JP2007256188A - Three-dimensional shape measuring system and three-dimensional shape measuring method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring system which can measure the three-dimensional shape of an object to be measured, using a simple and small-sized constitution. <P>SOLUTION: The three-dimensional shape measuring system comprises wire devices 20A, 20B, and 20C, respectively which can detect rotation angles θx, θz showing directions where the amount L of drawings of wires 21A, 21B, and 21C to be pulled out, and the same wires 21A, 21B, and 21C are pulled out. Each of tips 21aA, 21aB, and 21aC of the respective wires 21A, 21B, and 21C is connected to the back surface of a three-dimensional shape measuring device 10. A three-dimensional image data processor 43 calculates a coordinate transformation function F<SB>PS</SB>, by using the amount L of drawings of the wires 21A, 21B, and 21C at measurement by the three-dimensional shape measuring device 10 and the rotation angles θx, and θz. The coordinate transformation of the three-dimensional shape data formed for each measuring position is carried out, by using a coordinate transformation function F<SB>CP</SB>stored beforehand and the coordinate transformation function F<SB>PS</SB>calculated. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention converts a three-dimensional shape data group in each coordinate system of a measurement object measured at a plurality of different positions by a three-dimensional shape measurement apparatus into a three-dimensional shape data group in one reference coordinate system, and The present invention relates to a three-dimensional shape measurement system and a three-dimensional shape measurement method capable of displaying a three-dimensional shape of an object in a shape viewed from an arbitrary direction.

Conventionally, a three-dimensional shape measuring apparatus in which a measurement position is moved with respect to an object to be measured measures a three-dimensional shape of the measurement target from a plurality of different positions and synthesizes three-dimensional shape data for each measurement position. A three-dimensional shape measurement system that can display a three-dimensional shape of a measurement object when viewed from an arbitrary direction is well known. For example, in the three-dimensional shape measurement system described in Patent Document 1 below, a three-dimensional shape that measures the three-dimensional shape of an object to be measured at the tip of a support mechanism configured by movably connecting a plurality of arms to each other. A measuring device is attached. Then, the operator moves the three-dimensional shape measuring apparatus to a plurality of positions within the movable range of the support mechanism, and measures the measurement object for each position.
JP 2004-257927 A

  In this case, the three-dimensional shape data representing the three-dimensional shape of the measurement object measured by the three-dimensional shape measuring device at each measurement position is obtained by using the reference coordinate system via the coordinate system related to the tip of the support mechanism. Coordinates are converted to data. The coordinate system related to the tip of the support mechanism is a coordinate system for specifying the position of the coordinate axis origin and the direction of the coordinate axis with respect to the reference coordinate system of the three-dimensional shape measuring apparatus attached to the tip of the support mechanism. The position of the origin and the direction of the coordinate axis with respect to the reference coordinate system of the coordinate system related to the tip of the support mechanism are determined by using the length of each arm constituting the support mechanism, the angle between the arms, the twist angle between the arms, and the like. Detected.

  However, in such a three-dimensional shape measurement system, since the support mechanism for supporting the three-dimensional shape measurement apparatus has a large and complicated configuration, there is a problem that the configuration of the three-dimensional shape measurement system is large and complicated. There is. In other words, the support mechanism for supporting the three-dimensional shape measuring apparatus needs to be manufactured with high accuracy in order to accurately specify the position and orientation of the three-dimensional shape measuring apparatus with respect to the reference coordinate system, and the three-dimensional shape measuring apparatus is stable. Since it is necessary to ensure the rigidity for supporting it, a structure becomes large and complicated. In addition, since the movable range of the three-dimensional shape measuring apparatus is set according to the size of the measurement object, a support mechanism having a wide movable range must be prepared when measuring a measurement object having a large shape. In this case, there is a problem that the configuration of the support mechanism becomes larger and more complicated as the movable range becomes wider, and the configuration of the three-dimensional shape measurement system becomes larger and more complicated.

  The present invention has been made to cope with the above-described problem, and an object of the present invention is to be able to measure the three-dimensional shape of an object to be measured with a simple and small configuration compared to a support mechanism such as the conventional example. A three-dimensional shape measurement system and a three-dimensional shape measurement method are provided.

  In order to achieve the above object, the present invention is characterized in that a three-dimensional shape measuring apparatus for measuring a three-dimensional shape of a measurement object and outputting three-dimensional shape data representing the three-dimensional shape of the measurement object; A connecting member that freely supports the drawing amount and the drawing direction by the support device at the portion, and connects the three-dimensional shape measuring device to the tip, and the drawing amount and the drawing direction of the connecting member with respect to the support device Information acquisition means for acquiring position information representing at least the position of the three-dimensional shape measuring apparatus with respect to a reference coordinate system, and three-dimensional shape data output from the three-dimensional shape measuring apparatus, using the acquired position information, Data conversion means for converting into three-dimensional shape data represented by a reference coordinate system, and synthesis means for combining a plurality of sets of three-dimensional shape data converted by the data conversion means It lies in the fact was. In this case, the support device may include a detector that detects the pull-out amount and pull-out direction of the connection member. The connecting member may be a wire.

  In this case, the origin of the predetermined reference coordinate system and the orientation of the coordinate axes are determined with reference to the support device, and the information acquisition means includes a three-dimensional shape relative to the predetermined reference coordinate system in addition to the position information. Orientation information indicating the orientation of the measuring device may be acquired. In this case, it is preferable to prepare at least three connection members. Further, the data conversion means converts the three-dimensional shape data output from the three-dimensional shape measuring device into the three-dimensional shape data represented by the predetermined reference coordinate system using the position information and the orientation information. First coordinate conversion function calculating means for calculating a first coordinate conversion function for the first three-dimensional shape, and three-dimensional shape data output from the three-dimensional shape measuring device, using the first coordinate conversion function, the predetermined reference coordinates Coordinate conversion means for converting coordinates into three-dimensional shape data represented by the system may be provided. In this case, the first coordinate conversion function calculating means converts the three-dimensional shape data represented by the coordinate system related to the three-dimensional shape measuring apparatus into the three-dimensional shape data represented by the coordinate system related to the tip of the connecting member. And a third coordinate conversion function for converting the three-dimensional shape data represented by the coordinate system related to the tip end portion of the connecting member into the three-dimensional shape data represented by the coordinate system related to the predetermined reference coordinate system. It is preferable to calculate the first coordinate transformation function as the first coordinate transformation function.

  Instead of this, the 3D shape measuring apparatus adds 3D shape data representing the 3D shape of the measurement object to the 3D shape of the reference object arranged in the measurement target space of the 3D shape measuring apparatus. The origin of the predetermined reference coordinate system is determined with reference to the support device, and the direction of the coordinate axis of the reference coordinate system is determined with reference to the reference object, The data conversion means uses the three-dimensional shape data output from the three-dimensional shape measuring apparatus, using the three-dimensional shape data representing the three-dimensional shape of the reference object in addition to the acquired position information, according to the predetermined reference coordinate system. You may make it convert into the represented three-dimensional shape data. In this case, it is preferable to prepare at least one connection member. Further, the data conversion means calculates the direction of the coordinate axis related to the reference object using the three-dimensional shape data representing the three-dimensional shape of the reference object, and obtains the three-dimensional shape data representing the three-dimensional shape of the measurement object, A fourth coordinate conversion function calculating means for calculating a fourth coordinate conversion function for converting into three-dimensional shape data represented by a three-dimensional coordinate system having the same coordinate axis as the calculated coordinate axis; A fifth coordinate conversion function for converting the three-dimensional shape data representing the three-dimensional shape into three-dimensional shape data represented by a three-dimensional coordinate system having the same origin as that of the predetermined reference coordinate system is calculated. The third coordinate transformation function calculating means and the three-dimensional shape measuring device output from the three-dimensional shape measuring device are converted into the predetermined reference coordinate system by using the calculated fourth and fifth coordinate transformation functions. May be configured by the coordinate conversion means for converting the three-dimensional shape data represented. In this case, the fourth coordinate conversion function converts the three-dimensional shape data represented by the coordinate system related to the three-dimensional shape measuring apparatus into the three-dimensional shape data represented by the coordinate system related to the tip of the connecting member, The fifth coordinate transformation function may perform coordinate transformation from the three-dimensional shape data represented by the coordinate system related to the tip end portion of the connecting member to the three-dimensional shape data represented by the coordinate system related to the predetermined reference coordinate system.

  According to the feature of the present invention configured as described above, the distal end portion of the connection member pulled out from the support device is connected to the three-dimensional shape measuring device. Then, the position in the reference coordinate system for measuring the measurement object by the three-dimensional shape measuring apparatus is specified by the drawing amount and the drawing direction of the connecting member. That is, a three-dimensional shape that can display the three-dimensional shape of the measurement object from any direction with a configuration in which the tip of the connection member that can specify the position of the three-dimensional shape measurement device in the reference coordinate system is connected to the three-dimensional shape measurement device. Data can be generated. For this reason, a three-dimensional shape measuring system can be configured easily and compactly without using a support mechanism having a large and complicated configuration as in the conventional example. In addition, since the length of the connection member may be set according to the size of the measurement object, the three-dimensional shape measurement system can be easily and compactly configured even when measuring a measurement object having a large shape. Can do.

  In the three-dimensional shape measurement system, the predetermined reference coordinate system is determined based on a predetermined position of the support device, and the support device moves the support device relative to the predetermined reference coordinate system. An apparatus moving means; and a supporting apparatus position detecting means for detecting the position of the supporting apparatus represented by the predetermined reference coordinate system, wherein the data converting means is a supporting apparatus position detecting means in addition to the acquired position information. The three-dimensional shape data output from the three-dimensional shape measuring device may be converted into the three-dimensional shape data represented by the predetermined reference coordinate system using the position of the support device detected by the above. According to this, since the position of the support device in the reference coordinate system is detected, when the measurement object is measured from a plurality of positions, the support device can be moved together with the three-dimensional shape measurement device. The movement range of the apparatus is expanded, and the measurement object can be measured from a wider range. Therefore, for example, the part on the back side of the measurement object facing the three-dimensional shape measuring device can also be measured by moving the support device together with the three-dimensional shape measuring device.

  Further, the present invention is not limited to the three-dimensional shape measurement system, and can be implemented by a three-dimensional shape measurement method.

(First embodiment)
Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a schematic diagram showing a basic configuration of a three-dimensional shape measurement system according to the present invention. This three-dimensional shape measurement system includes a three-dimensional shape measurement apparatus 10 that measures the three-dimensional shape of a workpiece WK that is a measurement object.

  The three-dimensional shape measuring apparatus 10 is formed in a box shape, emits a laser beam toward the workpiece WK and receives reflected light from the workpiece WK, and measures the three-dimensional solid surface shape of the workpiece WK. Output measurement information representing the measurement result. As the three-dimensional shape measuring apparatus 10, any three-dimensional shape measuring apparatus can be used as long as it measures the three-dimensional surface shape of the workpiece WK and outputs a signal representing the measured three-dimensional surface shape. In the present embodiment, a brief description will be given of measuring a three-dimensional surface shape of an object according to a triangulation method using laser light.

  In this three-dimensional shape measuring apparatus, a virtual plane that is substantially perpendicular to the traveling direction of laser light emitted from a laser light source toward an object is assumed, and an X-axis direction and a Y-axis that are orthogonal to each other on the virtual plane. Assume a large number of minute areas divided along the direction. Then, the three-dimensional shape measuring apparatus sequentially irradiates the plurality of minute areas with laser light, sequentially detects the distance to the object surface defined by the minute areas by reflected light from the object as a Z-axis direction distance, Information on X, Y, and Z coordinates representing each divided area position obtained by dividing the surface of the object into minute areas is obtained, and the shape of the object surface facing the three-dimensional shape measuring apparatus is measured.

  Accordingly, the three-dimensional shape measuring apparatus includes an X-axis direction scanner that changes the direction of the emitted laser light in the X-axis direction, a Y-axis direction scanner that changes the direction of the emitted laser light in the Y-axis direction, and an object surface. And a distance detector for detecting the distance to the object surface by receiving the reflected laser beam reflected by the. The X-axis direction scanner and the Y-axis direction scanner may be any mechanism that can independently change the optical path of the laser beam emitted from the laser light source in the X-axis direction and the Y-axis direction. It is rotated by an electric motor around the axial lines in the axial direction and the Y-axis direction, or a galvanometer mirror provided in the optical path of the emitted laser light and changing its direction is rotated by an electric motor around the axes in the X-axis direction and the Y-axis direction. The mechanism is available. As the distance detector, a plurality of imaging lenses such as an imaging lens that condenses the reflected laser light reflected on the object surface and rotates following the optical path of the emitted laser light, and a CCD that receives the condensed laser light are used. It is possible to use a mechanism for detecting the distance to the object surface based on the light receiving position of the reflected laser beam by the line sensor.

  Therefore, such a three-dimensional shape measuring apparatus uses the reference direction of the laser beam emitted by the X-axis direction scanner as information on the X, Y, and Z coordinates representing the divided area positions obtained by dividing the surface of the object into minute areas. The inclination θx in the X-axis direction with respect to the angle, the inclination θy in the Y-axis direction with respect to the reference direction of the laser beam emitted by the Y-axis direction scanner, and the distance Lz to the object surface by the distance detector are the virtual X-axis direction. And output for each of a large number of minute areas divided along the Y-axis direction. More specifically, the inclinations θx and θy in the X-axis and Y-axis directions are rotation angles from the reference position of the electric motor. Further, the distance Lz to the object surface is the light receiving position of the reflected laser beam in the line sensor.

