JP2008002560A - Sealing structure - Google Patents

Sealing structure Download PDF

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Publication number
JP2008002560A
JP2008002560A JP2006172231A JP2006172231A JP2008002560A JP 2008002560 A JP2008002560 A JP 2008002560A JP 2006172231 A JP2006172231 A JP 2006172231A JP 2006172231 A JP2006172231 A JP 2006172231A JP 2008002560 A JP2008002560 A JP 2008002560A
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Japan
Prior art keywords
ring
annular groove
seal ring
side wall
backup ring
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JP2006172231A
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JP4819592B2 (en
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Yasushi Kano
康司 加納
Atsuyuki Kawasaki
敬幸 川崎
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Mitsubishi Cable Industries Ltd
Mitsubishi Materials Corp
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Mitsubishi Cable Industries Ltd
Mitsubishi Materials Corp
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Priority to JP2006172231A priority Critical patent/JP4819592B2/en
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a sealing structure with a seal ring and a backup ring independently exchangeable, for preventing the backup ring from being largely protruded from an annular groove with thermal expansion. <P>SOLUTION: The sealing structure comprises: the annular groove 9 formed on the outer peripheral face of a fitting portion 8 to be detachably fitted into a cylindrical portion of a high-temperature and high-pressure treatment device; the seal ring 1 mounted in opposition to a first side wall face 13 on the high pressure side of the annular groove 9 for sealing; and the resin backup ring 3 mounted in opposition to a second side wall face 14 on the low pressure side of the annular groove 9 for supporting a back face 4 of the seal ring 1. On a supporting face 5 of the backup ring 3 in contact with the back face 4, an annular uprising portion 6 is formed to be swollen to the side of the seal ring 1. Besides, a stepped face 11 is formed on the back face 4 in a mounted and non-compressed condition for engaging with an outer diameter peripheral face 10 of the annular uprising portion 6. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、高温高圧処理装置に使用される高圧ガス等の流体物質を密封する密封構造に関する。   The present invention relates to a sealing structure for sealing a fluid substance such as a high-pressure gas used in a high-temperature high-pressure processing apparatus.

高温高圧状態のガス等(流体物質)を封入する高温高圧処理装置に於て、その流体物質を封入する高圧容器と、開閉用の蓋部材との間(間隙)を密封するために、フッ素樹脂等から成るシール部材が用いられている。
具体的には、図8に示すように、蓋部材40は高圧容器41の開口部近傍の円筒壁部42に着脱自在に内嵌される嵌合部43を有し、勘合部43の外周面に形成された環状溝44に、金属バネ45を内装した密封用のシールリング46が嵌め込まれている。さらに、高圧時にシールリング46が開口円筒壁部42と嵌合部43との(低圧側の)隙間S側へはみ出さないように支持するバックアップリング47が環状溝44に装着されている。
In a high-temperature and high-pressure treatment device that encloses high-temperature and high-pressure gas or the like (fluid substance), a fluororesin is used to seal the gap (gap) between the high-pressure container enclosing the fluid substance and the lid member for opening and closing. The sealing member which consists of etc. is used.
Specifically, as shown in FIG. 8, the lid member 40 has a fitting portion 43 that is detachably fitted into a cylindrical wall portion 42 in the vicinity of the opening of the high-pressure vessel 41, and the outer peripheral surface of the fitting portion 43. A sealing ring 46 for sealing, in which a metal spring 45 is housed, is fitted in the annular groove 44 formed in the above. Further, a backup ring 47 is mounted in the annular groove 44 to support the seal ring 46 so that it does not protrude to the gap S side (on the low pressure side) between the open cylindrical wall portion 42 and the fitting portion 43 at high pressure.

高温高圧処理後、高温状態のまま高圧容器41から蓋部材40を外して開放した場合、上記バックアップリング47は大径サイズのフッ素樹脂製リングであるので、図9に示すように、熱膨張により外径方向に拡大し環状溝44から大きくはみ出す。そして、この状態では、再び蓋部材40を嵌め込むのは困難であり、無理に嵌め込むとはみ出たバックアップリング47が高圧容器41と蓋部材40との間に挟まれ損傷するといった問題があった。   After the high-temperature and high-pressure treatment, when the lid member 40 is removed from the high-pressure vessel 41 and opened in a high-temperature state, the backup ring 47 is a large-diameter size fluororesin ring. Therefore, as shown in FIG. It expands in the outer diameter direction and protrudes greatly from the annular groove 44. In this state, it is difficult to fit the lid member 40 again, and there is a problem that the backup ring 47 that protrudes when the lid member 40 is forcibly fitted is sandwiched between the high-pressure vessel 41 and the lid member 40 and is damaged. .

また、従来の密封構造には、バックアップリングとシールリングとを接着し、バックアップリングが熱膨張しても、シールリングにてバックアップリングのはみ出しを抑制することができるものがある(例えば、特許文献1参照)。
特開2006−57834号公報
In addition, there is a conventional sealing structure in which a backup ring and a seal ring are bonded, and even if the backup ring is thermally expanded, the seal ring can prevent the backup ring from protruding (for example, Patent Documents). 1).
JP 2006-57834 A

しかし、バックアップリングとシールリングとを接着した従来のシール部材では、バックアップリングとシールリングのうちどちらか一方が劣化した場合、他方が未だ使用可能であっても一緒に交換しなければならない欠点があった。   However, in the conventional seal member in which the backup ring and the seal ring are bonded, if one of the backup ring and the seal ring deteriorates, there is a disadvantage that it must be replaced together even if the other is still usable. there were.

そこで、本発明は、熱膨張によってバックアップリングが環状溝から大きくはみ出すのを防止すると共に、シールリングとバックアップリングとを単独で交換することができる密封構造を提供することを目的とする。   Therefore, an object of the present invention is to provide a sealing structure in which the backup ring is prevented from greatly protruding from the annular groove due to thermal expansion, and the seal ring and the backup ring can be replaced independently.

