JP2007241096A - Optical path conversion device, method for manufacturing optical path conversion device and laser module - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical path conversion device that ensures improved condensing efficiency. <P>SOLUTION: The optical path conversion device 1A includes a first reflecting face group S10A and a second reflecting face group S20A, which divide laser beams A and B of a flat emission pattern in the lengthwise direction and rotate the corresponding division laser beams A and B by a predetermined angle around the optical axis and re-dispose them as laser beams A' and B'. The first reflecting face group S10A has incident reflecting faces S11A and S12A disposed without a gap between them, across each other at predetermined angle so that the laser beams A and B traveling in a first direction are reflected in a second or third direction different from the first direction. The second reflecting face group S20A has emission reflecting faces S21A and S22A disposed without a gap between them across each other at a predetermined angle so that the laser beam A reflected by the first reflecting face group S10A and traveling in the second direction and the laser beam B traveling in the third direction are reflected in a fourth direction. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an optical path conversion device, an optical path conversion, and an optical path conversion device for shaping a flat pattern of light emitted from two or more light emitting elements arranged in a longitudinal direction into a isotropic shape. The present invention relates to a device manufacturing method and a laser module including the optical path conversion device. Specifically, the flat light emitted from the light-emitting element is divided in the longitudinal direction without being lost by a plurality of reflections, and the divided lights are rearranged by being rotated by a predetermined angle around the optical axis. Thus, the light collection efficiency can be improved.

  In recent years, many high-power semiconductor lasers have been developed. High-power semiconductor lasers are mainly used for laser processing and medical purposes, and have a structure in which about 10 to 100 light emitting portions (active layer stripes) emitting laser light are linearly arranged. In other words, it has been realized that an output of several tens of watts can be obtained by CW (Continuous Wave).

  A semiconductor laser in which the light emitting portions are linearly continuous is called a bar laser. By emitting laser light from each light emitting portion, a wide range of laser light in a broken line shape corresponds to each light emitting portion from the end surface of the bar laser. It will be emitted.

  In order to realize a high-intensity semiconductor laser module using such a bar laser, it is necessary to focus light emitted from the bar laser in a narrow area. For example, the bar laser currently widely used has a width of about 10 mm, and from there, a plurality of laser beams with an extremely flat emission pattern having a width (horizontal component) of 100 μm to 300 μm and a vertical length (vertical component) of 1 μm or less. Emitted.

  As a technique for condensing such flattened laser light in the width direction and superimposing it in the vertical direction, the laser light is rotated by reflection using a prism or the like (for example, patent document) 1), a technique of superposing optical paths by changing the number of reflections for each laser beam (for example, see Patent Document 2), and a technique for dividing and rearranging laser light by two reflections (for example, see Patent Document 3). ), And a technique for superposing optical paths with different reflection directions for each laser beam (see, for example, Patent Document 4).

Japanese Patent No. 3071360 Japanese Patent No. 3589299 Japanese Patent No. 2991968 Japanese Patent No. 3098200

  However, as in the technique described in Patent Document 1, in the configuration in which the optical element that rotates the divided laser light by 90 degrees is arranged facing the light emitting unit, the area of the effective incident surface of the optical element is limited. .

  In order to guide the total luminous flux of the laser light emitted from each light emitting part of the bar laser to this effective incident surface, the width of the light emitted from each light emitting part, in particular in the Slow (horizontal) direction, must be less than the width of the effective incident surface. . When light beams emitted from a plurality of light emitting units and overlapping with each other in the Slow direction are incident, a component deviating from the effective incident surface of the element is generated, and a component deviating from the effective incident surface is lost. For this reason, there existed a problem that condensing efficiency fell.

  Further, the technique described in Patent Document 2 has a problem in that the propagation distance for each light beam becomes longer as the light beam has more reflection in the mirror, and the optical path length is different for each light beam.

  Furthermore, in the case of light beams that are emitted from a plurality of light emitting units and overlap each other in the Slow direction, the virtual light emission position is the light beam dividing position, and the mirror is inclined with respect to the optical axis, so the light emission positions are sequentially in the optical axis direction. It will shift to. Such a shift in the light emission position has a problem of preventing efficient light collection.

  Similarly, the techniques described in Patent Document 3 and Patent Document 4 also have a problem that the light collection efficiency is lowered due to the difference in the virtual light emission position and the propagation distance.

  The present invention has been made to solve such problems, and provides an optical path conversion device with improved light collection efficiency, a laser module including the optical path conversion device, and a method for manufacturing the optical path conversion device. Objective.

  In order to solve the above-described problems, the optical path conversion device of the present invention divides light that has a flat emission pattern that is long in one direction and that travels in parallel along the longitudinal direction, and that is divided into two or more. An optical path conversion device that rotates and rearranges each of the emitted light, reflects the incident light, divides the light of the flat emission pattern in the longitudinal direction, and divides each divided light into an optical axis The first reflecting surface group and the second reflecting surface group that are rearranged by being rotated by a predetermined angle about the first direction, and the first reflecting surface group transmits light traveling in the first direction in the first direction. A plurality of incident reflection surfaces that intersect with a predetermined angle that alternately reflects in the second direction or the third direction, which are two different directions, and are arranged without gaps, and the second reflection surface group includes: The light reflected by the first reflecting surface group and traveling in the second direction and the light traveling in the third direction Intersect at a predetermined angle for reflecting into the fourth direction is the same direction, characterized in that it comprises a plurality of exit reflecting surfaces without any gap sequence.

  In the optical path conversion device according to the present invention, light having a flat emission pattern traveling in the first direction is incident on the first reflecting surface group. In the first reflecting surface group, the intersection of a plurality of incident reflecting surfaces arranged at a predetermined angle and arranged without a gap serves as a boundary line, and the light traveling in the first direction is reflected on each incident reflecting surface. The light of the flattened emission pattern is divided in the longitudinal direction by being alternately reflected in the second direction or the third direction which are two different directions.

  Each light divided | segmented by the 1st reflective surface group injects into a 2nd reflective surface group. In the second reflecting surface group, the light that travels in the second direction and the light that travels in the third direction are alternately alternated on the plurality of outgoing reflecting surfaces that intersect at a predetermined angle and are arranged without gaps. Incident.

  In the second reflecting surface group, the light traveling in the second direction and the light traveling in the third direction are reflected and divided into the fourth direction, which is the same direction, and divided. The respective lights are rearranged by rotating around the optical axis in a direction intersecting the longitudinal direction of the flat pattern.

  The laser module according to the present invention divides light emitted from a light emitting element having two or more light emitting portions arranged in one direction along its longitudinal direction, and rotates the divided light. The optical path conversion device divides the light of the flat emission pattern in the longitudinal direction by reflecting the light emitted from the light emitting element, and divides the light. Each of the first reflection surface group and the second reflection surface group includes a first reflection surface group and a second reflection surface group that are rearranged by rotating each light by a predetermined angle about the optical axis, and the first reflection surface group travels in the first direction. A plurality of incident reflection surfaces arranged at a predetermined angle so as to alternately reflect light in the second direction or the third direction, which are two directions different from the first direction, and arranged without gaps; The second reflecting surface group is reflected by the first reflecting surface group and advances in the second direction. And a plurality of outgoing reflection surfaces arranged at a predetermined angle so as to reflect light traveling in the third direction and light traveling in the third direction at a predetermined angle. To do.

  In the laser module of the present invention, light having a flat emission pattern emitted from the light emitting element and traveling in the first direction is incident on the first reflecting surface group of the optical path conversion device. In the optical path conversion device, the light that travels in the first direction by intersecting lines of a plurality of incident reflection surfaces arranged at a predetermined angle and intersecting at a predetermined angle in the first reflection surface group is defined as a boundary line. The light of the flattened outgoing pattern is divided in the longitudinal direction by being alternately reflected in the second direction or the third direction which are two different directions on the incident reflection surface.

  In the optical path conversion device, each light divided by the first reflecting surface group enters the second reflecting surface group. In the second reflecting surface group, the light that travels in the second direction and the light that travels in the third direction are alternately alternated on the plurality of outgoing reflecting surfaces that intersect at a predetermined angle and are arranged without gaps. Incident.

  In the second reflecting surface group, the light traveling in the second direction and the light traveling in the third direction are reflected and divided into the fourth direction, which is the same direction, and divided. The respective lights are rearranged by rotating around the optical axis in the direction intersecting the longitudinal direction of the flat pattern, and emitted from the optical path conversion device.

  The manufacturing method of the optical path changing device according to the present invention is such that at least one V-shaped reflection surface forming groove is formed on one surface of a metal plate material, and the metal plate material having the reflection surface formation groove is formed as a reflection surface formation groove. The bonding surface is created by cutting at a predetermined angle with respect to one surface and perpendicular to the extending direction of the metal plate, and a pair of metal plates are bonded to each other with the reflecting surface forming grooves facing each other. The light traveling in the first direction is alternately reflected in the second direction or the third direction, which are two different directions from the first direction, in the reflection surface forming groove of one of the joined metal plates. A plurality of incident reflection surfaces that intersect at a predetermined angle to be reflected and are arranged without gaps are formed to create a first reflection surface group, and the second reflection surface forming groove of the other metal plate member joined together The light traveling in the direction and the light traveling in the third direction are reflected at a predetermined angle to reflect the same direction to the fourth direction. Pointing, characterized in that to create a second reflection surface group to form a plurality of exit is a reflecting surface without clearance arranged.

  In the method for manufacturing an optical path changing device of the present invention, at least one V-shaped reflecting surface forming groove is formed on one surface of a metal plate material. The metal plate material on which the reflecting surface forming groove is formed is orthogonal to the extending direction of the reflecting surface forming groove and is cut at a predetermined angle with respect to one surface to form a bonding surface.

  Then, the pair of metal plate members face each other with the reflecting surface forming grooves facing each other and are joined at the joining surface, so that the light traveling in the first direction is reflected by the reflecting surface forming grooves of one of the joined metal plate materials. The first reflection is formed by forming a plurality of incident reflection surfaces that intersect with a predetermined angle that alternately reflects in the second direction or the third direction, which are two directions different from the first direction, and are arranged without gaps. A group of faces is created.

  Further, in the reflection surface forming groove of the other metal plate member joined, the light traveling in the second direction and the light traveling in the third direction are reflected in a fourth direction which is the same direction. A plurality of outgoing reflection surfaces that intersect at an angle and are arranged without gaps are formed to form a second reflection surface group.

  According to the optical path changing device of the present invention, the plurality of incident reflection surfaces and the plurality of output reflection surfaces are arranged at predetermined angles so as to intersect each other without any gap, and the incident reflection surfaces and the output reflection surfaces on both sides sandwiching the intersection line are arranged. By dividing and rearranging the light by using reflection in the light, it is possible to divide and rearrange the light without a flat emission pattern, and the effective aperture can be almost 100%.

  Further, since the difference in distance from the divided position of each divided light to the condensing position can be reduced, it is possible to suppress the deviation of the light emission point of each divided and rotated light.

