JP2008116216A - Plate-like member detector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a plate-like member detector capable of preventing breakage of a sensor unit. <P>SOLUTION: Protection recessed parts 29 are provided at the tips of sensor fixing members 21 provided at an equal interval in the longitudinal direction of a base member 2 as protection parts in U-shape made of an upper wall 21a and first and second side walls 21b, 21c. At the protection recessed part 29, a head unit 32 is provided slightly inside the protection recessed part 29, and top corner of the head unit 32, which is in rectangular shape, is protected from the collision with the plate-like member W by the protection recessed part 29. Thereby, the direct collision of the head unit 32 and the plate-like member E, etc. at the time of inserting the head unit 32 between the plate-like members W is prevented. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a plate-like member detection device for detecting the presence or absence of a plurality of plate-like members arranged at intervals from each other.

Conventionally, this type of plate-shaped member detection apparatus includes a plurality of sensor units each having a light projecting element and a light receiving element as a pair, as disclosed in, for example, Patent Document 1, and these sensor units are separated at a predetermined interval, for example. Are used by interposing between a plurality of plate-like members arranged in a row. Then, each sensor unit has a corresponding plate-like member based on the amount of light received from the light projecting element of the unit, for example, on the lower surface of the corresponding plate-like member, and received by the light receiving element from the lower surface. The presence or absence of a member is detected.
JP 2006-46958 A

  By the way, in the above plate-shaped member detection apparatus, generally a resin thing is used for the case which accommodates the light projecting element and light receiving element of a sensor unit in a pair. For this reason, when the sensor unit enters between the plate-like members, the sensor unit may collide with the plate-like member or a cassette that accommodates the plate-like member, and the sensor unit may be damaged.

  The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a plate-like member detection device that can prevent the sensor unit from being damaged.

  In order to solve the above problems, the invention according to claim 1 is a sensor unit having at least light projecting means for projecting light toward a plate-like member and light receiving means for receiving reflected light from the plate-like member. Are attached to the sensor mounting member, and a plurality of the sensor units are mounted at predetermined intervals in the longitudinal direction of the long base member via the sensor mounting member, and are arranged at predetermined intervals in the plate thickness direction. A plate-like member detecting device for detecting the plate-like member by arranging each sensor unit in the vicinity of the plate-like member, wherein each sensor mounting member is made of a metal member and can accommodate the sensor unit. The gist of the invention is that it includes a protective portion that protects a rectangular apex angle from a collision with the plate-like member.

  In the present invention, a sensor unit is attached to a sensor attachment member provided in the longitudinal direction of the base member, and a protective portion that protects a rectangular apex that can accommodate the sensor unit from collision with a plate member. Is provided. For this reason, a direct collision between the sensor unit and the plate-like member or the like is prevented by the protective portion that protects the apex angle, thereby preventing damage to the sensor unit.

The gist of the invention according to claim 2 is that, in the plate-like member detection device according to claim 1, the sensor mounting member is formed from a single plate-like metal member by sheet metal processing.
In this invention, since the sensor mounting member is formed by sheet metal processing from a single plate-like metal member, the sensor mounting member can be simplified and reduced in cost.

According to a third aspect of the present invention, in the plate-shaped member detection device according to the first or second aspect, the protection portion of the sensor mounting member includes a wall portion that abuts against the sensor unit in at least two directions, The gist of the sensor unit is that the sensor unit is attached to the protection portion in a state of being abutted against the wall portions.

  In this invention, the sensor unit can be easily attached to the sensor attachment member because the sensor unit is attached to the protection part while being abutted against each wall part of the protection part.

  Invention of Claim 4 is a plate-shaped member detection apparatus of any one of Claims 1-3, The said sensor attachment member has an opposing wall part facing the said plate-shaped member, The said The gist of the sensor unit is that a detection surface for light projection and reception is provided so as to face the opposing wall portion, and a light projection and reception window portion for light projection and reception is formed through the opposing wall portion. To do.

