JP2007194030A - Vacuum-resisting multipole penetration connector and manufacturing method of the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive vacuum-resisting multipole penetration connector usable in a high-vacuum environment, and high in versatility; and to provide a manufacturing method of the same. <P>SOLUTION: This vacuum-resisting multipole penetration connector 14 is manufactured through processes of: applying an epoxy-based adhesive 145 to one-side insulator 141 on the side of a camera body; inserting pin contacts 143, ... with flanges into a plurality of holes (a), ... of the insulator 141 with the adhesive 145 applied thereto; and filling the epoxy-based adhesive 145 between the insulators 141 and 142 and between the pin contacts 143, ... and the insulators 141 and 142 by inserting the pin contacts 143, ... inserted into the holes (a), ... of the insulator 141 into the holes (a), ... of the other-side insulator 142 to tightly fit the pair of insulators 141 and 142 to each other. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a vacuum-resistant multipolar through connector used in a high vacuum environment and a method of manufacturing the connector.

  Furthermore, the present invention relates to a vacuum-resistant multipolar through connector that is suitable for use in circuit connection in a vacuum environment of a CCD that is provided in a housing placed in a vacuum environment and that operates in an atmospheric environment.

A connector that separates the atmosphere side and the vacuum side requires high confidentiality. For example, when using a vacuum-resistant TV camera in a vacuum environment, the camera needs to be prepared with a connector for connecting to the cable, but in a vacuum environment, "gas released from metal and resin materials" Since it is necessary to take preventive measures against “leakage gas from the fitting gap”, it is not possible to use a connector that is generally distributed. On the other hand, there is a special hermetic connector that can be used for vacuum resistance, but the multi-pole connector has a large outer shape and is unsuitable for mounting on a small camera. Since there is a problem such as requiring sealing welding for mounting, there is a problem that the practicality is poor.
Japanese Patent Laid-Open No. 10-189091

  As described above, conventionally, there has been a problem that there is no inexpensive and highly versatile multipolar connector that requires high confidentiality to separate the atmosphere side and the vacuum side.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide an inexpensive and versatile vacuum-resistant multipolar through connector that can be used in a high vacuum environment and a method for manufacturing the connector.

  The present invention is a vacuum-resistant multipolar through connector that separates the atmosphere side and the vacuum side, and includes a pair of insulators having a plurality of holes, a plurality of pin contacts penetrating the holes of the insulator, and a mutual connection between the insulators. And an adhesive filled in between.

  The present invention is also a vacuum-resistant multi-pole through connector for connecting a CCD operating in an atmospheric environment provided in a housing placed in a vacuum environment in the vacuum environment, the surface exposed in the housing being A first insulator having a surface, a second insulator having a surface exposed to the outside of the housing, and a plurality of holes provided in each surface of the first and second insulators, and standing on the insulator And a plurality of pin contacts, and an epoxy adhesive filled between the first and second insulators.

  Further, the present invention is a method for manufacturing a vacuum-resistant multi-pole through connector that separates the atmosphere side and the vacuum side, and among the pair of insulators having holes through which a plurality of pin contacts penetrates, the other of the one insulator A first step of applying an epoxy-based adhesive on a surface to be overlapped with the insulator, a second step of inserting a pinned pin contact into a hole of the insulator to which the adhesive is applied, and a step of The pin contact inserted into the hole is inserted into the hole of the other insulator to closely contact the pair of insulators, and the epoxy-based adhesion between the pair of insulators and between the pin contact and the insulator And a third step of filling the agent.

  It is possible to provide an inexpensive and versatile vacuum-resistant multipolar through connector that can be used in a high vacuum environment.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 shows the overall configuration of a camera apparatus using a vacuum-resistant multipolar through connector according to an embodiment of the present invention.
The vacuum-resistant camera 10 according to the embodiment of the present invention includes a vacuum-resistant flexible composite cable 20 in a vacuum chamber (for example, a vacuum chamber) 1 in a high vacuum environment of about 10 ⁻⁶ [Pa]. By using this, it is possible to observe (monitor) the object to be inspected (subject) 2 by arbitrary position and posture control in the vacuum chamber 1. The vacuum-resistant multipolar through connector according to the present invention is used for the connection interface between the vacuum-resistant camera 10 and the vacuum-resistant flexible composite cable 20. Further, the vacuum-resistant multipolar through connector according to the present invention has a structure applicable to a connection port (flange portion) of a vacuum chamber to which the vacuum-resistant flexible composite cable 20 is connected.