  Thereby, according to the laser module of this invention, the light of the flat pattern radiate | emitted from a light emitting element can be efficiently condensed by providing the optical path changing device mentioned above.

  In addition, according to the method for manufacturing an optical path changing device of the present invention, it is possible to prevent the intersecting line of each reflecting surface from becoming defective in shape, and thus it is possible to suppress the loss of light reflected by the reflecting surface.

  Embodiments of an optical path conversion device, a method for manufacturing the optical path conversion device, and a laser module equipped with the optical path conversion device according to the present invention will be described below with reference to the drawings.

<Example of Configuration of Optical Path Conversion Device of First Embodiment>
FIG. 1 is an overall perspective view showing an example of the optical path changing device according to the first embodiment. The optical path conversion device 1A according to the first embodiment uses light emitted from a light-emitting element (not shown) such as a bar laser, in which two or more light-emitting portions are aligned in the longitudinal direction, for each light-emitting portion. And a predetermined angle about the optical axis.

  Light is emitted from the bar laser in a flat pattern in one direction, and the optical path changing device 1A applies the flat light emitted from the bar laser in the longitudinal direction (width direction) along the one direction, for example, for each light emitting unit. And has an optical path conversion function for rotating the divided lights in the short direction (longitudinal direction).

  That is, the optical path changing device 1A reflects a laser beam, which is light emitted from a light emitting unit (not shown), a plurality of times, thereby dividing the flat laser beam bundle in the longitudinal direction and rotating each divided laser beam by a predetermined angle. The first reflecting surface group S10A and the second reflecting surface group S20A are rearranged.

  Here, in the optical path conversion device 1A shown in FIG. 1, the optical path conversion for the laser beam A and the laser beam B emitted from two adjacent light emitting units will be described as one set.

  In the optical path conversion device 1A, an outline of functions realized by the first reflecting surface group S10A and the second reflecting surface group S20A will be described. The first reflecting surface group S10A includes two laser beams A that are incident adjacent to each other. , B are divided by reflecting in two different directions.

  Further, the first reflecting surface group S10A and the second reflecting surface group S20A are inclined at a predetermined angle with respect to the incident laser beams A and B, so that the reflected laser beams A and B are respectively reflected. Repositioned by rotating about 90 degrees around the optical axis.

  Next, details of the configuration of the optical path conversion device 1A will be described. Here, in the following description, the direction is represented by a vector. As a notation method, a vector having three components is shown as (x, y, z). In this example, the x axis is the longitudinal direction of the emission patterns of the laser beams A and B, the y axis is the short direction of the laser beams A and B, and the z axis is the emission direction of the laser beams A and B. For example, the + x direction is represented as the (1, 0, 0) direction, the + y direction is represented as the (0, 1, 0) direction, and the + z direction is represented as the (0, 0, 1) direction.

  The optical path changing device 1A has four inner surfaces of a quadrangular pyramid shape with a quadrilateral 101-102-103-104 having a substantially square shape with the point 101, the point 102, the point 103, and the point 104 as vertices and with the point 105 as a vertex. The first reflecting surface group S10A is configured by one of the two adjacent surfaces, and the second reflecting surface group S20A is configured by the other two surfaces.

  The first reflecting surface group S10A includes an incident reflecting surface S11A and an incident reflecting surface S12A, which are two reflecting surfaces arranged without a gap. The incident reflection surface S11A and the incident reflection surface S12A intersect at a predetermined angle with the sides 101-105 being straight lines as intersections. Further, the projection of the side 101-105, which is the intersection line of the incident reflection surface S11A and the incident reflection surface S12A, is substantially parallel to the short direction of the laser beams A and B incident on the first reflection surface group S10A.

  As a result, in the first reflecting surface group S10A, the incident reflecting surface S11A and the incident reflecting surface S12A are symmetrical with respect to the side 101-105 that is an intersecting line, and a plurality of the reflecting surfaces included in the first reflecting surface group S10A. The incident reflection surfaces S11A and S12A, which are reflection surfaces, are arranged at substantially equal distances from the light source.

  The incident reflection surface S11A is inclined at an angle that reflects the laser beam A traveling in the (0, 1, 0) direction, which is the first direction, in the (1, 0, 1) direction, which is the second direction. The incident reflection surface S12A is a third direction that intersects the second direction with the laser beam B traveling in the (0, 1, 0) direction which is the first direction in parallel with the laser beam A. It tilts at an angle that reflects in the (-1, 0, 1) direction.

  With the above configuration, the optical path conversion device 1A divides the laser beams A and B traveling in the (0, 1, 0) direction, which is the first direction, at the sides 101-105 in the first reflecting surface group S10A. To do.

  That is, in the optical path conversion device 1A, the laser beam A incident on the first reflecting surface group S10A is reflected in the (1,0,1) direction, which is the second direction, by the incident reflecting surface S11A, and the first reflection is performed. The laser beam B incident on the surface group S10A is reflected in the (−1, 0, 1) direction, which is the third direction, by the incident reflection surface S12A, so that the laser beam A that travels in the first direction in parallel. , B are reflected and divided in two different directions.

  The second reflecting surface group S20A includes an exit reflecting surface S21A and an exit reflecting surface S22A, which are two reflecting surfaces arranged without a gap. The outgoing reflection surface S21A and the outgoing reflection surface S22A have both sides at a predetermined angle with the side 103-105, which is a straight line that intersects the side 101-105 that is the intersection line of the incident reflection surfaces S11A and S12A, at a predetermined angle. Intersect.

  Further, in the second reflecting surface group S20A and the first reflecting surface group S10A, the exit reflecting surface S21A and the incident reflecting surface S11A intersect at a predetermined angle with the side 102-105 as an intersection line, and the exit reflecting surface S22A. The incident reflection surface S12A intersects at a predetermined angle with the side 104-105 as an intersection line.

  Here, the projection of the side 103-105, which is the intersection line of the outgoing reflection surface S21A and the outgoing reflection surface S22A, is performed by rearranging the laser beams A and B incident on the first reflection surface group S10A. It is substantially parallel to the longitudinal direction of the laser beams A ′ and B ′ emitted from the surface group S20A.

  Further, the projection of the side 102-105 that is the intersection line of the outgoing reflection surface S21A and the incident reflection surface S11A and the projection of the side 104-105 that is the intersection line of the outgoing reflection surface S22A and the incident reflection surface S12A are the first reflection surface. It is substantially parallel to the longitudinal direction of the laser beams A and B incident on the group S10A and the short direction of the laser beams A ′ and B ′ emitted from the second reflecting surface group S20A.

  As a result, in the second reflecting surface group S20A, the exit reflecting surface S21A and the exit reflecting surface S22A are symmetrical with respect to the side 103-105 that is an intersection line. Further, the outgoing reflection surface S22A of the second reflection surface group S20A is opposed to the incident reflection surface S11A of the first reflection surface group S10A arranged on a diagonal line, and is reflected by the incident reflection surface S11A in the second direction. The laser beam A that travels is incident. Furthermore, the outgoing reflection surface S21A of the second reflection surface group S20A is opposed to the incident reflection surface S12A of the first reflection surface group S10A arranged on a diagonal line, and is reflected by the incident reflection surface S12A to be in the third direction. The laser beam B that travels is incident. Therefore, the output reflection surfaces S21A and S22A, which are a plurality of reflection surfaces included in the second reflection surface group S20A, are arranged at substantially the same distance from the light source.

  The exit reflecting surface S22A reflects the laser beam A traveling in the (1, 0, 1) direction that is the second direction in the (0, -1, 0) direction that is the fourth direction. The outgoing reflection surface S21A is inclined and reflects the laser beam B traveling in the (−1, 0, 1) direction that is the third direction in the (0, −1, 0) direction that is the fourth direction. Tilt at an angle.

  With the above configuration, the optical path conversion device 1A is divided by the first reflecting surface group S10A and travels in the second direction (1, 0, 1), and the third direction. The laser beam B traveling in the (-1, 0, 1) direction is rearranged along the (0, -1, 0) direction which is the same fourth direction in the second reflecting surface group S20A.

  That is, in the optical path conversion device 1A, the laser beam A that is reflected by the incident reflection surface S11A of the first reflection surface group S10A and travels in the (1, 0, 1) direction, which is the second direction, The light is reflected in the (0, -1, 0) direction, which is the fourth direction, by the outgoing reflection surface S22A of the reflection surface group S20A.

  The laser beam B that is reflected by the incident reflection surface S12A of the first reflection surface group S10A and travels in the (−1, 0, 1) direction, which is the third direction, is reflected by the second reflection surface group S20A. The light is reflected in the (0, -1, 0) direction, which is the fourth direction, on the outgoing reflection surface S21A.

  As a result, the laser beam A traveling in the second direction, which is two different directions, and the laser beam B traveling in the third direction are rotated by a predetermined angle, respectively, and are aligned in the same fourth direction. It is rearranged into the beam A ′ and the laser beam B ′, and is emitted from the second reflecting surface group S20A.

  In the optical path changing device 1 </ b> A, the laser beam enters and exits through the reflecting prism 300. That is, the reflection prism 300 reflects the laser beams A and B emitted from the light emitting section and traveling in the (0, 0, 1) direction in the (0, 1, 0) direction and enters the optical path conversion device 1A. In addition, the laser beam A ′, B ′ emitted from the optical path changing device 1A has a function of reflecting again in the (0, 0, 1) direction.

  In the optical path conversion device 1A, the traveling direction of the incident laser beam and the traveling direction of the emitted laser beam are opposite and almost parallel. Therefore, by combining the optical path conversion device 1A and the reflecting prism 300, the incident laser beam The traveling direction of the laser beam and the traveling direction of the emitted laser beam are set to be in the same direction and substantially parallel so that the light emission form is suitable for use.

  FIG. 2 is an explanatory diagram showing details of the optical path conversion device. Next, incident reflection surfaces S11A and S12A constituting the first reflection surface group S10A, and emission reflection surfaces S21A and S21A constituting the second reflection surface group S20A, respectively. The geometric arrangement of S22A will be described.

  The incident reflective surfaces S11A and S12A and the outgoing reflective surfaces S21A and S22A share the point 105, and the direction of the normal vector of the incident reflective surface S11A is (1, −√2, 1), and the incident reflective surface S12A. The direction of the normal vector is (−1, −√2, 1). The direction of the normal vector of the outgoing reflection surface S21A is (1, -√2, -1), and the direction of the normal vector of the outgoing reflection surface S22A is (-1, -√2, -1).

  That is, the incident reflective surface S11A and the outgoing reflective surface S22A, and the incoming reflective surface S12A and the outgoing reflective surface S21A are arranged orthogonal to each other.

  That is, when the optical path changing device 1A is viewed from the (1, 0, -1) direction, the triangle 102-105-103 is a right-angled isosceles triangle as shown in FIG. The outgoing reflection surface S22A is perpendicular to the point 105.

  Further, when the optical path changing device 1A is viewed from the (1, 0, 1) direction, the triangle 101-105-102 is a right-angled isosceles triangle as shown in FIG. The reflection surface S <b> 21 </ b> A is orthogonal at the point 105.

