JP2007271988A - Image data processing method, image data processor, image display method, image display device, computer program, charged particle beam device, data processing method, and data processor - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To rearrange data fast with a small number of times of copying data while minimizing the size of a memory used for the rearrangement, and to rearrange all interlaced data with the same algorithm irrelevantly to interlacing intervals of the interlaced data. <P>SOLUTION: In a converting method for image data that takes current image data out of a memory space where image data columns of all (h) rows are stored by an interlacing system having an interlacing interval (i) where (h) and (i) are positive integers and i<h, and rearranges them into image data of the interlacing system in all (h) rows in the same memory space, a function f(y) of setting a row number of current image data of interest as a current row number (y) and acquiring a target row number of target image data after the rearrangement is expressed by a mathematical expression 1 (where 0≤y≤h-1) and a row number link list is generated. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

The present invention relates to an image data processing method, an image data processing device, an image display method, an image display device, a computer program, a charged particle beam device, and data processing for rearranging image data created by an interlace method into non-interlace image data The present invention relates to a method and a data processing apparatus.

  In a conventional charged particle beam apparatus, for example, a scanning electron microscope, an interlace method is used when scanning and irradiating an electron beam onto an imaging region of a sample from the viewpoint of preventing charge-up of the sample. That is, when an electron beam is scanned on a sample, if an adjacent scanning line region is continuously irradiated with an electron beam or the like, electrons are accumulated in the sample and charged up, which adversely affects the captured image.

  In order to prevent such a situation, an interlace method is employed in which when scanning an electron beam on a sample, the entire region is scanned in a plurality of times every other column. When the electron beam is divided into a plurality of columns (2, 3, 4,...) In this way, the region adjacent to the scanned scan line region is scanned with the electron beam at the timing after several scans. Can be prevented.

  However, when displaying an image obtained with an electron microscope, a non-interlace method in which the scanning area of the sample is continuously displayed is adopted. Therefore, interlaced image data is converted into a non-interlace method. There must be.

  Conventionally, in order to perform such conversion, a method of rearranging while copying to another memory area as shown in FIG. 13 or an algorithm corresponding to the number of interlace intervals as shown in FIG. It is supposed to be rearranged in the memory space.

In addition, when rearranging general digital data, a technique of rearranging by specifying a memory area to be rearranged is also known (for example, Patent Document 1 paragraphs [0011] to [0023] and Patent Document 2 paragraph [ [0010] to [0016]).
Japanese Patent No. 3146772 Japanese Patent No. 2906869

  However, in the method shown in FIG. 13 and the general digital data rearrangement methods described in Patent Document 1 and Patent Document 2, a new memory device must be added because a separate memory space is required. I must. In the method shown in FIG. 14, the algorithm needs to be optimized according to the interlace interval and the number of image data lines, and the number of times of data copy depends on the algorithm, and complicated processing must be executed. Sorting process was slow.

  Therefore, the present invention minimizes the memory size used for rearrangement, can perform data rearrangement with less data copying, and can perform all interlaced data with the same algorithm regardless of the interlace interval of interlaced data. It is an object of the present invention to provide a computer program, an image data processing method, an image data processing device, an image display method, an image display device, and a charged particle beam device that can realize data rearrangement.

  According to the first aspect of the present invention, h and i are positive integers and i <h, and the current image data is extracted from a memory space in which all h rows of image data sequences are stored in an interlaced manner with an interlace interval i. In a method of converting image data to be rearranged into non-interlaced image data of all h rows in space, the row number of the current image data of interest is set as the current row number y, and the target row of the target image data after the rearrangement The function f (y) for obtaining the number is

(However, 0 ≦ y ≦ h-1)

  As a next target line number y, a new target line number f (y) is obtained using the value of the obtained target line number f (y) as the next current line number y, and this process is repeated to obtain the target line number f (y). This process is performed until the current line number y set first is matched, and these processes are repeated as necessary to obtain target line numbers f (y) for all current line numbers y. It is a conversion method.

  According to a second aspect of the present invention, h and i are positive integers, i <h, and the current image data is extracted from a memory space in which all h rows of image data sequences are stored in an interlaced manner with an interlace interval i. In a method of converting image data to be rearranged into non-interlaced image data of all h rows in space, the row number of the current image data of interest is set as the current row number y, and the target row of the target image data after the rearrangement The function f (y) for obtaining the number is

(However, 0 ≦ y ≦ h-1)
As a next target line number y, a new target line number f (y) is obtained using the value of the obtained target line number f (y) as the next current line number y, and this process is repeated to obtain the target line number f (y). This process is performed until the current line number y set first is matched, a line number link list including a pair of the current line number and the target line number is created, and one image data line selected from the line number link list is created. Image data conversion, wherein image data row moving processing is performed for saving image data outside the memory space and moving image data to be placed in the saved column with reference to the row number link list Is the method.