  A cylindrical gripping part 11 is provided on the bottom surface of the three-dimensional shape measuring apparatus 10, and the three-dimensional shape measuring apparatus 10 can be moved to an arbitrary position by gripping the gripping part 11 by an operator. Further, the three-dimensional shape measuring apparatus 10 is pulled out from the three wire devices 20A, 20B, and 20C on the back surface, specifically, the side surface opposite to the side surface from which the laser beam is emitted in the three-dimensional shape measuring apparatus 10, respectively. The tip portions 21aA, 21aB, and 21aC of the wires 21A, 21B, and 21C are connected to each other. Specifically, as shown in FIG. 2, three holes 12 </ b> A (12 </ b> B, 12 </ b> C) each having an inner peripheral surface formed in a spherical shape are provided on the back surface of the three-dimensional shape measuring apparatus 10. FIG. 2 shows the hole 12A, but the other holes 12B and 12C are the same as the hole 12A. In these hole portions 12A (12B, 12C), a sphere 13A (13B, 13C) having a diameter smaller than the inner diameter of the hole portions 12A (12B, 12C) is exposed in a state where a part of the surface is exposed and is slid. Embedded in a movable state.

  A female screw 13aA (13aB, 13aC) is provided on the surface of the sphere 13A (13B, 13C) exposed from the back surface of the three-dimensional shape measuring apparatus 10 toward the center of the sphere 13A (13B, 13C). The male screw 21bA (21bB, 21bC) provided at each tip 21aA (21aB, 21aC) of the wire 21A (21B, 21C) is screwed to the female screw 13aA (13aB, 13aC). Therefore, the sphere 13A (13B, 13C) rotates and slides in the hole 12A (12B, 12C) according to the direction of the wire 21A (21B, 21C) with respect to the back surface of the three-dimensional shape measuring apparatus 10. It should be noted that the holes 12A, 12B, and 12C provided on the back surface of the three-dimensional shape measuring apparatus 10 are not positioned on the same straight line, that is, the holes 12A, 12B, and 12C each form a vertex of a triangle. Are arranged to be.

The wire devices 20A, 20B, and 20C are configured such that a predetermined length of wires 21A, 21B, and 21C accommodated in outer cylinders 22A, 22B, and 22C formed in a cylindrical shape, and the wires 21A, 21B, and 21C, respectively. Rotation angles θ _X and θ _Y representing the direction in which they are drawn out are detected, and signals representing the extraction amount L and the respective rotation angles θ _X and θ _Z are output. Since these wire devices 20A, 20B, and 20C have the same configuration, the wire device 20A shown in FIG. 3 will be described. The outer cylinder 22A (22B, 22C) includes a large-diameter portion 22aA (22aB, 22aC) that accommodates the wire 21A (21B, 21C) wound in a roll shape by a spring, and the large-diameter portion 22aA (22aB, 22aC). The small-diameter portion 22bA (22bB, 22bC) is formed to have a small diameter.

Among these, the hole 22cA (22cB, 22cC) for drawing out the wire 21A (21B, 21C) accommodated therein is provided in the central portion of the outer peripheral portion of the large diameter portion 22aA (22aB, 22aC). ing. In addition, a linear encoder 23A (23B, 23C) that detects the pull-out amount L of the wire 21A (21B, 21C) and outputs a signal representing the pull-out amount L is incorporated in the large-diameter portion 22aA (22aB, 22aC). It is. On the other hand, the small diameter portion 22bA (22bB, 22bC) Within outer cylinder 22A (22B, 22C) encoder 24A (24B that detects the rotation angle theta _X axial outputs a signal indicative of the same rotation angle theta _X of 24C) is incorporated. The outer cylinder 22A (22B, 22C) is supported by a support shaft 25A (25B, 25C) arranged in the horizontal direction so as to be rotatable around the support shaft 25A (25B, 25C). That is, the encoder 24A (24B, 24C) incorporated in the small diameter portion 22bA (22bB, 22bC) is a wire 21A (21B, 21C) drawn from the hole 22cA (22cB, 22cC) of the large diameter portion 22aA (22aB, 22aC). ) Is extracted, the rotation angle around the support shaft 25A (25B, 25C) is detected.

Both ends of the support shaft 25A (25B, 25C) are supported by both ends of a support arm 26A (26B, 26C) formed in a substantially U shape. The central portion of the support arm 26A (26B, 26C) is fixed to the upper surface of the rotary shaft 27A (27B, 27C) arranged in the vertical direction. The rotating shaft 27A (27B, 27C) is supported by the base 28A (28B, 28C) in a state of being rotatable around its axis. That is, the outer cylinder 22A (22B, 22C) that accommodates the wire 21A (21B, 21C) is configured to rotate also about the axis of the rotation shaft 27A (27B, 27C). Base 28A (28B, 28C) In the rotation shaft 27A (27B, 27C) encoder 29A that detects the rotation angle theta _Z around the axis and outputs a signal representing the same rotation angle theta _Z of (29B, 29C) Is incorporated. In other words, the encoder 29A (29B, 29C) has a rotating shaft 27A ( 27B, 27C) around the rotation angle is detected.

With these drawing amounts L and rotation angles θ _X and θ _Z , the positions of the tips of the tips 21aA (21aB and 21aC) of the wires 21A (21B and 21C) drawn from the wire devices 20A (20B and 20C), that is, the same The position of the three-dimensional shape measuring apparatus 10 connected to the tip can be specified. In this case, the position of the tip of the tip 21aA (21aB, 21aC) of the wire 21A (21B, 21C) is from the point of the tip of the tip 21aA (21aB, 21aC) on the axis of the wire 21A (21B, 21C). This is a point moved in the axial direction of the wire 21A (21B, 21C) by the radius of the sphere 13A (13B, 13C). A radius length of a sphere 13A (13B, 13C) is stored in a memory device of a three-dimensional image data processing device 43, which will be described later, and an amount obtained by adding this radius length to the detected withdrawal amount L is referred to as a withdrawal amount L. To do. And the position of this tip is the axis of the support shaft 25A (25B, 25C) when the rotation angle around the rotation shaft 27A (27B, 27C) is 0 °, and the rotation shaft 27A (27B, 27C) Is a three-dimensional coordinate system (hereinafter referred to as “wire device coordinate system W _A (W”), in which the Z axis is the Z axis, the Y axis is the axis that passes through the intersection of the X axis and the Z axis and is orthogonal to the X axis and the Z axis _B , W _C ) ”)).

  The wire devices 20A, 20B, and 20C are fixed to the upper portions of the columnar wire device support legs 30, respectively. The wire device support leg 30 includes mounting bases 32A and 32B for mounting and fixing the wire devices 20A, 20B, and 20C on an upper portion of a support column 31 provided in a vertical direction, and legs extending in three directions below the support column 31. The leg part 34 which has 33A, 33B, 33C is provided. Therefore, the wire devices 20A, 20B, and 20C can be moved to arbitrary positions by moving the wire device support device 30.

  A controller 41 is connected to the three-dimensional shape measuring apparatus 10 and the wire apparatuses 20A, 20B, and 20C. The controller 41 controls the operation of the three-dimensional shape measuring apparatus 10 according to an instruction from the input device 42 formed of a keyboard. Further, the controller 41 controls the operation of the three-dimensional image data processing device 43 in accordance with an instruction from the input device 42 and supplies data input by the input device 42 to the three-dimensional image data processing device 43.

The three-dimensional image data processing device 43 is constituted by a computer device, calculates the coordinate conversion function by executing each program shown in FIGS. 5, 6 and 8, and executes the program shown in FIG. Information about the three-dimensional shape (three-dimensional shape data group) from the three-dimensional shape measuring device 10, the amount L of the wires 21A, 21B, and 21C drawn from the wire devices 20A, 20B, and 20C, and the wires 21A, 21B, and 21C are drawn. Rotational angles θ _X and θ _Z representing directions are input, and three-dimensional shape data that can be displayed by viewing a three-dimensional image of an object located in the measurement target space from an arbitrary direction is generated. A display device 44 is connected to the three-dimensional image data processing device 43. The display device 44 is composed of a liquid crystal display, a CRT, or the like, and displays a 3D image of an object located in the measurement target space based on the 3D shape data output from the 3D image data processing device 43.

Next, the operation of the three-dimensional shape measurement system configured as described above will be described. Operator, wire apparatus 20A, 20B, each wire device coordinate system _W A of a coordinate system about _20C, W B, the coordinate values represented by _{W C} (wire 21A, 21B, 21C each tip 21aA of, 21aB, the position of the tip of 21ac) and to calculate the coordinate transformation function _{F WS} for converting the coordinate values represented by a single reference coordinate system S. In the present embodiment, the wire device coordinate system W _A is a coordinate system about the wire device 20A as a reference coordinate system S.

  First, as shown in FIG. 4, the worker attaches a stylus 50 formed with a sharpened tip to the tip 21aA of the wire 21A drawn from the wire device 20A. In this case, the length of the stylus 50 attached to the distal end portion 21aA is stored in advance in the memory device of the three-dimensional image data processing device 43, and the length of the stylus 50 is added to the detected withdrawal amount L. By setting the amount as the withdrawal amount L, the coordinates of the tip position of the stylus 50 can be specified. The tip of the stylus 50 may be formed in a spherical shape, and the length to the center position of the sphere may be stored. Next, the operator arranges the reference objects 70A, 70B, and 70C on the table 60 that is arranged in a range where the tips of the wires 21A, 21B, and 21C drawn from the wire devices 20A, 20B, and 20C reach, respectively. The reference objects 70A, 70B, and 70C are composed of three true spheres having different diameters, and have a function of determining a fixed point in the measurement target space. The reference objects 70A, 70B, and 70C may be disposed as long as the tips of the wires 21A, 21B, and 21C drawn from the wire devices 20A, 20B, and 20C reach, respectively. It is not necessary to arrange the reference objects 70A, 70B, and 70C on the table 60.

Next, the operator operates the input device 42 to instruct the three-dimensional image data processing device 43 to calculate the coordinate conversion function _FWS . In response to this instruction, the three-dimensional image data processing device 43 starts execution of the coordinate conversion function _FWS calculation program shown in FIG. 5 in step S100, and inputs the characteristics of the reference object in step S102. wait. Here, the characteristic of the reference object is data representing that each of the reference objects 70A, 70B, and 70C is a sphere. Therefore, the operator operates the input device 42 to input data representing that the reference objects 70A, 70B, 70C are spheres to the three-dimensional image data processing device 43. Note that if the previously inputted characteristics of the reference object are not changed, the processing in step S102 may be skipped.

Next, in step S104, the three-dimensional image data processing device 43 waits for input of the identification number of the wire device to be measured. The operator operates the input device 42 to input an identification number representing the wire device 20 </ b> A to the three-dimensional image data processing device 43. Next, in step S106, the three-dimensional image data processing device 43 waits for input of measurement information of the reference object. The operator holds and moves the stylus 50 attached to the distal end portion 21aA of the wire 21A by hand to four different positions on the surfaces of the reference objects 70A, 70B, and 70C. Information representing contact of the stylus 50 with the reference objects 70A, 70B, and 70C is input by operating the input device 42 for each contact. In this case, the wire 21 </ b> A is pulled out from the outer cylinder 22 </ b> A according to the movement of the stylus 50. Further, the outer cylinder 22A rotates around the support shaft 25A and the rotation shaft 27A according to the movement of the stylus 50. The three-dimensional image data processing device 43 calculates the drawing amount L and the rotation angles θ _X and θ _Z from the wire device 20A for each piece of information representing the contact of the stylus 50 with the reference objects 70A, 70B, and 70C input from the operator. The coordinate values of the contact points of the stylus 50 with respect to the reference objects 70A, 70B, and 70C are calculated. Thereby, each coordinate value (x, y, z) of four contact points is calculated for each reference object 70A, 70B, 70C.

Next, in step S108, the three-dimensional image data processing device 43 calculates a fixed point for each of the reference objects 70A, 70B, and 70C. Specifically, it is established by substituting the coordinate values (x, y, z) of each of the four contact points for each of the reference objects 70A, 70B, 70C calculated in step S106 into the left side of Equation 1 below. The unknowns a, b, and c are calculated as fixed points by solving the simultaneous equations. In this case, a, b, and c represent the center coordinates of the reference objects 70A, 70B, and 70C represented by the coordinate values (x, y, z). In the following formula 1, d represents the radius of each reference object 70A, 70B, 70C, but it is not necessary to calculate in the process of step S108. Thereby, the spherical center coordinates are calculated as fixed points for each of the reference objects 70A, 70B, and 70C.

  Next, in step S110, the three-dimensional image data processing device 43 determines whether or not the reference objects 70A, 70B, and 70C have been measured by the wire devices 20A, 20B, and 20C. That is, in this determination process, the determination is “No” until the reference objects 70A, 70B, and 70C are measured by all the wire devices 20A, 20B, and 20C, and the process returns to step S104. In step S104, as described above, the input of the identification number of the wire device to be measured is awaited. In this case, the operator replaces the stylus 50 attached to the distal end portion 21aA of the wire 21A with the distal end portion 21aB (or distal end portion 21aC) of the wire 21B (or wire 21C), and changes from the input device 42 to the wire device 20B. (Or the identification number of the wire device 20C) is input, and the measurement of the reference objects 70A, 70B, and 70C is repeatedly executed. On the other hand, when the reference objects 70A, 70B, and 70C are measured by all the wire devices 20A, 20B, and 20C, “Yes” is determined in this determination process, and the process proceeds to step S112. Thereby, the fixed points of the respective reference objects 70A, 70B, 70C are calculated for the respective wire devices 20A, 20B, 20C.

