JP2007155248A - Joining method of supply chamber, and supply chamber and clean booth - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To join supply chambers using a deformable sheet material easily and without the occurrence of dust. <P>SOLUTION: A cloth having air permeability is used for a blowout face 11 of the chambers, and the deformable sheet material is used for a non-permeable face 12 opposed to the blowout face 11. The supply chambers 3 swell by supply of clean air. Hook faces 101a and loop faces 101b are attached to circumferential faces of the supply chambers 3. Adhesion junction and separation of peripheral faces of the supply chambers 3 are easy, and without dust. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a supply chamber connecting method for supplying clean air, a supply chamber and a clean booth, and a supply chamber adopting a deformable air-permeable cloth having a predetermined air resistance as a blowing surface of the chamber The present invention relates to a method suitable for connecting the two.

  Conventionally, when connecting a plurality of clean booths (Patent Document 1) formed by a duct chamber composed of a blower, a filter, a thin film, etc., notches are provided at the four corners of the top plate of the clean booth, A method has been proposed in which a connecting member is inserted into a rectangular gap formed by a notch, and fixed and coupled with screws (Patent Document 2). In addition, a method of connecting clean booths with channel steel has been proposed. Furthermore, a method has also been proposed in which the thickness of the central part of the support made of aluminum alloy is reduced, and assembly and connection can be made manually by using a screwdriver (Patent Document 3).

JP 2001-74286 A JP 2002-286265 A JP 2002-309698 A

  However, the clean booth is provided with notches at the four corners of the top of the clean booth, and a connecting member is inserted into a rectangular gap formed by each notch and fixed and connected with screws. When connecting with grooved steel, it takes time to connect and divide clean booths. In addition, in the method that enables assembly and connection by manual operation using a screwdriver, dust generated at the time of connection (generated when the screw is screwed) is scattered, or multiple connections and disconnections are made. Is impossible.

  The present invention has been made in view of the above points, and a method for connecting supply chambers that can be easily connected and separated without generating dust, and that can be easily connected and disconnected without generating dust. It aims to provide a supply chamber and clean booth.

In order to achieve the above object, the present invention comprises a blowout surface made of a breathable cloth, non-woven fabric, or sheet, and a portion other than the blowout surface is made of a non-breathable sheet that can be deformed to keep clean air constant. A method of connecting supply chambers used when supplying to a space of
A part of the supply chamber other than the blow-out surface is provided with a connection member that can be connected to each other in close contact with each other, and that can be disconnected. It is characterized by doing.

  Another aspect of the present invention is that the blowout surface is made of a breathable cloth, non-woven fabric, or sheet, and a portion other than the blowout surface is made of a non-breathable sheet that can be deformed. The supply chambers used when supplying to the supply chamber are connected to each other, wherein a duct for supplying clean air from a clean air supply device to the supply chamber is formed of a deformable non-breathable sheet. A part is provided with a connecting member that can be connected to each other by being in close contact with each other and can be disconnected, and the ducts are connected by the connecting member.

  As the connecting member, a hook-and-loop fastener, a fastener, a magnet, a button, or a peelable low adhesive tape can be used.

  By using these connecting members, supply chambers or ducts can be easily connected or separated, and dust generation can be prevented.

  The place where the connecting member is provided can be arbitrarily provided on the peripheral surface of the supply chamber, the side surface of the duct, and the portion that contacts when connected.

  In the present invention, for example, the chamber body has a blowing surface, a non-venting surface facing the blowing surface, and a non-breathable peripheral surface forming a side surface between the blowing surface and the non-venting surface. ing. The blowing surface is formed of a breathable cloth, non-woven fabric or sheet, and the non-venting surface and a part between the blowing surface are connected in the chamber by a connecting member, and clean air is formed in the chamber body. The length of the connecting member is such that at least the peripheral part of the blowing surface is curved and bulges convexly toward the clean air blowing direction, except for the setting position of the connecting member. You can use what is set.

  If such a supply chamber is used, a part of the non-venting surface facing the blowing surface in the chamber and a part of the blowing surface are connected in the chamber by the connecting member, and clean air is supplied into the chamber. In this case, the length of the connecting member is set so that at least the peripheral portion of the blowing surface is curved and bulges toward the clean air blowing direction side except for the setting position of the connecting member. Therefore, a slanting airflow directed outward is formed at the peripheral portion of the blowout surface. Thereby, it is possible to suppress the atmosphere of the outer non-clean space from being caught in the clean space formed by the airflow from the blowout surface.

