JP2008064556A - Ultrasonic inspection method and system therefor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To determine quickly and surely existence of a hole in an inspection object; to remove instability caused by an inspection method using an ultrasonic wave; and to perform stable inspection to an optional inspection object. <P>SOLUTION: In this ultrasonic inspection system used for an ultrasonic leak test, equipped with an ultrasonic transmission device 5 or a transmission device of a compressed gas supply device 5A, an ultrasonic reception device 6, and an analyzer 8, a measuring object 4 comprises the inspection object 40 and a master 41, and the analyzer 8 is equipped with a threshold setting device 13 for setting a threshold from an ultrasonic wave generated from the master; and a determination device 15 for detecting measured data of the ultrasonic wave generated from the inspection object, and determining whether the inspection object is fit or not based on the threshold, the measured data, and a determination condition set beforehand. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to an ultrasonic inspection method and system used for an ultrasonic leak test.

  A device that performs so-called leak tests to check whether or not the test object is sufficiently sealed (no leaks) in the test object such as a container such as a tank or a piping tool such as a valve. There are known an airtight leak test apparatus, a submerged leak test apparatus, a helium leak test apparatus, and a leak test apparatus using ultrasonic waves (referred to as an “ultrasonic leak test apparatus”) (for example, Patent Document 1).

  This ultrasonic leak test device can detect even small holes with a hole diameter of several μm compared to conventional submerged leak test devices and helium leak test devices. There is an advantage that an expensive apparatus is not required and the apparatus can be easily maintained.

  In the conventional ultrasonic leak test apparatus, the ultrasonic transmission apparatus that outputs ultrasonic waves inside the inspection object, the ultrasonic reception apparatus that receives ultrasonic waves leaking from the inspection object, and the ultrasonic reception apparatus A determination device or the like for determining leakage of an inspection object based on ultrasonic waves is provided.

  In such an ultrasonic leak test apparatus, when an ultrasonic wave is output to the inside of the inspection object by the ultrasonic wave transmitting apparatus, if the inspection object has a hole, the ultrasonic wave leaks from the hole, and the ultrasonic reception apparatus The ultrasonic wave leaked by is received. Conversely, when there is no hole in the object to be inspected, the ultrasonic wave does not leak from the hole, and the ultrasonic wave is not received by the ultrasonic wave receiver.

In the determination apparatus, it is determined whether or not there is a leak in the inspection object based on the ultrasonic wave received by the ultrasonic reception apparatus. Specifically, when an ultrasonic wave is received by the ultrasonic receiving device, the determination device compares the output of the detected signal with a preset output, and outputs the detected signal output. When it is larger, it is judged that there is a leak, and a leak signal is output to activate the buzzer.
JP 2001-194259 A

  The ultrasonic leakage test apparatus described in Patent Document 1 compares the output of a detected signal with a preset output, and determines that there is a leak when the output of the detected signal is greater. is there. For this reason, depending on the type of the object to be inspected, it is not easy to accurately set the output to be compared in advance, and therefore there is a possibility that the presence or absence of holes in the object to be inspected cannot be determined quickly and reliably.

  It is an object of the present invention to be able to quickly and reliably determine the presence or absence of a hole in an inspection object, eliminate instability due to an inspection method using ultrasonic waves, and perform a stable inspection on an arbitrary inspection object. And

  The present invention has been made as an ultrasonic inspection method and system for solving the above problems, and the characteristic of the ultrasonic inspection method is that an ultrasonic wave is output from the ultrasonic transmitter to the inside of the object to be measured. In the ultrasonic inspection method used in an ultrasonic leakage test in which ultrasonic waves leaking from the object to be measured are received by an ultrasonic receiver and the leakage of the object to be inspected is determined based on the received ultrasonic waves. After preparing the inspection object and the master as the measurement object, the threshold value is set from the ultrasonic wave generated from the master, and the measurement data is detected from the ultrasonic wave generated from the inspection object, and the threshold value and the measurement data are detected. And determining whether or not the test article is compatible based on the determination conditions set in advance.

  The present invention implements a pressureless ultrasonic inspection method, and can quickly and surely determine the presence or absence of a hole in the object to be inspected. Size determination is also possible. Further, the instability due to the inspection method using ultrasonic waves is eliminated, and a stable inspection can be performed on an arbitrary inspection object.

