JP2008129281A - Optical device, optical scanner and image forming apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical device, wherein a swing angle of a movable plate is enlarged while attaining miniaturization and the movable plate can be turned around two axis lines which intersects each other, respectively, and to provide an optical scanner and an image forming apparatus. <P>SOLUTION: A first driving means 5 has: an piezoelectric element 52 provided so as to expand and contract in a direction parallel to a second axis line Y; a transmission member 51 which is connected to axis members 23 and 24, respectively, at positions dislocated with respect to the first axis line X in the thickness direction of the movable plate 22 and transmit the driving force of the piezoelectric element 52 to the first axis members 23 and 24, and the transmission member 51 gives torque to the respective first axis members 23 and 24 around the first axis line X and turns the movable plate 22 by expanding and contracting the piezoelectric element 52 by energizing. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an optical device, an optical scanner, and an image forming apparatus.

For example, an image forming apparatus such as a projector is known that includes an optical scanner that performs drawing by scanning light two-dimensionally (see, for example, Patent Document 1).
An optical scanner according to Patent Document 1 rotates a resonant MEMS deflector that rotates a movable plate having a reflecting surface about the Y axis, and rotates the resonant MEMS deflector itself about an X axis that is orthogonal to the Y axis. And a galvano deflector. Such an optical scanner is movable when the resonant MEMS deflector rotates the movable plate around the Y axis and the galvano deflector swings (rotates) the resonant MEMS deflector itself around the X axis. The plate can be rotated around the X axis and Y axis orthogonal to each other, and the light reflected by the reflecting surface can be scanned two-dimensionally.

However, since the optical scanner according to Patent Document 1 is configured to swing the resonant MEMS deflector itself around the X axis using a galvano deflector, the entire apparatus is increased in size and reduced in size. There is a problem that it is difficult to plan.
In particular, in such an optical scanner, it is desired to reduce the size of the entire apparatus while increasing the rotational angle (swing angle) of the movable plate to some extent.

JP 2005-156976 A

  An object of the present invention is to provide an optical device, an optical scanner, and an optical device capable of increasing the deflection angle of the movable plate and rotating the movable plate around two axes orthogonal to each other while reducing the size. An object is to provide an image forming apparatus.

Such an object is achieved by the present invention described below.
The optical device of the present invention includes a frame-shaped member having a frame shape,
A movable plate provided on the inner side of the frame-like member and provided with a light reflecting portion having light reflectivity;
A pair of first shaft members that rotatably support the movable plate around a first axis with respect to the frame-shaped member;
A pair of second shaft members that rotatably support the frame-shaped member around a second axis perpendicular to the first axis;
First driving means for rotating the movable plate around the first axis while twisting and deforming the first shaft member;
Second driving means for rotating the movable plate about the second axis by rotating the frame-shaped member around the second axis while twisting and deforming the second shaft member; Have
An optical device configured to two-dimensionally scan the light reflected by the light reflecting portion by operating the first driving unit and the second driving unit,
The first driving means includes the piezoelectric element provided to expand and contract in a direction parallel to the second axis, and the movable at a position eccentric to the first axis in the thickness direction of the movable plate. A transmission member that is joined to the plate and / or each of the first shaft members and transmits the driving force of the piezoelectric element to the movable plate and / or each of the first shaft members. By extending and contracting, the transmission member is configured to apply a torque around the first axis to the movable plate and / or each first shaft member to rotate the movable plate. And

As a result, it is possible to increase the deflection angle of the movable plate and reduce the size of the movable plate and to rotate the movable plate around the respective axes of two axes orthogonal to each other.
In particular, in such an optical device, since the expansion and contraction direction of the piezoelectric element is a direction perpendicular to the thickness direction of the movable plate or the frame-shaped member, while suppressing the dimension of the optical device in the thickness direction of the movable plate or the frame-shaped member, The amount of displacement of the piezoelectric element can be increased by increasing the length of the piezoelectric element in the expansion / contraction direction. In addition, the piezoelectric element can be provided by effectively using the space in the optical device. For these reasons, the deflection angle of the movable plate can be increased while reducing the size of the optical device.

In addition, torque around the first axis can be applied to the movable plate and the first shaft member in the vicinity of the first axis that is the rotation center axis of the movable plate. Therefore, the rotation angle of the movable plate with respect to the displacement amount of the piezoelectric element can be increased.
The rotation angle of the movable plate with respect to the displacement of the piezoelectric element roughly corresponds to the distance between the first axis in the thickness direction of the movable plate and the piezoelectric element (power point). It is set appropriately depending on the mounting position and shape. The attachment position of the piezoelectric element can be arbitrarily designed according to the thickness and shape of the transmission member. Therefore, the degree of freedom in designing the optical device can be improved.
Even if the movable plate is vibrated non-resonantly, the rotation angle of the movable plate can be increased. In this respect as well, the degree of freedom in designing the optical device can be improved.

In the optical device according to the aspect of the invention, it is preferable that the transmission member is bonded to one surface of the movable plate and / or one end of the first shaft member in the thickness direction of the movable plate. .
As a result, the transmission member can effectively apply torque around the first axis to the movable plate and the first shaft member. Therefore, it is possible to prevent the first axis, which is the rotation center axis of the movable plate, from being shaken, and to smoothly rotate the movable plate.

In the optical device according to the aspect of the invention, it is preferable that the transmission member is provided so as to be positioned inside the frame member when the frame member is viewed in plan.
Thereby, it is possible to prevent the transmission member from obstructing the rotation of the frame member without separating the transmission member from the frame member in the thickness direction. Therefore, the rotation angle of the frame member can be increased while suppressing the size of the optical device in the thickness direction of the frame member.

In the optical device according to the aspect of the invention, it is preferable that the transmission member is bonded to the movable plate and / or each first shaft member via a spacer.
Thereby, the transmission member can transmit the driving force of the piezoelectric element to the movable plate and the first shaft member while preventing unintentional contact between the transmission member and the movable plate and the first shaft member. As a result, the movable plate can be rotated more smoothly.

In the optical device of the present invention, the transmission member is formed by processing one Si layer of the SOI substrate, and the spacer is formed by processing the SiO ₂ layer of the SOI substrate. Is preferred.
Thereby, a spacer and a transmission member can be formed relatively easily and with high accuracy.
In the optical device of the present invention, the frame-shaped member, the movable plate, the first shaft member, and the second shaft member process a Si layer opposite to the one Si layer of the SOI substrate. It is preferable that it is formed by this.
Thereby, the frame-shaped member, the movable plate, the first shaft member, and the second shaft member can be formed relatively easily and with high accuracy. Moreover, since the frame-shaped member, the movable plate, the first shaft member, and the second shaft member are integrally formed and are made of silicon, excellent vibration characteristics can be exhibited. .

In the optical device according to the aspect of the invention, each of the first shaft members includes a drive member that is provided apart from the movable plate, a first connection member that connects the drive member and the frame, and the drive. A second connecting member that connects the member and the movable plate, and the first driving means is configured such that the transmission member is joined to each driving member and the first connecting member is twisted and deformed. It is preferable that the movable plate is rotated while the driving members are rotated and the second connecting members are twisted and deformed accordingly.
Accordingly, a two-degree-of-freedom vibration system can be configured by a vibration system including the movable plate and the pair of first connection members and a vibration system including the drive member and the pair of second connection members. . And since the transmission member is comprised so that the drive force of a piezoelectric element may be transmitted to each drive member, the rotation angle of a movable plate can be enlarged, suppressing the rotation angle of each drive member.

In the optical device according to the aspect of the invention, it is preferable that the transmission member is bonded to the movable plate and / or the first shaft members in the vicinity of the first axis.
Thereby, the transmission member can efficiently transmit the driving force of the piezoelectric element to the movable plate and the first shaft member.
In the optical device according to the aspect of the invention, it is preferable that the piezoelectric element is provided along the second axis when the movable plate is viewed in plan.
Thereby, the transmission member can more reliably transmit the driving force of the piezoelectric element to the movable plate and the first shaft member. For this reason, it is possible to prevent the first axis from being shaken and to rotate the movable plate more stably.

In the optical device of the present invention, it is preferable that the piezoelectric element is formed by alternately laminating a plurality of piezoelectric layers and electrode layers.
Thereby, the displacement amount of the piezoelectric element can be increased while suppressing the dimension in the expansion / contraction direction of the piezoelectric element and the voltage (drive voltage) applied to the piezoelectric element.
In the optical device according to the aspect of the invention, it is preferable that the piezoelectric element is provided so as to be positioned inside the frame-shaped member when the frame-shaped member is viewed in plan.
Accordingly, the piezoelectric element can be prevented from obstructing the rotation of the frame-shaped member without separating the piezoelectric element from the frame-shaped member in the thickness direction. Therefore, the rotation angle of the frame member can be increased while suppressing the size of the optical device in the thickness direction of the frame member.

In the optical device according to the aspect of the invention, it is preferable that the optical element has a support body that supports the frame member via the second shaft member, and the piezoelectric element is supported by the support body.
Thereby, the shape of the transmission member can be simplified, and the cost of the optical device can be reduced.
In the optical device according to the aspect of the invention, it is preferable that the transmission member includes a deformable portion that can be deformed so as to allow rotation of the frame-shaped member around the second axis.
Thereby, rotation of a frame-shaped member can be made smoother, aiming at cost reduction of an optical device.

In the optical device according to the aspect of the invention, it is preferable that the piezoelectric element is supported by the frame-shaped member.
Thereby, rotation of a frame-shaped member can be made smoother.
In the optical device according to the aspect of the invention, it is preferable that each of the first shaft members has a portion whose width is larger than the thickness.
Accordingly, the transmission member can transmit the driving force of the piezoelectric element to the movable plate and the first shaft member while preventing the first axis from moving.

