JP2008078180A - Shear test method for ribbon-bonded part and device therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a shear test method for ribbon-bonded parts by which the bonding strength of the ribbon-bonded part can be accurately detected by a shear test, and to provide a device therefor. <P>SOLUTION: The shear test method for ribbon-bonded parts is used to conduct a shear test for a ribbon-bonded part wherein a ribbon 23 is bonded on a wafer 21. In this case, a reinforcing jig 13 is brought into contact with the upper surface of the ribbon-bonded part, and while the reinforcing jig 13 is in contact with the ribbon-bonded part, a shearing force is given to the ribbon 23 from the side of the ribbon-bonded part. Based of the shear force when boundary breakage occurs at the ribbon-bonded part, it is determined whether or not boundary bonding at the ribbon-bonded part is appropriate. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a shear test method and an apparatus for testing a bonding strength at a portion where a strip-shaped conductive member is bonded to a base material (hereinafter referred to as a ribbon bonding portion). More specifically, the present invention relates to a shear test method and apparatus for a ribbon bonding portion for testing the bonding strength in the shear direction of the ribbon bonding portion.

  Conventionally, a member in which two or more members are joined by soldering or bonding is used. In order to ensure the reliability of the product, the bonding state and bonding strength of this bonding point are tested. For example, as a method of testing the bonding strength of wire bonding, a tensile test (pull test) that applies a tensile force in a direction substantially perpendicular to the bonding surface, or a shear test that applies a force in a direction substantially parallel to the bonding surface (Share test) is generally performed.

For example, Patent Document 1 discloses a wire bond inspection apparatus that detects data on shear strength while shearing a joint and processes data. According to the technique of this document, it is said that the bonding state of the wire bond bonding portion can be accurately grasped by data processing with a computer. Patent Document 2 discloses a bonding strength test apparatus that can perform a pull test and a shear test by changing the attachment.
Japanese Patent Laid-Open No. 2003-59982 Japanese Patent Laid-Open No. 2001-118887

  However, all of the conventional techniques described above are inspection devices for inspecting the bonding strength of wire bonding, and cannot be applied to the ribbon bonding portion as it is. The ribbon for ribbon bonding has a thickness of about 0.1 mm and is difficult to grip with a three-way grip jig or the like. Therefore, it is not suitable for pull testing.

  The ribbon bonding portion generally has a larger bonding area and smaller member thickness than wire bonding. Therefore, the stress due to the shear tool is not transmitted to the entire joint interface. Then, plastic deformation occurs greatly around the tool, and the base material of the joint is destroyed. For this reason, there was a problem that the joint strength could not be accurately detected even by the shear test.

  In order to investigate the reason for this, the stress distribution generated inside the joint member is simulated when a shear force in the horizontal direction is applied to the joint surface at the joint by wire bonding and ribbon bonding. Compared by. As shown in FIG. 10, the wire bonding location is assumed to be a location where the wire is bonded to the base material in the bonding range indicated by the broken line in the figure. On the other hand, the stress distribution generated when a force is applied in the direction of the arrow in the figure was calculated by simulation. Similarly, the ribbon bonding part was also performed.

  The results are simplified and shown in FIGS. In these figures, only the portion corresponding to the joining range of each member is shown by a solid line. The stress on the outer surface of the member in the joining range and the member cross section at the end of the joining range is divided into three stages, and the larger the stress, the darker the hatching. That is, as shown in FIG. 11, the stress is large in the range W1, the medium range W2 is moderate, and the stress is small in the range W3. The stress distribution in the ribbon bonding portion is as shown in FIG. 12, and the range R1 has a large stress, the range R2 has a medium level, and the range R3 has a small stress.

  As shown in FIG. 11, in wire bonding, a difference in stress is observed in the thickness direction of the wire (vertical direction in the figure), and stress is mainly concentrated at the lower portion of the wire. It can also be seen from the state of the stress distribution in the cross section that the stress is transmitted to almost the entire joining range. On the other hand, in ribbon bonding, as shown in FIG. 12, there is almost no difference in stress in the vertical direction in the figure, and the stress decreases toward the left in the figure. Therefore, it was found that the stress was transmitted only to a part of the joint.

  The present invention has been made to solve the problems of the conventional inspection method described above. That is, an object of the present invention is to provide a ribbon bonding location shear test method and apparatus capable of accurately detecting the bonding strength of the ribbon bonding location by the shear test.

