JP2008108720A - Discharge element, electric discharge module using the discharge element and ozone generating device and ion generating device using the electric discharge module - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve a problem that it has been difficult to increase an amount of ion and ozone generation by enhancing discharging efficiency while suppressing the sticking of a nitrate salt and NOx to the surface of a protecting layer. <P>SOLUTION: The discharge element has a protective layer having a first region and a second region of different heights from an insulating substrate up to an upper surface and the second region is arranged to pinch the first region in a plan view, and the first region has a smaller thickness on a discharge electrode than the second region and the deposition of nitrate and NOx on the protective layer surface can be prevented and the discharge efficiency is enhanced and a large volume of ion and ozone can be generated. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a discharge element used in an ozone generator, an ion generator, and the like, a discharge module using the discharge element, an ozone generator using the discharge module, and an ion generator.

  A discharge element using creeping corona discharge can generate corona discharge by energizing between the discharge electrode and the dielectric electrode to generate ions and ozone, so it is used in ozone generators and ion generators. It has been.

Moreover, in order to generate ions or ozone more efficiently, there has been proposed one in which the height of the ventilation path is changed directly above the discharge electrode constituting such a discharge element (Patent Document 1). Thus, by changing the height of the ventilation path and controlling the flow velocity of the air flowing on the discharge element, the amount of ions or ozone generated can be controlled.
JP-A-8-217413

  When ions or ozone is generated using such a discharge element, there is a problem that nitrate is generated at the same time and the discharge efficiency is lowered. However, the discharge element disclosed in Patent Document 1 can increase the amount of ions or ozone generated, but on the other hand, the generation of nitrate that reduces the discharge efficiency while maintaining the amount of ions or ozone generated. It was difficult to reduce the amount. This is because the discharge element disclosed in Patent Document 1 increases or decreases the flow velocity of the entire air flowing on the discharge element.

  In addition, the amount of ions or ozone generated can be increased by reducing the thickness of the protective layer. However, when the thickness of the protective layer is reduced in this way, the effect of the protective layer is reduced, and the reduction in discharge efficiency due to nitrate is increased.

  Alternatively, the amount of ions or ozone generated can be increased by increasing the discharge voltage. However, when the discharge voltage is increased, the power consumption increases and the influence of the discharge on the discharge electrode and the dielectric layer (insulating substrate) increases, making it difficult to improve the durability.

  This invention is made | formed in view of the said subject, and it aims at providing the discharge element by which the generation amount of the nitrate which reduces discharge efficiency was suppressed, maintaining the generation amount of ion or ozone.

  The first discharge element of the present invention includes an insulating substrate, a discharge electrode formed on at least one surface of the insulating substrate, a dielectric electrode embedded in the insulating substrate, the insulating substrate, and the A protective layer formed on the discharge electrode, and the protective layer has a first region and a second region having different thicknesses on the discharge electrode, and when viewed in plan The second region is disposed so as to sandwich the first region, and the thickness on the discharge electrode in the first region is smaller than the thickness on the discharge electrode in the second region. To do.

  Moreover, it is preferable that the thickness of the discharge element in the portion including the first region is substantially equal to the thickness of the discharge element in the portion including the second region. Or it is preferable that the thickness of the discharge element of the part containing the said 1st area | region is smaller than the thickness of the discharge element of the part containing the said 2nd area | region.

  Moreover, it is preferable that the said protective layer consists of a said 1st area | region and a said 2nd area | region. The first region is preferably formed on a central portion of the insulating substrate. Here, being formed on the central portion of the insulating substrate means that the first region includes the center of the width of the insulating substrate in the direction perpendicular to the wind direction. . The difference in thickness between the first region and the second region is preferably 30 to 90 μm.

  In addition, a plurality of discharge electrodes are formed on at least one surface of the insulating substrate so as to be spaced apart from each other, and the number of discharge electrodes located under the first region per unit area It is preferable that the number of discharge electrodes located under the region 2 is larger than the number per unit area. Here, the number per unit area of the discharge electrode means the number per unit area of the discharge electrode with respect to the area of the first region or the second region of the protective layer when the discharge element is seen in a plan view. . In addition, it is preferable that a perimeter per unit area of the discharge electrode located under the first region is longer than a perimeter per unit area of the discharge electrode located under the second region. . Here, the perimeter per unit area of the discharge electrode is a boundary line between the discharge electrode and the insulating substrate with respect to the area of the first region or the second region of the protective layer when the discharge element is seen in a plan view. Means the total perimeter of the unit area.

  The discharge electrode has a plurality of pointed portions, and the number of the pointed portions per unit area of the discharge electrode located below the first region is located below the second region. It is preferable that the number of the pointed portions per unit area of the discharge electrode is larger. Moreover, it is preferable that the said discharge electrode has a some pointed part, and the space | interval of the front-end | tip of these some pointed part is 0.1-2 mm. In addition, it is preferable that at least a part of the discharge electrode is formed with alternating short cusps and long cusps. Moreover, it is preferable that the said discharge electrode is arrange | positioned on both surfaces of the one surface and the other surface of the said insulating substrate.

  The second discharge element of the present invention includes an insulating substrate, a discharge electrode formed on at least one surface of the insulating substrate, a dielectric electrode embedded in the insulating substrate, the insulating substrate, and the A protective layer formed on the discharge electrode, and a region of the protective layer formed on the discharge electrode has a thickness corresponding to a flow velocity distribution of the fluid flowing on the protective layer. It is characterized by being.

  Moreover, it is preferable that the area | region where the flow velocity which flows on the said protective layer is quick is smaller than the area | region where the flow velocity of the fluid which flows on the said protective layer is slow. Moreover, it is preferable that the said discharge electrode has a some pointed part, and the space | interval of the front-end | tip of these some pointed part is 0.1-2 mm. In addition, it is preferable that at least a part of the discharge electrode is alternately formed with short cusps and long cusps.

Moreover, it is preferable that the said discharge electrode is arrange | positioned on both surfaces of the one surface and the other surface of the said insulating substrate.

  A discharge module according to the present invention includes any one of the discharge elements described above and a ventilation path in which the discharge elements are disposed.

  In the discharge module of the present invention, it is preferable that the velocity of the fluid flowing on the first region is larger than the flow velocity of the fluid flowing on the second region when the fluid flows in the ventilation path. . Moreover, it is preferable that the location where the flow velocity of the fluid flowing on the protective layer on the discharge electrode is the fastest is on the first region. Moreover, it is preferable that the location where the flow velocity of the fluid flowing on the protective layer on the discharge electrode is the slowest is on the second region.

