JP2007287891A - Solid state imaging apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve the sensitivity of a solid state imaging apparatus, even if pixels are refined. <P>SOLUTION: The apparatus has an imaging region 57 composed of a plurality of arranged pixels 54 having photo converters 53 and color filters 55 and on-chip lenses 56 laminated thereon. The on-chip lenses 56 are formed every one pixel and made greater than the pixel area (shown with broken line). <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a solid-state imaging device such as a CCD image sensor or a CMOS image sensor.

  A solid-state imaging device such as a CCD image sensor or a CMOS image sensor is configured by arranging a plurality of pixels having photoelectric conversion units in a two-dimensional array and stacking color filters and on-chip lenses on the imaging region. In recent years, this solid-state imaging device has attracted attention as an imaging device such as a mobile phone-like camera, a digital still camera, or a digital video camera. The solid-state image pickup device is also applied as an image pickup element of a copying machine or other scanner.

  For solid-state imaging devices, conventionally, on-chip lenses have been devised to improve white balance and to increase sensitivity. For example, Patent Document 1 proposes a CCD solid-state imaging device that optimizes the lens shape of an on-chip lens corresponding to each color of a color filter and optimizes white balance. In this solid-state imaging device, an on-chip lens is formed for pixels corresponding to each color of red, green, and blue, and the area of the on-chip lens corresponding to green is different from that of other on-chip lenses corresponding to red and blue. The on-chip lens is made larger than the area, or the same lens area and the height of the on-chip lens corresponding to green is made higher than the other on-chip lenses corresponding to red and blue, and the incident light amount is controlled. Yes.

  Further, Patent Document 2 proposes a CCD solid-state imaging device in which sensitivity is increased by a color arrangement using a white filter in units of 4 × 4 pixels. In this case, it has also been proposed that no on-chip lens is provided on the white filter.

JP-A-9-116127 JP 2003-60185 A

  By the way, in Patent Document 1, when the height of an on-chip lens is made constant with sensor cells of a square lattice, so-called pixels, the shape of the lens is ideally close to a circle when viewed from above. However, with the miniaturization of pixels, among the on-chip lenses, the reduced on-chip lens becomes too fine, which is difficult to realize due to the limitations of the fine processing technology.

  Further, in Patent Document 2, since the sensitivity of the white filter is higher than that of the red, green, and blue filters, the sensor corresponding to white (photoelectric conversion unit) is saturated quickly, and the dynamic range is reduced. End up. As an example of the solution, a configuration in which an on-chip lens is not formed on a white filter is disclosed. However, simply eliminating the on-chip lens leaves an ineffective sensitivity region between adjacent lenses other than the sensor aperture, and a sufficient sensitivity improvement effect cannot be obtained.

  In view of the above, the present invention provides a solid-state imaging device capable of improving sensitivity even when pixels are miniaturized.

  The solid-state imaging device according to the present invention has an imaging region in which a plurality of pixels having photoelectric conversion units are arranged, a color filter and an on-chip lens are stacked, and on-chip lenses are formed every other pixel. The chip lens is formed larger than the pixel area.

  In the solid-state imaging device of the present invention, the on-chip lens is formed every other pixel, and the on-chip lens is formed larger than the pixel area, so that the on-chip lens can be processed even if the pixel is miniaturized. In addition, there is no invalid sensitivity area for each pixel. A pixel having an on-chip lens has high sensitivity.

  With the solid-state imaging device according to the present invention, it is possible to improve the sensitivity even if the pixels are miniaturized. For example, according to the present invention, a solid-state imaging device with good luminance S / N and a solid-state imaging device with good color S / N can be provided according to the purpose of the product. Further, in combination with a white filter, a solid state imaging device having a high dynamic range and a high S / N (high sensitivity) can be provided.

  Embodiments of the present invention will be described below with reference to the drawings.

  Prior to the description of the present embodiment, an outline of a CCD image sensor and a CMOS image sensor that are targets of the solid-state imaging device of the present embodiment will be described. A configuration of an imaging region of a solid-state imaging device including an RGB Bayer array color filter will be described.

