JP2007146922A - Adjustment device and adjustment system - Google Patents

Adjustment device and adjustment system Download PDF

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JP2007146922A
JP2007146922A JP2005340395A JP2005340395A JP2007146922A JP 2007146922 A JP2007146922 A JP 2007146922A JP 2005340395 A JP2005340395 A JP 2005340395A JP 2005340395 A JP2005340395 A JP 2005340395A JP 2007146922 A JP2007146922 A JP 2007146922A
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adjustment
screw
longitudinal axis
shaft member
axis direction
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JP5020504B2 (en
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Sousaku Kimura
壮作 木村
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Hephaist Seiko Co Ltd
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Hephaist Seiko Co Ltd
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a high-precision position and posture adjustment device which can adjust the position and posture of an object to be adjusted with an inexpensive and simple mechanism. <P>SOLUTION: The adjustment device 13 includes a telescopic mechanism extendable in a longitudinal axis direction and a universal mechanism 47 attached to the top of the telescopic mechanism. By extending or contracting the telescopic mechanism, the position and posture of a support 15 as the object to be adjusted is adjusted via the universal mechanism 47. The universal mechanism 47 has an in-plane movement mechanism which is movable along a plane perpendicular to the longitudinal axis direction and an oscillating device 23 which can oscillate against the longitudinal axis direction. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、被調整体の位置及び姿勢を調整するための調整装置及び調整システムに関する。   The present invention relates to an adjustment device and an adjustment system for adjusting the position and posture of an object to be adjusted.

レーザ通信装置の送受信装置、例えばビル間のレーザ通信などで使用されるレーザ送信装置及びレーザ受信装置は、双方の光軸を一致させるために送信装置と受信装置との向きを調整する必要があり、このために、レーザ送信装置及びレーザ受信装置には、位置及び姿勢を微調整する調整装置が使用されている。この調整装置は、環境温度の変化によるレーザ送信装置及びレーザ受信装置の支持台や調整装置のわずかな変位による位置及び姿勢の変化を修正するものであって、長手軸線方向に伸縮可能な伸縮機構と、この伸縮機構の先端に取付けられた自在機構とを備えている。そして、複数個(通常3個)の調整装置によって支持台となる被調整体を支持し、各調整機構の長さを変化させることによって被調整体を介してレーザ送信装置及びレーザ受信装置の位置及び姿勢を修正する。   Laser transmitter / receiver of laser communication device, for example, laser transmitter and laser receiver used in laser communication between buildings, etc. need to adjust the direction of transmitter and receiver to match both optical axes For this reason, an adjustment device that finely adjusts the position and orientation is used in the laser transmission device and the laser reception device. This adjustment device corrects a change in position and posture due to slight displacement of the support and adjustment device of the laser transmission device and laser reception device due to a change in environmental temperature, and can be expanded and contracted in the longitudinal axis direction. And a free mechanism attached to the tip of the telescopic mechanism. And the to-be-adjusted body used as a support stand is supported by several (usually 3) adjustment apparatuses, and the position of a laser transmitter and a laser receiving apparatus is adjusted via an to-be-adjusted body by changing the length of each adjustment mechanism. And correct posture.

レーザ通信で使用されるレーザ送信装置及びレーザ受信装置は、通常、屋外に設置されるため、レーザ送信装置やレーザ受信装置を支持する支持台やその調整装置が気温の変化により伸縮して、支持台の取付位置や姿勢に変化が生じることがある。ところが、支持台や調整装置は建物の床面や壁面などに固定されており、支持台や調整装置の寸法の変化に直ちに対応することができないため、支持台にひずみを生じさせ、レーザ送信装置やレーザ受信装置の向きなどに誤差を生じさせたり、支持台と調整装置との接続部が破損したりするという事故が発生することがあった。
また、従来技術の調整装置では、伸縮機構としてボールねじを用い、微調整を可能とするために、減速機を介してモータでボールねじを回転させて微調整を行うものが多い。ところが、ボールねじを使用すると、ねじのピッチが大きいので、微調整するために減速機を使用するか分解能の高いモータを使用することになり、調整装置が高価になるという問題があった。また、ボールねじは摩擦係数が低いためモータに常時通電しておかなければ風などによる長手軸線方向の負荷変動に対しボールねじが回転してしまうという問題もあった。
Since laser transmitters and laser receivers used in laser communications are usually installed outdoors, the support base that supports the laser transmitters and laser receivers and its adjustment device expands and contracts due to changes in temperature and supports them. Changes may occur in the mounting position and posture of the base. However, since the support base and the adjusting device are fixed to the floor or wall surface of the building and cannot immediately respond to changes in the dimensions of the support base or the adjusting device, the support base is distorted, and the laser transmitting device In some cases, an error may occur in the orientation of the laser receiver or the orientation of the laser receiver, or the connection between the support base and the adjusting device may be damaged.
In addition, many conventional adjustment devices use a ball screw as an expansion / contraction mechanism and perform fine adjustment by rotating the ball screw with a motor via a speed reducer in order to enable fine adjustment. However, when a ball screw is used, the pitch of the screw is large, so that a reduction gear is used for fine adjustment or a motor with high resolution is used, and there is a problem that the adjustment device becomes expensive. Further, since the ball screw has a low coefficient of friction, there is a problem that the ball screw rotates with respect to load fluctuations in the longitudinal axis direction due to wind or the like unless the motor is always energized.

よって、本発明の目的は、従来技術に存する問題を解消して、安価で簡単な機構により支持台などの被調整体の位置及び姿勢を調整することを可能とする高精度の位置及び姿勢の調整装置及び調整システムを提供することにある。   Therefore, the object of the present invention is to solve the problems existing in the prior art and to adjust the position and posture of the adjusted body such as the support base with an inexpensive and simple mechanism. To provide an adjustment device and an adjustment system.

本発明は、上記目的に鑑み、長手軸線方向に伸縮可能な伸縮機構と、該伸縮機構の先端に取付けられた自在機構とを備え、前記伸縮機構を伸縮させることにより前記自在機構を介して被調整体の位置及び姿勢を調整する調整装置において、前記自在機構が、前記長手軸線方向に直交する面に沿って移動可能な平面移動機構と、前記長手軸線方向に対して揺動可能な揺動機構とを有することを特徴とする調整機構を提供する。   In view of the above-described object, the present invention includes an expansion / contraction mechanism that can be expanded and contracted in the longitudinal axis direction, and a free mechanism that is attached to the distal end of the expansion / contraction mechanism. In the adjusting device for adjusting the position and posture of the adjusting body, the universal mechanism is a plane moving mechanism that is movable along a plane orthogonal to the longitudinal axis direction, and a swing that is swingable with respect to the longitudinal axis direction. And an adjusting mechanism.