  The ultrasonic inspection method of the present invention is characterized in that a compressed gas of a predetermined pressure is supplied to the inside of the object to be measured by the compressed gas supply device, and the ultrasonic wave emitted from the gas leaked from the object to be measured is received by the ultrasonic receiver. In an ultrasonic inspection method used in an ultrasonic leakage test for receiving and determining leakage of an inspection object based on the received ultrasonic wave, based on the threshold value, the measurement data, and a predetermined determination condition It is to determine whether or not the test article is suitable.

  According to the present invention, the same effect as described above can be obtained in a pressurization type ultrasonic inspection method.

  The ultrasonic inspection system according to the present invention is characterized by an ultrasonic transmission device that outputs ultrasonic waves to the inside of a measurement object, an ultrasonic reception device that receives ultrasonic waves leaking from the measurement object, and an ultrasonic reception In a non-pressure type ultrasonic inspection system used for an ultrasonic leakage test, comprising an analysis device for determining leakage of an inspection object based on ultrasonic waves received by the apparatus, the measurement object is a test object The analysis device detects a threshold value setting device that sets a threshold value from ultrasonic waves generated from the master, and detects measurement data of ultrasonic waves generated from the specimen, and the threshold value and the measurement data And a determination device for determining whether or not the test article is suitable based on a predetermined determination condition.

  The ultrasonic inspection system according to the present invention is characterized in that a compressed gas supply device that supplies a compressed gas having a predetermined pressure to the inside of the object to be measured, and an ultrasonic receiver that receives the ultrasonic waves emitted from the gas leaking from the object to be measured. And a pressure-type ultrasonic inspection system used for an ultrasonic leakage test, comprising: an analysis device that performs leakage determination of an inspection object based on ultrasonic waves received by an ultrasonic receiver; It is provided with the determination apparatus which determines whether the said to-be-inspected object is suitable based on measurement data and the preset determination conditions.

  A display device is provided for displaying whether or not the object to be inspected is adapted according to the judgment of the analysis device of the ultrasonic inspection system of the present invention.

  The master of the ultrasonic inspection system of the present invention consists of a plurality of types having different hole diameters, and a threshold value for each master is set.

  The present invention receives leakage sound due to pressurization of an object to be inspected or leakage sound due to ultrasonic waves. Since it is a relative test method for comparing and determining, the presence or absence of holes in the object to be inspected can be determined quickly and reliably, and in the case of holes, the size can be determined by setting a threshold value and a determination condition. Further, the instability due to the inspection method using ultrasonic waves is eliminated, and a stable inspection can be performed on an arbitrary inspection object.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. 1 to 4 show an embodiment of the present invention. As shown in FIG. 1, the ultrasonic leakage test apparatus 1 includes an ultrasonic measurement unit 2 and a measurement apparatus main body 3.

  The ultrasonic measurement unit 2 can be set appropriately between a pressureless type and a pressure type. The pressureless ultrasonic measurement unit 2 includes an ultrasonic transmission device 5 that outputs ultrasonic waves of a predetermined frequency (for example, 40 kHz, etc.) inside the measurement object 4 as a transmission device, and an ultrasonic wave leaking from the measurement object 4. An ultrasonic receiving sensor (ultrasonic receiving device) 6 for receiving sound waves is provided.

  Here, the object to be measured 4 is a reference in which a test body (inspection object) 40 such as a product to be subjected to a leak test and a fine hole 41a having a predetermined diameter as shown in FIG. It is a concept including a piece (master) 41. In addition, the master 41 shown in FIG. 2 has expanded and shown the one part cut | disconnected for convenience. Examples of the inspected object 40 include containers such as tanks and cans, and piping tools such as valves, but are not particularly limited thereto, and may be various parts such as automobile parts and household appliance parts.

  The pressurized ultrasonic measurement unit 2 employs a compressed gas supply device 5A such as a compressor as a transmitting device. Then, a gas (in this embodiment, air) is supplied into the master 41 and the inspection object 40 using the compressed gas supply device 5A, and pressurized to a predetermined pressure of 0.05 MPa or more. When gas flows out from the leak location (hole) of the inspection object 40 of the master 41, ultrasonic waves of 10 kHz to 100 kHz are generated, and the ultrasonic receiving device 6 receives the ultrasonic waves that come out.

