JP2007192791A - Detector - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a detector such as a displacement meter which is user-friendly, inexpensive, and small in size. <P>SOLUTION: A seven-segment LED 42 indicates a measurement value or the like of an object. A bar indicator 43 includes a plurality of bars (segments) 43a composed of light emitting diodes (LEDs) indicating the entrance degree showing which position the measurement value enters within the tolerance range, an upper limit value indicator 43b, and a lower limit value indicator 43c. A certain degree of resolution implicitly desired by a user can be predicted from the upper limit value and the lower limit value of the tolerance range set by the user. Accordingly, the resolution of each bar 43a is defined by (upper limit value-lower limit value)/the number, wherein the number is that of bars 43a existing between the upper limit value indicator 43b and the lower limit value indicator 43c. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a detection device that measures a physical quantity from an object.

  In a detection device that measures a physical quantity of an object, for example, a contact displacement meter has a contactor (movable part) that is brought into contact with the surface of the object and that can be displaced in the axial direction, and a transformer (for example, Patent Document 1). reference).

  The transformer includes a core that interlocks with the contact. When the core is displaced according to the displacement of the contact, the level of the signal output from the transformer changes in accordance with the displacement of the contact. In such a configuration, the physical displacement amount such as the height of the target object is measured by converting the physical displacement amount of the target object into an electric quantity.

  A contact displacement meter generally includes a head portion including a transformer and a main body portion that controls the head portion (see, for example, Patent Document 2). An external signal is input to the main body from an external device such as a PLC (programmable logic controller). Thereby, the physical displacement amount of the object is measured at the input timing of the external signal.

  Then, it is determined whether the measured value is within an allowable range consisting of a predetermined upper limit value and lower limit value or outside the allowable range, and the determination result is output to an external device or the like.

Here, the main body of the contact displacement meter is provided with a display for performing various displays. This display unit has a bar display unit that displays the degree of entry of the position where the measurement value is within an allowable range using a plurality of bars made of light emitting diodes (LEDs) or the like. The user can easily recognize from the bar display section whether the measured value is a value near the lower limit value or the upper limit value or whether there is a margin in the position of the measured value within the allowable range.
Japanese Patent Laid-Open No. 2000-9412 JP 2002-131037 A

  In a detection device represented by a conventional displacement meter, the full scale of the contact displacement meter is displayed by lighting using all of the plurality of bars.

  In such a case, in order to increase the display resolution by the bar display unit without changing the full scale of the measurement range, it is necessary to further provide an LED or the like. Further, even when the full scale of the measurement range is increased while maintaining the resolution, it is necessary to further provide an LED or the like.

  As a result, it has been difficult to reduce the size and cost of a detection device represented by a contact displacement meter.

  An object of the present invention is to provide a detection device that is easy to use for a user, inexpensive, and downsized.

The displacement meter according to the present invention is a displacement meter for measuring the physical displacement amount of an object, and a measuring means for obtaining a measured value of the physical displacement amount of the object, and whether the physical displacement amount of the object is good or bad. From setting means for setting an allowable range having an upper limit value and a lower limit value for determination, display means for displaying the allowable range set by the setting means, and upper limit value and lower limit value of the allowable range set by the setting means Calculation means for calculating the display resolution of the display means, and control for displaying the positional relationship of the measurement values obtained by the measurement means with respect to the allowable range displayed by the display means based on the display resolution calculated by the calculation means Means.

  In the displacement meter according to the present invention, the measured value of the physical displacement amount of the object is obtained by the measuring means. An allowable range having an upper limit value and a lower limit value for determining whether the physical displacement amount of the object is good is set by the setting means. The allowable range set by the setting means is displayed by the display means.

  Further, the display resolution of the display means is calculated from the upper limit value and lower limit value of the allowable range set by the setting means. Based on the display resolution calculated by the calculation means, the positional relationship of the measured values with respect to the allowable range is displayed on the display means by the control means.

  Thus, in the displacement meter according to the present invention, the display resolution of the display means is set from the upper limit value and the lower limit value of the allowable range set by the setting means, so that the user can detect the physical displacement amount of the object. An allowable range for pass / fail determination can be arbitrarily set.

  Further, it is possible to increase the display resolution of the display means without changing the full scale of the measurement range of the displacement meter, or to increase the full scale of the measurement range of the displacement meter while maintaining the display resolution. Thereby, it is not necessary to newly provide light emitting elements such as LEDs.

  As a result, it is possible to obtain a contact displacement meter that is easy to use for the user, inexpensive, and downsized.

  The display means includes an array of a plurality of display units, and an allowable range display unit that displays a range of display units corresponding to the allowable range among the plurality of display units, and the calculation means includes an allowable range set by the setting means. The display resolution of the display unit may be calculated from the difference between the upper limit value and the lower limit value and the number of display units within the range displayed by the allowable range display unit.

  In this case, the positional relationship of the measured value with respect to the allowable range is displayed by a plurality of display units. The range of the display unit corresponding to the allowable range among the plurality of display units is displayed by the allowable range display unit.

  Further, the display unit display resolution is calculated from the difference between the upper limit value and the lower limit value of the allowable range set by the setting unit and the number of display units within the range displayed by the allowable range display unit.

  With such a configuration, the user can automatically obtain an appropriate display resolution by setting the upper limit value and the lower limit value of the allowable range using the setting means.

  The array of the plurality of display units may include an array of a plurality of light emitting elements. In this case, the positional relationship of the measured value with respect to the allowable range is displayed by the plurality of light emitting elements.

  The control means indicates a position corresponding to the measurement value obtained by the measurement means in a plurality of display units based on the display resolution calculated by the calculation means and the upper limit value or lower limit value of the allowable range set by the setting means. The display means may be controlled as described above.

  In this case, based on the display resolution and the upper limit value or lower limit value of the allowable range, the position corresponding to the measurement value in the plurality of display units is indicated on the display means. Thereby, the user can easily grasp the position of the measured value with respect to the allowable range by the display means.

  The measuring means includes a contactor that is displaced by contact with the object, a conversion means that converts the displacement amount of the contactor into an electrical signal, and a measured value of the physical displacement amount of the object that is obtained from the electrical signal obtained by the conversion means. Acquisition means for acquiring as follows.

  In this case, the contact is displaced by contacting the object. The displacement amount of the contact is converted into an electric signal by the converting means. Moreover, the electrical signal obtained by the conversion means is acquired by the acquisition means as a measurement value of the physical displacement amount of the object. With such a configuration, an accurate physical displacement amount of the object can be obtained. Further, the detection device according to the present invention is a detection device for measuring a physical quantity from an object, and a measurement means for obtaining a measurement value from the physical quantity from the object, and a pass / fail judgment using the measurement value obtained by the measurement means. Setting means for setting an allowable range having an upper limit value and a lower limit value, a calculating means for calculating display resolution from the upper limit value and lower limit value of the allowable range set by the setting means, and a display resolution calculated by the calculating means Based on the control means for outputting a display command for displaying the positional relationship of the measured value obtained by the measuring means with respect to the allowable range set by the setting means, and the display of the measured value according to the display command of the control means Display means for performing the above.

  According to the present invention, it is possible to obtain a detection device that is easy to use for a user, inexpensive, and downsized.

  Hereinafter, a detection apparatus according to an embodiment of the present invention will be described with reference to the drawings. In the following, a contact displacement meter will be described first as a first embodiment, and after describing the effects of the invention, other embodiments of the present invention will be described.

(1) Overall Configuration of Contact Displacement Meter FIG. 1 is a block diagram showing the configuration of the contact displacement meter according to the present embodiment.

  As shown in FIG. 1, a contact displacement meter 100 according to the present embodiment includes a head portion 100A and a main body portion 100B. Although not shown in FIG. 1, the main body unit 100B includes a display unit 32 described later. Details of the display unit 32 will be described later.

  The head portion 100A and the main body portion 100B are connected to each other by a cable 80. The main body 100B is connected to an external device (not shown) via a cable 81.

  2 is a block diagram showing a configuration of the head unit 100A of FIG. 1, and FIG. 3 is a block diagram showing a configuration of the main body unit 100B of FIG.

As shown in FIG. 2, the head unit 100A includes a transformer 1, a contact 1a that can be expanded and contracted and is in contact with an object, a transformer drive circuit 2, a signal detection circuit 3, an amplifier circuit 4, an EEPROM (Electrically Erasable and Programmable Read). Only Memory) 5, indicator lamp control circuit 6, indicator lamp 7, power supply circuit 8, comparator 9, and switch 10.