  The connecting member exhibits a so-called bulge-preventing function to prevent the entire blow-out surface from being curved and preventing the purpose of supplying clean air only to the original specific space. It is preferable that a wire is used as the member, and the non-venting surface and the blowing surface are connected in a dot shape when viewed from the blowing direction. In this way, the blowout surface is prevented from bulging at every “point”, and a uniform internal pressure is achieved throughout the chamber, and clean air can be supplied uniformly from the blowout surface. Further, it is not necessary to use a curved and rigid reinforcing material along the blowing surface. For the wire, for example, a string or a thread can be used.

  The connecting member is a partition member, and the non-venting surface and the blowing surface are linearly connected by the partition member when viewed from the blowing direction, and a part of the partition member is open. It may be. Since a part of the chamber is open as described above, a uniform internal pressure is achieved in the entire chamber, and clean air can be supplied uniformly from the blow-out surface. The part may be set at an end of the blowing surface. If it does so, a radial airflow can be formed also from the side surface of the far side of a partition (the side away from the site | part which takes in air in a chamber), and it can supply in a booth (local space). The partition member is preferably made of a flexible strip-shaped material. In this case, the belt-shaped material may be air permeable or non-air permeable.

  The non-venting surface facing the blowing surface in the chamber may be made of a deformable non-breathable sheet-like material. In such a case, if the peripheral surface is also made of a non-breathable and deformable sheet-like material, the entire supply chamber can be folded to be compact when air is not supplied into the chamber. .

  Furthermore, at least a part of the peripheral surface may be formed of a breathable cloth, nonwoven fabric or sheet.

  In the supply chamber described above, the chamber body other than the blowout surface is provided with a hook-and-loop fastener, a fastener, a magnet, a button, or a detachable low-adhesive tape for connecting to the chamber body of another supply chamber. Also good.

  According to the present invention, each of the above-described supply chambers, a clean air supply device that supplies clean air to the supply chamber, and the clean air supply device are provided, and the clean air from the clean air supply device is supplied to the supply chamber. A duct for supplying to the chamber, the supply chamber being integrated with the clean air supply device by the duct or a support member, and being supported horizontally so that the blow-out surface faces the lower surface. A clean booth is provided.

  According to such a clean booth, clean air is supplied from the upper side to the lower side in a compact and specific space so that the space has a cleanliness atmosphere higher than the surroundings in the height direction. It is easy and the surrounding air with low cleanliness can be prevented from being caught in the space, and the cleanliness of the space can be increased efficiently. The term “clean booth” in the present invention is used simply to mean “a device that creates a clean space locally”, and as seen in JISZ8122, “the filter is built in the ceiling surface”, “the surrounding is vinyl. It is not used as a device having an element such as “compartment with curtains”. This is clear from the embodiments described later and the essence and effects of the present invention.

  In addition, according to the present invention, the supply chamber includes a clean air supply device that supplies clean air to the supply chamber, and the supply chamber is clean so that a blow-out surface of the supply chamber faces in a horizontal direction. A clean booth is provided which is provided on an air supply device.

  According to the clean booth having such a configuration, it is easy to supply clean air in the horizontal direction to make the space have a cleanliness atmosphere higher than that of the surroundings, and air with low ambient cleanliness is involved in the space. And the cleanliness of the space can be increased efficiently. Therefore, this is particularly effective when the supply target of clean air is horizontal, for example, when an operating table in a hospital or an object requiring a cleaner atmosphere is on a belt conveyor.

A supply chamber in which a non-venting surface and a peripheral surface facing the chamber blowing surface are each made of a deformable non-breathable sheet-like material, and a clean air supply device for supplying clean air to the supply chamber; A duct for supplying clean air from the clean air supply device to the supply chamber, the duct being made of a non-breathable, deformable sheet material. Integrated with a supply chamber, the duct is attached to the outlet of the clean air supply device, the duct is erected by blowing out clean air from the outlet of the clean air supply device, and the supply chamber is It is configured to be supported horizontally by the duct so that its blowing surface faces the lower surface. Octopus and clean booth can also be proposed.
In such a clean booth, when the supply of clean air is stopped, both the supply chamber and the duct can be folded compactly, and the entire clean booth can be reduced in size and weight.

  In such a case, the duct may have a substantially rectangular tube shape, and at least one pair of opposing faces may be connected via a connecting member for suppressing swelling in the duct. As the connecting member, a wire, a string, a thread, or a flexible belt-like member as described above can be used.

  The clean air supply device is accommodated in a casing. If the supply chamber and the duct are of a size and shape that can be accommodated in the casing when the clean air supply from the clean air supply device stops, for example, the clean air supply device is not suitable. In use, the supply chamber and duct can be accommodated in the casing. In this case, the material forming the peripheral surface may not be deformable, but the non-venting surface and the peripheral surface facing the chamber blowing surface are each made of a deformable non-permeable sheet-like material. If it is, it will be formed of a soft material that can be deformed as a whole, which is advantageous when not in use.

