JP2007297098A - Packaging method and film case for film product - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a packaging method and a film case capable of effectively preventing the deformation of a film during the packaging, transport, etc., of a film product. <P>SOLUTION: The film case 16 for storing the film product 10 formed of a core member 12 and a film 14 wound around the core member includes at least a case body 18 in which the film product is stored, and a lid 24 fitted on the case body. The film product is stored in the case so that the film product is supported by the core member and, thereby, stored in the case body without touching the case body, and the lid is fitted to the case body without touching the film. The film product is stored in the film case and the film case is wrapped in the wrapping material. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a technique for packaging a film product, and more particularly, to a packaging method and a film case suitable for a film product that requires high flatness, such as a film used in the manufacture of semiconductor devices.

  Various films are used in the manufacturing process of semiconductor devices (see Patent Documents 1 to 4). For example, a film called a die attach film (DAF) or a die bond film (DBF) is used as a film for bonding between a substrate and a chip or between a chip and a chip.

When manufacturing such a film product, a film made of an organic material such as an epoxy resin is generally wound around an annular or cylindrical core member, and side plates such as PET are applied to both end faces of the film product. It is done. And after putting a film product into packaging bags, such as an aluminum bag, with a desiccant, it is packaged under a vacuum.
As described above, the film before use can be prevented from being soiled and deteriorated by applying the side plates to the both end faces of the film product and vacuum-packaging with the packaging bag.

  However, when the film product is vacuum-packed as described above, the film is pressed by the packaging bag, and a part of the film may be deformed due to external pressure applied during transportation, for example. In particular, since the die attach film is used for manufacturing a semiconductor device that requires extremely high flatness, there is a problem that even if the film is slightly deformed, the yield of the semiconductor device is greatly affected.

JP-A-5-335288 JP 2000-91357 A JP 2001-152107 A JP 2005-166773 A

  This invention is made in view of the above problems, and provides the packaging method and film case which can prevent the deformation | transformation of the film at the time of packaging of a film product, the time of transportation, etc. effectively. Objective.

  In order to achieve the above object, the present invention provides the following means.

<1> A method for packaging a film product comprising a core member and a film wound around the core member, wherein the film product is supported without supporting the core member and contacting the film with a packaging material. Is packaged with the packaging material.

<2> The film product packaging method according to <1>, wherein the film product is a die attach film.

<3> The film according to <1> or <2>, wherein the film has an adhesive layer, and a film product wound around the core member is packaged without providing a separator in the adhesive layer. This is a packaging method for film products.

<4> A film case for storing a film product including a core member and a film wound around the core member,
At least a case main body in which the film product is accommodated and a lid attached to the case main body, and the film product is supported by the core member so that the film contacts the case main body. The film product is housed in the case body, and the film product is housed in the case when the lid is attached to the case body without contacting the film.

<5> The film case according to <4>, wherein a support portion for supporting the core member of the film product is formed on the case body.

<6> In <4> or <5>, comprising a spacer for supporting the space between the film case and the core member of the film product housed in the film case It is a film case of description.

<7> The film case according to any one of <4> to <6>, wherein the case body and the lid are formed of polyethylene terephthalate.

<8> The film case according to any one of <4> to <7>, wherein the case body and the lid are not subjected to release treatment.

<9> A method of packaging a film product comprising a core member and a film wound around the core member, wherein the film product is the film case according to any one of <4> to <8> And a film case containing the film product is packaged with a packaging material.

<10> The film product packaging method according to <9>, wherein the film product in which the film is a die attach film is housed in the film case.

<11> The film has an adhesive layer, and a film product wound around the core member without providing a separator in the adhesive layer is stored in the film case <9> or <10> A film product packaging method according to <10>.

<12> The film product packaging method according to any one of <9> to <11>, wherein the film product is packaged by vacuum packaging.

  According to the present invention, the core member of the film product is supported and packaged so that the film part does not contact the packaging material. Therefore, when the film product is packaged, transported, etc., the film part is not compressed and the film is deformed. It can be effectively prevented.