Next, in step S112, the three-dimensional image data processing device 43 calculates a coordinate conversion function _FWS . In this case, the coordinate in the transform function F _WS, wire device 20B coordinate system in which the wire device coordinate system W reference coordinate system coordinate values represented by _B S (wire device coordinate system W _A) coordinate value expressed by about a coordinate transformation function F _WS1 to convert to, the coordinate values represented by a coordinate system about the wire device 20C wire device coordinate system W reference coordinate system coordinate values represented by _C S (wire device coordinate system W _a) There is a coordinate conversion function _FWS2 for conversion. Since the wire device coordinate system W _A is a coordinate system about the wire device 20A is the reference coordinate system S, the coordinate value expressed by the wire device coordinate system W _A the coordinate values represented by the reference coordinate system S conversion It is not necessary to calculate the coordinate conversion function F _WS to be performed.

Prior according to the step S112 to the calculation process of coordinate conversion coefficients F _WS, will be briefly described coordinate transformation. A first coordinate system composed of X, Y, and Z coordinates and the first coordinate system are rotated by θx, θy, and θz about the X, Y, and Z axes, respectively, and the origin of the first coordinate system is set to X Assume a second coordinate system moved by a, b, and c in the axial direction, Y-axis direction, and Z-axis direction, respectively. Assuming that the coordinate value (x, y, z) of one point in the first coordinate system and the coordinate value of the same point in the second coordinate system are (x ′, y ′, z ′), The following formula 2 is established. In this case, M in the following formula 2 is a matrix value represented by the following formula 3.

The calculation of the coordinate transformation function F _{WS in} step S112 is performed by calculating the matrix values M (g ₁₁ , g ₁₂ , g ₁₃ , g ₂₁ , g ₂₂ , g ₂₃ , g ₃₁ , g ₃₂ , g in the above equations 2 and 3. ₃₃ ) and matrix values a, b, c. In this case, the wire device coordinate system W _B (or wire device coordinate system W _C ) of the present embodiment corresponds to the first coordinate system, and the reference coordinate system S (wire device coordinate system W _A ) corresponds to the second coordinate system. Correspond. Therefore, the fixed points (x1, y1, z1), (x2, y2, z2), (x3, y3,) in the wire device coordinate system W _B (or the wire device coordinate system W _C ) of the reference objects 70A, 70B, and 70C. and z3), each fixed point in the reference coordinate system S (wire device coordinate system _{W a) (x'1, y'1,} z'1), (x'2, y'2, z'2), (x ' When 3, y′3, z′3) are applied to the above equation 2, the following equations 4 to 6 are established.

When Equation 4 is modified, the following simultaneous equations of Equation 7 are established.

Here, the normal vector of the plane including the fixed point coordinates (x1, y1, z1), (x2, y2, z2), (x3, y3, z3) is (α, β, γ), and the fixed point coordinates (x ′ 1, y′1, z′1), (x′2, y′2, z′2), (x′3, y′3, z′3) and the normal vector of the plane including (α ′, If β ′, γ ′), the following equation 8 is established if the two normal vectors have the same magnitude. The matrix M in Equation 8 is expressed by Equation 3 above.

The normal vector of the plane including the fixed point coordinates (x1, y1, z1), (x2, y2, z2), (x3, y3, z3) is directed from (x2, y2, z2) to (x1, y1, z1) Assuming that the vector is established by the outer product of the vector and the vector from (x3, y3, z3) to (x2, y2, z2), the normal vector (α, β, γ) is expressed by the following equation (9). .

Similarly, the vector (α ′, β ′, γ ′) is expressed by Equation 10 below.

Substituting Equation 9 and Equation 10 into Equation 8 yields Equation 11 below.

If the first equation of the equation 11 is added to the equation 7, the simultaneous equations of the following equation 12 are obtained.

By solving the simultaneous equations of Equation 12, matrix values g ₁₁ , g ₁₂ , and g ₁₃ can be calculated. Also, with respect to the equations 5 and 6, the matrix value g ₂₁ is modified by modifying the simultaneous equations of the equation 7 and solving the simultaneous equations obtained by adding the second and third equations of the equation 11, respectively. , G ₂₂ , g ₂₃ and matrix values g ₃₁ , g ₃₂ , g ₃₃ can be calculated. Then, the matrix values a, b, and c can be calculated by substituting these calculated matrix values into the equations 4-6. Thus, wire unit 20B (or wire device 20C) relating to a coordinate system wire device coordinate system W _{B (or} wire device coordinate system W _C) reference coordinate system coordinate values represented by S (wire device coordinate system W _A The coordinate conversion function F _WS1 (or the coordinate conversion function F _WS2 ) for conversion into the coordinate value represented by () is calculated. The calculated coordinate transformation function F _WS is stored in the memory device of the three-dimensional image data processing device 43. In step S114, the three-dimensional image data processing device 43 ends the execution of the coordinate conversion function _FWS calculation program.

Next, the operator transfers the three-dimensional shape data represented by the coordinate system (hereinafter referred to as “camera coordinate system C”) related to the three-dimensional shape measuring apparatus 10 from the wire device 20A in which the reference coordinate system S is set. A coordinate conversion function F _CP for conversion into three-dimensional shape data represented by a coordinate system (hereinafter referred to as “wire tip coordinate system P”) related to the tip portion 21aA of the wire 21A to be drawn is calculated. Here, the camera coordinate system C is a three-dimensional coordinate system that includes three coordinate axes (X axis, Y axis, and Z axis) that are orthogonal to each other and that has a specific point of the three-dimensional shape measuring apparatus 10 as an origin. The wire tip coordinate system P includes three coordinate axes (X axis, Y axis, Z axis) corresponding to the camera coordinate system C, and the axis of the wire 21A drawn from the wire device 20A in which the reference coordinate system S is set. This is a three-dimensional coordinate system in which the origin is a point moved by the radial length of the sphere 13A in the axial direction of the wire 21A from the point at the tip of the tip 21aA on the line. Worker upon calculation of the coordinate transformation function F _CP attaches the stylus 50 to the distal end portion 21aA of the wire 21A to be pulled out from the wire unit 20A of the reference coordinate system S is set again.

The operator operates the input device 42 to instruct the three-dimensional image data processing device 43 to calculate the coordinate conversion function _FCP . In response to this instruction, the three-dimensional image data processing device 43 starts the execution of the coordinate conversion function _FCP calculation program shown in FIG. 6 in step S200, and inputs the characteristics of the reference object in step S202. wait. In this case, the characteristics of the reference object are data indicating that each of the reference objects 70A, 70B, and 70C is a sphere and data indicating the diameter of each sphere. Therefore, the operator operates the input device 42 to input data indicating that the reference objects 70A, 70B, and 70C are spheres and data indicating the diameter of the spheres to the three-dimensional image data processing device 43. Note that if the previously inputted characteristics of the reference object are not changed, the process of step S202 may be skipped.

Next, the three-dimensional image data processing device 43 waits for input of measurement information of the reference object by the stylus 50 in step S204. In this case, the operator holds the tip of the stylus 50 with the hand by moving the stylus 50 attached to the tip portion 21aA of the wire 21A with the hand in the same manner as in step S106, so that the reference objects 70A, 70B, Information representing the contact of the stylus 50 with respect to the reference objects 70A, 70B, and 70C is input by contacting the four different positions on each surface of the 70C and operating the input device 42 for each contact. The three-dimensional image data processing device 43 calculates the drawing amount L and the rotation angles θ _X and θ _Z from the wire device 20A for each piece of information representing the contact of the stylus 50 with the reference objects 70A, 70B, and 70C input from the operator. The coordinate values of the contact points of the stylus 50 with respect to the reference objects 70A, 70B, and 70C are calculated. Thereby, each coordinate value (x, y, z) of four contact points is calculated for each reference object 70A, 70B, 70C.

  Next, in step S206, the three-dimensional image data processing device 43 calculates fixed points for each of the reference objects 70A, 70B, and 70C in the same manner as in step S108. Specifically, it is established by substituting the coordinate values (x, y, z) of each of the four contact points for each of the reference objects 70A, 70B, 70C calculated in step S204 into the left side of the equation 1. The unknowns a, b, and c are calculated as fixed points by solving the simultaneous equations. In this case, a, b, and c represent the center coordinates of the reference objects 70A, 70B, and 70C represented by the coordinate values (x, y, z). In the above equation 1, d represents the radius of each of the reference objects 70A, 70B, 70C, but it is not necessary to calculate in the process of step S206. Thereby, the center coordinates of each sphere are calculated as fixed points for each of the reference objects 70A, 70B, and 70C. Each fixed point for each of the reference objects 70A, 70B, and 70C calculated in step S206 is the same as each fixed point for each of the reference objects 70A, 70B, and 70C calculated in step S108. , 70B, 70C and the positions of the wire devices 20A, 20B, 20C are not changed, and the coordinate values of the fixed points for the reference objects 70A, 70B, 70C calculated in step 106 are stored. The processing of S204 and step S206 is not necessary.

  Next, the three-dimensional image data processing device 43 waits for input of measurement information of the reference object by the three-dimensional shape measuring device 10 in step S208. In this case, as shown in FIG. 7, the operator removes the stylus 50 attached to the tip 21aA of the wire 21A and connects it to the sphere 13A provided on the back surface of the three-dimensional shape measuring apparatus 10. The tip portions 21aB and 21aC of the other wires 21B and 21C are connected to the spheres 13B and 13C provided on the back surface of the three-dimensional shape measuring apparatus 10, respectively. Then, after fixing the three-dimensional shape measuring apparatus 10 to which the wires 21A, 21B, and 21C are connected to the three-dimensional shape measuring apparatus support leg 80, the input device 42 is operated to measure the reference objects 70A, 70B, and 70C. Do. The three-dimensional shape measuring device support leg 80 supports the three-dimensional shape measuring device 10 at a predetermined position in the same manner as the wire device support leg 30. In the figure, the controller 41, the input device 42, the three-dimensional image data processing device 43, and the display device 44 are not shown.

  The three-dimensional shape measuring apparatus 10 starts measurement of the reference objects 70A, 70B, and 70C in response to an instruction from the controller 41, and obtains information representing the three-dimensional shapes of the reference objects 70A, 70B, and 70C as three-dimensional image data. The data is output to the processing device 43. That is, information (specifically, inclinations θx, θy and distance Lz) regarding the XYZ coordinates representing the divided area positions obtained by dividing the surfaces of the reference objects 70A, 70B, and 70C into minute areas are obtained as a three-dimensional image. The data is output to the data processor 43. The three-dimensional image data processing device 43 then uses the three-dimensional shapes of the reference objects 70A, 70B, and 70C based on the information about the XYZ coordinates output from the three-dimensional shape measurement device 10 in step S208. 3D shape data consisting of a three-dimensional shape data group representing is generated. In this case, the three-dimensional shape data is represented by a coordinate system related to the three-dimensional shape measuring apparatus 10, that is, a camera coordinate system C. In this three-dimensional shape data, in addition to the reference objects 70A, 70B, 70C, a three-dimensional representing the surface shape of other objects (for example, the table 60) existing around the reference objects 70A, 70B, 70C. Shape data is also included.

  Next, in step S210, the three-dimensional image data processing device 43 selects three-dimensional shape data representing the three-dimensional shapes of the reference objects 70A, 70B, and 70C from the three-dimensional shape data generated in step S208. Are extracted respectively. The extraction process of the three-dimensional shape data representing the three-dimensional shapes of the reference objects 70A, 70B, and 70C is executed by a reference object extraction subprogram (not shown). The processing contents of the reference object extraction subprogram will be briefly described.

  The three-dimensional image data processing device 43 sets a unit block and a search block using data representing the diameter of the sphere among the features of the reference object input in step S202. The unit block is a minimum block that moves the search block in order to specify the positions where the reference objects 70A, 70B, and 70C exist, and the search block specifies the position that includes the reference objects 70A, 70B, and 70C. It is a collection of unit blocks used for The three-dimensional image data processing device 43 three-dimensionally divides the measurement target space of the three-dimensional shape measurement device 10 by the size of the unit block, and sequentially moves the search block in the measurement target space to enter the search block. The number of unit blocks including three-dimensional shape data among the included unit blocks is counted. In accordance with the counted number of unit blocks, it is determined whether or not the three-dimensional shape data included in the search block is three-dimensional shape data including the entire reference objects 70A, 70B, and 70C. When it is determined that the 3D shape data includes the entire 70B and 70C, the 3D shape data in the search block is extracted. This technique is already well known and is described in, for example, Japanese Patent Application Laid-Open No. 2004-333371.

  In addition to the reference object extraction method described above, three-dimensional shape data representing the three-dimensional shapes of the reference objects 70A, 70B, and 70C is extracted using the amount of reflected light from the reference objects 70A, 70B, and 70C. You can also. In this case, the amount of reflected light from the reference objects 70A, 70B, and 70C is detected in advance, and the amount of reflected light is set in the three-dimensional image data processing device 43. The three-dimensional shape measuring apparatus 10 also detects the amount of reflected light from the reference objects 70A, 70B, and 70C in addition to the information about the XYZ coordinates (specifically, the inclinations θx and θy and the distance Lz). Then, three-dimensional shape data that matches the set light amount is extracted.