本発明の調整装置は、被駆動体である支持台と調整装置との接続部である揺動装置の位置が環境温度の変化によって変動しても、自在機構が、長手軸線方向に直交する面に沿って移動可能な平面移動機構と、長手軸線方向に対して揺動可能な揺動機構とを有しているので、位置の変動に無理なく追随することができる。   The adjustment device according to the present invention is a surface in which the universal mechanism is perpendicular to the longitudinal axis direction even if the position of the swing device that is a connection portion between the support base that is a driven body and the adjustment device fluctuates due to a change in environmental temperature. Therefore, it is possible to follow the change in position without difficulty.

前記自在機構が、前記長手軸線方向に平行で且つ互いに平行に配置された一対の平行板ばねからなる平面移動機構と、該一対の平行板ばねに支持された移動体に設けられた球面座からなる揺動装置とによって構成されていてもよい。このように、平面移動機構が互いに平行に配置された一対の平行板ばねによって構成されていれば、長手軸線方向に対しては高い剛性を有するので、外部から被調整体である支持台に加えられる荷重に対して剛性が高く、支持台の姿勢保持に与える影響を低く抑えることができる。   The universal mechanism includes a plane moving mechanism including a pair of parallel leaf springs arranged in parallel to each other in the longitudinal axis direction and a spherical seat provided on a moving body supported by the pair of parallel leaf springs. It may be comprised with the rocking | fluctuation apparatus which becomes. Thus, if the plane moving mechanism is constituted by a pair of parallel leaf springs arranged in parallel to each other, it has high rigidity in the longitudinal axis direction, so that it can be added from the outside to the support base that is the body to be adjusted. The rigidity is high with respect to the applied load, and the influence on the posture maintenance of the support base can be kept low.

また、前記自在機構が、前記伸縮機構の先端に配置された直交面に複数の球体を介して取り付けられており、該複数の球体を介して移動する移動体と、該移動体に設けられた球面座からなる揺動装置とによって構成されていてもよい。このように、複数の球体を介して取り付けることによって、安価でかつ長手軸線方向に対して高い剛性を有するようにできる。また、揺動装置として一般的に使用する球面座を使用すれば、球面座は安価であるので、本発明の調整装置の製造コストを大きく低下させることができる。   In addition, the universal mechanism is attached to an orthogonal plane disposed at the tip of the telescopic mechanism via a plurality of spheres, and a movable body that moves via the plurality of spheres is provided on the movable body. You may be comprised by the rocking | fluctuation apparatus which consists of spherical seats. Thus, by attaching via a plurality of spheres, it can be inexpensive and have high rigidity in the longitudinal axis direction. Further, if a spherical seat that is generally used as a swinging device is used, the spherical seat is inexpensive, so that the manufacturing cost of the adjusting device of the present invention can be greatly reduced.

前記伸縮機構はいわゆるアクメねじのように雄ねじと雌ねじがすべり面として作用する差動ねじ機構であることが好ましい。この差動ねじ機構は、外周面に雄ねじが設けられた回転不能な軸部材と、前記軸部材が挿入され内周面に前記軸部材の雄ねじと螺合する雌ねじが設けられると共に、外周面に前記雌ねじと異なるピッチの雄ねじが設けられ、前記軸部材の周りを回転可能な内筒体と、前記内筒体の外側に設けられ、内周面に前記内筒体の雄ねじと螺合する雌ねじが設けられた回転不能な外筒体とを備えるものが好ましい。このように構成することによって、前記軸部材周りに前記内筒体を回転させることにより、前記差動ねじ機構の長さを調整することができる。そして、このような差動ねじ機構を使用することにより、調整装置の長さの微調整を可能とさせる一方、差動ねじのねじピッチは小さいので長手軸線方向の荷重に対しても自己保持することができ、ボールねじや減速機などの高価で且つ重い部品の使用を回避することが可能になる。   The expansion / contraction mechanism is preferably a differential screw mechanism in which a male screw and a female screw act as a sliding surface like a so-called acme screw. The differential screw mechanism includes a non-rotatable shaft member having a male screw provided on the outer peripheral surface, a female screw that is inserted into the inner peripheral surface and is engaged with the male screw of the shaft member, and is provided on the outer peripheral surface. A male screw having a pitch different from that of the female screw is provided, an inner cylinder that is rotatable around the shaft member, and a female screw that is provided on the outer side of the inner cylinder and is engaged with the male screw of the inner cylinder on an inner peripheral surface. It is preferable to include a non-rotatable outer cylindrical body provided with. With this configuration, the length of the differential screw mechanism can be adjusted by rotating the inner cylinder around the shaft member. By using such a differential screw mechanism, it is possible to finely adjust the length of the adjusting device, while the screw pitch of the differential screw is small, so that it can hold itself against a load in the longitudinal axis direction. It is possible to avoid the use of expensive and heavy parts such as a ball screw and a speed reducer.

前記差動ねじ機構は、前記軸部材と前記外筒体とを互いに離れる方向に付勢するコイルばねを備えることがさらに好ましい。このようなコイルばねを設けることにより、外筒体と内筒体との間並びに内筒体と軸部材との間の螺合部におけるバックラッシュを防止し、調整装置の長さの調整精度を向上させることができる。   More preferably, the differential screw mechanism includes a coil spring that urges the shaft member and the outer cylindrical body in directions away from each other. By providing such a coil spring, it is possible to prevent backlash at the threaded portion between the outer cylinder and the inner cylinder and between the inner cylinder and the shaft member, and to improve the adjustment accuracy of the length of the adjusting device. Can be improved.