  The shear test method of the ribbon bonding portion of the present invention, which has been made for the purpose of solving this problem, is a method for performing a shear test of a ribbon bonding portion where a belt-like member is joined on a plate-like object, and is provided on the upper surface of the ribbon bonding portion. While the auxiliary member is in contact and the auxiliary member is in contact with the ribbon bonding location, the shear force is applied to the belt-shaped member from the side of the ribbon bonding location, and the shear force when interface failure occurs at the ribbon bonding location Based on this, the quality of the interfacial bonding at the ribbon bonding location is judged.

  According to the shear test method for a ribbon bonding portion of the present invention, the shear force is applied while the auxiliary member is in contact with the upper surface of the ribbon bonding portion. Accordingly, since the shear force is applied to both the ribbon bonding portion and the auxiliary member, the shear force can be transmitted over almost the entire surface of the ribbon bonding portion. As a result, the ribbon bonding location shear test method can accurately detect the bonding strength of the ribbon bonding location. As the auxiliary member, a material having a sufficiently large thickness (for example, approximately the same as the depth in the pressing direction of the ribbon) and a hardness equal to or more than that of the ribbon is desirable.

  Furthermore, in the present invention, it is desirable that the auxiliary member is bonded to the upper surface of the ribbon bonding portion and the shear force is applied in that state. If it does in this way, a shear force can be applied with respect to an auxiliary member with a ribbon bonding location.

  Furthermore, in the present invention, it is desirable to press the auxiliary member against the upper surface of the ribbon bonding portion from above and apply the shear force in that state. Even in this case, the auxiliary member can be brought into contact with the upper surface of the ribbon bonding portion.

  Further, according to the present invention, the auxiliary member is formed with irregularities on the leading end surface that mesh with the irregularities on the upper surface of the ribbon bonding portion, and the irregularities on the leading end surface of the auxiliary member are engaged with the irregularities on the upper surface of the ribbon bonding portion. It is desirable to apply a shear force at In this way, even when a shear force is applied, the state in which the auxiliary member is in contact with the upper surface of the ribbon bonding portion can be reliably maintained.

  Furthermore, in the present invention, it is desirable to apply a shear force by using a tool member that contacts at least the side surface of the ribbon bonding portion and pressing the tool member and the side surface of the ribbon bonding portion together. In this way, shear force can be applied to the ribbon bonding location.

  Furthermore, in the present invention, it is desirable that the tool member is once lowered until its tip comes into contact with the surface of the plate-like object, lifted by a height smaller than the thickness of the ribbon bonding portion, and then the shear force is applied. In this way, the shear force can be applied to the ribbon bonding portion without bringing the tool member into contact with the plate-like object.

  The shear test apparatus for a ribbon bonding portion according to the present invention is a shear test device for performing a shear test on a ribbon bonding portion in which a strip member is joined on a plate-like object, and a table for holding the plate-like object and the table. Auxiliary member contact control unit that makes the auxiliary member contact the upper surface of the ribbon bonding portion of the plate-like object, and a shear force generation control that generates a shear force between the plate-like object held on the table and the ribbon bonding portion. Part.

  According to the shear test apparatus for a ribbon bonding portion of the present invention, the plate-like object is held on the table, and the auxiliary member is brought into contact with the upper surface of the ribbon bonding portion of the plate-like object. Therefore, for example, if the table is moved, both the ribbon bonding portion and the auxiliary member are moved. Accordingly, since the shear force generated by the shear force generation control unit is applied to the ribbon bonding portion while being assisted by the auxiliary member, the shear force is transmitted over almost the entire surface of the ribbon bonding portion. Accordingly, the shear test apparatus for the ribbon bonding portion can accurately detect the bonding strength at the ribbon bonding portion by the shear test.

  Furthermore, in the present invention, it is desirable to have a temperature raising part that raises the temperature of the auxiliary member to the curing temperature of the thermosetting adhesive. If a thermosetting adhesive is applied between the auxiliary member and the ribbon bonding portion and the auxiliary member is heated by the temperature raising portion, the adhesive can be cured and bonded. Accordingly, the auxiliary member can be brought into contact with the upper surface of the ribbon bonding portion.