  The ultrasonic measurement unit 2 is surrounded by a rubber or resin shield 9, and the shield 9 blocks ultrasonic waves scattered from the outside, that is, background ultrasonic waves. .

  When performing a leak test by the ultrasonic leak test apparatus 1, either the master 41 or the inspection object 40 is appropriately set in a clamp apparatus (not shown). In the case of the pressureless ultrasonic measurement unit 2, an ultrasonic wave is output to the inside of the measurement object 4 of the master 41 or the inspection object 40 by the ultrasonic transmission device 5, and the measurement object is detected by the ultrasonic reception device 6. Ultrasonic leakage from 4 is detected. If there is a hole in the DUT 4, the ultrasonic wave leaks from the hole, and the ultrasonic wave that has leaked is detected by the ultrasonic receiver 6. On the contrary, when there is no hole in the DUT 4, the ultrasonic wave does not leak and the ultrasonic wave reception device 6 does not detect the ultrasonic wave.

  The measuring device main body 3 is connected to the ultrasonic receiving device 6, and performs leakage determination of the measurement object 4 based on the ultrasonic wave received by the ultrasonic receiving device 6. The measuring device main body 3 includes an analysis device 8 constituted by an electronic computer (such as a personal computer) and a display device 10 such as an analysis monitor for displaying the result of the analysis device 8.

  The analysis device 8 includes a threshold value setting device 13 that sets a threshold value from the sound pressure of the ultrasonic wave when the ultrasonic wave reception device 6 receives the ultrasonic wave (sound) generated from the specific master 41, and the inspection object 40. When the ultrasonic receiving device 6 receives the ultrasonic wave generated from the above, the inspection object 40 is adapted based on the input reception data (measurement data), the threshold value, and the preset determination condition. Determination means 15 for determining whether or not the data is nonconforming and a storage device 16 for storing data such as a threshold value and a determination condition set by the threshold value setting device 13. The determination condition can be set as appropriate depending on the type of the inspection object 40 and a threshold value set to a value suitable for the inspection object 40.

  A plurality of types of masters 41 having predetermined micropores 41 a in which the diameters of the micropores are different are prepared, and the threshold values of the respective masters 41 are stored in the storage device 16.

  The display device 10 is connected to the analysis device 8 and, according to the determination of the analysis device 8, displays “OK” if the inspected object 40 is compatible, and “NG” if it is not compatible.

  Next, the case where a leak test is performed by the ultrasonic leak test apparatus 1 will be described with reference to FIG.

  First, the case where a leak test is performed by the pressureless ultrasonic leak test apparatus 1 will be described. When performing a leak test using the ultrasonic leak test apparatus 1, a plurality of types of masters 41 for determining thresholds are prepared which have different hole diameters of non-porous and perforated (small, medium and large). For example, as the master 41, a non-porous one and one having a hole diameter of 3 μm, 10 μm, and 30 μm are prepared.

  Note that the master 41 having a hole diameter of 3 μm corresponds to the inspection accuracy of a helium-type leak test apparatus. The master 41 having a hole diameter of 10 μm corresponds to inspection accuracy by a submergence test. The master 41 having a hole diameter of 30 μm corresponds to the inspection accuracy by the airtight test. Therefore, an arbitrary master 41 can be selected as required for each test accuracy.

  After preparing each master 41, the ultrasonic leak test apparatus 1 is set to the threshold setting mode (S1). Then, any one of the masters 41 is set in the clamping device (S2). At this time, the master 41 is disposed at a position where ultrasonic waves from the ultrasonic transmission device 5 are incident on the master 41.

  After setting the master 41, the ultrasonic transmission device 5 outputs ultrasonic waves to the inside of the master 41 (S3), and the ultrasonic reception device 6 detects ultrasonic leakage from the master 41 (S4).

  The ultrasonic wave receiving device 6 receives the ultrasonic waves generated from the master 41, the data based on the sound pressure is transmitted to the analyzing device 8, the threshold value setting device 13 reads the output value (S5), and the threshold value setting device 13 reads the data. Based on the output value, a threshold suitable for the inspection object 40 is set and stored in the storage device 16 (S6). The steps from step S2 for installing the master to step S6 for inputting a threshold are performed for each master 41, the threshold of each master 41 is set, and the storage device 16 stores the threshold.

