JP2008064601A - Method for correcting measurement error and characteristic measuring device for electronic component - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a measurement error correction method and a characteristic measuring device for electronic components capable of performing high-precision relative correction, even if an instrument wherein signals leak between ports is used. <P>SOLUTION: A first mathematical equation relating a measured value by a testing implement to a measured value by a reference implement concerning independent ports 1, 2 is decided while ignoring a signal leakage between the ports. A through device wherein non-independent ports 3, 4 and the independent ports 1, 2 are electrically connected is mounted on the reference implement and the testing implement, measurements concerning the independent ports and the non-independent ports are performed, and a second mathematical equation relating a measured value by the testing implement and a measured value by the reference implement is decided concerning the non-independent ports 3, 4, by using the first mathematical equation taking a signal leakage between the ports into consideration. With an arbitrary electronic component mounted on the testing implement, electric characteristics are measured concerning the non-independent ports, a measured value by the reference implement is calculated by using the second mathematical equation. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a measurement error correction method and an electronic component characteristic measurement apparatus. More specifically, from the result of measuring the electrical characteristics of an electronic component mounted on a test jig, an estimated value of the electrical characteristics that would be obtained if the electronic component was mounted on a reference jig and measured. The present invention relates to a method for correcting a measurement error to be calculated and an electronic component characteristic measuring apparatus.

  Conventionally, electronic components that do not have a coaxial connector, such as surface-mount electronic components, are mounted on a jig having a coaxial connector, and the jig and measuring device are connected via a coaxial cable to measure the electrical characteristics. Sometimes. In such measurement, variations in characteristics of individual jigs and variations in characteristics of individual coaxial cables and measurement devices cause measurement errors.

  For coaxial cables and measuring devices, a standard device with reference characteristics is connected to the measuring device via a coaxial cable and measured to identify errors on the measuring device side of the coaxial cable tip to which the standard device is connected. be able to.

  However, with respect to the jig, it is not possible to accurately identify an error in electrical characteristics between the connection terminal of the part on which the electronic component is mounted and the coaxial connector for connecting to the coaxial cable. Moreover, it is not easy to adjust so that the characteristics between jigs match. In particular, it is extremely difficult to adjust the jig so that the characteristics between the jigs coincide with each other with a wide bandwidth.

  Therefore, a standard sample is mounted on a plurality of jigs and measured, and due to variations in measured values between jigs, a certain jig (hereinafter referred to as “reference jig”) and another jig (hereinafter referred to as “test”). A mathematical expression that corrects a relative error between the electronic component and the electrical characteristic of an arbitrary electronic component is measured in a state of being mounted on a test jig (hereinafter referred to as “the jig”). (Also referred to as “test jig measurement value”)), the estimated value of the measurement value (hereinafter also referred to as “reference jig measurement value”) measured by mounting the electronic component on the reference jig using this mathematical formula. A so-called relative correction method for calculating (hereinafter also referred to as “relative correction value”) has been proposed.

For example, the reference jig is used for assuring electric characteristics to the user, and the test jig is used for measurement for selecting a good product in the manufacturing process of the electronic component. Specifically, for each port, a scattering matrix (this is referred to as a “relative correction adapter”) obtained by synthesizing the scattering matrix for removing the test jig error and the scattering matrix for the reference jig error is derived. By synthesizing the relative correction adapter with the scattering matrix of the test jig measurement value, an estimated value of the reference jig measurement value is calculated. The relative correction adapter can measure at least three standard samples for each port using both the reference jig and the test jig, and can calculate from the measurement results. As the correction data acquisition sample, for example, a sample having the characteristics of open circuit, short circuit, and termination may be used. (For example, refer to Patent Document 1, Non-Patent Documents 1 and 2).
Japanese Patent No. 3558086 GAKU KAMANTINI (Murata manufacturing Co., Ltd.) "A METHOD TO COLLECT DIFFERENCE OF IN-FIX MEASUREMENTS AMONG FIXTURES AP DEVICS AP." 2, p1094-1097, 2003 J. et al. P. Dunsmore, L.M. BETTS (Agilent Technologies) "NEW METHODS FOR CORRELATING FIXTURE MEASUREMENTS" APMC Vol. 1, p568-571, 2003

  In the conventional relative correction method, the relative correction adapter is based on the derivation condition that each port of the reference jig and the test jig is independent of other ports (no signal leakage between ports). The adapter is a two-terminal pair relative correction adapter that corrects only the port error determined by three one-port standard samples.

FIG. 1 shows a conventional relative correction adapter model at the k-th and i-th ports of an N-port device. The characteristics of the sample DUT are represented by a scattering matrix (S _DUT ), and the coaxial connector of the reference jig corresponds to the terminals kk ′ and ii ′. For the k and i th ports, the scattering matrix of the error characteristic of the test jig is represented by E _pk and E _pi , and the relative correction adapter is represented by CA _pk and CA _pi .

FIG. 2 shows a case where the k and i-th ports of the test jig are not independent, that is, the relative correction is performed by the conventional two-terminal pair relative correction adapter when there is signal leakage. In this case, by modeling the leakage signals between the ports to the error E _T test fixture represented by the 4 × 4 = total of 16 error matrix, 2 × 2 × 2 = total of eight correction Since the relative correction is attempted using the values of the two two-terminal pair relative correction adapters CA _pk and CA _pi represented by the coefficients, the reference jig measurement value cannot be accurately estimated.

