JP2007225391A - Adjustment device and adjustment method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To allow a coordinate axis on the light receiving surface of a photoelectric conversion element to efficiently and quickly agree with a reference axis of a rotator. <P>SOLUTION: In this adjustment device 200, a reference LD 205 irradiates a PSD light receiving surface with laser light, and a PSD coordinate converter 210 detects the PSD coordinate, and a controller 220 determines whether the inclination of the coordinate axis defined on the PSD light receiving surface 111 is smaller than a prescribed value, based on the PSD coordinate, and when the inclination is larger than the prescribed value, information of an adjustment moving amount is outputted to a rotation adjustment driving mechanism controller 230, to thereby drive a rotation adjustment driving mechanism 230a or a rotation adjustment driving mechanism 230b, and the inclination of the coordinate axis on the PSD light receiving surface is adjusted. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an adjustment device and an adjustment method for adjusting the angle of a photoelectric conversion element, and in particular, an adjustment device capable of efficiently and quickly matching a coordinate axis on a light receiving surface of a photoelectric conversion element with a reference axis of a rotating body. And an adjustment method.

  Conventionally, rotational operations (roll (around the x axis), pitch (around the y axis), and yaw (around the z axis) rotation) of the rotating body of the space stabilization mechanism (for example, a shaft) are structurally restricted. Is done on each independent axis. Then, when adjusting the rotation angle of the rotating body, an angle detector such as an encoder or resolver is attached to each axis, and the rotation angle of the rotating body is determined based on the information on the rotation angle detected by the angle detector. A method of adjusting is generally used.

  However, when the rotation center element of the rotator is a pivot element such as a spherical bearing, there is no structurally constrained axis. Therefore, a method of adjusting the angle of the rotator by attaching an angle detector to each axis There was a problem that could not be applied.

  Therefore, in Patent Document 1, a PSD (Position Sensing Detector), which is a photoelectric conversion element, is attached to a rotating body, laser light from an LD (Laser Diode) is irradiated on the PSD, and the laser light moves on the PSD light receiving surface. A technique for calculating the rotation angle from the above is disclosed.

JP 2005-214867 A

  However, in the above-described prior art, it is necessary to fix the coordinate axis of the PSD light receiving surface (the coordinate axis defined for performing angle calculation using PSD) according to the reference axis of the rotating body. However, there is a problem that the burden on the worker is large.

  Furthermore, since the accuracy of the coordinate axis of the light receiving surface with respect to the outer surface of the package is not specified in a commercially available PSD, the work of matching the coordinate axis of the PSD light receiving surface with the reference axis of the rotating body becomes more complicated, and this problem Was even more serious.

  The present invention has been made to solve the above-mentioned problems caused by the prior art, and efficiently and quickly matches the coordinate axis of the PSD light receiving surface and the reference axis of the rotating body without imposing a burden on the operator. It is an object of the present invention to provide an adjustment device and an adjustment method that can be performed.

  In order to solve the above-described problems and achieve the object, the present invention is an adjustment device that adjusts the angle of a photoelectric conversion element, and moves laser light onto a light receiving surface of the photoelectric conversion element while moving the photoelectric conversion element. The coordinate value detecting means for detecting the coordinate value on the coordinate axis defined on the light receiving surface of the photoelectric conversion element, and the photoelectric value based on the coordinate value detected by the coordinate value detecting means. Adjusting means for adjusting the angle of the conversion element.

  Further, the present invention is the above invention, wherein the adjusting means is defined on the reference axis of the rotating body on which the photoelectric conversion element is installed and the light receiving surface of the photoelectric conversion element, based on the coordinate value. The angle of the photoelectric conversion element is adjusted so that the coordinate axis coincides.

