JP2007245126A - Apparatus and method for dedusting - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus and a method for dedusting, in each of which the dust removed from a component can surely be prevented from being stuck again to the component. <P>SOLUTION: The apparatus 10 for dedusting is provided with: a dedusting chamber 12 having a holding stand 30 for holding an object 50 to be treated; an air jetting unit 22 for blowing air against the object 50 be treated; and a negative pressure generating unit 18 for sucking dust from the dedusting chamber 12. The negative pressure generating unit 18 is constituted so that the operation thereof is continued during a beforehand-stipulated time after dedusting is completed. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

The present invention relates to a dust removing apparatus and a dust removing method used in a manufacturing process of precision equipment.

Conventionally, in the process of manufacturing parts for precision equipment, dust removal devices are used to remove foreign matters such as dust attached to each part by blowing compressed air on the part (for example,
Patent Document 1).

JP 2005-199169 A

However, there is a problem in that dust simply removed from a part may fly up in the dust removing device and adhere to the part again simply by blowing compressed air on the part.

Then, an object of this invention is to provide the dust removal apparatus and dust removal method which can prevent reliably that the dust removed from the components adheres to a component again.

According to the first aspect of the present invention, there is provided a dust removal chamber having a holding base for holding a processing target, an air injection device for blowing air to the processing target, and generation of negative pressure for sucking dust from the dust removal chamber. The dust removing device has a device, and the negative pressure generating device is achieved by a dust removing device configured to continue operation for a predetermined time after completion of dust removal. .

According to the configuration of the first aspect of the invention, the negative pressure generating device is configured to continue operation for a predetermined time after completion of dust removal, and therefore, in the dust removal chamber after completion of dust removal. The floating dust can be discharged from the dust removal chamber.
Thereby, it can prevent reliably that the dust removed from the components adheres to the components again.

According to a second aspect of the present invention, there is provided the dust removing device according to the first aspect, wherein the side wall of the dust removal chamber is made of a conductive material, and the side wall is charged during dust removal. is there.

According to the configuration of the second invention, charged dust can be attached to the side wall.
Thereby, it can prevent more reliably that the dust removed from the components adheres to the components again.

According to a third aspect of the present invention, there is provided a dust removing chamber having a holding base for holding a processing target, an air injection device for blowing air to the processing target, and generation of negative pressure for sucking dust from the dust removing chamber. A dust removal device having a device sets a position and inclination of the holding table and a position of the air injection device and an air blowing direction based on the shape of the processing target, and the dust removal device A charging step for charging the side wall of the dust removal chamber, a suction start step for causing the dust removal device to operate the negative pressure generating device, and an air for which the dust removal device blows air discontinuously toward the processing object. A spraying step, an air spraying stop step in which the dust removing device stops spraying air on the object to be treated, and the dust removing device after a predetermined time has passed , A suction stop step of stopping the operation of the negative pressure generating device, wherein the dust removing device is achieved by dedusting method characterized by having a charging release step of releasing the charging of said side wall.

According to the configuration of the third aspect of the invention, it is possible to sufficiently remove the foreign matter adhering to a three-dimensional shape or a complex shape having irregularities. Moreover, it is possible to reliably prevent the dust removed from the component from adhering to the component again.

Preferred embodiments of the present invention will be described below in detail with reference to the accompanying drawings.
The embodiments described below are preferred specific examples of the present invention, and thus various technically preferable limitations are given. However, the scope of the present invention is particularly limited in the following description. Unless otherwise stated, the present invention is not limited to these embodiments.

(Embodiment)
FIG. 1 is a schematic perspective view showing a dust removing device 10 according to an embodiment of the present invention.
The dust removing device 10 is an example of a dust removing device.
As shown in FIG. 1, the dust removal device 10 has a dust removal chamber 12. The dust removal chamber 12 is an example of a dust removal chamber.
The dust removing device 10 includes a control device 11 that controls each unit. Although the control apparatus 11 is connected with each part, illustration about a connection state is abbreviate | omitted. The control device 11 is an example of a control device.