  Next, the ultrasonic leak test apparatus 1 is changed to the normal (inspection) mode (S7). In the normal mode (S8), the inspection object 40 is set similarly to the master 41 (S9). At this time, it arrange | positions in the position where the ultrasonic wave from the ultrasonic transmission apparatus 5 injects into the to-be-inspected object 40. FIG. After the inspection object 40 is set, an ultrasonic wave is output to the inside of the inspection object 4 by the ultrasonic transmission device 5 (S10), and an ultrasonic leak from the inspection object 4 is detected by the ultrasonic reception device 6. (S11).

  The ultrasonic wave reception device 6 receives the ultrasonic wave generated from the inspection object 40, and the measurement data is transmitted to the determination device 15 (S12). The determination device 15 compares the input measurement data of the inspection object 40 with a predetermined threshold value that is input and held (S13), and determines the inspection object 40 based on the determination condition suitable for the inspection object 40. Judge conformity and nonconformity.

  For example, it is assumed that the threshold value of the master 41 having a hole diameter of 3 μm is selected, and the determination condition is set such that the threshold value <measured value = defective. The input measurement data of the object to be inspected 40 is compared with the threshold value input and held as described above. If the measurement value obtained from the measurement data is larger than the threshold value, it is determined as nonconforming and the result is analyzed and monitored. Send to 10. If the measured value is less than or equal to the threshold value, it is determined that the measurement is appropriate and the result is sent to the analysis monitor 10.

The analysis monitor 10 displays a judgment of conformity or nonconformity. In the present embodiment, “OK” is displayed if it conforms (S15), and “NG” is displayed if it does not conform (S14).

  When the leakage test for one inspection object 40 is completed, the inspection objects 40 set in the clamp device are sequentially replaced, and the leakage test for the set inspection object 40 is sequentially performed.

  When a leak test is performed by the non-pressure ultrasonic leak test apparatus 1, air is supplied into the master 41 using the compressed gas supply apparatus 5A in steps S2 to S4, and 0.05 MPa The pressure is increased to the above predetermined pressure (S3A). When air flows out from the master 41, an ultrasonic wave of 10 kHz to 100 kHz is generated, and the ultrasonic receiving device 6 detects the ultrasonic wave that comes out (S4). From step S5 for reading the output value thereafter to step S9 for setting the object to be inspected 40 is the same as the pressureless inspection method.

  Further, air is supplied into the object to be inspected 40 using the compressed gas supply device 5A, and pressurized to a predetermined pressure of 0.05 Mpa or more (S10A). Subsequent steps (steps S11 to S15) are the same as the pressureless inspection method.

  The determination condition can be arbitrarily set according to the type and threshold value of the object to be inspected 40. For example, when the determination condition is set as threshold value> measured value = defective, the inspection object is inspected based on the determination condition The measurement data of the object 40 is compared with a predetermined threshold value stored in the input (S17), and “OK” is displayed if it is compatible (S18), and “NG” is displayed if it is not compatible (S19).

  As described above, in the present embodiment, leakage sound due to pressurization or leakage sound due to ultrasonic waves is received by the ultrasonic receiving device 6 installed in the vicinity of the inspection object 40, and the analysis device 8 uses the master 41. Since it is a relative test method that compares and judges conformity and nonconformity based on threshold values and judgment conditions, the presence or absence of holes in the inspection object can be quickly and reliably judged. In addition, when the inspection object 40 has a hole, it is possible to immediately determine the size of the hole of the inspection object 40 by setting a plurality of threshold values and determination conditions according to the hole diameter in the master 41.

  In addition, since the test results are displayed on the analysis monitor 10, there are no individual differences in visual judgment by humans, and the uniformity of inspection is excellent. In addition, the test results are required compared to conventional submerged leak test equipment. The time, place, loading and unloading, etc. that have been done are greatly reduced, and the economy is excellent.

  Relative test method for comparing and judging conformity / nonconformity based on the threshold value and judgment condition by the master 41 in the analysis device 8, so that there is no instability and stable practical use compared with the conventional inspection method using ultrasonic waves. Inspection method.

