JP2008053129A - Liquid-cooled magnetron and waterproof device for attachment thereof - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a waterproof device for attachment of liquid-cooled magnetron, capable of mounting a liquid-cooled magnetron on the upper surface of a waveguide launcher easy to mount while interrupting water flowing from the liquid-cooled magnetron by dew condensation. <P>SOLUTION: An elastic member 40 having a frame diameter capable of enclosing a gasket 26 is provided around an antenna dome 13 inserted to an antenna hole 23 of the waveguide launcher from above, so that even if water flowing by dew condensation of the liquid-cooled magnetron 10 falls onto the upper surface of the waveguide launcher 22, the water is interrupted by the elastic member 30 to prevent intrusion thereof into the launcher 22 through the gasket 26. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a liquid-cooled magnetron that waterproofs water flowing out from a liquid-cooled magnetron due to condensation and can be installed on the upper surface of a waveguide launcher, and a waterproof device for mounting the liquid-cooled magnetron.

FIG. 5 shows a liquid-cooled magnetron.
A water-cooled magnetron is used as a cooling medium. However, since there is a cooling medium other than water, the liquid-cooled magnetron is hereinafter referred to as a liquid-cooled magnetron.

As shown in the figure, the liquid-cooled magnetron 10 includes an anode 11, a cathode component assembly 12, an antenna dome 13, and the like, and particularly includes a cooling jacket 14 that cools the anode 11 that generates heat.
The jacket 14 is called a serpentine tube because of its shape, and a pipe for supplying a cooling liquid is connected to one end of the jacket 14 and a pipe for discharging the cooling liquid after cooling the magnetron is connected to the other end.

The anode 11 has a built-in resonance cavity for generating microwaves, and the anode end face 11a is connected to the antenna dome 13 via a metal-sealed component or the like.
The antenna dome 13 made of alumina ceramic includes an antenna (not shown) that radiates microwaves, and the microwave radiated from the antenna passes through the antenna dome 13 and propagates to the outside.

In addition, the yokes 15 and 16 are made of a magnetic material such as iron, and efficiently supply the magnetic force of the permanent magnets 17 and 18 to the magnetron side, and also function as a magnetic shield.
The intermediate rings 19 and 20 are made of a magnetic material such as iron, and transmit the magnetic force of the permanent magnets 17 and 18 to a magnetic pole (not shown) inside the anode end surface 11a.

Further, the stud screw 21 attaches the liquid-cooled magnetron 10 to the waveguide launcher.
That is, the antenna dome 13 is inserted into the antenna hole 23 of the waveguide launcher (high frequency coupler) 22 as shown in FIG. 6, and the stud screw 21 is inserted into the mounting hole 24 and screwed with a nut. The liquid-cooled magnetron 10 is attached to the waveguide launcher 22 by stopping.

Further, a flange 25 having a height H of 1 mm to 2 mm is provided around the antenna hole 23.
FIG. 7 is a cross-sectional view of the launcher 22 cut along the tube axis direction.

On the other hand, a magnetron that generates a high-output microwave has a large anode loss, so that forced air cooling is not sufficient for cooling, and the above-described liquid cooling with high cooling efficiency is used.
Such a high-power liquid-cooled magnetron has a large anode resonant cavity, permanent magnet, and the like, and thus increases the overall weight.

  On the other hand, even with a low-power magnetron, there is a liquid-cooled magnetron. However, in a magnetron with a permanent magnet, a liquid with high cooling efficiency is used if you do not want the microwave output to be affected by the temperature characteristics of the permanent magnet. By adopting a cooling method, the effect can be minimized.

  In addition, a liquid-cooled magnetron is used in order to improve the dust environment at the installation site of the magnetron application device generated by forced air cooling or to improve the noise generated by the forced air cooling blower.

  When the liquid-cooled magnetron 10 as described above is used in a magnetron application device, the relationship between the temperature of the coolant and the dew point at the location where the magnetron application device is installed is important for ensuring reliability. .

