JP2007194097A - Charged particle transport mechanism - Google Patents

Charged particle transport mechanism Download PDF

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JP2007194097A
JP2007194097A JP2006011853A JP2006011853A JP2007194097A JP 2007194097 A JP2007194097 A JP 2007194097A JP 2006011853 A JP2006011853 A JP 2006011853A JP 2006011853 A JP2006011853 A JP 2006011853A JP 2007194097 A JP2007194097 A JP 2007194097A
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charged particle
transport mechanism
lens
half ring
contact
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Noriaki Kanamaru
訓明 金丸
Yoshihiro Ueno
良弘 上野
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Shimadzu Corp
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Shimadzu Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a charged particle transport mechanism which can prevent two sets of flexible cables for electrically connecting between opposed two lens electrodes from touching each other, as well as can reduce the number of the producing steps of the device therewith and simplify the fabrication method of those portions, thereby improving its reliability and maintainability. <P>SOLUTION: An assembling method of this charged particle transport mechanism comprises the steps of inserting a fastening screw 23 into a hole formed at a predetermined position for a lens electrode 4 which makes a set with four ones; engaging a nut 24 onto the fastening screw 23 and screwing it to an intermediate position; inserting a connection half ring 21 which is formed from parts of a connection part 21A, a stepped part 21B, and a contact 21C, from the side direction of the fastening screw 23 into a gap between the nut and a lens electrode, and fastening the fastening screw 23 tight; fixing a connection half ring 21 at opposed two lens electrodes 4, respectively; and inserting the other connection half ring 22 which has the reversed structure of the connection half ring 21 from the side direction on the rear side of the shown drawing, and fixing it to the other opposed two lens electrodes 4, respectively. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、荷電粒子の質量と電荷数によって運動性の異なる現象を利用して荷電粒子の選別を行い、被検物質の質量スペクトルを得る質量分析計(以下、MSと記載する)、特に液体クロマトグラフ(以下、LCと記載する)と組合せて質量分析を行う液体クロマトグラフ質量分析計(以下、LC/MSと記載する)に関する。LC/MSにおいては、前段のLCで試料の移動速度別の分離および分離物の定量分析が行われる。また後段のMSで分離物の電離(イオン化)、電離した荷電粒子の荷電粒子選別部への輸送、荷電粒子選別部における荷電粒子の質量と電荷数による選別が行われ、前記分離物の詳細な定性分析が行われる。少量の分離物で詳細な定性分析を行うためには、荷電粒子の損失の少ない輸送機構が重要である。   The present invention relates to a mass spectrometer (hereinafter referred to as MS), particularly a liquid, which selects charged particles by utilizing a phenomenon in which motility varies depending on the mass of the charged particles and the number of charges, and obtains a mass spectrum of a test substance. The present invention relates to a liquid chromatograph mass spectrometer (hereinafter referred to as LC / MS) that performs mass spectrometry in combination with a chromatograph (hereinafter referred to as LC). In LC / MS, separation according to the moving speed of the sample and quantitative analysis of the separated substance are performed in the preceding LC. Also, ionization (ionization) of the separated substance is performed in the subsequent MS, the ionized charged particles are transported to the charged particle sorting unit, and the charged particle sorting unit sorts the charged particles based on the mass and the number of charges. A qualitative analysis is performed. In order to conduct detailed qualitative analysis with a small amount of separation, a transport mechanism with little loss of charged particles is important.

以下、LC/MSを例に挙げて説明する。LC/MSにおいて、被検物質となる試料溶液はまず前段のLCで溶質ごとに分離された後、スプレーから大気中に噴霧される。スプレー先端には高電圧が印加されており、この高電圧で電離された霧状の荷電粒子(一般には陽イオン。以下、イオンと記載する)はMSの吸入口からMSの入射部に吸引され試料イオン流となる。試料イオン流は入射部の後段にあるQアレー(Q−array)およびオクタポールで輸送される。Qアレーは一般に偶数個のレンズ電極を1組として構成する。たとえば特許文献1には前記偶数個のレンズ電極によるイオンの輸送が記載されている。   Hereinafter, LC / MS will be described as an example. In LC / MS, a sample solution as a test substance is first separated for each solute in the previous LC, and then sprayed from the spray to the atmosphere. A high voltage is applied to the spray tip, and mist-like charged particles (generally positive ions, hereinafter referred to as ions) ionized at this high voltage are attracted from the MS inlet to the MS entrance. Sample ion flow. The sample ion stream is transported by a Q-array and octopole at the rear stage of the incident part. A Q array generally comprises an even number of lens electrodes as a set. For example, Patent Document 1 describes ion transport by the even number of lens electrodes.

