JP2007155709A - Method of evaluating image clarity - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of evaluating quantitatively a surface property such as cleanness and quality of a work surface evaluated conventionally by visual appearance inspection. <P>SOLUTION: A reference pattern 14 arranged with a ring pattern around an objective lens of an imaging device 12 as the center is faced each other to the work surface, by pushing a tip of a probe 10 against the work surface, using the probe 10 provided in a vertical-directional intermediate of a cylindrical case 11, the reference pattern 14 is illuminated by a light from a light source to reflect a reflection image of the reference pattern 14 on the work surface, the reflection image is picked up by the imaging device, a standard deviation of amplitudes in a brightness distribution of an image data is found on a plurality of lines extended radially from the center of the ring pattern in an obtained image, and the image clarity of the work surface is evaluated based on specular rates about the plurality of lines, using a relative value of the obtained standard deviation to a standard deviation of amplitudes in a brightness distribution of an image data on a plurality of lines as to a reference specular face, as the specular rate. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a method for evaluating image clarity, and more particularly, to a method that enables quantitative evaluation of surface properties such as cleanliness and quality of a workpiece surface that has been evaluated by a visual appearance inspection method.

  For example, how to evaluate the properties of the workpiece surface, such as the surface of a polished steel plate, the painted surface, and the surface of a ceramic product, is very important in terms of product development and commercial properties.

  For example, even if the surface roughness is small, it can be determined that the shape of the workpiece is poor if the shape is distorted or scratched. Therefore, it is possible to correctly evaluate whether the image has been accurately copied, that is, the mapping property. Conventionally, image clarity was evaluated by visual appearance inspection, but because it depends on human sensation of visual recognition, the criteria for discrimination are ambiguous and there are variations in judgment due to individual differences. Therefore, the development of a method that can quantify the image clarity is strongly desired because the test results are easily affected by the surrounding environment, and even a simple test cannot withstand high-speed continuous work and easily fatigue. It was.

  On the other hand, methods for measuring surface roughness, glossiness, etc. for minute surface shapes and evaluating the surface minute shape from these measured values are known. It is only part of the properties and does not accurately reflect the surface properties.

  In addition, the pattern plate on which the slit is formed is illuminated with light from the light source from behind, the slit pattern is projected onto the workpiece surface, the change in the brightness of the slit of the image obtained by imaging this pattern is detected, and the amplitude of the detection signal A method has been proposed in which the degree of work surface finish is evaluated step by step based on the average value and the dispersion value (Patent Document 1).

  In addition, the applicant illuminates the reference pattern with the light of the light source, copies the reflected image onto the work surface, obtains the standard deviation of the luminance amplitude in the luminance distribution of the reference pattern, and obtains the amplitude of the amplitude previously obtained for the same type of surface Using the correlation between the standard deviation and the center line average roughness Ra, a method for obtaining the center line average roughness Ra of the surface to be measured has been developed and filed (Patent Document 2).

JP-A-61-75236 JP 2001-99632 A

  However, since the method described in Patent Document 1 uses light that has passed through the slit, the contour of the pattern projected on the workpiece surface is deteriorated and / or the brightness changes due to light diffraction, and the center line is changed. Cannot be applied to surfaces with an average roughness Ra of 0.1 μm or more (Takahiko Inari “Surface Roughness Measurement Using Projected Optical Pattern Image” Proceedings of the Society of Instrument and Control Engineers vol.14 No.11 1998 (1998) (November) Japan Society for Instrument and Control Engineers).

  On the other hand, in the method described in Patent Document 2, since the reference pattern is illuminated and the reflected image is copied onto the surface to be measured, the projection pattern is not deteriorated due to light diffraction, and the center line is 0.1 μm or more. Although the average roughness Ra can also be measured, it is a simple measurement that obtains the average value of the center line average roughness of the workpiece surface, and is not suitable when it is desired to accurately evaluate the surface properties.

  In view of such problems, it is an object of the present invention to provide a method for evaluating image clarity that enables accurate evaluation of surface properties.