  Furthermore, in the present invention, it is desirable that the auxiliary member contact control unit presses the auxiliary member against the upper surface of the ribbon bonding portion of the plate-like object held by the table. Even in this case, the auxiliary member can be brought into contact with the upper surface of the ribbon bonding portion.

  Furthermore, in the present invention, it is desirable that the front end surface of the auxiliary member is formed with unevenness that meshes with the unevenness on the upper surface of the ribbon bonding portion. In this way, even when a shear force is applied, the state in which the auxiliary member is in contact with the upper surface of the ribbon bonding portion can be reliably maintained.

  Furthermore, the present invention has a tool member that contacts at least the side surface of the ribbon bonding portion of the plate-like object held by the table, and a shear force detection unit that detects the force that the tool member receives from the side surface of the ribbon bonding portion. And it is desirable that the shear force generation control unit relatively moves the table and the tool member in the direction in which the shear force is generated. In this way, shear force can be applied to the ribbon bonding location.

  Furthermore, in the present invention, it is desirable to have a tool member height control unit that lowers the tool member once until the tip thereof contacts the surface of the plate-like object, and lifts the tool member by a height smaller than the thickness of the ribbon bonding portion. According to the tool member height control unit, the shear force can be applied to the ribbon bonding portion without bringing the tool member into contact with the plate-like object.

  According to the shear test method and apparatus for a ribbon bonding portion of the present invention, the bonding strength at the ribbon bonding portion can be accurately detected by the shear test.

"First form"
Hereinafter, a first embodiment of the present invention will be described in detail with reference to the accompanying drawings. In this embodiment, the present invention is applied to a method and apparatus for performing a shear test on a ribbon bonding portion.

  As shown in FIG. 1, the share test apparatus 1 according to this embodiment includes a main body 11, a tool 12, a reinforcing jig 13, a display device 14, and a moving table 15. Further, in the main body 11, a load detection sensor 16 that detects the shear force received by the tool 12, a tool height control unit 17 that controls the height position of the tool 12, and a jig that controls the position of the reinforcing jig 13. A position controller 18, a heater 19 for heating the reinforcing jig 13, and a table position controller 20 for controlling the position of the moving table 15 are provided.

  FIG. 1 shows a state during the test, and a wafer 21 to be tested is fixed on the moving table 15. As shown in an enlarged view in FIG. 2, a pad 22 is provided on the wafer 21, and a ribbon 23 is bonded to the surface of the pad 22. The bonding surface between the pad 22 and the ribbon 23 is a ribbon bonding portion, and is a test target by the present test apparatus. Here, the wafer 21 and the pad 22 correspond to a plate-like material, and the ribbon 23 corresponds to a belt-like member. Note that the base material of the ribbon bonding portion is the pad 22.

  Depending on the bonding method of the ribbon bonding part, a regular uneven mark remains on the upper surface of the ribbon 23. FIG. 2 shows the ribbon 23 thus formed. In the shear test apparatus 1 of this embodiment, a shear test is possible regardless of the shape of the upper surface of the ribbon 23, and therefore any bonding method for ribbon bonding may be used.

  The tool 12 is a shearing tool used in a general shear tester. The taper is gradually thinned toward the tip (lower end in FIG. 1). A test object is pressed against the flat end of the tool 12 (right side in the figure), and a shear force is applied in the horizontal direction in the figure. Note that the position of the tool 12 in the vertical direction in FIG. This tool 12 corresponds to a tool member.

  The reinforcing jig 13 has a substantially prismatic shape, and a lower end portion of the reinforcing jig 13 is formed in a shape substantially equivalent to a ribbon bonding portion of the workpiece and is in contact with the ribbon bonding portion. The left side surface of the reinforcing jig 13 in FIG. 1 is a flat surface and is in surface contact with the right side surface of the tool 12 in the drawing. The reinforcing jig 13 is controlled by the jig position control unit 18 in the vertical direction in FIG. As a material of the reinforcing jig 13, a member having high rigidity, strong heat resistance, and good heat conductivity, for example, metal is optimal. Here, stainless steel is used.

  In this embodiment, the reinforcing jig 13 is bonded to the upper surface of the ribbon 23 with an adhesive 24 as shown in FIG. Here, as the adhesive 24, an adhesive having an adhesive strength larger than the bonding strength of the ribbon bonding portion is used. Here, a thermosetting adhesive 24 is used. The reinforcing jig 13 is replaced for each test. Alternatively, the adhesive 24 may be removed with a solvent or the like and used again. Here, the reinforcing jig 13 corresponds to an auxiliary member.