  That is, in the conventional relative correction method, if there is a signal leakage between the ports in the reference jig and the test jig, an error remains after the relative correction.

  SUMMARY OF THE INVENTION In view of the above circumstances, the present invention intends to provide a measurement error correction method and an electronic component characteristic measurement apparatus capable of performing accurate relative correction even when using a jig that leaks signals between ports. It is.

  In order to solve the above problems, the present invention provides a measurement error correction method configured as follows.

  The measurement error correction method is based on the result of measuring an electronic component mounted on a test jig, and the electrical characteristics of the electronic component that would be obtained if the electronic component was measured mounted on a reference jig. This is a method for calculating the estimated value of. The reference jig and the test jig include a port that ignores signal leakage between ports (hereinafter referred to as “independent port”) and a plurality of ports that consider signal leakage between ports (hereinafter referred to as “non-portable”). And the number of non-independent ports (hereinafter referred to as “measurement non-independent ports”) that measure electrical characteristics (hereinafter referred to as “measurement non-independent ports”). Or less. The measurement error correction method is as follows: (1) Measured values measured with the number of independent ports (hereinafter referred to as “measurement independent ports”) at least as many as the number of measurement non-independent ports mounted on the test jig. And (2) the measurement non-independent port, determining a first mathematical expression that associates the measured value measured in a state mounted on the reference jig with ignoring signal leakage between the ports. Electrical characteristics in a state in which the first correction data acquisition through device for connecting all of the measurement independent ports and the measurement non-independent ports from which at least the same number of the first mathematical expressions are mounted is mounted on the reference jig And a second correction data acquisition device that can be regarded as having characteristics equivalent to those of the first correction data acquisition through device or the first correction data acquisition through device. A second step of measuring electrical characteristics with the device mounted on the test jig, and (3) the first mathematical formula determined in the first step and the result of measurement in the second step. Using the measurement non-independent port, the measurement value measured in the state mounted on the test jig and the measurement value measured in the state mounted on the reference jig are used for signal leakage between the measurement non-independent ports. A second step of determining a second mathematical expression to be related in consideration of (4), (4) a fourth step of measuring electrical characteristics in a state where an arbitrary electronic component is mounted on the test jig, 5) Based on the result measured in the fourth step, the electronic component is mounted on the reference jig for the measurement non-independent port using the second mathematical formula determined in the third step. If measured in the state Wherein calculating the estimated value of the electrical characteristics of the electronic components that would be, and a fifth step.

  In the above method, the same number of independent ports and non-independent ports selected as measurement targets are measurement independent ports and measurement non-independent ports. In the above method, signal leakage is taken into account between measurement-independent ports. That is, the second equation is determined on the assumption that signal transmission occurs between the measurement non-independent ports. On the other hand, signal leakage is ignored for measurement independent ports. That is, for the measurement independent port, it is assumed that no signal is transmitted from other ports including the measurement non-independent port, and the first equation is determined independently for each port of the measurement independent port.

  According to the above method, a port where signal leakage cannot be ignored is treated as a measurement non-independent port, and relative correction is performed using the second formula that takes into account signal leakage between ports. It is also possible to correct errors due to signal leakage.

  Preferably, in the first step, (a) at least three types of the third correction data acquisition samples are added to the reference treatment for each of the measurement independent ports at least as many as the number of measurement non-independent ports. The electrical characteristics are measured in a state mounted on a tool, and the third correction data acquisition sample or the third correction data acquisition sample is equivalent to the measurement independent port of the test jig, respectively. A measurement process for measuring electrical characteristics in a state in which at least three types of fourth correction data acquisition samples that can be regarded as having the above characteristics are mounted; and (b) from the measurement results in the measurement process, And a formula determining step for determining the first formula.

Preferably, the second mathematical formula determined in the fourth step is: (a) from the measurement value of the measurement independent port when the second correction data acquisition through device is mounted on the test jig. The measured value of the measurement independent port when the second correction data acquisition through device calculated using the first mathematical expression is mounted on the reference jig, and the second correction data acquisition through device An inverse matrix (T _TH ^* ) ⁻¹ of a transmission matrix (T _TH ^* ) between measurement values of the measurement non-independent port when mounted on the test jig, and (b) for obtaining the first correction data Transmission matrix (T _D ) between the measurement independent port and the measurement non-independent port when a through device is mounted on the reference jig, and (c) measurement non-independence when the through device is mounted on the test jig The measured value of the port Transmission matrix of the relative correction adapter for converting the measured values of the measuring non-isolated port when mounted on the semi-jig and (T _CA), the following relationship between,
(T _CA ) = (T _TH ^* ) ⁻¹ · (T _D ) or (T _CA ) = (T _D ) · (T _TH ^* ) ⁻¹
Derived using

  In this case, since the second mathematical expression can be easily obtained by converting the transmission matrix and the scattering matrix, the relative correction value can be calculated in a short time for the measurement non-independent port.

  Preferably, in the first and second correction data acquisition through devices, a transmission coefficient between the measurement independent port and the measurement non-independent port is -40 dB or more in a reciprocal manner.