In the optical device according to the aspect of the invention, the second driving unit includes an electrode provided at a distance from the frame-shaped member and applies a voltage between the frame-shaped member and the electrode. It is preferable that an electrostatic attractive force is generated between the frame-shaped members and the frame-shaped member is rotated.
Thereby, the rotation angle around the second axis of the movable plate can be increased while downsizing the optical device.

In the optical device according to the aspect of the invention, it is preferable that the second driving unit includes a piezoelectric element that rotates the frame-shaped member.
Thereby, the rotation angle around the second axis of the movable plate can be increased while downsizing the optical device.
In the optical device according to the aspect of the invention, the second driving unit includes a magnetic body and a magnetic field applying unit including a coil provided to face the magnetic body, and applies a voltage to the coil. It is preferable that the frame member is configured to rotate.
Thereby, the rotation angle around the second axis of the movable plate can be increased while downsizing the optical device.

The optical scanner of the present invention includes a frame-shaped member having a frame shape,
A movable plate provided on the inner side of the frame-like member and provided with a light reflecting portion having light reflectivity;
A pair of first shaft members that rotatably support the movable plate around a first axis with respect to the frame-shaped member;
A pair of second shaft members that rotatably support the frame-shaped member around a second axis perpendicular to the first axis;
First driving means for rotating the movable plate around the first axis while twisting and deforming the first shaft member;
Second driving means for rotating the movable plate about the second axis by rotating the frame-shaped member around the second axis while twisting and deforming the second shaft member; Have
An optical scanner configured to two-dimensionally scan the light reflected by the light reflecting portion by operating the first driving unit and the second driving unit,
The first driving means includes the piezoelectric element provided to expand and contract in a direction parallel to the second axis, and the movable at a position eccentric to the first axis in the thickness direction of the movable plate. A transmission member that is joined to the plate and / or each of the first shaft members and transmits the driving force of the piezoelectric element to the movable plate and / or each of the first shaft members. By extending and contracting, the transmission member is configured to apply a torque around the first axis to the movable plate and / or each first shaft member to rotate the movable plate. And
As a result, it is possible to provide an optical scanner capable of increasing the deflection angle of the movable plate and rotating the movable plate around each of the two orthogonal axes while achieving downsizing.

An image forming apparatus according to the present invention includes a frame-shaped member having a frame shape,
A movable plate provided on the inner side of the frame-like member and provided with a light reflecting portion having light reflectivity;
A pair of first shaft members that rotatably support the movable plate around a first axis with respect to the frame-shaped member;
A pair of second shaft members that rotatably support the frame-shaped member around a second axis perpendicular to the first axis;
First driving means for rotating the movable plate around the first axis while twisting and deforming the first shaft member;
Second driving means for rotating the movable plate about the second axis by rotating the frame-shaped member around the second axis while twisting and deforming the second shaft member; Have
Light configured to two-dimensionally scan the light reflected by the light reflecting portion and to form an image on an object by operating the first driving unit and the second driving unit, respectively. An image forming apparatus provided with a scanner,
The first driving means includes the piezoelectric element provided to expand and contract in a direction parallel to the second axis, and the movable at a position eccentric to the first axis in the thickness direction of the movable plate. A transmission member that is joined to the plate and / or each of the first shaft members and transmits the driving force of the piezoelectric element to the movable plate and / or each of the first shaft members. By extending and contracting, the transmission member is configured to apply a torque around the first axis to the movable plate and / or each first shaft member to rotate the movable plate. And
As a result, it is possible to provide an image forming apparatus capable of increasing the deflection angle of the movable plate and reducing the size of the movable plate and rotating the movable plate around the two axes orthogonal to each other.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, preferred embodiments of an optical device, an optical scanner, and an image forming apparatus of the invention will be described with reference to the accompanying drawings.
<First Embodiment>
First, a first embodiment of the optical device of the present invention will be described.
1 is a perspective view showing a first embodiment of the optical device of the present invention, FIG. 2 is a plan view of the optical device shown in FIG. 1, FIG. 3 is a cross-sectional view taken along line AA in FIG. FIG. 5 is a cross-sectional view taken along line BB in FIG. 2, and FIG. 5 is a block diagram showing a configuration of a control system of the optical device shown in FIG.
In the following, for convenience of explanation, the front side of the paper in FIG. 2 is referred to as “up”, the back side of the paper is referred to as “down”, the right side is referred to as “right”, and the left side is referred to as “left”. The upper side in FIG. 4 is called “upper”, the lower side is “lower”, the right side is “right”, and the left side is “right”. “Left”.

An optical device 1 shown in FIGS. 1 and 2 includes a base 2 having a vibration system, a support 3 that supports the base 2, first driving means 5 and second for driving the vibration system of the base 2. Drive means 6.
In such an optical device 1, the first driving means 5 and the second driving means 6 are actuated to move around the first axis X and the second axis Y perpendicular to the vibration system of the base 2. Causes vibration. In FIG. 1, the direction parallel to the first axis X is referred to as “x direction”, the direction parallel to the second axis Y is referred to as “y direction”, and directions perpendicular to the x direction and the y direction are respectively defined. These are illustrated as “z direction”.

Hereinafter, each part which comprises the optical device 1 is demonstrated sequentially.
As shown in FIGS. 1 and 2, the base body 2 includes a frame-shaped member 21 having a frame shape, a movable plate 22 provided inside the frame-shaped member 21, and the movable plate 22 rotated with respect to the frame-shaped member 21. A pair of first shaft members 23 and 24 that are movably supported, a pair of second shaft members 25 and 26 that movably support the frame-like member 21, and each second shaft member 25, 26 and a support portion 27 for supporting 26.

In the present embodiment, the base 2 is formed so as to have a symmetrical shape when viewed in plan.
The frame-shaped member 21 has a frame shape (more specifically, a quadrangular ring shape). Further, the transmission members 61 and 63 of the second driving means 6 for rotating the frame member 21 around the second axis Y are joined to the lower surface of the frame member 21. The second driving means 6 will be described in detail later.

A movable plate 22 is provided inside the frame-shaped member 21 in a state of being separated from the frame-shaped member 21.
The movable plate 22 has a plate shape, and a light reflecting portion 221 is provided on the plate surface (upper surface). Thereby, the optical device 1 can be applied to optical devices such as an optical scanner, an optical attenuator, and an optical switch.

  In this embodiment, the planar view shape of the movable plate 22 is a circle. That is, the movable plate 22 has a disk shape. Therefore, the area available for light reflection of the light reflecting portion 221 can be increased while suppressing the moment of inertia of the movable plate 22. The planar view shape of the movable plate 22 is determined according to the design of the optical device and the like, and is not limited to the disk shape as described above. For example, a polygonal shape such as a quadrilateral, a pentagon, Alternatively, it may be oval or oval.

In such a frame-shaped member 21 and the movable plate 22, the movable plate 22 is supported by the frame-shaped member 21 via a pair of first shaft members 23, 24, and the frame-shaped member 21 is 1 It is supported by the support portion 27 via the pair of second shaft members 25 and 26.
The first shaft member 23 includes a drive member 231 that is provided apart from the movable plate 22, a first connection member 232 that connects the drive member 231 and the movable plate 22, and the drive member 231 and the frame-shaped member 21. And a second connecting member 233 for connecting the two. Similarly, the first shaft member 24 includes a driving member 241 provided apart from the movable plate 22, a first connecting member 242 that connects the driving member 241 and the movable plate 22, and a driving member 241. And a second connecting member 243 that connects the frame-shaped member 21.

In other words, the movable plate 22 is supported by the frame-shaped member 21 via the pair of first connecting members 232 and 242, the pair of driving members 231 and 241, and the pair of second connecting members 233 and 243. Has been.
The pair of drive members 231 and 241 each have a plate shape, and are provided with a gap therebetween via the movable plate 22. The transmission member 51 of the first driving means 5 that rotates the driving members 231 and 241 about the first axis X is joined to the lower surfaces of the pair of driving members 231 and 241. The first driving means 5 will be described in detail later.

The pair of first connecting members 232 and 242 and the pair of second connecting members 233 and 243 are each configured to be elastically deformable.
The first connecting member 232 connects the movable plate 22 so as to be rotatable with respect to the driving member 231, and the first connecting member 242 rotates the movable plate 22 with respect to the driving member 241. It is connected as possible.

On the other hand, the second connecting member 233 connects the driving member 231 with respect to the frame-shaped member 21 so as to be rotatable, and the second connecting member 243 connects the driving member 241 with respect to the frame-shaped member 21. It is connected so that it can rotate.
The pair of first connecting members 232 and 242 and the pair of second connecting members 233 and 243 are provided coaxially along the first axis X, and are connected to a rotation center axis (rotating shaft). ), The drive members 231 and 241 are rotatable with respect to the frame-shaped member 21 and the movable plate 22 is rotatable with respect to the drive members 231 and 241.

As described above, the first vibration system including the movable plate 22 and the pair of first connecting members 232 and 242 and the pair of driving members 231 and 241 and the pair of second connecting members 233 and 243 are included. The second vibration system constitutes a two-degree-of-freedom vibration system.
Such a two-degree-of-freedom vibration system is supported by the support portion 27 via a pair of second shaft members 25 and 26.

The support portion 27 includes a support member 271 that supports the frame-shaped member 21 described above via the second shaft member 25, and a support member 272 that supports the frame-shaped member 21 via the second shaft member 26. ing.
Each of the second shaft members 25 and 26 is configured to be elastically deformable. The second shaft member 25 connects the frame member 21 so as to be rotatable with respect to the support member 271, and the second shaft member 26 connects the frame member 21 with respect to the support member 272. It is connected so that it can rotate.