  Further, a supply chamber in which a non-venting surface and a peripheral surface facing the chamber blowing surface are each made of a deformable non-breathable sheet-like material, and a clean air supply device for supplying clean air to the supply chamber And the supply chamber is erected by the blowout of clean air from the blowout port of the clean air supply device, and the supply chamber is directed to the horizontal direction so that the blowout surface faces in the horizontal direction. A clean booth attached to can be proposed. In this case, the material forming the peripheral surface may not be deformable, but the non-venting surface and the peripheral surface facing the chamber blowing surface are all made of a deformable non-permeable sheet-like material. If it is, it will be formed of a soft material as a whole, which is advantageous when not in use.

  Even in such a case, it is more preferable that the clean air supply device is accommodated in a casing, and the supply chamber is sized and shaped so that it can be accommodated in the casing when the clean air blowing from the clean air supply device is stopped. .

  If a caster is provided on the lower surface of the clean air supply device, the entire clean booth can be easily moved and a clean space can be created in a desired place only when necessary.

  A hook-and-loop fastener, a fastener, a magnet, a button, or a peelable low adhesive tape provided in the chamber body of the supply chamber may be provided in the duct.

The hook-and-loop fastener, fastener, magnet, button, or peelable low adhesive tape may be provided in the duct instead of being provided in the chamber body of the supply chamber.

  According to the present invention, it is possible to easily connect and separate the supply chambers while preventing dust generation. Further, since the connecting portion between the supply chamber and the duct is in close contact, it is possible to prevent dust from entering the clean space from the connecting portion.

  FIG. 1 shows a side view of a clean booth 1 according to the present embodiment. This clean booth 1 is installed in, for example, a clean room R in which a semiconductor manufacturing process is performed, and further, high cleanliness work is performed in the clean room R. Used when creating space.

  The clean booth 1 has a clean air supply device 2 and a duct 4 for sending clean air from the clean air supply device 2 to the supply chamber 3. The clean air supply device 2 has a fan, a ULPA filter, and the like in the casing. The clean air supply device 2 sucks ambient air, filters it, and supplies clean air to the duct 4. A free caster 5 is provided on the lower surface of the clean air supply device 2.

  As shown in FIGS. 2, 3, and 4, the chamber body 10 of the supply chamber 3 includes a blowing surface 11, a non-venting surface 12 that faces the blowing surface, and a space between the blowing surface 11 and the non-venting surface 12. And a non-breathable side plate 13 that constitutes the peripheral surface, and has a substantially rectangular parallelepiped shape as a whole.

  The blowout surface 11 is formed of a breathable cloth, nonwoven fabric or sheet. Examples of the breathable cloth that forms the blowout surface include, for example, a 100% polyester long-fiber fabric that is breathable (generally used as a dust-free garment for clean rooms). Further, as the non-woven fabric having air permeability, a non-woven fabric of 100% polyester long fibers, a Teflon membrane (registered trademark of DuPont), or a laminate of cloth and non-woven fabric may be used. With such a composite material, there is no flaking or the like, and the durability as a cloth is improved while maintaining the filter performance of the nonwoven fabric. A Teflon membrane laminate structure product such as Gore-Tex (registered trademark of Gore-Tex) may be used. An example of the air-permeable sheet is a synthetic resin sheet in which many fine holes are formed.

Although an appropriate panel material may be used for the non-ventilated surface 12, a non-breathable cloth or sheet is used in the present embodiment. Examples of the non-breathable fabric include a fabric made of 100% polyester long fiber and low breathability (for example, a fabric used in a negative pressure clean suit with a fan). As the non-breathable sheet, for example, a polyethylene film or a soft vinyl chloride sheet can be used. Moreover, even if it does not have complete non-air permeability, it can be suitably used as long as the air permeability according to JIS L 1096 is 2 (cc / cm ² / sec) or less.

  In any case, the breathable and non-breathable cloth, non-woven fabric, and sheet used in the supply chamber 3 are washable, have low dust generation, are resistant to repeated folding, and are lightweight and have high tear and tensile strength. Those satisfying the conditions such as low elongation are preferred.

  As shown in FIG. 4, the blowout surface 11 and the non-venting surface 12 are connected by a string 21 in the chamber. In the present embodiment, as shown in FIG. 2 and FIG. 3, the blowing surface 11 and the non-venting surface 12 are equal at a plurality of locations so as to be dotted at the intersection (set position P) of the lattice. They are tied evenly at intervals. The length L of the string 21 in the chamber at that time is at least the blowing surface 11 except for the set position P connected with the string 21 when clean air is supplied into the chamber, as shown in FIG. The peripheral portion in FIG. 1, that is, the side close to the side plate 13 is set so as to bend and bulge convexly toward the clean air blowing direction side by the internal pressure at that time.