  FIG. 8 shows a schematic cross-sectional structure of the imaging region of the CCD image sensor. The imaging region 2 of the CCD image sensor 1 has a p-type semiconductor well region 4 of a second conductivity type formed in a first conductivity type, in this example, an n-type silicon semiconductor substrate 3, and this p-type semiconductor well region. A plurality of photodiodes PD serving as photoelectric conversion units are formed in a two-dimensional array on the front surface side of FIG. 3, and a vertical transfer register unit 5 having a CCD structure is formed corresponding to each photodiode column. The photodiode PD is formed with a so-called HAD (Hole Accumulation Diode) structure having a charge accumulation region 6 by an n-type semiconductor region and a p-type accumulation region 7 for suppressing dark current on the surface thereof.

  The vertical transfer register unit 5 forms an n-type transfer channel region 8 on the surface of the p-type semiconductor well region 4, and a transfer electrode 10 made of, for example, a polycrystalline silicon film via a gate insulating film 9 on the n-type channel region 8. Is formed and configured. The transfer electrode 10 is formed over the p-type channel stop region 11, the n-type transfer channel region 8, and the read gate portion 12. A unit pixel 13 is formed by the photodiode PD and the vertical transfer register unit 5 corresponding to the photodiode PD. A light shielding film 14 is formed on the entire surface excluding the photodiode PD so as to cover the transfer electrode 10.

  Further, a color filter (on-chip filter) 16 made of, for example, red (R), green (G), and blue (B) is formed through the insulating film 15, and an on-chip lens 17 corresponding to each pixel 13 is formed thereon. Is formed. If necessary, an in-layer lens 18 made of an insulating film having a different refractive index is formed in the insulating film 15 so as to correspond to each photodiode PD.

  Although not shown, a horizontal transfer register unit having a CCD structure is formed so as to be connected to the end of the vertical transfer register unit 4, and an output unit is formed after the horizontal transfer register unit. The description of the operation of the CCD image sensor configured in this way is omitted because it is well known.

  FIG. 9 shows a schematic cross-sectional structure of the imaging region of the CMOS image sensor. Here, the CMOS image sensor is an image sensor manufactured by applying or partially using a CMOS process. The imaging region 22 of the CMOS image sensor 21 has a first conductivity type, in this example, a p-type semiconductor well region 24 of the second conductivity type formed in an n-type silicon semiconductor substrate 23, and the p-type semiconductor well region 24. A plurality of pixels 25 each including a photodiode PD serving as a photoelectric conversion unit and a plurality of MOS transistors Tr are arranged in a two-dimensional array. Each pixel 25 is isolated by an element isolation region such as insulation isolation or trench isolation, in this example, a trench isolation region 26.

  The plurality of MOS transistors Tr are usually composed of, for example, three transistors or four transistors. The three-transistor structure includes a transfer transistor, a reset transistor, and an amplification transistor. The four-transistor structure includes a transfer transistor, a reset transistor, an amplification transistor, and a selection transistor. In FIG. 8, the transfer transistor Tr1 is shown.

  As described above, the photodiode PD is formed with a HAD structure including a charge storage region 27 of an n-type semiconductor region and a p-type accumulation region 28 on the surface thereof. The transfer transistor Tr1 includes an n-type semiconductor region 30 (drain) serving as a floating diffusion (FD), an n-type charge storage region 28 (source) of the photodiode PD, and a gate electrode formed through a gate insulating film. 31.

  A plurality of wiring layers 34 [34A, 34B, 34C] are formed on the imaging region 22 via an interlayer insulating film 33, and further, for example, a color filter composed of red (R), green (G), and blue (B). 35 is formed, and an on-chip lens 36 is formed thereon so as to correspond to each pixel 25. If necessary, an intralayer lens 37 made of an insulating film having a different refractive index is formed in the insulating film 36 so as to correspond to each photodiode PD. The description of the operation of the CMOS image sensor configured in this way is omitted because it is well known.

