JP2007270160A - Nickel-plating solution and method for manufacturing electronic parts - Google Patents

Nickel-plating solution and method for manufacturing electronic parts Download PDF

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JP2007270160A
JP2007270160A JP2006093617A JP2006093617A JP2007270160A JP 2007270160 A JP2007270160 A JP 2007270160A JP 2006093617 A JP2006093617 A JP 2006093617A JP 2006093617 A JP2006093617 A JP 2006093617A JP 2007270160 A JP2007270160 A JP 2007270160A
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nickel
plating solution
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JP4936210B2 (en
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Akihiro Motoki
章博 元木
Hideyuki Kashio
秀之 樫尾
Sotoshi Numata
外志 沼田
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Murata Manufacturing Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a nickel-plating solution which minimizes the growth of a plating film, imparts the plated film satisfactory smoothness, and adequately dissolves an anode therein. <P>SOLUTION: The nickel-plating solution includes a nickel salt mainly containing nickel sulfate, a halogen compound such as nickel chloride, and a pH buffer such as boric acid; has a pH adjusted to 2.2 to 5.5; contains nickel ions in a molar concentration (x) of 1.71 mol/L or higher; and contains halide ions so that a molar concentration ratio x/y of the molar concentration (x) of the nickel ions to the molar concentration (y) of the halide ions can be 3.0<x/y≤10.0. This method for manufacturing electronic parts comprises the steps of: electrolytically plating external electrodes 6a and 6b with nickel in the nickel plating bath to form nickel films 7a and 7b having satisfactory smoothness thereon; and then electrolytically plating the external electrodes with tin to form tin films 8a and 8b on the nickel films 7a and 7b. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明はニッケルめっき液、及び該ニッケルめっき液を使用した電子部品の製造方法に関する。   The present invention relates to a nickel plating solution and a method for manufacturing an electronic component using the nickel plating solution.

セラミック電子部品等の電子部品では、はんだ付き性の向上等を目的として導電部上にスズ皮膜やスズ基合金皮膜、金皮膜等のめっき皮膜が形成されるが、通常、その下地皮膜としてはんだ接合性及びはんだ耐熱性に優れたニッケル皮膜が形成されている。   In electronic parts such as ceramic electronic parts, a plating film such as a tin film, a tin-based alloy film, or a gold film is formed on the conductive part for the purpose of improving solderability. A nickel film excellent in heat resistance and solder heat resistance is formed.

そして、この種のニッケル皮膜形成用のめっき液としては、従来より、ワット浴が知られている。このワット浴は、一般的には、硫酸ニッケルを0.49〜1.45mol/L、塩化ニッケルを0.19〜0.25mol/L、pH緩衝剤としてのホウ酸を0.48〜0.65mol/L含有し、pHが2.5〜5.5、浴温が40〜65℃となるように組成調整されている。   As a plating solution for forming this kind of nickel film, a watt bath is conventionally known. This Watt bath generally has nickel sulfate of 0.49 to 1.45 mol / L, nickel chloride of 0.19 to 0.25 mol / L, and boric acid as a pH buffering agent of 0.48 to 0.00. The composition is adjusted to contain 65 mol / L, pH is 2.5 to 5.5, and bath temperature is 40 to 65 ° C.

また、特許文献1には、スルファミン酸ニッケル又はその複合剤を主成分とし、ニッケルの不動態化を防止するためのハロゲン化合物と、pH安定剤とが添加されたニッケルめっき液が開示されている。   Patent Document 1 discloses a nickel plating solution containing nickel sulfamate or a complex thereof as a main component and a halogen compound for preventing nickel passivation and a pH stabilizer. .

特開平11−92988号公報JP-A-11-92988

しかしながら、上記ワット浴を使用してニッケルめっきを行った場合、ニッケル皮膜の表面粗さが大きく平滑性を欠き、このため表面が酸化し、その後工程で形成されるスズ皮膜等の上層皮膜の緻密性が低く、特に高温多湿の厳しい環境下でははんだ付き性が低下するという問題点があった。   However, when nickel plating is performed using the Watt bath, the surface roughness of the nickel film is large and lacks smoothness. Therefore, the surface is oxidized, and the denseness of the upper film such as a tin film formed in the subsequent process is reduced. There is a problem that the solderability is lowered particularly in a severe environment of high temperature and high humidity.

ニッケル皮膜の表面を平滑化する方策としては、ワット浴中へのハロゲン化合物を不添加とすることも考えられるが、この場合は、被めっき物上の導電部以外の部品素体上にもめっき金属であるニッケルが析出し、さらにはアノードの溶解効率が低下するため、めっき処理中に頻繁にめっき液の濃度調整を行う必要が生じるなど、浴管理の煩雑さを招くという問題点が新たに生じる。   As a measure to smooth the surface of the nickel film, it is possible to add no halogen compound to the watt bath, but in this case, plating is also performed on the component body other than the conductive part on the object to be plated. Since nickel, which is a metal, is deposited, and the dissolution efficiency of the anode is reduced, it is necessary to frequently adjust the concentration of the plating solution during the plating process. Arise.

部品素体へのニッケルの析出を防ぐ方法としては、ニッケルイオンとハロゲンイオンとの濃度比を制御する方法も考えられるが、特許文献1では、ニッケル源としてスルファミン酸ニッケルを使用しているため、部品素体へのニッケルの析出を防止することができず、所謂めっき成長を十分に抑制することができないという問題点があった。   As a method for preventing the deposition of nickel on the component body, a method of controlling the concentration ratio of nickel ions and halogen ions is also conceivable, but in Patent Document 1, since nickel sulfamate is used as a nickel source, There is a problem that nickel cannot be prevented from being deposited on the component body and so-called plating growth cannot be sufficiently suppressed.

本発明はこのような事情に鑑みなされたものであって、めっき成長を極力抑制することができ、かつ良好な平滑性を有するニッケル皮膜と良好なアノード溶解性を有するニッケルめっき液を提供することを目的とし、さらに該ニッケルめっき液を使用した良好なはんだ付き性を有する電子部品の製造方法を提供することを目的とする。   The present invention has been made in view of such circumstances, and provides a nickel plating solution that can suppress plating growth as much as possible and that has good smoothness and good anodic solubility. Furthermore, it aims at providing the manufacturing method of the electronic component which has the favorable solderability using this nickel plating solution.