Qアレーおよびオクタポールを通過した試料イオン流はカドラポールマスフィルタ(以下、QMS)でイオンの質量電荷比によって選別(フィルタリング)され、QMS電極に印加した電圧(高周波と直流の重畳電圧)に依存した特定の質量電荷比のイオンのみが電流として取り出される。QMS電極に印加した電圧を走査することにより質量スペクトルが得られる。   The sample ion flow that has passed through the Q array and the octopole is sorted (filtered) by the mass-to-charge ratio of the ions with a quadrapole mass filter (QMS) and depends on the voltage applied to the QMS electrode (superposed voltage of high frequency and direct current). Only ions having a specific mass-to-charge ratio are extracted as current. A mass spectrum is obtained by scanning the voltage applied to the QMS electrode.

以下、図5によって従来のMSの基本的な構造を説明する。図5(A)において、高電圧が印加されたスプレー1先端で電離され放射された噴霧試料イオン流(以下、試料イオン流と記載する)はカバー2、サンプリングコーン3からなる入射部に入射し、数組のレンズ電極4で構成されたQアレー部を通過する。なおこの時、質量分析に必要のない溶媒の大部分は、吸入孔Sから導入されサンプリングコーン3とカバー2の間隙から外部に噴出する窒素ガス流によって除去される。   Hereinafter, the basic structure of a conventional MS will be described with reference to FIG. In FIG. 5A, a sprayed sample ion stream (hereinafter referred to as a sample ion stream) ionized and radiated at the tip of the spray 1 to which a high voltage is applied is incident on an incident portion composed of a cover 2 and a sampling cone 3. , It passes through a Q-array part composed of several sets of lens electrodes 4. At this time, most of the solvent that is not necessary for mass spectrometry is removed by the nitrogen gas flow introduced from the suction hole S and ejected to the outside through the gap between the sampling cone 3 and the cover 2.

1組のレンズ電極4は図5(B)に示すように4個のレンズ電極4で構成されており、対向するレンズ電極4たとえば上下の2個のレンズ電極4には等しい輸送用電圧が印加される。一般に輸送用電圧は高周波電圧である。また左右の他の2個のレンズ電極4には前記高周波電圧と逆位相の高周波電圧が印加される。以下、両者を含め単にRF電圧と記載する。試料イオン流はRF電圧により発生するRF電界によって集束力を受けつつ、スキマー5を通過し後段のオクタポール部、さらにMSフィルタ部に導かれる。Qアレー部においては、設計上の必要に応じて複数組のレンズ電極4が用いられる。レンズ電極4の形状は各段毎に異なるものが使用される場合もあるが、図5では3組の同一形状のレンズ電極4を例示した。   One set of lens electrodes 4 is composed of four lens electrodes 4 as shown in FIG. 5B, and equal transport voltages are applied to the opposing lens electrodes 4, for example, the upper and lower lens electrodes 4. Is done. In general, the transport voltage is a high-frequency voltage. A high frequency voltage having a phase opposite to that of the high frequency voltage is applied to the other two left and right lens electrodes 4. Hereinafter, both are simply referred to as RF voltage. The sample ion flow passes through the skimmer 5 while being focused by the RF electric field generated by the RF voltage, and is guided to the octopole section at the rear stage and further to the MS filter section. In the Q array section, a plurality of sets of lens electrodes 4 are used as required in the design. Although the shape of the lens electrode 4 may be different for each stage, FIG. 5 illustrates three sets of lens electrodes 4 having the same shape.