That is, the portion where the surface temperature of the liquid-cooled magnetron 10 cooled by the coolant is higher than the dew point does not condense, but the portion where the surface temperature is lower than the dew point continues to condense, and water continues to flow downward.
Especially in the summer and rainy seasons, the atmosphere is hot and humid, so a large amount of water is generated and continues to flow.

  Specifically, since the amount of heat generated during operation of the magnetron is large, the portion below the dew point is only a small portion of the coolant supply pipe and the cooling jacket connected to it, and water flows down the surface of the magnetron. Since the amount is small, it does not adversely evaporate in the middle.

  However, when the liquid-cooled magnetron is in a standby state, the cooling liquid continues to flow while the magnetron hardly generates heat, so many surfaces of the magnetron become below the dew point, and a large amount of water is generated due to condensation and continues to flow down. become.

Therefore, since the liquid-cooled magnetron 10 as described above may be submerged in the waveguide launcher 22, the antenna dome 13 is turned upward as shown in FIG. It is attached to the lower side of the waveguide launcher 22.
If attached in this way, the water generated by the dew condensation flows on the surface of the magnetron and falls down, so that the waveguide launcher 22 is not submerged.

However, when the liquid-cooled magnetron 10 is attached to the lower side of the waveguide launcher 22 as shown in FIG.
More specifically, the liquid-cooled magnetron 10 is held with both hands, and the stud screw 21 is inserted into the mounting hole 24 while the antenna dome 13 is partially inserted into the antenna hole 23.

  Thereafter, while pressing the liquid-cooled magnetron 10 against the waveguide launcher 22 with one hand, a nut is screwed into each of the stud screws 21 and the liquid-cooled magnetron 10 is fixed by screwing the nut.

  The liquid-cooled magnetron 10 is provided with a gasket 26 made of a fine metal wire. By mounting as described above, the flange 25 of the waveguide launcher 22 bites into the gasket 26, and the flange 25 and the gasket 26 are in contact with each other. Microwave leakage from the part is prevented.

  Therefore, in the replacement operation of the magnetron, the liquid-cooled magnetron 10 can only be held with one hand because it is a work in a narrow place. In addition, the mounting operation cannot be performed while looking at the antenna hole 23 and the mounting hole 24. There were many cases, and it took a lot of time for the installation work.

  Thus, in order to avoid the destruction of the waveguide circuit device caused by the flooding of the waveguide launcher 22, the attachment means of FIG.

FIG. 9 shows the mounting means for the liquid-cooled magnetron 10 employed under limited specification conditions.
This attachment means inserts the antenna dome 13 into the antenna hole 23, and fixes the liquid-cooled magnetron 10 on the waveguide launcher 22.

  Specifically, while holding the liquid-cooled magnetron 10 with both hands and confirming the positions of the antenna dome 13 and the antenna hole 23, the stud screw 21 is inserted into the mounting hole 24, and the liquid-cooled magnetron 10 is inserted into the waveguide launcher. Then, the liquid-cooled magnetron 10 is fixed by screwing a nut into the stud screw 21 and screwing it.

  Thus, while this attachment means is a simple attachment action, water flowing out from the liquid-cooled magnetron 10 may be immersed in the waveguide launcher 22 and the waveguide circuit device may be destroyed. It is not adopted except for the conditions.

  In particular, since the surface of the cooling jacket 14 or the like easily falls below the dew point in the standby state, the water that has flowed down due to condensation accumulates on the top of the waveguide launcher 22, and the liquid-cooled magnetron 10 and the waveguide launcher 22 It passes through the gap 27 and is immersed in the waveguide launcher 22 from the gasket 26.

When the liquid-cooled magnetron 10 is waiting, if the water is immersed in the waveguide launcher 22, the isolator as the waveguide circuit device is also liquid-cooled, so that the surface of the ferrite that bends the microwave in the isolator is also present. Condensation occurs below the dew point.
When microwaves propagate in such a state, the performance of the isolator deteriorates.