  In this invention, the sensor unit is provided such that the detection surface for performing light projection and reception faces the opposing wall portion of the protection unit, and light projection and reception of the sensor unit is performed through the light projection and reception window. Thereby, since a sensor unit is covered by the opposing wall part of a protection part, the detection surface of a sensor unit can be protected.

  According to a fifth aspect of the present invention, in the plate-shaped member detection device according to any one of the first to fourth aspects, the sensor unit includes only a light projecting unit of the light projecting unit and a light receiving unit of the light receiving unit. The gist is that the head unit has

  In the present invention, the sensor unit attached to the sensor attachment member is a head unit having only the light projecting unit of the light projecting unit and the light receiving unit of the light receiving unit. For this reason, the sensor unit attached to the sensor attachment member can be reduced in size, and this makes it possible to cope with even a small arrangement interval of the plate-like members in the plate thickness direction.

  The invention described in claim 6 is the gist of the plate member detection device according to any one of claims 1 to 5, wherein the sensor unit is detachably attached to the sensor attachment member. To do.

  In this invention, since the sensor unit is detachably attached to the sensor mounting member, when the sensor unit needs to be replaced due to a malfunction of the sensor unit, or the sensor unit selected from a plurality of types of sensor units having different detection distances It becomes possible to deal with when changing to.

  A seventh aspect of the present invention is the plate member detection device according to the sixth aspect, wherein the sensor mounting member is detachably mounted on a base member, and the sensor unit includes a plurality of types having different detection distances. The gist is that a sensor unit selected from among the sensor units can be attached to and detached from the sensor mounting member.

  In this invention, the sensor attachment member is detachably attached to the base member, and a sensor unit selected from a plurality of types of sensor units having different detection distances is detachably attached to the sensor attachment member. For this reason, it becomes possible to cope with a change in the detection distance of the sensor unit accompanying a change in the arrangement interval of the plate-like members.

  The invention according to claim 8 is the plate-like member detection device according to any one of claims 1 to 7, wherein each sensor unit is provided at a tip of a signal line for connection to the outside. The gist is that the connector is detachably mounted.

  In this invention, a connector provided at the tip of a signal line for connecting to the outside is detachably attached to the sensor unit. For this reason, it becomes possible to remove a sensor unit from a plate-shaped member detection apparatus separately at the time of replacement | exchange of a sensor unit.

  The invention according to claim 9 is the plate-like member detection device according to any one of claims 1 to 8, wherein each of the sensor units has a detection sensitivity setting means for adjusting its own detection sensitivity. The gist is prepared.

  According to the present invention, since each sensor unit is provided with detection sensitivity setting means for adjusting the detection sensitivity, variations in detection sensitivity among the sensor units can be reduced.

  A tenth aspect of the present invention is the plate member detection device according to any one of the first to ninth aspects, wherein each of the sensor units includes an operation display unit for confirming its own detection operation. This is the gist.

In this invention, since each sensor unit is provided with an operation display unit for confirming the detection operation, it can be confirmed whether each sensor unit is operating.
The gist of an eleventh aspect of the invention is the plate-like member detection device according to any one of the first to tenth aspects, wherein the sensor mounting member is grounded.

  In the present invention, since the sensor mounting member is grounded, static electricity charged on the plate-like member or the like flows to the ground via the sensor mounting member, thereby suppressing the influence of electrostatic noise.

  Therefore, according to the above described invention, it is possible to provide a plate-like member detection device that can prevent the sensor unit from being damaged.

DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, an embodiment of the invention will be described with reference to the drawings.
1 and 2 show a plate-like member detection apparatus 1 according to the present embodiment. The plate-like member detection device 1 includes a long base member 2 and a plurality of detection units 3 that are detachably attached at equal intervals along the longitudinal direction of the base member 2 (the vertical direction in this case). For example, it is for collectively detecting the presence or absence of a plate-like member W such as a glass substrate used for a flat panel display arranged in a cassette (not shown) at intervals in the plate thickness direction.