Hereinafter, as a preferred embodiment of the present invention, a case where a film product in which a die attach film is wound around an annular (tubular) core member is packaged will be specifically described with reference to the accompanying drawings.
The present inventor has intensively studied about means capable of preventing deformation of a film even when an external pressure is applied when packaging or transporting a film product in which a film is wound around a core member. As a result, the present inventors support the core member of the film product when packaging the film product with a packaging material such as a packaging bag, and if the film product is packaged with the packaging material without contacting the film with the packaging material, In addition to preventing contamination of the film, it has been found that deformation of the film can be effectively prevented, and further investigations have been made to complete the present invention.

  FIG. 1 schematically shows a cross section of an example of a film case according to the present invention that can be suitably used when packaging a film product. The film case 16 includes a case main body 18 in which the film product 10 is accommodated and a lid 24 attached to the case main body 18, and a spacer 26 is provided as a support portion for supporting the film product 10. ing.

  The case main body 18 has a substantially trapezoidal cross section, and an accommodating portion 20 for accommodating the film product 10 is formed in an annular shape. A frustoconical protrusion 22 is formed inside the accommodating portion 20, and when the film product 10 is accommodated in the case body 18 (accommodating portion 20), the film product 10 is positioned via the protruding portion 22. be able to.

  The lid 24 has a shape that covers the upper surface and the side surface of the case body 18, and can be mounted in a state of being in close contact with the side surface of the case body 18.

  The material of the film case 16 is not particularly limited, but plastic is preferable in view of more reliably preventing the film 14 from being contaminated and considering moldability, strength, material cost, and the like. For example, if the case body 18 and the lid 24 are made of polyethylene terephthalate (PET), the molding is easy, the case has sufficient strength, and the cost can be kept low. In addition, PET which recycled the PET bottle for drinks can also be used as a raw material.

  The film case 16 is preferably not subjected to release treatment. The release treatment material generally contains silicon, and when the die attach film comes into contact with such a release material, the adhesive force of the film may be weakened. Accordingly, when the film case 16 according to the present invention is manufactured, it is preferable that a mold material for molding is not used with a release material, and is molded with a resin material that has not been subjected to a release treatment, particularly PET.

  The spacers 26 are respectively provided on the case body 18 and the lid 24 so that the core member 12 can be supported between the case body 18 and the lid 24. Such a spacer 26 may be fixed to the case 16 (the main body 18 and the lid 24), or provided between the case 16 and the core member 12 when the film product 10 is stored separately from the case 16. May be.

  About the material of the spacer 26, in order to support the core member 12 of the film product 10, it is preferable to use an elastic material. For example, a foamed polyethylene spacer 26 is suitable because it is lightweight and has excellent elasticity. If the core member 12 is supported by such a spacer 26, the fluttering (movement) of the film product 10 can be reliably prevented even if vibration is applied during transportation.

Next, a procedure for storing the film product 10 in the film case 16 as described above and further packaging with the packaging material will be described.
First, the film product 10 is accommodated in the accommodating portion 20 of the case body 18. At this time, as shown in FIG. 1, the core member 12 of the film product 10 is supported by the spacer 26, and the film 14 wound around the core member 12 is accommodated in the accommodating portion 20 without contacting the case body 18. To be. The dimensions of the case main body 18, the accommodating portion 20, the spacer 26, etc. may be set in consideration of the outer diameter of the film product 10 to be accommodated, the inner diameter of the core member 12, the width of the film 14, and the like.

  After the film product 10 is accommodated in the case main body 18 (accommodating portion 20), the lid 24 is attached to the main body 18. As shown in FIG. 1, the film product 10 accommodated in the case main body 18 is supported by the spacer 26 even between the core member 12 and the lid 24, and the lid 24 and the spacer 26 do not contact the film 14. .

  Since the core member 12 of the film product 10 is supported by the spacer 26 as described above, the entire film product is accommodated in the case 16 without the case body 18 and the lid 24 coming into contact with the film 14. That is, the film product 10 is supported by only the core member 12 in the case, and the film portion 14 is held in a non-contact state with the case or the like.

After the film product 10 is stored in the film case 16, the film case 16 is packaged with a packaging material.
The packaging material is not particularly limited, and the film case 16 in which the film product 10 is stored may be put in a packaging bag such as an aluminum bag, and then the opening may be heat-sealed and packaged under vacuum. Alternatively, the case 16 may be packaged using wrapping paper.