  Further, the present invention is the above invention, wherein the adjusting means is an inclination calculating means for calculating an inclination of the coordinate axis based on the coordinate value, and whether or not the inclination calculated by the calculating means is equal to or less than a specified value. It is characterized by comprising determination means for determining, and adjustment execution means for adjusting the angle of the photoelectric conversion element when the determination means determines that the inclination is larger than a specified value.

  The present invention is also an adjustment method for adjusting an angle of a photoelectric conversion element, wherein the photoelectric conversion element is irradiated with a laser beam while moving the photoelectric conversion element, and the photoelectric conversion element receives light. A coordinate value detection step for detecting a coordinate value on a coordinate axis defined on the surface; an adjustment step for adjusting the angle of the photoelectric conversion element based on the coordinate value detected by the coordinate value detection step; It is characterized by including.

  Further, the present invention is the above invention, wherein the adjustment step is defined on the reference axis of the rotating body on which the photoelectric conversion element is installed and the light receiving surface of the photoelectric conversion element, based on the coordinate value. The angle of the photoelectric conversion element is adjusted so that the coordinate axis coincides.

  According to the present invention, while moving the photoelectric conversion element, the light receiving surface of the photoelectric conversion element is irradiated with laser light to detect the coordinate value on the coordinate axis defined on the light receiving surface, and the detected coordinate axis is Since the angle of the photoelectric conversion element is adjusted based on the base, the angle of the photoelectric conversion element can be adjusted efficiently and quickly.

  Further, according to the present invention, based on the coordinate value, the photoelectric conversion is performed so that the reference axis of the rotating body on which the photoelectric conversion element is installed coincides with the coordinate axis defined on the light receiving surface of the photoelectric conversion element. Since the angle of the element is adjusted, it is not necessary for the operator himself to adjust the coordinate axis and the reference axis, and the burden on the operator can be reduced.

  Further, according to the present invention, the inclination of the coordinate axis is calculated based on the coordinate value, it is determined whether the calculated inclination is equal to or less than the specified value, and when the inclination is larger than the specified value, the photoelectric conversion element Therefore, the angle of the photoelectric conversion element can be adjusted efficiently.

  Exemplary embodiments of an adjusting device and an adjusting method according to the present invention will be explained below in detail with reference to the accompanying drawings.

  First, the problems of the prior art will be described, and then the features of the present invention will be described. FIG. 9 is an overall view of a shaft of a conventional attitude angle detection device, and FIG. 10 is an explanatory diagram for explaining LD fixing conditions. As shown in FIG. 9, the shaft 10 includes a reference axis (AZ axis, EL axis) of the shaft and a coordinate axis (AZ ′ axis, EL ′) of a PSD (Position Sensing Detector; hereinafter simply referred to as PSD) light receiving surface. As shown in FIG. 10, LDs (Laser Diodes) 30 and 40 for irradiating the PSD 20 with laser light have respective laser optical axes as shown in FIG. The rotation center 50 is fixed to the shaft 10 so as to be orthogonal to each other.

  When the attitude angle detection device calculates the rotation angle of the rotating body, the laser light emitted from the LDs 30 and 40 is received by the light receiving surface of the PSD 20, and the position information of the light receiving point is detected to detect the position of the rotating body. The rotation angle of the rotator is calculated as an angle around three axes: a roll angle (not shown), a yaw angle (around the AZ axis shown in FIG. 9), and a pitch angle (around the EL axis shown in FIG. 9). .

  In order for the attitude angle detection device to calculate the rotation angle of the rotating body using the above-described method, as shown in Japanese Patent Application Laid-Open No. 2005-214864, the PSD light receiving surface is used for the convenience of the calculation. It was necessary to define the coordinate axes above.

FIG. 11 is a conceptual diagram related to the coordinate axis definition. As shown in the figure, position detection three-dimensional coordinates (A _x , A _y , A _z ) are defined by coordinate axes (AZ ′ axis, EL ′ axis) defined on the PSD light receiving surface.