A pair of second shaft members 25 and 26 are provided coaxially along the second axis Y that is orthogonal to the above-described first axis X, and these are used as a rotation center axis (rotation axis). The frame-like member 21 is rotatable with respect to the support members 271 and 272.
The base 2 as described above is made of, for example, silicon as a main material. Further, the base body 2 is formed by integrally forming a frame-shaped member 21, a movable plate 22, a pair of first shaft members 23 and 24, a pair of second shaft members 25 and 26, and a support portion 27. Yes.

In particular, in the present embodiment, the substrate 2 is formed by processing one Si layer of the SOI substrate. Further, by processing the other Si layer of the SOI substrate (the Si layer opposite to the one Si layer), a second layer 322 of the spacer 32, a transmission member 51, and transmission members 61 and 63, which will be described later. And are formed. Further, by processing the SiO ₂ layer of the SOI substrate, a first layer 321 of the spacer 32 described later, spacers 53 and 54 for the transmission member 51, and spacers 65 and 66 for the transmission member 63 are formed. Has been.

As described above, the frame-shaped member 21, the movable plate 22, the pair of first shaft members 23 and 24, and the pair of second shaft members 25 and 26 are formed by processing the Si layer of the SOI substrate. In this case, the frame-shaped member 21, the movable plate 22, the pair of first shaft members 23, 24, and the pair of second shaft members 25, 26 are formed relatively easily and with high accuracy. be able to. Further, the frame-shaped member 21, the movable plate 22, the pair of first shaft members 23, 24, and the pair of second shaft members 25, 26 are integrally formed, and these are made of silicon. Therefore, excellent vibration characteristics can be exhibited.
When the base 2 and the like are manufactured using the SOI substrate in this way, a structure such as the base 2 can be formed easily and with high accuracy. Therefore, the optical device 1 having excellent characteristics can be manufactured at low cost. In addition, the board | substrate and base material used for manufacture of the base | substrate 2 grade | etc., Are not limited to the SOI substrate mentioned above.

The support body 3 is bonded to the lower surface of the support portion 27 of the base 2 as described above.
The support 3 includes a substrate 31 and a pair of spacers 32 bonded to the upper surface of the substrate 31.
A substrate 31, for example, glass or silicon is used as a main material.
On the upper surface of the substrate 31, a protruding portion 41 is provided so as to protrude toward the inside of the frame-shaped member 21 described above.

The protrusion 41 has a plate shape having a plate surface parallel to a surface orthogonal to the second axis Y. And the piezoelectric element 52 of the 1st drive means 5 mentioned later is joined and supported on the board surface by the side of the movable board 22 of the projection part 41. As shown in FIG.
In the pair of spacers 32 bonded to the upper surface of the substrate 31, one spacer 32 is bonded to the lower surface of the support member 271 and the other is bonded to the lower surface of the support member 272. When the frame vibrates, that is, when the frame-like member 21 and the movable plate 22 rotate (vibrate), an escape portion (space) that prevents contact with the substrate 31 is formed.

Each spacer 32 includes a first layer 321 bonded to the lower surface of the support portion 27 and a second layer 322 bonded to the lower surface of the first layer 321.
As described above, the first layer 321 is composed of SiO ₂ as a main material, and the second layer 322 is composed of silicon as a main material.
Each spacer 32 is substantially L-shaped in a plan view and has a side surface parallel to a surface perpendicular to the first axis X. On the side surfaces, piezoelectric elements 62 and 64 of second driving means 6 described later are joined and supported.

Here, the first driving means 5 and the second driving means 6 will be described in detail.
The first driving means 5 for rotating the movable plate 22 about the first axis X includes a piezoelectric element 52 joined and supported by the protrusion 41 described above, a piezoelectric element 52 and the driving member 231 described above, 241 and a transmission member 51 that is connected to 241.
The piezoelectric element 52 is disposed so as to expand and contract in a direction parallel to the second axis Y (that is, the y direction shown in FIG. 1). Such a piezoelectric element 52 has one end in the expansion / contraction direction joined and supported by the protrusion 41 and the other end in contact with the transmission member 51. Here, the transmission member 51 is in a movable state within the contact surface with the piezoelectric element 52 and has a configuration that does not hinder the rotation of the frame-shaped member 21 and the movable plate 22 around the second axis Y.

The piezoelectric element 52 is not particularly limited, but is preferably one in which a plurality of piezoelectric layers and electrode layers are alternately stacked. Thereby, the amount of displacement of the piezoelectric element 52 can be increased while suppressing the dimension of the piezoelectric element 52 in the expansion / contraction direction and the voltage (drive voltage) applied to the piezoelectric element 52.
Such a piezoelectric element 52 is connected to a power supply circuit 7 to be described later, and is applied with a periodically changing voltage. Thereby, the piezoelectric element 52 can be expanded and contracted.

The transmission member 51 receives the driving force of the piezoelectric element 52 described above and is displaced in a direction parallel to the second axis Y, thereby rotating the pair of driving members 231 and 241 around the first axis X. It has a function to make it.
Such a transmission member 51 is joined to each of the first shaft members 23 and 24 at a position eccentric to the first axis X in the thickness direction of the movable plate 22 (z direction shown in FIG. 1). The driving force of 52 is transmitted to the first shaft members 23 and 24.

  More specifically, the transmission member 51 is supported and fixed to the piezoelectric element 52 described above, and is provided between the substrate 31 and the base body 2 along these. The transmission member 51 branches in the middle and is joined to the lower surfaces of the drive members 231 and 241. In the present embodiment, the transmission member 51 is joined to the drive member 231 via the spacer 53 and joined to the drive member 241 via the spacer 54. In addition, a deformable portion 511 that can be elastically deformed is formed on a portion of the transmission member 51 on the side joined to the piezoelectric element 52. Since such a deforming portion 511 is formed in the transmission member 51, a pair of driving forces of the piezoelectric element 52 are allowed to pass through the transmission member 51 while allowing the frame-shaped member 21 to rotate around the second axis. The drive members 231 and 241 can be transmitted.

In such a first drive means 5, the transmission member 51 gives the torque around the first axis X to each of the first shaft members 23 and 24 by expanding and contracting the piezoelectric element 52 by energization, and the movable plate 22. Rotate.
Such a first driving means 5 has the piezoelectric element 52 extending and contracting in a direction perpendicular to the thickness direction of the movable plate 22 and the frame-shaped member 21 (z direction shown in FIG. 1). While the size of the optical device 1 in the thickness direction of the frame-shaped member 21 is suppressed, the length of the piezoelectric element 52 in the expansion / contraction direction can be increased, and the displacement amount of the piezoelectric element 52 can be increased. In addition, the piezoelectric element 52 can be provided by effectively using the space in the optical device 1 (in this embodiment, the space inside the frame-shaped member 21 in plan view). For these reasons, the deflection angle of the movable plate 22 can be increased while downsizing the optical device 1.

  In addition, the torque around the first axis X can be applied to each of the first shaft members 23 and 24 in the vicinity of the first axis X that is the rotation center axis of the movable plate 22. Therefore, the rotation angle of the movable plate 22 with respect to the displacement amount of the piezoelectric element 52 can be increased. As a result, the length of the piezoelectric element 52 in the expansion / contraction direction can be suppressed, and the optical device 1 can easily arrange the piezoelectric element 52 using the space in the optical device 1 as described above. It has become.

  The rotation angle of the movable plate 22 relative to the displacement amount of the piezoelectric element 52 roughly corresponds to the distance between the first axis X and the piezoelectric element 52 (power point) in the thickness direction (that is, the z direction) of the movable plate 22. The distance and the force point are appropriately set depending on the attachment position and shape of the piezoelectric element 52. The attachment position of the piezoelectric element 52 can be arbitrarily designed according to the thickness and shape of the transmission member 51. Therefore, the design freedom of the optical device 1 can be improved.

  Furthermore, in this embodiment, since the movable plate 22 and the first shaft members 23 and 24 constitute a two-degree-of-freedom vibration system as described above, the frequency is such that the movable plate 22 resonates. By driving the pair of drive members 231 and 241, even if the rotation angle around the first axis X of the pair of drive members 231 and 241 is small, the rotation angle around the first axis X of the movable plate 22 can be reduced. Can be bigger. That is, even if the displacement amount of the piezoelectric element 52 is small, the movable plate 22 can be angularly displaced largely around the first axis X.

  Furthermore, since the transmission member 51 is joined to one end (the lower surface in the present embodiment) of each of the first shaft members 23 and 24 in the thickness direction of the movable plate 22, the transmission member 51 is connected to each of the first shaft members 23 and 24. Torque around the first axis X can be effectively applied to the shaft members 23 and 24. Therefore, blurring of the first axis X that is the rotation center axis of the movable plate 22 can be prevented, and the movable plate 22 can be smoothly rotated.

  In addition, when the frame-shaped member 21 is viewed in plan (hereinafter, also simply referred to as “plan view”), the transmission member 51 is provided so as to be positioned inside the frame-shaped member 21. Even if the frame member 21 is not separated in the thickness direction, the transmission member 51 can be prevented from obstructing the rotation of the frame member 21. That is, since the transmission member 51 is not located directly below the frame-shaped member 21, it is possible to prevent the frame-shaped member 21 from inadvertently contacting the transmission member 51 regardless of the rotation angle during rotation. Therefore, the rotation angle of the frame-shaped member 21 can be increased while suppressing the size of the optical device 1 in the thickness direction of the frame-shaped member 21.

  Further, since the transmission member 51 is joined to the first shaft member 23 (drive member 231) via the spacer 53 and joined to the first shaft member 24 (drive member 241) via the spacer 54, The transmission member 51 can transmit the driving force of the piezoelectric element 52 to each first shaft member 23, 24 while preventing unintentional contact between the transmission member 51 and each first shaft member 23, 24. . As a result, the movable plate 22 can be rotated more smoothly.