  Next, in step S212, the three-dimensional image data processing device 43 uses the three-dimensional shape data representing the reference objects 70A, 70B, and 70C extracted in step S210, for each of the reference objects 70A, 70B, and 70C. Calculate each fixed point coordinate. Specifically, the extracted three-dimensional shape data is assigned to the left side of Equation 1 for each of the reference objects 70A, 70B, and 70C, and the unknowns a, b, and c are calculated as fixed points using the least square method. In this case, a, b, and c represent the center coordinates of the sphere represented by the three-dimensional shape data, that is, the reference objects 70A, 70B, and 70C. In the above equation 1, d represents the radius of each of the reference objects 70A, 70B, and 70C, but it is not necessary to calculate in the process of step S212.

Next, in step S214, the three-dimensional image data processing device 43 calculates a coordinate conversion function _FSP for converting the coordinate value represented by the reference coordinate system S into the coordinate value represented by the wire tip coordinate system P. . The calculation of the coordinate transformation function F _SP is performed by executing the coordinate transformation function F _SP calculation subprogram shown in FIG.

3-dimensional image data processor 43, at step S300, the start of execution of the coordinate transformation function _{F SP} calculation subprogram, at step S302, the wires 21A, 21B, each tip 21aA of 21C, 21aB, the 21aC Detect tip coordinates. Specifically, the three-dimensional image data processing apparatus 43 determines the amount L of each wire 21A, 21B, 21C drawn at the position of the three-dimensional shape measurement apparatus 10 that has measured the reference objects 70A, 70B, 70C in step S208, and rotation angle theta _X, enter the theta _Z, each wire unit 20A, 20B, each 20C, i.e. wire device coordinate system _{W a, W B,} the distal end portion 21aA each _{W C,} 21aB, the position of the tip of 21ac ( (Coordinate value) is calculated as the tip coordinate.

Then, the three-dimensional image data processor 43, at step S304, the front end portion 21aA calculated in the step S302, 21aB, the coordinates of the tip of 21ac, were calculated by executing the coordinate transformation function _{F WS} calculation program The coordinates are converted into coordinate values represented by the reference coordinate system S using the coordinate conversion function F _WS (coordinate conversion function F _WS1 and coordinate conversion function F _WS2 ). In this case, the tip coordinates of the distal end portion 21aA represented by wire system coordinate system W _A, since the wire device coordinate system W _A is the reference coordinate system S, there is no need to coordinate transformation. Incidentally, the three top end coordinates calculated at step S304, the front end portion 21aA, 21aB, so as to correspond to 21ac _{P A,} P B, and _{P C.}

Next, the three-dimensional image data processor 43, at step S306, calculates a coordinate transformation function _{F SP.} Calculation of the rotational component of the coordinate axes in the coordinate transformation function _{F SP} is three top end coordinates _P A in the reference coordinate system S calculated at the step _S304, P B, 3 a vector A with _{P C,} B, C Are calculated using the components of each vector in the reference coordinate system S and the wire tip coordinate system P of the three vectors A, B, and C. Specifically, the component of one vector in the reference coordinate system S is (α, β, γ), and the component of the one vector in the wire tip coordinate system P is (α ′, β ′, γ ′). Then, the equation 8 is established. The matrix value M in Equation 8 represents the relative rotation component of the coordinate axis of the wire tip coordinate system P with respect to the coordinate axis of the reference coordinate system S, and is expressed by Equation 3 above. In this case, the vector (α, β, γ) and the vector (α ′, β ′, γ ′) have the same size.

Coordinate transformation function _F calculated rotational component of the coordinate axes in _{the SP,} the matrix value _M in the formula _{8 (M = g 11, g} 12, g 13, g 21, g 22, g 23, g 31 in step S306, g ₃₂ , g ₃₃ ) is calculated. That is, assuming three vectors A, B, and C that are not in the same direction, the components A _S , B _S , and C _S in the reference coordinate system S of the three vectors A, B, and C are expressed as (α1, β1, γ1), (α2, β2, γ2), (α3, β3, and [gamma] 3), a of the three vectors, B, the components _a P in wire tip coordinate system P of _C, B P, the _{C P} (alpha If '1, β'1, γ'1), (α'2, β'2, γ'2), (α'3, β'3, γ'3), the relationship of the following equations 13-15: Is established.

The matrix value M can be calculated by solving the simultaneous equations of Equations 13-15. In the present embodiment, the unit vector of the vector from the tip coordinate P _A to the tip coordinate P _B (or tip coordinate P _C ) is the vector A of the three vectors A, B, C, and the tip coordinate P _{A is used.} A unit vector calculated by the outer product of the vector directed to the tip coordinate P _C (or the tip coordinate P _B ) and the vector A is a vector B, and a unit vector calculated by the outer product of the vector A and the vector B is a vector. C. In this case, the direction of the coordinate axis of the wire tip coordinate system P is defined as being the same as the direction of these vectors A, B, and C. Therefore, each component in the wire tip coordinate system P of the same vector A, B, C is (1, 0, 0), (0, 1, 0), (0, 0, 1). Then, each component the vector A in the reference coordinate system S, B, in C, the three top end coordinates _{P A,} P B, is calculated using the _{P C.} Therefore, the matrix value M can be calculated by substituting the components of the vectors A, B, and C in the reference coordinate system S and the wire tip coordinate system P into the equations 13 to 15 and solving the simultaneous equations. . Further, the amount of deviation of the origin of the wire tip coordinates P to the origin of the reference coordinate system S is the coordinate value of the coordinates of the tip _{P A (a, b, c} ). Coordinate values of these matrices values M and tip coordinates _{P A (a, b, c} ) is a coordinate transformation function _{F SP.} The relationship between the coordinate values (X _S , Y _S , Z _S ) represented by the reference coordinate system S and the coordinate values (X _P , Y _P , Z _P ) represented by the wire tip coordinate system P is expressed as a coordinate conversion function F. _When expressed using _SP , the following equation 16 is obtained.

Then, the three-dimensional image data processing device 43, after storing the coordinate transformation function F _SP mentioned above calculation, at step S308, the flow returns to step S216 and ends the execution of the coordinate transformation function F _SP calculation subprograms. Next, in step S216, the three-dimensional image data processing device 43 converts the fixed point coordinates for each of the reference objects 70A, 70B, and 70C calculated in step S206 into the coordinate conversion function F calculated in step S214. _{Using SP} , the coordinates are converted into fixed point coordinates represented by the wire tip coordinate system P. Thereby, for the three reference objects 70A, 70B, and 70C, three fixed point coordinates represented by the wire tip coordinate system P and three fixed point coordinates represented by the camera coordinate system C are calculated. Become.

Next, the three-dimensional image data processor 43, at step S218, calculates a coordinate transformation function _{F CP.} The calculation of the coordinate transformation function F _CP uses the three fixed point coordinates in the camera coordinate system C calculated in step S212 and the three fixed point coordinates in the wire tip coordinate system P calculated in step S216. Then, the calculation is performed by the same process as the coordinate conversion function _FWS . That is, the first coordinate system is a camera coordinate system C, the second coordinate system is a reference coordinate system S, and three fixed points (x1, y1, z1), (x2, y2,) represented by the camera coordinate system C are used. z2), (x3, y3, z3) and three fixed points (x'1, y'1, z'1), (x'2, y'2, z'2) represented by the wire tip coordinate system P ) And (x′3, y′3, z′3) are respectively substituted into the equation 2, the coordinate transformation function F _CP can be calculated in the same manner as described above. Then, the three-dimensional image data processing device 43 stores the calculated coordinate transformation function F _CP and then ends the execution of the coordinate transformation function F _CP calculation program in step S220.

After the execution of the coordinate conversion function F _CP calculation program, the operator removes the reference objects 70A, 70B, and 70C from the table 60, and places the work WK that is the measurement object on the table 60. Then, the input device 42 is operated to instruct the display of the three-dimensional shape of the work WK. In response to this, the three-dimensional image data processing device 43 starts execution of the three-dimensional shape display program shown in FIG. 9 in step S400, and in step S402, the measurement information representing the three-dimensional shape of the workpiece WK is displayed. Wait for input.

  The operator removes the three-dimensional shape measuring apparatus 10 from the three-dimensional shape measuring apparatus support leg 80, holds the three-dimensional shape measuring apparatus 10 by hand, and wires 21A, 21B pulled out from the wire devices 20A, 20B, 20C. , 21C, and the three-dimensional shape of the workpiece WK are measured by moving the three-dimensional shape measuring apparatus 10 with respect to the workpiece WK while changing the rotation angles θx, θy of the outer cylinders 22A, 22B, 22C. Do.

  The measurement information of the workpiece WK measured by the three-dimensional shape measuring apparatus 10 is output to the three-dimensional image data processing apparatus 43. That is, information (specifically, inclinations θx, θy and distance Lz) relating to the XYZ coordinates representing the divided area positions obtained by dividing the surface of the workpiece WK into minute areas is given to the three-dimensional image data processing device 43. Output. Then, the three-dimensional image data processing device 43 determines one piece of three-dimensional shape data (that is, based on the information about one XYZ coordinate output from the three-dimensional shape measurement device 10 in step S402). One coordinate value) is calculated. In this case, the three-dimensional shape data is represented by a coordinate system related to the three-dimensional shape measuring apparatus 10, that is, a camera coordinate system C. The three-dimensional shape data is any one of the three-dimensional shape data representing the surface shape of the workpiece WK and other objects (for example, the table 60) existing around the workpiece WK.

Next, in step S404, the three-dimensional image data processing device 43 calculates a coordinate conversion function F _PS for converting the coordinate value represented by the wire tip coordinate system P into the coordinate value represented by the reference coordinate system S. . The calculation of the coordinate transformation function F _PS is computed as an inverse function of the coordinate transformation function F _SP. That is, the three-dimensional image data processor 43, after calculating the coordinate transformation function F _SP by performing a coordinate transformation function F _SP calculation subprogram shown in FIG. 8, inverse coordinate transformation function F _SP that the calculated _Is calculated as a coordinate transformation function _FPS .

Next, the three-dimensional image data processor 43, at step S406, the three-dimensional shape data generated in step S402, coordinate transformation function _{F CP} calculated by executing the coordinate transformation function _{F CP} calculation program The three-dimensional shape data represented by the camera coordinate system C is coordinate-converted into the three-dimensional shape data represented by the wire tip coordinate system P. Then, the three-dimensional image data processing device 43 uses the coordinate transformation function F _PS calculated in step S404 as the reference coordinates for the three-dimensional shape data coordinate-transformed in the wire tip coordinate system P in step S408. Coordinates are converted into three-dimensional shape data represented by the system S. That is, the three-dimensional shape data represented by the camera coordinate system C is transformed into the three-dimensional shape data represented by the reference coordinate system S through these steps S406 and S408.

In this case, to calculate the coordinate transformation function _{F CP} and the coordinate transformation function _{F PS} and the multiplication _(F CP · _{F PS)} and the coordinate transformation function _{F CS} was, by the camera coordinate system C by using the coordinate transformation function _{F CS} Even if the expressed three-dimensional shape data is coordinate-transformed into the three-dimensional shape data represented by the reference coordinate system S, the result is the same. That is, the coordinate transformation function F _CP corresponds to the second coordinate transformation function according to the present invention, the coordinate transformation function F _PS corresponds to the third coordinate transformation function according to the present invention, and these coordinate transformation functions F _CP and The coordinate transformation function _FPS corresponds to the first coordinate transformation function according to the present invention. The three-dimensional shape data coordinate-converted to the reference coordinate system S is stored in the three-dimensional image data processing device 43.

Next, in step S410, the three-dimensional image data processing device 43 determines whether the three-dimensional shape measurement is finished. Specifically, when information regarding the XYZ coordinates is input from the three-dimensional shape measuring apparatus 10, the determination is “Yes” and the process returns to step S402. As described above, the calculation and coordinates of the three-dimensional shape data are performed. The conversion function _FPS is calculated, the calculated 3D shape data is subjected to coordinate conversion to the 3D shape data of the reference coordinate system S, and the 3D shape data subjected to the coordinate conversion is stored in the 3D image data processing device 43. To do. This process is repeated as long as information about the XYZ coordinates is input from the three-dimensional shape measuring apparatus 10. On the other hand, when the information regarding the XYZ coordinates is not input from the three-dimensional shape measuring apparatus 10 for a predetermined time or more, it is determined as “No” in the same determination, and the workpiece WK is measured from another measurement position in step S412. It is determined whether or not to do. Specifically, the three-dimensional image data processing device 43 inquires of the operator whether or not to continue the measurement of the workpiece WK, and “Yes” is determined in the determination until an instruction to end the measurement is input from the operator. Determine and return to step S402. In this case, the operator changes the measurement position of the three-dimensional shape measuring apparatus 10 with respect to the workpiece WK and performs measurement again. Thereby, the three-dimensional shape data when the workpiece WK is measured from a measurement position different from the above is stored in the three-dimensional image data processing device 43. In this case, the positions of the wire devices 20A, 20B, and 20C are fixed. On the other hand, if an instruction to end measurement is input from the operator, the determination is “No” and the process proceeds to step S414.

  Next, in step S414, the three-dimensional image data processing device 43 synthesizes the three-dimensional shape data represented by the reference coordinate system S for each measurement position into a set of three-dimensional shape data groups. In this synthesis, since the three-dimensional shape data at all measurement positions is represented by coordinate values on the reference coordinate system S which is the same coordinate system, the three-dimensional shape representing the part of the workpiece WK that is not measured at each measurement position. When the data are complemented to each other and a plurality of three-dimensional shape data groups exist at the same place, an averaging process is performed to form a set of data groups.