上記目的を達成するために、本発明に係る密封構造は、高温高圧処理装置の筒状部に着脱自在に内嵌される嵌合部の外周面に形成された環状溝と、該環状溝の高圧側の第1側壁面に対向して装着される密封用のシールリングと、上記環状溝の低圧側の第2側壁面に対向して装着されると共に上記シールリングの背面を支持する樹脂製のバックアップリングと、を備えた密封構造に於て、上記背面と接触する上記バックアップリングの受け面に上記シールリング側へ膨出する環状凸隆部を形成し、装着未圧縮状態で上記背面に該環状凸隆部の外径周面部と係合する段差面を形成したものである。   In order to achieve the above object, a sealing structure according to the present invention includes an annular groove formed on an outer peripheral surface of a fitting portion that is detachably fitted in a cylindrical portion of a high-temperature and high-pressure processing apparatus, and the annular groove Sealing seal ring mounted facing the first side wall surface on the high pressure side, and resin made to mount facing the second side wall surface on the low pressure side of the annular groove and supporting the back surface of the seal ring And a back-up ring, and an annular convex bulge bulging to the seal ring side is formed on the receiving surface of the backup ring that comes into contact with the back surface. A stepped surface that engages with the outer peripheral surface portion of the annular convex ridge is formed.

また、上記シールリングは上記第1側壁面側へ開口する凹溝を有する横断面U形に形成され、かつ、該凹溝内に金属製弾発部材を有するものでもよい。   The seal ring may be formed in a U-shaped cross section having a groove that opens to the first side wall surface side, and may have a metal resilient member in the groove.

また、高温高圧処理装置の筒状部に着脱自在に内嵌される嵌合部の外周面に形成された環状溝と、該環状溝の高圧側の第1側壁面に対向して装着される密封用のシールリングと、上記環状溝の低圧側の第2側壁面に対向して装着されると共に上記シールリングの背面を支持する樹脂製のバックアップリングと、を備えた密封構造に於て、上記第2側壁面と接触する上記バックアップリングの当接面に該第2側壁面へ膨出する環状凸隆部を形成し、装着未圧縮状態で上記第2側壁面に該環状凸隆部の外径周面部と係合する段差面を形成したものである。   Further, the annular groove formed on the outer peripheral surface of the fitting portion that is detachably fitted in the cylindrical portion of the high-temperature and high-pressure processing apparatus, and the first side wall surface on the high-pressure side of the annular groove are mounted to face each other. In a sealing structure comprising: a sealing ring for sealing; and a resin backup ring mounted opposite to the second side wall surface on the low pressure side of the annular groove and supporting the back surface of the sealing ring. An annular bulge that bulges to the second sidewall surface is formed on the contact surface of the backup ring that contacts the second sidewall surface, and the annular ridge is formed on the second sidewall surface in an uncompressed state. A step surface that engages with the outer peripheral surface portion is formed.

本発明は、次のような著大な効果を奏する。
本発明に係る密封構造によれば、高温状態で筒状部から嵌合部を引き抜いた場合に、熱膨張によって外径方向に拡大しようとするバックアップリングをシールリング(又は第2側壁面)の段差面にて係止して、その外径方向の拡大を抑制することができる。そして、バックアップリングが環状溝から大きく突出する(はみ出す)のを防止することができる。従って、高温状態のままで再度嵌合部を筒状部内へ挿入する際に、バックアップリングが嵌合部と筒状部の間に挟まって破損する虞がなくなり、嵌合部を筒状部内へスムーズに挿入して嵌め込むことができる。
さらに、シールリングとバックアップリングが分離可能であるので、それぞれ単独で交換することができる。つまり、シールリングとバックアップリングを接着した従来のシール部材のように、一方の使用期間が早く劣化する他方の製品寿命に制限されることがなく、使用コスト面に関して優れたものである。
The present invention has the following remarkable effects.
According to the sealing structure according to the present invention, when the fitting portion is pulled out from the cylindrical portion in a high temperature state, the backup ring to be expanded in the outer diameter direction by thermal expansion is provided on the seal ring (or the second side wall surface). Engagement at the step surface can suppress expansion in the outer diameter direction. And it can prevent that a backup ring protrudes greatly from an annular groove. Therefore, when the fitting portion is inserted into the cylindrical portion again in a high temperature state, there is no possibility that the backup ring is sandwiched between the fitting portion and the cylindrical portion and damaged, and the fitting portion is moved into the cylindrical portion. Can be inserted and fitted smoothly.
Furthermore, since the seal ring and the backup ring can be separated, they can be replaced independently. That is, unlike the conventional seal member in which the seal ring and the backup ring are bonded, the service life of one of them is not limited to the other product life that deteriorates quickly, and the use cost is excellent.

以下、実施の形態を示す図面に基づき本発明を詳説する。
本発明は、高温高圧処理装置に使用される高圧ガス等の流体物質を密封する密封構造に係るものであり、図1に示すように、高温高圧処理装置の筒状部7の内周面と、筒状部7に着脱自在に内嵌される嵌合部8の外周面との間(間隙)を密封するものである。なお、図1に於て上方が外周側、下方が内周側であり、一点鎖線は、筒状部7及び嵌合部8の軸心を示す。
Hereinafter, the present invention will be described in detail with reference to the drawings illustrating embodiments.
The present invention relates to a sealing structure that seals a fluid substance such as a high-pressure gas used in a high-temperature and high-pressure treatment apparatus. As shown in FIG. The space (gap) between the outer peripheral surface of the fitting portion 8 that is detachably fitted in the cylindrical portion 7 is sealed. In FIG. 1, the upper side is the outer peripheral side and the lower side is the inner peripheral side, and the alternate long and short dash line indicates the axis of the cylindrical portion 7 and the fitting portion 8.

