JP2007178298A - Oscillatory type inertial force detection sensor - Google Patents

Oscillatory type inertial force detection sensor Download PDF

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Publication number
JP2007178298A
JP2007178298A JP2005377937A JP2005377937A JP2007178298A JP 2007178298 A JP2007178298 A JP 2007178298A JP 2005377937 A JP2005377937 A JP 2005377937A JP 2005377937 A JP2005377937 A JP 2005377937A JP 2007178298 A JP2007178298 A JP 2007178298A
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inertial force
power
circuit
detection sensor
vibrator
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Takeshi Uemura
猛 植村
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Panasonic Holdings Corp
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Matsushita Electric Industrial Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an oscillation type inertial force detection sensor reduced in electric power consumption. <P>SOLUTION: The oscillation type inertial force detection sensor is provided with: an oscillator 4; a driving circuit 6 for oscillating the oscillator 4; a detection circuit 8 for detecting distortions which occur in the oscillator 4 owing to the Coriolis force (inertial force); and an electric power supply circuit 10 for supply electric power for the driving circuit 6 and the detection circuit 8. The oscillation type inertial force detection sensor is provided with: a sleep function to shift to such a power-saving state as to supply electric power for the driving circuit 6 but not for the detection circuit 8 when not receiving the Coriolis force; and a return circuit 12 for returning from the power saving state. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、各種電子機器に用いる振動型慣性力検知センサに関するものである。   The present invention relates to a vibration type inertial force detection sensor used in various electronic devices.

以下、従来の振動型慣性力検知センサについて説明する。   Hereinafter, a conventional vibration type inertial force detection sensor will be described.

振動型慣性力検知センサとしては角速度センサが挙げられ、この角速度センサは、振動子と、この振動子を振動させるための駆動回路と、コリオリ力(慣性力)に起因して振動子に生じる歪を検知するための検知回路と、駆動回路および検知回路に電力を供給するための電力供給回路とを備えている。   An example of the vibration type inertial force detection sensor is an angular velocity sensor. The angular velocity sensor includes a vibrator, a drive circuit for vibrating the vibrator, and distortion generated in the vibrator due to Coriolis force (inertial force). And a power supply circuit for supplying power to the drive circuit and the detection circuit.

振動子には、音叉形状、H形状、T形状、音片形状等、各種の形状のものがあるが、この振動子を振動させて、コリオリ力の発生に伴う振動子の歪を電気的に検知して角速度を算出するものである。   There are various types of vibrators such as a tuning fork shape, H shape, T shape, and sound piece shape. By vibrating this vibrator, the distortion of the vibrator accompanying the generation of Coriolis force is electrically affected. It detects and calculates angular velocity.

このような角速度センサは、例えば、デジタルカメラの手振れ防止機能を構成する部品として搭載されている。   Such an angular velocity sensor is mounted, for example, as a component constituting a camera shake prevention function of a digital camera.

なお、この出願の発明に関する先行技術文献情報としては、例えば、特許文献1が知られている。
特開2002−243451号公報
As prior art document information relating to the invention of this application, for example, Patent Document 1 is known.
JP 2002-243451 A

一般に、デジタルカメラは電池の駆動により作動させるため、電池の消費電力が大きくなれば使用可能な時間が短くなる。そのため、電池の消費電力を節電して長時間使用できるように、不使用時には主要機能への電力の供給を最低限に設定し、他の付加機能に対する電力の供給を遮断するような機能が採用されている。   Generally, since a digital camera is operated by driving a battery, the usable time is shortened if the power consumption of the battery is increased. Therefore, in order to save battery power consumption and use it for a long time, when not in use, the power supply to the main function is set to the minimum and the power supply to other additional functions is cut off. Has been.

しかしながら、手振れ防止機能を構成する角速度センサには、常時電力が供給されており、電池の消費電力の節電を阻害しているという問題点を有していた。   However, the angular velocity sensor constituting the camera shake prevention function is always supplied with electric power, which has a problem that it obstructs power saving of battery power consumption.

本発明は上記問題点を解決するもので、消費電力を低減した振動型慣性力検知センサを提供することを目的としている。   The present invention solves the above-described problems, and an object thereof is to provide a vibration type inertial force detection sensor with reduced power consumption.

上記目的を達成するために本発明は、特に、駆動回路には電力が供給されるが検知回路には電力が供給されない節電状態に移行させるスリープ機能を設けたものである。   In order to achieve the above object, in particular, the present invention is provided with a sleep function for shifting to a power saving state in which power is supplied to the drive circuit but power is not supplied to the detection circuit.

上記構成により、慣性力に起因して振動子に生じる歪を検知するための検知回路に電力が供給されないので消費電力を低減できる。   With the above configuration, power is not supplied to the detection circuit for detecting distortion generated in the vibrator due to inertial force, so that power consumption can be reduced.