As shown in FIG. 11, the A _x axis is defined as a vector having the rotation center 50 as the origin and moving toward the center of the PSD light receiving surface, and intersects the PSD light receiving surface perpendicularly. The A _y axis and the A _z axis are defined as vectors having the rotation center 50 as the viewpoint and having the same orientation as the AZ ′ axis and the EL ′ axis, respectively.

Then, when the optical axis of the laser light emitted from the LD 30 is displaced by the rotation of the rotating body, the attitude angle detection device detects the predefined position detection three-dimensional coordinates (A _x , A _y , A _z ). And the rotation angle of the rotating body was calculated based on the displacement of the optical axis.

  As described above, when the conventional attitude angle detection device accurately calculates the angle of the rotating body, it is a major premise that the coordinate axis defined on the PSD light receiving surface and the reference axis of the shaft are accurately matched. It has become. In addition, since the currently available PSD does not specify the coordinate axis of the light receiving surface with respect to the outer surface of the package, the PSD is directly applied to the shaft in advance so that the coordinate axis of the PSD light receiving surface coincides with the reference axis of the shaft. The method of bonding is taken.

  However, the work of fixing the coordinate axis of the PSD light-receiving surface according to the reference axis of the shaft has a problem that the burden on the operator is large.

  Conventionally, since the method of directly adhering and fixing the PSD to the shaft has been taken, there is no method of adjusting the deviation between the coordinate axis of the PSD light receiving surface and the reference axis of the shaft after attachment, and the rotating body This is a factor that deteriorates the accuracy of angle calculation. Furthermore, since the PSD is bonded and fixed to the shaft, when it is necessary to disassemble the PSD for replacement or the like, it is necessary to replace the entire shaft, which increases the cost.

  Therefore, in the present invention, in order to reduce the burden on the operator, the PSD light receiving surface is irradiated with laser light while moving the PSD to detect the coordinate values on the coordinate axes defined on the PSD light receiving surface, and the detected coordinates. An adjustment device for automatically adjusting the angle of the PSD based on the value is provided. Further, by maintaining the state of the PSD adjusted by the adjusting device and making it into an assembly (an assembly made up of a plurality of components), it is possible to replace the PSD efficiently and at low cost.

  Next, examples according to the present invention will be described. Here, first, after explaining the PSD fixing unit in which the adjustment device performs rotation adjustment, the configuration of the adjustment device will be described. 1 is a diagram showing a configuration of a PSD fixing part, and FIG. 2 is a cross-sectional view (cross section AA) of the PSD fixing part shown in FIG. As shown in FIG. 1, the PSD fixing unit 100 includes a PSD 110, a PSD light receiving surface 111, a component 120, and a component 130.

  A gap 140 exists between the component 120 and the component 130. The component 130 has mounting holes 131 to 134 and rotation adjustment holes 135 and 136. Among these holes, the mounting holes 131 to 134 are holes used when the shaft or the adjusting device and the PSD fixing portion 100 are fixed with screws, and the rotation adjusting holes 135 and 136 are used for adjusting the component 120 by the adjusting device. This is a hole used for rotation adjustment.

  Turning to the description of FIG. 2, the PSD 110 has a PSD terminal 110a for electrical connection with an adjustment device (not shown), and is connected to the adjustment device via PSD wiring holes 120a and 130a.

  In addition to the description of FIG. 1, the component 120 has a recess 121 into which the PSD 110 is inserted, and the PSD 110 is inserted into the recess 121 and bonded and fixed. The component 120 also has a pin 122 for rotating the PSD 110.

  In addition to the description of FIG. 1, the component 130 has a recess 137 into which the component 120 is inserted and a fitting hole 138 into which the pin 122 is fitted. Further, the component 130 is connected with a detent pin 150 for preventing the PSD fixing portion 100 from rotating.