  The display device 14 displays the detection result of the shear force by the load detection sensor 16. For example, like the oscilloscope, the detection result of the load detection sensor 16 may be directly graphed and displayed. Or you may make it further have a memory | storage device and memorize | store the detection result in a predetermined time interval.

  The moving table 15 is movable in the horizontal plane in the horizontal direction and depth direction in FIG. The position of the moving table 15 is controlled by the table position control unit 20. The wafer 21 which is a base material of the inspection object is fixed to the moving table 15. Accordingly, both the wafer 21 and the ribbon bonding portion bonded thereon are moved in the horizontal plane by the movement of the moving table 15. This movement table 15 corresponds to a table.

  The load detection sensor 16 is connected to the tool 12. Then, the leftward load in FIG. 1 applied to the tool 12 is always detected and output to the display device 14. The tool height control unit 17 moves the tool 12 in the vertical direction in FIG. This movement can be controlled with an accuracy of a minimum width of several μm.

  The jig position controller 18 holds the reinforcing jig 13 and moves it in the vertical direction in FIG. Thereby, the reinforcing jig 13 is brought into contact with the upper surface of the ribbon bonding portion. Note that the jig position control unit 18 controls the position of the reinforcing jig 13 in two types of modes with respect to the position in the horizontal plane. The first is a mode fixed to the main body 11, and the second is a mode fixed to the moving table 15. Here, the jig position control unit 18 corresponds to an auxiliary member contact control unit.

  The heater 19 is for heating the reinforcing jig 13. In a state where the reinforcing jig 13 is in contact with the upper surface of the ribbon bonding portion, the heat of the heater 19 is transmitted to the adhesive 24 through the reinforcing jig 13. In this embodiment, since the thermosetting adhesive 24 is used as the adhesive 24, the adhesive 24 is cured by raising the temperature of the heater 19 to the curing temperature of the adhesive 24. Note that the heater 19 is not required when an adhesive that is not thermosetting is used. Here, the heater 19 corresponds to a temperature raising portion.

  The table position control unit 20 moves the moving table 15 within a horizontal plane. In this embodiment, the tool 12 is fixed, and the ribbon bonding portion is moved leftward in FIG. Therefore, here, the table position control unit 20 corresponds to a shear force generation control unit.

  In the shear test apparatus 1 of this embodiment, the test is performed after the reinforcing jig 13 is bonded to the ribbon 23 which is ribbon-bonded by the adhesive 24. Therefore, the movement of the moving table 15 moves not only the ribbon bonding portion but also the reinforcing jig 13. In addition, during the test, the tool height control unit 17 adjusts the height so that the tip of the tool 12 contacts the side surface of the ribbon 23. Therefore, as shown in FIG. 2, the right side of the tool 12 in the drawing is pressed not only on the left side of the ribbon 23 in the drawing but also on the left side of the reinforcing jig 13 in the drawing. Accordingly, a shear force is applied as indicated by an arrow in the figure. Accordingly, the shear force can be applied to almost the entire ribbon bonding portion. As a result, it was possible to measure the interface fracture strength of the joints with almost no damage to the base metal.

  Next, a shear test method for a ribbon bonding portion using the shear test apparatus 1 according to the present embodiment will be described with reference to the process diagram of FIG. Before performing this test, the tool 12 and the reinforcing jig 13 are moved upward to some extent by the tool height controller 17 and the jig position controller 18. Here, the jig position control unit 18 controls the reinforcing jig 13 in a first mode in which the reinforcement jig 13 is fixed to the main body unit 11. Further, a wafer 21 having a ribbon 23 bonded to a pad 22 is prepared as an object to be tested, and is fixed to a predetermined position on the moving table 15.

  Next, as shown in FIG. 4, an adhesive 24 is applied to the upper surface of the ribbon at the ribbon bonding location (step 1). The adhesive 24 is preferably an epoxy-based thermosetting adhesive. Then, the table 15 is controlled by the table position control unit 20 and held so that the portion where the adhesive 24 is applied is arranged directly below the reinforcing jig 13 (step 2). Subsequently, the jig position controller 18 is driven to lower the reinforcing jig 13 straight onto the ribbon bonding portion (step 3).