  The ozone generator of this invention is equipped with the discharge module in any one of said. Moreover, the ion generator of this invention is equipped with the discharge module in any one of said, It is characterized by the above-mentioned.

  According to the first discharge element of the present invention, the protective layer has the first region and the second region having different thicknesses on the discharge electrode. The first region is disposed so as to sandwich the first region, and the thickness on the discharge electrode in the first region is smaller than the thickness on the discharge electrode in the second region.

  As described above, in the first discharge element of the present invention, the thickness on the discharge electrode in the second region, which is an end portion where nitrate and NOx are likely to be generated, is increased, and conversely, on the discharge electrode in the first region. The thickness is reduced. Therefore, the discharge on the second region where nitrate is likely to be generated is suppressed as compared with the discharge on the first region where nitrate is difficult to be generated. As a result, the amount of nitrate and NOx generated is suppressed, and the amount of adhesion to the protective layer surface is suppressed. On the other hand, the discharge efficiency is increased and a large amount of ozone can be generated.

  According to the second discharge element of the present invention, the region formed on the discharge electrode in the protective layer has a thickness corresponding to the distribution of the flow velocity of the fluid flowing on the protective layer. Therefore, unnecessary discharge can be suppressed and discharge can be effectively performed in a predetermined region.

  The flow velocity distribution of a fluid such as air passing over the discharge element is generally not constant. However, since the protective layer has a thickness corresponding to the distribution of the flow velocity of the fluid flowing on the protective layer, discharge in a region where nitrate is likely to be generated is suppressed. As a result, the amount of nitrate and NOx generated is suppressed, and the amount of adhesion to the protective layer surface is suppressed. On the other hand, the discharge efficiency is increased and a large amount of ozone can be generated.

  Hereinafter, the first discharge element of the present invention will be described in detail with reference to the drawings. FIG. 1 is an exploded perspective view showing an example of an embodiment according to the first discharge element of the present invention. FIG. 2A is a cross-sectional view showing an arrangement state of discharge electrodes according to the discharge element of the embodiment shown in FIG. FIG. 2B is an enlarged cross-sectional view of the region A in FIG. FIG. 3 is a cross-sectional view of the discharge element shown in FIG.

  As shown in FIGS. 1 to 3, the discharge element 1 of the present embodiment is embedded in the insulating substrate 3, the discharge electrode 5 formed on at least one surface of the insulating substrate 3, and the insulating substrate 3. A dielectric electrode 7 and a protective layer 9 formed on the insulating substrate 3 and the discharge electrode 5 are provided. The protective layer 9 has a first region 9a and a second region 9b having different thicknesses on the discharge electrode 5. When the discharge element 1 is viewed in plan, the second region 9b It arrange | positions so that the 1st area | region 9a may be pinched | interposed. Furthermore, the thickness on the discharge electrode 5 in the first region 9a is smaller than the thickness on the discharge electrode 5 in the second region 9b.

  In the conventional discharge element, since the thickness of the protective layer on the discharge electrode is constant, it is difficult to increase the durability of the discharge element while increasing the generation amount of ions and ozone. However, in the discharge element 1 according to this embodiment, the thickness of the protective layer 9 on the discharge electrode 5 in the first region 9a is smaller than the thickness of the protective layer 9 on the discharge electrode 5 in the second region 9b. Thus, it is possible to generate a large amount of ions and ozone while suppressing the generation amount of nitrate (NOx). At the same time, since the thickness of the second region 9b is larger than that of the first region 9a, the influence of nitrate on the discharge electrode 5 can be reduced.

  From these facts, the thickness difference L1 between the first region 9a and the second region 9b of the protective layer 9 is preferably 30 μm or more. This is because by setting the difference in thickness to 30 μm or more, it is possible to further reduce the amount of nitrate generated and generate more ions and ozone.

  Further, the difference in thickness between the first region 9a and the second region 9b of the protective layer 9 is preferably 90 μm or less. By setting the difference in thickness to 90 μm or less, it is possible to reduce stress that tends to concentrate on the boundary between the first region 9a and the second region 9b of the protective layer 9 during firing. As a result, the possibility of cracks occurring at this boundary can be suppressed, so that the productivity of the discharge element 1 can be improved. In addition, since it is possible to suppress the dielectric breakdown from reaching the insulating substrate 3, the durability of the discharge electrode 5 can be improved.

  The protective layer 9 is formed to prevent deterioration of the discharge electrode 5 due to nitrate. Therefore, the thickness of the protective layer 9 on the discharge element 1 is preferably formed so as to be 10 μm or more even at the smallest thickness. Even when a high voltage is applied, the insulating property can be maintained by setting the thickness to 10 μm or more. Further, it is preferably formed so as to be 100 μm or less even in the thickest place. Since the reduction in discharge efficiency can be suppressed by setting the thickness to 100 μm or less, more ions and ozone can be generated.

  The protective layer 9 may be made of any material having good insulation properties, and for example, ceramics made of alumina, mullite, cordierite, zirconia, or the like can be used. By using a protective layer 9 having a good insulating property as described above, unnecessary discharge in this region is suppressed, so that the durability of the discharge electrode 5 is reduced due to the generation of nitrate and the discharge itself. It can suppress more effectively. In addition, power consumption can be suppressed by suppressing unnecessary discharge.

  FIG. 4 is a cross-sectional view showing another example of the embodiment according to the first discharge element of the present invention. As shown in FIG. 4, it is preferable that the thickness L2 of the portion of the discharge element 1 including the first region 9a is substantially equal to the thickness L3 of the portion of the discharge element 1 including the second region 9b. By making the height of the discharge electrode 5 located in the first region 9a from the lower surface of the discharge element 1 higher than the height of the discharge electrode 5 located in the second region 9b from the lower surface of the discharge element 1, It can be made into a shape as shown in FIG.

  In such a case, the upper surface of the protective layer 9 becomes flat, and no step is formed between the first region 9a and the second region 9b, so that the concentration of stress on the step can be reduced. In addition, here, “substantially equal” means that the difference in average thickness between the first region 9a and the second region 9b is smaller than the size of the unevenness on the upper surface of the protective layer 9 which is unavoidable in manufacturing. Means.

  FIG. 5 is a cross-sectional view showing another example of the embodiment according to the first discharge element of the present invention. As shown in FIG. 5, it is also preferable that the thickness L2 of the portion of the discharge element 1 including the first region 9a is smaller than the thickness L3 of the portion of the discharge element 1 including the second region 9b. Thus, when the height of the upper surface of the second region 9b is higher than the height of the upper surface of the first region 9a with respect to the height of the upper surface of the protective layer 9, the air flow on the discharge element 1 is made smooth. Because it can be done.