オクタポール部は8本のロッドからなるオクタポール6で構成され、試料イオン流はオクタポール6に印加された電圧によりさらに輸送されアパーチャ7を通過してMSフィルタ部に入射する。試料イオン流はその質量電荷比(M/e)によって、4本のロッドまたはその断面が双曲線形状の4個の電極で構成されるカドラポール8に印加した分析電圧(高周波と直流の重畳電圧)によって質量選別を受け、特定の質量電荷比のイオンのみがコレクタ9から電流として取り出される。コレクタ9には2次電子倍増管が用いられることが多い。分析電圧を走査することによって試料イオン流の質量スペクトルを得ることができる。   The octopole part is composed of an octopole 6 composed of eight rods, and the sample ion stream is further transported by the voltage applied to the octopole 6 and passes through the aperture 7 and enters the MS filter part. The sample ion flow depends on the mass-to-charge ratio (M / e), and on the analysis voltage (superposed voltage of high frequency and direct current) applied to the four rods or the quadrupole composed of four electrodes whose cross sections are hyperbolic. After being subjected to mass selection, only ions having a specific mass-to-charge ratio are extracted from the collector 9 as current. The collector 9 is often a secondary electron multiplier. A mass spectrum of the sample ion stream can be obtained by scanning the analysis voltage.

試料イオン流とともに入射部に吸引された主に溶媒・キャリアガスなどからなる中性粒子および、MSフィルタ部の通過の際に質量選別により発散軌道を蛇行運動した後各電極と衝突して中性化された粒子などは、各部に設けられた排気口A、排気口Bおよび排気口Cから、各排気口に接続された真空ポンプ(図示せず)によって常時排気され除去される。   Neutral particles mainly composed of solvent / carrier gas attracted to the incident part along with the sample ion flow, and neutralized by colliding with each electrode after meandering the diverging orbit by mass selection when passing through the MS filter part The converted particles and the like are always exhausted and removed from the exhaust port A, exhaust port B, and exhaust port C provided in each part by a vacuum pump (not shown) connected to each exhaust port.

図6(A)および(B)はレンズ電極4部分の組立例および対向するレンズ電極4の導電接続例を3組のレンズ電極4の場合に対して示している。4個1組のレンズ電極4は絶縁物の保持リング10、絶縁物の絶縁スペーサ13を介して相互に絶縁され、締結ネジ12およびナット14で締結されている。対向するレンズ電極4はリード線11aおよび11bによりそれぞれ電気接続されている。なおリード線11aおよび11bは相互に接触しないように配設されているので、図6(A)ではリード線11aおよび11bが重なる部分を記号的に示している。   FIGS. 6A and 6B show an assembly example of the lens electrode 4 portion and a conductive connection example of the opposing lens electrode 4 in the case of three sets of lens electrodes 4. A set of four lens electrodes 4 are insulated from each other via an insulating holding ring 10 and an insulating insulating spacer 13 and fastened by a fastening screw 12 and a nut 14. The opposing lens electrodes 4 are electrically connected by lead wires 11a and 11b, respectively. Since the lead wires 11a and 11b are arranged so as not to contact each other, the portion where the lead wires 11a and 11b overlap is shown symbolically in FIG.

特開2000−149865号公報JP 2000-149865 A

従来の質量分析計の構造は以上のとおりであるが、この構造ではQアレー部内の、対向するレンズ電極4の電気接続のための構造に問題がある。すなわち、基本的に不定形である可撓性のリード線11aおよび11bは、真空環境に置かれる関係で放出ガス量の大きな有機物絶縁チューブで覆うことには問題があり、またガラス被覆などを行うにしても曲げの制限や使用中の破損などの問題が生じるため、通常裸線で使用される。しかしこの方法は、裸線の材料硬度が大きいほど作業性が悪く、また硬度が小さいほど、限られた空間に近接して配設されている複数のリード線相互または導体の外囲器などと常に接触の危険性を有しており、当該機器の信頼性を阻害する。   The structure of the conventional mass spectrometer is as described above. However, in this structure, there is a problem in the structure for electrical connection of the facing lens electrodes 4 in the Q array section. That is, the flexible lead wires 11a and 11b, which are basically indeterminate, have a problem in covering with an organic insulating tube having a large amount of released gas because they are placed in a vacuum environment, and they are covered with glass. Even so, problems such as bending limitations and breakage during use occur, and therefore, it is usually used with bare wires. However, in this method, the higher the material hardness of the bare wire, the worse the workability, and the lower the hardness, the multiple lead wires arranged in a limited space or a conductor envelope, etc. There is always a danger of contact, hindering the reliability of the equipment.