  As shown in FIG. 3, the main body 100B includes a CPU 20, a PWM (pulse width modulation) output circuit 21, a first filter circuit 22, a second filter circuit 23, and an A / D (analog / digital) converter. 24, communication interface 25, power supply circuit 26, drive circuit 27, first to third input circuits 28a, 28b, 28c, overcurrent detection circuit 29, first to third output circuits 30a, 30b, 30c, EEPROM 31, A display unit 32, a display panel 33, an input unit 34, and a connection unit 50 are provided.

  Signals are transmitted and received between the head unit 100A and the main body unit 100B via the cable 80. In this case, the cable 80 connected to the head unit 100A is connected to the connection unit 50 of the main body unit 100B.

  In FIG. 3, first, the CPU 20 gives a rectangular wave pulse signal for operating the transformer 1 to the PWM output circuit 21. The PWM output circuit 21 converts the rectangular wave pulse signal into a sine wave signal. The first filter circuit 22 removes noise from the sine wave signal and supplies the sine wave signal to the transformer drive circuit 2 in FIG.

  The transformer drive circuit 2 applies a sine wave current to the transformer 1 in response to the sine wave signal. Details of the configuration and operation of the transformer 1 will be described later.

  Subsequently, the transformer 1 supplies two voltage signals (described later) to the signal detection circuit 3. The signal detection circuit 3 subtracts the two voltage signals from each other and gives a differential voltage to the amplifier circuit 4.

  The amplifier circuit 4 performs impedance conversion and supplies a differential voltage to the second filter circuit 23 (FIG. 3). The second filter circuit 23 converts the differential voltage into a DC voltage and supplies the DC voltage to the A / D converter 24.

  The A / D converter 24 converts the DC voltage into a digital value, and gives the conversion result to the CPU 20 as a measured value of the physical displacement. The CPU 20 controls the display unit 32, the drive circuit 27, and the like based on the given measurement value.

  Signals are transmitted / received to / from an external device such as a main body of another contact displacement meter, a personal computer, or a PLC (programmable logic controller) (each not shown) via the communication interface 25 of the main body 100B. be able to. For example, when it is desired to import information related to the main body 100B into the PLC, information is transmitted to and received from the PLC via the communication interface 25.

  The power supply circuit 26 of the main body 100B is connected to an external DC power supply (not shown) of 24V, for example, and supplies power to each component of the head 100A via the power supply circuit 8 of the head 100A and the main body 100B. Electric power is supplied to each of the components.

  The drive circuit 27 supplies a current required for turning on or blinking the indicator lamp 7 of the head unit 100 </ b> A to the indicator lamp control circuit 6 via the switch 10.

  Here, the CPU 20 can switch the voltage level of the power supply circuit 8 of the head portion 100A via the power supply circuit 26 of the main body portion 100B. This voltage level includes, for example, 8.5 V in the communication mode performed at startup and 6.5 V in the normal operation mode.

  The communication mode is a mode in which the CPU 20 receives correction information stored in the EEPROM 5 of the head unit 100A, and the normal operation mode is a display that is performed when the CPU 20 controls the indicator lamp control circuit 6 of the head unit 100A. A mode in which the lamp 7 is turned on or blinked. The correction information stored in the EEPROM 5 will be described later.

  The comparator 9 of the head unit 100A connects the switch 10 to the EEPROM 5 side when the voltage level is 8.5 V based on the switching of the voltage level of the power supply circuit 8 by the CPU 20. On the other hand, the comparator 9 connects the switch 10 to the indicator light control circuit 6 side when the voltage level is 6.5V. With this configuration, the contact displacement meter 100 can be switched between the communication mode and the normal operation mode.

  The first to third input circuits 28a, 28b, 28c give the CPU 20 predetermined signals input from the outside. The predetermined signal is, for example, a timing signal for instructing the start of measurement, a preset signal for setting a reference position, or the like.

  The first to third output circuits 30a, 30b, and 30c are allowed by the CPU 20 including the physical displacement amount of the object obtained in accordance with the differential voltage from the head unit 100A and preset upper and lower limits. Based on the range, signals can be output to the outside.

  Specifically, for example, the first output circuit 30a determines a predetermined level (“H” level or “L” level) when the physical displacement amount of the object exceeds the upper limit value of the allowable range. Output a signal. The second output circuit 30b outputs a determination signal of a predetermined level (“H” level or “L” level) when the physical displacement amount of the object is below the lower limit value of the allowable range. Furthermore, the third output circuit 30c outputs a determination signal of a predetermined level (“H” level or “L” level) when the physical displacement amount of the object is within the allowable range.

  The overcurrent detection circuit 29 monitors whether or not a current equal to or higher than the rated current value flows through the first to third output circuits 30a, 30b, and 30c. When a current equal to or higher than the rated current value flows in any of the first to third output circuits 30a, 30b, and 30c, the overcurrent detection circuit 29 temporarily turns the output circuit off. Thereafter, the CPU 20 periodically turns on the output circuit, and the overcurrent detection circuit 29 continues to monitor the output circuit.

  The EEPROM 31 of the main body 100B stores correction information. This correction information will be described later.

  The display unit 32 displays the amount of physical displacement of the object under the control of the CPU 20. The display unit 32 includes a display panel 33 and an input unit 34. Details of the display panel 33 and the input unit 34 will be described later with reference to the drawings. The reset circuit 35 resets the CPU 20 to an initial state by giving a reset signal to the CPU 20 based on a user's operation.

  Here, when the frequency of use of the contact 1a is increased, the head unit 100A often fails. In such a case, the main body 100B is used as it is, and the head 100A is replaced with a new one.

  First, a new head portion 100A (hereinafter simply referred to as the head portion 100A) is attached to the main body portion 100B. The CPU 20 of the main body 100B communicates with the EEPROM 5 of the head 100A in the communication mode.

  The EEPROM 5 stores correction information of the head unit 100A (hereinafter referred to as head correction information) and correction information of an inspection master main body (to be described later) (hereinafter referred to as master correction information).

  The head correction information is information for correcting variation in the relationship between the physical displacement amount of the object and the output value from the A / D converter 24 of the main body 100B (hereinafter referred to as a displacement-output table). is there.

  The master correction information is information for correcting variation in the displacement-output table of the inspection master body used for obtaining the head correction information.

  The CPU 20 communicates with the EEPROM 5 to acquire the master correction information. Next, the CPU 20 communicates with the EEPROM 31 of the main body 100B.

The EEPROM 31 stores correction information of the main body 100B (hereinafter referred to as main body correction information).

  The main body correction information is information for correcting variations in the relationship between the level of the DC voltage converted by the second filter circuit 23 of the main body 100B and the output value from the A / D converter 24.

  The CPU 20 communicates with the EEPROM 31 to acquire the main body correction information. Then, based on the acquired main body correction information and master correction information, the CPU 20 uses the same state as the state in which the reference master body for inspection is used, that is, from the output value of the A / D converter 24, the object. Create a state that can recognize the exact amount of physical displacement.

  Thereafter, the CPU 20 communicates with the EEPROM 5 to acquire the head correction information, thereby accurately determining the relationship between the DC voltage level of the second filter circuit 23 and the output value of the A / D converter 24. Create a recognizable state. Thereby, even when the head portion 100A is replaced, the main body portion 100B can be brought into the same state as the master main body portion serving as a reference, and an appropriate physical displacement amount of the object can be obtained.

(2) Configuration of Transformer Next, a detailed configuration of the transformer 1 of the head unit 100A will be described with reference to the drawings.

  FIG. 4 is a schematic diagram showing a detailed configuration of the transformer 1.

  As shown in FIG. 4, the transformer 1 includes a primary coil 1b, a secondary coil 1c, a primary resistor 1d, a secondary resistor 1e, and a core C made of a magnetic material. The core C is provided so as to be capable of reciprocating in the primary side coil 1b and the secondary side coil 1c in conjunction with the contact 1a.

  One end of the primary side coil 1 b is connected to the transformer drive circuit 2, and the other end is connected to the signal detection circuit 3. One end of the secondary coil 1 c is grounded, and the other end is connected to the signal detection circuit 3. The winding directions of the primary coil 1b and the secondary coil 1c are opposite to each other.

  One end of the primary side resistor 1d is connected to the node N1 between the primary side coil 1b and the signal detection circuit 3, and the other end is grounded. One end of the secondary side resistor 1e is connected to the node N2 between the secondary side coil 1c and the signal detection circuit 3, and the other end is grounded.