  Next, in step S416, the three-dimensional image data processing device 43 causes the display device 44 to display the three-dimensional shape of the workpiece WK using the synthesized three-dimensional shape data group. Then, the three-dimensional image data processing device 43 ends the execution of the three-dimensional shape display program in step S418. In displaying the three-dimensional shape of the workpiece WK, the operator can instruct the display direction of the workpiece WK by operating the input device 42, and the controller 41 and the three-dimensional image data processing device 43 are displayed on the display device 44. The display direction of the workpiece WK displayed is changed. Thereby, the three-dimensional shape which looked at the workpiece | work WK from arbitrary directions can be displayed.

If a new work WK is placed on the table 60 and the display of the work WK is instructed and measurement is performed by the three-dimensional shape measuring apparatus 10 as described above, a reference coordinate system is obtained by executing the three-dimensional shape display program. The generation of the three-dimensional shape data by S and the synthesis of the three-dimensional shape data are performed, and the three-dimensional shape of the new work WK viewed from an arbitrary direction can be displayed on the display device 44. That is, if the coordinate transformation function F _WS and the coordinate transformation function F _CP are calculated only once using the reference objects 70A, 70B, and 70C, the positions of the wire devices 20A, 20B, and 20C (that is, the reference coordinate system S) are determined. As long as the workpiece WK is not displaced, the three-dimensional shape of the workpiece WK can be displayed on the display device 44 by changing the workpiece WK one after another.

As can be understood from the above description of the operation, according to the first embodiment, the three-dimensional image data processing device 43 is configured so that the drawing amounts L of the wires 21A, 21B, and 21C detected by the wire devices 20A, 20B, and 20C and Using the rotation angles θ _X and θ _Y representing the directions in which the wires 21A, 21B, and 21C are drawn, the position in the reference coordinate system S of the three-dimensional shape measuring apparatus 10, specifically the camera coordinate system C, is specified. A coordinate conversion function F _CP and a coordinate conversion function F _PS are calculated. Thereby, the operator has a configuration in which the tips 21aA, 21aB, and 21aC of the wires 21A, 21B, and 21C that can specify the position of the three-dimensional shape measuring apparatus 10 in the reference coordinate system S are connected to the three-dimensional shape measuring apparatus 10, respectively. If the workpiece WK is measured, the three-dimensional image data processing device 43 converts the three-dimensional shape data obtained by the measurement into three-dimensional shape data based on the reference coordinate system S and synthesizes the three-dimensional shape from an arbitrary direction. Displayable three-dimensional shape data can be generated. For this reason, a three-dimensional shape measuring system can be configured easily and compactly without using a support mechanism having a large and complicated configuration as in the conventional example. In addition, since the length of the wires 21A, 21B, and 21C accommodated in the wire devices 20A, 20B, and 20C may be set according to the size of the work WK, the workpiece WK having a large shape is measured. In addition, the three-dimensional shape measuring system can be configured easily and compactly.

(Second Embodiment)
A second embodiment of the present invention will be described. In the first embodiment, the three-dimensional shape measurement system in which the three wire devices 20A, 20B, and 20C are connected to the three-dimensional shape measurement device 10 has been described. However, a coordinate conversion function for converting the three-dimensional shape data represented by the camera coordinate system C into the three-dimensional shape data represented by the reference coordinate system S (in the first embodiment, the coordinate conversion function F _CP and The present invention is not limited to this as long as the coordinate conversion function F _PS ) can be calculated. FIG. 10 shows a three-dimensional shape measurement system in which one wire device 20 ′ is connected to the three-dimensional shape measurement device 10 ′. As in the first embodiment, the tip 21′a of the wire 21 ′ drawn from the wire device 20 ′ is emitted from the back surface of the three-dimensional shape measuring device 10 ′ (laser light in the three-dimensional shape measuring 10 ′ is emitted. It is connected to a sphere 13 ′ embedded in a side surface facing the side surface). The wire device 20 ′ is fixed on a wire device support leg 30 ′ that supports the wire device 20 ′ at a predetermined position, similarly to the case of calculating the coordinate transformation function F _CP in the first embodiment. Yes.

  The three-dimensional shape measuring apparatus 10 'is XY- representing measurement information measured by the three-dimensional shape measuring apparatus 10 in the first embodiment, that is, each divided area position obtained by dividing the surface of the object into minute areas. In addition to the information about the Z coordinate (specifically, the inclinations θx and θy and the distance Lz), the amount of reflected light R for each divided area is also detected. Therefore, the three-dimensional image data processing device 43 calculates the amount of reflected light for each minute area of the object surface located in the measurement target space, using the amount of reflected light R detected by the three-dimensional shape measuring device 10 '. In the figure, the controller 41, the input device 42, the three-dimensional image data processing device 43, and the display device 44 are not shown. Since other configurations are the same as those of the first embodiment, description thereof is omitted.

Next, the operation of the three-dimensional shape measurement system according to the second embodiment configured as described above will be described. The operator converts the rotation component M _{PS of the} coordinate axis constituting the coordinate conversion function F _PS for converting the three-dimensional shape data represented by the wire tip coordinate system P into the three-dimensional shape data represented by the reference coordinate system S, and An origin deviation component G _CP of the coordinate origin constituting the coordinate transformation function F _CP for coordinate transformation of the 3D shape data represented by the camera coordinate system C to the 3D shape data represented by the wire tip coordinate system P is calculated.

First, as shown in FIG. 11, the worker, as in the first embodiment, has a stylus 50 formed by sharpening the tip at the tip 21′a of the wire 21 ′ drawn from the wire device 20 ′. To fix. Next, an operator arrange | positions table 60 'formed in the shape of a rectangular parallelepiped in the range which the front-end | tip of wire 21' pulled out from wire apparatus 20A 'reaches. The table 60 ′ is an object that constitutes a reference object that is used when calculating the coordinate transformation function F _CP and the coordinate transformation function F _PS by defining the wire tip coordinate system P, and at least two of the tables 60 ′. The surfaces 60′a and 60′b are arranged so as to face the three-dimensional shape measuring apparatus 10 ′. Two surfaces 60′a and 60′b facing the three-dimensional shape measuring apparatus 10 ′ in the table 60 ′ are formed to have different reflectances. In the figure, the difference in reflectance between these surfaces 60'a and 60'b is represented by the difference in pattern on each surface. In addition, when the two surfaces 60'a and 60'b are respectively irradiated with laser light, the amount of reflected light from the surfaces 60'a and 60'b is recognized in advance by the operator, and is three-dimensional. It is stored in advance in the memory device of the image data processing device 43.

  Next, the worker places one reference object 70 'on the table 60'. Similar to the first embodiment, the reference object 70 ′ is formed of a true sphere and has a function of determining a fixed point in the measurement target space. Note that the reference object 70 ′ is within the reach of the tip of the wire 21A ′ drawn from the wire device 20 ′, and simultaneously with the two surfaces 60′a and 60′b of the table 60 ′ by the three-dimensional shape measuring device 10 ′. If it is arranged in a positional relationship that can be measured, it is not necessarily arranged on the table 60 '.

Next, the operator operates the input device 42 to calculate the rotation component M _{PS of} the coordinate axis constituting the coordinate transformation function F _PS and the origin deviation component G _CP of the coordinate origin constituting the coordinate transformation function F _CP. The 3D image data processing device 43 is instructed. In response to this instruction, the three-dimensional image data processing device 43 starts execution of the rotation component M _PS and origin deviation component G _CP calculation program shown in FIG. 12 in step S500, and in step S502, the reference object Wait for feature input. The feature of the reference object is data representing that the reference object is composed of one sphere and two planes. Therefore, the operator operates the input device 42 to input such information to the three-dimensional image data processing device 43. As described above, when the characteristics of the previously input reference object are not changed, the processing in step S502 may be skipped.

Next, in step S504, the three-dimensional image data processing device 43 waits for input of measurement information of the reference object. In this case, similarly to the first embodiment, the operator holds the tip of the stylus 50 with the hand and moves the stylus 50 attached to the tip 21'a of the wire 21 ', thereby moving the tip of the stylus 50 to the reference object. Information representing the contact of the stylus 50 with respect to the reference object 70 ′ is input by contacting the four different positions on each surface 70 ′ and operating the input device 42 for each contact. The three-dimensional image data processing device 43 inputs the pull-out amount L and the rotation angles θ _X and θ _Z of the wire 21 ′ for each piece of information representing the contact of the stylus 50 with the reference object 70 ′ input from the operator. The coordinate values of the contact points of the stylus 50 with respect to the reference object 70 'are calculated.

Next, in step S506, the three-dimensional image data processing device 43 waits for input of a surface identification number. In this case, the worker inputs a number assigned in advance to identify the two surfaces 60′a and 60′b of the table 60 ′. Next, in step S508, the three-dimensional image data processing device 43 waits for input of surface measurement information. In this case, the operator holds the tip of the stylus 50 by hand, and moves the tip of the stylus 50 to three different positions on the two surfaces 60′a and 60′b of the table 60 ′. Information representing contact with the surfaces 60'a and 60'b of the stylus 50 is input by making the contact and operating the input device 42 for each contact. The three-dimensional image data processing device 43 obtains the amount of withdrawal L and the rotation angle θ _X , θ of the wire 21 ′ for each piece of information representing each contact with the surfaces 60 ′ a, 60 ′ b of the stylus 50 input from the operator. _Z is input, and the coordinate values of the respective contact points with respect to the surfaces 60′a and 60′b of the stylus 50 are calculated.

  Next, in step S510, the three-dimensional image data processing device 43 calculates the center coordinates of the reference object 70 'as a fixed point. Specifically, as in step 106 in the first embodiment, the coordinate values of each of the four contact points of the reference object 70 ′ calculated in step S504 are substituted for the left side of Equation 1. The unknown equations a, b, and c are calculated as fixed points by solving the simultaneous equations established by The calculated fixed point is stored in the three-dimensional image data processing device 43.

Next, in step S512, the three-dimensional image data processing device 43 calculates the normal vectors α _{S60 ′} and β _{S60 ′} on the two surfaces 60′a and 60′b of the table 60 ′. Specifically, the simultaneous equations established by substituting the coordinate values of the three contact points for each of the surfaces 60′a and 60′b calculated in step S508 into the left side of the following equation 17 are solved. To calculate unknowns a, b, c, and d, respectively. Of the unknowns a, b, c, d calculated for each surface 60′a, 60′b, each of the normal vectors α _{S60 ′ in} which the unknowns a, b, c correspond to the surfaces 60′a, 60′b. , Β represents the vector component of _{S60 ′} .

Next, the three-dimensional image data processor 43, at step S514, calculates a rotational component _{M PS.} Specifically, a unit vector of one normal vector α _{S60 ′} (or normal vector β _{S60 ′} ) of the two normal vectors α _{S60 ′} and β _{S60 ′} calculated in step S512 is a vector A. A vector vector calculated by the outer product of the two normal vectors α _{S60 ′} and β _{S60 ′} is a vector B, and a unit vector of the vector calculated by the outer product of these vectors A and B is a vector C. A coordinate system in which the directions of these three vectors A, B, and C are calculated as coordinate axes is defined as a wire tip coordinate system P.

Then, the vector A, B, each vector component in the wire tip coordinate system P of C _{A P,} B P, the _{C P (α1, β1, γ1} ), (α2, β2, γ2), (α3, β3, γ3) And each component A _S , B _S , C _S in the reference coordinate system S of A, B, C of the same vector is expressed as (α′1, β′1, γ′1), (α′2, β′2, If [gamma] '2), ([alpha]' 3, [beta] '3, [gamma]' 3), the components of the vectors A, B, and C in the wire tip coordinate system P and the reference coordinate system S are substituted into the equations 13-15. Then, the matrix value M, that is, the rotation component _MPS can be calculated by solving the simultaneous equations. In this case, the components _A P in wire tip coordinate system _P, B P, a _{C P (α1, β1, γ1} ), (α2, β2, γ2), (α3, β3, γ3) , respectively (1, 0, 0), (0, 1, 0), (0, 0, 1) and the components A _S , B _S , C _S in the reference coordinate system S (α′1, β′1, γ '1), (α'2, β'2, γ'2), (α'3, β'3, γ'3) are obtained from the respective components of the two normal vectors α _S60 and β _S60 as described above. Has already been calculated. Thus, the rotational component _{M PS} in the coordinate transformation function _{F PS} is calculated. The calculated rotation component _MPS is stored in the three-dimensional image data processing device 43.

  Next, in step S516, the three-dimensional image data processing apparatus 43 waits for input of measurement information of the reference object by the three-dimensional shape measurement apparatus 10 '. In this case, as shown in FIG. 13, the operator removes the stylus 50 attached to the tip 21a ′ of the wire 21 ′ and removes the three-dimensional shape measuring apparatus 10 ′ as in the first embodiment. Are connected to a sphere 12 ′ provided on the back surface of the. Then, after fixing the three-dimensional shape measuring apparatus 10 'to which the wire 21' is connected to the three-dimensional shape measuring apparatus support leg 80, the input device 42 is operated to operate the two surfaces 60 of the reference object 70 'and the table 60'. Measure 'a, 60'b.