Here, the transmission member 51 is formed by processing one Si layer of the SOI substrate, and the spacers 53 and 54 are formed by processing the SiO ₂ layer of the SOI substrate. In addition, the spacers 53 and 54 and the transmission member 51 can be formed with high accuracy.
Further, since the transmission member 51 is configured to transmit the driving force of the piezoelectric element 52 to the driving members 231 and 241, the rotation of the movable plate 22 is suppressed while suppressing the rotation angle of the driving members 231 and 241. The corner can be increased.

Further, since the transmission member 51 is joined to the first shaft members 23 and 24 (specifically, the drive members 231 and 241) in the vicinity of the first axis X, the transmission member 51 drives the piezoelectric element 52. The force can be efficiently transmitted to the first shaft members 23 and 24.
Furthermore, since the piezoelectric elements 52 are provided along the second axis Y in a plan view, the transmission member 51 can more surely apply the driving force of the piezoelectric elements 52 to the first shaft members 23, 24. Therefore, blurring of the first axis X can be prevented and the movable plate 22 can be rotated more stably.

  Further, since the piezoelectric element 52 is provided so as to be located inside the frame-shaped member 21 in a plan view, the piezoelectric element 52 can be formed without being separated from the frame-shaped member 21 in the thickness direction. It is possible to prevent 52 from inhibiting the rotation of the frame-shaped member 21. Therefore, the rotation angle of the frame-shaped member 21 can be increased while suppressing the size of the optical device 1 in the thickness direction of the frame-shaped member 21.

Moreover, since the piezoelectric element 52 is supported by the support body 3, the shape of the transmission member 51 can be simplified, and the cost of the optical device 1 can be reduced.
Here, since the transmission member 51 includes the deformable portion 511 that can be deformed so as to allow the frame-shaped member 21 to rotate around the second axis Y, the cost of the optical device 1 can be reduced and the frame can be reduced. The rotation of the shaped member 21 can be made smoother.

On the other hand, the second driving means 6 for rotating the frame-shaped member 21 around the second axis Y includes a pair of piezoelectric elements 62 and 64 joined and supported by the spacer 32 of the support 3 described above, and 1 It has a pair of transmission members 61 and 63 formed by connecting the pair of piezoelectric elements 62 and 64 and the frame-shaped member 21 described above.
The piezoelectric elements 62 and 64 are arranged so as to expand and contract in a direction parallel to the first axis X (that is, the x direction shown in FIG. 1). One end of the piezoelectric element 62 in the expansion / contraction direction is bonded and supported to a portion on the support member 271 side of the spacer 32, and the other end is bonded to the transmission member 61. In addition, the piezoelectric element 64 has one end in the expansion / contraction direction joined / supported to a portion on the support member 272 side of the spacer 32 and the other end joined to the transmission member 63.

Such piezoelectric elements 62 and 64 are not particularly limited, but those in which a plurality of piezoelectric layers and electrode layers are alternately laminated are preferable. Thereby, the displacement amount of the piezoelectric elements 62 and 64 can be increased while suppressing the dimension of the piezoelectric elements 62 and 64 in the expansion / contraction direction and the voltage (drive voltage) applied to the piezoelectric elements 62 and 64.
Such piezoelectric elements 62 and 64 are connected to a power supply circuit 7 which will be described later, and a periodically changing voltage is applied thereto. Thereby, the piezoelectric elements 62 and 64 can be expanded and contracted.

  The transmission member 61 has a function of rotating the frame-like member 21 around the second axis Y by receiving the driving force of the piezoelectric element 62 and displacing in a direction parallel to the first axis X. . Similar to the transmission member 61, the transmission member 63 receives the driving force of the piezoelectric element 64 described above and is displaced in a direction parallel to the first axis X, thereby causing the frame-shaped member 21 to move around the second axis Y. It has a function to rotate.

  Such a transmission member 61 is joined to the frame member 21 at a position eccentric to the second axis Y in the thickness direction of the frame member 21 (z direction shown in FIG. 1), and the driving force of the piezoelectric element 62 Is transmitted to the frame-shaped member 21. Similar to the transmission member 61, the transmission member 63 is joined to the frame-shaped member 21 at a position eccentric in the thickness direction of the frame-shaped member 21 with respect to the second axis Y, and the driving force of the piezoelectric element 64 is applied to the frame-shaped member 21. It is comprised so that it may transmit to 21.

  More specifically, the transmission member 61 is supported and fixed to the piezoelectric element 62 described above, and is provided between the substrate 31 and the base body 2 along these. The transmission member 61 is joined to the lower surface of the frame-shaped member 21 in the vicinity of the second shaft member 25. Similar to the transmission member 61, the transmission member 63 is supported and fixed to the piezoelectric element 64 described above, and is provided between the substrate 31 and the base 2 along these. The transmission member 63 is joined to the lower surface of the frame-shaped member 21 in the vicinity of the second shaft member 26. In the present embodiment, the transmission member 61 is joined to the frame-like member 21 via the spacer 65, and the transmission member 63 is joined to the frame-like member 21 via the spacer 66.

Such a second drive means 6 expands and contracts the piezoelectric elements 62 and 64 by energization, whereby the transmission members 61 and 63 give the frame-shaped member 21 a torque around the second axis Y, and the frame-shaped member 21. Rotate.
Such a second driving means 6 has a movable plate because the expansion and contraction directions of the piezoelectric elements 62 and 64 are perpendicular to the thickness direction (z direction shown in FIG. 1) of the movable plate 22 and the frame-like member 21. The length of the piezoelectric elements 62 and 64 in the expansion / contraction direction is increased and the displacement amount of the piezoelectric elements 62 and 64 is increased while suppressing the size of the optical device 1 in the thickness direction of the frame 22 and the frame-shaped member 21. it can. In addition, the piezoelectric elements 62 and 64 can be provided by effectively utilizing the space in the optical device 1 (in this embodiment, the space between the frame-shaped member 21 and the support portion 27 in plan view). For these reasons, it is possible to increase the deflection angle of the frame-like member 21 and to increase the deflection angle of the movable plate 22 while reducing the size of the optical device 1.

  In addition, the torque around the second axis Y can be applied to the frame member 21 in the vicinity of the second axis Y, which is the rotation center axis of the frame member 21. Therefore, the rotation angle of the frame-shaped member 21 with respect to the displacement amount of the piezoelectric elements 62 and 64 can be increased. As a result, the length of the piezoelectric elements 62 and 64 in the expansion / contraction direction can be suppressed, and the optical device 1 can arrange the piezoelectric elements 62 and 64 by effectively using the space in the optical device 1 as described above. Is easy.

  The rotation angle of the frame member 21 with respect to the displacement amount of the piezoelectric elements 62 and 64 is the distance between the second axis Y in the thickness direction of the frame member 21 (that is, the z direction) and the piezoelectric elements 62 and 64 (power point). The distance and the power point are appropriately set according to the mounting position and shape of the piezoelectric elements 62 and 64. The attachment positions of the piezoelectric elements 62 and 64 can be arbitrarily designed depending on the thickness and shape of the transmission members 61 and 63. Therefore, the design freedom of the optical device 1 can be improved.

Moreover, since the rotation angle of the frame-shaped member 21 with respect to the displacement amount of the piezoelectric elements 62 and 64 can be increased, the rotation angle of the frame-shaped member 21 is increased even if the frame-shaped member 21 is vibrated non-resonantly. can do. Also in this respect, the degree of freedom in designing the optical device 1 can be improved.
Further, since the transmission members 61 and 63 are joined to one end (the lower surface in the present embodiment) of the frame member 21 in the thickness direction of the frame member 21, the transmission members 61 and 63 are joined to the frame member 21. The torque around the second axis Y can be effectively applied. Therefore, the frame-shaped member 21 can be smoothly rotated by preventing the second axis Y that is the rotation center axis of the frame-shaped member 21 from blurring.

  In addition, when the frame-shaped member 21 is viewed in plan (hereinafter, also simply referred to as “plan view”), the transmission members 61 and 63 are provided so as to be located outside the frame-shaped member 21, so that the transmission member Even if 61 and 63 are not separated from the frame-shaped member 21 in the thickness direction, the transmission members 61 and 63 can be prevented from obstructing the rotation of the frame-shaped member 21. That is, since the transmission members 61 and 63 are not located immediately below the frame-shaped member 21, it is possible to prevent the frame-shaped member 21 from inadvertently contacting the transmission members 61 and 63 regardless of the rotation angle when rotating. it can. Therefore, the rotation angle of the frame-shaped member 21 can be increased while suppressing the size of the optical device 1 in the thickness direction of the frame-shaped member 21.

  Further, since the transmission member 61 is joined to the frame member 21 via the spacer 65 and the transmission member 63 is joined to the frame member 21 via the spacer 66, the transmission members 61 and 63 and the frame member 21 are joined. In addition, the transmission members 61 and 63 can transmit the driving force of the piezoelectric elements 62 and 64 to the frame-like member 21 while preventing unintentional contact with the second shaft members 25 and 26. As a result, the frame-shaped member 21 (and hence the movable plate 22) can be rotated more smoothly.

Here, the transmission members 61 and 63 are formed by processing one Si layer of the SOI substrate, and the spacers 65 and 66 are formed by processing the SiO ₂ layer of the SOI substrate. The spacers 65 and 66 and the transmission members 61 and 63 can be formed easily and with high accuracy.
Further, since the transmission members 61 and 63 are joined to the frame-shaped member 21 in the vicinity of the second axis Y, the transmission members 61 and 63 apply the driving force of the corresponding piezoelectric elements 62 and 64 to the frame-shaped member 21, respectively. It can be transmitted efficiently.