  In this case, since the correction equation of the port that is not the signal source is derived through the first and second correction data acquisition through devices, if the insertion loss is -40 dB or more, the dynamic range of the measurement value is suppressed to one digit or less. , Good correction accuracy can be obtained.

  Moreover, in order to solve the said subject, this invention provides the electronic component characteristic measuring apparatus comprised as follows.

  The electronic component characteristic measuring apparatus is an electrical characteristic of the electronic component that would be obtained if the electronic component was measured with the electronic component mounted on a reference jig from the result of measuring the electronic component mounted on the test jig. The estimated value of is calculated. The electronic component includes a port that ignores signal leakage between ports (hereinafter referred to as “independent ports”) and a plurality of ports that consider signal leakage between ports (hereinafter referred to as “non-independent ports”). Including. The electronic component characteristic measuring device includes (1) measuring means for measuring the electronic component in a state mounted on the test jig or the reference jig, and (2) the non-independent port for measuring electric characteristics (hereinafter, referred to as “independent port”). At least the same number of independent ports (hereinafter referred to as “measurement independent ports”) as the number of “measurement independent ports” (hereinafter referred to as “measurement independent ports”) are included in the test jig. A first storage means for storing a result measured in a mounted state and a result measured in a state mounted on the reference jig; and (3) from the result stored in the first storage means, For the measurement independent port, a first mathematical expression that associates the measurement value measured in the state mounted on the test jig and the measurement value measured in the state mounted on the reference jig ignoring signal leakage between the ports. Determine the first Formula determining means; and (4) a first correction data acquisition through for connecting all of the measurement independent ports and the measurement non-independent ports from which at least the same number of the first mathematical expressions as the number of the measurement independent ports are derived. A second device that measures electrical characteristics in a state where the device is mounted on the reference jig and has the same characteristics as the first correction data acquisition through device or the first correction data acquisition through device; Second storage means for storing a result of measuring electrical characteristics in a state where the correction data acquisition through device is mounted on the test jig; and (5) the result stored in the second storage means; Using the first mathematical formula determined by the first mathematical formula determining means, the measurement value measured with the measurement non-independent port mounted on the test jig and the reference jig A second formula determining means for determining a second formula for associating the measured value measured in the mounted state in consideration of signal leakage between the measurement non-independent ports; and (6) an arbitrary electronic component Based on the result of measuring the electrical characteristics of the at least one measurement non-independent port (hereinafter referred to as “measurement port”) by the measurement means in a state of being mounted on the test jig, the second mathematical formula determination means. The estimated value of the electrical characteristics of the electronic component that would be obtained if the electronic port was measured with the electronic component mounted on the reference jig for the measurement port is calculated using the second mathematical formula determined by Electrical characteristic estimation means.

  Preferably, the first storage means has at least one of the measurement independent ports in a state where at least three types of first correction data acquisition samples are mounted on the reference jig, respectively. At least three types of second correction data acquisition samples that can be regarded as having the same characteristics as the first correction data acquisition sample and the results of measuring the electrical characteristics by the measurement means are mounted on the test jig. In this state, the measurement results of the electrical characteristics of at least one of the measurement independent ports are stored. The first mathematical formula determination unit determines the first mathematical formula for the measurement independent port from the result stored in the first storage unit.

  According to the present invention, it is possible to perform relative correction with high accuracy even if a jig having signal leakage between ports is used.

  Hereinafter, embodiments of the present invention will be described with reference to FIGS.

  <Conventional Example> First, a conventional relative correction method (conventional method) as a premise of the present invention will be described with reference to FIGS.

  As shown in FIG. 6, an electronic component 120 (for example, a surface acoustic wave filter that is a high-frequency passive electronic component) is mounted on a jig 112, and its electrical characteristics are measured by a measuring device 110 (for example, a network analyzer). Is measured. The coaxial connector 112a of the jig 112 and the measuring device 110 are connected by a coaxial cable 114. As indicated by an arrow 116, when the electronic component 120 is mounted on the mounting portion 112 b of the jig 112, the terminal 121 of the electronic component 120 is electrically connected to the measuring device 110. The measuring device 110 measures the electrical characteristics of the electronic component 120 by inputting a signal to a certain terminal 121 of the electronic component 120 and detecting an output signal from the other terminal 121.

  The measuring device 110 performs arithmetic processing on the measurement data according to a predetermined program and calculates electrical characteristics. In this case, the measuring apparatus 110 reads necessary data such as measured values from an internal memory or a recording medium, or reads necessary data by communicating with an external device (for example, a server). The measuring apparatus 110 can be divided into a plurality of devices. For example, it may be divided into a measurement unit that performs only measurement and a calculation unit that receives input of measurement data and performs calculation processing, pass / fail determination, and the like.

  It is difficult to manufacture a plurality of jigs 112 having the same characteristics. Therefore, even if the electronic component 120 is the same, the measurement result differs if the jig 112 used for measurement is different. For example, a measurement result is obtained with a jig (reference jig) used for assuring electric characteristics to a user and a jig (test jig) used for measurement for non-defective product selection in an electronic component manufacturing process. Different. Such a difference in measured values between jigs can be corrected by a relative correction method.

