JP2007304072A - Position detector - Google Patents

Position detector Download PDF

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JP2007304072A
JP2007304072A JP2006135683A JP2006135683A JP2007304072A JP 2007304072 A JP2007304072 A JP 2007304072A JP 2006135683 A JP2006135683 A JP 2006135683A JP 2006135683 A JP2006135683 A JP 2006135683A JP 2007304072 A JP2007304072 A JP 2007304072A
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displacement
fixed
conductive plate
phase
position detection
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JP5001577B2 (en
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Makoto Hattori
真 服部
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Honda Motor Co Ltd
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Honda Motor Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a position detector improved in detection responsiveness and further in toughness to disturbance such as temperature through a simple structure. <P>SOLUTION: This position detector comprises two conductive plates 12 and 14 fixed to a fixed side 10a; a displacement-side conductive plate 16 fixed to a displacement side 10b and disposed in a position opposed to a plurality of conductors; power sources 18 and 20 supplying power to the fixed-side conductive plates in different phases; a phase detection circuit 30 detecting a capacitance ratio caused between each of the fixed-side conductive plate and the displacement-side conductive plate as a phase of potential difference; and an arithmetic circuit 32 computing a displacement quantity or an absolute angle from the detected phases. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

この発明は位置検出装置に関し、より詳しくはレゾルバに類似した構造を備えた位置検出装置に関する。   The present invention relates to a position detection device, and more particularly to a position detection device having a structure similar to a resolver.

この種の位置検出装置としては、例えば特許文献1に記載される技術が知られている。その技術にあっては、コイルとコンデンサで共振回路を構成し、コイルの自己インダクタンスまたはコンデンサの静電容量を変位に対して変化させると共に、変位によって共振回路の共振周波数の変化を検出することで、変位量の検出精度を向上させている。
特開2002−206948
As this type of position detection device, for example, a technique described in Patent Document 1 is known. In that technology, a resonance circuit is configured with a coil and a capacitor, and the self-inductance of the coil or the capacitance of the capacitor is changed with respect to the displacement, and the change in the resonance frequency of the resonance circuit is detected by the displacement. The detection accuracy of the displacement amount is improved.
JP 2002-206948

従来技術においては静電容量に基づいて変位量を検出しているが、静電容量は間隔が所期のものから微小にずれても変化してしまうことから、検出条件を整えるのが煩瑣であるという不都合があった。また、静電容量から変位を求めるには共振周波数の検出が必要となるが、その共振周波数の検出にフィードバックを用いているため、検出の応答性に限界があった。また、共振周波数は、変位のみならず、温度などの外乱の影響を受けやすいという問題もあった。   In the prior art, the amount of displacement is detected based on the electrostatic capacity. However, since the electrostatic capacity changes even if the interval slightly deviates from the intended one, it is troublesome to prepare the detection conditions. There was an inconvenience. Further, in order to obtain the displacement from the capacitance, it is necessary to detect the resonance frequency. However, since feedback is used to detect the resonance frequency, there is a limit to the response of detection. In addition, the resonance frequency is susceptible to not only displacement but also disturbances such as temperature.

従って、この発明の目的は上記した課題を解決し、構成において簡易であると共に、検出応答性を改善し、さらに温度などの外乱に対するタフネスも向上させるようにした位置検出装置を提供することにある。   SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a position detection device that solves the above-described problems, is simple in configuration, improves detection response, and further improves toughness against disturbances such as temperature. .

上記の目的を達成するため、請求項1に係る位置検出装置にあっては、固定側に固定される複数個の固定側導電体と、変位側に固定されると共に、前記複数個の導電体と対向した位置に配置される変位側導電体と、前記複数個の固定側導電体に互いに異なる位相で電力を供給する第1、第2の電力供給手段と、前記複数個の固定側導電体と前記変位側導電体の間でそれぞれ生じる静電容量比を電位変化の位相として検出する位相検出手段と、前記検出された位相から変位量または絶対角を演算する演算手段とを備える如く構成した。   In order to achieve the above object, in the position detecting device according to claim 1, a plurality of fixed-side conductors fixed to the fixed side, a plurality of conductors fixed to the displacement side, and the plurality of conductors A displacement-side conductor disposed at a position opposite to the first and second power supply means for supplying power to the plurality of fixed-side conductors in different phases, and the plurality of fixed-side conductors. And a phase detecting means for detecting a capacitance ratio generated between the displacement-side conductor and a phase of potential change, and a calculating means for calculating a displacement amount or an absolute angle from the detected phase. .