  Therefore, in the evaluation method of image clarity according to the present invention, when evaluating the image clarity of the workpiece surface, the ring pattern is formed around the objective lens of the image pickup device, with the image pickup device built in the cylindrical case with the open end. Using a probe with a reference pattern arranged in the middle of the cylindrical case in the vertical direction, place the tip of the probe against the work surface so that the work surface and the reference pattern face each other. The reflected image of the reference pattern is projected on the workpiece surface, and the reflected image is captured by the image sensor. The amplitude of the luminance distribution of the image data on multiple lines extending in the radial direction from the center of the ring pattern of the obtained image The standard deviation obtained and a plurality of lines extending in the radial direction from the center of the ring pattern of the image obtained in advance for the reference mirror surface The relative values of the amplitude standard deviation of the brightness distribution of the image data and specularity in, characterized in that so as to evaluate the clarity of the work surface from the mirror of the plurality of lines.

  One of the features of the present invention is that illumination is applied to a ring-shaped reference pattern, a reflection image thereof is copied onto the work surface, and the luminance of image data on a plurality of lines extending in the radial direction from the center of the image is captured. The standard deviation of the amplitude of the distribution is obtained, the relative value with the standard deviation of the reference mirror surface is taken as the mirror surface degree, and the image clarity is evaluated from the mirror degree of a plurality of lines.

  As a result, for example, when the specularity of a plurality of lines is a sufficiently large value and they are equal to each other, the surface roughness is small, and the shape roughness is small or there are few scratches. Therefore, it can be judged that the image is accurately and cleanly displayed on the work surface, and that the image clarity is high.

  In addition, the specularities of multiple lines are equal to each other, but if the value is small, there is no anisotropy of the surface roughness, but it can be determined that the surface roughness is large, and the shape of the image on the workpiece surface is Although it looks accurate, it is not beautiful and it can be evaluated that the image clarity is low.

  In addition, the specularity for multiple lines is a sufficiently large value, but if there is variation, the surface roughness is small, but it can be judged that the surface roughness is anisotropic, and the image on the workpiece surface is Although it is beautiful, it appears distorted. In this case, it can be evaluated that the image clarity is low.

  By the way, there are generally a large number of surfaces with anisotropy in the finished surface roughness, such as cutting surfaces such as turning and milling, lapping surfaces, buffing surfaces, etc. When measuring the roughness of such surfaces For measuring instruments that can measure only in one direction, measure the measurement direction and the roughness direction in exact alignment. For example, with a stylus type roughness meter, measurement must be performed in a direction perpendicular to the roughness line. An error occurs in the value. It is not always easy for the user to always accurately set the roughness line or the direction perpendicular thereto, and this setting error causes variations in measured values.

  On the other hand, in the present invention, a ring pattern is adopted, and the roughness is measured for a plurality of lines extending in the radial direction from the center of the ring pattern, so that the user can perform measurement without being aware of the direction of the roughness. It can be carried out.

  In addition, surface roughness anisotropy is thought to affect surface functions and mechanical properties such as surface aesthetics, joint wetting properties, and contact area synthesis. Grasping is also an important point in measurement. For example, when grasping the anisotropy of the surface roughness, it is necessary to repeat the measurement by changing the direction with the stylus type roughness meter, which takes a very long time, whereas in the present invention, the anisotropic surface roughness Sex can be measured instantaneously and quantitatively.

  As the reference mirror surface, a dedicated mirror may be prepared, but there is a risk of losing. Since it is desirable for the cylindrical probe to close the tip opening with a cap so that dust does not enter inside, the inner surface of this cap can be used as a reference mirror surface.

  That is, a cap whose inner surface is a reference mirror surface is fitted to the tip of the probe so that the reference mirror surface and the reference pattern face each other, and the reference pattern is illuminated by the light of the light source, and a reflected image of the reference pattern is formed on the reference mirror surface. It is preferable that the reflected image is captured by an image sensor, and the standard deviation of the amplitude of the luminance distribution of the image data on a plurality of lines extending in the radial direction from the center of the ring pattern of the obtained image is obtained.

  The standard deviation of the amplitude of the luminance distribution may be obtained for a plurality of lines extending in the radial direction from the center of the ring pattern of the image, and the angle interval is not particularly limited, but the anisotropy of the surface roughness is one of the evaluations of image clarity. In consideration of being a parameter, it is preferable to obtain a plurality of lines extending at equal angular intervals.

  That is, it is preferable to obtain the standard deviation of the amplitude of the luminance distribution of the image data on a plurality of lines extending in the radial direction from the center of the ring pattern of the obtained image and spaced at equal angular intervals.

  The reference pattern may be a ring pattern, and the width of the ring is not particularly limited. Further, the ring pattern may be one or plural. In particular, when a reference pattern formed by concentrically arranging a plurality of ring patterns around the objective lens of the image sensor is used, the image clarity can be evaluated over a wide range of the workpiece surface.