また、レンズ電極4部分の組立時にリード線11aおよび11bをレンズ電極4に確実に締結するためには、リード線11aおよび11bの端部にラグ金具等の補助部品をロウ付けなどの方法であらかじめ固定しておくことが望まれるが、この方法は常温の使用時においても、また特に真空度を向上させるための焼きだし処理(ベークアウト)時においても放出ガス量を増加させ、また焼きだし温度も制限され、真空中で使用される当該機器の性能に問題を生じていた。   Further, in order to securely fasten the lead wires 11a and 11b to the lens electrode 4 when the lens electrode 4 is assembled, an auxiliary component such as a lug fitting is previously brazed to the end portions of the lead wires 11a and 11b. Although it is desirable to keep it fixed, this method increases the amount of released gas even when used at room temperature, and especially during the baking process (bakeout) to improve the vacuum, and the baking temperature. However, there was a problem with the performance of the equipment used in vacuum.

さらに従来の構造では不定形の可撓性部品の形状を適切に保って組立を行い、またリード線相互または質量分析計の外囲器などとの不測の接触が生じないように部品および当該機器を保管・輸送し、また管理する必要があるため、作業効率や信頼性、保守性に問題があった。本発明はこのような問題点を解決する手段を提供することを目的とするもので、当該機器の製造工数の低減、ならびに信頼性、保守性の向上を図るための発明である。   Furthermore, in conventional structures, assembly is performed with the shape of the irregularly shaped flexible part appropriately maintained, and the parts and the device are protected so that unexpected contact with the lead wires or the envelope of the mass spectrometer does not occur. There is a problem in work efficiency, reliability, and maintainability because it is necessary to store, transport, and manage the equipment. An object of the present invention is to provide means for solving such problems, and is an invention for reducing the number of manufacturing steps of the device, and improving reliability and maintainability.

本発明は上記課題を解決するために、荷電粒子輸送機構において、対向するそれぞれのレンズ電極と接触し電気接触されるそれぞれの接触板と、前記荷電粒子流の通過領域の外に配設され前記それぞれの接触板を電気的に接続する接続板を設ける。   In order to solve the above-described problems, the present invention provides a charged particle transport mechanism in which a contact plate that is in contact with and electrically contacts each lens electrode facing each other, and is disposed outside a passage region of the charged particle flow. A connection plate for electrically connecting each contact plate is provided.

本発明によれば、形状の定まった放出ガス量の少ない部品を使用して、対向するレンズ電極同士を簡単確実に電気的に接続でき、組立後の形状変化も生じないため、当該機器の組立が簡単になり、当該機器の製造工数の低減、ならびに信頼性、保守性の向上が達成される。   According to the present invention, the lens electrodes facing each other can be easily and reliably electrically connected to each other using a part having a small amount of released gas with a fixed shape, and no change in shape after assembly occurs. Thus, the number of manufacturing steps of the device can be reduced, and reliability and maintainability can be improved.

本発明が提供する質量分析計の特徴は、対向するレンズ電極面のそれぞれと接触する接触板と、接触板を接続板にて接続したことにある。   A feature of the mass spectrometer provided by the present invention is that a contact plate that contacts each of the opposing lens electrode surfaces is connected to the contact plate by a connection plate.