  According to a third aspect of the present invention, h and i are positive integers and i <h, and the current image data is extracted from a memory space in which all h rows of image data sequences are stored in an interlaced manner with an interlace interval i. In an image data conversion apparatus that rearranges all h rows of non-interlaced image data in space, the row number of the current image data of interest is set as the current row number y, and the target row of the target image data after the rearrangement The function f (y) for obtaining the number is

(However, 0 ≦ y ≦ h-1)
The target line number calculating means for calculating the target line number f (y) as the next current line number y is obtained as the next target line number f (y). This process is performed until the number f (y) matches the initially set current line number y, and these processes are repeated as necessary to obtain target line numbers f (y) for all current line numbers y. And an arithmetic control means for performing the above.

  According to a fourth aspect of the present invention, h and i are positive integers and i <h, and the current image data is extracted from a memory space in which all h rows of image data sequences are stored in an interlaced manner with an interlace interval i. In an image data conversion apparatus that rearranges all h rows of non-interlaced image data in space, the row number of the current image data of interest is set as the current row number y, and the target row of the target image data after the rearrangement The function f (y) for obtaining the number is

(However, 0 ≦ y ≦ h-1)
The target number calculating means for calculating the target line number f (y) is obtained using the value of the calculated target line number f (y) as the next current line number y, and this process is repeated to obtain the target line number. This processing is performed until f (y) coincides with the first set current line number y, and a line number linked list creating means for creating a line number linked list having a pair of the current line number and the target line number, An image saving memory arranged outside the memory space in which one image data row selected from the row number link list is saved, and an image to be arranged in the column saved with reference to the row number link list An image data conversion apparatus comprising: data movement control means for performing a movement process of image data rows for sequentially moving data.

  The invention of claim 5 is an image data display method comprising the image data conversion method of claim 1 or 2 and displaying non-interlaced images.

  According to a sixth aspect of the present invention, there is provided an image data display device comprising the image data conversion device according to the third or fourth aspect, wherein the non-interlaced image is displayed.

  The invention of claim 7 is a computer program characterized by storing the image data conversion method of claim 1 or 2.

  The invention of claim 8 is a computer program characterized in that the image data display method of claim 3 or 4 is stored.

  According to the ninth aspect of the present invention, an electron optical system that scans and irradiates an electron beam from an electron beam source within a predetermined range of the sample, and a charged particle beam generated from the sample is received to correspond to the scanning of the electron beam. The electron optical system is controlled to scan the charged particle beam at all h rows and an interlace interval i, where h and i are positive integers, i <h, The arithmetic processing device includes an image memory that records an image obtained by the interlace method as current image data. The image data processing device is connected to the image memory, and the image data processing device A function f (y) that sets the line number of the data as the current line number y and obtains the target line number of the target image data after the rearrangement is obtained.

(However, 0 ≦ y ≦ h-1)
The target line number calculating means for calculating the target line number f (y) as the next current line number y is obtained as the next target line number f (y). This process is performed until the number f (y) matches the initially set current line number y, and these processes are repeated as necessary to obtain target line numbers f (y) for all current line numbers y. And a new target line number f (y) with the value of the obtained target line number f (y) as the next current line number y, and this process is repeated to obtain the target line number f ( The line number link list creating means for performing this processing until y) coincides with the initially set current line number y and creating a line number linked list having a pair of the current line number and the target line number, and the line number One image data row selected from the link list An image saving memory arranged outside the memory space to be saved, and an image data row moving process for sequentially moving the image data to be arranged in the column to the saved column with reference to the row number link list It is a charged particle beam apparatus characterized by having a data movement control means and a calculation means for displaying on the display means.

The present invention of claim 10 extracts current data from a memory space in which h and i are positive integers, i <h, and all h rows of data columns are stored in an interlaced manner with an interlace interval i, and is stored in the same memory space. Function f for setting the line number of the current data of interest as the current line number y and acquiring the target line number of the target data after the rearrangement in the data conversion method for rearranging the data into non-interlaced data of all h rows (Y)
(However, 0 ≦ y ≦ h-1)
As
A new target line number f (y) is obtained with the value of the obtained target line number f (y) as the next current line number y, and this process is repeated, and the target line number f (y) is set first. This data conversion method is characterized by performing this process until it matches the current line number y, repeating these processes as necessary, and obtaining the target line number f (y) for all the current line numbers y.