  FIG. 7 shows a schematic configuration of an imaging region of a solid-state imaging device having a color filter of the current RGB Bayer arrangement. This solid-state imaging device is applied to the above-described CCD image sensor or CMOS image sensor. As shown in FIG. 7A (schematic plan view), the imaging region 42 of the solid-state imaging device 41 has a rectangular shape, in which a plurality of regular rectangular pixels 43 are arranged in a two-dimensional array. A 2 × 2 RGB Bayer array color filter 44 and an on-chip lens 45 are laminated on the area 43. For the four pixels 43, the color filter 44 has a red filter component 44R in one pixel, a blue filter component 44B in the other pixel, and a green filter component 44G in the other two pixels, respectively. It is formed to correspond. The on-chip lens 45 is formed in a shape close to a circle inscribed in the rectangular pixel 43.

  Further, as shown in FIG. 7B (cross-sectional view along the line AA in FIG. 7A: a schematic cross-section), a photoelectric conversion portion 48 constituting the pixel 43 is formed on the semiconductor substrate 47, and an insulating film under the color filter 44 is formed. In 49, an in-layer lens 46 made of an insulating film having a different refractive index is formed so as to correspond to the photoelectric conversion portion 48 of each pixel 43. Reference numeral 50 corresponds to the uppermost wiring layer (for example, also serving as power supply wiring and light shielding) in the case of a CMOS image sensor, for example, and corresponds to the transfer electrode of the vertical transfer register unit in the case of a CCD image sensor.

  As described above, in the solid-state imaging device 41 of the comparative example, each rectangular color filter component 44R having a similar shape and area to each square pixel 43, that is, the red pixel 43R, the green pixel 43G, and the blue pixel 43B. , 44G, 4B, and an on-chip lens 45 is formed on the color filter 44 so as to be within a rectangular pixel area for each pixel 43 [43R, 43G, 43B]. Composed.

  Next, an embodiment of a solid-state imaging device according to the present invention will be described. The solid-state imaging device according to the present embodiment is intended for the above-described CCD image sensor or CMOS image sensor.

  1A and 1B show a solid-state imaging device according to the first embodiment. This figure is a schematic configuration of an imaging region in which pixels of a solid-state imaging device are arranged, and a part thereof is schematically shown. As shown in FIGS. 1A and 1B, the solid-state imaging device 51 according to the present embodiment includes a plurality of pixels 54 having a photoelectric conversion unit 53 arranged in a two-dimensional array on a semiconductor substrate 52, and includes a color filter 55 and an on-chip. An imaging region 57 in which a lens 56 is stacked is configured. The color filter 55 is configured as, for example, a 2 × 2 RGB Bayer array filter. In FIG. 1B, reference numeral 58 corresponds to the uppermost wiring layer (for example, also serving as power supply wiring and light shielding) in the case of a CMOS image sensor, and corresponds to the transfer electrode of the vertical transfer register unit in the case of a CCD image sensor. Furthermore, an inner lens 59 made of an insulating film having a different refractive index is formed below the color filter 55 corresponding to the photoelectric conversion unit 53 of each pixel 54 as necessary.

  In the present embodiment, the on-chip lenses 56 are formed every other pixel, and the on-chip lenses 56 are formed in a square shape, in the example shown in the drawing, the area of the regular square pixels 54 (shown in broken lines: The pixel area). That is, the on-chip lens 56 is formed in synchronization with the color arrangement of the color filter 55. In this example, the on-chip lens 56 is formed only on the green (G) filter component 55G in the color filters 55 of the RGB Bayer array, and on the red (R) filter component 55R and the blue (B) filter component 5B. The on-chip lens 56 is not formed.

  The shape seen from the upper surface of the on-chip lens 56, that is, the so-called planar shape of the lens, is formed into an octagon circumscribing the four corners of the square pixel 54 or a shape close to a circle. In actual manufacturing, even if it is formed in an octagon, it has a shape close to a circle. In the illustrated example, the on-chip lens 56 is formed in a regular octagon circumscribing the regular square of the pixel 54.