  The base member 2 made of a metal member is formed in a square cylinder shape having a hollow portion 11. The base member 2 is provided with accommodation holes 12 formed by penetrating one corner of the base member 2 in the horizontal direction (see FIGS. 3 and 4), each having the same shape and at equal intervals along the longitudinal direction. In the base member 2, the detection units 3 are respectively attached to the accommodation holes 12. The base member 2 is grounded, and static electricity charged on the plate member W flows to the ground via the metal sensor mounting member 21 and the base member 2 of the detection unit 3.

As shown in FIGS. 1 to 4, each detection unit 3 includes a sensor attachment member 21 and a fiber sensor 22 having a controller unit 31 and a head unit 32 that are detachably attached to the sensor attachment member 21. The sensor mounting member 21 formed by sheet metal processing from a single plate-like metal member includes an upper wall 21a as an opposing wall portion extending in a direction orthogonal to the outer surface of the base member 2 (in this case, the horizontal direction). Yes. On both sides in the longitudinal direction of the upper wall 21a, a first side wall 21b and a second side wall 21c as a pair of wall portions extending downward are bent. The base end portion of the sensor mounting member 21 includes a mounting piece 23 formed by cutting and raising from the upper wall 21a at a right angle, and a mounting piece 24 formed by bending the second side wall 21c at a right angle by screws 25, respectively. By being fastened, the base member 2 is detachably attached. The mounting piece 23 formed on the upper wall 21a is bent at a right angle with respect to the upper wall 21a, and further bent at a right angle along the corner of the base member 2 so as to be fitted to the corner. Is formed.

  A controller mounting portion 26 for mounting the controller unit 31 is formed at the base end of each sensor mounting member 21, and one side portion of the controller unit 31 is connected to the upper wall on the second side wall 21 c side. A sandwiching piece 27 sandwiched between 21a is bent. A holding claw 28 formed by cutting and raising the upper wall 21a downward is provided at the longitudinal center of the upper wall 21a. The tip of the sensor mounting member 21 has a U-shaped cross section with an upper wall 21a and first and second side walls 21b and 21c. The upper wall 21a and the first and second side walls 21b and 21c are protected. A protective recess 29 is formed as a part. In addition, a light projecting / receiving window 30 extending in the width direction is formed through the tip of the upper wall 21a of the sensor mounting member 21.

  Each fiber sensor 22 includes a controller unit 31 and a head unit 32 which are separated from each other. These units 31 and 32 are a light projecting optical fiber 33a constituting a light projecting means and a light receiving light constituting a light receiving means. They are connected by a fiber 33b. The controller unit 31 and the head unit 32 have a flat rectangular box shape, and the head unit 32 is configured to be smaller than the controller unit 31.

  Each controller unit 31 is detachably fastened to the clamping piece 27 via the unit 31 from the upper wall 21a side of the controller mounting portion 26 with screws 34, and is accommodated in the accommodation hole 12 of the base member 2. Each controller unit 31 includes a control device 41, a light projecting element 42 that constitutes a light projecting means electrically connected to the device 41, and a light receiving element 43 that constitutes a light receiving means ( (See FIG. 5). Further, an operation unit 44 as a detection sensitivity setting unit, a display unit 45, and an operation display lamp 46 as an operation display unit are provided on the outer surface of each controller unit 31, respectively. The operation unit 44 is used to adjust the detection sensitivity of the head unit 32, and the control device 41 sets the detection sensitivity of the fiber sensor 22 based on the output signal output by the operation of the operation unit 44. The control device 41 causes the display unit 45 to display the detection sensitivity of the fiber sensor 22. The control device 41 turns on the operation indicator lamp 46 during the detection operation of the fiber sensor 22, and turns it off when the detection operation is not correctly performed. The controller unit 31 is inserted into the inside of the base member 2 from the accommodation hole 12 to about half of the longitudinal direction, and the operation unit 44, the display unit 45, and the operation indicator lamp 46 are provided on the first side wall 21 b side of the sensor mounting member 21. It is provided to be exposed.