The present invention of claim 11 extracts current data from a memory space in which h and i are positive integers, i <h, and a data string of all h rows is stored in an interlaced manner with an interlace interval i, and is stored in the same memory space. Function f for setting the line number of the current data of interest as the current line number y and acquiring the target line number of the target data after the rearrangement in the data conversion method for rearranging the data into non-interlaced data of all h rows (Y)
(However, 0 ≦ y ≦ h-1)
As a next target line number y, a new target line number f (y) is obtained using the value of the obtained target line number f (y) as the next current line number y, and this process is repeated to obtain the target line number f (y). Data conversion characterized by performing this process until it matches the initially set current line number y and repeating these processes as necessary to obtain the target line number f (y) for all current line numbers y Is the method.

According to the twelfth aspect of the present invention, h and i are positive integers, i <h, and the current data is extracted from the memory space in which all h rows of data columns are stored in an interlaced manner with an interlace interval i. In the data conversion method for rearranging all h rows into non-interlaced data, a function f for setting the current current row number as the current row number y and obtaining the target row number of the target data after the rearrangement (Y)
(However, 0 ≦ y ≦ h-1)
As a next target line number y, a new target line number f (y) is obtained using the value of the obtained target line number f (y) as the next current line number y, and this process is repeated to obtain the target line number f (y). This process is performed until the current line number y set first is matched, a line number link list including a pair of the current line number and the target line number is created, and one data line selected from the line number link list is created. A data conversion method characterized in that a data row moving process is performed in which the data to be placed in the column is moved to the saved column by saving outside the memory space and referring to the row number link list.

The invention of claim 13 takes out current data from a memory space in which h and i are positive integers, i <h, and all h rows of data columns are stored in an interlaced manner with an interlace interval i, and is stored in the same memory space. Function f for setting the row number of the current data of interest as the current row number y and obtaining the target row number of the target data after the rearrangement in the data conversion apparatus for rearranging the data into all h rows of non-interlaced data (Y)
(However, 0 ≦ y ≦ h-1)
The target line number calculating means for calculating the target line number f (y) as the next current line number y is obtained as the next target line number f (y). This process is performed until the number f (y) matches the initially set current line number y, and these processes are repeated as necessary to obtain target line numbers f (y) for all current line numbers y. A data conversion device comprising: an arithmetic control means for performing

According to the fourteenth aspect of the present invention, h and i are positive integers, i <h, and the current data is extracted from the memory space in which all h rows of data columns are stored in an interlaced manner with an interlace interval i. In a data conversion device that rearranges all h rows into non-interlace data,
The function f (y) for setting the line number of the current data of interest as the current line number y and obtaining the target line number of the target data after the rearrangement is
(However, 0 ≦ y ≦ h-1)
A purpose number calculating means for calculating as
A new target line number f (y) is obtained with the value of the obtained target line number f (y) as the next current line number y, and this process is repeated, and the target line number f (y) is set first. This process is performed until the current line number y is matched, and a line number link list creating means for creating a line number link list having a pair of the current line number and the target line number, and one selected from the line number link list A save memory arranged outside the memory space where data rows are saved, and a data row moving process for sequentially moving data to be arranged in the columns to the saved columns with reference to the row number link list And a data movement control means.

In the invention of claim 15, when hmodi ≠ 0,
h = h '
The image data conversion method according to claim 1, the image data conversion device according to claim 3, or the image data display according to claim 5, wherein the processing is performed by setting h that is divisible by i. An image data display device according to claim 6, a computer program according to claim 7 or 8, a charged particle beam device according to claim 9, a data conversion method according to claim 10 or 11, or a data conversion method according to claim 12 or 13. It is a data converter of description.

  According to the present invention, rearrangement can be performed with the same algorithm regardless of the interlace interval, and interlace data can be rearranged into non-interlace data within the same memory space with a minimum increase in memory. Moreover, this rearrangement can be performed at high speed.

First, the theory of rearrangement used in the image data conversion method according to the present invention will be described.
Interlace data is defined as follows.
Interlace line interval: i where i ≧ 0,
Total number of data lines: h
And

The description will be made assuming that hmodi = 0 (h is divisible by i).
For example, the interlace data with i = 2 and h = 8 and the target non-interlace data are as shown in FIG.

  Here, the target row number acquisition function f (y) that is the storage destination after the data stored in the current row number y with the stored data is rearranged can be expressed as follows.