  Further, the image clarity evaluation apparatus according to the present invention is an apparatus for evaluating image clarity of a workpiece surface, which has an imaging element built in a cylindrical case with an open tip and is centered on an objective lens of the imaging element. A reference pattern formed by arranging a ring pattern is provided in the middle of the cylindrical case in the vertical direction, and the reference mirror surface or work surface and the reference pattern face each other with the tip applied to the reference mirror surface or work surface, and the light source The reference pattern is illuminated with the light of the reference pattern, and a reflected image of the reference pattern is copied onto the reference mirror surface or the workpiece surface. Luminance of image data on multiple lines extending in the radial direction from the center of the ring pattern of the obtained image using the mirror cap and the probe signal as input Obtain the standard deviation of the amplitude of the cloth, the standard deviation obtained, and the standard deviation of the amplitude of the luminance distribution of the image data on a plurality of lines extending in the radial direction from the center of the ring pattern of the image obtained in advance with respect to the reference mirror surface And an arithmetic processing unit that calculates the relative value of the above as the specularity.

  The specularity may be evaluated with a numerical value printed out or displayed on a display, but it is difficult to evaluate intuitively because it is necessary to compare numerical values. Therefore, when the specularity of a plurality of lines calculated by the arithmetic processing device is displayed on the display device (display) as a line segment having a length corresponding to the specularity extending in the radial direction from the center, the image clarity is visually determined. Can be evaluated.

  The probe has a built-in image sensor in a cylindrical case with an open end, and a reference pattern formed by arranging a ring pattern around the objective lens of the image sensor is provided in the middle in the vertical direction of the cylindrical case. Well, the material and size are not particularly limited.

  The reference pattern can be produced, for example, by printing or engraving a ring pattern on a film, sheet or plate. In addition, it is important that the reference pattern is flat because the reflected image is reflected on the reference mirror surface or the workpiece surface and becomes a reference for obtaining the mirror surface degree.

  It is important that the reference mirror surface is a flat surface because it serves as a reference for determining the specularity. However, the workpiece surface does not necessarily have to be a flat surface. For example, even if it is a cylindrical surface or a spherical surface, whether or not it is an accurate cylindrical surface or a spherical surface can be identified by comparing the mirror surface degree of a plurality of lines or the lengths of the line segments.

  For example, a computer can be used as the arithmetic processing unit. As the display device, various displays such as a CRT and a liquid crystal display device can be used.

  Hereinafter, the present invention will be described in detail based on specific examples shown in the drawings. 1 to 6 show a preferred embodiment of the image clarity evaluation apparatus according to the present invention. The evaluation apparatus of this example includes a probe 10, a computer (arithmetic processing apparatus) 20, a display (display apparatus) 30, and a printer 40, and the computer 20 is connected to the probe 10 via an interface 50.

  In the probe 10, as shown in FIG. 2, the case 11 has a cylindrical shape with an open front end, and a CCD camera 12 is built in the case 11 with the objective lens facing the front end opening of the case 11. Is provided with a processing unit 12A for processing signals from the CCD camera 12.

  A cylindrical base 13 is press-fitted into the case 11 of the probe 10, and a reference pattern 14 is provided on the lower end surface of the base 13. The reference pattern 14 is configured by forming, for example, four ring patterns as shown in FIG. 3 on a ring-shaped film, and the four ring patterns are laid out concentrically around the center of the objective lens.

  Furthermore, a ring member 11A having a substantially triangular cross section is fitted and fixed inside the tip edge of the case 11 of the probe 10 to form a fitting recess, and a plurality of LEDs (light sources) 16 are formed in the fitting recess. Is oriented toward the reference pattern 14 and spaced from each other, and a light diffusion ring 15 is fitted above the reference pattern 14.

  The light diffusing ring 15 is manufactured, for example, by forming minute irregularities on the outer surface of a transparent or translucent plastic ring, or by dispersing light-reflective fine particles or small pieces inside, and dispersing the light from the LED 16 as a reference. The pattern 14 is illuminated.

  A cap 18 is detachably fitted to the tip of the case 11 of the probe 10, and the inner surface of the cap 18 is a flat reference mirror surface 18A.