本発明者らは上記目的を達成するために鋭意研究したところ、ニッケルめっき液中のニッケルイオンのモル濃度を1.71mol/L以上、ニッケルイオンとハロゲンイオンとのモル濃度比が3.0を超え10.0以下となるようにめっき液組成を定量的に制御することにより、良好な平滑性を有するニッケル皮膜を形成することが可能になると共に、めっき成長も極力抑制することができ、かつアノード溶解性も良好であるという知見を得た。   The inventors of the present invention have made extensive studies to achieve the above object. As a result, the molar concentration of nickel ions in the nickel plating solution is 1.71 mol / L or more, and the molar concentration ratio of nickel ions to halogen ions is 3.0. By quantitatively controlling the plating solution composition so as to be over 10.0 or less, it becomes possible to form a nickel film having good smoothness, and to suppress plating growth as much as possible, and The knowledge that anodic solubility was also good was obtained.

本発明はこのような知見に基づきなされたものであって、本発明に係るニッケルめっき液は、ニッケル塩とハロゲン化合物とpH緩衝剤とを含有し、pHが2.5〜5.5に調整されたニッケルめっき液において、ニッケルイオンのモル濃度xが1.71mol/L以上であって、かつ、ニッケルイオンのモル濃度xとハロゲンイオンのモル濃度yとの比x/yが、3.0<x/y≦10.0であることを特徴としている。   The present invention has been made based on such knowledge, and the nickel plating solution according to the present invention contains a nickel salt, a halogen compound, and a pH buffer, and the pH is adjusted to 2.5 to 5.5. In the obtained nickel plating solution, the molar concentration x of nickel ions is 1.71 mol / L or more, and the ratio x / y between the molar concentration x of nickel ions and the molar concentration y of halogen ions is 3.0. <X / y ≦ 10.0.

また、本発明のニッケルめっき液は、前記ニッケル塩は主成分が硫酸ニッケルであることを特徴としている。   In the nickel plating solution of the present invention, the nickel salt is mainly composed of nickel sulfate.

さらに、本発明のニッケルめっき液は、前記ハロゲン化合物は、塩化ニッケル及び臭化ニッケルのうちの一種以上であることを特徴としている。   Furthermore, the nickel plating solution of the present invention is characterized in that the halogen compound is one or more of nickel chloride and nickel bromide.

また、本発明のニッケルめっき液は、前記pH緩衝剤は、ホウ酸、オキシカルボン酸、これらの塩、及びラクトン化合物から選択された少なくとも1種以上であることを特徴としている。   The nickel plating solution of the present invention is characterized in that the pH buffer is at least one selected from boric acid, oxycarboxylic acid, salts thereof, and lactone compounds.

また、本発明に係る電子部品の製造方法は、上記ニッケルめっき液を使用して導電部の形成された部品素体にめっき処理を施し、前記導電部の表面にニッケル皮膜を形成することを特徴としている。   In addition, the electronic component manufacturing method according to the present invention is characterized in that the nickel element is formed on the surface of the conductive portion by plating the component body on which the conductive portion is formed using the nickel plating solution. It is said.

本発明のニッケルめっき液によれば、少なくとも硫酸ニッケル等のニッケル塩と塩化ニッケルや臭化ニッケル等のハロゲン化合物とホウ酸やオキシカルボン酸、ラクトン化合物等のpH緩衝剤とを含有し、pHが2.5〜5.5に調整されたニッケルめっき液において、ニッケルイオンのモル濃度xが1.71mol/L以上であって、かつ、ニッケルイオンのモル濃度xとハロゲンイオンのモル濃度yとの比x/yが、3.0<x/y≦10.0であるので、平滑性の良好なニッケル皮膜を形成することができ、したがって厳しい使用環境下に晒されても良好なはんだ付き性を得ることができる。また、導電部上に優先的にニッケルをめっき析出させることができ、これにより部品素体へのめっき成長を大幅に抑制することができ、さらにはアノード溶解性が良好で浴管理も簡便なニッケルめっき液を得ることができる。   The nickel plating solution of the present invention contains at least a nickel salt such as nickel sulfate, a halogen compound such as nickel chloride and nickel bromide, and a pH buffer such as boric acid, oxycarboxylic acid and lactone compound, and has a pH of In the nickel plating solution adjusted to 2.5 to 5.5, the molar concentration x of nickel ions is 1.71 mol / L or more, and the molar concentration x of nickel ions and the molar concentration y of halogen ions are Since the ratio x / y is 3.0 <x / y ≦ 10.0, it is possible to form a nickel film with good smoothness, and thus good solderability even when exposed to harsh usage environments. Can be obtained. In addition, nickel can be preferentially deposited on the conductive part, which can greatly suppress the growth of plating on the component body, and furthermore, nickel having good anode solubility and easy bath management. A plating solution can be obtained.

すなわち、ニッケルイオンのモル濃度を1.71mol/L以上としているので、導電部上に優先的にニッケルが析出し、導電部以外の部品素体上へのめっき成長を抑制することができる。   That is, since the molar concentration of nickel ions is set to 1.71 mol / L or more, nickel is preferentially deposited on the conductive portion, and plating growth on a component body other than the conductive portion can be suppressed.

また、ニッケルイオンxとハロゲンイオンyとの比x/yが、3.0を超えるようにめっき液を調製しているので、電解めっきにより形成されたニッケル皮膜の平滑性が向上し、したがって後工程でニッケル皮膜上に形成されるスズ皮膜等の上層皮膜は緻密なものとなり、高温多湿の厳しい環境下に晒されても良好なはんだ付き性を得ることができる。   In addition, since the plating solution is prepared so that the ratio x / y of nickel ion x to halogen ion y exceeds 3.0, the smoothness of the nickel film formed by electrolytic plating is improved. The upper film such as a tin film formed on the nickel film in the process becomes dense, and good solderability can be obtained even when exposed to a severe environment of high temperature and humidity.

さらに、前記比x/yを10.0以下としているので、アノード溶解効率が低下することもなく、所望の良好なアノード溶解性を得ることが可能となり、したがってめっき処理中にめっき液の濃度調整を行う必要もなくなり、浴管理も簡便なものとなる。   Further, since the ratio x / y is set to 10.0 or less, it is possible to obtain desired good anodic solubility without lowering the anodic dissolution efficiency, and thus adjusting the concentration of the plating solution during the plating process. It is no longer necessary to perform bathing, and bath management is simplified.

