JP2008136927A - Method of driving droplet discharge head, droplet discharge device and electro-optical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of driving a droplet discharge head by which the uniformity of film thickness of a film pattern formed by discharging droplets is improved, a droplet discharge device and an electro-optical device. <P>SOLUTION: Ranks [1]-[7] corresponding to the quantity of the discharged droplets are respectively corresponded to each of a plurality of the nozzles. A plurality of different driving waveform signals COMs (a first driving waveform signal COMA, a second driving waveform signal COMB, a third driving waveform signal COMC, a forth driving waveform signal COMD) corresponding to the respective ranks of the nozzles are generated in combination so that the practical quantity of the discharged droplets become a predetermined reference weight. The plurality of the driving waveform signal COMs corresponding to the selected each rank of the nozzle are fed to the corresponding piezoelectric element selected based on a draw data and the reference quantity of the droplets is discharged toward a discharge surface from the selected nozzle. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a droplet discharge head driving method, a droplet discharge device, and an electro-optical device.

In general, a liquid crystal display is equipped with a color filter substrate having a large number of pixels. Each pixel of the color filter substrate receives light from the light source, transmits light of a specific wavelength, and displays a full color image on the liquid crystal display. In the color filter manufacturing process, an inkjet method using a droplet discharge head is employed in order to improve productivity and reduce production costs (for example, Patent Document 1).

The droplet discharge head includes a plurality of cavities for storing a liquid material, a plurality of nozzles arranged in one direction so as to communicate with the cavity, and a plurality of actuators (for example, piezo elements) that pressurize the liquid material in each cavity. And a resistance heating element). The droplet discharge head inputs a drive waveform signal common to the actuators selected based on the drawing data, and discharges liquid droplets from the nozzles corresponding to the actuators. In the inkjet method, a pixel is formed by supplying a filter material to a droplet discharge head, discharging droplets of the filter material toward a color filter substrate, and drying the droplets that have landed on the substrate.

In the ink jet method, drawing with excellent gradation expression is desired as the drawing target is highly refined. Japanese Patent Application Laid-Open No. H10-228707 provides common waveform generation means for generating a plurality of drive voltage waveforms corresponding to the ink ejection amount, and selects any one of the drive voltage waveforms generated by the common waveform generation means based on the gradation data signal. To supply to the actuator. According to this, the size of the droplet can be changed by different drive waveform signals, and excellent gradation expression can be achieved without changing the design of the inner diameter of the nozzle and the nozzle formation pitch.
JP-A-8-146214 Japanese Patent Laid-Open No. 9-11457

In the inkjet method, the color filter substrate and the droplet discharge head are relatively moved in a predetermined scanning direction, and the drive waveform signal is input to each actuator at a predetermined discharge frequency.
Thereby, the droplets for the arranged nozzles are sequentially ejected at a predetermined ejection frequency, and the liquid pattern is sequentially drawn along the scanning direction of the color filter substrate.

However, when the weights of the droplets vary within the array of nozzles arranged, the large or small weight droplets continue along the scanning direction of the color filter substrate.
As a result, a step in film thickness is formed along the scanning direction of the color filter substrate, and the display image quality of the liquid crystal display is significantly lowered.

Therefore, if the weight of the droplet can be calibrated for each nozzle, the uniformity of the film thickness can be improved, and as a result, the display image quality of the liquid crystal display can be improved.
The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a method for driving a droplet discharge head that improves the film thickness uniformity of a film pattern formed by discharging droplets. It is an object to provide a discharge device and an electro-optical device.

According to the droplet discharge head driving method of the present invention, a rank setting step for associating a rank corresponding to the weight of droplets discharged to each of a plurality of nozzles, and discharging when the nozzle actuator is driven a plurality of times. A drive waveform signal generating step for generating a plurality of different drive waveform signals for each rank to make an average weight of the plurality of droplets a predetermined weight, and an actuator for the nozzle selected based on the drawing data A droplet discharge step of supplying the plurality of different drive waveform signals corresponding to the rank of the selected nozzle and discharging the droplet from the selected nozzle toward an object.

According to the droplet ejection head driving method of the present invention, the nozzle selected based on the drawing data receives a plurality of different drive waveform signals corresponding to the set rank, and calculates the average weight of the droplets to be ejected. The weight is set to a predetermined weight. Accordingly, each of the plurality of nozzles normalizes the average weight of the ejected droplets to a predetermined weight by a combination of the drive waveform signals generated for each rank. As a result, the total weight of the droplets discharged onto the object can be calibrated for each nozzle, and the film thickness uniformity of the thin film made of droplets can be improved. In addition, compared to the case where droplets are ejected using a single drive waveform signal, the accuracy can be improved when adjusting the average weight by the combination of different drive waveform signals and the degree of freedom. Can be expanded.

In this droplet discharge head driving method, the driving waveform signal generating step supplies the first driving waveform signal to the actuator of the nozzle by a predetermined first number of pulses, and the first pulse from the nozzle. And ejecting the droplet corresponding to the second pulse from the nozzle by supplying a second drive waveform signal to the actuator of the nozzle for a predetermined second number of pulses. When the first driving waveform signal and the second driving waveform signal are used, an average weight of the plurality of droplets ejected by the first driving waveform signal is set to the predetermined weight.
The drive waveform signal and the second drive waveform signal may be generated for each rank.

According to this droplet discharge head driving method, compared to the case where droplets are discharged using a single pulse drive waveform signal, the accuracy is reduced by the number of first pulses and the number of second pulses. Thus, the average weight can be calibrated to a predetermined weight.

In this droplet discharge head driving method, the droplet discharge step associates a combination of the plurality of different drive waveform signals corresponding to the ranks with respect to all the nozzles, and The configuration may be such that droplet ejection / non-ejection is set, and the corresponding combination of drive waveform signals is supplied to the actuator of the nozzle for which the ejection operation has been set.

According to this droplet discharge head driving method, a plurality of different drive waveform signals corresponding to ranks are associated with all nozzles regardless of whether or not droplets are discharged. Therefore,
The nozzle selected based on the drawing data is more reliably driven by the corresponding drive waveform signal.

In this droplet discharge head driving method, in the droplet discharge step, all the nozzles are associated with a combination of the plurality of different drive waveform signals corresponding to the rank for all the nozzles. The configuration is such that the droplet ejection / non-ejection setting is repeated, and each time the ejection / non-ejection setting is made, the corresponding combination of drive waveform signals is supplied to the actuator of the nozzle for which the ejection operation has been set. There may be.

According to this droplet discharge head driving method, it is possible to associate the combination of the drive waveform signals only once with all the nozzles, and then repeat the droplet discharge operation. Therefore,
A common combination of drive waveform signals can be kept corresponding to a single nozzle, and all nozzles that discharge droplets are more reliably driven by the corresponding drive waveform signal.

In this droplet discharge head driving method, the droplet discharge step corresponds to the rank for all the nozzles each time the droplet discharge / non-discharge is set for all the nozzles. The combination of the plurality of different drive waveform signals may be associated with each other, and the associated combination of drive waveform signals may be supplied to the actuator of the nozzle for which the discharge operation is set.

According to this droplet ejection head driving method, a plurality of different driving waveforms corresponding to the ranks for all the nozzles are set each time a droplet ejection operation is set regardless of whether or not droplets are ejected. Signals are associated. Accordingly, all the nozzles that discharge the droplets are more reliably driven by a plurality of corresponding different drive waveform signals.

The droplet discharge device of the present invention is a droplet discharge device that supplies a drive waveform signal to each of a plurality of actuators provided in a droplet discharge head and discharges droplets from a nozzle corresponding to the actuator, Output control signal generating means for generating an output control signal in which ejection / non-ejection of the droplet is associated with each of the plurality of nozzles based on drawing data; and A plurality of storage means for storing information in which ranks set in accordance with weights are associated with each other, and an average weight of the plurality of droplets ejected by driving the actuator of the nozzle a plurality of times to obtain a predetermined predetermined weight. Drive waveform signal generating means for generating different drive waveform signals for each rank in association with the rank, and each of the plurality of nozzles using the information stored in the storage means Based on the common selection control signal generating means for generating a common selection control signal that associates a combination of the plurality of different drive waveform signals corresponding to the rank, the common selection control signal and the output control signal, Output means for outputting the plurality of different drive waveform signals corresponding to the rank to an actuator of the nozzle that discharges the droplets.

According to the droplet discharge device of the present invention, the nozzle selected based on the drawing data receives a plurality of different drive waveform signals corresponding to the set rank, and the average weight of the droplet to be discharged is defined in advance. To a predetermined weight. Accordingly, each of the plurality of nozzles has the weight of the ejected droplets normalized to a predetermined weight by a combination of a plurality of different drive waveform signals generated for each rank. As a result, the total weight of the droplets discharged onto the object can be calibrated for each nozzle, and the film thickness uniformity of the thin film made of droplets can be improved. Moreover, compared to the case where droplets are ejected using a single drive waveform signal, the amount of combination of different drive waveform signals is as follows:
When adjusting the average weight, the accuracy can be improved and the degree of freedom can be expanded.

The droplet discharge device of the present invention is a droplet discharge device that supplies a drive waveform signal to each of a plurality of actuators provided in a droplet discharge head and discharges droplets from a nozzle corresponding to the actuator, Output control signal generating means for generating an output control signal in which ejection / non-ejection of the droplet is associated with each of the plurality of nozzles based on drawing data; and Storage means for storing information in which ranks set in accordance with weights are associated with each other, and a plurality of droplets that are driven by driving the actuator of the nozzle a plurality of times so that an average weight of the plurality of droplets is set to a predetermined weight. Driving waveform signal generating means for associating a combination of different driving waveform signals with the rank and generating the plurality of different driving waveform signals for each rank; and storing in the storage means A common selection control signal generating means for generating a common selection control signal in which a combination of the plurality of different drive waveform signals corresponding to the rank is associated with each of the plurality of nozzles using the information; and the common selection control signal And output means for outputting the plurality of different drive waveform signals corresponding to the rank to an actuator of the nozzle that discharges the droplet based on the output control signal.

