JP2008073796A - Vise doubling as vacuum chuck - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a vise doubling as a vacuum chuck having a function of the vacuum chuck capable of fully holding a non-magnetic and even such thin and fragile material that might be broken when pinched and also having a function of the vise capable of rigidly pinching a workpiece. <P>SOLUTION: The vise doubling as the vacuum chuck includes a base, a fixed jaw integrally formed with or fixed to the base, and a movable jaw which can move on the base. The fixed jaw is structured to have the function of the vacuum chuck. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to a vise also serving as a vacuum chuck capable of holding workpieces of various materials or various shapes. Specifically, in order to turn, grind, polish or cut a workpiece, it is possible to freely hold workpieces of various materials or shapes, and even if non-magnetic, it can be grasped thinly or fragilely. The vise also serves as a vacuum chuck that can hold even difficult workpieces.

The most basic structure of a vise used for clamping a workpiece is, for example, a sandwiched body disposed opposite to each other so that the sandwiched body is opposed to the other sandwiched body as seen in a scissor vise. Provided so that it can be advanced and retracted, a screw shaft is connected to the movable holding body side, and the screw shaft is rotated by a lever to move the movable holding body toward the fixed holding body, and between the two holding bodies. The work is sandwiched between the two and the position of the work is fixed.

An example of a conventional vise is shown in FIG. This vise is provided with a U-shaped base 1 and a fixed jaw 2 and a movable jaw 3 as clamping members arranged to face each other. The upper surface of the base part 1 forms a flat slide surface. The fixed jaw 2 is integrally fixed to the base portion 1 at the left end of the base portion 1, and the movable jaw 3 is slidably provided on the base portion 1. The right end drive shaft 4 has a threaded portion, is screwed into a female screw formed at the right end of the other end of the base portion 1, and rotates the handle attached to the other end to fix the movable jaw 3 to the fixed jaw 2. It is possible to move in the direction of approaching or separating.

When the workpiece 5 is sandwiched and processed using such a vise, the movable jaw 3 is brought close to the fixed jaw 2 while the workpiece 5 is supported between the fixed jaw 2 and the movable jaw 3, and both the jaws 2, 3, the work 5 is clamped. In this state, a vise is set on the table of the machine tool, and the workpiece is machined using a tool such as a tool, an end mill or a grindstone.

As described above, many proposals related to the vice have been made so that the workpiece is clamped so as not to move when the workpiece is processed. Among them, for example, a vise has been provided that has compactness without changing the overall length of the vise in use, and can hold the workpiece elastically and firmly (see Patent Document 1). In addition, a vise capable of suppressing the lifting of the workpiece even when a plurality of workpieces are sandwiched has been proposed (see Patent Document 2).

JP 2000-306256 A Japanese Utility Model Publication No. 5-51564

As described above, as represented by patent documents, the conventional vise has the following problems.

That is, the first problem of the conventional vise is that it is impossible to grasp a fragile and thin workpiece that breaks when sandwiched. In this case, when the work is a magnetic material, the work can be attracted and held by an electric or permanent magnet chuck. However, for example, in the case of a flat work made of a non-magnetic material such as a ceramic such as a silicon wafer plate or an alumina plate and made of a brittle material, the work will be destroyed in a vise, and an electric or permanent magnet chuck The workpiece cannot be held even when using.

Secondly, the conventional vise is only used for holding a workpiece and does not have a function as a chuck. Therefore, when a vise is fixed on the table of a processing machine, it is not possible to perform processing while holding a flat workpiece. When flat processing is performed on a flat workpiece, it is necessary to remove the vise from the processing machine and set another chuck on the table of the machine tool. Thus, it is necessary to change the vise or the chuck every time the material or shape of the workpiece is changed. That is, the versatility of the function held depending on the shape or type of the work was lacking.

Therefore, the vise also serving as a vacuum chuck according to the present invention has been made in order to solve the problems of the conventional vise, and is a thin brittle material that is non-magnetic and breaks when sandwiched. The purpose of the present invention is to provide a vise that also functions as a vacuum chuck that has the function of a vacuum chuck that can be held freely, and also has the function of a vise that can firmly hold a workpiece. That is, an object of the present invention is to provide a vise that also serves as a vacuum chuck so that it can be freely held and held regardless of the material or shape of the workpiece.

Furthermore, an object of the present invention is to provide a vise also serving as a vacuum chuck that can be used in any machine tool that processes a workpiece.

Therefore, the present inventors have focused on the fact that a flat silicon wafer that is brittle in material can be securely held by using a vacuum chuck, while steel that does not break even when firmly sandwiched. The idea was developed for a jig that can hold a metal material such as a vise and a jig that can also be used as a vacuum chuck. Based on this idea, we prototyped a vise that also serves as a vacuum chuck, and found that it was very easy to use on all machine tools. The vise also used as a vacuum chuck of the present invention is embodied based on such knowledge, and the invention of claim 1 includes a base portion, a fixed jaw integrally formed or fixed to the base portion, and a base portion. The vise is provided with a movable jaw that can move above, and the fixed jaw has a vacuum chuck function.