また、本発明の電子部品の製造方法によれば、上記ニッケルめっき液を使用して導電部の形成された部品素体にめっき処理を施し、前記導電部の表面にニッケル皮膜を形成しているので、部品素体へのめっき成長が抑制されて導電部上にのみニッケル皮膜が形成され、しかもニッケル皮膜上にスズ皮膜等の上層皮膜が形成された場合であっても、該上層皮膜は緻密化されたものとなり、したがって、高温多湿の厳しい環境下でもはんだ付き性が良好で、かつめっき成長の抑制されたセラミック電子部品等の各種電子部品を得ることが可能となる。   Moreover, according to the method for manufacturing an electronic component of the present invention, the nickel base is formed on the surface of the conductive portion by plating the component body on which the conductive portion is formed using the nickel plating solution. Therefore, even when the plating growth on the component body is suppressed and a nickel film is formed only on the conductive portion, and an upper film such as a tin film is formed on the nickel film, the upper film is dense. Therefore, it is possible to obtain various electronic components such as ceramic electronic components that have good solderability even in a severe environment of high temperature and high humidity and have suppressed plating growth.

次に、本発明の実施の形態を詳説する。   Next, an embodiment of the present invention will be described in detail.

本発明に係るニッケルめっき液は、ニッケル塩とハロゲン化合物とpH緩衝剤とを含有し、pHが2.5〜5.5に調整され、ニッケルイオンのモル濃度xが1.71mol/L以上であって、かつニッケルイオンのモル濃度xとハロゲンイオンのモル濃度yとの比x/yが、3.0<x/y≦10.0となるように調製されている。   The nickel plating solution according to the present invention contains a nickel salt, a halogen compound and a pH buffer, the pH is adjusted to 2.5 to 5.5, and the molar concentration x of nickel ions is 1.71 mol / L or more. In addition, the ratio x / y between the molar concentration x of nickel ions and the molar concentration y of halogen ions is adjusted to be 3.0 <x / y ≦ 10.0.

ニッケルイオンのモル濃度x、及びニッケルイオンのモル濃度xとハロゲンイオンのモル濃度yとの比x/yを上述のように限定したのは以下の理由による。   The reason why the molar concentration x of nickel ions and the ratio x / y between the molar concentration x of nickel ions and the molar concentration y of halogen ions are limited as described above is as follows.

(1)ニッケルイオンのモル濃度x
表面所定個所に導電部が形成された被めっき物にニッケルめっきを施す場合、導電部以外の部分、すなわち部品素体へのめっき成長を抑制するためには、導電部上に優先的にめっき析出させる必要がある。
(1) Nickel molar concentration x
When nickel plating is applied to an object to be plated with a conductive part formed on a predetermined surface, in order to suppress plating growth on parts other than the conductive part, that is, the component body, plating is preferentially deposited on the conductive part. It is necessary to let

そして、本発明者らが鋭意研究したところ、導電部上に優先的にめっき析出させるには、ニッケルイオンのモル濃度xを増加させて該モル濃度xを少なくともを1.71mol/L以上とするのが効果的であることが分かった。   As a result of extensive research by the present inventors, in order to preferentially deposit metal on the conductive portion, the molar concentration x of nickel ions is increased so that the molar concentration x is at least 1.71 mol / L or more. Was found to be effective.

そこで、本実施の形態では、ニッケルイオンのモル濃度xの下限値を1.71mol/Lとし、ニッケルイオンのモル濃度xが少なくとも1.71mol/L以上となるようにニッケルめっき液を調製している。   Therefore, in the present embodiment, the nickel plating solution is prepared so that the lower limit value of the molar concentration x of nickel ions is 1.71 mol / L and the molar concentration x of nickel ions is at least 1.71 mol / L or more. Yes.

(2)ニッケルイオンのモル濃度xとハロゲンイオンのモル濃度yとの比x/y
ニッケルめっき液ではアノードの不動態化を避けるためにハロゲン化合物を含有させているが、このハロゲン化合物を多量に含有させるとめっき形成されたニッケル皮膜の表面粗さが大きくなって平滑性に欠け、このためニッケル皮膜上に形成されるスズ皮膜等の上層皮膜が緻密さを欠き、はんだ付き性の低下を招く。
(2) Ratio x / y between the molar concentration x of nickel ions and the molar concentration y of halogen ions
The nickel plating solution contains a halogen compound in order to avoid passivation of the anode, but if this halogen compound is contained in a large amount, the surface roughness of the nickel film formed by plating becomes large and lacks smoothness. For this reason, the upper layer film such as a tin film formed on the nickel film lacks the denseness, and the solderability is deteriorated.

そこで、本発明者らが鋭意研究したところ、ニッケルイオンのモル濃度xとハロゲンイオンのモル濃度yとのモル濃度比x/yが3.0以上となるようにハロゲンイオンのモル濃度yを小さくすることにより、良好な平滑性を有するニッケル皮膜を得ることが分かった。   Therefore, the present inventors have intensively studied, and as a result, the halogen ion molar concentration y is decreased so that the molar concentration ratio x / y between the nickel ion molar concentration x and the halogen ion molar concentration y is 3.0 or more. By doing so, it was found that a nickel film having good smoothness was obtained.

そしてこれによりスズ皮膜等の上層皮膜を緻密化させることができ、高温多湿下に晒されても良好なはんだ付き性を得ることができる。   Thus, an upper layer film such as a tin film can be densified, and good solderability can be obtained even when exposed to high temperature and high humidity.

一方、ハロゲンイオンのモル濃度yを過度に減少させて比x/yが10.0を超えると、アノードの溶解効率が低下し、めっき処理中に頻繁に濃度調整を行う必要が生じるなど、めっき液の浴管理が煩雑になる。   On the other hand, if the molar concentration y of the halogen ions is excessively decreased and the ratio x / y exceeds 10.0, the dissolution efficiency of the anode is lowered, and it is necessary to frequently adjust the concentration during the plating process. The liquid bath management becomes complicated.

そこで、本実施の形態では、ニッケルイオンxとハロゲンイオンyとのモル濃度比x/yが、3.0<x/y≦10.0となるようにニッケルめっき液を調製している。   Therefore, in the present embodiment, the nickel plating solution is prepared so that the molar concentration ratio x / y between nickel ions x and halogen ions y satisfies 3.0 <x / y ≦ 10.0.