特に、検知回路には電力が供給されないが、駆動回路には電力が供給されているので、節電状態から復帰させる際、振動型慣性力検知センサとして機能させる復帰時間を早くすることができる。これは、振動子を振動させるための駆動回路への電力を遮断し、再度、電力を供給した場合、電力の遮断によって振動が止まった振動子は、再度、電力が供給されて振動子が振動したとしても、その振動子の振動が安定状態になるまでに時間を要する。そのため、振動子の振動が安定状態になるまで、精度の良い検知ができない。しかし、振動子を振動させるための駆動回路への電力を遮断せずに供給しておけば、振動子の振動は常時安定状態であり、節電状態からの復帰時間に時間を要しない。   In particular, power is not supplied to the detection circuit, but power is supplied to the drive circuit. Therefore, when returning from the power saving state, the return time for functioning as the vibration type inertial force detection sensor can be shortened. This is because when the power to the drive circuit for vibrating the vibrator is cut off and power is supplied again, the vibrator that has stopped vibrating due to the power cutoff is supplied with power again and the vibrator vibrates. Even so, it takes time for the vibration of the vibrator to become stable. Therefore, accurate detection cannot be performed until the vibration of the vibrator becomes stable. However, if the power to the drive circuit for vibrating the vibrator is supplied without being cut off, the vibration of the vibrator is always in a stable state, and time is not required for the return time from the power saving state.

以下、本発明の一実施の形態について図面を用いて説明する。   Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

本発明の一実施の形態における振動型慣性力センサとしては角速度センサが挙げられる。   An angular velocity sensor is an example of the vibration type inertial force sensor according to an embodiment of the present invention.

図1は本発明の一実施の形態における角速度センサのブロック図、図2は同角速度センサの振動子の平面図である。   FIG. 1 is a block diagram of an angular velocity sensor according to an embodiment of the present invention, and FIG. 2 is a plan view of a vibrator of the angular velocity sensor.

図1、図2において、この角速度センサ2は、振動子4と、この振動子4を振動させるための駆動回路6と、コリオリ力(慣性力)に起因して振動子4に生じる歪を検知するための検知回路8と、駆動回路6および検知回路8に電力を供給するための電力供給回路10とを備えている。   1 and 2, the angular velocity sensor 2 detects a transducer 4, a drive circuit 6 for vibrating the transducer 4, and distortion generated in the transducer 4 due to Coriolis force (inertial force). And a power supply circuit 10 for supplying power to the drive circuit 6 and the detection circuit 8.

また、節電状態に移行させるための節電信号に基づき、駆動回路6には電力が供給されるが検知回路8には電力が供給されない節電状態に移行させるスリープ機能を設けている。この節電信号はコリオリ力を受けていない時に発せられるようにしている。   In addition, a sleep function is provided for shifting to a power saving state in which power is supplied to the drive circuit 6 but power is not supplied to the detection circuit 8 based on a power saving signal for shifting to the power saving state. This power saving signal is generated when the Coriolis force is not applied.

さらに、スリープ機能によって節電状態に移行された後、節電状態から復帰する復帰回路12を設けている。   Further, a return circuit 12 that returns from the power saving state after being shifted to the power saving state by the sleep function is provided.

振動子4は、AgやAu等の金属導体からなる電極でPZTからなる圧電薄膜を挟み込んで形成した多層構造の駆動電極16および検知電極18とを、音叉形状のシリコン基板14上に配置して形成したものである。なお、図示していないが、シリコン基板14はH形状やT形状や音叉形状等でもよい。   The vibrator 4 includes a drive electrode 16 and a detection electrode 18 having a multilayer structure formed by sandwiching a piezoelectric thin film made of PZT with an electrode made of a metal conductor such as Ag or Au, on a tuning fork-shaped silicon substrate 14. Formed. Although not shown, the silicon substrate 14 may have an H shape, a T shape, a tuning fork shape, or the like.

駆動回路6は振動子4の振動が一定の振幅で振動するよう、駆動電極16に印加する駆動電圧を制御する回路であり、AGCや増幅器等により構成され、検知回路8はコリオリ力の発生に伴う振動子4の歪に起因して検知電極18から電気的に出力された検知信号を処理する回路であり、作動回路や積分回路やIC等により構成されている。   The drive circuit 6 is a circuit that controls the drive voltage applied to the drive electrode 16 so that the vibration of the vibrator 4 vibrates with a constant amplitude. The drive circuit 6 includes an AGC, an amplifier, and the like, and the detection circuit 8 generates Coriolis force. This is a circuit for processing a detection signal that is electrically output from the detection electrode 18 due to the distortion of the accompanying vibrator 4, and includes an operation circuit, an integration circuit, an IC, and the like.