According to the droplet discharge device of the present invention, the nozzle selected based on the drawing data receives a plurality of different drive waveform signals corresponding to the set rank, and the average weight of the droplet to be discharged is defined in advance. To a predetermined weight. Accordingly, each of the plurality of nozzles normalizes the average weight of the ejected droplets to a predetermined weight by a combination of the drive waveform signals generated for each rank. As a result, the total weight of the droplets discharged onto the object can be calibrated for each nozzle, and the film thickness uniformity of the thin film made of droplets can be improved. In addition, compared to the case where droplets are ejected using a single drive waveform signal, the accuracy can be improved when adjusting the average weight by the combination of different drive waveform signals and the degree of freedom. Can be expanded.

In this droplet discharge device, the drive waveform signal generating means includes a first drive waveform signal and a second drive waveform signal.
For each rank, and the output means outputs the first drive waveform signal to the actuator of the nozzle by a predetermined first number of pulses, and outputs the second drive waveform signal. A predetermined number of second pulses are output to the actuator of the nozzle, and an average weight of the plurality of droplets ejected by the first drive waveform signal and the second drive waveform signal is set to the predetermined weight. It may be configured to.

According to this droplet discharge head driving method, compared to the case where droplets are discharged using a single pulse drive waveform signal, the accuracy is reduced by the number of first pulses and the number of second pulses. Thus, the average weight can be calibrated to a predetermined weight.

In this droplet discharge device, the common selection control signal generation unit generates the common selection control signal synchronized with the output control signal, and the output unit includes the output control signal, the output control signal, The plurality of different drive waveform signals corresponding to the rank may be output to the actuator of the nozzle that discharges the droplet based on the synchronized common selection control signal.

According to this droplet discharge device, each time a droplet discharge operation is executed, a combination of a plurality of different drive waveform signals corresponding to the rank is associated with each nozzle. Therefore, all the nozzles that discharge droplets are more reliably driven by the corresponding drive waveform signal.

In this droplet discharge device, the common selection control signal generation unit generates the common selection control signal prior to the output control signal, and the output unit receives the output control signal each time the output control signal is received. The plurality of different drive waveform signals corresponding to the rank may be output to the actuator of the nozzle that discharges the droplet using a common selection control signal generated in advance.

According to this droplet discharge apparatus, a combination of a plurality of different drive waveform signals is associated with all nozzles only once, and then the droplet discharge operation is repeated. Therefore, it is possible to keep corresponding combinations of driving waveform signals for a single nozzle, and all the nozzles are more reliably driven by the corresponding driving waveform signal.

This droplet discharge device may be configured to include a droplet weight device that measures the weight of the droplet.
According to this droplet discharge device, the weight of the droplet can be measured, and a more accurate weight can be obtained as compared with the case where the weight of the droplet is separately measured by an external device. As a result, the weight of the droplet can be normalized more accurately.

The electro-optical device of the present invention is an electro-optical device having a thin film formed by drying droplets discharged onto a substrate, and the thin film is formed by the droplet discharge device.
According to the electro-optical device of the present invention, the film thickness uniformity of various thin films can be improved. As a result, the optical characteristics of the electro-optical device can be improved.

Hereinafter, an embodiment embodying the present invention will be described with reference to FIGS. First, the liquid crystal display device 1 as an electro-optical device will be described. FIG. 1 is a perspective view showing the entire liquid crystal display device, and FIG. 2 is a perspective view showing a color filter substrate provided in the liquid crystal display device.

In FIG. 1, the liquid crystal display device 1 includes a backlight 2 and a liquid crystal panel 3. The backlight 2 irradiates the entire surface of the liquid crystal panel 3 with light emitted from the light source 4. LCD panel 3
Includes an element substrate 5 and a color filter substrate 6, and the element substrate 5 and the color filter substrate 6 are bonded together by a rectangular frame-shaped sealing material 7, and the liquid crystal LC is sealed in the gap. The liquid crystal LC modulates the light from the backlight 2 and displays a desired image on the color filter substrate 6.
Is displayed on the top surface.

In FIG. 2, on the upper surface of the color filter substrate 6 (the lower surface in FIG. 1; the side surface facing the element substrate 5), a lattice-shaped light shielding layer 8 and a large number of spaces (pixels 9) surrounded by the light shielding layer 8 are formed. )When,
Is formed. The light shielding layer 8 is formed of a resin containing a light shielding material such as chromium or carbon black, and shields light transmitted through the liquid crystal LC. In each pixel 9, a color filter CF is formed as a thin film that transmits light of a specific wavelength. The color filter CF is, for example,
A red filter CFR that transmits red light, a green filter CFG that transmits green light,
A blue filter CFB that transmits blue light. The color filter CF is formed using the droplet discharge device of the present invention. That is, the color filter CF is formed by discharging droplets of each filter material into the corresponding pixels 9 and drying the droplets that have landed in each pixel 9.

Here, the upper surface (the lower surface in FIG. 1) of the color filter substrate 6 is referred to as an ejection surface 6a.
Next, a droplet discharge device for forming the color filter CF will be described. FIG.
FIG. 3 is an overall perspective view showing a droplet discharge device.

In FIG. 3, the droplet discharge device 10 includes a base 11 formed in a rectangular parallelepiped shape. A pair of guide grooves 12 extending along the longitudinal direction (Y direction) is formed on the upper surface of the base 11,
A substrate stage 13 is attached to the pair of guide grooves 12. The substrate stage 13 is connected to an output shaft of a stage motor provided on the base 11. The substrate stage 13 places the color filter substrate 6 with the discharge surface 6a facing upward, and positions and fixes the color filter substrate 6. The substrate stage 13 is scanned at a predetermined speed along the guide groove 12 when the stage motor rotates normally or reversely, and scans the color filter substrate 6 along the Y direction.

On the upper side of the base 11, a guide member 14 formed in a gate shape is installed along the X direction orthogonal to the Y direction. An ink tank 15 is disposed above the guide member 14.
The ink tank 15 stores a liquid material (filter ink Ik) containing a filter material, and derives the filter ink Ik at a predetermined pressure.

The guide member 14 is formed with a pair of upper and lower guide rails 16 extending in the X direction, and a carriage 17 is attached to the pair of upper and lower guide rails 16. The carriage 17 is connected to an output shaft of a carriage motor provided on the guide member 14. A plurality of droplet discharge heads 18 (hereinafter simply referred to as discharge heads 18) arranged in the X direction are mounted on the lower side of the carriage 17. The carriage 17 is scanned along the guide rail 16 when the carriage motor rotates forward or backward, and scans each ejection head 18 along the X direction.

4 is a view of the discharge head 18 as viewed from the lower side (substrate stage 13), and FIG.
It is AA sectional view taken on the line.
In FIG. 4, on the upper side (lower side in FIG. 3) of the ejection head 18, a nozzle plate 19
Is provided. A nozzle forming surface 19a parallel to the color filter substrate 6 is formed on the upper surface (the lower surface in FIG. 3) of the nozzle plate 19, and 180 nozzles penetrating in the normal direction of the nozzle forming surface 19a are formed in the nozzle forming surface 19a. Through holes (nozzles N) are arranged at equal intervals along the X direction. On the lower side of the discharge head 18 (upper side in FIG. 3), the head substrate 20
And an input terminal 20a is provided at one end of the head substrate 20. Various signals for driving the ejection head 18 are input to the input terminal 20a.

In FIG. 5, cavities 21 communicating with the ink tanks 15 are formed above the nozzles N, respectively. Each cavity 21 stores the filter ink Ik derived from the ink tank 15 and supplies it to the corresponding nozzle N. A diaphragm 22 that can vibrate in the vertical direction is attached to the upper side of each cavity 21 so that the volume of the corresponding cavity 21 can be enlarged and reduced. On the upper side of the diaphragm 22, piezoelectric elements PZ as actuators are disposed. Each piezoelectric element PZ contracts and expands in the vertical direction to vibrate the corresponding diaphragm 22 when a signal (driving waveform signal COM) for driving the piezoelectric element PZ is input.

Each cavity 21 has a corresponding nozzle N when the corresponding diaphragm 22 vibrates.
The filter meniscus is vibrated in the vertical direction, and the filter ink Ik having a predetermined weight corresponding to the drive waveform signal COM (drive voltage) is ejected as a droplet D from the corresponding nozzle N. The ejected droplet D flies along a substantially normal line of the color filter substrate 6 and lands on a position on the ejection surface 6a opposite to the nozzle N.

In FIG. 4, a droplet weight device 23 is disposed on the left side of the base 11. The droplet weight device 23 measures the weight (actual weight Iw) of the droplet D for each nozzle N, and a known weight measuring device can be used. The droplet weight device 23 includes, for example, a discharged droplet D
An electronic balance can be used which is received by a receiving pan and weighs the droplets D. Further, the droplet weight device 23 uses a piezoelectric vibrator having an electrode, and discharges the droplet D toward the electrode.
It is possible to use one that detects the actual weight Iw of the droplet D based on the resonance frequency of the piezoelectric vibrator that changes due to the landing of the.

Here, the average value of the actual weight Iw of each droplet D ejected from all the nozzles N in the row is referred to as an average actual weight Iwcen. In addition, the average actual weight Iwcen is calculated as Iwmax when the maximum actual weight Iw among the discharged droplets D is Iwmax and the minimum actual weight Iw is Iwmin.
It is defined by cen = (Iwmax + Iwmin) / 2. The average actual weight Iwcen is
It is defined for each of the plurality of ejection heads 18 mounted on the carriage 17.