... Formula 1
However, 0 ≦ y ≦ h-1

Where the sign
Represents a floor function (floor) and represents a maximum integer less than or equal to the real number.

Let S be the current row number set of interlaced data currently stored, and D be the row number set to be rearranged.
For example, the line number set S and the original line number set D of interlaced data with i = 2 and h = 8 are:
S = {0, 2, 4, 6, 1, 3, 5, 7}
D = {0, 1, 2, 3, 4, 5, 6, 7}
It can be expressed.

Here, the restart function used in the present invention is defined as follows.
That is, Kf (y) is y or f (y) or Kf (y).

An example of the expansion of this function is as follows.

When S = D is now established,
… Formula 2
Is established.

  It is unclear whether this relationship is generally true for Equation 1, but the inventor has found that Equation 1 and Equation 2 are areas where the present invention is implemented, up to i = 128, h = 10 ^ 7 order. It was confirmed that

For example, if this formula is expanded with i = 2 and h = 8,
It becomes.

  As a result of the establishment of Equation 2, the following a. b. This is the case for Equation 1.

a. Regarding data rearrangement, the data stored in the current line number y is the data of the target line number storage destination f (y) after the rearrangement.
b. For data linking, if the target line number storage destination f (y) is repeated as f (f (y)) as the argument of the target line number acquisition function, the current line number is always specified first. Return to number y.

  As a result, it has been found that a list in which the conversion destination line numbers are associated with each other for all current line numbers can be created using Equation 1.

  Embodiments of an image conversion method according to the present invention will be described below. As shown in FIG. 5, it is assumed that there are interlaced data of i = 2 and h = 8. That is, y is arranged from 0 to 7 in the image of the current row number (current image: interlace method). Image data from AAA to HHH is stored in each row. This image data was arranged in the order of AAA, BBB, CCC,..., HHH on the sample. In this figure, in order to simplify the description, the row numbers to be rearranged in the non-interlace method are shown in the f (y) column in advance.

  First, a link list of line number data (line number link list) is generated. As shown in FIG. 6, the search is started by setting the search start line number to 0. However, since f (0) = 0 is established (no rearrangement is required), the next line number position f (1) starts. Search to generate a line number linked list. The line number link list is as shown in FIG.

First, substituting y = 1 into Equation 1,
f (1) = 2
And f (1) = 2 is substituted into f (y).
Then
f (2) = 4
Similarly,
f (4) = 1
And return to the first y.
That is, as shown in FIG. 6B, a link in which row numbers circulate in the order of 1 → 2 → 4 → 1 is completed.

Next, the data is rearranged. In this example, the rearrangement is performed from the largest line number 4. Since the target data of the current line number y is stored at f (y), as shown in FIG. 7, the reverse direction from the end of the link as shown in FIG. Sort the data.
(1) The last data of the line number link is saved.
(2) Continue copying the data stored immediately before the link from the end of the line number link (3) Store the saved data at the top

  When the rearrangement of the first data is completed, the next line number link generation position is searched. The search, that is, the generation position of the next link is performed by searching for a line in which the current line position does not match the target line number, as shown in FIG.

  If a mismatch is detected, the above line number link generation is repeated. As shown in FIG. 9, when the next inconsistency is not found and the last line number −1 (because f (h−1) = h−1) is reached, the rearrangement ends as shown in FIG. .

The calculation from h = 0 to h = 7 is shown below.

In this way, all sorting is completed.
The calculation when the same calculation is performed for i = 3 and h = 18 is shown below, and the creation state of the line number link list is shown in FIG.

  In FIG. 10, the interlaced-type acquired data is obtained by scanning the image data a to r of h = 18 with i = 3. This is converted into conversion data. After f (0) = 0 is processed when y = 0, f (y) is calculated as described above from the calculation start of the acquired data y = 1, and this value is then substituted into f (y). The processing is continued, and the link that returns to 1 and circulates at f (6) is completed.

  In this way, it can be seen that even when i = 3 and h = 18, a line number link list can be created by the same algorithm. In this example, all the lines are linked by creating one line number linked list. However, in another example, it is not always possible to process all line numbers by creating one line number linked list. In this case, after the movement of the image line data described above is finished, the unprocessed line number is searched to create a new line number link list, and the image data is moved. Continue until finished.

  Similarly, the line number linked list can be created by the same algorithm up to i = 128 and h = 10 ^ 7 order verified by the inventor, and the image data can be converted.