  As described above, when the film product 10 is stored in the film case 16 according to the present invention and wrapped in a bag or the like, the film portion 14 is held in a non-contact state in the case even if vacuum packaging is performed, for example. Therefore, the film 14 is not pressed by the packaging bag. In particular, when packaging a film product 10 that requires extremely high flatness, such as a die attach film used in the manufacture of semiconductor devices, if it is packaged after being stored in the film case 16 according to the present invention, the contamination of the film 14 In addition to preventing deterioration, even if an external pressure is applied during packaging or transportation, the film 14 can be reliably prevented from being deformed.

  In addition, the structure of a film is not specifically limited, The film which consists of one layer or several layers may be sufficient. For example, in a film having an adhesive layer, there are a film in which an adhesive layer is provided with a separator and a film in which the separator is not provided with a separator. In particular, a film product without a separator is likely to be deformed when the film part is pressed. However, if the film case 16 according to the present invention is used, the film part 10 does not come into contact with the case body 18 or the lid 24. It can be stored in a state and packaged with a packaging material. Therefore, even a film product in which a film without a separator is wound can reliably prevent deformation due to compression during packaging.

  Examples of the present invention and comparative examples will be described below.

[Example]
<Film products>
FIG. 2 shows a schematic shape of the film product 10 used in the example.
As the core member 12, three types (2.0 mm, 3.0 mm, 4.0 mm) of an annular body made of ABS resin and having different widths (portion D in FIG. 2) were prepared.
On the other hand, two types of die attach films (25 μm and 40 μm) having different thicknesses were prepared as the film 14. Table 1 shows the mechanical properties of the die attach film.

The die attach film 14 as described above was wound around the core member 12 to obtain a film product 10. The winding conditions were a tension of 0.5 kgf · m and a winding speed of 5 m / min.
Table 2 shows the dimensions of the core member and film portion of the produced film product.

<Film case>
Using polyethylene terephthalate (NOACRYSTAL-M, manufactured by RP Topra Co., Ltd.), which is a recycled material for PET bottles, a case body 18 and a lid 24 having the shapes shown in FIG. 1 were formed. The dimensions of the case body and the lid were both 160 mm × 160 mm and the thickness was 0.3 mm. In addition, the said raw material was PET (100%) which was not mold-release-processed, and it shape | molded without using a mold release material also for the metal mold | die for shaping | molding. Table 3 shows the physical property values of the used PET.

<Spacer>
Spacers were produced using foamed polyethylene (Sanperca (L-2500), manufactured by Sanwa Chemical Co., Ltd.). The inner diameter and outer diameter of the spacer were the same size as the core member of the film product. Table 4 shows the physical property values of the used polyethylene foam.

The film product was vacuum packaged using a film case and an aluminum bag.
Specifically, as shown in FIG. 3, the film product 10 was accommodated in the accommodating portion 20 of the case body 18, and a lid 24 was attached to the case body 18. Spacers (not shown) were provided between the core member 12 and the case (main body 18 and lid 24).
After storing the film product 10 in the case as described above, the cases were individually placed in the aluminum bag 30 together with the silica gel 28, and the opening of the bag 30 was heat-sealed and vacuum packaged (the degree of vacuum during packaging: − 66.5 kPa).

[Comparative example]
Based on the conventional method, the said film product 10 was vacuum-packed with the aluminum bag.
Specifically, a side plate (120 mm × 120 mm) made of PET having a thickness of 200 μm was prepared, and the above-described side plates 32 were applied to both end faces of the film product 10 as shown in FIG. Such a film product 10 was individually put into an aluminum bag 30 together with silica gel 28, and the opening of the bag 30 was heat-sealed and vacuum packaged (vacuum degree during packaging: -66.5 kPa).

<Measurement of deformation>
After carrying out vacuum packaging in each of the examples and comparative examples as described above, the bag 30 was opened, the film product 10 was taken out, and the presence or absence of deformation of the film 14 was visually confirmed.
As a result, no deformation of the film 14 was observed in the film product 10 packaged in the examples. On the other hand, in the film product 10 packaged in the comparative example, deformation as shown in FIG. Such deformation of the film portion is considered to be caused by compression during packaging.

  Further, the amount of deformation of the film portion 14 was measured using calipers. The dimensions of the portion (X, Y) shown in FIG. 5 were measured with calipers (CD-15CP, manufactured by Mitutoyo Corporation, minimum display digit: 0.01 mm), and the height (Z) of the deformed portion was calculated. The results are shown in Table 5.

