JP2008091511A - Laser annealing technique, semiconductor film, semiconductor device, and electrooptical device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a laser annealing technique that can highly crystallize the entire surface of an amorphous semiconductor film, hardly has granular crystal sections on nearly the entire surface of the amorphous semiconductor film, and can form a lateral crystal film without any joints, to provide a semiconductor film that has high crystallinity and is ideal as an active layer, or the like of a thin-film transistor (TFT) by using the technique, and to provide a semiconductor device, such as the TFT using the semiconductor film, and an electrooptical device. <P>SOLUTION: Laser annealing is executed under conditions where a granular crystal part and an amorphous part are melted and a lateral crystal part is not melted. Further, laser annealing is executed by extending laser beam irradiation time in the granular crystal part from that in the amorphous part so that ¾EA-EP¾<¾EA-EPs¾... (1) is met, where EA is absorption light energy per unit area of laser beams at the amorphous part, EPs is absorption light energy per unit area of laser beams at the granular crystal part when laser beams are applied under the same laser beam irradiation conditions as those for the amorphous part, and EP is actual absorption light energy per unit area of laser beams at the granular crystal part. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to a laser annealing method and a laser annealing apparatus for performing laser annealing on a semiconductor film to be annealed made of an amorphous semiconductor.
The present invention also relates to a semiconductor film manufactured by the laser annealing method, a semiconductor device such as a thin film transistor (TFT) using the semiconductor film, and an electro-optical device using the semiconductor device.

  In an electro-optical device such as an electroluminescence (EL) device or a liquid crystal device, an active matrix driving method is widely adopted. In the active matrix type, a large number of pixel electrodes are arranged in a matrix, and these pixel electrodes are driven through pixel switching TFTs provided corresponding to the pixel electrodes, for example.

  The electro-optical device includes a pixel portion in which a large number of the pixel electrodes and pixel switching TFTs are formed in a matrix on the same substrate, and a plurality of driving circuit TFTs that drive the pixel portion. In some cases, a driving unit including the driving circuit is provided.

  An amorphous or polycrystalline silicon film is widely used for the active layer of the TFT. Considering device characteristics such as carrier mobility, the silicon film forming the active layer preferably has high crystallinity. In particular, in the driving circuit TFT, it is preferable that the silicon film forming the active layer has high crystallinity.

  In the manufacture of a polysilicon TFT, for example, an amorphous silicon (a-Si) film is first formed, and laser annealing is performed to polycrystallize the film by irradiating the film with laser light. At present, excimer laser light is widely used as the laser light (ELA method). The excimer laser beam is a pulsed laser beam in the ultraviolet region of 308 nm or less, and the polycrystal produced by the ELA method is usually a granular crystal having a small crystal grain size. This is because the absorption rate of excimer laser light absorbed by the silicon film is large regardless of the crystalline nature of the silicon film, and the energy is greatly absorbed on the surface of the silicon film, resulting in a large temperature distribution in the film thickness direction. It is considered that crystals grow in the film thickness direction and hardly grow in the lateral direction (paragraphs 0005 and 0036 of Patent Document 2).

  A lateral crystal having a large crystal grain size extending in the relative scanning direction can be grown by irradiating the amorphous silicon film while relatively scanning the amorphous silicon film using a continuous wave laser beam having a wavelength range of 350 nm or more. Yes (paragraph 0006 etc. in Patent Document 2).

  In the laser head using the current continuous wave laser beam with an oscillation wavelength of 350 nm or more, the width of the beam spot to which the annealing energy capable of lateral crystal growth can be applied is about 10 mm at the maximum. The substrate plane is the xy plane, the main relative scanning direction of the laser light is the x direction, and the sub relative scanning direction is the y direction. In order to anneal the entire surface of the amorphous silicon film having a large area formed on the substrate, the relative scanning in the x direction is performed at a certain y position, and then the relative scanning in the x direction is performed by changing the y position. Need to repeat. Normally, when performing relative scanning of the laser beam in the x direction with the y position shifted, the laser beam is irradiated so that the region irradiated with the laser beam first and the region irradiated with the laser beam partially overlap each other. A relative scanning of light is performed.

  When the relative scanning of the laser beam in the x direction is performed only once without changing the y position, a granular crystal with small crystal grains is generated outside the lateral crystal generation region (see FIG. 1 of this specification). ). This means that no matter how the beam profile of the laser beam is controlled, heat diffuses around the irradiated region of the laser beam, so the surface temperature does not reach the surface temperature necessary for lateral crystal growth, but is sufficient for granular crystallization. This is because a temperature region is generated. Granular crystals (granularity) at the edge in the region directly irradiated with laser light and / or the region where heat is conducted (= directly outside the region directly irradiated with laser light) but not directly irradiated with laser light poly-Si) is generated.

  Next, when the relative position of the laser beam in the x direction is shifted by shifting the y position, the previously generated granular crystal can be laterally crystallized by irradiating the granular crystal portion with the laser beam. Conceivable. However, in the wavelength region of 350 nm or more, amorphous silicon (a-Si) and granular crystal (granular poly-Si) which is polycrystalline silicon have different laser light absorption rates. The temperature of the crystal may not reach the temperature required for lateral crystallization. In addition, using a granular crystal as a seed crystal, a lateral crystal may grow in an undesired direction, and the growth direction of the lateral crystal may become uneven.

  Even if the granular crystal can be made into a lateral crystal in a desired growth direction, a granular crystal having small crystal grains is generated outside the lateral crystal generation region, and the granular crystal cannot be eliminated. Further, when laser light is irradiated again on the lateral crystal portion that has been grown, the lateral crystal portion may be remelted and its crystallinity may change.

  Since the granular crystal part has many grain boundaries and current characteristics are not good, it is necessary to avoid the granular crystal part and form the TFT. Therefore, at present, based on the design information on the TFT formation position, the laser beam is scanned so that the beam end of the laser beam and the TFT element formation region do not overlap, or the laser beam is applied only to the TFT element formation region. A device such as selective irradiation is required.

Patent Document 1 describes that lateral crystal growth is performed using the second harmonic (wavelength 532 nm) of an Nd: YAG laser, the second harmonic (wavelength 532 nm) of an Nd: YVO ₄ laser, or the like. Suitable lateral crystal growth conditions are described. As preferable lateral crystal growth conditions, laser beam diameter: 2 to 10 μm in the scanning direction, scanning speed: 300 to 1000 mm / s, and output power density when the laser beam diameter is 3 μm: 0.4 to 2.4 MW / cm ² is described (claims 4, 8, paragraph 0037, etc.). In Patent Document 1, laser light is selectively irradiated only to the element formation region of the TFT (FIG. 8 and the like).

  Patent Document 2 discloses a visible pulse laser beam (wavelength of 350 nm or more) such as a second harmonic (wavelength of 532 nm) of an Nd: YAG laser, which is a solid-state laser, and an Nd: YAG laser. A laser annealing method is described in which ultraviolet pulse laser light (less than 350 nm) having a wavelength shorter than the second harmonic is irradiated and scanned simultaneously such that these irradiation regions partially overlap ( Claims 1 and 3, paragraphs 0011 and 0045, FIG.

  In Patent Document 2, a granular crystal generated outside a lateral crystal generation region by irradiation with a visible light pulse laser can be amorphized by irradiation with an ultraviolet pulse laser beam, and the visible pulse laser is shifted in position. It is described that a portion that has been non-crystallized by irradiation with ultraviolet pulse laser light can be laterally crystallized by re-irradiation with light, and a silicon film having high crystallinity as a whole can be obtained (paragraph 0066, FIG. 20 and the like). ).

  Patent Document 3 discloses that the absorption rate of non-crystalline silicon of the second harmonic (wavelength 524 or 527 nm) of an Nd: YLF laser is one digit or more larger than that of crystalline silicon. It is described that laser light is preferentially absorbed by amorphous silicon over silicon, and amorphous silicon can be preferentially melted and crystallized to obtain a silicon film with high crystallinity (paragraph 0020 and the like). ).

  In Patent Document 4, when laser light having a wavelength range of 390 to 640 nm such as the second harmonic (wavelength of 532 nm) of an Nd: YAG laser is used, the absorption rate in polycrystalline silicon is higher than that of amorphous silicon. Therefore, even if the polycrystalline silicon produced by irradiating the amorphous silicon film with laser light is irradiated again with laser light, the produced polycrystalline silicon will not melt and its characteristics are It is described that it does not change so much by re-irradiation (paragraph 0010). However, as a conventional problem, the absorption rate of laser light in a granular crystal having a small crystal grain, which is polycrystalline silicon, also decreases, so the crystallinity of a granular crystal having a small crystal grain cannot be improved. Describes that the overlapping region is subtly recognized (paragraph 0042).

  Therefore, in Patent Document 4, it is proposed to adopt one of the following configurations (1) to (5) in laser annealing using laser light in a wavelength range of 390 to 640 nm.

  (1) In Patent Document 4, it is proposed that the irradiation energy density is set as low as possible within a range in which sufficient carrier mobility can be obtained as a TFT (paragraph 0043). Specifically, in the relationship between the carrier mobility and the laser output, the lower limit value of the laser output that gives a mobility of 80% or more with respect to the laser output that gives the maximum carrier mobility is Elow, and the upper limit value is It has been proposed that Ehigh is a laser output E that satisfies Elow ≦ E ≦ (Ehigh + Elow) / 2 (claim 1).

  In Patent Document 4, the laser output is generated in the region of the end of the first scan by deliberately dropping the laser output from the laser output that provides the maximum carrier mobility within a range where sufficient carrier mobility can be obtained as a TFT. It is described that the crystal grain size of polycrystalline silicon, that is, granular crystals can be reduced, and in the second scan, the granular crystals can be easily remelted and the crystallinity can be improved (paragraph 0048).

  (2) In Patent Document 4, it is proposed that the length L of the inclined region at the end of the light beam is set short, preferably 3 mm or less (claim 3, paragraph 0043). Patent Document 4 describes that with such a configuration, the polycrystallized region in the inclined region of the first scan, that is, the generation region of the granular crystal can be reduced, and the characteristic deterioration of the overlap region can be made inconspicuous. (Paragraph 0050).

  (3) Patent Document 4 proposes to increase the laser light intensity of the second scan in the inclined region of the light beam end as compared to the first scan (claim 5, paragraph 0043). In such a configuration, it is described that since the beam having higher light intensity is irradiated to the end region of the first scan, the granular crystal can be easily remelted and the crystallinity can be improved. (Paragraph 0052).

  In the configuration (3), a reflective film is formed in a predetermined region of the substrate stage, and the laser beam is reflected from the substrate stage to the overlapping region of the laser beam, so that the first scan is compared with the end region of the first scan. A mode in which a beam having a higher light intensity is irradiated by two scans is described (claims 9, 10, paragraphs 0054, 0056, FIGS. 15, 17).

Patent Document 5 discloses that a first laser beam having a wavelength with which the absorption coefficient of amorphous silicon is 5 × 10 ³ / cm or more with respect to amorphous silicon and an absorption coefficient of amorphous silicon is 5 × 10 ² / It has been proposed to irradiate simultaneously with a second laser beam having a wavelength of not more than cm and a absorption coefficient of amorphous silicon in a molten state being not less than 5 × 10 ³ / cm (Claim 1). . For example, it is described that the second harmonic of a solid laser such as a YAG laser is used as the first laser light and the fundamental wave of the solid laser is used as the second laser light (paragraphs 0044 and 0084). In such a configuration, the second laser beam is not absorbed by normal silicon, but is well absorbed by the melted portion by the irradiation of the first laser beam, so that the beam profile can be flattened, and the granular crystal It is described that the generation region of can be reduced and the lateral crystal region can be increased (paragraphs 0015, 0016, 0084, FIG. 1B).
JP 2005-217209 A JP 2005-72183 A JP 2004-152978 A JP 2005-259809 JP JP 2004-297055 A

  In any of the laser annealing techniques described in Patent Documents 2 to 5, paying attention to the fact that the absorption characteristics of amorphous silicon with respect to the wavelength of laser light are different from the absorption characteristics of polycrystalline silicon with respect to the wavelength of laser light, I'm doing something new.

  For example, FIGS. 5 (a) and 5 (b) (micrographs) of Patent Document 5 show that the lateral crystal region can be widened by employing the laser annealing method described in Patent Document 5. FIG. However, FIGS. 5A and 5B of Patent Document 5 show that granular crystals having a small particle diameter are still generated outside the lateral crystals.

  In paragraph 0009 of Patent Document 2, it is described that substantially entire lateral crystallization is possible. However, referring to FIG. 8, FIG. 13, FIG. 14 and the like of Patent Document 2, it is possible to crystallize laterally from this method in the main scanning direction by this method, but in the sub scanning direction. It is considered that a granular crystal region or an amorphous region always occurs.

  In this method, since the rectangular beam is irradiated with pulses, irradiation is performed discontinuously while overlapping the rectangular beams. Therefore, it is considered that a granular crystal region or an amorphous region that does not become a lateral crystal is formed along the periphery of the rectangular beam in both the main scanning direction and the sub-scanning direction. The granular crystalline region or non-crystalline region formed in both the main scanning direction and the sub-scanning direction along the periphery of the rectangular beam is re-annealed even if laser annealing is performed with the position shifted. In other words, a granular crystal region or an amorphous region is always generated in the sub-scanning direction.

  Moreover, in patent document 2, in order to amorphize a granular crystal part, as shown in FIG. 13, high irradiation energy is required. Such high-energy irradiation is considered to cause inconveniences such as the recrystallization of the lateral crystals and the granular crystallization.

  That is, in the prior art, even if lateral crystallization can be performed in the main scanning direction, it cannot be avoided that granular crystal portions and the like remain at the joints when viewed in the sub scanning direction. Further, even if it is possible to realize that no granular crystal portion or the like is left in the joint, it is impossible to eliminate the joint.