  Next, a comparison is made between the image conversion method according to the present invention performed in such a procedure and a conventional rearrangement method. The comparison target algorithm is as follows. The algorithm names in the table are named for this comparison. In the table, “different memory” is the method shown in FIG. 13, “Q sort” is the quickest sort that is the fastest in the sort algorithm of the numerical set, and “by number” is the same memory space known in the past. The reordering algorithm (shown in FIG. 14) is shown.

  For comparison, the interlaced data is a grayscale 256-gradation (1 byte / pixel) image, and the number of bytes used to access the memory used to convert the interlaced image to the non-interlaced image and the total amount of memory used are compared. It was.

  First, let's look at the number of bytes that have accessed the memory. The results are shown in Table 2 and FIG. The act of accessing the memory is a relatively heavy process from the viewpoint of the CPU, and the speed decreases proportionally as the size of the access increases. Therefore, it was implemented for each algorithm, and the image size and the number of bytes accessed in the memory were measured. The “number” described in “this time” is described for 2, 4, 8, 16, and 32 because the amount of memory access varies depending on the interlace interval. Note that the “Q sort” algorithm is not shown in the graph because it has about three times as many memory accesses as any algorithm.

From this result, “another memory” is the fastest algorithm, and “this time” the method according to the present invention is almost comparable to that, and it is one of the fastest algorithms for rearranging in the same image memory space. I understood.

  Next, let us look at memory usage. The results are shown in Table 3 and FIG. The number described in “By number” is 2, 4, 8, 16, 32 because the amount of memory access varies depending on the interlace interval.

  The memory size required for the conversion is larger in the “different memory” algorithm than in other algorithms. This is because the “different memory” algorithm requires a separate area of the same size as the data. Further, “current”, which is the image data processing method of the present invention, realizes a memory size almost equivalent to the “Q sort” algorithm with the smallest memory used. Furthermore, when compared with the “by number” algorithm, a maximum difference of 870 KB was obtained. In the image data processing method according to the present invention, the used memory size does not change at any interlace interval.

  As described above, according to the image data conversion method according to the present invention, the memory size used for the rearrangement can be minimized and the number of times of data copy can be reduced as compared with other conversion algorithms. It can be seen that rearrangement can be performed. In addition, rearrangement of all interlace data can be realized with the same algorithm regardless of the interlace interval of the interlace data.

  Next, a charged particle beam apparatus according to an embodiment of the present invention will be described. The charged particle beam apparatus according to the present embodiment employs the image data conversion apparatus. FIG. 1 is a schematic diagram showing an electron microscope according to an embodiment of the present invention.

  The charged particle beam apparatus 10 according to this example includes a control unit 40 including a lens barrel 20, a sample chamber 30, an arithmetic processing device 41, and an image display device 42. In the lens barrel 20, an electron beam source 21 that generates an electron beam, two deflectors 22 and 22 that deflect the electron beam from the electron beam source 21 in a predetermined direction, a converging lens (not shown), and a reflected electron beam And a detector 23 for detecting secondary electron beams and charged particles. In the sample chamber 30, a sample stage is arranged and a sample 31 is placed.

  The control means 40 generates an image signal based on the deflection control device 44 for controlling the deflection state of the electron beam in the deflectors 22 and 22, the signal from the detector 23 and the scanning signal from the deflection control device 44. The image processing apparatus 41 includes an image display apparatus 42 that includes a CRT or an LCD and displays an observation image based on a signal from the arithmetic processing apparatus 41. In this example, the arithmetic processing unit 41 includes a CPU, a ROM, and a RAM (not shown), acquires an observation image from the substrate current signal based on a program stored in advance, and stores it in the image memory 43. The deflection control device 44 can control the deflectors 22 and 22 to set an electron beam scanning range and an electron beam scanning direction.

  In this example, as described above, the image data processing device 50 is connected to the image memory 43, and the image data processing device 50 stores the acquired interlaced image data in the image memory 43 and also stores the image data. The non-interlace type image data converted by the processing device 50 is stored.

  Hereinafter, the image data processing apparatus 50 of the charged particle beam apparatus 10 according to the present example will be described. FIG. 2 is a block diagram showing a configuration of the image processing apparatus shown in FIG. In this example, the image data processing apparatus 50 includes an arithmetic control unit 51 that controls the entire apparatus, an arithmetic execution unit 52 that executes the above-described expression 1, a line number link list 53 that stores the created line number link list, An image line memory 54 is provided which saves one line of image data when rewriting the image data.

