JP2007329034A - Scanning electron microscope and electron beam axis adjusting method therefor - Google Patents

Scanning electron microscope and electron beam axis adjusting method therefor Download PDF

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JP2007329034A
JP2007329034A JP2006159741A JP2006159741A JP2007329034A JP 2007329034 A JP2007329034 A JP 2007329034A JP 2006159741 A JP2006159741 A JP 2006159741A JP 2006159741 A JP2006159741 A JP 2006159741A JP 2007329034 A JP2007329034 A JP 2007329034A
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electron beam
electron
filament
anode
acceleration voltage
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JP4728173B2 (en
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Akihisa Takahata
陽久 高畑
Tomohisa Otaki
智久 大瀧
Kenichi Hirane
賢一 平根
Ryoichi Ishii
良一 石井
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Hitachi High Tech Corp
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Hitachi High Tech Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a scanning electron microscope which can be manufactured inexpensively by dispensing with an automatic adjustment gun aligner mechanism and a control circuit therefor, and facilitates manual electron beam adjustment. <P>SOLUTION: An acceleration voltage and a heating current for a filament are decreased to be lower than a specified value. This expands the exposure area of an electron beam heading for an anode to ensure the electron beam passing through an anode hole. Then, redirection adjustment is carried out in the axial direction of the electron beam to increase the brightness of the electron beam having passed through the anode hole. When the bright part of the electron beam reaches the anode hole, the acceleration voltage and heating current for the filament are increased to bring them closer to a specified value to narrow the exposure area of the electron beam. In this manner, the increase and decrease of the acceleration voltage and heating current for the filament and the redirection adjustment in the axial direction of the electron beam are repeated to adjust a shift in the electron beam in the axial direction. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、走査電子顕微鏡の電子ビーム軸の調整方法および走査電子顕微鏡に関するものである。   The present invention relates to a method for adjusting an electron beam axis of a scanning electron microscope and a scanning electron microscope.

図５に従来の走査電子顕微鏡の構成図を示す。   FIG. 5 shows a configuration diagram of a conventional scanning electron microscope.

電子源であるフィラメント２から放出される電子ビーム６は、ウェネルト４の電位により、収束作用を受け軌道が偏向し、ウェネルト４と加速電極となるアノード８の間に第一のクロスオーバー７を作る。   The electron beam 6 emitted from the filament 2 which is an electron source is converged by the electric potential of the Wehnelt 4 and the trajectory is deflected to form a first crossover 7 between the Wehnelt 4 and the anode 8 serving as an acceleration electrode. .

さらに、加速電圧により加速された電子ビーム６はアノード８を通過し、コンデンサレンズ１０により収束作用を受け、コンデンサレンズ１０と対物レンズ１３の間に第二のクロスオーバー７を作る。そして、電子ビーム６は対物レンズ１３により収束され、試料１５の表面に照射される。   Further, the electron beam 6 accelerated by the acceleration voltage passes through the anode 8 and is converged by the condenser lens 10 to form a second crossover 7 between the condenser lens 10 and the objective lens 13. The electron beam 6 is converged by the objective lens 13 and irradiated on the surface of the sample 15.

従来の構成ではフィラメント２から出力される電子ビーム６が軸ずれをした場合、ガンアライナー５０に流れる電流をガンアライナー制御回路５１で変化させることで電子ビーム６がアノード８の中心にあるアノード穴を通過するように偏向させて電子ビーム軸ずれを補正していた。   In the conventional configuration, when the electron beam 6 output from the filament 2 is misaligned, the current flowing through the gun aligner 50 is changed by the gun aligner control circuit 51, so that the electron beam 6 forms an anode hole at the center of the anode 8. The deviation of the electron beam axis was corrected by deflecting it so as to pass.

上述した従来の走査電子顕微鏡は、例えば、特許文献１（特開平８−２１２９５１公報）に示されている。   The above-described conventional scanning electron microscope is disclosed, for example, in Patent Document 1 (Japanese Patent Laid-Open No. 8-212951).

特開平８−２１２９５１公報JP-A-8-212951

図２を参照し説明する。   This will be described with reference to FIG.