The present invention has been made in view of the above circumstances, and an amorphous semiconductor film can be highly crystallized on substantially the entire surface. The amorphous semiconductor film has almost no granular crystal portion on the entire surface, and is seamless. It is an object of the present invention to provide a laser annealing technique that can be a lateral crystal film.
The present invention also provides a semiconductor film having high crystallinity and suitable as an active layer of a thin film transistor (TFT) by using the laser annealing technique, a semiconductor device such as a TFT using the same, and an electro-optical device. It is intended.

The laser annealing method of the present invention grows a lateral crystal by performing laser annealing to irradiate a laser beam on a region of a semiconductor film to be annealed made of an amorphous semiconductor under conditions where a lateral crystal grows.
Furthermore, the annealing region is shifted, and the laser annealing is performed again on a region including at least a part of the granular crystal generated outside the lateral crystal and at least a part of the non-crystallized remaining uncrystallized. Then, in the laser annealing method in which the operation of laterally crystallizing the portion is performed one or more times,
The laser annealing is performed under the condition that the granular crystal part and the amorphous part of the semiconductor film to be annealed are melted and the lateral crystal part of the semiconductor film to be annealed is not melted.
In addition, the laser annealing is performed by setting the laser light irradiation time per unit area in the granular crystal part to be longer than the laser light irradiation time per unit area in the non-crystalline part so that the following formula (1) is satisfied. It is characterized by doing.

The laser annealing apparatus of the present invention comprises a laser head equipped with one or a plurality of laser light oscillation sources,
A region of a semiconductor film to be annealed made of an amorphous semiconductor is subjected to laser annealing to irradiate a laser beam under the condition that a lateral crystal grows, and a lateral crystal is grown.
Furthermore, the annealing region is shifted, and the laser annealing is performed again on a region including at least a part of the granular crystal generated outside the lateral crystal and at least a part of the non-crystallized remaining uncrystallized. Then, in a laser annealing apparatus that performs the operation of lateral crystallization of the portion at least once,
The granular crystal part and the non-crystalline part of the semiconductor film to be annealed are melted, and the laser light irradiation conditions are set so that the lateral crystal part of the semiconductor film to be annealed does not melt,
And the laser beam irradiation time per unit area in the granular crystal part is set to the laser beam irradiation condition longer than the laser beam irradiation time per unit area in the non-crystalline part so as to satisfy the following formula (1). It is characterized by being.
| EA-EP | <| EA-EPs | (1)
(In the formula (1),
EA is the absorbed light energy per unit area of the laser light in the amorphous part,
EPs is the absorbed light energy per unit area of the laser light in the granular crystal part when the laser light is irradiated under the same laser light irradiation conditions as the non-crystalline part,
EP indicates the actual absorbed light energy per unit area of the laser beam in the granular crystal part. )

The granular crystal is generated at the end in the region where the laser beam is directly irradiated, and the region where the laser beam is not directly irradiated but the heat is conducted (= the region just outside the region where the laser beam is directly irradiated) ) And in both of these areas.
In this specification, “laser annealing” includes annealing of a region that is directly irradiated with laser light and annealing of a region that is not directly irradiated with laser light but that conducts heat and changes its crystalline state. To do.

In the laser annealing apparatus of the present invention, the laser beam irradiation time per unit area in the granular crystal part is longer than the laser beam irradiation time per unit area in the amorphous part so as to satisfy the following formula (1A) It is preferable that the irradiation conditions are set.
EP ≒ EA ... (1A)
(In formula (1A), EP and EA are the same as above.)

  In this specification, “EP≈EA” is defined as EP / EA or EA / EP being in the range of 0.95 to 1.05.

  In the laser annealing apparatus of the present invention, it is preferable that the laser light irradiation time per unit area in the lateral crystal portion is set to be equal to or less than the laser light irradiation time per unit area in the non-crystalline portion. .

When the semiconductor film to be annealed is an amorphous silicon film, it is preferable that the laser light irradiation conditions satisfy the following formulas (3) and (4).
0.82 ≦ EP / EA ≦ 1.0 (3),
EL / EA ≦ 0.70 (4)

  A “silicon film” is a film containing silicon as a main component. In the present specification, the “main component” is defined as a component having a content of 50% by mass or more. In the silicon film for TFT, the silicon content is preferably 90% by mass or more.

  In the laser annealing apparatus of the present invention, it is preferable that the laser light absorption rate in the lateral crystal portion is set to a laser light irradiation condition smaller than the laser light absorption rate in the granular crystal portion.

  In the laser annealing apparatus of the present invention, it is preferable that a relative scanning unit that relatively scans the laser light while partially irradiating the laser light to the semiconductor film to be annealed is provided.

In the laser annealing apparatus of the present invention provided with the above relative scanning means, the laser beam includes at least a part of the granular crystal generated outside the lateral crystal and at least a part of the non-crystal remaining uncrystallized. And a beam pattern in which the total irradiation width in the relative scanning direction of the granular crystal part is wider than the total irradiation width in the relative scanning direction of the amorphous part. It is preferable.
The beam pattern may be composed of a plurality of patterns separated in the relative scanning direction of the laser light. In this case, the “total irradiation width in the relative scanning direction” is defined as the total irradiation width of a plurality of patterns spaced apart in the relative scanning direction of the laser light.

  As the laser beam, it is possible to simultaneously irradiate a region including at least a part of the granular crystal generated outside the lateral crystal and at least a part of the non-crystallized remaining uncrystallized, and A first beam pattern whose front end side and rear end side are substantially perpendicular to the relative scanning direction of the laser light as viewed in the relative scanning direction of the laser light, and in the relative scanning direction of the laser light. As seen, it has a shape combined with the second beam pattern that is located on the front side of the first beam pattern and can irradiate the granular crystal portion, and at least the irradiation energy distribution of the first beam pattern portion is It is preferably substantially uniform.

  Here, it is said that the beam pattern has a shape obtained by combining the first beam pattern and the second beam pattern, and the shape obtained by combining the first beam pattern and the second beam pattern with one beam. These beam patterns may be formed, or a beam pattern having a shape obtained by combining the first beam pattern and the second beam pattern may be formed by a plurality of beams. Moreover, the beam pattern which the 1st beam pattern and the 2nd beam pattern touched may be sufficient, and the beam pattern which these spaced apart may be sufficient.

In the laser annealing apparatus of the present invention, the laser beam is preferably a continuous wave laser beam.
In the laser annealing apparatus of the present invention, the laser light oscillation source is preferably a semiconductor laser. The laser light oscillation source is preferably a semiconductor laser having an oscillation wavelength in the wavelength range of 350 to 600 nm, and more preferably a semiconductor laser having an oscillation wavelength in the wavelength range of 350 to 500 nm. The laser light oscillation source is preferably a GaN-based semiconductor laser or a ZnO-based semiconductor laser.

  In the laser annealing apparatus of the present invention, when the laser annealing is performed again with the annealing region shifted with respect to the semiconductor film to be annealed, the laser light is irradiated next to the region irradiated with the laser light first. The laser annealing is preferably performed so that the region to be irradiated partially overlaps.

The first semiconductor film of the present invention may be the one before or after patterning. According to the first semiconductor film of the present invention, it is possible to provide a semiconductor film whose substantially entire surface is made of a lateral crystal.
The second semiconductor film of the present invention is characterized in that, in an unpatterned semiconductor film formed on a substrate, a substantially entire surface is a seamless lateral crystal film.

According to the laser annealing method of the present invention, the entire surface can be laterally crystallized without a granular crystal portion. However, for the granular crystals generated at the start and end of laser annealing, laser annealing is performed again. As a result, there is a portion that is not implemented, so that the granular crystals of this portion remain. The amount of the granular crystals is small when viewed from the whole substrate.
“The semiconductor film is composed of substantially the entire lateral crystal” means that all the portions except for the granular crystals that are generated at the start and end of laser annealing and remain without being subjected to laser annealing again are composed of lateral crystals. To do.

A semiconductor device according to the present invention includes an active layer obtained by using the semiconductor film according to the present invention. Examples of the semiconductor device of the present invention include a thin film transistor (TFT).
An electro-optical device according to the present invention includes the above-described semiconductor device according to the present invention. Examples of the electro-optical device include an electroluminescence (EL) device, a liquid crystal device, an electrophoretic display device, and a sheet computer including these.

  According to the laser annealing method of the present invention, the laser annealing is performed under the condition that the granular crystal portion and the amorphous portion of the semiconductor film to be annealed made of an amorphous semiconductor are melted and the lateral crystal portion of the semiconductor film to be annealed is not melted. It is said.

Furthermore, in the laser annealing method of the present invention, the laser light irradiation time per unit area in the granular crystal part is set to the unit area in the amorphous part so as to satisfy the following formula (1), preferably the following formula (1A). The laser annealing is performed for longer than the hit laser light irradiation time.
| EA-EP | <| EA-EPs | (1),
EP ≒ EA ... (1A)
(In the formulas (1) and (1A),
EA is the absorbed light energy per unit area of the laser light in the amorphous part,
EPs is the absorbed light energy per unit area of the laser light in the granular crystal part when the laser light is irradiated under the same laser light irradiation conditions as the non-crystalline part,
EP indicates the actual absorbed light energy per unit area of the laser beam in the granular crystal part. )

 According to the laser annealing method of the present invention, the granular crystal part and the non-crystal part can be selectively melted and highly crystallized. In addition, since the lateral crystal portion once generated is not melted, there is no possibility that the lateral crystal portion that has been grown is remelted and its crystallinity is not changed.

  In addition, the absorption rate of the laser light in the granular crystal portion and the amorphous portion is somewhat different under the condition that the granular crystal portion and the amorphous portion of the semiconductor film to be annealed are melted and the lateral crystal portion of the semiconductor film to be annealed is not melted. There is a difference, and under the same laser light irradiation conditions, there is a slight difference in the absorbed light energy per unit area between the granular crystal part and the amorphous part. In the present invention, the difference in absorbed light energy per unit area between the granular crystal part and the amorphous part is reduced by changing the laser light irradiation time in the granular crystal part and the amorphous part. Therefore, the temperature gradient between the granular crystal part and the non-crystalline part is made smaller and more uniform laterally than the case where the granular crystal part and the non-crystalline part are processed with the same laser light irradiation time. Crystals can be grown.

  Therefore, according to the laser annealing method of the present invention, the amorphous semiconductor film can be highly crystallized on substantially the entire surface, and the amorphous semiconductor film has almost no granular crystal portion on the entire surface, but has a seamless lateral crystal film. It is also possible. The present inventor has actually realized a lateral crystal film in which substantially the entire surface is seamless (see a SEM / TEM surface photograph (FIG. 18) of Example 1 described later).

  By using the laser annealing method of the present invention, a semiconductor film having high crystallinity and uniformity and suitable as an active layer of a thin film transistor (TFT) can be manufactured at low cost. By using this semiconductor film, a semiconductor device such as a TFT having excellent element characteristics (carrier mobility, etc.) and element uniformity can be manufactured.

  In the present invention, since a lateral crystal film having almost no granular crystal portion and almost no joint can be manufactured on substantially the entire surface, the beam end portion of the laser beam and the TFT can be manufactured based on the design information of the formation position of the semiconductor device such as TFT. It is not necessary to devise such means as scanning the laser beam so that it does not overlap with the element formation region of the semiconductor device such as, or selectively irradiating the laser beam only to the element formation region of the semiconductor device such as TFT. A semiconductor device such as a TFT having excellent carrier mobility and element uniformity can be stably manufactured at low cost. An electro-optical device provided with such a semiconductor device such as a TFT has excellent performance such as display quality.

"Laser annealing method"
Conventionally, it has been known that amorphous silicon (a-Si) and polycrystalline silicon (poly-Si) have different absorption characteristics with respect to the wavelength of laser light. However, conventionally, granular crystalline silicon and lateral crystalline silicon are both polycrystalline silicon (poly-Si), and it has not been considered that there is a difference in the absorption characteristics of these laser beams.

  The present inventor evaluated the absorption characteristics of granular crystalline silicon and lateral crystalline silicon with respect to the wavelength of the laser beam, and found that there is a difference between these absorption characteristics. Then, by paying attention to these absorption characteristics, it was found that laser annealing can be carried out under the condition that the granular crystal portion and the non-crystalline portion melt and the lateral crystal portion does not melt. By performing laser annealing under such conditions, the inventor does not remelt the lateral crystal once generated, and selectively melts only the granular crystal part and the amorphous part without changing the crystallinity thereof. Thus, they have found that they can be laterally crystallized, and can be substantially laterally lateral crystals. Hereinafter, the evaluation performed by the present inventor will be described.

  Laser annealing was performed by using a GaN-based semiconductor laser (oscillation wavelength: 405 nm) and continuously irradiating an amorphous silicon (a-Si) film with an elongated rectangular laser beam L while relatively scanning. The substrate plane is the xy plane, the main relative scanning direction of the laser light is the x direction, and the sub relative scanning direction is the y direction.

  As shown in FIG. 1A, when the x-direction relative scanning of the laser beam L is performed once at a certain y position, a laterally grown lateral crystal extending in the main relative scanning direction x of the laser beam L is generated. A granular crystal having small crystal grains (granular poly-Si) is generated outside the crystal generation region. After the relative scanning of the laser beam L only once, granular crystals are generated on both sides of the lateral crystal growth region extending in a band shape.

  Here, a case where a granular crystal is generated at an end portion in a region directly irradiated with the laser beam L is illustrated. Depending on the laser annealing conditions, an end portion in the region directly irradiated with the laser beam L and / or a region where the laser beam L is not directly irradiated but heat is conducted (= immediately outside the region directly irradiated with the laser beam L). In this region, granular crystals are generated.

  In this specification, when a lateral crystal is grown by performing relative scanning of laser light, a region annealed when the relative scanning in the x direction of laser light L is performed once at a certain y position is referred to as “1. "Annealing region of the first laser annealing".

  In order to process the entire surface of the film, as shown in FIG. 1B, the y position is changed and the relative scanning in the x direction of the laser light L is repeatedly performed. When the x-direction relative scanning of the laser beam L is performed while changing the y position, at least a part of the granular crystal generated outside the lateral crystal before the change of the y position and the non-crystallized non-crystallized portion remain. Laser annealing is performed on a region including at least part of the crystal. At this time, the laser beam L may be irradiated so as to overlap the previously generated lateral crystal.