In addition to the above feature of the invention of claim 1, the invention of claim 2 is a vacuum chuck combined vise characterized in that an O-ring groove is engraved in a grid pattern on the upper surface of the fixed jaw. .

A single tool can hold workpieces of various materials or shapes, and can hold flat workpieces of various materials. Specifically, various non-magnetic flat materials that are brittle and easily broken can be held by a vacuum chuck, and various shapes of metal materials such as blocks can be held in a vise. Therefore, once it is set on the table of the machine tool, there is no need to remove and replace the vise even if the material or shape of the workpiece changes. For this reason, it is possible to save time for setting up the jig on the machine tool and to improve the efficiency of machining the workpiece.

Embodiments of the present invention will be specifically described below based on the embodiments of the present invention illustrated in the accompanying drawings.

First, Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1 is a perspective view showing the entire structure of a vacuum chuck vise. FIG. 2 is a perspective view showing an O-ring groove carved on the upper surface of the fixed jaw. FIG. 3 is a perspective view showing a state in which an O-ring is mounted on the upper surface of the fixed jaw. FIG. 4 is a cross-sectional view showing a state in which the movable jaw is locked and the workpiece is clamped when used as a vise. FIG. 5 is a cross-sectional view of a vacuum path showing a state in which a workpiece is held on a fixed jaw when used as a vacuum chuck. FIG. 6 is a rear view showing a state in which the movable jaw is locked. FIG. 7 is a perspective view showing a state used exclusively for a vacuum chuck.

As shown in FIG. 1, the vise also serving as a vacuum chuck according to this embodiment includes a lower base portion 10, a fixed jaw 20 thereon, and a movable jaw 30 facing the fixed jaw 20. Slide portions 11 and 11 are formed with corners dropped at right angles on both sides in the longitudinal direction of the base portion 10. In addition, the bottom surface of the movable jaw 30 is formed in a concave shape in accordance with the angle drop shape of the slide portions 11 and 11.

At the left end of the figure, the fixed jaw 20 is integrally fixed to the base portion 10 from the back surface with a screw or the like. The other movable jaw 30 is arranged so as to straddle the slide portions 11, 11 on both sides in the longitudinal direction of the base portion 10 so as to face the fixed jaw 20, and the arrow shown in the drawing along the slide portions 11, 11 on both sides. Slide in the direction of A. The base portion 10 is provided so as to penetrate the long hole 7 in the central longitudinal direction. As shown in FIGS. 1 and 4, the movable jaw 30 is provided with a lock screw 6 penetrating from the upper side to the lower side in the direction of the base portion 10, and a stopper 9 is provided at the tip thereof. Here, the stopper 9 includes a locking portion 92 and a handle portion 91 having a circular cross-section at the tip. Further, as shown in FIG. 6, a plurality of recesses 71, 71 are provided on both sides along the longitudinal direction of the long hole 7 on the back surface of the base portion 10, and both end portions of the locking portion 92 at the tip of the stopper 9 are recessed 71. , 71 is retained in the groove.

As shown in FIG. 2, an O-ring groove 22 is engraved on the upper surface of the fixed jaw 20 in a grid pattern. The pitch interval and the dimension of the grooves adjacent to each other in the vertical and horizontal directions of the O-ring groove can be freely selected according to the size or shape of the workpiece.

It is comprised as mentioned above, Next, an effect | action is demonstrated.

The movable jaw 30 is pushed leftward along the slide portions 11 on both sides in the longitudinal direction of the base portion 10. Since the movable jaw 30 is slidably provided, it moves so as to approach or separate from the fixed jaw 20.

First, the case where the vacuum chuck vise is used as a vise will be described. Basically, the shape of the workpiece is a thick block, and is not distorted and deformed by clamping. It can be used when the block is subjected to any processing such as turning, polishing, drilling, cutting, and grooving. As shown in FIG. 4, the position of the movable jaw 30 is determined in a state where the workpiece 5 of the workpiece is sandwiched between the fixed jaw 20 and the movable jaw 30, and then the movable jaw 30 is locked to the base portion 10. Fix it. Here, the lock screw 6 penetrates the movable jaw 30 obliquely to the lower left, and the tip of the lock screw 6 reaches the long hole 7 provided in the base portion 10. The stopper 9 is screwed into the tip screw portion of the lock screw 6 from the back side of the base portion 10. As shown in FIG. 6 when the details are seen from the back side of the base portion 10, the stopper 9 is composed of a handle portion 91 and a locking portion 92. The locking portion 92 has a circular cross section, and the outer portion is long. It is locked in the recess 71 provided in the hole 7. Then, by tightening the lock screw 6 obliquely from above, both ends of the locking portion 92 of the stopper 9 are firmly locked to the concave portions 71, 71 on both sides, so that the position of the movable jaw 30 can be fixed. Here, the position of the stopper 9 can be changed by selecting the positions of the recesses 71, 71 at a plurality of locations along the elongated hole 7 according to the size of the workpiece. Since the concave portions 71 and 71 are provided at a plurality of locations along the elongated hole 7, the movable jaw 30 moves according to the size of the workpiece 5 and is locked at an appropriate position. When the position of the movable jaw 30 is determined, the lock screw 6 is fastened and fixed to the screw of the stopper 9 from above. As shown in FIG. 4, the lock screw 6 tightens the stopper 9 from the upper right side to the lower side, so that the work 5 held by the leftward force acting on the movable jaw 30 is placed between the fixed jaw 20 and the workpiece 5. Can be firmly clamped.