  Next, the configuration of the adjusting device according to the present embodiment will be described. FIG. 3 is a functional block diagram illustrating the configuration of the adjustment device according to the present embodiment. As shown in the figure, the adjustment device 200 includes a PSD fixing unit 100, a PSD fixing base 201, a reference LD 205, an LD holder 205a, a PSD coordinate converter 210, a controller 220, and a rotation adjustment drive. Mechanism controller 230, rotation adjustment drive mechanisms 230a, 230b, pins 231, 232, stage drive mechanism controller 240, horizontal stage drive mechanism 240a, vertical stage drive mechanism 240b, horizontal movement stage 241 and vertical movement And a stage 242 for use.

  Among these, the PSD fixing base 201 is a base for fixing the PSD fixing unit 100 shown in FIG. In addition, when fixing the PSD fixing | fixed part 100 to the PSD fixing stand 201, an operator prepares for preparation. Here, the preparations performed by the worker will be described with reference to FIGS. 1 and 2. The worker adheres the PSD 110 to the recess 121 of the component 120 and inserts the component 120 into the component 130 (the pin on the back surface of the component 120). 122 is fitted into the fitting hole 138 of the component 130). The assembly so far is attached to the PSD fixing base 201 of the adjusting device 200 (the pin 122 coming out from the back surface of the component 130 and the locking pin 150 are inserted into the fitting holes provided in the PSD fixing base 201, Fix with screws using the mounting holes 131-134).

  Returning to the description of FIG. 3, the reference LD 205 is a device that irradiates the PSD light receiving surface 111 of the PSD fixing unit 100 with laser light, and is fixed by the LD holder 205 a. The reference LD 205 moves in the horizontal direction or the vertical direction as the horizontal movement stage 241 or the vertical movement stage 242 is driven.

  The PSD coordinate converter 210 is a device that acquires data output from the PSD terminal 110 a of the PSD fixing unit 100 and detects coordinate values on the PSD light receiving surface 111 irradiated with the laser light from the reference LD 205. . The PSD coordinate converter 210 holds information on the coordinate axes (defined AZ ′ axis and EL ′ axis) described with reference to FIGS. 9 to 11, and a coordinate value based on this coordinate axis (hereinafter referred to as PSD). Coordinate value) is detected. For example, the PSD coordinate converter 210 uses the intersection of the AZ ′ axis and the EL ′ axis as the origin of the coordinate axis, and subtracts the coordinate value of the origin from the absolute coordinate value on the PSD light receiving surface 111 irradiated with the laser light. Relative coordinate values may be detected as PSD coordinate values.

  The controller 220 calculates the inclination of the PSD 110 on the basis of the PSD coordinate value output from the PSD coordinate converter 210, and moves (rotation adjustment drive) for matching the coordinate axis of the PSD 110 with the reference axis of the shaft. This is a device for calculating the pushing amount of the mechanism;

  Here, the inclination calculation of the PSD 110 performed by the controller 220 will be described. FIG. 4 is an explanatory diagram for explaining the inclination calculation of the PSD 110 performed by the controller 220. First, after the controller 220 shows a method for calculating the inclination in the horizontal direction (EL ′ axis), a method for calculating the inclination in the vertical direction (AZ ′ axis) will be described.

  First, when calculating the inclination in the horizontal direction, the controller 220 inputs information on a predetermined movement amount with respect to the horizontal direction to the stage drive mechanism controller 240 to drive the horizontal movement stage 240, and to obtain two coordinates, For example, the coordinate A and the coordinate B are acquired, and the inclination in the horizontal direction is calculated.

  Here, the stage drive mechanism controller 240 is a device that drives the horizontal stage drive mechanism or the vertical stage drive mechanism 240 in accordance with movement amount information input from the controller 220. The stage drive mechanism controller 240 outputs a drive signal to the horizontal stage drive mechanism 240a or the vertical stage drive mechanism 240b when driving the horizontal movement stage 241 or the vertical movement stage 242. In addition, the stage drive mechanism controller 240 acquires position signals output from the horizontal stage drive mechanism 240a and the vertical stage drive mechanism 240b, and detects the amount of movement.