As is clear from Table 5, it was found that the film of the example (sample 1-5) was not deformed even by measurement with calipers. On the other hand, deformation of 0.15 to 0.5 mm was recognized in the film of the comparative example (Sample 6-10).
From these results, when the film product is stored in the film case according to the present invention and then wrapped in the packaging bag, the film portion 14 is held in a non-contact state in the case, and thus is not compressed by the packaging bag. It can be seen that deformation of the film can be effectively prevented.

As mentioned above, although this invention was demonstrated, this invention is not limited to said embodiment and Example.
For example, in the embodiments and the like, the case of packaging a film product in which a die attach film is wound around an annular core member has been described. However, the film product is not particularly limited, and the present invention has high flatness in the manufacture of semiconductor devices. It can be applied to the storage and packaging of other required films or films used in fields other than the manufacture of semiconductor devices.

  Moreover, about the film case, although what supported the core member with the spacer was demonstrated, you may make it support a core member with a case main body, without providing a spacer. For example, it is assumed that the diameter of the frustoconical protrusion in the accommodating portion is formed below the inner diameter of the core member. Such a frustoconical protrusion can act as a support, and can be inserted into the core member of the film product and supported by the protrusion of the case body. However, also in this case, if the spacer 26 as shown in FIG. 1 is provided to support the core member 12, fluttering (movement) of the film product during transportation or the like can be prevented more reliably.

  Moreover, the utilization form of the film case which concerns on this invention is not specifically limited, For example, after storing a film product in a case, you may store, transport, etc. as it is, without packaging with a packaging material.

  Furthermore, the packaging method according to the present invention does not necessarily require the use of a film case as shown in the figure. When packaging a film product, the film product is supported without supporting the core member of the film product and contacting the film with the packaging material. Is packaged with a packaging material, and is included in the present invention.

It is a schematic sectional drawing which shows an example of the film case which concerns on this invention. It is the schematic for demonstrating the dimension of the film product used by the Example and the comparative example. (A) Top view (B) Side view It is the schematic explaining the packaging method of the film product in an Example. It is the schematic explaining the packaging method of the film product in a comparative example. It is the schematic which shows the deformation | transformation of a film part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Film product 12 Core member 14 Film 16 Film case 18 Case main body 20 Storage part 22 Protrusion part (support part)
24 Lid 26 Spacer (support)
30 Aluminum bag (packaging material)

Claims (12)

  A method of packaging a film product comprising a core member and a film wound around the core member, wherein the film product is supported without supporting the core member and contacting the film with a packaging material. A film product packaging method characterized by packaging with a material.   The film product packaging method according to claim 1, wherein the film product is a die attach film.   The film product according to claim 1, wherein the film has an adhesive layer, and the film product wound around the core member is packaged without providing a separator in the adhesive layer. Packaging method. A film case for storing a film product comprising a core member and a film wound around the core member,
At least a case main body in which the film product is accommodated and a lid attached to the case main body, and the film product is supported by the core member so that the film contacts the case main body. The film product is housed in the case body, and the film product is housed in the case by being attached to the case body without contacting the film.   The film case according to claim 4, wherein a support portion for supporting a core member of the film product is formed on the case main body.   6. The film according to claim 4, further comprising a spacer for supporting a space between the film case and a core member of the film product accommodated in the film case. Case.   The film case according to any one of claims 4 to 6, wherein the case main body and the lid are formed of polyethylene terephthalate.   The film case according to any one of claims 4 to 7, wherein the case main body and the lid are not subjected to release treatment.   A method for packaging a film product comprising a core member and a film wound around the core member, wherein the film product is placed in the film case according to any one of claims 4 to 8. A film product packaging method comprising: housing and packaging a film case containing the film product with a packaging material.   The film product packaging method according to claim 9, wherein a film product in which the film is a die attach film is stored in the film case.   The film according to claim 9 or 10, wherein the film has an adhesive layer, and a film product wound around the core member without providing a separator in the adhesive layer is stored in the film case. The packaging method of the film product as described in 2.   The film product packaging method according to any one of claims 9 to 11, wherein the film product is packaged by vacuum packaging.

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