JP2007293097A - Y-branched optical waveguide - Google Patents

Y-branched optical waveguide Download PDF

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JP2007293097A
JP2007293097A JP2006122013A JP2006122013A JP2007293097A JP 2007293097 A JP2007293097 A JP 2007293097A JP 2006122013 A JP2006122013 A JP 2006122013A JP 2006122013 A JP2006122013 A JP 2006122013A JP 2007293097 A JP2007293097 A JP 2007293097A
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branch
optical waveguide
waveguide
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Hiroshi Shirai
宏 白井
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Coorstek KK
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Covalent Materials Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a Y-branched optical waveguide that facilitates manufacturing while practical branching efficiency is secured. <P>SOLUTION: The Y-branched optical waveguide 10 branches light propagating in one input waveguide 11 into two directions by two branching waveguides 12a, 12b. The branched tip end part 13 held between the two branching waveguides 12a, 12b is provided with a stepped structure comprising a tip end face 13a vertical to the longitudinal direction of the input waveguide 11, a side face 13b orthogonal to the tip end face 13a, and a bottom face 13c orthogonal to the side face 13b, wherein the width d<SB>1</SB>of the tip end face 13a is made wider than the width D of the input waveguide 11. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は光通信等に使用されるY分岐光導波路に関する。   The present invention relates to a Y-branch optical waveguide used for optical communication and the like.

従前より、図4Aに示すように、X方向に平行に設けられた1本の入力導波路91を伝搬する光を2本の分岐導波路92a,92bにより2方向に分岐するY分岐光導波路(スプリッタ)90として、2本の分岐導波路92a,92bによって挟まれた分岐先端部93の形状が楔形であるものが知られている。この分岐角θが小さいほど分岐効率はよいが、分岐角θが小さく、尖った形状の分岐先端部93を有するY分岐光導波路の製造には技術的困難が伴う。また、製造した場合の製品の特性ばらつきも大きい。   Conventionally, as shown in FIG. 4A, a Y-branching optical waveguide that branches light propagating through one input waveguide 91 provided in parallel with the X direction in two directions by two branching waveguides 92a and 92b ( A splitter 90 is known in which the shape of a branch tip 93 sandwiched between two branch waveguides 92a and 92b is a wedge shape. The smaller the branch angle θ is, the better the branching efficiency is. However, the manufacture of a Y-branch optical waveguide having a small branch angle θ and a sharply branched branch tip 93 is accompanied by technical difficulties. In addition, there is a large variation in product characteristics when manufactured.

このような問題を解決するために、図4Bに示すように、入射方向と直交する平坦面を有する分岐先端部94を有するY分岐光導波路90Aや、図4Cに示すように、入力導波路91に向けて突出した平面略長方形の突起95aを備えた分岐先端部95を有するY分岐光導波路90Bが知られている(例えば、特許文献1,非特許文献1参照)。   In order to solve such a problem, as shown in FIG. 4B, a Y-branch optical waveguide 90A having a branching tip 94 having a flat surface perpendicular to the incident direction, or an input waveguide 91 as shown in FIG. 4C. There is known a Y-branch optical waveguide 90B having a branching tip portion 95 provided with a substantially rectangular projection 95a projecting toward (see, for example, Patent Literature 1 and Non-Patent Literature 1).

しかしながら、図4Bに示す構造のY分岐光導波路90Aでは、分岐効率が低くなるという問題がある。また、入射方向と直交する平坦面による反射光により放射モードになりやすい。   However, the Y-branch optical waveguide 90A having the structure shown in FIG. 4B has a problem that the branching efficiency is lowered. Moreover, it becomes easy to become a radiation mode by the reflected light by the flat surface orthogonal to an incident direction.

一方、図4Cに示す構造のY分岐光導波路90Bでは、突起95aの幅を細くしなければならないが、これには、分岐角θの小さい尖った形状の分岐先端部93を有するY分岐光導波路と同様に、製造に技術的な困難が伴う。
特開2003−185867号公報(図6等) 沢真之輔、藪哲郎、真瀬博仁、下代雅哲,「最適化法による新構造低損失Y分岐光導波路の低損失化」,電子情報通信学会技術研究報告,(1997),LQE−97〜100
On the other hand, in the Y-branch optical waveguide 90B having the structure shown in FIG. 4C, the width of the protrusion 95a must be narrowed. For this purpose, a Y-branch optical waveguide having a sharp branching tip 93 having a small branching angle θ is included. As with manufacturing, there are technical difficulties in manufacturing.
JP2003-185867A (FIG. 6 etc.) Shinnosuke Sawa, Tetsuro Tsuji, Hirohito Mase, Masatsugu Shimodai, “Reducing Loss of New Structure Low Loss Y-Branch Optical Waveguide by Optimization Method”, IEICE Technical Report, (1997), LQE-97 ~ 100