走査電子顕微鏡には、フィラメントや各種絞りなど、定期的にメンテナンスを必要とする部品がある。電子源であるフィラメント２の寿命は、凡そ数十時間であるため定期的にこれを交換する必要がある。   Scanning electron microscopes include parts that require regular maintenance, such as filaments and various diaphragms. Since the filament 2 as an electron source has a life of about several tens of hours, it must be periodically replaced.

通常、フィラメント２を交換すると、図２−ａのように電子ビーム６の軸が理想ビーム軸２０よりずれる場合があり、電子ビーム６がアノード８に遮られ、アノードの中心にあるアノード穴を通過できないので試料１５に到達せず、像が見えないことがある。   Normally, when the filament 2 is replaced, the axis of the electron beam 6 may be deviated from the ideal beam axis 20 as shown in FIG. 2A, and the electron beam 6 is blocked by the anode 8 and passes through the anode hole in the center of the anode. Since it cannot, the sample 15 may not be reached and the image may not be visible.

最近の電子顕微鏡では、その軸ずれは前述の従来の技術等により自動調整されるがその機構は複雑であり高価である。また、その機構が何らかの理由により作動しなくなった場合、軸調整は非常に困難なものになる。   In recent electron microscopes, the axis deviation is automatically adjusted by the above-described conventional technique, but the mechanism is complicated and expensive. Also, if the mechanism fails to operate for some reason, the axis adjustment becomes very difficult.

本発明の目的は、走査電子顕微鏡の低コスト化及び小型化、かつ電子ビームの軸ずれ調整を機械的に容易に行うための操作性の向上を図るものである。   An object of the present invention is to reduce the cost and size of a scanning electron microscope and to improve the operability for easily adjusting the axis deviation of an electron beam mechanically.

本発明は、電子銃のフィラメントに加える加速電圧および加熱電流の加減と、電子銃が発生する電子ビーム軸方向の向き変え調節を併せてしながら電子ビームの軸方向の軸ずれを調整することを特徴とする   The present invention adjusts the axial misalignment of the electron beam while adjusting the acceleration voltage and heating current applied to the filament of the electron gun and adjusting the direction of the electron beam generated by the electron gun. Characterize

本発明の電子ビーム軸調整方法によれば、自動調整用のガンアライナー機構とその制御回路を省略するため安価かつ電子銃を小型化することができる。   According to the electron beam axis adjusting method of the present invention, since the gun aligner mechanism for automatic adjustment and its control circuit are omitted, the electron gun can be made inexpensive and downsized.

図１を引用して走査電子顕微鏡の実施例を説明する。   An embodiment of a scanning electron microscope will be described with reference to FIG.

電子銃３には、電子源であるタングステンヘアピン型のフィラメント２とウェネルト４が固定されており、加速電圧制御回路によりフィラメント２に負の加速電圧（Ｖ０）が印加され、加熱電流が流され２６００°Ｋ程度まで加熱される。   A tungsten hairpin filament 2 and Wehnelt 4 which are electron sources are fixed to the electron gun 3. A negative acceleration voltage (V 0) is applied to the filament 2 by an acceleration voltage control circuit, and a heating current is applied to the electron gun 2600. Heated to about ° K.

すると、フィラメント２から電子ビーム６が放出され、ウェネルト４に印加されるバイアス電圧により電子ビームの軌道が偏向、最初のクロスオーバーポイント７を作る。   Then, the electron beam 6 is emitted from the filament 2, and the trajectory of the electron beam is deflected by the bias voltage applied to the Wehnelt 4, thereby creating the first crossover point 7.

そして、電子ビーム６はフィラメント２とアノード８の間に印加された加速電圧で加速され、アノード８を通過し、コンデンサ絞りＡ９によって制限され、コンデンサレンズ１０によって再度軌道が偏向、さらにコンデンサ絞りＢ１１によって制限され、２度目のクロスオーバーポイント７を作る。   The electron beam 6 is accelerated by an acceleration voltage applied between the filament 2 and the anode 8, passes through the anode 8, is limited by the condenser aperture A9, is deflected again by the condenser lens 10, and is further deflected by the condenser aperture B11. Limited and creates a second crossover point 7.