Next, the electrical configuration of the droplet discharge device 10 will be described with reference to FIGS.
FIG. 6 is a block circuit diagram showing an electrical configuration of the droplet discharge device 10.
In FIG. 6, the control device 30 causes the droplet discharge device 10 to execute various processing operations. The control device 30 includes an external I / F 31, a control unit 32 including a CPU, and a DRA.
It has a RAM 33 which is composed of M and SRAM and stores various data, and a ROM 34 which stores various control programs. In addition, the control device 30 includes an oscillation circuit 35 that generates a clock signal, a drive waveform generation circuit 36 as a drive waveform signal generation unit that generates a drive waveform signal COM, and a weight device for driving the droplet weight device 23. A driving circuit 37, a motor driving circuit 38 for scanning the substrate stage 13 and the carriage 17, and an internal I / F 39 for transmitting various signals are included. The control device 30 is connected to the input / output device 40 via the external I / F 31. The control device 30 is connected to a plurality of head drive circuits 41 corresponding to the substrate stage 13, the carriage 17, the droplet weight device 23, and the ejection head 18 via an internal I / F 39.

The input / output device 40 is an external computer having, for example, a CPU, RAM, ROM, hard disk, liquid crystal display, and the like. The input / output device 40 outputs various control signals for driving the droplet discharge device 10 to the external I / F 31 according to a control program stored in the ROM or the hard disk. The external I / F 31 receives drawing data I from the input / output device 40.
p, reference drive voltage data Iv, head data Ih, and the like are received.

Here, the drawing data Ip is information on the position and film thickness of the color filter CF, the droplet D
Are various data for ejecting the droplet D to each pixel 9 on the ejection surface 6a, such as information on the ejection position and information on the scanning speed of the substrate stage 13.

The reference drive voltage data Iv is data relating to a drive voltage (reference drive voltage Vh0) for calibrating the average actual weight Iwcen to a predetermined weight (reference weight). The reference drive voltage data Iv is defined for each ejection head 18 because the average actual weight Iwcen of each ejection head 18 is different. That is, the reference drive voltage data Iv is the discharge head 18.
This is data for calibrating the average actual weight Iwcen of the reference weight to a common reference weight.

The head data Ih is data in which each of the nozzles N (piezoelectric elements PZ) is classified into seven “ranks”, and is data in which each of the nozzles N is associated with a rank based on the weight of the droplet D. . In the head data Ih, for example, as shown in FIG. 7, the rank “1” is set for the nozzle N where the actual weight Iw of the discharged droplet D satisfies Iwcen × 1.020> Iw ≧ Iwcen × 1.015. Has been. In the head data Ih, the actual weight Iw of the discharged droplet D
Rank “2” is set for the nozzle N satisfying Iwcen × 1.015> Iw ≧ Iwcen × 1010, and the actual weight Iw of the discharged droplet D is Iwcen × 1.010> Iw ≧ I
A rank “3” is set for the nozzle N satisfying wcen × 1.005. In the head data Ih, the actual weight Iw of the discharged droplet D is Iwcen × 1.005> Iw ≧ Iwc
For a nozzle N that satisfies en × 0.995, a rank “4” is set, and the actual weight Iw of the discharged droplet D satisfies Iwcen × 0.995> Iw ≧ Iwcen × 0.990.
On the other hand, rank “5” is set. In the head data Ih, the rank “6” is set for the nozzle N where the actual weight Iw of the discharged droplet D satisfies Iwcen × 0.990> Iw ≧ Iwcen × 0.985, and the actual amount of the discharged droplet D Weight Iw is Iwcen × 0.985>
The rank “7” is set for the nozzle N that satisfies Iw ≧ Iwcen × 0.980.

In FIG. 6, a RAM 33 is used as a reception buffer 33a, an intermediate buffer 33b, and an output buffer 33c.
The ROM 34 stores various control routines executed by the control unit 32 and various data for executing the control routine. The ROM 34 stores, for example, gradation data for associating gradation with each dot, and rank data for associating the drive waveform signal COM corresponding to the rank with each nozzle N at that time.

Gradation data means that a single dot is formed by a plurality of droplets D, and pseudo gradations are expressed by two gradations, ie, whether or not the droplets D are ejected (that is, ejection / non-ejection). It is data for. As shown in FIG. 7, the rank data means that each rank (“1” to “7”) is divided into four different drive waveform signals COM (first drive waveform signal COMA, second drive waveform signal COMB, third This is data for associating with any one of seven types of combinations of the drive waveform signal COMC and the fourth drive waveform signal COMD. That is, the rank data is data for associating each nozzle N with a combination of drive waveform signals COM corresponding to the rank.

In FIG. 6, the oscillation circuit 35 generates a clock signal for synchronizing various data and various drive signals. The oscillation circuit 35 generates a transfer clock SCLK used at the time of serial transfer of various data, for example. The oscillation circuit 35 generates a latch signal (pattern data latch signal LATA and common selection data latch signal LATB) used in parallel conversion of various serially transferred data. The oscillation circuit 35 generates a state switching signal CHA that defines the ejection timing of the droplet D and a common switching signal CHB that defines the switching timing of the drive waveform signal COM.

The drive waveform generation circuit 36 includes a waveform memory 36a, a latch circuit 36b, and a D / A converter 36c.
And an amplifier 36d. The waveform memory 36a stores waveform data for generating each drive waveform signal COM in association with a predetermined address. The latch circuit 36b latches the waveform data read from the waveform memory by the control unit 32 with a predetermined clock signal. The D / A converter 36c converts the waveform data latched by the latch circuit 36b into an analog signal, and the amplifier 3
6d amplifies the analog signal converted by the D / A converter 36c to simultaneously generate the drive waveform signal COM.

When the input / output device 40 receives the reference drive voltage data Iv, the control unit 32 reads the waveform data in the waveform memory 36a with reference to the reference drive voltage data Iv via the drive waveform generation circuit 36. Then, the control unit 32, via the drive waveform generation circuit 36, has four types of drive waveform signals COM (first drive waveform signal COMA, second drive waveform signal COMB,
The third drive waveform signal COMC and the fourth drive waveform signal COMD) are generated.

The control unit 32 is connected to the first to fourth drive waveform signals COMA, CO via the drive waveform generation circuit 36.
MB, COMC, and COMD are generated as signals having different drive voltages corresponding to the ranks “1” to “7”, respectively. For example, as illustrated in FIGS. 7 and 8, the control unit 32 sets the first drive waveform signal COMA to the drive voltage (first drive voltage Vha) corresponding to the nozzle N of rank “1”.
It generates as a signal consisting of The first drive voltage Vha is a voltage at a level lower than the reference drive voltage Vh0 (for example, Vha = Vh0 × 0.9825). As a result, the rank "
When the first drive waveform signal COMA is input to the corresponding piezoelectric element PZ, the nozzle N of “1” reduces the drive amount (expansion / contraction amount) of the corresponding piezoelectric element PZ by the first drive voltage Vha. The actual weight Iw of the droplet D is calibrated, and the actual weight Iw of the droplet D is set to the average actual weight Iwcen (reference weight).

Similarly, the control unit 32 outputs the second drive waveform signal COMB, the third drive waveform signal COMC, and the fourth drive waveform signal COMD through ranks “3” and “
5 ”, the drive voltage corresponding to the rank“ 7 ”(second drive voltage Vhb, third drive voltage Vhc, fourth
The drive voltage Vhd) is generated. The second drive voltage Vhb, the third drive voltage Vhc, and the fourth drive voltage Vhd are Vhb = Vh0 × 0.9925, Vhc = Vh0 × 1.075, V
hd = Vh0 × 1.175. The nozzles N of rank “3”, rank “5” and rank “7” are supplied to the corresponding piezoelectric element PZ by the second drive waveform signal COMB and the third drive waveform signal C, respectively.
When the OMC and the fourth drive waveform signal COMD are input, the actual weight Iw of the droplet D is calibrated by the drive voltage corresponding to the rank, and the actual weight Iw of the droplet D is set as the reference weight.

Further, when the nozzle N of rank “2” receives the first drive waveform signal COMA having a predetermined number of pulses and the second drive waveform signal COMB having a predetermined number of pulses, the corresponding piezoelectric element PZ receives the first drive waveform signal COMB. The droplet D corresponding to the first drive waveform signal COMA and the droplet D corresponding to the second drive waveform signal COMB are ejected, and the average value of the actual weight Iw of the droplet D is calibrated. The nozzle N of rank “2” uses the average value of the actual weights Iw of the discharged droplets D as a reference weight.

Similarly, when the nozzle N of rank “4” receives the second driving waveform signal COMB having a predetermined number of pulses and the third driving waveform signal COMC having a predetermined number of pulses, the second driving waveform signal COMC having a predetermined number of pulses is input to the corresponding piezoelectric element PZ. The droplet D corresponding to the drive waveform signal COMB and the droplet D corresponding to the third drive waveform signal COMC are ejected, and the average value of the actual weight Iw of the droplet D is calibrated. The nozzle N of rank “4” uses the average value of the actual weights Iw of the discharged droplets D as a reference weight. Rank “6”
The nozzle N of the second driving waveform signal COMC having a predetermined number of pulses is applied to the corresponding piezoelectric element PZ,
When the fourth drive waveform signal COMD having a predetermined number of pulses is input, the third drive waveform signal CO
The droplet D corresponding to MC and the droplet D corresponding to the fourth drive waveform signal COMD are ejected, and the average value of the actual weight Iw of the droplet D is calibrated. The nozzle N of rank “6” uses the average value of the actual weights Iw of the discharged droplets D as a reference weight.