  The arithmetic control unit 51 includes a CPU, a ROM, and a RAM (not shown), and rewrites interlaced image data stored in the image memory 43 into non-interlaced image data based on a program stored in advance. The operation of the image data processing device 50 will be described below.

  FIG. 3 is a flowchart showing the operation of the image data processing apparatus 50 shown in FIG. First, the search is started by setting the row number to 0, but since f (0) = 0 is satisfied (no rearrangement is required), the search starts from the next row number position f (1) and the row number link list Is generated. Next, the arithmetic control unit 51 sets the current line number to “1” in order to start the first rewriting (S1). Next, the target line number f (1) is calculated by the calculation execution unit 52 (S2), and the pair of (1, f (1)) is stored in the line number link list 53, and n = f (1) (S3). Next, the operation execution unit 52 calculates the next target line number f (n) = m by setting the current line number to n (S4).

  Then, a pair of row numbers (n, m) is stored. The processes of S4 and S5 are performed until m = 1, that is, until the link circulates (S6, S7), and the first line number link list is created.

  Next, the image data at the end of the line number is saved in the image one-line memory 54 based on the created first line number link list 53, and the image data is sequentially moved as shown in FIG. S8).

  When this process ends, as shown in FIG. 8, the next line number is searched (S9). If there is no next industry paper number, the process ends. When the next line number is found, the next start line number p is determined (S10). Next, the operation execution unit 52 calculates the target line number f (p) = n (S11), and the line number link list. The pair of (p, n) is stored in 53 (S12). Next, the operation execution unit 52 calculates the next target line number f (n) = m by setting the current line number to n (S14).

  The processes in S13 and S14 are performed until m = p, that is, until the link circulates (S15, S16), and the current line number link list is created.

  Next, the image data at the end of the line number is saved in the image one-line memory 54 based on the created line number link list 53 this time, and the image data is sequentially moved as shown in FIG.

  After the processes of S9 to S17 have been performed for all the row numbers, the series of image data processing ends (S18).

  As described above, according to the charged particle beam device 10 according to the present invention, the image data processing device 50 is provided in addition to the image memory 43 arranged in the arithmetic processing device 41, and the line number link list 53, the image is provided as the memory. The image data can be quickly converted from the interlace type to the non-interlace type only by adding the one-line memory 54.

Next, the case where hmmodi ≠ 0 will be described.
In this case,
h = h '
Set h to be divisible by i.
That is, processing can be performed by preparing dummy row numbers and data and rearranging data that is insufficient in processing.
For example, h = 10, i = 3
When S = {0, 3, 6, 9, 1, 4, 7, 10, 2, 5}
h '= 10
h = 4 × 3 = 12
In the case of
F (10) = 8 to the two additional line numbers 10 and 11
f (11) = 11
S = {0, 3, 6, 9, 1, 4, 7, 10, 2, 5, 8, 11}
As described above, the above-described conversion can be performed.

Where the sign
Represents a ceiling function (sail: ceil) and represents the smallest integer that is not less than a certain real number.

  In the above example, image data has been described as an example of data to be converted. However, this is not limited to image data, and any data may be used.

It is a schematic diagram which shows the electron microscope which concerns on the embodiment of this invention. It is a block diagram which shows the structure of the image data processing apparatus shown in FIG. It is a flowchart which shows the action | operation of the image data processing apparatus shown in FIG. It is a schematic diagram which shows interlace data and non-interlace data. It is a schematic diagram which shows interlace data. It is a schematic diagram which shows the production | generation of a line number link list. It is a schematic diagram which shows rearrangement of image data. It is a schematic diagram which shows the line number search for the next line number link list preparation. It is a schematic diagram which shows the completion | finish state of rearrangement. It is a schematic diagram which shows line number link list creation in the case of i = 3 and h = 18. It is a graph which shows the relationship between the image size which shows the comparison with a prior art example, and the number of bytes which accessed memory. It is a graph which shows the relationship between the image size which shows the comparison with a prior art example, and the use memory size. It is a schematic diagram which shows the conventional image conversion method. It is a schematic diagram which shows the conventional image conversion method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Charged particle beam apparatus 20 ... Lens barrel 21 ... Electron beam source 22 ... Deflector 23 ... Detector 30 ... Sample chamber 31 ... Sample 40 ... Control means 41 ... arithmetic processing device 42 ... image display device 43 ... image memory 44 ... deflection control device 50 ... image data processing device 51 ... arithmetic control unit 52 ... arithmetic execution unit 53 ... Line number link list 54 ... Image line memory

