JP2007145625A - Method for processing glass plate by laser beam irradiation - Google Patents

Method for processing glass plate by laser beam irradiation Download PDF

Info

Publication number
JP2007145625A
JP2007145625A JP2005340211A JP2005340211A JP2007145625A JP 2007145625 A JP2007145625 A JP 2007145625A JP 2005340211 A JP2005340211 A JP 2005340211A JP 2005340211 A JP2005340211 A JP 2005340211A JP 2007145625 A JP2007145625 A JP 2007145625A
Authority
JP
Japan
Prior art keywords
glass plate
laser beam
glass
end surface
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005340211A
Other languages
Japanese (ja)
Inventor
Mizuki Nishi
瑞樹 西
Yoshinori Akamatsu
佳則 赤松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Central Glass Co Ltd
Original Assignee
Central Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Co Ltd filed Critical Central Glass Co Ltd
Priority to JP2005340211A priority Critical patent/JP2007145625A/en
Publication of JP2007145625A publication Critical patent/JP2007145625A/en
Pending legal-status Critical Current

Links

Images

Landscapes

  • Surface Treatment Of Glass (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for processing the end part of a glass plate by laser beam irradiation, which does not necessitate a large-scale device and uses a simple means. <P>SOLUTION: In the method for processing the end face part of the glass plate, comprising softening at least the corner part of the end part of the glass plate by heat generated by laser beam irradiation and then solidifying the softened part, the end face part of the glass plate is irradiated with a laser beam having a beam width larger than the thickness of the glass plate from an oblique direction with respect to the surface of the glass plate under such conditions that the end face part is irradiated with the highest intensity part of the laser beam and the laser beam satisfies following formulas: Power*sinθ*speed<SP>-1</SP>>50 (1) and 160> Power*cosθ*speed<SP>-1</SP>>260 (2), wherein, Power represents intensity (W/cm<SP>2</SP>) of laser beam; θ is irradiation angle (°) of the laser beam to the end face part of the glass plate; and speed is working speed (mm/s) in a process for scanning the laser beam along the end face part of the glass plate. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、ガラスの端部へのレーザー光照射による当該部の加熱、軟化、及び固化を行うことでガラス端部の強度を向上させる技術に関する。   The present invention relates to a technique for improving the strength of a glass end by heating, softening, and solidifying the portion by irradiating a laser beam to the end of the glass.

ガラス板の強度は、端部の傷、クラック等の欠陥の存在状態に依存し、この欠陥の状態によっては、ガラス板の強度は著しく低下する。かくして、ガラス板の強度を向上させるために、ガラス板端面部の欠陥を減少させるべく、端部への加工が施されており、該加工方法として、研削砥石等による研磨加工が一般的に行われている。そして、レーザー光照射で端部を加熱、軟化、及び固化させる方法が、研磨屑の発生がないので、端部の強度をより向上させる可能性のある方法として検討されている。   The strength of the glass plate depends on the presence of defects such as scratches and cracks at the ends, and depending on the state of this defect, the strength of the glass plate is significantly reduced. Thus, in order to improve the strength of the glass plate, in order to reduce defects on the glass plate end surface portion, the edge portion is processed, and as the processing method, a polishing process using a grinding wheel or the like is generally performed. It has been broken. And the method of heating, softening, and solidifying the end portion by laser light irradiation has been studied as a method that may further improve the strength of the end portion because there is no generation of polishing scraps.

