JP2007160207A - Coating apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a coating apparatus capable of easily, quickly and certainly washing an outer peripheral surface of a roller. <P>SOLUTION: The coating apparatus 1 has at least one roller including a roller for coating a work with a liquid-like material. In the coating apparatus, the liquid-like material is fed to the outer peripheral surface of the roller and the work is coated with the liquid-like material by contacting the liquid-like material on the outer peripheral surface of the roller with the work. The apparatus has a washing means for washing the outer peripheral surface of the roller. The washing means has a gas feeding means for feeding a predetermined gas; and a discharging means for generating discharge. The washing means is constituted such that the discharge is generated to produce plasma while feeding the predetermined gas and the outer peripheral surface of the roller is washed by the plasma. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a coating apparatus.

As a coating device for applying a liquid material (for example, a resist material, an insulating material, etc.) on a substrate (work), a roll coater (roll) that supplies the liquid material to the outer peripheral surface of the roller and applies the liquid material to the substrate by the roller. A coating type coating apparatus is known (for example, see Patent Document 1).
For such cleaning of the outer peripheral surface of the roller of the roll coater, a wet (WET) method using a chemical solution is mainly used.

However, in the conventional roll coater, when the outer peripheral surface of the roller is cleaned by a wet method, there are many manual operations, and there are, for example, the following disadvantages (1) to (6).
(1) A large amount of chemical solution is used, and waste liquid treatment after washing is necessary.
(2) Insufficient cleaning is likely to occur. For example, a residue may be generated, or dust (for example, mark) may be generated from a cleaning cloth or Ben cotton used for cleaning, and the dust may adhere to the outer peripheral surface of the roller. If the liquid material is applied in a state where dust is attached to the outer peripheral surface of the roller, an unnecessary product is generated or the product is adversely affected.
(3) Cleaning cannot be performed with the roller attached to the apparatus. That is, at the time of cleaning, it is necessary to first remove the roller from the apparatus, and after cleaning, it is necessary to attach the roller to the apparatus, which takes time and effort.
(4) After washing, a step of drying the roller (drying step) is required, which takes time and effort.
(5) When cleaning, it is necessary to completely stop the apparatus.
(6) The apparatus may be provided with a scraping roller for scraping off the liquid material adhering to the coating roller in addition to the coating roller for coating the liquid material on the substrate. The surface preferably has liquid repellency, and is composed of, for example, resin or rubber. For this reason, the liquid material causes corrosion, deterioration, chemical reaction, etc., and the liquid repellency is reduced. Come on.

JP 2003-340334 A

  The objective of this invention is providing the coating device which can wash | clean the outer peripheral surface of a roller easily, rapidly, and reliably.

Such an object is achieved by the present invention described below.
The coating apparatus of the present invention has at least one roller including a roller for applying a liquid material to a workpiece, supplies the liquid material to the outer peripheral surface of the roller, and brings the liquid material on the outer peripheral surface of the roller into contact with the workpiece. A coating device for coating,
Having cleaning means for cleaning the outer peripheral surface of the roller;
The cleaning unit includes a gas supply unit that supplies a predetermined gas and a discharge unit that generates a discharge. The cleaning unit generates a plasma while generating the discharge while supplying the predetermined gas. It is comprised so that the outer peripheral surface of may be wash | cleaned.
Thereby, the outer peripheral surface of the roller can be cleaned (ashed) easily, quickly and reliably.

That is, since the cleaning means is a dry (DRA) method using plasma, a chemical solution as in the wet method is unnecessary, and a waste liquid treatment and a nozzle drying process are unnecessary.
Also, when cleaning, the outer peripheral surface of the roller must be cleaned reliably without dust (for example, scraps, etc.) generated from the cleaning cloth, ben cotton, etc. adhering to the outer peripheral surface of the roller as in the wet method. Can do.

In addition, since the coating device itself has a cleaning means, the outer peripheral surface of the roller can be cleaned without removing the roller (with the roller attached), and a separate cleaning facility is provided. There is no need to provide it.
Further, the outer peripheral surface of the roller can be cleaned without stopping the coating apparatus (for example, while the liquid material is being applied to the workpiece).

In the coating apparatus of the present invention, the gas supply means supplies gas near the outer peripheral surface of the roller, and the discharge means generates discharge near the outer peripheral surface of the roller,
The cleaning unit is preferably configured to generate plasma in the vicinity of the outer peripheral surface of the roller by the gas supply unit and the discharge unit.
As a result, plasma is generated in the vicinity of the outer peripheral surface of the roller, so that the cleaning processing rate is high and the cleaning time (processing time) can be shortened.

In the coating apparatus of the present invention, the discharge means includes a pair of electrodes facing each other, and a power supply unit that applies a voltage between the pair of electrodes.
One electrode of the pair of electrodes is preferably constituted by an outer peripheral surface of the roller or a portion in the vicinity of the outer peripheral surface.
As a result, the outer peripheral surface of the roller can be more reliably cleaned, and the number of parts can be reduced.

In the coating apparatus of the present invention, it is preferable that a surface of the other electrode of the pair of electrodes facing the roller has a curved shape facing the outer peripheral surface of the roller.
As a result, a uniform discharge can be generated between the electrodes, and a good plasma can be generated.
In the coating apparatus according to the aspect of the invention, it is preferable that the cleaning unit includes a discharge portion that discharges the generated plasma, and the discharge portion is disposed at a position facing the outer peripheral surface of the roller.
As a result, plasma is generated in a portion other than the vicinity of the outer peripheral surface of the roller, so that damage (damage) of the outer peripheral surface of the roller can be prevented, and the selection range of the material of the roller (outer peripheral surface of the roller), etc. Spread.

In the coating apparatus according to the aspect of the invention, it is preferable that the discharge unit includes a pair of electrodes facing each other and a power supply unit that applies a voltage between the pair of electrodes.
Thereby, a favorable plasma can be generated.
In the coating apparatus of this invention, it is preferable that the insulating layer is provided in the mutually opposing surface of each said electrode.
Thereby, generation | occurrence | production of arc discharge can be prevented, and since favorable (uniform) glow discharge (barrier discharge) can be produced, favorable plasma can be generated.

In the coating apparatus of this invention, it is preferable to have the collection | recovery means which collect | recovers the gas used for the washing | cleaning of the outer peripheral surface of the said roller.
Thereby, the gas used for cleaning can be reliably recovered, and organic substances contained in the gas can be prevented from adhering to the outer peripheral surface of the roller again. Further, the collected gas can be discharged to a predetermined place.

In the coating apparatus according to the aspect of the invention, it is preferable that the collection unit includes a collection unit that covers a portion of the outer peripheral surface of the roller that is cleaned by the plasma and collects the gas used for the cleaning.
Thereby, the gas used for washing | cleaning can be collect | recovered more reliably.
In the coating apparatus of the present invention, it has a heating means for heating at least the outer peripheral surface of the roller,
When cleaning the outer peripheral surface of the roller, the outer peripheral surface of the roller is preferably heated by the heating means.
Thereby, the cleaning processing rate is increased, and the cleaning time (processing time) can be shortened.