請求項2に係る位置検出装置にあっては、前記固定側導電体と前記変位側導電体は、一定の離間距離をもって相対的に移動すると共に、前記演算手段は前記検出された位相から変位量を演算する如く構成した。   In the position detection device according to claim 2, the fixed-side conductor and the displacement-side conductor are relatively moved with a certain separation distance, and the arithmetic means is configured to move from the detected phase to a displacement amount. It was comprised so that it might calculate.

請求項3に係る位置検出装置にあっては、前記固定側導電体と前記変位側導電体は、一定の離間距離をもって相対的に回転すると共に、前記演算手段は前記検出された位相から絶対角を演算する如く構成した。   In the position detection device according to claim 3, the fixed-side conductor and the displacement-side conductor are relatively rotated with a constant separation distance, and the calculation means is configured to calculate an absolute angle from the detected phase. It was comprised so that it might calculate.

請求項1に係る位置検出装置にあっては、複数個の固定側導電体と変位側導電体の間でそれぞれ生じる静電容量比を電位変化の位相として検出し、検出された位相から変位量または絶対角を演算する如く構成したので、上記した従来技術の欠点を解消することができ、構成において簡易であると共に、検出応答性を改善することができ、さらに温度などの外乱に対するタフネスも向上させることができる。   In the position detection device according to claim 1, the capacitance ratio generated between each of the plurality of fixed-side conductors and the displacement-side conductor is detected as a phase of potential change, and a displacement amount is detected from the detected phase. Alternatively, the absolute angle is calculated so that the above-mentioned drawbacks of the prior art can be solved, the configuration is simple, the detection response can be improved, and the toughness against disturbances such as temperature is improved. Can be made.

請求項2に係る位置検出装置にあっては、固定側導電体と変位側導電体は一定の離間距離をもって相対的に移動すると共に、検出された位相から変位量を演算する如く構成したので、上記した効果に加え、固定側に対する変位側の変位量の変化を精度良く検出することができる。   In the position detection device according to claim 2, the fixed-side conductor and the displacement-side conductor move relative to each other with a constant separation distance, and the displacement amount is calculated from the detected phase. In addition to the effects described above, it is possible to accurately detect a change in the displacement amount on the displacement side with respect to the fixed side.

請求項3に係る位置検出装置にあっては、固定側導電体と変位側導電体は一定の離間距離をもって相対的に回転すると共に、検出された位相から絶対角を演算する如く構成したので、上記した効果に加え、固定側に対する変位側の絶対角の変化を精度良く検出することができる。   In the position detection device according to claim 3, the fixed-side conductor and the displacement-side conductor are configured to relatively rotate with a constant separation distance and calculate the absolute angle from the detected phase. In addition to the effects described above, it is possible to accurately detect a change in the absolute angle on the displacement side with respect to the fixed side.

以下、添付図面に即してこの発明に係る位置検出装置を実施するための最良の形態について説明する。   The best mode for carrying out the position detection apparatus according to the present invention will be described below with reference to the accompanying drawings.

図1は、この発明の第1実施例に係る位置検出装置を模式的に示す説明断面図である。   FIG. 1 is an explanatory sectional view schematically showing a position detection apparatus according to a first embodiment of the present invention.

図1において、符号10は位置検出装置を示す。位置検出装置10は、固定側10aに固定(配置)された複数個、具体的には2個の導電板(導電体)12,14と、変位側10bに固定(配置)された1個の導電板(導電体)16を備える。導電板12,14は、電気的に接続しないように微小の間隔をおいて離間して配置される。   In FIG. 1, the code | symbol 10 shows a position detection apparatus. The position detection device 10 includes a plurality (specifically) two conductive plates (conductors) 12 and 14 fixed (arranged) on the fixed side 10a and one fixed (arranged) on the displacement side 10b. A conductive plate (conductor) 16 is provided. The conductive plates 12 and 14 are spaced apart from each other so as not to be electrically connected.

導電板16は導電板12,14に対して平行移動しつつ(距離を変えることなく)、変位に応じて重合(オーバーラップ)する面積を変化させるように構成される。理解の便宜のため、導電板16のうち、導電板12と重合する部分を16a、導電板14と重合する部分を16bと示す。   The conductive plate 16 is configured to change the overlapping (overlapping) area in accordance with the displacement while moving parallel to the conductive plates 12 and 14 (without changing the distance). For convenience of understanding, a portion of the conductive plate 16 that overlaps with the conductive plate 12 is denoted as 16a, and a portion that overlaps with the conductive plate 14 is denoted as 16b.