  Next, the basic principle of the conventional relative correction method will be described with reference to FIGS. In the following, for simplicity, the electrical characteristics between two ports will be described by taking a two-terminal pair circuit as an example, but it can be extended to an n-terminal pair circuit (n is 1 or an integer of 3 or more). .

FIG. 7A shows a two-terminal pair circuit of a reference jig on which a two-port electronic component (hereinafter referred to as “sample DUT”) is mounted. The characteristics of the sample DUT are represented by a scattering matrix (S _DUT ). Error characteristics between the coaxial connector and the port of the sample DUT in the reference jig are represented by scattering matrices (E _D1 ) and (E _D2 ). Measurement values (hereinafter also referred to as “reference jig measurement values”) S _11D and S _21D in a state where the sample DUT is mounted on the reference jig are obtained at the terminals on both sides of the circuit.

FIG. 7B shows a two-terminal pair circuit of a test jig on which the sample DUT is mounted. The characteristics of the sample DUT are represented by a scattering matrix (S _DUT ). Error characteristics between the coaxial connector in the test jig and the port of the sample DUT are represented by scattering matrices (E _T1 ) and (E _T2 ). At the terminals on both sides of the circuit, measured values (hereinafter also referred to as “test jig measured values”) S _11T and S _21T in a state where the sample DUT is mounted on the test jig are obtained.

In FIG. 7C, adapters (E _T1 ) ⁻¹ and (E _T2 ) ⁻¹ that neutralize the error characteristics (E _T1 ) and (E _T2 ) are connected to both sides of the circuit of FIG. Indicates the state. The adapters (E _T1 ) ⁻¹ and (E _T2 ) ⁻¹ theoretically convert the scattering matrix (E _T1 ) and (E _T2 ) of the error characteristics into a transmission matrix, obtain the inverse matrix, and then scatter again. It is obtained by converting to a matrix. Test measured by mounting the sample DUT on the test jig at the boundary portions 80 and 82 between the error characteristics (E _T1 ), (E _T2 ) and the adapters (E _T1 ) ⁻¹ , (E _T2 ) ⁻¹ Jig measurement values S _11T and S _21T are obtained. At the terminals on both sides of the circuit in FIG. 7C, the error of the test jig is removed, and the measured values S ₁₁ DUT and S ₂₁ DUT of the sample DUT itself are obtained.

Since the circuit of FIG. 7C is equivalent only to the sample DUT, when the scattering matrices (E _D1 ) and (E _D2 ) of the error characteristics of the reference jig are connected to both sides, as in FIG. As shown in FIG.

In FIG. 8A, a scattering matrix obtained by combining (E _D1 ) and (E _T1 ) ⁻¹ indicated by reference numeral 84 is (CA1), and (E _T2 ) ⁻¹ and (E _D2 ) indicated by reference numeral 86 are If the combined scattering matrix is (CA2), the result is as shown in FIG. These scattering matrices (CA1) and (CA2) are so-called “relative correction adapters”, and associate the test jig measurement values S _11T and S _21T with the reference jig measurement values S _11D and S _21D . Therefore, when the relative correction adapters (CA1) and (CA2) are determined, the relative correction adapters (CA1), (CA1), (21) are determined from the test jig measurement values S _11T , S _21T in a state where an arbitrary electronic component is mounted on the test jig. The reference jig measurement values S _11D and S _21D can be calculated (estimated) using CA2).

Each of the relative correction adapters (CA1) and (CA2) includes four coefficients c ₀₀ , c ₀₁ , c ₁₀ , c ₁₁ ; c ₂₂ , c ₂₃ , c ₃₂ , and c ₃₃ , but according to the reciprocity theorem, c ₀₁ = c ₁₀ and c ₂₃ = c ₃₂ . Therefore, for each port, three types of one-port standard samples (correction data acquisition samples) having different characteristics are mounted on the reference jig and the reference jig and measured, and each coefficient c ₀₀ , c ₀₁ , c ₁₀ , c ₁₁ ; c ₂₂ , c ₂₃ , c ₃₂ , c ₃₃ are determined.

  The basic characteristics of the correction data acquisition sample for calculating the relative correction adapter are that the transfer coefficient between each port is sufficiently small, and the reflection coefficient characteristics at the same port and frequency are the same between each correction data acquisition sample. Need to be different. Since the reflection coefficient is used, it is easy to satisfy the basic characteristics of the correction data acquisition sample described above by forming the open circuit, the short circuit, and the termination. Moreover, it is preferable that the external shape of the correction data acquisition sample is an external shape that can be attached to a jig in the same manner as the correction target sample.

  Opening, short-circuiting, and termination between each port can be realized by connecting the signal line of the package and the ground with a lead wire, a chip resistor, or the like in the same package as the sample to be measured. . However, in this method, when the sample to be measured is downsized, it becomes difficult to arrange a chip resistor or the like inside the package or the like, and it becomes impossible to produce a sample for acquiring correction data. There is a possibility that it will not be possible to select non-defective products.

  As a countermeasure against this, a correction data acquisition sample is manufactured using a manufacturing process of a sample (electronic component) to be measured. In this case, the correction data acquisition sample may be manufactured using any one of a manufacturing line for manufacturing an electronic component as a product, a manufacturing line for experimentally manufacturing a prototype of the electronic component, or a compromise of both.