  The computer 20 receives the image data from the probe 10 as an input and extends from the center of the ring pattern of the image obtained on the surface of the workpiece W at equal angular intervals in the radial direction, for example, images on 64 lines as shown in FIG. The standard deviation of the amplitude of the luminance distribution of the data is obtained, and the relative value with respect to the standard deviation obtained in advance for the reference mirror surface 18A is calculated as the specularity, and a plurality of specularities are obtained for each of the plurality of lines according to the operator's instruction. It is displayed on the display 30, and the specularity of a plurality of lines is displayed as a line segment having a length corresponding to the specularity extending in the radial direction from the center.

  When evaluating the image clarity of the surface of the workpiece W, the probe 10 is activated with the cap 18 on the case 11 of the probe 10. Then, the light from the LED 16 is diffused by the light diffusing ring 15 to uniformly illuminate the reference pattern 14, the reflected image is formed on the reference mirror surface of the cap 18, and the reflected image is picked up by the CCD camera 12. 20 is sent.

  The computer 20 extracts image data of a predetermined range A (see FIG. 5A) of the ring pattern as, for example, 80 pixel data on 64 lines extending in the radial direction from the center of the ring pattern of the obtained image. Then, the luminance distribution is calculated, and the average value a of the amplitude in the luminance distribution is obtained, and the ring pattern portion L (see (a) in FIG. 6) and the portion H between the adjacent ring patterns ((a in FIG. 6) The standard deviation is calculated from the amplitude and the average value a) in FIG. 6), and the standard deviation of the amplitude in the luminance distribution obtained for each of the 64 lines is stored as the standard deviation of the reference mirror surface.

  Next, the cap 18 is removed, the tip opening of the probe 10 is applied to the surface of the workpiece W as shown in FIG. 1, and the probe 10 is activated to capture a reflection image of the reference pattern 14 reflected on the surface of the workpiece W. The image data is processed by the computer 20 in the same manner as the image data of the reference mirror surface.

  In the case of the surface of the workpiece W, the reflected image of the reference pattern 14 is blurred or deformed according to the surface roughness of the surface of the workpiece W or the anisotropy of the shape. As shown in FIG. 6 (b), the rise and fall are deformed compared to the rectangular shape of the reference mirror surface 18A, and the amplitude is reduced.

Therefore, the relative value of the standard deviation of each of the 64 lines obtained for the surface of the workpiece W and the standard deviation of the 64 corresponding lines obtained for the reference mirror surface 18A is expressed as (standard deviation of the workpiece surface / standard of the reference mirror surface). Deviation) × reference value (for example, 1000)
This is used as the specularity.

  The specularity thus obtained is stored for each of the 64 lines, and when the operator gives an instruction to the computer 20 by a key operation or a mouse operation, the specularity for each of the 64 lines is displayed as a numerical value on the display 30. When there is an instruction from the operator, the numerical value is printed out.

  When the operator gives an instruction, the specularity of each of the 64 lines is displayed on the display 30 as a line segment having a length corresponding to the 64 specularities extending radially.

  Since the reference pattern 14 is illuminated by the LED 16 and the reflected image is formed on the workpiece surface, the reflected image is formed with higher accuracy than when the slit pattern is used. In contrast to the conventional slit pattern, which can only detect a center line average roughness of 0.1 μm or less, according to the present inventors' experiment, the center line average roughness of 0.01 μm to 10 μm is obtained in the method of this example. As a result, it was confirmed that the image clarity can be evaluated with high accuracy. In particular, when the number of ring patterns of the reference pattern 14 is further increased and the contour of the pattern is formed with high accuracy, for example, with accuracy of the μm level, it is expected that the image clarity of the workpiece surface can be more accurately evaluated.

  7 to 10 show the reflection image of the reference pattern 14 and the line segment (absolute value and relative value) of the specularity in different works. Fig. 7 shows the case of a workpiece with low surface roughness and little shape anisotropy. The line segments of the specularity are sufficiently long and almost equal to each other, and it is evaluated that the image clarity is high. Can do.

  FIG. 8 shows a case where the surface roughness is not so large, but the workpiece has anisotropy in shape. The line segment of the mirror surface degree is not so short, but the length of the line segment varies and the image clarity is low. It can be evaluated that it is not too high.

  FIG. 9 shows a case where the surface roughness is large and the work has anisotropy in shape. It can be evaluated that the specularity line segment is short, the length of the line segment varies, and the image clarity is low. it can.

  FIG. 10 shows a case where the surface roughness is very large and the work has anisotropy in shape, the line segment of the specularity is very short, the length of the line segment varies, and the image clarity is considerably low. Can be evaluated.