ニッケルイオンの供給源としては、硫酸ニッケルを主成分とするニッケル塩を使用するのが好ましく、またハロゲン化化合物としては、塩化ニッケルや臭化ニッケル等のハロゲン化ニッケルを使用するのが好ましい。   As the nickel ion supply source, it is preferable to use a nickel salt containing nickel sulfate as a main component, and as the halogenated compound, nickel halide such as nickel chloride or nickel bromide is preferably used.

尚、ハロゲンイオン源、ニッケルイオン源となる化合物は、本発明の目的を妨げない限り、上記以外の化合物を含んでいても構わない。   In addition, the compound used as a halogen ion source and a nickel ion source may contain compounds other than the above, unless the objective of this invention is disturbed.

また、ニッケルめっき液のpHを2.5〜5.5に調整したのは、pHが2.5未満では、ニッケルめっき液が過度に酸性となり、このため部品素体を構成する成分元素の溶出が顕著となるからであり、一方、pHが5.5を超えると、ニッケルイオンがイオン状態で安定して存在するのが困難となるからである。尚、ニッケルめっき液のpHの好ましい範囲は、3.0〜4.5である。   In addition, the pH of the nickel plating solution was adjusted to 2.5 to 5.5 when the pH is less than 2.5, the nickel plating solution becomes excessively acidic, so that the component elements constituting the component body are eluted. On the other hand, if the pH exceeds 5.5, it is difficult for nickel ions to exist stably in an ionic state. In addition, the preferable range of pH of a nickel plating solution is 3.0-4.5.

また、pH緩衝剤としては、錯化作用を示さないホウ酸を使用するのが好ましいが、ホウ酸以外のオキシカルボン酸類、例えば、クエン酸等のオキシトリカルボン酸、グルコン酸、グルコヘプトン酸、サリチル酸、乳酸、グリコール酸等のオキシモノカルボン酸、リンゴ酸、酒石酸等のオキシジカルボン酸を使用することができ、さらにはグルコノラクトンやグルコヘプトノラクトン等のラクトン化合物を使用することもできる。   Further, as the pH buffering agent, it is preferable to use boric acid that does not exhibit a complexing action, but oxycarboxylic acids other than boric acid, for example, oxytricarboxylic acid such as citric acid, gluconic acid, glucoheptonic acid, salicylic acid, Oxymonocarboxylic acids such as lactic acid and glycolic acid, oxydicarboxylic acids such as malic acid and tartaric acid can be used, and lactone compounds such as gluconolactone and glucoheptonolactone can also be used.

ただし、オキシカルボン酸類やラクトン化合物をpH緩衝剤として使用する場合は、所定量以上添加させると錯化作用を強く示すおそれがあることから、添加量を制限する必要がある。   However, when oxycarboxylic acids or lactone compounds are used as pH buffering agents, it is necessary to limit the addition amount because adding a predetermined amount or more may cause a strong complexing effect.

このように上記ニッケルめっき液は、ニッケルイオンのモル濃度xが1.71mol/L以上であって、かつニッケルイオンのモル濃度xとハロゲンイオンのモル濃度yとの比x/yが、3.0<x/y≦10.0となるように調製されているので、導電部上に優先的にニッケルをめっき析出させることができ、これにより部品素体へのめっき成長を大幅に抑制することができる導電部上に優先的にニッケルをめっき析出させることができる。また、ニッケル皮膜の平滑性が向上することから、後工程でニッケル皮膜上に形成されるスズ皮膜等の上層皮膜が緻密なものとなり、したがって高温多湿の厳しい環境下に晒されても良好なはんだ付き性を得ることができる。しかもアノード溶解効率が低下することもなく、所望の良好なアノード溶解性を得ることが可能となることから、めっき処理中にめっき液の濃度調整を行う必要もなくなり、浴管理も簡便なニッケルめっき液を得ることができる。   Thus, the nickel plating solution has a molar concentration x of nickel ions of 1.71 mol / L or more and a ratio x / y between the molar concentration x of nickel ions and the molar concentration y of halogen ions is 3. Since it is prepared so as to satisfy 0 <x / y ≦ 10.0, nickel can be preferentially deposited on the conductive portion, thereby significantly suppressing plating growth on the component body. It is possible to preferentially deposit nickel on the conductive portion that can be formed. In addition, since the smoothness of the nickel film is improved, the upper layer film such as a tin film formed on the nickel film in the subsequent process becomes dense, and therefore a good solder even when exposed to a severe environment of high temperature and high humidity. Adherence can be obtained. Moreover, since it is possible to obtain the desired good anodic solubility without lowering the anodic dissolution efficiency, it is not necessary to adjust the concentration of the plating solution during the plating process, and the nickel plating is easy to manage the bath. A liquid can be obtained.

次に、上記ニッケルめっき液を使用して製造した電子部品について詳述する。   Next, an electronic component manufactured using the nickel plating solution will be described in detail.

図1は電子部品としての積層セラミックコンデンサの一実施の形態を示す断面図である。   FIG. 1 is a cross-sectional view showing an embodiment of a multilayer ceramic capacitor as an electronic component.

該積層セラミックコンデンサは、チタン酸バリウム等の誘電体材料で形成されたセラミック素体(部品素体)1に内部電極2〜5が埋設されると共に、前記セラミック素体1の両端部には外部電極(導電部)6a、6bが形成され、さらに外部電極6a、6bの表面にはニッケル皮膜7a、7b及びスズ皮膜8a、8bが順次形成されている。   In the multilayer ceramic capacitor, internal electrodes 2 to 5 are embedded in a ceramic body (component body) 1 made of a dielectric material such as barium titanate, and both ends of the ceramic body 1 are externally provided. Electrodes (conductive portions) 6a and 6b are formed, and nickel films 7a and 7b and tin films 8a and 8b are sequentially formed on the surfaces of the external electrodes 6a and 6b.

そして、内部電極2、4の引出部2a、4aは一方の外部電極6aと電気的に接続されると共に、内部電極3、5の引出部3a、5aは他方の外部電極6bと電気的に接続され、内部電極2、4と内部電極3、5との間に静電容量が形成されている。   The lead portions 2a and 4a of the internal electrodes 2 and 4 are electrically connected to one external electrode 6a, and the lead portions 3a and 5a of the internal electrodes 3 and 5 are electrically connected to the other external electrode 6b. In addition, a capacitance is formed between the internal electrodes 2 and 4 and the internal electrodes 3 and 5.

次に、上記積層セラミックコンデンサの製造方法を説明する。   Next, a method for manufacturing the multilayer ceramic capacitor will be described.