特許文献1では、ガラス基板の稜線部にレーザー光を吸収する物質を塗布し、ガラス端部にYAGレーザーのレーザー光を照射し、稜線部を加熱、軟化後、固化を行うことで端部をR形状に加工する技術が開示されている。又、特許文献2では、ガラス全体を予熱した状態で端部にCOレーザーのレーザー光を照射することで、端部を前記予熱温度よりも高温に加熱、そして軟化、固化を行うことで端部の面取りを行うことを開示している。さらには、特許文献3には、ガラス板を水平に保った状態で、ガラス板端面部に対するCOレーザーからのレーザー光の照射角度を変化させることで、端部の丸みを帯びた形状が、種々変化することが開示されている。 In Patent Document 1, a material that absorbs laser light is applied to a ridge line portion of a glass substrate, a laser beam of a YAG laser is applied to the glass edge portion, the edge line portion is heated, softened, and then solidified. A technique for processing into an R shape is disclosed. Further, in Patent Document 2, the end portion is heated to a temperature higher than the preheating temperature by softening and solidifying the end portion by irradiating the end portion with a laser beam of CO 2 laser in a state where the entire glass is preheated. It is disclosed that a part is chamfered. Furthermore, in Patent Document 3, the rounded shape of the end portion is obtained by changing the irradiation angle of the laser light from the CO 2 laser to the end surface portion of the glass plate while keeping the glass plate horizontal. Various changes are disclosed.

そして、特許文献4では、レーザー照射で生じる局所加熱による極端な温度勾配発生に起因する熱割れを防ぐために、加工部位にガラスが加工(軟化)されない程度の強度のレーザー光を照射することでガラスの予熱を行い、その後加工部位をレーザー照射による局所加熱で加工する技術が開示されている。
特開平2−48423号公報 特開平2−241684号公報 特開2000−344551号公報 特開2000−288763号公報
And in patent document 4, in order to prevent the thermal crack resulting from the extreme temperature gradient generation | occurrence | production by the local heating which arises by laser irradiation, it is glass by irradiating the laser beam of the intensity | strength which does not process (soften) glass to a process part A technique is disclosed in which preheating is performed, and then the processing site is processed by local heating by laser irradiation.
Japanese Patent Laid-Open No. 2-48423 JP-A-2-241684 JP 2000-344551 A JP 2000-288863 A

レーザー光を照射してガラス板を加工する場合、照射される部位が局所加熱されるので、極端な温度勾配が生じ、ガラス板の熱割れが発生する大きな原因となる。そのために、特許文献2では、ガラス板全体が加熱炉等の手段で予熱され、特許文献4では、レーザー光によってガラスが予熱されている。   When processing a glass plate by irradiating a laser beam, the irradiated portion is locally heated, so that an extreme temperature gradient is generated, which is a major cause of thermal cracking of the glass plate. Therefore, in patent document 2, the whole glass plate is preheated by means, such as a heating furnace, and in patent document 4, glass is preheated by the laser beam.

しかしながら、ガラス全体を予熱するためには、装置全体が大掛かりなものとなる。そして、ガラスの徐冷工程も必要となることから、生産性を落とすか、さらなる設備増加の対応が必要となるので、大幅なコスト増につながる。又、レーザー光による予熱であっても、予熱を保持するための保温手段が必要となり装置が大掛かりなものとなることや、加工工程が一つ増えることによる生産性の低下が問題となる。   However, in order to preheat the entire glass, the entire apparatus becomes large. And since the glass slow cooling process is also required, it is necessary to reduce productivity or cope with further increase in equipment, leading to a significant increase in cost. Further, even with preheating by laser light, there is a problem in that a heat retention means for maintaining the preheating is required and the apparatus becomes large, and productivity is lowered due to one additional processing step.

従って、本発明では、上記点を考慮し、大掛かりな装置を必要とせずに簡便な手段で、レーザー光照射によるガラス端面部の加工方法を提供とすることを課題とする。   Therefore, in view of the above points, an object of the present invention is to provide a method for processing a glass end surface portion by laser light irradiation with simple means without requiring a large-scale apparatus.

すなわち本発明のガラス板の加工方法は、レーザー光の照射による加熱でガラス板端部の少なくとも角部を軟化させ、その後該軟化部を冷却することによって固化させるガラス端面部の加工方法において、ガラス板表面に対して斜め方向からガラス板厚みよりも大きなビーム幅のレーザー光を該レーザー光の強度ピーク部がガラス板端面部に照射されるように照射し、該照射では前記レーザー光が[1]式、且つ[2]式の条件を満たすように照射されることを特徴とする。   That is, the glass plate processing method of the present invention is a glass end face processing method in which at least a corner of a glass plate end is softened by heating by laser light irradiation, and then the softened portion is cooled to solidify. A laser beam having a beam width larger than the thickness of the glass plate is irradiated from an oblique direction with respect to the plate surface so that the intensity peak portion of the laser beam is applied to the end surface portion of the glass plate. ] And [2] are satisfied so as to satisfy the condition.