Thereby, all the nozzles N (piezoelectric elements PZ) normalize the average value of the actual weights Iw of the respective droplets D to a common reference weight when the driving waveform signal COM corresponding to the rank is input. be able to.

Here, among the drive waveform signals COM combined for each rank, the drive waveform signal COM that is supplied prior to the piezoelectric element PZ is referred to as a previous drive waveform signal COMF, and the previous drive waveform supplied to the piezoelectric element PZ. Let the number of pulses of the signal COMF be the number of previous pulses. Further, among the drive waveform signals COM combined for each rank, the drive waveform signal COM supplied subsequent to the previous drive waveform signal COMF is set as the rear drive waveform signal COML, and the rear drive waveform supplied to the piezoelectric element PZ. Let the number of pulses of the signal COML be the number of post-pulses.

In FIG. 6, the control unit 32 outputs a drive control signal corresponding to the weight device drive circuit 37. The weight device drive circuit 37 responds to the drive control signal from the control unit 32, and receives the internal I / F 39.
Then, the droplet weight device 23 is driven.

The control unit 32 outputs a drive control signal corresponding to the motor drive circuit 38. The motor drive circuit 38 scans the substrate stage 13 and the carriage 17 via the internal I / F 39 in response to the drive control signal from the control unit 32.

The control unit 32 temporarily stores the drawing data Ip received by the external I / F 31 in the reception buffer 33a. The control unit 32 converts the drawing data Ip into an intermediate code and stores it as intermediate code data in the intermediate buffer 33b. The control unit 32 reads the intermediate code data from the intermediate buffer 33b, develops the dot pattern data with reference to the gradation data in the ROM 34, and stores the dot pattern data in the output buffer 33c.

The dot pattern data is data for associating dot gradations (drive pulse patterns) with the respective lattice points of the dot pattern lattice. The dot pattern data is a 2-bit value (“00”, “01”, “10”, or “11”) at each position (each grid point of the dot pattern grid) on the two-dimensional drawing plane (ejection surface 6a). ). The dot pattern grid is a grid with a minimum interval that defines the gradation of dots.

When the dot pattern data corresponding to one scan of the substrate stage 13 is developed, the control unit 32 generates serial data synchronized with the transfer clock SCLK using the dot pattern data, and via the internal I / F 39, The serial data is serially transferred to the head drive circuit 41. When the dot pattern data for one scan is serially transferred, the control unit 32 erases the contents of the intermediate buffer 33b and executes the development process for the next intermediate code data.

Here, the serial data generated using the dot pattern data is referred to as serial pattern data SIA. The serial pattern data SIA is generated in units of a dot pattern grid along the scanning direction.

In FIG. 9, the serial pattern data SIA has a 2-bit value for selecting the dot gradation corresponding to the number of nozzles N (180). The serial pattern data SIA includes 180-bit high-order selection data SIH composed of high-order bits of 2-bit values for selecting dot gradations, and 180-bit low-order selection data SIL composed of low-order bits. And having. The serial pattern data SIA includes pattern data SP in addition to the upper selection data SIH and the lower selection data SIL.

The pattern data SP includes 8-bit data (each switch data Pnm (nm = 00 to 03) in each of four values defined by the upper selection data SIH and the lower selection data SIL.
, 10 to 13,..., 70 to 73). Each switch data Pnm (nm = 00-03, 10-13,..., 70-73) is data for defining ON / OFF of the piezoelectric element PZ.

In FIG. 10, the state switching signal CHA is a pulse signal generated at the ejection frequency of the droplet D. Here, the state defined for each pulse of the state switching signal CHA is expressed as “
It is called “state”. The state switching signal CHA has a plurality of states (for example, “0” to “7”) from when the preceding pattern data latch signal LATA is generated until the subsequent pattern data latch signal LATA is generated. Each state). In addition,
The period between the generation of the preceding pattern data latch signal LATA and the generation of the subsequent pattern data latch signal LATA corresponds to the period in which each nozzle N faces the unit cell of the dot pattern lattice. .

The control unit 32 associates each data of the pattern data SP (each switch data Pnm) with each state via the head drive circuit 41 according to the truth table shown in FIG.
For example, the control unit 32 sends the switch data P00 to the nozzle N (piezoelectric element PZ) whose upper selection data SIH is “0” and lower selection data SIL is “0” via the head drive circuit 41.
, P10,..., P70. The control unit 32 switches the switch data P00 and P10.
,..., P70 is associated with the states “0” to “7”, respectively. Then, the control unit 32 switches the switch data P00 to P70 set to “1” via the head drive circuit 41.
In this state, the drive waveform signal COM is supplied to the piezoelectric element PZ. For example, P00 to P60
Is “0” and P70 is “1”, the control unit 32 indicates that the state is “0” to “6”.
During this period, the piezoelectric element PZ is turned off, and the piezoelectric element PZ is turned on at the timing when the state becomes “7”.

Similarly, the control unit 32 determines that the upper selection data SIH and the lower selection data SIL are “01”.
, “10”, “11” are associated with switch data P01 to P71, P02 to P72, and P03 to P73, respectively, according to the truth table shown in FIG. The control unit 32 switches the switch data P01 to P71, P02 to P72, P03 to P73.
Is associated with each state of “0” to “7”. Then, the control unit 32 supplies the drive waveform signal COM to the corresponding piezoelectric element PZ through the head drive circuit 41 in a state where the switch data P01 to P71, P02 to P72, and P03 to P73 are “1”.

As a result, every time the serial pattern data SIA is generated, all the nozzles N each time the dot gradation (that is, the pattern of the drive pulse) selected by the corresponding upper selection data SIH and lower selection data SIL. ) For the corresponding lattice.

In FIG. 6, the control unit 32 temporarily stores the head data Ih received by the external I / F 31 in the reception buffer 33a. The control unit 32 converts the head data Ih into an intermediate code and stores it as intermediate code data in the intermediate buffer 33b. The control unit 32 reads the intermediate code data from the intermediate buffer 33b, expands it into common selection data with reference to the rank data in the ROM 34, and stores the common selection data in the output buffer 33c.

The common selection data is a 2-bit value ("") at each grid point of the dot pattern grid.
00 ”,“ 01 ”,“ 10 ”,“ 11 ”), and any one of the first to fourth drive waveform signals COMA, COMB, COMC, COMD for each of the four values. This is data for associating.

When the common selection data corresponding to one scan of the substrate stage 13 is obtained, the control unit 32 generates serial data synchronized with the transfer clock SCLK using the common selection data, and transmits the serial data via the internal I / F 39. Serial data is serially transferred to the head drive circuit 41. When serially transferring the common selection data for one scan, the control unit 32 erases the contents of the intermediate buffer and executes the expansion process for the next intermediate code data.

Here, the serial data generated using the common selection data is referred to as serial common selection data SIB. The serial common selection data SIB is the serial pattern data S
As with IA, the dot pattern is generated in units of a lattice along the scanning direction.

In FIG. 11, serial common selection data SIB includes front serial common selection data SFB for defining the type of the previous drive waveform signal COMF, and rear serial common selection data SLB for defining the type of the rear drive waveform signal COML. It consists of.

The previous serial common selection data SFB is a 180-bit previous upper selection data SFH composed of upper bits of a 2-bit value defining the type of the previous drive waveform signal COMF and a 180-bit composed of lower bits. Pre-lower selection data SFL. The previous serial common selection data SFB has 32-bit control data CR in addition to the previous upper selection data SFH and the previous lower selection data SFL.

The front upper selection data SFH and the front lower selection data SFL are data for associating each nozzle N (piezoelectric element PZ) with the type of the drive waveform signal COM according to the truth table shown in FIG.

The control unit 32 uses the front upper selection data SFH and the front lower selection data SFL via the head drive circuit 41 and uses the 180 nozzles N (piezoelectric elements P) according to the truth table shown in FIG.
Z) is associated with the type of the drive waveform signal COM. For example, the control unit 32 uses the head drive circuit 41 to set the preceding upper selection data SFH to “0” and the preceding lower selection data SFL to “0”.
The first drive waveform signal COMA is associated with each of the nozzles N (piezoelectric elements PZ) of the “.” The control unit 32 sets the preceding upper selection data SFH and the preceding lower selection data SFL to “01”, “10”, “
The 11 ″ nozzle N (piezoelectric element PZ) is associated with the second drive waveform signal COMB, the third drive waveform signal COMC, and the fourth drive waveform signal COMD, respectively.

The control data CR includes data for driving a temperature detection circuit provided in the head drive circuit 41. The control data CR has 1-bit latch selection data AD.
The latch selection data AD is data for causing each latch to select whether or not to latch the previous upper selection data SFH and the previous lower selection data SFL according to the value of each bit (“1” or “0”). is there. When the latch selection data AD is “0”, the control unit 32 causes the latch for the previous drive waveform signal COMF to latch the previous upper selection data SFH and the previous lower selection data SFL via the head drive circuit 41.

The rear serial common selection data SLB is a 180-bit rear upper selection data SLH composed of upper bits of a 2-bit value that defines the type of the rear drive waveform signal COML, and a 180-bit rear bit selection data SLH. And rear lower selection data SLL. The rear serial common selection data SLB includes 32-bit dummy data DM in addition to the rear upper selection data SLH and the rear lower selection data SLL.

The rear upper selection data SLH and the rear lower selection data SLL are data for associating the type of the drive waveform signal COM with each nozzle N (piezoelectric element PZ) according to the truth table shown in FIG. The control unit 32 drives each of the 180 nozzles N (piezoelectric elements PZ) via the head driving circuit 41 according to the rear upper selection data SLH and the rear lower selection data SLL and the truth table shown in FIG. Corresponds to the type of signal COM. For example, the control unit 32 sends the first drive waveform signal COMA to the nozzle N (piezoelectric element PZ) whose rear upper selection data SLH is “0” and rear lower selection data SLL is “0” via the head drive circuit 41. Make it correspond.
In the control unit 32, the rear upper selection data SLH and the rear lower selection data SLL are “01”, “10”.
, “11” nozzle N (piezoelectric element PZ) is associated with the second drive waveform signal COMB, the third drive waveform signal COMC, and the fourth drive waveform signal COMD, respectively.