まず、BaCO、TiO、ZrO等の所定の誘電体セラミック材料を混合し、粉砕、乾燥、仮焼等の工程を経、ドクターブレード法によりセラミックグリーンシートを作製する。 First, a predetermined dielectric ceramic material such as BaCO 3 , TiO 2 , and ZrO 2 is mixed and subjected to processes such as pulverization, drying, and calcination, and a ceramic green sheet is produced by a doctor blade method.

次いで、PdやNi等の導電性材料にガラス粒子やワニス等の有機成分が含有された内部電極用導電性ペーストを作製する。そして、該導電性ペーストを使用してセラミックグリーンシートの表面にスクリーン印刷を施し、導電パターンを形成し、この後、前記導電パターンの形成されたセラミックグリーンシートを積層した後、導電パターンの形成されていないセラミックグリーンシートで挟持し、これらを圧着して積層体を形成する。その後、所定温度(例えば、900〜1300℃)で前記積層体に焼成処理を施し、バレル研磨を行い、これによりセラミック素体1が作製される。   Next, a conductive paste for internal electrodes is produced in which an organic component such as glass particles or varnish is contained in a conductive material such as Pd or Ni. Then, using the conductive paste, screen printing is performed on the surface of the ceramic green sheet to form a conductive pattern, and after that, the ceramic green sheets on which the conductive pattern is formed are stacked, and then the conductive pattern is formed. It is sandwiched between ceramic green sheets that are not yet bonded, and these are pressed to form a laminate. Thereafter, the laminated body is subjected to a firing treatment at a predetermined temperature (for example, 900 to 1300 ° C.) and subjected to barrel polishing, whereby the ceramic body 1 is manufactured.

次に、AgやCu等の導電性材料にガラス粒子、ワニス等の有機成分が含有された外部電極用導電性ペーストを作製する。次いで、該導電性ペーストをディップ方式によりセラミック素体1の両端部に塗布した後、温度600〜800℃で焼付処理を行なう。これによりワニス等の有機成分が燃焼して焼失し、導電性材料とガラス粒子との混合体からなる外部電極6a、6bが前記両端部に形成される。   Next, a conductive paste for an external electrode is produced in which an organic component such as glass particles and varnish is contained in a conductive material such as Ag or Cu. Next, the conductive paste is applied to both ends of the ceramic body 1 by a dip method, and then baked at a temperature of 600 to 800 ° C. As a result, organic components such as varnish burn and burn out, and external electrodes 6a and 6b made of a mixture of conductive material and glass particles are formed at both ends.

そしてこの後、外部電極6a、6bの形成されたセラミック素体1を被めっき物とし、例えば電解バレルめっき法によりニッケルめっきを行なってニッケル皮膜7a、7bを形成する。   Thereafter, the ceramic body 1 on which the external electrodes 6a and 6b are formed is used as an object to be plated, and nickel plating is performed by, for example, electrolytic barrel plating to form nickel films 7a and 7b.

すなわち、まず、上記ニッケルめっき液を用意する。   That is, first, the nickel plating solution is prepared.

そして、ニッケルをアノードに配し、カソード板、被めっき物、及び導電性媒体が内有されたバレルをカソードに配して上記ニッケルめっき液に浸漬し、バレルを回転、揺動等させながらアノード、カソード間に所定時間通電し、外部電極6a、6bの表面にニッケル皮膜7a、7bを形成する。   Then, nickel is disposed on the anode, and a cathode plate, an object to be plated, and a barrel containing a conductive medium are disposed on the cathode and immersed in the nickel plating solution, while the barrel is rotated, swung, etc. Then, a current is passed between the cathodes for a predetermined time to form nickel films 7a and 7b on the surfaces of the external electrodes 6a and 6b.

このようにしてニッケル皮膜7a、7bを形成した後、所定組成に調製されたスズめっき液を使用し、上述と同様、例えば電解バレルめっき法によりニッケル皮膜7a、7b上にスズ皮膜8a、8bを形成し、これにより積層セラミックコンデンサが製造される。   After forming the nickel films 7a and 7b in this way, the tin plating solution prepared in a predetermined composition is used, and the tin films 8a and 8b are formed on the nickel films 7a and 7b by the electrolytic barrel plating method, for example, as described above. This forms a multilayer ceramic capacitor.

このように本積層セラミックコンデンサは、上記ニッケルめっき液を使用して製造されているので、セラミック素体1へのめっき成長が抑制されて外部電極6a、6b上にのみ平滑性の良好なニッケル皮膜7a、7bが形成され、したがってニッケル皮膜7a、7b上のスズ皮膜8a、8bは緻密化されたものとなり、したがって、高温多湿の厳しい環境下でもはんだ付け性が良好で、かつめっき成長の抑制された積層セラミックコンデンサを得ることができる。   Thus, since this multilayer ceramic capacitor is manufactured using the said nickel plating solution, the plating growth to the ceramic body 1 is suppressed, and the nickel film with good smoothness only on the external electrodes 6a and 6b 7a and 7b are formed, and thus the tin films 8a and 8b on the nickel films 7a and 7b are densified. Therefore, solderability is good even in a severe environment of high temperature and high humidity, and plating growth is suppressed. A multilayer ceramic capacitor can be obtained.

尚、本発明は上記実施の形態に限定されるものではない。上記実施の形態ではニッケルめっき液の適用例として積層セラミックコンデンサを例示したが、他の電子部品にも広く適用でき、例えば、単板コンデンサ、積層インダクタ、正特性サーミスタ、負特性サーミスタ等に適用できるのはいうまでもない。   The present invention is not limited to the above embodiment. In the above embodiment, the multilayer ceramic capacitor is exemplified as an application example of the nickel plating solution. However, the multilayer ceramic capacitor can be widely applied to other electronic components, for example, a single plate capacitor, a multilayer inductor, a positive temperature coefficient thermistor, a negative temperature coefficient thermistor, and the like. Needless to say.

次に、本発明の実施例を具体的に説明する。   Next, examples of the present invention will be specifically described.

まず、表1に示すような成分組成となるようにニッケル塩としての硫酸ニッケル・6水和物(NiSO・6HO)、ハロゲン化合物としての塩化ニッケル・6水和物(NiCl・6HO)又は臭化ニッケル(NiBr)、ホウ酸を配合し、pH及び浴温を調整し、実施例1〜4及び比較例1〜9のニッケルめっき液を作製した。 First, nickel sulfate hexahydrate (NiSO 4 · 6H 2 O) as a nickel salt and nickel chloride · hexahydrate (NiCl 2 · 6H) as a halogen compound so as to have a component composition as shown in Table 1. 2 O) or nickel bromide (NiBr 2 ) and boric acid were blended, and the pH and bath temperature were adjusted to prepare nickel plating solutions of Examples 1 to 4 and Comparative Examples 1 to 9.