  The main part of the clean booth 1 according to the present embodiment is configured as described above, and when clean air from the clean air supply device 2 is supplied into the chamber of the supply chamber 3 through the duct 4, FIG. As shown in FIG. 4, clean air is blown downward from the blowing surface 11. As blowing conditions, the average surface wind speed is preferably about 0.1 to 0.5 m / s, and the internal pressure in the chamber (differential pressure with respect to ambient air) is preferably 50 to 200 Pa.

The blowout surface 11 when clean air is blown out in this way is curved convexly toward the blowout direction except for the set position P. Accordingly, a slanting airflow is formed toward the outside in the peripheral portion of the curved region. As a result, in the peripheral portion of the blowing surface 11, the surrounding atmosphere is prevented from being caught at the interface with the surrounding atmosphere, and the entry of dust and the like into the clean space formed by the blown clean air is suppressed. As a result, the clean area A is not reduced as in the prior art.
Furthermore, in the present embodiment, the blowing surface 11 and the non-venting surface 12 are connected at equal intervals at a plurality of set positions P via the string 21 and the length L of the string 21 is the same. Therefore, when clean air is supplied into the supply chamber 3, the entire thickness of the supply chamber 3 becomes substantially uniform.

  In addition, since it is not necessary to use a dripping wall as in the prior art, as shown in FIG. 1, the clean area A below the supply chamber 3 is obstructed to hinder the work of the worker H who operates the equipment G. There is nothing, and the working environment is good. In the environment where the clean booth 1 is installed, for example, in a place where the airflow from the horizontal direction is strong (for example, a place where a device that blows out a horizontal airflow is installed in the vicinity), the clean area formed by the clean booth 1 is In order to ensure, a sheet-like banner or the like may be attached to the side surface (circumferential surface) of the supply chamber 3 by using a hook-and-loop fastener, a fastener, and other fastening buttons.

Next, in order to investigate the effect of the present invention, an experimental result actually performed using the apparatus of FIG. 10 is shown. Regarding the experimental conditions, first, the dust concentration (the number of particles having a diameter of 0.1 μm or more) in the ambient environment X where the clean booth 1 is installed is 34860 / m ³ (987 / ft ³ ). there were. And the said laminate raw material whose air permeability of the cloth which comprises the blowing face 11 is 49.8 (cc / cm < ² > / sec) was used. As shown in FIG. 5, the blown wind speed is 0.4 to 0.7 m / s below the set position P, and 0.27 on the other side (below the convexly curved surface) on average. It was -0.35 m / s. The area vertically below the blowout surface 11 was defined as the original clean area Y, and the area slightly outside thereof was defined as the measurement area Z. In the measurement region Z, measurement points M and N were set above and below a position 50 mm outside the clean region Y. The measurement location M is set to a position 500 mm below the blowout surface 11, and the measurement location N is set to a position further 500 mm below the measurement location M. That is, in FIG. 5, D1 = 50 mm, D2 = 500 mm, and D3 = 500 mm.

As a result of measuring the dust concentration (the number of particles having a diameter of 0.1 μm or more) at the measurement points N and M, both are 0 / m ³ (that is, the dust count is 0). there were. Accordingly, even in the original clean region Y, the dust concentration is naturally 0 / m ³ , and as a result, it can be confirmed that the clean region has spread outside the original clean region Y by at least 50 mm.

  In the clean booth 1 according to the embodiment, the supply chamber 3 is supported horizontally by the duct 4 so as to blow clean air vertically downward. You may support horizontally by a supporting member.

  Furthermore, in an environment where desk work is performed, such as the clean booth 31 shown in FIG. 6, the supply chamber 3 is vertically supported on the clean air supply device 2 so that the blowing surface 11 is directed horizontally. Also good. In addition, the clean booth 31 having such a configuration is placed next to an examination table for examining a patient and an operation table for surgery, for example, so that the examination table and the operation table are placed without interfering with illumination from above. The space can be easily made into a high cleanliness space.

  Further, in the above-described embodiment, the blowing surface 11 and the non-venting surface 12 are connected to form a dot by the string 21 when viewed from the blowing direction, but as shown in FIGS. 7, 8, and 9. In addition, it may be connected in a linear manner by a strip-shaped partition member 41 inside the chamber.

  In such a case, in the example of FIGS. 7 to 9, the air outlet surface 11 is linearly connected from the end portion 42 on the duct 4 side to the opposite end portion 43 side, and is further open near the end portion 43 side. . That is, the length W1 in the longitudinal direction of the partition wall member 41 is shorter than the length W2 between the end portions 42 and 43 on the blowing surface 11. The partition member 41 uses the same non-breathable sheet as the material used for the non-breathing surface 12. The length (height) L of the partition member 41 is at least except for the set position Q when clean air is supplied into the chamber, as shown in FIGS. The peripheral portion of the blowing surface 11 is set so as to bulge out convexly toward the clean air blowing direction side by the internal pressure at that time.