  As shown in FIG. 4, depending on the arrangement method of the ultrasonic receiving apparatus, it is possible to specify the leak position. Specifically, the measurement is performed while relatively moving the inspection object 40 and the ultrasonic receiver 6. For example, the inspection object 40 is moved in the axial direction and rotated around the axial center. As a result, the leak portion (hole) 40a of the inspection object 40 can be brought close to the ultrasonic receiver 6, and the leak position is specified by measuring the peak value of the received data of the ultrasonic receiver 6. And more accurate inspection can be performed.

  The present invention is not limited to the embodiment described above. For example, in addition to the reference piece, the master 41 may employ a product that is actually a defective product as the master 41. In such a case, the threshold value of the defective product can be obtained, and the quality of the product can be promptly determined on site based on the threshold value.

It is a figure which shows schematic structure of the ultrasonic detection system of this invention. It is a perspective view which shows the measurement of a master. It is a flowchart of the ultrasonic detection system of this invention. It is a perspective view which shows the test | inspection state of a to-be-inspected object.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Ultrasonic leak test apparatus 2 Ultrasonic measurement unit 3 Measuring apparatus main body 4 Object to be measured 5 Ultrasonic transmission apparatus 6 Ultrasonic reception apparatus 8 Analysis apparatus 9 Shield 10 Analysis monitor (display apparatus)
13 Threshold setting device 15 Determination device 40 Inspected object 41 Master (reference piece)

Claims (6)

  An ultrasonic wave is output from the ultrasonic transmitter to the inside of the object to be measured, and the ultrasonic wave leaked from the object to be measured is received by the ultrasonic wave receiver, and the leakage of the object to be inspected is determined based on the received ultrasonic wave. In the ultrasonic inspection method used in the ultrasonic leakage test, after preparing an inspection object and a master as the object to be measured, a threshold value is set from the ultrasonic waves generated from the master, and from the inspection object Ultrasonic waves characterized by detecting measurement data from generated ultrasonic waves and determining whether or not the test object is suitable based on the threshold value, the measurement data, and a predetermined determination condition Inspection method.   A compressed gas supply device supplies a compressed gas of a predetermined pressure to the inside of the object to be measured, and an ultrasonic wave generated by the gas leaked from the object to be measured is received by the ultrasonic wave receiver, and based on the received ultrasonic wave In an ultrasonic inspection method used in an ultrasonic leakage test for determining leakage of an object to be inspected, after preparing an inspection object and a master as the object to be measured, a threshold value is set from ultrasonic waves generated from the master. Detecting measurement data from ultrasonic waves generated from the test object and determining whether or not the test object is suitable based on the threshold value, the measurement data, and a preset determination condition. Ultrasonic inspection method characterized by.   An ultrasonic transmitter that outputs ultrasonic waves inside the object to be measured, an ultrasonic receiver that receives ultrasonic waves leaking from the object to be measured, and an object to be measured based on the ultrasonic waves received by the ultrasonic receiver. In an ultrasonic inspection system used in an ultrasonic leakage test including an analysis device for determining leakage of an inspection object, the measurement object includes an inspection object and a master, and the analysis device is generated from the master. A threshold setting device for setting a threshold value from the ultrasonic wave to be detected, and measurement data of ultrasonic waves generated from the test object, and the inspection test based on the threshold value, the measurement data, and a preset determination condition An ultrasonic inspection system comprising: a determination device that determines whether or not an object is suitable.   A compressed gas supply device that supplies a compressed gas of a predetermined pressure into the object to be measured, an ultrasonic receiver that receives ultrasonic waves emitted from the gas leaked from the object to be measured, and an ultrasonic wave received by the ultrasonic receiver In an ultrasonic inspection system used for an ultrasonic leakage test including an analysis device that performs leakage determination of an inspection object based on sound waves, the measurement object includes an inspection object and a master, and the analysis apparatus includes: , A threshold value setting device for setting a threshold value from ultrasonic waves generated from the master, and measurement data of ultrasonic waves generated from the object to be inspected, and based on the threshold value, the measurement data, and preset determination conditions An ultrasonic inspection system comprising: a determination device that determines whether or not the inspection object is compatible.   The ultrasonic inspection system according to claim 3, wherein a display device is provided for displaying whether or not the inspection object is suitable according to the judgment of the analysis device.   The ultrasonic inspection system according to claim 3, wherein the master includes a plurality of types having different hole diameters, and a threshold value for each master is set.

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