その後、電子ビーム６は対物レンズ１３によって収束され、試料１５に到達する。その際、偏向器１２によって電子ビーム６は、試料１５上を２次元的に走査偏向される。   Thereafter, the electron beam 6 is converged by the objective lens 13 and reaches the sample 15. At that time, the electron beam 6 is two-dimensionally scanned and deflected on the sample 15 by the deflector 12.

試料１５から反射電子１６が放出し、反射電子検出器１７により信号を得て制御のＰＣ１８に画像が出力される。反射電子検出器１７を含む検出手段は、反射電子１６、二次電子、電磁波等を含む観察電子情報を検知する。   The backscattered electrons 16 are emitted from the sample 15, a signal is obtained by the backscattered electron detector 17, and an image is output to the control PC 18. The detection means including the reflected electron detector 17 detects observation electronic information including the reflected electrons 16, secondary electrons, electromagnetic waves, and the like.

図２に基づいて説明する。   This will be described with reference to FIG.

上記のような走査電子顕微鏡では定期的にフィラメント２交換やコンデンサ絞りＡ９、対物絞り１４のクリーニング等のメンテナンスを行う必要がある。   In the scanning electron microscope as described above, it is necessary to periodically perform maintenance such as replacement of the filament 2 and cleaning of the condenser aperture A9 and the objective aperture 14.

そのため、図２−ａに示すようにメンテナンス後に、フィラメント２とアノード８の位置がずれ、規定の加速電圧では電子ビーム６がアノード８に遮られ、試料１５に到達できなくなる場合がある。   Therefore, as shown in FIG. 2A, the position of the filament 2 and the anode 8 may be shifted after maintenance, and the electron beam 6 may be blocked by the anode 8 at a specified acceleration voltage, and may not reach the sample 15 in some cases.

本実施例の走査電子顕微鏡では、加速電圧制御回路１によって、フィラメント２の加速電圧と加熱電流を制御し、電子ビーム６がアノード８を通過しやすいようにしている。つまり、規定の加速電圧の場合には電子ビーム照射領域（Ｌ１）２１が狭いのに対し、図２−ｂに示すように規定の加速電圧より低い場合には電子ビーム照射領域（Ｌ２）２２が広がる。このため、電子ビーム６の軸がずれていても、アノード８の中央に開くアノード穴を電子ビーム６の一部が通過し、試料１５に達しやすくなる。   In the scanning electron microscope of this embodiment, the acceleration voltage control circuit 1 controls the acceleration voltage and heating current of the filament 2 so that the electron beam 6 can easily pass through the anode 8. That is, the electron beam irradiation region (L1) 21 is narrow in the case of the specified acceleration voltage, whereas the electron beam irradiation region (L2) 22 is lower in the case of being lower than the predetermined acceleration voltage as shown in FIG. spread. For this reason, even if the axis of the electron beam 6 is deviated, a part of the electron beam 6 passes through the anode hole opened in the center of the anode 8 and easily reaches the sample 15.

したがって、電子ビーム６の軸がアノード穴の位置よりずれていてもＰＣ１８の画面上に何らかの画像が出力される確率が増すため、図１の電子銃調整ネジ５で画像が明るくなる方向に電子銃を移動し、理想ビーム軸２３に近づくよう調整することが可能になる。   Therefore, even if the axis of the electron beam 6 is deviated from the position of the anode hole, the probability that an image is output on the screen of the PC 18 is increased. Can be adjusted so as to approach the ideal beam axis 23.

すなわち、電子銃調整ネジ５を操作して電子ビームが試料に反射して得られる画像が明るくなるように電子ビーム軸方向の向き変え調節をする。   That is, the direction of the electron beam axis is adjusted so that the image obtained by operating the electron gun adjusting screw 5 to reflect the electron beam on the sample becomes bright.

前記画像が明るくなったところで、フィラメント２の加速電圧と加熱電流を上げて電子ビーム照射領域を狭め、更に電子銃調整ネジ５を操作して画像が明るくなるように電子ビーム軸方向の向き変え調節をする。   When the image becomes brighter, the acceleration voltage and heating current of the filament 2 are increased to narrow the electron beam irradiation area, and the electron gun adjusting screw 5 is operated to change the direction of the electron beam axis so that the image becomes brighter. do.