導電板12,14はそれぞれ、電源18,20に接続される。電源18,20は、互いに既知の異なる位相をもって変化する電圧(交流電圧)を生じて導電板12,14に供給する。導電板16は、同様に変位側10bに固定された導電板22に電線24を介して電気的に接続される。導電板22は、対向して配置された固定側10aの導電板26に対して平行移動しつつ、常に一定の重合面積をもつように配置される。   The conductive plates 12 and 14 are connected to power sources 18 and 20, respectively. The power supplies 18 and 20 generate voltages (AC voltages) that change with known different phases and supply them to the conductive plates 12 and 14. Similarly, the conductive plate 16 is electrically connected to a conductive plate 22 fixed to the displacement side 10b via an electric wire 24. The conductive plate 22 is arranged so as to always have a certain overlapping area while moving in parallel with respect to the conductive plate 26 on the fixed side 10a arranged to face each other.

導電板26は位相検出回路30に接続され、そこで静電容量比の変化に起因する電位あるいは電流変化の位相が検出される。位相検出回路30は演算回路32に接続され、その出力、即ち、検出された位相は演算回路32に入力され、そこで検出された位相から変位量が演算される。導電板12,14,16は矩形状を呈すると共に、銅箔などの導電材からなる。位相検出回路30と演算回路32は、具体的には、マイクロコンピュータからなる。   The conductive plate 26 is connected to a phase detection circuit 30 where the phase of the potential or current change due to the change in capacitance ratio is detected. The phase detection circuit 30 is connected to an arithmetic circuit 32, and its output, that is, the detected phase is input to the arithmetic circuit 32, and the displacement amount is calculated from the detected phase. The conductive plates 12, 14, and 16 have a rectangular shape and are made of a conductive material such as copper foil. Specifically, the phase detection circuit 30 and the arithmetic circuit 32 are formed of a microcomputer.

図2は位置検出装置10の適用例を示す模式図である。この実施例に係る変位検出装置10は、例えば、車両のサスペンションの変位の検出に適用可能であり、その場合、固定側10aは車体(図示せず)に連結されるシリンダ100からなると共に、変位側10bはアクスル(図示せず)に連結されるピストン102からなる。   FIG. 2 is a schematic diagram illustrating an application example of the position detection device 10. The displacement detection device 10 according to this embodiment is applicable to, for example, detection of displacement of a vehicle suspension. In this case, the fixed side 10a includes a cylinder 100 connected to a vehicle body (not shown), and the displacement Side 10b consists of a piston 102 connected to an axle (not shown).

それらに出力側カップリングとして導電板22,26が接続され、位相が検出される。変位検出装置10の出力に基づき、例えば、アクティブサスペンションにおけるフィードバック信号が生成される。   Conductive plates 22 and 26 are connected to them as output side couplings, and the phase is detected. Based on the output of the displacement detection device 10, for example, a feedback signal in the active suspension is generated.

図1の説明に戻ると、図示の構成において、導電板12,14,16は、奥行き方向長さをL,横方向長さをW、導電板12の(図1において)左端から導電板16の左端までの距離をxとすると、16aの部分の面積S16aと16bの部分の面積S16bは以下の通りとなる。
S16a=L×(W−x)
S16b=L×x
導電板12,14と導電板16は、その間の離間距離を常に一定のdに保ちつつ、相対的に移動(平行移動)する。
Returning to the description of FIG. 1, in the illustrated configuration, the conductive plates 12, 14, and 16 have a length in the depth direction of L, a length in the horizontal direction of W, and the conductive plate 16 from the left end of the conductive plate 12 (in FIG. 1). If the distance to the left end of x is x, the area S16a of the portion 16a and the area S16b of the portion 16b are as follows.
S16a = L × (W−x)
S16b = L × x
The conductive plates 12 and 14 and the conductive plate 16 relatively move (translate) while keeping the distance between them constant d.

電源18,20によって導電板12,14に生じる電位Vをそれぞれ以下とする。
V12=V0×cos(ωt)、V14=V0×sin(ωt)
上記でV0およびωは適当な定数であり、tは時間を表わす変数である。
The potentials V generated on the conductive plates 12 and 14 by the power sources 18 and 20 are as follows.
V12 = V0 × cos (ωt), V14 = V0 × sin (ωt)
In the above, V0 and ω are appropriate constants, and t is a variable representing time.

16a,16bの部分の静電容量はそれぞれ以下の如くになる。
C16a=εL(W−x)/d
C16b=εLx/d
上記でεは空気中の誘電率を表わす。
The capacitances of the portions 16a and 16b are as follows.
C16a = εL (W−x) / d
C16b = εLx / d
Where ε represents the dielectric constant in air.

