cam 26. However, since the convex portion 25 pushes up the second cam 26 by this movement, the second cam 26 moves upward by the height of the convex portion 25 (FIG. 5). State). Therefore, the stem 18 joined integrally with the second cam 26 also rises while compressing the spring 20, and the valve body 13 joined to the tip of the stem 18 also rises and is separated from the valve seat 10 to be mainstream. The path valve is opened and the fluid flowing in from the first flow path 2 flows to the second flow path 3 (state shown in FIG. 1). Moreover, since the indicator 21 protrudes from the upper surface of the handle 31 as the stem 18 rises, it can be visually recognized that the main flow path valve is open or closed.

  On the other hand, when the handle 31 is rotated 90 degrees counterclockwise from this state (the state of FIG. 1), the first cam 22 joined to the handle 31 is also rotated 90 degrees, and the convex portion 25 of the first cam 22 is again formed. And the concave portion 28 of the second cam 26 mesh with each other, so that the second cam 26 moves downward (state shown in FIG. 4), and the stem 18 integrally joined with the second cam 26 is lowered. At this time, the valve element 13 is pressed against the valve seat 10 by the urging force of the spring 20, the main flow path valve is closed, and the flow of fluid is blocked (the state shown in FIGS. 2 and 3).

  Since the structure of the branch valve is the same as that of the main flow path valve, the description of the operation is omitted. However, when the branch valve is in the closed state, the fluid flow from the second flow path 3 to the third flow path 4 is interrupted, and the branch valve When the valve is open, fluid flows from the second flow path 3 to the third flow path 4.

  Next, the interlock mechanism of the manifold valve of the present invention will be described.

  First, when the main flow path valve is in the open state and the branch valve is in the closed state (the state shown in FIG. 1), the fluid that has flowed into the first flow path 2 flows out from the second flow path 3 to the outside. At this time, the arc-shaped concave portion 46 of the branch valve handle 41 faces the direction of the main flow path valve, and the circular convex portion of the main flow path valve handle 31 is accommodated in the arc-shaped concave portion 46 (FIG. 6). Status). In this state, even if the handle 41 of the branch valve is rotated, the handles interfere with each other and the side surface of the arc-shaped recess 46 hits the circular convex portion of the handle 31, so that the handle 41 is rotated while the branch valve is closed. To prevent opening. On the other hand, even if the handle 31 of the main flow path valve is rotated, the handles do not interfere with each other, and can be freely switched from the open state to the closed state. That is, in this state, the main flow path valve can be opened and closed, but the branch valve cannot be operated.

  Next, when the main flow path valve is in the closed state and the branch valve is in the open state (the state in FIG. 3), the fluid flows from the second flow path 3 to the third flow path 4. At this time, the arc-shaped concave portion 45 of the main flow path valve handle 31 faces the branch valve, and the circular convex portion of the branch valve handle 41 is accommodated in the arc-shaped concave portion 45 (state of FIG. 8). . In this state, even if the main flow path valve handle 31 is to be rotated, the handles interfere with each other and the side surface of the arc-shaped recess 45 hits the circular convex portion of the handle 41, so that the handle 31 is rotated while the branch valve is closed. It cannot be done and it is prevented from opening. On the other hand, even if the handle 41 of the branch valve is rotated, the handles do not interfere with each other, and can be freely switched from the open state to the closed state. That is, in this state, the branch valve can be opened and closed, but the main flow path valve cannot be operated.

  Next, in the case where both valves are closed (the state shown in FIG. 2), each of the arc-shaped recesses 45 and 46 faces the direction of the valve, so that either valve can be operated (FIG. 7). State). However, when one valve is operated, the other valve cannot be operated due to interference between the handles, and therefore it is impossible to operate both valves simultaneously.

  As described above, the manifold valve of the present invention has a structure in which both valves cannot be opened simultaneously. When this manifold valve is used in a piping line of a semiconductor manufacturing apparatus as shown in FIG. 12, the main flow path valve 102 and the branch valve 103 need only be one manifold valve of the present invention (not shown), and an interlock mechanism is provided. Since the manifold valve structure is equipped, it is not necessary to finely adjust the piping position to install the interlock mechanism, so the piping connection is easy and the compact structure allows it to be used in a narrow space in the piping line. In addition, the semiconductor manufacturing apparatus can be formed smaller. When replacing piping line parts, the main flow path valve is closed to stop the flow of the main flow path, and the branch valve is opened to allow the fluid remaining in the main flow path to flow out of the branch flow path. When the parts are replaced, the interlock mechanism prevents the main flow path valve from being inadvertently opened, so that the operator can safely replace the parts without any fluid splashing around. .