The vacuum-resistant camera 10 using the vacuum-resistant flexible composite cable 20 can freely position the object to be inspected (subject) 2 in the vacuum chamber 1 and adjust the alignment in the vicinity of the object to be inspected. This makes it possible to realize a TV camera for observation that allows easy positioning and angle setting. In addition, while realizing the same electrical characteristics as a general-purpose camera, a vacuum-proof camera with a camera cable that emits almost no gas into the vacuum environment even in a high vacuum environment of about 10 ⁻⁶ [Pa] is realized. is doing. In order to realize this vacuum-resistant camera, the vacuum-resistant camera 10 and the vacuum-resistant flexible composite cable 20 operate stably even when exposed to a high vacuum with a degree of vacuum of 10 ⁻⁶ [Pa]. In addition, the structure and the material structure are such that the emission of impurities (unnecessary gas emission) to the vacuum space is minimized.

  The vacuum chamber 1 is provided with a flange 40 having a sealed structure including a through connector 30 having a connection interface for the vacuum-resistant flexible composite cable 20. The vacuum-resistant camera 10 placed in the vacuum chamber 1 is provided outside (atmosphere side) of the vacuum chamber 1 via a vacuum-resistant flexible composite cable 20 and a through connector 30 provided on the flange 40. The controller 50 is connected to the circuit. The flange 40 has a shape and strength in accordance with the standard and dimensions of the vacuum chamber 1. The through connector 30 has a highly airtight structure. The controller 50 sends a drive signal to the image sensor provided in the vacuum resistant camera 10 and outputs a video signal according to the output signal of the image sensor to the outside.

  A vacuum-resistant camera 10 provided in the vacuum chamber 1 includes a camera housing that houses an imaging device, a lens mount that mounts a lens that forms an image on the imaging device, and a vacuum-proof multipolar penetration that connects the imaging device to a circuit. A connector and a jacket covering the connector, and the camera housing is hermetically sealed with a lens mount and a connector jacket as partition walls. As a result, the image pickup device accommodated in the camera housing is placed in the atmosphere on the atmosphere side in the vacuum region.

  The outer casing exposed to the vacuum of the vacuum resistant camera 10 is configured using a metal material that emits very little gas in the vacuum. Here, the camera casing, the lens mount, and the jacket constituting the outer casing of the vacuum resistant camera 10 are all made of stainless steel. The specific structure of the vacuum resistant camera 10 will be described later with reference to FIGS.

  A vacuum-resistant flexible composite cable 20 provided in the vacuum chamber 1 is a signal cable connected to a vacuum-resistant multipolar through connector (see reference numeral 14 in FIGS. 7 to 11) according to an embodiment of the present invention. It is composed of materials and structures that minimize the emission of impurities in a vacuum, and is ideal for camera signals (CCD direct drive signals) with a multicore cable structure that includes constant impedance signal lines (coaxial core lines). Transmission is possible.

  2 and 3 show the cross-sectional structure of the vacuum-resistant flexible composite cable 20, and FIG. 8 shows the same cable provided with a cable connector.

  The vacuum-resistant flexible composite cable 20 is manufactured in consideration of the wire and the manufacturing method so as not to cause air accumulation between the wires and the core wire in a vacuum and to prevent unnecessary gas from being released. As shown in FIG. 3, the coaxial core wires 21, 21,. Are twisted together and passed through the braided tube 23, and then the twists of the coaxial core wires 21, 21,... And the other core wires 22, 22,. Manufactured by making the gap between the core wires dense and baking. Each of the core wires 21 and 22 has a flexible cable structure using a stranded wire for the internal conductors 21a and 22a so as to maintain flexibility and withstand long-term use. It has almost the same flexibility as a flexible cable. Also, fluorine resin is used for the insulating materials 21b and 22b of the core wires 21 and 22, and the conductors 21a and 22a, the braided shield 21c, and the braided tube 23 of the core wires 21 and 22 are silver plated wires. The material composition does not release gas. In the baking process, vacuum baking is performed at about 200 ° C. for 10 to several tens hours to remove unnecessary gas components in the resin.

The vacuum-resistant flexible composite cable 20 manufactured in this way is a resin-insulated cable, and the cable itself bends very softly, so that it is similar to a general camera cable used in the atmosphere. Flexibility can be realized, and the camera can be freely moved and handled in the vacuum chamber 1 according to the subject. With such a cable structure, an economically advantageous configuration and electrical characteristics are equivalent to those of a general-purpose camera cable, but gas emission to the vacuum environment is almost zero even at 10 ⁻⁶ [Pa]. The vacuum resistant flexible camera cable can be realized.