  In response to an instruction from the controller 41, the three-dimensional shape measuring apparatus 10 ′ starts measuring the two surfaces 60′a and 60′b of the reference object 70 ′ and the table 60 ′, and then performs the reference object 70 ′ and the table. Information representing the three-dimensional shapes of the two surfaces 60'a and 60'b of the 60 ', and the reflected light from the surfaces of the two surfaces 60'a and 60'b of the reference object 70' and the table 60 ' Information representing the amount of light is output to the three-dimensional image data processing device 43. That is, information on the XYZ coordinates (specifically, the coordinates of each divided area position obtained by dividing the surfaces of the two surfaces 60′a and 60′b of the reference object 70 ′ and the table 60 ′ into minute areas) 3 (inclination θx, θy and distance Lz), and information (specifically, the amount of reflected light R) relating to the reflected light from each surface of the two surfaces 60′a, 60′b of the reference object 70 ′ and the table 60 ′. Each is output to the dimensional image data processing device 43.

  Then, in step S516, the three-dimensional image data processing device 43 determines the reference object 70 ′ and the information on the XYZ coordinates and the information on the reflected light output from the three-dimensional shape measurement device 10 ′. Three-dimensional shape data including a three-dimensional shape data group representing the three-dimensional shape of the two surfaces 60′a and 60′b of the table 60 ′ is generated. In this case, in the three-dimensional shape data, the reference object 70 ′ and the surface of the two surfaces 60′a and 60′b of the table 60 ′ correspond to each area position in the three-dimensional shape data that represents the surface for each minute area. Reflected light amount data representing the reflected light amount R is added. Note that the three-dimensional shape data is represented by a coordinate system relating to the three-dimensional shape measuring apparatus 10 ', that is, a camera coordinate system C. Further, in the three-dimensional shape data, in addition to the two surfaces 60′a and 60′b of the reference object 70 ′ and the table 60 ′, the two surfaces 60′a and 60′a of the reference object 70 ′ and the table 60 ′, Three-dimensional shape data representing the surface shape of another object (for example, the upper surface of the table 60 ′) existing around 60′b is also included.

Next, in step S518, the three-dimensional image data processing device 43 detects the tip coordinates of the tip portion 21a ′ of the wire 21 ′. Specifically, the three-dimensional image data processing apparatus 43 measures the position of the three-dimensional shape measuring apparatus 10 ′ that measured the two surfaces 60′a and 60′b of the reference object 70 ′ and the table 60 ′ in step S512. Is input with the drawing amount L of the wire 21 ′ and the rotation angles θ _X and θ _Z, and the position (coordinate value) of the tip end portion 21a ′ in the wire device coordinate system W, that is, the reference coordinate system S is calculated as the tip coordinate. To do.

  Next, in step S520, the three-dimensional image data processing device 43 selects two surfaces 60′a and 60 of the reference object 70 ′ and the table 60 ′ from the three-dimensional shape data generated in step S516. Each three-dimensional shape data representing the three-dimensional shape of 'b is extracted. Among these, the extraction process of the three-dimensional shape data representing the three-dimensional shape of the reference object 70 'is executed by a reference object extraction subprogram (not shown), as in the first embodiment. Further, the three-dimensional shape data representing the three-dimensional shapes of the two surfaces 60′a and 60′b of the table 60 ′ are extracted using the reflected light amount data in the three-dimensional shape data generated in step S516. . That is, the light intensity of each reflected light from the two surfaces 60′a and 60′b of the table 60 ′ stored in advance in the three-dimensional image data processing device 43 is included in the predetermined discrimination value. Three-dimensional shape data corresponding to the reflected light amount data is extracted for each of the surfaces 60′a and 60′b.

  Next, in step S522, the three-dimensional image data processing device 43 calculates fixed point coordinates using the three-dimensional shape data representing the reference object 70 'extracted in step S520. Specifically, as in the first embodiment, the extracted three-dimensional shape data is substituted for the left side of Equation 1, and the unknowns a, b, and c are calculated as fixed points using the least square method. Thereby, the center coordinates of the reference object 70 ′ in the camera coordinate system C are calculated as fixed points. In the above equation 1, d represents the radius of the reference object 70 ', but it is not necessary to calculate in the process of step S518.

Next, in step S524, the three-dimensional image data processing device 43 uses each of the three-dimensional shape data representing the two surfaces 60′a and 60′b of the table 60 ′ extracted in step S520. The normal vectors α _{C60 ′} and β _{C60 ′} are calculated for each of the surfaces 60′a and 60′b. Specifically, as in the first embodiment, the three-dimensional shape data for each of the surfaces 60′a and 60′b generated in step S520 is assigned to the left side of Equation 17, respectively. The unknowns a, b, c, and d are calculated using the square method. Of the unknowns a, b, c, d calculated for each surface 60′a, 60′b, the unknowns a, b, c are normal vectors α _{C60 ′} , corresponding to the surfaces 60′a, 60′b. β represents the vector component of _{C60 ′} .

Next, in step S526, the three-dimensional image data processing device 43 converts the fixed point coordinates represented by the reference coordinate system S calculated in step S510 into fixed point coordinates represented by the wire tip coordinate system P. To do. Specifically, the inverse function M _SP of the rotation component M _PS calculated in step S514 and the tip coordinates of the wire 21 ′ detected in step S518, that is, the wire tip coordinate system P and the reference coordinate system S are used. since the origin displacement (coordinate values) using the coordinate transformation function F _SP configured, fixed point coordinates fixed point coordinates represented by the reference coordinate system S calculated at the step S510, represented by the wire tip coordinates P Convert coordinates to. Thereby, the fixed point coordinates represented by the wire tip coordinate system P and the fixed point coordinates represented by the camera coordinate system C are calculated for the reference object 70 ′.

Next, the three-dimensional image data processing device 43 calculates the origin deviation component G _CP in step S528. Specifically, the unit vector of one normal vector α _{C60 ′} (or normal vector β _{C60 ′} ) of the two normal vectors α _{C60 ′} and β _{C60 ′} calculated in step S524 is a vector A. A vector vector calculated from the outer product of the two normal vectors α _{C60 ′} and β _{C60 ′} is a vector B, and a vector unit vector calculated from the outer product of these vectors A and B is a vector C. Calculate each. These three vectors A, B, and C are the same as the vectors A, B, and C described above.

Accordingly, the vector components A _C , B _C , and C _C of the vectors A, B, and C in the camera coordinate system C are (α1, β1, γ1), (α2, β2, γ2), and (α3, β3, γ3). , of the vector a, B, the components _a P in wire tip coordinate system P of _C, B P, the _{C P (α'1, β'1, γ'1} ), (α'2, β'2, If γ′2) and (α′3, β′3, γ′3), the respective components in the camera coordinate system C and the wire tip coordinate system P of the vectors A, B, and C are substituted into the equations 13-15. Then, by solving the simultaneous equations, the matrix value M, that is, the rotation component _McP can be calculated. In this case, the direction of the coordinate axis of the wire tip coordinate system P is the same as the direction of the vectors A, B, and C. Therefore, it is the components _{A P,} B _{P, C} P in the wire tip coordinates P (α'1, β'1, γ'1) , (α'2, β'2, γ'2), (α '3, β'3, γ'3) are (1, 0, 0), (0, 1, 0), (0, 0, 1), respectively, and each component A _C , B _C and C _C (α1, β1, γ1), (α2, β2, γ2), (α3, β3, γ3) are derived from the respective components of the two normal vectors α _{C60 ′} and β _{C60 ′} . Has already been calculated.

Then, the calculated rotation component M _CP is substituted into M in the above equation 2, and the fixed point coordinates represented by the camera coordinate system C are substituted into x, y, z in the equation 2 and represented by the wire tip coordinate system P. If the fixed point coordinates are substituted into x ′, y ′, and z ′ in Equation 2, the origin deviation components G _CP in both coordinate systems are calculated as a, b, and c in Equation 2. This origin deviation component G _CP is stored in the three-dimensional image data processing device 43. Then, in step S530, the three-dimensional image data processing device 43 ends the execution of the rotation component M _PS and the origin deviation component G _CP calculation program.

After executing the rotation component M _PS and origin deviation component G _CP calculation program, as shown in FIG. 10, the operator removes the reference object 70 ′ from the table 60 ′, and places the measurement object on the table 60 ′. A certain work WK is arranged. Then, the input device 42 is operated to instruct the display of the three-dimensional shape of the work WK. In response to this instruction, the three-dimensional image data processing device 43 starts execution of the three-dimensional shape display program shown in FIG. 14 in step S600, and in step S602, measurement information representing the three-dimensional shape of the workpiece WK. Wait for input.

  The operator moves the three-dimensional shape measuring device support leg 80 to which the three-dimensional shape measuring device 10 ′ is attached to move the workpiece while changing the drawing amount L of the wire 21 ′ drawn from the wire device 20 ′. The three-dimensional shape measuring apparatus 10 'is moved with respect to the WK, and the three-dimensional shape measuring apparatus support leg 80 is fixed to measure the three-dimensional shape. In this case, the operator supports the three-dimensional shape measuring apparatus support leg 80 so that the two surfaces 60′a and 60′b of the table 60 ′ are positioned together with the workpiece WK in the measurement target space of the three-dimensional shape measuring apparatus 10 ′. That is, the three-dimensional shape measuring apparatus 10 ′ is positioned. Accordingly, measurement information regarding the workpiece WK existing in the measurement target space of the three-dimensional shape measuring apparatus 10 ′ and the two surfaces 60′a and 60′b of the table 60 ′ is output to the three-dimensional image data processing apparatus 43. The That is, as in step S512, information on the XYZ coordinates representing the divided area positions obtained by dividing the surfaces of the workpiece WK and the two surfaces 60′a and 60′b of the table 60 ′ into minute areas ( Specifically, the inclinations θx and θy and the distance Lz) and information on the reflected light from the respective surfaces of the two surfaces 60′a and 60′b of the workpiece WK and the table 60 ′ (specifically, the reflected light amount R ) Is output.

  When the input of information relating to the XYZ coordinates from the three-dimensional shape measurement apparatus 10 ′ is completed, the three-dimensional image data processing apparatus 43 outputs the information from the three-dimensional shape measurement apparatus 10 ′ in step S602. Based on the information about the XYZ coordinates, three-dimensional shape data including a three-dimensional shape data group representing the three-dimensional shapes of the work WK and the two surfaces 60′a and 60′b of the table 60 ′ is generated. In this case, the three-dimensional shape data includes three-dimensional shape data representing the respective surfaces of the work WK and the two surfaces 60′a and 60′b of the table 60 ′ for each minute area, and the reflection corresponding to each area position. Reflected light amount data representing the light amount R is added. Note that the three-dimensional shape data is represented by a coordinate system relating to the three-dimensional shape measuring apparatus 10 ', that is, a camera coordinate system C. In addition to the two surfaces 60′a and 60′b of the workpiece WK and the table 60 ′, the three-dimensional shape data includes two surfaces 60′a and 60 ′ of the reference object 70 ′ and the table 60 ′. Also included is three-dimensional shape data representing the surface shape of another object (for example, the upper surface of the table 60 ′) existing around b.

Next, in step S604, the three-dimensional image data processing device 43 detects the tip coordinates of the tip portion 21a ′ of the wire 21 ′. Specifically, the three-dimensional image data processing device 43 measures the wire at the position of the three-dimensional shape measuring device 10 ′ that measured the two surfaces 60′a and 60′b of the work WK and the table 60 ′ in the step S602. The drawing amount L and the rotation angles θ _X and θ _Z of 21 ′ are input, and the position (coordinate value) of the tip end portion 21a ′ in the wire device coordinate system W, that is, the reference coordinate system S is calculated as the tip coordinate.

  Next, in step S606, the three-dimensional image data processing device 43 selects the three-dimensional images of the two surfaces 60′a and 60′b of the table 60 ′ from the three-dimensional shape data generated in step S602. Three-dimensional shape data representing the shape is extracted. The three-dimensional shape data representing the three-dimensional shapes of the two surfaces 60'a and 60'b of the table 60 'are extracted using the reflected light amount data in the three-dimensional shape data, as in step S516. That is, the light intensity of each reflected light from the two surfaces 60′a and 60′b of the table 60 ′ stored in advance in the three-dimensional image data processing device 43 is included in the predetermined discrimination value. Three-dimensional shape data corresponding to the reflected light amount data is extracted for each of the surfaces 60′a and 60′b.

Next, in step S608, the three-dimensional image data processing device 43 converts the three-dimensional shape data represented by the camera coordinate system C into the three-dimensional shape data represented by the wire tip coordinate system P. Calculate _FCP . In this case, the origin shift component _{G CP} in the coordinate transformation function _{F CP,} the rotation component _{M PS,} because it is stored in the three-dimensional image processing apparatus 43 by executing the origin shift component _{G CP} calculation program, coordinate transformation function _{F CP} calculating the rotational component _{M CP} of coordinate axes in. The calculation of the rotational component _{M CP} is performed by the same process as calculating the rotational component _{M CP} in the step S514 and step S528.

That is, each normal vector α _C60 for each surface 60′a and 60′b using each three-dimensional shape data representing the two surfaces 60′a and 60′b of the table 60 ′ extracted in step S606. _' , Β _C60' is calculated, and vectors A, B, C are calculated. Then, the matrix value M, that is, the rotational component M _CP is calculated by substituting the components in the camera coordinate system C and the wire tip coordinate system P of the vectors A, B, and C into the equations 13 to 15 and solving the simultaneous equations. To do. A coordinate conversion function F _CP is calculated from the calculated rotation component M _CP and the stored origin deviation component G _CP .