  In this embodiment, the inflowing fluid is used as a flow that flows out from the second flow path 3 through the first flow path 2 and a flow that flows out from the second flow path to the third flow path. Depending on the application, the fluid may be in any flow.

  Next, a second embodiment of the present invention when the main flow path valve has a branch valve structure will be described.

  As shown in FIGS. 9 and 10, the manifold valve of the second embodiment penetrates from the first connection port 57 to the fourth connection port 60 through the first flow path 52 (in FIG. 9, from the front side to the back side). The first and fourth connection ports 57 and 60 are open on both side surfaces of the main body 51), the second flow channel 53 communicating from the predetermined location of the first flow channel 52 to the second connection port 58, A third flow path 54 communicating from a predetermined location of the second flow path 53 to the third connection port 59 is integrally provided inside the main body 51, and a main flow path valve chamber 55 and a branch valve valve chamber 56 are provided above. It has been. At this time, the first flow path 52 becomes the main flow path, the flow path flowing from the first flow path 52 through the main flow path valve valve chamber 55 through the second flow path 53 becomes the main flow path, and the third flow path from the branch valve valve chamber 56. A flow path flowing through the path 54 becomes a branch flow path. The main channel is a channel branched from the main channel.

  The main body 51 is formed so that a main flow path valve for opening and closing the main flow path on the main flow path valve valve chamber 55 side and a branch valve for opening and closing the branch flow path on the branch valve valve chamber 56 side are integrated. Since the configuration of the main flow path valve and the branch valve is the same as that of the first embodiment, description thereof is omitted.

  Next, the operation of the second embodiment of the present invention will be described.

  As for the fluid flow of the manifold valve, the fluid flowing in the first flow path 52 is branched via the main flow path valve and flows to the second flow path 53. The main flow path valve can open and close the branched flow path, and the fluid flowing through the second flow path 53 is further branched by the branch valve and flows to the third flow path 54. The branch valve can further open and close the branched flow path. Since the operations of the main flow path valve and the branch valve and the interlock mechanism are the same as those in the first embodiment of the present invention, description thereof will be omitted. When this manifold valve is used in a piping line of a semiconductor manufacturing apparatus, as shown in FIG. 11, when connecting a plurality of manifold valves of the present invention in parallel, conventionally, the fluid is branched by a cheese or a manifold joint and connected. Can be connected to the pipe without the need for a manifold joint, and the number of members for connecting the pipe is small, and the pipe connection is facilitated.

  The interlock mechanism of the manifold valve according to the present invention may be configured such that when one valve is open and the other valve is closed, the handle of one valve holds the handle of the other valve in an unrotatable manner. At this time, the one valve may be opened and closed by rotating the handle of one of the valves while maintaining the state in which the handle of the other valve cannot be rotated.

  Further, the handles 31 and 41 may be thick, thin, cylindrical, or may have a shape close to a cone as long as the handles 31 and 41 have a disk shape and satisfy the interlock mechanism. Further, handle portions 47 and 48 such as levers and protrusions and slip stoppers may be provided on the outer periphery of the handle, or grooves and irregularities may be provided within a range not departing from the disk shape.

  The branch valve and the main flow path valve of the present invention are configured to open and close the valve by the angular displacement of the rotating shaft of the handles 31 and 41, and at least one of the valves controls the angular displacement of the rotating shaft of the handles 31 and 41 to the valve body. It is necessary to provide means for converting the vertical movements of 13 and 35, and the configuration of the valve at this time includes a diaphragm valve, a stop valve, a poppet valve, a spool valve and the like. Since it is easy to make it the structure which suppresses generation | occurrence | production, it is suitable that it is a diaphragm valve.

  In the present invention, the materials of the diaphragms 14 and 36 are preferably made of fluororesin, such as polytetrafluoroethylene (hereinafter referred to as PTFE), polyvinylidene fluoride (hereinafter referred to as PVDF), tetrafluoroethylene perfluoro. Preferred examples include alkyl vinyl ether copolymers (hereinafter referred to as PFA).