図1に於て、20は高温高圧状態のガス等(流体物質)を封入する高温高圧処理装置の高圧容器であり、上記筒状部7は、例えばこの高圧容器20の開口部近傍の円筒壁部である。また、21は高圧容器20を施蓋する蓋部材であり、蓋部材21は円筒壁部7に内嵌される上記嵌合部8を有する。嵌合部8は、先端縁に周状の切欠部17を有する軸部18と、軸部18の先端にボルト等で固着された円盤部19とを、有している。即ち、嵌合部8の外周面には、切欠部17と円盤部19の基端面の外縁部とから成る周状の環状溝9が形成されている。   In FIG. 1, reference numeral 20 denotes a high-pressure vessel of a high-temperature and high-pressure processing apparatus that encloses a gas or the like (fluid substance) in a high-temperature and high-pressure state. The cylindrical portion 7 is, for example, a cylindrical wall near the opening of the high-pressure vessel 20. Part. Reference numeral 21 denotes a lid member that covers the high-pressure vessel 20, and the lid member 21 has the fitting portion 8 that is fitted into the cylindrical wall portion 7. The fitting portion 8 includes a shaft portion 18 having a circumferential cutout portion 17 at the tip edge, and a disk portion 19 fixed to the tip of the shaft portion 18 with a bolt or the like. That is, on the outer peripheral surface of the fitting portion 8, a circumferential annular groove 9 composed of a notch portion 17 and an outer edge portion of the base end surface of the disk portion 19 is formed.

環状溝9内には、横断面U形の密封用のシールリング1が、環状溝9の高圧側(図に於て左側)Hの第1側壁面13に対向して配設され、シールリング1の第1側壁面13側に開口する凹溝16には、内径・外径方向に張り力を与える金属製弾発部材(板バネ)2が内装されている。さらに、シールリング1の背面4を支持する(フッ素樹脂等の)樹脂製のバックアップリング3が、環状溝9の低圧側(図に於て右側)Lの第2側壁面14に対向して配設されている。また、シールリング1及びバックアップリング3は、例えば径寸法が 400mm〜700mm ほどの大径のリングである。なお、図例ではシールリング1はフッ素樹脂製である。   A sealing ring 1 for sealing having a U-shaped cross section is disposed in the annular groove 9 so as to face the first side wall surface 13 on the high pressure side (left side in the figure) H of the annular groove 9. In the concave groove 16 opened to the first side wall surface 13 side, a metal elastic member (plate spring) 2 that applies tension in the inner diameter / outer diameter direction is housed. Further, a resin-made backup ring 3 (such as a fluororesin) that supports the back surface 4 of the seal ring 1 is arranged to face the second side wall surface 14 on the low pressure side (right side in the drawing) L of the annular groove 9. It is installed. The seal ring 1 and the backup ring 3 are large-diameter rings having a diameter of, for example, 400 mm to 700 mm. In the illustrated example, the seal ring 1 is made of a fluororesin.

このように、図1は、蓋部材21の嵌合部8が高圧容器20の円筒壁部7内に嵌め込まれた状態、言い換えれば、環状溝9内に装着されたシールリング1(及び弾発部材2)・バックアップリング3とが内径方向に押圧された圧縮状態を示す。   1 shows a state in which the fitting portion 8 of the lid member 21 is fitted in the cylindrical wall portion 7 of the high-pressure vessel 20, in other words, the seal ring 1 (and the impact) mounted in the annular groove 9. Member 2)-The compressed state in which the backup ring 3 is pressed in the inner diameter direction is shown.

図2は、環状溝9内にシールリング1(及び弾発部材2)・バックアップリング3が装着されかつ嵌合部8が円筒壁部7内に嵌め込まれていない状態、言い換えれば、シールリング1(及び弾発部材2)・バックアップリング3の装着未圧縮状態を示す。   FIG. 2 shows a state in which the seal ring 1 (and the elastic member 2) and the backup ring 3 are mounted in the annular groove 9 and the fitting portion 8 is not fitted in the cylindrical wall portion 7, in other words, the seal ring 1 (And the elastic member 2) The backup ring 3 is shown in an uncompressed state.

図2に於て、シールリング1の背面4と接触するバックアップリング3の受け面5には、シールリング1側へ膨出する環状凸隆部6が形成されている。また、シールリング1の背面4に段差面11を形成し、上記装着未圧縮状態でこの段差面11と環状凸隆部6の外径周面部10とが係合するようになっている。   In FIG. 2, an annular ridge 6 that bulges toward the seal ring 1 is formed on the receiving surface 5 of the backup ring 3 that contacts the back surface 4 of the seal ring 1. Further, a step surface 11 is formed on the back surface 4 of the seal ring 1 so that the step surface 11 and the outer peripheral surface portion 10 of the annular ridge 6 are engaged in the uncompressed state.

環状凸隆部6の突出寸法A1 は、環状溝9内でシールリング1とバックアップリング3とが溝幅方向に位置ずれできる移動可能寸法(隙間)B1 より大きく設定されている。突出寸法A1 が移動可能寸法B1 以下の場合は、高温状態で嵌合部8を円筒壁部7から引き抜き取り外した場合に、係止凸部22と環状凸隆部6とが外れて、バックアップリング3が熱膨張により環状溝9から大きくはみ出るからである。 The projecting dimension A 1 of the annular convex ridge 6 is set larger than the movable dimension (gap) B 1 in which the seal ring 1 and the backup ring 3 can be displaced in the groove width direction within the annular groove 9. When the protruding dimension A 1 is less than the movable dimension B 1 , when the fitting part 8 is pulled out and removed from the cylindrical wall part 7 at a high temperature, the locking convex part 22 and the annular convex ridge part 6 come off, This is because the backup ring 3 protrudes greatly from the annular groove 9 due to thermal expansion.