  If the blowing surface 11 and the non-venting surface 12 are connected in a linear manner in this manner, for example, when a large chamber is formed, it is necessary to increase the pressure in the chamber. It is possible to cope with this by increasing the bonding strength with 12, and it is possible to disperse this by receiving a linear force, and the strength of the chamber can be suitably increased. In production, for example, if a non-breathable cloth band equal to the chamber height is placed between the blowout surface 11 and the non-venting surface 12 and sewn with a sewing machine from the outside, this can be easily achieved. .

  Further, in the present embodiment, since the vicinity of the end 43 side is open, the pressure in the chamber becomes uniform, and the blowing surface near the end 43 is also on the blowing direction side when clean air is supplied. It is possible to bulge it in a convex shape and form an oblique air flow toward the outside even under the end portion 43 to suppress the entrainment of dust from the surrounding atmosphere. Since the duct 4 is disposed on the end portion 42 side, the duct 4 functions as a “sag wall”, so that dust from the ambient atmosphere is hardly generated under the end portion 42.

  In the above embodiment, the non-breathable side plate 13 is used as a member constituting the peripheral surface, but instead, a thin film material such as a non-breathable cloth or sheet may be used. Furthermore, if air-permeable cloth, non-woven fabric, or sheet is used in place of the non-air-permeable side plate 13, clean air can be easily supplied in the circumferential direction.

  FIG. 10 shows a clean booth 51 according to still another embodiment. The blowout surface 53 of the supply chamber 52 used in the clean booth 51 is similar to the blowout surface 11 in the supply chamber 3 of the clean booth 1 in the above-described embodiment at the set position P via a non-venting surface 54 and a string. Also, the non-ventilated surface 54 is made of a non-breathable cloth or sheet similar to the non-vented surface 12 of the supply chamber 3. A non-breathable cloth or sheet is also used for the four side surfaces 55 that form the peripheral surface of the supply chamber 52.

  The supply chamber 52 is integrated with the duct 61. The duct 61 has a rectangular tube shape as a whole, and a non-breathable cloth or sheet is used as the material of the duct 61 in the same manner as the non-breathing surface 54. A pair of faces 62 and 63 facing each other in the duct 61 are connected at equal intervals at substantially the same position at the intersections of the lattices via the strings 64 in the same manner as the supply chamber 52.

  The clean air supply device employed in the clean booth 51 according to the present embodiment is a fan filter unit 71. The fan filter unit 71 is accommodated in the casing 72 as shown in FIGS. The fan filter unit 71 itself has a suction port 73 in the lower part, followed by a blower 74 in the upper part, and further a purification filter such as a HEPA filter having four sides surrounded by a panel material or the like on the blower side of the blower 74. 75 is provided. A blowout port 76 is formed on the downstream side of the purification filter 75.

  The casing 72 has an open bottom surface and four side surfaces constituted by a panel material 77. A lid 78 that can freely close the opening is provided at the edge of the upper opening of the casing 72 by a hinge or the like. The end opening 61 a of the duct 61 is airtightly provided at the blowout port 76 of the fan filter unit 71. In the present embodiment, the periphery of the opening of the duct 61 is sandwiched by the flange 80 and is fastened and fixed by a fastening fixing member 79 such as a wing nut.

  The clean booth 51 according to the present embodiment has the above-described configuration. When the fan filter unit 71 is operated, clean air blown from the blowout port 76 is supplied to the supply chamber 52 via the duct 61. In this embodiment, not only the non-ventilated surface 54 but also the peripheral surface 55 and the duct 61 are made of a non-breathable cloth or sheet. As shown in FIG. 10, the supply chamber 52 and the duct 61 swell with the internal pressure at the time of supplying clean air, and each has a substantially rectangular parallelepiped shape, and this shape is maintained. The duct 61 itself has a pair of opposing faces 62 and 63 constituting the duct 61 connected to each other at almost equal intervals via the string 64, so that the thickness of the duct 61 is uniform as a whole. . Moreover, since the pressure applied to the duct 61 is dispersed by the plurality of strings 64, sufficient strength is ensured.

  When the operation of the fan filter unit 71 is stopped, the internal pressures of the duct 61 and the supply chamber 52 become the same as the outside, and the shape of the substantially rectangular parallelepiped is lost as shown in FIG. 11, resulting in a substantially flat bag shape. . Therefore, by folding it, it can be stored in the casing 72 as shown in FIG. If the lid 78 is closed as shown in FIG. 12, it can be sealed with the same cleanliness as the environment used without special packaging. In order to further improve the sealing performance, a gasket may be inserted as appropriate, or the sealing performance between the lid 78 and the panel 77 may be improved by a buckle or the like.