  In addition, the correction data acquisition sample to be mounted on the reference jig and the correction data acquisition sample to be mounted on the test jig are not necessarily the same because, in principle, the same electrical characteristics are sufficient. Also good. For example, a plurality of correction data acquisition samples that can be regarded as having the same electrical characteristics are prepared, and a separate correction data acquisition sample arbitrarily selected from the prepared correction data acquisition samples is used as a reference. The relative correction adapter can be derived even if it is mounted on a jig and a test jig and measured.

  By the way, with the miniaturization of wireless devices and the increase in the number of bands, RF components become multi-ports and narrow pitch. In such an electronic component, it is difficult to ensure isolation between ports in the jig. On the other hand, in RF components that require high performance by increasing the transmission rate and multiband, the correction error is required to be smaller. However, in the conventional relative correction method, the signal between such ports is Since the leakage is not modeled, a correction error remains after the relative correction.

  <Example> Next, the measurement error correction method of the present invention will be described with reference to FIGS.

  For example, the 4-port device 10 shown in the circuit diagram of FIG. 3A includes an ANT port (port 1) connected to an antenna, a Tx port (port 2) to which a transmission signal is input, and a received signal that is 180 degrees out of phase. Is a balanced duplexer having an Rx1 port (port 3) and an Rx2 port (port 4).

  As shown in the plan view of FIG. 3B, the 4-port device 10 has the electrodes 11 to 14 of the ports 1 to 4 and the GND electrodes 15 and 16, and is mounted on the jig 20, It is measured in the same manner as in the conventional example. The jig 20 is provided with coaxial connectors 21 to 24 of ports 1 to 4 for connection to a measuring instrument such as a network analyzer.

  Since the GND electrode 15 is disposed between the electrode 11 of the ANT port (port 1) and the electrode 12 of the Tx port (port 2) of the 4-port device 10, it is easy to obtain isolation in the jig 10. . Therefore, even if the ports 1 and 2 are treated as ports (independent ports) ignoring signal leakage between the ports, the error of the relative correction method does not cause a problem in practice.

  On the other hand, the electrode 13 of the Rx1 port (port 3) and the electrode 14 of the Rx2 port (port 4) of the 4-port device 10 are adjacent to each other because they are balanced ports, so that it is difficult to achieve isolation. Therefore, it is necessary to treat the ports 3 and 4 as ports that consider signal leakage between ports (non-independent ports), and to apply a relative correction method that considers the inter-port leakage error signal.

FIG. 4 shows a signal flow diagram of a model for obtaining the measurement error. Terminals 1t-1t ′, 2t-2t ′, 3t-3t ′, 4t-4t ′ correspond to the coaxial connectors of the ports 1 to 4 of the test jig on which the 4-port device 10 is mounted, and the terminals 1d-1d ′, 2d-2d ′, 3d-3d ′, and 4d-4d ′ correspond to the coaxial connectors of the ports 1 to 4 of the reference jig on which the 4-port device 10 is mounted. The characteristics of the 4-port device 10 are represented by a scattering matrix S _DUT .

Since ports 1 and 2 are treated as ports (independent ports) that ignore signal leakage between ports, they are each modeled by a two-terminal pair network as in the conventional example. The error characteristics of the ports 1 and 2 of the test jig are represented by scattering matrices E _Tp1 and E _Tp2 , respectively. Further, the relative correction adapters that convert the ports 1 and 2 of the test jig into the ports 1 and 2 of the reference jig are CA _p1 and CA _p2 , respectively.

On the other hand, since the ports 3 and 4 are treated as ports (non-independent ports) that consider signal leakage between the ports, they are modeled as a four-terminal pair. The error characteristics of the ports 3 and 4 of the test jig are represented by a scattering matrix _ETp3 . Further, the relative correction adapter that converts the ports 3 and 4 of the test jig into the ports 3 and 4 of the reference jig is CA _p34 .

The relative correction adapters CA _p1 and CA _p2 can be derived by the conventional method disclosed in Patent Document 1 and the like.

When the relative correction adapters CA _p1 and CA _p2 can be derived, measured values (reference jig measured values) and test treatments when an arbitrary 4-port through device standard sample (through device for correction data acquisition) is mounted on the reference jig. The relative correction adapter CA _p3p4 for the ports 3 and 4 can be derived from the measurement value (test jig measurement value) when mounted on the tool.

That is, as shown in the signal flow diagram of FIG. 5, between the terminals 1d-1d ′ and 2d-2d ′ corresponding to the coaxial connector of the reference jig and the terminals 3d-3d ′ and 4d-4d ′ is ( a) With respect to the test jig measurement value of the 4-port through device standard sample, the relative correction adapters CA _p1 and CA _p2 were used for the ports 1 and 2 to perform relative correction to the ports 1 and 2 of the reference test jig measurement value A scattering matrix S _TH ^* and (b) a 4-terminal pair relative correction adapter scattering matrix CA _p34 for ports 3 and 4 are connected in series. The scattering matrix _SD of the reference jig measurement of the 4-port through device standard sample is a scattering matrix between the terminals 1d-1d ′ and 2d-2d ′ and the terminals 3d-3d ′ and 4d-4d ′. Since S _TH ^* and _SD are known, CA _p34 can be derived.