図3は図1の上記圧縮状態の拡大図であり、シールリング1とバックアップリング3は、それぞれ円筒壁部7の内周面と環状溝9の底面24とに圧着している状態を示す。   FIG. 3 is an enlarged view of the compressed state of FIG. 1, and shows a state in which the seal ring 1 and the backup ring 3 are respectively crimped to the inner peripheral surface of the cylindrical wall portion 7 and the bottom surface 24 of the annular groove 9.

図4はシールリング1と弾発部材2の環状溝9への未装着状態を示し、図5はバックアップリング3の未装着状態を示す。
図4に於て、シールリング1は、凹溝16を有するU字状シール部25と、シール部25の基端面の外半分(図の上半分)に一体に突設された横断面略矩形の係止凸部22とを、有している。即ち、係止凸部22の内周面にて上記段差面11が形成される。
4 shows a state where the seal ring 1 and the elastic member 2 are not attached to the annular groove 9, and FIG. 5 shows a state where the backup ring 3 is not attached.
In FIG. 4, the seal ring 1 has a U-shaped seal portion 25 having a concave groove 16 and a substantially rectangular cross section projecting integrally on the outer half (upper half) of the base end surface of the seal portion 25. And a locking projection 22. That is, the step surface 11 is formed on the inner peripheral surface of the locking projection 22.

さらに、U字状シール部25の先端には三角山形の内リップ部26と外リップ部27とを有している。また、凹溝16に内装された横断面U形乃至V形の弾発部材2は、多数の分岐状小板バネ突片又はコ字折曲板バネ片から成るステンレス鋼等の金属バネである。   Further, a triangular chevron-shaped inner lip portion 26 and an outer lip portion 27 are provided at the tip of the U-shaped seal portion 25. The elastic member 2 having a U-shaped to V-shaped cross section housed in the concave groove 16 is a metal spring such as stainless steel made up of a number of branched small plate spring protrusions or U-shaped bent plate spring pieces. .

図5に於て、バックアップリング3は、横断面矩形のリング本体部28と、その先端面の内半分(図の下半分)に一体に突設された横断面略矩形の環状凸隆部6とを、有している。   In FIG. 5, the backup ring 3 includes a ring main body 28 having a rectangular cross section and an annular ridge 6 having a substantially rectangular cross section protruding integrally with the inner half (the lower half of the figure) of the front end surface. And have.

また、図1に戻って、円筒壁部7の内周開口縁には周状の切欠部29が形成されている。そして、切欠部29には内径・外径方向に張り力を与える金属製の板バネ30が内装されたU形シール31が装着されている。また、嵌合部8を円筒壁部7内にスムーズに嵌め込めるように、シールリング1・バックアップリング3・U形シール31をガイドするテーパ状ガイド面32,33が、円筒壁部7の内周面と嵌合部8の外周面にそれぞれ設けられている。   Returning to FIG. 1, a circumferential cutout 29 is formed at the inner peripheral opening edge of the cylindrical wall portion 7. A U-shaped seal 31 is mounted in the notch 29. The U-shaped seal 31 is internally provided with a metal leaf spring 30 that gives tension in the inner and outer diameter directions. Further, tapered guide surfaces 32 and 33 for guiding the seal ring 1, the backup ring 3, and the U-shaped seal 31 are provided in the cylindrical wall portion 7 so that the fitting portion 8 can be smoothly fitted into the cylindrical wall portion 7. It is provided on the peripheral surface and the outer peripheral surface of the fitting portion 8 respectively.

次に、図6と図7に示すのは、本発明の密封構造の他の実施の形態であり、図6は装着未圧縮状態を示し、図7は圧縮状態を示す。
図6に於て、8は円筒壁部(筒状部)7に着脱自在に内嵌される嵌合部であり(図1参照)、嵌合部8はその外周面に環状溝9を有する。環状溝9の先端側(高圧側H)の第1側壁面13に対向して横断面U形のシールリング1が装着され、シールリング1の凹溝16に金属製弾発部材2が内装されている。さらに、環状溝9の基端側(低圧側L)の第2側壁面14に対向して樹脂製のバックアップリング3が装着されている。
Next, FIG. 6 and FIG. 7 show other embodiments of the sealing structure of the present invention, FIG. 6 shows a non-compressed state, and FIG. 7 shows a compressed state.
In FIG. 6, reference numeral 8 denotes a fitting portion that is detachably fitted to a cylindrical wall portion (tubular portion) 7 (see FIG. 1), and the fitting portion 8 has an annular groove 9 on its outer peripheral surface. . A seal ring 1 having a U-shaped cross section is mounted facing the first side wall surface 13 on the front end side (high-pressure side H) of the annular groove 9, and a metal elastic member 2 is housed in the concave groove 16 of the seal ring 1. ing. Further, a resin-made backup ring 3 is mounted facing the second side wall surface 14 on the base end side (low pressure side L) of the annular groove 9.

第2側壁面14と接触するバックアップリング3の当接面12には、第2側壁面14へ膨出する環状凸隆部60が形成され、図6の装着未圧縮状態で、第2側壁面14には環状凸隆部60の外径周面部61と係合する段差面15が形成されている。   The contact surface 12 of the backup ring 3 that is in contact with the second side wall surface 14 is formed with an annular convex ridge 60 that bulges to the second side wall surface 14, and the second side wall surface in the uncompressed state of FIG. 14 is formed with a step surface 15 that engages with the outer circumferential surface portion 61 of the annular convex ridge 60.