本発明は、また、上記調整装置を少なくとも3個有し、該少なくとも3個の調整装置の自在機構よって支持された被調整体を備えるようにした調整システムを提供する。この調整システムでは、前記少なくとも3個の調整装置の各々の差動ねじ機構の長さを変化させることにより、前記被調整体の位置及び姿勢を調整することができ、温度変化などに起因して被調整体の位置や姿勢が変化しても、調整装置の伸縮機構を伸縮することによって被調整体の位置や姿勢の変化を修正することができる。   The present invention also provides an adjustment system that includes at least three adjustment devices and includes an object to be adjusted supported by a universal mechanism of the at least three adjustment devices. In this adjustment system, the position and posture of the object to be adjusted can be adjusted by changing the length of the differential screw mechanism of each of the at least three adjustment devices, which is caused by a temperature change or the like. Even if the position and orientation of the object to be adjusted change, the change in the position and orientation of the object to be adjusted can be corrected by extending and contracting the expansion and contraction mechanism of the adjusting device.

前記少なくとも3個の調整装置は、伸縮機構の差動ねじ機構が個別に伸縮するので、伸縮によって被調整体(支持台)との接続部にひずみが生じる。このひずみは、所定の一点(一般には重心)を中心として放射状に起こるので、生じたひずみを十分に吸収するためには、前記少なくとも3個の調整装置が、前記被調整体上に定められた一点を中心として、前記平行板ばねの変位する方向が放射状となるように配置されることが好ましい。   In the at least three adjustment devices, the differential screw mechanism of the expansion / contraction mechanism individually expands / contracts, so that distortion occurs in the connection portion with the adjusted body (support base) due to expansion / contraction. Since this distortion occurs radially around a predetermined point (generally the center of gravity), in order to sufficiently absorb the generated distortion, the at least three adjusting devices are defined on the object to be adjusted. It is preferable that the parallel leaf springs are arranged so that the direction of displacement of the parallel leaf springs is a radial shape around one point.

本発明によれば、伸縮機構の伸縮及び自在機構を構成する平行板ばねの撓みと揺動装置の揺動により、温度変化に起因する被調整体(支持台)の位置や姿勢の変化を修正することができる。また、伸縮機構である差動ねじ機構、自在機構である平行板ばねや球面座は、いずれも単純な構造であり、安価であるので、調整装置の製造コストを安価にすることができる。したがって、支持台などの被調整体の寸法変化を容易に修正することができ、被調整体にひずみを生じさせない安価で製造の簡単な調整装置及び調整システムが実現される。   According to the present invention, the change in the position and orientation of the body to be adjusted (support base) due to the temperature change is corrected by the expansion and contraction of the expansion and contraction mechanism and the bending of the parallel leaf spring constituting the universal mechanism and the swing of the swing device. can do. In addition, the differential screw mechanism, which is an expansion / contraction mechanism, and the parallel leaf spring and spherical seat, which are free mechanisms, all have a simple structure and are inexpensive, so that the manufacturing cost of the adjusting device can be reduced. Therefore, the dimensional change of the adjusted body such as the support base can be easily corrected, and an inexpensive and simple manufacturing adjusting device and adjusting system that do not cause distortion of the adjusted body are realized.

以下、図面を参照して、本発明の好ましい実施形態について説明する。
図1は、本発明の調整装置の第1の実施形態の断面図、図2は、本発明の調整装置の第2の実施形態を示す断面図、図3は、図2の調整装置の直動軸受の上側球体を保持する構成を示す平面図、図4は、図2の調整装置の直動軸受の下側球体を保持する構成を示す平面図、図5は、本発明の調整装置を用いた調整システムの模式図である。
Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
FIG. 1 is a cross-sectional view of a first embodiment of the adjusting device of the present invention, FIG. 2 is a cross-sectional view showing a second embodiment of the adjusting device of the present invention, and FIG. 3 is a direct view of the adjusting device of FIG. 4 is a plan view showing a configuration for holding the upper sphere of the dynamic bearing, FIG. 4 is a plan view showing a configuration for holding the lower sphere of the linear motion bearing of the adjusting device in FIG. 2, and FIG. 5 shows the adjusting device of the present invention. It is a schematic diagram of the used adjustment system.

図5に示されているように、本発明の調整システム11は、少なくとも3個の調整装置13又は49と、これら調整装置13又は49に取り付けられて支持される被調整体である支持台15とを備え、この支持台15の上にレーザ送信装置やレーザ受信装置などが取り付けられる。   As shown in FIG. 5, the adjustment system 11 of the present invention includes at least three adjustment devices 13 or 49 and a support base 15 that is an object to be adjusted and supported by the adjustment devices 13 or 49. And a laser transmitting device, a laser receiving device, and the like are mounted on the support base 15.

第1の実施形態の調整装置13は、図1に示されているように、ハウジング17と、ハウジング17内に収容される伸縮機構と、該伸縮機構の先端に取り付けられ、一対の平行板ばね21と該平行板ばね21によって支持されている揺動装置23とからなる自在機構47を備えている。図示されている実施形態では、伸縮機構として、差動ねじ機構19が使用されている。また、ハウジング17には、差動ねじ機構19と平行に延びる回転軸25が回転可能に支持されており、差動ねじ機構と回転軸25は平歯車により噛合している。回転軸25の上端はハウジング17の上方に突出し、回転軸25の下端はハウジング17の下方に突出し、例えばスパイラル溝のついたモータの軸端を回転軸端部の六角穴に係合し、別に設けたコンピュータにより演算した移動量分回転させるといった形で操作者がその端部にアクセスできるようになっている。   As shown in FIG. 1, the adjusting device 13 of the first embodiment includes a housing 17, a telescopic mechanism housed in the housing 17, and a pair of parallel leaf springs attached to the tip of the telescopic mechanism. 21 and a swing mechanism 47 that is supported by the parallel leaf spring 21 is provided. In the illustrated embodiment, a differential screw mechanism 19 is used as the expansion / contraction mechanism. A rotating shaft 25 extending in parallel with the differential screw mechanism 19 is rotatably supported on the housing 17, and the differential screw mechanism and the rotating shaft 25 are engaged with each other by a spur gear. The upper end of the rotating shaft 25 protrudes above the housing 17, and the lower end of the rotating shaft 25 protrudes below the housing 17. For example, the shaft end of a motor with a spiral groove is engaged with a hexagonal hole at the end of the rotating shaft. The operator can access the end portion by rotating it by the amount of movement calculated by the provided computer.