  As shown in the figure, when the x-direction relative scanning of the laser beam L is performed by changing the y position (when the annealing region is changed), the region to which the laser beam L is first irradiated on the semiconductor film to be annealed. It is preferable to carry out laser annealing so that the region to which the laser beam L is next irradiated partially overlaps.

  In FIG. 1A, reference numeral 20 is assigned to the semiconductor film to be annealed, reference numeral 110 is assigned to the substrate stage, and reference numeral 120 is assigned to the laser head. FIG. 1A is a diagram in the middle of performing the x-direction relative scanning of the laser light L once at a certain y position. Here, in order to facilitate visual recognition, the size of the laser head is shown larger than the film.

  FIG. 1B is an image plan view of crystallization when the x-direction relative scanning of the laser beam L is repeatedly performed while changing the y position. In the figure, a region not particularly hatched among regions irradiated with the laser beam L is a lateral crystal generation region.

For each of the lateral crystal portion (lateral poly-Si), the granular crystal portion (granular poly-Si), and the amorphous portion (a-Si), the wavelength of the measurement light is changed, and the complex refractive index n + ik (k is k) It is an extinction coefficient, and ik represents an imaginary part.). FIG. 2 shows the relationship between the wavelength and the refractive index n in each crystal state. Moreover, the relationship between the wavelength in each crystal state and the absorption coefficient α was determined based on the following formula. The results are shown in FIG. In any crystal state, it has been clarified that the absorption coefficient tends to greatly decrease around 400 nm.
Absorption coefficient α = k / 4πλ
(In the formula, k is an extinction coefficient and λ is a wavelength.)

  Next, the absorption rate of the silicon film at each wavelength was determined for lateral crystalline silicon, granular crystalline silicon, and amorphous silicon.

The energy emitted from the laser head is attenuated by the loss generated during transmission through various optical systems incorporated in the laser annealing apparatus and the loss due to Fresnel reflection on the film surface, and is absorbed by the film. The light energy absorbed by the film is expressed by the following formula.
(Light energy absorbed by the film) = (Light energy irradiated on the film) × (Ratio of the amount of light incident on the film without surface reflection) × (Ratio of the amount of light absorbed by the film)

  In the above formula, (ratio of the amount of light incident on the film without surface reflection) × (ratio of the amount of light absorbed by the film) is the absorption rate. The absorptance is the ratio of the amount of light absorbed by the film to the amount of laser light applied to the film, and is expressed as absorptance = a × b.

In the above formula, a is the ratio of the amount of light absorbed by the film, and is obtained from the following formula. The film thickness t was set to 50 nm, which is common when crystallization is performed by laser annealing to form a polysilicon TFT.
a = exp ^−αt
(Where α is the absorption coefficient and t is the film thickness)

In the above formula, b is the ratio of the amount of light incident on the film without being reflected from the surface, and is obtained from the following formula. b is an amount obtained by subtracting the loss on the film surface due to Fresnel reflection from the amount of laser light emitted from the laser head.
b = 1-((1-n) / (1 + n)) ²
(In the formula, n is a refractive index.)

  Further, at each wavelength, the ratio of the absorption ratio of granular crystalline silicon to the absorption ratio of amorphous silicon (= absorption ratio of granular poly-Si / a-Si absorption ratio), and the ratio of lateral crystalline silicon to the absorption ratio of amorphous silicon. Absorptivity ratio (= absorption rate of lateral poly-Si / absorption rate of a-Si) was determined. These absorptance ratios are the relative absorptance of granular crystalline silicon and the lateral absorptive silicon when the absorptivity of amorphous silicon is 1. The results are shown in FIG.

  Both granular crystalline silicon and lateral crystalline silicon are polycrystalline silicon (poly-Si), but FIG. 4 shows that the absorption characteristics of these laser beams differ greatly with respect to the wavelength of the laser beams.

  As shown in FIGS. 2 to 4, granular crystalline silicon (granular poly-Si) having a small particle size exhibits intermediate characteristics between amorphous silicon (a-Si) and lateral crystalline silicon (lateral poly-Si). It became clear to show. In this way, no example has been found in the past in which absorption characteristics are evaluated by dividing lateral crystalline silicon and granular crystalline silicon.

  As shown in FIG. 4, in the wavelength region of less than 350 nm, there is no significant difference in absorption characteristics between granular crystalline silicon and lateral crystalline silicon, both of which are about 0.7 to 0.9 times the absorption rate of amorphous silicon. It became clear that the high absorption rate was shown. On the other hand, in the wavelength region of 350 nm or more, both the granular crystalline silicon and the lateral crystalline silicon tend to decrease in the absorption ratio with respect to the amorphous silicon as the wavelength becomes longer. It has been clarified that the level of decrease in the absorptance ratio with respect to amorphous silicon is larger and that the decrease occurs on the shorter wavelength side. In the wavelength range of 350 to 650 nm, the difference between the absorption ratio of granular crystalline silicon to amorphous silicon and the absorption ratio of lateral crystalline silicon to amorphous silicon is large.

  FIG. 4 shows a relative absorptance ratio based on the absorptivity of amorphous silicon (a-Si). As shown in FIG. 3, the absolute absorptance is 500 nm. In the above wavelength range, all the absorptances of lateral crystalline silicon, granular crystalline silicon, and amorphous silicon are remarkably reduced. Therefore, the wavelength of the laser beam to be used can be determined within a range where the difference between the absorption rate of the lateral crystalline silicon and the absorption rate of the granular crystalline silicon is large and the absorption rate of the granular crystalline silicon and the amorphous silicon is somewhat high. preferable.

  The absorption rate of the laser light varies depending on the film thickness t of the silicon film. When the film thickness t (nm) is 50, 100, 200, the ratio of the absorption ratio of the lateral crystalline silicon to the absorption ratio of the laser light and the amorphous silicon (= absorption ratio of lateral poly-Si / a-Si) (Absorption rate). The results are shown in FIG. Similarly, the ratio of the absorption ratio of granular crystalline silicon to the absorption ratio of amorphous silicon (= absorption ratio of granular poly-Si / absorption ratio of a-Si) also varies depending on the film thickness (not shown).

  When a polysilicon TFT is formed by crystallization by laser annealing, when the film thickness is t (nm)> 120, it is difficult to form a TFT element and the leakage current increases. When the film thickness is t (nm) <40, The active layer becomes too thin and the reliability of the device is lowered. Therefore, for TFTs, 40 ≦ film thickness t (nm) ≦ 120 nm is preferable. In the case of forming a polysilicon TFT by performing crystallization by laser annealing, the film thickness t of the amorphous silicon film is most commonly about 50 nm.

  Under the condition of 40 ≦ film thickness t (nm) ≦ 120 nm, the difference between the absorption rate of lateral crystalline silicon and the absorption rate of granular crystalline silicon is increased, and the absorption rate of granular crystalline silicon and amorphous silicon is increased to some extent. For this, it is preferable to use a laser beam having a wavelength region of 350 to 600 nm, and it is more preferable to use a laser beam having a wavelength region of 350 to 500 nm.

  The excimer laser beam that is currently used for laser annealing is an ultraviolet laser beam with a wavelength of 300 nm or less. Therefore, the lateral crystal part, the granular crystal part, and the amorphous part all have high absorptance, and there is a large difference in absorption characteristics. Absent.

  Further, the visible laser light used in Patent Documents 1 to 5 mentioned in the section “Background Art” is a laser light having a wavelength region of 500 to 550 nm such as the second harmonic of a solid-state laser. In such a wavelength region, it seems that there is a large difference in the absorption characteristics between the lateral crystal part and the granular crystal part in FIG. 4, but as shown in FIG. There is no significant difference in absorption characteristics between the lateral crystal part and the granular crystal part.

  That is, conventionally, a laser beam having a wavelength region of 300 nm or less, or a wavelength region of 500 to 550 nm, which does not have a large difference in absorption characteristics between the lateral crystal portion and the granular crystal portion, has been used. And since both the lateral crystal part and the granular crystal part are polycrystalline silicon, it was thought that there was no big difference in absorption characteristics. The inventor has clarified for the first time that there exists a wavelength region in which a large difference appears in the absorption characteristics between the lateral crystal portion and the granular crystal portion.

Japanese Patent Application Laid-Open No. 2004-64066 discloses a laser annealing apparatus using a GaN-based semiconductor laser (wavelength: 350 to 450 nm). Examples of irradiation conditions include a scanning speed of 3000 mm / s and an optical power density of 600 mJ / cm ² on the surface of the amorphous silicon film (paragraph 0127). However, this document does not discuss the relationship between the crystalline state and the absorption rate.

  The melting point of single crystal silicon (c-Si) is about 1400 ° C., and the melting point of amorphous silicon (a-Si) is about 1200 ° C. Therefore, in order to melt the granular crystal part and the amorphous part, it is preferable that the surface temperature of the laser light in the granular crystal part and the amorphous part is about 1400 ° C. or higher.

  The inventor uses a GaN-based semiconductor laser (oscillation wavelength of 405 nm) and changes the amount of light emitted from the laser head on an amorphous silicon film under the condition that the relative scanning speed of the laser light is 0.01 m / s or more. Laser annealing was performed, and SEM and TEM were used to observe whether or not a lateral crystal actually grew in the central portion of the laser beam, and the surface temperature of the laser beam necessary for the lateral crystal growth was determined. there were. Moreover, it has been found from actual experiments that when the surface temperature of the laser beam reaches about 2200 ° C. or higher, partial peeling of the film may occur due to ablation. That is, in order to laterally crystallize the granular crystal part and the non-crystal part, it is preferable that the surface temperature of the laser beam in these parts is about 1700 to 2200 ° C. The surface temperature of the laser beam is an instantaneous film surface temperature when the laser beam is irradiated.

  The temperature reached by the surface is the amount of light incident on the silicon film (this amount of light is caused by the loss of the amount of light generated while passing through various optical systems incorporated in the laser annealing apparatus from the amount of light emitted from the laser head, and by Fresnel reflection on the film surface). It is calculated theoretically from the absorption rate of the silicon film.

The irradiation energy required to bring the surface temperature of the laser light to a desired temperature is conceptually expressed by the following equation. Since each energy changes with time and temperature, it cannot be simply expressed, but is shown here conceptually. In the formula, the melting energy E2 is energy required at the melting point.
(Irradiation energy E1) = (Melting energy E2) + (Energy E3 required for raising to a desired temperature) + (Heat dissipation energy E4)

  For reference, an example of calculation in an adiabatic model when a rectangular parallelepiped of 1 μm × 1 μm × 50 nm is heated is shown. Here, the calculation is performed under the condition that the desired temperature is 1400 ° C.

The melting energy E2 necessary for melting Si contained in a volume of 1 μm × 1 μm × 50 nm is calculated as follows.
E2 = (unit melting energy) × (number of moles of Si contained in a volume of 1 μm × 1 μm × 50 nm) = 46 × 10 ³ × ((2.32 g / cm ³ ) × (10 ⁻⁶ × 10 ⁻⁶ × 50 × 10 ^-9 m ³ ) / 28) = 1.9 × 10 ^-10 J

The energy E3 required to raise Si contained in a volume of 1 μm × 1 μm × 50 nm to a desired temperature (1400 ° C. = melting point in this calculation example) is calculated as follows.
E3 = (specific heat) × (mass of Si contained in a volume of 1 μm × 1 μm × 50 nm) × (desired temperature) = 770 J / kg K × (2.32 g / cm ³ × (10 ⁻⁶ × 10 ⁻⁶ × 50 × 10 ^-9 m ³ )) × 1400 ℃ ＝ 1.3 × 10 ^-10 J

  FIG. 6 shows the relationship between the energy ratio to the absorbed light energy at which the laser beam surface temperature reaches 2200 ° C. and the laser beam surface temperature. Amorphous silicon melts at about 1200 ° C. or higher, but in this figure, a region having a surface temperature of about 1400 ° C. or lower at which the lateral and granular crystals do not melt is illustrated as “non-melted”. Further, a region where the laser beam reaches a surface temperature of about 1700 to 2200 ° C. where the lateral crystal grows and a region where the laser beam reaches a surface temperature of about 2200 ° C. or more where partial film peeling occurs due to ablation are shown.

  When the semiconductor film 20 to be annealed is irradiated with light having a uniform light energy distribution, the amount of light energy absorbed varies depending on the crystal state, so that the surface temperature of the laser light in each crystal state changes. FIG. 6 shows that lateral crystal growth is possible under the condition that the energy ratio to the absorbed light energy at which the surface temperature of the laser beam reaches 2200 ° C. is 0.82 or more, and granularity is obtained under the condition where the energy ratio is 0.70 or less. It has been shown that the crystals do not melt.

In order to melt the granular crystal part and the non-crystalline part and laterally crystallize them, and not to melt the already produced lateral crystal part, the surface temperature of the laser beam for the granular crystal part and the non-crystalline part is low. Absorbed light energy that is about 1700 to 2200 ° C. is applied, and for the lateral crystal portion, absorbed light energy that causes the surface temperature of the laser light to be about 1400 ° C. or lower may be applied. That is, when the semiconductor film to be annealed is an amorphous silicon film, laser annealing may be performed under the conditions satisfying the following expressions (3) and (4).
0.82 ≦ EP / EA ≦ 1.0 (3),
EL / EA ≦ 0.70 (4)
(In the formulas (3) and (4),
EA is the absorbed light energy per unit area of the laser light in the amorphous part,
EP is the absorbed light energy per unit area of the laser beam in the granular crystal part,
EL indicates the absorbed light energy per unit area of the laser light in the lateral crystal portion. )

In order to stably perform laser annealing in which the granular crystal portion and the non-crystalline portion are laterally crystallized and the lateral crystal is not melted, laser annealing is performed under the conditions satisfying the following formulas (3A) and (4). More preferred.
0.85 ≦ EP / EA ≦ 1.0 (3A),
EL / EA ≦ 0.70 (4)

  It has been described that in order to laterally crystallize the granular crystal part and the non-crystal part, it is necessary that the surface temperature of the laser beam in these parts be about 1700 to 2200 ° C. When the present inventor performed laser annealing while changing the conditions within the range of the surface temperature, the granular crystal had a laser beam with the granular crystals serving as nuclei at a relatively low surface temperature condition even within the above range. The lateral crystal tends to grow in a non-parallel direction with respect to the main relative scanning direction (for example, an angle direction of 5 to 45 ° with respect to the main relative scanning direction of the laser beam) and is aligned with the main relative scanning direction simultaneously. Since a lateral crystal is about to grow, a curved lateral crystal may be formed. In order to suppress variations in device characteristics of TFTs, it is preferable that the lateral crystal directions are substantially aligned over substantially the entire surface of the film.