  Furthermore, since the piezoelectric elements 62 and 64 are provided so as to be symmetric with respect to the first axis X in plan view, the transmission members 61 and 63 are more reliably connected to the corresponding piezoelectric elements 62 and 64, respectively. The driving force can be transmitted to the frame-like member 21 in the direction parallel to the first axis X. Therefore, blurring of the second axis Y can be prevented, and the frame-like member 21 (and hence the movable plate 22) can be rotated more stably.

  Further, since the piezoelectric elements 62 and 64 are provided so as to be located outside the frame-shaped member 21 in plan view, the piezoelectric elements 62 and 64 are not separated from the frame-shaped member 21 in the thickness direction. In addition, the piezoelectric elements 62 and 64 can be prevented from obstructing the rotation of the frame-shaped member 21. Therefore, the rotation angle of the frame-shaped member 21 can be increased while suppressing the size of the optical device 1 in the thickness direction of the frame-shaped member 21.

In addition, since the piezoelectric elements 62 and 64 are supported by the support 3 (more specifically, the spacer 32), the shape of the transmission members 61 and 63 is simplified, and the cost of the optical device 1 is reduced. Can do.
When the second driving means 6 is configured to include the piezoelectric elements 62 and 64 for rotating the frame-like member 21 as described above, the second axis of the movable plate 22 can be achieved while reducing the size of the optical device 1. The rotation angle around Y can be increased.

Here, the control system of the optical device 1 will be described with reference to FIG.
The optical device 1 includes a power supply circuit 7 that applies a voltage to the above-described piezoelectric elements 52, 62, and 64, and a control unit 8 that controls driving of the power supply circuit 7.
The power supply circuit 7 includes a first voltage generator 71 that generates a first voltage to be applied to the piezoelectric element 52, and a second voltage generator that generates a second voltage to be applied to the piezoelectric elements 62 and 64, respectively. 72.

The first voltage generator 71 generates a first voltage that periodically changes at the first frequency. The first voltage generator 71 is connected to the piezoelectric element 52 and applies the first voltage to the piezoelectric element 52.
The first voltage is not particularly limited as long as the piezoelectric element 52 can be expanded and contracted, and examples thereof include alternating current and intermittent direct current. As will be described later, when the rotation of the movable plate 22 around the first axis X is used for horizontal scanning, the first voltage preferably has a waveform such as a sine wave or a rectangular wave. Used.
Further, the first frequency is not particularly limited, but when rotating around the first axis X of the movable plate 22 is used for horizontal scanning as described later, for example, 10 to 40 kHz is preferably used.

  Further, the first frequency is set to be equal to the torsional resonance frequency of the vibrator (first vibration system described above) including the movable plate 22 and the pair of first connecting members 232 and 242. Is preferred. Thereby, the rotation angle around the first axis X of the movable plate 22 can be increased while suppressing the rotation angle around the first axis X of the pair of drive members 231 and 241. Therefore, the voltage applied to the piezoelectric element 52 (that is, the first voltage) can be suppressed. The relationship between the first frequency and the vibration frequency of the first vibration system is set by the design of the power supply circuit 7 and the design of the movable plate 22 and the pair of first connecting members 232 and 242. can do.

The second voltage generator 72 generates a second voltage that periodically changes at the second frequency. The second voltage generator 72 is connected to the piezoelectric elements 62 and 64, respectively, and applies the second voltage to the piezoelectric elements 62 and 64, respectively.
The second voltage is not particularly limited as long as the piezoelectric elements 62 and 64 can be expanded and contracted, and examples thereof include alternating current and intermittent direct current. As will be described later, when the rotation of the movable plate 22 around the second axis Y is used for vertical scanning, for example, a voltage having a waveform like a sawtooth is preferably used as the second voltage.

Further, the second frequency is not particularly limited, but when rotating around the second axis Y of the movable plate 22 is used for vertical scanning as described later, for example, 40 to 80 Hz (about 60 Hz) is preferable. Used.
The control unit 8 that controls the driving of the power supply circuit 7 configured as described above is based on the behavior information (for example, the frequency) of the movable plate 22 detected by the behavior detection unit (not shown). The driving of the 71 and the second voltage generator 72 is controlled.

The optical device 1 configured as described above operates as follows.
The power supply circuit 7 applies the first voltage described above to the piezoelectric element 52 and also applies the second voltage described above to the piezoelectric elements 62 and 64.
The piezoelectric element 52 to which the first voltage is applied expands and contracts in the direction parallel to the second axis Y (that is, the y direction shown in FIG. 1) at the first frequency described above. In response to the driving force of the piezoelectric element 52, the transmission member 51 vibrates (displaces) in the direction parallel to the second axis Y (that is, the y direction shown in FIG. 1) at the first frequency described above. . As a result, the driving force of the piezoelectric element 52 is transmitted to the vicinity of the first axis X on the lower surfaces of the driving members 231 and 241 via the transmission member 51. That is, a torque around the first axis X is applied to the drive members 231 and 241 to rotate the drive members 231 and 241 while twisting and deforming the pair of second connecting members 233 and 243.
Accordingly, the movable plate 22 is rotated around the first axis X while twisting and deforming the pair of first connecting members 232 and 242.

On the other hand, the piezoelectric elements 62 and 64 to which the second voltage is applied expands and contracts in the direction parallel to the first axis X (that is, the x direction shown in FIG. 1) at the second frequency described above. In response to the driving force of the piezoelectric elements 62 and 64, the transmission members 61 and 63 vibrate in the direction parallel to the first axis X (that is, the y direction shown in FIG. 1) at the second frequency described above. (Displace). As a result, the driving force of the piezoelectric elements 62 and 64 is transmitted to the vicinity of the second axis Y on the lower surface of the frame-shaped member 21 via the transmission members 61 and 63. That is, a torque around the second axis Y is applied to the frame-shaped member 21, and the frame-shaped member 21 is rotated while twisting and deforming the pair of second shaft members 25, 26. 22 is rotated around the second axis Y.
By such driving, the movable plate 22 is rotated (vibrated) around the second axis Y at the second frequency while being rotated (vibrated) around the first axis X at the first frequency. That is, the movable plate 22 can be rotated around two axes orthogonal to each other.

<Second Embodiment>
Next, a second embodiment of the optical device of the present invention will be described.
6 is a plan view showing a second embodiment of the optical device of the present invention, and FIG. 7 is a cross-sectional view taken along line AA in FIG. In the following, for convenience of explanation, the front side of the page in FIG. 6 is referred to as “up”, the back side of the page is referred to as “down”, the right side is referred to as “right”, the left side is referred to as “left”, and the upper side in FIG. The upper side, the lower side is called “lower”, the right side is called “back”, and the left side is called “front”.

Hereinafter, the optical device of the second embodiment will be described focusing on the differences from the optical device of the first embodiment described above, and the description of the same matters will be omitted.
As shown in FIGS. 6 and 7, the optical device 1 </ b> A of the second embodiment is substantially the same as the optical device 1 of the first embodiment except that the configuration of the second driving unit is different.
As shown in FIGS. 6 and 7, an optical device 1A according to the second embodiment includes a coil 211 provided on a frame-like member 21A of a base 2A and a pair of permanent magnets facing each other via the frame-like member 21A. 42, 43. In the optical device 1 </ b> A, the second driving unit is configured to rotate the frame-shaped member 21 </ b> A around the second axis Y by energizing the coil 211.

The coil 211 is formed on the upper surface of the frame-shaped member 21A along the frame-shaped member 21A and has an annular shape.
The coil 211 is composed of a single metal layer such as Al or Cu. Thereby, the coil 211 can be formed by a single film formation, and the manufacture of the optical device 1 can be simplified. As a result, the cost of the optical device 1 can be reduced. Further, since the coil 211 can be made relatively thin, the influence of the coil 211 on the vibration characteristics of the optical device 1 can be reduced, and the design of the optical device 1 can be simplified.
As shown in FIG. 1, the coil 211 is connected to a pair of terminals 212 and 213 provided on the support member 272 through the second elastic member 26 from the frame-shaped member 21 </ b> A.
Such a pair of terminals 212 and 223 is connected to a power supply circuit (not shown).

On the other hand, the pair of permanent magnets 42 and 43 are respectively supported and fixed on the upper surface of the substrate 31 of the support 3.
The pair of permanent magnets 42 and 43 are separated from each other in a direction (x direction) parallel to the first axis X, and are opposed to each other via the frame-shaped member 21A.
The pair of permanent magnets 42 and 43 generate a magnetic field such that the magnetic lines of force penetrate the frame member 21A in the x direction. That is, the pair of permanent magnets 42 and 43 generates a magnetic field in the x direction in the vicinity of the frame-shaped member 21A. In this embodiment, the part on the frame-shaped member 21A side of the permanent magnet 42 is the N pole, and the part on the frame-shaped member 21A side of the permanent magnet 43 is the S pole, thereby generating the magnetic field as described above.
An electromagnet can be used instead of the permanent magnet as long as it generates a magnetic field as described above.

Such second driving means operates as follows.
By applying an alternating voltage to the coil 211, the direction of the current flowing through the coil 211 is alternately switched between the direction indicated by the solid line arrow and the direction indicated by the broken line arrow in FIG.
At this time, the coil 211 generates a magnetic field in the thickness direction of the frame-shaped member 21A. Therefore, an attractive force and a repulsive force are generated between the frame-shaped member 21A and the pair of permanent magnets 42 and 43 so as to tilt the frame-shaped member 21A. Therefore, when the direction of the current flowing in the coil 211 is alternately switched between the direction indicated by the solid line arrow and the direction indicated by the broken line arrow in FIG. 6, the frame-shaped member 21A rotates and vibrates around the second axis Y. .
Also in the optical device 1A of the present embodiment as described above, the same effect as the optical device 1 of the first embodiment described above can be exhibited. In addition, since the optical device 1A of the present embodiment includes the second driving unit as described above, the rotation angle around the second axis Y of the movable plate 22 while reducing the size of the optical device 1A. Can be increased.