本発明はかかる事情に鑑みてなされたものであり、実用的な分岐効率を確保しながら、製造が容易であるY分岐光導波路を提供することを目的とする。   The present invention has been made in view of such circumstances, and an object thereof is to provide a Y-branch optical waveguide that is easy to manufacture while ensuring practical branching efficiency.

本発明によれば、三次元の光導波路を2次元のスラブ導波路として見たときに、1本の入力導波路を伝搬する光を2本の分岐導波路により2方向に分岐するY分岐光導波路であって、前記2本の分岐導波路によって挟まれた分岐先端部は、前記入力導波路の長手方向に垂直な先端面と、該先端面と直交する側面と、該側面と直交する底面とを備えた階段状に形成され、前記先端面の幅が前記入力導波路の幅よりも広いことを特徴とするY分岐光導波路が提供される。   According to the present invention, when a three-dimensional optical waveguide is viewed as a two-dimensional slab waveguide, Y-branched light that branches light propagating through one input waveguide in two directions by two branch waveguides. A branch tip portion sandwiched between the two branch waveguides includes a tip surface perpendicular to the longitudinal direction of the input waveguide, a side surface orthogonal to the tip surface, and a bottom surface orthogonal to the side surface. And a Y-branch optical waveguide characterized in that the width of the tip end face is wider than the width of the input waveguide.

なお、実際には三次元構造を有する光導波路を二次元スラブ導波路として規定するのは、当業者が計算の都合上よく利用する手法であり、二次元として見た場合でも実際の三次元の光導波路の特性を十分に把握することができる(例えば、“藪哲郎、沢真之輔,「光導波路の解析法」,光学(1998),27巻11号,pp632−639”参照)。   In practice, the definition of an optical waveguide having a three-dimensional structure as a two-dimensional slab waveguide is a technique used by those skilled in the art for convenience of calculation, and even when viewed as two-dimensional, The characteristics of the optical waveguide can be sufficiently grasped (for example, see “Tetsuro Tsuji, Shinnosuke Sawa,“ Analysis Method of Optical Waveguide ”, Optics (1998), Vol. 27, No. 11, pp 632-639)).

このY分岐光導波路では、入力導波路の幅を4μm〜6μm、分岐先端部の幅を8μm〜12μm、分岐先端部の長さを10μm〜350μm、2本の分岐導波路の分岐角を1.8度〜5.0度とすることが好ましい。   In this Y branch optical waveguide, the width of the input waveguide is 4 μm to 6 μm, the width of the branch tip is 8 μm to 12 μm, the length of the branch tip is 10 μm to 350 μm, and the branch angle of the two branch waveguides is 1. It is preferable to set it at 8 degrees to 5.0 degrees.

また本発明によれば、三次元の光導波路を2次元のスラブ導波路として見たときに、1本の入力導波路を伝搬する光を2本の分岐導波路により2方向に分岐するY分岐光導波路であって、前記2本の分岐導波路によって挟まれた分岐先端部は、前記入力導波路の長手方向に垂直な先端面と、該先端面と直交する側面と、該側面と直交する底面とを備えた階段状に形成され、前記入力導波路の幅は4μm〜6μm、前記先端面の幅は2μm〜4μm、前記側面の長さが10μm〜200μm、前記2本の分岐導波路の分岐角は1.6度〜2.0度であることを特徴とするY分岐光導波路が提供される。   Further, according to the present invention, when a three-dimensional optical waveguide is viewed as a two-dimensional slab waveguide, the Y-branch branches light propagating through one input waveguide in two directions by two branch waveguides. An optical waveguide having a branching tip portion sandwiched between the two branching waveguides, a tip surface perpendicular to the longitudinal direction of the input waveguide, a side surface orthogonal to the tip surface, and a right angle to the side surface The input waveguide has a width of 4 μm to 6 μm, the tip surface has a width of 2 μm to 4 μm, the side surface has a length of 10 μm to 200 μm, and the two branch waveguides have a bottom surface. A Y-branch optical waveguide having a branching angle of 1.6 degrees to 2.0 degrees is provided.