  In the present embodiment, the duct 61 and the supply chamber 52 are integrated into a single bag, and the opening of the duct 61 is fastened and fixed to the outlet 46 of the fan filter unit 71 by a wing nut 79. Therefore, it is easy to remove the duct 61 and the supply chamber 52 from the fan filter unit 71, and the replacement is easy. When the duct 61 and the supply chamber 52 are dirty, they are washed and reused. It is also possible to do.

  In the clean booth 51 according to this embodiment, the supply chamber 52 and the duct 61 are all made of materials such as cloth, non-woven fabric, and sheet. However, by appropriately selecting these materials, the clean booth 51 when supplying clean air is used. Can suppress dust generation from the supply chamber 52 itself.

  In the clean booth 51 according to this embodiment, in order to increase the self-sustainability and the shape maintenance degree when supplying air to the supply chamber 52 and the duct 61, for example, as shown in FIG. May be attached to both the inside and outside of the supply chamber 52 and the inside and outside of the duct 61, respectively.

  In the clean booth 51 according to this embodiment, the supply chamber 3 and the duct 4 of the clean booth 1 shown in FIG. 1 are all made of a deformable material such as cloth, non-woven fabric, sheet, and the like. The chamber 52 and the duct 61 can be stored in the casing 72 (they can be stored in the casing 72 even when there are telescopic poles 81 and 82). The horizontal blow-off type clean booth 31 shown in FIG. 6 is also composed of a non-breathable material such as cloth, non-woven fabric, sheet, etc. not only on the blowout surface 11 but also on the non-ventilated surface opposite to the blowout surface 11 and on the peripheral surface. As a result, when used, the supply chamber 3 supplied into the chamber stands up as shown in FIG. 6, and when not in use, it is shown in FIG. It is possible to adopt a configuration in which the supply chamber 3 can be accommodated in a casing.

  Next, the example which attached the connection member is demonstrated. As shown in FIG. 13, the connecting member, for example, the hook-and-loop fastener 101, may be attached to the surface of the side plate 13a, and, as shown in FIG. You may attach directly to the ventilation surface 12a.

  FIG. 15 shows a state where the hook-and-loop fastener 101 is attached to the surface of the side plate 13a. Since the hook-and-loop fastener 101 can be connected and separated by locking the hook of the hook surface and the loop of the loop surface, as shown in FIG. For example, one side plate 13 may be alternately attached to the loop surface 101b. Accordingly, in the other supply chamber 3 to be connected, the loop surface 101b and the hook surface 101a may be attached so as to join (lock) the hook surface 101a and the loop surface 101b shown in FIG.

  By attaching the hook-and-loop fastener 101 as the connecting member to the peripheral surface of the supply chamber 3 in this way, the peripheral surfaces of the supply chamber 3 can be easily connected as shown in FIG. Can be separated. In addition, due to such close contact, the gap between the connection portions of both supply chambers 3 becomes 0, and the entry of dust into the clean area A can be suppressed.

  In addition, since the supply chambers 3 are in close contact with each other, the chambers are shaken so that the chambers come into contact with each other, and dust generation and deterioration caused by rubbing caused thereby can be prevented or suppressed.

  This is extremely effective when using clean booths side by side. That is, as shown in FIG. 18, when the clean booths are used side by side, if there is a gap 110, the surrounding dust enters the clean area A, but the connecting member of the present invention, for example, the hook-and-loop fastener 101, is used. By using and connecting the supply chambers 3 of a plurality of clean booths, it is possible to form a wide range of highly clean spaces without gaps.

As a result of actual verification by the inventors, when the dust concentration in the surrounding environment is 7.0 × 10 ⁶ (the size of the dust is 0.1 μm or more), the gap is 50 mm as shown in FIG. In the lower part of the gap 110, dust as shown in FIG. 18 was detected, but in the example of FIG. 17, the dust concentration was almost the same as the original clean region.

  In place of the hook-and-loop fastener 101, a fastener, a magnet, a button, or a peelable low adhesive tape may be used. As described above, the hook and loop surfaces of the hook-and-loop fastener 101 are usually brought into close contact with each other to achieve a connected state. However, if a mixed type of both is used, there are no restrictions on the connection and the hook and loop surfaces are free. Flexible connection is possible. Even when magnets are used, the same free connection can be realized by using a type in which N poles and S poles are mixed.

  FIGS. 19 to 26 show examples of connecting clean booths provided with connection members as shown in FIGS. The state seen from these planes is shown. These modes are arranged in consideration of work processes and flow lines. FIG. 27 shows a state where two clean booths 51 are connected to face each other. In this way, it is possible to freely form clean spaces of various forms and sizes.

  Also in the clean booth 31 of the type shown in FIG. 6, various connecting members such as hook-and-loop fasteners may be used at locations other than the blowout surface. The example of a connection in the case concerning FIG. 28, FIG. 29 was shown.