Figure 2007270160
次に、外形寸法が縦2.0mm、横1.25mm、厚み1.25mmであって、ニッケルからなる内部電極が埋設されると共に、焼付け処理により銅からなる外部電極が両端部に形成された第1の被めっき物(セラミック素体(主成分:チタン酸バリウム系))を用意した。
Figure 2007270160
Next, the outer dimensions were 2.0 mm in length, 1.25 mm in width, and 1.25 mm in thickness. Internal electrodes made of nickel were embedded, and external electrodes made of copper were formed at both ends by baking treatment. A first object to be plated (ceramic body (main component: barium titanate)) was prepared.

次いで、実施例1〜4及び比較例1〜9のニッケルめっき液を使用して第1の被めっき物に電解バレルめっきを施し、外部電極上に膜厚3μmのニッケル皮膜を形成した。尚、電解バレルめっきは10Aの電流(平均カソード電流密度0.20A/dm)を120分間通電して行った。 Next, electrolytic barrel plating was applied to the first object to be plated using the nickel plating solutions of Examples 1 to 4 and Comparative Examples 1 to 9, and a nickel film having a thickness of 3 μm was formed on the external electrode. The electrolytic barrel plating was performed by supplying a current of 10 A (average cathode current density of 0.20 A / dm 2 ) for 120 minutes.

次に、下記組成を有するスズめっき液を用意した。   Next, a tin plating solution having the following composition was prepared.

〔スズめっき液の浴組成〕
硫酸第1スズ 43g/L
クエン酸アンモニウム 122g/L
硫酸アンモニウム 132g/L
ラウリルジエタノールアミン 1g/L
pH 5.0
浴温 30℃
次いで、このスズめっき液を使用して電解バレルめっきを施し、ニッケル皮膜上に膜厚4μmのスズ皮膜を形成し、これにより実施例1〜4及び比較例1〜9の積層セラミックコンデンサを得た。尚、電解バレルめっきは8Aの電流(平均カソード電流密度0.16A/dm)を30分間通電して行った。
[Bath composition of tin plating solution]
Stannous sulfate 43g / L
Ammonium citrate 122g / L
Ammonium sulfate 132g / L
Lauryldiethanolamine 1g / L
pH 5.0
Bath temperature 30 ° C
Next, electrolytic barrel plating was performed using this tin plating solution to form a tin film having a film thickness of 4 μm on the nickel film, and thus multilayer ceramic capacitors of Examples 1 to 4 and Comparative Examples 1 to 9 were obtained. . The electrolytic barrel plating was carried out by applying a current of 8 A (average cathode current density of 0.16 A / dm 2 ) for 30 minutes.

次に、外形寸法が縦2.0mm、横1.25mm、厚み1.25mmであって、ニッケル−パラジウム合金からなる内部電極が埋設されると共に、焼付け処理により銀からなる外部電極が両端部に形成された第2の被めっき物(セラミック素体(主成分:フェライト系))を用意した。   Next, the external dimensions are 2.0 mm in length, 1.25 mm in width, and 1.25 mm in thickness, and an internal electrode made of nickel-palladium alloy is embedded, and external electrodes made of silver are baked at both ends by baking treatment. A formed second object to be plated (ceramic body (main component: ferrite)) was prepared.

次いで、上記実施例1〜4及び比較例1〜9のニッケルめっき液を使用し、上述と同様の方法・手順で、前記第2の被めっき物の外部電極上に膜厚3μmのニッケル皮膜を形成し、さらに上記スズめっき液を使用して前記ニッケル皮膜上に膜厚1μmのスズ皮膜を形成し、これにより実施例1〜4及び比較例1〜9の積層インダクタを得た。   Next, using the nickel plating solutions of Examples 1 to 4 and Comparative Examples 1 to 9, a nickel film having a thickness of 3 μm is formed on the external electrode of the second object to be plated by the same method and procedure as described above. Further, a tin film having a film thickness of 1 μm was formed on the nickel film using the tin plating solution, thereby obtaining multilayer inductors of Examples 1 to 4 and Comparative Examples 1 to 9.

次に、実施例1〜4及び比較例1〜9の各積層セラミックコンデンサ及び積層インダクタのそれぞれ10個について、マイクロスコープを使用し、セラミック素体上に析出しためっき皮膜の伸びを測定してその平均値を算出し、めっき成長の程度を評価した。   Next, for each of the multilayer ceramic capacitors and the multilayer inductors of Examples 1 to 4 and Comparative Examples 1 to 9, using a microscope, the elongation of the plating film deposited on the ceramic body was measured and The average value was calculated and the degree of plating growth was evaluated.

また、実施例1〜4及び比較例1〜9の各積層セラミックコンデンサ及び積層インダクタのそれぞれ10個について、はんだ付き性を評価した。   Moreover, solderability was evaluated about ten each of the multilayer ceramic capacitors and multilayer inductors of Examples 1-4 and Comparative Examples 1-9.

ここで、はんだ付き性は、温度105℃、相対湿度100%の高温多湿下で各試料を4時間放置した後、浴温210℃の共晶はんだ溶融槽に2秒浸漬し、スズ皮膜上のはんだ被覆面積を測定し、その被覆率によってはんだ付き性を評価した。   Here, the solderability is determined by allowing each sample to stand for 4 hours at a high temperature and humidity of 105 ° C. and a relative humidity of 100%, and then immersing in a eutectic solder melting bath having a bath temperature of 210 ° C. for 2 seconds. The solder coating area was measured, and the solderability was evaluated based on the coverage.

さらに、実施例1〜4及び比較例1〜9の各積層セラミックコンデンサ及び積層インダクタのそれぞれ2個について、アノードの溶解効率を算出し、アノード溶解性を評価した。   Further, for each of the multilayer ceramic capacitors and multilayer inductors of Examples 1 to 4 and Comparative Examples 1 to 9, the anode dissolution efficiency was calculated and the anode solubility was evaluated.

尚、アノードの溶解効率は、析出量の実測値を印加電流に対する理論析出量で除算して得た。   The dissolution efficiency of the anode was obtained by dividing the measured value of the precipitation amount by the theoretical precipitation amount with respect to the applied current.