これらY分岐光導波路は、波長が1.50μm〜1.60μmの光を分岐し、伝搬するために好適に用いられる。   These Y branch optical waveguides are preferably used for branching and propagating light having a wavelength of 1.50 μm to 1.60 μm.

本発明のY分岐光導波路は、実用的な分岐効率を確保しながら、製造が容易である。特に、従来の分岐先端が平坦である形状のものと比較すると、その分岐先端の位置が同じ場合に高い分岐効率を得ることができる。   The Y-branch optical waveguide of the present invention is easy to manufacture while ensuring practical branching efficiency. In particular, when compared with a conventional shape having a flat branch tip, a high branching efficiency can be obtained when the position of the branch tip is the same.

以下、本発明の実施の形態について図面を参照しながら詳細に説明する。図1にY分岐光導波路の概略構造を示す。このY分岐光導波路10は、幅Dを有する1本のシングルモードの入力導波路11と、この入力導波路11を伝搬する光を分岐角θで2方向に分岐する2本の分岐導波路12a,12bを有している。これら入力導波路11および分岐導波路12a,12bはコア部となり、それ以外の部分はクラッド部となっている。   Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 shows a schematic structure of a Y branch optical waveguide. This Y-branch optical waveguide 10 includes one single-mode input waveguide 11 having a width D and two branch waveguides 12a that branch light propagating through the input waveguide 11 in two directions at a branch angle θ. , 12b. These input waveguide 11 and branching waveguides 12a and 12b are core portions, and the other portions are clad portions.

なお、図1は平面的に示されているが、実際のY分岐光導波路10は紙面に垂直な方向に厚みを有する。図1に示すように、入力導波路11の光伝搬方向をX方向とする。また、図1では、Y字に分岐した分岐導波路12a,12bはそれぞれ、その後にX方向に平行となっているが、これは後述するBPM計算に用いたY分岐光導波路の構造を反映させたものである。   1 is shown in a plan view, the actual Y-branch optical waveguide 10 has a thickness in a direction perpendicular to the paper surface. As shown in FIG. 1, the light propagation direction of the input waveguide 11 is assumed to be the X direction. Further, in FIG. 1, the branch waveguides 12a and 12b branched into Y-shapes are respectively parallel to the X direction thereafter, which reflects the structure of the Y-branch optical waveguide used for the BPM calculation described later. It is a thing.

2本の分岐導波路12a,12bによって挟まれた三角状部15の先端には、階段状の分岐先端部13が形成されている。   A step-shaped branch tip 13 is formed at the tip of the triangular portion 15 sandwiched between the two branch waveguides 12a and 12b.

この分岐先端部13は、入力導波路11の光伝搬方向であるX方向と直交する辺P−Pを含む面(以下「先端面」といい、図1において符号‘13a’で示す)と、この辺P−Pと直交する面(以下「側面」といい、図1において符号‘13b’で示す)と、この側面と直交し、分岐導波路12a,12bのそれぞれの内側壁14a,14bと交差する面(以下「底面」といい、図1において符号‘13c’で示す)とを有している。点P,Pはそれぞれ内側壁14a,14bの延長上にある。 The branch tip 13 includes a plane including sides P 1 -P 2 orthogonal to the X direction, which is the light propagation direction of the input waveguide 11 (hereinafter referred to as “tip plane”, and indicated by reference numeral “13a” in FIG. 1). And a plane orthogonal to the side P 1 -P 2 (hereinafter referred to as “side surface”, indicated by reference numeral “13b” in FIG. 1), and an inner wall 14a of each of the branched waveguides 12a and 12b orthogonal to the side surface. , 14b (hereinafter referred to as “bottom surface” and indicated by reference numeral “13c” in FIG. 1). Points P 1 and P 2 are on extensions of the inner walls 14a and 14b, respectively.

この先端面13aの幅dは辺P−Pの長さで規定される。また、側面13bの長さLはそのX方向長さで規定される。 Width d 1 of the distal end surface 13a is defined by the length of the side P 1 -P 2. The length L 1 of the side surface 13b is defined by its X-direction length.