さらに詳しくは、バックアップリング3は、横断面矩形のリング本体部28と、その基端面の内半分(図6の下半分)に一体に突設された横断面矩形の環状凸隆部60とを、有する。また、環状溝9は第2側壁面14側の開口縁部を第1側壁面13側へ突出させて形成した係止突条部62を有し、係止突条部62の内周面が上記段差面15となる。また、シールリング1の背面4と、それを支持するバックアップリング3の受け面5は、それぞれ平坦面(ストレート面)状に形成されている。   More specifically, the backup ring 3 includes a ring main body portion 28 having a rectangular cross section and an annular ridge 60 having a rectangular cross section projecting integrally with the inner half (the lower half of FIG. 6) of the base end face. Have. The annular groove 9 has a locking ridge 62 formed by projecting the opening edge on the second side wall surface 14 side toward the first side wall surface 13, and the inner peripheral surface of the locking ridge 62 is The step surface 15 is formed. The back surface 4 of the seal ring 1 and the receiving surface 5 of the backup ring 3 that supports the seal ring 1 are each formed in a flat surface (straight surface).

環状凸隆部60の突出寸法A2 は、環状溝9内でシールリング1とバックアップリング3とが溝幅方向に位置ずれできる移動可能寸法(隙間)B2 より大きく設定されている。突出寸法A2 が移動可能寸法B2 以下の場合は、高温状態で嵌合部8を円筒壁部7から引き抜き取り外した場合に、係止突条部62と環状凸隆部60とが外れて、バックアップリング3が熱膨張により環状溝9から大きくはみ出るからである。
なお、図6と図7に於て、上記図1〜図3と同一の符号は図1〜図3と同様の構成であるので説明を省略する。
The projecting dimension A 2 of the annular convex ridge 60 is set larger than the movable dimension (gap) B 2 in which the seal ring 1 and the backup ring 3 can be displaced in the groove width direction in the annular groove 9. When the protruding dimension A 2 is less than or equal to the movable dimension B 2 , when the fitting portion 8 is pulled out and removed from the cylindrical wall portion 7 in a high temperature state, the locking protrusion 62 and the annular ridge 60 are disengaged. This is because the backup ring 3 protrudes greatly from the annular groove 9 due to thermal expansion.
6 and 7, the same reference numerals as those in FIGS. 1 to 3 have the same configurations as those in FIGS.

本発明の密封構造は設計変更自由であり、例えば、図2に於て、環状凸隆部6の表面と係止凸部22の表面をそれぞれ弧状(凸曲面状)に形成して、シールリング1とバックアップリング3との各々の合わせ面(背面4と受け面5)をS字状に形成してもよい。   The sealing structure of the present invention can be freely changed in design. For example, in FIG. 2, the surface of the annular convex ridge 6 and the surface of the locking convex 22 are formed in an arc shape (convex curved surface), respectively, and the seal ring The mating surfaces (back surface 4 and receiving surface 5) of 1 and the backup ring 3 may be formed in an S shape.

また、図示省略するが、シールリング1は金属製の部材(金属製弾発部材2)と組み合わされていない(横断面U形以外の断面形状の)ものであってもよい。即ち、シールリング1が線膨張係数の小さい樹脂等で形成され、バックアップリング3の熱膨張による外径方向の拡大を抑制することが可能な強度を有するものであればよい。   Although not shown, the seal ring 1 may not be combined with a metal member (metal bullet member 2) (having a cross-sectional shape other than the U-shaped cross section). That is, the seal ring 1 may be formed of a resin having a small linear expansion coefficient, and has a strength capable of suppressing the expansion in the outer diameter direction due to the thermal expansion of the backup ring 3.

バックアップリング3の素材としては、フッ素樹脂以外に、ポリアセタール・ポリアミド・ポリエーテルエーテルケトン等公知のものを適用可能である。   As the material of the backup ring 3, known materials such as polyacetal, polyamide, and polyetheretherketone can be used in addition to the fluororesin.

また、高温状態で円筒壁部7から嵌合部8を引き抜いた状態、つまり高温状態の装着未圧縮状態に於て、環状凸隆部6が係止凸部22に当接してバックアップリング3が環状溝9から大きくはみ出すのを防止することができれば、常温(低温)状態に於て環状凸隆部6の外径周面部10と係止凸部22の段差面11との間に多少隙間があっても構わない。このことは、図6と図7に示す環状凸隆部60と係止突条部62との関係についても同様であるので説明を省略する。
なお、図2及び図6の装着未圧縮状態は、高温状態となる前の常温(低温)状態での装着未圧縮状態を示している。
Further, in a state in which the fitting portion 8 is pulled out from the cylindrical wall portion 7 in a high temperature state, that is, in an uncompressed state in the high temperature state, the annular convex ridge portion 6 abuts on the locking convex portion 22 and the backup ring 3 is If it can be prevented from protruding from the annular groove 9, there will be a slight gap between the outer circumferential surface portion 10 of the annular convex ridge 6 and the step surface 11 of the locking convex portion 22 in a normal temperature (low temperature) state. It does not matter. This also applies to the relationship between the annular ridge 60 and the locking protrusion 62 shown in FIGS.
Note that the uncompressed state in FIGS. 2 and 6 indicates the uncompressed state in the normal temperature (low temperature) state before the high temperature state.

上述した本発明の密封構造の使用方法(作用)について説明する。
まず、図2に示す如くバックアップリング3・弾発部材2が内装されたシールリング1を環状溝9に装着した嵌合部8を、円筒壁部7内へ挿入して施蓋する。このとき、シールリング1は、円筒壁部7の内周面に形成されたガイド面32(図1参照)に沿って摺動しつつ内径方向へ圧縮される。また、バックアップリング3の環状凸隆部6とシールリング1の係止凸部22とが係合しているので、シールリング1の内径方向の移動に伴って、バックアップリング3も一緒に内径方向へ移動する。そして、シールリング1(及び弾発部材2)とバックアップリング3は円筒壁部7の内周面にて圧縮された圧縮状態となる(図1又は図3参照)。
The use method (action) of the above-described sealing structure of the present invention will be described.
First, as shown in FIG. 2, the fitting portion 8 in which the seal ring 1 in which the backup ring 3 and the resilient member 2 are housed is mounted in the annular groove 9 is inserted into the cylindrical wall portion 7 and covered. At this time, the seal ring 1 is compressed in the inner diameter direction while sliding along the guide surface 32 (see FIG. 1) formed on the inner peripheral surface of the cylindrical wall portion 7. Further, since the annular convex ridge 6 of the backup ring 3 and the engaging convex portion 22 of the seal ring 1 are engaged with each other, the backup ring 3 also moves in the inner diameter direction along with the movement of the seal ring 1 in the inner diameter direction. Move to. Then, the seal ring 1 (and the elastic member 2) and the backup ring 3 are compressed on the inner peripheral surface of the cylindrical wall portion 7 (see FIG. 1 or FIG. 3).