The dust removal chamber 12 has a holding table 30 that holds the component 50. The holding table 30 is an example of a holding table. The component 50 is an example of a processing target. The component 50 is, for example, a projector component that is a precision instrument.
The dust removal chamber 12 has side walls 12a, 12b, 12c and 12d. The side walls 12a and the like are made of a conductive material, for example, conductive plastic, and are connected to the power supply device 20, respectively. In FIG. 1, only the state in which the side wall 12a is connected to the power supply device 20 is illustrated, and the other side walls 12b and the like are not illustrated, but actually, the side walls 12b, 12c, and 12d are omitted. Is also connected to the power supply device 20.
The power supply device 20 stores a power supply 20a and is connected to the side walls 12a and the like by electric wires 20b and 20c.
When a current is supplied from the power supply device 20, the side wall 12a and the like are charged.
The power supply device 20 supplies power to portions other than the side wall 12a (suction device 18, air gun 22, etc.), but the connection state is not shown.

The dust removal chamber 12 also has a ceiling 12e and a bottom 12f. The bottom part 12f is connected to the connecting part 14
In addition, the suction device 18 communicates with the tube 16. The suction device 18 is an example of a negative pressure generator.
The suction device 18 has a FAN 18a connected to the motor 18b via the rotating shaft 18c. By rotating the FAN 18a, a negative pressure can be generated in the dust removal chamber 12.
A metal net 28 is disposed between the processing space S in the dust removal chamber 12 and the bottom 12f.

The dust removing device 10 also has an air gun 22 that blows air against the component 50. The air gun 22 is an example of an air injection device. The air gun 22 can blow out compressed air from the injection port 22b.
The air gun 22 can inject air discontinuously.
For example, the air gun 22 injects air at intervals of 0.01 seconds (s). For this reason, the air injected by the air gun 22 strikes the component 50 as a shock wave. Thereby, the dust adhering to the component 50 can be removed efficiently.

The holding base 30 for holding the component 50 is fixed to the longitudinal movement shaft 28 so as to be movable in the directions of the arrows Y1 and Y2. And the axis | shaft 28 is arrow X1 with respect to the axis | shaft 26 for horizontal movement.
And fixed to be movable in the X2 direction. Arrow X1 (and X2) and arrow Y2 (and Y2
) Are orthogonal to each other.
For this reason, the axis | shaft 26 and the axis | shaft 28 are united, and the holding stand 30 can be planarly moved.
That is, the shaft 26 and the shaft 28 are an example of the holding table moving device as a unit.

FIG. 2 is a schematic view of the state in which the holding table 30 moves in a plane as seen from the direction of arrow Z1 in FIG.
In FIG. 2A, the holding table 30 is located at the left center.
When the holding table 30 moves from the state of FIG. 2A along the axis 28 in the direction of the arrow Y2, FIG.
As shown to b), the holding stand 30 is located in the lower left part.
Then, when the shaft 28 moves in the direction of the arrow X2 along the shaft 26 from the state of FIG. 2B, the holding base 30 is positioned at the lower right as shown in FIG.
As described above, the holding table 30 moves along the axis 28, and the axis 28 moves along the axis 26, whereby the holding table 30 can be moved in a plane to an arbitrary position in the dust removing chamber 12.

FIG. 3 is a schematic view showing the component 50 and the like.
As shown in FIG. 3A, the component 50 is a rectangular parallelepiped having a recess 50a at a position deviated from the central portion thereof.
As shown in FIG. 3B, the holding table 30 has a component stage 30a. The component 50 is
It is mounted on the component stage 30a.
When the injection port 22b of the air gun 22 and the component 50 have the positional relationship shown in FIG.
The air W1 ejected from the ejection port 22b does not hit the recess 50a.
When the holding table 30 moves in the direction of the arrow X2 from the state of FIG.
The positional relationship between the component 50 and the component 50 changes, and the air W1 injected from the injection port 22b comes into contact with the recess 50a.