  The connecting member of the present invention may be attached to the duct 4 shown in FIGS. However, in order not to entrain dust, it is important that the width of the side plate serving as the upper chamber and the width of the duct 4 are the same.

  Moreover, you may attach the connection member of this invention to the non-ventilation surface facing the blowing surface 12, for example. FIG. 30 shows such a state. For example, a hook surface 101 a of a hook-and-loop fastener is attached to the non-venting surface 120 facing the blowout surface 11, and the loop surface 101 b of the hook-and-loop fastener is attached to the support member 123 suspended from the ceiling 121 by the string 122. The supply chamber 3 is suspended and supported by this support member 123. By doing so, the supply chamber 3 can be stably maintained without using a self-supporting pole.

  The connecting operation of the chamber with the connecting member may be performed before or after the expansion by supplying clean air. However, the connecting operation is not performed after the supply chamber has been expanded due to the supply of clean air. Cheap.

It is a side view of the basic form of the clean booth concerning an embodiment. It is a bottom view of the supply chamber used for the clean booth of FIG. It is a perspective view of the supply chamber used for the clean booth of FIG. It is a longitudinal cross-sectional view of the supply chamber used for the clean booth of FIG. It is a longitudinal cross-sectional view which shows a mode that the effect of the supply chamber used for the clean booth of FIG. 1 is investigated. It is a side view of the clean booth concerning other embodiment. It is a perspective view of the supply chamber concerning other embodiment. FIG. 8 is a bottom view of the supply chamber of FIG. 7. It is a longitudinal cross-sectional view of the supply chamber of FIG. It is a perspective view of the clean booth concerning other embodiment. It is a side view which shows the mode in the casing at the time of the air supply stop of the clean booth of FIG. It is a side view which shows the mode in the casing at the time of non-use of the clean booth of FIG. It is a perspective view of the supply chamber used for the clean booth concerning an embodiment. It is a longitudinal cross-sectional view of the supply chamber used for the clean booth concerning embodiment. It is a perspective view of the clean booth concerning an embodiment. It is explanatory drawing of the plane of the supply chamber used for the clean booth concerning embodiment. It is a longitudinal cross-sectional view which shows a mode that the supply chamber used for the clean booth concerning embodiment was connected. It is a longitudinal cross-sectional view which shows a mode that the clearance gap produced between supply chambers when a clean booth is juxtaposed. It is explanatory drawing of the plane which shows a mode that two clean booths concerning embodiment were connected in parallel in the same direction. It is explanatory drawing of the plane which shows a mode that two clean booths concerning embodiment were connected in parallel by mutually reverse direction. It is explanatory drawing of the plane which shows a mode that two clean booths concerning embodiment were connected in parallel at right angle direction. It is explanatory drawing of the plane which shows a mode that the two clean booths concerning embodiment are faced | matched and connected facing each other. It is explanatory drawing of the plane which shows a mode that two pairs of the clean booths which opposedly connected were connected in parallel in the same direction. It is explanatory drawing of the plane which shows a mode that a pair of clean booth connected in the orthogonal | vertical direction and the pair of clean booth of the symmetrical connection were connected in parallel. It is explanatory drawing of the plane which shows a mode that two sets of 1 pair of clean booths which faced connection were shifted and connected in the same direction. It is explanatory drawing of the plane which shows a mode that the pair of facing clean booth and the thing which juxtaposed three clean booths in the same direction were connected in the orthogonal direction. It is explanatory drawing of the side surface which shows a mode that the clean booth concerning embodiment was faced | matched and connected facing each other. It is explanatory drawing of the side surface which shows a mode that three clean booths concerning other embodiment were connected. It is explanatory drawing which shows a mode that the connection state of FIG. 28 was seen from the plane. It is a perspective view which shows a mode that a supply chamber is supported from a ceiling.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1,31,51 Clean booth 2 Clean air supply apparatus 3,52 Supply chamber 4 Duct 5 Caster 11 Outlet surface 12 Non-venting surface 21 String 41 Partition member 42,43 End part 101 Surface fastener A Clean area L Length P, Q Setting position

Claims (19)