従って、導電板16に生じる電荷Qは、以下のようになる。
Q=εV0/d×((W−x)cos(ωt)+xsin(ωt))
=εV0/d×√(W−2Wx+2x)cos(ωt−φ)・・・式1
ただし、tanφ=x/(W−x)である。
Therefore, the charge Q generated in the conductive plate 16 is as follows.
Q = εV0 / d × ((W−x) cos (ωt) + xsin (ωt))
= ΕV0 / d × √ (W 2 −2Wx + 2x 2 ) cos (ωt−φ) Equation 1
However, tan φ = x / (W−x).

一方、導電板22,26によって決定される静電容量は、重合面積と導電板間の距離が一定であるため、常に一定となるので、位相検出回路30には、上記したQの位相を反映した電圧が入力される。従って、位相検出回路30は、式1よりtanφを導出し、演算回路32に出力する。演算回路32は、入力されたtanφより変位xを演算する。   On the other hand, the capacitance determined by the conductive plates 22 and 26 is always constant because the overlap area and the distance between the conductive plates are constant, so the phase detection circuit 30 reflects the phase of Q described above. Voltage is input. Therefore, the phase detection circuit 30 derives tan φ from the expression 1 and outputs it to the arithmetic circuit 32. The arithmetic circuit 32 calculates the displacement x from the inputted tan φ.

この検出の原理について若干説明を補足すると、導電板26に生じる電荷Qは、上記の式1で示す如くとなるので、出力される電流Iは、図3の下部に式2として示す如くとなる。即ち、電源18,20が出力する交流の周波数が高い、換言すればωが大きい場合を想定しているので、∂x/∂t≒0、即ち、変位xを定数と見做している。その電流Iを電流センサ(図示せず)により電圧に変換し、式3に示す電位V’を求め、その中のφから静電容量比を求め、それから変位xを演算する。   If the explanation of the principle of this detection is supplemented slightly, the electric charge Q generated in the conductive plate 26 is as shown in the above equation 1, and the output current I is as shown in the equation 2 at the bottom of FIG. . That is, since it is assumed that the AC frequency output from the power supplies 18 and 20 is high, in other words, ω is large, ∂x / ∂t≈0, that is, the displacement x is regarded as a constant. The current I is converted into a voltage by a current sensor (not shown), the potential V 'shown in Equation 3 is obtained, the capacitance ratio is obtained from φ therein, and the displacement x is calculated therefrom.

第1実施例に係る位置検出装置10にあっては、導電板12,14と導電板16の間に構成されるコンデンサの静電容量比が変位によって変化することにより、導電板16側の電位変化の位相が電源18,20の位相の間で変化し、その導電板16側の電位変化は、導電板22,26によって構成されるコンデンサを介して位相検出回路30に入力され、位相検出回路30が入力された電位変化の位相を演算回路32に出力する如く構成した。それによって、簡易な構成でありながら、従来技術のようにフィードバックなどの時間を要する処理を用いることなく、変位を迅速にかつ精度良く検出することができる。   In the position detecting device 10 according to the first embodiment, the capacitance on the conductive plate 16 side is changed by changing the capacitance ratio of the capacitor formed between the conductive plates 12 and 14 and the conductive plate 16 due to the displacement. The phase of the change changes between the phases of the power supplies 18 and 20, and the potential change on the conductive plate 16 side is input to the phase detection circuit 30 via the capacitor constituted by the conductive plates 22 and 26, and the phase detection circuit The phase of the potential change to which 30 is input is output to the arithmetic circuit 32. As a result, the displacement can be detected quickly and accurately without using a time-consuming process such as feedback as in the prior art, with a simple configuration.

また、変位に伴う位相の変化は、導電板12,16および導電板14,16によって構成される2個のコンデンサの静電容量比となるため、固定側と変位側の距離変化や温度による静電容量の変化が相殺され、外乱に影響されずに、変位を精度良く検出することができる。   In addition, since the phase change due to the displacement is the capacitance ratio of the two capacitors constituted by the conductive plates 12 and 16 and the conductive plates 14 and 16, the static change due to the change in the distance between the fixed side and the displacement side or the temperature. The change in capacitance is canceled out, and the displacement can be detected with high accuracy without being affected by disturbance.

図4は、この発明の第2実施例に係る位置検出装置を模式的に示す説明断面図である。   FIG. 4 is an explanatory sectional view schematically showing a position detection apparatus according to the second embodiment of the present invention.

第2実施例において、位置検出装置10は絶対角検出器として構成され、半径r、奥行きLの円筒形状を呈すると共に、円筒の軸を中心に自由に回転する変位側10bと、変位側10bと一致した中心軸をもつ、半径r+d、奥行きLの円筒形状の中空をもつ固定側10aにより構成される。ただし、dはrに対して十分短い距離とする。   In the second embodiment, the position detection device 10 is configured as an absolute angle detector, has a cylindrical shape with a radius r and a depth L, and has a displacement side 10b that freely rotates around the axis of the cylinder, and a displacement side 10b. It is constituted by a fixed side 10a having a cylindrical hollow with a radius r + d and a depth L and having a coincident central axis. However, d is a sufficiently short distance with respect to r.