  As shown in FIGS. 4 and 8, one end of the vacuum resistant flexible composite cable 20 is provided with a vacuum resistant multipolar through connector (FIGS. 7 to 7) provided in the housing of the vacuum resistant camera 10. 11 is provided with a cable connector 28 that is coupled to the through connector 30 of the flange 40 at the other end.

  The assembled structure of each part of the vacuum resistant camera 10 provided in the vacuum chamber 1 together with the above-described vacuum resistant flexible composite cable 20 is shown in FIGS. The external appearance structure of the vacuum resistant camera 10 is shown in FIG. 4, the assembly structure of the camera head portion of the vacuum resistant camera 10 is shown in FIGS. 5 and 6, and a vacuum resistant multipolar through connector and a jacket portion covering this connector 7 and FIG. 8, and the assembly structure of the vacuum-proof multi-pole through connector is shown in FIGS.

  As shown in FIGS. 4 to 8, the vacuum-resistant camera 10 provided in the vacuum chamber 1 includes a camera housing 12 that houses a camera body 11 that is configured by an image sensor (CCD in this embodiment), and an image sensor. A lens mount 13 for mounting a lens for imaging, a vacuum-resistant multi-pole through connector 14 for connecting an image pickup device in a circuit, and a connector jacket (connector case) 15 for covering the through connector 14.

  Further, as shown in FIG. 4, a clamp fitting 18 for attaching the vacuum-resistant camera 10 to a camera moving mechanism (manipulator) (not shown) is attached to the outer peripheral portion of the camera housing 12. FIG. 4 illustrates a state where the cable connector 28 provided at one end of the vacuum resistant flexible composite cable 20 is fitted to the vacuum resistant multipolar through connector 14 provided in the connector jacket 15. Yes.

  The metal parts exposed to the vacuum region, such as the camera housing 12, the lens mount 13, and the connector jacket 15, the clamp metal fitting 18, and the outer housing of the cable connector 28 that constitute the outer casing of the vacuum-resistant camera 10, Each is made of stainless steel. Although the lens and the lens case attached to the lens mount 13 are not shown in the drawing, the lens case attached to the lens mount 13 is also made of stainless steel.

  As shown in FIGS. 5 and 6, an O-ring 133 for maintaining confidentiality, a windshield 134, and a slip plate 135 are arranged on the imaging surface portion 13b of the lens mount 13, and the glass presser 132 is screwed to the imaging surface portion 13b. Thus, the windshield 134 is attached to the lens mount 13. Further, as shown in FIG. 6, a mount adapter 136 for mounting a lens case (not shown) is screwed onto the imaging surface portion 13b of the lens mount 13 and fixed with a tightening screw. 136 is attached. FIG. 6B shows an attachment state when the lens mount 13 is viewed from the imaging surface side.

  As shown in FIGS. 5 and 6, the camera body 11 is inserted into the camera mounting portion 13 a of the lens mount 13, the camera holder 131 is screwed into the lens mount 13, and the camera body is attached to the camera mounting portion 13 a of the lens mount 13. 7, as shown in FIG. 7, one end of the cylindrical camera housing 12 is screwed to the housing joint portion 13 c of the lens mount 13 with an O-ring 137 for maintaining confidentiality interposed therebetween. By attaching the camera housing 12 around the main body 11, the camera head portion of the vacuum resistant camera 10 is configured. Further, as shown in FIGS. 7 and 8, a connector jacket 15 provided with a vacuum-resistant multi-pole through connector 14 is screwed to the other end of the camera housing 12 with an O-ring 151 for maintaining confidentiality interposed therebetween. Then, by attaching the connector jacket 15 to the camera housing 12, the vacuum resistant camera 10 in which the camera housing 12 is sealed is configured. Reference numeral 19 shown in FIG. 7 is an internal wiring that connects the camera body 11 and the vacuum-proof multipolar through connector 14 in the vacuum-proof camera 10.

  As shown in FIGS. 9 to 11, the vacuum-resistant multipolar through connector 14 provided in the connector jacket 15 includes a pair of insulators 141, 142 having a plurality of holes a, and holes a of the insulators 141, 142. ,... And a plurality of pin contacts 143... And an adhesive 145 filled between the insulators 141 and 142. The insulators 141 and 142 are formed of a polyether ether ketone (PEEK) resin. The pin contacts 143,... Are plated with gold or electroless nickel that does not contain Sn and Zn components. As the adhesive 145, a two-component mixed epoxy adhesive is used.