以下図示例にしたがって説明する。なお図1および図2において、図5および図6と同符号の部品の構造および動作は図5および図6と同一である。図1(A)は本発明のレンズ電極4部分の構成を示す正面図、図1(B)は同部分の斜視図、図2はレンズ電極4と接触板21Cが接する部分の詳細図である。本発明の接続手段として機能する接続ハーフリング21は、接続板21A、段差部21Bおよび接触板21Cから構成され一体化されている。接続ハーフリング21の材質としては銅板、アルミニウム板、ステンレス板など、導電性の良好な材料が挙げられる。接触板21Cはその端部にU字形凹部Uを持ち、U字形凹部U、締結ネジ23およびナット24で接続ハーフリング21がレンズ電極4に締結される。   This will be described with reference to the illustrated example. In FIGS. 1 and 2, the structure and operation of components having the same reference numerals as those in FIGS. 5 and 6 are the same as those in FIGS. 1A is a front view showing the configuration of the lens electrode 4 portion of the present invention, FIG. 1B is a perspective view of the same portion, and FIG. 2 is a detailed view of a portion where the lens electrode 4 and the contact plate 21C are in contact with each other. . The connection half ring 21 functioning as the connection means of the present invention is composed of a connection plate 21A, a step portion 21B, and a contact plate 21C, and is integrated. Examples of the material of the connection half ring 21 include materials having good conductivity such as a copper plate, an aluminum plate, and a stainless plate. The contact plate 21 </ b> C has a U-shaped recess U at its end, and the connection half ring 21 is fastened to the lens electrode 4 by the U-shaped recess U, the fastening screw 23 and the nut 24.

この際、最初に締結ネジ23をレンズ電極4の規定の孔に挿入し、ナット24を中間位置まで螺入した後、U字形凹部Uを利用して接続ハーフリング21を図2に示すように横方向から挿入し、本締めを行って締結を完了することができる。段差部21Bは、接続板21Aと接触板21Cを軸心方向にたとえば数mmの段差を確保して一体化する。一体化の方法は単に一枚の平面板を切り抜き、接続板21A、段差部21Bおよび接触板21Cの各寸法に合致するように曲げ加工しても、溶接などの電導性のある方法で固着しても良い。   At this time, first, the fastening screw 23 is inserted into the prescribed hole of the lens electrode 4 and the nut 24 is screwed to the intermediate position. Then, the connection half ring 21 is formed using the U-shaped recess U as shown in FIG. It can be inserted from the side and final tightening can be completed. The step portion 21B integrates the connecting plate 21A and the contact plate 21C while securing a step of, for example, several mm in the axial direction. The integration method is simply cutting out a single flat plate and bending it so as to match the dimensions of the connecting plate 21A, stepped portion 21B and contact plate 21C, and fixing by a conductive method such as welding. May be.

接続ハーフリング21および接続ハーフリング22は反対方向からレンズ電極4と接続される。なお接続ハーフリング21とともに本発明の接続手段として機能する接続ハーフリング22は、説明上接続ハーフリング21と別符号を与えたが、両者は同構造の部品を表裏に配置したものであるので、接続ハーフリング22の詳細な説明は省略する。前記のようにU字形凹部Uを設けた効果で、図2に示すごとくあらかじめ締結ネジ23にナット24を中間位置まで螺入した状態で接触板21Cを横位置から挿入することができるので、組立が効率的になり、組立工程が迅速化される。また図1(A)では接続ハーフリング21と接続ハーフリング22は約90゜の範囲で重なっているが、段差部21Bの効果で両者は軸心方向の前後に配置されるので、接触などの干渉は生じない。なお、図1では接続ハーフリング21側では紙面表面側に締結ネジ23が、また接続ハーフリング22側では紙面表面側にナット24が示されているが、紙面表面側に全部の締結ネジ23、裏面側に全部のナット24を配設しても特別な支障は生じない。   The connection half ring 21 and the connection half ring 22 are connected to the lens electrode 4 from opposite directions. In addition, although the connection half ring 22 which functions as a connection means of the present invention together with the connection half ring 21 is given a different symbol from the connection half ring 21 for the sake of explanation, both are parts having the same structure arranged on the front and back, A detailed description of the connection half ring 22 is omitted. Since the U-shaped recess U is provided as described above, the contact plate 21C can be inserted from the lateral position with the nut 24 screwed into the intermediate screw 23 in advance as shown in FIG. Is efficient and the assembly process is accelerated. In FIG. 1A, the connection half ring 21 and the connection half ring 22 overlap each other within a range of about 90 °. However, because of the effect of the stepped portion 21B, both are arranged in front and rear in the axial direction. There is no interference. In FIG. 1, the fastening screw 23 is shown on the paper surface side on the connection half ring 21 side, and the nut 24 is shown on the paper surface side on the connection half ring 22 side. Even if all the nuts 24 are arranged on the back side, no special trouble occurs.