  The present inventor performs laser annealing under the condition that the surface temperature of the laser beam in the granular crystal part and the non-crystalline part is about 2000 ± 200 ° C., so that the granular crystal is instantaneously melted and the granular crystal is nucleated. It has been found that lateral crystal growth is suppressed and the lateral crystal direction can be aligned over almost the entire surface of the film. The present inventor has found that by performing laser annealing under such conditions, the angle between the main relative scanning direction of the laser light and the lateral crystal growth direction can be made equal to or less than 5 ° over substantially the entire surface of the film.

FIG. 7 shows the range of the absorbed power density where the surface temperature at the amorphous portion is about 2000 ± 200 ° C. with respect to the relative scanning speed of the laser beam. As shown in this figure, the laser beam absorption power density P (MW / cm ² ) and the laser beam relative scanning speed v (m / s) in the non-crystalline portion satisfy the following formula (5). It is preferable to perform laser annealing.
0.44v ^0.34143 ≦ P ≦ 0.56v ^0.34143 (5)

Conventionally, in research in the field of SOI, it has been reported that the crystal growth rate of Si of 1 cm / s or less is expressed by the following formula.
V = V0 × exp (−Ea / kT)
(Where V is the solid phase growth rate (cm / s) from a-Si to Poly-Si, T is the annealing temperature (K), V0 is a coefficient, and V0 = 2.3-3. 0.1 × 10 ⁸ cm / s, Ea is the activation energy (= equal to the vacancy formation energy in c-Si), and Ea = 2.68-2.71 eV.)

  The present inventor has confirmed that the lateral crystal growth rate in the laser annealing of the present invention is also expressed by the above relational expression. As described above, since the upper limit of the annealing temperature in the non-crystalline portion is about 2200 ° C., the upper limit of the lateral crystal growth rate is 8 m / s.

  With reference to FIG. 4, it was described that there is a large difference in absorption characteristics between the lateral crystal and the granular crystal in the wavelength region of 350 nm or more. FIG. 4 shows that there is a difference in absorption characteristics between granular crystals and non-crystals in the wavelength region of 350 nm or more. Therefore, if the granular crystal part and the amorphous part to be melted are irradiated with laser light under the same conditions, the amount of light energy absorbed varies depending on the crystalline state, so the laser in the granular crystal part and the amorphous part The surface temperature of light changes. This is shown in FIG.

  FIG. 8 shows that a lateral crystal part, a granular crystal part, and an amorphous part are irradiated with a laser beam of 405 nm under the same irradiation conditions, and the surface temperature of the granular crystal part and the amorphous part becomes about 1700 to 2200 ° C. In addition, when laser annealing is performed so that the surface temperature of the lateral crystal portion is about 1400 ° C. or less, the absorptance distribution and the unit on the film surface in the non-crystalline portion, the granular crystal portion, and the lateral crystal portion It is an image figure of distribution of laser beam irradiation intensity per area, distribution of absorbed energy per unit area of laser beam, and temperature distribution.

  In this figure, the temperature distribution of the film is shown instead of the surface temperature of the laser beam. This figure shows the surface of the semiconductor film to be annealed, the laser beam position on the surface and the relative scanning direction of the laser beam during laser annealing.

  The irradiation intensity distribution of the laser light on the film surface is uniform in the non-crystalline part, the granular crystal part, and the lateral crystal part, but since the respective absorption rates are different, the laser light per unit area in each part is different. Absorbed light energy is different.

  Under the conditions described above, the granular crystal part and the non-crystal part are at a melting temperature, but the lateral crystal part once generated is suppressed to a temperature at which it does not remelt even when irradiated with laser light.

  Here, if attention is paid to the granular crystal part and the amorphous part to be melted, there is a slight difference in the absorption rate of the laser light in these parts. There is a slight difference in the absorbed light energy per unit area between the amorphous part and the amorphous part. As a result, there is a temperature difference between the granular crystal part and the amorphous part. Further, a temperature gradient due to this temperature difference occurs at the boundary between the granular crystal part and the non-crystalline part and in the vicinity thereof.

  The temperature difference between the granular crystal part and the non-crystal part is much smaller than the temperature difference between the lateral crystal part and the granular crystal part. However, the temperature gradient between the granular crystal portion and the non-crystal portion (this temperature gradient is the temperature gradient in the y direction (sub-relative scanning direction)) is lateral in the lateral direction (x direction, main relative scanning direction). There is a possibility of slight influence on crystal growth. It is preferable that there is no temperature gradient between the granular crystal part and the non-crystalline part, since lateral crystals can be grown more uniformly on the entire surface of the film.

Therefore, in the present invention, laser annealing is performed by setting the laser beam irradiation time in the granular crystal part longer than the laser beam irradiation time in the non-crystalline part so as to satisfy the following formula (1), preferably the following formula (1A). carry out.
| EA-EP | <| EA-EPs | (1),
EP ≒ EA ... (1A)
(In the formulas (1) and (1A),
EA is the absorbed light energy per unit area of the laser light in the amorphous part,
EPs is the absorbed light energy per unit area of the laser light in the granular crystal part when the laser light is irradiated under the same laser light irradiation conditions as the non-crystalline part,
EP indicates the actual absorbed light energy per unit area of the laser beam in the granular crystal part. )

  That is, in the present invention, laser annealing is performed so that the difference in absorbed light energy per unit area between the granular crystal part and the amorphous part is reduced by changing the laser light irradiation time in the granular crystal part and the amorphous part. carry out. In such a configuration, the temperature gradient between the granular crystal part and the non-crystalline part is reduced and the film surface is more uniform than when the granular crystal part and the non-crystalline part are processed under the same laser light irradiation conditions. Lateral crystals can be grown.

The irradiation light energy per unit area of the laser beam in the lateral crystal portion preferably satisfies the following formula (2A) or (2B). Even if the irradiation light energy per unit area is equal, in the present invention, the lateral crystal portion has a smaller absorption rate than the non-crystalline portion, and therefore the absorbed energy per unit area is small.
IL≈IA (2A),
IL <IA (2B)
(In the formulas (2A) and (2B), IA is the irradiation light energy per unit area of the laser light in the amorphous part.
IL represents the irradiation light energy per unit area of the laser light in the lateral crystal portion. )
In order to obtain the irradiation light energy per unit area satisfying the above (2A) or (2B), the irradiation time of the laser light per unit area in the lateral crystal portion is the laser light irradiation time per unit area in the non-crystalline portion. It is preferable to be equal to or less than.

 Since the difference in the absorptance between the granular crystal part and the non-crystalline part can be seen from FIG. 4, in order to satisfy the above equation (1), the laser light per unit area in the granular crystal part is satisfied in accordance with the difference in the absorptance What is necessary is just to lengthen irradiation time. For example, if the absorption rate of the non-crystalline portion: the absorption rate of the granular crystal portion = 100: 90, that is, the absorption rate of the granular crystal portion is 10% lower than the absorption rate of the non-crystalline portion, the unit in the granular crystal portion When the laser light irradiation time per area is increased by 10% of the laser light irradiation time per unit area in the non-crystalline portion, EP≈EA (1A) can be satisfied.

  When laser annealing is performed by relatively scanning laser light, the laser light irradiation time per unit area of each crystal region can be adjusted by the beam pattern of the laser light L. As described above, in order to perform laser annealing by making the laser beam irradiation time in the granular crystal portion longer than the laser beam irradiation time in the non-crystalline portion, the beam pattern of the laser beam L is generated outside the lateral crystal. It is possible to simultaneously irradiate a region including at least a part of the granular crystal and at least a part of the non-crystallized remaining non-crystallized, and the ratio to the total irradiation width Da in the relative scanning direction of the non-crystalline part. Thus, it is preferable that the beam pattern has a wide total irradiation width Dp in the relative scanning direction of the granular crystal portion (see FIGS. 9A and 9B).

  In order to obtain the beam pattern as described above, the laser beam L is applied to a region including at least a part of the granular crystal generated outside the lateral crystal and at least a part of the non-crystal remaining uncrystallized. The first beam pattern Lp1 can be irradiated simultaneously and the front end side and the rear end side have a substantially linear shape substantially perpendicular to the relative scanning direction of the laser light L when viewed in the relative scanning direction of the laser light L. And a second beam pattern Lp2 that is positioned on the front side of the first beam pattern Lp1 and can irradiate the granular crystal portion, as viewed in the relative scanning direction of the laser beam, It is preferable to use a laser beam L having a substantially uniform irradiation energy distribution in the first beam pattern Lp1 portion.

  As illustrated, the second beam pattern Lp2 is preferably a pattern that can irradiate only the granular crystal portion. However, the second beam pattern Lp2 is a pattern that can irradiate not only the granular crystal part but also its surroundings within a range in which the effect of improving the temperature gradient between the granular crystal part and the amorphous part is obtained. It does not matter.

  In the above configuration, the granular crystal portion is first annealed only by the second beam pattern Lp2, and then the irradiation energy distribution and the beam width are substantially uniform, and the rear end side is a substantially straight line that is substantially perpendicular to the relative scanning direction. Since the entire region irradiated simultaneously with the first beam pattern Lp1 is annealed, the end of laser beam irradiation can be made substantially the same in any crystal region. If the end of laser beam irradiation differs for each region, the cooling that starts almost simultaneously with the end of irradiation has a considerable influence on the annealing of the regions on both sides. In order to obtain a higher quality and uniform lateral crystal, it is preferable that the laser beam irradiation is simultaneously completed in the laser beam irradiation region as described above.

  In the beam pattern, as shown in FIGS. 9A and 9B, the first beam pattern Lp1 and the second beam pattern Lp2 may be in contact with each other or separated from each other. The distance between the first beam pattern Lp1 and the second beam pattern Lp2 is preferably in contact with each other, so that the first beam pattern Lp1 and the second beam pattern Lp2 are preferably in contact with each other. (FIG. 9A).

  FIG. 10 shows that EP≈EA (1A) by adjusting the laser beam irradiation time per unit area in the granular crystal part and the non-crystalline part by a laser beam pattern as shown in FIG. It is an image figure when making it satisfy. In this example, the laser light irradiation time per unit area in the lateral crystal portion and the non-crystal portion is substantially the same, and IL≈IA.

  Here, the laser beam irradiation time per unit area of the granular crystal part is made slightly longer than the laser light irradiation time per unit area of the amorphous part, thereby satisfying the above formula (1A). Even if the laser light irradiation time per unit area on the non-crystalline portion side is slightly shortened, the above formula (1A) can be satisfied. However, if the laser beam irradiation time on the non-crystalline part side is made too short, sufficient light absorption energy for lateral crystallization of the non-crystalline part cannot be obtained, so laser light irradiation per unit area on the granular crystal part side A configuration with a slightly longer time is preferred.

  11 similarly adjusts the laser beam irradiation time per unit area in the granular crystal part and the non-crystal part by a laser beam pattern as shown in FIG. It is an image figure when it makes it satisfy (1A). In this example, the laser light irradiation time per unit area in the lateral crystal portion is also changed to satisfy IL <IA. However, as a laser beam to be irradiated, one having a wavelength with a large difference in absorptivity between the lateral crystal part and the amorphous part is selected, and the irradiation time per unit area in the lateral crystal part and the amorphous part is the same, The configuration is simple and preferable.

  In the conventional laser annealing, the beam pattern of the laser beam irradiated to the region of the semiconductor film to be annealed at one time is generally rectangular, so the laser beam irradiation time per unit area of the granular crystal portion is not set. In order to make the length longer than the crystal portion, an additional annealing process using a laser beam that can irradiate only the granular crystal portion is necessary, that is, the number of steps increases. As described above, according to the present invention, the laser beam irradiation time per unit area can be changed according to the beam pattern, and therefore the laser beam irradiation time per unit area of the granular crystal portion without increasing the number of steps. Can be lengthened.

  As shown in FIG. 1A, when the x-direction relative scanning of the laser beam L is performed only once at a certain y position, granular crystals are generated on both sides of a lateral crystal growth region extending in a band shape. The In the conventional method, when the x-direction relative scanning of the laser beam L is performed for the second time by shifting the y position, granular crystals are formed on both sides of the lateral crystal growth region extending in a band shape, as in the first time. Is generated.

  However, in the method of the present invention, even when the laser beam is irradiated on the lateral crystal portion, the lateral crystal portion is not remelted, and the temperature of the portion is less than the formation temperature of the granular crystal. As shown in FIG. 11, when the x-direction relative scanning of the second laser beam L is performed by shifting the y position, the granular crystal is formed only on one side of the lateral crystal growth region extending in a band shape and only on the amorphous silicon side. Will be generated. That is, according to the method of the present invention, among the granular crystals generated on both sides of the lateral crystal growth region extending in the first band by the second laser annealing, the granular crystal generated on one side is laterally converted. Further, unnecessary granular crystals are not generated by the second laser annealing on the side where the laser annealing is performed first. By repeating the same operation while changing the y position, it is possible to crystallize almost the entire surface without a joint.

  Although the above evaluation is an evaluation when the semiconductor film 20 to be annealed is a silicon film, it can be applied regardless of the constituent material of the semiconductor film 20 to be annealed.