Y分岐光導波路10では、先端面13aの幅dを入力導波路11の幅Dよりも広くする。つまり、D<dとする。これにより製造を容易とし、かつ、実用上問題のない所望の分岐効率を得ることができる。特に、入力導波路11の終点位置(X方向の終点)を基準としたときの先端面13aのX方向位置が、図4Bに示したY分岐光導波路90Aにおける入力導波路91の終点位置を基準としたときの分岐先端部94の先端面のX方向位置と同じである場合に、分岐効率を高めることができる。 In the Y branch optical waveguide 10, the width d 1 of the tip surface 13 a is made wider than the width D of the input waveguide 11. That is, the D <d 1. As a result, manufacturing can be facilitated and desired branching efficiency can be obtained without any practical problems. In particular, the X-direction position of the tip surface 13a with reference to the end point position (X-direction end point) of the input waveguide 11 is based on the end point position of the input waveguide 91 in the Y-branch optical waveguide 90A shown in FIG. 4B. When the position is the same as the position in the X direction of the front end surface of the branch front end portion 94, the branching efficiency can be increased.

Y分岐光導波路10では、具体的には、分岐角θを1.8度〜5.0度(°)、入力導波路11の幅Dを4μm〜6μmとしたときに、先端面13aの幅dを8μm〜12μm、側面13bの長さLを10μm〜350μmとすることが好ましい。このような形状を有する場合に、シングルモードの入力導波路11に入射させる光の波長としては、1.50μm〜1.60μmが好適であり、高い分岐効率を得ることができる。 Specifically, in the Y branch optical waveguide 10, when the branch angle θ is 1.8 degrees to 5.0 degrees (°) and the width D of the input waveguide 11 is 4 μm to 6 μm, the width of the distal end surface 13a. It is preferable that d 1 is 8 μm to 12 μm, and the length L 1 of the side surface 13 b is 10 μm to 350 μm. In the case of such a shape, the wavelength of light incident on the single mode input waveguide 11 is preferably 1.50 μm to 1.60 μm, and high branching efficiency can be obtained.

図2に別のY分岐光導波路10Aの概略構造を示す。このY分岐光導波路10Aが図1に示されたY分岐光導波路10と相違する点は、その分岐先端部13における先端面13aの幅dが入力導波路11の幅Dよりも狭い、つまり、D>dとなっている点であり、このような形状に起因して、所望の分岐効率を得るためにその形状に制限がある。 FIG. 2 shows a schematic structure of another Y-branch optical waveguide 10A. That the Y branch optical waveguide 10A is different from the Y branch optical waveguide 10 shown in FIG. 1 is narrower than the width D of the width d 2 is the input waveguide 11 of the front end surface 13a of the branch tip 13, i.e. , D> d 2, and due to such a shape, there is a limitation on the shape in order to obtain a desired branching efficiency.

Y分岐光導波路10Aでは、入力導波路11の終点位置を基準としたときの分岐先端部13の先端面13aのX方向位置が、図4Bに示したY分岐光導波路90Aにおける入力導波路91の終点位置を基準としたときの分岐先端部94の先端面のX方向位置と同じであり、かつ、分岐角θが1.6°〜2.0°と小さいときに、Y分岐光導波路90Aよりも分岐効率を高めることができる。しかし、例えば分岐角θが5°と大きい場合には、Y分岐光導波路90Aよりも分岐効率は低下する。この原因は定かではないが、Y分岐光導波路10Aの分岐先端部13における底面13cにより放射モードになりやすく、これにより分岐効率が低下しているものと推測される。   In the Y branch optical waveguide 10A, the position in the X direction of the distal end surface 13a of the branch distal end portion 13 when the end point position of the input waveguide 11 is used as a reference is the same as that of the input waveguide 91 in the Y branch optical waveguide 90A shown in FIG. 4B. From the Y-branch optical waveguide 90A, when the end point position is the same as the position in the X direction of the distal end surface of the branch distal end portion 94 and the branch angle θ is as small as 1.6 ° to 2.0 °. Can also increase the branching efficiency. However, for example, when the branch angle θ is as large as 5 °, the branching efficiency is lower than that of the Y-branch optical waveguide 90A. Although this cause is not certain, it is presumed that the radiation efficiency is likely to be caused by the bottom surface 13c of the branch tip portion 13 of the Y-branch optical waveguide 10A, thereby reducing the branching efficiency.