  A connector 47 at the tip end of the signal line 48 inserted through the hollow portion 11 of the base member 2 is detachably attached to and electrically connected to the base end portion of each controller unit 31. A light projecting optical fiber 33a and a light receiving optical fiber 33b are detachably connected to the tip of the controller unit 31. The light projecting optical fiber 33 a and the light receiving optical fiber 33 b are held by the holding claws 28 of the upper wall 21 a at the center in the longitudinal direction, and their tips are connected to a head unit 32 mounted in the protective recess 29. (See FIGS. 2 and 4).

The head unit 32 includes a flat rectangular box-shaped case 51 made of a resin member, and a light projecting unit 52 and a light receiving unit that constitute a light projecting unit connected to the tips of the light projecting optical fiber 33a and the light receiving optical fiber 33b, respectively. The light receiving part 53 which comprises these. The light projecting unit 52 and the light receiving unit 53 are partially exposed from the detection surface 54 that performs light projecting and receiving of light in the case 51. The head unit 32 is provided so that its detection surface 54 faces the upper wall 21a of the protective recess 29, and is detachably fastened by screws 55 from the upper wall 21a. Further, the head unit 32 is provided at a position slightly inside the protective recess 29, and substantially the entire detection surface 54 is covered by the protective recess 29, and the upper wall 21a and the first and second side walls 21b of the protective recess 29 are covered. 21c slightly protrudes from the head unit 32 toward the front end side. That is, the protective recess 29 protects the vertical angle of the rectangular head unit 32 from collision with the plate member W. The head unit 32 transmits and receives light through the light projecting / receiving window 30. Since the head unit 32 is detachably provided, the head unit 32 can be replaced with a head unit selected from a plurality of types of head units having different detection distances.

  In the plate-shaped member detection apparatus 1 configured as described above, the presence or absence of the plate-shaped member W is achieved by inserting the head units 32 attached to the tips of the respective detection units 3 into the lower surfaces of the corresponding plate-shaped members W, respectively. Detection is performed. The control device 41 of the controller unit 31 causes the light projecting element 42 to emit light and transmits the light to the light projecting unit 52 of the head unit 32 via the light projecting optical fiber 33a. The transmitted light is emitted upward from the light projecting unit 52. Light including light reflected from the light projecting unit 52 reflected by the lower surface of the plate member W is incident on the light receiving unit 53, and the incident light is received by the light receiving element 43 via the light receiving optical fiber 33b. Is done. The light receiving element 43 outputs a light reception signal of a level corresponding to the amount of received light to the control device 41. The control device 41 changes the level of the light reception signal (light reception) that changes depending on the presence or absence of the plate member W based on the light reception signal. Quantity) and a threshold value for detection, and a detection signal corresponding to the comparison result is output to an external device via a signal line 48.

  When performing such detection, each detection unit 3 is inserted into the lower surface side of the corresponding plate member W. However, the detection unit is arranged such that the plate member W is inclined with respect to the detection unit 3. 3 may collide with the plate member W. At this time, since the front end of the protective recess 29 protrudes from the head unit 32 toward the front end side, that is, the insertion direction side of the head unit 32, only the protective recess 29 comes into contact with the plate member W. Collision with the unit 32 is prevented in advance, and damage to the head unit 32 due to this is prevented.

Next, characteristic actions and effects of the present embodiment will be described.
(1) At the front end of the sensor mounting member 21 provided at equal intervals in the longitudinal direction of the base member 2, the upper wall 21a and the first and second side walls 21b and 21c serve as a protective portion having a U-shaped cross section. A protective recess 29 is provided. The protective recess 29 is provided with a head unit 32 slightly inside the protective recess 29, and the rectangular head unit 32 collides with the plate-like member W by the protective recess 29. Protected from. For this reason, a direct collision between the head unit 32 and the plate-like member W when the head unit 32 is inserted between the plate-like members W is prevented, and thus the head unit 32 can be prevented from being damaged. . Further, since the sides adjacent to the upper wall 21a and the side wall 21b are protected by the protective recess 29, the head unit 32 can be more reliably prevented from being damaged. Furthermore, the impact protection performance of the recess 29 can be improved by forming the protection recess 29 in a U-shaped cross section that is resistant to impact.