この加速電圧と加熱電流の下げ上げ加減と、電子ビーム軸方向の向き変え調節を繰り返して電子ビームの軸方向の軸ずれを調整して理想ビーム軸２３に近づけられる。   The acceleration voltage and the heating current are increased and decreased, and the direction change adjustment in the electron beam axis direction is repeated to adjust the axial deviation of the electron beam in the axial direction so as to approach the ideal beam axis 23.

なお、本装置ではコンデンサレンズ１０の位置も固定としているが機械的に上下に稼動しても同様の効果が得られる。   In this device, the position of the condenser lens 10 is also fixed, but the same effect can be obtained even if it is mechanically moved up and down.

さらに、本発明の装置では、この理想ビーム軸２３に近づけるための調整をＰＣ１８またはＷＳの表示装置上で、電子ビーム軸調整画面を使用して調整する。   Furthermore, in the apparatus of the present invention, the adjustment for bringing the ideal beam axis 23 closer is adjusted on the display device of the PC 18 or WS using the electron beam axis adjustment screen.

図３で詳細を説明する。   Details will be described with reference to FIG.

調整者がモニタ３０上で軸調整メニュー３５を選択すると、画像確認用試料として反射電子感度が向上する重金属製の試料をステージに挿入するよう促すメッセージ画面３６が出力される。   When the adjuster selects the axis adjustment menu 35 on the monitor 30, a message screen 36 that prompts the user to insert a heavy metal sample with improved reflected electron sensitivity on the stage as an image confirmation sample is output.

このメッセージ画面３６の「ＯＫ」をクリックすると、自動で倍率を最低倍、コントラスト、ブライトネスを規定値にし、加速電圧とフィラメント加熱電流が規定値より低い設定となり、図２に示す電子ビーム照射領域Ｌ２が広い条件となる。   When “OK” in this message screen 36 is clicked, the magnification is automatically set to the minimum value, the contrast and the brightness are set to the specified values, the acceleration voltage and the filament heating current are set lower than the specified values, and the electron beam irradiation region L2 shown in FIG. Is a wide range of conditions.

そして、ＳＴＥＰ１の操作タブが選択された状態となる。調整者は、画像表示エリア３１の画面が参考画像表示エリア３４の画面とほぼ同様となるように、調整ガイド３２に示されている操作方法に従って、図１の電子銃調整ネジ５で調整する。   Then, the operation tab of STEP1 is selected. The adjuster adjusts with the electron gun adjustment screw 5 of FIG. 1 according to the operation method shown in the adjustment guide 32 so that the screen of the image display area 31 is substantially the same as the screen of the reference image display area 34.

ＳＴＥＰ１で参考画面表示エリア３４と同様の状態になったらＳＴＥＰ（１）３３〜ＥＮＤタブの次のＳＴＥＰ操作タブを選択し、同じように調整ガイド３２に示されている操作方法に従って調整し、ＥＮＤの操作タブまで繰り返し調整する。   When the same state as the reference screen display area 34 is obtained in STEP 1, the STEP operation tab next to the STEP (1) 33 to END tab is selected, and the adjustment is similarly performed according to the operation method indicated in the adjustment guide 32. Repeat until the operation tab.

最終ＳＴＥＰでは加速電圧が規定値になるのでオートフォーカス機能やオートブライトネス機能が自動的に作動し、軸調整が終了した時点で最適な画像を得ることができる。   In the final STEP, since the acceleration voltage becomes a specified value, the autofocus function and the autobrightness function are automatically activated, and an optimal image can be obtained when the axis adjustment is completed.

このように本実施例によれば、フィラメントの加速電圧と加熱電流の下げ上げ加減と、電子銃調整ネジによる電子ビーム軸方向の向き変え調節により電子ビーム軸の軸ずれ調整ができるので、自動調整用のガンアライナー機構とその制御回路を省略するため安価な電子顕微鏡を提供できる。   As described above, according to the present embodiment, the adjustment of the electron beam axis can be adjusted by increasing or decreasing the filament acceleration voltage and heating current, and adjusting the direction of the electron beam axis by the electron gun adjustment screw. Therefore, an inexpensive electron microscope can be provided since the gun aligner mechanism and its control circuit are omitted.