  The air flow immediately above the second region 9b is more likely to stagnate than the air flow just above the first region 9a, and nitrate is likely to be generated. However, as shown in FIG. 3, by increasing the thickness of the portion of the discharge element 1 including the second region 9b, the space where the nitrate is likely to be generated can be reduced. In this way, the amount of nitrate generated can be suppressed.

  Moreover, as shown in FIG. 5, it is preferable that an inclined surface is provided between the first region 9a and the second region 9b. This is because the provision of the inclined surface can reduce the stress generated between the first region 9a and the second region 9b of the protective layer 9 during firing.

  Moreover, it is preferable that the protective layer 9 consists only of the 1st area | region 9a and the 2nd area | region 9b. For example, as shown in FIG. 3, the protective layer 9 is composed of the first region 9a and the second region 9b, so that the discharge efficiency can be improved without a complicated process and cost even though the structure is simple. Because it can.

  FIG. 6 is a cross-sectional view showing another example of the embodiment according to the first discharge element of the present invention. As shown in FIG. 3, the protective layer 9 may be formed of only the first region 9a and the second region 9b. On the other hand, as shown in FIG. 6, the third region 9c It is also preferable to provide another region in which the height from the insulating substrate 3 to the upper surface is different from the first region 9a and the second region 9b. By providing not only the first region 9a and the second region 9b but also the third region 9c and the like, and changing the thickness of the protective layer 9 stepwise, the amount of nitrate generated can be more effectively reduced. This is because it is possible to reduce ions and generate ozone and ozone more efficiently.

  The first region 9 a is preferably formed on the central portion of the insulating substrate 3. Since the first region 9a is formed in this way, the first region 9a can be positioned more reliably in a portion where the flow velocity of the air flowing over the protective layer 9 is relatively fast. This is because the second region 9b can be positioned in a portion where the flow velocity of the air flowing on the layer 9 is relatively slow. Thereby, adhesion of nitrate to the surface of the protective layer 9 is effectively suppressed, and ions and ozone can be generated efficiently.

  In addition, each of the first region 9a and the second region 9b is, for example, divided into four protective layers 9 in a direction orthogonal to the wind direction, and a substantially central 2/4 region is defined as the first region 9a. More preferably, the regions on both sides of the first region 9a are the second regions 9b. By doing in this way, since discharge efficiency can be improved more, generation | occurrence | production of nitrate is suppressed more and more ions and ozone can be generated.

  Moreover, as shown in FIGS. 1-3, it is preferable that the some discharge electrode 5 is formed in the at least one surface of the insulating substrate 3 mutually spaced apart. This is because the surface area of the discharge electrode 5 can be increased by forming the plurality of discharge electrodes 5 apart from each other. Since discharge tends to concentrate on the surface of the discharge electrode 5, when the discharge electrode 5 is formed as described above, the discharge efficiency can be further improved. In this case, as shown in FIGS. 1 and 3, the respective discharge electrodes 5 are electrically connected to each other via the filler 11 and the wiring circuit 13.

  Further, in the discharge element 1 using the linear discharge electrode 5, when the protective layer 9 has the first region 9a and the second region 9b, the protective layer 9 is continuously wide at the time of firing. A shrinkage difference occurs in the range. On the other hand, when the plurality of discharge electrodes 5 are formed apart from each other, the above-described shrinkage difference can be reduced. Thereby, the stress concerning the discharge electrode 5 and the protective layer 9 can be reduced, and the durability of the discharge element 1 can be improved.

  Furthermore, it is preferable that the number per unit area of the discharge electrode 5 located under the first region 9a is larger than the number per unit area of the discharge electrode 5 located under the second region 9b. By forming the discharge electrode 5 in this way, the density of the discharge electrode 5 positioned below the first region 9a can be relatively increased, so that more ions and ozone can be generated. Because it can. Ions and ozone can be generated efficiently in a region where the flow velocity of the air flowing directly above is relatively fast. Then, by increasing the number of discharge electrodes 5 disposed under the first region 9a, the amount of discharge on the first region 9a can be increased. As a result, ions and ozone can be generated efficiently while suppressing unnecessary discharge.

  Moreover, it is preferable that the space | interval of the discharge electrodes 5 formed mutually spaced apart is 0.5 mm or more. By setting these intervals to 0.5 mm or more, deterioration of the insulating substrate 3 and the protective layer 9 due to discharge is suppressed, and durability of the discharge element 1 is improved.

  Moreover, it is preferable that the perimeter per unit area of the discharge electrode 5 located under the first region 9a is longer than the perimeter of the discharge electrode 5 located under the second region 9b. . As already shown, since discharge tends to concentrate on the surface of the discharge electrode 5, the surface area of the discharge electrode 5 can be increased by increasing the peripheral length of the discharge electrode 5. Therefore, when the discharge electrode 5 is formed as described above, the discharge efficiency can be improved, so that ions and ozone can be generated efficiently while suppressing unnecessary discharge.

  In addition, as shown in FIG. 2, the discharge electrode 5 preferably has a plurality of pointed portions 15. This is because discharge is likely to occur at the tip of the pointed portion 15. The discharge electrode 5 preferably has a plurality of pointed portions 15 formed radially. Specifically, each pointed portion 15 may have a triangular shape or a cusp shape with the apex facing the outside of the discharge electrode 5. This is because by using such a shape, the discharge is concentrated on the tip. The discharge efficiency can be further increased by forming a plurality of such pointed portions 15.

  Further, the angle of the pointed portion 15, that is, the angle formed by the two sides extending from the triangular apex is preferably 30 ° or more. By setting the angle of the pointed portion 15 to 30 ° or more, it is possible to suppress the influence of ink bleeding during printing and form an acute angle. Thereby, the generation amount of ion and ozone can be increased reliably. The angle of the pointed portion 15 is preferably 90 ° or less. By setting the angle of the pointed portion 15 to 90 ° or less, strong current concentration can be caused in the pointed portion 15, so that the discharge amount can be increased.

  The distance between the tips of the pointed portions 15 in each discharge electrode 5 is preferably 100 μm or more. By setting these intervals to 100 μm or more, discharge between the pointed portions 15 is prevented, so that the discharge efficiency is not lowered and the deterioration of the insulating substrate 3 and the protective layer 9 is suppressed. This is because the durability of the discharge element 1 can be improved. Moreover, it is preferable that the space | interval of the front-end | tip of pointed part 15 is 2 mm or less. The discharge element 1 can be reduced in size by setting these intervals to 2 mm or less.