差動ねじ機構19は、ハウジング17に固定された回転不能な軸部材27と、軸部材27が挿入され、軸部材27の周りを回転可能な内筒体29と、内筒体29が挿入された外筒体31とを含む。軸部材27の外周面には雄ねじ27aが設けられている。また、内筒体29の内周面には、軸部材27の雄ねじ27aに螺合する雌ねじ29aが設けられており、内筒体29の外周面には、内周面の雌ねじと29a異なるピッチの雄ねじ29bが設けられている。さらに、外筒体31の内周面には、内筒体29の雄ねじ29bと螺合する雌ねじ31aが設けられている。一方、外筒体31の外周面には、長手軸線方向に延びる溝31bが設けられており、この溝31bにハウジング17に固定された回転防止装置33のボールを係合させることにより、外筒体31の長手軸線方向への移動を許容しながら外筒体31の回転を防止するようにしている。なお、いずれのねじ27a、29a、29b、31aも右ねじであるとする。   In the differential screw mechanism 19, a non-rotatable shaft member 27 fixed to the housing 17, a shaft member 27 is inserted, an inner cylinder body 29 rotatable around the shaft member 27, and an inner cylinder body 29 are inserted. The outer cylinder 31 is included. A male screw 27 a is provided on the outer peripheral surface of the shaft member 27. Further, a female screw 29a is provided on the inner peripheral surface of the inner cylindrical body 29 and is screwed into the male screw 27a of the shaft member 27. The outer cylindrical surface of the inner cylindrical body 29 has a pitch different from that of the female screw on the inner peripheral surface. Male screw 29b is provided. Further, a female screw 31 a that is screwed with a male screw 29 b of the inner cylinder 29 is provided on the inner peripheral surface of the outer cylinder 31. On the other hand, a groove 31b extending in the longitudinal axis direction is provided on the outer peripheral surface of the outer cylinder 31. By engaging the ball of the anti-rotation device 33 fixed to the housing 17 in this groove 31b, the outer cylinder The outer cylinder 31 is prevented from rotating while allowing the body 31 to move in the longitudinal axis direction. It is assumed that any of the screws 27a, 29a, 29b, and 31a are right-hand screws.

差動ねじ機構19はこのような構成をとっているので、固定の軸部材27の周りに内筒体29を回転させると、外筒体31が、軸部材27に対する内筒体29の移動方向とは逆方向に、内筒体29に対して移動する。したがって、例えば、内筒体29の雌ねじ29aのピッチを1mm、雄ねじ29bのピッチを1.2mmに設定した場合、内筒体29を一回転させることにより、軸部材27に対して外筒体31を0.2mだけ移動させることができ、減速機等を用いなくても、差動ねじ機構19全体の長さをより微細に調整することが可能となる。また、このような差動ねじ機構19は、ボールねじと減速機などよりも軽量で安価であるので、高精度の調整が可能でありながら、軽量且つ安価な調整装置を実現できる。   Since the differential screw mechanism 19 has such a configuration, when the inner cylinder 29 is rotated around the fixed shaft member 27, the outer cylinder 31 moves in the moving direction of the inner cylinder 29 with respect to the shaft member 27. It moves relative to the inner cylinder 29 in the opposite direction. Therefore, for example, when the pitch of the internal thread 29a of the inner cylindrical body 29 is set to 1 mm and the pitch of the external thread 29b is set to 1.2 mm, the inner cylindrical body 29 is rotated once to thereby rotate the outer cylindrical body 31 with respect to the shaft member 27. Can be moved by 0.2 m, and the entire length of the differential screw mechanism 19 can be finely adjusted without using a speed reducer or the like. In addition, such a differential screw mechanism 19 is lighter and cheaper than a ball screw and a speed reducer, so that it is possible to realize a light and inexpensive adjustment device while being able to adjust with high accuracy.

上述したように軸部材27に対して移動する外筒体31の先端部に、一対の平行板ばね21を介して揺動装置23が取り付けられる。また、外筒体31の先端部には蓋部35が設けられ、蓋部35から長手軸線方向に沿って、外筒体31内の軸部材27の端部に向かってばねガイド37が下方に延びている。そして、外筒体31の蓋部35と軸部材27の先端部との間には、ばねガイド37に沿ってコイルばね39が配置され、外筒体31と軸部材27とを互いに離れる方向に付勢している。この付勢ばね39は、外筒体31の雌ねじ31aと内筒体29の雄ねじ29bとの螺合部、並びに、内筒体29の雌ねじ29aと軸部材27の雄ねじ27aとの螺合部におけるバックラッシュの発生を防止させ、差動ねじ機構19の長さの調整精度をさらに高めさせている。   As described above, the swing device 23 is attached to the distal end portion of the outer cylindrical body 31 that moves relative to the shaft member 27 via the pair of parallel leaf springs 21. Further, a lid portion 35 is provided at the distal end portion of the outer cylindrical body 31, and the spring guide 37 is directed downward from the lid portion 35 toward the end portion of the shaft member 27 in the outer cylindrical body 31 along the longitudinal axis direction. It extends. A coil spring 39 is disposed along the spring guide 37 between the lid portion 35 of the outer cylindrical body 31 and the distal end portion of the shaft member 27, so that the outer cylindrical body 31 and the shaft member 27 are separated from each other. Energized. This urging spring 39 is in a threaded portion between the female screw 31 a of the outer cylindrical body 31 and the male screw 29 b of the inner cylindrical body 29, and in a threaded portion of the female screw 29 a of the inner cylindrical body 29 and the male screw 27 a of the shaft member 27. The occurrence of backlash is prevented, and the accuracy of adjusting the length of the differential screw mechanism 19 is further increased.

ハウジング17に回転可能に支持される回転軸25のうちハウジング17内に収容されている部分の外周面には、歯車25aが形成されており、内筒体29の下端部に固定された歯車41と噛合している。よって、例えばスパイラル溝のついたモータの軸端を回転軸端部の六角穴に係合し、別に設けたコンピュータにより演算した移動量分回転させるといった形で回転軸25にアクセスして回転軸25を回転させることにより、軸部材27に対して内筒体29を回転させ、差動ねじ機構19を伸縮させることができる。   A gear 25 a is formed on the outer peripheral surface of the portion of the rotating shaft 25 that is rotatably supported by the housing 17 and is accommodated in the housing 17, and the gear 41 is fixed to the lower end portion of the inner cylindrical body 29. Is engaged. Therefore, for example, the shaft end of the motor with the spiral groove is engaged with the hexagonal hole at the end of the rotation shaft, and the rotation shaft 25 is accessed by rotating the rotation shaft 25 by the amount of movement calculated by a separately provided computer. Is rotated, the inner cylinder 29 is rotated with respect to the shaft member 27, and the differential screw mechanism 19 can be expanded and contracted.