Y分岐光導波路10Aでは、分岐角θが1.6°〜2.0°で、入力導波路の幅が4μm〜6μmのときに、先端面13aの幅dを2μm〜4μm、側面13bの長さLを10μm〜200μmとする。Y分岐光導波路10Aでも、入力導波路11に入射させる光の波長としては、1.50μm〜1.60μmが好適である。 In the Y branch optical waveguide 10A, when the branch angle θ is 1.6 ° to 2.0 ° and the width of the input waveguide is 4 μm to 6 μm, the width d 2 of the tip surface 13a is 2 μm to 4 μm and the side surface 13b the length L 2 to 10 m to 200 m. Also in the Y branch optical waveguide 10A, the wavelength of light incident on the input waveguide 11 is preferably 1.50 μm to 1.60 μm.

上述した構造を有するY分岐光導波路10,10Aについて、比屈折率差(Δ)が0.476%の場合の二次元ビーム伝播法(BPM;beam propagation method)による計算を行った。この計算は二次元スラブ導波路計算であるが、3次元の光導波路の光分岐特性を良好に再現する。   For the Y-branch optical waveguides 10 and 10A having the above-described structure, calculation was performed by a two-dimensional beam propagation method (BPM) when the relative refractive index difference (Δ) was 0.476%. This calculation is a two-dimensional slab waveguide calculation, but reproduces the optical branching characteristics of a three-dimensional optical waveguide well.

0.476%という比屈折率差(Δ)は通常の矩形導波路の比屈折率差のレベルの数値である。BPM計算には、BPM計算用ソフトであるOptiwave社のOptiBPMを用いた。計算パラメータの設定では、入力導波路11の幅D=5μm、コア部の屈折率n=1.467、クラッド部の屈折率n=1.460として、シングルモードの二次元スラブ導波路を設定した。また、分岐角θは、1.8°および5.0°とした。入射光はTE偏光(すなわち、電気ベクトルの方向は紙面に垂直)とし、その波長は1.55μmとした。 The relative refractive index difference (Δ) of 0.476% is a numerical value of the level of the relative refractive index difference of a normal rectangular waveguide. For the BPM calculation, OptiBPM manufactured by Optiwave, which is BPM calculation software, was used. In setting the calculation parameters, the width D of the input waveguide 11 is 5 μm, the refractive index n 1 of the core portion is 1.467, and the refractive index of the cladding portion is n 2 = 1.460. Set. Further, the branch angle θ was set to 1.8 ° and 5.0 °. The incident light was TE-polarized light (that is, the direction of the electric vector was perpendicular to the paper surface), and its wavelength was 1.55 μm.

分岐導波路12a,12bの幅は、図1のように入力導波路11と分岐導波路12a,12bを設定すると、厳密には分岐前の入力導波路11の幅よりも狭くなるが、分岐角θが小さいことから、近似的に、入力導波路11の幅Dと同じとした。   If the input waveguide 11 and the branch waveguides 12a and 12b are set as shown in FIG. 1, the width of the branch waveguides 12a and 12b is narrower than the width of the input waveguide 11 before branching. Since θ is small, it is approximately the same as the width D of the input waveguide 11.

このような条件の下に、BPM計算では、分岐先端部13の先端面13aの幅d,dと、側面13bの長さL,Lを種々に変えた計算モデルを設定した。また、比較のために、図4Aに示した構造のY分岐光導波路90(参考例1,2;幅d=0μm、長さL=0μm)、図4Bに示す構造のY分岐光導波路90A(比較例1〜3,5;長さL=0μm)についても同様の計算を行った。なお、この計算結果は全ての計算モデルにおいて、図1,図2に示したようにY字に分岐した分岐導波路12a,12bそれぞれのX方向に平行となっている部分での値である。 Under such conditions, in the BPM calculation, calculation models were set in which the widths d 1 and d 2 of the tip surface 13a of the branch tip 13 and the lengths L 1 and L 2 of the side surface 13b were variously changed. For comparison, a Y-branch optical waveguide 90 having the structure shown in FIG. 4A (Reference Examples 1 and 2; width d 1 = 0 μm, length L 1 = 0 μm), and a Y-branch optical waveguide having the structure shown in FIG. 4B The same calculation was performed for 90A (Comparative Examples 1 to 3, 5; length L 1 = 0 μm). This calculation result is a value in a portion parallel to the X direction of each of the branched waveguides 12a and 12b branched in a Y shape as shown in FIGS. 1 and 2 in all calculation models.