<Operation Example of Optical Path Conversion Device of First Embodiment>
Next, an example of the operation of the optical path conversion device 1A according to the first embodiment will be described with reference to FIGS.

  The laser beam A and the laser beam B incident on the optical path changing device 1A are emitted from each light emitting portion of a light emitting element (not shown) and travel substantially parallel to the (0, 0, 1) direction.

  The laser beams A and B each have an emission pattern flattened in one direction, the longitudinal direction is along the (1, 0, 0) direction, and the short direction is along the (0, 1, 0) direction. The incident aperture 400 is defined as a rectangular range having points 401, 403, 406, and 404 at which the laser beam A and the laser beam B traveling in parallel in the longitudinal direction pass.

  In the incident aperture 400, two sides 401-404 and 403-406, which are two sides in the short direction, are parallel to the short direction of the laser beams A and B, that is, the (0, 1, 0) direction. Two sides 401-403 and 404-406 of the direction are parallel to the longitudinal direction of the laser beams A and B, that is, the (1,0,0) direction.

  The laser beam A passes through the first incident aperture 400 </ b> A having a substantially square range with the points 401, 402, 405, and 404 as vertices in the incident aperture 400. The laser beam B is adjacent to the first incident aperture 400A in the incident aperture 400, and is a second incident aperture 400B having a substantially square range with the points 402, 403, 406, and 405 as vertices. Pass through.

  A laser beam A and a laser beam B emitted from each light emitting portion of a light emitting element (not shown) and traveling in the (0, 0, 1) direction are (0, 1, 0) on the reflecting surface S31 of the reflecting prism 300, respectively. Reflect in the direction.

  A projection of the incident aperture 400 on the reflecting surface S31 of the reflecting prism 300 is shown as an incident aperture projection 451. In the reflecting prism 300, the projection of the sides 401-403, which are the sides in the longitudinal direction of the incident aperture 400, onto the reflecting surface S31 is the sides 301-302. As a result, the laser beams A and B passing through the inside of the incident aperture 400 including the points 401, 403, 406, and 404 are reflected by the reflecting surface S31 without being lost.

  The laser beams A and B which are reflected by the reflecting surface S31 of the reflecting prism 300 and travel in the first direction (0, 1, 0) are incident on the first reflecting surface group S10A of the optical path changing device 1A. To do.

  A projection of the incident aperture 400 on the bottom surface of the optical path changing device 1A having points 101, 102, 103, and 104, which are surfaces on which light enters and exits in the optical path changing device 1A, is shown as an incident aperture projection 452.

  In the first reflecting surface group S10A of the optical path changing device 1A, sides 402-405 serving as a boundary between the first incident opening 400A and the second incident opening 400B are intersecting lines of the incident reflecting surface S11A and the incident reflecting surface S12A. Is projected onto the side 101-105. This indicates that the division of the laser beam A and the laser beam B is performed substantially parallel to the short direction of the emission pattern.

  Further, the sides 401-402 of the first incident aperture 400A and the sides 402-403 of the second incident aperture 400B are projected onto the sides 102-105 and 105-104 of the optical path conversion device 1A, respectively.

  As a result, the laser beam A passing through the inside of the first incident aperture 400A composed of the points 401, 402, 405, and 404 is incident on the incident reflection surface S11A of the first reflection surface group S10A without being lost. Is reflected in the (1, 0, 1) direction. Further, the laser beam B passing through the inside of the second incident aperture 400B composed of the points 402, 403, 406, and 405 is the third reflecting surface S12A of the first reflecting surface group S10A without being lost. Reflects in the (-1, 0, 1) direction.

  Accordingly, the laser beam A and the laser beam B traveling in parallel in the (0, 1, 0) direction which is the first direction are the first reflecting surface group S10A of the optical path conversion device 1A in the second direction. The light is reflected in the (1, 0, 1) direction and the (−1, 0, 1) direction, which is the third direction, without being lost, and is divided into a laser beam A and a laser beam B.

  The laser beam A that is reflected and split by the incident reflecting surface S11A of the first reflecting surface group S10A travels in the (1,0,1) direction, which is the second direction, so that the second reflecting surface group. The light enters the outgoing reflection surface S22A of S20A.

  In the second reflecting surface group S20A of the optical path changing device 1A, the side 102-105 of the incident reflecting surface S11A projects onto the side 103-105 of the outgoing reflecting surface S22A, and the side 101-105 of the incident reflecting surface S11A is outgoing reflected. Project to the side 104-105 of the surface S22A.

  As a result, the laser beam A that is reflected by the incident reflection surface S11A of the first reflection surface group S10A and travels in the second direction (1, 0, 1) is emitted from the second reflection surface group S20A. The reflection surface S22A reflects in the (0, -1, 0) direction, which is the fourth direction, without being lost.

  Similarly, the laser beam B split by being reflected by the incident reflecting surface S12A of the first reflecting surface group S10A travels in the (−1, 0, 1) direction, which is the third direction, so that the second Is incident on the exit reflecting surface S21A of the reflecting surface group S20A.

  In the second reflecting surface group S20A of the optical path conversion device 1A, the side 104-105 of the incident reflecting surface S12A is projected onto the side 103-105 of the outgoing reflecting surface S21A, and the side 101-105 of the incident reflecting surface S12A is outgoing reflected. Projecting onto the side 102-105 of the surface S21A.

  As a result, the laser beam B, which is reflected by the incident reflection surface S12A of the first reflection surface group S10A and travels in the (−1, 0, 1) direction, which is the third direction, The outgoing reflection surface S21A reflects in the (0, -1, 0) direction, which is the fourth direction, without being lost.

  A projection of the incident aperture 400 after rearrangement on the bottom surface of the optical path changing device 1A where light enters and exits in the optical path changing device 1A is shown as an incident aperture projection 453. The laser beam A traveling in the (1, 0, 1) direction that is the second direction and the laser beam B traveling in the (-1, 0, 1) direction that is the third direction are The second reflecting surface group S20A is reflected without being missing in the same fourth direction (0, -1, 0), and is regenerated as laser beams A 'and B' rotated by a predetermined angle. Be placed.

  The laser beam A ′ that is reflected by the outgoing reflection surface S22A of the second reflective surface group S20A and travels in the (0, −1, 0) direction, and is reflected by the outgoing reflective surface S21A of the second reflective surface group S20A. The laser beam B ′ traveling in the (0, −1, 0) direction, which is the same direction as the traveling direction of the laser beam A ′, is (0, 0, 1) direction on the reflecting surface S32 of the reflecting prism 300, respectively. Reflect on.

  The projection of the incident aperture 400 after rearrangement on the reflecting surface S32 of the reflecting prism 300 is shown as an incident aperture projection 454. In the reflecting prism 300, the sides 102-105 of the outgoing reflecting surface S21A and the sides 105-104 of the outgoing reflecting surface S22A are projected onto the sides 301-302 of the reflecting surface S32.

  As a result, the laser beam A ′ reflected and rearranged by the output reflection surface S22A of the second reflection surface group S20A and the laser beam B ′ rearranged after reflection by the output reflection surface S21A are reflected without being lost. The light enters the reflecting surface S32 of the prism 300 and is reflected by the reflecting surface S32 without being chipped.

  A rectangular range having points 501, 503, 506, and 504 through which the laser beam A ′ and the laser beam B ′ reflected by the reflecting surface S 32 of the reflecting prism 300 pass is defined as an emission aperture 500.

  The laser beam A ′ passes through the first emission aperture 500 </ b> A having a substantially square range with the points 502, 503, 506, and 505 as vertices. The laser beam B ′ is adjacent to the first exit aperture 500A in the exit aperture 500, and is a second exit aperture having a substantially square range with points 501, 502, 505, and 504 as vertices. It passes through 500B.

  The rectangular exit aperture 500 constituted by the points 501, 503, 506, and 504 is divided without missing the rectangular entrance aperture 400 constituted by the points 401, 403, 406, and 404. The incident aperture 400 and the exit aperture 500 have the same shape.

  Accordingly, the exit aperture 500 through which the laser beams A ′ and B ′ emitted from the optical path conversion device 1A pass corresponds to the entrance aperture 400 through which the laser beams A and B incident on the optical path conversion device 1A pass and is not missing. 100% effective opening can be almost realized.

  In other words, as described above, the propagation path is not hindered on each reflection surface of the optical path changing device 1A and further on the reflection prism 300 due to the geometrical arrangement of each reflection surface, and the laser beam passing through the incident aperture 400. A and B are propagated in the exit aperture 500 by substantially reflecting all of them with almost no loss on each reflecting surface.

  Note that the slight loss is caused by the sides 101-105, 102-105, and 103-105 that are intersections of the incident reflection surfaces S11A and S12A of the optical path conversion device 1A and the exit reflection surfaces S21A and S22A. The shape of the sides 104-105, or the shape of the sides 301-302 that are the intersection of the reflecting surfaces S31 and S32 of the reflecting prism 300, and the laser beams A and B collimated by the preceding optical system (not shown) are included. It is the divergence that is the spread.

  Here, in the case where the optical path changing device 1A is configured in a quadrangular pyramid shape with the quadrangle 101-102-103-104 formed of a substantially square as the bottom and the point 105 as the apex as described above, the bottom of the quadrangular pyramid is configured. The sides 101-102 and 102-103 are configured to have substantially the same length, and the sides 101-102 and 102-103 are side 401-404 of the incident aperture 400 in order to reflect the laser beam without missing. The length is 2√2 times or more.

  Now, the incident reflection surfaces S11A and S12A constituting the first reflection surface group S10A of the optical path conversion device 1A and the exit reflection surfaces S21A and S22A constituting the second reflection surface group S20A are incident laser beams A and B, respectively. Is inclined by rotating at a predetermined angle.

  Thereby, the laser beam A enters the optical path conversion device 1A and is reflected by the incident reflection surface S11A of the first reflection surface group S10A and the emission reflection surface S22A of the second reflection surface group S20A. The laser beam A ′ is rotated by −90 degrees clockwise with the axis as a rotation axis, and the longitudinal direction and the lateral direction are switched.

  Similarly, the laser beam B is incident on the optical path conversion device 1A, and is reflected by the incident reflection surface S12A of the first reflection surface group S10A and the emission reflection surface S21A of the second reflection surface group S20A. The laser beam B ′ is rotated 90 degrees clockwise with the axis as a rotation axis, and the longitudinal direction and the transverse direction are switched.

  Before the conversion, the laser beam A and the laser beam B which are sequentially arranged in the (1, 0, 0) direction along the longitudinal direction of the emission pattern are the laser beams after the optical path conversion by the optical path conversion device 1A. The arrangement is changed in the order of B ′ and laser beam A ′, and rearranged in the short direction.

  As described above, in the optical path conversion device 1A, the laser beams A are made up of the incident reflection surfaces S11A and S12A constituting the first reflection surface group S10A and the exit reflection surfaces S21A and S22A constituting the second reflection surface group S20A. By reflecting B once, each of the divided laser beams A and B rotates approximately 90 degrees about the optical axis.