第2実施例に係る位置検出装置10は、例えば、図5に示す如く、内燃機関104のクランクシャフト106の一端に固定されてクランク角度を検出するように構成される。よって得られた検出角度は、給排気バルブのタイミングの制御などに使用される。   For example, as shown in FIG. 5, the position detection apparatus 10 according to the second embodiment is configured to be fixed to one end of a crankshaft 106 of the internal combustion engine 104 and detect a crank angle. The detected angle thus obtained is used for controlling the timing of the supply / exhaust valve.

第2実施例において、固定側10aには導電板(導電体)42,44が配置され、その導電板と対向するように、変位側10bに導電板(導電体)46が配置され、変位側10bの絶対角の変化により、導電板46の面積のうち、導電板42と重なる面積46aと、導電板44と重なる面積46bが変化するように構成される。   In the second embodiment, conductive plates (conductors) 42 and 44 are disposed on the fixed side 10a, and a conductive plate (conductor) 46 is disposed on the displacement side 10b so as to face the conductive plate. By changing the absolute angle of 10b, the area 46a overlapping the conductive plate 42 and the area 46b overlapping the conductive plate 44 out of the area of the conductive plate 46 are changed.

導電板46は、変位側10bに配置された導電板(導電体)48に電線50を介して電気的に接続され、導電板48と対向するように、固定側10aに導電板(導電体)52が配置され、導電板48と導電板52の重合する面積および間隔(離間距離)は、絶対角にかかわらず、一定とされる。   The conductive plate 46 is electrically connected to a conductive plate (conductor) 48 disposed on the displacement side 10 b via an electric wire 50, and is disposed on the fixed side 10 a so as to face the conductive plate 48. 52, and the overlapping area and interval (separation distance) between the conductive plate 48 and the conductive plate 52 are constant regardless of the absolute angle.

導電板42,44はそれぞれ電源54,56に接続され、電源54,56はそれぞれ以下の電位を生じて導電板42,44に供給する。
V42=V0×cos(ωt)
V44=V0×sin(ωt)
The conductive plates 42 and 44 are connected to power sources 54 and 56, respectively. The power sources 54 and 56 generate the following potentials and supply them to the conductive plates 42 and 44, respectively.
V42 = V0 × cos (ωt)
V44 = V0 × sin (ωt)

導電板42,44,46は、奥行き方向長さL,円周方向長さWの長方形を円筒に貼り付けたような形状を呈し、導電板42、44と導電板46の間の間隔(離間距離)は、LやWに対して十分小さな一定の距離dに保たれる。   The conductive plates 42, 44, 46 have a shape such that a rectangle having a length L in the depth direction and a length W in the circumferential direction is attached to a cylinder, and the distance between the conductive plates 42, 44 and the conductive plate 46 (separation). The distance) is kept at a constant distance d sufficiently small with respect to L and W.

導電板42の上端から導電板46の上端までの長さを図4に示すようにxとすると、46a部分と46b部分の面積は以下の通りとなる。
S46a=L×(W−x)
S46b=L×x
上記で、第1実施例と同様、V0およびωは適当な定数、tは時間を表わす変数である。
Assuming that the length from the upper end of the conductive plate 42 to the upper end of the conductive plate 46 is x as shown in FIG. 4, the areas of the 46a portion and the 46b portion are as follows.
S46a = L × (W−x)
S46b = L × x
As in the first embodiment, V0 and ω are appropriate constants, and t is a variable representing time.

上記した構成において、位相検出回路30と演算回路32で第1実施例と同様の処理を行うことにより、変位xを検出し、それから絶対角θを下記の通りに検出することができる。
θ=x/r[rad]
In the configuration described above, the phase detection circuit 30 and the arithmetic circuit 32 perform the same processing as in the first embodiment, thereby detecting the displacement x and then detecting the absolute angle θ as follows.
θ = x / r [rad]