  Furthermore, when the dew condensation generated inside the isolator is heated by microwaves and changed to water vapor, the electromagnetic field is concentrated inside the isolator, so that plasma is generated, the isolator is destroyed, and the magnetron is also destroyed by the influence.

  The isolator utilizes the fact that the ferrite bends the microwave in the presence of a static magnetic field, propagates the traveling wave of the microwave to the load (applicator), and absorbs the reflected wave from the applicator with a dummy load. It has become.

In order to ensure this performance, the ferrite is liquid cooled, and the dummy load that absorbs the reflected wave is also liquid cooled.
This is because the ferrite that bends the microwaves and the dummy load that absorbs the reflected waves also generate heat.

  Therefore, the mounting means in FIG. 9 is a liquid-cooled magnetron used in a semiconductor manufacturing apparatus, for example, when it is installed in a clean room, the humidity is controlled, and the surface temperature of the cooling system is maintained even in a standby state. Adopted under certain conditions of use that do not fall below the dew point.

JP-A-5-132774

  The present invention prevents water from entering the waveguide launcher from the liquid-cooled magnetron, allows the liquid-cooled magnetron to be installed on the upper surface of the waveguide launcher without requiring special conditions, and provides a liquid-cooled magnetron. The purpose of this is to enable easy installation.

  In order to achieve the above object, in the present invention, as a first invention, in a liquid-cooled magnetron having a metal fine wire mesh gasket at the base of an antenna dome, an elastic member having a frame diameter larger than that of the gasket is provided. The elastic member is disposed around an antenna dome inserted from above the tube launcher, and the liquid-cooled magnetron is attached to the upper surface of the waveguide launcher with the elastic member interposed for waterproofing. We propose a waterproof device for mounting liquid-cooled magnetrons.

  According to a second aspect of the present invention, in the mounting waterproof device according to the first aspect, a concave groove for fitting the elastic frame is provided on the upper surface of the waveguide launcher around the antenna dome. We propose a waterproof device for mounting liquid-cooled magnetrons.

  As a third invention, in the mounting waterproof device according to the first invention described above, the contact surface or gap between the antenna-side anode end surface and the antenna-side intermediate ring, the contact surface between the antenna-side intermediate ring and the antenna-side permanent magnet A waterproof device for mounting a liquid-cooled magnetron, characterized in that a waterproof elastic member is provided on at least one contact surface or clearance between the clearance and the contact surface or clearance between the antenna-side permanent magnet and the antenna-side yoke. Propose.

  As a fourth invention, at least on the antenna side of the liquid-cooled magnetron, the contact surface or gap between the anode end surface and the antenna-side intermediate ring, the contact surface or gap between the antenna-side intermediate ring and the antenna-side permanent magnet, the antenna-side permanent magnet A waterproof elastic member is provided on at least one of the contact surfaces or gaps between the antenna side yoke and the antenna side yoke to prevent water flowing out of the gasket through the contact surfaces or gaps. We propose a liquid-cooled magnetron.

In the mounting waterproof device according to the first aspect of the invention, when the liquid-cooled magnetron is mounted on the upper surface of the waveguide launcher, an elastic member is sandwiched between the magnetron and the launcher and functions as a waterproof member.
Since this elastic member is arranged around the antenna dome having a frame diameter larger than that of the gasket, even if water flowing out from the liquid-cooled magnetron due to condensation falls on the upper surface of the waveguide launcher, the above-mentioned elasticity is achieved. Water is cut off by the member, and the gasket does not soak into the waveguide launcher.

  As a result, even if a liquid-cooled magnetron is disposed on the upper side of the waveguide launcher, there is no problem such as destruction of the waveguide circuit device, so that the liquid-cooled magnetron can be mounted very easily and the reliability of the magnetron is high. Become.

  Further, since the waterproof device for attachment of the second invention is configured to fit the elastic member for waterproofing into the concave groove provided in the conduction launcher, the arrangement position of the elastic member is in the process of installing the liquid-cooled magnetron. There is no shift and the waterproof function is performed reliably.