本発明は上記の実施例に限定されるものではなく、さらに種々の変形実施例を挙げることができる。たとえば図1では1組のレンズ電極4は2対4枚であるが、2対以上あればよい。したがって接続板21Aは必ずしも軸心方向と直交している必要はない。また接続板21Aは半円形である必要はなく、楕円形や多角形の一部の形状あるいは直線部があっても良い。段差部21Bの方向は必ずしも軸心に平行方向には限定されない。段差部21Bを複数箇所設けることもできる。また段差部21Bは接続板21A同士の接触を回避するための手段として有用であるが、段差部21Bを使用せず、接続板21Aと接触板21Cを直接接続し、接続板21A自身を軸心方向に3次元的に湾曲させ、接続板同士の接触を回避しても良い。さらにレンズ電極4と接触板21Cの接触は面接触である必要はなく、たとえば接触板21Cの一部に突起を作成し、点接触とすることも考えられる。   The present invention is not limited to the above-described embodiments, and various modifications can be given. For example, in FIG. 1, the pair of lens electrodes 4 is two to four, but two or more pairs are sufficient. Therefore, the connecting plate 21A does not necessarily need to be orthogonal to the axial direction. Further, the connecting plate 21A does not have to be semicircular, and may have an elliptical shape, a partial shape of a polygon, or a straight portion. The direction of the stepped portion 21B is not necessarily limited to the direction parallel to the axis. A plurality of step portions 21B may be provided. The step portion 21B is useful as a means for avoiding contact between the connection plates 21A, but without using the step portion 21B, the connection plate 21A and the contact plate 21C are directly connected, and the connection plate 21A itself is an axis. It may be curved three-dimensionally in the direction to avoid contact between the connecting plates. Furthermore, the contact between the lens electrode 4 and the contact plate 21C does not have to be a surface contact. For example, a protrusion may be formed on a part of the contact plate 21C to make a point contact.

接続板21Aは図3の接続板25Aに示すように、図1(B)と異なる方向を厚み方向とし、そこに段差部25Bおよび接触板25Cを一体化してもよい。またU字形凹部Uの形状はU字形に限定されるものではなく、U字形の底部にたとえばフラスコの断面状のふくらみを設けて組立時の位置決めおよび抜け止め効果をさらに改善しても良い。凹部を引きかけ形状(鈎形など)とし、または凹部に替えて円孔などとしても本発明の効果は損なわれない。また図4の接触板26Cに示すように、U字形凹部Uの端部を平面でなく、僅かに持ち上げた形状として組立時に接触板26Cと図2の締結ネジ23をさらに抜けにくくし作業性を改善することも考えられる。本発明はこれらをすべて包含する。また締結部材として締結ネジ23を例にあげ説明したが、ネジを用いない締結部材も使用可能で締結ネジに限定されない。   As shown in the connection plate 25A in FIG. 3, the connection plate 21A may have a thickness direction in a direction different from that in FIG. 1B, and the step portion 25B and the contact plate 25C may be integrated there. Further, the shape of the U-shaped recess U is not limited to the U-shape, and for example, a bulge having a cross section of a flask may be provided at the bottom of the U-shape to further improve the positioning and retaining effect during assembly. The effect of the present invention is not impaired even if the concave portion has a hooked shape (such as a bowl shape) or a circular hole instead of the concave portion. Also, as shown in the contact plate 26C in FIG. 4, the end of the U-shaped recess U is not flat but slightly lifted so that the contact plate 26C and the fastening screw 23 in FIG. It can be improved. The present invention includes all of these. Although the fastening screw 23 has been described as an example of the fastening member, a fastening member that does not use a screw can be used and is not limited to the fastening screw.

本発明は、イオンの質量と電荷数によって運動性の異なる現象を利用してイオンの選別を行い、被検物質の質量スペクトルを得る質量分析計、特に液体クロマトグラフと組合せて質量分析を行う液体クロマトグラフ質量分析計
に適用することができる。
The present invention relates to a mass spectrometer that obtains a mass spectrum of a test substance by using a phenomenon in which motility is different depending on the mass of ions and the number of charges, and in particular a liquid for mass analysis in combination with a liquid chromatograph It can be applied to a chromatograph mass spectrometer.