その結果を表1に示す。この表1中の「分岐効率」は、入力導波路11に入射するシングルモードの伝播光のパワーに対して分岐導波路12a,12bに分岐されてシングルモード伝播する光のパワーの比率を示す。分岐導波路12a,12bの構造が同じであれば、これら分岐導波路12a,12bの分岐効率も同じであり、理想的には損失無しの場合に0.5(50%)となる。今回の設定では、分岐導波路12a,12bは同じ構造としている。   The results are shown in Table 1. The “branching efficiency” in Table 1 indicates the ratio of the power of the light that is branched into the branching waveguides 12 a and 12 b and propagates in the single mode with respect to the power of the propagation light in the single mode incident on the input waveguide 11. If the structures of the branch waveguides 12a and 12b are the same, the branch efficiencies of the branch waveguides 12a and 12b are also the same, and ideally 0.5 (50%) when there is no loss. In this setting, the branching waveguides 12a and 12b have the same structure.

また「効率向上割合」は、入力・分岐導波路幅,先端幅,分岐角が同じときの、比較例1〜3,5それぞれの分岐効率に対する各計算モデルの分岐効率の比で表される。

Figure 2007293097
The “efficiency improvement ratio” is represented by the ratio of the branch efficiency of each calculation model to the branch efficiency of each of Comparative Examples 1 to 3 and 5 when the input / branch waveguide width, the tip width, and the branch angle are the same.
Figure 2007293097

この表1に示されるように、図4Aに示す構造を有するY分岐光導波路90は、参考例1,2の結果に示されるように、分岐角θが1.8°,5.0°のいずれの場合でも、分岐角θが同じ他の計算モデルと比較して大きな分岐効率を示していることがわかる。しかしながら、先に説明した通り、Y分岐光導波路90の製造が容易ではない。   As shown in Table 1, the Y-branch optical waveguide 90 having the structure shown in FIG. 4A has branch angles θ of 1.8 ° and 5.0 ° as shown in the results of Reference Examples 1 and 2. In any case, it can be seen that the branching efficiency is larger than that of other calculation models having the same branching angle θ. However, as described above, the manufacture of the Y-branch optical waveguide 90 is not easy.

比較例1と実施例1との比較から明らかなように、分岐角θが1.8°で、分岐先端部13の幅が3μm(=d)の場合、実施例1(Y分岐光導波路10A)の分岐効率は、比較例1(Y分岐光導波路90A)に対して、僅かではあるが向上する。 As is clear from the comparison between Comparative Example 1 and Example 1, when the branch angle θ is 1.8 ° and the width of the branch tip 13 is 3 μm (= d 2 ), Example 1 (Y-branch optical waveguide) The branching efficiency of 10A) is slightly improved as compared with Comparative Example 1 (Y-branch optical waveguide 90A).

比較例2と実施例2とを比較すると、分岐角θが1.8°で、分岐先端部13の幅が10μm(=d)の場合には、実施例2(Y分岐光導波路10)の分岐効率は、比較例2(Y分岐光導波路90A)の1.54倍に向上する。 Comparing Comparative Example 2 and Example 2, when the branch angle θ is 1.8 ° and the width of the branch tip 13 is 10 μm (= d 1 ), Example 2 (Y-branch optical waveguide 10) Is improved to 1.54 times that of Comparative Example 2 (Y-branch optical waveguide 90A).

比較例3(Y分岐光導波路90A)は比較例1に対して分岐角θを5°とした構造を有しており、一方、比較例4は、実施例1に対して分岐角θを5°とし、階段状の分岐先端部を有する構造を有するが、比較例3よりも分岐効率が低下している。これは、分岐角θが大きくなると、階段状の分岐先端部が有する底面の面積が大きくなるために、放射モードが増えることによるものと推測される。   Comparative Example 3 (Y-branch optical waveguide 90A) has a structure in which the branching angle θ is 5 ° with respect to Comparative Example 1, while Comparative Example 4 has a branching angle θ of 5 with respect to Example 1. However, the branching efficiency is lower than that of Comparative Example 3. This is presumably because the radiation mode increases because the area of the bottom surface of the stepped branch tip increases as the branch angle θ increases.

比較例5(Y分岐光導波路90A)に対する実施例3〜5(Y分岐光導波路10)の効率向上割合から明らかなように、分岐先端部を階段状とすることにより、分岐効率は最大で約1.9倍も向上することが確認された。実施例3〜5は、分岐角θが5°でありながら、分岐角θが1.8°の比較例2よりも大きな分岐効率が得られるという優れた特性を示していることがわかる。また、特に実施例4は、参考例2に近い高い分岐効率を示している。   As is apparent from the efficiency improvement ratios of Examples 3 to 5 (Y branch optical waveguide 10) with respect to Comparative Example 5 (Y branch optical waveguide 90A), the branch efficiency is about a maximum by making the branch tip portion stepped. It was confirmed that it improved by 1.9 times. It can be seen that Examples 3 to 5 have excellent characteristics that a branching efficiency greater than that of Comparative Example 2 in which the branching angle θ is 1.8 ° can be obtained while the branching angle θ is 5 °. In particular, Example 4 shows a high branching efficiency close to that of Reference Example 2.