In the coating apparatus of the present invention, it is preferable that the cleaning unit has a function of modifying the outer peripheral surface of the roller in addition to the function of cleaning the outer peripheral surface of the roller.
As a result, the outer peripheral surface of the roller can be modified easily and quickly, and thereby the performance of the roller can be improved.
In the coating device of the present invention, in modifying the outer peripheral surface of the roller, a lyophilic process or a liquid-repellent process is performed on the outer peripheral surface of the roller by selecting the gas to be supplied. It is preferable.
Thereby, the wettability of the outer peripheral surface of the roller can be increased or decreased.

For example, by performing lyophilic treatment on the outer peripheral surface of the roller, the wettability of the outer peripheral surface of the roller is increased, and thereby, the liquid material can be uniformly and stably applied to the workpiece.
Further, for example, the outer peripheral surface of a roller whose outer peripheral surface preferably has liquid repellency, such as a scraping roller, can be easily subjected to liquid repellency treatment, and the outer peripheral surface of the roller can be wetted. Can be reduced.

In the coating apparatus of the present invention, as the roller, a coating roller that applies a liquid material to a workpiece, and a liquid material supply roller that supplies the liquid material to the outer peripheral surface of the coating roller from a reservoir that stores the liquid material; Have
It is preferable that at least one of the application roller and the liquid material supply roller is provided with the cleaning means for cleaning the outer peripheral surface thereof.
As a result, the outer peripheral surfaces of the application roller and the liquid material supply roller can be easily, quickly and reliably cleaned.

Hereinafter, the coating device of the present invention will be described in detail based on a preferred embodiment shown in the accompanying drawings.
<First Embodiment>
FIG. 1 is a cross-sectional view (including a partial block diagram) schematically showing a first embodiment of a coating apparatus of the present invention. In the following description, the upper side in FIG. 1 is referred to as “upper”, the lower side is referred to as “lower”, the left side is referred to as “left”, the right side is referred to as “right”, and the vertical direction in FIG. The horizontal direction is called “horizontal direction”.

  As shown in FIG. 1, a coating apparatus 1 includes a coating roller (roller) 3 for coating a liquid material on a substrate (work) 5 such as a semiconductor substrate such as a silicon wafer, and an outer peripheral surface (surface) of the coating roller 3. And a liquid material supply roller (roller) 4 for supplying the liquid material to the outer peripheral surface of the coating roller 3 from the storage portion 2 for storing the liquid material by the liquid material supply roller 4. In this coating apparatus, the liquid material on the outer peripheral surface of the application roller 3 is brought into contact with the substrate 5 and applied onto the substrate 5 (the surface of the substrate 5).

  The application roller 3 and the liquid material supply roller 4 are provided so as to be rotatable in both forward and reverse directions. Further, the application roller 3 and the liquid material supply roller 4 are juxtaposed along the horizontal direction so that their outer peripheral surfaces are separated from each other by a predetermined distance. The gap between the outer peripheral surface of the application roller 3 and the outer peripheral surface of the liquid material supply roller 4 regulates the thickness of the liquid material supplied from the liquid material supply roller 4 to the outer peripheral surface of the application roller 3, As a result, the thickness (film thickness) of the liquid material (coating film) applied to the substrate 5 by the application roller 3 is regulated. The length (distance) of the gap between the outer peripheral surface of the application roller 3 and the outer peripheral surface of the liquid material supply roller 4 can be adjusted by an adjusting mechanism (not shown).

  In the present embodiment, a form (system) in which the positions of the application roller 3 and the liquid material supply roller 4 are fixed and the substrate 5 moves relative to the application roller 3 and the liquid material supply roller 4 is adopted. The coating device 1 includes a transport device (not shown) that moves the substrate 5 in the horizontal direction, a drive device (not shown) that rotates the coating roller 3, and a drive device (not shown) that rotates the liquid material supply roller 4. .

The application roller 3 has a substantially cylindrical shape, and its outer peripheral surface (surface) constitutes one electrode (counter electrode) of a pair of electrodes facing each other. In this case, for example, only the outer peripheral portion of the application roller 3 may constitute the one electrode, and substantially the entire application roller 3 constitutes the one electrode. May be.
Above the coating roller 3, the other electrode (application electrode) 61 of the pair of electrodes and a support portion 63 that supports the electrode 61 are installed.
The electrode 61 extends from one end portion (one end portion in a direction perpendicular to the paper surface of FIG. 1) to the other end portion (the other end portion in a direction perpendicular to the paper surface in FIG. 1) of the application roller 3. Exist.

  Further, the surface (inner surface) of the electrode 61 facing the application roller 3 has a curved shape (curved surface) facing the outer peripheral surface of the application roller 3. Thereby, the distance (distance between a pair of electrodes) between the electrode 61 and the outer peripheral surface of the application roller 3 is substantially uniform (constant) over substantially the whole. The electrode 61 and the portion facing (corresponding to) the electrode 61 on the outer peripheral surface of the coating roller 3 constitute a pair of parallel plate electrodes.

The constituent materials of the electrode 61 and the electrode on the application roller 3 side are not particularly limited. For example, a simple metal such as copper, aluminum, iron and silver, an alloy such as stainless steel and brass, an intermetallic compound, etc. Examples thereof include materials having good conductivity.
An insulating layer 62 is provided on the surface (lower surface) of the electrode 61 facing the application roller 3.
Moreover, it is preferable that an insulating layer (not shown) is provided on the outer peripheral portion (outer peripheral surface) of the application roller 3. In this case, since the surface of the insulating layer becomes the outer peripheral surface of the application roller 3, the one electrode is located on the inner peripheral side of the outer peripheral surface of the application roller 3 (site near the outer peripheral surface of the application roller 3). Consists of.

  A predetermined gas is supplied between the electrode 61 and the outer peripheral surface of the application roller 3, and a predetermined voltage, for example, a high-frequency voltage (between a pair of electrodes) is provided between the electrode 61 and the outer peripheral surface of the application roller 3. When a voltage is applied, an electric field is generated between the electrode 61 and a portion of the outer peripheral surface of the coating roller 3 facing the electrode 61, and a discharge, that is, a glow discharge (barrier discharge) is generated. The gas is activated (ionization, ionization, excitation, etc.) to generate plasma, and the outer peripheral surface of the coating roller 3 is cleaned (ashed) by this plasma.

Here, by providing an insulating layer 62 on the electrode 61 and an insulating layer on the coating roller 3, it is possible to prevent the occurrence of arc discharge and to generate a good (uniform) glow discharge. Plasma can be generated.
If the thickness of the insulating layer 62 and the insulating layer on the application roller 3 side is too thick, a high voltage may be required to generate plasma (desired discharge). Since destruction may occur and arc discharge may occur, the thickness is preferably 0.01 to 4 mm, more preferably 1 to 2 mm.

In addition, the constituent material of the insulating layer 62 and the insulating layer on the application roller 3 side is not particularly limited, but for example, plastic such as polytetrafluoroethylene and polyethylene terephthalate, glass such as quartz glass, Al ₂ O ₃ , Examples thereof include insulators (dielectrics) such as metal oxides such as SiO _2, ZrO ₂ , and TiO ₂ , and double oxides such as BaTiO ₃ (barium titanate).
Here, if a dielectric having a relative dielectric constant of 10 or more at 25 ° C. is used, high-density plasma can be generated at a low voltage, and the processing efficiency is improved.