<Third Embodiment>
Next, a third embodiment of the optical device of the present invention will be described.
FIG. 8 is a plan view showing a third embodiment of the optical device of the present invention, and FIG. 9 is a sectional view taken along line AA in FIG. In the following, for convenience of explanation, the front side in FIG. 8 is referred to as “up”, the back side in FIG. 8 is referred to as “down”, the right side is referred to as “right”, the left side is referred to as “left”, and the upper side in FIG. The upper side, the lower side is called “lower”, the right side is called “back”, and the left side is called “front”.

Hereinafter, the optical device of the third embodiment will be described focusing on the differences from the optical device of the first embodiment described above, and the description of the same matters will be omitted.
As shown in FIGS. 8 and 9, the optical device 1B of the third embodiment is substantially the same as the optical device 1 of the first embodiment, except that the configuration of the second driving means is different.
As shown in FIGS. 8 and 9, the optical device 1 </ b> B of the third embodiment includes a frame-like member 21 </ b> B that rotatably supports the movable plate 22 via a pair of first shaft members 23 and 24, A pair of electrodes 44 and 45 that are opposed to each other with the frame-shaped member 21B interposed therebetween. In such an optical device 1B, by alternately applying a voltage between the electrode 44 and the frame-shaped member 21A and between the electrode 45 and the frame-shaped member 21A, the frame-shaped member 21 is rotated around the second axis Y. The second driving means is configured so as to be rotated to the right.
Comb-like electrode portions 214 and 215 having a comb-like shape are provided at both ends in a direction parallel to the first axis X in the plan view of the frame-like member 21B.

On the other hand, the pair of electrodes 44 and 45 are respectively supported and fixed on the upper surface of the substrate 31 of the support 3.
The pair of electrodes 44 and 45 are separated from each other in the direction parallel to the first axis X (x direction) and face each other via the frame-shaped member 21B.
Further, the electrode 44 is formed with a comb-like electrode portion 441 provided so as to mesh with the comb-like electrode portion 214 of the frame-like member 21B described above with a space therebetween.

Similarly, the electrode 45 is formed with a comb-like electrode portion 451 provided so as to mesh with the comb-like electrode portion 215 of the frame-like member 21B described above with a space therebetween.
Here, the comb-like electrode portion 441 is initially displaced downward with respect to the comb-like electrode portion 214. Similarly, the comb-like electrode portion 451 is initially displaced downward with respect to the comb-like electrode portion 215. Thereby, the start of the rotational drive of the frame-shaped member 21B can be simplified. The comb-like electrode portion 441 may be initially displaced upward with respect to the comb-like electrode portion 214, and the comb-like electrode portion 451 may be initially displaced upward with respect to the comb-like electrode portion 215.

Such electrodes 44 and 45 are connected to a power supply circuit (not shown).
Such second driving means operates as follows.
A voltage is alternately applied between the electrode 44 and the frame-shaped member 21B (base 2B) and between the electrode 45 and the frame-shaped member 21B (base 2B) (a potential difference is generated). Then, between the electrode 44 and the frame-shaped member 21B (more specifically, between the comb-shaped electrode portion 214 and the comb-shaped electrode portion 441), and between the electrode 45 and the frame-shaped member 21B (more Specifically, electrostatic attraction is alternately generated between the comb-shaped electrode portion 215 and the comb-shaped electrode portion 451.

Due to this electrostatic force, the frame-shaped member 21B rotates and vibrates around the second axis Y.
Also in the optical device 1B of the present embodiment as described above, the same effect as the optical device 1 of the first embodiment described above can be exhibited. In addition, since the optical device 1B of the present embodiment includes the second driving unit as described above, the rotation angle of the movable plate 22 around the second axis Y is achieved while reducing the size of the optical device 1B. Can be increased.

<Fourth embodiment>
Next, a fourth embodiment of the optical device of the present invention will be described.
FIG. 10 is a plan view showing a fourth embodiment of the optical device of the present invention, and FIG. 11 is a cross-sectional view taken along line AA in FIG. In the following, for convenience of explanation, the front side of the page in FIG. 10 is referred to as “up”, the back side of the page is referred to as “down”, the right side is referred to as “right”, and the left side is referred to as “left”. The upper side, the lower side is called “lower”, the right side is called “back”, and the left side is called “front”.

Hereinafter, the optical device according to the fourth embodiment will be described with a focus on differences from the optical device according to the first embodiment described above, and description of similar matters will be omitted.
As shown in FIGS. 10 and 11, the optical device 1C of the fourth embodiment is substantially the same as the optical device 1 of the first embodiment, except that the configuration of the second driving unit is different.
As shown in FIGS. 10 and 11, the optical device 1C according to the fourth embodiment includes a pair of permanent magnets 216 and 217 provided on the lower surface of the frame-like member 21C of the base 2C, and a lower part of the frame-like member 21C. And a coil 46 provided. In the optical device 1 </ b> C, the second drive unit is configured to rotate the frame-shaped member 21 </ b> C around the second axis Y by energizing the coil 46.

The pair of permanent magnets 216 and 217 are arranged at both ends of the frame-shaped member 21C in the direction parallel to the second axis Y (y direction) (both ends at the distal end of the frame-shaped member 21C with respect to the second axis Y). ).
Each of the pair of permanent magnets 216 and 217 has a thin film shape, is made of a ferromagnetic material as a main material, and is magnetized in a direction parallel to the first axis X. Of the both end portions of each permanent magnet 216, 217 in the y direction, one end portion is an N pole and the other end portion is an S pole, and the permanent magnet 216 and the permanent magnet 217 are magnetized in the same direction.

The ferromagnetic material is not particularly limited, but various hard magnetic materials are preferably used.
In addition, the permanent magnets 216 and 217 are provided over almost the entire area of the frame-shaped member 21 </ b> C in a direction parallel to the first axis X at a position separated from the first axis X. Thereby, the magnetic field generated from the coil 46 described later can be effectively applied to the permanent magnets 216 and 217. As a result, the rotational angle around the second axis Y of the frame-shaped member 21C and the movable plate 22 can be further increased while further reducing power consumption and size.

On the other hand, the coil 46 is supported and fixed on the upper surface of the substrate 31 of the support 3.
As shown in FIG. 10, the coil 46 is formed (winded) so as to surround the outer periphery of the frame-shaped member 21 </ b> C in plan view, and has a frame shape. Therefore, the frame-shaped member 21 can be rotated inside the coil 46, and the rotation angle of the frame-shaped member 21C can be increased while suppressing the vertical dimension of the optical device 1C.

A power circuit (not shown) is connected to such a coil 46. The power supply circuit is configured to apply a periodically changing voltage to the coil 46.
Such second driving means operates as follows.
For example, by applying an alternating current to the coil 46, the direction of the current flowing through the coil 46 is switched alternately.

At this time, the coil 46 generates a magnetic field in the thickness direction of the frame-shaped member 21C. Therefore, an attractive force and a repulsive force are generated between the frame member 21C and the pair of permanent magnets 216 and 217 so as to incline the frame member 21C. Therefore, as described above, when the direction of the current flowing through the coil 46 is alternately switched, the frame-shaped member 21C rotates and vibrates around the second axis Y.
Also in the optical device 1 </ b> C of the present embodiment as described above, the same effect as the optical device 1 of the first embodiment described above can be exhibited. In addition, since the optical device 1C according to the present embodiment includes the second driving unit as described above, the rotation angle around the second axis Y of the movable plate 22 while reducing the size of the optical device 1C. Can be increased.

<Fifth Embodiment>
Next, a fifth embodiment of the optical device of the present invention will be described.
FIG. 12 is a plan view showing a fifth embodiment of the optical device of the present invention, and FIG. 13 is a sectional view taken along line AA in FIG. In the following, for convenience of explanation, the front side of the paper in FIG. 12 is called “up”, the back side of the paper is called “down”, the right side is called “right”, the left side is called “left”, and the upper side in FIG. The upper side, the lower side is called “lower”, the right side is called “back”, and the left side is called “front”.

Hereinafter, the optical device according to the fifth embodiment will be described with a focus on differences from the optical device according to the first embodiment described above, and description of similar matters will be omitted.
As shown in FIGS. 12 and 13, the optical device 1D of the fifth embodiment is substantially the same as the optical device 1 of the first embodiment except that the configuration of the second driving unit is different.
As shown in FIGS. 12 and 13, the optical device 1D of the fifth embodiment includes a pair of soft magnetic bodies 218 and 219 provided on the lower surface of the frame-like member 21D of the base 2D, and the pair of soft magnetic elements. A pair of coils 47 and 48 provided below the frame-shaped member 21D corresponding to the bodies 218 and 219 are provided. In the optical device 1D, the second drive unit is configured to rotate the frame member 21D around the second axis Y by energizing the coil 47 and the coil 48 alternately.

The pair of soft magnetic bodies 218 and 219 are arranged at both ends of the frame-shaped member 21D in the direction parallel to the first axis X (x direction) (both ends at the distal end of the frame-shaped member 21D with respect to the second axis Y). Part).
Each of the pair of soft magnetic bodies 218 and 219 has a thin film shape, and is composed of a soft magnetic material as a main material.

The soft magnetic material is not particularly limited, and examples thereof include Fe, various Fe alloys (silicon iron, permalloy, amorphous, sendust, etc.), soft magnetic ferrite, and the like.
Further, the soft magnetic bodies 218 and 219 are provided over almost the entire area of the frame-shaped member 21D in a direction parallel to the second axis Y at a position spaced from the second axis Y. Thereby, a magnetic field generated from coils 47 and 48 described later can be effectively applied to the soft magnetic bodies 218 and 219. As a result, the rotational angle around the second axis Y of the frame-shaped member 21D and the movable plate 22 can be further increased while further reducing power consumption and size.