また、表示装置に映し出す軸ずれ調整を導く画面を参照しながら、手動操作調整ができるので、調整を容易に行なうことが出来る。   Further, since manual operation adjustment can be performed while referring to a screen for guiding the axis deviation adjustment displayed on the display device, the adjustment can be easily performed.

上述した電子ビーム軸調整について、図４を引用してまとめて説明する。   The above-described electron beam axis adjustment will be described collectively with reference to FIG.

まず、ステップ４００で、光源を交換若しくはコンデンサ絞りを交換、清掃に類した操作を行う。ステップ４０１で、電子銃部を閉じ、試料をステージの中心に配置する。ステップ４０２で、軸調整モードを選択し、表示装置に軸調整画面を表示する。   First, in step 400, an operation similar to cleaning is performed by exchanging the light source or exchanging the condenser diaphragm. In step 401, the electron gun section is closed and the sample is placed at the center of the stage. In step 402, an axis adjustment mode is selected and an axis adjustment screen is displayed on the display device.

ステップ４０３で、ＳＴＥＰ１タブが選択され加速電圧値と倍率と電流値が設定値まで下がった画像と参考画面が表示される。ステップ４０４で、現状の画面全体が参考画面と同等になるように軸調整ネジを回して調整する。   In step 403, the STEP1 tab is selected, and an image and a reference screen in which the acceleration voltage value, the magnification, and the current value are reduced to the set values are displayed. In step 404, the shaft adjustment screw is turned to adjust so that the entire current screen is equivalent to the reference screen.

ステップ４０５の判定で、参考画面と同等になっていなければ、軸調整ネジによる調整が続けられる。ステップ４０５の判定で、参考画面と同等になっていれば次のステップ４０６に進む。   If it is determined in step 405 that the screen is not equivalent to the reference screen, the adjustment with the shaft adjusting screw is continued. If it is determined in step 405 that the screen is equivalent to the reference screen, the process proceeds to the next step 406.

ステップ４０６で、次のＳＴＥＰタブを選択する。ステップ４０７で、加速電圧値と電流値が指定値まで上がる。ステップ４０８で、現状の画面全体が参考画面と同等になるように軸調整ネジを回して調整する。   In step 406, the next STEP tab is selected. In step 407, the acceleration voltage value and the current value are increased to specified values. In step 408, the shaft adjustment screw is turned to adjust so that the entire current screen is equivalent to the reference screen.

ステップ４０８の判定で、参考画面と同等になっていなければ、軸調整ネジによる調整が続けられる。ステップ４０８の判定で、参考画面と同等になっていれば次のステップ４０９に進む。   If it is determined in step 408 that the screen is not equivalent to the reference screen, the adjustment using the shaft adjusting screw is continued. If it is determined in step 408 that the screen is equivalent to the reference screen, the process proceeds to the next step 409.

ステップ４０９で、次のステップタブを選択する。ステップ４１０で、ＥＮＤタブまでステップアップと調整ネジ操作を継続する。ステップ４１１で、ＥＮＤタブを選択し目的の画像を得る。目的の画像を得られてなければ、継続される。   In step 409, the next step tab is selected. In step 410, step-up and adjustment screw operation are continued until the END tab. In step 411, the END tab is selected to obtain a target image. If the target image is not obtained, it is continued.

目的の画像を得られていれば、次のステップ４１２に進み、軸調整モードを終了し通常観察画面に移行する。   If the target image is obtained, the process proceeds to the next step 412 to end the axis adjustment mode and shift to the normal observation screen.

本発明の実施例に係わるもので、走査電子顕微鏡の概略を示した図である。It is a figure concerning the Example of this invention, and is the figure which showed the outline of the scanning electron microscope. 本発明の実施例に係わるもので、アノードに対する電子ビーム照射領域範囲を示した図である。FIG. 6 is a diagram showing an electron beam irradiation region range for an anode according to an embodiment of the present invention. 本発明の実施例に係わるもので、表示装置に表示した子ビーム軸調整画面を示す図である。It is a figure which concerns on the Example of this invention, and is a figure which shows the sub beam axis adjustment screen displayed on the display apparatus. 本発明の実施例に係わるもので、電子ビーム軸調整のフローを示す図である。It is a figure concerning the Example of this invention, and is a figure which shows the flow of electron beam axis | shaft adjustment. 従来例を示した図である。It is the figure which showed the prior art example.