このような角速度センサ2は、例えば、図3に示すようなデジタルカメラ20の手振れ防止機能を構成する部品として搭載されている。また、デジタルカメラ20は、一般的には、電池22で駆動させるので、電池22の消費電力が大きくなれば使用可能な時間が短くなる。そのため、電池22の消費電力を節電して長時間使用できるように、不使用時には主要機能への電力の供給を最低限に設定し、他の付加機能に対する電力の供給を遮断するような機能が採用されている。   Such an angular velocity sensor 2 is mounted, for example, as a component constituting a camera shake prevention function of the digital camera 20 as shown in FIG. Further, since the digital camera 20 is generally driven by the battery 22, the usable time is shortened if the power consumption of the battery 22 is increased. Therefore, in order to save power consumption of the battery 22 so that it can be used for a long time, the power supply to the main function is set to the minimum when not in use and the power supply to other additional functions is cut off. It has been adopted.

上記構成の角速度センサ2では、コリオリ力を受けていない時、コリオリ力に起因して振動子4に生じる歪を検知するための検知回路8に電力が供給されないので、消費電力を低減できる。この角速度センサ2をデジタルカメラ20に用いれば、デジタルカメラ20の電池22の消費電力も節電できる。また、検知回路8に電力が供給されなくなるまでの時間は、コリオリ力を受けなくなった直後や、コリオリ力を受けなくなって一定時間を経過した後でもよく、仕様に合わせて設定すればよい。   In the angular velocity sensor 2 having the above-described configuration, when no Coriolis force is received, power is not supplied to the detection circuit 8 for detecting distortion generated in the vibrator 4 due to the Coriolis force, so that power consumption can be reduced. If this angular velocity sensor 2 is used in the digital camera 20, the power consumption of the battery 22 of the digital camera 20 can also be saved. Further, the time until the power is not supplied to the detection circuit 8 may be set immediately after the Coriolis force is not received or after a certain time has passed since the Coriolis force is not received, and may be set according to the specification.

特に、コリオリ力を受けていない時、検知回路8には電力が供給されないが、駆動回路6には電力が供給されているので、節電状態から復帰させる際、角速度センサ2として機能させる復帰時間を早くすることができる。これは、振動子4を振動させるための駆動回路6への電力を遮断し、再度、電力を供給した場合、電力の遮断によって振動が止まった振動子4は、再度、電力が供給されて振動子4が振動したとしても、その振動子4の振動が安定状態になるまでに時間を要する。そのため、振動子4の振動が安定状態になるまで、精度の良い検知ができない。しかし、振動子4を振動させるための駆動回路6への電力を遮断せずに供給しているので、振動子4の振動は常時安定状態であり、節電状態からの復帰時間に時間を要しない。   In particular, when no Coriolis force is received, no power is supplied to the detection circuit 8, but power is supplied to the drive circuit 6. Can be fast. This is because when the electric power to the drive circuit 6 for vibrating the vibrator 4 is cut off and the electric power is supplied again, the vibrator 4 whose vibration is stopped by the interruption of the electric power is again supplied with electric power and vibrated. Even if the child 4 vibrates, it takes time until the vibration of the vibrator 4 becomes stable. Therefore, accurate detection cannot be performed until the vibration of the vibrator 4 becomes stable. However, since the power to the drive circuit 6 for vibrating the vibrator 4 is supplied without being cut off, the vibration of the vibrator 4 is always in a stable state, and no time is required for the return time from the power saving state. .

さらに、角速度センサ2には、節電状態から復帰する復帰回路12を設けているので、節電状態からも円滑に復帰が可能である。復帰を促す外部信号24が復帰回路12に入力されたら、検知回路8に電力が供給され、スリープ機能を解除するようにすればよい。復帰を促す外部信号24の発信は、例えば、角速度センサ2を搭載するデジタルカメラ20から行うようにし、デジタルカメラ20の各種のボタン等を外部信号24の発信スイッチとして用いればよい。   Furthermore, since the angular velocity sensor 2 includes the return circuit 12 that returns from the power saving state, the angular velocity sensor 2 can smoothly return from the power saving state. When the external signal 24 that prompts the return is input to the return circuit 12, power may be supplied to the detection circuit 8 to cancel the sleep function. For example, the external signal 24 for prompting the return may be transmitted from the digital camera 20 on which the angular velocity sensor 2 is mounted, and various buttons of the digital camera 20 may be used as a transmission switch for the external signal 24.