  This vacuum-resistant multipolar through connector 14 is a first one in which an epoxy adhesive 145 is applied to one insulator 141 on the camera body side of a pair of insulators 141 and 142 having holes through which a plurality of pin contacts penetrate. , The second step of inserting pinned pin contacts 143 into the holes a of the insulator 141 coated with the adhesive 145, and the pins inserted into the holes a of the insulator 141. The contacts 143 are inserted into the holes a of the other insulator 142 so that the pair of insulators 141 and 142 are brought into close contact with each other, and between the pair of insulators 141 and 142 and between the pin contacts 143 and the insulators 141 and 142. The third step of filling the epoxy adhesive 145 between the pins and the pin contacts 143. The adhesive 145 exiting run off from the peripheral portion of the adhesive 145 and the insulator 141 and 142 was removed, is prepared by passing through a fourth step of curing the adhesive 145.

  Of the pair of insulators 141 and 142, one insulator 141 on the camera body side is formed with a recessed portion A on the surface side to be joined to the other insulator 142 as shown in FIG. A plurality of holes a for attaching pin contacts are provided at the bottom. The recessed part A is formed with a high collar part B and a low collar part C, and the collar part C serves as a relief groove for an excess of the adhesive 145 applied to the concave part A.

  In the first step, the adhesive 145 is applied to the recessed portion A of the insulator 141 to a height that exceeds the flange portion C.

  In the second step, pinned pin contacts 143,... Are inserted into holes a,... Provided in the bottom of the recessed portion A of the insulator 141.

  In the third step, the pin contacts 143,... Are inserted into the holes a,... Of the other insulator 142 and the pair of insulators 141, 142 are brought into close contact with each other. The epoxy adhesive 145 is filled between the contacts 143,... And the insulators 141, 142. At this time, the excess adhesive protrudes from the peripheral portions of the insulators 141, 142 using the flange C as a relief groove. . The protruding adhesive 145 is wiped off in the fourth step. Further, in the fourth step, as shown in FIG. 11, the cable connector 28 used by being connected to the vacuum-resistant flexible composite cable 20 is used to connect between the pair of insulators 141 and 142 and the pin contacts 143 and 143. The epoxy adhesive 145 filled in the gaps between the insulators 141 and 142 is cured. As a result, the vacuum-resistant multipolar through connector 14 that can be smoothly attached and detached, which is familiar with the cable connector 28 to be fitted later, can be manufactured.

Through such a manufacturing process, the vacuum-proof multipolar through connector 14 as shown in FIG. 11 is manufactured.
An epoxy adhesive is applied to the insulator peripheral portion of the vacuum-resistant multipolar through connector 14, and the vacuum resistant multipolar through connector 14 is connected to the connector mounting portion 15a of the connector jacket 15 as shown in FIGS. And the connector holder 153 is screwed into the connector mounting portion 15a, so that the gap between the vacuum-resistant multipolar through connector 14 and the connector mounting portion 15a is filled with an epoxy adhesive. The multipolar through connector 14 is attached to the connector jacket 15.

  As a result, a connector jacket 15 is formed in which the vacuum side and the atmosphere side are separated by the vacuum-resistant multipolar through connector 14. Note that the structure of the vacuum-resistant multipolar through connector 14 described above can be applied not only to the through connector of the vacuum resistant camera 10, but also to the through connector 30 provided on the flange 40 having a sealed structure, for example.

  By using the vacuum-resistant camera 10 using the above-described vacuum-resistant flexible composite cable 20 as a monitoring / observation camera in the vacuum region, alignment of the object to be inspected (subject) in the vacuum region, alignment adjustment, etc. It is possible to realize a monitoring / observation television camera having an economically advantageous configuration that enables free positioning and angle setting in the vicinity of the object to be inspected. The vacuum-resistant camera 10 using the vacuum-resistant flexible composite cable 20 can be applied to various industrial vacuum apparatuses such as a vacuum film forming apparatus (deposition deposition, sputtering, etc.) and other vacuum equipment.

  In the above-described embodiment, the camera body 12, the lens mount 13, and the jacket 15 that constitute the outer casing of the vacuum resistant camera 10 are all made of stainless steel. For example, it is possible to use a metal material such as aluminum.