(2) Since the sensor mounting member 21 is formed by sheet metal processing from a single plate-like metal member, the sensor mounting member 21 can be simplified and reduced in cost.
(3) Since the head unit 32 is fixed to the upper wall 21 a of the protective recess 29, the head unit 32 can be easily and reliably attached to the sensor attachment member 21.

  (4) The head unit 32 is provided such that the detection surface 54 that performs light projection and reception faces the upper wall 21 a of the protective recess 29, and light projection and reception of the head unit 32 is performed through the light projection and reception window 30. . Thereby, since the head unit 32 is covered with the upper wall 21a of the protection recessed part 29, the detection surface 54 of a sensor unit can be protected.

(5) A resin member having a low reflectance is used for the case 51 of each head unit 32. For this reason, it is possible to suppress erroneous detection of the plate-like member W due to the light emitted from the light projecting unit 52 of the head unit 32 being reflected by the back surface of another adjacent head unit 32.

  (6) Each fiber sensor 22 is configured such that the controller unit 31 and the head unit 32 are separated from each other, and only the light projecting portion 52 and the light receiving portion 53 are provided in the protective recess 29 at the tip of the sensor mounting member 21. A head unit 32 is provided. For this reason, the head unit 32 can be made smaller than the controller unit 31, and this makes it possible to cope with a case where the arrangement interval of the plate-like members W in the thickness direction is small.

  (7) The head unit 32 and the controller unit 31 are detachably attached to the sensor mounting member 21. For this reason, it becomes possible to deal with when it is necessary to replace the head unit 32 and the controller unit 31 due to a malfunction or when the head unit 32 is replaced with one selected from a plurality of types of head units having different detection distances.

  (8) The controller unit 31 is detachably attached to the sensor attachment member 21 and is detachably accommodated in the accommodation hole 12 formed in the base member 2. For this reason, it becomes possible to deal with when it is necessary to replace the controller unit 31 accompanying the malfunction of the controller unit 31 or the malfunction of the head unit 32.

  (9) Each controller unit 31 is provided with an operation unit 44 as detection sensitivity setting means for adjusting the detection sensitivity of the corresponding head unit 32. For this reason, the dispersion | variation in each detection sensitivity of each fiber sensor 22 can be reduced.

(10) Since each controller unit 31 is provided with the operation indicator lamp 46 for confirming the detection operation, it is possible to confirm whether or not each fiber sensor 22 is operating.
(11) Since the detection unit 3 composed of the sensor attachment member 21 and the controller unit 31 and the head unit 32 attached to the sensor attachment member 21 is detachably provided on the base member 2, the detection unit 3 is integrated. Can be exchanged.

  (12) The base member 2 has a cylindrical shape having the hollow portion 11, and the base end portion of each controller unit 31 is inserted into the hollow portion 11 from the accommodation hole 12 formed through the outer surface of the base member 2. For this reason, each signal line 48 connected to the base end part of the controller unit 31 can be passed through the hollow part 11, thereby simplifying the routing of each signal line 48.

  (13) Since the base member 2 is made of a metal member and the sensor mounting member 21 is grounded, the static electricity charged in the plate member W flows to the ground via the sensor mounting member 21 and the base member 2. Thereby, the influence by electrostatic noise can be suppressed.

  (14) Since the attachment position of the head unit 32 is guided by the pair of side walls 21b and the upper wall 21a, the head unit 32 can be easily attached to the sensor attachment member 21.

  (15) A head unit selected from a plurality of types of head units with different detection distances is detachably attached to the sensor attachment member 21. For this reason, it becomes possible to cope with a change in the detection distance of the head unit 32 accompanying a change in the arrangement interval of the plate-like members W.