図1に示されている第1の実施形態では、揺動装置23として、基台に設けられた球状の凹部内に球状体24を収容し球関節(ボール−ソケット形継手)式に接続した球面座が使用されており、この球面座の球状体24上に支持台15が取り付けられている。しかしながら、球面座は、後述する第2の実施形態のように、中心に配置された球状体を複数の小球で支持する構造であってもよい。   In the first embodiment shown in FIG. 1, a spherical body 24 is accommodated in a spherical concave portion provided in a base as the swing device 23 and connected to a ball joint (ball-socket joint) type. A spherical seat is used, and a support base 15 is attached on the spherical body 24 of the spherical seat. However, the spherical seat may have a structure in which a spherical body arranged at the center is supported by a plurality of small spheres as in the second embodiment described later.

揺動装置23が取り付けられた一対の平行板ばね21は、図1において左右方向から力を受けたときに撓んで支持台15を平行に移動させる機能を果たすものであり、板ばねの厚さは、移動させる際の剛性や支持台15の最大変位量などを考慮して、適宜に選択される。   The pair of parallel leaf springs 21 to which the oscillating device 23 is attached functions to bend and move the support base 15 in parallel when receiving force from the left and right directions in FIG. Is appropriately selected in consideration of the rigidity at the time of movement, the maximum amount of displacement of the support base 15, and the like.

第1の実施形態では、一対の平行板ばね21の間に、差動ねじ機構19の先端と揺動装置23との間に複数の球体45がさらに配置されており、この球体45が、一対の平行板ばね21と共に、差動ねじ機構の長手軸線方向から支持台15に加えられる荷重を支持するようになっている。この荷重は、屋外に設置されている支持台15に風が吹き付けた時などに生じるものであって、このように揺動装置23を一対の平行板ばね21だけではなく球体45でも支持することにより、支持台15を支持する板ばね21の長手軸線方向の剛性が低くても十分に大きな荷重を支持することが可能になり、平行板ばね21の横方向からの荷重に対する撓み性を十分に確保することが容易となる。なお、平行板ばね21が撓んだときには、揺動装置23の長手軸線方向への移動を伴うことになるが、この移動はごく僅かであるので無視することができる。   In the first embodiment, a plurality of spheres 45 are further disposed between the tip of the differential screw mechanism 19 and the swing device 23 between the pair of parallel leaf springs 21. With the parallel leaf spring 21, a load applied to the support base 15 from the longitudinal axis direction of the differential screw mechanism is supported. This load is generated, for example, when wind blows on the support table 15 installed outdoors. Thus, the swing device 23 is supported not only by the pair of parallel leaf springs 21 but also by the sphere 45. This makes it possible to support a sufficiently large load even if the leaf spring 21 supporting the support base 15 has a low rigidity in the longitudinal axis direction, and the flexibility of the parallel leaf spring 21 with respect to the load from the lateral direction is sufficiently high. It is easy to ensure. When the parallel leaf spring 21 is bent, the swing device 23 is moved in the longitudinal axis direction, but this movement is negligible and can be ignored.

第1の実施形態とは異なる構成を有する第2の実施形態の調整装置49は、図2に示すように、ハウジング17と、このハウジング17内に収容される伸縮機構と、該伸縮機構の先端に取り付けられた揺動装置51とからなる自在機構53を有している。この実施形態では、伸縮機構である差動ねじ機構19は、第1の実施形態とほぼ同様なので、以下の説明では、同じ部品には同じ符号を付して説明する。   As shown in FIG. 2, the adjusting device 49 according to the second embodiment having a configuration different from that of the first embodiment includes a housing 17, a telescopic mechanism accommodated in the housing 17, and a tip of the telescopic mechanism. And a swing mechanism 51 including a swinging device 51 attached to the head. In this embodiment, the differential screw mechanism 19 that is an expansion / contraction mechanism is substantially the same as that of the first embodiment. Therefore, in the following description, the same components are denoted by the same reference numerals.

差動ねじ機構19は、ハウジング17に固定された回転不能な軸部材27と、軸部材27が挿入され、軸部材27の周りを回転可能な内筒体29と、内筒体29が挿入された外筒体31とを含む構成となっている。そして、差動ねじ機構19と平行に延びる回転軸25の外周面に形成された歯車25aが内筒体29の下端部に固定された歯車41と噛合している。また、軸部材27の外周面には雄ねじ27aが設けられている。また、内筒体29の内周面には、軸部材27の雄ねじ27aに螺合する雌ねじ29aが設けられており、内筒体29の外周面には、内周面の雌ねじ29aと異なるピッチの雄ねじ29bが設けられている。   In the differential screw mechanism 19, a non-rotatable shaft member 27 fixed to the housing 17, a shaft member 27 is inserted, an inner cylinder body 29 rotatable around the shaft member 27, and an inner cylinder body 29 are inserted. The outer cylinder 31 is included. A gear 25 a formed on the outer peripheral surface of the rotary shaft 25 extending in parallel with the differential screw mechanism 19 meshes with a gear 41 fixed to the lower end portion of the inner cylindrical body 29. A male screw 27 a is provided on the outer peripheral surface of the shaft member 27. Further, a female screw 29a that is screwed into the male screw 27a of the shaft member 27 is provided on the inner peripheral surface of the inner cylindrical body 29, and a pitch different from that of the female screw 29a on the inner peripheral surface is provided on the outer peripheral surface of the inner cylindrical body 29. Male screw 29b is provided.

さらに、外筒体31の内周面には、内筒体29の雄ねじ29bと螺合する雌ねじ31aが設けられている。一方、外筒体31の外周面には、長手軸線方向に延びる溝31bが設けられており、この溝31bにハウジング17に固定された回転防止装置33のボールを係合させることにより、外筒体31の長手軸線方向への移動を許容しながら外筒体31の回転を防止するようになっている。なお、いずれのねじ27a,29a,29b,31aも右ねじである。   Further, a female screw 31 a that is screwed with a male screw 29 b of the inner cylinder 29 is provided on the inner peripheral surface of the outer cylinder 31. On the other hand, a groove 31b extending in the longitudinal axis direction is provided on the outer peripheral surface of the outer cylinder 31. By engaging the ball of the anti-rotation device 33 fixed to the housing 17 in this groove 31b, the outer cylinder The outer cylinder 31 is prevented from rotating while allowing the body 31 to move in the longitudinal axis direction. All the screws 27a, 29a, 29b, and 31a are right-hand screws.