The waterproof device for attachment of the third invention is provided with an elastic member for preventing water flowing out from the inside of the magnetron such as between the anode end face and the intermediate ring, between the intermediate ring and the permanent magnet due to condensation.
Therefore, according to this waterproofing device for mounting, in addition to the water that flows down from the outer surface of the magnetron, the water that flows down from the inside of the magnetron can be shut off, and water intrusion into the waveguide launcher is prevented with high accuracy.

The liquid-cooled magnetron according to the fourth aspect of the present invention is provided with a waterproof elastic member between the anode end face and the intermediate ring, between the intermediate ring and the permanent magnet, etc., to prevent outflow of water from the inside of the liquid-cooled magnetron due to condensation. The configuration is prevented.
The elastic member can be provided on the cathode side as well as the antenna side, and can also be adopted for a liquid-cooled magnetron that is attached to the lower surface of the waveguide launcher.

Next, embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a partial cross-sectional view showing a mounting portion of a liquid-cooled magnetron 10 according to the first embodiment of the present invention.
This embodiment is characterized in that a waterproof elastic member 30 is provided between the liquid-cooled magnetron 10 and the waveguide launcher 22.
In addition, since it is the same structure as the attachment means shown in FIG. 9, the same code | symbol is attached | subjected about the same member and the description is abbreviate | omitted.

The elastic member 30 provided in the present embodiment is formed as an elastic frame having a larger frame diameter than the gasket 26 so as to include the gasket 26 of the liquid-cooled magnetron 10.
The elastic member 30 can be composed of, for example, silicone rubber.

In the present embodiment, the liquid-cooled magnetron 10 is held with both hands in the same manner as the attachment means shown in FIG. 9, the antenna dome 13 is aligned with the antenna hole 23 of the waveguide launcher 22, and the stud screw 21 is attached. The liquid-cooled magnetron 10 is placed on the upper surface of the waveguide launcher 22 by being inserted into the mounting hole 24 of the waveguide launcher 22.
Thereafter, the nud is screwed into the stud screw 21 and screwed to fix the liquid-cooled magnetron 10 to the waveguide launcher 22.

  When the liquid-cooled magnetron 10 is attached as described above, the elastic member 30 is disposed on the outer side of the flange 25 of the waveguide launcher 22 prior to attachment, and the liquid-cooled magnetron 10 is guided. By attaching to the tube launcher 22, the elastic member 30 is sandwiched by a gap 27 between the liquid-cooled magnetron 10 and the waveguide launcher 22.

  In the first embodiment configured as described above, even if water generated by condensation from the outer surface of the liquid-cooled magnetron 10 flows down to the upper surface of the waveguide launcher 22, water is cut off by the elastic member 30. Water entering the waveguide launcher 22 through is reliably prevented.

FIG. 2 is a partial sectional view similar to FIG. 1 shown as the second embodiment.
The second embodiment is characterized in that a concave groove 31 for partially fitting the elastic member 30 described above is provided at an outer portion of the flange 25 of the waveguide launcher 22.

  In the present embodiment, since the elastic member 30 is fitted into the concave groove 31 prior to the mounting of the liquid cooling magnetron 10, the elastic member 30 does not move during the mounting process of the liquid cooling magnetron 10, A certain waterproof effect can be obtained.

FIG. 3 is a partial cross-sectional view of a conventional liquid-cooled magnetron 10.
The same members as those in the liquid-cooled magnetron 10 shown in FIG.
In this conventional example, the outer diameter of the intermediate ring 19 is set smaller than the outer diameter of the permanent magnet 17 and larger than the diameter of the anode end surface 11 a, and the inner diameter of the intermediate ring 19 is substantially the same as the inner diameter of the permanent magnet 17. As a result, the magnetic force from the permanent magnet 17 is efficiently guided into the magnetron.

  Here, as for the magnetic force of the permanent magnet 17, in order to minimize the influence of the temperature of the permanent magnet 17 on the anode temperature rise, the intermediate ring 19 is generally provided with a protrusion 19a.