  On the other hand, in the color filter 55, the green (G) filter component 55G is formed in an octagon or a shape close to a circle similar to the shape and size of the on-chip lens 56, in the example shown, a regular octagon. On the other hand, the red (R) filter component 55R and the blue (B) filter component 55B without an on-chip lens are surrounded by a square filter smaller than the pixel area, in the example shown, a regular octagonal green filter component 55G. It is formed in a square shape smaller than the area.

  Here, the pixel 54G in which the green filter component 55G is formed, the pixel 54R in which the red filter component 55R is formed, and the pixel 54B in which the blue filter component 5B is formed are referred to as a green pixel, a red pixel, and a blue pixel, respectively.

  According to the solid-state imaging device 51 according to the first embodiment, when the 2 × 2 RGB Bayer array color filter 55 is provided, the on-chip lens 56 is provided only in the green pixel 54G, and the on-chip lens 56 is a pixel. By forming larger than the area, the sensitivity of the green pixel 54G is improved, and the luminance S / N can be improved. Since the on-chip lens is abolished in the red pixel 54R and the blue pixel 54B whose effective area is reduced, the on-chip lens 56 can be processed even if the pixel is reduced. By using the in-layer lens 59, the red pixel 54R and the blue pixel 54B without the on-chip lens 56 can be efficiently condensed. The solid-state imaging device 51 of the first embodiment is optimal as a solid-state imaging device that places importance on reduction of luminance noise.

  In recent years, with the increase in the number of pixels in a digital still camera, a reduction in S / N such as luminance S / N and color S / N has become a major issue. To improve this, it is effective to increase the sensitivity of the green pixel and reduce the noise of the red and blue pixels by applying a low-pass filter. The resolution of the human eye is sensitive to green, but insensitive to red and blue, so it does not matter if a low-pass filter is applied.

  2A and 2B show a solid-state imaging device according to the second embodiment. This figure is a schematic configuration of an imaging region in which pixels of a solid-state imaging device are arranged, and a part thereof is schematically shown. As shown in FIGS. 2A and 2B, the solid-state imaging device 61 according to the present embodiment has a plurality of pixels 54 each having a photoelectric conversion unit 53 arranged on a semiconductor substrate 52 in a two-dimensional array, as described above. An imaging region 57 in which a filter 65 and an on-chip lens 56 are stacked is provided. The color filter 65 is configured as, for example, a 2 × 2 RGB Bayer array filter. Furthermore, an inner lens 59 made of an insulating film having a different refractive index corresponding to the photoelectric conversion portion 53 of each pixel 54 is formed below the color filter 65 as necessary.

  In the present embodiment, the on-chip lens 56 is formed at every other pixel, and the on-chip lens 56 is formed in a quadrangular shape, which is larger than the regular quadrangular pixel area in the illustrated example. Is done. That is, the on-chip lens 56 is formed in synchronization with the color arrangement of the color filter 65. In this example, the on-chip lens 56 is formed only on the red filter component 65R and the blue filter component 65B, and the on-chip lens 56 is not formed on the green filter component 65G.

  Also in this case, the planar shape of the on-chip lens 56 is formed as an octagon circumscribing the square shape of the pixel 54 or a shape close to a circle, in the example shown, a regular octagon. On the other hand, also in the color filter 65, the red (G) filter component 65R and the blue filter component 65B are formed in an octagon similar to the shape and size of the on-chip lens 56, and in the illustrated example, a regular octagon. On the other hand, the green filter component 65G without the on-chip lens 56 has a square shape smaller than the pixel area. In the illustrated example, the green filter component 65G is surrounded by the regular octagonal red filter component 65R and the blue filter component 65B and is a regular square smaller than the pixel area. It is formed into a shape.

  Since other configurations are the same as those of the first embodiment of FIGS. 1A and 1B, the same reference numerals are given to corresponding portions in FIGS.

  According to the solid-state imaging device 61 according to the second embodiment, when the 2 × 2 RGB Bayer array color filter 65 is provided, the green pixel 54G is not provided with the on-chip lens 56, and only the red pixel 54R and the blue pixel 54B are provided. In addition, by providing the on-chip lens 56 and enlarging the on-chip lens 56 with respect to the pixel area, the sensitivity of the red pixel 54R and the blue pixel 54B can be improved, and the color S / N can be improved. The green pixel 54G having a reduced effective area can be condensed by an in-layer lens. Therefore, the solid-state imaging device 61 according to the second embodiment is optimal as a solid-state imaging device in which reduction of color noise is emphasized.