  Then, as shown in FIG. 5, the reinforcing jig 13 is brought into close contact with the surface of the adhesive 24 by the jig position controller 18 (step 4). In this state, the reinforcing jig 13 is heated by the heater 19 (step 5). This heat is transmitted to the adhesive 24 through the reinforcing jig 13, and the adhesive 24 is cured (step 6). Thereby, the reinforcing jig 13 and the ribbon 23 are strongly bonded. As the adhesive 24, an adhesive whose adhesive strength is larger than that of the ribbon bonding portion is selected. When this bonding process is completed, the jig position control unit 18 is changed to the second mode in which the reinforcing jig 13 is fixed to the moving table 15.

  Next, the relative arrangement of the reinforcing jig 13 and the tool 12 is positioned (step 7). That is, the moving table 15 is controlled by the table position control unit 20, and as shown in FIG. 5, the reinforcing jig 13 is arranged so that the left side surface in the drawing and the right side surface in the drawing of the tool 12 face each other. Let At this time, a position where the tool 12 and the reinforcing jig 13 are not in contact with each other is preferable. Then, as shown in FIG. 5, the tool 12 is lowered by the tool height control unit 17 (step 8).

  Next, when it is detected that the tip of the tool 12 has contacted the pad 22, the tool 12 is stopped (step 9). Further, as shown in FIG. 6, the tool 12 is raised by a predetermined set value determined in advance (step 10). For example, by raising about 20 μm, the tool 12 is prevented from rubbing the surface of the pad 12 in the subsequent test. At this time, the thickness of the ribbon 23 is not increased by more than half. That is, this set value is a value within a range from several μm to the thickness of the ribbon bonding portion.

  Next, the tool height controller 17 is stopped at this position, and the position of the tool 12 is fixed (step 11). On the other hand, the reinforcing jig 13 is fixed to the moving table 15 by the jig position control unit 18. In this state, the moving table 15 is moved toward the tool 12 by the table position control unit 20 as shown by the lower arrow in FIG. In this figure, it is moved leftward in the figure (step 12).

  As a result, the wafer 21, the pad 22, the ribbon 23, the adhesive 24, and the reinforcing jig 13 disposed thereon are moved together with the moving table 15. On the other hand, the tool 12 is not moved because it is fixed in position by the main body 11. Accordingly, the ribbon 23, the reinforcing jig 13 and the like are brought into contact with the tool 12 as shown in FIG. Further, the shearing force is applied to the ribbon bonding portion by moving the moving table 15 (step 12).

  A change in the shear force at this time is detected by the load detection sensor 16 (step 13). Further, the detected share power is displayed on the display device 14. By further moving the moving table 15, the ribbon bonding portion is sheared by the tip of the tool 12. If it is confirmed that the ribbon bonding part is broken, the share test for this work is completed. Therefore, the tool 12 is raised to return the position of the moving table 15, and the broken ribbon 23, reinforcing jig 13, wafer 21 and the like are removed from the moving table 15 (step 14). This completes the share test process by the share test apparatus 1 of the present embodiment.

  Next, the result of the share test by the share test apparatus 1 of this embodiment will be described. FIG. 7 shows an example of a change in the load detected by the load detection sensor 16 with the position where the tool 12 and the ribbon 23 are in contact as the origin. In FIG. 7, line L indicates that the load suddenly decreases after reaching 80 N, and it can be seen that the shear force was 80 N when interface fracture occurred. This value can be compared with the bonding strength required for the ribbon bonding portion to be tested to determine the quality of the bonded state. This line L is an example having sufficient joint strength, but as shown by the line M in FIG. 7, when the load suddenly disappears without reaching a sufficient load amount, the joint strength is insufficient. It is an example.

  In the inventor's experiment, there was almost no base metal destruction also from the observation of the fracture surface where the joint was destroyed by this method. Therefore, it was confirmed that the interface strength, which is the strength at which the bonded interface is broken, could be measured.

  In addition, we simulated the stress distribution when applying a horizontal shear force to the joint surface of a ribbon bonding part with a reinforcing jig attached in the same way as for the conventional one. The result is shown in FIG. In this figure, the magnitude of the stress is divided into three stages, and the area where the stress is large is shown with blackish hatching. That is, the stress is large in the range Q1, the range Q2 is moderate, and the stress is small in the range Q3. As shown in this figure, it can be seen that the stress can be transmitted over almost the entire joining range by bonding the reinforcing jig. Compared with the conventional example shown in FIG. 12, the range in which stress is transmitted is very large.