Power・sinθ・speed-1 > 50 [1]
160 > Power・cosθ・speed-1 > 260 [2]
ここでPowerはレーザー光の強度(W/cm2)、θはレーザー光のガラス板端面部への照射角度(°)で図1にてその角度が説明される。そして、speedはレーザー光をガラス板端面部に沿って走査させる加工速度(mm/s)である。又、前記軟化部の冷却は、自然冷却よるもので十分に成し得る。
Power ・ sinθ ・ speed -1 > 50 [1]
160> Power ・ cosθ ・ speed -1 > 260 [2]
Here, Power is the intensity of the laser beam (W / cm 2 ), θ is an irradiation angle (°) of the laser beam to the end surface of the glass plate, and the angle is explained in FIG. The speed is a processing speed (mm / s) for scanning the laser beam along the end surface of the glass plate. The softened portion can be sufficiently cooled by natural cooling.

本発明では、ガラス板の加熱条件とガラス板の熱割れ条件を検討したところ、ガラス板端面部の軟化された部位からガラス板の面内の垂直方向での10mmの位置(この位置については図2で説明される)での温度が、ガラス転移温度から330℃以内であれば、ガラス板の熱割れが発生しないという知見を見出した。   In the present invention, when the heating condition of the glass plate and the thermal cracking condition of the glass plate were examined, the position of 10 mm in the vertical direction in the plane of the glass plate from the softened portion of the glass plate end surface portion (this position is illustrated in FIG. And the temperature of the glass plate is within 330 ° C. from the glass transition temperature.

そして本発明では、上記知見を基に、室温環境下であっても、1本のレーザー光の照射による加工でもガラス板にクラックが生じないようにするためには、ガラス板端面部へのレーザー光照射時に、ガラス板表面に対して斜めにレーザー光を照射する方法が有望であることを見出した。   In the present invention, on the basis of the above knowledge, in order to prevent the glass plate from cracking even under processing at room temperature or by processing with a single laser beam, a laser applied to the end surface of the glass plate is used. It has been found that a method of irradiating laser light obliquely with respect to the glass plate surface is promising during light irradiation.

ガラス板表面に対して斜め方向からガラス板厚みよりも大きなビーム幅のレーザー光を該レーザー光の強度ピーク部がガラス板端面部に照射されるように照射することで、ガラス板端面部は軟化され、そして表面部は軟化しない程度に加熱される。そして、ガラス板端面部へのレーザー光の照射条件を前記[1]式、且つ[2]式を満たすことで、加熱炉等の予熱装置を必要としないで、0〜50℃の室温環境乃至室温環境に近い温度雰囲気下、又は0〜35℃の室温環境下でレーザー光によるガラス板端面部の加工ができるようになる。   By irradiating a laser beam having a beam width larger than the glass plate thickness from an oblique direction with respect to the glass plate surface so that the intensity peak portion of the laser beam is applied to the glass plate end surface portion, the glass plate end surface portion is softened. And the surface is heated to such an extent that it does not soften. And by satisfy | filling the said [1] type | formula and [2] type | formula as the irradiation conditions of the laser beam to a glass plate end surface part, it is room temperature environment thru | or 0-50 degreeC, without requiring preheating apparatuses, such as a heating furnace. The glass plate end face can be processed with a laser beam in a temperature atmosphere close to room temperature or in a room temperature environment of 0 to 35 ° C.

