JP2007154561A - Safety measure device for opening/closing door - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To ensure the safety of an object caught between an opening/closing door and an opening opened/closed by the opening/closing door. <P>SOLUTION: This safety measure device 1 is composed of a cover 17 elastically supported and integrated with a safety door 10 through a pair of springs 18; the pair of springs 18 with one ends supported and fixed to a side face, close to an opened/closed opening 4, of the safety door 10 and with the other ends supported and fixed to the cover 17; and a limit switch 19 and an alarm device 22 installed between the pair of springs 18. The springs 18 are normally held in an extended state and elastically deformed when a human body is caught in the safety door 10 and brought into contact with the cover 17. The limit switch 19 is operated ON to generate a signal when the springs 18 are compressed by a predetermined dimension or more. The alarm device 22 sounds an alarm, and a drive motor 14 is reversed through a safety door driving device 2 to start the opening operation of the safety door 10. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a safety device for an open / close door that prevents an object from being caught between the open / close door and an opening that is opened and closed by the open / close door.

  In manufacturing factories such as semiconductor manufacturing factories and liquid crystal display panel manufacturing factories, various transfer robots, transfer robots, etc. are often used in combination with workers. To ensure the safety of workers against these, safety doors and safety fences are used. Etc. are provided. In order to secure a clean environment, a specific space is partitioned with a door to ensure a clean environment. For example, in Patent Document 1, an automatic door and a fire door are provided at the opening of the vertical shaft, and in Patent Document 2, a fire door is provided at the transfer port of the shaft constituting the transport mechanism.

JP-A-7-176687 Japanese Patent Laid-Open No. 7-14909

  However, the doors provided in the device and the specific space for the purpose of ensuring safety and a clean environment may cause a part of the body to be caught in the door when an operator enters the body or a part of the body. Also, the work in the clean room is to wear dust-proof clothing, masks, goggles, etc., and the field of view is narrow and there is no activity. In particular, maintenance and inspection work for equipment and facilities, unlike normal work, is often forced to work in an unreasonable posture in a narrower space, resulting in oversight, misperception, etc. due to narrow vision and obstruction of vision due to obstacles. It is easy and the danger of getting caught is much higher than normal environment and normal work.

  Here, a conventional open / close door used in a manufacturing factory will be described with reference to FIG. FIG. 5 is a plan view of a typical automatic or semi-automatic door according to the prior art. As shown in FIG. 5, the opening / closing port 4 is opened and closed by a door 11. A rack 12 is attached to the door 11, meshes with a pinion (not shown) attached to the drive motor 14, and slides on the rail 20 so as to be able to advance and retreat with the driving force of the drive motor 14, and opens and closes in the direction of the arrow. . The door 11 closes the door 11 by approaching the outer wall 9 by an approach operation, closes the opening / closing port 4, and opens the opening / closing port 4 by an exit operation. FIG. 5 is an example of a case where the opening / closing port 4 does not necessarily need to be closed in an airtight state. When the opening / closing port 4 needs to be closed in an airtight state, the door 11 needs to be brought into contact with the outer wall 9 and stopped.

  In such a conventional technique, safety measures are not taken on the assumption that an operator inserts a part of the body such as a hand or a finger in accordance with the opening / closing operation of the door. In particular, when the manufacturing factory is a semiconductor factory, maintenance and inspection work for transport equipment laid on the ceiling requires maintenance and inspection of the drive mechanism, etc., which is partitioned by walls and installed inside the wall. There are many cases where an open / close door is installed. If the maintenance / inspection door provided in the semiconductor factory has no safety measures for the worker as shown in FIG. 5, there is a high possibility of inducing a personal accident.

  Therefore, the present invention can ensure safety against an object sandwiched between the opening and closing door and the opening that is opened and closed by the opening and closing door, particularly with the closing operation of the opening and closing door provided in the manufacturing factory. The safety measures apparatus of the door which can ensure the safety | security with respect to the human body pinched | interposed between the opening part opened and closed by the door is provided.

Means and effects for solving the problems

  The safety device for an open / close door according to the present invention is an elastic member which is disposed at an opening or an opening of the open / close door or an opening / closing door, or a portion which is in contact with or close to the open / close door. And an edge member that is held by the elastic member and is in contact with or close to either the opening or the opening / closing door, and the elastic member has one end connected to the opening / closing door or the opening. At the same time, the other end is connected to the end side member, and the opening / closing operation of the open / close door is performed in an extended state, and compression is performed by contact between the end side member and an object.