  Further, the discharge electrode 5 has a plurality of pointed portions 15, and the number of the pointed portions 15 per unit area of the discharge electrode 5 positioned below the first region 9 a is below the second region 9 b. The number is preferably larger than the number of pointed portions 15 per unit area of the discharge electrode 5 positioned. Since the discharge concentrates strongly at the acute angle portion of the discharge electrode 5, when the discharge electrode 5 is formed as described above, ions and ozone can be generated more efficiently.

  Further, when the short cusps 15a and the long cusps 15b are alternately formed on at least a part of the discharge electrode 5, the distance between the cusps 15 can be sufficiently maintained. Interference due to corona discharge between the pointed portions 15 is suppressed. As a result, deterioration of the insulating substrate 3 and the protective layer 9 due to discharge is suppressed, and the durability of the discharge element 1 is improved.

  In addition, when the discharge electrode 5 is formed as described above, the interval between the tips of the pointed portions 15 can be more reliably set to 100 μm or more, and discharge between the pointed portions 15 can be more reliably prevented. be able to. Further, since the short cusp portions 15a and the long cusp portions 15b are alternately formed, the interval between the discharge electrodes 5 that are more reliably separated from each other can be set to 0.5 mm or more as described above. It is also possible to increase the number of.

  Specifically, as shown in FIG. 2, the discharge electrodes 5 formed on the insulating substrate 3 so as to be separated from each other and electrically connected to each other via the filler 11 and the wiring circuit 13 are short. With the shape in which the pointed portions 15a and the long pointed portions 15b are alternately formed, it is possible to maintain the distance between the tips of the pointed portions 15. Further, as shown in FIG. 2B, the distance between the pointed portions 15 of the discharge electrode 5 and the distance between the short pointed portion 15a and the long pointed portion 15b of each discharge electrode 5 are 100 μm as described above. By setting it as the above, it becomes possible to suppress the discharge between the pointed parts 15, maintaining the discharge amount required in order to generate sufficient quantity of ions and ozone.

  Further, as shown in FIG. 3, when the discharge electrodes 5 are disposed on both the one surface and the other surface of the insulating substrate 3, the discharge area can be increased, so that ions or ozone The generation amount of can be greatly increased.

  Next, the 2nd discharge element of this invention is demonstrated. FIG. 7 is a cross-sectional view showing an example of an embodiment according to the second discharge element of the present invention.

  As shown in FIG. 7, the discharge element 1 of the present embodiment includes an insulating substrate 3, a discharge electrode 5 formed on at least one surface of the insulating substrate 3, and a dielectric electrode embedded in the insulating substrate 3. 7 and a protective layer 9 formed on the insulating substrate 3 and the discharge electrode 5. The region of the protective layer 9 formed on the discharge electrode 5 has a thickness corresponding to the flow velocity distribution of the fluid flowing on the protective layer 9. As described above, since the protective layer 9 in the discharge element 1 of the present embodiment has a thickness corresponding to the distribution of the flow velocity of the fluid flowing on the protective layer 9, unnecessary discharge is suppressed. It is possible to effectively discharge in the region.

  In general, the flow velocity distribution of a fluid such as air passing over the discharge element 1 is not constant. For this reason, when the thickness of the protective layer 9 is constant, a loss of discharge occurs in the region where the flow velocity of the fluid is low. However, in the discharge element 1 of the present embodiment, the region formed on the discharge electrode 5 in the protective layer 9 has a thickness corresponding to the distribution of the flow velocity of the fluid flowing on the protective layer 9. Therefore, it is possible to suppress discharge loss and improve discharge efficiency. Further, since the thickness of the protective layer 9 is large in a region where the flow rate of a fluid such as air that is liable to generate nitrate and easily adhere to the protective layer 9 is large, the durability of the discharge element 1 can also be improved.

  The flow rate on the discharge element 1 can be measured from the generated pressure difference by using a small diameter Pitot tube and arranging the Pitot tube directly above the discharge element 1. Further, the flow velocity distribution can be obtained by using the measured value as the flow velocity on the discharge element 1.

  The protective layer 9 is preferably formed smoothly according to the flow velocity distribution of the air flowing over the protective layer 9. This is because, since the protective layer 9 is formed smoothly, there are no steps, and therefore cracks that lead to deterioration of the discharge element 1 are unlikely to occur.

  The material of the protective layer 9 may be any material as long as it has a good insulating property as in the first discharge element of the present invention. For example, ceramics made of alumina, mullite, cordierite, zirconia, or the like can be used. .

  The protective layer 9 is formed in order to prevent deterioration of the discharge electrode 5 due to nitrate, but the protective layer 9 is preferably formed to have a thickness of 10 μm or more even at the smallest thickness. Even when a high voltage is applied, the insulating property can be maintained by setting the thickness to 10 μm or more. Further, it is preferably formed so as to be 100 μm or less even in the thickest place. Since the discharge efficiency is improved by setting the thickness to 100 μm or less, a desired amount of ions and ozone can be obtained more reliably.

  Moreover, since discharge tends to concentrate on the surface of the discharge electrode 5, it is preferable that the plurality of discharge electrodes 5 be formed apart from each other. By being formed apart from each other, the surface area of the discharge electrode 5 can be increased. In this case, as in the case of the first discharge element, each discharge electrode 5 is electrically connected to each other via the filler 11 and the wiring circuit 13. In the region where the flow velocity of the fluid flowing in the upper part is higher, the density of the discharge electrode 5 per unit area is larger, so that the surface area of the discharge electrode 5 becomes larger and more ions and ozone can be generated.

  Furthermore, it is preferable that the number per unit area of the discharge electrodes 5 located under the region where the fluid flow rate is high is larger than the number per unit area of the discharge electrodes 5 located under the region where the flow rate is slow. Thus, when the discharge electrode 5 is formed, discharge efficiency can be improved more. This is because discharge is generated from the discharge electrode 5, so that the flow rate is high and the density of the discharge electrode 5 located under the region where the amount of oxygen supply is large is increased. As a result, more ions and ozone are generated. It is because it can be made. Furthermore, if the thickness of the protective layer 9 is changed with the linear discharge electrode 5, a shrinkage difference occurs continuously over a wide range during firing, and thus there is a risk of cracks occurring in the discharge electrode 5. By forming 5 apart from each other, generation of cracks due to the above reason can be prevented.