That is, the laser annealing method of the present invention grows a lateral crystal by performing laser annealing that irradiates a laser beam on a region of a semiconductor film to be annealed made of an amorphous semiconductor under conditions where the lateral crystal grows,
Further, the annealing region is shifted, and laser annealing is performed again on the region including at least a part of the granular crystal generated outside the lateral crystal and at least a part of the non-crystallized remaining uncrystallized. In the laser annealing method in which the operation of lateral crystallization of the portion is performed one or more times,
Laser annealing is performed under the condition that the granular crystal part and the amorphous part of the semiconductor film to be annealed are melted and the lateral crystal part of the semiconductor film to be annealed is not melted.
In addition, the laser annealing is performed by setting the laser beam irradiation time in the granular crystal portion longer than the laser beam irradiation time in the non-crystalline portion so as to satisfy the following formula (1), preferably the following formula (1A). It is a feature.
| EA-EP | <| EA-EPs | (1),
EP ≒ EA ... (1A)
(In the formulas (1) and (1A),
EA is the absorbed light energy per unit area of the laser light in the amorphous part,
EPs is the absorbed light energy per unit area of the laser light in the granular crystal part when the laser light is irradiated under the same laser light irradiation conditions as the non-crystalline part,
EP indicates the actual absorbed light energy per unit area of the laser beam in the granular crystal part. )

  In the laser annealing method of the present invention, it is preferable to carry out laser annealing by setting the laser light irradiation time per unit area in the lateral crystal portion to be equal to or less than the laser light irradiation time per unit area in the amorphous portion.

  The constituent material of the semiconductor film to be annealed is not particularly limited, and examples thereof include silicon, germanium, and silicon / germanium.

 According to the laser annealing method of the present invention, the granular crystal part and the non-crystal part can be selectively melted and highly crystallized. In addition, since the lateral crystal portion once generated is not melted, there is no possibility that the lateral crystal portion that has been grown is remelted and its crystallinity is not changed.

  Under the condition that the granular crystal part and the amorphous part of the semiconductor film to be annealed are melted and the lateral crystal part of the semiconductor film to be annealed is not melted, the absorption rate of the laser light in the granular crystal part and the amorphous part is somewhat There is a difference, and under the same laser light irradiation conditions, there is some difference in the absorbed light energy per unit area between the granular crystal part and the amorphous part. In the present invention, the difference in absorbed light energy per unit area between the granular crystal part and the amorphous part is reduced by changing the laser light irradiation time in the granular crystal part and the amorphous part. Therefore, the temperature gradient between the granular crystal part and the non-crystalline part is made smaller and more uniform laterally than the case where the granular crystal part and the non-crystalline part are processed with the same laser light irradiation time. Crystals can be grown.

  In the laser annealing method of the present invention, by defining the relationship of the absorbed light energy per unit area in the lateral crystal part, the granular crystal part, and the amorphous part, the granular crystal part and the amorphous part are selectively melted, And the lateral crystal part once produced | generated is set as the conditions which do not melt | dissolve. Therefore, the laser annealing method of the present invention can be applied to a semiconductor film to be annealed having an arbitrary film thickness without restriction on the wavelength of the laser beam to be used as long as such a condition can be satisfied.

  However, it is preferable to perform laser annealing under the condition that the absorption rate of the laser beam in the lateral crystal portion is smaller than the absorption rate of the laser beam in the granular crystal portion. As shown in the image diagrams of FIGS. 10 and 11, laser annealing is performed under a condition where the difference between the absorptance in the granular crystal part and the non-crystalline part and the absorptivity of the lateral crystal part is relatively large. It is preferable to perform laser annealing so as to finely adjust the difference in absorbed light energy per unit area in the amorphous portion. In such a configuration, the granular crystal portion and the non-crystalline portion melt, the lateral crystal portion does not melt, and the difference in absorbed light energy per unit area between the granular crystal portion and the non-crystalline portion is the same laser light irradiation condition. It is easy to adjust to the condition of making it smaller than the case, and is preferable. When the semiconductor film to be annealed is an amorphous silicon film, laser annealing is performed using a 350 to 600 nm laser beam having a relatively large difference between the absorption rate of the laser beam in the lateral crystal portion and the absorption rate of the laser beam in the granular crystal portion. Is preferably performed, and laser annealing is more preferably performed using a laser beam of 350 to 500 nm.

  In the laser annealing method of the present invention, it is preferable to use continuous wave laser light as the laser light. In the case of pulse laser light, time during which the laser light is not irradiated periodically even while the laser head is turned on. When continuous wave laser light is used, the laser light is continuously irradiated onto the semiconductor film to be annealed while the laser head is turned on. Large lateral crystals can be grown, which is preferable. Considering a wavelength region suitable for use in carrying out the laser annealing of the present invention, it is preferable to use a semiconductor laser beam as the laser beam.

  In the laser annealing method of the present invention, as shown in FIG. 1B, a region where the laser light is irradiated first and a region where the laser light is irradiated next are partially applied to the annealed semiconductor film. It is preferable to perform laser annealing so as to overlap.

  There is no particular limitation on how the laser light irradiation regions are partially overlapped. If the region irradiated with the laser beam later covers 100% of the granular crystal portion formed by the previous laser beam irradiation, the granular crystal portion is all laterally crystallized, and the lateral crystal formed by the previous irradiation The next lateral crystal region can be formed without a granular crystal region between the crystal regions.

  Depending on the application of the semiconductor film to be annealed, a granular crystal region may remain between the lateral crystal regions. Even in such a case, if the overlap between the region to which the laser light is irradiated later and the granular crystal region is 1% or more, the granular crystal region is partially laterally crystallized, so that the lateral crystal region can be widened. It is preferable that the lateral crystal region becomes wider as the rate of overlap between the region irradiated with the laser beam later and the granular crystal region increases. The overlapping ratio between the region to be irradiated with the laser beam later and the granular crystal region is preferably 50% or more.

  Depending on the laser annealing conditions, the edge within the region directly irradiated with the laser beam and / or the region that is not directly irradiated with the laser beam but conducts heat (= the region immediately outside the region directly irradiated with the laser beam). In addition, granular crystals are produced.

  In the first relative scan in the x direction, granular crystals are generated in the region where the laser beam is not directly irradiated but heat is conducted (= the region immediately outside the region directly irradiated with the laser beam), and the y position is changed. When the laser beam is directly irradiated to the granular crystal in the next relative scanning in the x direction, the region irradiated with the laser beam first and the region irradiated with the laser beam partially overlap each other. Even if not, the granular crystal can be laterally crystallized. However, considering the positional deviation between the generation region of the granular crystal and the irradiation position of the laser beam, when laser annealing is performed again with the annealing region shifted with respect to the semiconductor film to be annealed, the laser beam is first emitted. Laser annealing is preferably performed so that the irradiated region and the region irradiated with the laser beam partially overlap each other.

  Although the case where the laser beam is relatively scanned with respect to the semiconductor film to be annealed has been described, the method of the present invention can be applied to the case where laser annealing is performed under the condition that the lateral crystal grows without the relative scanning of the laser beam. It is.

  For example, by irradiating a laser beam in a rectangular shape to a certain region first, and repeatedly irradiating the laser beam multiple times while reducing the irradiation width in one direction without changing the irradiation center line, First, the temperature is cooled from the outside of the region irradiated with the laser beam, and a temperature gradient is generated between the irradiation center line and the outside, so that a lateral crystal extending outward from the irradiation center line can be grown. At this time, the generation of the granular crystal outside the lateral crystal generation region is the same as in the case where the lateral crystal is grown by relative scanning. In this case, the region that is annealed by irradiating the same region with the laser beam a plurality of times under the above conditions becomes the annealing region for one laser annealing. However, this method is inefficient because it is necessary to irradiate a laser beam a plurality of times by changing the irradiation area using a photomask or the like to one annealing region. It is also difficult to treat almost the entire surface uniformly.

  Therefore, in the laser annealing method of the present invention, it is preferable to perform laser annealing by relatively scanning the laser light while partially irradiating the semiconductor film to be annealed with the laser light. In such a configuration, since the crystal grows in the relative scanning direction of the laser beam, the lateral crystal can be continuously grown, and the entire film surface can be processed efficiently. In addition, since the entire film surface can be processed continuously and densely, a substantially whole surface lateral crystal film excellent in uniformity can be obtained.

  By using the laser annealing method of the present invention, a semiconductor film having high crystallinity and uniformity and suitable as an active layer of a thin film transistor (TFT) can be manufactured at low cost. By using this semiconductor film, a semiconductor device such as a TFT having excellent element characteristics (carrier mobility, etc.) and element uniformity can be manufactured.

When the semiconductor film to be annealed is an amorphous silicon film, the inventor performs laser annealing under the condition satisfying the above formula (1A), and when the TFT is manufactured using the obtained silicon film, The carrier mobility close to single crystal silicon, specifically, the carrier mobility of 500 to 600 cm ² / Vs can be realized.

  In the present invention, since a lateral crystal film having almost no granular crystal portion and almost no joint can be manufactured on substantially the entire surface, the beam end portion of the laser beam and the TFT can be manufactured based on the design information of the formation position of the semiconductor device such as TFT. It is not necessary to devise such means as scanning the laser beam so that it does not overlap with the element formation region of the semiconductor device such as, or selectively irradiating the laser beam only to the element formation region of the semiconductor device such as TFT. A semiconductor device such as a TFT having excellent carrier mobility and element uniformity can be stably manufactured at low cost. An electro-optical device provided with such a semiconductor device such as a TFT has excellent performance such as display quality.

"Laser annealing equipment"
A configuration of a laser annealing apparatus according to an embodiment of the present invention will be described with reference to the drawings. FIG. 12 is a diagram showing the overall configuration of the laser annealing apparatus, and FIG. 13 is a diagram showing the internal configuration of one combined semiconductor laser light source 121.

  The laser annealing apparatus 100 of this embodiment includes a substrate stage 110 on which a semiconductor film 20 to be annealed such as an amorphous silicon film is placed, a laser head 120 that emits laser light L, and an emitted laser light L from the laser head 120. And a scanning optical system 140 for scanning.

  In the present embodiment, the laser light L emitted from the laser head 120 is scanned in the x direction (main relative scanning direction) by the scanning optical system 140. Further, the substrate stage 110 is movable in the y direction in the figure by a stage moving means (not shown), so that the laser light L is relatively scanned in the y direction (sub-relative scanning direction) in the figure. Yes. In this embodiment, the substrate stage 110 and the scanning optical system 140 constitute a relative scanning unit that relatively scans the laser light L with respect to the semiconductor film 20 to be annealed.

  The laser head 120 is schematically configured by a plurality of combined semiconductor laser light sources 121 arranged on the water-cooled heat sink 131 without any gap.

  As shown in FIG. 13, each combined semiconductor laser light source 121 includes a single multi-transverse mode semiconductor laser LD (broad area semiconductor laser, not shown) having a continuous wave output as a laser light oscillation source 4. LD packages 123 (123A to 123D) and collimator lenses 124 (124A to 124D) of the same number as the LD package 123, which respectively parallelize the laser beams L1 to L4 emitted from the four LD packages 123. Are incorporated in the LD unit 122.

  In the combined semiconductor laser light source 121, the four LD packages 123 (123A to 123D) are arranged in the x direction shown in the drawing (the depth direction shown in FIG. 12).

The combined semiconductor laser light source 121 further includes the same number of reflecting mirrors 125 (125A to 125D) as the LD package 123 that reflects the laser beams L1 to L4, respectively.
A polarizing beam splitter 126A on which the laser beams L1 and L2 reflected by the reflecting mirrors 125A and 125B are incident;
And a polarization beam splitter 126B on which the laser beams L3 and L4 reflected by the reflection mirrors 125C and 125D are incident.

  Each of the polarization beam splitters (hereinafter referred to as PBS) 126A and 126B is a cube-shaped PBS in which two right-angle prisms are bonded, and the polarization direction of the laser beams L3 and L4 is set on the light incident surface of the PBS 126B. A half-wave phase difference element 127 that is shifted by 90 ° is attached.

  For example, when the PBS 126A reflects a P wave, the laser waves L1 and L2 incident on the PBS 126A have S wave components transmitted through the PBS 126A and incident on the photodiodes 129A and 129B, respectively, for light output detection. It is reflected in the PBS 126A and enters the PBS 126B. Since the ratio of the P wave component and the S wave component can be changed by adjusting the direction of polarization of the laser beams L1 and L2, in this case, by adjusting the direction in which the P wave component increases, more light can be obtained. Can be used effectively.

  By making the PBS 126B have the property of reflecting (or transmitting) the component opposite to that of the PBS 126A, that is, in this case, reflecting the S wave, the P wave reflected by the PBS 126A is left as it is. Can be transmitted. On the other hand, the laser beams L3 and L4 are each shifted in polarization direction by 90 ° by the ½ wavelength phase difference element 127 and then made incident on the PBS 126B. In the PBS 126B that reflects the wave, a P-wave component with a small amount of light for light output detection passes through the PBS 126B and enters the photodiodes 129C and 129D, and an S-wave with a large amount of light is reflected.

  Therefore, in the combined semiconductor laser light source 121, the laser light L1 and the laser light L3, and the laser light L2 and the laser light L4 having different polarization components are polarized and combined in the fast axis direction in the PBS 126B, and further combined. The combined laser beams L1 and L3 and the polarized laser beams L2 and L4 are angularly combined in the slow axis direction.

  Since the laser output of the semiconductor laser LD is relatively small, and the optical power density necessary for high-speed scanning annealing cannot be obtained by itself, the laser head 120 uses the combined semiconductor laser light source 121 including a plurality of LD packages 123. It is set as the structure provided with multiple. In each combined semiconductor laser light source 121, when the emitted light from the plurality of LD packages 123 is combined only by the angle combination, the depth of focus becomes shallow, and there is a fear that the light intensity variation due to the defocus is increased. In the multi-lateral mode semiconductor laser LD, the radiation angle in the fast axis direction is 40 to 60 °, and the radiation angle in the slow axis direction is 15 to 25 °. In the present embodiment, the laser beams L1 to L4 emitted from the plurality of LD packages 123 are polarized and multiplexed in the fast axis direction and angularly multiplexed in the slow axis direction. The required optical power density is obtained.

