JP2007192829A5 - - Google Patents

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Publication number
JP2007192829A5
JP2007192829A5 JP2007033920A JP2007033920A JP2007192829A5 JP 2007192829 A5 JP2007192829 A5 JP 2007192829A5 JP 2007033920 A JP2007033920 A JP 2007033920A JP 2007033920 A JP2007033920 A JP 2007033920A JP 2007192829 A5 JP2007192829 A5 JP 2007192829A5
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JP
Japan
Prior art keywords
fluid
contamination
continuously
sources
particle detector
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2007033920A
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Japanese (ja)
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JP2007192829A (en
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Priority claimed from US09/638,366 external-priority patent/US6615679B1/en
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Publication of JP2007192829A publication Critical patent/JP2007192829A/en
Publication of JP2007192829A5 publication Critical patent/JP2007192829A5/ja
Pending legal-status Critical Current

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Claims (5)

粒子を検出する方法であって、該方法は、以下の工程：A method for detecting particles comprising the following steps:
複数の可能な汚染現象源を有する密閉加工具のクリーンゾーン（４１０、５１０）を提供する工程；  Providing a clean zone (410, 510) of a hermetic tool having a plurality of possible sources of contamination phenomena;
複数の流体試料の各々を、該密閉加工具のクリーンゾーンにおける該可能な汚染現象源の１つから連続的に同時に引き出す工程；  Sequentially and simultaneously drawing each of a plurality of fluid samples from one of the possible sources of contamination in the clean zone of the sealing tool;
該複数の流体試料の全てを合体流体ストリームに連続的に合流する工程；および  Continuously joining all of the plurality of fluid samples into a combined fluid stream; and
該合体流体ストリームを粒子検知器（４５０、５７０）に連続的に流す工程；を包含し、  Continuously flowing the combined fluid stream to a particle detector (450, 570);
ここで、各該流体試料が、該引き出しと該合流との間の隔離された囲まれた領域内で連続的に流れる、方法。  Wherein each fluid sample flows continuously in an isolated enclosed area between the drawer and the merge. 前記流体試料の各々が、前記複数の可能な汚染源に位置している複数のサンプリングプローブ（５１２）の１個を通して引き出され、該サンプリングプローブの各々が、前記試料ポートの１個に流体接続されている、請求項１に記載の方法。Each of the fluid samples is withdrawn through one of a plurality of sampling probes (512) located at the plurality of possible contamination sources, each of the sampling probes being fluidly connected to one of the sample ports. The method of claim 1. 前記流体試料の引き出しが、等速で行われる、請求項１に記載の方法。The method of claim 1, wherein the withdrawal of the fluid sample is performed at a constant speed. 前記流体試料が、気体状流体、エアロゾル粒子および液状流体からなる群から選択される流体を含有する、請求項１に記載の方法。The method of claim 1, wherein the fluid sample contains a fluid selected from the group consisting of gaseous fluids, aerosol particles, and liquid fluids. アンサンブルマニホルドを、前記粒子検知器に直接取り付ける工程をさらに包含する、請求項１に記載の方法。The method of claim 1, further comprising attaching an ensemble manifold directly to the particle detector.
JP2007033920A 2000-08-15 2007-02-14 Ensemble manifold, system, and method for monitoring particle in clean environment Pending JP2007192829A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US09/638,366 US6615679B1 (en) 2000-08-15 2000-08-15 Ensemble manifold, system and method for monitoring particles in clean environments

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2002519077A Division JP2004506222A (en) 2000-08-15 2001-08-08 Ensemble manifold, system and method for monitoring particles in a clean environment

Publications (2)

Publication Number Publication Date
JP2007192829A JP2007192829A (en) 2007-08-02
JP2007192829A5 true JP2007192829A5 (en) 2008-10-02

Family

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Family Applications (2)

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JP2002519077A Pending JP2004506222A (en) 2000-08-15 2001-08-08 Ensemble manifold, system and method for monitoring particles in a clean environment
JP2007033920A Pending JP2007192829A (en) 2000-08-15 2007-02-14 Ensemble manifold, system, and method for monitoring particle in clean environment

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2002519077A Pending JP2004506222A (en) 2000-08-15 2001-08-08 Ensemble manifold, system and method for monitoring particles in a clean environment