なお、上述した一実施の形態における振動型慣性力センサでは、コリオリ力(慣性力)を受けていない時、節電信号が発せられ、駆動回路6には電力が供給されるが検知回路8には電力が供給されない節電状態に移行させるスリープ機能を設けたが、意図的に節電信号を発せられるようにして、節電状態に移行させるようにしてもよい。例えば、デジタルカメラ20に搭載した場合は、デジタルカメラ20の各種のボタン等を節電信号の発信スイッチとして用いればよい。   In the vibration type inertial force sensor according to the above-described embodiment, when no Coriolis force (inertial force) is received, a power saving signal is generated and power is supplied to the drive circuit 6, but the detection circuit 8 is supplied with power. Although a sleep function for shifting to a power saving state in which no power is supplied is provided, the power saving signal may be intentionally generated to shift to a power saving state. For example, when mounted on the digital camera 20, various buttons and the like of the digital camera 20 may be used as a power saving signal transmission switch.

さらに、本発明は、角速度センサ2として用いる他、振動子4を有する加速度センサ等、振動子4の振動に基づいて慣性力を検知する形態において適用できる。   Furthermore, the present invention can be applied not only to the angular velocity sensor 2 but also to a mode in which an inertial force is detected based on the vibration of the vibrator 4 such as an acceleration sensor having the vibrator 4.

以上のように本発明にかかる振動型慣性力センサは、消費電力を低減できるので各種の電子機器に有用である。   As described above, the vibration type inertial force sensor according to the present invention can reduce power consumption, and thus is useful for various electronic devices.

本発明の一実施の形態における角速度センサのブロック図The block diagram of the angular velocity sensor in one embodiment of this invention 同角速度センサの振動子の平面図Plan view of transducer of same angular velocity sensor 同角速度センサを搭載するデジタルカメラの斜視図Perspective view of a digital camera equipped with the same angular velocity sensor

符号の説明Explanation of symbols

2 角速度センサ
4 振動子
6 駆動回路
8 検知回路
10 電力供給回路
12 復帰回路
14 シリコン基板
16 駆動電極
18 検知電極
20 デジタルカメラ
22 電池
24 外部信号
2 angular velocity sensor 4 vibrator 6 drive circuit 8 detection circuit 10 power supply circuit 12 return circuit 14 silicon substrate 16 drive electrode 18 detection electrode 20 digital camera 22 battery 24 external signal

Claims (4)

振動子と、前記振動子を振動させるための駆動回路と、慣性力に起因して前記振動子に生じる歪を検知するための検知回路と、前記駆動回路および前記検知回路に電力を供給するための電力供給回路とを備え、前記駆動回路には電力が供給されるが前記検知回路には電力が供給されない節電状態に移行させるスリープ機能を設けた振動型慣性力検知センサ。 A vibrator, a drive circuit for vibrating the vibrator, a detection circuit for detecting distortion generated in the vibrator due to inertial force, and supplying power to the drive circuit and the detection circuit A vibration type inertial force detection sensor provided with a sleep function for shifting to a power saving state in which power is supplied to the drive circuit but power is not supplied to the detection circuit. 前記節電状態から復帰させる復帰回路を設けた請求項1記載の振動型慣性力検知センサ。 The vibration type inertial force detection sensor according to claim 1, further comprising a return circuit for returning from the power saving state. 前記節電状態に移行させるための節電信号に基づいて、前記節電状態に移行させる請求項1記載の振動型慣性力検知センサ。 The vibration type inertial force detection sensor according to claim 1, wherein the vibration type inertial force detection sensor is shifted to the power saving state based on a power saving signal for shifting to the power saving state. 前記節電信号は前記慣性力を受けていない時に発せられる請求項3記載の振動型慣性力検知センサ。 The vibration type inertial force detection sensor according to claim 3, wherein the power saving signal is generated when the inertial force is not received.
JP2005377937A 2005-12-28 2005-12-28 Oscillatory type inertial force detection sensor Pending JP2007178298A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015004872A1 (en) * 2013-07-12 2015-01-15 パナソニックIpマネジメント株式会社 Drive apparatus, physical quantity detection apparatus, and electronic apparatus
US10107626B2 (en) 2015-04-10 2018-10-23 Kabushiki Kaisha Toshiba Method for acquiring angular velocity of gyro sensor and device for doing the same

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015004872A1 (en) * 2013-07-12 2015-01-15 パナソニックIpマネジメント株式会社 Drive apparatus, physical quantity detection apparatus, and electronic apparatus
US9746326B2 (en) 2013-07-12 2017-08-29 Panasonic Intellectual Property Management Co., Ltd. Drive apparatus, physical quantity detection apparatus, and electronic apparatus
US10107626B2 (en) 2015-04-10 2018-10-23 Kabushiki Kaisha Toshiba Method for acquiring angular velocity of gyro sensor and device for doing the same

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