  As a result, when closing the opening / closing door, between the opening / closing door and the opening, that is, between the end member provided on either the opening / closing door or the opening and the other of the opening / closing door or the opening. Even if an object is sandwiched, the elastic member is compressed, and the force exerted on the object is only the compressive force of the elastic member. Compared with the pressing force based on the mechanism that drives the door, the impact load on the object Can be significantly reduced, and safety can be ensured.

  Here, the safety device for an open / close door according to the present invention is disposed together with the elastic member at a portion in contact with or close to the opening or the open / close door of either the open / close door or the opening. A pressure sensing means for generating a signal when the member is compressed more than a predetermined size, and the driving means for controlling the opening / closing operation of the opening / closing door stops the closing operation of the opening / closing door based on the signal. Alternatively, the opening / closing door may be opened.

  As a result, when closing the opening / closing door, between the opening / closing door and the opening, that is, between the end member provided on either the opening / closing door or the opening and the other of the opening / closing door or the opening. By detecting that the object has been caught and stopping the closing operation of the open / close door or starting the opening operation, the object can be prevented from being caught and safety can be further ensured.

  In addition, the safety device for an open / close door according to the present invention may further include an informing means for generating an alarm based on the signal.

  As a result, when closing the opening / closing door, between the opening / closing door and the opening, that is, between the end member provided on either the opening / closing door or the opening and the other of the opening / closing door or the opening. By generating an alarm that an object has been caught, it is possible to notify the surrounding of the object to the surroundings.

  In the safety device for an open / close door according to the present invention, the end member includes the elastic member and abuts or is close to either the open / close door or the open / close door of the open / close door. It may be formed to cover up to a part.

  Thus, by covering and encapsulating the elastic member with the edge member, it is possible to prevent the object from being caught in the gap between the edge member and the opening / closing door or the opening provided with the edge member, and further safety. Can be secured.

  In the safety device for an open / close door according to the present invention, the end member may be formed of an elastic material.

  As a result, when closing the opening / closing door, between the opening / closing door and the opening, that is, between the end member provided on either the opening / closing door or the opening and the other of the opening / closing door or the opening. Even when the object is sandwiched, the end side member is elastically deformed, so that the impact load applied to the object can be further reduced, and the safety can be further ensured.

  Further, in the safety device for an open / close door according to the present invention, the open / close door is provided in a manufacturing factory, and a drive means for controlling the open / close operation of the open / close door is automatically generated by a signal or It may be automatically or semi-automatically controlled based on a signal generated by a human operation.

  Thereby, by applying the present invention in a manufacturing factory where there is a high risk of the human body being caught, safety measures can be taken to prevent personal injury.

  In the present invention, the manufacturing factory includes a semiconductor manufacturing factory, a liquid crystal display panel manufacturing factory, and the like.

  Hereinafter, the best mode for carrying out the safety device for an open / close door according to the present invention will be described with reference to a specific example with reference to the drawings. In the present embodiment, it is assumed that the safety measure device according to the present invention is applied to a safety door (opening / closing door) provided in a lifter portion of a roller conveyor conveyance system in a semiconductor manufacturing factory, but the present invention is not limited thereto.

  First, a roller conveyor conveyance system including a safety door to which the safety measure device according to the present embodiment is applied will be described with reference to FIGS. FIG. 6 is a perspective view showing an outline of a roller conveyor transport system centered on a lifter portion provided in the vicinity of the ceiling. FIG. 7 is a plan view showing an outline of a conveyor transport system centered on a lifter portion provided in the vicinity of the ceiling shown in FIG. FIG. 8 is a front view showing a driving roller of the roller conveyor. FIG. 9 is a partial cross-sectional view showing the turntable.

  As shown in FIGS. 6 and 7, the roller conveyor conveyance system including a safety door to which the safety measure device according to the present embodiment is applied includes an upper roller conveyor 6, a lower roller conveyor 7, an upper roller conveyor 6, and a lower roller conveyor 7. It is comprised with the lift mechanism 3 which relays between. The upper roller conveyor 6 and the lower roller conveyor 7 are composed of a driving roller 24 and a driven roller 40.

  Here, the drive means of the five drive rollers 24 constituting one block is configured as shown in FIG. 8, and a plurality of blocks are continuously arranged in the entire roller type conveyor. In FIG. 8, a roller shaft 43 is rotatably supported with respect to the conveyor frame 37, and a load receiving portion 44 and a flange portion 45 are integrally provided on the roller shaft 43, and urethane rubber 46 is provided on the outer periphery of the load receiving portion 44. Inserted. A toothed pulley 43 is inserted into the roller shaft 42, and a sprocket 39 is fixed to the drive shaft of the motor 38. The sprocket 39 is arranged on the same vertical plane as the sprocket 43 fixed to the series of rollers 24. Has been.