  In a scanner or copier having a light source, sufficient luminance S / N can be obtained by the light source, but in many cases, color reproduction and color S / N are emphasized. In such an application, it is effective to enlarge the on-chip lenses of red pixels and blue pixels, and the solid-state imaging device 61 of the second embodiment is suitable.

  3A and 3B show a solid-state imaging device according to the third embodiment. This figure is a schematic configuration of an imaging region in which pixels of a solid-state imaging device are arranged, and a part thereof is schematically shown. 3A and 3B, the solid-state imaging device 67 according to the present embodiment replaces the green pixel 54G that does not have the on-chip lens 56 with the white pixel 54W in the second embodiment of FIG. 2 described above. It is a configuration. That is, the solid-state imaging device 67 according to the present embodiment includes, as the color filter 65, one red (R) filter component 65R, one blue (B) filter component 65B, and two white (W) filter components 65W. An on-chip lens 56 larger than the pixel area is formed on the red pixel 54R and the blue pixel 54B, and an on-chip lens 56 is not formed on the white pixel 54W. The In this case, the white pixel 54W is a substantial reduced pixel.

  Since the other configuration is the same as that of the second embodiment of FIGS. 2A and 2B, the same reference numerals are given to the corresponding parts in FIGS.

  According to the solid-state imaging device 67 according to the third embodiment, the color S / N can be improved as in the second embodiment. At the same time, the white pixel 54W is used instead of the green pixel 54G, so that the sensitivity of the reduced pixel is improved as compared with the second embodiment, and in particular, the luminance S / N can be improved. Here, in the portion where the green pixel is lost (that is, the white pixel 54W), a green signal is obtained by the calculation of G = W− (R + B). The solid-state imaging device 67 according to the third embodiment is also suitable for applications such as a scanner and a copy machine.

  4A and 4B show a solid-state imaging device according to the fourth embodiment. This figure is a schematic configuration of an imaging region in which pixels of a solid-state imaging device are arranged, and a part thereof is schematically shown. As shown in FIGS. 4A and 4B, the solid-state imaging device 71 according to the present embodiment has a plurality of pixels 54 each having a photoelectric conversion unit 53 arranged on a semiconductor substrate 52 in a two-dimensional array, as described above. An imaging region 57 in which a filter 75 and an on-chip lens 56 are stacked is provided. Furthermore, an inner layer lens 59 made of an insulating film having a different refractive index corresponding to the photoelectric conversion portion 53 of each pixel 54 is formed below the color filter 75 as necessary.

  In the present embodiment, in particular, the color filter 75 includes a set of one red filter component 75R, one blue filter component 75B, two green filter components 75G, and one white filter component 75W. It is composed of repeated arrangements. Further, the on-chip lens 56 is formed every other pixel, and the on-chip lens 56 is formed in a square shape, which is larger than the pixel area of the regular square shape in the illustrated example. That is, the on-chip lens 56 is formed in synchronization with the color arrangement of the color filter 75. In this example, the on-chip lens 56 is formed on the red filter component 75R, the green filter component 75G, and the blue filter component 75B, and the on-chip lens 56 is not formed on the white filter component 75W.

  Also in this case, the planar shape of the on-chip lens 56 is formed as an octagon circumscribing the square shape of the pixel 54 or a shape close to a circle, in the example shown, a regular octagon. On the other hand, in the color filter 75, the red (G) filter component 75R, the green filter component 75G, and the blue filter component 75B are formed in an octagon similar to the shape and size of the on-chip lens 56, and in the illustrated example, a regular octagon. Is done. On the other hand, the white filter component 75W without the on-chip lens 56 is surrounded by a rectangular shape smaller than the pixel area, which is a regular octagonal red, green and blue filter components 75R, 75G and 75B in the illustrated example. It is formed in a smaller regular square shape.