  Moreover, it is preferable that the perimeter per unit area of the discharge electrode 5 located under the region where the flow rate is fast is longer than the perimeter per unit area of the discharge electrode 5 located under the region where the flow rate is slow. By forming the discharge electrode 5 in this way, the surface area of the discharge electrode 5 can be increased. Since discharge tends to concentrate on the surface of the discharge electrode 5, the discharge efficiency can be increased by increasing the surface area of the discharge electrode 5. Thereby, more ions and ozone can be generated. Furthermore, since the peripheral length of the discharge electrode 5 located under the region where the flow rate is high and the supply amount of oxygen is large, as a result, more ions and ozone can be generated, and the discharge efficiency is further improved. be able to.

  Further, when the discharge electrode 5 has a plurality of pointed portions 15 and the number of the pointed portions 15 per unit area is larger in the region where the flow velocity is higher than the region where the fluid flow velocity is slower, the discharge electrode 5 Since the discharge concentrates strongly at the acute angle, ions and ozone can be generated more efficiently.

  In addition, at least a part of the discharge electrode 5 can maintain a sufficient distance between the cusps 15 when the short cusps 15a and the long cusps 15b are alternately formed. Corona discharge between the portions 15 is suppressed, and as a result, deterioration of the insulating substrate 3 and the protective layer 9 due to discharge is suppressed, and durability of the discharge element 1 is improved.

  Further, when the discharge electrode 5 is provided on both surfaces of the one surface and the other surface of the insulating substrate 3, air passes over each surface on which the discharge electrode 5 is provided. Since the area is doubled, the amount of ions and ozone generated is greatly increased. As a result, it becomes possible to efficiently generate many ions and ozone.

  The discharge electrode 5 is formed on at least one surface of the insulating substrate 3, and the thickness of the discharge electrode 5 is preferably 5 to 50 μm after firing. By setting the thickness to 5 μm or more, the variation in the shape of the discharge electrode 5 is reduced, and the durability of the discharge electrode 5 against discharge can be improved, so the life of the discharge element 1 can be extended. It is. Moreover, it is because the level | step difference with the insulating board | substrate 3 in the outer peripheral part of the discharge electrode 5 becomes small by setting it as 50 micrometers or less, and generation | occurrence | production of the crack which may occur when forming the protective layer 9 can be suppressed.

  The material of the discharge electrode 5 may be any material having good conductivity. In the case of forming by simultaneous firing with the insulating substrate 3, it is preferable that the main component is a refractory metal such as tungsten (W), molybdenum (Mo), rhenium (Re).

  The thickness of the insulating substrate 3 is preferably 0.5 mm or more. By setting the thickness of the insulating substrate 3 to 0.5 mm or more, the deformation and warpage of the discharge element 1 itself can be prevented, so that the durability of the discharge element 1 is improved.

  Further, the insulating substrate 3 may be any substrate having good insulating properties, and similarly to the protective layer 9, for example, ceramics made of alumina, mullite, cordierite, zirconia, or the like can be used. The insulating substrate 3 is preferably made of the same material as the protective layer 9. By using the same material, it is possible to prevent a crack caused by a difference in thermal expansion from occurring near the boundary between the insulating substrate 3 and the protective layer 9 during firing.

  The dielectric electrode 7 is embedded in the insulating substrate 3. The thickness of the dielectric electrode 7 is preferably 5 to 50 μm after firing. By setting the thickness to 5 μm or more, variation in the shape of the dielectric electrode 7 is reduced, and the durability of the electrode against discharge is improved, so that the life of the discharge element 1 can be extended. Further, when the thickness is 50 μm or less, it is possible to remove the metallized ink during firing, and it is possible to prevent bubbles from being generated in the ceramic laminate.

  The material of the dielectric electrode 7 may be any material as long as it has good conductivity, like the discharge electrode 5, but is preferably composed mainly of a refractory metal such as tungsten (W), molybdenum (Mo), rhenium (Re). Is used.

  Further, the power feeding portion 17 for feeding power to the discharge electrode 5 and the dielectric electrode 7 is formed on the side surface portion 3a of the insulating substrate 3 or the other surface of the insulating substrate 3 where the discharge electrode 5 is not disposed. It is preferable. Thereby, the creeping distance between the power feeding unit 17 and the discharge electrode 5 can be ensured. In addition, as shown in FIG. 3, when the discharge electrode 5 is arrange | positioned on both surfaces of one surface and the other surface, the side part 3a of the insulating substrate 3, or the discharge electrode of the insulating substrate 3 5 is preferably formed on the peripheral edge 3b or the like where the discharge electrode 5 is not formed.

  Hereinafter, the manufacturing method of the discharge element 1 of this embodiment is demonstrated.

  First, metallized ink to be the discharge electrode 5 and the dielectric electrode 7 is produced. Specifically, a powder of a high melting point metal such as tungsten, molybdenum, rhenium, a binder, and a solvent are mixed and kneaded to prepare a slurry. The slurry is then used to form a metallized ink using a tape molding method such as a doctor blade method or a calendar roll method.

  Next, a ceramic green sheet to be the insulating substrate 3 is produced. Specifically, a ceramic sheet is produced by producing a slurry containing alumina, mullite, cordierite, zirconia or the like. A through hole is formed in the ceramic green sheet thus produced, and the through hole is filled with an ink mainly composed of a refractory metal such as tungsten, molybdenum, rhenium or the like as the filler 11. Further, a plurality of discharge electrode 5 patterns are printed on the surface of the ceramic green sheet by the screen printing method using the metallized ink.

  Similarly, a ceramic green sheet in which a through hole is filled with the ink mainly composed of the refractory metal is formed, and the pattern of the planar dielectric electrode 7 is formed on the surface of the ceramic green sheet by screen printing. Print using metallized ink. A plurality of hole patterns 19 are formed in the dielectric electrode 7, and a through hole is formed in the center of the hole pattern 19.

  Further, a wiring circuit 13 that electrically connects the plurality of discharge electrodes 5 to the surface of a ceramic green sheet made of alumina, mullite, cordierite, zirconia, or the like via a filler 11 filled in a through hole, Print by screen printing. In addition, the wiring circuit 13 is electrically connected to a power feeding portion 17 formed on the side surface portion 3a or the peripheral edge portion 3b of the ceramic green sheet that becomes the insulating substrate 3.

  These ceramic green sheets are joined. When disposing the discharge electrodes 5 on both surfaces of one side and the other surface of the insulating substrate 3, the ceramic green on which the pattern of the dielectric electrode 7 is printed on both sides of the ceramic green sheet on which the wiring circuit 13 is printed. Join the sheets. Next, the ceramic green sheets on which the patterns of the dielectric electrodes 7 are printed are joined to the ceramic green sheets on which the patterns of the discharge electrodes 5 are printed.