Moreover, the upper limit of the dielectric constant of the usable dielectric material is not particularly limited, but those having a relative dielectric constant of 10 to 100 are preferable. The dielectric having a relative dielectric constant of 10 or more corresponds to a metal oxide such as ZrO ₂ or TiO ₂ or a double oxide such as BaTiO ₃ .
The support part 63 functions as a relay part when a voltage is applied to the electrode 61. For this reason, as a constituent material of the support part 63, it is preferable to use materials having good conductivity such as simple metals such as copper, aluminum, iron, and silver, alloys such as stainless steel and brass, and intermetallic compounds. .

  The electrode 61 is connected to the high-frequency power source (power supply unit) 12 via the conductive wire (cable) 111 and the support portion 63, and the electrode on the application roller 3 side is connected to the high-frequency power source (power supply unit) 12 via the conductive wire 111. 11 is configured. A part of this circuit 11, that is, the conductive wire 111 on the electrode side of the coating roller 3 is grounded. The electrode on the application roller 3 side and the conductive wire 111 can be connected using, for example, a brush. When plasma is generated, that is, when a discharge is generated between the electrode 61 and the electrode on the application roller 3 side, the high-frequency power source 12 is activated to generate a high frequency between the electrode 61 and the electrode on the application roller 3 side. A voltage (voltage) is applied.

Further, the frequency of the high-frequency power source 12 is not particularly limited, but is preferably 10 to 50 MHz, and more preferably 10 to 40 MHz.
A through hole 64 is formed in the support portion 63, the electrode 61, and the insulating layer 62 along the vertical direction.
Further, the coating apparatus 1 includes a supply pipe 13 having one end connected to the base end (upper end) of the through hole 64 of the support portion 63 and a gas cylinder (connected to the other end of the supply pipe 13 to supply a predetermined gas. A gas supply source) 14 and a regulator (flow rate adjusting means) 15 for adjusting the flow rate of the gas supplied from the gas cylinder 14. The regulator 15 is provided on the support part 63 side from the gas cylinder 14. Further, a valve (flow path opening / closing means) 16 for opening and closing the flow path in the supply pipe 13 is provided on the support section 63 side of the supply pipe 13 from the regulator 15.

Further, the coating apparatus 1 has a collecting means 7 that collects the gas used for cleaning the outer peripheral surface of the coating roller 3.
The collecting means 7 has a collecting unit 70 that covers a portion of the outer peripheral surface of the coating roller 3 that is cleaned by plasma (activated gas) and collects the gas used for the cleaning.
In the present embodiment, the collection unit 70 is fixed at the center to the support unit 63, and has a substantially rectangular upper wall 71 and four side walls 72 erected downward from four edges of the upper wall 71. The part which opposes the electrode 61 and the electrode 61 of the outer peripheral surface of the application | coating roller 3 is located in the inner side. An opening is formed in the upper wall 71 of the collecting portion 70, and an attachment portion 73 having a through hole 74 communicating with the opening is provided on the outer surface (upper surface) of the upper wall 71.
The constituent material of the collection unit 70 is not particularly limited, and examples thereof include insulators such as Al ₂ O _{3 and} quartz glass. By configuring the collecting unit 70 with an insulator, it is possible to prevent the collecting unit 70 from being an energization (conduction) path when a voltage is applied to the electrode 61 and the electrode on the application roller 3 side.

  In the present embodiment, the collecting means 7 constitutes an exhaust mechanism that collects the gas used for cleaning the outer peripheral surface of the coating roller 3 and discharges the collected gas to a predetermined place. The recovery means 7 further supplies an air supply pipe 17 having one end connected to the base end (upper end) of the through hole 74 of the mounting portion 73 and an air supply for supplying gas used for cleaning the outer peripheral surface of the application roller 3. As a means, it has a pump (air supply means) 18 connected to the other end side of the air supply pipe 17 and sucking gas. Further, a valve (flow path opening / closing means) 19 for opening and closing the flow path in the air supply pipe 17 is provided on the collecting section side of the air supply pipe 17 from the pump 18. For example, a vacuum pump or the like can be used as the pump 18. Needless to say, the air supply means is not limited to the pump 18.

The application roller 3 is provided with a heater (heating means) 31 for heating the outer peripheral surface thereof. In this case, for example, only the outer peripheral portion of the application roller 3 may be heated by the heater 31, or substantially the entire application roller 3 may be heated by the heater 31. Good. Note that power can be supplied to the heater 31 via, for example, a brush.
When cleaning the outer peripheral surface of the application roller 3, the outer peripheral surface of the application roller 3 is heated by the heater 31. Thereby, the cleaning processing rate is increased, and the cleaning time (processing time) can be shortened.

  The gas cylinder 14, the regulator 15, the valve 16, the supply pipe 13 and the through hole 64 constitute gas supply means for supplying gas, and the high-frequency power source 12, conducting wire 111, electrode 61, insulating layer 62, coating The electrode on the roller 3 side and the insulating layer on the application roller 3 side constitute a discharge means for generating discharge. The gas supply unit and the discharge unit constitute a cleaning unit that generates a plasma while supplying a gas to generate plasma and cleans the outer peripheral surface of the coating roller 3 with the plasma.

  The liquid material supply roller 4 is arranged on the right side of the application roller 3. The liquid material supply roller 4 has a substantially cylindrical shape, similar to the application roller 3, and the outer peripheral surface (surface) thereof is one of a pair of electrodes facing each other (the counter electrode). ). In this case, for example, only the outer peripheral portion of the liquid material supply roller 4 may constitute the one electrode, and substantially the entire liquid material supply roller 4 may have the one electrode. It may be configured.

Above the liquid material supply roller 4, the other electrode (application electrode) 81 of the pair of electrodes and a support portion 83 that supports the electrode 81 are installed.
The electrode 81 extends from one end of the liquid material supply roller 4 (one end in the direction perpendicular to the paper surface of FIG. 1) to the other end (the other end in the direction perpendicular to the paper surface of FIG. 1). ).
Further, the surface (inner surface) of the electrode 81 facing the liquid material supply roller 4 has a curved shape (curved surface) facing the outer peripheral surface of the liquid material supply roller 4. Thereby, the distance (distance between a pair of electrodes) between the electrode 81 and the outer peripheral surface of the liquid material supply roller 4 is substantially uniform (constant) over substantially the whole. The electrode 81 and the portion facing (corresponding to) the electrode 81 on the outer peripheral surface of the liquid material supply roller 4 constitute a pair of parallel plate electrodes.

The constituent material of the electrode 81 and the electrode on the liquid material supply roller 4 side is not particularly limited, but for example, a single metal such as copper, aluminum, iron, silver or the like, an alloy such as stainless steel or brass, or between metals Examples thereof include materials having good conductivity such as compounds.
An insulating layer 82 is provided on the surface (lower surface) of the electrode 81 facing the liquid material supply roller 4.
In addition, an insulating layer (not shown) is preferably provided on the outer peripheral portion (outer peripheral surface) of the liquid material supply roller 4. In this case, since the surface of the insulating layer becomes the outer peripheral surface of the liquid material supply roller 4, the one electrode is located on the inner peripheral side of the liquid material supply roller 4 (liquid material supply roller). 4 near the outer peripheral surface).