  (16) Since the connector 47 at the distal end of the signal line 48 for electrical connection to the outside is detachably attached to the proximal end of the controller unit 31, the fiber sensor 22 can be detached individually. .

The embodiment of the present invention may be modified as follows.
In the above embodiment, the base member 2 is formed in a cylindrical shape having the hollow portion 11, and the signal line 48 connected to each controller unit 31 is inserted into the hollow portion 11 of the base member 2. The signal line 48 may be provided along the outer surface of the base member 2, for example, with the base member 2 having a columnar shape.

  In the above embodiment, a part of the detection unit 3 including each controller unit 31 is accommodated in the accommodation hole 12 of the base member 2. However, for example, the accommodation hole 12 may be omitted and supported without being accommodated.

  In the above embodiment, the fiber sensor 22 in which the controller unit 31 and the head unit 32 are separated is used for each sensor, but an integrally configured sensor may be used.

In the embodiment described above, the controller unit 31 and the head unit 32 are detachably provided on each sensor mounting member 21, but may be fixed so as not to be detachable.
-In above-mentioned embodiment, although the detection unit 3 (sensor attachment member 21) was provided in the base member 2 so that attachment or detachment was possible, you may fix so that attachment or detachment is impossible.

  In the above embodiment, the head unit 32 is attached to the upper wall 21a of the protective recess 29, but the present invention is not limited to this. For example, the head unit 32 may be attached to the first side wall 21b or the second side wall 21c. Good.

  In the above embodiment, a resin member is used for the case 51 of the head unit 32. However, the present invention is not limited to this. If the surface reflectance is low, for example, a metal member is used. A thing may be used.

  In the above embodiment, the head unit 32 is provided so that the detection surface 54 that performs light projection and reception faces the upper wall 21a of the protective recess 29, but is not limited to this. The back surface may be provided to face the upper wall 21a. In this case, the light projecting unit 52 of the head unit 32 emits light toward the upper surface of the plate-like member W.

  In the above embodiment, the protective recess 29 has the first and second side walls 21b and 21c extending downward from the upper wall 21a. However, the first and second side walls 21b and 21c extend upward. It is good also as a structure. In addition, the shape is not limited to the U-shaped concave portion, for example, the shape in which the tip of the upper wall 21a is bent downward, the shape in which at least one of the first sidewall 21b and the second sidewall 21c is omitted, and the tip of the upper wall 21a are omitted. The shape may be a square shape or a square tube shape.

  In the above embodiment, the upper wall 21a is provided with the light projecting / receiving window 30 extending in the width direction. However, the present invention is not limited to this. For example, it corresponds to each of the light projecting unit 52 and the light receiving unit 53. Two light emitting / receiving windows may be provided.

  In the above embodiment, the head unit 32 has a rectangular shape, but may have other shapes. In this case, the rectangular apex angle that can accommodate the head unit is protected from a collision with the plate member W by the protection portion.

  In the above embodiment, the light projecting element 42 and the light receiving element 43 are disposed in the controller unit 31, but the present invention is not limited to this, and may be provided in the head unit 32, for example.

  In the above embodiment, the sensor attachment member 21 is formed by sheet metal processing from a single plate-like metal member, but is not limited to this, and may be formed by, for example, cutting, You may form from two or more members.

  In the above embodiment, the tip (head unit 32) of the detection unit 3 is inserted below the plate-like member W to detect the plate-like member W. However, for example, the plane of the plate-like member W is not inserted. Detection may be performed by emitting light from the parallel direction to the end face of the plate member W.

  The plate-like member W of the above embodiment may be, for example, a semiconductor wafer, a magnetic disk substrate, or an electronic circuit substrate in addition to a glass substrate used for a flat panel display. Moreover, plate-like members, such as a dial of a timepiece, a flat cover body, a pulley, and a washer, used other than an electric product may be used.