A state in which the drive waveform signal COM supplied to each piezoelectric element PZ is selected based on the previous upper selection data SFH and the previous lower selection data SFL is referred to as pre-selection. Also. Each piezoelectric element P
The drive waveform signal COM supplied to Z is the rear upper selection data SLH and the rear lower selection data SLL.
The state selected on the basis of is called pre-selection.

The dummy data DM is data for transferring the corresponding post serial common selection data SLB by the same transfer clock SCLK as the serial pattern data SIA. The dummy data DM includes the latch selection data AD in addition to invalid data. When the bit value of the latch selection data AD is “1” via the head driving circuit 41, the control unit 32 adds the rear upper selection data SLH and the rear lower selection data S to the latch for the rear driving waveform signal COML.
LL is latched.

In FIG. 13, a common switching signal CHB is a signal for switching the selection state (common selection state: “F” or “L”) of the drive waveform signal COM supplied to each piezoelectric element PZ. That is, the common switching signal CHB is pre-selected (the common selection state is “F”).
And a post-selection (a state where the common selection state is “L”).

The common selection state is switched to “F” (previous selection) or “L” (rear selection) in synchronization with the rise of the common switching signal CHB. The common selection state is set to the “F” state (previous selection) when the pattern data latch signal LATA is “H” level (high potential level) and the common switching signal CHB is “L” level. It is initialized. In the common selection state, the pattern data latch signal LATA is “H” level, and
When the common switching signal CHB is at “H” level, it is set to “L” state (post-selection).

Next, the head drive circuit 41 will be described below.
In FIG. 14, a head drive circuit 41 includes an output control signal generation circuit 50 as output control signal generation means, and a common selection control signal generation circuit 60 as common selection control signal generation means.
And having. The head drive circuit 41 includes an output synthesis circuit 70 (first to fourth common output synthesis circuits 70A, 70B, 70C, and 70D) and a level shifter that boosts a logic signal to a drive voltage level of an analog switch. 71 (first to fourth common level shifters 71A, 71B, 71C, 71D). The head drive circuit 41 includes four switch circuits 72 (first to fourth common switch circuits 72A, 72B, 72C, and 72D) that include analog switches for supplying each drive waveform signal COM to the piezoelectric element PZ. ). The output synthesizing circuit 70, the level shifter 71, and the switch circuit 72 constitute output means.

First, the output control signal generation circuit 50 for generating the output control signal PI will be described below.
In FIG. 15, the output control signal generation circuit 50 includes a shift register 51, a latch 52, a state counter 53, a selector 54, and a pattern data synthesis circuit 55.

The shift register 51 includes a pattern data register 51A and a lower selection data register 5
1B and upper selection data register 51C, and serial pattern data SIA and transfer clock SCLK are input from control device 30.

In the pattern data register 51A, the pattern data SP of the serial pattern data SIA is serially transferred, and sequentially shifted by the transfer clock SCLK to store the 32-bit pattern data SP. The lower selection data register 51B serially transfers the lower selection data SIL out of the serial pattern data SIA, and sequentially shifts by the transfer clock SCLK to store 180-bit lower selection data SIL. The upper selection data register 51C serially transfers the upper selection data SIH out of the serial pattern data SIA, and sequentially shifts by the transfer clock SCLK to store 180-bit upper selection data SIH.

The latch 52 includes a pattern data latch 52A, a lower selection data latch 52B, and an upper selection data latch 52C, and the pattern data latch signal LA from the control device 30.
TA is input.

When the pattern data latch signal LATA is input, the pattern data latch 52A latches the data in the pattern data register 51A, that is, the pattern data SP. When the pattern data latch signal LATA is input, the lower selection data latch 52B latches the data of the lower selection data register 51B, that is, the lower selection data SIL. When the pattern data latch signal LATA is input, the upper selection data latch 52C latches the data of the upper selection data register 51C, that is, the upper selection data SIH.

The state counter 53 is a 3-bit counter circuit and includes a state switching signal CHA.
The state is changed by counting at the rising edge of. State counter 53
After counting the state from “0” to “7”, the state is returned to “0” by inputting the state switching signal CHA. The state counter 53 is reset when the LATA signal becomes “H” level (high potential level), and returns the state to “0”. When the state switching signal CHA and the pattern data latch signal LATA are input from the control device 30, the state counter 53 counts the state value and outputs it to the selector 54.

The selector 54 selects switch data Pn0 to Pn3 corresponding to the state value from time to time based on the state value output by the state counter 53 and the pattern data SP latched by the pattern data latch 52A. Selected switch data Pn0-P
n3 is output to the pattern data synthesis circuit 55. That is, when the pattern data latch signal LATA is input to the pattern data latch 52A, the selector 54 reads the pattern data SP latched by the pattern data latch 52A, and follows the state value “ The switch data Pn0 to Pn3 corresponding to “n” are selected. For example, when the state of the state counter 53 is “0”, the selector 54 sets the state “0”.
The pattern data SP corresponding to the above, that is, the switch data P00 to P03 shown in FIG.

The pattern data synthesis circuit 55 receives the switch data Pn0 to Pn3 from the selector 54, and reads the lower selection data SIL latched by the lower selection data latch 52B and the upper selection data SIH latched by the upper selection data latch 52C. . The pattern data synthesizing circuit 55 uses the switch data Pn0 to Pn3, the lower selection data SIL, and the upper selection data SIH and discharges droplets to 180 nozzles N according to the truth table shown in FIG. 180-bit data (output control signal PI) defining non-ejection (value of each bit: “0” or “1”) is generated for each state.

As shown in FIG. 15, the pattern data synthesis circuit 55 includes, for example, four AND gates 55a, 55b, 55c, and 55d corresponding to one nozzle N, and these AND gates 55.
and an OR gate 55e to which outputs of a, 55b, 55c and 55d are inputted. Upper AND selection data SIH, lower selection data SIL, and corresponding switch data Pn0 to Pn3 are input to AND gates 55a, 55b, 55c, and 55d, respectively.
When the upper selection data SIH and the lower selection data SIL are “00”, the AND gate 55
Only a is valid, and the switch data Pn0 (“0” or “1”) is output as the output control signal PI of the corresponding nozzle N. When the upper selection data SIH and the lower selection data SIL are “01”, “10”, and “00”, AND gates 55b and 55, respectively.
Only c and 55d are valid, and switch data Pn1, Pn2, and Pn3 (“0” or “1”) are output as the output control signal PI of the corresponding nozzle N. As a result, FIG.
Switch data Pnm corresponding to the truth table shown in 0 is output as the output control signal PI.

Next, the common selection control signal generation circuit 60 for generating the common selection control signals PXA, PXB, PXC, and PXD will be described below.
In FIG. 16, the common selection control signal generation circuit 60 includes a shift register 61, a latch 62, a common selection state generation circuit 63, and a common selection data decoding circuit 64.

The shift register 61 includes a control data register 61A and a lower selection data register 61B.
And the upper selection data register 61C, and the serial common selection data SIB and the transfer clock SCLK are input from the control device 30.

The control data register 61A is a control data C in the serial common selection data SIB.
R is serially transferred and sequentially shifted by the transfer clock SCLK to store 32-bit control data CR. Alternatively, in the control data register 61A, the dummy data DM of the serial common selection data SIB is serially transferred, and sequentially shifted by the transfer clock SCLK to store 32-bit dummy data DM.

Lower selection data register 61B serially transfers lower selection data SXL (front lower selection data SFL or rear lower selection data SLL) of serial common selection data SIB, and sequentially shifts by transfer clock SCLK to select 180 bits of lower selection. Data S
Store XL. The upper selection data register 61C includes upper selection data SXH (previous upper selection data SFH or rear higher selection data SLH among serial common selection data SIB).
) Are serially transferred, and sequentially shifted by the transfer clock SCLK to store 180-bit higher-order selection data SXH.

The latch 62 includes a control data latch 62A, a front lower selection data latch 62B, a front upper selection data latch 62C, a rear lower selection data latch 62D, and a rear upper selection data latch 62E. The common selection data latch signal LATB and the latch selection data AD are input.

When the common selection data latch signal LATB is input, the control data latch 62A latches the data in the control data register 61A, that is, the control data CR or the dummy data DM, and the latched data is transferred to a predetermined control circuit (for example, Output to temperature detection circuit).

When the common selection data latch signal LATB is input, the preceding lower selection data latch 62B reads the latch selection data AD stored in the control data register 61A. When the latch selection data AD is “0”, the lower selection data AD The data in the register 61B, that is, the front / lower selection data SFL is latched. Further, when the common selection data latch signal LATB is input, the preceding upper selection data latch 62C reads the latch selection data AD stored in the control data register 61A, and when the latch selection data AD is “1”, the upper selection data latch 62C The data of the selection data register 61C, that is, the front / lower selection data SFL is latched.

The rear lower selection data latch 62D reads the latch selection data AD stored in the control data register 61A when the common selection data latch signal LATB is input. When the latch selection data AD is “1”, the lower selection data AD The data of the register 61B, that is, the rear lower selection data SLL is latched. Further, when the common selection data latch signal LATB is input, the rear upper selection data latch 62E reads the latch selection data AD stored in the control data register 61A, and when the latch selection data AD is “0”, The data of the selection data register 61C, that is, the rear lower selection data SLL is latched.