によって表すことができる。θｈが０となった場合に、ＥＬ’軸は、シャフトのＥＬ軸に対して平行となる。（制御器２２０は、水平方向に対する規定値を保持しており、θｈの値が規定値以下となった場合に、ＥＬ’軸がシャフトのＥＬ軸に対して平行になったと判定してもよい。） Returning to the description of the controller 220, a specific mathematical formula for the controller 220 to calculate the horizontal inclination θh is:

Can be represented by When θh becomes 0, the EL ′ axis is parallel to the EL axis of the shaft. (The controller 220 holds a specified value in the horizontal direction, and may determine that the EL ′ axis is parallel to the EL axis of the shaft when the value of θh is equal to or less than the specified value. .)

によって表すことができる。θｖが０となった場合に、ＡＺ’軸は、シャフトのＡＺ軸に対して平行となる。（制御器２２０は、水平方向に対する規定値を保持しており、θｖの値が規定値以下となった場合に、ＡＺ’軸がシャフトのＡＺ軸に対して平行になったと判定してもよい。） Further, when calculating the inclination in the vertical direction, the controller 220 inputs information on a predetermined movement amount with respect to the vertical direction to the stage drive mechanism controller 240 to drive the vertical movement stage 242 so that two coordinates are obtained. For example, the coordinate A and the coordinate C are acquired, and the inclination in the vertical direction is calculated. A specific mathematical formula for calculating the vertical inclination θv takes into account zero percent,

Can be represented by When θv becomes 0, the AZ ′ axis is parallel to the AZ axis of the shaft. (The controller 220 holds a specified value in the horizontal direction, and may determine that the AZ ′ axis is parallel to the AZ axis of the shaft when the value of θv is equal to or less than the specified value. .)

  Next, an example of how to obtain the adjustment movement amount performed by the controller 220 will be described. FIG. 5 is a movement amount calculation table held by the controller 220. That is, the controller 220 can determine the adjustment movement amount by comparing the value of the horizontal inclination θh or the vertical inclination θv with the movement amount calculation table, and rotates the information of the adjustment movement amount. Output to the adjustment movement mechanism controller 230. Note that the controller 220 may obtain the adjustment movement amount in any way. For example, the controller 220 uses a mathematical formula that can calculate the adjustment movement amount from the inclination (the inclination θh in the horizontal direction or the inclination θv in the vertical direction). It may be used instead of the calculation table.

  Here, the rotation adjustment drive mechanism controller 230 acquires the information of the adjustment movement amount from the controller 220, and the rotation adjustment drive mechanism 230a (the rotation adjustment drive mechanism 230a has the pin 231 set so that the acquired adjustment movement amount is obtained. Via the pin 232, the rotation adjusting drive mechanism 230b rotates the component 120 of the PSD fixing part 100 counterclockwise. Device).

  The rotation adjustment drive mechanism controller 230 outputs a drive signal to the rotation adjustment drive mechanism to be driven when driving the rotation adjustment drive mechanism 230a or 230b. Further, the rotation adjustment drive mechanism controller 230 acquires the position signals output from the rotation adjustment drive mechanisms 230a and 230b, and detects the movement amount.

  The controller 220 repeatedly performs adjustments on the PSD fixing unit 100 until the horizontal inclination θh and the vertical inclination θv are equal to or less than a specified value. Note that the controller 220 determines that the adjustment of the horizontal inclination θh and the vertical inclination θv has been completed (when the horizontal inclination θh and the vertical inclination θv are equal to or less than a predetermined value). Displays on the display (not shown) that the adjustment work has been completed and notifies the operator.

  In this case, the operator pours an adhesive into the gap 140 between the component 120 and the component 130 to bond and fix the component 120 and the component 130 to form an assembly. Then, when attaching the assembled PSD fixing part 100 to the shaft, the operator positions the pin 122 and the non-rotating pin 150 protruding from the component 130, and screws the shaft using the mounting holes 131 to 134. Secure with.