また、端子３ｔ−３ｔ'及び端子４ｔ−４ｔ'と端子３ｄ−３ｄ'及び端子４ｄ−４ｄ'との間の関係式は、散乱行列ＣＡ_ｐ３４の散乱係数ＣＡ_{ｐ３４＿ｉｊ}（ｉ＝１〜４、ｊ＝１〜４）を用いて、次の数式２で表される。

また、端子１ｄ−１ｄ'及び端子２ｄ−２ｄ'と端子３ｄ−３ｄ'及び端子４ｄ−４ｄ'との間の関係式は、散乱行列Ｓ_Ｄの散乱係数Ｓ_Ｄｉｊ（ｉ＝１〜４、ｊ＝１〜４）を用いて、次の数式３で表される。

数式１、２、３を伝送行列に変換すると、次に数式４、５、６となる。

ここで、Ｔ_ＴＨｉｊ ^＊（ｉ＝１〜４、ｊ＝１〜４）は、散乱行列Ｓ_ＴＨ ^＊を変換した伝送行列Ｔ_ＴＨ ^＊の係数である。ＴＣＡ_{ｐ３４＿ｉｊ}（ｉ＝１〜４、ｊ＝１〜４）は、散乱行列ＣＡ_ｐ３４を変換した伝送行列ＴＣＡ_ｐ３４の係数である。Ｔ_Ｄｉｊ（ｉ＝１〜４、ｊ＝１〜４）は、散乱行列Ｓ_Ｄを変換した伝送行列Ｔ_Ｄの係数である。 Input / output signals at the terminals 1d, 1d ′, 2d, 2d ′, 3t, 3t ′, 4t, 4t ′, 3d, 3d ′, 4d, 4d ′ are represented by α _{1 to} α ₆ , β ₁ as shown in FIG. When expressed using ～Beta _6, relation between the terminal 1d-1d 'and terminal 2d-2d' terminal 3t-3t 'and terminals 4t-4t', the scattering matrix _{S TH} ^* of the scattering coefficient _{S ThiJ} ^* It is expressed by the following formula 1 using (i = 1 to 4, j = 1 to 4).

Further, the relational expression between the terminals 3t-3t ′ and 4t-4t ′ and the terminals 3d-3d ′ and 4d-4d ′ is a scattering coefficient CA _{p34_ij} (i = 1 to 4, j of the scattering matrix CA _p34 ). = 1 to 4), it is expressed by the following formula 2.

Further, the relational expression between the terminals 1d-1d ′ and 2d-2d ′ and the terminals 3d-3d ′ and 4d-4d ′ is the scattering coefficient S _Dij (i = 1 to 4, j of the scattering matrix _SD ). = 1 to 4), it is expressed by the following mathematical formula 3.

When Formulas 1, 2, and 3 are converted into a transmission matrix, Formulas 4, 5, and 6 are then obtained.

Here, T _THij ^* (i = 1 to 4, j = 1 to 4) is a coefficient of the transmission matrix T _TH ^* obtained by converting the scattering matrix S _TH ^* . TCA _{p34_ij} (i = 1 to 4, j = 1 to 4) is a coefficient of the transmission matrix TCA _p34 obtained by converting the scattering matrix CA _p34 . T _Dij (i = 1 to 4, j = 1 to 4) is a coefficient of the transmission matrix T _D obtained by converting the scattering matrix S _D.

数式７と数式６とを比較することにより、次の数式８が導出される。

数式８の右辺第１項の逆行列を、数式８の両辺に左から掛けることにより、次の数式９が導出される。

数式９の結果を、以下に示した伝送行列から散乱行列に変換する式を用いて、４端子対相対補正アダプタの散乱行列ＣＡ_ｐ３４に変換する。 Substituting Equation 5 into Equation 4 yields Equation 7 below.

By comparing Equation 7 and Equation 6, the following Equation 8 is derived.

By multiplying the inverse matrix of the first term on the right side of Equation 8 by both sides of Equation 8 from the left, the following Equation 9 is derived.

The result of Expression 9 is converted into the scattering matrix CA _p34 of the four-terminal pair relative correction adapter using the expression for converting the transmission matrix to the scattering matrix shown below.

上記手順にて導出した４端子対相対補正アダプタは、基準治具及び試験治具におけるポート間の信号の漏洩もモデル化しているため、狭ピッチのためアイソレーションが取り難いと考えられるＲｘ１ポートとＲｘ２ポートについて、相対補正を正確に行える。 When the scattering matrix is expressed by Formula 10 and the transmission matrix is expressed by Formula 11, the conversion formula from the scattering matrix to the transmission matrix and the conversion formula from the transmission matrix to the scattering matrix are parts of Formulas 12-19. It represents with Numerical formula 20-27 using a matrix.

The four-terminal-pair relative correction adapter derived in the above procedure also models the signal leakage between the ports in the reference jig and test jig, so that it is difficult to isolate because of the narrow pitch. Rx2 ports can be accurately corrected relative to each other.

  For the relative correction value, for example, a measurement device similar to the conventional measurement device 110 (for example, network analyzer) shown in FIG. By changing so as to realize the correction method, it can be easily calculated.