  At this time, it is preferable that the thickness of the insulating substrate 3 (dielectric layer) between the discharge electrode 5 and the dielectric electrode 7 is 20 μm or more. By setting the thickness of the insulating substrate 3 to 20 μm or more, it is possible to prevent dielectric breakdown from occurring between the discharge electrode 5 and the dielectric electrode 7.

  Moreover, it is preferable to form the insulating substrate 3 between the dielectric electrode 7 and the wiring circuit 13 so as to have a thickness of 300 μm or more. By setting the thickness of the insulating substrate 3 to 300 μm or more, it is possible to prevent dielectric breakdown between the dielectric electrode 7 and the wiring circuit 13.

  Moreover, it is preferable that the space | interval between the dielectric electrode 7 and a through hole is 300 micrometers or more. By setting the distance between the dielectric electrode 7 and the through hole to 300 μm or more, it is possible to prevent dielectric breakdown from occurring even when a high voltage is applied to the discharge element 1. The distance between the dielectric electrode 7 and the through hole is preferably 2 mm or less. By setting the distance between the dielectric electrode 7 and the through hole to 2 mm or less, the discharge element 1 can be reduced in size.

  Furthermore, a ceramic green sheet made into a slurry by mixing ceramic powder made of alumina, mullite, cordierite, zirconia, etc., the same components as the insulating substrate 3 on the discharge electrode 5, and a solvent is prepared. Then, the protective layer 9 is formed by printing it on the surface of the discharge electrode 5 pattern by a screen printing method. Here, the thickness of the protective layer 9 in the first region 9a and the second region 9b is made different by changing the number of screen printings, for example, by partially performing screen printing on the surface of the discharge electrode 5 pattern. The first region 9a, the second region 9b, etc. can be formed.

  Moreover, when the insulating substrate 3 and the protective layer 9 are the same component, the discharge element 1 of embodiment shown in FIG. 4 can also be produced as follows.

  First, in the same manner as in the above embodiment, a metallized ink to be the discharge electrode 5 and the dielectric electrode 7, a ceramic green sheet to be the insulating substrate 3 and the protective layer 9 are prepared. Then, metallized ink is printed on the ceramic green sheet. At this time, the metallized ink to be the discharge electrode 5 positioned below the first region and the metallized ink to be the discharge electrode 5 positioned below the second region are respectively printed on different ceramic green sheets.

  Then, the metallized ink to be the discharge electrode 5 positioned below the first region 9a is printed on the ceramic green sheet on which the metallized ink to be the discharge electrode 5 positioned below the second region 9b is printed. Laminated ceramic green sheets. Further, a ceramic green sheet to be the protective layer 9 is laminated thereon.

  Then, the discharge element 1 is formed by cut | judging to a predetermined dimension and baking in 1500-1650 degreeC reducing atmosphere.

  After firing, the power supply unit 17 is plated and connected to a power supply line (not shown) of the discharge element 1 by brazing or soldering. Furthermore, it is preferable to take measures to prevent oxidation by coating the wired power supply portion 17 with silicon or the like.

  Note that the first discharge element and the second discharge element of the present invention can change the generation amount of ions and ozone by changing the magnitude and frequency of the applied voltage. For example, by applying a high voltage, it is possible to mainly convert oxygen in the air to ozone, so that it can be used as a discharge element 1 for generating ozone used in a deodorizer or the like. On the other hand, by applying a low voltage, it becomes possible to ionize various molecules in the air, so that it can be used as the discharge element 1 for generating ions used in an air cleaner or the like.

  In addition, when the discharge electrode 5 is formed on both the one surface and the other surface of the insulating substrate 3, by changing the voltage value applied to each surface, one surface is used for ozone generation, and the other surface These surfaces can be used for different purposes, for example, by using the surface for generating ions.

  Next, the discharge module according to the present embodiment will be described. FIG. 8A is a cross-sectional view showing the relationship between the discharge element and the flow velocity of the fluid flowing on the discharge element in an example of the embodiment of the discharge module using the first discharge element of the present invention. FIG. 8B is a cross-sectional view showing the relationship between the discharge element in the discharge module using the second discharge element of the present invention and the flow velocity of the fluid flowing on the discharge element.

  FIG. 9 is a perspective view showing an example of an embodiment according to the discharge module of the present invention. As shown in FIG. 9, the discharge module 21 according to the present embodiment includes the discharge element 1 typified by the above-described embodiment, and a ventilation path 23 in which the discharge element 1 is disposed.

  As described above, since the discharge module in the above embodiment includes the ventilation path 23, the wind direction can be stabilized, so that high discharge efficiency is obtained, more ozone or ions are generated, and nitrate is generated. Can be further suppressed.

  The ventilation path 23 is a passage for air flowing over the discharge element 1, and any one may be used as long as the direction in which the air flows is stabilized in a desired direction. For example, as shown in FIG. 9, by using a cylindrical shape, the air flow direction can be made constant by using the internal cavity as the ventilation path 23. Further, the direction of air flow may be made constant by using a blower such as a fan.

  At this time, it is preferable to dispose the discharge element 1 according to the flow velocity distribution of the fluid flowing in the ventilation path 23. For example, as shown in FIG. 8 (a), when the flow velocity (wind velocity) is relatively fast at the center of the ventilation path 23 and the flow velocity is relatively slow at the end, this relatively large area on the first region 9a. The region 25 having a high flow rate is provided, and the region 27 having a relatively low flow rate is provided on the second region 9b, so that the adhesion of nitrate to the surface of the protective layer 9 can be more effectively suppressed, and the discharge efficiency can be improved. Can be generated to generate more ions and ozone.

  Furthermore, the discharge element 1 can be further improved in discharge efficiency by being disposed so that the region 25 having the fastest flow velocity is positioned on the first region 9a where the thickness of the protective layer 9 is small. And the amount of ozone generated can be increased. Further, by disposing the region 27 having the slowest flow velocity on the second region 9b having a large thickness, unnecessary discharge is further suppressed, and adhesion of nitrate to the surface of the protective layer 9 is further improved. It becomes possible to suppress it reliably.

  When the discharge electrode 5 is formed only on one surface of the insulating substrate 3, the discharge element 1 is disposed so that the discharge electrode 5 faces the air flowing in the ventilation path 23, and the insulating substrate 3. In the case where the discharge electrode 5 is formed on both the one surface and the other surface, it is preferable that the discharge element 1 is disposed so that the ventilation path 23 is divided into two. In this case, for example, a fixing portion (not shown) is provided on the side surface portion 3a or the peripheral edge portion 3b of the insulating substrate 3, and if there is a side wall or the like in the ventilation path 23, it is fixed to them. The discharge element 1 is fixed by separately providing a plate (not shown) and floating it.