  Further, when replacing the PSD 110, the operator can remove the PSD 110 for each of the parts 120 and 130 by unscrewing the mounting holes 131 to 134. That is, it is not necessary to replace the PSD 110 with the shaft as in the conventional case, and the cost for the PSD replacement can be greatly reduced.

  Next, processing performed by the adjustment device 200 illustrated in FIG. 3 will be described. FIG. 6 is a flowchart showing processing performed by the adjustment apparatus 200. In this flowchart, only the process performed by the adjustment device 200 is shown, and description of work performed by the worker (such as work for attaching the PSD fixing unit 100 to the PSD fixing base) is omitted.

  As shown in the figure, in the adjustment device 200, the reference LD 205 irradiates the PSD light receiving surface 111 with laser light (step S101), and the controller 220 inputs information on the amount of movement to the stage drive mechanism controller 240. The horizontal movement stage 241 is driven in the horizontal direction (step S102).

  Then, the controller 220 acquires the PSD coordinate value from the PSD coordinate converter 210 (step S103), calculates a horizontal inclination (step S104), and determines whether the inclination is equal to or less than a specified value (step S105). ).

  When the inclination is larger than the specified value (No at Step S106), the controller 220 calculates the adjustment movement amount from the inclination, and outputs the calculated adjustment movement amount information to the rotation adjustment drive mechanism controller 230, and PSD. The rotational angle of the PSD light receiving surface 111 of the fixed unit 100 is adjusted (step S107), and the process proceeds to step S102.

  On the other hand, if the inclination is equal to or less than the specified value (step S106, Yes), the controller 220 inputs information on the amount of movement to the stage drive mechanism controller 240 to drive the vertical movement stage 242 (step S108). .

  Then, the controller 220 acquires the PSD coordinate value from the PSD coordinate converter 210 (step S109), calculates the inclination in the vertical direction (step S110), and determines whether the inclination is equal to or less than a specified value (step S111). ).

  When the inclination is larger than the specified value (No at Step S112), the controller 220 calculates the adjustment movement amount from the inclination, and outputs information on the calculated adjustment movement amount to the rotation adjustment drive mechanism controller 230, and PSD. The rotational angle of the PSD light receiving surface 111 of the fixed unit 100 is adjusted (step S113), and the process proceeds to step S108.

  On the other hand, when the inclination is equal to or less than the specified value (step S112, Yes), the controller 220 outputs and displays on the display (not shown) that the adjustment work is completed (step S114).

  As described above, in the adjustment apparatus 200, when the controller 220 drives the horizontal movement stage 241 or the vertical movement stage 242, the PSD coordinates are acquired, the inclination is calculated, and the calculated inclination is larger than the specified value. In this case, the adjustment movement amount is calculated, and the adjustment movement amount is output to the rotation adjustment drive mechanism controller 230 to adjust the rotation angle of the PSD light receiving surface 111, so that the burden on the operator can be reduced.

  As described above, in the adjusting device 200 according to the present embodiment, the reference LD 205 irradiates the PSD light receiving surface 111 with the laser light, the PSD coordinate converter 210 detects the PSD coordinates, and the controller 220 detects the PSD. Based on the coordinate value, it is determined whether or not the inclination of the coordinate axis defined on the PSD light receiving surface 111 is equal to or less than a specified value. If the inclination is larger than the specified value, the rotation adjustment drive mechanism controller 230 performs adjustment movement. The amount information is output to drive the rotation adjustment drive mechanism 230a or the rotation adjustment drive mechanism 230b to adjust the inclination of the coordinate axis on the PSD light receiving surface, so that the operator can define the coordinate axis and shaft defined on the PSD light receiving surface. Can be easily matched with the reference axis, greatly reducing the burden on the operator.