A predetermined gas is supplied between the electrode 81 and the outer peripheral surface of the liquid material supply roller 4, and a predetermined voltage is applied between the electrode 81 and the outer peripheral surface of the liquid material supply roller 4 (between a pair of electrodes). For example, when a high frequency voltage (voltage) is applied, an electric field is generated between the electrode 81 and a portion of the outer peripheral surface of the liquid material supply roller 4 facing the electrode 81, and discharge, that is, glow discharge. (Barrier discharge) occurs, and the gas is activated (ionization, ionization, excitation, etc.) by the discharge to generate plasma, and the outer peripheral surface of the liquid material supply roller 4 is cleaned by this plasma.
Here, by providing the electrode 81 with an insulating layer 82 and the liquid material supply roller 4 with an insulating layer, it is possible to prevent the occurrence of arc discharge and to generate good (uniform) glow discharge, Thereby, good plasma can be generated.

If the thickness of the insulating layer 82 and the insulating layer on the liquid material supply roller 4 side is too thick, a high voltage may be required to generate plasma (desired discharge). Since dielectric breakdown may occur during application and arc discharge may occur, the thickness is preferably 0.01 to 4 mm, and more preferably 1 to 2 mm.
The constituent materials of the insulating layer 82 and the insulating layer on the liquid material supply roller 4 side are not particularly limited. For example, plastic such as polytetrafluoroethylene and polyethylene terephthalate, glass such as quartz glass, Al ₂ , and the like. Examples thereof include insulators (dielectrics) such as metal oxides such as O ₃ , SiO _2, ZrO ₂ , and TiO ₂ , and double oxides such as BaTiO ₃ (barium titanate).
Here, if a dielectric having a relative dielectric constant of 10 or more at 25 ° C. is used, high-density plasma can be generated at a low voltage, and the processing efficiency is improved.

Moreover, the upper limit of the dielectric constant of the usable dielectric material is not particularly limited, but those having a relative dielectric constant of 10 to 100 are preferable. The dielectric having a relative dielectric constant of 10 or more corresponds to a metal oxide such as ZrO ₂ or TiO ₂ or a double oxide such as BaTiO ₃ .
The support part 83 functions as a relay part when a voltage is applied to the electrode 81. For this reason, as a constituent material of the support part 83, it is preferable to use materials having good conductivity such as simple metals such as copper, aluminum, iron and silver, alloys such as stainless steel and brass, and intermetallic compounds. .

  The electrode 81 is connected to the high-frequency power source (power supply unit) 22 via the conductive wire (cable) 211 and the support portion 83, and the electrode on the liquid material supply roller 4 side is connected to the high-frequency power source (power supply portion) 22 via the conductive wire 211. Thus, the circuit 21 is configured. In this circuit 21, a part thereof, that is, the conductive wire 211 on the electrode side of the liquid material supply roller 4 is grounded. The electrode on the liquid material supply roller 4 side and the conducting wire 211 can be connected using, for example, a brush or the like. When plasma is generated, that is, when a discharge is generated between the electrode 81 and the electrode on the liquid material supply roller 4 side, the high-frequency power source 22 is activated, and the electrode 81 and the liquid material supply roller 4 side are operated. A high frequency voltage (voltage) is applied between the electrodes.

Moreover, the frequency of the high frequency power supply 22 is not particularly limited, but is preferably 10 to 50 MHz, and more preferably 10 to 40 MHz.
A through hole 84 is formed in the support portion 83, the electrode 81, and the insulating layer 82 along the vertical direction.
In addition, the coating apparatus 1 includes a supply pipe 23 having one end connected to the base end (upper end) of the through hole 84 of the support portion 83, and a gas cylinder (connected to the other end of the supply pipe 23 and supplying a predetermined gas. A gas supply source) 24 and a regulator (flow rate adjusting means) 25 for adjusting the flow rate of the gas supplied from the gas cylinder 24. The regulator 25 is provided on the support portion 83 side from the gas cylinder 24. Further, a valve (flow path opening / closing means) 26 for opening and closing the flow path in the supply pipe 23 is provided on the support section 83 side of the supply pipe 23 from the regulator 25.

Further, the coating apparatus 1 has a recovery means 9 that recovers the gas used for cleaning the outer peripheral surface of the liquid material supply roller 4.
The recovery means 9 has a collecting unit 90 that covers a portion of the outer peripheral surface of the liquid material supply roller 4 to be cleaned by plasma (activated gas) and collects the gas used for the cleaning. Yes.

In the present embodiment, the collection unit 90 is fixed at the center to the support unit 83, and has a substantially rectangular upper wall 91 and four side walls 92 erected downward from four edges of the upper wall 91. A portion facing the electrode 81 on the outer peripheral surface of the electrode 81 and the liquid material supply roller 4 is located inside. An opening is formed in the upper wall 91 of the collecting portion 90, and an attachment portion 93 having a through hole 94 communicating with the opening is provided on the outer surface (upper surface) of the upper wall 91.
The constituent material of the collecting portion 90 is not particularly limited, for example, Al 2 _{O 3,} an insulator such as quartz glass. By configuring the collection unit 90 with an insulator, it is possible to prevent the collection unit 90 from being an energization (conduction) path when a voltage is applied to the electrode 81 and the electrode on the liquid material supply roller 4 side.

  In the present embodiment, the recovery means 9 constitutes an exhaust mechanism that recovers the gas used for cleaning the outer peripheral surface of the liquid material supply roller 4 and discharges the recovered gas to a predetermined place. The recovery means 9 further supplies gas used for cleaning the air supply pipe 27 having one end connected to the base end (upper end) of the through hole 94 of the mounting portion 93 and the outer peripheral surface of the liquid material supply roller 4. As an air supply means, it has a pump (air supply means) 28 connected to the other end of the air supply pipe 27 and sucking gas. Further, a valve (flow path opening / closing means) 29 for opening and closing the flow path in the air supply pipe 27 is provided on the collecting section side of the air supply pipe 27 from the pump 28. For example, a vacuum pump or the like can be used as the pump 28. Needless to say, the air supply means is not limited to the pump 28.

  The liquid material supply roller 4 is provided with a heater (heating means) 32 for heating the outer peripheral surface thereof. In this case, for example, only the outer peripheral portion of the liquid material supply roller 4 may be heated by the heater 32, and substantially the entire liquid material supply roller 4 is heated by the heater 32. It may be like this. Note that power can be supplied to the heater 32 through, for example, a brush.

When the outer peripheral surface of the liquid material supply roller 4 is cleaned, the outer peripheral surface of the liquid material supply roller 4 is heated by the heater 32. Thereby, the cleaning processing rate is increased, and the cleaning time (processing time) can be shortened.
The gas cylinder 24, the regulator 25, the valve 26, the supply pipe 23, and the through hole 84 constitute gas supply means for supplying gas, and the high-frequency power source 22, the conducting wire 211, the electrode 81, the insulating layer 82, the liquid state. The electrode on the material supply roller 4 side and the insulating layer on the liquid material supply roller 4 side constitute discharge means for generating discharge. The gas supply means and the discharge means constitute a cleaning means for generating a plasma while supplying gas to generate plasma and cleaning the outer peripheral surface of the liquid material supply roller 4 with the plasma.