FIG. 4 is a schematic diagram showing the configuration and the like of the holding table 30.
FIG. 4A is a schematic plan view of the holding table 30 as viewed from the direction of the arrow Z1 in FIG.
FIG. 4B is a schematic cross-sectional view taken along the line AA in FIG.
As shown in FIG. 4A, the holding table 30 includes rotating rollers 30b1 and 30b3.
The rotating roller 30b1 is a component stage 30a having a hemispherical cross section (see FIG. 4B).
Rotate in the direction of arrow B1 about the axis L3 while contacting the bottom surface 30aa. Thereby, the component stage 30a can be inclined.

The rotating roller 30b3 rotates in the arrow B3 direction about the axis L5 while being in contact with the bottom surface 30aa of the component stage 30a. Thereby, the component stage 30a can be inclined in the direction opposite to the direction in which the rotating roller 30b1 is inclined.
As shown in FIG. 4B, the component stage 30a is connected to a DD motor (direct drive motor) 31 and is rotatable in the directions of arrows H1 and H2 in FIG. The rotating rollers 30b1 and 30b3 are configured to rotate in the directions of arrows H1 and H2 together with the component stage 30a.
The component stage 30a is inclined by the rotating rollers 30b1 and 30b3 and the DD motor 3
By combining the rotation in the directions of the arrows H1 and H2 by 1, it is possible to tilt in any direction.
Thereby, air can be blown from the air gun 22 to all surfaces other than the bottom surface even for components having complicated shapes.

FIG. 5 is a schematic view showing the component 50A and the like.
As shown in FIG. 5A, the component 50A has a convex portion 50Aa.
As shown in FIG. 4B, when the component stage 30a is not inclined, the air gun 2
The air W1 from the second injection port 22b hits the upper surface of the convex portion 50Aa, but does not hit the side surface.
In contrast, as shown in FIG. 5B, when the component stage 30a is inclined at an angle θ1, the air W1 hits one side surface 50Aa1 of the convex portion 50Aa.
When the component stage 30a is inclined at an angle θ2, the air W1 hits the other side surface 50Aa2 of the convex portion 50Aa.
As described above, air can be blown from the air gun 22 to all the surfaces of the component 50A having the convex portion.

Further, the air gun 22 can be moved in a plane and the air injection direction (injection angle) can be changed, and air can be blown to all surfaces other than the bottom surface even for a complicated shape. it can.
As shown in FIG. 1, the air gun 22 is fixed so as to be movable in the directions of arrows Y1 and Y2 with respect to a shaft 34 for vertical movement. Then, the shaft 34 has an arrow X with respect to the shaft 32 for lateral movement.
It is fixed so as to be movable in the 1 and X2 directions.
For this reason, the axis | shaft 32 and the axis | shaft 34 are united, and the air gun 22 can be planarly moved. That is, the shaft 32 and the shaft 34 are an example of an air injection device moving device as a unit.

FIG. 6 is a schematic view of the air gun 22 as seen from the direction of arrow Z1 in FIG.
In FIG. 6A, the air gun 22 is located at the left-side center.
When the air gun 22 moves in the direction of the arrow Y2 along the shaft 34 from the state of FIG.
As shown in (b), the air gun 22 is located in the lower left part.
Then, when the shaft 34 moves in the arrow X2 direction along the shaft 32 from the state of FIG. 6B, the air gun 22 is positioned at the lower right side as shown in FIG. 6C.
As described above, the air gun 22 moves along the axis 34, and the axis 34 moves along the axis 32, so that the air gun 22 can be moved in a plane to any position in the dust removal chamber 12.

FIG. 7 is a schematic diagram showing the configuration and the like of the air gun 22.
As shown in FIG. 7A, the air gun 22 has a compressed air supply tube 22c. The compressed air supply tube 22c acquires compressed air from the outside and supplies the compressed air to the injection port 22b.
The main body 22a of the air gun 22 has an arrow C about the axis L7 with respect to the fixing member 22d.
It is held so as to be rotatable in the 1 and C2 directions.
Then, the fixing member 22d has an arrow C about the axis L8 with respect to the ceiling 12e of the dust removal chamber 12.
It is fixed so that it can rotate in the 3 and C4 directions.
For this reason, the injection port 22b of the air gun 22 can face in any direction. That is, the direction of the air ejected from the ejection port 22b can be set to an arbitrary direction.
As described above, the air gun 22 is configured to be able to move on a plane and to change the air injection direction, so that the complicatedly shaped component 50B as shown in FIG. Air can be applied to all other surfaces.