  In the present embodiment, after the adjustment of the inclination of the PSD light receiving surface by the adjustment device 200 is completed, an adhesive is poured into the gap 140 between the component 120 and the component 130, and the component 120 and the component 130 are bonded and fixed to form an assembly. However, the present invention is not limited to this. 7 is a diagram showing another configuration of the PSD fixing part, and FIG. 8 is a cross-sectional view (cross section AA) of the PSD fixing part shown in FIG.

  As shown in FIGS. 7 and 8, the PSD fixing part 300 has fixing screws 340 to 343. By using this fixing screw, the component 310 and the component 320 can be fixed without using an adhesive, so that only the component 310 in which the PSD 110 is embedded can be replaced. Such costs can be reduced.

  Further, as shown in the figure, the inclination of the PSD 110 can be manually adjusted by attaching a rotation adjusting screw 330 to the PSD fixing portion 300.

(Appendix 1) An adjustment device for adjusting the angle of the photoelectric conversion element,
Coordinate value detecting means for detecting a coordinate value on a coordinate axis defined on the light receiving surface of the photoelectric conversion element by irradiating a laser beam onto the light receiving surface of the photoelectric conversion element while moving the photoelectric conversion element; ,
Adjusting means for adjusting the angle of the photoelectric conversion element based on the coordinate value detected by the coordinate value detecting means;
An adjustment device comprising:

(Additional remark 2) Based on the said coordinate value, the said adjustment means is so that the reference axis of the rotary body in which the said photoelectric conversion element is installed, and the coordinate axis defined on the light-receiving surface of the said photoelectric conversion element may correspond. The adjustment device according to appendix 1, wherein an angle of the photoelectric conversion element is adjusted.

(Supplementary Note 3) The adjustment unit includes an inclination calculation unit that calculates an inclination of the coordinate axis based on the coordinate value, a determination unit that determines whether the inclination calculated by the calculation unit is a specified value or less, The adjustment apparatus according to appendix 1 or 2, further comprising an adjustment execution unit that adjusts an angle of the photoelectric conversion element when the determination unit determines that the inclination is larger than a specified value.

(Supplementary Note 4) The adjustment execution unit calculates an adjustment amount for adjusting the angle of the photoelectric conversion element based on the inclination, and adjusts the angle of the photoelectric conversion element based on the calculated adjustment amount. The adjustment device according to Supplementary Note 3.

(Additional remark 5) It is the adjustment method which adjusts the angle of a photoelectric conversion element, Comprising:
A coordinate value detecting step of detecting a coordinate value on a coordinate axis defined on the light receiving surface of the photoelectric conversion element by irradiating a laser beam onto the light receiving surface of the photoelectric conversion element while moving the photoelectric conversion element; ,
An adjustment step of adjusting the angle of the photoelectric conversion element based on the coordinate value detected by the coordinate value detection step;
The adjustment method characterized by including.

(Additional remark 6) The said adjustment process is based on the said coordinate value so that the reference axis of the rotary body in which the said photoelectric conversion element is installed, and the coordinate axis defined on the light-receiving surface of the said photoelectric conversion element may correspond. The adjustment method according to appendix 5, wherein the angle of the photoelectric conversion element is adjusted.

(Supplementary note 7) The adjustment step includes an inclination calculation step of calculating an inclination of the coordinate axis based on the coordinate value, a determination step of determining whether the inclination calculated by the calculation step is equal to or less than a specified value, The adjustment method according to appendix 5 or 6, further comprising an adjustment execution step of adjusting an angle of the photoelectric conversion element when the determination step determines that the inclination is larger than a specified value.

(Additional remark 8) The said adjustment execution process calculates the adjustment amount which adjusts the angle of the said photoelectric conversion element based on the said inclination, and adjusts the angle of the said photoelectric conversion element based on the calculated adjustment amount, It is characterized by the above-mentioned. The adjustment method according to appendix 7.