Next, in step S610, the three-dimensional image data processing device 43 converts the three-dimensional shape data represented by the wire tip coordinate system P into the three-dimensional shape data represented by the reference coordinate system S. Calculate _FPS . In this case, the rotational component _{M PS} in the coordinate transformation function _{F PS,} the rotation component _{M PS,} because it is stored in the three-dimensional image processing apparatus 43 by executing the origin shift component _{G CP} calculation program, coordinate transformation function _{F PS} The origin deviation component _GPS is calculated. Specifically, the tip coordinates of the tip portion 21a ′ of the wire 21 ′ detected in step S604 become the origin deviation component _GPS . Therefore, the coordinate conversion function F _PS can be calculated from the origin deviation component G _PS and the stored rotation component M _PS . That is, the tip coordinates of the tip 21a ′ of the wire 21 ′ detected in step S604 are the position of the three-dimensional shape measuring apparatus 10 ′ in the reference coordinate system S, more specifically, the position of the camera coordinate system C. Used to identify.

Next, in step S612, the three-dimensional image data processing device 43 converts the three-dimensional shape data generated in step S602 and represented by the camera coordinate system C into the coordinate transformation function F _CP calculated in step S608. Is used to convert the coordinates into three-dimensional shape data represented by the wire tip coordinate system P. Then, the three-dimensional image data processing device 43 uses the coordinate transformation function F _PS calculated in step S610 as the reference coordinates for the three-dimensional shape data coordinate-transformed in the wire tip coordinate system P in step S614. Coordinates are converted into three-dimensional shape data represented by the system S. In other words, the three-dimensional shape data represented by the camera coordinate system C is transformed into the three-dimensional shape data represented by the reference coordinate system S through these steps S612 and S614.

In this case, to calculate the coordinate transformation function _{F CP} and the coordinate transformation function _{F PS} and the multiplication _(F CP · _{F PS)} and the coordinate transformation function _{F CS} was, by the camera coordinate system C by using the coordinate transformation function _{F CS} Even if the expressed three-dimensional shape data is coordinate-transformed into the three-dimensional shape data represented by the reference coordinate system S, the result is the same. That is, the coordinate conversion function F _CP corresponds to the fourth coordinate conversion function according to the present invention, and the coordinate conversion function F _PS corresponds to the fifth coordinate conversion function according to the present invention. The three-dimensional shape data coordinate-converted to the reference coordinate system S is stored in the three-dimensional image data processing device 43.

  Next, in step S616, the three-dimensional image data processing device 43 determines whether to measure the workpiece WK from another measurement position. Specifically, the three-dimensional image data processing device 43 inquires of the operator whether or not to continue the measurement of the workpiece WK, and “Yes” is determined in the determination until an instruction to end the measurement is input from the operator. Determine and return to step S602. In this case, the operator changes the measurement position of the three-dimensional shape measuring apparatus 10 'with respect to the workpiece WK and performs measurement again. Thereby, the three-dimensional shape data when the workpiece WK is measured from a measurement position different from the above is stored in the three-dimensional image data processing device 43. On the other hand, if an instruction to end measurement is input from the operator, the determination is “No” and the process proceeds to step S618.

When the workpiece WK is measured from different positions, the coordinate conversion function F _CP and the coordinate conversion function F _PS are calculated for each measurement position. This is the origin shift component G _PS in the rotational component M _CP and coordinate transformation function F _PS in the coordinate transformation function F _CP is because changes in accordance with the measurement position of the three-dimensional shape measurement device 10 '. That is, the direction of the coordinate axis of the wire tip coordinate system P is fixedly defined by the two surfaces 60′a and 60′b of the table 60 ′ regardless of the direction of the three-dimensional shape measuring apparatus 10 ′. It is necessary to calculate the rotation component M _CP of the wire tip coordinate system P with respect to the camera coordinate system C every time the direction of the dimension shape measuring device 10 ′ changes, and the coordinate axis origin of the wire tip coordinate system P is the three-dimensional shape measuring device 10. 'for changing the position of the three-dimensional shape measuring apparatus 10' it is because it is necessary to calculate the origin shift component G _PS wire tip coordinate system P relative to the reference coordinate system S every time the position of the change.

  Next, in step S618, the three-dimensional image data processing device 43 synthesizes the three-dimensional shape data represented by the reference coordinate system for each measurement position into a set of three-dimensional shape data groups. In this synthesis, since the three-dimensional image data at all measurement positions is represented by coordinate values on the reference coordinate system S which is the same coordinate system, the three-dimensional shape representing the part of the workpiece WK that is not measured at each measurement position. When the data are complemented to each other and a plurality of three-dimensional shape data groups exist at the same place, an averaging process is performed to form a set of data groups.

  Next, in step S620, the three-dimensional image data processing device 43 causes the display device 44 to display the three-dimensional shape of the workpiece WK using the synthesized three-dimensional shape data group. Then, the three-dimensional image data processing device 43 ends the execution of the three-dimensional shape display program in step S622. In displaying the three-dimensional shape of the workpiece WK, the operator can instruct the display direction of the workpiece WK by operating the input device 42, and the controller 41 and the three-dimensional image data processing device 43 are displayed on the display device 44. The display direction of the workpiece WK displayed is changed. Thereby, the three-dimensional shape which looked at the workpiece | work WK from arbitrary directions can be displayed.

If a new workpiece WK is placed on the table 60 and the display of the workpiece WK is instructed and measurement is performed by the three-dimensional shape measuring apparatus 10 'as described above, the reference coordinates are obtained by executing the three-dimensional shape display program. Generation of three-dimensional shape data by the system S and synthesis of the three-dimensional shape data are performed, and a three-dimensional shape of the new workpiece WK viewed from an arbitrary direction can be displayed on the display device 44. That, if the origin shift component _{G CP} of the rotating component _{M PS} and coordinate transformation function _{F CP} coordinate conversion function _{F PS} using reference object 70 'and table 60' to calculate only once, the wire device 20 '(i.e. As long as the position of the reference coordinate system S) and the table 60 is not displaced, the workpiece WK can be changed one after another and the three-dimensional shape can be displayed on the display device 44.

As can be understood from the above description of the operation, according to the second embodiment, the rotation angle θ _X , which represents the pulling amount L of the wire 21 ′ detected by the wire device 20 ′ and the pulling direction of the wire 21 ′, Using θ _Y , the position of the three-dimensional shape measuring apparatus 10 ′ in the reference coordinate system S, more specifically the position of the camera coordinate system C, is specified, and the two surfaces 60′a, 60 ′ of the table 60 ′ are identified. Using b, the direction of the coordinate axis of the wire tip coordinate system P with respect to the reference coordinate system S is specified, and the coordinate conversion function F _CP and the coordinate conversion function F _PS are calculated. As a result, the operator arranges the table 60 ′ together with the workpiece WK in the measurement target space of the three-dimensional shape measuring apparatus 10 ′, and sets the tip 21′a of the wire 21 ′ whose position can be specified in the reference coordinate system S. If measurement is performed with a configuration connected to the three-dimensional shape measuring apparatus 10 ', the three-dimensional image data processing apparatus 43 converts the three-dimensional shape data obtained by the measurement into three-dimensional shape data based on the reference coordinate system S. The three-dimensional shape data that can be synthesized and displayed from the arbitrary direction can be generated. For this reason, similarly to the first embodiment, the three-dimensional shape measurement system can be configured in a simple and compact manner as compared with the support mechanism in the conventional example. In the second embodiment, since the three-dimensional shape measuring system is configured by using one wire device 20 ′, the three-dimensional shape measuring system is configured more easily than the first embodiment. be able to.

In the second embodiment, the three-dimensional shape measuring device 10 ′ is fixed on the three-dimensional shape measuring device support leg 80 when measuring the three-dimensional solid shape of the workpiece WK. This is because the coordinate conversion function F _PS and the coordinate conversion function F _CP calculated in Steps S610 and S612 are coordinate conversion functions specific to the measurement position of the three-dimensional shape measuring apparatus 10 ′, and thus the measurement of the workpiece WK. This is for fixing the position of the three-dimensional shape measuring apparatus 10 'in the middle (during the laser beam scanning). Therefore, if the position of the three-dimensional shape measuring apparatus 10 ′ is not changed during measurement of the workpiece WK (during laser beam scanning), the three-dimensional shape measuring apparatus 10 ′ is held by hand as in the first embodiment. You may make it measure. Also by this, the same effect as the second embodiment can be expected.

In the second embodiment, the two vectors α _60′a and β _60′b used for the calculation of the coordinate transformation function F _CP and the coordinate transformation function F _PS are converted into two surfaces 60 ′ constituting the table 60 ′. a and 60′b, respectively. However, the present invention is not limited to this as long as two vectors that can be measured simultaneously with the reference object 70 ′ and the workpiece WK and are not parallel to each other can be defined. For example, as shown in FIGS. 15A to 15D, two non-parallel planes 90a and 90b may be provided in the vicinity of the workpiece WK (and the reference object 70 ′).

  Further, as shown in FIG. 16A, a straight line 91a formed with a reflectance different from that of the plane 90a may be provided on one plane 90a. In this case, the three-dimensional image data processing device 43 calculates one vector based on the three-dimensional shape data representing the plane 90a and outputs it from the three-dimensional shape measurement device 10 ′, as in the second embodiment. The three-dimensional shape data related to the straight line 91a is extracted from the measured information based on the reflected light amount data, and another vector is calculated based on the extracted three-dimensional shape data. Also, as shown in FIG. 16B, two straight lines 91a and 91b formed with different reflectances are provided on one plane 90a, and two vectors are defined using these two straight lines 91a and 91b. You may make it do. In the figure, the difference in reflectance between these straight lines 91a and 91b is represented by the difference in pattern on each straight line. Also by these, the same effect as the second embodiment can be expected.

Further, in the second embodiment, one fixed point and reference object 70 'to define two vectors alpha _60'A, beta _60'B two surfaces 60'A for defining, 60'B Table 60 ′ provided with However, the reference object 70 ′ may be integrated with the two surfaces 60′a and 60′b as long as it does not become an obstacle when measuring the workpiece WK. Also by this, the same effect as the second embodiment can be expected.

In the second embodiment, the two surfaces 60′a and 60′b for defining the two vectors α _60′a and β _60′b are configured to be orthogonal to each other. However, if two vectors that are not parallel to each other can be defined, the two faces 60′a and 60′b do not necessarily need to be orthogonal. Also by this, the same effect as the second embodiment can be expected.

In the second embodiment, the reference coordinate system S is the wire device coordinate system W ′ that is a coordinate system related to the wire device 20 ′. However, instead of this, the coordinate system in which the origin of the reference coordinate system S is the same as that of the wire device coordinate system W ′ and the direction of the coordinate axis of the reference coordinate system S is the same as the direction of the coordinate axis of the wire tip coordinate system P is used as a reference. A coordinate system S may be used. According to this, in the coordinate conversion function F _PS for converting the three-dimensional shape data represented by the wire tip coordinate system P into the three-dimensional shape data represented by the reference coordinate system S, the rotation component M _PS is not necessary. . For this reason, the coordinate conversion function F _PS becomes the origin deviation component G _PS , and the calculation of the coordinate conversion function F _PS can be simplified.

  Furthermore, in carrying out the present invention, the present invention is not limited to the first embodiment and the second embodiment and their modifications, and various modifications can be made without departing from the object of the present invention.

In the first and second embodiments, and it sets a wire device 20A, 20 is a coordinate system about the 'wire system coordinate system W _A, W and the reference coordinate system S. However, the reference coordinate system S can identify the positions of the tip end wires 21aA, 21aB, 21aC, 21a ′ of the wires 21A, 21B, 21C, 21 ′ drawn from the wire devices 20A, 20B, 20C, 20 ′. It is not limited to this. For example, a wire device 20A, 20 'is a coordinate system relating to wire the apparatus coordinate system W _A, W' and the origin of the reference coordinate system S in any position of the wire device supported on legs 30, 30 'which can be identified by It may be set. Further, as shown in FIG. 17, it may be provided a mechanism for detecting the orientation of the origin position and coordinate axes of the wire device coordinate system W _A with respect to the reference coordinate system S. Figure 17 shows a three-dimensional shape measurement system sets the origin of the reference coordinate system S in a position other than the wire device coordinate system W _A. In the figure, the controller 41, the input device 42, the three-dimensional image data processing device 43, and the display device 44 are not shown.

  In this three-dimensional shape measurement system, a wire device support leg 31 ′ is fixed on a moving body 101 that can slide along a rail 100 provided in a ring shape. On the wire device support leg 31 ', three wire devices 20A, 20B, and 20C are provided in the same manner as in the first embodiment, and wires are drawn from the three wire devices 20A, 20B, and 20C, respectively. The three-dimensional shape measuring apparatus 10 is connected to the tip portions 21aA, 21aB, and 21aC of 21A, 21B, and 21C. The center position of the rail 100 formed in a ring shape is known and stored in advance in the three-dimensional image data processing device 43. The origin of the reference coordinate system S is set at the center of the cross section at a predetermined position of the rail 100 (for example, the position indicated by the arrow in the figure). Further, the rail 100 is provided with a position detector (not shown) for detecting the position of the moving body 101 on the rail 100 with respect to the position where the reference coordinate system S is set. Is output to the three-dimensional image data processing device 43.