Supply chambers that are used to supply clean air to a certain space, where the blowing surface is made of a breathable cloth, non-woven fabric or sheet, and the portions other than the blowing surface are made of a deformable non-breathable sheet. Where
A part of the supply chamber other than the blow-out surface is provided with a connection member that can be connected to each other in close contact with each other, and that can be released from the connection. A method of connecting supply chambers. Supply chambers that are used to supply clean air to a certain space, where the blowing surface is made of a breathable cloth, non-woven fabric or sheet, and the portions other than the blowing surface are made of a deformable non-breathable sheet. Where
The duct for supplying clean air from the clean air supply device to the supply chamber is composed of a deformable non-breathable sheet,
A connecting method for a supply chamber, characterized in that a part of the duct is provided with a connecting member that can be connected to each other by being in close contact with each other and that can be disconnected, and the ducts are connected by the connecting member. . The chamber body of the supply chamber has a blowing surface, a non-venting surface facing the blowing surface, a peripheral surface perpendicular to the blowing surface and the non-venting surface, and constituting a side surface therebetween,
The blowing surface is formed of a breathable cloth, nonwoven fabric or sheet,
A part of the non-venting surface and a part of the blowing surface are connected through a connecting member in the chamber,
When supplying clean air into the chamber body, at least the peripheral portion of the blowing surface excluding the set position of the connecting member is curved and bulges convexly toward the clean air blowing direction. The method for connecting supply chambers according to claim 1, wherein the length of the connecting member is set. A supply chamber used for supplying clean air to a certain space,
The chamber body has a blowing surface, a non-venting surface facing the blowing surface, and a peripheral surface that is orthogonal to the blowing surface and the non-venting surface and forms a side surface therebetween.
The blowing surface is formed of a breathable cloth, nonwoven fabric or sheet,
A part of the non-venting surface and a part of the blowing surface are connected through a connecting member in the chamber,
When supplying clean air into the chamber body, at least the peripheral part of the blowing surface excluding the set position of the connecting member is curved so as to protrude convexly toward the blowing direction side of the clean air so as to bulge out. The length of the connecting member is set,
Furthermore, the chamber body other than the blowout surface is provided with a hook-and-loop fastener, a fastener, a magnet, a button, or a detachable low-adhesive tape for connecting to the chamber body of another supply chamber. , Supply chamber.
A supply chamber, characterized in that 5. The supply chamber according to claim 4, wherein the connecting member is a wire, and the non-venting surface and the blowout surface are connected to each other in a dot shape by the wire as viewed from the blowout direction. The supply chamber according to claim 5, wherein the wire is a string or a thread. The connecting member is a partition member, and the non-venting surface and the blowing surface are linearly connected through the partition member when viewed from the blowing direction, and a part of the partition member is opened. The supply chamber according to claim 4, wherein: The supply chamber according to claim 7, wherein the part is an end portion of the blowout surface. The supply chamber according to claim 7 or 8, wherein the partition member is made of a strip-like material having flexibility. The supply chamber according to any one of claims 4 to 9, wherein the non-venting surface of the chamber is made of a deformable non-breathable sheet-like material. The supply chamber according to claim 10, wherein the peripheral surface is made of a non-breathable deformable sheet-like material. The supply chamber according to any one of claims 4 to 11, wherein at least a part of the peripheral surface is formed of a breathable cloth, nonwoven fabric or sheet. A supply chamber according to any of claims 4-12;
A clean air supply device for supplying clean air to the supply chamber;
A duct that is provided in the clean air supply device and supplies clean air from the clean air supply device to the supply chamber;
The clean booth is characterized in that the supply chamber is integrated with the clean air supply device by the duct or a support member, and is supported horizontally such that the blowing surface faces the lower surface. A supply chamber according to any of claims 4-12;
A clean air supply device for supplying clean air to the supply chamber;
A clean booth characterized in that the supply chamber is provided in the clean air supply device so that the blow-out surface of the supply chamber faces in a horizontal direction. A supply chamber according to claim 4, 11 or 12,
A clean air supply device for supplying clean air to the supply chamber;
A duct that is provided in the clean air supply device and supplies clean air from the clean air supply device to the supply chamber;
The duct is made of a non-breathable, deformable sheet material, integrated with the supply chamber,
The duct is attached to the outlet of the clean air supply device,
By blowing clean air from the blowing port of the clean air supply device,
A clean booth, characterized in that the duct stands up and the supply chamber is horizontally supported by the duct so that its blowout surface faces the lower surface. The clean air supply device is accommodated in a casing, and the supply chamber and the duct have a size and shape that can be accommodated in the casing when the clean air blowing from the clean air supply device is stopped. The clean booth according to claim 15, characterized in that A supply chamber according to claim 4, 11 or 12,
A clean air supply device for supplying clean air to the supply chamber;
By blowing clean air from the blowing port of the clean air supply device,
A clean booth, wherein the supply chamber is attached to a blowout port of the clean air supply device so that the supply chamber stands up and a blowout surface thereof faces in a horizontal direction. The surface fastener, fastener, magnet, button, or peelable low adhesive tape provided in the chamber body of the supply chamber is also provided in the duct, according to claim 13, 15 or 16, The listed clean booth. The surface fastener, the fastener, the magnet, the button, or the peelable low adhesive tape is provided in the duct instead of being provided in the chamber main body of the supply chamber. Clean booth.

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