  In such a configuration, when a sine wave current flows from the transformer drive circuit 2 to the primary side coil 1b, an induced current flows to the secondary side coil 1c accordingly. In this case, a voltage drop occurs in the primary resistor 1d and a voltage drop also occurs in the secondary resistor 1e. The voltage of the node N1 at one end of the primary side resistor 1d and the voltage of the node N2 at one end of the secondary side resistor 1e are supplied to the signal detection circuit 3.

  As described above, when the core C is moved in a state where the induced current flows through the secondary coil 1c, the mutual inductance between the primary coil 1b and the secondary coil 1c changes. Thereby, the voltage of the node N2 changes depending on the position of the core C.

  The signal detection circuit 3 calculates a differential voltage between the voltage at the node N1 and the voltage at the node N2, and applies the differential voltage to the amplifier circuit 4. With such a configuration, the amount of physical displacement of the object can be detected by converting the amount of movement of the contact 1a into a differential voltage.

In the present embodiment, the winding direction of the primary side coil 1b and the secondary side coil 1c is opposite, so that the resistance components of the primary side coil 1b and the secondary side coil cancel each other. Thus, by canceling out the resistance component having a characteristic that varies depending on the temperature, the accurate differential voltage can be obtained without being affected by the temperature change at the place where the contact displacement meter 100 is used. As a result, an accurate physical displacement amount of the object can be obtained.

(3) Configuration of Display Unit Next, the configuration of the display unit 32 of the main body unit 100B will be described with reference to the drawings.

  FIG. 5 is a schematic diagram illustrating a configuration of the display unit 32 of the main body 100B.

  As shown in FIG. 5, the display unit 32 of the main body unit 100 </ b> B includes a display panel 33 and an input unit 34.

  The display panel 33 includes three output indicator lights 41, a 7-segment LED 42 and a bar display unit 43. The input unit 34 includes a mode key 44, a set key 45, and a cross key 46.

  The user can shift from the normal mode to the setting mode by pressing the mode key 44 for 3 seconds or more in the normal mode for displaying the measured values and the like, and can display the setting menu on the 7-segment LED 42. .

  Further, the user can change the setting item of the setting menu by operating the cross key 46 left and right, and can change the value of the setting item by operating the cross key 46 up and down. Further, the user can determine the value of the setting item by pressing the set key 45. The setting items include an upper limit value and a lower limit value for determining an allowable range.

  The 7-segment LED 42 displays the measured value of the object, and one of the output indicator lamps 41 is lit (HI lit) when the measured value exceeds the upper limit value. One is lit when the measured value is within the allowable range (GO lit), and the other one of the output indicator lights 41 is lit when the measured value is below the lower limit (LO lit). To do.

  The bar display unit 43 includes a plurality of bars (segments) 43a (13 in the example of FIG. 5) made up of light emitting diodes (LEDs) or the like that indicate the degree of entry of the position where the measurement value is within an allowable range, and an upper limit. A value display unit 43b and a lower limit display unit 43c are included.

  The user can easily recognize from the bar display unit 43 whether the measured value is a value near the lower limit value or the upper limit value or whether there is a margin in the position of the measured value within the allowable range.

  Generally, when the user makes a rough determination of the physical displacement amount of the object, that is, when the difference between the upper limit value and the lower limit value set by the user is large, it is obtained from the bar 43a of the bar display unit 43. The resolution that can be achieved is not high. On the other hand, when the user makes a strict determination of the physical displacement amount of the object, that is, when the difference between the upper limit value and the lower limit value set by the user is small, the resolution required for the bar 43a of the bar display unit 43. Becomes higher. Here, the resolution refers to a range of measured values assigned to one bar 43a.

  In this way, it is possible to predict a certain degree of resolution implicitly desired by the user from the upper limit value and the lower limit value set by the user.

  Therefore, in the present embodiment, the resolution of each bar 43a is determined by the following equation.

Resolution = (upper limit value−lower limit value) / number (1)
In the above equation (1), the number is the number of bars 43a between the upper limit display unit 43b and the lower limit display unit 43c. In the example of FIG. 5, the number in the above equation (1) is 7 as an initial setting. The number may be changed by setting by the user. For example, the number 7 may be set to the number 5.

  For example, when the upper limit value and the lower limit value set by the user are 0.7 mm and 0.0 mm, respectively, the resolution of each bar 43a is 0.1 from the above equation (1). Further, when the upper limit value and the lower limit value set by the user are 2.8 mm and 0.0 mm, respectively, the resolution of each bar 43a is 0.4 from the above equation (1).

  The resolution of the bar 43a set as described above is stored in the EEPROM 31 of the main body 100B.

  When measuring the object, the CPU 20 controls the display of the bar display unit 43 based on the resolution set by the above method. In this case, the CPU 20 calculates the number of bars 43a to be lit (the number of lighting) by the following formula.

Number of lights = (Measured value−Lower limit value) / Resolution + K (2)
In the above equation (2), K is the number of bars 43a on the right side of the lower limit display portion 43c. The CPU 20 lights up the number of lighting bars 43 a calculated by the above equation (2) from the left end of the bar display unit 43.

(4) Resolution setting process by CPU Next, the resolution setting process by the CPU 20 will be described with reference to a flowchart.

  FIG. 6 is a flowchart showing the resolution setting process by the CPU 20.

  As shown in FIG. 6, first, the CPU 20 determines whether or not an upper limit value and a lower limit value are set by the user (step S1). When the upper limit value and the lower limit value are set by the user, the CPU 20 sets the resolution of each bar 43a from the above equation (1) (step S2). When the upper limit value and the lower limit value are not set by the user, the CPU 20 waits until the upper limit value and the lower limit value are set.

  Another example of the resolution setting process shown in FIG. 6 is as follows. When the contact displacement meter 100 according to the present embodiment is shipped from a factory or the like, the initial values of the upper limit value and the lower limit value are set by the manufacturer. In this case, unless the user changes the initial values of the upper limit value and the lower limit value, the initial values are used as set values. Further, when the initial values are changed by the user, the changed values are set as new upper limit values and lower limit values.

(5) Effects in the present embodiment In the contact displacement meter 100 of the present embodiment, the resolution of each bar 43a of the bar display unit 43 is automatically set based on the upper limit value and the lower limit value of the allowable range set by the user. Is set automatically. Thereby, the user can arbitrarily set the allowable range of the physical displacement amount of the object.

Further, the resolution of the bar 43a can be increased without changing the full scale of the measurement range of the contact displacement meter 100, or the full scale of the measurement range of the contact displacement meter 100 can be increased while maintaining the resolution. It becomes possible. Thereby, it is not necessary to newly provide light emitting elements such as LEDs.

  As a result, it is possible to obtain a contact displacement meter that is easy to use for the user, inexpensive, and downsized.

(6) Other Embodiments The displacement meter of the present invention is also applied to an optical displacement meter using a laser beam, a photoelectric sensor, a flow sensor, a pressure sensor, an ultrasonic sensor, a radiation temperature sensor, a proximity sensor, and a strain sensor. It is possible. Details of each embodiment will be described below.

(7) Second Embodiment of the Present Invention in a Head Amplifier-Integrated Photoelectric Sensor FIG. 7 is an example of a photoelectric sensor according to the second embodiment of the present invention, and FIG. (B) The schematic of a sensor is shown in a figure. FIG. 8 is a block diagram thereof. As shown in FIG. 8, the photoelectric sensor 200 according to the present embodiment is a so-called head amplifier integrated type. However, as another example, the photoelectric sensor 200 can be applied to a head / amplifier separated type which will be described later. Although not shown in FIG. 7, the photoelectric sensor 200 includes a display unit 230 similar to the display unit 32 described in the first embodiment. This operation is as described in the first embodiment.

  The photoelectric sensor 200 is connected to the external device described in the first embodiment by a cable 252 (not shown).

  As shown in FIG. 8, the photoelectric sensor 200 includes a control unit 210, a light projection processing unit 212, a light projection unit 214, a light reception unit 216, an amplification unit 218, an A / D conversion unit 220, a display unit 230, a storage unit 260, An external input / output unit 270 and a setting unit 280 are provided.

  In FIG. 8, first, the control unit 210 gives a light emission command to the light projection processing unit 212 in order to operate the light projection unit 214. The light projection processing unit 212 causes the light projection unit 214 to emit light based on the light emission command, and projects the light onto the inspection target. In addition, although the light emission part in a present Example uses LED (Light Emitting Diode), you may use other light emitting elements, such as LD (Laser Diode).