  Two light beams that propagate in a substantially symmetric direction with respect to the optical axis included in the individual-order high-order transverse mode light emitted from the multi-lateral-mode semiconductor laser LD are formed at the light exit of the combined semiconductor laser light source 121. In order to reduce the coherence of the wavefront component, a ½ wavelength phase difference element 128 that shifts the polarization direction of one of the two wavefront components by 90 ° is provided. This will be described with reference to FIG.

  In the multi-lateral mode semiconductor laser LD, a plurality of higher-order transverse modes having different orders are oscillated simultaneously. As shown in FIG. 14A, the near-field image NFP (m) of high-order transverse mode light of any one order m has an intensity distribution having a plurality of peaks according to the order, and between adjacent peaks. It is an image in which the phase of is reversed. As schematically shown in FIG. 14B, the optical waveguide R of the semiconductor laser LD has two end faces E1 and E2 parallel to the optical axis A. Since one order of higher-order transverse mode light is emitted after being repeatedly reflected between these two end faces E1 and E2, the higher-order transverse mode light of one order is roughly approximate to the optical axis A. A plurality of two wavefront components W1 and W2 propagating in a symmetric direction are superimposed.

  The two wavefront components W1 and W2 are roughly the same. When the wavefront component W1 is reflected at the end face E1, the wavefront component W2 is reflected at the end face E2, and when the wavefront component W1 is reflected at the end face E2, the wavefront component W2 is reflected at the end face E1. It is in the relationship reflected by. It is considered that the near-field image NFP (m) having the intensity distribution and the phase distribution is formed by the interference between the two wavefront components W1 and W2.

  Actually, since a plurality of higher-order transverse modes having different orders are simultaneously oscillated, the actual near-field image NFP is a superposition of the near-field images NFP (m) of a plurality of higher-order transverse modes having different orders. .

  If attention is paid to an arbitrary high-order transverse mode light of the order m, the two wavefront components W1 and W2 propagate in a substantially symmetric direction with respect to the optical axis A, and are substantially symmetrical with respect to the optical axis A. A far-field image FFP (m) having the intensity distributions P1 and P2 is formed.

  Even if the order of the high-order transverse mode light is different, a plurality of the two wavefront components W1 and W2 propagating in a substantially symmetrical direction with respect to the optical axis A are overlapped. However, the peak separation angle θ of the bimodal light intensity distributions P1 and P2 is determined by the stripe width and refractive index distribution of the optical waveguide R of the semiconductor laser, the oscillation wavelength, the order of the high-order transverse mode, etc. As the result, the peak separation angle θ tends to increase.

  In the figure, the far-field image FFP (m) of the high-order transverse mode light having the largest peak separation angle θ of the bimodal light intensity distributions P1 and P2 is indicated by a solid line, and the far-field images of other orders of the high-order transverse mode light. The field image FFP (m) is indicated by a broken line.

  Although the coherence between the high-order transverse mode lights of different orders is small, the coherence between the two wavefront components W1 and W2 constituting the high-order transverse mode lights of the individual orders is large. Therefore, in the present embodiment, a 1/2 wavelength phase difference element 128 that shifts the polarization direction of one of the two wavefront components W1 and W2 by 90 ° is provided, and the two wavefront components W1 and W2 are The coherence is reduced, and the intensity distribution of the emitted light from the combined semiconductor laser light source 121 is configured to be uniform.

  In the combined semiconductor laser light source 121, emitted light L 1 to L 4 from the four LD packages 123 is obtained by the collimator lens 124, the reflection mirror 125, the polarization beam splitters 126 A and 126 B, and the ½ wavelength phase difference elements 127 and 128. A multiplexing optical system that multiplexes the signals is configured.

  As shown in FIG. 12, the position and the prism angle are set on the light emitting surface side of the laser head 120 including the plurality of combined semiconductor laser light sources 121 according to the formation positions of the plurality of combined semiconductor laser light sources 121. A prism array (deflection element) 132 composed of a plurality of prisms 132a is attached.

  The scanning optical system 140 includes an optical scanning mirror (dynamic deflection element) 141 such as a galvanometer mirror and a parallel beam forming lens 142.

  Laser light L emitted from a plurality of multiplexed semiconductor laser light sources 121 mounted on the laser head 120 is deflected by the prism array 132, enters the optical scanning mirror 141, and is scanned in the x direction in the drawing.

  The lens 142 is scanned in accordance with the optical scanning by the optical scanning mirror 141, and the laser beam L deflected by the optical scanning mirror 141 enters the lens 142 and is converted into a parallel beam.

In the present embodiment, a spatial light modulator 133 is interposed between the unit of the plurality of multiplexed semiconductor laser light sources 121 and the prism array 132.
In the present embodiment, a laser beam L having an elongated rectangular beam pattern having a uniform light intensity distribution and having a longitudinal direction in the y direction in the figure is emitted from a plurality of combined laser diode light source 121 units. The spatial light modulator 133 has a distribution in its light transmission characteristics, and has a beam pattern in which the total irradiation width in the relative scanning direction of the granular crystal part is wider than the total irradiation width in the relative scanning direction of the amorphous part. It is an element that can be formed, and the laser light irradiation time per unit area in the granular crystal part per scan can be made longer than the laser light irradiation time per unit area in the amorphous part.

  The spatial light modulation element 133 is a spatial light modulation element having a complex amplitude distribution of an inverse Fourier transform profile having a desired beam pattern on the film surface of the semiconductor film 20 to be annealed. Examples of the spatial light modulator 133 include a phase modulator.

  The attachment position of the spatial light modulator 133 is not particularly limited, and may be provided on the laser head 120 itself as described above, or on the optical path between the laser head 120 and the semiconductor film 20 to be annealed. However, when the spatial light modulation element 133 is provided independently of the laser head 120, the spatial light modulation element 133 needs to be relatively scanned in accordance with the relative scanning of the laser head 120.

In the present embodiment, with the above-described configuration, a long and narrow laser beam whose longitudinal direction is the y direction shown in the figure is formed, and this semiconductor beam 20 is irradiated with this laser beam. For example, the present inventor realized an elongated rectangular laser beam of 8 × 1 μm to 20 × 3 μm in which the irradiation light power density in the amorphous portion of the semiconductor film 20 to be annealed is 0.5 to 2.7 W / cm ² . .

  In the laser annealing apparatus 100 of the present embodiment, the irradiation condition of the laser light L is such that the granular crystal portion and the amorphous portion of the semiconductor film 20 to be annealed melt and the lateral crystal portion of the semiconductor film 20 to be annealed does not melt. Is set.

In the laser annealing apparatus 100 of this embodiment, the laser light irradiation time per unit area in the granular crystal part and the unit area in the amorphous part are also satisfied so as to satisfy the following formula (1), preferably the following formula (1A). The hit laser beam irradiation time is changed. In the present embodiment, such a condition is satisfied by the spatial light modulator 133.
| EA-EP | <| EA-EPs | (1),
EP ≒ EA ... (1A)
(In the formulas (1) and (1A),
EA is the absorbed light energy per unit area of the laser light in the amorphous part,
EPs is the absorbed light energy per unit area of the laser light in the granular crystal part when the laser light is irradiated under the same laser light irradiation conditions as the non-crystalline part,
EP indicates the actual absorbed light energy per unit area of the laser beam in the granular crystal part. )

In the laser annealing apparatus 100 of this embodiment, it is preferable that the laser light irradiation time per unit area in the lateral crystal portion is set to be equal to or less than the laser light irradiation time per unit area in the amorphous portion. . In the present embodiment, as described above, the spatial light modulation element 133 can be adjusted to satisfy such a condition.
As will be described later in Example 1, when laser annealing is performed while changing the y position and carrying out the x-direction relative scanning of the laser light L at a constant amount, formation of granular crystals and lateral crystals is performed. Since the region is determined, the laser light irradiation time per unit area in the granular crystal generation region, or the granular crystal generation region and the region in which the previously generated lateral crystal is re-irradiated becomes a desired value. The light modulation characteristics of the spatial light modulator 133 may be designed so as to form a laser beam pattern.

  In the present embodiment, the beam pattern of the laser light can be changed by the spatial light modulator 133. By setting the beam pattern as shown in FIG. 9, the irradiation time per unit area in the granular crystal part and the amorphous part can be changed.

In the laser annealing apparatus 100 of this embodiment, when the semiconductor film 20 to be annealed is an amorphous silicon film, it is preferable that the laser light irradiation conditions satisfy the following formulas (3) and (4) are set.
0.82 ≦ EP / EA ≦ 1.0 (3),
EL / EA ≦ 0.70 (4)
(In formulas (3) and (4), EA, EP, and EL are the same as described above.)

  In the laser annealing apparatus 100 of the present embodiment, it is preferable that the laser light absorption rate in the lateral crystal portion is set to a laser light irradiation condition smaller than the laser light absorption rate in the granular crystal portion.

  When the semiconductor film 20 to be annealed is an amorphous silicon film, the semiconductor laser (laser light oscillation source) LD mounted on the laser head 120 absorbs the laser light in the lateral crystal portion and absorbs the laser light in the granular crystal portion. The semiconductor laser is preferably a semiconductor laser having an oscillation wavelength in the wavelength range of 350 to 600 nm, and more preferably a semiconductor laser having an oscillation wavelength in the wavelength range of 350 to 500 nm.

  As a laser having an oscillation wavelength in the wavelength range of 350 to 600 nm or 350 to 500 nm, GaN having an active layer containing one or more nitrogen-containing semiconductor compounds such as GaN, AlGaN, InGaN, InAlGaN, InGaNAs, and GaNAs And II-VI group compound semiconductor lasers such as ZnO and ZnSe.

  The laser annealing apparatus 100 according to the present embodiment first performs laser beam L scanning on the semiconductor film 20 to be annealed by changing the y position in the x direction (when changing the annealing region). Laser annealing is preferably performed so that the region irradiated with L and the region irradiated with laser beam L next overlap each other.

In the laser annealing apparatus 100 of the present embodiment, when the semiconductor film 20 to be annealed is an amorphous silicon film, the irradiation condition of the laser beam L and the relative scanning condition are the absorption power density P (MW) of the laser beam in the amorphous part. / cm ² ) and the relative scanning speed v (m / s) of the laser beam L are preferably set to satisfy the following formula (5).
0.44v ^0.34143 ≦ P ≦ 0.56v ^0.34143 (5)

  By using the laser annealing apparatus 100 of the present embodiment, the above-described laser annealing method of the present invention can be implemented.

(Design change example)
The laser annealing apparatus 100 of the present embodiment is not limited to the above configuration, and the design can be changed as appropriate.
As shown in FIGS. 15A and 15B, the spatial light modulator 133 is not provided, and the same plurality of combined semiconductor laser light source 121 as shown in FIG. A semiconductor laser light source 134 mounted with one semiconductor laser LD (laser light oscillation source) may be attached. FIG. 15B is a top view of the laser head 120 (the illustration of the water-cooled heat sink 131 is omitted).

  The semiconductor laser light source 134 is attached to the front side with respect to the relative scanning direction of one combined semiconductor laser light source 121. In this embodiment, the granular crystal portion is irradiated with the light emitted from the semiconductor laser light source 134 and the light emitted from the combined semiconductor laser light source 121 to which the light is attached. The semiconductor laser 134 is preferably applied only to the granular crystal portion. However, the semiconductor laser 134 may irradiate not only the granular crystal part but also its surroundings within a range in which the effect of improving the temperature gradient between the granular crystal part and the amorphous part is obtained.

FIG. 15C shows the shape of the laser beam irradiated to the semiconductor film 20 to be annealed. FIG. 15B and FIG. 15C are illustrated in different scales.
Also in the configuration shown in FIG. 15, the beam pattern of the laser beam L is a beam pattern in which the total irradiation width in the relative scanning direction of the granular crystal part is wider than the total irradiation width in the relative scanning direction of the amorphous part. Therefore, as shown in FIG. 10 and FIG. 11, the laser light irradiation time per unit area in the granular crystal part per scan is longer than the laser light irradiation time per unit area in the non-crystalline part. can do.

  Since the semiconductor laser light source 134 is for slightly increasing the laser light irradiation time per unit area in the granular crystal portion as shown in FIGS. 10 and 11, the semiconductor laser mounted on the semiconductor laser light source 134 is used. One LD is enough. However, a plurality of semiconductor lasers LD may be mounted on the semiconductor laser light source 134 as necessary. The semiconductor laser LD mounted on the semiconductor laser light source 134 may be single mode or multimode.

  The semiconductor laser light source 134 may be provided independently of the laser head 120 as long as it can selectively irradiate only the granular crystal portion with laser light, without being provided in the laser head 120 itself. However, when the semiconductor laser light source 134 is provided independently of the laser head 120, the semiconductor laser light source 134 needs to be relatively scanned in accordance with the relative scanning of the laser head 120.

  In the above embodiment, the laser beam L is scanned relative to the semiconductor film 20 to be annealed by moving the substrate stage 110 and scanning light by the scanning optical system 140. The relative scanning is performed by mechanical scanning of the laser head 120 in the illustrated x and y directions, mechanical scanning of the substrate stage 110 in the illustrated x and y directions, or optical scanning of the laser light L in the illustrated x and y directions. Can also be implemented.

  As described in the above embodiment, since a high output can be obtained and an elongated laser beam shape can be obtained, the laser head 120 is equipped with a plurality of combined semiconductor laser light sources 121 including a plurality of multi-lateral mode semiconductor lasers LD. It is preferable that Although the case where the number of LDs mounted on each combined semiconductor laser light source 121 is four has been described, the number can be designed as appropriate. The laser head 120 may include only a single combined semiconductor laser light source 121. The laser head 120 may include only a single semiconductor laser LD.

"Semiconductor films, semiconductor devices, active matrix substrates"
With reference to the drawings, a semiconductor film, a semiconductor device using the semiconductor film, and a manufacturing method and structure of an active matrix substrate including the semiconductor film according to an embodiment of the present invention will be described. In this embodiment, a top gate type pixel switching thin film transistor (pixel switching TFT) and an active matrix substrate including the same will be described as an example. FIG. 16 is a process diagram (cross-sectional view in the thickness direction of the substrate).