  Therefore, a flat laser beam emitted from a light emitting element in which a plurality of light emitting portions are arranged in the longitudinal direction is divided, and the flat direction can be converted for each divided light. Further, in the optical path conversion device 1A, in the first reflecting surface group S10A that reflects and divides the laser beams traveling in parallel in two different directions, the directions of reflection are alternately changed. Without interference, the optical path lengths are almost equal, and the deviation of the light emitting point can be suppressed.

<Example of Configuration of Optical Path Conversion Device of Second Embodiment>
FIG. 3 is an overall perspective view showing an example of the optical path changing device of the second embodiment. Since the optical path conversion device 1B according to the second embodiment corresponds to a light emitting element in which a large number of light emitting sections that are long in one direction are arrayed along the longitudinal direction, the width in the x-axis direction along the arrangement of the light emitting sections. Is minimized without obstructing the entrance and exit apertures.

  Here, in the optical path conversion device 1B shown in FIG. 3, the optical path conversion for the laser beam A and the laser beam B emitted from two adjacent light emitting units will be described as one set. In the description of FIG. 3 as well, the direction is expressed as a vector in the same manner as the description of FIG.

  The optical path conversion device 1B divides a flat laser beam bundle in the longitudinal direction by reflecting the laser beams A and B emitted from a light emitting unit (not shown) and traveling in parallel plural times, and each divided laser beam A , B are rotated by a predetermined angle to be rearranged, and a first reflecting surface group S10B and a second reflecting surface group S20B are provided.

  The first reflecting surface group S10B includes an incident reflecting surface S11B and an incident reflecting surface S12B, which are two reflecting surfaces arranged without a gap. The incident reflection surface S11B and the incident reflection surface S12B intersect at a predetermined angle with the sides 101-105 being straight lines as intersections. Further, the projection of the side 101-105, which is the intersection line of the incident reflection surface S11B and the incident reflection surface S12B, is substantially parallel to the short direction of the laser beams A and B incident on the first reflection surface group S10B.

  Further, the incident reflection surface S11B has a shape in which the side facing the side 101-105, which is an intersection line with the incident reflection surface S12B, is divided by sides 106-107 parallel to the side 101-105, and the incident reflection surface S12B is The side facing the side 101-105 that is the line of intersection with the incident reflective surface S11B is shaped to be separated by a side 109-110 parallel to the side 101-105, so that the width of the first reflective surface group S10B is The shape is narrower than the width of the first reflecting surface group S10A in the optical path conversion device 1A of the first embodiment.

  As a result, in the first reflecting surface group S10B, the incident reflecting surface S11B and the incident reflecting surface S12B are symmetrical with respect to the side 101-105 that is an intersecting line, and a plurality of the reflecting surfaces included in the first reflecting surface group S10B. The incident reflection surfaces S11B and S12B, which are reflection surfaces, are arranged at substantially equal distances from the light source.

  The incident reflection surface S11B is inclined at an angle that reflects the laser beam A traveling in the (0, 1, 0) direction, which is the first direction, in the (1, 0, 1) direction, which is the second direction. The incident reflection surface S12B is a third direction that intersects the second direction with the laser beam B traveling in the (0, 1, 0) direction which is the first direction in parallel with the laser beam A. It tilts at an angle that reflects in the (-1, 0, 1) direction.

  With the above configuration, the optical path conversion device 1B divides the laser beams A and B traveling in the (0, 1, 0) direction, which is the first direction, at the sides 101-105 in the first reflecting surface group S10B. To do.

  That is, in the optical path conversion device 1B, the laser beam A incident on the first reflecting surface group S10B is reflected by the incident reflecting surface S11B in the (1,0,1) direction, which is the second direction, and the first reflection. The laser beam B incident on the surface group S10B is reflected in the (−1, 0, 1) direction, which is the third direction, by the incident reflection surface S12B, so that the laser beam A traveling in the first direction in parallel is transmitted. , B are reflected and divided in two different directions.

  The second reflecting surface group S20B includes an exit reflecting surface S21B and an exit reflecting surface S22B, which are two reflecting surfaces arranged without a gap. The outgoing reflection surface S21B and the outgoing reflection surface S22B have both sides at a predetermined angle with the side 103-105, which is a straight line that intersects the side 101-105 that is an intersection line of the incident reflection surfaces S11B and S12B, at a predetermined angle. Intersect.

  In addition, the second reflection surface group S20B and the first reflection surface group S10B are configured such that the emission reflection surface S21B and the incident reflection surface S11B intersect at a predetermined angle with the side 107-105 as an intersection line, and the emission reflection surface S22B. The incident reflection surface S12B intersects at a predetermined angle with the side 110-105 as an intersection line.

  The exit reflection surface S21B has a shape in which the side facing the side 103-105, which is a line of intersection with the exit reflection surface S22B, is divided by sides 108-107 parallel to the side 103-105, and the exit reflection surface S22B is The side facing the side 103-105, which is the line of intersection with the outgoing reflection surface S21B, has a shape delimited by sides 111-110 parallel to the side 103-105, and the width of the second reflection surface group S20B is The shape is narrower than the width of the second reflecting surface group S20A in the optical path conversion device 1A of the first embodiment.

  Here, the projection of the side 103-105, which is the intersection line of the outgoing reflection surface S21B and the outgoing reflection surface S22B, is performed by rearranging the laser beams A and B incident on the first reflection surface group S10B and performing the second reflection. It is substantially parallel to the longitudinal direction of the laser beams A ′ and B ′ emitted from the surface group S20B.

  Further, the projection of the side 107-105 that is the intersection line of the outgoing reflection surface S21B and the incident reflection surface S11B and the projection of the side 110-105 that is the intersection line of the outgoing reflection surface S22B and the incident reflection surface S12B are the first reflection surface. It is substantially parallel to the longitudinal direction of the laser beams A and B incident on the group S10B and the short direction of the laser beams A ′ and B ′ emitted from the second reflecting surface group S20B.

  As a result, in the second reflecting surface group S20B, the exit reflecting surface S21B and the exit reflecting surface S22B are symmetrical with respect to the side 103-105 that is an intersection line. In addition, the outgoing reflection surface S22B of the second reflection surface group S20B is opposed to the incident reflection surface S11B of the first reflection surface group S10B arranged on a diagonal line, and is reflected by the incident reflection surface S11B in the second direction. The laser beam A that travels is incident. Furthermore, the outgoing reflection surface S21B of the second reflection surface group S20B is opposed to the incident reflection surface S12B of the first reflection surface group S10B arranged on the diagonal line, and is reflected by the incident reflection surface S12B to be in the third direction. The laser beam B that travels is incident. Therefore, the output reflection surfaces S21B and S22B, which are a plurality of reflection surfaces included in the second reflection surface group S20B, are arranged at substantially the same distance from the light source.

  The outgoing reflection surface S22B is orthogonal to the incident reflection surface S11B, and the laser beam A traveling in the (1,0,1) direction, which is the second direction, is in the fourth direction (0,- The laser beam B is inclined at an angle reflecting in the (1, 0) direction, and the outgoing reflection surface S21B is orthogonal to the incident reflection surface S12B and travels in the (-1, 0, 1) direction which is the third direction. Is inclined at an angle reflecting in the (0, -1, 0) direction which is the fourth direction.

  With the above configuration, the optical path changing device 1B is divided by the first reflecting surface group S10B and travels in the second direction (1, 0, 1) and the third direction. The laser beam B traveling in the (-1, 0, 1) direction is rearranged along the (0, -1, 0) direction which is the same fourth direction in the second reflecting surface group S20B.

  That is, in the optical path conversion device 1B, the laser beam A that is reflected by the incident reflection surface S11B of the first reflection surface group S10B and travels in the (1, 0, 1) direction, which is the second direction, The light is reflected in the (0, -1, 0) direction which is the fourth direction by the outgoing reflection surface S22B of the reflection surface group S20B.

  Further, the laser beam B that is reflected by the incident reflection surface S12B of the first reflection surface group S10B and travels in the (−1, 0, 1) direction, which is the third direction, is reflected by the second reflection surface group S20B. Reflected in the (0, −1, 0) direction, which is the fourth direction, on the exit reflecting surface S21B.

  As a result, the laser beam A traveling in the second direction, which is two different directions, and the laser beam B traveling in the third direction are rotated by a predetermined angle, respectively, and are aligned in the same fourth direction. It is rearranged into the beam A ′ and the laser beam B ′, and is emitted from the second reflecting surface group S20B.

  Also in the optical path conversion device 1B, the laser beam enters and exits through the reflecting prism 300. That is, the reflecting prism 300 reflects the laser beams A and B emitted from the light emitting unit and traveling in the (0, 0, 1) direction in the (0, 1, 0) direction and enters the optical path conversion device 1B. In addition, the laser beam A ′, B ′ emitted from the optical path changing device 1B has a function of reflecting again in the (0, 0, 1) direction.

  Also in the optical path conversion device 1B, the traveling direction of the incident laser beam and the traveling direction of the emitted laser beam are opposite and almost parallel. Therefore, by combining the optical path conversion device 1B and the reflecting prism 300, the incident laser beam The traveling direction of the laser beam and the traveling direction of the emitted laser beam are set to be in the same direction and substantially parallel so that the light emission form is suitable for use.

<Operation Example of Optical Path Conversion Device of Second Embodiment>
Next, an example of the operation of the optical path conversion device 1B according to the second embodiment will be described with reference to FIG.

  The laser beam A and the laser beam B incident on the optical path changing device 1B are emitted from the light emitting portions of the light emitting element (not shown) and travel substantially parallel to the (0, 0, 1) direction.

  The laser beams A and B each have an emission pattern flattened in one direction, the longitudinal direction is along the (1, 0, 0) direction, and the short direction is along the (0, 1, 0) direction. The laser beam A and the laser beam B, which travel in parallel in the longitudinal direction, pass through the entrance aperture 400 formed of a rectangle with the points 401, 403, 406, and 404 as vertices.

  In the incident aperture 400, two sides 401-404 and 403-406, which are two sides in the short direction, are parallel to the short direction of the laser beams A and B, that is, the (0, 1, 0) direction. Two sides 401-403 and 404-406 of the direction are parallel to the longitudinal direction of the laser beams A and B, that is, the (1,0,0) direction.

  The laser beam A passes through the first incident aperture 400 </ b> A having a substantially square range with the points 401, 402, 405, and 404 as vertices in the incident aperture 400. The laser beam B is adjacent to the first incident aperture 400A in the incident aperture 400, and is a second incident aperture 400B having a substantially square range with the points 402, 403, 406, and 405 as vertices. Pass through.

  A laser beam A and a laser beam B emitted from each light emitting portion of a light emitting element (not shown) and traveling in the (0, 0, 1) direction are (0, 1, 0) on the reflecting surface S31 of the reflecting prism 300, respectively. Reflect in the direction.