本発明の構成を示す図で図(A)は横断面を示し、図(B)はレンズ電極と接続板との関係を斜視的に示す図である。FIG. 1A is a diagram illustrating a configuration of the present invention, FIG. 1A is a cross-sectional view, and FIG. 2B is a perspective view illustrating a relationship between a lens electrode and a connection plate. 本発明の接続ハーフリングとレンズ電極の固定方法を示す図である。It is a figure which shows the fixing method of the connection half ring and lens electrode of this invention. 本発明の変形実施例を示す図である。It is a figure which shows the modification Example of this invention. 本発明の他の変形実施例を示す図である。It is a figure which shows the other modified Example of this invention. 従来の質量分析計の構成例を示す図である。It is a figure which shows the structural example of the conventional mass spectrometer. 従来の質量分析計のレンズ電極部の縦断面を示す図である。It is a figure which shows the longitudinal cross-section of the lens electrode part of the conventional mass spectrometer.

符号の説明Explanation of symbols

1 スプレー
2 カバー
3 サンプリングコーン
4 レンズ電極
5 スキマー
6 オクタポール
7 アパーチャ
8 カドラポール
9 コレクタ
10 保持リング
11a リード線
11b リード線
12 締結ネジ
13 絶縁スペーサ
14 ナット
21 接続ハーフリング
21A 接続板
21B 段差部
21C 接触板
22 接続ハーフリング
23 締結ネジ
24 ナット
25A 接続板
25B 段差部
25C 接触板
26C 接触板
A 排気口
B 排気口
C 排気口
S 吸入孔
U U字形凹部
DESCRIPTION OF SYMBOLS 1 Spray 2 Cover 3 Sampling cone 4 Lens electrode 5 Skimmer 6 Octapole 7 Aperture 8 Quadrapole 9 Collector 10 Holding ring 11a Lead wire 11b Lead wire 12 Fastening screw 13 Insulating spacer 14 Nut 21 Connection half ring 21A Connection plate 21B Step part 21C Contact Plate 22 Connection half ring 23 Fastening screw 24 Nut 25A Connection plate 25B Stepped portion 25C Contact plate 26C Contact plate A Exhaust port B Exhaust port C Exhaust port S Suction hole U U-shaped recess

Claims (3)

軸心に沿って試料の荷電粒子流を入射させる入射部と、入射部の後段における前記軸心を挟んで対向する少なくとも二対のレンズ電極を備え、このそれぞれのレンズ電極に輸送用電圧を印加し、軸心の周囲に発生する電界により試料荷電粒子を次段に輸送する荷電粒子輸送機構において、前記対向するそれぞれのレンズ電極と接触され電気的に接続されるそれぞれの接触板と、前記荷電粒子流の通過領域外に配設され前記それぞれの接触板を電気的に接続する接続板を設けたことを特徴とする荷電粒子輸送機構。   An incident part for allowing the charged particle flow of the sample to enter along the axial center and at least two pairs of lens electrodes facing each other with the axial center in the subsequent stage of the incident part, and applying a transport voltage to each of the lens electrodes In the charged particle transport mechanism for transporting the sample charged particles to the next stage by the electric field generated around the axis, the contact plates that are in contact with and electrically connected to the opposing lens electrodes, and the charge A charged particle transport mechanism characterized in that a connection plate is provided outside the particle flow passage region to electrically connect the contact plates. 接触板には、レンズ電極との接触を固定する締結部材が挿入できる凹部が形成されていることを特徴とする請求項1記載の荷電粒子輸送機構。   The charged particle transport mechanism according to claim 1, wherein the contact plate is formed with a recess into which a fastening member for fixing contact with the lens electrode can be inserted. 荷電粒子がイオンであることを特徴とする請求項1または2に記載の荷電粒子輸送機構。   The charged particle transport mechanism according to claim 1, wherein the charged particle is an ion.
JP2006011853A 2006-01-20 2006-01-20 Charged particle transport mechanism Withdrawn JP2007194097A (en)

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Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101694729B (en) * 2009-10-21 2011-07-20 山西科泰微技术有限公司 Data protecting container releasing device for ships

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101694729B (en) * 2009-10-21 2011-07-20 山西科泰微技术有限公司 Data protecting container releasing device for ships

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