  Next, the ozone generator and ion generator concerning this embodiment are demonstrated. FIG. 10 is a schematic view showing an example of an embodiment according to the ozone generator or the ion generator of the present invention. As shown in FIG. 10, the ozone generator 29 or the ion generator 31 according to this embodiment includes the discharge module 21 typified by the above embodiment, and upstream of the air flow on the discharge element 1 of the discharge module 21. A blower 33 for creating an air flow is provided on the side, and an ozone adsorption honeycomb 35 for preventing ozone from staying on the downstream side.

  Examples are shown below.

(Example 1)
A discharge element 1 in which a maximum of 42 discharge electrodes 5 were provided on an insulating substrate 3 having a width of 15 mm and a length of 40 mm was fabricated using a 96% purity alumina green sheet and tungsten ink. Then, 13 samples having different shapes, quantities, densities, circumferential lengths or thicknesses of the protective layer 9 of the discharge electrode 5 were prepared. In addition, the following method was used for the discharge evaluation in which the 20 mm width in the length direction was defined as the first region 9 a of the protective layer 9 and the both ends 10 mm were the second regions 9 b of the protective layer 9.

  Discharge evaluation: Using a high-frequency high-voltage power supply of 3 kV (PP) and 10 kHz, the amount of ozone generated under environmental conditions of 25 ° C.-60% RH was measured. In the measurement method, a high voltage is applied to the discharge element 1 in a cylinder having an air flow rate of 20 L / min and an inner diameter of 52 mm for discharge in a constant temperature and humidity chamber, and an ozone concentration meter (Dairex Co., Ltd.) is provided downstream. A sampling tube 37 (manufactured by DY-1500 type) was installed and measured. An ozone adsorption honeycomb 35 was placed downstream of the sampling tube 37 to prevent ozone from staying in the constant temperature and humidity chamber.

  In the measurement, after applying a voltage to the discharge element 1, the concentration after 1 minute was measured. The accuracy of measurement is 0.01 PPM. For comparison, a discharge element 1 having a conventional linear discharge electrode structure was used for Sample No. 9.

The results are as shown in Table 1. However, the “island shape” of the shape of the discharge electrode 5 in Table 1 means that a plurality of discharge electrodes 5 are formed apart from each other through a through hole and a wiring circuit 13 as shown in FIG. It means that

  When comparing the discharge elements 1 of sample numbers 1 to 8 and the discharge elements 1 of sample numbers 9 to 13, the discharge elements 1 of sample numbers 1 to 8 have good discharge efficiency and can generate a large amount of ozone. I understand.

  Moreover, as shown in Table 1, the protective layer 9 of the discharge elements 1 of the sample numbers 1 to 8 is formed only from the first region 9a and the second region 9b. It can be seen that the discharge efficiency is improved as compared with the discharge element 1.

  Thus, even if the protective layer 9 is formed only from the first region 9a and the second region 9b and has a simple structure that does not require high costs, high discharge efficiency can be obtained. If the protective layer 9 is provided with not only the first region 9a and the second region 9b but also another region having a different thickness of the protective layer 9, the thickness of the protective layer 9 is changed stepwise. Therefore, it can be expected to generate ozone efficiently.

  Further, when comparing sample numbers 1 and 9, the flow velocity distribution of the air on the discharge element 1 is taken into consideration, and the thickness of the protective layer 9 in the first region 9a where the flow velocity of the air flowing upward is fast is reduced. It can be seen that increasing the thickness of the protective layer 9 in the second region 9b, where the flow velocity of the air flowing in the second region 9b is higher, has better discharge efficiency and is more effective for generating more ozone. This is because the wind speed is fast on the first region 9a and more oxygen is supplied, so that the chemical reaction from oxygen to ozone by corona discharge is efficiently performed.

  Further, from the measurement results of sample numbers 1 and 2, it is more likely that the plurality of discharge electrodes 5 are formed apart from each other than the discharge electrode 5 formed in the shape of a linear electrode. It can be seen that it is more effective in generation. This is because the circumferential length of the discharge electrode 5 can be made longer when the plurality of discharge electrodes 5 are formed apart from each other.

  Further, from the measurement results of sample numbers 2 and 10, or sample numbers 5 and 13, even when using a plurality of discharge electrodes 5 formed apart from each other, the flow velocity distribution of air on the discharge element 1 is considered. It is better to reduce the thickness of the protective layer 9 in the first region 9a where the flow velocity of the air flowing above is fast and to increase the thickness of the protective layer 9 in the second region 9b where the flow velocity of the air flowing upward is slower. It can be seen that the discharge efficiency is good and it is effective to generate more ozone.

  Further, from the measurement results of the sample numbers 3 and 11, the density of the discharge electrode 5 positioned below the first region 9a is higher than that of the second region 9b. It can be seen that increasing the density of ozone increases the amount of ozone generated and is more effective for generating ozone by corona discharge. This is because the flow rate of air on the first region 9a is fast and the supply amount of oxygen is large, so the density of the discharge electrode 5 per unit area of the first region 9a is increased to concentrate strong discharge. This is because the reaction from oxygen to ozone by discharge is efficiently performed.

  Furthermore, from the measurement results of the sample numbers 4 and 12, the flow velocity of the upper air is slow, and the flow velocity of the upper air is higher than that of the discharge electrode 5 positioned under the second region 9b where the thickness of the protective layer 9 is large. It can be seen that the greater the perimeter per unit area of the discharge electrode 5 located under the first region 9a where the thickness of the protective layer 9 is smaller, the greater the amount of ozone generated. From this, it can be seen that a longer peripheral length of the discharge electrode 5 per unit area of the first region 9a is more effective than the second region 9b in order to increase discharge efficiency.

  Furthermore, from the measurement results of sample numbers 5, 6, and 13, the number per unit area of the discharge electrode 5 positioned below the first region 9a is the unit of the discharge electrode 5 positioned below the second region 9b. It can be seen that the amount of ozone generated is large when the number is larger than the number per area. Therefore, the discharge efficiency is higher when the number per unit area of the discharge electrode 5 positioned below the first region 9a is increased than the discharge electrode 5 positioned below the second region 9b. You can see that

  In addition, when the measurement results of the sample numbers 4 and 5 are compared, the pointed portion per unit area of the discharge electrode 5 positioned below the first region 9a rather than the discharge electrode 5 positioned below the second region 9b. It can be seen that increasing the number of 15 can generate more ozone. This is because the discharge efficiency can be improved by increasing the number of pointed portions 15 provided on the discharge electrode 5 per unit area.