上記のように施蓋した高圧容器20内で高温高圧処理後、高温状態(例えば200 ℃)のまま蓋部材21の嵌合部8を円筒壁部7から引き抜いて取り外す。圧縮状態から解放された高温状態のバックアップリング3は熱膨張により外径方向に拡大しようとするが、環状凸隆部6(外径周面部10)と係止凸部22(段差面11)とが当接して係止されているので、シールリング1にてバックアップリング3の外径方向の拡大を抑制して環状溝9から大きく突出する(はみ出す)のを防止する。   After the high-temperature and high-pressure treatment in the high-pressure vessel 20 covered as described above, the fitting portion 8 of the lid member 21 is pulled out and removed from the cylindrical wall portion 7 in a high-temperature state (for example, 200 ° C.). The high-temperature backup ring 3 released from the compressed state tries to expand in the outer diameter direction due to thermal expansion, but the annular convex ridge 6 (outer diameter peripheral surface portion 10) and the locking convex portion 22 (step surface 11) Since they are in contact and locked, the seal ring 1 suppresses the expansion of the backup ring 3 in the outer diameter direction and prevents the protrusion from protruding greatly from the annular groove 9.

また、図6と図7に示す他の実施の形態の場合は、上記と同様に施蓋し高温高圧処理した後、高温状態のまま円筒壁部7から嵌合部8を引き抜くと、バックアップリング3は熱膨張により外径方向に拡大して環状溝9から大きくはみ出そうとするが、環状凸隆部60(外径周面部61)と係止突条部62(段差面15)とが当接して係止されているので、係止突条部62にてバックアップリング3の外径方向の拡大を抑止して環状溝9から大きく突出する(はみ出す)のを防止する。   In the case of the other embodiments shown in FIGS. 6 and 7, after the lid is applied and subjected to the high-temperature and high-pressure treatment in the same manner as described above, when the fitting portion 8 is pulled out from the cylindrical wall portion 7 in the high-temperature state, the backup ring 3 expands in the outer diameter direction due to thermal expansion and tends to protrude greatly from the annular groove 9, but the annular ridge 60 (outer diameter circumferential surface portion 61) and the locking protrusion 62 (step surface 15) Since they are in contact and locked, the locking protrusion 62 prevents the backup ring 3 from expanding in the outer diameter direction and prevents the protrusion from protruding greatly from the annular groove 9.

以上のように、本発明の密封構造は、高温高圧処理装置の筒状部7に着脱自在に内嵌される嵌合部8の外周面に形成された環状溝9と、環状溝9の高圧側Hの第1側壁面13に対向して装着される密封用のシールリング1と、環状溝9の低圧側Lの第2側壁面14に対向して装着されると共にシールリング1の背面4を支持する樹脂製のバックアップリング3と、を備えた密封構造に於て、背面4と接触するバックアップリング3の受け面5にシールリング1側へ膨出する環状凸隆部6を形成し、装着未圧縮状態で背面4に環状凸隆部6の外径周面部10と係合する段差面11を形成したので、高温状態で筒状部7から嵌合部8を引き抜いた場合に、熱膨張によって外径方向へ拡大しようとするバックアップリング3をシールリング1の段差面11にて係止して、その外径方向の拡大を抑制することができる。そして、バックアップリング3が環状溝9から大きく突出する(はみ出す)のを防止することができる。従って、高温状態のままで再度嵌合部8を筒状部7内へ挿入する際に、バックアップリング3が嵌合部8と筒状部7の間に挟まって破損する虞がなくなり、嵌合部8を筒状部7内へスムーズに挿入して嵌め込むことができる。
さらに、シールリング1とバックアップリング3が分離可能であるので、それぞれ単独で交換することができる。つまり、シールリング1とバックアップリング3を接着した従来のシール部材のように、一方の使用期間が早く劣化する他方の製品寿命に制限されることがなく、使用コスト面に関して優れたものである。
As described above, the sealing structure of the present invention includes the annular groove 9 formed on the outer peripheral surface of the fitting portion 8 that is detachably fitted in the cylindrical portion 7 of the high-temperature and high-pressure processing apparatus, and the high-pressure of the annular groove 9. A sealing ring 1 for sealing that is mounted to face the first side wall surface 13 on the side H, and a rear surface 4 of the sealing ring 1 that is mounted to face the second side wall surface 14 on the low pressure side L of the annular groove 9. A ring-shaped protruding portion 6 bulging toward the seal ring 1 is formed on the receiving surface 5 of the backup ring 3 in contact with the back surface 4. Since the stepped surface 11 that engages with the outer circumferential surface portion 10 of the annular convex ridge 6 is formed on the back surface 4 in the uncompressed state, the heat is generated when the fitting portion 8 is pulled out from the tubular portion 7 in a high temperature state. The back-up ring 3 to be expanded in the outer diameter direction by expansion is locked by the step surface 11 of the seal ring 1 Thus, expansion in the outer diameter direction can be suppressed. And it can prevent that the backup ring 3 protrudes largely from the annular groove 9 (projects out). Therefore, when the fitting portion 8 is inserted into the cylindrical portion 7 again in the high temperature state, there is no possibility that the backup ring 3 is sandwiched between the fitting portion 8 and the cylindrical portion 7 and damaged. The portion 8 can be smoothly inserted and fitted into the cylindrical portion 7.
Furthermore, since the seal ring 1 and the backup ring 3 can be separated, they can be replaced independently. That is, unlike the conventional seal member in which the seal ring 1 and the backup ring 3 are bonded, the service life of one of them is not limited to the other product life that deteriorates quickly, and the use cost is excellent.