  Other configurations are the same as those of the first embodiment shown in FIGS. 1A and 1B. Therefore, the corresponding parts in FIGS.

  According to the solid-state imaging device 71 according to the fourth embodiment, the white filter component 75W has the color filter 75 arranged every other pixel, and the reduced white pixel 54W corresponding to the white filter component 75W is on the reduced white pixel 54W. The on-chip lens 56 is not formed, and the on-chip lens 56 is formed only on the red pixel 54R, the green pixel 54G, and the blue pixel 54B, so that a solid-state imaging device having an optimum sensitivity balance including sensitivity improvement is provided. Can provide.

  That is, the sensitivity of white is equivalent to receiving all colors of red, green, and blue, and is about three times as sensitive as the filter components of red, green, and blue. On the other hand, the sensitivity difference due to the presence / absence of the on-chip lens is also about three times. As a result, white (W), red (R), green (G), and blue (B) The outputs of the photoelectric conversion units 53 can be made uniform. For this reason, the white pixel 54W is not saturated earlier and the dynamic range is not lowered. The target sensitivity improvement can be drastically improved by making the on-chip lenses 56 of the red pixel 54R, the green pixel 54G, and the blue pixel 54B into a large octagonal or circular shape. In particular, there is no invalid area that does not contribute to light reception, that is, the invalid area of the white pixel 54W can be used effectively, and the sensitivity can be improved. Therefore, an optimum sensitivity balance including sensitivity improvement can be obtained.

The sensitivity balance will be further described. As shown in FIG. 5, let X be one side of an area (hereinafter referred to as a square pixel area) of a square pixel 43 of the comparative example. The octagonal honeycomb area S8 of each color pixel 54 of red (R), green (G), and blue (B) is expressed by the following equation.
S8 = 8 × X × (X / √2−X / 2)
Area ratio = 1.65 times The reduced pixel area S4 of white (W) is expressed by the following equation.
S4 = [X−2 × (X√2−X / 2)] ²
Area ratio = 0.34 times Here, the area ratio is a ratio to the square pixel area of the comparative example.

On the other hand, the RGB ratio which is the ratio of the octagonal honeycomb area S8 and the reduced pixel area S4 is as follows.
RGB ratio = 0.207 times

  There is no problem with saturation. The RGB ratio is 0.207 times smaller than 3 times, but in the case of B: G: R: W = 1: 2: 1: 4 (W = B + G + R), almost balance is achieved when W / B = 4 times. I can take it. Actually, when there is no color filter, since W> B + G + R, the sensitivity difference is further reduced, and the sensitivity balance can be more balanced.

  Here, the definition of the white pixel treated as one of the high sensitivity pixels will be described. In the above description, the expression “white” is used for “white filter” or the like, but it is not limited to a white or transparent filter in a strict sense. The white pixel only needs to be a pixel having higher sensitivity than the conventional primary color pixel and complementary color pixel for obtaining each color component for color reproduction, and a gray filter is provided instead of an ideal white or transparent filter. It may be a pixel or a pixel provided with a filter in which a small amount of a pigment component is mixed. However, rather than a filter in which a specific pigment component is biased and mixed, it is better that the component is contained in a balanced manner in colors such as RGB, such as a white or transparent filter or a gray filter. This is preferable from the viewpoint of processing.

  As described above, according to the embodiment of the present invention, a solid-state imaging device with good luminance S / N and a solid-state imaging device with good color S / N can be obtained according to the purpose of the product. Further, in combination with the white filter component, a solid-state imaging device having a high dynamic range and a high S / N (high sensitivity) can be obtained.

  That is, the luminance S / N and the color S / N are improved by changing the size of the on-chip lens 56 according to the color arrangement of the color filters 55, 65, or 75, or by repeating the presence / absence. Or, it is possible to provide an image sensor having a good balance of sensitivity, dynamic range, and resolution by suppressing saturation level in combination with four-color spectroscopy including white having a high output level.

  In the above example, the in-layer lens 59 is formed corresponding to all the pixels, but it is also possible to adopt a configuration in which the in-layer lens 59 is formed only on the pixels without the on-chip lens 56. In this case, condensing is performed by the on-chip lens 56 in the pixel having the on-chip lens 56, and condensing is performed only by the in-layer lens 59 in the pixel not having the on-chip lens 56. Light is obtained.