Here, as a gas used for cleaning (for example, removing organic materials such as a liquid material and a dried product thereof) of the outer peripheral surfaces (hereinafter also simply referred to as “peripheral surfaces”) of the coating roller 3 and the liquid material supply roller 4, As long as plasma is generated by discharge and the outer peripheral surface can be cleaned by this plasma, there is no particular limitation, and examples thereof include (1) and (2) below.
(1) Oxygen gas such as O ₂ gas, rare gas such as He, Ne, Ar, and Xe, N ₂ gas, etc. (2) Mixed gas composed of processing gas and carrier gas Examples of processing gas include O ₂ An oxygen-based gas such as a gas is used. As the carrier gas, for example, a rare gas such as He, Ne, Ar, Xe, N ₂ gas, or the like is used. The “carrier gas” refers to a gas introduced for starting discharge and maintaining discharge.

Note that the ratio of the processing gas in the mixed gas is not particularly limited, but if the ratio of the processing gas is too large, discharge may be difficult to occur or the cleaning processing rate may be reduced. Is preferably 1 to 10%.
The cleaning means of the coating apparatus 1 has a function of modifying the outer peripheral surface in addition to the function of cleaning the outer peripheral surface. As a result, the outer peripheral surface can be modified easily and quickly, whereby the performance of the application roller 3 and the liquid material supply roller 4 can be improved. The cleaning of the outer peripheral surface (cleaning process) and the reforming of the outer peripheral surface (reforming process) can be performed separately or simultaneously.

In the modification of the outer peripheral surface, for example, by selecting a gas to be used (supplied), the outer peripheral surface is hydrophilized (lyophilic) or water repellent (liquid repellent). Water repellent treatment (liquid repellent treatment). Normally, the cleaning of the outer peripheral surface and the hydrophilic treatment of the outer peripheral surface are performed simultaneously.
By performing the water repellent treatment on the outer peripheral surface, the wettability of the outer peripheral surface is lowered.

In this water repellent treatment, it is preferable to use a mixed gas composed of a treatment gas and a carrier gas. As the processing gas, for example, a fluorine atom-containing compound gas such as CF ₄ , C ₂ F ₆ , C ₃ F ₆ , CC1F ₃ , SF ₆ or the like is used. As the carrier gas, for example, a rare gas such as He, Ne, Ar, Xe, N ₂ gas, or the like is used.
In addition, by applying a hydrophilic treatment to the outer peripheral surface, the wettability of the outer peripheral surface is increased, whereby the liquid material can be uniformly and stably applied to the substrate 5.

In this hydrophilic treatment, it is preferable to use a mixed gas composed of a treatment gas and a carrier gas. Examples of the processing gas include oxygen atom-containing compounds such as O ₂ , O ₃ , H ₂ O, and air, nitrogen atom-containing compounds such as N ₂ and NH ₃ , and sulfur atom-containing compounds such as SO ₂ and SO _3. Used. Thereby, hydrophilic functional groups, such as a carbonyl group, a hydroxyl group, and an amino group, can be formed on the outer peripheral surface to increase the surface energy and obtain a hydrophilic surface (lyophilic surface). Alternatively, a hydrophilic polymer film can be deposited (formed) using a polymerizable monomer having a hydrophilic group such as acrylic acid or methacrylic acid. As the carrier gas, for example, a rare gas such as He, Ne, Ar, Xe, N ₂ gas, or the like is used.

Next, the operation (operation) of the coating apparatus 1 will be described with reference to FIG. In this case, as an example, a case where a liquid material is applied to the surface of the substrate 5 to form a coating film (coating film) and then the outer peripheral surfaces of the application roller 3 and the liquid material supply roller 4 are respectively cleaned will be described. To do.
When applying a liquid material to the surface of the substrate 5 to form a coating film, with the valves 16, 19, 26 and 29 closed, the substrate 5 is moved to the left side by the operation of a transfer device (not shown) The application roller 3 is rotated clockwise in FIG. 1 by a driving device (not shown), and the liquid material supply roller 4 is rotated clockwise in FIG. 1 by a driving device (not shown).

As a result, the liquid material stored in the storage unit 2 adheres to the surface of the liquid material supply roller 4, and the liquid material is supplied from the outer peripheral surface of the liquid material supply roller 4 to the outer peripheral surface of the application roller 3. The At this time, the thickness of the liquid material supplied to the outer peripheral surface of the application roller 3 (applied to the substrate 5 by the application roller 3) by the gap between the outer peripheral surface of the application roller 3 and the outer peripheral surface of the liquid material supply roller 4. The thickness of the liquid material to be controlled).
Then, as the application roller 3 rotates, the liquid material on the outer peripheral surface is applied to the surface of the substrate 5. Thereby, a coating film of the liquid material is formed on the surface of the substrate 5. The substrate 5 is transported to another apparatus for the next step (processing).

Next, the outer peripheral surfaces of the application roller 3 and the liquid material supply roller 4 are respectively cleaned.
When cleaning the outer peripheral surface of the application roller 3, the outer peripheral surface of the application roller 3 is heated by the heater 31 and the application roller 3 is rotated by a driving device (not shown). Then, the valve 16 is opened, the gas flow rate is adjusted by the regulator 15, the gas is sent from the gas cylinder 14, the high-frequency power source 12 is activated, the valve 19 is opened, and the pump 18 is activated to suck the gas. .

The temperature of the outer peripheral surface of the application roller 3 is not particularly limited, but is preferably 50 ° C. or higher.
The flow rate of the gas to be supplied is not particularly limited, but is preferably 30 SCCM to 3 SLM.
Thereby, the gas sent out from the gas cylinder 14 flows through the supply pipe 13, is introduced into the through hole 64 of the support portion 63, flows through the through hole 64, and between the electrode 61 and the electrode on the application roller 3 side. It is introduced (supplied) to (the outer peripheral surface of the application roller 3 and its vicinity).

Then, by the operation of the high-frequency power source 12, a high-frequency voltage is applied between the electrode 61 and the electrode on the application roller 3 side, and an electric field is generated between the electrode 61 and the electrode on the application roller 3 side. The gas is activated by the discharge and plasma is generated, and the outer peripheral surface of the coating roller 3 is cleaned by the plasma (activated gas).
In this case, the liquid material adhering to the outer peripheral surface of the application roller 3 and the organic matter such as a dried product thereof are removed by reacting with the activated gas. The organic matter is gasified and collected by the collecting unit 70 together with the gas used for cleaning.