  Even if the number of device ports or the number of non-independent ports increases, the above correction procedure is within the derivable condition (in the case of N-port devices, the number of independent ports with no signal leakage between ports is N / 2 or more. ) Can be easily expanded.

ここで、Ｔ_ＴＨ ^＊は、スルーデバイス標準試料を試験治具に実装したときの独立ポートの測定値から、独立ポートの相対補正アダプタを用いて算出した、スルーデバイス標準試料を基準治具に実装したときの測定独立ポートの測定値と、スルーデバイス標準試料を試験治具に実装したときの非独立ポートの測定値と間の伝送行列であり、Ｔ_ＴＨ ^＊の逆行列がＴ_ＴＨ ^＊−１である。Ｔ_Ｄは、スルーデバイス標準試料を基準治具に実装したときの独立ポートと非独立ポートとの間の伝送行列である。Ｔ_ＣＡは、試験治具に実装したときの非独立ポートの測定値を、基準治具に実装したときの測定非独立ポートの測定値（相対補正値）に変換する相対補正アダプタの伝送行列である。 As shown in FIG. 5, Equation 9 when the ports 1 and 2 are independent ports and the ports 3 and 4 are non-independent ports is expressed by the following Equation 28 when generalized.

Here, T _TH ^* is calculated using the relative correction adapter of the independent port from the measured value of the independent port when the through device standard sample is mounted on the test jig. the measured value of the measurement independent ports when, through devices when the standard sample is mounted on the test jig is a transmission matrix between the measured value of the non-isolated ports, T _TH ^* of the inverse matrix T _{TH *} ^-1 It is. T _D is the transmission matrix between the isolated port and the non-isolated port when mounting the through device standard sample on the reference jig. T _CA is a transmission matrix of a relative correction adapter that converts measured values of non-independent ports when mounted on a test jig into measured values (relative correction values) of non-independent ports when mounted on a reference jig. is there.

On the other hand, when the ports 1 and 2 in FIG. 5 are non-independent ports and the ports 3 and 4 are independent ports, the calculation order changes, so that the following Expression 29 is obtained.

For N port devices (N ≧ 4), when M non-independent ports are to be measured, M independent ports are selected to perform relative correction. In this case, T _CA is a transmission matrix (2 × M rows, 2 × M columns) of 2 × M terminal pair relative correction adapters for M non-independent ports. T _TH ^* and T _D are 2 × M rows and 2 × M columns transmission matrices.

  The error characteristic of the non-independent port can be easily obtained by calculating the transmission matrix and the scattering matrix using Equation 28. Therefore, the relative correction value of the non-independent port can be calculated in a short time.

  <Summary> When the same number of independent ports and non-independent ports are selected as measurement targets and the above-described relative correction method of the present invention is applied, a model considering signal leakage at the non-independent ports is used. The correction error for the port is smaller than in the conventional method.

  In other words, accurate relative correction can be performed even if a jig having signal leakage between ports is used. This eliminates the need for jig design and adjustment to ensure jig isolation, leading to a reduction in adjustment man-hours, a reduction in apparent defect rate, avoiding the introduction of defective products, and a reduction in sorting costs.

  The present invention is not limited to the above-described embodiment, and can be implemented with various modifications.

  For example, the first mathematical formula for the measurement independent port may be derived by a conventional TRL correction method, SOLT correction method, or the like.

It is a signal flow diagram of an independent port. (Conventional example) It is a signal flow diagram of a non-independent port. (Conventional example) It is (a) circuit diagram and (b) top view of a 4-port device. (Example) It is a signal flow diagram including a 4-terminal pair relative correction adapter. (Example) It is a signal flow diagram including a 4-terminal pair relative correction adapter. (Example) It is explanatory drawing of a measurement system. (Conventional example) It is a 2 terminal pair circuit diagram which shows the basic principle of a relative correction method. (Conventional example) It is a 2 terminal pair circuit diagram which shows the basic principle of a relative correction method. (Conventional example)

Explanation of symbols

10 4 port device 20 Jig

Claims (6)