第2実施例に係る位置検出装置10にあっても、導電板42,44と導電板46の間に構成されるコンデンサの静電容量比が変位によって変化することにより、導電板46側の電位変化の位相が電源54,56の位相の間で変化し、その導電板46側の電位変化は、導電板48,50によって構成されるコンデンサを介して位相検出回路30に入力され、位相検出回路30が入力された電位変化の位相を演算回路32に出力する如く構成したので、簡易な構成でありながら、従来技術のようにフィードバックなどの時間を要する処理を用いることなく、絶対角を迅速にかつ精度良く検出することができる。   Even in the position detection device 10 according to the second embodiment, the capacitance ratio of the capacitor formed between the conductive plates 42 and 44 and the conductive plate 46 changes due to the displacement, whereby the potential on the conductive plate 46 side. The phase of the change changes between the phases of the power sources 54 and 56, and the potential change on the conductive plate 46 side is input to the phase detection circuit 30 via the capacitor constituted by the conductive plates 48 and 50, and the phase detection circuit Since the phase of the potential change when 30 is input is output to the arithmetic circuit 32, the absolute angle can be quickly obtained without using a time-consuming process such as feedback as in the prior art while having a simple configuration. And it can detect with high precision.

図6は、この発明の第3実施例に係る位置検出装置を模式的に示す説明断面図である。   FIG. 6 is an explanatory sectional view schematically showing a position detection apparatus according to the third embodiment of the present invention.

第3実施例に係る位置検出装置10も絶対角検出器として構成され、半径rの円盤形状を呈し、円盤の中心軸を中心に自由に回転する変位側10bと、変位側10bと一致した中心軸をもつ、半径rの同様に円盤形状を呈する固定側10aにより構成される。ただし、固定側円盤と変位側円盤は、rに対して十分小さな距離dをもって平行に保たれる(相対回転する)。   The position detection device 10 according to the third embodiment is also configured as an absolute angle detector, has a disk shape with a radius r, a displacement side 10b that freely rotates around the central axis of the disk, and a center that coincides with the displacement side 10b It is constituted by a fixed side 10a having an axis and having a disk shape as well as a radius r. However, the fixed-side disk and the displacement-side disk are kept parallel (relatively rotated) with a sufficiently small distance d to r.

固定側10aに導電板(導電体)62,64が配置され、その導電板と対向するように、変位側10bに導電板(導電体)66が配置され、変位側10bの絶対角の変化により、導電板66の面積のうち、導電板62と重なる面積66aと、導電板64と重なる面積66bが変化するように構成される。   Conductive plates (conductors) 62 and 64 are disposed on the fixed side 10a, and a conductive plate (conductor) 66 is disposed on the displacement side 10b so as to face the conductive plate. By changing the absolute angle of the displacement side 10b, Of the area of the conductive plate 66, the area 66a overlapping the conductive plate 62 and the area 66b overlapping the conductive plate 64 are changed.

導電板66は、変位側10bに配置された導電板(導電体)68に電線70を介して電気的に接続され、導電板68と対向するように、固定側10aに導電板(導電体)72が配置される。導電板68と導電板72の重合する面積および間隔(離間距離)は、絶対角にかかわらず、一定とされる。   The conductive plate 66 is electrically connected to a conductive plate (conductor) 68 disposed on the displacement side 10 b via an electric wire 70, and is disposed on the fixed side 10 a so as to face the conductive plate 68. 72 is arranged. The overlapping area and interval (separation distance) between the conductive plate 68 and the conductive plate 72 are constant regardless of the absolute angle.

導電板62,64はそれぞれ電源74,76に接続され、電源74,76はそれぞれ以下のような電位を生じて導電板62,64に供給する。
V62=V0×cos(ωt)
V64=V0×sin(ωt)
The conductive plates 62 and 64 are connected to power sources 74 and 76, respectively. The power sources 74 and 76 generate the following potentials and supply them to the conductive plates 62 and 64, respectively.
V62 = V0 × cos (ωt)
V64 = V0 × sin (ωt)

導電板62,64,66は、外周半径r、内周半径r’、円周方向の長さがλの扇形状を呈し、導電板62,64と導電板66の間の間隔(離間距離)は、r,r’やλに対して十分小さな一定の距離dに保たれる。   The conductive plates 62, 64, 66 have a fan shape with an outer peripheral radius r, an inner peripheral radius r ′, and a circumferential length of λ, and an interval (separation distance) between the conductive plates 62, 64 and the conductive plate 66. Is kept at a constant distance d sufficiently small with respect to r, r ′ and λ.

導電板62の上端から導電板64の上端までの長さを図6に示すようにxとすると、66a部分と66b部分の面積は下記の通りとなる。
S66a=(λ−x)×(r−r’)/2
S66b=x×(r−r’)/2
従前の実施例と同様、V0およびωは適当な定数、tは時間を表わす変数である。
When the length from the upper end of the conductive plate 62 to the upper end of the conductive plate 64 is x as shown in FIG. 6, the areas of the 66a portion and the 66b portion are as follows.
S66a = (λ−x) × (r−r ′) / 2
S66b = xx (r−r ′) / 2
As in the previous embodiment, V0 and ω are appropriate constants, and t is a variable representing time.