Claims (15)

h and i are positive integers, i <h, and the current image data is extracted from a memory space in which all h rows of image data sequences are stored in an interlaced manner with an interlace interval i. In the method for converting image data to be rearranged into interlaced image data,
A function f (y) for setting the line number of the current image data of interest as the current line number y and acquiring the target line number of the target image data after the rearrangement is obtained.
(However, 0 ≦ y ≦ h-1)
As
A new target line number f (y) is obtained with the value of the obtained target line number f (y) as the next current line number y,
This process is repeated until the target line number f (y) matches the initially set current line number y.
An image data conversion method characterized in that these processes are repeated as necessary to obtain target line numbers f (y) for all current line numbers y.
h and i are positive integers, i <h, and the current image data is extracted from a memory space in which all h rows of image data sequences are stored in an interlaced manner with an interlace interval i. In the method for converting image data to be rearranged into interlaced image data,
A function f (y) for setting the line number of the current image data of interest as the current line number y and acquiring the target line number of the target image data after the rearrangement is obtained.
(However, 0 ≦ y ≦ h-1)
As
A new target line number f (y) is obtained with the value of the obtained target line number f (y) as the next current line number y,
This process is repeated until the target line number f (y) matches the initially set current line number y.
Create a line number linked list with the current line number and destination line number pair,
One image data line selected from this line number link list is saved outside the memory space,
An image data conversion method characterized by performing an image data row moving process for moving image data to be arranged in a column saved with reference to the row number link list. h and i are positive integers, i <h, and the current image data is extracted from a memory space in which all h rows of image data sequences are stored in an interlaced manner with an interlace interval i. In an image data conversion device for rearranging to interlaced image data,
A function f (y) for setting the line number of the current image data of interest as the current line number y and acquiring the target line number of the target image data after the rearrangement is obtained.
(However, 0 ≦ y ≦ h-1)
A target line number calculating means for calculating as
A new target line number f (y) is obtained with the value of the obtained target line number f (y) as the next current line number y, and this process is repeated, and the target line number f (y) is set first. This processing is performed until the current line number y is matched, and these processes are repeated as necessary to obtain the target line number f (y) for all current line numbers y;
An image data conversion device comprising: h and i are positive integers, i <h, and the current image data is extracted from a memory space in which all h rows of image data sequences are stored in an interlaced manner with an interlace interval i. In an image data conversion device for rearranging to interlaced image data,
A function f (y) for setting the line number of the current image data of interest as the current line number y and acquiring the target line number of the target image data after the rearrangement is obtained.
(However, 0 ≦ y ≦ h-1)
A purpose number calculating means for calculating as
A new target line number f (y) is obtained by setting the value of the obtained target line number f (y) as the next current line number y, and this process is repeated to set the target line number f (y) first. A line number link list creating means for performing this process until the current line number y is matched, and creating a line number linked list having a pair of the current line number and the target line number;
An image saving memory arranged outside the memory space in which one image data row selected from the line number link list is saved;
Data movement control means for performing movement processing of image data rows for sequentially moving image data to be arranged in the columns to the columns saved with reference to the row number link list;
An image data conversion device comprising: An image data display method comprising the image data conversion method according to claim 1 or 2 and displaying a non-interlaced image.
  5. An image data display device comprising the image data conversion device according to claim 3 and displaying a non-interlaced image.   A computer program storing the image data conversion method according to claim 1.   A computer program storing the image data display method according to claim 3. An electron optical system that scans and irradiates a predetermined range of a sample with an electron beam from an electron beam source, and an arithmetic processing unit that receives a charged particle beam generated from the sample and obtains image information of the sample corresponding to the scanning of the electron beam And the electron optical system is controlled to scan the charged particle beam at all h rows and an interlace interval i, where h and i are positive integers, i <h.
The arithmetic processing unit includes an image memory that records an image obtained by an interlace method as current image data,
An image data processing device is connected to the image memory,
The image data processing device
A function f (y) for setting the line number of the current image data of interest as the current line number y and acquiring the target line number of the target image data after the rearrangement is obtained.
(However, 0 ≦ y ≦ h-1)
A target line number calculating means for calculating as
A new target line number f (y) is obtained with the value of the obtained target line number f (y) as the next current line number y, and this process is repeated, and the target line number f (y) is set first. This processing is performed until the current line number y is matched, and these processes are repeated as necessary to obtain the target line number f (y) for all current line numbers y;