また、シールリング1は第1側壁面13側へ開口する凹溝16を有する横断面U形に形成され、かつ、凹溝16内に金属製弾発部材2を有するので、つまり、線膨張係数が小さく、かつ、強度の高い金属製弾発部材2をシールリング1に内装しているので、熱膨張によるバックアップリング3の外径方向の拡大を一層効果的に抑制することができる。   Further, the seal ring 1 is formed in a U-shaped cross section having a concave groove 16 that opens to the first side wall surface 13 side, and has a metal elastic member 2 in the concave groove 16, that is, the linear expansion coefficient. Since the metal elastic member 2 having a small size and high strength is housed in the seal ring 1, the expansion of the backup ring 3 in the outer diameter direction due to thermal expansion can be more effectively suppressed.

また、高温高圧処理装置の筒状部7に着脱自在に内嵌される嵌合部8の外周面に形成された環状溝9と、環状溝9の高圧側Hの第1側壁面13に対向して装着される密封用のシールリング1と、環状溝9の低圧側Lの第2側壁面14に対向して装着されると共にシールリング1の背面4を支持する樹脂製のバックアップリング3と、を備えた密封構造に於て、第2側壁面14と接触するバックアップリング3の当接面12に第2側壁面14へ膨出する環状凸隆部60を形成し、装着未圧縮状態で第2側壁面14に環状凸隆部60の外径周面部61と係合する段差面15を形成したので、高温状態で筒状部7から嵌合部8を引き抜いた場合に、熱膨張によって外径方向に拡大しようとするバックアップリング3を第2側壁面14の段差面15にて係止して、その外径方向の拡大を抑止することができる。そして、バックアップリング3が環状溝9から大きく突出する(はみ出す)のを防止することができる。従って、高温状態のままで再度嵌合部8を筒状部7内へ挿入する際に、バックアップリング3が嵌合部8と筒状部7の間に挟まって破損する虞がなくなり、嵌合部8を筒状部7内へスムーズに挿入して嵌め込むことができる。
さらに、シールリング1とバックアップリング3が分離可能であるので、それぞれ単独で交換することができる。つまり、シールリング1とバックアップリング3を接着した従来のシール部材のように、一方の使用期間が早く劣化する他方の製品寿命に制限されることがなく、使用コスト面に関して優れたものである。
Moreover, the annular groove 9 formed in the outer peripheral surface of the fitting part 8 detachably fitted in the cylindrical part 7 of the high temperature and high pressure processing apparatus, and the first side wall surface 13 on the high pressure side H of the annular groove 9 are opposed. A sealing ring 1 for sealing, and a resin backup ring 3 that is mounted to face the second side wall surface 14 on the low pressure side L of the annular groove 9 and supports the back surface 4 of the sealing ring 1. Is formed on the abutment surface 12 of the backup ring 3 in contact with the second side wall surface 14 so as to bulge to the second side wall surface 14 in an uncompressed state. Since the stepped surface 15 that engages with the outer circumferential surface portion 61 of the annular convex ridge 60 is formed on the second side wall surface 14, when the fitting portion 8 is pulled out from the tubular portion 7 at a high temperature, The backup ring 3 to be expanded in the outer diameter direction is locked by the step surface 15 of the second side wall surface 14 to expand the outer diameter direction. It is possible to stop. And it can prevent that the backup ring 3 protrudes largely from the annular groove 9 (projects out). Therefore, when the fitting portion 8 is inserted into the cylindrical portion 7 again in the high temperature state, there is no possibility that the backup ring 3 is sandwiched between the fitting portion 8 and the cylindrical portion 7 and damaged. The portion 8 can be smoothly inserted and fitted into the cylindrical portion 7.
Furthermore, since the seal ring 1 and the backup ring 3 can be separated, they can be replaced independently. That is, unlike the conventional seal member in which the seal ring 1 and the backup ring 3 are bonded, the service life of one of them is not limited to the other product life that deteriorates quickly, and the use cost is excellent.

本発明に係る密封構造の断面図である。It is sectional drawing of the sealing structure which concerns on this invention. 要部断面図である。It is principal part sectional drawing. 要部断面図である。It is principal part sectional drawing. シールリングと弾発部材の断面図である。It is sectional drawing of a seal ring and a resilient member. バックアップリングの断面図である。It is sectional drawing of a backup ring. 本発明の他の実施の形態を示す要部断面図である。It is principal part sectional drawing which shows other embodiment of this invention. 要部断面図である。It is principal part sectional drawing. 従来の密封構造の断面図である。It is sectional drawing of the conventional sealing structure. 要部断面図である。It is principal part sectional drawing.