Country Status (6)

Country Link
US (1) US6615679B1 (en)
JP (2) JP2004506222A (en)
AU (1) AU2001281175A1 (en)
DE (1) DE10196505T5 (en)
GB (1) GB2382139B (en)
WO (1) WO2002013943A2 (en)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7024950B2 (en) * 2000-11-30 2006-04-11 Texas Instruments Incorporated Method for intelligent sampling of particulates in exhaust lines
US20030063271A1 (en) * 2001-08-17 2003-04-03 Nicholes Mary Kristin Sampling and measurement system with multiple slurry chemical manifold
US6796164B2 (en) * 2001-11-06 2004-09-28 The Johns Hopkins University Integrated fluidics system for simplified analysis of aerosolized biological particles and particle detection ticket thereof
US7208123B2 (en) * 2002-06-24 2007-04-24 Particle Measuring Systems, Inc. Molecular contamination monitoring system and method
JP3714926B2 (en) * 2002-08-22 2005-11-09 ホーチキ株式会社 Sampling tube smoke detector
US6976397B2 (en) * 2003-10-28 2005-12-20 General Electric Company Multi-point sampling method for obtaining isokinetic fluid composition flows in a non-uniform velocity flow field
WO2006017143A1 (en) * 2004-07-11 2006-02-16 Lighthouse Worldwide Solutions, Inc. Lateral manifold for a multiple sample locations sensor and method for collection
WO2008118769A1 (en) * 2007-03-23 2008-10-02 Particle Measuring Systems, Inc. Optical particle sensor with exhaust-cooled optical source
US8800383B2 (en) 2009-08-24 2014-08-12 Particle Measuring Systems, Inc. Flow monitored particle sensor
US10352844B2 (en) 2013-03-15 2019-07-16 Particles Plus, Inc. Multiple particle sensors in a particle counter
US9677990B2 (en) 2014-04-30 2017-06-13 Particles Plus, Inc. Particle counter with advanced features
US10983040B2 (en) 2013-03-15 2021-04-20 Particles Plus, Inc. Particle counter with integrated bootloader
US11579072B2 (en) 2013-03-15 2023-02-14 Particles Plus, Inc. Personal air quality monitoring system
ITRM20130128U1 (en) 2013-07-23 2015-01-24 Particle Measuring Systems S R L DEVICE FOR MICROBIAL AIR SAMPLING
KR20150047097A (en) 2013-10-23 2015-05-04 주식회사 위드텍 Multi sampling port monitoring apparatus for air pollution measuring and monitoring method for using the same
WO2015148148A1 (en) 2014-03-14 2015-10-01 Particle Measuring Systems, Inc. Pressure-based airflow sensing in particle impactor systems
US9631222B2 (en) 2014-03-14 2017-04-25 Particle Measuring Systems, Inc. Filter and blower geometry for particle sampler
US9719891B2 (en) 2015-05-13 2017-08-01 The Southern Company Simultaneous multi-point testing systems and methods
US10948470B2 (en) * 2016-04-29 2021-03-16 TricornTech Taiwan System and method for in-line monitoring of airborne contamination and process health
CN111247418A (en) 2017-10-26 2020-06-05 粒子监测系统有限公司 Particle measurement system and method
JP6875318B2 (en) * 2018-04-24 2021-05-19 株式会社日立産機システム Safety cabinet
CN112601948A (en) 2018-08-31 2021-04-02 粒子监测系统有限公司 Fluid refractive index optimized particle counter
TWI728453B (en) 2018-09-04 2021-05-21 美商粒子監測系統有限公司 Detecting nanoparticles on production equipment and surfaces
US11181455B2 (en) 2018-11-12 2021-11-23 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
US11385161B2 (en) 2018-11-12 2022-07-12 Particle Measuring Systems, Inc. Calibration verification for optical particle analyzers
KR20210091183A (en) 2018-11-16 2021-07-21 파티클 머슈어링 시스템즈, 인크. Particle Sampling Systems and Methods for Robot Controlled Manufacturing Barrier Systems
CN113015897A (en) 2018-11-16 2021-06-22 粒子监测系统有限公司 Slurry monitoring and single particle detection in combination with bulk size distribution
JP2022529213A (en) 2019-04-25 2022-06-20 パーティクル・メージャーリング・システムズ・インコーポレーテッド Particle detection systems and methods for on-axis particle detection and / or difference detection
JP7182523B2 (en) * 2019-07-10 2022-12-02 株式会社日立産機システム safety cabinet
CN114270165A (en) 2019-08-26 2022-04-01 粒子监测系统有限公司 Triggered sampling system and method
US11339733B2 (en) * 2019-09-06 2022-05-24 Tokyo Electron Limited Systems and methods to monitor particulate accumulation for bake chamber cleaning
KR20220072829A (en) 2019-10-07 2022-06-02 파티클 머슈어링 시스템즈, 인크. Particle Detector with Remote Alarm Monitoring and Control
WO2021071793A1 (en) 2019-10-07 2021-04-15 Particle Measuring Systems, Inc. Antimicrobial particle detectors
IT201900020248A1 (en) 2019-11-04 2021-05-04 Particle Measuring Systems S R L MOBILE MONITORING DEVICE FOR CONTROLLED CONTAMINATION AREAS
JP2023509830A (en) 2020-01-21 2023-03-10 パーティクル・メージャーリング・システムズ・インコーポレーテッド Robot control for aseptic processing
CN111381611A (en) * 2020-04-09 2020-07-07 湖北平安电工材料有限公司 Mica slurry online concentration control system and method
EP4356105A1 (en) * 2021-06-15 2024-04-24 Particle Measuring Systems, Inc. Modular particle counter with docking station