  As described above, the adjusting device and the adjusting method according to the present invention require that the coordinate axis on the photoelectric conversion element attached to the rotating body of the space stabilization mechanism and the reference axis of the rotating body be matched efficiently and quickly. Useful for adjustment devices and the like.

It is a figure which shows the structure of a PSD fixing | fixed part. It is sectional drawing of the PSD fixing | fixed part shown in FIG. It is a functional block diagram which shows the structure of the adjustment apparatus concerning a present Example. It is explanatory drawing for demonstrating the inclination calculation of PSD which a controller performs. It is the movement amount calculation table which a controller holds. It is a flowchart which shows the process which an adjustment apparatus performs. It is a figure which shows the other structure of a PSD fixing | fixed part. It is sectional drawing of the PSD fixing | fixed part shown in FIG. It is a general view of the shaft of the conventional attitude angle detection device. It is explanatory drawing for demonstrating the fixing conditions of LD. It is a conceptual diagram concerning a coordinate axis definition.

Explanation of symbols

10 Shaft 20,110 PSD (photoelectric conversion element)
30, 40 LD
50 Rotation center 100, 300 PSD fixing part 110a PSD terminal 111 PSD light receiving surface 120, 130, 310, 320 Parts 120a, 130a PSD terminal wiring hole 122 Pin 131, 132, 133, 134 Mounting hole 135 Rotation adjustment hole 121 , 137 Indentation 140 Clearance 150 Non-rotating pin 200 Adjusting device 201 PSD fixing base 205 Reference LD
205a LD holder 210 PSD coordinate converter 220 Controller 230 Rotation adjustment drive mechanism controllers 230a and 230b Rotation adjustment drive mechanisms 231 and 232 Pins 240 Stage drive mechanism controller 240a Horizontal stage drive mechanism 240b Vertical stage drive mechanism 241 Horizontal movement stage 242 Vertical movement stage 330 Rotation adjustment screw 340, 341, 342, 343 Fixing screw

Claims (5)

An adjustment device for adjusting the angle of the photoelectric conversion element,
Coordinate value detecting means for detecting a coordinate value on a coordinate axis defined on the light receiving surface of the photoelectric conversion element by irradiating a laser beam onto the light receiving surface of the photoelectric conversion element while moving the photoelectric conversion element; ,
Adjusting means for adjusting the angle of the photoelectric conversion element based on the coordinate value detected by the coordinate value detecting means;
An adjustment device comprising:   Based on the coordinate value, the adjusting means is configured to adjust the reference axis of the rotating body on which the photoelectric conversion element is installed and the coordinate axis defined on the light receiving surface of the photoelectric conversion element to coincide with each other. The adjustment device according to claim 1, wherein the angle of the conversion element is adjusted.   The adjusting means includes an inclination calculating means for calculating an inclination of the coordinate axis based on the coordinate value, a determining means for determining whether the inclination calculated by the calculating means is equal to or less than a specified value, and the determining means. The adjustment apparatus according to claim 1, further comprising an adjustment execution unit that adjusts an angle of the photoelectric conversion element when the inclination is determined to be larger than a specified value. An adjustment method for adjusting the angle of the photoelectric conversion element,
A coordinate value detecting step of detecting a coordinate value on a coordinate axis defined on the light receiving surface of the photoelectric conversion element by irradiating a laser beam onto the light receiving surface of the photoelectric conversion element while moving the photoelectric conversion element; ,
An adjustment step of adjusting the angle of the photoelectric conversion element based on the coordinate value detected by the coordinate value detection step;
The adjustment method characterized by including.   The adjustment step is based on the coordinate values so that the reference axis of the rotating body on which the photoelectric conversion element is installed matches the coordinate axis defined on the light receiving surface of the photoelectric conversion element. The adjustment method according to claim 4, wherein the angle of the conversion element is adjusted.

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