表2は積層セラミックコンデンサの測定結果を示し、表3は積層インダクタの測定結果を示している。   Table 2 shows the measurement results of the multilayer ceramic capacitor, and Table 3 shows the measurement results of the multilayer inductor.

Figure 2007270160
Figure 2007270160

Figure 2007270160
表中、めっき成長については、積層セラミックコンデンサの場合は、セラミック素体上のめっき皮膜の伸びが2μm未満の場合を良(○)、2μm以上の場合を不良(×)と判断し、積層インダクタの場合は、セラミック素体上のめっき皮膜の伸びが80μm未満の場合を良(○)、80μm以上の場合を不良(×)と判断した。
Figure 2007270160
In the table, regarding the plating growth, in the case of a multilayer ceramic capacitor, the case where the elongation of the plating film on the ceramic body is less than 2 μm is judged as good (◯), and the case where it is 2 μm or more is judged as bad (×). In the case of, the case where the elongation of the plating film on the ceramic body was less than 80 μm was judged as good (◯), and the case where it was 80 μm or more was judged as defective (x).

はんだ付き性については、スズ皮膜上のはんだ被覆率が95%以上を良品、95%未満を不良品とし、不良品が全く発生しなかった場合を良(〇)、不良品が1個でも発生した場合を不良(×)と判断した。   With regard to solderability, the solder coverage on the tin film is 95% or higher as a non-defective product, and less than 95% is a defective product. If no defective product occurs at all (Good), even one defective product occurs. The case was judged as bad (x).

アノード溶解性については、溶解効率が90%以上の場合を良(○)、90%未満の場合を不良(×)と判断した。   Regarding the anode solubility, a case where the dissolution efficiency was 90% or more was judged as good (◯), and a case where it was less than 90% was judged as poor (×).

この表2及び表3から明らかなように、比較例1のニッケルめっき液は、モル濃度比x/yが2.9であり、3.0未満であるため、はんだ付き性の不良発生率が積層セラミックコンデンサの場合で20%、積層インダクタの場合で10%となり、製品歩留まりの低下を招くことが分かった。これはニッケルめっき液中のハロゲンイオンのモル濃度yが高いため、めっき析出速度が速くなり、このためめっき皮膜が緻密性・平滑性を欠くことになり、はんだ付き性の低下を招いたものと思われる。   As is apparent from Tables 2 and 3, the nickel plating solution of Comparative Example 1 has a molar concentration ratio x / y of 2.9 and less than 3.0, so that the solderability defect occurrence rate is low. It was found that the yield was 20% in the case of a multilayer ceramic capacitor and 10% in the case of a multilayer inductor, leading to a decrease in product yield. This is because the molar concentration y of the halogen ion in the nickel plating solution is high, so that the plating deposition rate is increased, and the plating film lacks denseness and smoothness, which leads to a decrease in solderability. Seem.

比較例2のニッケルめっき液は、モル濃度比x/yが11.4であり、10.0を超えているため、積層セラミックコンデンサ及び積層インダクタのいずれの場合も、アノードの溶解効率が85%と低下し、アノード溶解性に劣ることが分かった。   The nickel plating solution of Comparative Example 2 has a molar concentration ratio x / y of 11.4 and exceeds 10.0. Therefore, in both cases of the multilayer ceramic capacitor and the multilayer inductor, the dissolution efficiency of the anode is 85%. It was found that the anodic solubility was poor.

比較例3のニッケルめっき液は、ニッケルイオンのモル濃度xが1.41mol/Lであり、1.71mol/L未満であるため、セラミック素体上に形成されためっき皮膜の伸びは、積層セラミックコンデンサの場合で3.2μm、積層インダクタの場合で90μmであり、いずれの場合もめっき成長が顕著であることが分かった。これはニッケルめっき液中のニッケルイオンのモル濃度xが低いため、めっき処理中に被めっき物に大きな電位が負荷され、このため外部電極以外のセラミック素体上にもめっき皮膜が形成されてめっき成長が生じたものと思われる。   Since the nickel plating solution of Comparative Example 3 has a nickel ion molar concentration x of 1.41 mol / L and less than 1.71 mol / L, the elongation of the plating film formed on the ceramic body is a multilayer ceramic. In the case of the capacitor, the thickness was 3.2 μm, and in the case of the multilayer inductor, the thickness was 90 μm. It was found that the plating growth was remarkable in either case. This is because the molar concentration x of nickel ions in the nickel plating solution is low, so that a large potential is applied to the object to be plated during the plating process, so that a plating film is formed on the ceramic body other than the external electrodes. It seems that growth has occurred.

比較例4のニッケルめっき液は、モル濃度比x/yが2.8であり、3.0未満であるため、比較例1と同様の理由から、はんだ付き性の不良発生率が積層セラミックコンデンサ及び積層インダクタのいずれの場合であっても30%となり、製品歩留まりの低下を招くことが分かった。   Since the nickel plating solution of Comparative Example 4 has a molar concentration ratio x / y of 2.8 and less than 3.0, for the same reason as in Comparative Example 1, the rate of occurrence of defective solderability is a multilayer ceramic capacitor. It was found that in any case of the multilayer inductor and the multilayer inductor, it was 30%, and the product yield was reduced.

比較例5のニッケルめっき液は、モル濃度比x/yが32.1であり、10.0を大幅に超えているため、積層セラミックコンデンサ及び積層インダクタのいずれの場合も、アノードの溶解効率が60%と低下し、比較例2と同様、アノード溶解性に劣ることが分かった。   The nickel plating solution of Comparative Example 5 has a molar concentration ratio x / y of 32.1 and greatly exceeds 10.0. Therefore, in both cases of the multilayer ceramic capacitor and the multilayer inductor, the dissolution efficiency of the anode is high. It was found that the anodic solubility was inferior, as in Comparative Example 2, as it decreased to 60%.

比較例6のニッケルめっき液は、ニッケルイオンのモル濃度xが1.52mol/Lであり、1.71mol/L未満であるため、比較例3と同様の理由から、セラミック素体上に形成されためっき皮膜の伸びは、積層セラミックコンデンサの場合で3.0μm、積層インダクタの場合で110μmであり、いずれの場合もめっき成長が顕著であることが分かった。   The nickel plating solution of Comparative Example 6 has a nickel ion molar concentration x of 1.52 mol / L and is less than 1.71 mol / L. Therefore, it is formed on the ceramic body for the same reason as in Comparative Example 3. The elongation of the plated film was 3.0 μm in the case of the multilayer ceramic capacitor and 110 μm in the case of the multilayer inductor, and it was found that the plating growth was remarkable in either case.