It is a figure which shows the whole structure in preferable embodiment of the image clarity evaluation apparatus which concerns on this invention. It is a figure which shows the structure of the probe in the said embodiment. It is a figure which shows the example of the reference | standard pattern in the said embodiment. It is a schematic diagram for demonstrating the method of extracting luminance distribution from the image data in the said embodiment. It is a figure which shows the example of the image data in the said embodiment. It is a figure which shows the example of the luminance distribution in the said embodiment. It is a figure which shows the example of the line segment of the reflected image of a workpiece | work surface, and specularity. It is a figure which shows the example of the line segment of the reflected image and specularity of the other workpiece | work surface. Furthermore, it is a figure which shows the example of the line segment of the reflected image and mirror surface degree of another workpiece | work surface. Furthermore, it is a figure which shows the example of the reflected image of a workpiece | work surface, and a component of specularity.

Explanation of symbols

10 Probe 11 Cylindrical Case 12 CCD Camera 14 Reference Pattern 15 LED (Light Source)
20 Computer (arithmetic processing unit)
30 Display (display device)

Claims (6)

In evaluating the image clarity of the workpiece surface,
Using a probe in which an imaging element is built in a cylindrical case with an open tip and a reference pattern formed by arranging a ring pattern around the objective lens of the imaging element is provided in the middle in the vertical direction of the cylindrical case,
Place the probe tip against the workpiece surface so that the workpiece surface and the reference pattern face each other, illuminate the reference pattern with light from the light source, copy the reflected image of the reference pattern onto the workpiece surface, and capture the reflected image with an image sensor. And
Obtain the standard deviation of the amplitude of the luminance distribution of the image data on a plurality of lines extending in the radial direction from the center of the ring pattern of the obtained image, and obtain the standard deviation and the ring pattern of the image obtained in advance for the reference mirror surface The relative value of the amplitude deviation of the brightness distribution of the image data on multiple lines extending in the radial direction from the center of the image is taken as the specularity, and the image clarity of the workpiece surface is evaluated from the specularity of the multiple lines. Evaluation method of image clarity characterized by A cap whose inner surface is a reference mirror surface is fitted to the tip of the probe so that the reference mirror surface and the reference pattern face each other, the reference pattern is illuminated by light from the light source, and a reflected image of the reference pattern is copied to the reference mirror surface. The reflected image is captured by the image sensor,
The method for evaluating image clarity according to claim 1, wherein the standard deviation of the amplitude of the luminance distribution of the image data on a plurality of lines extending in the radial direction from the center of the ring pattern of the obtained image is obtained.   3. The standard deviation of the amplitude of the luminance distribution of the image data on a plurality of lines extending in the radial direction from the center of the ring pattern of the obtained image and spaced at equal angular intervals. Evaluation method of image clarity.   3. The image clarity evaluation method according to claim 1, wherein a reference pattern formed by concentrically arranging a plurality of ring patterns around an objective lens of an image sensor is used. An apparatus for evaluating the image clarity of a workpiece surface,
It is configured by providing a reference pattern in the middle of the cylindrical case in the vertical direction, in which the imaging element is built in the cylindrical case with the open end and the ring pattern is arranged around the objective lens of the imaging element. The tip is applied to the reference mirror surface or workpiece surface so that the reference mirror surface or workpiece surface and the reference pattern face each other, the reference pattern is illuminated by the light of the light source, and a reflected image of the reference pattern is projected on the reference mirror surface or workpiece surface. A probe that captures a reflected image with an image sensor;
A cap provided to be fitted to the tip of the probe and having an inner surface serving as a reference mirror surface;
Using the probe signal as an input, the standard deviation of the amplitude of the luminance distribution of the image data on a plurality of lines extending in the radial direction from the center of the ring pattern of the obtained image is obtained, and the obtained standard deviation and the reference mirror surface are obtained in advance. An arithmetic processing unit that calculates the relative value of the standard deviation of the amplitude of the luminance distribution of the image data on a plurality of lines extending in the radial direction from the center of the ring pattern of the image that has been obtained;
A device for evaluating image clarity, comprising:   6. The evaluation of image clarity according to claim 5, further comprising a display device that displays the specularity of the plurality of lines calculated by the arithmetic processing unit as a line segment having a length corresponding to the specularity extending in the radial direction from the center. apparatus.

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