The gas in the collection unit 70 is sucked by the pump 18, flows out from the through hole 74, flows through the air supply pipe 17, and is discharged to a predetermined place. As a result, the gas can be easily and reliably recovered and discharged, and organic substances contained in the gas can be prevented from adhering to the outer peripheral surface of the application roller 3 again.
When cleaning the outer peripheral surface of the liquid material supply roller 4, the liquid material in the reservoir 2 is discharged, and then the outer peripheral surface of the liquid material supply roller 4 is heated by the heater 32 and is not shown. The liquid material supply roller 4 is rotated by the driving device. Then, the valve 26 is opened, the gas flow rate is adjusted by the regulator 25, the gas is sent from the gas cylinder 24, the high frequency power supply 22 is operated, the valve 29 is opened, the pump 28 is operated, and the gas is sucked. .

The temperature of the outer peripheral surface of the liquid material supply roller 4 is not particularly limited, but is preferably 50 ° C. or higher.
The flow rate of the gas to be supplied is not particularly limited, but is preferably 30 SCCM to 10 SLM.
As a result, the gas delivered from the gas cylinder 24 flows through the supply pipe 23 and is introduced into the through hole 84 of the support portion 83, flows through the through hole 84, and the electrode 81 and the electrode on the liquid material supply roller 4 side. (In the vicinity of the outer peripheral surface of the liquid material supply roller 4 and its vicinity).

  Then, by the operation of the high frequency power supply 22, a high frequency voltage is applied between the electrode 81 and the electrode on the liquid material supply roller 4 side, and between the electrode 81 and the electrode on the liquid material supply roller 4 side, An electric field is generated to generate a discharge, and a gas is activated by the discharge to generate plasma. The outer surface of the liquid material supply roller 4 is cleaned by this plasma (activated gas).

In this case, the liquid material adhering to the outer peripheral surface of the liquid material supply roller 4 and the organic matter such as a dried product thereof are removed by reacting with the activated gas. The organic matter is gasified and collected by the collecting unit 90 together with the gas used for cleaning.
The gas in the collection unit 90 is sucked by the pump 28, flows out from the through hole 94, flows through the air supply pipe 27, and is discharged to a predetermined place. As a result, the gas can be easily and reliably recovered and discharged, and the organic matter contained in the gas can be prevented from adhering to the outer peripheral surface of the liquid material supply roller 4 again.

As described above, according to this coating apparatus 1, the outer peripheral surfaces of the coating roller 3 and the liquid material supply roller 4 can be cleaned easily, quickly, and reliably.
That is, since the cleaning means of the coating apparatus 1 is a dry (DRA) system using plasma, no chemical solution as in the wet system is required, and the outer peripheral surfaces of the waste liquid treatment and the coating roller 3 and the liquid material supply roller 4 are eliminated. This drying step is unnecessary.

Further, when the outer peripheral surfaces of the coating roller 3 and the liquid material supply roller 4 are cleaned, dust (for example, scraps, etc.) generated from a cleaning cloth or Bencotton adheres to the outer peripheral surfaces as in the wet method. The outer peripheral surface can be reliably cleaned.
Further, since the coating device 1 itself has a cleaning means, the outer periphery of the coating device 1 without removing the coating roller 3 and the liquid material supply roller 4 (with the coating roller 3 and the liquid material supply roller 4 attached). The surface can be cleaned, and there is no need to provide a separate cleaning facility.
Further, since plasma is generated on and around the outer peripheral surface of the coating roller 3 and on the outer peripheral surface of the liquid material supply roller 4, the cleaning processing rate is high and the cleaning time (processing time) can be shortened.

In the coating apparatus 1, the outer peripheral surfaces of the coating roller 3 and the liquid material supply roller 4 can be cleaned while the liquid material is applied to the surface of the substrate 5 to form a coating film. . In this case, after the liquid material is applied to the surface of the substrate 5 from the outer peripheral surface of the application roller 3, the portion of the outer peripheral surface of the application roller 3 to which the liquid material has adhered is rotated by the rotation of the application roller 3. It moves below the electrode 61 (opposite part) and is cleaned by the generated plasma. Similarly, after the liquid material is supplied from the outer peripheral surface of the liquid material supply roller 4 to the outer peripheral surface of the application roller 3, the portion of the outer peripheral surface of the liquid material supply roller 4 to which the liquid material has adhered is the liquid material. When the supply roller 4 rotates, it moves below the electrode 81 (opposite part) and is cleaned by the generated plasma.
Further, in this coating apparatus 1, the outer peripheral surfaces of the coating roller 3 and the liquid material supply roller 4 can be modified, respectively, and the coating material is formed by coating the liquid material on the surface of the substrate 5. While the outer peripheral surface is being cleaned, the outer peripheral surface can be modified (for example, hydrophilic treatment).

Second Embodiment
FIG. 2 is a cross-sectional view (including a partial block diagram) schematically showing a second embodiment of the coating apparatus of the present invention, and FIG. 3 is a cross-sectional view taken along line AA of the plasma generator in FIG. 4 is a cross-sectional view taken along line BB of the plasma generation unit in FIG. In the following description, the upper side in FIG. 2 is referred to as “upper”, the lower side is referred to as “lower”, the left side is referred to as “left”, the right side is referred to as “right”, and the vertical direction in FIG. The horizontal direction is called “horizontal direction”. Also, the left side in FIGS. 3 and 4 is referred to as “left”, the right side is referred to as “right”, and the left-right direction in FIGS. 3 and 4 is referred to as “horizontal direction”.

Hereinafter, the coating apparatus according to the second embodiment will be described with a focus on differences from the first embodiment described above, and description of similar matters will be omitted.
As shown in these drawings, in the coating apparatus 1 of the second embodiment, a plasma generating unit 40 that generates plasma is provided above the coating roller 3. Similarly, above the liquid material supply roller 4. In addition, a plasma generator 50 for generating plasma is provided.

The plasma generating unit 40 includes a pair of electrodes (application electrode) 41 and an electrode (counter electrode) 42 facing each other, insulating layers 43 and 44 provided on surfaces (inner surfaces) facing the electrodes 41 and 42, A pair of side walls 45 and 46 are fixed to both sides of the electrodes 41 and 42 and face each other.
Each of the electrodes 41 and 42 has a rectangular plate shape, and one end portion (one end portion in a direction perpendicular to the paper surface of FIG. 2) of the coating roller 3 or the other end portion thereof (the paper surface of FIG. 2). To the other end in the direction perpendicular to the surface) or the vicinity thereof. The electrodes 41 and 42 are arranged so as to be substantially parallel to each other, that is, the opposing surfaces (inner surfaces) are substantially parallel to each other. The electrodes 41 and 42 constitute a pair of parallel plate electrodes.

Each of the side walls 45 and 46 has a quadrangular plate shape and is disposed so as to be substantially parallel to each other, that is, the opposing surfaces (inner surfaces) are substantially parallel to each other. Each of the side walls 45 and 46 has an insulating property (made of an insulator) so that the electrode 41 and the electrode 42 are not electrically connected (insulated) through the side walls 45 and 46.
The constituent materials of the electrodes 41 and 42 are not particularly limited. For example, materials having good conductivity such as simple metals such as copper, aluminum, iron and silver, alloys such as stainless steel and brass, and intermetallic compounds. Is mentioned.
The insulating layers 43 and 44 are the same as those in the first embodiment described above, and thus the description thereof is omitted.
The plasma generating unit 40 is arranged such that the discharge port (discharge unit) 47 at the tip (lower end) of the through hole 48 is located at a position facing the outer peripheral surface of the application roller 3.