  The timing belt 30 corresponds to a plurality of sprockets 43 (five in the example shown in FIG. 8) provided on each of the sprocket 39 of the drive motor 38 serving as the drive source of the roller 24 and the series of rollers 24 arranged in a straight line. Then, the tooth side (inner peripheral surface) is sequentially engaged to form one loop. Then, tension rollers 41 are arranged at appropriate positions (two positions in the example shown in FIG. 8) on the side (outer peripheral surface) of the timing belt 30 that does not have the teeth. Note that the support shaft of the tension roller 41 applies tension to the timing belt 30. In addition, the flange 45 has a function of forcibly regulating the lateral movement so that the carrier 5 transported on the roller conveyor does not deviate from the conveyor track. In both the upper roller conveyor 6 and the lower roller conveyor 7, one roller is constituted by a driving roller 24 and the other roller is constituted by a driven roller 40.

  As shown in FIGS. 6 and 7, the lift mechanism 3 includes an upper port 27, a lower port 28, and a lifter 25. The lifter 25 is mounted with a turntable 51 shown in FIG. Here, the structure of the turntable 51 will be described with reference to FIG. As shown in FIG. 9, the turntable 51 has a rotation mechanism 50 that rotates the table 26 below the roller support frame 21. The rotation mechanism 50 includes a turning shaft 29, a sprocket 31, a mounting member 32, a timing belt 33, a sprocket 34, a motor shaft 35, a drive motor 36, and a bearing 49. That is, the table 26 is fixed to the turning shaft 29 by the mounting member 32, and the turning shaft 29 is rotatably supported by the lifter 25 at the lower portion by the bearing 49. The sprocket 31 fixed to the turning shaft 29 is connected via a timing belt 33 to a sprocket 34 inserted into a motor shaft 35 of a drive motor 36 fixed to the lifter 25. Then, the turning shaft 29 is rotated forward and backward by the rotation of the drive motor 36.

  On the other hand, as shown in FIG. 9, the carrier 5 has an opening / closing lid 5a for keeping the stored transported object clean. Then, when the carrier 5 is transferred from the upper roller conveyor 6 to the lower roller conveyor 7, or when the carrier 5 is transferred from the lower roller conveyor 7 to the upper roller conveyor 6, the carrier 5 is rotated so that the lid 5a for opening and closing the carrier 5 faces the transfer direction. Using the mechanism 50, the table 26 is rotated 90 degrees based on the table turning angle detected by the position sensor 26a provided in the table 26.

  Further, as shown in FIG. 9, the turntable 51 is provided with a pair of stock sensors 23. When the carrier 5 is placed at the correct position on the table 26, both the pair of stock sensors 23 detect the carrier 5, and both the pair of stock sensors 23 are ON signals. Put out. Further, when the carrier 5 is not placed at the correct position on the table 26, one of the pair of stock sensors 23 is in a state in which the carrier 5 is detected. One of them gives an ON signal. Here, when the lifter 25 delivers the carrier 5 from the upper roller conveyor 6 to the lower roller conveyor 7 or from the lower roller conveyor 7 to the upper roller conveyor 6, the carrier 5 is not placed at the correct position on the table 26. In the worst case, an accident such as dropping the carrier 5 is caused. Therefore, when the position of the carrier 5 is not correct, the safety door driving device (driving means) 2 (not shown) that receives the ON signal from one of the pair of stock sensors 23 issues an alarm and the safety door (opening / closing door) ) 10 is closed and the lifter 25 is stopped. As shown in FIGS. 6 and 7, the lifter 25 is supported and fixed to the cable bear 8 by the coupling member 16, and the cable bear 8 moves between the upper port 27 and the lower port 28 by a cable bear drive mechanism (not shown). Move up and down in conjunction.

  Here, the ladder 47 in FIG. 6 is an emergency inspection ladder used when the worker reaches the maintenance table 48. For example, when the carrier 5 is not placed at the correct position in the lifter 25, the safety door driving device 2 closes the safety door 10 and issues an alarm. Then, the worker climbs the ladder 47 and reaches the maintenance table 48 for maintenance and inspection. Next, the operator opens the safety door 10 using the semi-automatic mode function of the safety door driving device 2 and inserts a hand into the lifter 25 to correct the posture of the carrier 5. When the carrier 5 is placed at the correct position, the alarm is released. After the alarm is released, the worker uses the semi-automatic mode function of the safety door driving device 2 to close the safety door 10 and finish the maintenance inspection work.