The common selection state generation circuit 63 is a 1-bit counter circuit, and counts at the rising edge of the common switching signal CHB. As shown in FIG. 13, the common selection state generation circuit 63 generates the state of the common switching signal CHB and the pattern data latch signal L.
Depending on the ATA state, select the common selection state as “F” (previous selection) or “L” (rear selection)
And a signal related to the common selection state is output to the common selection data decoding circuit 64.

When the common selection state is “F”, the common selection data decoding circuit 64 has the front lower selection data SFL latched by the front lower selection data latch 62B, the front upper selection data SFH latched by the front upper selection data latch 62C, Is read. The common selection data decoding circuit 64 uses the previous lower selection data SFL and the previous upper selection data SFH and determines whether to use each of the four different drive waveform signals COM according to the truth table shown in FIG. Selection). The common selection data decoding circuit 64 generates data defining selection / non-selection of each drive waveform signal COM for each of the 180 nozzles N.

When the common selection state is “L”, the common selection data decoding circuit 64 latches the lower lower selection data SLL latched by the lower lower selection data latch 62D and the upper selection data SLH latched by the rear upper selection data latch 62E. And read. The common selection data decoding circuit 64 uses the rear lower selection data SLL and the rear upper selection data SLH, and FIG.
Whether to use each of four different drive waveform signals COM (selected / non-selected) is defined in accordance with the truth table shown in FIG. The common selection data decoding circuit 64 generates data defining selection / non-selection of each drive waveform signal COM for each of the 180 nozzles N.

That is, the common selection data decoding circuit 64 is configured so that the common selection state is “F”.
Data defining any one of the previous drive waveform signals COMF is generated for each of the 180 nozzles N. The common selection data decoding circuit 64 generates data defining any one of the post drive waveform signals COML for each of the 180 nozzles N while the common selection state is “L”.

Here, the data defining the selection / non-selection of the first drive waveform signal COMA is referred to as a first common selection control signal PXA. Further, the second drive waveform signal COMB, the third drive waveform signal C
Data that defines the selection / non-selection of the OMC and the fourth drive waveform signal COMD are referred to as a second common selection control signal PXB, a third common selection control signal PXC, and a fourth common selection control signal PXD, respectively.

In FIG. 14, the output synthesis circuit 70 includes a first common output synthesis circuit 70A, a second common output synthesis circuit 70B, a third common output synthesis circuit 70C, and a fourth common output synthesis circuit 70.
D. A 180-bit output control signal PI is commonly input from the output control signal generation circuit 50 to each of the output synthesis circuits 70A, 70B, 70C, and 70D. In addition, the output synthesis circuits 70A, 70B, 70C, and 70D respectively include a first common selection control signal PXA, a second common selection control signal PXB, a third common selection control signal PXC, and a first common selection control signal PXC from the common selection control signal generation circuit 60. A 4-common selection control signal PXD is input.

The first to fourth common output combining circuits 70A, 70B, 70C, and 70D are configured by AND gates corresponding to one nozzle N, respectively. Each A of the first common output synthesis circuit 70A
A corresponding output control signal PI and a corresponding first common selection control signal PXA are input to the ND gates. Whether each AND gate of the first common output synthesis circuit 70A supplies the first drive waveform signal COMA to the corresponding piezoelectric element PZ (supply / non-supply).
Is output (first selected common output control signal CPA). Each AND gate of the second common output synthesis circuit 70B has a corresponding output control signal PI and a corresponding second.
The common selection control signal PXB is input. Each AND of the second common output synthesis circuit 70B
The gate outputs a signal (second selection common output control signal CPB) defining supply / non-supply of the second drive waveform signal COMB to the corresponding piezoelectric element PZ. A corresponding output control signal PI and a corresponding third common selection control signal PXC are input to each AND gate of the third common output combining circuit 70C. Each AN of the third common output synthesis circuit 70C
The D gates output a signal (third selection common output control signal CPC) defining supply / non-supply of the third drive waveform signal COMC to the corresponding piezoelectric element PZ. The corresponding output control signal PI and the corresponding fourth common selection control signal PXD are input to each AND gate of the fourth common output synthesis circuit 70D. Fourth common output synthesis circuit 70D
Each of the AND gates outputs a signal (third selection common output control signal CPC) defining supply / non-supply of the fourth drive waveform signal COMD to the corresponding piezoelectric element PZ.

In the first common output combining circuit 70A, for example, the output control signal PI is “1”, and
When the first common selection control signal PXA is “1”, the first selection common output control signal CPA (the signal whose bit value is “1”) for supplying the first drive waveform signal COMA to the corresponding piezoelectric element PZ is used. Output. Conversely, in the first common output synthesis circuit 70A, the output control signal PI is “0”,
Alternatively, when the first common selection control signal PXA is “0”, the first selection common output control signal CPA (the signal whose bit value is “0”) for not supplying the first drive waveform signal COMA to the piezoelectric element PZ. ) Is output.

As a result, each of the 180 nozzles N (piezoelectric elements PZ) determines whether or not the droplet D is ejected or not based on the output control signal PI, and the first to fourth common selection control signals PXA and PXB.
, PXC, and PXD determine the supply / non-supply of each drive waveform signal COM.

The level shifter 71 has first to fourth drive waveform signals COMA, COMB, COMC, COM.
There are four D level shifters (first common level shifter 71A, second common level shifter 71B, third common level shifter 71C, and fourth common level shifter 71D). The first to fourth common level shifters 71A, 71B, 71C, 71D are supplied from the corresponding output synthesis circuit 70 to the first to fourth selected common output control signals CPA, CPB, CP, respectively.
C and CPD are input. First to fourth common level shifters 71A, 71B, 71C, 7
1D boosts the first to fourth selected common output control signals CPA, CPB, CPC, and CPD to the drive voltage level of the analog switch, and outputs open / close signals corresponding to the 180 piezoelectric elements PZ.

The switch circuit 72 has first to fourth drive waveform signals COMA, COMB, COMC, COM.
4 D switch circuits (first common switch circuit 72A, second common switch circuit 72B, third common switch circuit 72C, and fourth common switch circuit 72D). The first to fourth common switch circuits 72A, 72B, 72C, and 72D each have 180 analog switches corresponding to the piezoelectric elements PZ. Open / close signals are input from the corresponding level shifters 71 to the first to fourth common switch circuits 72A, 72B, 72C, 72D, respectively. Corresponding drive waveform signals COM are input to the input terminals of the four analog switches, and corresponding piezoelectric elements PZ are commonly connected to the output terminals of the four analog switches. Each analog switch receives an open / close signal from the corresponding level shifter 71, and outputs a drive waveform signal COM corresponding to the corresponding piezoelectric element PZ when the open / close signal is at "H" level.

Accordingly, each of the 180 nozzles N (piezoelectric elements PZ) is selected from the first to fourth selected common output control signals CPA, C when the ejection operation of the droplet D is selected by the output control signal PI.
The first to fourth drive waveform signals COMA, COMB, COMC, PB, CPC, CPD
Any one of COMD is supplied. That is, 180 nozzles N (piezoelectric elements PZ
) Is supplied with the drive waveform signal COM corresponding to the rank when the discharge operation of the droplet D is selected.

Next, a method for driving the droplet discharge head 18 mounted on the droplet discharge device 10 will be described below. FIG. 18 is a timing chart for explaining the drive waveform signal COM supplied to each piezoelectric element PZ.

First, as shown in FIG. 3, the color filter substrate 6 is placed on the substrate stage 13 with its discharge surface 6a facing upward. At this time, the substrate stage 13 arranges the color filter substrate 6 in the anti-Y arrow direction of the carriage 17. From this state, the input / output device 40 inputs drawing data Ip, reference drive voltage data Iv, and head data Ih to the control device 30.
The reference drive voltage data Iv and the head data Ih are respectively generated based on the actual weight Iw of each droplet D measured by the droplet weight device 23.

This head data Ih is the nozzle N (first piezoelectric element PZ1) positioned in the most X direction.
Is classified into a rank of “1”, the tenth nozzle N (tenth piezoelectric element PZ10) counted from the X arrow direction is classified into a rank of “6”, and the 20th nozzle N (counted from the X arrow direction) Second
0 piezoelectric element PZ20) is classified into a rank of “4”.

The first piezoelectric element PZ1, the tenth piezoelectric element PZ10, and the twentieth piezoelectric element PZ.
Reference numeral 20 denotes an average value of the actual weights Iw of the ejected droplets D when the ratio between the number of previous pulses of the previous drive waveform signal COMF and the number of subsequent pulses of the rear drive waveform signal COML is 1: 1. It becomes weight.

The control device 30 scans the carriage 17 via the motor drive circuit 38 and moves the carriage 17 so that each ejection head 18 passes over the color filter substrate 6 when the color filter substrate 6 is scanned in the Y arrow direction. Deploy. When the carriage 17 is arranged, the control device 30 starts scanning the substrate stage 13 via the motor drive circuit 38.

The control device 30 expands the head data Ih input from the input / output device 40 into common selection data. When the control device 30 expands the common selection data corresponding to one scan of the substrate stage 13, as shown in FIG. 18, the control device 30 generates the serial common selection data SIB using the common selection data, and the serial common selection data SIB. Are serially transferred to the head drive circuit 41 in synchronization with the transfer clock SCLK.

At this time, the control device 30 controls the previous serial common selection data SFB (previous upper selection data SF
H, the previous lower selection data SFL, and the control data CR) are transferred in advance, and then the rear serial common selection data SLB (the rear upper selection data SLH, the rear lower selection data SLL, and the dummy data DM) are transferred. . The latch selection data AD included in the control data CR
Is set to “0”, and the latch selection data AD included in the dummy data DM is set to “1”.