  The light projected onto the inspection object by the light projecting unit 214 is reflected by the inspection object and received by the light receiving unit 216. A PD (Photo Diode) or the like is used as the light receiving unit, the light receiving unit 216 generates a light reception signal voltage based on the amount of received light, the signal is amplified by the amplification unit 218, and A / D conversion is performed by the A / D conversion unit 220. Then, it is given to the control unit 210. The control unit 210 displays the received light amount on the display unit 230 based on the received light amount as a given measurement value, and outputs, for example, an on / off signal to the external input / output unit 270 as a result of the received light amount or a result determined thereby. Is done.

  Similar to the first embodiment, the display unit 230 includes the display panel 33 illustrated in FIG. 5, and includes at least a 7-segment LED 42 and a bar display unit 43. In the first embodiment, the display target of the bar display unit 43 is set as the displacement amount (distance) to the target object for the contact displacement meter. In this embodiment, the display target is the received light amount. In other words, the 7-segment LED 42 displays a digital value of the amount of received light, and the display content of the bar display unit varies as the amount of received light increases or decreases.

  When the present invention is applied to the photoelectric sensor in the present embodiment, as shown in FIG. 7, the user sets the received light amount from the inspection target to be within an allowable range around the value X1 that is the reference received light amount. The upper limit Hi and the lower limit Lo of the allowable range are set by the unit 260.

  Further, when the present invention is applied to this embodiment, the resolution of the bar display unit 43 with respect to the amount of light received can be obtained from the equation (1) described in the first embodiment, and the resolution of the bar 43a can be determined.

  For example, when the upper limit value and lower limit value of the received light amount set by the user are 1800 and 2500, respectively, and the number of bars 43a between the upper limit value display portion 43b and the lower limit value display portion 43c is 7, From the equation (1), the resolution of each bar 43a is 100. The set resolution of the bar 43a is stored in the storage unit 260. Note that the received light amount displayed in the present embodiment is a dimensionless relative value based on the above-described received light signal.

  Using the resolution obtained by the equation (1), the number of bars 43a to be displayed is determined by using the equation (2) described in the first embodiment.

  Here, when 2400 is obtained as the amount of received light, the control unit 210 outputs a display command for lighting the nine bars 43a from the right side when K is set to 3 from the equation (2). Accordingly, the nine bars 43a are turned on from the right side. Further, when 1700 having a light reception amount smaller than the lower limit value 1800 is obtained, a display command for turning on the two bars 43a is output from the right side, and 2700 having a light reception amount smaller than the upper limit value 2500 is output. If it is obtained, a display command for turning on 11 bars 43a from the right side is output. Thus, it is preferable to display the received light amount outside the allowable range with the same resolution. Of course, when the amount of received light is 1600 or less, which is below the display limit, only the rightmost bar 43a is turned on, and when the amount of received light is 2800 or more, all of the bars 43a are turned on.

  In the photoelectric sensor 200 of the present embodiment, the resolution with respect to the amount of light received by each bar 43a of the bar display unit 43 is automatically set based on the upper limit value and the lower limit value of the allowable range set by the user. Thereby, the user can arbitrarily set the allowable range of the amount of light received from the object.

Further, it is possible to increase the resolution of the bar 43a without changing the full scale of the measurement range of the photoelectric sensor 200, or to increase the full scale of the measurement range of the photoelectric sensor 200 while maintaining the resolution. Thereby, it is not necessary to newly provide light emitting elements such as LEDs.

  As a result, it is possible to obtain a photoelectric sensor 200 that is easy to use for the user, inexpensive, and downsized.

(8) Third Embodiment of the Present Invention in a Head Amplifier Separation Type Photoelectric Sensor FIG. 9 is an example of a head amplifier separation type photoelectric sensor 202 according to the third embodiment, and FIG. The schematic of a sensor is shown in a figure and (b) figure. FIG. 10 is a block diagram showing the configuration.

  As shown in FIG. 9, the head amplifier separation type photoelectric sensor 202 according to this embodiment includes a head portion 202A and a main body portion 202B. Although not shown in FIG. 9, the main body unit 202B includes a display unit 230B described later.

  As shown in FIG. 10, the difference from the head amplifier integrated photoelectric sensor 200 of the second embodiment is that the head unit 202A and the amplifier unit 202B are connected by a cable 291 and the heads are connected using the communication units 290A and 290B. The amount of light received by the control unit 210A of the unit 202A is acquired by the control unit 210B of the amplifier unit 202B and displayed on the display unit 230B. In addition, the display unit 230A provided in the head unit 202A may be provided with a simple indicator lamp, such as whether it is in a light projection state or in a detection state, and the amount of received light may be displayed as a bar. The other parts are the same as those of the integrated photoelectric sensor shown in FIG.

  When the present invention is applied to the photoelectric sensor in the present embodiment, as shown in FIG. 9, the user sets the received light amount from the inspection target to be within an allowable range near the value X1 that is the reference received light amount. The upper limit Hi and the lower limit Lo of the allowable range are set by the unit 260.

  Similar to the first embodiment, the display unit 230B provided in the amplifier unit 202B includes the display panel 33 illustrated in FIG. 5 and includes at least a 7-segment LED 42 and a bar display unit 43. . When the present invention is applied to the present embodiment, the control unit 210B calculates the resolution from the set upper limit value Hi and lower limit value Lo using equations (1) and (2). Thereafter, the number of bars 43a to be displayed is determined and turned on.

  Also in the head amplifier separation type photoelectric sensor 202 according to the present embodiment, the effects of the present invention as described in the first embodiment can be obtained.

(9) Fourth Embodiment of the Present Invention in Distance Setting Type Photoelectric Sensor The photoelectric sensor of the third embodiment shown in FIGS. 8 and 10 has an inspection based on the amount of reflected light received from the inspection object. The presence or absence of the subject was judged. The present invention can be applied to a triangulation type photoelectric sensor in addition to such a light receiving amount type photoelectric sensor.

  FIG. 11 is an example of the distance measuring photoelectric sensor 204 of the triangulation method according to the present embodiment, where FIG. 11A is a schematic diagram of setting, and FIG. 11B is a schematic diagram of the sensor. FIG. 12 is a block diagram of the configuration.

  The difference from the above-described photoelectric sensor is that the light receiving unit 216 is not a PD but a light receiving element capable of detecting the position of the light receiving spot such as a PSD (Position Sensitive Detector) or a CCD (Charge Coupled Devices) is used. The other parts are the same as those of the head amplifier separation type photoelectric sensor 202 shown in FIG.

  The position of the light receiving spot on the light receiving surface of the light receiving unit 216 or the CCD varies depending on the distance between the distance setting type photoelectric sensor 204 and the detection target. When the detection target approaches the distance setting type photoelectric sensor 204, the light receiving spot is formed on the one end e1 side of the light receiving surface of the light receiving unit 216, and when the detection target moves away from the distance setting type photoelectric sensor 204, the light receiving spot becomes the light receiving unit 216. Is formed on one end e2 side of the light receiving surface.

  When PSD is used for the light receiving unit 216, two light receiving signals N and F corresponding to the position of the light receiving spot on the light receiving surface are output. One light receiving signal N has a signal substantially proportional to the distance from one end e1 of the light receiving unit 216 to the light receiving spot, and the other light receiving signal F is substantially proportional to the distance from the other end e2 of the light receiving surface to the light receiving spot. Signal. Therefore, the distance from the distance setting type photoelectric sensor 204 to the detection target can be detected using the two light receiving signals N and F.

  When a CCD is used for the light receiving unit 216, the distance from the distance setting type photoelectric sensor 204 to the detection target can be detected by calculating the peak position of the amount of light received on the CCD.

  In order for the user to set whether the inspection target exists within the allowable range near the reference distance X1 shown in FIG. 11, the upper limit Hi and the lower limit Lo of the allowable range are set by the setting unit 260. That is, the setting contents of the received light amount type photoelectric sensor are the same except that the setting target is the received light amount, whereas the measurement value that is the setting target of this embodiment is the distance.

  Similar to the third embodiment, the display unit 230B provided in the amplifier unit 204B includes the display panel 33 illustrated in FIG. 5 and includes at least a 7-segment LED 42 and a bar display unit 43. . When the present invention is applied to the present embodiment, the control unit 210B calculates the resolution from the set upper limit value Hi and lower limit value Lo using equations (1) and (2). Thereafter, the number of bars 43a to be displayed is determined and turned on.

  That is, even in the distance setting type photoelectric sensor 204 according to this embodiment, the effects of the present invention described in the first embodiment can be obtained.

(10) Fifth embodiment of the present invention in a head amplifier integrated flow sensor The photoelectric sensor shown in FIG. 8, FIG. 10, or FIG. 12 is based on the amount of received reflected light from the inspection object. The presence or absence was judged. The present invention can be applied to a flow rate sensor for measuring a flow rate in a measuring tube in addition to such a light receiving amount type photoelectric sensor.