  Next, a safety measure device according to this embodiment applied to the safety door (opening / closing door) of the roller conveyor conveyance system described above will be described with reference to FIGS. FIG. 1 is a perspective view showing an outline of a safety door to which the safety measure device according to the present embodiment is applied. FIG. 2 is an exploded view showing a configuration of only a safety door to which the safety measure device according to the present embodiment shown in FIG. 1 is applied. FIG. 3 is a plan view of only the safety door to which the safety measure device according to this embodiment shown in FIG. 1 is applied. FIG. 4 is a sectional view showing a safety door to which the safety measure device according to the present embodiment shown in FIG. 1 is applied and a cover elastically supported by a spring on one side surface thereof.

  As shown in FIGS. 1 to 4, the safety door 10 to which the safety measure device 1 is applied adopts a rack and pinion system in the present embodiment. That is, the rack 12 is attached to the upper part of the safety door 10, and the drive motor 14 slides on the rail 20 through the pinion 15 fixed to the drive motor 14 so as to freely advance and retract (in the direction of the arrow shown in FIG. 3). Thus, the opening / closing operation of the safety door 10 with respect to the opening / closing port (opening) 4 is performed. Here, the opening / closing port 4 is a portion surrounded by the safety door 10 and the outer wall 9. The opening / closing operation of the safety door 10 is controlled based on a safety door drive device (drive means) 2 connected to the drive motor 14. Note that the safety door 10 is used except for the period of maintenance and inspection of the carrier 5 in the lifter 25 and the period in which the upper roller conveyor 6 or the lower roller conveyor 7 performs the transfer operation of the lifter 25 and the carrier 5. When the normal conveyance is performed, the closed state is always maintained.

  The safety measure device 1 includes a cover (edge member) 17, a pair of springs (elastic members) 18, 18, a limit switch (pressure-sensitive means) 19, and an alarm device (notification means) 22. . One end of a pair of elastic springs 18 and 18 is supported and fixed to one side surface (side surface close to the opening / closing port 4) of the safety door 10, and the other ends of the springs 18 and 18 are supported and fixed to the cover 17. The cover 17 is elastically supported and integrated with the safety door 10 via springs 18 and 18. The cover 17 and the springs 18 and 18 are held so that the springs 18 and 18 are in an extended state during a normal opening / closing operation and in a closed state of the safety door 10 with respect to the opening / closing port 4. The cover 17 is preferably formed of an elastic material such as rubber. Thereby, the impact force at the time of a human body being pinched | interposed into the safety door 10 can be reduced more, and safety | security can be ensured more.

  Further, a limit switch 19 is further installed between the pair of springs 18 and 18 on the side surface (side surface close to the opening / closing port 4) on which the spring 18 of the safety door 10 is supported and fixed. The limit switch 19 is turned on to generate a signal when the springs 18 and 18 are compressed by a predetermined size or more. And based on the signal which the limit switch 19 generate | occur | produced, while the alarm device (notification means) 22 generate | occur | produces an alarm, the safety door drive device 2 reverses the drive motor 14, and starts the opening operation of the safety door 10. FIG. Note that the alarm device 22 only needs to be able to notify an alarm to surrounding workers, and may be one that sounds an alarm or that lights a warning light. Further, the alarm device 22 is not always necessary.

  Thus, in the safety door 10 provided with the safety measure device 1 according to the present embodiment, when the maintenance inspection work of the carrier 5 in the lifter 25 described above is finished and the safety door 10 is closed, the operator's A part of the body, such as a finger or a hand, may be pinched. However, even if pinched, the spring 18 having one end supported and fixed to the cover 17 is elastically deformed. Therefore, the force exerted on the human body is only the compressive force of the spring 18. Thus, the pressing force generated by the drive motor 14 that drives the safety door 10 is greatly reduced, the impact load on the human body is reduced, and the operator is not injured.

  Further, the drive motor 14 is reversed by the operation of the limit switch 19 installed on the side surface on which the spring 18 of the safety door 10 is supported and fixed, so that the pinch can be eliminated and the safety of the limit switch 19 can be increased. In operation, an alarm can be issued by the alarm device 22 to notify surrounding workers of the trapping.