The control device 30 outputs a latch signal LATB for common selection data to the head driving circuit 41, and causes the head driving circuit 41 to sequentially latch the front serial common selection data SFB and the rear serial common selection data SLB. That is, the head drive circuit 41 reads the latch selection data AD (“0”) included in the control data CR of the previous serial common selection data SFB, and converts the previous upper selection data SFH and the previous lower selection data SFL to the previous upper selection data. The latch 62C and the preceding and lower selection data latch 62B are latched. Further, the head drive circuit 4
1 reads the latch selection data AD (“1”) included in the dummy data DM of the rear serial common selection data SLB, and converts the rear upper selection data SLH and the rear lower selection data SLL into the rear upper selection data latch 62E and the rear lower The selected data latch 62D is latched.

Next, the control device 30 develops the drawing data Ip input from the input / output device 40 into dot pattern data. When developing the dot pattern data corresponding to one scan of the substrate stage 13, the control device 30 generates the serial pattern data SIA using the dot pattern data and transfers the serial pattern data SIA as shown in FIG. The data is serially transferred to the head drive circuit 41 in synchronization with the clock SCLK.

When the substrate stage 13 reaches a predetermined drawing start position, the control device 30 outputs a pattern data latch signal LATA to the head drive circuit 41 as shown in FIG. (Upper selection data SIH, lower selection data SIL, and pattern data SP) are latched.

When the control device 30 outputs the pattern data latch signal LATA to latch the serial pattern data SIA, the control device 30 sequentially outputs the state switching signal CHA to the head drive circuit 41 to change the state from “0” to “1”, “2”. ”,“ 3 ”,“ 4 ”,... In addition, the control device 30 refers to the reference drive voltage data Iv and sends four types of drive waveform signals COM (first drive waveform signal COMA, second drive waveform signal COMB,
The third drive waveform signal COMC and the fourth drive waveform signal COMD) are generated. The control device 30 synchronizes the first to fourth drive waveform signals COMA, COMB, COMC, COMD with the pattern data latch signal LATA and the state switching signal CHA, respectively, and the head drive circuit 4.
1 for each state.

Further, when the head driving circuit 41 latches the serial pattern data SIA, the head driving circuit 41 associates each data of the pattern data SP with each state in accordance with the upper selection data SIH and the lower selection data SIL and the truth table shown in FIG. , Discharge / non-discharge in each state is defined for each of the 180 nozzles N (piezoelectric element PZ). For example, as shown in FIG. 18, the first piezoelectric element PZ1, the tenth piezoelectric element PZ10, and the twentieth piezoelectric element PZ20 have liquid in each state of “1”, “3”, “5”, “7”. The ejection operation of the droplet D is selected.

At this time, the control device 30 counts the number of pulses of the state switching signal CHA, and sets the common switching signal CHB to the “L” state while the state shifts from “0” to “3”. Since the common switching signal CHB is in the “L” state, the head drive circuit 41 initializes the common selection state to “F” (previous selection) at the timing when the pattern data latch signal LATA is input. Then, the head drive circuit 41, based on the previous selection, the previous upper selection data SFH latched by the previous upper selection data latch 62C and the previous lower selection data latch 62B.
And the first and lower selection data SFL latched by the first and second data according to the truth table shown in FIG.
To generate fourth common selection control signals PXA, PXB, PXC, and PXD.

For example, in the case of the first piezoelectric element PZ1, the front upper selection data SFH and the front lower selection data S
FL is set to “00”. The head drive circuit 41 uses the previous upper selection data SFH.
And the first lower order selection data SFL (“00”), the first value is shown according to the truth table shown in FIG.
First to fourth common selection control signals PXA, PXB, PXC, and PXD are generated that select the drive waveform signal COMA and deselect other drive waveform signals COM. As a result, the first drive waveform signal C is applied to the first piezoelectric element PZ1 in the states “1” and “3” where the ejection operation is selected.
OMA is supplied. That is, the rank “1” is applied to the first piezoelectric element PZ1 of rank “1”.
A pre-drive waveform signal COMF corresponding to is supplied.

Similarly, in the case of the tenth piezoelectric element PZ10, the previous upper selection data SFH and the previous lower selection data SFL are set to “10”. The head drive circuit 41 sends the previous upper selection data S
First to fourth common selection control signals PXA and PX that use FH and previous / lower selection data SFL (“10”), select third drive waveform signal COMC, and deselect other drive waveform signals COM.
B, PXC, and PXD are generated. Thus, the third drive waveform signal COMC is supplied to the tenth piezoelectric element PZ10 in the states “1” and “3” in which the ejection operation is selected. That is, the previous drive waveform signal COMF corresponding to the rank “6” is supplied to the tenth piezoelectric element PZ10 of the rank “6”.

In the case of the twentieth piezoelectric element PZ20, the previous upper selection data SFH and the previous lower selection data SFL are set to “01”. The head drive circuit 41 uses the previous upper selection data SF.
The second drive waveform signal COMB is selected using H and the previous and lower selection data SFL (“01”).
First to fourth common selection control signals PXA and PXB for selecting other drive waveform signals COM.
, PXC, PXD. Thus, the second drive waveform signal COMB is supplied to the twentieth piezoelectric element PZ20 in the states “1” and “3” in which the ejection operation is selected. That is, the previous drive waveform signal COMF corresponding to the rank “4” is supplied to the twentieth piezoelectric element PZ20 of the rank “4”.

Next, the control device 30 outputs the common switching signal CHB at the timing when the state shifts to “4”. The head drive circuit 41 switches the common selection state from “F” (previous selection) to “L” (rear selection) in response to the rising edge of the common switching signal CHB. Then, the head drive circuit 41 uses the upper higher selection data SLH latched by the rear higher selection data latch 62E and the lower lower selection data SLL latched by the rear lower selection data latch 62D based on the subsequent selection. In accordance with the truth table shown in FIG. 12, the first to fourth common selection control signals PX
A, PXB, PXC, and PXD are generated.

Thereby, the first drive waveform signal COMA is supplied to the first piezoelectric element PZ1 in the states “5” and “7” in which the ejection operation is selected. That is, the post-drive waveform signal COML corresponding to the rank “1” is supplied to the first piezoelectric element PZ1 of the rank “1”. Similarly,
The tenth piezoelectric element PZ10 is supplied with the fourth drive waveform signal COMD in the states “5” and “7” in which the ejection operation is selected. That is, the tenth piezoelectric element PZ1 of rank “6”
0 is supplied with the post drive waveform signal COML corresponding to the rank “6”. The twentieth piezoelectric element PZ20 is supplied with the third drive waveform signal COMC in the states “5” and “7” in which the ejection operation is selected. That is, the 20th piezoelectric element PZ20 of rank “4”
The post drive waveform signal COML corresponding to the rank “4” is supplied.

Thereafter, similarly, the control device 30 counts the number of pulses of the state switching signal CHA,
The common switching signal CHB is output at the timing when the state again shifts to “4”. The head drive circuit 41 switches the common selection state in response to the rising edge of the common switching signal CHB. Thus, every time the state transitions to “4”, “5”, “7”, “1”
, “3”, and “5”, “7”, “1”, “3”
The post-selection discharge operation in each state is repeated. That is, the first piezoelectric element P
Z1, the tenth piezoelectric element PZ10, and the twentieth piezoelectric element PZ20 each have a ratio of the number of front pulses to the number of rear pulses of 1: 1, and the average value of the actual weights Iw of the ejected droplets D is the reference weight. To.

Next, effects of the present embodiment configured as described above will be described below.
(1) According to the embodiment described above, the ranks “1” to “7” corresponding to the weight of the droplet D to be ejected to each of the plurality of nozzles N are associated. Further, a plurality of different drive waveform signals COM (first drive waveform signal COMA, second drive) corresponding to the nozzles N of the respective ranks are set so that the actual weight Iw of the droplet D to be ejected becomes a predetermined reference weight defined in advance. The waveform signal COMB, the third drive waveform signal COMC, and the fourth drive waveform signal COMD) are generated in combination. A plurality of drive waveform signals COM corresponding to the ranks of the selected nozzles N are supplied to the piezoelectric elements PZ selected based on the drawing data, and a reference weight is applied from the selected nozzles N toward the ejection surface. Droplet D was discharged.

Therefore, the nozzle N selected based on the drawing data Ip receives a plurality of drive waveform signals COM corresponding to the set rank, and sets the average weight of the ejected droplets D to a predetermined reference weight. As a result, each of the plurality of nozzles N normalizes the average weight of the ejected droplets D to a predetermined reference weight by a combination of the drive waveform signals COM generated for each rank. Therefore, the total weight of the droplets D ejected on the ejection surface 6a can be calibrated for each nozzle N, and the film thickness uniformity of the color filter CF can be improved.

(2) In addition, compared to the case where the droplet D is ejected using only one type of drive waveform signal COM, the accuracy can be improved when adjusting the average weight by combining different drive waveform signals COM. And the degree of freedom can be expanded.

(3) According to the above embodiment, the previous drive waveform signal COMF is output by the number of previous pulses in the pre-selection, and the rear drive waveform signal COML is output by the number of subsequent pulses in the post-selection. Therefore, compared with the case where the average weight of the droplet D is calibrated to the reference weight by the drive waveform signal COM of the single pulse, the average weight is set to the reference weight with higher accuracy by the number of the previous pulses and the number of the rear pulses. Can be calibrated.

(4) According to the above embodiment, before generating the pattern data (serial pattern data SIA), the common selection data (serial common selection data SIB) is generated, and 180
The front drive waveform signal COMF and the rear drive waveform signal C corresponding to the ranks for all the nozzles N
Associated with OML. The common first to fourth common selection control signals PXA and PXB
, PXC, and PXD were used to execute the discharge operation in each state. Accordingly, it is possible to associate the combination of the drive waveform signals COM with all the nozzles N only once, and then repeat the discharge operation of the droplets D. That is, a single nozzle can be associated with a combination of drive waveform signals COM that is common to each state, and all nozzles N that eject droplets D can be associated.
Are more reliably driven by the drive waveform signal COM corresponding to the rank.