比較例7のニッケルめっき液は、モル濃度比x/yが2.9であり、3.0未満であるため、比較例1と同様の理由から、はんだ付き性の不良発生率が積層セラミックコンデンサの場合で30%、積層インダクタの場合で10%となり、製品歩留まりの低下を招くことが分かった。   Since the nickel plating solution of Comparative Example 7 has a molar concentration ratio x / y of 2.9 and less than 3.0, for the same reason as in Comparative Example 1, the rate of occurrence of defective solderability is a multilayer ceramic capacitor. It was found that it was 30% in the case of 10 and 10% in the case of the multilayer inductor, leading to a decrease in product yield.

比較例8のニッケルめっき液は、モル濃度比x/yが11.2であり、10.0を超えているため、積層セラミックコンデンサ及び積層インダクタのいずれの場合も、アノードの溶解効率が71%と低下し、比較例2や比較例5と同様、アノード溶解性に劣ることが分かった。   The nickel plating solution of Comparative Example 8 had a molar concentration ratio x / y of 11.2 and exceeded 10.0. Therefore, in both cases of the multilayer ceramic capacitor and the multilayer inductor, the dissolution efficiency of the anode was 71%. As in Comparative Example 2 and Comparative Example 5, it was found that the anode solubility was inferior.

比較例9のニッケルめっき液は、ニッケルイオンのモル濃度xが1.70mol/Lであり、1.71mol/L未満であるため、比較例3と同様の理由から、セラミック素体上に形成されためっき皮膜の伸びは、積層セラミックコンデンサの場合で2.8μm、積層インダクタの場合で100μmであり、いずれの場合もめっき成長が顕著であることが分かった。   The nickel plating solution of Comparative Example 9 has a nickel ion molar concentration x of 1.70 mol / L and is less than 1.71 mol / L. Therefore, it is formed on the ceramic body for the same reason as in Comparative Example 3. The elongation of the plated film was 2.8 μm in the case of the multilayer ceramic capacitor and 100 μm in the case of the multilayer inductor, and it was found that the plating growth was remarkable in either case.

これに対して実施例1〜4のニッケルめっき液はニッケルイオンのモル濃度が1.71mol/L以上、ニッケルイオンのモル濃度xとハロゲンイオンのモル濃度yの比x/yが、3.0<x/y≦10.0であるので、高温多湿下に晒されてもはんだ付き性が良好であり、また、セラミック素体上に析出しためっき皮膜の伸びは積層セラミックコンデンサの場合で1μm以下、積層インダクタの場合で50〜70μmと良好であり、めっき成長を抑制することができた。さらにアノードの溶解効率も99%以上となってアノード溶解性が良好で、浴管理も簡便に行うことのできることが分かった。   In contrast, in the nickel plating solutions of Examples 1 to 4, the molar concentration of nickel ions is 1.71 mol / L or more, and the ratio x / y of the molar concentration x of nickel ions to the molar concentration y of halogen ions is 3.0. <X / y ≦ 10.0, so that the solderability is good even when exposed to high temperature and humidity, and the elongation of the plating film deposited on the ceramic body is 1 μm or less in the case of the multilayer ceramic capacitor In the case of the multilayer inductor, it was as good as 50 to 70 μm, and the plating growth could be suppressed. Further, it was found that the anode dissolution efficiency was 99% or more, the anode solubility was good, and the bath management could be easily performed.

本発明に係るニッケルめっき液を使用して製造された電子部品としての積層セラミックコンデンサの一実施の形態を模式的に示す断面図である。It is sectional drawing which shows typically one Embodiment of the multilayer ceramic capacitor as an electronic component manufactured using the nickel plating liquid which concerns on this invention.

符号の説明Explanation of symbols

1 セラミック素体(部品素体)
6a、6b 外部電極(導電部)
7a、7b ニッケル皮膜
1 Ceramic body (component body)
6a, 6b External electrode (conductive part)
7a, 7b Nickel coating

Claims (5)

ニッケル塩とハロゲン化合物とpH緩衝剤とを含有し、pHが2.5〜5.5に調整されたニッケルめっき液において、
ニッケルイオンのモル濃度xが1.71mol/L以上であって、
かつ、ニッケルイオンのモル濃度xとハロゲンイオンのモル濃度yとの比x/yが、3.0<x/y≦10.0であることを特徴とするニッケルめっき液。
In a nickel plating solution containing a nickel salt, a halogen compound, and a pH buffer, and having a pH adjusted to 2.5 to 5.5,
The molar concentration x of nickel ions is 1.71 mol / L or more,
The nickel plating solution is characterized in that the ratio x / y between the molar concentration x of nickel ions and the molar concentration y of halogen ions is 3.0 <x / y ≦ 10.0.
前記ニッケル塩は、主成分が硫酸ニッケルであることを特徴とする請求項1記載のニッケルめっき液。   2. The nickel plating solution according to claim 1, wherein the nickel salt is mainly composed of nickel sulfate. 前記ハロゲン化合物は、塩化ニッケル及び臭化ニッケルのうちの一種以上であることを特徴とする請求項1又は請求項2記載のニッケルめっき液。   The nickel plating solution according to claim 1 or 2, wherein the halogen compound is at least one of nickel chloride and nickel bromide. 前記pH緩衝剤は、ホウ酸、オキシカルボン酸、これらの塩、及びラクトン化合物から選択された1種以上であることを特徴とする請求項1乃至請求項3にいずれかに記載のニッケルめっき液。   The nickel plating solution according to any one of claims 1 to 3, wherein the pH buffer is at least one selected from boric acid, oxycarboxylic acid, salts thereof, and lactone compounds. . 請求項1乃至請求項4のいずれかに記載のニッケルめっき液を使用して導電部の形成された部品素体にめっき処理を施し、前記導電部の表面にニッケル皮膜を形成することを特徴とする電子部品の製造方法。   A nickel plating solution according to any one of claims 1 to 4 is used to plate a component body on which a conductive portion is formed, and a nickel film is formed on the surface of the conductive portion. Manufacturing method for electronic parts.
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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015079897A (en) * 2013-10-18 2015-04-23 株式会社村田製作所 Method of manufacturing inductor, and inductor

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