On the other hand, the pair of coils 47 and 48 are supported and fixed on the upper surface of the substrate 31 of the support 3.
As shown in FIG. 12, the coil 47 is formed (winded) so as to surround the outer periphery of the soft magnetic body 218 in plan view, and has a frame shape. Similar to the coil 47, the coil 48 is formed (wound) so as to surround the outer periphery of the soft magnetic body 219 in plan view, and has a frame shape.

A power circuit (not shown) is connected to each of the coils 47 and 48. This power supply circuit is configured to alternately apply intermittent direct current to the coils 47 and 48.
Such second driving means operates as follows.
An intermittent direct current is applied to the pair of coils 47 and 48 alternately.
When a current is applied to the coil 47, the soft magnetic body 218 is attracted to the coil 47 side by the magnetic field generated by the coil 47.

On the other hand, when a current is applied to the coil 48, the soft magnetic body 219 is attracted to the coil 48 side by the magnetic field generated by the coil 48.
Therefore, as described above, when intermittent DC is alternately applied to the pair of coils 47 and 48, the frame-shaped member 21D rotates and vibrates around the second axis Y.
Also in the optical device 1D of the present embodiment as described above, the same effect as the optical device 1 of the first embodiment described above can be exhibited. In addition, since the optical device 1D of the present embodiment includes the second driving unit as described above, the rotation angle of the movable plate 22 around the second axis Y is achieved while reducing the size of the optical device 1D. Can be increased.

<Sixth Embodiment>
Next, a sixth embodiment of the optical device of the present invention will be described.
FIG. 14 is a plan view showing a sixth embodiment of the optical device of the present invention, and FIG. 15 is a sectional view taken along the line CC in FIG. In the following, for convenience of explanation, the front side of the page in FIG. 14 is referred to as “up”, the back side of the page is referred to as “down”, the right side is referred to as “right”, the left side is referred to as “left”, and the upper side in FIG. The upper side, the lower side is called “lower”, the right side is called “back”, and the left side is called “front”.

Hereinafter, the optical device according to the sixth embodiment will be described with a focus on differences from the optical device according to the first embodiment described above, and description of similar matters will be omitted.
As shown in FIGS. 14 and 15, the optical device 1E of the sixth embodiment is substantially the same as the optical device 1 of the first embodiment, except that the configuration of the first driving unit is different.
As shown in FIGS. 14 and 15, the optical device 1 </ b> E of the sixth embodiment includes a piezoelectric element 52 </ b> E joined and supported by a transmission member 61 supported by a frame-like member 21 </ b> E of the base 2 </ b> E. In such an optical device 1E, the driving force of the piezoelectric element 52E is transmitted to the driving members 231 and 241 via the transmitting member 51.

Thus, since the piezoelectric element 52E is supported by the frame-like member 21E, the rotation of the frame-like member 21E can be made smoother. In addition, the piezoelectric element 52E may be supported directly with respect to the frame-shaped member 21E, or may be supported via other members other than the transmission member 61.
Also in the optical device 1E of the present embodiment as described above, the same effect as the optical device 1 of the first embodiment described above can be exhibited.

<Seventh embodiment>
Next, a seventh embodiment of the optical device of the present invention will be described.
16 is a plan view showing a seventh embodiment of the optical device of the present invention, FIG. 17 is a cross-sectional view taken along line AA in FIG. 16, and FIG. 18 is a cross-sectional view taken along line BB in FIG. . In the following, for convenience of explanation, the front side in FIG. 16 is referred to as “up”, the back side in FIG. 16 is referred to as “down”, the right side is referred to as “right”, the left side is referred to as “left”, and the upper side in FIG. In FIG. 18, the upper side in FIG. 18 is “up”, the lower side is “lower”, the right side is “right”, and the left side is “right”. “Left”.

Hereinafter, the optical device according to the seventh embodiment will be described focusing on the differences from the optical device according to the first embodiment described above, and description of similar matters will be omitted.
As shown in FIGS. 16 to 18, the optical device 1 </ b> F of the seventh embodiment is substantially the same as the optical device 1 of the first embodiment except that the configurations of the first shaft member and the second shaft member are different. is there.

In the optical device 1F of the seventh embodiment, the base 2F includes first shaft members 23F and 24F and second shaft members 25F and 26F having flat portions, as shown in FIGS.
More specifically, the first shaft member 23F has a second connecting member 233F that connects the drive member 231 and the frame-shaped member 21, and the second connecting member 233F has a width thereof. The (length in the y direction) is larger than the thickness (length in the z direction). Similar to the second connecting member 233F, the first shaft member 24F includes a second connecting member 243F that connects the driving member 241 and the frame-shaped member 21, and the second connecting member 243F. The width (length in the y direction) is larger than the thickness (length in the z direction).

Thus, since each 1st shaft member 23F and 24F has a part whose width | variety is larger than thickness, it is hard to bend in ay direction. Therefore, the transmission member 51 can transmit the driving force of the piezoelectric element 52 to the driving members 231 and 241 while preventing the first axis X from blurring.
On the other hand, each of the second shaft members 25F and 26F has a width (length in the x direction) larger than a thickness (length in the z direction), and is difficult to bend in the x direction. . Therefore, the transmission members 61 and 63 can transmit the driving force of the piezoelectric elements 62 and 64 to the frame-shaped member 21 while preventing the second axis Y from moving.

Also in the optical device 1F of the present embodiment as described above, the same effect as the optical device 1 of the first embodiment described above can be exhibited.
The optical devices 1 to 1F as described above can be suitably applied to an optical scanner provided in an image forming apparatus such as a laser printer, a barcode reader, a scanning confocal laser microscope, or an imaging display.

Here, based on FIG. 19 and FIG. 20, a case where the optical device 1 is used as an optical scanner of an imaging display will be described as an example of an image forming apparatus.
19 is a schematic diagram illustrating an example of an image forming apparatus (imaging display) according to the present invention, and FIG. 20 is a block diagram illustrating a configuration of a control system of the image forming apparatus illustrated in FIG.
As shown in FIG. 19, the image forming apparatus 10 includes an optical device 1 that is an optical scanner and a light irradiation device 9 that irradiates light to the optical device 1, and the light from the light irradiation device 9 is transmitted to the optical device 1. Thus, an image is formed (drawn) on the screen S by performing main scanning and sub-scanning.

The screen S may be provided in the main body of the image forming apparatus 10 or may be a separate body. Further, the surface of the screen S (viewing side surface) may be irradiated with light from the light irradiation device 9 and displayed, or the back surface of the screen S (surface opposite to the viewing side surface) may be displayed. The light from 9 may be irradiated and transmitted through the surface for display.
As shown in FIG. 20, the light irradiation device 9 includes light sources 91, 92, and 93 of R (red), G (green), and B (blue), a cross dichroic prism (X prism) 94, and a mirror. 95 and a lens 96.

The light source 91 emits red light, and is connected to a light source driver 81 for driving the light source 91. The light source 92 emits green light and is connected to a light source driver 82 for driving the light source 92. The light source 93 emits blue light and is connected to a light source driver 83 for driving the light source 93.
Each drive driver 81, 82, 83 is connected to the control unit 8A and operates based on a signal from the control unit 8A. Here, the control unit 8A receives image information (image signal) from a host computer (not shown), and activates the drive drivers 81, 82, and 83 in accordance with the image information. Further, the control unit 8A controls driving of the power supply circuit 7 based on behavior information of the optical device 1 (movable plate 22) detected by a detection unit (not shown).

  In such an image forming apparatus 10, light of each color is irradiated from the light sources 91, 92, 93 to the optical device 1 (light reflecting unit 221) via the cross dichroic prism 94, the mirror 95, and the lens 96. . At this time, the red light from the light source 91, the green light from the light source 92, and the blue light from the light source 93 are combined by the cross dichroic prism 95. The intensity of light output from the light sources 91, 92, and 93 of each color changes according to image information received from a host computer (not shown).

Then, the light reflected by the light reflecting portion 221 (three colors of combined light) is irradiated onto the screen S.
At that time, the light reflected by the light reflecting portion 221 is scanned in the horizontal direction of the screen S (main scanning) by the rotation of the movable plate 22 of the optical device 1 around the first axis X. On the other hand, the light reflected by the light reflecting portion 221 is scanned (sub-scanned) in the vertical direction of the screen S by the rotation of the movable plate 22 of the optical device 1 around the second axis Y.

In this way, the image forming apparatus 10 performs image formation (drawing) on the screen S. In such an image forming apparatus 10, by providing only one optical device 1, two-dimensional scanning, that is, main scanning (horizontal scanning) and sub-scanning (vertical scanning) can be performed. Can be achieved.
While the optical device, the optical scanner, and the image forming apparatus of the present invention have been described based on the illustrated embodiment, the present invention is not limited to this.

For example, in the optical device of the present invention, the configuration of each part can be replaced with an arbitrary configuration that exhibits the same function, and an arbitrary configuration can be added.
In the above-described embodiment, the first driving unit has one piezoelectric element. However, the first driving unit may have two or more piezoelectric elements. In this case, the number of transmission members may be one, or a plurality of transmission members may be provided corresponding to each piezoelectric element.

  Moreover, although embodiment mentioned above demonstrated what the transmission member of the 1st drive means was joined to the 1st shaft member, this transmission member may be joined to the movable plate. In this case, torque around the first axis can be applied to the movable plate in the vicinity of the first axis that is the rotation center axis of the movable plate. Therefore, even if the movable plate is vibrated non-resonantly, the rotation angle of the movable plate can be increased. Therefore, even in such a case, the degree of freedom in designing the optical device can be improved.

In the above-described first embodiment, the second driving unit has two piezoelectric elements. However, the first driving unit may have one or more than three piezoelectric elements. Good. In this case, the number of transmission members may be one as with the first driving means, or a plurality of transmission members may be provided corresponding to each piezoelectric element.
In the first embodiment described above, the transmission member of the second driving unit is joined to the frame-like member. However, the transmission member may be joined to the second shaft member.