  The electrodes 41 and 42 are each connected to a high-frequency power source (power source unit) 12 via a conducting wire (cable) 111, thereby configuring the circuit 11. A part of the circuit 11, that is, the conductive wire 111 on the electrode 42 side is grounded. When plasma is generated, that is, when a discharge is generated between the electrode 41 and the electrode 42, the high-frequency power source 12 is activated and a high-frequency voltage (voltage) is applied between the electrode 41 and the electrode 42. .

  When a predetermined gas is supplied into the through hole 48 of the plasma generating unit 40 and a predetermined voltage, for example, a high frequency voltage (voltage) is applied between the electrode 41 and the electrode 42, the electrode 41 and the electrode 42 In the meantime, an electric field is generated, and a discharge, that is, a glow discharge (barrier discharge) is generated. A gas is activated (ionization, ionization, excitation, etc.) by the discharge, and plasma is generated. The generated plasma is discharged from the discharge port 47 of the plasma generation unit 40, and the outer peripheral surface of the coating roller 3 is cleaned by this plasma.

Further, the collection unit 70 of the recovery means 7 is fixed to the tip (lower part) of the plasma generation unit 40 at the center of the upper wall 71, and the discharge port 47 of the plasma generation unit 40 is connected to the collection unit 70. Located inside.
Further, one end side of the supply pipe 13 is connected to the base end (upper end) of the through hole 48 of the plasma generation unit 40.

  The gas cylinder 14, the regulator 15, the valve 16, and the supply pipe 13 constitute gas supply means for supplying gas, and the high-frequency power source 12, the conductive wire 111 and the plasma generator 40 (electrodes 41 and 42, the insulating layer 43 and 44) constitutes a discharging means for generating a discharge. The gas supply unit and the discharge unit constitute a cleaning unit that generates a plasma while supplying a gas to generate plasma and cleans the outer peripheral surface of the coating roller 3 with the plasma.

Similarly to the plasma generation unit, the plasma generation unit 50 is provided on a pair of electrodes (application electrode) 51 and electrode (counter electrode) 52 facing each other, and surfaces (inner surfaces) of the electrodes 51 and 52 facing each other. Insulating layers 53 and 54 and a pair of side walls 55 and 56 fixed to both sides of the electrodes 51 and 52 and facing each other.
Each of the electrodes 51 and 52 has a rectangular plate shape, and is one end portion (one end portion in a direction perpendicular to the paper surface of FIG. 2) of the liquid material supply roller 4 or the other end portion thereof (see FIG. 2). The other end in the direction perpendicular to the paper surface 2) or the vicinity thereof. The electrodes 51 and 52 are arranged so as to be substantially parallel to each other, that is, the opposing surfaces (inner surfaces) are substantially parallel to each other. The electrodes 51 and 52 constitute a pair of parallel plate electrodes.

Further, the side walls 55 and 56 each have a rectangular plate shape, and are arranged so as to be substantially parallel to each other, that is, the opposing surfaces (inner surfaces) are substantially parallel to each other. Each of the side walls 55 and 56 has an insulating property (made of an insulator) so that the electrode 51 and the electrode 52 are not electrically connected (insulated) through the side walls 55 and 56.
The constituent materials of the electrodes 51 and 52 are not particularly limited. For example, materials having good conductivity such as simple metals such as copper, aluminum, iron and silver, alloys such as stainless steel and brass, and intermetallic compounds. Is mentioned.
Note that the insulating layers 53 and 54 are the same as those in the first embodiment described above, and a description thereof will be omitted.
The plasma generating unit 50 is arranged so that the discharge port (discharge unit) 57 at the tip (lower end) of the through hole 58 is located at a position facing the outer peripheral surface of the liquid material supply roller 4.

  The electrodes 51 and 52 are each connected to a high-frequency power source (power source unit) 22 via a conducting wire (cable) 211, thereby configuring the circuit 21. In this circuit 21, a part thereof, that is, the conductive wire 211 on the electrode 52 side is grounded (grounded). When plasma is generated, that is, when a discharge is generated between the electrode 51 and the electrode 52, the high-frequency power source 22 is activated and a high-frequency voltage (voltage) is applied between the electrode 51 and the electrode 52. .

  When a predetermined gas is supplied into the through hole 58 of the plasma generating unit 50 and a predetermined voltage, for example, a high frequency voltage (voltage) is applied between the electrode 51 and the electrode 52, the electrode 51 and the electrode 52 In the meantime, an electric field is generated to generate a discharge, that is, a glow discharge (barrier discharge), and the gas is activated (ionization, ionization, excitation, etc.) by the discharge to generate plasma. The generated plasma is discharged from the discharge port 57 of the plasma generation unit 50, and the outer peripheral surface of the liquid material supply roller 4 is cleaned by this plasma.

The collection unit 90 of the recovery means 9 is fixed to the tip (lower part) of the plasma generation unit 50 at the center of the upper wall 91, and the discharge port 57 of the plasma generation unit 50 is connected to the collection unit 90. Located inside.
Further, one end side of the supply pipe 23 is connected to the base end (upper end) of the through hole 58 of the plasma generating unit 50.

The gas cylinder 24, the regulator 25, the valve 26, and the supply pipe 23 constitute gas supply means for supplying gas, and the high-frequency power source 22, the conductive wire 211, and the plasma generator 50 (electrodes 51, 52, insulating layer 53 and 54) constitutes a discharging means for generating a discharge. The gas supply means and the discharge means constitute a cleaning means for generating a plasma while supplying gas to generate plasma and cleaning the outer peripheral surface of the liquid material supply roller 4 with the plasma.
According to this coating apparatus 1, the same effect as the coating apparatus 1 of 1st Embodiment mentioned above is acquired.

  In this coating apparatus 1, since plasma is generated in a portion other than the vicinity of the outer peripheral surface of the application roller 3 and a portion other than the vicinity of the outer peripheral surface of the liquid material supply roller 4, the application roller 3 and the liquid material supply roller 4 The outer peripheral surface can be prevented from being damaged (damage), and the material of the application roller 3 and the liquid material supply roller 4 (particularly, the material of the outer peripheral surface of the application roller 3 and the liquid material supply roller 4) can be selected. The width of.

  Here, in the present invention, when the coating apparatus includes a scraping roller that scrapes off the liquid material adhering to the outer peripheral surface of a predetermined roller such as the coating roller 3, the outer peripheral surface of the scraping roller is cleaned with plasma. A cleaning means may be provided. Since the outer peripheral surface of the scraping roller is often made of, for example, an organic material such as resin or rubber, it is preferable to use a cleaning unit having the same configuration as that of the second embodiment. In the cleaning, damage to the outer peripheral surface of the scraping roller can be reduced. The cleaning means can also modify the outer peripheral surface of the scraping roller. In this case, it is preferable to perform water-repellent treatment on the outer peripheral surface of the scraping roller to reduce the wettability of the outer peripheral surface of the scraping roller.