符号の説明Explanation of symbols

1 シールリング
2 弾発部材
3 バックアップリング
4 背面
5 受け面
6 環状凸隆部
7 筒状部
8 嵌合部
9 環状溝
10 外径周面部
11 段差面
12 当接面
13 第1側壁面
14 第2側壁面
15 段差面
16 凹溝
60 環状凸隆部
61 外径周面部
H 高圧側
L 低圧側
DESCRIPTION OF SYMBOLS 1 Seal ring 2 Elastic member 3 Backup ring 4 Back surface 5 Receiving surface 6 Annular convex part 7 Cylindrical part 8 Fitting part 9 Annular groove
10 Outer diameter peripheral surface
11 Step surface
12 Contact surface
13 First side wall
14 Second side wall
15 Step surface
16 groove
60 Annular protuberance
61 Outer peripheral surface H High pressure side L Low pressure side

Claims (3)

高温高圧処理装置の筒状部(7)に着脱自在に内嵌される嵌合部(8)の外周面に形成された環状溝(9)と、該環状溝(9)の高圧側(H)の第1側壁面(13)に対向して装着される密封用のシールリング(1)と、上記環状溝(9)の低圧側(L)の第2側壁面(14)に対向して装着されると共に上記シールリング(1)の背面(4)を支持する樹脂製のバックアップリング(3)と、を備えた密封構造に於て、
上記背面(4)と接触する上記バックアップリング(3)の受け面(5)に上記シールリング(1)側へ膨出する環状凸隆部(6)を形成し、装着未圧縮状態で上記背面(4)に該環状凸隆部(6)の外径周面部(10)と係合する段差面(11)を形成したことを特徴とする密封構造。
An annular groove (9) formed on the outer peripheral surface of the fitting part (8) detachably fitted in the cylindrical part (7) of the high-temperature and high-pressure processing apparatus, and a high-pressure side (H of the annular groove (9)) ) Facing the first side wall surface (13) and the sealing ring (1) for sealing, and the second side wall surface (14) on the low pressure side (L) of the annular groove (9). In a sealing structure comprising a resin backup ring (3) which is mounted and supports the back surface (4) of the seal ring (1).
An annular ridge (6) bulging toward the seal ring (1) is formed on the receiving surface (5) of the backup ring (3) in contact with the back surface (4), and the back surface is mounted in an uncompressed state. (4) A sealing structure characterized in that a stepped surface (11) that engages with the outer peripheral surface portion (10) of the annular convex ridge (6) is formed.
上記シールリング(1)は上記第1側壁面(13)側へ開口する凹溝(16)を有する横断面U形に形成され、かつ、該凹溝(16)内に金属製弾発部材(2)を有する請求項1記載の密封構造。   The seal ring (1) is formed in a U-shaped cross section having a groove (16) that opens to the first side wall surface (13) side, and a metal elastic member ( The sealing structure according to claim 1, comprising 2). 高温高圧処理装置の筒状部(7)に着脱自在に内嵌される嵌合部(8)の外周面に形成された環状溝(9)と、該環状溝(9)の高圧側(H)の第1側壁面(13)に対向して装着される密封用のシールリング(1)と、上記環状溝(9)の低圧側(L)の第2側壁面(14)に対向して装着されると共に上記シールリング(1)の背面(4)を支持する樹脂製のバックアップリング(3)と、を備えた密封構造に於て、
上記第2側壁面(14)と接触する上記バックアップリング(3)の当接面(12)に該第2側壁面(14)へ膨出する環状凸隆部(60)を形成し、装着未圧縮状態で上記第2側壁面(14)に該環状凸隆部(60)の外径周面部(61)と係合する段差面(15)を形成したことを特徴とする密封構造。
An annular groove (9) formed on the outer peripheral surface of the fitting part (8) detachably fitted in the cylindrical part (7) of the high-temperature and high-pressure processing apparatus, and a high-pressure side (H of the annular groove (9)) ) Facing the first side wall surface (13) and the sealing ring (1) for sealing, and the second side wall surface (14) on the low pressure side (L) of the annular groove (9). In a sealing structure comprising a resin backup ring (3) which is mounted and supports the back surface (4) of the seal ring (1).
An annular ridge (60) that bulges to the second side wall surface (14) is formed on the contact surface (12) of the backup ring (3) that is in contact with the second side wall surface (14). A sealing structure characterized in that a stepped surface (15) is formed on the second side wall surface (14) in a compressed state to engage with the outer peripheral surface portion (61) of the annular ridge (60).
JP2006172231A 2006-06-22 2006-06-22 Sealing structure Active JP4819592B2 (en)

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Cited By (3)

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Publication number Priority date Publication date Assignee Title
KR200459738Y1 (en) 2009-11-20 2012-04-13 한일전기엠엠씨 주식회사 V-Ring Compression Prevention Structure
JP2016129199A (en) * 2015-01-09 2016-07-14 東京エレクトロン株式会社 Bonding device, bonding system, bonding method, program and computer storage medium
TWI630048B (en) * 2015-01-09 2018-07-21 東京威力科創股份有限公司 Bonding device, bonding system, bonding method, and computer memory medium

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103594125A (en) * 2013-11-27 2014-02-19 中科华核电技术研究院有限公司 Sealing ring used for reactor pressure vessel
CN104329460A (en) * 2014-10-24 2015-02-04 东方电气集团东方汽轮机有限公司 Sealing structure and sealing method for faying surface of high-temperature medium pressure container

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JPS611776U (en) * 1984-06-11 1986-01-08 カヤバ工業株式会社 Seal mechanism
JPS62128276U (en) * 1986-02-06 1987-08-14
JPS62176554U (en) * 1986-04-28 1987-11-10
JPH05305202A (en) * 1992-04-30 1993-11-19 Kobe Steel Ltd Supercritical fluid extractor

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JPS611776U (en) * 1984-06-11 1986-01-08 カヤバ工業株式会社 Seal mechanism
JPS62128276U (en) * 1986-02-06 1987-08-14
JPS62176554U (en) * 1986-04-28 1987-11-10
JPH05305202A (en) * 1992-04-30 1993-11-19 Kobe Steel Ltd Supercritical fluid extractor

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200459738Y1 (en) 2009-11-20 2012-04-13 한일전기엠엠씨 주식회사 V-Ring Compression Prevention Structure
JP2016129199A (en) * 2015-01-09 2016-07-14 東京エレクトロン株式会社 Bonding device, bonding system, bonding method, program and computer storage medium
TWI630048B (en) * 2015-01-09 2018-07-21 東京威力科創股份有限公司 Bonding device, bonding system, bonding method, and computer memory medium

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