上記した構成において第1実施例と同様の処理を行うことにより、変位xを検出し、それから絶対角θを下記の如く検出することができる。
θ=x/r[rad]
By performing the same processing as in the first embodiment in the above configuration, the displacement x can be detected, and then the absolute angle θ can be detected as follows.
θ = x / r [rad]

第3実施例に係る位置検出装置10にあっても、導電板62,64と導電板66の間に構成されるコンデンサの静電容量比が変位によって変化することにより、導電板66側の電位変化の位相が電源74,76の位相の間で変化し、その導電板66側の電位変化は、導電板68,72によって構成されるコンデンサを介して位相検出回路30に入力され、位相検出回路30が入力された電位変化の位相を演算回路32に出力する如く構成したので、簡易な構成でありながら、従来技術のようにフィードバックなどの時間を要する処理を用いることなく、絶対角を迅速にかつ精度良く検出することができる。   Even in the position detection device 10 according to the third embodiment, the capacitance ratio of the capacitor formed between the conductive plates 62 and 64 and the conductive plate 66 changes due to the displacement, so that the potential on the conductive plate 66 side. The phase of the change changes between the phases of the power supplies 74 and 76, and the potential change on the conductive plate 66 side is input to the phase detection circuit 30 via the capacitor constituted by the conductive plates 68 and 72, and the phase detection circuit Since the phase of the potential change when 30 is input is output to the arithmetic circuit 32, the absolute angle can be quickly obtained without using a time-consuming process such as feedback as in the prior art while having a simple configuration. And it can detect with high precision.

第1から第3実施例に係る位置検出装置10にあっては、上記の如く、固定側10aに固定される複数個の、より具体的には2個の固定側導電体(導電板12,14、導電板42,44、導電板62,64)と、変位側10bに固定されると共に、前記複数個の導電体と対向した位置に配置される変位側導電体(導電板16、導電板46、導電板66)と、前記複数個の固定側導電体に互いに異なる位相で電力を供給する第1、第2の電力供給手段(電源18,20、電源54,56、電源74,76)と、前記複数個の固定側導電体と前記変位側導電体の間でそれぞれ生じる静電容量比を電位変化の位相として検出する位相検出手段(位相検出回路30)と、前記検出された位相から変位量または絶対角を演算する演算手段(演算回路32)とを備える如く構成した。   In the position detection device 10 according to the first to third embodiments, as described above, a plurality of, more specifically, two fixed-side conductors (conductive plates 12, 14, conductive plates 42 and 44, conductive plates 62 and 64) and a displacement side conductor (conductive plate 16, conductive plate) fixed to the displacement side 10b and disposed at a position facing the plurality of conductors. 46, conductive plate 66) and first and second power supply means (power supplies 18, 20, power supplies 54, 56, power supplies 74, 76) for supplying electric power to the plurality of fixed-side conductors in different phases. A phase detection means (phase detection circuit 30) for detecting a capacitance ratio generated between the plurality of fixed-side conductors and the displacement-side conductors as a phase of potential change, and from the detected phases Arithmetic means for calculating the displacement amount or absolute angle (arithmetic circuit 32 It was as configuration provided with a door.

また、前記固定側導電体と前記変位側導電体(導電板12,14,16)は、一定の離間距離をもって相対的に移動すると共に、前記演算手段は前記検出された位相から変位量xを演算する如く構成した。   The fixed-side conductor and the displacement-side conductor (conductive plates 12, 14, 16) move relative to each other with a constant separation distance, and the calculation means calculates the displacement amount x from the detected phase. It was configured to calculate.

また、前記固定側導電体と前記変位側導電体(導電板42,44,46,62,64,66)は、一定の離間距離をもって相対的に回転すると共に、前記演算手段は前記検出された位相から絶対角θを演算する如く構成した。   Further, the fixed-side conductor and the displacement-side conductor (conductive plates 42, 44, 46, 62, 64, 66) rotate relatively with a constant separation distance, and the calculation means detects the detection The absolute angle θ is calculated from the phase.

この発明の第1実施例に係る位置検出装置を模式的に示す説明図である。It is explanatory drawing which shows typically the position detection apparatus based on 1st Example of this invention. 図1に示す位置検出装置の適用例を示す説明図である。It is explanatory drawing which shows the example of application of the position detection apparatus shown in FIG. 図2に示す位置検出装置の検出原理を示す説明図である。It is explanatory drawing which shows the detection principle of the position detection apparatus shown in FIG. この発明の第2実施例に係る位置検出装置を模式的に示す説明図である。It is explanatory drawing which shows typically the position detection apparatus based on 2nd Example of this invention. 図4に示す位置検出装置の適用例を示す説明図である。It is explanatory drawing which shows the example of application of the position detection apparatus shown in FIG. この発明の第3実施例に係る位置検出装置を模式的に示す説明図である。It is explanatory drawing which shows typically the position detection apparatus which concerns on 3rd Example of this invention.