  FIG. 13 shows an example of a flow rate sensor according to the fifth embodiment of the present invention. FIG. 13A is a schematic diagram of setting, FIG. 13B is a schematic diagram of the sensor, and an arrow indicates a flow direction. . FIG. 14 is a block diagram thereof.

  The head amplifier integrated flow sensor 300 is connected to the external device described in the first embodiment by a cable 352 (not shown).

  As shown in FIG. 14, the head amplifier integrated flow sensor 300 includes a control unit 310, a drive unit 312, an excitation coil 314, a detection unit 316, an amplification unit 318, an A / D conversion unit 320, a display unit 330, and a storage unit 360. An external input / output unit 370 and a setting unit 380.

  In FIG. 14, first, the control unit 310 gives an excitation command to the drive unit 312 in order to operate the excitation coil 314. The drive unit 312 operates the excitation coil 314 based on the excitation command, and causes the measurement tube 1300 to be inspected shown in FIG. 13 to generate a direction across the magnetic field. When a fluid to be detected that is a derivative passes through the magnetic field, an electromotive force that is orthogonal to the magnetic field proportional to the flow velocity is generated. The detection unit 316 outputs the electromotive force as a detection signal, is amplified by the amplification unit 318, is A / D converted by the A / D conversion unit 320, and is then supplied to the control unit 310.

  The control unit 310 calculates the flow rate from the given measurement value and the pipe diameter, displays the flow rate on the display unit 330, and outputs a determination result, for example, an on / off signal to the external input / output unit 370.

  The display unit 330 has the display panel 33 shown in FIG. 5 as in the above-described embodiment, and has at least a 7-segment LED 42 and a bar display unit 43. In the embodiment described above, the display target of the bar display unit 43 is set as the light receiving amount of the target object for the distance type photoelectric sensor, but in this embodiment, the display target is the flow rate. That is, the 7-segment LED 42 displays a digital value of the flow rate, and the display content of the bar display unit varies as the flow rate increases or decreases.

  When the present invention is applied to the flow rate sensor in the present embodiment, as shown in FIG. 13, the user sets the setting unit 360 so that the flow rate of the measurement pipe 1300 is within an allowable range near the value X1 that is the reference flow rate. To set the upper limit value Hi and the lower limit value Lo of the allowable range.

  When the present invention is applied to the present embodiment, the resolution is calculated from the set upper limit value Hi and lower limit value Lo using equations (1) and (2). Thereafter, the number of bars 43a to be displayed is determined, and the bars 43a can be turned on with a resolution desired by the user.

  That is, the head amplifier integrated flow sensor 300 according to the present embodiment can achieve the above-described effects of the present invention.

(11) Sixth Embodiment of the Present Invention in the Head Amplifier Separated Flow Sensor FIG. 15 is an example of a head amplifier separated flow sensor 302 according to the sixth embodiment, and FIG. The schematic of a sensor is shown in a figure and (b) figure. The arrow is the direction of flow. FIG. 16 is a block diagram showing the configuration.

  As shown in FIG. 15, a head amplifier separation type flow sensor 302 according to the present embodiment includes a head portion 302A and a main body portion 302B. Although not shown in FIG. 15, the main body 302B includes a display unit 330B described later.

  As shown in FIG. 16, the difference from the head amplifier integrated flow sensor 300 of the fifth embodiment is that the head unit 302A and the amplifier unit 302B are connected by a cable 391, and the heads are connected using the communication units 390A and 390B. The flow rate obtained by the control unit 310A of the unit 302A is acquired by the control unit 310B of the amplifier unit 302B and displayed on the display unit 330B. In addition, the display unit 330A provided in the head unit 302A is provided with a simple indicator lamp such as whether it is in a measurement state or a detection state, and the flow rate may be displayed as a bar. Since the other parts are the same as those of the integrated flow sensor shown in the fourth embodiment, the same reference numerals are given and the description thereof is omitted.

  When the present invention is applied to the flow rate sensor in the present embodiment, as shown in FIG. 15, the user sets the setting unit 360 so that the flow rate of the measurement tube 1300 is within an allowable range near the value X1 that is the reference flow rate. To set the upper limit value Hi and the lower limit value Lo of the allowable range.

  Similar to the first embodiment, the display unit 330B provided in the amplifier unit 302B includes the display panel 33 illustrated in FIG. 5 and includes at least a 7-segment LED 42 and a bar display unit 43. . When the present invention is applied to the present embodiment, the control unit 310B calculates the resolution from the set upper limit value Hi and lower limit value Lo using equations (1) and (2). Thereafter, the number of bars 43a to be displayed is determined and turned on.

  Also in the head amplifier separation type flow sensor 302 according to the present embodiment, the effects of the present invention described in the first embodiment can be obtained.

(12) Seventh Embodiment of the Invention in the Thermal Flow Sensor FIG. 17 is an example of a thermal flow sensor 304 according to the seventh embodiment, and (a) a schematic diagram of setting in FIG. ) Shows a schematic diagram of the sensor. The arrow is the direction of flow. FIG. 18 is a block diagram showing the configuration. As shown in FIG. 17, the thermal flow sensor 304 according to the present embodiment includes a head portion 304A and a main body portion 304B. Although not shown in FIG. 9, the main body unit 304B includes a display unit 330B described later.

  As shown in FIG. 18, the difference from the above-described head amplifier separation type flow sensor 302 is that the head unit 302 </ b> A has a flow sensor 315 instead of the excitation coil 314, and the detection unit 316 has a voltage difference from the flow sensor 315. Since the other parts are the same as those of the separation type flow sensor shown in FIG. 16, the same reference numerals are given and description thereof is omitted.

  The flow sensor 315 is formed by forming a platinum thin film on a silicon chip of several millimeters square using a processing technique called MEMS (Micro Electro Mechanical System), and the detection unit 316 is arranged on the upstream side and the downstream side. This is to detect a difference in current (voltage difference) in the heater resistance. The detected voltage difference of the heater resistance is signal amplified by the amplifying unit 318, A / D converted by the A / D converting unit 320, and then supplied to the control unit 310A. The control unit 310A calculates the flow rate based on the voltage difference as the given measurement value, and transmits the flow rate to the control unit 310B of the amplifier unit 304B through the communication unit 390. Control unit 310B displays the given flow rate on display unit 330B, and outputs an on / off signal to external input / output unit 370B based on the flow rate. Of course, the measured flow rate may be calculated not by the control unit 310A of the head unit 304A but by the control unit 310B of the amplifier unit 304B.

  When the present invention is applied to the flow sensor in the present embodiment, as shown in FIG. 17, the user sets the setting unit 380 so that the flow rate of the measurement tube 1300 is within the allowable range near the value X1 that is the reference flow rate. To set the upper limit value Hi and the lower limit value Lo of the allowable range.

  Similar to the first embodiment, the display unit 330B provided in the amplifier unit 304B includes the display panel 33 illustrated in FIG. 5 and includes at least a 7-segment LED 42 and a bar display unit 43. . When the present invention is applied to the present embodiment, the control unit 310B calculates the resolution from the set upper limit value Hi and lower limit value Lo using equations (1) and (2). Thereafter, the number of bars 43a to be displayed is determined and turned on.

  Even in the thermal flow sensor 304 according to the present embodiment, the effects of the present invention described in the first embodiment can be obtained. In addition, although the electromagnetic type or the thermal type is given as the measurement principle of the flow sensor, it goes without saying that the present invention can also be applied to the flow sensor of other measurement principles.

(13) Eighth Embodiment of the Present Invention in an Integrated Pressure Sensor The present invention can be applied to a pressure sensor that measures the pressure (gauge pressure) in the pressure conduit in addition to the photoelectric sensor and the flow sensor.

  FIG. 19 shows an example of an integrated pressure sensor according to the eighth embodiment of the present invention. FIG. 19A is a schematic diagram of setting, and FIG. 19B is a schematic diagram of the sensor. FIG. 20 is a block diagram thereof.

  The integrated pressure sensor 400 is connected to the external device described in the first embodiment by a cable 452 (not shown).

  As shown in FIG. 20, the integrated pressure sensor 400 includes a control unit 410, a drive unit 412, a pressure sensor unit 415, a detection unit 416, an amplification unit 418, an A / D conversion unit 420, a display unit 430, a storage unit 460, An external input / output unit 470 and a setting unit 480 are provided.