  As described in detail above, according to the shear test apparatus 1 of the present embodiment, the reinforcing jig 13 is bonded to the ribbon bonding portion, and the reinforcing jig 13 and the ribbon 23 are both pressed by the tool 12. As a result, stress can be transmitted to almost the entire ribbon bonding portion, and the interface strength can be measured. Therefore, the ribbon bonding strength testing apparatus can accurately detect the bonding strength at the ribbon bonding portion by the shear test.

"Second form"
Hereinafter, a second embodiment of the present invention will be described in detail with reference to the accompanying drawings. In the present embodiment, the present invention is applied to an inspection apparatus and an inspection method for performing a share test on a ribbon bonding portion.

  Compared to the first embodiment, the share test apparatus 2 of this embodiment includes a pressing device instead of the heater 19 in the main body. In this embodiment, the reinforcing jig 33 may be made of a material having high rigidity, and heat transfer is not required. The other parts are the same as those in the first embodiment, so that common reference numerals are given and description thereof is omitted.

  In this embodiment, the reinforcing jig 33 is not bonded to the ribbon 23. After the alignment between the reinforcing jig 33 and the ribbon bonding portion, the reinforcing jig 33 is pressed against the ribbon 23 and pressed by a pressing device as shown in FIG. Then, the share test is performed in the pressed state. Therefore, in this embodiment, the pressing device corresponds to the auxiliary member contact control unit.

  In general, the shape of the joining jig used at the time of joining is transferred to the upper surface of the ribbon 23 to form a certain uneven shape. In that case, an uneven surface that meshes with the upper surface of the ribbon 23 may be formed in advance on the lower end surface of the reinforcing jig 33. That is, the lower end surface of the reinforcing jig 33 is formed in the same shape as the joining jig. The reinforcing jig 33 is pressed to the ribbon 23 after being aligned with a position where the reinforcing jig 33 meshes with the irregularities on the upper surface of the ribbon 23. In this way, as shown in FIG. 9, since the concave and convex portions of the ribbon 23 and the reinforcing jig 33 are engaged with each other, the shear force is more efficiently transmitted to the entire ribbon bonding portion.

  In the case of this embodiment, due to the influence of the pressing force, the magnitude of the shear force when interface fracture occurs is different from the value in the first embodiment. For each type of joint location, a shear force according to this form corresponding to a sufficient joint strength is obtained in advance, and the quality of the joint can be determined by comparing with that. Furthermore, according to this embodiment, no time is required for applying and curing the adhesive, and inspection in a short time is possible. Furthermore, since the reinforcing jig 33 is not bonded, it is easy to remove the reinforcing jig 33, and the reinforcing jig 33 can be easily reused.

  As described in detail above, the shear test apparatus 2 of the present embodiment can also transmit stress to almost the entire ribbon bonding portion and measure the interface strength. Therefore, as in the first embodiment, the bonding strength at the ribbon bonding portion can be accurately detected by the shear test.

In addition, this form is only a mere illustration and does not limit this invention at all. Therefore, the present invention can naturally be improved and modified in various ways without departing from the gist thereof.
For example, a camera may be further provided to photograph the shear plane and inspect the joining state. Further, for example, the heater 19 in the first embodiment, the pressing device in the second embodiment, and the like may be provided separately from the main body. Moreover, when using the reinforcement jig | tool 33 which does not adhere | attach like 2nd form, you may comprise the reinforcement jig | tool 33 and the tool 12 integrally. In that case, the reinforcing jig 33 is pressed against the ribbon 23, so that the tip position is slightly different so that the distance from the pad 22 of the tool 12 is appropriate. Further, in the above embodiment, the shear test of the ribbon bonding portion bonded on the wafer 21 is targeted, but the present invention can be applied not only to the wafer 21 but also to the shear test of the bonding portion on the printed board.