上述の通り、分岐先端部の階段化は、先端が平坦な分岐構造を有する構造と比較すると、分岐角θが1.8°と小さい場合のみならず、分岐角θが5°と大きい場合にも効果的であることがわかる。   As described above, the step of the branch tip is not only when the branch angle θ is as small as 1.8 ° but also when the branch angle θ is as large as 5 ° as compared with the structure having a branch structure with a flat tip. Is also effective.

本発明は上述した実施の形態に限定されることなく、特許請求の範囲に記載した発明の範囲内で種々の変形が可能である。   The present invention is not limited to the embodiments described above, and various modifications can be made within the scope of the invention described in the claims.

例えば、Y分岐光導波路を構成する入力導波路と分岐導波路は、図1,図2に示すような直線的なものに限定されるものではない。具体的には、図3Aの平面図に示すY分岐光導波路10Bのように、入力導波路11の終端部分の幅が拡がった構造を有する構造においても、分岐導波路12a,12bによって形成される分岐先端部13を階段状にすることができる。また、図3Bの平面図に示すY分岐光導波路10Cのように、分岐導波路12a,12bが曲線状であっても、その分岐先端部13を階段状にすることができる。   For example, the input waveguide and the branch waveguide constituting the Y branch optical waveguide are not limited to linear ones as shown in FIGS. Specifically, even in a structure having a structure in which the end portion of the input waveguide 11 is widened like the Y-branch optical waveguide 10B shown in the plan view of FIG. 3A, it is formed by the branching waveguides 12a and 12b. The branch tip 13 can be stepped. Further, even if the branch waveguides 12a and 12b are curved like the Y-branch optical waveguide 10C shown in the plan view of FIG. 3B, the branch tip portion 13 can be stepped.

また、分岐先端部13は複数段の階段状であってもよい。例えば、図1に示したY分岐光導波路10の分岐先端部13を複数段の階段状に変形させる場合には、底面13cの内側壁14a,14b側端からそれぞれX方向と平行な別の側面を形成し、さらにその側面と直交する別の底面を形成すればよく、これと同様にしてさらに段数を増やしてもよい。   Further, the branch tip portion 13 may have a plurality of steps. For example, when the branching tip 13 of the Y-branch optical waveguide 10 shown in FIG. 1 is deformed into a plurality of steps, separate side surfaces parallel to the X direction from the inner side walls 14a, 14b side end of the bottom surface 13c, respectively. And another bottom surface orthogonal to the side surface may be formed, and the number of steps may be further increased in the same manner.

Y分岐光導波路の構造を示す平面図。The top view which shows the structure of a Y branch optical waveguide. 別のY分岐光導波路の構造を示す平面図。The top view which shows the structure of another Y branch optical waveguide. さらに別のY分岐光導波路の構造を示す平面図。The top view which shows the structure of another Y branch optical waveguide. さらに別のY分岐光導波路の構造を示す平面図。The top view which shows the structure of another Y branch optical waveguide. 従来のY分岐光導波路の構造を示す平面図。The top view which shows the structure of the conventional Y branch optical waveguide. 従来の別のY分岐光導波路の構造を示す平面図。The top view which shows the structure of another conventional Y branch optical waveguide. 従来のさらに別のY分岐光導波路の構造を示す平面図Plan view showing the structure of yet another conventional Y-branch optical waveguide

符号の説明Explanation of symbols

10,10A,10B,10C…Y分岐光導波路、11…入力導波路、12a,12b…分岐導波路、13…分岐先端部、13a…先端面、13b…側面、13c…底面、14a,14b…内側壁、15…三角状部、90,90A,90B…Y分岐光導波路、91…入力導波路、92a,92b…分岐導波路、93,94,95…分岐先端部、95a…突起。   10, 10A, 10B, 10C ... Y branch optical waveguide, 11 ... input waveguide, 12a, 12b ... branch waveguide, 13 ... branch tip, 13a ... tip surface, 13b ... side surface, 13c ... bottom surface, 14a, 14b ... Inner side wall, 15 ... triangular part, 90, 90A, 90B ... Y branch optical waveguide, 91 ... input waveguide, 92a, 92b ... branch waveguide, 93,94,95 ... branch tip, 95a ... projection.