  Further, the safety door 1 is provided with a cover 17, a pair of springs 18, 18, and a limit switch 19 that constitute the safety device 1, and is provided on one side surface (side surface close to the opening / closing port 4). Not only when the human body is sandwiched between the outer wall 9 of the opening / closing port 4 and the cover 17 provided on the safety door 10 in the closed state, the human body is in the middle of the closing operation of the safety door 10. Even when contacting the cover 17 provided in the above, the force exerted on the human body is only the compression force of the spring 18, the impact load exerted on the human body is reduced, and further safety can be provided.

  As mentioned above, although this invention is described in said preferable embodiment, this invention is not restrict | limited only to it. Various other embodiments may be made without departing from the spirit and scope of the invention. Furthermore, in this embodiment, although the effect | action and effect by the structure of this invention are described, these effect | actions and effects are examples and do not limit this invention. In addition, the specific examples illustrate the configuration of the present invention and do not limit the present invention.

  Although the above-mentioned embodiment showed the rack and pinion system as a safety door opening and closing system to which the safety device is applied, it is not limited to this. In addition to this, the safety measure device can be applied to a safety door using a known opening / closing method such as a linear motor method.

  Further, in the above-described embodiment, the cover 17, the pair of springs 18, 18 and the limit switch 19 constituting the safety countermeasure device 1 are provided on one side surface (side surface close to the opening / closing port 4) of the safety door 10. It is provided but not limited to it. For example, one end of a pair of springs 18 and 18 and a limit switch 19 are supported and fixed to the side surface of the outer wall 9 close to the safety door 10, and the other end of the springs 18 and 18 is supported and fixed to the cover 17. 18 and 18 may be elastically supported and integrated with the safety door 10. In this case, when the safety door 10 is closed and the human body is sandwiched between the cover 17 provided on the outer wall 9 of the opening / closing port 4 and the safety door 10, the force exerted on the human body is compressed by the spring 18. Only the force is applied, impact load on the human body is reduced, and safety can be provided.

It is a perspective view showing the outline of the safety door to which the safety measure device concerning this embodiment is applied. It is an exploded view which shows the structure of only the safety door to which the safety countermeasure apparatus which concerns on this embodiment shown in FIG. 1 is applied. FIG. 2 is a plan view of only a safety door to which the safety measure device according to the present embodiment shown in FIG. 1 is applied. It is sectional drawing which shows the cover which is elastically supported by the safety door which applied the safety measures apparatus which concerns on this embodiment shown in FIG. 1, and its one side surface with a spring. It is a top view of the typical automatic or semi-automatic opening / closing door based on a prior art. It is a perspective view which shows the outline of the roller conveyor conveyance system centering on the lifter part provided in the ceiling vicinity. It is a top view which shows the outline of the conveyor conveyance system centering on the lifter part provided in the ceiling vicinity shown in FIG. It is a front view which shows the drive roller of a roller conveyor. It is a partial cross section figure which shows a turntable.

Explanation of symbols

1 Safety measures device 2 Safety door drive device (drive means)
4 Opening / closing opening (opening)
10 Safety door (open / close door)
17 Cover (edge member)
18 Spring (elastic member)
19 Limit switch (pressure sensitive means)
22 Alarm device (notification means)

Claims (6)

An elastic member that is disposed at a portion that is in contact with or close to the opening or the opening / closing door of the opening / closing door or the opening / closing door, and is elastic.
An end member that is held by the elastic member and is in contact with or close to either the opening or the open / close door,
One end of the elastic member is connected to the open / close door or the opening, and the other end is connected to the end side member, and the open / close operation of the open / close door is performed in an extended state. A safety device for doors that is compressed by contact with the door. A signal is generated when the elastic member is disposed in contact with or close to one of the opening or the opening of the opening / closing door or the opening / closing door together with the elastic member, and the elastic member is compressed by a predetermined size or more. Further comprising pressure sensitive means,
2. The door according to claim 1, wherein driving means for controlling the opening / closing operation of the opening / closing door stops the opening / closing operation of the opening / closing door or opens the opening / closing door based on the signal. Safety measures device. Informing means for generating an alarm based on the signal,
The safety countermeasure device for an open / close door according to claim 2, further comprising:   The end side member is formed so as to cover a portion that is in contact with or close to the opening or opening of either the opening / closing door or the opening including the elastic member. The safety device for an open / close door according to any one of claims 1 to 3.   The safety device for an open / close door according to any one of claims 1 to 4, wherein the end member is made of an elastic material.   The opening / closing door is provided in a manufacturing factory, and the driving means for controlling the opening / closing operation of the opening / closing door is automatically or based on a signal generated automatically or a signal generated by a human operation. The door safety control device according to any one of claims 1 to 5, which is controlled semi-automatically.

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