  First, as shown in FIG. 16A, a substrate 10 is prepared, and an annealed semiconductor film 20 made of an amorphous semiconductor is formed on the entire surface of the substrate 10. Here, the case where the semiconductor film 20 to be annealed is an amorphous silicon (a-Si) film is illustrated.

  The substrate 10 is not particularly limited, and has a heat resistance that can withstand heat treatment in a glass substrate (quartz glass substrate, barium borosilicate glass substrate, alumino borosilicate glass substrate, etc.), the TFT process of this embodiment, and a subsequent process of the TFT process. In addition, examples include a plastic substrate, a silicon substrate, and a metal substrate (stainless steel substrate or the like) having a heat insulating property equal to or higher than that of glass, and a substrate provided with a heat insulating property equal to or higher than that of glass.

  The semiconductor film 20 to be annealed is not directly formed on the substrate 10, but a base film (not shown) such as silicon oxide or silicon nitride is formed on the substrate 10, and then the semiconductor film 20 to be annealed is formed thereon. May be formed. The method for forming the base film and the semiconductor film 20 to be annealed is not particularly limited, and examples thereof include vapor phase growth methods such as a plasma CVD method, an LPCVD method, and a sputtering method.

  The thickness of the base film is not particularly limited, and is preferably about 200 nm, for example. The thickness of the semiconductor film 20 to be annealed is not particularly limited and is preferably 40 to 120 nm. The film thickness of the semiconductor film 20 to be annealed is preferably about 50 nm, for example.

  The to-be-annealed semiconductor film 20 formed by plasma CVD or the like usually contains a lot of hydrogen. When crystallization is performed by laser annealing while a large amount of hydrogen is contained, there is a possibility that problems such as hydrogen bumping and the film surface becoming rough, or film peeling partially due to hydrogen bumping. Therefore, it is preferable to perform a dehydrogenation process prior to laser annealing. The dehydrogenation treatment method is not particularly limited, and examples include thermal annealing treatment (for example, about 500 ° C. for about 10 minutes).

Next, as shown in FIG. 16B, the laser annealing of the present invention is performed on the semiconductor film 20 to be annealed to crystallize the entire surface of the semiconductor film 20 to be annealed. In the present embodiment, substantially entire lateral crystallization is possible.
Next, as shown in FIG. 16C, the semiconductor film 21 after laser annealing is patterned by photolithography to remove regions other than the TFT element formation region. Reference numeral 22 denotes a semiconductor film after patterning.

Next, as shown in FIG. 16D, a gate insulating film 24 made of SiO ₂ or the like is formed by CVD or sputtering. The thickness of the gate insulating film 24 is not particularly limited and is preferably about 100 nm, for example.
Next, as shown in FIG. 16E, an electrode material is formed and patterned by photolithography to form a gate electrode 25 on the gate insulating film 24.

Next, as shown in FIG. 16F, the gate electrode 25 is used as a mask, the semiconductor film 22 is doped with a dopant such as P and B, and the active layer 23 having a source region 23a and a drain region 23b which are active regions. Form. The case where the dopant is P is shown. In the active layer 23, a region between the source region 23a and the drain region 23b becomes a channel region 23c. The doping amount is preferably about 3.0 × 10 ¹⁵ ions / cm ² , for example. By this step, the semiconductor film 23 forming the active layer of the TFT is formed.

Next, as shown in FIG. 16G, an interlayer insulating film 26 made of SiO ₂ , SiN, or the like is formed, and further, etching such as dry etching or wet etching is performed, and the interlayer insulating film 26 is formed with a semiconductor. A contact hole 27a that communicates with the source region 23a of the film 23 and a contact hole 27b that communicates with the drain region 23b are opened.

  Further, a source electrode 28 a and a drain electrode 28 b are formed in a predetermined region on the interlayer insulating film 26. The source electrode 28a is electrically connected to the source region 23a of the semiconductor film 23 via the contact hole 27a, and the drain electrode 28b is electrically connected to the drain region 23b of the semiconductor film 23 via the contact hole 27b.

In the present embodiment, the semiconductor film 21 after laser annealing and before patterning, the semiconductor film 22 after patterning and before impurity implantation, and the semiconductor film 23 after impurity implantation are all manufactured using the laser annealing technique of the present invention. It is a semiconductor film of the invention.
Through the above steps, the pixel switching TFT 30 of this embodiment is manufactured.

Next, as shown in FIG. 16H, an interlayer insulating film 31 made of SiO ₂ , SiN, or the like is formed, and etching such as dry etching or wet etching is performed, and the interlayer insulating film 31 is formed on the source electrode 28a. A contact hole 32 is opened.

  Further, the pixel electrode 33 is formed in a predetermined region on the interlayer insulating film 31. The pixel electrode 33 is electrically connected to the source electrode 28 a of the TFT 30 through the contact hole 32.

  Only a pair of pixel electrodes 33 and TFTs 30 are shown, but in reality, a large number of pixel electrodes 33 are formed in a matrix on one substrate 10, and pixel switching is performed corresponding to each pixel electrode 33. A TFT 30 is formed.

  Usually, for a liquid crystal device, one pixel electrode 33 and one pixel switching TFT 30 are formed for one dot, and for an EL device, one pixel electrode 33 for one dot. Two pixel switching TFTs 30 are formed.

Through the above steps, the active matrix substrate 40 of the present embodiment is manufactured.
In manufacturing the active matrix substrate 40, wiring lines such as scanning lines and signal lines are formed. In some cases, the gate electrode 25 also serves as a scanning line, and in other cases, the scanning line is formed separately from the gate electrode 25. In some cases, the drain electrode 28b also serves as a signal line, and in other cases, the signal line is formed separately from the drain electrode 28b.

  In this embodiment, since the laser annealing technique of the present invention is used, semiconductor films 21 to 23 having high crystallinity and suitable as an active layer of a TFT can be manufactured. The pixel switching TFT 30 of this embodiment manufactured using these semiconductor films 21 to 23 is excellent in element characteristics (carrier mobility and the like) and element uniformity. The active matrix substrate 40 of this embodiment provided with the pixel switching TFT 30 has high performance for an electro-optical device.

  In an electro-optical device such as a liquid crystal device or an EL device, a pixel portion in which a large number of pixel electrodes and pixel switching TFTs are formed in a matrix on the same substrate, and a plurality of driving circuit TFTs that drive the pixel portion There is a case in which a driving unit including a driving circuit configured by using the above is provided. The drive circuit usually has a CMOS structure of N-type TFT and P-type TFT.

  In the laser annealing technique of the present invention, the semiconductor film 20 to be annealed can be substantially laterally crystallized, so that the active layer of the pixel switching TFT and the active layer of the driving circuit TFT can be formed simultaneously. With the laser annealing technology of the present invention, it is possible to manufacture a TFT for a drive circuit that is excellent in device characteristics such as carrier mobility.

"Electro-optical device"
A configuration of an electro-optical device according to an embodiment of the invention will be described with reference to the drawings. The present invention can be applied to an EL device, a liquid crystal device, and the like, and an organic EL device will be described as an example. FIG. 17 is an exploded perspective view of the organic EL device.

  The organic EL device (electro-optical device) 50 according to this embodiment emits red light (R), green light (G), and blue light (B) by applying current on the active matrix substrate 40 according to the above-described embodiment. The light emitting layers 41R, 41G, and 41B to be formed are formed in a predetermined pattern, and the common electrode 42 and the sealing film 43 are sequentially stacked thereon.

  Instead of using the sealing film 43, sealing may be performed with a sealing member such as a metal can or a glass substrate. In this case, a desiccant such as calcium oxide may be included.

  The light emitting layers 41R, 41G, and 41B are formed in a pattern corresponding to the pixel electrode 33, and one pixel is composed of three dots that emit red light (R), green light (G), and blue light (B). . The common electrode 42 and the sealing film 43 are formed on substantially the entire surface of the active matrix substrate 40.

  In the organic EL device 50, one of the pixel electrode 33 and the common electrode 42 functions as an anode and the other functions as a cathode, and the light emitting layers 41R, 41G, and 41B have holes injected from the anode and electrons injected from the cathode. Light is emitted by the recombination energy.

  In order to improve the luminous efficiency, a hole injection layer and / or a hole transport layer can be provided between the light emitting layers 41R, 41G, 41B and the anode. In order to improve the light emission efficiency, an electron injection layer and / or an electron transport layer can be provided between the light emitting layers 41R, 41G, 41B and the cathode.

  Since the organic EL device (electro-optical device) 50 according to the present embodiment is configured using the active matrix substrate 40 according to the above-described embodiment, the device characteristics (such as carrier mobility) and element uniformity of the TFT 30 are excellent. Therefore, the electro-optical characteristics such as display quality are excellent.

Examples and comparative examples according to the present invention will be described.
(Example 1)
On the glass substrate, a base film (200 nm thickness) made of silicon oxide and an amorphous silicon film (a-Si, 50 nm thickness) were sequentially formed by plasma CVD. Thereafter, thermal annealing was performed at about 500 ° C. for about 10 minutes, and dehydrogenation treatment of the amorphous silicon film was performed.

  The amorphous silicon film was subjected to substantially entire surface laser annealing using the laser annealing apparatus 100 of the above embodiment (see FIGS. 12 and 13). A GaN semiconductor laser (oscillation wavelength of 405 nm) was used as the laser beam oscillation source. The laser beam pattern on the amorphous silicon film surface was an elongated rectangular shape of 20 × 3 μm.

  As shown in the image diagram of FIG. 10, the laser light irradiation time per unit area in the granular crystal part is slightly longer than the laser light irradiation time per unit area in the non-crystalline part and the lateral crystal part, Laser annealing was performed so that the absorbed light energy per unit area in the non-crystalline portion and the non-crystalline portion was substantially the same (EP≈EA).

  Specifically, since the absorptivity of the non-crystalline portion: the absorptivity of the granular crystal portion = 100: 90, the laser light irradiation time per unit area in the granular crystal portion is set to the laser per unit area in the non-crystalline portion. In order to make it 10% longer than the light irradiation time, a laser beam pattern of the laser beam pattern by the spatial light modulation element is used, and the laser beam of the beam pattern in which the beam width in the relative scanning direction is increased by 10% only for the granular crystal part, Laser annealing was performed.

Other conditions were as follows.
<Other conditions>
The relative scanning speed of the laser beam was 0.01 m / s, the absorption power density in the amorphous part was 0.1 MW / cm ² , and the overlap amount was 75%.

  The overlap amount of 75% means that after the x-direction relative scanning of the laser beam is performed at a certain y position, the y position is shifted by 5 μm when the x-direction relative scanning of the laser beam is performed by changing the y position. This means that laser annealing was performed so that the irradiated region overlapped by 15 μm with respect to the 20 μm wide region previously irradiated with the laser beam.

  18A and 18B show an SEM photograph and a TEM photograph of the film surface after the substantially entire surface laser annealing. As shown in the figure, under the conditions of this example, the granular crystal part and the non-crystal part melt, but the lateral crystal part once generated does not remelt even when irradiated with laser light, and is almost entirely over the surface. A lateral crystal film having almost no granular crystal part and a seamless seam was obtained. Moreover, the lateral crystal growth direction and size and shape are uniform over the entire surface of the film, and the angle between the main relative scanning direction of the laser beam and the lateral crystal growth direction can be aligned to 5 ° or less over substantially the entire surface of the film.

(Comparative Example 1)
Absorptivity of non-crystalline part: Absorptivity of granular crystal part = 100: 90 In Comparative Example 1, the laser light irradiation time per unit area in the granular crystal part is set as the laser light per unit area in the non-crystalline part. By reducing the irradiation time by 10%, the difference in absorbed light energy per unit area between the granular crystal part and the amorphous part was further increased. Except for performing laser annealing under such conditions, substantially entire surface laser annealing was performed in the same manner as in Example 1.

  An SEM photograph and a TEM photograph of the film surface after the substantially entire surface laser annealing are shown in FIGS. As shown in the drawing, under the conditions of this comparative example, the granular crystal portion and the lateral crystal portion were not melted again even if they were irradiated with laser light. For this reason, even when the laser beam was irradiated repeatedly, the granular crystal portion was not laterally crystallized. Further, the lateral crystal is intended to grow in the non-parallel direction (angular direction of 5 to 45 ° with respect to the scanning direction of the laser beam) with the granular crystal serving as a nucleus, and at the same time. Since the lateral crystal tries to grow so as to align in the main relative scanning direction, a curved lateral crystal was formed. The ratio of the granular crystals to the film area was 30% or more.

(Evaluation of Vg-Id characteristics)
A TFT was manufactured using the silicon film obtained by laser annealing in Example 1, and the Vg-Id characteristics (relationship between the gate voltage Vg and the drain current Id) of the obtained TFT were evaluated.
Similarly, a TFT was manufactured using the silicon film obtained by laser annealing of Comparative Example 1, and its Vg-Id characteristics were evaluated.
The results are shown in FIG. As shown in the figure, the TFT obtained in Example 1 had higher carrier mobility and better device current characteristics than the TFT obtained in Comparative Example 1.

  The laser annealing apparatus of the present invention can be preferably applied to the manufacture of a thin film transistor (TFT) and an electro-optical device including the same.

