JP2007234259A5 - - Google Patents

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Publication number
JP2007234259A5
JP2007234259A5 JP2006051309A JP2006051309A JP2007234259A5 JP 2007234259 A5 JP2007234259 A5 JP 2007234259A5 JP 2006051309 A JP2006051309 A JP 2006051309A JP 2006051309 A JP2006051309 A JP 2006051309A JP 2007234259 A5 JP2007234259 A5 JP 2007234259A5
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JP
Japan
Prior art keywords
organic
display device
ito electrode
ito
film
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Pending
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JP2006051309A
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Japanese (ja)
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JP2007234259A (en
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Priority to JP2006051309A priority Critical patent/JP2007234259A/en
Priority claimed from JP2006051309A external-priority patent/JP2007234259A/en
Publication of JP2007234259A publication Critical patent/JP2007234259A/en
Publication of JP2007234259A5 publication Critical patent/JP2007234259A5/ja
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Claims (6)

ＩＴＯ電極上に有機膜と金属膜とを順次積層してなる有機ＥＬ素子をマトリクス状に配置した有機ＥＬ表示装置において、
前記ＩＴＯ電極の前記有機層との境界近傍において、前記ＩＴＯ電極中の酸素含有量の深さ方向の分布が、ＩＴＯ電極内部から有機膜に向かって増加する分布となっていることを特徴とする有機ＥＬ表示装置。 In an organic EL display device in which organic EL elements formed by sequentially laminating an organic film and a metal film on an ITO electrode are arranged in a matrix,
In the vicinity of the boundary of the ITO electrode with the organic layer, the distribution of the oxygen content in the ITO electrode in the depth direction is a distribution increasing from the inside of the ITO electrode toward the organic film. Organic EL display device. 請求項１において、
前記ＩＴＯ電極と有機膜との界面におけるＩＴＯ電極の酸素含有量を、該ＩＴＯの化学量論組成以上とすることを特徴とする有機ＥＬ表示装置。 In claim 1,
An organic EL display device characterized in that the oxygen content of the ITO electrode at the interface between the ITO electrode and the organic film is equal to or higher than the stoichiometric composition of the ITO. 請求項１又は２において、
前記酸素含有量は、前記ＩＴＯ電極と前記有機膜との界面から1ｎｍ以上１０ｎｍ以下の範囲における酸素含有量であることを特徴とする有機ＥＬ表示装置。 In claim 1 or 2,
The organic EL display device, wherein the oxygen content is an oxygen content in a range of 1 nm to 10 nm from an interface between the ITO electrode and the organic film. 有機膜と金属膜とを順次ＩＴＯ電極上に積層してなる有機ＥＬ素子をマトリクス状に配置した有機ＥＬ表示装置において、
前記ＩＴＯと前記有機層との界面に、酸素濃度がＩＴＯの化学量論組成以上となる層が存在することを特徴とする有機ＥＬ表示装置。 In an organic EL display device in which organic EL elements formed by sequentially laminating an organic film and a metal film on an ITO electrode are arranged in a matrix,
An organic EL display device comprising a layer having an oxygen concentration equal to or higher than the stoichiometric composition of ITO at an interface between the ITO and the organic layer. 請求項４において、
前記層は、１ｎｍ以上の厚みを備えていることを特徴とする有機ＥＬ表示装置。 In claim 4,
The organic EL display device, wherein the layer has a thickness of 1 nm or more. 請求項１乃至５において、In claims 1 to 5,
前記有機ＥＬ素子は、アクティブマトリクス基板上に形成されていることを特徴とする有機ＥＬ表示装置。The organic EL display device, wherein the organic EL element is formed on an active matrix substrate.
JP2006051309A 2006-02-27 2006-02-27 Organic el display device Pending JP2007234259A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2006051309A JP2007234259A (en) 2006-02-27 2006-02-27 Organic el display device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006051309A JP2007234259A (en) 2006-02-27 2006-02-27 Organic el display device

Publications (2)

Publication Number Publication Date
JP2007234259A JP2007234259A (en) 2007-09-13
JP2007234259A5 true JP2007234259A5 (en) 2009-04-16

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Family Applications (1)

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JP2006051309A Pending JP2007234259A (en) 2006-02-27 2006-02-27 Organic el display device

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JP (1) JP2007234259A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010065494A2 (en) * 2008-12-01 2010-06-10 E. I. Du Pont De Nemours And Company Anode for an organic electronic device
EP2352802A4 (en) 2008-12-01 2012-10-31 Du Pont Electroactive materials
JP2011139052A (en) * 2009-12-04 2011-07-14 Semiconductor Energy Lab Co Ltd Semiconductor memory device
JP5597504B2 (en) * 2010-10-06 2014-10-01 株式会社アルバック Plasma processing apparatus and pretreatment method
JP2013229186A (en) * 2012-04-25 2013-11-07 Asahi Glass Co Ltd Organic led element, translucent substrate, and translucent substrate manufacturing method
US9490441B2 (en) * 2012-08-02 2016-11-08 Sony Corporation Semiconductor device, method of manufacturing semiconductor device, solid-state image pickup unit, and electronic apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000077190A (en) * 1998-08-28 2000-03-14 Futaba Corp Organic electroluminescent element and manufacture thereof
JP2000091084A (en) * 1998-09-16 2000-03-31 Trustees Of Princeton Univ Positive hole injection performance improving electrode
JP2001035667A (en) * 1999-07-27 2001-02-09 Tdk Corp Organic el element
JP4850393B2 (en) * 2003-03-25 2012-01-11 株式会社半導体エネルギー研究所 Method for manufacturing display device

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