  A projection of the incident aperture 400 on the reflecting surface S31 of the reflecting prism 300 is shown as an incident aperture projection 451. In the reflecting prism 300, the projection of the sides 401-403, which are the sides in the longitudinal direction of the incident aperture 400, onto the reflecting surface S31 is the sides 301-302. As a result, the laser beams A and B passing through the inside of the incident aperture 400 including the points 401, 403, 406, and 404 are reflected by the reflecting surface S31 without being lost.

  The laser beams A and B reflected by the reflecting surface S31 of the reflecting prism 300 and traveling in the first direction (0, 1, 0) are incident on the first reflecting surface group S10B of the optical path conversion device 1B. To do.

  The projection of the incident aperture 400 on the bottom surface of the optical path changing device 1B with the points 101, 106, 108, 103, 111, and 109, which are surfaces on which light enters and exits in the optical path changing device 1B, as the apex. Shown as projection 452.

  In the first reflecting surface group S10B of the optical path changing device 1B, sides 402-405 serving as a boundary between the first incident opening 400A and the second incident opening 400B are intersecting lines of the incident reflecting surface S11B and the incident reflecting surface S12B. Is projected onto the side 101-105. This indicates that the division of the laser beam A and the laser beam B is performed substantially parallel to the short direction of the emission pattern.

  Also, the sides 401-402 of the first incident aperture 400A and the sides 402-403 of the second incident aperture 400B are projected onto the sides 107-105 and 105-110 of the optical path conversion device 1B, respectively.

  Further, the sides 401 to 404 of the first incident aperture 400A are projected onto the sides 107 to 106 of the optical path changing device 1B, and the sides 403 to 406 of the second incident aperture 400B are projected to the sides 110 to 109 of the optical path changing device 1B. Is projected on.

  As a result, the laser beam A passing through the inside of the first incident aperture 400A composed of the points 401, 402, 405, 404 is incident on the incident reflection surface S11B of the first reflection surface group S10B without being lost. Is reflected in the (1, 0, 1) direction. Further, the laser beam B passing through the second incident aperture 400B composed of the points 402, 403, 406, and 405 is incident on the incident reflection surface S12B of the first reflection surface group S10B without being lost. Reflects in the (-1, 0, 1) direction.

  Accordingly, the laser beam A and the laser beam B traveling in parallel in the first direction (0, 1, 0) are the first reflecting surface group S10B of the optical path conversion device 1B in the second direction. The light is reflected in the (1, 0, 1) direction and the (−1, 0, 1) direction, which is the third direction, without being lost, and is divided into a laser beam A and a laser beam B.

  The laser beam A which is reflected and divided by the incident reflection surface S11B of the first reflection surface group S10B travels in the (1, 0, 1) direction which is the second direction, so that the second reflection surface group. The light enters the outgoing reflection surface S22B of S20B.

  In the second reflecting surface group S20B of the optical path changing device 1B, the side 404-405 of the first incident opening 400A is projected onto the side 111-110 of the outgoing reflecting surface S22B.

  As a result, the laser beam A that is reflected by the incident reflection surface S11B of the first reflection surface group S10B and travels in the (1,0,1) direction, which is the second direction, is emitted from the second reflection surface group S20B. The reflection surface S22B reflects in the (0, -1, 0) direction, which is the fourth direction, without being lost.

  Similarly, the laser beam B divided by being reflected by the incident reflecting surface S12B of the first reflecting surface group S10B travels in the (−1, 0, 1) direction, which is the third direction, so that the second Is incident on the exit reflecting surface S21B of the reflecting surface group S20B.

  In the second reflecting surface group S20B of the optical path changing device 1B, the sides 405 to 406 of the second incident opening 400B are projected onto the sides 107 to 108 of the outgoing reflecting surface S21B.

  As a result, the laser beam B that is reflected by the incident reflection surface S12B of the first reflection surface group S10B and travels in the (−1, 0, 1) direction, which is the third direction, is reflected by the second reflection surface group S20B. The outgoing reflection surface S21B reflects in the (0, -1, 0) direction, which is the fourth direction, without being lost.

  A projection of the incident aperture 400 after rearrangement on the bottom surface of the optical path changing device 1B where light enters and exits in the optical path changing device 1B is shown as an incident aperture projection 453. The laser beam A traveling in the (1, 0, 1) direction that is the second direction and the laser beam B traveling in the (-1, 0, 1) direction that is the third direction are The second reflecting surface group S20B is reflected without being missing in the same fourth direction (0, -1, 0), and is regenerated as laser beams A 'and B' rotated by a predetermined angle. Be placed.

  The laser beam A ′ that is reflected by the output reflection surface S22B of the second reflection surface group S20B and travels in the (0, −1, 0) direction and is reflected by the output reflection surface S21B of the second reflection surface group S20B. The laser beam B ′ traveling in the (0, −1, 0) direction, which is the same direction as the traveling direction of the laser beam A ′, is (0, 0, 1) direction on the reflecting surface S32 of the reflecting prism 300, respectively. Reflect on.

  The projection of the incident aperture 400 after rearrangement on the reflecting surface S32 of the reflecting prism 300 is shown as an incident aperture projection 454. In the reflecting prism 300, the sides 107-105 of the outgoing reflecting surface S21B and the sides 105-110 of the outgoing reflecting surface S22B are projected onto the sides 301-302 of the reflecting surface S32.

  As a result, the laser beam A ′ reflected and rearranged by the output reflection surface S22B of the second reflection surface group S20B and the laser beam B ′ rearranged after reflection by the output reflection surface S21B are reflected without being lost. The light enters the reflecting surface S32 of the prism 300 and is reflected by the reflecting surface S32 without being chipped.

  The laser beam A ′ and the laser beam B ′ reflected by the reflecting surface S32 of the reflecting prism 300 pass through an emission opening 500 formed of a rectangle with points 501, 503, 506 and 504 as vertices.

  The laser beam A ′ passes through the first emission aperture 500 </ b> A having a substantially square range with the points 502, 503, 506, and 505 as vertices. The laser beam B ′ is adjacent to the first exit aperture 500A in the exit aperture 500, and is a second exit aperture having a substantially square range with points 501, 502, 505, and 504 as vertices. It passes through 500B.

  The rectangular exit aperture 500 constituted by the points 501, 503, 506, and 504 is divided without missing the rectangular entrance aperture 400 constituted by the points 401, 403, 406, and 404. The incident aperture 400 and the exit aperture 500 have the same shape.

  Accordingly, the exit aperture 500 through which the laser beams A ′ and B ′ emitted from the optical path conversion device 1B pass corresponds to the entrance aperture 400 through which the laser beams A and B incident on the optical path conversion device 1B pass and is not missing. 100% effective opening can be almost realized.

  Here, in order to minimize the width of the optical path conversion device 1B without blocking the entrance and exit apertures, the intersection line of each reflection surface of the first reflection surface group S10B and each reflection of the second reflection surface group S20B. The plane formed by the points 101, 103, and 105 included in the intersecting lines of the planes, the plane formed by the points 106, 107, and 108 that are the end portions of the respective reflective surfaces, and the points 109, 110, and 110, The planes formed by the points 111 are parallel to each other. In addition, the distance between the plane formed by the points 101, 103, and 105 and the plane formed by the points 106, 107, and 108 is made equal to the length of the side 401-402 of the incident aperture 400, and the point 101 , 103, 105, and the plane formed by the points 109, 110, 111 are made equal to the length of the side 402-403 of the entrance aperture 400.

  Thereby, also in the optical path changing device 1B, as described above, the propagation of the laser beams A and B passing through the incident aperture 400 is not hindered due to the geometrical arrangement of the reflecting surfaces. In this case, substantially all of the light is reflected without any loss and propagates into the exit aperture 500.

  Further, the optical path conversion device 1B can make the width in the x-axis direction equal to the width of the incident aperture 400 of the laser beams A and B.

  Now, in the optical path conversion device 1B, similarly to the optical path conversion device 1A of the first embodiment, the incident reflection surfaces S11B, S12B and the second reflection surface group S20B constituting the first reflection surface group S10B are configured. The outgoing reflection surfaces S21B and S22B have an inclination to emit the incident laser beams A and B by rotating them by a predetermined angle.

  Thereby, the laser beam A enters the optical path conversion device 1B and is reflected by the incident reflection surface S11B of the first reflection surface group S10B and the emission reflection surface S22B of the second reflection surface group S20B. The laser beam A ′ is rotated by −90 degrees clockwise with the axis as a rotation axis, and the longitudinal direction and the lateral direction are switched.

  Similarly, the laser beam B is incident on the optical path changing device 1B, and is reflected by the incident reflection surface S12B of the first reflection surface group S10B and the emission reflection surface S21B of the second reflection surface group S20B. The laser beam B ′ is rotated 90 degrees clockwise with the axis as a rotation axis, and the longitudinal direction and the transverse direction are switched.

  Before the conversion, the laser beam A and the laser beam B which are sequentially arranged in the (1, 0, 0) direction along the longitudinal direction of the emission pattern are the laser beams after the optical path conversion by the optical path conversion device 1B. The arrangement is changed in the order of B ′ and laser beam A ′, and rearranged in the short direction.

  As described above, also in the optical path conversion device 1B, the laser beams A, the incident reflection surfaces S11B and S12B constituting the first reflection surface group S10B, and the exit reflection surfaces S21B and S22B constituting the second reflection surface group S20B. By reflecting B once, each of the divided laser beams A and B rotates approximately 90 degrees about the optical axis.

  Therefore, a flat laser beam emitted from a light emitting element in which a plurality of light emitting portions are arranged in the longitudinal direction is divided, and the flat direction can be converted for each divided light. Further, in the optical path conversion device 1B, in the first reflection surface group S10B that reflects and divides the laser beams traveling in parallel in two different directions, the directions of reflection are alternately changed. Without interference, the optical path lengths are almost equal, and the deviation of the light emitting point can be suppressed.

<Configuration Example and Operation Example of Optical Path Conversion Device of Third Embodiment>
FIG. 4 is an overall perspective view showing an example of the optical path changing device of the third embodiment. The optical path conversion apparatus 1C of the third embodiment arranges a plurality (n) of optical path conversion apparatuses 1B of the second embodiment described with reference to FIG. Can be performed.

  In other words, the optical path conversion device 1C is configured with four optical path conversion units 1C (1) to (4) in parallel in this example. For example, in the adjacent optical path conversion unit 1C (1) and optical path conversion unit 1C (2), the optical path conversion unit 1C (1) includes an incident reflection surface S12C constituting the first reflection surface group S10C, and the optical path conversion unit 1C ( In 2), the sides 112 to 113 that intersect with the incident reflecting surface S13C constituting the first reflecting surface group S10C are the sides 106 to 107 and the sides 109 to 110 described in FIG.

  Further, the output reflection surface S22C constituting the second reflection surface group S20C in the optical path conversion unit 1C (1) and the output reflection surface S23C forming the second reflection surface group S20C in the optical path conversion unit 1C (2). The sides 113 to 114 serving as the intersection lines are the sides 107 to 108 and the sides 110 to 111 described with reference to FIG.