  However, since the water channel is formed by such a protrusion 19a, an elastic member 32 is provided between the intermediate ring 19 and the anode end face 11a, and the intermediate ring 19 and the permanent magnet as shown in the third embodiment in FIG. It is preferable that an elastic member 33 is provided between 17.

In addition, if the flatness between the permanent magnet 17 and the yoke 15 is poor and there is a gap, this gap becomes a water channel. Therefore, it is preferable to provide an elastic member 34 that blocks this water channel.
The elastic members 32, 33, and 34 can be made of silicone rubber or the like. In addition, the elastic members 32, 33, and 34 do not necessarily have to be provided, and at least one or more members may be provided. Good.

  In the said 3rd Embodiment, the water which flows out from the inside of the liquid cooling magnetron 10 by condensation can be prevented, and the water which permeates into the waveguide launcher 22 from the gasket 26 can be waterproofed.

  The present invention can be effectively applied to a magnetron application apparatus in which a liquid-cooled magnetron is mounted on the upper surface of a waveguide launcher with the antenna dome facing downward.

It is the fragmentary sectional view which showed the attachment state of the liquid cooling magnetron which is 1st Embodiment. It is sectional drawing similar to FIG. 1 shown as 2nd Embodiment. It is a fragmentary sectional view of the conventional liquid cooling magnetron for demonstrating 3rd Embodiment. It is the fragmentary sectional view similar to FIG. 3 shown as 3rd Embodiment. It is a side view of the liquid cooling magnetron shown as a prior art example. It is a perspective view of the waveguide launcher which installs a liquid cooling magnetron. It is sectional drawing which cut | disconnected and showed the above-mentioned waveguide launcher to the pipe-axis direction. It is a fragmentary sectional view which shows the conventional attachment state which attached the liquid cooling magnetron to the lower surface of the waveguide launcher. It is a fragmentary sectional view which shows the conventional attachment state which attached the liquid cooling magnetron to the upper surface of the waveguide launcher.

Explanation of symbols

10 Liquid-cooled magnetron 11 Anode 11a Anode end face 13 Antenna dome 14 Jacket 15, 16 Yoke 17, 18 Permanent magnet 19, 20 Intermediate ring 22 Waveguide launcher 25 鍔 26 Gasket 30 Elastic member 31 Recessed groove 32, 33, 34 Elastic Element

Claims (4)

In a liquid-cooled magnetron having a metal fine wire mesh gasket at the base of the antenna dome,
An elastic member having a larger frame diameter than the gasket is provided,
The elastic member is arranged around an antenna dome inserted from above the waveguide launcher, and the liquid cooling magnetron is attached to the upper surface of the waveguide launcher with the elastic member interposed for waterproofing. Waterproofing device for mounting liquid-cooled magnetron. The waterproof device for mounting according to claim 1,
An apparatus for attaching and waterproofing a liquid-cooled magnetron, wherein a concave groove for fitting the elastic frame is provided on the upper surface of a waveguide launcher around the antenna dome. The waterproof device for mounting according to claim 1,
Contact surface or gap between the antenna side anode end face and the antenna side intermediate ring,
Contact surface or gap between antenna side intermediate ring and antenna side permanent magnet,
Contact surface or gap between antenna side permanent magnet and antenna side yoke,
A waterproof apparatus for mounting a liquid-cooled magnetron, wherein an elastic member for waterproofing is provided on at least one of the contact surfaces or gaps. At least on the antenna side of the liquid-cooled magnetron,
Contact surface or gap between the anode end face and the antenna-side intermediate ring,
Contact surface or gap between the antenna-side intermediate ring and the antenna-side permanent magnet,
Contact surface or gap between antenna side permanent magnet and antenna side yoke,
Provide an elastic member for waterproofing on at least one contact surface or gap of
A liquid-cooled magnetron configured to prevent water flowing out of the gasket through the contact surface or gap.

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