Next, the case where the vacuum chuck vise is used as a vacuum chuck will be described. The material and shape of the workpiece are basically a non-magnetic material that cannot be held by an electromagnetic chuck and is flat. Even fragile workpieces that deform or break when sandwiched with a vise can be held. As shown in the cross-sectional view of FIG. 5, a suction port 23 is provided on the upper surface of the fixed jaw 20, followed by a conduit 24 on the extension thereof, to the conduit 12 drilled in the longitudinal direction of the base portion 10, and A vacuum path communicating with the suction port 13 at the right end of the base portion 10 is formed. A hose 40 is connected to the suction port 13 and connected to an ejector 50 serving as a vacuum source. Since the O-ring 8 is mounted in the O-ring groove 22 on the upper surface of the fixed jaw 20, the space between the workpiece 5 and the upper surface of the fixed jaw 20 is kept sealed. When vacuum suction is performed from the suction port 23 through this vacuum path, the workpiece 5 is softly held on the O-ring 8. For example, the vacuum chuck vise described above is set on the table of the machine tool. Next, a flat silicon wafer is vacuum-sucked on the O-ring 8 carved on the surface of the fixed jaw 20 and sliced into small pieces.

An O-ring groove 22 intersects the upper surface of the fixed jaw 20 in a grid pattern. Therefore, when the O-ring 8 is mounted at the position of the O-ring groove 22, the position of the O-ring can be changed according to the size of the workpiece 5. For example, when the diameter of the flat workpiece 5 is large, the O-ring 8 may be mounted along the outer groove of the grid-like O-ring groove 22.

As another method of use, this vacuum chuck vise can be used exclusively for a vacuum chuck. For example, FIG. 7 shows a state in which three fixed jaws 20, 20, 20 with O-ring grooves 22 formed thereon are arranged and fixed on the base portion 10. By expanding the area of the vacuum chuck, a large amount of workpieces can be chucked and processed at a time, so that the production efficiency can be improved.

The use of the present invention is a vise that also serves as a vacuum chuck that can be used to machine a workpiece with various machine tools. It can be expanded to a use of holding a workpiece for cutting with a lathe, grinding with a polishing machine, polishing, cutting with a cutter, or polishing a workpiece with a buff or the like. It is optimal for processing such as silicon wafers, fine ceramic materials such as non-magnetic materials, and cutting, etc. by attracting fragile electronic materials.

It is a perspective view which shows the whole structure of the vacuum chuck combined vise concerning the Example of this invention. It is a perspective view which shows the O-ring groove | channel carved on the upper surface of the fixed jaw same as the above. It is a perspective view which shows the state which mounted | wore the upper surface of the fixed jaw same as the above. It is sectional drawing which shows the state which locks a movable jaw and clamps a workpiece | work in the case of using it as a vise. It is sectional drawing of the vacuum path | route which shows the state which hold | maintains a workpiece | work to a fixed jaw, when using as a vacuum chuck same as the above. It is a reverse view which shows the state which locks a movable jaw same as the above. It is a perspective view which shows the state used exclusively for a vacuum chuck same as the above. It shows a conventional example and is a side view of a vise.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1, 10 Base part 11 Slide part 12 Conduit 13 Suction port 2, 20 Fixed jaw 22 O ring groove 23 Suction port 24 Conduit 3, 30 Movable jaw 4 Drive shaft 5 Work piece 6 Lock screw 7 Elongate hole 71 Recess
8 O-ring 9 Stopper 91 Handle portion 92 Locking portion 40 Hose 50 Vacuum ejector

Claims (2)

A base portion and a fixed jaw integrally formed or fixed to the base portion;
A vise equipped with a movable jaw movable on the base part,
The fixed jaw has a structure having a vacuum chuck function. The vacuum chuck combined vise according to claim 1, wherein an O-ring groove is formed in a grid pattern on the upper surface of the fixed jaw.

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