  In FIG. 20, first, the control unit 410 gives a drive command to the drive unit 412 in order to operate the detection unit 416. The drive unit 412 operates the detection unit 416 in the pressure sensor unit 415 based on the command, and the detection unit 416 generates an electromotive force proportional to the pressure in the pressure conduit 1400 to be inspected shown in FIG. The electromotive force is output as a detection signal, amplified by the amplifier 418, A / D converted by the A / D converter 420, and then supplied to the controller 410.

  Control unit 410 calculates a pressure from the given measurement value, displays the pressure on display unit 430, and outputs an on / off signal to external input / output unit 470 based on the determined result.

  Similar to the first embodiment, the display unit 430 includes the display panel 33 illustrated in FIG. 5, and includes at least a 7-segment LED 42 and a bar display unit 43. In the sixth embodiment, the display target of the bar display unit 43 is set to the flow rate of the object for the flow rate sensor, but in this embodiment, the display target is pressure. That is, the 7-segment LED 42 displays a digital value of pressure, and the display content of the bar display unit varies depending on the level of pressure.

  When the present invention is applied to the pressure sensor in the present embodiment, as shown in FIG. 19, the user uses the setting unit 480 so that the pressure to be inspected is within the allowable range near the value X1 that is the reference pressure. The upper limit value Hi and the lower limit value Lo of the allowable range are set.

  Further, when the present invention is applied to the present embodiment, the resolution is calculated from the set upper limit value Hi and lower limit value Lo using the above-described equations (1) and (2). Thereafter, the number of bars 43a to be displayed is determined, and the bars 43a can be turned on with a resolution desired by the user.

That is, even in the integrated pressure sensor 400 according to the present embodiment, the effects of the present invention as described in the first embodiment can be obtained.
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(14) Ninth embodiment of the present invention in a head amplifier separation type pressure sensor FIG. 21 is an example of a head amplifier separation type pressure sensor 402 according to a ninth embodiment, and FIG. , (B) shows a schematic diagram of the sensor. FIG. 22 is a block diagram showing the configuration.

  As shown in FIG. 21, a head amplifier separation type pressure sensor 402 according to the present embodiment includes a head portion 402A and a main body portion 402B. Although not shown in FIG. 21, the main body 402B includes a display unit 430B described later.

  As shown in FIG. 22, the difference from the integrated pressure sensor 400 of the seventh embodiment is that the head unit 402A and the amplifier unit 402B are connected by a cable 491, and the head unit 402A is used by using the communication units 490A and 490B. The pressure obtained by the control unit 410A is acquired by the control unit 410B of the amplifier unit 402B and displayed on the display unit 430B. In addition, the display unit 430A provided in the head unit 402A is provided with a simple indicator lamp such as whether it is in a measurement state or a detection state, and pressure or the like may be displayed as a bar. The other parts are the same as those of the integrated pressure sensor shown in FIG.

  When the present invention is applied to the pressure sensor in this embodiment, as shown in FIG. 21, the user sets the setting unit 460 so that the pressure of the pressure conduit 1400 is within the allowable range near the value X1 that is the reference pressure. To set the upper limit value Hi and the lower limit value Lo of the allowable range.

  The display unit 430B provided in the amplifier unit 402B has the display panel 33 shown in FIG. 5 and has at least a 7-segment LED 42 and a bar display unit 43, as in the above-described embodiment. When the present invention is applied to the present embodiment, the control unit 410B calculates the resolution from the set upper limit value Hi and lower limit value Lo using equations (1) and (2). Thereafter, the number of bars 43a to be displayed is determined and turned on.

  Also in the head amplifier separation type pressure sensor 402 according to the present embodiment, the effects of the present invention as described in the first embodiment can be obtained.

(15) Tenth Embodiment of the Present Invention in Ultrasonic Sensor The present invention can be applied to an ultrasonic sensor that measures a distance by ultrasonic waves in addition to the above-described sensor.

  As shown in FIG. 23, the ultrasonic sensor 500 according to the tenth embodiment includes a head portion 500A and a main body portion 500B. (A) The schematic of a setting is shown to a figure, (b) The schematic of a sensor is shown to a figure. FIG. 24 shows a block diagram thereof. Although not shown in FIG. 23, the main body unit 500B includes a display unit 530B described later.

  As shown in FIG. 24, the ultrasonic sensor 500 includes a head unit 500A, a control unit 510A, a drive unit 512, a transmission unit 514, a reception unit 516, an amplification unit 518, an A / D conversion unit 520, a display unit 530A, a communication unit. 590A, and the main body 500B includes a control unit 510B, a storage unit 560, an external input / output unit 570, a setting unit 580, and a communication unit 590B.

  In FIG. 24, first, control unit 510A gives a drive command to drive unit 512 in order to operate transmission unit 514. The drive unit 512 operates the transmission unit 514 based on the command and transmits ultrasonic waves to the inspection target. The receiving unit 516 generates an electromotive force proportional to the received ultrasonic wave. The electromotive force is output as a detection signal, amplified by the amplifier 518, A / D converted by the A / D converter 520, and then supplied to the controller 510A.

  The control unit 510A transmits a detection signal to the control unit 510B via the communication units 590A and 590B, and the control unit 510B calculates the distance to the measurement target from the given detection signal and the transmission timing of the transmitted ultrasonic waves. . The control unit 510B displays the distance on the display unit 530 and outputs a signal such as on or off to the external input / output unit 570.

  Similar to the first embodiment, the display unit 530 includes the display panel 33 illustrated in FIG. 5, and includes at least a 7-segment LED 52 and a bar display unit 43. In the embodiment described above, the display target of the bar display unit 43 is set as the pressure of the target object for the pressure sensor, but in this embodiment, the display target is the distance to the target object. That is, the 7-segment LED 42 displays a digital value of the distance, and the display content of the bar display unit varies depending on the distance to the inspection target.

  When the present invention is applied to the ultrasonic sensor in this embodiment, as shown in FIG. 23, the user sets the setting unit so that the distance to the inspection object is within the allowable range around the value X1 that is the reference distance. In 580, an upper limit value Hi and a lower limit value Lo of an allowable range are set.

  When the present invention is applied to the present embodiment, the resolution is calculated from the set upper limit value Hi and lower limit value Lo using the above-described equations (1) and (2). Thereafter, the number of bars 43a to be displayed is determined, and the bars 43a can be turned on with a resolution desired by the user.

That is, also in the ultrasonic sensor 500 according to the present embodiment, the above-described effects of the present invention can be obtained.
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(16) Eleventh embodiment of the present invention in a radiation temperature sensor The present invention can be applied to a radiation temperature sensor that measures the radiation temperature of a measurement object in addition to the above-described sensor.

  As shown in FIG. 25, the radiation temperature sensor 600 according to the eleventh embodiment includes a head portion 600A and a main body portion 600B. (A) The schematic of a setting is shown to a figure, (b) The schematic of a sensor is shown to a figure. FIG. 26 shows a block diagram thereof. Although not shown in FIG. 26, the main body portion 600B includes a display portion 630B described later.

  As shown in FIG. 26, the radiation temperature sensor 600 includes a head unit 600A, a control unit 610A, a drive unit 612, a temperature sensor unit 615, a detection unit 616, an amplification unit 618, an A / D conversion unit 620, a display unit 630A, communication. 690A, the main body 600B includes a control unit 610B, a display unit 630B, a storage unit 660, an external input / output unit 670, a setting unit 680, and a communication unit 690B.

  In FIG. 26, first, the control unit 610A gives a drive command to the drive unit 612 in order to operate the detection unit 616. The drive unit 612 operates the detection unit 616 in the temperature sensor unit 615 based on the command, and detects the radiation temperature from the inspection target. The detection unit 616 is formed by a thermopile, a thermistor, or the like. The thermopile generates a first voltage proportional to the radiation temperature (infrared ray) from the outside, and the thermistor generates a second voltage proportional to the internal temperature of the radiation temperature sensor. appear. The first and second voltages are output as first and second detection signals, amplified by the amplifier 618, A / D converted by the A / D converter 620, and then supplied to the controller 610A. It is done.

  Control unit 610A gives the first and second detection signals to control unit 610B via communication units 690A and 690B. The control unit 610B calculates the temperature of the inspection target, displays the obtained temperature on the display unit 630B, and outputs, for example, an on / off signal from the external input / output unit 660.

  Similar to the first embodiment, the display unit 630 includes the display panel 33 illustrated in FIG. 5, and includes at least a 7-segment LED 62 and a bar display unit 43. In the ninth embodiment, the display target of the bar display unit 43 is set as the distance to the target for the ultrasonic sensor, but in this embodiment, the display target is temperature. That is, the 7-segment LED 42 displays a digital value of the temperature to be inspected, and the display content of the bar display portion varies depending on the temperature.