符号の説明Explanation of symbols

１…加速電圧制御回路、２…フィラメント、３…電子銃、４…ウェネルト、軸調整ネジ、６…電子ビーム、７…クロスオーバーポイント、８…アノード、９…コンデンサ絞りＡ、１０…コンデンサレンズ、１１…コンデンサ絞りＢ、１２…偏向器、１３…対物レンズ、１４…対物絞り、１５…試料、１６…反射電子、１７…反射電子検出器、１８…ＰＣ、２０…理想ビーム軸、２１…電子ビーム照射領域（Ｌ１）、２２…電子ビーム照射領域（Ｌ２）、３０…モニタ、３１…画像表示エリア、３２…調整ガイド、３３…ＳＴＥＰ１〜ＥＮＤタブ、３４…参考画像表示エリア、３５…軸調整メニュー、３６…メッセージ、４０…ガンアライナー、４１…ガンアライナー制御回路。   DESCRIPTION OF SYMBOLS 1 ... Acceleration voltage control circuit, 2 ... Filament, 3 ... Electron gun, 4 ... Wehnelt, Axis adjusting screw, 6 ... Electron beam, 7 ... Crossover point, 8 ... Anode, 9 ... Condenser aperture A, 10 ... Condenser lens, DESCRIPTION OF SYMBOLS 11 ... Condenser aperture B, 12 ... Deflector, 13 ... Objective lens, 14 ... Objective aperture, 15 ... Sample, 16 ... Reflected electron, 17 ... Reflected electron detector, 18 ... PC, 20 ... Ideal beam axis, 21 ... Electron Beam irradiation area (L1), 22 ... Electron beam irradiation area (L2), 30 ... Monitor, 31 ... Image display area, 32 ... Adjustment guide, 33 ... STEP1-END tab, 34 ... Reference image display area, 35 ... Axis adjustment Menu, 36 ... message, 40 ... gun aligner, 41 ... gun aligner control circuit.

Claims (5)