It is a schematic block diagram which shows the shear test apparatus of the ribbon bonding location which concerns on a 1st form. It is explanatory drawing which shows a ribbon bonding location. It is process drawing which shows the shear test process of a ribbon bonding location. It is explanatory drawing which shows a mode that an adhesive agent is apply | coated to a ribbon bonding location. It is explanatory drawing which shows the state which the tool front-end | tip detected the pad. It is explanatory drawing which shows the state which raised the tool front-end | tip slightly. It is a graph which shows the example of a measurement result. It is explanatory drawing which shows the example of a simulation result of the stress distribution in a ribbon bonding location. It is explanatory drawing which shows the ribbon bonding location which concerns on a 2nd form. It is explanatory drawing which shows the example of the shear test of a wire bonding location. It is explanatory drawing which shows the example of a simulation result of the stress distribution in a wire bonding location. It is explanatory drawing which shows the example of a simulation result of the stress distribution in the conventional ribbon bonding location.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Share test apparatus 11 Main body part 12 Tool 13,33 Reinforcement jig | tool 15 Moving table 16 Load detection sensor 17 Tool height control part 18 Jig position control part 19 Heater 20 Table position control part 21 Wafer 23 Ribbon

Claims (12)

In a method of performing a shear test of a ribbon bonding part in which a strip member is joined on a plate-like object,
An auxiliary member is brought into contact with the upper surface of the ribbon bonding portion,
In a state where the auxiliary member is in contact with the ribbon bonding location, a shear force is applied to the belt-shaped member from the side of the ribbon bonding location,
A shear test method for a ribbon bonding portion, wherein the quality of the interface bonding at the ribbon bonding portion is determined based on a shear force when an interface fracture occurs in the ribbon bonding portion. The share test method according to claim 1,
A shear test method for a ribbon bonding part, wherein the auxiliary member is bonded to an upper surface of the ribbon bonding part and a shear force is applied in that state. The share test method according to claim 1,
A shear test method for a ribbon bonding portion, wherein the auxiliary member is pressed from above onto the upper surface of the ribbon bonding portion and a shear force is applied in that state. The share test method according to claim 1,
As the auxiliary member, a member formed on the tip surface with unevenness that meshes with the unevenness on the upper surface of the ribbon bonding portion,
A shear test method for a ribbon bonding portion, wherein the unevenness on the tip surface of the auxiliary member is engaged with the unevenness on the upper surface of the ribbon bonding portion, and a shear force is applied in that state. In the share test method according to any one of claims 1 to 4,
Using a tool member that contacts at least the side surface of the ribbon bonding part,
A shear test method for a ribbon bonding portion, wherein a shear force is applied by pressing the tool member and a side surface of the ribbon bonding portion against each other. The share test method according to claim 5,
The tool member,
Lower the tip until it touches the surface of the plate,
Lift by a height smaller than the thickness of the ribbon bonding part,
A shear test method for a ribbon bonding portion, wherein a shear force is applied thereafter. In a shear test device that performs a shear test of a ribbon bonding part where a strip-shaped member is joined to a plate-like object,
A table for holding the plate-like object;
An auxiliary member contact control unit for bringing the auxiliary member into contact with the upper surface of the ribbon bonding portion of the plate-like object held by the table;
A shear test apparatus for a ribbon bonding location, comprising: a shear force generation control unit that generates a shear force between the plate-like object held on the table and the ribbon bonding location. The share test apparatus according to claim 7,
A shear test apparatus for a ribbon bonding portion, comprising a temperature raising portion for raising the temperature of an auxiliary member to a curing temperature of a thermosetting adhesive. The shear test apparatus according to claim 7, wherein the auxiliary member contact control unit includes:
A shear test apparatus for a ribbon bonding portion, wherein the auxiliary member is pressed against the upper surface of the ribbon bonding portion of the plate-like object held by the table. The share test apparatus according to claim 7,
A ribbon bonding location shear test apparatus, wherein the tip of the auxiliary member is formed with irregularities that mesh with the irregularities on the upper surface of the ribbon bonding location. In the share test apparatus according to any one of claims 7 to 10,
A tool member that contacts at least the side surface of the ribbon bonding portion of the plate-like object held by the table;
A shear force detecting unit that detects a force that the tool member receives from a side surface of the ribbon bonding portion;
The shear force generation control unit is configured to move the table and the tool member relative to each other in a direction in which the shear force is generated. The share test apparatus according to claim 11,
The tool member,
Lower the tip until it touches the surface of the plate,
A shear test apparatus for a ribbon bonding portion, comprising a tool member height control unit that lifts a height smaller than the thickness of the ribbon bonding portion.

Images