  Furthermore, when the measurement results of sample numbers 6 and 7 are compared, it can be seen that more ozone can be generated by providing the plurality of discharge electrodes 5 in which the cusps 15 having different lengths are alternately arranged. The plurality of discharge electrodes 5 in which the cusps 15 having different lengths are alternately arranged are provided in comparison with the sample number 6 in which the plurality of discharge electrodes 5 in which the cusps 15 having the same length are alternately arranged are provided. Sample No. 7 has better discharge efficiency and can generate more ozone.

  This is because the peripheral length per unit area of the discharge electrode 5 can be increased by providing the pointed portions 15 having different lengths, and the discharge region between the adjacent discharge electrodes 5 is overlapped. A decrease in the area can be prevented.

  Then, by comparing the sample numbers 8 and 9, the discharge area can be increased in the case where the discharge electrode 5 is provided on both the one surface and the other surface of the insulating substrate 3, and more It can be seen that ozone can be generated.

It is an expansion | deployment perspective view which shows an example of embodiment concerning the 1st discharge element of this invention. (A) is a top view of the discharge element of embodiment shown in FIG. 1, (b) is an enlarged plan view of the area | region A in (a). It is sectional drawing of the discharge element shown in FIG. It is sectional drawing which shows another example of embodiment concerning the 1st discharge element of this invention. It is sectional drawing which shows another example of embodiment concerning the 1st discharge element of this invention. It is sectional drawing which shows another example of embodiment concerning the 1st discharge element of this invention. It is sectional drawing which shows an example of embodiment concerning the 2nd discharge element of this invention. It is the figure which showed the relationship between the discharge module using the discharge element of this invention, and the flow velocity of the fluid in a ventilation path. (A) relates to a discharge module using the first discharge element, and (b) relates to a discharge module using the second discharge element. It is a perspective view which shows an example of embodiment concerning the discharge module of this invention. It is the schematic which shows an example of embodiment concerning the ozone generator of this invention, or an ion generator.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Discharge element 3 ... Insulating substrate 3a ... Side surface part 3b ... Peripheral part 5 ... Discharge electrode 7 ... Dielectric electrode 9 ... Protective layer 9a ... 1st Region 9b ... Second region 9c ... Third region 11 ... Filler 13 ... Wiring circuit 15 ... Pointed portion 15a ... Short pointed portion 15b ... Long point Shape portion 17 ... Power feeding portion 19 ... Hole pattern 21 ... Discharge module 23 ... Ventilation path 25 ... Fast region 27 ... Slow region 29 ... Ozone generator 31 ... Ion Generator 33 ... Blower 35 ... Ozone adsorption honeycomb 37 ... Sampling tube

Claims (24)

An insulating substrate; a discharge electrode formed on at least one surface of the insulating substrate; a dielectric electrode embedded in the insulating substrate; a protective layer formed on the insulating substrate and the discharge electrode; A discharge element comprising:
The protective layer has a first region and a second region having different thicknesses on the discharge electrode, and the second region sandwiches the first region when viewed in plan. A discharge element that is disposed and has a thickness on the discharge electrode in the first region smaller than a thickness on the discharge electrode in the second region.   2. The discharge element according to claim 1, wherein the thickness of the discharge element in the portion including the first region is substantially equal to the thickness of the discharge element in the portion including the second region.   2. The discharge element according to claim 1, wherein the thickness of the discharge element in the portion including the first region is smaller than the thickness of the discharge element in the portion including the second region.   The discharge element according to claim 1, wherein the protective layer includes the first region and the second region.   The discharge element according to claim 1, wherein the first region is formed on a central portion of the insulating substrate.   The discharge element according to claim 1, wherein a difference in thickness between the first region and the second region is 30 to 90 μm.   A plurality of discharge electrodes are formed apart from each other on at least one surface of the insulating substrate, and the number of the discharge electrodes located under the first region per unit area is the second number. The discharge element according to claim 1, wherein the number of discharge electrodes located below the region is larger than the number per unit area.   A circumference per unit area of the discharge electrode located under the first region is longer than a circumference per unit area of the discharge electrode located under the second region. The discharge element according to any one of claims 1 to 7.   The discharge electrode has a plurality of pointed portions, and the number of the pointed portions per unit area of the discharge electrode located below the first region is located below the second region. The discharge element according to any one of claims 1 to 8, wherein the number of the pointed portions per unit area of the discharge electrode is larger.   The discharge element according to any one of claims 1 to 9, wherein the discharge electrode has a plurality of pointed portions, and an interval between tips of the plurality of pointed portions is 0.1 to 2 mm.   The discharge element according to any one of claims 1 to 10, wherein at least a part of the discharge electrode is alternately formed with short cusps and long cusps.   The discharge element according to any one of claims 1 to 11, wherein the discharge electrodes are disposed on both surfaces of one surface and the other surface of the insulating substrate.   The discharge module provided with the discharge element in any one of Claims 1-12, and the ventilation path in which this discharge element is arrange | positioned.   The flow rate of the fluid flowing on the first region when the fluid flows in the ventilation path is larger than the flow rate of the fluid flowing on the second region. Discharge module.   The discharge module according to claim 14, wherein a portion where the flow velocity of the fluid flowing on the protective layer on the discharge electrode is the fastest is on the first region.   The discharge module according to claim 14, wherein a portion where the flow velocity of the fluid flowing on the protective layer on the discharge electrode is the slowest is on the second region. An insulating substrate; a discharge electrode formed on at least one surface of the insulating substrate; a dielectric electrode embedded in the insulating substrate; a protective layer formed on the insulating substrate and the discharge electrode; A discharge element comprising:
The region formed on the discharge electrode in the protective layer has a thickness corresponding to the distribution of the flow velocity of the fluid flowing on the protective layer.   The discharge element according to claim 17, wherein the thickness is smaller in a region where the flow velocity of the fluid flowing on the protective layer is higher than that of a region where the flow velocity of the fluid flowing on the protective layer is slower.   The discharge element according to claim 17 or 18, wherein the discharge electrode has a plurality of pointed portions, and an interval between tips of the plurality of pointed portions is 0.1 to 2 mm.   The discharge element according to any one of claims 17 to 19, wherein at least a part of the discharge electrode is alternately formed with short cusps and long cusps.   The discharge element according to any one of claims 17 to 20, wherein the discharge electrode is disposed on both surfaces of one surface and the other surface of the insulating substrate.   The discharge module provided with the discharge element in any one of Claims 17-21, and the ventilation path in which this discharge element is arrange | positioned.   The ozone generator provided with the discharge module in any one of Claims 13-16, 22.   The ion generator provided with the discharge module in any one of Claims 13-16, 22.

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