電子銃のフィラメントに加える加速電圧および加熱電流の加減と、電子銃が発生する電子ビーム軸方向の向き変え調節を併せてしながら電子ビームの軸方向の軸ずれを調整することを特徴とする走査電子顕微鏡の電子ビーム軸調整方法。   A scanning characterized by adjusting the axial deviation of the electron beam while adjusting the acceleration voltage and heating current applied to the filament of the electron gun and adjusting the direction of the electron beam generated by the electron gun. An electron beam axis adjustment method for an electron microscope. 電子源のフィラメントを有する電子銃と、前記フィラメントの加速電圧と加熱電流を制御する加速電圧制御回路と、試料に向けて電子銃より放出される電子ビームが通るアノード穴を有し、電子ビームを加速するアノードと、前記電子ビームを絞るコンデンサ絞り、前記電子ビームに偏向を加える偏向器と、前記試料から反射する反射電子を含む観察電子情報を検知する検知手段とを有する走査電子顕微鏡の電子ビーム軸調整方法において、
前記フィラメントの加速電圧と加熱電流を規定値より下げ、前記アノードに向かう前記電子ビームの照射領域を拡大して前記アノード穴を通過する前記電子ビームを確保し、
前記アノード穴を通過した前記電子ビームが明るくなるように電子ビーム軸方向の向き変え調節を行い、
前記電子ビームの明るいところが前記アノード穴に来たら前記フィラメントの加速電圧と加熱電流を規定値に近づけるように上げて前記電子ビームの照射領域を狭め、
前記フィラメントの加速電圧と加熱電流の下げ上げ加減と、電子ビーム軸方向の向き変え調節を繰り返して電子ビームの軸方向の軸ずれを調整することを特徴とする走査電子顕微鏡の電子ビーム軸調整方法。 An electron gun having an electron source filament, an acceleration voltage control circuit for controlling the acceleration voltage and heating current of the filament, and an anode hole through which an electron beam emitted from the electron gun toward the sample passes. Electron beam of a scanning electron microscope having an accelerating anode, a condenser aperture for focusing the electron beam, a deflector for deflecting the electron beam, and detection means for detecting observation electron information including reflected electrons reflected from the sample In the axis adjustment method,
Lowering the accelerating voltage and heating current of the filament from a specified value, expanding the irradiation region of the electron beam toward the anode, and securing the electron beam passing through the anode hole,
Adjust the direction of the electron beam axis so that the electron beam that has passed through the anode hole becomes brighter,
When the bright spot of the electron beam comes to the anode hole, the accelerating voltage and heating current of the filament are raised so as to approach specified values, and the irradiation region of the electron beam is narrowed,
A method for adjusting an electron beam axis of a scanning electron microscope, comprising adjusting the axial deviation of the electron beam by repeatedly increasing and decreasing the acceleration voltage and heating current of the filament and adjusting the direction of the electron beam axis. . 請求項１または２記載の走査電子顕微鏡の電子ビーム軸調整方法において、
前記電子ビームの軸方向の軸ずれ調整は、備わる表示装置に映し出された操作画面の操作手順に従って行なうことを特徴とする走査電子顕微鏡の電子ビーム軸調整方法。 The electron beam axis adjusting method for a scanning electron microscope according to claim 1 or 2,
The method of adjusting an electron beam axis of a scanning electron microscope, wherein the adjustment of the axial deviation of the electron beam in the axial direction is performed according to an operation procedure on an operation screen displayed on a display device provided. 請求項２記載の走査電子顕微鏡の電子ビーム軸調整方法において、
前記加速電圧と加熱電流の下げ上げ加減や前記電子ビーム軸方向の向き変え調節は、備わる表示装置に表示される前記観察電子情報を基に作られた画面で行なうことを特徴とする走査電子顕微鏡の電子ビーム軸調整方法。 The method of adjusting an electron beam axis of a scanning electron microscope according to claim 2,
The scanning electron microscope is characterized in that the acceleration voltage and the heating current are increased and decreased and the direction of the electron beam is adjusted on the screen based on the observation electronic information displayed on the display device. Electron beam axis adjustment method. 電子源のフィラメントを有する電子銃と、前記フィラメントの加速電圧と加熱電流を制御する加速電圧制御回路と、試料に向けて電子銃より放出される電子ビームが通るアノード穴を有し、電子ビームを加速するアノードと、前記電子ビームを絞るコンデンサ絞り、前記電子ビームに偏向を加える偏向器と、前記試料から反射する反射電子を含む観察電子情報を検知する検知手段と、前記観察電子情報に基づく表示情報等を含めて表示する表示装置とを有する走査電子顕微鏡において、
前記フィラメントの加速電圧と加熱電流を規定値より下げ、前記アノードに向かう前記電子ビームの照射領域を拡大して前記アノード穴を通過する前記電子ビームを確保する際に、電子ビーム軸方向の向き変え調節を行なう電子銃調整ネジを設けたことを特徴とする走査電子顕微鏡。 An electron gun having an electron source filament, an acceleration voltage control circuit for controlling the acceleration voltage and heating current of the filament, and an anode hole through which an electron beam emitted from the electron gun toward the sample passes. An accelerating anode, a condenser aperture for focusing the electron beam, a deflector for deflecting the electron beam, a detecting means for detecting observation electronic information including reflected electrons reflected from the sample, and a display based on the observation electronic information In a scanning electron microscope having a display device that displays information and the like,
When the accelerating voltage and heating current of the filament are lowered from specified values, the irradiation area of the electron beam toward the anode is enlarged to secure the electron beam passing through the anode hole, the direction of the electron beam axis is changed. A scanning electron microscope comprising an electron gun adjustment screw for adjustment.
JP2006159741A 2006-06-08 2006-06-08 Method for adjusting electron beam axis of scanning electron microscope and scanning electron microscope Expired - Fee Related JP4728173B2 (en)

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