The component 50B shown in FIG. 7B has a deep recess 50Bd and has a smaller size on the bottom surface 50Bc side than the top surface 50Ba.

FIG. 8 is a schematic view showing a state in which the air W1 is applied to the component 50B.
FIG. 8A shows a state in which the air W1 is applied from the injection port 22b to the central portion of the upper surface 50Ba of the component 50B. In this state, the side surfaces 50Bb1 and 50Bb2 do not hit the air W1. Further, the air W1 does not hit the inside of the recess 50Bd.

From the state of FIG. 8A, the holding table 30 and the air gun 22 move in a plane, and the component stage 30.
When a is inclined and the air gun 22 changes the direction of the injection port 22b to be in the state of FIG. 8B, the air W1 comes into contact with the side surface portion 50Bb1.
Further, the part stage 30a is moved and inclined on the plane, and the air gun 22 is also moved on the plane.
When the direction of the injection port 22b is changed to the state of FIG. 8C, the air W1 hits the recess 50Bd.
As described above, the air gun 22 has a deep recess 50Bd, and air W is applied to all parts other than the bottom surface portion 50Bc, even for parts having a small bottom surface portion 50Bc.
1 can be hit.
The control device 11 in FIG. 1 can perform control so that the plane movement of the air gun 22 and the change of the direction of the injection port 22b are performed in synchronization with the plane movement and inclination of the holding table 30.

In addition, the control device 11 has a predetermined time, for example, 10 seconds (s) after the end of the blowing of the air W1 to the component 50 or the like (hereinafter also referred to as “dust removal”), for example, for 10 seconds (s). The operation is to be continued.
Thereby, it is possible to prevent the dust removed from the component 50 and the like from adhering to the component 50 again.

As described above, as shown in FIG. 1, the side wall 12a and the like of the dust removal chamber 12 are connected to the power supply device 20 and can be charged.
And while the control apparatus 11 is blowing the air W1 with respect to the components 50 etc. (at the time of dust removal)
In FIG. 2, a current is passed through the side wall 12a and the like to charge the side.
For this reason, the dust removed from the component 50 etc. and charged can be adsorbed to the side wall 12 a or the like.
Thereby, it is possible to more reliably prevent the dust removed from the component 50 and the like from adhering to the component 50 again.

The dust removing device 10 is configured as described above.
As described above, the holding table 30 is movable in a plane.
In addition, since the component stage 30a of the holding base 30 is configured to be tiltable, the component 50 or the like is the component stage 30a when the component 50 or the like has a three-dimensional shape or a complicated shape having irregularities. Air can be blown against all surfaces other than the surface in contact with.
Thereby, according to the dust removal apparatus 10, the foreign material adhering to the three-dimensional shape and the complicated shape component which has an unevenness | corrugation can fully be removed.

In addition, since the plane movement of the air gun 22 and the air injection direction can be changed in synchronization with the plane movement and inclination of the holding base 30, even if the component 50 has a deep recess, for example, The positions of the holding table 30 and the air gun 22 and the injection direction can be adjusted so that air can be blown into the recess.

Moreover, since the air gun 22 injects air discontinuously, the air which strikes the components 50 etc. turns into a shock wave.
For this reason, the dust adhering to the components 50 etc. can be removed effectively.

Further, since the suction device 18 is configured to continue the operation for a predetermined time after the dust removal is completed, the dust floating in the dust removal chamber 12 after the dust removal is completed is removed from the dust removal chamber 12. Can be discharged.
Thereby, it is possible to reliably prevent the dust removed from the component 50 and the like from adhering to the component again.

Further, since the side wall 12a and the like are charged when dust is removed, the charged dust can be adsorbed on the side wall 12a and the like.
Thereby, it is possible to more reliably prevent the dust removed from the component 50 and the like from adhering to the component again.

Hereinafter, an operation example of the dust removing device 10 will be described mainly using FIG. 9.
The following description will be made on the assumption that dust on the component 50B in FIG.