  When the present invention is applied to the radiation temperature sensor in the present embodiment, as shown in FIG. 25, the user sets the setting unit 660 so that the temperature of the inspection object is within an allowable range near the value X1 that is the reference temperature. To set the upper limit value Hi and the lower limit value Lo of the allowable range.

  Further, when the present invention is applied to the present embodiment, the resolution is calculated from the set upper limit value Hi and lower limit value Lo using equations (1) and (2). Thereafter, the number of bars 43a to be displayed is determined, and the bars 43a can be turned on with a resolution desired by the user.

That is, the effect of the present invention as described in the first example can be obtained also in the radiation type temperature sensor 600 according to the present embodiment.
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(17) Twelfth Embodiment of the Present Invention in Proximity Sensor The present invention can be applied to a proximity sensor that measures the presence or absence of a measurement object using magnetism in addition to the above-described sensor.

  As shown in FIG. 27, the proximity sensor 700 according to the eleventh embodiment includes a head portion 700A and a main body portion 700B. (A) The schematic of a setting is shown to a figure, (b) The schematic of a sensor is shown to a figure. FIG. 28 shows a block diagram thereof. Although not shown in FIG. 27, the main body 700B has a display 730B described later.

  As shown in FIG. 28, the proximity sensor 700 includes a control unit 710A, a drive unit 712, a transmission unit 714, a reception unit 716, an amplification unit 718, an A / D conversion unit 720, and a communication unit 790A in the head unit 700A. The main body 700B includes a control unit 710B, a display unit 730B, a storage unit 760, an external input / output unit 770, a setting unit 780, and a communication unit 790B.

  In FIG. 28, first, the control unit 710A gives a drive command to the drive unit 712 in order to operate the transmission unit 714. The drive unit 712 operates the transmission unit 714 based on the command to generate a high-frequency magnetic field on the measurement target. When the measurement object approaches the magnetic field, an induced current (eddy current) flows through the measurement object, and this current detects that the impedance of the detection coil of the detection unit 716 changes and oscillation stops, and the detection unit detects the detection signal. Is output. This detection signal is amplified by the amplifying unit 718, A / D converted by the A / D converting unit 720, and then supplied to the control unit 710A.

  Control unit 710A provides a detection signal to control unit 710B via communication units 790A and 790B. The control unit 710B calculates the amount of magnetism from the detection signal, displays the obtained amount of magnetism on the display unit 730, and outputs, for example, an on / off signal from the external input / output unit 770.

  Similar to the first embodiment, the display unit 730 includes the display panel 33 illustrated in FIG. 5, and includes at least a 7-segment LED 62 and a bar display unit 43. In the eleventh embodiment, the display target of the bar display unit 43 is set to the temperature of the target object for the radiation temperature sensor, but in this embodiment, the display target is a magnetic quantity. That is, the 7-segment LED 42 displays the magnetic amount, and the display content of the bar display unit varies depending on the increase or decrease of the magnetic amount.

    When the present invention is applied to the proximity sensor in the present embodiment, as shown in FIG. 27, the user allows the setting unit 760 to allow the magnetic amount to be within the allowable range near the value X1 that is the reference magnetic amount. The upper limit value Hi and the lower limit value Lo of the range are set.

  When the present invention is applied to the present embodiment, the resolution is calculated from the set upper limit value Hi and lower limit value Lo using equations (1) and (2). Thereafter, the number of bars 43a to be displayed is determined, and the bars 43a can be turned on with a resolution desired by the user.

  That is, also in the proximity sensor 700 which is this Embodiment, the effect of this invention as described in the 1st Example is acquired.

(18) Thirteenth Embodiment of the Present Invention in Strain Sensor The present invention can be applied to a strain sensor that measures strain of a measurement object in addition to the above sensor.

  As shown in FIG. 29, the strain sensor 800 according to the twelfth embodiment includes a head portion 800A and a main body portion 800B. (A) The schematic of a setting is shown to a figure, (b) The schematic of a sensor is shown to a figure. FIG. 28 shows a block diagram thereof. Although not shown in FIG. 30, the main body portion 802B includes a display portion 830B described later.

  As shown in FIG. 30, the strain sensor 800 includes a control unit 810A, a drive unit 812, a strain sensor unit 815, a detection unit 816, an amplification unit 818, an A / D conversion unit 820, a display unit 830A, and a communication unit. 890A, and the amplifier unit 800B includes a control unit 810A, a display unit 830B, a storage unit 860, an external input / output unit 870, a setting unit 880, and a communication unit 890B.

  In FIG. 30, first, the control unit 810A gives a drive command to the drive unit 812 to operate the detection unit 816 in the strain sensor unit 815. The drive unit 812 operates the detection unit 816 based on the command, and the detection unit 816 detects the distortion of the measurement target 1800 illustrated in FIG. 29 and outputs a detection signal. This detection signal is amplified by the amplifying unit 818, A / D converted by the A / D converting unit 820, and then supplied to the control unit 810A.

  Control unit 810A provides a detection signal to control unit 810B via communication units 890A and 890B. The control unit 810B calculates the distortion to be inspected from the given detection signal and displays it on the display unit 830B, and for example, an on / off signal is output from the external input / output unit 870.

  Similar to the first embodiment, the display unit 830B includes the display panel 33 shown in FIG. 5 and includes at least an 8-segment LED 62 and a bar display unit 43. In the eleventh embodiment, the display target of the bar display unit 43 is set as the magnetic quantity of the target object for the proximity sensor, but in the present embodiment, the display target is distorted. That is, the 8-segment LED 42 displays the amount of distortion to be measured, and the display content of the bar display unit varies depending on the increase or decrease in the amount of distortion.

  When the present invention is applied to the strain sensor in the present embodiment, as shown in FIG. 29, the user sets the setting unit so that the strain amount to be measured is within the allowable range near the value X1 that is the reference strain amount. In 860, an upper limit value Hi and a lower limit value Lo of the allowable range are set.

  Further, when the present invention is applied to the present embodiment, the resolution is calculated from the set upper limit value Hi and lower limit value Lo using equations (1) and (2). Thereafter, the number of bars 43a to be displayed is determined, and the bars 43a can be turned on with a resolution desired by the user.

  That is, even in the strain sensor 800 according to the present embodiment, the effects of the present invention as described in the first example can be obtained.

(19) Correspondence between each component of claim and each part of embodiment The following describes an example of the correspondence between each component of the claim and each part of the embodiment. It is not limited.

  In the first embodiment, the transformer 1 corresponds to conversion means, the input unit 34 corresponds to setting means, the CPU 20 corresponds to measurement means, calculation means, control means, and acquisition means, and the bar 43a is a display unit. The upper limit value display portion 43b and the lower limit value display portion 43c correspond to an allowable range display portion, and the bar display portion 43 corresponds to a display means.

  In the second, third, and fourth embodiments, the light receiving unit 216, the amplification unit 218, the A / D conversion unit 220, and the control units 210, 210A, and 210B correspond to the measurement unit, and the setting unit 280 serves as the setting unit. The control units 210, 210A and 210B correspond to calculation means and control means, and the bar display unit 43 corresponds to display means.

  In the fifth, sixth, and seventh embodiments, the detection unit 316, the amplification unit 318, the A / D conversion unit 320, and the control units 310, 310A, and 310B correspond to the measurement unit, and the setting unit 380 serves as the setting unit. The control units 310, 310A, and 310B correspond to calculation means and control means, and the bar display unit 43 corresponds to display means.

  In the eighth and ninth embodiments, the detection unit 416, the amplification unit 418, the A / D conversion unit 420, and the control units 410A and 410B correspond to a measurement unit, the setting unit 480 corresponds to a setting unit, and control. The units 410A and 410B correspond to calculation means and control means, and the bar display unit 43 corresponds to display means.

  In the tenth embodiment, the reception unit 516, the amplification unit 518, the A / D conversion unit 520, and the control units 510A and 510B correspond to the measurement unit, the setting unit 580 corresponds to the setting unit, and the control unit 510A, 510B corresponds to calculation means and control means, and the bar display unit 43 corresponds to display means.

  In the eleventh embodiment, the detection unit 616, the amplification unit 618, the A / D conversion unit 620, the control units 610A and 610B correspond to measurement means, the setting unit 680 corresponds to setting means, and the control units 610A, 610B corresponds to calculation means and control means, and the bar display unit 43 corresponds to display means.