(5) In the above embodiment, the droplet weight device 2 that measures the weight of the droplet D on the droplet discharge device 10.
3 was installed. Therefore, the weight of the droplet can be measured in the droplet discharge environment, and a more accurate actual weight Iw can be obtained as compared with the case where the weight of the droplet is separately measured by an external device. As a result, the actual weight Iw of the droplet D can be normalized more accurately with the reference weight.

In addition, you may change the said embodiment as follows.
In the above-described embodiment, the control device 30 transfers only the serial common selection data SIB in advance, and sends to the common selection control signal generation circuit 60 the previous upper selection data SFH, the previous lower selection data SFL, and the rear higher selection data SLH. , Rear lower selection data SLL is stored. Each time the head drive circuit 41 latches the serial pattern data SIA and generates the output control signal PI, the preceding upper selection data SFH, the previous lower selection data SFL, the rear upper selection data SLH, the rear lower selection stored in advance. Using selection data SLL,
The fourth common selection control signals PXA, PXB, PXC, and PXD are generated.

For example, every time the control device 30 transfers the serial pattern data SIA, the control device 30 transfers the serial common selection data SIB and the pattern data latch signal LATA.
Alternatively, the common selection data latch signal LATB may be output each time. Each time the output control signal PI for defining the discharge / non-discharge of the droplet D is generated,
First to fourth common selection control signals PX for defining selection / non-selection of the drive waveform signal COM
A, PXB, PXC, and PXD may be generated.

According to this, every time the ejection operation of the droplet D is set, the drive waveform signal COM corresponding to the rank is associated with each of all the nozzles N. Accordingly, all the nozzles N that discharge the droplets D are more reliably driven by the drive waveform signal COM corresponding to the rank.

In the above embodiment, the control unit 32 is configured to develop the drawing data Ip into dot pattern data. For example, the input / output device 40 may develop the drawing data Ip into dot pattern data, and the input / output device 40 may input the dot pattern data to the control device 30.

In the above embodiment, the actuator is embodied in the piezoelectric element PZ. For example, the actuator may be embodied as a resistance heating element as long as it receives a predetermined drive waveform signal COM and discharges the droplet D.

In the above embodiment, each ejection head 18 is configured to include 180 nozzles N in only one row. For example, each ejection head 18 may be configured to include two or more rows of 180 nozzles N, and the number of nozzles in the row may be embodied with a quantity larger than 180.

In the above embodiment, the electro-optical device is embodied in the liquid crystal display device 1, and the color filter CF is manufactured using the droplets D. For example, the alignment film of the liquid crystal display device 1 may be manufactured using the droplets D. Alternatively, the electro-optical device may be embodied as an electroluminescence display device, and a light-emitting element may be manufactured by discharging droplets D containing a light-emitting element forming material.

FIG. 11 is a perspective view illustrating a liquid crystal display device. Similarly, the perspective view explaining a color filter substrate. Similarly, the perspective view explaining a droplet discharge device. Similarly, the perspective view explaining a droplet discharge head. Similarly, the principal part sectional drawing explaining a droplet discharge head. Similarly, the electric block circuit diagram explaining the electrical constitution of a droplet discharge device. Similarly, the figure explaining the rank of the nozzle. Similarly, the figure explaining a drive waveform signal. Similarly, the figure explaining serial pattern data. Similarly, a timing chart for explaining pattern data. Similarly, the figure explaining serial common selection data. Similarly, the figure explaining the relation between the rank and the drive waveform signal. The figure explaining a common selection state similarly. Similarly, the electric block circuit diagram explaining a head drive circuit. Similarly, the electric block circuit diagram explaining an output control signal generation circuit. Similarly, a circuit diagram illustrating a pattern data synthesis circuit. Similarly, a circuit diagram illustrating a common selection control signal generation circuit. Similarly, a timing chart for explaining the drive timing of the head drive circuit.

Explanation of symbols

CF: color filter as a thin film, COM: drive waveform signal, D: droplet, N: nozzle,
Ip: Drawing data, PI: Output control signal, PXA, PXB, PXC, PXD ... Common selection control signal, PZ ... Piezoelectric element as actuator, 10 ... Droplet ejection device, 18 ... Droplet ejection head, 23 ... Droplet Weight device 33 ... RAM as storage means 36 ... Drive waveform generation circuit as drive waveform generation means 50 ... Output control signal generation circuit as output control signal generation means 60 ... Common as common selection control signal generation means Selection control signal generation circuit, 70... Output synthesis circuit constituting output means.

Claims (11)

A rank setting step for associating ranks according to the weight of droplets discharged to each of the plurality of nozzles;
A drive waveform signal generating step for generating, for each rank, a plurality of different drive waveform signals for setting an average weight of the plurality of droplets discharged when the nozzle actuator is driven a plurality of times to a predetermined weight; ,
The plurality of different drive waveform signals corresponding to the rank of the selected nozzle are supplied to an actuator of the nozzle selected based on drawing data, and the droplet is directed from the selected nozzle toward an object. A droplet discharge process for discharging
A method for driving a droplet discharge head, comprising: A method for driving a droplet discharge head according to claim 1,
The drive waveform signal generation step includes
A first drive waveform signal is supplied to the actuator of the nozzle by a predetermined first pulse number, the droplet corresponding to the first pulse number is ejected from the nozzle, and a second drive waveform signal is When the droplet corresponding to the second pulse is ejected from the nozzle by supplying a predetermined second number of pulses to the actuator of the nozzle, the first drive waveform signal and the second drive waveform signal Generating the first drive waveform signal and the second drive waveform signal for each rank so that an average weight of the plurality of droplets discharged by the above is the predetermined weight,
A method of driving a droplet discharge head characterized by the above. A method for driving a droplet discharge head according to claim 1 or 2,
The droplet discharge step includes
Associating a combination of the plurality of different drive waveform signals corresponding to the rank for all the nozzles, setting ejection / non-ejection of the droplets for all the nozzles,
Supplying a drive waveform signal of the corresponding combination to the actuator of the nozzle for which the discharge operation is set;
A method of driving a droplet discharge head characterized by the above. A method for driving a droplet discharge head according to any one of claims 1 to 3,
The droplet discharge step includes
After associating a combination of the plurality of different drive waveform signals corresponding to the rank for all the nozzles, repeating the setting of ejection / non-ejection of the droplets for all the nozzles,
For each setting of ejection / non-ejection, a driving waveform signal of the associated combination is supplied to the actuator of the nozzle for which ejection operation is set.
A method of driving a droplet discharge head characterized by the above. A method for driving a droplet discharge head according to any one of claims 1 to 3,
The droplet discharge step includes
Each time the droplet ejection / non-ejection is set for all the nozzles, all the nozzles are associated with combinations of the plurality of different drive waveform signals corresponding to the ranks,
Supplying a drive waveform signal of the corresponding combination to the actuator of the nozzle for which the discharge operation is set;
A method of driving a droplet discharge head characterized by the above. A droplet discharge device that supplies a drive waveform signal to each of a plurality of actuators provided in a droplet discharge head to discharge droplets from a nozzle corresponding to the actuator,
An output control signal generating means for generating an output control signal in which ejection / non-ejection of the droplet is associated with each of the plurality of nozzles based on drawing data;
Storage means for storing information in which ranks set according to the weight of the droplets are associated with each of the plurality of nozzles;
The plurality of different drive waveform signals are associated with the rank in combination with a plurality of different drive waveform signals that make the average weight of the plurality of droplets ejected by driving the nozzle actuator a plurality of times. Driving waveform signal generating means for generating for each rank,
A common selection control signal generating means for generating a common selection control signal in which a combination of the plurality of different drive waveform signals corresponding to the rank is associated with each of the plurality of nozzles using the information stored in the storage means; ,
Based on the common selection control signal and the output control signal, an output means for outputting the plurality of different drive waveform signals corresponding to the rank to an actuator of the nozzle that discharges the droplets;
A droplet discharge apparatus comprising: The droplet discharge device according to claim 6,
The drive waveform signal generating means includes
Generating a first drive waveform signal and a second drive waveform signal for each rank;
The output means includes
Outputting the first driving waveform signal to the actuator of the nozzle by a predetermined first number of pulses, and outputting the second driving waveform signal to the actuator of the nozzle by a predetermined second number of pulses; The average weight of the plurality of droplets ejected by the first drive waveform signal and the second drive waveform signal is set to the predetermined weight.
A droplet discharge device characterized by the above. The droplet discharge device according to claim 6 or 7,
The common selection control signal generating means includes
Generating the common selection control signal prior to the output control signal;
The output means includes
Every time the output control signal is received, the common selection control signal generated in advance is used,
Outputting the plurality of different drive waveform signals corresponding to the rank to the actuator of the nozzle for discharging the droplets;
A droplet discharge device characterized by the above. The droplet discharge device according to claim 6 or 7,
The common selection control signal generating means includes
Generating the common selection control signal synchronized with the output control signal;
The output means includes
Based on the output control signal and the common selection control signal synchronized with the output control signal, the plurality of different drive waveform signals corresponding to the rank for the actuator of the nozzle that discharges the droplets. Output,
A droplet discharge device characterized by the above. A droplet discharge device according to any one of claims 6 to 9,
Provided with a droplet weight device for measuring the weight of the droplet;
A droplet discharge device characterized by the above. An electro-optical device having a thin film formed by drying droplets discharged onto a substrate,
The thin film is
An electro-optical device formed by the droplet discharge device according to claim 6.

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