差動ねじ機構19はこのような構成をとっているので、第1の実施形態と同様に作動することによって、同様に微細な調整をすることが可能となる。そして、ばねガイド37に沿ってコイルばね39が配置されているので、ボールねじと減速機などよりも軽量で安価でありながら、高精度の調整が可能な調整機構を実現することができる。   Since the differential screw mechanism 19 has such a configuration, it can be similarly finely adjusted by operating in the same manner as in the first embodiment. And since the coil spring 39 is arrange | positioned along the spring guide 37, the adjustment mechanism in which a highly accurate adjustment is possible can be implement | achieved while being lightweight and cheaper than a ball screw, a reduction gear, etc.

外筒体31の先端部に設けられた蓋部35に取り付けられたプレート55には、複数の球体57,59を介して自在機構53が取り付けられている。自在機構53は、プレート55から立ち上げられたフランジ61が半径方向内方に向かうつば部を有しており、該つば部の対向する二面のうちの一方の面61aは平面状に形成され、他方の面61bには直線溝61cが形成されている。一方、揺動装置51の外筒の上端および下端から半径方向外方に延びるフランジ面のうちフランジ61のつば部の面61aと対向する面51aは平面状に形成され、フランジ61のつば部の面61bと対向する面51bには直線溝61cと対向する位置に直線溝51cが形成されている。そして、球体59が球体保持部材73によって保持された状態で面51aと面61aとの間に狭持され、球体57が球体保持部材71によって保持された状態で直線溝51c,61cに係合しつつ面51bと面61bの間に狭持されている(図3及び4を参照)。すなわち、この複数の球体57,59は、揺動装置51を支持する平面軸受を構成するものであって、この直動軸受の存在によって、揺動装置51は所定の方向のみに軽い力で移動することができる。なお、この直動軸受は、フランジ61のつば部の面61a,61bをともに平面状に形成し、かつ、揺動装置51の外筒のフランジ面51a,51bもともに平面状に形成して、球体保持部材71に保持された球体57を面51bと面61bの間に狭持すると共に、球体保持部材73に保持された球体59を面51aと面61aの間に狭持し、軌道面を形成することなく、任意の方向に移動できるように平面軸受として構成しても良い。   A universal mechanism 53 is attached to a plate 55 attached to a lid 35 provided at the distal end portion of the outer cylindrical body 31 via a plurality of spheres 57 and 59. The free mechanism 53 has a flange portion in which a flange 61 raised from the plate 55 faces inward in the radial direction, and one surface 61a of two opposing surfaces of the flange portion is formed in a flat shape. A straight groove 61c is formed on the other surface 61b. On the other hand, of the flange surfaces extending radially outward from the upper end and the lower end of the outer cylinder of the swinging device 51, the surface 51a facing the surface 61a of the flange portion of the flange 61 is formed in a flat shape. A straight groove 51c is formed on the face 51b facing the face 61b at a position facing the straight groove 61c. The sphere 59 is held between the surfaces 51 a and 61 a while being held by the sphere holding member 73, and the sphere 57 is engaged with the linear grooves 51 c and 61 c while being held by the sphere holding member 71. While being sandwiched between the surface 51b and the surface 61b (see FIGS. 3 and 4). That is, the plurality of spheres 57 and 59 constitute a planar bearing that supports the swing device 51. Due to the presence of the linear motion bearing, the swing device 51 moves with a light force only in a predetermined direction. can do. In this linear motion bearing, the flange surfaces 61a and 61b of the flange 61 are both formed in a planar shape, and the flange surfaces 51a and 51b of the outer cylinder of the swing device 51 are also formed in a planar shape. While holding the sphere 57 held by the sphere holding member 71 between the surface 51b and the surface 61b, the sphere 59 held by the sphere holding member 73 is held between the surface 51a and the surface 61a, and the track surface is You may comprise as a flat bearing so that it can move to arbitrary directions, without forming.

揺動装置51は、球面座によって揺動可能になっている。この球面座は、中心に配置された大径の球体63が複数の小球65で支持される構造となっており、軽い力で揺動することはできるように構成されている。そして、中心の球体63に被調整体である支持台15が固定されている。   The swing device 51 can swing by a spherical seat. The spherical seat has a structure in which a large-diameter sphere 63 arranged at the center is supported by a plurality of small spheres 65, and is configured to be able to swing with a light force. And the support stand 15 which is a to-be-adjusted body is being fixed to the spherical body 63 of center.

第2の実施形態では、複数の球体57,59からなる直動軸受又は平面軸受を介して自在機構53が取り付けられており、揺動装置51は、中心に配置された大径の球体63が複数の小球65で支持される構造の球面座によって揺動可能になっているので、長手軸線方向の剛性が充分に高い構造でありながら、軽い力で移動又は揺動することが可能であり、容易に調整可能となる。しかしながら、球面座は、第1の実施形態のように、基台に設けられた凹部内に球体を収容し球関節式に接続した構造であってもよい。   In the second embodiment, the free mechanism 53 is attached via a linear motion bearing or a planar bearing made up of a plurality of spheres 57, 59, and the swinging device 51 has a large-diameter sphere 63 arranged at the center. Since it is swingable by a spherical seat having a structure supported by a plurality of small spheres 65, it can move or swing with a light force while having a sufficiently high rigidity in the longitudinal axis direction. Easy to adjust. However, as in the first embodiment, the spherical seat may have a structure in which a spherical body is accommodated in a concave portion provided in the base and connected in a spherical joint manner.

本発明の調整装置及び調整システムは以上のように構成されており、温度変化による支持台15の位置及び姿勢の変化を修正するときには、個々の伸縮機構を伸縮させるので、支持台15の取付部におけるひずみは、支持台15の中心から放射状に起こると考えることができる。したがって、この支持台15の中心に向って変位する方向が放射状となるように配置することが有効である。そして、中心の位置Oにレーザ送信装置の送信部や、レーザ受信装置の受信部を配置することが好ましい。   The adjustment device and the adjustment system of the present invention are configured as described above. When correcting changes in the position and posture of the support table 15 due to temperature changes, the individual expansion / contraction mechanisms are expanded and contracted. It can be considered that the strain in is generated radially from the center of the support base 15. Therefore, it is effective to dispose the support base 15 so that the direction of displacement toward the center is radial. And it is preferable to arrange | position the transmission part of a laser transmitter, and the receiver of a laser receiver in the center position O. FIG.