  Then, with the detection position of the moving body 101 as the origin, a vector whose coordinate axis is directed from the detection position of the moving body 101 toward the center of the rail 100, a tangential vector of the rail 100, and a vector perpendicular to these two vectors. When coordinate axes that are the same as the directions of two vectors are set, the vectors from the detection position of the moving body 101 to the origin of the wire device coordinate system WA (or the wire device coordinate systems WB and WC) are always the same, The orientation of the coordinate axis of the wire device coordinate system WA (or the wire device coordinate system WB, WC) with respect to the orientation is always the same, and the direction of the vector component and the coordinate axis is determined by the wire device coordinate system WA (or the wire device coordinate system WB, WC). The rotation component of the coordinate conversion function for setting the direction of the coordinate axis of () is stored in advance in the three-dimensional image data processing device 43. There. A vector from the detection position of the moving body 101 in the reference coordinate system S to the origin of the reference coordinate system S can be calculated, and the center position of the rail 100 is known as described above. The vector toward the center of 100 and the vector in the tangential direction of the rail 100 can be calculated by detecting the position of the moving body 101. That is, a coordinate conversion function for converting the coordinate value based on the wire device coordinate system WA (or the wire device coordinate system WB, WC) into the coordinate value based on the coordinate axis with the detection position of the moving body 101 as the origin is stored. A coordinate conversion function for converting the coordinate value of the coordinate axis with the detection position of the body 101 as the origin to the coordinate value of the reference coordinate system S can be calculated by detecting the detection position of the moving body 101. That is, if the detection position of the moving body 101 is detected, the three-dimensional shape data based on the wire device coordinate system WA (or the wire device coordinate system WB, WC) can be converted into the three-dimensional shape data based on the reference coordinate system S.

Prior to measurement of the workpiece WK, the operator arranges reference objects 70A, 70B, and 70C (not shown) inside the ring-shaped rail 100, and performs the coordinate conversion function in the same manner as in the first embodiment. _FSP and coordinate transformation function _FCP are calculated. Then, the workpiece WK is arranged (not shown) instead of the reference objects 70A, 70B, and 70C inside the rail 100, and the workpiece WK is measured. In this case, the workpiece WK can be measured over the entire circumference by moving the moving body 101 along the rail 100. The three-dimensional shape data measured by the three-dimensional shape measuring device 10 and generated by the three-dimensional image data processing device 43 is coordinate-transformed into three-dimensional shape data by the wire tip coordinate system P by the coordinate transformation function _FCP , is coordinate converted into three-dimensional shape data by wire system coordinate system W _a by the transformation function F _PS.

Then, the three-dimensional shape data represented by the wire device coordinate system W _A is the coordinate values and coordinate axes origin detected position of the moving object 101 is calculated from the position of the moving body 101 detected by the position detector A coordinate conversion function for converting to a coordinate value of the reference coordinate system S, and a coordinate value by the wire device coordinate system WA (or wire device coordinate system WB, WC) stored in advance in the three-dimensional image data processing device 43, The coordinates are converted into three-dimensional shape data based on the reference coordinate system S by a coordinate conversion function for converting the detected position of the moving body 101 into a coordinate value with the coordinate axis origin. The three-dimensional image processing device 43 displays the three-dimensional shape of the workpiece WK on the display device 44 based on the three-dimensional image data represented by the reference coordinate system S. According to this, the same effects as those of the first embodiment and the second embodiment can be expected, and the workpiece WK is wider than the first embodiment and the second embodiment, for example, three-dimensional shape measurement. The measurement can be performed from the part on the back side of the measurement object facing the apparatus 10. In this case, if the length of the wire device support leg 31 ′ in the illustrated vertical direction can be changed, the range in which the three-dimensional shape measuring apparatus 10 can be moved can be further widened. A workpiece WK having a height can also be measured. Further, if two common vectors that are not parallel to each other can be defined from any measurement direction, as shown in the second embodiment, the tip 21′a of the wire 21 ′ drawn from one wire device 20 ′ can be divided into three. It is good also as a structure connected to dimension shape measuring apparatus 10 '.

  In the first and second embodiments, the three-dimensional shape measuring apparatuses 10 and 10 'and the wire apparatuses 20A, 20B, 20C, and 20' are connected by the wires 21A, 21B, 21C, and 21 '. However, the wire devices 20A, 20B, 20C, and 20 ', that is, the members that can identify the amount and the direction in which the wire devices are pulled out from the support device according to the present invention are not limited to wires. For example, a plurality of cylinders having different outer diameters are arranged concentrically, and a member whose length can be expanded and contracted as each cylinder protrudes and retracts from a cylinder with a larger outer diameter is used as the connection member. Also good. In this case, a detector that detects the amount and direction of the connection member to be pulled out in the same manner as in the first embodiment and the second embodiment is provided in the support device that supports the connection member. Also by this, the same effect as each said embodiment can be anticipated.

  In the first and second embodiments, a sphere is used as the reference object 70A, 70B, 70C, 70 ′. The size and shape of the reference objects 70A, 70B, 70C, 70 ′ are not particularly limited as long as the position can be defined as a fixed point. For example, reference objects 70A, 70B, 70C, 70 ′ formed by shapes such as an elliptical sphere, prism, pyramid, cylinder, cone, and polyhedron, or reference objects 70A, 70B formed into shapes including these shapes. , 70C, 70 ′ may be used. Further, a fixed point may be calculated by forming a mark distinguishable from the same surface on the surface of the reference objects 70A, 70B, 70C and 70 'and extracting the mark. Also by this, the same effect as each said embodiment can be anticipated.

1 is a schematic diagram showing an entire three-dimensional shape measurement system according to a first embodiment of the present invention. It is sectional drawing for demonstrating the connection state of the three-dimensional shape measuring apparatus and wire in the three-dimensional shape measuring system of FIG. It is a perspective view which shows the wire apparatus in the three-dimensional shape measuring system of FIG. It is the perspective view which showed a mode that a reference | standard object was measured with a stylus in 1st Embodiment. It is a flowchart of the coordinate transformation function _FWS calculation program performed by the three-dimensional image data processing apparatus in the three-dimensional shape measurement system of FIG. It is a flowchart of the coordinate transformation function _FCP calculation program performed by the three-dimensional image data processing apparatus in the three-dimensional shape measurement system of FIG. It is the perspective view which showed a mode that the reference | standard object was measured with the three-dimensional shape measuring apparatus in the three-dimensional shape measuring system of FIG. It is a flowchart of the coordinate transformation function _FSP calculation program performed by the three-dimensional image data processing apparatus in the three-dimensional shape measurement system of FIG. It is a flowchart of the three-dimensional shape display program executed by the three-dimensional image data processing device in the three-dimensional shape measurement system of FIG. It is the schematic which shows the whole three-dimensional shape measuring system which concerns on 2nd Embodiment of this invention. It is the perspective view which showed a mode that a reference | standard object was measured with a stylus in 2nd Embodiment. FIG. 11 is a flowchart of a rotation component M _PS and origin deviation component G _CP calculation program executed by the three-dimensional image data processing apparatus in the three-dimensional shape measurement system of FIG. 10. It is the perspective view which showed a mode that the reference | standard object was measured with the three-dimensional shape measuring apparatus in the three-dimensional shape measuring system of FIG. It is a flowchart of the three-dimensional shape display program performed by the three-dimensional image data processing apparatus in the three-dimensional shape measurement system of FIG. (A)-(D) are perspective views which show the modification in 2nd Embodiment. (A), (B) is a perspective view which shows the other modification in 2nd Embodiment. It is a perspective view which shows the modification in 1st Embodiment.

Explanation of symbols

WK: Workpiece, 10: Three-dimensional shape measuring device, 13: Sphere, 20A, 20B, 20C ... Wire device, 21A, 21B, 21C ... Wire, 21aA, 21aB, 21aB ... Tip, 22A, 22B, 22C ... Outer cylinder 30 ... Wire device support leg, 41 ... Controller, 42 ... Input device, 43 ... 3D image data processing device, 44 ... Display device, 50 ... stylus, 60 ... Table, 70A, 70B, 70C ... Reference object, 80 ... Support legs for 3D shape measuring equipment

Claims (12)

A three-dimensional shape measuring apparatus that measures the three-dimensional shape of the measurement object and outputs three-dimensional shape data representing the three-dimensional shape of the measurement object;
A connecting member that freely supports the drawing amount and the drawing direction by a support device at the base end, and connects the three-dimensional shape measuring device to the tip;
Information acquisition means for acquiring position information representing at least the position of the three-dimensional shape measuring apparatus with respect to a predetermined reference coordinate system using an amount and direction of the connection member with respect to the support device;
Data conversion means for converting the three-dimensional shape data output from the three-dimensional shape measuring apparatus into three-dimensional shape data represented by the predetermined reference coordinate system using the acquired position information;
A three-dimensional shape measurement system comprising: a combining unit that combines a plurality of sets of three-dimensional shape data converted by the data conversion unit. The three-dimensional shape measurement system according to claim 1,
The said support apparatus is a three-dimensional shape measuring system provided with the detector which detects the drawing amount and drawing direction of the said connection member. In the three-dimensional shape measurement system according to claim 1 or 2,
The origin of the predetermined reference coordinate system and the orientation of the coordinate axes are determined with reference to the support device,
The information acquisition means is a three-dimensional shape measurement system that acquires direction information indicating the direction of the three-dimensional shape measurement apparatus with respect to the predetermined reference coordinate system in addition to the position information. In the three-dimensional shape measurement system according to claim 3,
The connection member is a three-dimensional shape measuring system having at least three. In the three-dimensional shape measurement system according to any one of claims 3 and 4,
The data conversion means includes
First coordinates for converting the three-dimensional shape data output from the three-dimensional shape measuring apparatus into three-dimensional shape data represented by the predetermined reference coordinate system using the position information and the orientation information A first coordinate transformation function calculation means for calculating a transformation function;
Coordinate conversion means for converting the three-dimensional shape data output from the three-dimensional shape measuring apparatus into three-dimensional shape data represented by the predetermined reference coordinate system using the first coordinate conversion function; 3D shape measurement system provided. In the three-dimensional shape measurement system according to claim 5,
The first coordinate conversion function calculating means converts the three-dimensional shape data represented by the coordinate system related to the three-dimensional shape measuring apparatus into the three-dimensional shape data represented by the coordinate system related to the tip of the connecting member. For converting the three-dimensional shape data expressed by the second coordinate conversion function for the first reference coordinate system and the coordinate system related to the tip of the connecting member into the three-dimensional shape data expressed by the coordinate system related to the predetermined reference coordinate system A three-dimensional shape measurement system that calculates the third coordinate conversion function of the first coordinate conversion function as the first coordinate conversion function. The three-dimensional shape measurement system according to claim 1 or 2,
The three-dimensional shape measuring device is a three-dimensional device that represents a three-dimensional shape of a reference object arranged in a measurement target space of the three-dimensional shape measuring device, in addition to three-dimensional shape data that represents the three-dimensional shape of the measuring object. Shape data is also output,
The origin of the predetermined reference coordinate system is determined with reference to the support device, and the orientation of the coordinate axis of the predetermined reference coordinate system is determined with reference to the support device or the reference object,
The data conversion means uses the three-dimensional shape data representing the three-dimensional shape of the reference object in addition to the acquired position information, using the three-dimensional shape data output from the three-dimensional shape measuring device, and A three-dimensional shape measurement system for converting into three-dimensional shape data represented by a reference coordinate system. The three-dimensional shape measurement system according to claim 7,
The connection member is at least one three-dimensional shape measurement system. In the three-dimensional shape measuring system according to claim 7 or 8,
The data conversion means includes
Calculating a direction of a coordinate axis related to the reference object using three-dimensional shape data representing a three-dimensional shape of the reference object;
Fourth coordinate conversion function for converting three-dimensional shape data representing the three-dimensional shape of the measurement object into three-dimensional shape data represented by a three-dimensional coordinate system having the same coordinate axis as the calculated coordinate axis direction A fourth coordinate transformation function calculating means for calculating
Fifth coordinates for converting three-dimensional shape data representing the three-dimensional shape of the measurement object into three-dimensional shape data represented by a three-dimensional coordinate system having the same origin as the origin of the predetermined reference coordinate system A fifth coordinate conversion function calculating means for calculating a conversion function;
The three-dimensional shape data output from the three-dimensional shape measuring device is converted into three-dimensional shape data represented by the predetermined reference coordinate system using the calculated fourth and fifth coordinate conversion functions. A three-dimensional shape measurement system comprising coordinate conversion means. The three-dimensional shape measurement system according to claim 9,
The fourth coordinate conversion function converts the three-dimensional shape data represented by the coordinate system related to the three-dimensional shape measuring apparatus into the three-dimensional shape data represented by the coordinate system related to the tip of the connection member,
The fifth coordinate conversion function performs coordinate conversion of 3D shape data represented by a coordinate system related to the tip of the connecting member into 3D shape data expressed by a coordinate system related to the predetermined reference coordinate system. Dimensional shape measurement system. The three-dimensional shape measurement system according to any one of claims 1 to 10, further comprising:
The predetermined reference coordinate system is determined based on a predetermined position of the support device,
Support device moving means for moving the support device relative to the predetermined reference coordinate system;
Supporting device position detecting means for detecting the position of the supporting device represented by the predetermined reference coordinate system;
The data conversion means uses the position of the support device detected by the support device position detection means, in addition to the acquired position information, to convert the 3D shape data output from the 3D shape measurement device. A three-dimensional shape measurement system for converting into three-dimensional shape data represented by the predetermined reference coordinate system. The three-dimensional shape measurement system according to any one of claims 1 to 11,
The connection member is a three-dimensional shape measurement system which is a wire.

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