  The optical path conversion device 1C has the same configuration, and four optical path conversion units 1C (1) to (4) are arranged in parallel. In this example, a laser beam bundle emitted from a light emitting element (not shown) in which eight light emitting units are arrayed enters through a reflecting prism 300.

  In the optical path conversion device 1C, the optical path conversions for the laser beam A and the laser beam B emitted from two adjacent light emitting units and proceeding in parallel are taken as one set, and each optical path conversion unit 1C (1) to (4). The laser beams A and B are divided and rearranged every time, and the rearranged laser beams A ′ and B ′ are emitted through the reflecting prism 300.

  Next, the operation of splitting and rearranging the laser beams in the adjacent optical path conversion units will be described by taking the optical path conversion unit 1C (1) and the optical path conversion unit 1C (2) as an example.

  The projection of the incident aperture 400 on the surface where light enters and exits in the optical path changing device 1C is shown as an incident aperture projection 452.

  In the incident aperture 400 through which the laser beam incident on the optical path changing device 1C passes, the adjacent incident aperture 411 and incident aperture 412 through which the pair of laser beams A and B traveling in parallel pass are the first of the incident apertures 411. The side 403-406 serving as a boundary between the second incident aperture 411B and the first incident aperture 412A of the other incident aperture 412 forms the first reflective surface group S10C in the optical path conversion unit 1C (1). The surface S12C and the side 112-113 that is an intersection line of the incident reflection surface S13C constituting the first reflection surface group S10C in the optical path conversion unit 1C (2) are projected.

  This indicates that the splitting of the laser beams A and B is performed substantially in parallel with the short direction of the emission pattern even between the adjacent optical path changing units 1C (1) and 1C (2). Thus, the laser beam B incident on the incident reflection surface S12C of the first reflection surface group S10C of the optical path conversion unit 1C (1) and the incident reflection surface of the first reflection surface group S10C of the optical path conversion unit 1C (2). The laser beam A incident on S13C is reflected and divided without being lost.

  A projection of the incident aperture 400 after rearrangement on a surface where light enters and exits in the optical path changing device 1C is shown as an incident aperture projection 453.

  In the adjacent incident aperture 411 and incident aperture 412, the sides 404-405 of the first incident aperture 411A of one incident aperture 411 and the sides 409-410 of the second incident aperture 412B of the other incident aperture 412 are in the optical path. A line of intersection between the exit reflection surface S22C constituting the second reflection surface group S20C in the conversion unit 1C (1) and the exit reflection surface S23C constituting the second reflection surface group S20C in the optical path conversion unit 1C (2) Is projected onto the side 113-114.

  As a result, the laser beam incident on the outgoing reflection surface S22C of the second reflection surface group S20C of the optical path conversion unit 1C (1) also between the adjacent optical path conversion unit 1C (1) and the optical path conversion unit 1C (2). A and the laser beam B incident on the exit reflecting surface S23C of the second reflecting surface group S20C of the optical path changing unit 1C (2) are reflected without being lost, and re-entered into the laser beam A 'and the laser beam B'. Be placed.

  Accordingly, even in the optical path changing device 1C, the flat laser beam bundle is divided in the longitudinal direction without being chipped, and the divided laser beams are rotated and rearranged by about 90 degrees without being chipped.

  The laser beam emitted from the optical path changing device 1C passes through an emission opening 500 having a predetermined shape in which emission openings 511, 512, 513, and 514 are arranged in parallel. Here, the exit aperture 511 is divided and rearranged without the entrance aperture 411 missing, and the entrance aperture 411 and the exit aperture 511 have the same shape.

  Similarly, the exit aperture 512 is divided and rearranged without the entrance aperture 412 missing, and the shapes of the entrance aperture 412 and the exit aperture 512 are equal. Further, the exit aperture 513 is divided and rearranged without the entrance aperture 413 missing, and the shapes of the entrance aperture 413 and the exit aperture 513 are the same. Furthermore, the exit aperture 514 is divided and rearranged without the entrance aperture 414 missing, and the entrance aperture 414 and the exit aperture 514 have the same shape.

  Therefore, in the optical path conversion device 1C, the effective aperture can be almost 100% without increasing the width in the x-axis direction.

  Further, the incident reflection surfaces S11C and S12C included in the optical path conversion unit 1C (1) are arranged at substantially equal distances from the light source, and similarly, the incident reflection of the optical path conversion units 1C (2) to 1C (4). The surfaces S13C to S18C are arranged at substantially equal distances from the light source.

  In addition, the exit reflection surfaces S21C and S22C included in the optical path conversion unit 1C (1) are arranged at substantially equal distances from the light source, and similarly, the output reflections of the optical path conversion units 1C (2) to 1C (4). The surfaces S23C to S28C are arranged at substantially equal distances from the light source.

  Therefore, in the optical path conversion device 1C, even when arrayed light sources are used, the optical path lengths of the respective laser beams become substantially equal, and deviation of the respective light emission points can be suppressed.

<Configuration Example and Operation Example of Optical Path Conversion Device of Fourth Embodiment>
FIG. 5 is an overall perspective view showing an example of the optical path changing device of the fourth embodiment. The optical path conversion device 1D of the fourth embodiment is formed into an array by integrally forming a plurality of optical path conversion units having the same configuration as the optical path conversion device 1B of the second embodiment described in FIG. It is a thing.

  That is, in the optical path changing device 1D, the first reflecting surface group S10D having a plurality of incident reflecting surfaces S11D to S18D and the second reflecting surface group S20D having a plurality of outgoing reflecting surfaces S21D to S28D are incident. It is integrally formed of a transparent optical member such as a glass prism having a desired transmittance with respect to the wavelength of light.

  Here, in the optical path conversion device 1D, the laser beam is reflected by utilizing total reflection on the incident reflection surfaces S11D to S18D and the output reflection surfaces S21D to S28D.

  A projection of the entrance aperture 400 through which light incident on the optical path changing device 1D passes is shown as an entrance aperture projection 452, and a projection after the rearrangement is shown as an entrance aperture projection 453.

  In the optical path conversion device 1D, the optical path conversion for the laser beam A and the laser beam B emitted from two adjacent light emitting units and proceeding in parallel is made into one set, for example, incident reflection surfaces S11D and S12D, and an output reflection surface Division and rearrangement are performed in S21D and S22D.

  For this reason, the incident reflection surface S11D reflects the laser beam A traveling in the (0, 1, 0) direction that is the first direction at an angle that reflects the (1,0, 1) direction that is the second direction. The incident reflection surface S12D is inclined and the laser beam B traveling in the (0, 1, 0) direction, which is the first direction, in parallel with the laser beam A, in the third direction intersecting the second direction. It is inclined at an angle of reflection in a certain (-1, 0, 1) direction.

  The outgoing reflection surface S22D is orthogonal to the incident reflection surface S11D, and the laser beam A traveling in the (1, 0, 1) direction, which is the second direction, is in the fourth direction (0, − The laser beam B is inclined at an angle reflecting in the (1, 0) direction, and the outgoing reflection surface S21D is orthogonal to the incident reflection surface S12D and travels in the (-1, 0, 1) direction which is the third direction. Is inclined at an angle reflecting in the (0, -1, 0) direction which is the fourth direction.

  With the above configuration, in the optical path conversion device 1D, the laser beam A incident on the incident reflection surface S11D of the first reflection surface group S10D is reflected in the (1, 0, 1) direction, which is the second direction, and is incident. The laser beam B incident on the reflecting surface S12D is reflected in the (−1, 0, 1) direction, which is the third direction, so that the laser beams A and B traveling in the first direction in parallel are different. Reflected in two directions and split.

  Further, the laser beam A which is divided by the first reflecting surface group S10D and travels in the (1,0,1) direction which is the second direction is the fourth reflecting surface S22D of the second reflecting surface group S20D. The laser beam B that is reflected in the (0, -1, 0) direction that is the first direction and travels in the (-1, 1, 0) direction that is the third direction is the fourth direction on the outgoing reflection surface S21D. Reflects in a certain (0, -1, 0) direction.

  As a result, the laser beam A traveling in the second direction, which is two different directions, and the laser beam B traveling in the third direction are rotated by a predetermined angle, respectively, and are aligned in the same fourth direction. It is rearranged into the beam A ′ and the laser beam B ′, and is emitted from the second reflecting surface group S20D.

  Similarly, the laser beams A and B are divided and rearranged using the incident reflection surfaces S13D and S14D and the output reflection surfaces S23D and S24D as one set of optical path conversion units. Further, the laser beams A and B are divided and rearranged using the incident reflection surfaces S15D and S16D and the output reflection surfaces S25D and S26D as a pair of optical path conversion units. Further, the laser beams A and B are divided and rearranged using the incident reflection surfaces S17D and S18D and the output reflection surfaces S27D and S28D as a pair of optical path conversion units.

  Therefore, also in the optical path changing device 1D, the flat laser beam bundle is divided in the longitudinal direction without being chipped, and each of the divided laser beams is rotated and rearranged by about 90 degrees without being chipped. Thereby, the shape of the incident aperture 400 through which the light incident on the optical path changing device 1D passes and the shape of the outgoing aperture 500 through which the rearranged light emitted from the optical path changing device 1D passes are equal, and the effective aperture is almost 100%.

  Further, the incident reflection surfaces S11D to S18D constituting the first reflection surface group S10D are arranged at substantially equal distances from the light source, and further, the respective emission reflection surfaces S21D constituting the second reflection surface group S20D. In S28D, since the distances from the light sources are arranged substantially equal, the optical path lengths of the laser beams are substantially equal in the optical path conversion device 1D, and the shift of the light emitting points can be suppressed.

<Configuration Example and Operation Example of Optical Path Conversion Device of Fifth Embodiment>
FIG. 6 is an overall perspective view showing an example of the optical path changing device of the fifth embodiment. The optical path conversion device 1E of the fifth embodiment combines a plurality of optical path conversion units having the same configuration as the optical path conversion device 1B of the second embodiment described in FIG. 3 with a plurality of optical components. The configuration is an array.

  That is, the optical path changing device 1E includes a first optical block 610 in which a first reflecting surface group S10E having a plurality of incident reflecting surfaces S11E to S18E is formed, and a first optical block 610 having a plurality of outgoing reflecting surfaces S21E to S28E. And a second optical block 620 formed with two reflecting surface groups S20E.

  The first optical block 610 and the second optical block 620 are, for example, members having the same shape formed by processing a metal plate material to form each reflecting surface. The optical path changing device 1E includes the first optical block 610 and the second optical block 620. The optical block 620 is configured by joining the reflecting surfaces facing each other.

  Here, in the optical path conversion device 1E, a metal film or a dielectric multilayer film is formed according to the wavelength of light that is divided and rearranged by using reflection, and the incident reflection surfaces S11E to S18E and the emission reflection surface. S21E to S28E are configured.

  A projection of the incident aperture 400 through which light incident on the optical path changing device 1E passes is shown as an incident aperture projection 452, and a projection after the rearrangement is shown as an incident aperture projection 453.