次に、図1、図2及び図5に示されている調整装置13,49及び調整システム11の動作について説明する。
調整システム11において、支持台15の高さ位置を調整する場合には、支持台15を支持する調整装置13,49全てについて、同じ量だけ、調整装置13,49の長さを伸縮させる。一方、支持台15の姿勢を変える場合には、所望の姿勢が得られるようにそれぞれの調整装置13,49の長さを調整する。なお、調整装置13,49に対する支持台15の姿勢変化は調整装置13,49の先端に取り付けられた揺動装置23,51、すなわち球面座の球状体の回転と伸縮機構に直交する方向の変位によって可能となる。このとき、支持台15の中心から放射状に変位する取付部のひずみは、揺動装置23,51の球面座が回転し、伸縮機構に直交する方向に変位することによって無理なく吸収することができる。
Next, the operation of the adjusting devices 13 and 49 and the adjusting system 11 shown in FIGS. 1, 2 and 5 will be described.
When adjusting the height position of the support base 15 in the adjustment system 11, the lengths of the adjustment apparatuses 13 and 49 are expanded or contracted by the same amount for all the adjustment apparatuses 13 and 49 that support the support base 15. On the other hand, when the posture of the support base 15 is changed, the lengths of the respective adjusting devices 13 and 49 are adjusted so as to obtain a desired posture. Note that the posture change of the support base 15 with respect to the adjusting devices 13 and 49 is the displacement of the swinging devices 23 and 51 attached to the tips of the adjusting devices 13 and 49, that is, the rotation of the spherical body of the spherical seat and the direction orthogonal to the expansion and contraction mechanism. Is possible. At this time, the distortion of the mounting portion that is radially displaced from the center of the support base 15 can be absorbed without difficulty by rotating the spherical seats of the oscillating devices 23 and 51 and displacing them in the direction orthogonal to the expansion and contraction mechanism. .

調整装置13,49の長さを調整するためには、専用のレンチなどを回転軸25の端部に嵌合させ、あるいはパルスモータなどの駆動源によって回転軸25を回転させる。すると、回転軸25の外周面に設けられた歯車歯25aと差動ねじ機構19の内筒体29の歯車41との噛合により、回転軸25の回転が内筒体29に伝達され、固定された軸部材27の周りを内筒体29が回転する。内筒体29が回転すると、内筒体29はその内周面において軸部材27と螺合しているから、内筒体29が軸部材27に対して移動する。また、内筒体29はその外周面において外筒体31とも螺合しているから、このとき、外筒体31は軸部材27に対する内筒体29の移動の向きとは逆向きに内筒体29に対して移動することになる。すなわち、内筒体29に一回転につき、内筒体29の雌ねじ29aと雄ねじ29bとのピッチの差の分だけ、軸部材27に対して外筒体31が移動することになり、差動ねじ機構19の外筒体31の先端に取り付けられた揺動装置23,51の高さ方向の位置が変化する。このようにして、調整装置13,49の長さが調整される。   In order to adjust the lengths of the adjusting devices 13 and 49, a dedicated wrench or the like is fitted to the end of the rotating shaft 25, or the rotating shaft 25 is rotated by a driving source such as a pulse motor. Then, the rotation of the rotation shaft 25 is transmitted to the inner cylinder body 29 and fixed by meshing between the gear teeth 25a provided on the outer peripheral surface of the rotation shaft 25 and the gear 41 of the inner cylinder body 29 of the differential screw mechanism 19. The inner cylinder 29 rotates around the shaft member 27. When the inner cylinder 29 is rotated, the inner cylinder 29 is screwed with the shaft member 27 on the inner peripheral surface thereof, so that the inner cylinder 29 moves with respect to the shaft member 27. Further, since the inner cylindrical body 29 is also screwed with the outer cylindrical body 31 on the outer peripheral surface thereof, the outer cylindrical body 31 at this time is opposite to the movement direction of the inner cylindrical body 29 with respect to the shaft member 27. It will move relative to the body 29. That is, for each rotation of the inner cylinder 29, the outer cylinder 31 moves relative to the shaft member 27 by the difference in pitch between the female thread 29a and the male thread 29b of the inner cylinder 29. The position in the height direction of the swinging devices 23 and 51 attached to the tip of the outer cylinder 31 of the mechanism 19 changes. In this way, the lengths of the adjusting devices 13 and 49 are adjusted.

以上、図示された実施形態に基づいて本発明を説明したが、本発明は、図示された実施形態に限定されるものではない。例えば、図示された実施形態では、調整装置の伸縮機構として差動ねじ機構を用いているが、従来のようにボールねじ機構を使用することも可能である。この場合でも、揺動装置の支持に平行板ばねや直動軸受又は平面軸受を用いていれば、支持台の位置や姿勢の修正において取付部に無理なひずみを発生させることがないという本発明の効果を奏する。   Although the present invention has been described based on the illustrated embodiment, the present invention is not limited to the illustrated embodiment. For example, in the illustrated embodiment, a differential screw mechanism is used as the expansion / contraction mechanism of the adjusting device, but a ball screw mechanism may be used as in the related art. Even in this case, if parallel plate springs, linear motion bearings, or planar bearings are used for supporting the oscillating device, the present invention will not cause excessive distortion in the mounting portion in correcting the position and orientation of the support base. The effect of.

本発明の調整装置の第1の実施形態の断面図である。It is sectional drawing of 1st Embodiment of the adjustment apparatus of this invention. 本発明の調整装置の第2の実施形態を示す断面図である。It is sectional drawing which shows 2nd Embodiment of the adjustment apparatus of this invention. 図2の調整装置の直動軸受の上側球体を保持する構成を示す平面図である。It is a top view which shows the structure which hold | maintains the upper side spherical body of the linear motion bearing of the adjustment apparatus of FIG. 図2の調整装置の直動軸受の下側球体を保持する構成を示す平面図である。It is a top view which shows the structure which hold | maintains the lower side spherical body of the linear motion bearing of the adjustment apparatus of FIG. 本発明の調整装置を用いた調整システムの模式図である。It is a schematic diagram of the adjustment system using the adjustment apparatus of this invention.