符号の説明Explanation of symbols

10 位置検出装置、10a 固定側、10b 変位側、12,42,62 固定側の導電板(導電体)、14,44,64 固定側の導電板(導電体)、16,46,66 変位側の導電板(導電体)、18,20,54,56,74,76 電源(第1、第2の電力供給手段)、22,48,68 変位側の導電板(導電体)、26,52,72 固定側の導電板(導電体)、30 位相検出回路、32 演算回路   DESCRIPTION OF SYMBOLS 10 Position detection apparatus, 10a Fixed side, 10b Displacement side, 12, 42, 62 Fixed side conductive plate (conductor), 14, 44, 64 Fixed side conductive plate (conductor), 16, 46, 66 Displacement side Conductive plate (conductor), 18, 20, 54, 56, 74, 76 Power source (first and second power supply means), 22, 48, 68 Displacement side conductive plate (conductor), 26, 52 , 72 Fixed side conductive plate (conductor), 30 phase detection circuit, 32 arithmetic circuit

Claims (3)

固定側に固定される複数個の固定側導電体と、変位側に固定されると共に、前記複数個の導電体と対向した位置に配置される変位側導電体と、前記複数個の固定側導電体に互いに異なる位相で電力を供給する第1、第2の電力供給手段と、前記複数個の固定側導電体と前記変位側導電体の間でそれぞれ生じる静電容量比を電位変化の位相として検出する位相検出手段と、前記検出された位相から変位量または絶対角を演算する演算手段とを備えたことを特徴とする位置検出装置。   A plurality of fixed-side conductors fixed to the fixed side, a displacement-side conductor fixed to the displacement side and disposed at a position facing the plurality of conductors, and the plurality of fixed-side conductors First and second power supply means for supplying electric power to the body in mutually different phases, and capacitance ratios generated between the plurality of fixed-side conductors and the displacement-side conductors as potential change phases A position detection apparatus comprising: phase detection means for detecting; and calculation means for calculating a displacement amount or an absolute angle from the detected phase. 前記固定側導電体と前記変位側導電体は、一定の離間距離をもって相対的に移動すると共に、前記演算手段は前記検出された位相から変位量を演算することを特徴とする請求項1記載の位置検出装置。   2. The fixed-side conductor and the displacement-side conductor move relative to each other with a constant separation distance, and the calculation means calculates a displacement amount from the detected phase. Position detection device. 前記固定側導電体と前記変位側導電体は、一定の離間距離をもって相対的に回転すると共に、前記演算手段は前記検出された位相から絶対角を演算することを特徴とする請求項1記載の位置検出装置。   2. The fixed-side conductor and the displacement-side conductor are relatively rotated with a constant separation distance, and the calculation means calculates an absolute angle from the detected phase. Position detection device.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011047679A (en) * 2009-08-25 2011-03-10 Seidensha Co Ltd Electrostatic encoder
JP2011163865A (en) * 2010-02-08 2011-08-25 Seidensha Co Ltd Rotating electrostatic encoder

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JPS62142203A (en) * 1985-12-17 1987-06-25 Ono Sokki Co Ltd Electrostatic capacity type angle detector
JPS6394102A (en) * 1986-10-08 1988-04-25 Chinon Kk Position detector
JPH0755414A (en) * 1994-08-22 1995-03-03 Sokkia Co Ltd Rotational angle measuring method
JP2002521655A (en) * 1998-07-22 2002-07-16 ビ−エイイ− システムズ パブリック リミテッド カンパニ− Capacitive position transducer

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Publication number Priority date Publication date Assignee Title
JPS62142203A (en) * 1985-12-17 1987-06-25 Ono Sokki Co Ltd Electrostatic capacity type angle detector
JPS6394102A (en) * 1986-10-08 1988-04-25 Chinon Kk Position detector
JPH0755414A (en) * 1994-08-22 1995-03-03 Sokkia Co Ltd Rotational angle measuring method
JP2002521655A (en) * 1998-07-22 2002-07-16 ビ−エイイ− システムズ パブリック リミテッド カンパニ− Capacitive position transducer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011047679A (en) * 2009-08-25 2011-03-10 Seidensha Co Ltd Electrostatic encoder
JP2011163865A (en) * 2010-02-08 2011-08-25 Seidensha Co Ltd Rotating electrostatic encoder

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