Claims (4)

三次元の光導波路を2次元のスラブ導波路として見たときに、1本の入力導波路を伝搬する光を2本の分岐導波路により2方向に分岐するY分岐光導波路であって、
前記2本の分岐導波路によって挟まれた分岐先端部は、前記入力導波路の長手方向に垂直な先端面と、該先端面と直交する側面と、該側面と直交する底面とを備えた階段状に形成され、
前記先端面の幅が前記入力導波路の幅よりも広いことを特徴とするY分岐光導波路。
A Y-branch optical waveguide that splits light propagating through one input waveguide in two directions by two branch waveguides when the three-dimensional optical waveguide is viewed as a two-dimensional slab waveguide,
A branch tip portion sandwiched between the two branch waveguides has a staircase having a tip surface perpendicular to the longitudinal direction of the input waveguide, a side surface orthogonal to the tip surface, and a bottom surface orthogonal to the side surface. Formed into a shape,
A Y-branch optical waveguide characterized in that a width of the front end face is wider than a width of the input waveguide.
前記入力導波路の幅は4μm〜6μm、前記分岐先端部の幅は8μm〜12μm、前記分岐先端部の長さが10μm〜350μm、前記2本の分岐導波路の分岐角は1.8度〜5.0度であることを特徴とする請求項1に記載のY分岐光導波路。   The width of the input waveguide is 4 μm to 6 μm, the width of the branch tip is 8 μm to 12 μm, the length of the branch tip is 10 μm to 350 μm, and the branch angle of the two branch waveguides is 1.8 degrees to The Y-branch optical waveguide according to claim 1, wherein the angle is 5.0 degrees. 三次元の光導波路を2次元のスラブ導波路として見たときに、1本の入力導波路を伝搬する光を2本の分岐導波路により2方向に分岐するY分岐光導波路であって、
前記2本の分岐導波路によって挟まれた分岐先端部は、前記入力導波路の長手方向に垂直な先端面と、該先端面と直交する側面と、該側面と直交する底面とを備えた階段状に形成され、
前記入力導波路の幅は4μm〜6μm、前記先端面の幅は2μm〜4μm、前記側面の長さが10μm〜200μm、前記2本の分岐導波路の分岐角は1.6度〜2.0度であることを特徴とするY分岐光導波路。
A Y-branch optical waveguide that splits light propagating through one input waveguide in two directions by two branch waveguides when the three-dimensional optical waveguide is viewed as a two-dimensional slab waveguide,
A branch tip portion sandwiched between the two branch waveguides has a staircase having a tip surface perpendicular to the longitudinal direction of the input waveguide, a side surface orthogonal to the tip surface, and a bottom surface orthogonal to the side surface. Formed into a shape,
The input waveguide has a width of 4 μm to 6 μm, the tip surface has a width of 2 μm to 4 μm, the side surface has a length of 10 μm to 200 μm, and the branch angle of the two branch waveguides is 1.6 ° to 2.0 °. A Y-branch optical waveguide characterized in that
前記入力導波路に導入される光の波長は1.50μm〜1.60μmであることを特徴とする請求項1から請求項3のいずれか1項に記載のY分岐光導波路。   The Y-branch optical waveguide according to any one of claims 1 to 3, wherein a wavelength of light introduced into the input waveguide is 1.50 µm to 1.60 µm.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012074134A1 (en) * 2010-12-01 2012-06-07 日本電気株式会社 Optical branching element, optical waveguide device using optical branching element, and method of manufacturing optical branching element, method of manufacturing optical waveguide device
CN102590942A (en) * 2012-03-31 2012-07-18 上海光芯集成光学股份有限公司 Light path structure for integrated optical device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012074134A1 (en) * 2010-12-01 2012-06-07 日本電気株式会社 Optical branching element, optical waveguide device using optical branching element, and method of manufacturing optical branching element, method of manufacturing optical waveguide device
JPWO2012074134A1 (en) * 2010-12-01 2014-05-19 日本電気株式会社 Optical branching device, optical waveguide device using optical branching device, optical branching device manufacturing method, and optical waveguide device manufacturing method
CN102590942A (en) * 2012-03-31 2012-07-18 上海光芯集成光学股份有限公司 Light path structure for integrated optical device

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