  In the twelfth embodiment, the reception unit 716, the amplification unit 718, the A / D conversion unit 720, the control units 710A and 710B correspond to measurement means, the setting unit 780 corresponds to setting means, and the control units 710A, 710A, 710B corresponds to a calculation unit and a control unit, and the bar display unit 43 corresponds to a display unit.

  In the thirteenth embodiment, the detection unit 816, the amplification unit 818, the A / D conversion unit 820, and the control units 810A and 810B correspond to the measurement unit, the setting unit 880 corresponds to the setting unit, and the control unit 810A, 810B corresponds to calculation means and control means, and the bar display unit 43 corresponds to display means.

  The detection apparatus according to the present invention can be used to detect a physical quantity of an object.

It is a block diagram which shows the structure of the contact-type displacement meter which concerns on 1st Embodiment. It is a block diagram which shows the structure of the head part of FIG. It is a block diagram which shows the structure of the main-body part of FIG. It is a schematic diagram which shows the detailed structure of a transformer. It is a schematic diagram which shows the structure of the display part of a main-body part. It is a flowchart which shows the resolution setting process by CPU. It is the schematic which shows the structure of the integrated photoelectric sensor which concerns on 2nd Embodiment. It is a block diagram which shows the structure of FIG. It is the schematic which shows the structure of the head amplifier separate type photoelectric sensor which concerns on 3rd Embodiment. It is a block diagram which shows the structure of FIG. It is the schematic which shows the structure of the distance setting type photoelectric sensor which concerns on 4th Embodiment. FIG. 10 is a block diagram illustrating the configuration of FIG. 9. It is the schematic which shows the structure of the head amplifier integrated flow sensor which concerns on 5th Embodiment. It is a block diagram which shows the structure of FIG. It is the schematic which shows the structure of the head amplifier separation type flow sensor which concerns on 6th Embodiment. It is a block diagram which shows the structure of FIG. It is the schematic which shows the structure of the thermal type flow sensor which concerns on 7th Embodiment. It is a block diagram which shows the structure of FIG. It is the schematic which shows the structure of the thermal type flow sensor which concerns on 7th Embodiment. It is a block diagram which shows the structure of FIG. It is the schematic which shows the structure of the integrated pressure sensor which concerns on 8th Embodiment. It is a block diagram which shows the structure of FIG. It is the schematic which shows the structure of the head amplifier separation type pressure sensor which concerns on 9th Embodiment. It is a block diagram which shows the structure of FIG. It is the schematic which shows the structure of the ultrasonic sensor which concerns on 10th Embodiment. It is a block diagram which shows the structure of FIG. It is the schematic which shows the structure of the radiation temperature sensor which concerns on 11th Embodiment. It is a block diagram which shows the structure of FIG. It is the schematic which shows the structure of the proximity sensor which concerns on 12th Embodiment. It is a block diagram which shows the structure of FIG. It is the schematic which shows the structure of the distortion sensor which concerns on 13th Embodiment. FIG. 30 is a block diagram showing the configuration of FIG. 29.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Transformer 1a Contact 2 Transformer drive circuit 3 Signal detection circuit 4 Amplifier circuit 5 EEPROM
6 Indicator lamp control circuit 7 Indicator lamp 8 Power supply circuit 9 Comparator 20 CPU
DESCRIPTION OF SYMBOLS 21 PWM output circuit 22 1st filter circuit 23 2nd filter circuit 24 A / D converter 25 Communication interface 28a, 28b, 28c 1st-3rd input circuit 29 Overcurrent detection circuit 30a, 30b, 30c 1st ~ Third output circuit 31 EEPROM
32 Display 33 Display Panel 34 Input 41 Output Indicator 42 7 Segment LED
43 bar display unit 43a bar 43b upper limit value display unit 43c lower limit value display unit 44 mode key 45 set key 46 cross key 50 connection unit 80 cable 100 contact displacement meter 100A head unit 100B main unit C core 200 photoelectric sensor 202 head amplifier separation Type photoelectric sensor 204 Distance type photoelectric sensor 210, 210A, 210B Control unit 212 Light projection processing unit 214 Light projection unit 216 Light reception unit 218 Amplification unit 220 A / D conversion unit 230, 230A, 230B Display unit 260 Storage unit 270 External input / output 280 Setting unit 290, 290A, 290B Communication unit 291 Cable 300 Flow rate sensor 302 Head amplifier separation type flow rate sensor 304 Thermal flow rate sensor 310, 310A, 310B Control unit 312 Drive unit 314 Excitation coil 315 Flow sensor unit 3 16 Detection unit 318 Amplification unit 320 A / D conversion unit 330, 330A, 330B Display unit 360 Storage unit 370 External input / output 380 Setting unit 390, 390A, 390B Communication unit 391 Cable 400 Pressure sensor 402 Head amplifier separation type pressure sensor 410, 410A, 410B Control unit 412 Drive unit 415 Pressure sensor unit 416 Detection unit 418 Amplification unit 420 A / D conversion unit 430, 430A, 430B Display unit 460 Storage unit 470 External input / output 480 Setting unit 490, 490A, 490B Communication unit 491 Cable 500 Ultrasonic Sensors 510, 510A, 510B Control Unit 512 Drive Unit 514 Transmission Unit 516 Detection Unit 518 Amplification Unit 520 A / D Conversion Unit 530, 530A, 530B Display Unit 560 Storage Unit 570 External Input / Output 580 Setting Unit 5 0, 590A, 590B Communication unit 591 Cable 600 Radiation temperature sensor 610A, 610B Control unit 612 Drive unit 615 Temperature sensor unit 616 Detection unit 618 Amplification unit 620 A / D conversion unit 630A, 630B Display unit 660 Storage unit 670 External input / output 680 Setting unit 690, 690A, 690B Communication unit 691 Cable 700 Ultrasonic sensor 710, 710A, 710B Control unit 712 Drive unit 714 Transmission unit 716 Detection unit 718 Amplification unit 720 A / D conversion unit 730, 730A, 730B Display unit 760 Storage unit 770 External input / output 780 Setting unit 790, 790A, 790B Communication unit 791 Cable 800 Ultrasonic sensor 810, 810A, 810B Control unit 812 Drive unit 814 Transmission unit 816 Detection unit 818 Amplification unit 820 A / D conversion unit 30,830A, 830B display unit 860 storage unit 870 external input 880 setting unit 890,890A, 890B communication unit 891 cable

Claims (6)

A displacement meter that measures the physical displacement of an object,
A measuring means for obtaining a measured value of the physical displacement of the object;
Setting means for setting an allowable range having an upper limit value and a lower limit value for determining whether the physical displacement amount of the object is good or bad;
Display means for displaying an allowable range set by the setting means;
Calculating means for calculating the display resolution of the display means from the upper limit value and the lower limit value of the allowable range set by the setting means;
Control means for displaying a positional relationship of measured values obtained by the measuring means with respect to an allowable range displayed by the displaying means based on the display resolution calculated by the calculating means; Displacement meter. The display means includes an array of a plurality of display units, and an allowable range display unit that displays a range of display units corresponding to an allowable range among the plurality of display units,
The calculation means calculates the display unit display resolution from the difference between the upper limit value and the lower limit value of the allowable range set by the setting means and the number of display units within the range displayed by the allowable range display unit. The displacement meter according to claim 1. The displacement meter according to claim 2, wherein the array of the plurality of display units includes an array of a plurality of light emitting elements. Based on the display resolution calculated by the calculation unit and the upper limit value or lower limit value of the allowable range set by the setting unit, the control unit converts the measurement value obtained by the measurement unit in the plurality of display units. 4. The displacement meter according to claim 2, wherein the display means is controlled to indicate a corresponding position. The measuring means includes
A contact that is displaced by contact with an object;
Conversion means for converting the displacement of the contact into an electrical signal;
The displacement meter according to claim 1, further comprising an acquisition unit that acquires an electrical signal obtained by the conversion unit as a measurement value of a physical displacement amount of an object. A detection device for measuring a physical quantity from an object,
A measuring means for obtaining a measured value from a physical quantity from an object;
Setting means for setting an allowable range having an upper limit value and a lower limit value for pass / fail judgment using the measurement values obtained by the measurement means;
A calculation means for calculating a display resolution from an upper limit value and a lower limit value of an allowable range set by the setting means;
Control means for outputting a display command for displaying the positional relationship of the measurement values obtained by the measurement means with respect to the allowable range set by the setting means based on the display resolution calculated by the calculation means;
Display means for displaying the measurement value obtained by the measurement means in response to a display command of the control means;
A detection device comprising:

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