  In the present invention, when the coating apparatus includes a squeegee, a cleaning unit that cleans the surface of the squeegee with plasma may be provided. The main use of the squeegee is to scrape off the liquid material adhering to the outer peripheral surface of a predetermined roller such as the application roller 3. Since this squeegee is often made of an organic material such as a resin or rubber, for example, it is preferable to use the same cleaning device as that of the second embodiment. Damage to the surface of the squeegee can be reduced. The surface of the squeegee can be modified by the cleaning means. In this case, it is preferable to perform water-repellent treatment on the surface of the squeegee to reduce the wettability of the surface of the squeegee.

As mentioned above, although the coating device of this invention was demonstrated based on embodiment of illustration, this invention is not limited to this, The structure of each part is substituted by the thing of the arbitrary structures which have the same function. be able to. In addition, any other component may be added to the present invention.
Further, the present invention may be a combination of any two or more configurations (features) of the above embodiments.

In the above embodiment, it is assumed that plasma is generated under atmospheric pressure. However, in the present invention, plasma may be generated in a reduced pressure or vacuum state.
Moreover, in the said embodiment, although the position of a roller is fixed and a board | substrate (workpiece | work) moves, it is not restricted to this in this invention, For example, the position of a board | substrate is fixed and a roller moves. (Rolling) may be configured, and the substrate and the roller may be moved.

  Further, the substrate (work) is not limited to a semiconductor substrate such as a silicon wafer, and for example, plastic such as polyethylene, polypropylene, polystyrene, polycarbonate, polyethylene terephthalate, polytetrafluoroethylene, polyimide, liquid crystal polymer, epoxy resin, acrylic resin, etc. And a substrate made of glass, ceramic, glass for metal liquid crystal display, or the like. The shape of the substrate is not limited to a plate shape, and examples thereof include a film shape.

Further, the voltage applied to the electrode is not limited to a high frequency, and may be a pulse wave or a microwave, or may be a direct current.
In addition, the present invention can be applied to coating devices of various forms (systems) as long as the coating device includes a coating roller (roller) that applies a liquid material to a workpiece. In addition to the above embodiments, examples of apparatuses to which the present invention can be applied include apparatuses that perform flexographic printing, gravure printing, and the like.
Further, the number of rollers provided in the coating device may be one (single) or two or more (plural).
Further, when the coating apparatus includes a plurality of rollers, it is only necessary that at least one of the plurality of rollers be provided with a cleaning unit that cleans the outer peripheral surface with plasma.

It is sectional drawing which shows typically 1st Embodiment of the coating device of this invention. It is sectional drawing which shows typically 2nd Embodiment of the coating device of this invention. It is sectional drawing in the AA of the plasma generation part in FIG. It is sectional drawing in the BB line of the plasma generation part in FIG.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Coating apparatus 2 ... Storage part 3 ... Coating roller 4 ... Liquid material supply roller 5 ... Substrate 61 ... Electrode 62 ... Insulating layer 63 ... Supporting part 64 ... Through-hole 7 ... Collection Means 70 …… Collecting part 71 …… Upper wall 72 …… Side wall 73 …… Mounting part 74 …… Through hole 81 …… Electrode 82 …… Insulating layer 83 …… Supporting part 84 …… Through hole 9 …… Recovery means 90 …… Collecting part 91 …… Upper wall 92 …… Side wall 93 …… Mounting part 94 …… Through hole 11 …… Circuit 111 …… Conductor 12 …… High frequency power supply 13 …… Supply pipe 14 …… Gas cylinder 15 …… Regulator 16 …… Valve 17 …… Air supply pipe 18 …… Pump 19 …… Valve 21 …… Circuit 211 …… Conductor 22 …… High frequency power supply 23 …… Supply pipe 24 …… Gas cylinder 25 …… Regulator 26 …… Valve 2 ... Air pipe 28 ... Pump 29 ... Valve 31, 32 ... Heater 40 ... Plasma generator 41,42 ... Electrode 43,44 ... Insulating layer 45,46 ... Side wall 47 ... Discharge port 48 ... … Through hole 50 …… plasma generating part 51, 52 …… electrode 53, 54 …… insulating layer 55, 56 …… side wall 57 …… discharge port 58 …… through hole

Claims (13)

An applicator that has at least one roller including a roller for applying a liquid material to a workpiece, supplies the liquid material to the outer peripheral surface of the roller, and applies the liquid material on the outer peripheral surface of the roller in contact with the workpiece. And
Having cleaning means for cleaning the outer peripheral surface of the roller;
The cleaning unit includes a gas supply unit that supplies a predetermined gas and a discharge unit that generates a discharge. The cleaning unit generates a plasma while generating the discharge while supplying the predetermined gas. A coating apparatus characterized in that the outer peripheral surface of the coating device is cleaned. The gas supply means supplies gas near the outer peripheral surface of the roller, and the discharge means generates discharge near the outer peripheral surface of the roller,
The coating apparatus according to claim 1, wherein the cleaning unit is configured to generate plasma in the vicinity of an outer peripheral surface of the roller by the gas supply unit and the discharge unit. The discharge means includes a pair of electrodes facing each other, and a power supply unit that applies a voltage between the pair of electrodes,
The coating apparatus according to claim 2, wherein one electrode of the pair of electrodes is configured by an outer peripheral surface of the roller or a portion in the vicinity of the outer peripheral surface.   The coating apparatus according to claim 3, wherein a surface of the other electrode of the pair of electrodes facing the roller has a curved shape facing the outer peripheral surface of the roller.   The coating apparatus according to claim 1, wherein the cleaning unit includes an emission part that emits generated plasma, and the emission part is disposed at a position facing an outer peripheral surface of the roller.   The coating apparatus according to claim 5, wherein the discharging unit includes a pair of electrodes opposed to each other and a power supply unit that applies a voltage between the pair of electrodes.   The coating apparatus according to claim 3, wherein an insulating layer is provided on surfaces of the electrodes facing each other.   The coating apparatus according to claim 1, further comprising a recovery unit that recovers a gas used for cleaning the outer peripheral surface of the roller.   The coating apparatus according to claim 8, wherein the recovery unit includes a collection unit that covers a portion of the outer peripheral surface of the roller that is cleaned by the plasma and collects the gas used for the cleaning. Heating means for heating at least the outer peripheral surface of the roller;
The coating apparatus according to any one of claims 1 to 9, wherein when the outer peripheral surface of the roller is cleaned, the outer peripheral surface of the roller is heated by the heating means.   The coating apparatus according to claim 1, wherein the cleaning unit has a function of modifying the outer peripheral surface of the roller in addition to a function of cleaning the outer peripheral surface of the roller.   12. The coating according to claim 11, wherein the reforming of the outer peripheral surface of the roller is configured such that a lyophilic process or a liquid-repellent process is performed on the outer peripheral surface of the roller by selecting the gas to be supplied. apparatus. As the roller, an application roller that applies a liquid material to a workpiece, and a liquid material supply roller that supplies the liquid material to a peripheral portion of the application roller from a storage portion that stores the liquid material,
The coating device according to any one of claims 1 to 12, wherein at least one of the coating roller and the liquid material supply roller is provided with the cleaning means for cleaning an outer peripheral surface thereof.

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