A new target line number f (y) is obtained with the value of the obtained target line number f (y) as the next current line number y, and this process is repeated, and the target line number f (y) is set first. A line number link list creating means for performing this process until the current line number y is matched, and creating a line number linked list having a pair of the current line number and the target line number;
An image saving memory arranged outside the memory space in which one image data row selected from the line number link list is saved;
A data movement control means for performing image data row movement processing for sequentially moving image data to be arranged in the column to the saved column with reference to the row number link list;
A charged particle beam apparatus comprising arithmetic means for displaying on a front display means. h, i are positive integers, i <h, and the current data is extracted from the memory space in which all h rows of data strings are stored in an interlaced manner with an interlace interval i, and all h rows are non-interlaced in the same memory space. In the data conversion method for rearranging the data,
The function f (y) for setting the line number of the current data of interest as the current line number y and obtaining the target line number of the target data after the rearrangement is
(However, 0 ≦ y ≦ h-1)
As
A new target line number f (y) is obtained with the value of the obtained target line number f (y) as the next current line number y,
This process is repeated until the target line number f (y) matches the initially set current line number y.
A data conversion method characterized by repeating these processes as necessary to obtain target line numbers f (y) for all current line numbers y. h, i are positive integers, i <h, and the current data is extracted from the memory space in which all h rows of data strings are stored in an interlaced manner with an interlace interval i, and all h rows are non-interlaced in the same memory space. In the data conversion method for rearranging the data,
The function f (y) for setting the line number of the current data of interest as the current line number y and obtaining the target line number of the target data after the rearrangement is
(However, 0 ≦ y ≦ h-1)
As
A new target line number f (y) is obtained with the value of the obtained target line number f (y) as the next current line number y,
This process is repeated until the target line number f (y) matches the initially set current line number y.
A data conversion method characterized by repeating these processes as necessary to obtain target line numbers f (y) for all current line numbers y.
h, i are positive integers, i <h, and the current data is extracted from the memory space in which all h rows of data strings are stored in an interlaced manner with an interlace interval i, and all h rows are non-interlaced in the same memory space. In the data conversion method for rearranging the data,
The function f (y) for setting the line number of the current data of interest as the current line number y and obtaining the target line number of the target data after the rearrangement is
(However, 0 ≦ y ≦ h-1)
As
A new target line number f (y) is obtained with the value of the obtained target line number f (y) as the next current line number y,
This process is repeated until the target line number f (y) matches the initially set current line number y.
Create a line number linked list with the current line number and destination line number pair,
Save one data line selected from this line number linked list outside the memory space,
A data conversion method comprising: performing data row movement processing for moving data to be arranged in a saved column with reference to the row number link list. h, i are positive integers, i <h, and the current data is extracted from the memory space in which all h rows of data strings are stored in an interlaced manner with an interlace interval i, and all h rows are non-interlaced in the same memory space. In the data conversion device that rearranges the data into
The function f (y) for setting the line number of the current data of interest as the current line number y and obtaining the target line number of the target data after the rearrangement is
(However, 0 ≦ y ≦ h-1)
A target line number calculating means for calculating as
A new target line number f (y) is obtained with the value of the obtained target line number f (y) as the next current line number y, and this process is repeated, and the target line number f (y) is set first. This processing is performed until the current line number y is matched, and these processes are repeated as necessary to obtain the target line number f (y) for all current line numbers y;
A data conversion device comprising: h, i are positive integers, i <h, and the current data is extracted from the memory space in which all h rows of data strings are stored in an interlaced manner with an interlace interval i, and all h rows are non-interlaced in the same memory space. In the data conversion device that rearranges the data into
The function f (y) for setting the line number of the current data of interest as the current line number y and obtaining the target line number of the target data after the rearrangement is
(However, 0 ≦ y ≦ h-1)
A purpose number calculating means for calculating as
A new target line number f (y) is obtained with the value of the obtained target line number f (y) as the next current line number y, and this process is repeated, and the target line number f (y) is set first. A line number link list creating means for performing this process until the current line number y is matched, and creating a line number linked list having a pair of the current line number and the target line number;
A save memory arranged outside the memory space in which one data line selected from the line number link list is saved;
A data movement control means for performing data row movement processing for sequentially moving data to be placed in the column saved with reference to the row number link list;
A data conversion device comprising: When hmodi ≠ 0,
h = h '
The image data conversion method according to claim 1, the image data conversion device according to claim 3, or the image data display according to claim 5, wherein the processing is performed by setting h that is divisible by i. An image data display device according to claim 6, a computer program according to claim 7 or 8, a charged particle beam device according to claim 9, a data conversion method according to claim 10 or 11, or a data conversion method according to claim 12 or 13. The data converter described.