FIG. 9 is a schematic flowchart showing an operation example and the like of the dust removing device 10.
First, the component 50B is placed on the component stage 30a (see FIG. 8A) (step ST1 in FIG. 9).
Subsequently, a necessary control attitude is determined based on the shape of the component 50B (step ST2).
. This step ST2 is an example of a work posture setting step.
Specifically, the control device 11 receives data indicating the shape of the component 50B, and receives the component 50B.
A plurality of control postures for applying the air W1 to all surfaces other than the bottom surface of B are calculated.

Subsequently, the holding table 30 and the air gun 22 move to the work position, and take the work posture shown in FIG. 8B, for example (step ST3).
The work posture in FIG. 8B is one of a plurality of work postures.

Subsequently, the side wall 12a and the like are charged (step ST4). This step ST4 is an example of a charging step.
Subsequently, the FAN 18a of the suction device 18 is rotated (step ST5). Step ST
5 is an example of a suction start step.
When the FAN 18a rotates, a negative pressure is generated in the dust removal chamber 12.

Subsequently, air W1 is injected from the air gun 22 onto the component 50B (step ST6).
. This step ST6 is an example of an air blowing step.
Subsequently, after the injection of the air W1 in all working postures is completed, the injection of the air W1 from the air gun 22 is stopped (step ST7). This step ST7 is an example of an air blowing stop step.

Subsequently, after the standby time t1 has elapsed, the rotation of the FAN 18a is stopped (step ST8).
This step ST8 is an example of a suction stop step.
The waiting time t1 is defined as a time necessary and sufficient for sucking the dust removed from the component 50B and floating in the dust removal chamber 12, and is, for example, 10 seconds (s).
Subsequently, the charging of the side wall 12a and the like is released (step ST9). This step ST9
It is an example of a charge release step.

Subsequently, the component 50B is taken out from the dust removal chamber 12 (step ST10).
The dust removal method having the above steps can sufficiently remove foreign matter adhering to a three-dimensional shape or a complex shape with irregularities.
Moreover, it is possible to reliably prevent the dust removed from the component from adhering to the component again.

The present invention is not limited to the embodiments described above. Furthermore, the above-described embodiments may be combined with each other.

The schematic perspective view which shows the dust removal apparatus which concerns on embodiment of this invention. The schematic diagram which looked at a mode that a holding stand carries out plane movement from the arrow Z1 direction of FIG. Schematic which shows components. Schematic which shows the structure etc. of a holding stand. Schematic which shows components. The schematic which looked at a mode that an air gun moved planely from the arrow Z1 direction of FIG. Schematic which shows the structure etc. of an air gun. Schematic which shows a mode that air is applied to components. The schematic flowchart figure which shows the operation example etc. of a dust removal apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Dust removal device, 12 ... Dust removal chamber, 18 ... Suction device, 22 ... Air gun, 26, 28, 32
, 34... Shaft, 30.

Claims (3)

A dust removing device having a dust removing chamber having a holding table for holding a processing target, an air jet device for blowing air to the processing target, and a negative pressure generating device for sucking dust from the dust removing chamber,
The negative pressure generator is configured to continue to operate for a predetermined time after completion of dust removal. The side wall of the dust removal chamber is made of a conductive material,
2. The dust removing device according to claim 1, wherein the side wall is charged during dust removal. A dust removing chamber having a holding table for holding a processing target, an air jet device for blowing air to the processing target, and a dust removing device having a negative pressure generating device for sucking dust from the dust removing chamber are shaped as the processing target. And a work posture setting step for setting the position and inclination of the holding table, and the position and air blowing direction of the air injection device,
A charging step in which the dust removing device charges a side wall of the dust removing chamber;
A suction start step in which the dust removing device operates the negative pressure generating device; and
An air blowing step in which the dust removing device blows air discontinuously on the processing object;
The dust removing device, an air blowing stop step for stopping the blowing of air to the processing object;
A suction stop step in which the dust removing device stops the operation of the negative pressure generating device after elapse of a prescribed time defined in advance;
The dust removing device, the charge releasing step for releasing the charging of the side wall;
A dust removal method comprising:

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