  Further, an illumination function is provided by providing illumination wiring on the vacuum-resistant flexible composite cable 20, providing pin contacts of illumination wiring on the vacuum-resistant multipolar through connector 14, and providing LEDs on the lens mount 13. It is possible to provide a vacuum-resistant camera 10 having

1 is a block diagram showing the configuration of a vacuum resistant camera using a vacuum resistant multipolar through connector according to an embodiment of the present invention. The figure which shows the cross-section of the vacuum-resistant flexible composite cable used for the vacuum-proof multipolar penetration connector which concerns on the said embodiment. The figure which shows the cross-section of the coaxial core wire contained in the flexible composite cable for vacuum resistance shown in the said FIG. The figure which shows the external appearance structure of the camera for vacuum resistant which concerns on the said embodiment. The figure which shows the assembly structure of the camera head part of the vacuum-resistant camera which concerns on the said embodiment. The figure which shows the assembly structure of the camera head part of the vacuum-resistant camera which concerns on the said embodiment. The figure which shows the assembly structure of the vacuum-resistant camera which concerns on the said embodiment. The figure which shows the assembly structure of the vacuum-resistant camera which concerns on the said embodiment. The figure which shows the assembly structure of the multipolar penetration connector for vacuum resistance which concerns on the said embodiment. The figure which shows the assembly structure of the multipolar penetration connector for vacuum resistance which concerns on the said embodiment. The figure which shows the external appearance structure of the multipolar penetration connector for vacuum resistance which concerns on the said embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Vacuum chamber (for example, vacuum chamber), 2 ... Test object (subject), 10 ... Vacuum resistant camera, 11 ... Camera body (CCD unit), 12 ... Camera housing, 13 ... Lens mount, 14 ... Vacuum resistant Multi-pole through connector, 15 ... Connector jacket (connector case), 15a ... Connector mounting portion, 18 ... Clamp fitting, 20 ... Flexible composite cable for vacuum resistance, 28 ... Cable connector, 30 ... Through connector, 40 ... Flange , 50 ... Controller, 141, 142 ... Insulator, 143 ... Pin contact, 145 ... Adhesive (two-component mixed epoxy adhesive), 153 ... Connector press, A ... Recessed part, B ... High collar, C ... Low buttocks.

Claims (10)

A multi-pole through connector for vacuum resistance that separates the atmosphere side and the vacuum side,
A pair of insulators having a plurality of holes;
A plurality of pin contacts penetrating through the holes of the insulator;
An anti-vacuum multipolar through connector having an adhesive filled between the insulators.   2. The vacuum-resistant multipolar through connector according to claim 1, wherein at least one of the insulators has a recessed portion, and the recessed portion is filled with the adhesive.   3. The vacuum-resistant multipolar through connector according to claim 2, wherein a plurality of holes through which the plurality of pin contacts penetrates are provided at the bottom of the recessed portion.   The vacuum-resistant multipolar through connector according to claim 3, wherein the adhesive is a two-component mixed epoxy adhesive.   5. The multipolar through connector for vacuum resistance according to claim 4, wherein the pin contact is plated with gold or electroless nickel.   6. The vacuum-resistant multipolar through connector according to claim 5, wherein the insulator is formed of a polyether / ether / ketone resin. A multi-pole through connector for vacuum resistance that connects a circuit that operates in an atmospheric environment provided in a vacuum environment and operates in an atmospheric environment.
A first insulator having a surface exposed in the housing;
A second insulator having a surface exposed outside the housing;
A plurality of pin contacts erected on the insulator through a plurality of holes provided on the respective surfaces of the first and second insulators;
An anti-vacuum multipolar through connector having an epoxy adhesive filled between the first and second insulators.   The first insulator has a recessed portion, and has a plurality of holes through which the plurality of pin contacts penetrate at the bottom of the recessed portion, and the recessed portion is filled with the adhesive. The multipolar through connector for vacuum resistance according to claim 7. A method for manufacturing a vacuum-resistant multi-pole through connector that separates the atmosphere side and the vacuum side,
A first step of applying an epoxy-based adhesive to a surface of one insulator that overlaps the other insulator of the pair of insulators having a hole through which a plurality of pin contacts pass;
A second step of inserting a pinned pin contact into the hole of the insulator coated with the adhesive;
A pin contact inserted into the hole of the one insulator is inserted into the hole of the other insulator to closely contact the pair of insulators, and between the pair of insulators and between the pin contact and the insulator. And a third step of filling the epoxy-based adhesive with a vacuum-resistant multi-pole through connector manufacturing method.   8. The method according to claim 7, further comprising a fourth step of temporarily fitting the pin contacts erected on the pair of insulators to a cable connector to be fitted later to cure the epoxy adhesive. The manufacturing method of the vacuum-proof multipolar penetration connector of description.

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