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE53334C (en) * H. ALBRECHT in Philadelphia, Nr. 1728 North Seventh Street, V. St. A Meat cutting machine
CA646702A (en) * 1962-08-14 Bailey Meter Company Gas sample scanning apparatus
US3357257A (en) * 1966-01-28 1967-12-12 Ree Du Gas sampling and detecting system
CH442807A (en) * 1967-01-27 1967-08-31 Walter Eugster & Cie Method for conveying air samples in room air control systems and device for carrying out the method
BE758311A (en) 1969-10-31 1971-04-30 Technicon Instr FLUID DISTRIBUTOR MANIFOLD
DE2013682B2 (en) * 1970-03-21 1974-08-15 Draegerwerk Ag, 2400 Luebeck Measuring point switch for a suction device
US3765247A (en) * 1971-10-22 1973-10-16 Nat Southwire Aluminum Air sampling device
US4113434A (en) 1975-07-30 1978-09-12 Yanagimoto Seisakusho Co., Ltd. Method and apparatus for collectively sampling a plurality of gaseous phases in desired proportions for gas analysis or other purposes
JPS60200145A (en) * 1984-03-26 1985-10-09 Hitachi Ltd Remote measuring apparatus of cleanliness for clean room
US4601211A (en) * 1984-12-12 1986-07-22 The Perkin-Elmer Corporation Multi-port valve in a gas collection system and method of using same
US4860598A (en) * 1985-03-26 1989-08-29 W. L. Gore & Associates, Inc. Air-stream sampling device
US4993271A (en) * 1988-12-12 1991-02-19 Micron Technology, Inc. Liquid in situ multiport monitoring system
US5005430A (en) * 1989-05-16 1991-04-09 Electric Power Research Institute, Inc. Automated membrane filter sampler
US5090257A (en) * 1990-05-09 1992-02-25 The United States Of America As Represented By The Secretary Of The Army Automatic isokinetic aerosol sampling system
EP0702790A4 (en) * 1993-06-10 1997-02-26 Rupprecht & Patashnick Co Airborne particulate sampling monitor
JP3470370B2 (en) 1994-01-24 2003-11-25 富士通株式会社 Apparatus and method for specifying dust particle generation position and clean room
US5601234A (en) 1994-08-01 1997-02-11 Abbott Laboratories Fluid nozzle and method of introducing a fluid
KR100210599B1 (en) 1996-10-10 1999-07-15 윤종용 Particle counter
US6125710A (en) * 1997-04-15 2000-10-03 Phoenix Controls Corporation Networked air measurement system
KR100252215B1 (en) * 1997-05-02 2000-04-15 윤종용 Monitoring system of the state of clean room measuring apparatus
KR100236717B1 (en) * 1997-12-24 2000-01-15 윤종용 Particle formation analyzer of smock for clean room and method for it

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