  In the present invention, the material of the main body 1 of the manifold valve, the bonnets 15 and 37, the stems 18 and 38, the first cams 22 and 39, the second cams 26 and 40, and the handles 31 and 41 have physical properties necessary for the manifold valve. Although not particularly limited as long as it is, fluororesins such as PTFE, PVDF, PFA, and polychlorotrifluoroethylene are preferred. Resins such as polypropylene, polyvinyl chloride, polystyrene, and ABS resin, and corrosion caused by fluids If there is no worry, any metal such as stainless steel may be used.

  The fluid flowing through the manifold valve of the present invention is not particularly limited, such as pure water, hydrochloric acid, sulfuric acid, hydrofluoric acid, ammonia water, hydrogen peroxide water, and ammonium fluoride.

It is a longitudinal cross-sectional view which shows the manifold valve which the main flow path valve which is 1st embodiment of this invention is an open state, and a branch valve is a closed state. FIG. 2 is a longitudinal sectional view showing a manifold valve with a main flow path valve of FIG. 1 in a closed state and a branch valve in a closed state. FIG. 2 is a longitudinal sectional view showing a manifold valve with a main flow path valve of FIG. 1 in a closed state and a branch valve in an open state. It is a perspective view which shows the structure of the 1st cam of a valve closed state, and a 2nd cam. It is a perspective view which shows the structure of the 1st cam of a valve open state, and a 2nd cam. It is a top view of FIG. FIG. 3 is a plan view of FIG. 2. FIG. 4 is a plan view of FIG. 3. It is a longitudinal cross-sectional view which shows 2nd embodiment of this invention. FIG. 10 is a plan view of FIG. 9. It is a schematic diagram which shows the piping line using 2nd embodiment of this invention. It is a schematic diagram which shows the piping line of the conventional semiconductor manufacture. It is a front view which shows the opening / closing operation apparatus of a valve.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Main body 2 1st flow path 3 2nd flow path 4 3rd flow path 5 Main flow path valve valve chamber 6 Branch valve valve chamber 7 Valve seat 8 1st opening part 9 2nd opening part 10 Valve seat 11 3rd opening part 12 1st Four openings 13 Valve body 14 Diaphragm 15 Bonnet 16 Recessed portion 17 Through hole 18 Stem 19 Hook 20 Spring 21 Indicator 22 First cam 23 Cylindrical portion 24 Hook portion 25 Projected portion 26 Second cam 27 Flat portion 28 Recessed portion 29 Through hole 30 Joint pin 31 Handle 32 Fitting portion 33 Gap 34 Through hole 35 Valve element 36 Diaphragm 37 Bonnet 38 Stem 39 First cam 40 Second cam 41 Handle 42 First connection port 43 Second connection port 44 Third connection port 45 Arc shape Concave portion 46 Arc-shaped concave portion 47 Handle portion 48 Handle portion 51 Main body 52 First flow path 53 Second flow path 54 Third flow path 55 Main flow path valve valve chamber 5 6 Branch valve valve chamber 57 First connection port 58 Second connection port 59 Third connection port 60 Fourth connection port

Claims (4)

A main flow path; a branch flow path that branches from the main flow path; a main flow path valve that opens and closes the main flow path; and a branch valve that opens and closes the branch flow path, the main flow path, the branch flow path, and the main flow A manifold valve in which the road valve and the branch valve are integrated,
The main flow path valve and the branch valve are each a manual valve that opens and closes the flow path by rotating a handle.
Either the main flow path valve or the branch valve opens or closes the flow path by bringing the valve body into pressure contact with the valve seat via a conversion means that converts the rotation of the handle into linear movement of the valve body. And
When one of the main flow path valve and the branch valve is in an open state and the other valve is in a closed state, the one valve has an interlock mechanism that disables the handle of the other valve. Manifold valve characterized by that.   The manifold valve according to claim 1, further comprising a main flow path, wherein the main flow path is branched from the main flow path. The interlock mechanism is
The handle is formed in a disc shape having an arc-shaped concave portion at a part of its outer periphery and a circular convex portion around the handle rotation center at the other portion of the outer periphery. The distance between the dynamic center axes is set smaller than the sum of the disc radii of each handle,
When one of the main flow path valve and the branch valve is open and the other valve is closed,
3. The circular convex portion of one handle is configured to be opposed to the arc-shaped concave portion of the other handle with a certain gap so as to fit into the arc-shaped concave portion. Manifold valve as described.   4. The manifold valve according to claim 1, wherein one of the main flow path valve and the branch valve is a diaphragm valve. 5.

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