符号の説明Explanation of symbols

11 調整システム
13 調整装置
15 支持台
19 差動ねじ機構
21 平行板ばね
23 揺動装置
27 軸部材
27a 雄ねじ
29 内筒体
29a 雌ねじ
29b 雄ねじ
31 外筒体
31a 雌ねじ
39 コイルばね
45 球体
47 自在機構
49 調整装置
51 揺動装置
53 自在機構
DESCRIPTION OF SYMBOLS 11 Adjustment system 13 Adjustment apparatus 15 Support stand 19 Differential screw mechanism 21 Parallel leaf | plate spring 23 Oscillator 27 Shaft member 27a Male screw 29 Inner cylinder 29a Female screw 29b Male screw 31 Outer cylinder 31a Female screw 39 Coil spring 45 Spherical body 47 Free mechanism 49 Adjusting device 51 Oscillating device 53 Swivel mechanism

Claims (7)

長手軸線方向に伸縮可能な伸縮機構と、該伸縮機構の先端に取付けられた自在機構とを備え、前記伸縮機構を伸縮させることにより前記自在機構を介して被調整体の位置及び姿勢を調整する調整装置において、
前記自在機構が、前記長手軸線方向に直交する面に沿って移動可能な平面移動機構と、前記長手軸線方向に対して揺動可能な揺動機構とを有することを特徴とする調整機構。
A telescopic mechanism that can expand and contract in the longitudinal axis direction, and a free mechanism attached to the tip of the telescopic mechanism, and adjusts the position and orientation of the object to be adjusted via the free mechanism by expanding and contracting the telescopic mechanism. In the adjustment device,
An adjusting mechanism, wherein the universal mechanism includes a plane moving mechanism that can move along a plane orthogonal to the longitudinal axis direction, and a swing mechanism that can swing with respect to the longitudinal axis direction.
前記自在機構が、前記長手軸線方向に平行で且つ互いに平行に配置された一対の平行板ばねからなる平面移動機構と、該一対の平行板ばねに支持された移動体に設けられた球面座からなる揺動装置とによって構成されている、請求項1に記載の調整装置。   The universal mechanism includes a plane moving mechanism including a pair of parallel leaf springs arranged in parallel to each other in the longitudinal axis direction and a spherical seat provided on a moving body supported by the pair of parallel leaf springs. The adjusting device according to claim 1, comprising: 前記自在機構が、前記伸縮機構の先端に配置された直交面に複数の球体を介して取り付けられており、該複数個の球体を介して移動する移動体と、該移動体に設けられた球面座からなる揺動装置とによって構成されている、請求項1に記載の調整装置。   The universal mechanism is attached to an orthogonal plane disposed at the tip of the telescopic mechanism via a plurality of spheres, a moving body that moves through the plurality of spheres, and a spherical surface provided on the moving body The adjusting device according to claim 1, comprising an oscillating device comprising a seat. 前記伸縮機構が、外周面に雄ねじが設けられた回転不能な軸部材と、前記軸部材が挿入され、内周面に前記軸部材の雄ねじと螺合する雌ねじが設けられると共に、外周面に前記雌ねじと異なるピッチの雄ねじが設けられ前記軸部材の周りを回転可能な内筒体と、前記内筒体の外側に設けられ、内周面に前記の雄ねじと螺合する雌ねじが設けられた回転不能な外筒体とを備える差動ねじ機構である、請求項1に記載の調整装置。   The expansion / contraction mechanism includes a non-rotatable shaft member having a male screw provided on an outer peripheral surface, a female screw that is inserted into the inner peripheral surface and is engaged with the male screw of the shaft member, and the outer peripheral surface includes the screw Rotation in which a male screw having a pitch different from that of the female screw is provided and an inner cylinder that can rotate around the shaft member, and a female screw that is provided on the outer surface of the inner cylinder and that engages with the male screw is provided on the inner peripheral surface. The adjusting device according to claim 1, which is a differential screw mechanism including an impossible outer cylinder. 前記差動ねじ機構は、前記軸部材と前記外筒体とを互いに離れる方向に付勢するコイルばねを備える、請求項4に記載の調整装置。   The adjustment device according to claim 4, wherein the differential screw mechanism includes a coil spring that urges the shaft member and the outer cylindrical body in directions away from each other. 請求項1に記載の調整装置を少なくとも3個有し、該少なくとも3個の調整装置の自在機構によって支持された被調整体を備えることを特徴とする調整システム。   An adjustment system comprising: at least three adjustment devices according to claim 1, and an object to be adjusted supported by a universal mechanism of the at least three adjustment devices. 前記少なくとも3個の調整装置は、前記被調整体上に定められた一点を中心として、前記平行板ばねの変位する方向が放射状となるように配置される、請求項6に記載のシステム。   The system according to claim 6, wherein the at least three adjusting devices are arranged such that a direction in which the parallel leaf spring is displaced is radially centered on one point defined on the object to be adjusted.
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012077442A1 (en) * 2010-12-08 2012-06-14 東レエンジニアリング株式会社 Sheet material cutting device
CN109580156A (en) * 2019-01-03 2019-04-05 成都中航华测科技有限公司 A kind of fall-down test device that height is fine-tuning

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6113101A (en) * 1984-06-29 1986-01-21 Tokyo Optical Co Ltd Feeding mechanism
JPH09216138A (en) * 1996-02-07 1997-08-19 Kazuya Hirose Supporting unit for multiple-degrees of freedom table mechanism and multiple-degrees of freedom table mechanism
JP2002072352A (en) * 2000-09-04 2002-03-12 Kikuchi Kagaku Kenkyusho:Kk Fixture

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6113101A (en) * 1984-06-29 1986-01-21 Tokyo Optical Co Ltd Feeding mechanism
JPH09216138A (en) * 1996-02-07 1997-08-19 Kazuya Hirose Supporting unit for multiple-degrees of freedom table mechanism and multiple-degrees of freedom table mechanism
JP2002072352A (en) * 2000-09-04 2002-03-12 Kikuchi Kagaku Kenkyusho:Kk Fixture

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012077442A1 (en) * 2010-12-08 2012-06-14 東レエンジニアリング株式会社 Sheet material cutting device
CN109580156A (en) * 2019-01-03 2019-04-05 成都中航华测科技有限公司 A kind of fall-down test device that height is fine-tuning

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