  In the example of FIG. 4, pixels without the on-chip lens 56 are white pixels having higher sensitivity than red pixels, green pixels, and blue pixels. In addition, a pixel without the on-chip lens 56 can be a pixel having higher sensitivity than other pixels according to the color arrangement of the color filter. Even in this case, an image sensor having a well-balanced sensitivity can be obtained.

  The solid-state imaging device of this embodiment can be applied to an electronic device module and a camera module. FIG. 6 shows a schematic configuration of an embodiment of an electronic device module and a camera module. The module configuration of FIG. 5 is applicable to both an electronic device module and a camera module. The module 110 includes a solid-state imaging device (CCD image sensor or CMO image sensor) 51, 61, 67 or 71 according to any of the above-described embodiments, an optical lens 111, an input / output unit 112, and a signal processing device (Digital Signal Processors). ) 113, a central processing unit for controlling the optical lens system, (CPU) 114 is incorporated into one to form a module. Further, as the electronic device module or the camera module 115, a module can be formed only by the solid-state imaging device 51, 61, 67 or 71, the optical lens system 111 and the input / output unit 112. A module 116 including the solid-state imaging device 51, 61, 67 or 71, the optical lens system 111, the input / output unit 112, and the signal processing device 113 can also be configured.

  According to the electronic device module and the camera module, it is possible to improve the image quality by improving the S / N such as the luminance S / N and the color S / N described above in the solid-state imaging device.

1A and 1B are a schematic configuration diagram showing a first embodiment of a solid-state imaging device according to the present invention and a cross-sectional view along the line BB. A, B It is a schematic block diagram which shows 2nd Embodiment of the solid-state imaging device concerning this invention, and its sectional drawing on the CC line. FIGS. 4A and 4B are a schematic configuration diagram showing a third embodiment of a solid-state imaging device according to the present invention and a cross-sectional view taken along the line DD. A and B are a schematic configuration diagram showing a fourth embodiment of a solid-state imaging device according to the present invention and a cross-sectional view along the line EE. It is explanatory drawing with which it uses for description of this Embodiment. It is a circuit block diagram which shows the example of the module using the solid-state imaging device which concerns on this invention. 1A and 1B are a schematic configuration diagram illustrating a solid-state imaging device according to a comparative example and a cross-sectional view taken along the line AA. It is sectional drawing of the imaging area | region of CCD solid-state imaging device used as the object of the solid-state imaging device concerning this invention. It is sectional drawing of the imaging area | region of the CMOS solid-state imaging device used as the object of the solid-state imaging device concerning this invention.

Explanation of symbols

  51, 61, 67, 71 ... Solid-state imaging device 52 ... Semiconductor substrate 53 ... Photoelectric converter 54 ... Pixel 54R Red pixel 54G Green pixel 54B Blue pixel 54W ..White pixel, 55, 65, 75..Color filter, 55R, 65R, 75R..Red filter component, 55G, 65G, 75G..Green filter component, 55B, 56B, 75B..Blue filter component, 75W. .White filter component, 56 .. On-chip lens, 57 .. Imaging area, 59.

Claims (6)

A plurality of pixels having a photoelectric conversion unit are arranged,
It has an imaging area where color filters and on-chip lenses are stacked,
The on-chip lens is formed every other pixel,
The solid-state imaging device, wherein the on-chip lens is formed larger than a pixel area. The solid-state imaging device according to claim 1, wherein the planar shape of the on-chip lens is an octagon or a shape close to a circle. The solid-state imaging device according to claim 1, wherein the on-chip lens is formed in synchronization with a color arrangement of the color filter. The solid-state imaging device according to claim 1, wherein the pixel without the on-chip lens is a pixel having higher sensitivity than other pixels. The solid-state imaging device according to claim 1, wherein an inner lens is formed corresponding to all pixels. The solid-state imaging device according to claim 1, wherein an in-layer lens is formed only in a pixel without the on-chip lens.

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