A measurement that calculates an estimated value of the electrical characteristics of the electronic component that would be obtained if the electronic component was measured with the electronic component mounted on a reference jig, based on the measurement result of the electronic component mounted on the test jig. An error correction method,
The reference jig and the test jig include a port that ignores signal leakage between ports (hereinafter referred to as “independent port”) and a plurality of ports that consider signal leakage between ports (hereinafter referred to as “non-portable”). And the number of non-independent ports (hereinafter referred to as “measurement non-independent ports”) that measure electrical characteristics (hereinafter referred to as “measurement non-independent ports”). Less than or equal to
With respect to at least the same number of independent ports (hereinafter referred to as “measurement independent ports”) as the number of measurement non-independent ports, the measurement values measured in the state of being mounted on the test jig and the state of being mounted on the reference jig Determining a first equation that relates the measured value to the port ignoring signal leakage between the ports;
Mounted on the reference jig is a first correction data acquisition through device that connects all of the measurement independent ports and the measurement independent ports derived from at least the same number of the measurement independent ports as the first mathematical expression. A second correction data acquisition through device that measures electrical characteristics in the state and can be regarded as having the same characteristics as the first correction data acquisition through device or the first correction data acquisition through device. A second step of measuring electrical characteristics in a state of being mounted on the test jig;
Using the first mathematical formula determined in the first step and the result measured in the second step, the measurement value measured with the measurement non-independent port mounted on the test jig and the reference A third step of determining a second mathematical expression that associates a measurement value measured in a state mounted on a jig in consideration of signal leakage between the measurement non-independent ports;
A fourth step of measuring electrical characteristics in a state where an arbitrary electronic component is mounted on the test jig;
Based on the result measured in the fourth step, the second mathematical formula determined in the third step is used, and the electronic component is mounted on the reference jig for the measurement non-independent port. Calculating an estimate of the electrical properties of the electronic component that would be obtained if measured;
A method for correcting a measurement error, comprising: The first step includes
With respect to any of the measurement independent ports of at least the same number as the number of measurement non-independent ports, the electrical characteristics are measured in a state where at least three types of third correction data acquisition samples are mounted on the reference jig, In addition, at least three types of the fourth correction data can be regarded as having the same characteristics as the third correction data acquisition sample or the third correction data acquisition sample, respectively, in the measurement independent port of the test jig. A measurement process for measuring electrical characteristics with the correction data acquisition sample mounted,
From the result measured in the measurement step, a formula determination step for determining the first formula for the measurement independent port;
The measurement error correction method according to claim 1, comprising: The second mathematical formula determined in the third step is
The second correction data acquisition through device calculated using the first mathematical formula from the measurement value of the measurement independent port when the second correction data acquisition through device is mounted on the test jig. Transmission between the measured value of the measurement independent port when mounted on the reference jig and the measured value of the measurement independent port when the second correction data acquisition through device is mounted on the test jig matrix and _{(T TH} ^*) of the inverse matrix ^_(T TH ^{*) -1,}
A transmission matrix (T _D ) between the measurement independent port and the measurement independent port when the first correction data acquisition through device is mounted on the reference jig;
A transmission matrix (T _CA ) of a relative correction adapter that converts a measurement value of the measurement non-independent port when mounted on the test jig into a measurement value of the measurement non-independent port when mounted on the reference jig;
The following relation between
(T _CA ) = (T _TH ^* ) ⁻¹ · (T _D ) or (T _CA ) = (T _D ) · (T _TH ^* ) ⁻¹
The measurement error correction method according to claim 3, wherein the measurement error correction method is derived by using the method.   The first and second correction data acquisition through devices have a transfer coefficient between the measurement independent port and the measurement non-independent port of -40 dB or more in a reciprocal manner. Or a method for correcting a measurement error described in 3 above. From the result of measuring the electronic component in the state mounted on the test jig, to calculate an estimated value of the electrical characteristics of the electronic component that would be obtained if the electronic component was measured in the state mounted on the reference jig, An electronic component characteristic measuring device,
The electronic component includes a port that ignores signal leakage between ports (hereinafter referred to as “independent ports”) and a plurality of ports that consider signal leakage between ports (hereinafter referred to as “non-independent ports”). Measuring means for measuring the electronic component in a state mounted on the test jig or the reference jig,
The number of the independent ports (hereinafter referred to as “measurement non-independent ports”) at least as many as the number of the non-independent ports (hereinafter referred to as “measurement non-independent ports”) for measuring electrical characteristics. A first storage means for storing a result measured with the test jig mounted on the test jig and a result measured with the test jig mounted on the reference jig;
From the result stored in the first storage means, for the measurement independent port, a measurement value measured in a state mounted on the test jig and a measurement value measured in a state mounted on the reference jig, First mathematical formula determination means for determining a first mathematical formula to be associated with ignoring signal leakage between ports;
Mounted on the reference jig is a first correction data acquisition through device that connects all of the measurement independent ports and the measurement independent ports derived from at least the same number of the measurement independent ports as the first mathematical expression. A second correction data acquisition through device that measures electrical characteristics in the state and can be regarded as having the same characteristics as the first correction data acquisition through device or the first correction data acquisition through device. Second storage means for storing a result of measuring electrical characteristics in a state of being mounted on the test jig;
Using the result stored in the second storage means and the first mathematical expression determined by the first mathematical expression determination means, the measurement non-independent port is measured in a state mounted on the test jig. Second formula determining means for determining a second formula that associates the measured value measured with the measured value mounted on the reference jig in consideration of signal leakage between the measurement non-independent ports; ,
Based on the result of measuring the electrical characteristics of the at least one measurement non-independent port by the measurement unit in a state where an arbitrary electronic component is mounted on the test jig, the second formula determination unit determines the first Using the mathematical formula 2 to calculate an estimated value of the electrical property of the electronic component that would be obtained if the non-independent port was measured with the electronic component mounted on the reference jig. An estimation means;
An electronic component characteristic measuring apparatus comprising: The first storage means is configured to measure at least one of the measurement independent ports with at least three types of first correction data acquisition samples mounted on the reference jig. And at least three types of second correction data acquisition samples that can be regarded as having the same characteristics as the first correction data acquisition sample or the first correction data acquisition sample. In the state mounted on the test jig, the result of measuring the electrical characteristics by the measuring means for at least one of the measurement independent ports is stored,
The electronic device according to claim 5, wherein the first mathematical formula determination unit determines the first mathematical formula for the measurement independent port from the result stored in the first storage unit. Component characteristic measuring device.

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