(A) Perspective view showing a state of generating a lateral crystal and a granular crystal when the x-direction relative scanning of the laser beam is performed once at a certain y position, and (b) is a relative view of the laser beam in the x direction when the y position is changed. Image plan view of crystallization when repeated scanning The figure which shows the relationship between the wavelength and the refractive index n in the lateral crystal part of a silicon film, a granular crystal part, and an amorphous part The figure which shows the relationship between the wavelength and the absorption coefficient in the lateral crystal part, the granular crystal part and the non-crystalline part of the silicon film The figure which shows the relationship between the wavelength of a laser beam, the absorptivity ratio of granular crystalline silicon with respect to the absorptivity of amorphous silicon, and the absorptivity ratio of lateral crystalline silicon with respect to the absorptivity of amorphous silicon The figure which shows the relationship between the wavelength of a laser beam when the film thickness t (nm) = 50,100,200 and the absorptivity ratio of the lateral crystalline silicon with respect to the absorptivity of the amorphous silicon The figure which shows the relationship between the energy ratio with respect to the absorbed light energy in which the surface arrival temperature of a laser beam is 2200 degreeC, the surface arrival temperature of a laser beam, and the crystal state to produce | generate The figure which shows the range of the absorption power density from which the surface arrival temperature in an amorphous part becomes about 2000 +/- 200 degreeC with respect to the relative scanning speed of a laser beam. When a 405 nm laser beam is irradiated to the lateral crystal part, the granular crystal part, and the amorphous part under the same irradiation conditions, the absorptance distribution, the laser light irradiation time distribution, the laser light absorption energy distribution, and Example image of temperature distribution (A) And (b) is a beam pattern example of the laser beam in the laser annealing method of the present invention. Example image of absorption distribution, laser light irradiation time distribution, laser light absorption energy distribution, and temperature distribution when the laser annealing method of the present invention is performed Example image of absorption distribution, laser light irradiation time distribution, laser light absorption energy distribution, and temperature distribution when the laser annealing method of the present invention is performed 1 is an overall configuration diagram of a laser annealing apparatus according to an embodiment of the present invention. The figure which shows the internal structure of one combining semiconductor laser light source with which the laser annealing apparatus of FIG. 12 was equipped. (A), (b) is a figure for demonstrating the structure which reduces the coherence which multi transverse mode light has. The figure which shows the example of a design change of the laser annealing apparatus of embodiment which concerns on this invention (A)-(h) is process drawing which shows the semiconductor film of embodiment which concerns on this invention, the semiconductor device using the same, and the manufacturing method of an active matrix substrate provided with the same The figure which shows the structure of the organic electroluminescent apparatus (electro-optical apparatus) of embodiment which concerns on this invention. (A) is an SEM surface photograph after laser annealing when laser annealing is performed in Example 1, and (b) is the TEM surface photograph. (A) is SEM surface photograph after laser annealing of Comparative Example 1, and (b) is TEM surface photograph. The figure which shows the evaluation result of the Vg-Id characteristic of TFT obtained in Example 1 and Comparative Example 1

Explanation of symbols

20 Semiconductor film to be annealed 21, 22 Semiconductor film 23 Semiconductor film (active layer)
23a Source region (active region)
23b Drain region (active region)
30 TFT (semiconductor device)
40 active matrix substrate 50 organic EL device (electro-optical device)
100 Laser annealing device 110 Substrate stage (relative scanning means)
DESCRIPTION OF SYMBOLS 120 Laser head 121 Combined semiconductor laser light source 123 (123A-123D) LD package 133 Spatial light modulation element 134 Semiconductor laser light source 140 Scanning optical system (relative scanning means)
LD semiconductor laser (laser light source)
L laser light Lp1 first beam pattern Lp2 second beam pattern Da total irradiation width in the relative scanning direction of the amorphous part Dp total irradiation width in the relative scanning direction of the granular crystal part

Claims (38)

A region of a semiconductor film to be annealed made of an amorphous semiconductor is subjected to laser annealing to irradiate a laser beam under the condition that a lateral crystal grows, and a lateral crystal is grown.
Furthermore, the annealing region is shifted, and the laser annealing is performed again on a region including at least a part of the granular crystal generated outside the lateral crystal and at least a part of the non-crystallized remaining uncrystallized. Then, in the laser annealing method in which the operation of laterally crystallizing the portion is performed one or more times,
The laser annealing is performed under the condition that the granular crystal part and the amorphous part of the semiconductor film to be annealed are melted and the lateral crystal part of the semiconductor film to be annealed is not melted.
In addition, the laser annealing is performed by setting the laser light irradiation time per unit area in the granular crystal part to be longer than the laser light irradiation time per unit area in the non-crystalline part so that the following formula (1) is satisfied. And a laser annealing method.
| EA-EP | <| EA-EPs | (1)
(In the formula (1),
EA is the absorbed light energy per unit area of the laser light in the amorphous part,
EPs is the absorbed light energy per unit area of the laser light in the granular crystal part when the laser light is irradiated under the same laser light irradiation conditions as the non-crystalline part,
EP indicates the actual absorbed light energy per unit area of the laser beam in the granular crystal part. ) The laser annealing is performed by setting the laser light irradiation time per unit area in the granular crystal part longer than the laser light irradiation time per unit area in the amorphous part so as to satisfy the following formula (1A). The laser annealing method according to claim 1.
EP ≒ EA ... (1A)
(In formula (1A), EP and EA are the same as above.)   3. The laser annealing method according to claim 1, wherein a laser light irradiation time per unit area in the lateral crystal portion is equal to or less than a laser light irradiation time per unit area in the non-crystalline portion. The semiconductor film to be annealed is an amorphous silicon film,
The laser annealing method according to any one of claims 1 to 3, wherein the laser annealing is performed under a condition that satisfies the following expressions (3) and (4).
0.82 ≦ EP / EA ≦ 1.0 (3),
EL / EA ≦ 0.70 (4)
(In formulas (3) and (4), EA and EP are the same as above.
EL represents the absorbed light energy per unit area of the laser light in the lateral crystal portion. )   5. The laser annealing is performed under a condition that an absorption rate of the laser light in the lateral crystal portion is smaller than an absorption rate of the laser light in the granular crystal portion. Laser annealing method.   6. The laser annealing is performed by relatively scanning the laser light while partially irradiating the laser light to the semiconductor film to be annealed. Laser annealing method. The beam pattern of the laser light is
Irradiation to a region including at least a part of the granular crystal formed outside the lateral crystal and at least a part of the non-crystallized non-crystallized material is possible at the same time, and relative to the non-crystalline part The laser annealing method according to claim 6, wherein the beam pattern has a wider total irradiation width in the relative scanning direction of the granular crystal portion than a total irradiation width in the scanning direction. As the laser light,
Relative scanning of the laser light can be performed simultaneously on a region including at least a part of the granular crystal generated outside the lateral crystal and at least a part of the non-crystallized non-crystal which remains. A first beam pattern whose front end side and rear end side have a substantially linear shape that is substantially perpendicular to the relative scanning direction of the laser light, as viewed in the direction;
A beam pattern having a shape that is combined with a second beam pattern that is positioned on the front side of the first beam pattern and can irradiate the granular crystal portion when viewed in the relative scanning direction of the laser beam;
8. The laser annealing method according to claim 7, wherein a laser beam having a substantially uniform irradiation energy distribution in at least the first beam pattern portion is used.   9. The laser annealing method according to claim 8, wherein the beam pattern of the laser light is a beam pattern having a shape obtained by combining the first beam pattern and the second beam pattern. The semiconductor film to be annealed is an amorphous silicon film,
The laser annealing is performed under the condition that the absorption power density P (MW / cm ² ) of the laser light in the amorphous portion and the relative scanning speed v (m / s) of the laser light satisfy the following formula (5). The laser annealing method according to claim 6, wherein the laser annealing method is performed.
0.44v ^0.34143 ≦ P ≦ 0.56v ^0.34143 (5)   The laser annealing method according to claim 1, wherein a continuous wave laser beam is used as the laser beam.   The laser annealing method according to claim 1, wherein a semiconductor laser beam is used as the laser beam. The semiconductor film to be annealed is an amorphous silicon film,
The laser annealing method according to claim 12, wherein a laser beam having a wavelength range of 350 to 600 nm is used as the laser beam. When the laser annealing is performed again by shifting the annealing region with respect to the semiconductor film to be annealed,
The laser annealing is performed on the semiconductor film to be annealed so that a region irradiated with the laser beam first and a region irradiated with the laser beam partially overlap each other. Item 14. The laser annealing method according to any one of Items 1 to 13. A laser head equipped with one or a plurality of laser light oscillation sources is provided,
A region of a semiconductor film to be annealed made of an amorphous semiconductor is subjected to laser annealing to irradiate a laser beam under the condition that a lateral crystal grows, and a lateral crystal is grown.
Furthermore, the annealing region is shifted, and the laser annealing is performed again on a region including at least a part of the granular crystal generated outside the lateral crystal and at least a part of the non-crystallized remaining uncrystallized. Then, in a laser annealing apparatus that performs the operation of lateral crystallization of the portion at least once,
The granular crystal part and the amorphous part of the semiconductor film to be annealed are melted, and the laser light irradiation conditions are set so that the lateral crystal part of the semiconductor film to be annealed does not melt,
And the laser beam irradiation time per unit area in the granular crystal part is set to the laser beam irradiation condition longer than the laser beam irradiation time per unit area in the non-crystalline part so as to satisfy the following formula (1). A laser annealing apparatus characterized by comprising:
| EA-EP | <| EA-EPs | (1)
(In the formula (1),
EA is the absorbed light energy per unit area of the laser light in the amorphous part,
EPs is the absorbed light energy per unit area of the laser light in the granular crystal part when the laser light is irradiated under the same laser light irradiation conditions as the non-crystalline part,
EP indicates the actual absorbed light energy per unit area of the laser beam in the granular crystal part. ) The laser light irradiation time per unit area in the granular crystal part is set to a laser light irradiation condition longer than the laser light irradiation time per unit area in the amorphous part so as to satisfy the following formula (1A). The laser annealing apparatus according to claim 15.
EP ≒ EA ... (1A)
(In formula (1A), EP and EA are the same as above.)   The laser light irradiation time per unit area in the lateral crystal portion is set to be equal to or less than the laser light irradiation time per unit area in the non-crystalline portion. Laser annealing equipment. The semiconductor film to be annealed is an amorphous silicon film,
The laser annealing apparatus according to any one of claims 15 to 17, wherein the laser annealing condition is set to satisfy the following formulas (3) and (4).
0.82 ≦ EP / EA ≦ 1.0 (3),
EL / EA ≦ 0.70 (4)
(In formulas (3) and (4), EA and EP are the same as above.
EL indicates the actual absorbed light energy per unit area of the laser light in the lateral crystal portion. )   The laser light irradiation rate in the lateral crystal portion is set to a laser light irradiation condition smaller than the laser light absorption rate in the granular crystal portion. Laser annealing equipment.   20. The laser annealing according to claim 15, further comprising a relative scanning unit that relatively scans the laser light while partially irradiating the laser light to the semiconductor film to be annealed. apparatus. The laser beam is
Irradiation to a region including at least a part of the granular crystal formed outside the lateral crystal and at least a part of the non-crystallized non-crystallized material is possible at the same time, and relative to the non-crystalline part 21. The laser annealing apparatus according to claim 20, wherein the laser annealing apparatus has a beam pattern in which the total irradiation width in the relative scanning direction of the granular crystal portion is wider than the total irradiation width in the scanning direction. The laser beam is
Relative scanning of the laser light can be performed simultaneously on a region including at least a part of the granular crystal generated outside the lateral crystal and at least a part of the non-crystallized non-crystal which remains. A first beam pattern whose front end side and rear end side have a substantially linear shape that is substantially perpendicular to the relative scanning direction of the laser light, as viewed in the direction;
A beam pattern having a shape that is combined with a second beam pattern that is positioned on the front side of the first beam pattern and can irradiate the granular crystal portion when viewed in the relative scanning direction of the laser beam;
The laser annealing apparatus according to claim 21, wherein the irradiation energy distribution of at least the first beam pattern portion is substantially uniform.   23. The laser annealing apparatus according to claim 22, wherein the beam pattern of the laser beam is a beam pattern having a shape obtained by bringing the first beam pattern and the second beam pattern into contact with each other.   24. The spatial light modulator for forming the beam pattern is provided on the laser head itself or on an optical path between the laser head and the semiconductor film to be annealed. The laser annealing apparatus according to any one of the above.   25. The laser annealing according to claim 24, wherein the spatial light modulation element is an element having a complex amplitude distribution of an inverse Fourier transform profile that forms the beam pattern on a film surface of the semiconductor film to be annealed. apparatus.   A laser light oscillation source for selectively irradiating the granular crystal portion with laser light on the laser head itself or independently of the laser head to form the second beam pattern; The laser annealing apparatus according to any one of claims 21 to 23. The semiconductor film to be annealed is an amorphous silicon film,
The laser light irradiation condition and the relative scanning condition are as follows: the absorption power density P (MW / cm ² ) of the laser light in the amorphous portion and the relative scanning speed v (m / s) of the laser light 27. The laser annealing apparatus according to claim 20, wherein the laser annealing apparatus is set to satisfy a condition (5).
0.44v ^0.34143 ≦ P ≦ 0.56v ^0.34143 (5)   The laser annealing apparatus according to any one of claims 15 to 27, wherein the laser beam is a continuous wave laser beam.   The laser annealing apparatus according to any one of claims 15 to 28, wherein the laser beam oscillation source is a semiconductor laser.   30. The laser annealing apparatus according to claim 29, wherein the laser beam oscillation source is a semiconductor laser having an oscillation wavelength in a wavelength range of 350 to 600 nm.   The laser annealing apparatus according to claim 30, wherein the laser beam oscillation source is a GaN-based semiconductor laser or a ZnO-based semiconductor laser. When the laser annealing is performed again by shifting the annealing region with respect to the semiconductor film to be annealed,
32. The laser annealing according to claim 15, wherein the laser annealing is performed so that a region irradiated with the laser beam first and a region irradiated with the laser beam partially overlap each other. A laser annealing apparatus according to claim 1.   A semiconductor film manufactured by performing the laser annealing method according to claim 1 on an annealed semiconductor film made of an amorphous semiconductor.   34. The semiconductor film according to claim 33, wherein the semiconductor film to be annealed is an amorphous silicon film.   The semiconductor film according to claim 33 or 34, wherein substantially the entire surface is made of a lateral crystal. In an unpatterned semiconductor film formed on a substrate,
A semiconductor film characterized in that a substantially entire surface is a seamless lateral crystal film.   37. A semiconductor device comprising an active layer obtained by using the semiconductor film according to claim 32.   An electro-optical device comprising the semiconductor device according to claim 37.