It is the perspective view which looked at the plate-shaped member detection apparatus in this Embodiment from diagonally upward. It is the perspective view which looked at the plate-shaped member detection apparatus from diagonally downward. It is an exploded view of a plate-shaped member detection apparatus. It is an exploded view of a plate-shaped member detection apparatus. It is a block diagram which shows the outline of the electrical constitution of a fiber sensor.

Explanation of symbols

  W: plate-like member, 1 ... plate-like member detection device, 2 ... base member, 3 ... detection unit, 11 ... hollow portion, 12 ... receiving hole, 21 ... sensor mounting member, 21a ... upper wall as opposed wall portion, 21b... Side wall as a wall, 22... Fiber sensor, 29... Protective recess as a protection, 30... Projecting / receiving window, 31. An optical fiber, 33b, a light receiving optical fiber constituting the light receiving means, 41, a control device, 42, a light projecting element constituting the light projecting means, 43, a light receiving element constituting the light receiving means, and 44, a detection sensitivity setting means. Operation unit 46: Operation indicator as an operation display unit, 47: Connector, 48 ... Signal line, 51 ... Case, 52 ... Light projecting part constituting light projecting means, 53 ... Light receiving part constituting light receiving means, 54 ... detection surface.

Claims (11)

A sensor unit having at least light projecting means for projecting light toward the plate-like member and light receiving means for receiving reflected light from the plate-like member is attached to the sensor attachment member, and the sensor unit is interposed via the sensor attachment member. A plurality of sensor units are arranged in the vicinity of the plate-like members that are arranged at predetermined intervals in the longitudinal direction of the long base member and arranged at predetermined intervals in the plate thickness direction. A plate-like member detection device for detecting a member,
Each of the sensor mounting members is made of a metal member, and includes a protective member that protects a rectangular apex angle that can accommodate the sensor unit from collision with the plate member. apparatus. In the plate-shaped member detection apparatus according to claim 1,
The said sensor attachment member was formed by sheet metal processing from the sheet metal member of 1 sheet, The plate-shaped member detection apparatus characterized by the above-mentioned. In the plate-shaped member detection apparatus according to claim 1 or 2,
The protection part of the sensor mounting member includes a wall part that is abutted against the sensor unit in at least two directions,
The plate-shaped member detection device, wherein the sensor unit is attached to the protection unit in a state of being abutted against the wall portions. In the plate-shaped member detection apparatus according to any one of claims 1 to 3,
The sensor mounting member has an opposing wall portion facing the plate-like member,
The sensor unit is provided so that a detection surface for performing light projection and reception faces the opposing wall portion, and a light projection and reception window portion for performing light projection and reception is formed through the opposing wall portion. A plate-shaped member detecting device. In the plate-shaped member detection apparatus of any one of Claims 1-4,
The plate-like member detection apparatus, wherein the sensor unit is a head unit having only a light projecting unit of the light projecting unit and a light receiving unit of the light receiving unit. In the plate-shaped member detection apparatus according to any one of claims 1 to 5,
The plate-like member detection device, wherein the sensor unit is detachably attached to the sensor attachment member. In the plate-shaped member detection apparatus according to claim 6,
The sensor attachment member is detachably attached to the base member,
The plate-shaped member detection device, wherein the sensor unit is detachable from a sensor mounting member selected from a plurality of types of sensor units having different detection distances. In the plate-shaped member detection apparatus according to any one of claims 1 to 7,
A connector provided at the tip of a signal line for electrical connection to the outside is detachably attached to each sensor unit. In the plate-shaped member detection apparatus according to any one of claims 1 to 8,
Each of the sensor units is provided with a detection sensitivity setting means for adjusting its own detection sensitivity. In the plate-shaped member detection apparatus according to any one of claims 1 to 9,
Each of the sensor units includes an operation display unit for confirming its own detection operation. In the plate-shaped member detection apparatus of any one of Claims 1-10,
The plate-like member detection device, wherein the sensor attachment member is grounded.

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