  Also in the optical path conversion device 1E, the optical path conversion for the laser beam A and the laser beam B emitted from two adjacent light emitting units and proceeding in parallel is made into one set, for example, incident reflection surfaces S11E, S12E, and an output reflection surface Division and rearrangement are performed in S21E and S22E.

  For this reason, the incident reflection surface S11E reflects the laser beam A traveling in the (0, 1, 0) direction that is the first direction at an angle that reflects the (1,0, 1) direction that is the second direction. The incident reflection surface S12E is inclined, and the laser beam B traveling in the (0, 1, 0) direction which is the first direction in parallel with the laser beam A is in the third direction intersecting the second direction. It is inclined at an angle of reflection in a certain (-1, 0, 1) direction.

  The outgoing reflection surface S22E is orthogonal to the incident reflection surface S11E, and the laser beam A traveling in the (1, 0, 1) direction, which is the second direction, is in the fourth direction (0, − The laser beam B is inclined at an angle reflecting in the (1, 0) direction, and the outgoing reflection surface S21E is orthogonal to the incident reflection surface S12E and travels in the (−1, 0, 1) direction which is the third direction. Is inclined at an angle reflecting in the (0, -1, 0) direction which is the fourth direction.

  With the above configuration, in the optical path conversion device 1E, the laser beam A incident on the incident reflection surface S11E of the first reflection surface group S10E is reflected in the (1,0,1) direction, which is the second direction, and is incident. The laser beam B incident on the reflecting surface S12E is reflected in the third direction (-1, 0, 1), so that the laser beams A and B traveling in the first direction in parallel are different. Reflected in two directions and split.

  Further, the laser beam A that is divided by the first reflecting surface group S10E and travels in the (1,0,1) direction, which is the second direction, is transmitted through the fourth reflecting surface S22E of the second reflecting surface group S20E. The laser beam B that is reflected in the (0, -1, 0) direction that is the first direction and travels in the (-1, 1, 0, 1) direction that is the third direction is the fourth direction on the outgoing reflection surface S21E. Reflects in a certain (0, -1, 0) direction.

  As a result, the laser beam A traveling in the second direction, which is two different directions, and the laser beam B traveling in the third direction are rotated by a predetermined angle, respectively, and are aligned in the same fourth direction. It is rearranged into the beam A ′ and the laser beam B ′, and is emitted from the second reflecting surface group S20E.

  Similarly, the laser beams A and B are divided and rearranged using the incident reflection surfaces S13E and S14E and the exit reflection surfaces S23E and S24E as a pair of optical path conversion units. Further, the laser beams A and B are divided and rearranged by using the incident reflection surfaces S15E and S16E and the emission reflection surfaces S25E and S26E as one set of optical path conversion units. Further, the laser beams A and B are divided and rearranged using the incident reflection surfaces S17E and S18E and the output reflection surfaces S27E and S28E as a pair of optical path conversion units.

  Therefore, also in the optical path changing device 1E, the flat laser beam bundle is divided in the longitudinal direction without being lost, and the divided laser beams are rotated and rearranged by about 90 degrees without being lost. Thereby, the shape of the incident opening 400 through which the light incident on the optical path changing device 1E passes and the shape of the outgoing opening 500 through which the rearranged light emitted from the optical path changing device 1E passes are equal, and the effective opening is almost 100%.

  Further, the incident reflection surfaces S11E to S18E constituting the first reflection surface group S10E are arranged at substantially equal distances from the light source, and further, the respective emission reflection surfaces S21E constituting the second reflection surface group S20E. In S28E, since the distances from the light sources are substantially equal, the optical path lengths of the laser beams can be substantially equal in the optical path conversion device 1E, and the deviation of the light emitting points can be suppressed.

<Example of manufacturing method of optical path conversion device>
7 and 8 are process explanatory views showing an example of a manufacturing method of the optical path changing device 1E of the fifth embodiment. Next, an embodiment of the manufacturing method of the optical path changing device will be described.

  First, as shown in FIG. 7A, a reflective surface forming an incident reflective surface S11E to S18E or an outgoing reflective surface S21E to S28E is formed on one surface 701 of a flat metal plate 700 having a predetermined thickness. A groove 702 is created. The reflecting surface forming grooves 702 have a V-shaped cross section, and four reflecting surface forming grooves 702 are created in this example according to the number of incident reflecting surfaces and outgoing reflecting surfaces.

  The pitch P1 of the parallel reflecting surface forming grooves 702 is set according to the pitch of the light emitting units (not shown), and is set to about 1 mm in this example. Further, the opening angle α1 of each reflection surface forming groove 702 is set to about 120 degrees in this example. A method for calculating the opening angle α1 of the reflecting surface forming groove 702 will be described later.

  Next, as shown in FIG. 7B, the metal plate material 700 on which the reflecting surface forming groove 702 is formed is orthogonal to the extending direction of the reflecting surface forming groove 702 and is predetermined with respect to the surface 701. Cutting is performed at the joint surface 703 inclined at an angle. The cutting angle α2 of the joint surface 703 is set to about 54.74 degrees in this example. A method for calculating the cutting angle α2 of the joint surface 703 will be described later.

  The metal plate 700 cut by the joint surface 703 has the first optical block 610 in which the incident reflection surfaces S11E to S18E are formed by the reflection surface formation groove 702, or the output reflection surfaces S21E to S28E by the reflection surface formation groove 702. A second optical block 620 is formed.

  Next, as shown in FIG. 8, two metal plate members 700 cut by the joint surface 703 are made to face the reflecting surface forming groove 702 so that one becomes the first optical block 610 and the other becomes the first. The second optical block 620 is bonded at the bonding surface 703.

  Thereby, the optical path changing device 1E in which the first reflection surface group S10E having the incident reflection surfaces S11E to S18E and the second reflection surface group S20E having the emission reflection surfaces S21E to S28E are formed.

  Next, a method for calculating the opening angle α1 of the reflecting surface forming groove 702 will be described.

  The incident reflection surfaces S11E and S12E that are one set among the plurality of incident reflection surfaces S11E to S18E will be described as an example. The interior angle between the normal vectors of the incident reflection surface S11E and the incident reflection surface S12E is expressed by the following equation: It is shown in (1).

S11E ・ S12E = │S11E││S12E│cosθ ・ ・ ・ (1)
From equation (1), cos θ = 2/4 and θ = 60 degrees. Accordingly, the opening angle between the incident reflection surface S11E and the incident reflection surface S12E is about 120 degrees. As a result, the opening angle α1 of the reflecting surface forming groove 702 constituting the incident reflecting surface S11E and the incident reflecting surface S12E is about 120 degrees, and the opening angles of the incident reflecting surfaces and the outgoing reflecting surfaces that form one set are respectively It will be about 120 degrees.

  Next, a method of calculating the cutting angle α2 of the joint surface 703 will be described by taking the incident reflection surface S11E and the incident reflection surface S12E as an example.

  Since the direction vector a of the intersecting line formed by the incident reflection surfaces S11E and S12E is orthogonal to the normal vectors of the incident reflection surfaces S11E and S12E, S11E · a = 0 and S12E · a = 0. = (0,1, √2)

The internal angle between the direction vector a and the y-axis direction vector e _y = (0, 1, 0) is expressed by the following equation (2).

a · e _y = │a││e _y │cosθ ・ ・ ・ (2)
From equation (2), cos θ = 1 / √3 and θ = 54.74 degrees. Therefore, the cutting angle α2 of the joint surface 703 is about 54.74 degrees.

  In the manufacturing method of the optical path conversion device 1E described above, the metal plate material 700 in which the V-shaped reflection surface forming groove 702 serving as a reflection surface is formed is cut at a predetermined angle on the joint surface 703, so that the two metal plate materials 700 are obtained. Since the first reflecting surface group S10E and the second reflecting surface group S20E are created by facing each other, it is possible to prevent the intersecting line of each reflecting surface from becoming a defective shape. Therefore, loss of light reflected by the reflecting surface can be suppressed.

<Configuration Example of Laser Module of First Embodiment>
FIG. 9 is a configuration diagram illustrating an example of the laser module according to the first embodiment. FIG. 9A is a plan view of the laser module 800A according to the first embodiment, and FIG. 9B is a diagram illustrating the laser module 800A according to the first embodiment. It is a side view.

  The laser module 800A according to the first embodiment includes, for example, the optical path conversion device 1E described in FIG. 6 corresponding to the arrayed light sources, a bar laser 801 that emits a laser beam, and a laser beam emitted from the bar laser 801. A first optical system 802 coupled to the conversion device 1E and a second optical system 804 configured to couple the laser beam rearranged by the optical path conversion device 1E to the optical fiber 803 are provided.

  In the bar laser 801, a light emitting portion (not shown) that is long in one direction is formed on the light emitting end face of the active layer stripe of the semiconductor laser. For example, about 10 light emitting portions are arranged in a line along the longitudinal direction.

  The first optical system 802 is an example of an incident light condensing member, and an FAC (fast axis collimating) lens 802a that narrows the radiation angle in the vertical direction of the laser beam C emitted from the bar laser 801 to be substantially parallel, and a bar laser 801. And a SAC (slow axis collimating) lens 802b that narrows the horizontal radiation angle of the laser beam C emitted from the laser beam C and makes it substantially parallel.

  The second optical system 804 is an example of an emitted light condensing member, and a cylindrical lens 804a that makes the laser beam C ′ rearranged by the optical path changing device 1E substantially parallel, and a laser beam that is made substantially parallel by the cylindrical lens 804a. A focus lens 804 b that collects C ′ on the incident end face of the optical fiber 803.

  The laser module 800A is modularized, for example, by mounting a bar laser 801, a first optical system 802, an optical path changing device 1E, a reflecting prism 300, and a second optical system 804 in a package (not shown) to which an optical fiber 803 is connected. Is done.

<Operation Example of Laser Module of First Embodiment>
Next, an example of the operation of the laser module 800A according to the first embodiment will be described with reference to FIG.

  The laser module 800A emits a laser beam C from the bar laser 801 in a flat pattern in one direction. Here, it is assumed that the longitudinal direction of the flattened laser beam C is the direction along the x-axis, and the emission direction of the laser beam C is the direction along the z-axis.

  The laser beam C emitted from the bar laser 801 is transmitted through the FAC lens 802a, thereby narrowing the emission angle in the vertical direction (y-axis direction), and further transmitted through the SAC lens 802b in the horizontal direction (x-axis direction). The radiation angle is narrowed and made almost parallel.

  The laser beam C emitted from the bar laser 801 and transmitted through the FAC lens 802a and the SAC lens 802b and made substantially parallel is reflected by the reflecting prism 300 and enters the first reflecting surface group S10E of the optical path changing device 1E.

  The laser beam C incident on the first reflecting surface group S10E of the optical path changing device 1E is divided in the longitudinal direction by being reflected by the incident reflecting surfaces S11E to S18E as described with reference to FIG. The light is reflected by S21E to S28E, rotated by a predetermined angle, rearranged, and emitted from the second reflecting surface group S20E.