In the above-described embodiment, the description has been given of the case where the first shaft member is formed so that the movable plate and the pair of first shaft members constitute a two-degree-of-freedom vibration system. The pair of first shaft members may constitute a one-degree-of-freedom vibration system or may constitute a three-degree-of-freedom vibration system.
In the above-described embodiment, the frame-shaped member and the pair of second shaft members are described so that the second shaft member is formed so as to form a one-degree-of-freedom vibration system. The pair of second shaft members may constitute a vibration system having two or more degrees of freedom.
In the above-described embodiment, the configuration in which the light reflecting portion is provided on the upper surface of the movable plate (the surface on the side opposite to the support) has been described. Also good. In this case, a transparent substrate is adopted as the substrate 31 or an opening is formed in the substrate 31.

It is a perspective view which shows 1st Embodiment of the optical device of this invention. It is a top view of the optical device shown in FIG. It is the sectional view on the AA line in FIG. It is the BB sectional view taken on the line in FIG. It is a block diagram which shows the structure of the control system of the optical device shown in FIG. It is a top view which shows 2nd Embodiment of the optical device of this invention. It is the sectional view on the AA line in FIG. It is a top view which shows 3rd Embodiment of the optical device of this invention. It is the sectional view on the AA line in FIG. It is a top view which shows 4th Embodiment of the optical device of this invention. It is the sectional view on the AA line in FIG. It is a top view which shows 5th Embodiment of the optical device of this invention. It is the sectional view on the AA line in FIG. It is a top view which shows 6th Embodiment of the optical device of this invention. It is CC sectional view taken on the line in FIG. It is a top view which shows 7th Embodiment of the optical device of this invention. It is the sectional view on the AA line in FIG. It is the BB sectional view taken on the line in FIG. It is the schematic which shows an example of the image forming apparatus (imaging display) of this invention. FIG. 20 is a block diagram illustrating a configuration of a control system of the image forming apparatus illustrated in FIG. 19.

Explanation of symbols

  1, 1A, 1B, 1C, 1D, 1E, 1F ... Optical device (optical scanner) 2 ... Base 2A to 2F ... Base 21, 21A, 21B, 21C, 21D, 21E ... Frame-shaped member 211 ... Coil 212, 213 ... Terminal 214, 215 ... Comb-shaped electrode part 216, 217 ... Permanent magnet 218, 219 ... Soft magnetic material 22 ... Movable plate 221 ... Light reflecting part 23, 23F, 24, 24F …… First shaft member 231, 241 …… Drive member 232, 242 ...... First connecting member 233, 233 F, 243, 243 F... Second connecting member 25, 25 F, 26, 26 F. Shaft member 271, 272 ...... Support member 3 ...... Support body 31 ...... Substrate 32 ...... Spacer 41 ...... Projection 42, 43 ...... Permanent magnet 44, 45 …… Electrode 46 to 48 …… Carp 5... First drive means 51... Transmission member 511... Deformation parts 52 and 52 E... Piezoelectric elements 53, 54, 65 and 66. Members 62, 64 ... Piezoelectric element 7 ... Power supply circuit 71 ... First voltage generator 72 ... Second voltage generator 8, 8A ... Control unit 81-83 ... Light source driver 9 ... Light irradiation Device 91, 92, 93 …… Light source 94 …… Cross dichroic prism 95 …… Mirror 96 …… Lens S …… Screen 10 …… Image forming device X …… First axis Y …… Second axis

Claims (20)

A frame-shaped member forming a frame shape;
A movable plate provided on the inner side of the frame-like member and provided with a light reflecting portion having light reflectivity;
A pair of first shaft members that rotatably support the movable plate around a first axis with respect to the frame-shaped member;
A pair of second shaft members that rotatably support the frame-shaped member around a second axis perpendicular to the first axis;
First driving means for rotating the movable plate around the first axis while twisting and deforming the first shaft member;
Second driving means for rotating the movable plate about the second axis by rotating the frame-shaped member around the second axis while twisting and deforming the second shaft member; Have
An optical device configured to two-dimensionally scan the light reflected by the light reflecting portion by operating the first driving unit and the second driving unit,
The first driving means includes the piezoelectric element provided to expand and contract in a direction parallel to the second axis, and the movable at a position eccentric to the first axis in the thickness direction of the movable plate. A transmission member that is joined to the plate and / or each of the first shaft members and transmits the driving force of the piezoelectric element to the movable plate and / or each of the first shaft members. By extending and contracting, the transmission member is configured to apply a torque around the first axis to the movable plate and / or each first shaft member to rotate the movable plate. An optical device.   The optical device according to claim 1, wherein the transmission member is bonded to one surface of the movable plate and / or one end of the first shaft member in a thickness direction of the movable plate.   The optical device according to claim 1, wherein the transmission member is provided so as to be positioned inside the frame-shaped member when the frame-shaped member is viewed in plan.   The optical device according to any one of claims 1 to 3, wherein the transmission member is joined to the movable plate and / or the first shaft member via a spacer. The optical device according to claim 4, wherein the transmission member is formed by processing one Si layer of an SOI substrate, and the spacer is formed by processing a SiO ₂ layer of the SOI substrate. .   The frame-shaped member, the movable plate, the first shaft member, and the second shaft member are formed by processing a Si layer opposite to the one Si layer of the SOI substrate. The optical device according to claim 5.   Each of the first shaft members includes a driving member provided apart from the movable plate, a first connecting member that connects the driving member and the frame, and the driving member and the movable plate. A second connecting member to be connected, and the first driving means rotates the driving members while the transmission members are joined to the driving members and torsionally deforms the first connecting members. The optical device according to claim 1, wherein the movable plate is rotated while twisting and deforming each of the second connecting members.   The optical device according to claim 1, wherein the transmission member is joined to the movable plate and / or each of the first shaft members in the vicinity of the first axis.   The optical device according to claim 1, wherein the piezoelectric element is provided along the second axis when the movable plate is viewed in plan.   The optical device according to claim 1, wherein the piezoelectric element is formed by alternately laminating a plurality of piezoelectric layers and electrode layers.   The optical device according to claim 1, wherein the piezoelectric element is provided so as to be positioned inside the frame-shaped member when the frame-shaped member is viewed in plan.   The optical device according to claim 1, further comprising: a support body that supports the frame-shaped member via the second shaft member, wherein the piezoelectric element is supported by the support body. .   The optical device according to claim 12, wherein the transmission member includes a deformable portion that can be deformed so as to allow rotation of the frame-shaped member around the second axis.   The optical device according to claim 1, wherein the piezoelectric element is supported by the frame-shaped member.   The optical device according to claim 1, wherein each of the first shaft members has a portion whose width is larger than a thickness.   The second driving means includes an electrode provided at a distance from the frame-shaped member, and an electrostatic attractive force is generated between the electrode by applying a voltage between the frame-shaped member and the electrode. The optical device according to claim 1, wherein the optical device is configured to cause the frame-shaped member to rotate.   The optical device according to claim 1, wherein the second driving unit includes a piezoelectric element that rotates the frame-shaped member.   The second driving unit includes a magnetic body and a magnetic field applying unit including a coil provided so as to face the magnetic body, and rotates the frame member by applying a voltage to the coil. The optical device according to any one of claims 1 to 15, wherein the optical device is configured so as to cause the optical device to operate. A frame-shaped member forming a frame shape;
A movable plate provided on the inner side of the frame-like member and provided with a light reflecting portion having light reflectivity;
A pair of first shaft members that rotatably support the movable plate around a first axis with respect to the frame-shaped member;
A pair of second shaft members that rotatably support the frame-shaped member around a second axis perpendicular to the first axis;
First driving means for rotating the movable plate around the first axis while twisting and deforming the first shaft member;
Second driving means for rotating the movable plate about the second axis by rotating the frame-shaped member around the second axis while twisting and deforming the second shaft member; Have
An optical scanner configured to two-dimensionally scan the light reflected by the light reflecting portion by operating the first driving unit and the second driving unit,
The first driving means includes the piezoelectric element provided to expand and contract in a direction parallel to the second axis, and the movable at a position eccentric to the first axis in the thickness direction of the movable plate. A transmission member that is joined to the plate and / or each of the first shaft members and transmits the driving force of the piezoelectric element to the movable plate and / or each of the first shaft members. By extending and contracting, the transmission member is configured to apply a torque around the first axis to the movable plate and / or each first shaft member to rotate the movable plate. And optical scanner. A frame-shaped member forming a frame shape;
A movable plate provided on the inner side of the frame-like member and provided with a light reflecting portion having light reflectivity;
A pair of first shaft members that rotatably support the movable plate around a first axis with respect to the frame-shaped member;
A pair of second shaft members that rotatably support the frame-shaped member around a second axis perpendicular to the first axis;
First driving means for rotating the movable plate around the first axis while twisting and deforming the first shaft member;
Second driving means for rotating the movable plate about the second axis by rotating the frame-shaped member around the second axis while twisting and deforming the second shaft member; Have
Light configured to two-dimensionally scan the light reflected by the light reflecting portion and to form an image on an object by operating the first driving unit and the second driving unit, respectively. An image forming apparatus provided with a scanner,
The first driving means includes the piezoelectric element provided to expand and contract in a direction parallel to the second axis, and the movable at a position eccentric to the first axis in the thickness direction of the movable plate. A transmission member that is joined to the plate and / or each of the first shaft members and transmits the driving force of the piezoelectric element to the movable plate and / or each of the first shaft members. By extending and contracting, the transmission member is configured to apply a torque around the first axis to the movable plate and / or each first shaft member to rotate the movable plate. An image forming apparatus.

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