  The laser beam C ′ that has been rearranged and emitted from the optical path changing device 1E is reflected by the reflecting prism 300, is made substantially parallel by passing through the cylindrical lens 804a, and is made incident on the optical fiber 803 by passing through the focus lens 804b. The light is condensed on the end face and enters the optical fiber 803.

  The laser beam C ′ rearranged by the optical path changing device 1E described with reference to FIG. 6 and the like divides the laser beam having a flat emission pattern in the longitudinal direction, and each of the divided laser beams has a predetermined angle around the optical axis. The deviation of the emission point of each laser beam that has been rotated and split and rotated is suppressed.

  Thereby, in the laser module 800A, the flat pattern laser beam emitted from the bar laser 801 can be focused in a narrow range by including the focus lens 804b in the subsequent stage of the optical path conversion device 1E. Since the optical path changing device 1E has an effective aperture of almost 100%, the flat laser beam emitted from the bar laser 801 can be condensed on the optical fiber 803 with high efficiency.

<Configuration Example of Laser Module of Second Embodiment>
FIG. 10 is a configuration diagram illustrating an example of the laser module according to the second embodiment. FIG. 10A is a plan view of the laser module 800B according to the second embodiment, and FIG. 10B is a diagram illustrating the laser module 800B. It is a side view.

  The laser module 800B of the second embodiment is obtained by stacking a plurality of bar lasers 801 as light sources. That is, in the laser module 800B, in this example, five bar lasers 801 are stacked in a direction orthogonal to the longitudinal direction of the light emitting unit (not shown).

  The first optical system 805 as an incident light condensing member for coupling the laser beam emitted from each bar laser 801 to the optical path changing device 1E includes a FAC lens 802a and a SAC lens 802b for each bar laser 801. Also, a cylindrical lens 805a for condensing the laser beam D emitted from each bar laser 801 and made substantially parallel by the FAC lens 802a and the SAC lens 802b, and the laser beam D condensed by the cylindrical lens 805a are made almost parallel. A cylindrical lens 805b is provided.

  The second optical system 804 that couples the laser beam D ′ rearranged by the optical path changing device 1E to the optical fiber 803 is substantially parallel to the laser beam D ′ in the same manner as the laser module 800A of the first embodiment. A cylindrical lens 804a for focusing, and a focus lens 804b for condensing the laser beam D ′ made substantially parallel by the cylindrical lens 804a on the incident end face of the optical fiber 803.

<Operation Example of Laser Module of Second Embodiment>
Next, an example of the operation of the laser module 800B according to the second embodiment will be described with reference to FIG.

  The laser module 800B emits a laser beam from each bar laser 801 in a flat pattern in one direction. The laser beam emitted from each bar laser 801 is transmitted through the FAC lens 802a, thereby narrowing the radiation angle in the vertical direction (y-axis direction), and further transmitted through the SAC lens 802b in the horizontal direction (x-axis direction). The radiation angle is narrowed and made almost parallel.

  A laser beam that is emitted from each bar laser 801, is transmitted through the FAC lens 802a and the SAC lens 802b, and is made substantially parallel so that it is flattened in one direction and stacked in another direction orthogonal to the one direction. D is condensed by passing through the cylindrical lens 805a, and is made substantially parallel so as to be incident on the optical path changing device 1E by passing through the cylindrical lens 805b. Then, the light is reflected by the reflecting prism 300 and enters the first reflecting surface group S10E of the optical path changing device 1E.

  The laser beam D incident on the first reflecting surface group S10E of the optical path changing device 1E is divided in the longitudinal direction by being reflected by the incident reflecting surfaces S11E to S18E as described with reference to FIG. The light is reflected by S21E to S28E, rotated by a predetermined angle, rearranged, and emitted from the second reflecting surface group S20E.

  The laser beam D ′ rearranged and emitted from the optical path changing device 1E is reflected by the reflecting prism 300, is made substantially parallel by passing through the cylindrical lens 804a, and is made incident by the optical fiber 803 by passing through the focus lens 804b. The light is condensed on the end face and enters the optical fiber 803.

  In the laser module 800B of the second embodiment, two sets of cylindrical lenses 805a and 805b are provided in the front stage of the optical path conversion device 1E, so that the laser beams emitted from the plurality of stacked bar lasers 801 are converted into optical paths. The light can enter the apparatus 1E.

  Thereby, in the laser module 800B, the laser beam emitted from the plurality of stacked bar lasers 801 can be focused on a narrow range by the focus lens 804b provided at the rear stage of the optical path conversion device 1E, and the output can be increased. Is possible.

  In the laser module 800A of the first embodiment and the laser module 800B of the second embodiment described above, the optical path conversion device 1E described in FIG. 6 is used as the optical path conversion device that splits and rearranges the laser beam. However, depending on the number of light emitting units (not shown) of the bar laser 801, the optical path conversion device 1A described in FIG. 1 or the optical path conversion device 1B described in FIG. 3 may be used, or the optical path conversion described in FIG. The device 1C or the optical path conversion device 1D described with reference to FIG. 5 may be used.

  The present invention is applied to a light source excited by a solid laser or a fiber laser, a light source such as a cutting process, and the like.

It is a whole perspective view which shows an example of the optical path changing apparatus of 1st Embodiment. It is explanatory drawing which shows the detail of an optical path changing apparatus. It is a whole perspective view which shows an example of the optical path changing apparatus of 2nd Embodiment. It is a whole perspective view which shows an example of the optical path changing apparatus of 3rd Embodiment. It is a whole perspective view which shows an example of the optical path changing apparatus of 4th Embodiment. It is a whole perspective view which shows an example of the optical path changing apparatus of 5th Embodiment. It is process explanatory drawing which shows an example of the manufacturing method of the optical path changing apparatus of 5th Embodiment. It is process explanatory drawing which shows an example of the manufacturing method of the optical path changing apparatus of 5th Embodiment. It is a block diagram which shows an example of the laser module of 1st Embodiment. It is a block diagram which shows an example of the laser module of 2nd Embodiment.

Explanation of symbols

1A to 1E: optical path changing device, S10A to S10E: first reflecting surface group, S20A to S20E: second reflecting surface group, S11A to S12A: incident reflecting surface, S11B to S12B .. Incident reflection surface, S11C to S18C ... Incident reflection surface, S11D to S18D ... Incident reflection surface, S11E to S18E ... Incident reflection surface, S21A to S22A ... Outgoing reflection surface, S21B to S22B .. Outgoing reflection surface, S21C to S28C ... Outgoing reflection surface, S21D to S28D ... Outgoing reflection surface, S21E to S28E ... Outgoing reflection surface, S400 ... Incident aperture, 500 ... Outgoing aperture, 610 ... 1st optical block, 620 ... 2nd optical block, 700 ... Metal plate material, 702 ... Reflecting surface forming groove, 703 ... Joining surface, 800A, 800B ..Laser module, 801 ... Bar laser, 802a ... FAC lens, 802b ... SAC lens, 803 ... Optical fiber, 804a ... Cylindrical lens, 804b ... Focus lens, 805a ... Cylindrical lens, 805b ... Cylindrical lens

Claims (9)

An optical path changer that has a flat emission pattern that is long in one direction and that splits light that travels in parallel along the longitudinal direction and rotates and re-arranges each divided light. There,
A first reflecting surface group configured to divide the light of the flat emission pattern in the longitudinal direction by reflecting the incident light, and to rearrange each of the divided lights by rotating a predetermined angle around the optical axis; A second reflecting surface group;
The first reflecting surface group intersects at a predetermined angle to reflect light traveling in the first direction alternately in the second direction or the third direction, which are two directions different from the first direction. And a plurality of incident reflection surfaces arranged without gaps,
The second reflecting surface group reflects light traveling in the second direction reflected by the first reflecting surface group and light traveling in the third direction into the fourth direction, which is the same direction. An optical path conversion device comprising a plurality of outgoing reflection surfaces that intersect at a predetermined angle of reflection and are arranged without gaps. The projection of the intersecting line where the incident reflecting surfaces intersect and the intersecting line where the exit reflecting surfaces intersect is a direction parallel to the longitudinal direction or the lateral direction of the light of the flattened exit pattern. The optical path changing device according to claim 1, wherein a reflective surface group and the second reflective surface group are arranged. The incident reflection surfaces of the first reflection surface group are arranged at equal distances from the light source, and the outgoing reflections of the second reflection surface group on which the light reflected by the first reflection surface group is incident. The optical path conversion device according to claim 1, wherein the surfaces are arranged at equal distances from the light source. 2. The first reflecting surface group and the second reflecting surface group are integrally formed of a transparent optical member having a desired transmittance with respect to the wavelength of incident light. The optical path changing device as described. 2. The optical path conversion according to claim 1, wherein each of the first reflection surface group and the second reflection surface group includes a mirror surface having a desired reflectance with respect to a wavelength of incident light. apparatus. Create at least one V-shaped reflecting surface forming groove on one surface of the metal plate,
The metal plate material on which the reflecting surface forming groove is formed is orthogonal to the extending direction of the reflecting surface forming groove and is cut at a predetermined angle with respect to the one surface to form a bonding surface. ,
A pair of the metal plate members are joined at the joining surface with the reflecting surface forming grooves facing each other,
In the reflection surface forming groove of one of the joined metal plate members, the light traveling in the first direction is alternately switched to the second direction or the third direction which are two directions different from the first direction. Forming a plurality of incident reflection surfaces intersecting at a predetermined angle of reflection and arranged without gaps to create a first reflection surface group;
The reflection surface forming groove of the other joined metal plate member reflects the light traveling in the second direction and the light traveling in the third direction in a fourth direction which is the same direction. A method of manufacturing an optical path changing device, wherein a second reflecting surface group is formed by forming a plurality of outgoing reflecting surfaces that intersect at an angle and are arranged without gaps. A light emitting element having two or more light emitting sections arranged in one direction along the longitudinal direction;
A laser module comprising: an optical path conversion device that divides the light emitted from the light emitting element and rotates and re-arranges each divided light;
The optical path changer reflects light emitted from the light emitting element to divide the light of the flat emission pattern in the longitudinal direction, and rotates each of the divided lights by a predetermined angle around the optical axis. A first reflecting surface group and a second reflecting surface group to be rearranged,
The first reflecting surface group intersects at a predetermined angle to reflect light traveling in the first direction alternately in the second direction or the third direction, which are two directions different from the first direction. And a plurality of incident reflection surfaces arranged without gaps,
The second reflecting surface group reflects light traveling in the second direction reflected by the first reflecting surface group and light traveling in the third direction into the fourth direction, which is the same direction. A laser module comprising: a plurality of outgoing reflection surfaces that intersect at a predetermined angle to be reflected and are arranged without gaps. An outgoing light condensing member that condenses the light emitted from the optical path changing device;
The laser module according to claim 7, further comprising: an optical fiber on which light collected by the outgoing light collecting member is incident. While laminating the light emitting element in a direction orthogonal to the longitudinal direction of the light emitting portion,
The laser module according to claim 7, further comprising an incident light condensing member that condenses the light emitted from each of the light emitting elements onto the optical path conversion device.

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