レーザー光の照射角度を調節することのみにより、ガラスの熱割れが生じることなく、ガラスの端面加工を行うことが可能となる。従って、従来必要であった加熱炉等の予熱装置を省略化でき、端面加工により強度が向上されたガラス基板の製造の低コスト化に奏功する。   Only by adjusting the irradiation angle of the laser light, it becomes possible to perform the end face processing of the glass without causing thermal cracking of the glass. Therefore, a preheating device such as a heating furnace, which has been conventionally required, can be omitted, and it is possible to reduce the cost of manufacturing a glass substrate whose strength is improved by end face processing.

本発明のガラス板端面部の加工方法は、レーザー光の照射による加熱でガラス端部の少なくとも角部を軟化させ、その後該軟化部を冷却することによって固化させるガラス端面部の加工方法において、ガラス板端面部へのレーザー光の照射角度を調節することにより行われる。   The glass plate end surface processing method of the present invention is a glass end surface portion processing method in which at least a corner portion of the glass end portion is softened by heating by laser light irradiation, and then the softened portion is cooled to be solidified. This is done by adjusting the irradiation angle of the laser beam to the plate end surface.

ガラス板の加工を行うレーザーには、炭酸ガスレーザー、YAGレーザー等が使用され、ガラスの吸収波長である10.6μmの波長のビームを発する炭酸ガスレーザーを使用することが好ましい。本発明は、ガラス板端面加工時のガラス端面の軟化部とガラス板表面部の熱勾配を緩和させるために、ガラスの角部を含む端面にビームを照射すると同時にガラス面の周縁部にもビームを照射するので、ビームの径はガラス板厚みよりも、大きいものとすることが好ましい。そのため、ビームの径は、ガラス板に照射される時点で、ガラス板厚みの1〜20とすることが好ましい。   As a laser for processing the glass plate, a carbon dioxide laser, a YAG laser, or the like is used, and a carbon dioxide laser that emits a beam having a wavelength of 10.6 μm, which is an absorption wavelength of glass, is preferably used. In order to alleviate the thermal gradient between the softened portion of the glass end surface and the glass plate surface portion during processing of the glass plate end surface, the present invention irradiates the end surface including the corner of the glass with the beam and simultaneously also irradiates the peripheral portion of the glass surface Therefore, the beam diameter is preferably larger than the glass plate thickness. Therefore, the diameter of the beam is preferably set to 1 to 20 of the glass plate thickness at the time when the glass plate is irradiated.

ビームの径の上限は、使用されるレーザー光のビームプロファイル、光学系等に左右されるが、ガラス板厚みの10倍以内とすることが好ましい。又、ビーム径の下限は、1.5倍以上、好適には2倍以上とすることが好ましい。   The upper limit of the beam diameter depends on the beam profile of the laser beam used, the optical system, etc., but is preferably within 10 times the glass plate thickness. The lower limit of the beam diameter is preferably 1.5 times or more, and preferably 2 times or more.

レーザービームの強度分布は、一般的にはガウシアン分布のものが多いが、ガラス板端面部と面内部へのレーザー強度分布を適切に調整しやすくするためにトップハットの強度分布をもつレーザー光を使用するのが好ましい。   In general, the intensity distribution of the laser beam is often a Gaussian distribution. However, in order to easily adjust the laser intensity distribution on the glass plate end face and inside the surface, laser light having a top hat intensity distribution is used. It is preferred to use.

そして、本発明のガラス板の加工方法には、フロートガラス、無アルカリガラス、石英ガラス、PDPに使用されている高歪点ガラス等が使用される。そして、適用されるガラスの厚みには、加工効率の点から、1〜5mmの厚みのガラス板を使用することが好ましい。   And the glass plate processing method of the present invention uses float glass, alkali-free glass, quartz glass, high strain point glass used in PDP, and the like. And it is preferable to use the glass plate of the thickness of 1-5 mm for the thickness of the glass applied from the point of processing efficiency.

ガラス板端面部に対するレーザー光の照射角度の条件は、power・sinθ・speed-1値が50以上となるように照射する。ここでPowerはレーザー光の強度(W/cm2)、θはレーザー光のガラス板端面部への照射角度(°)、speedはレーザー光をガラス板端面部に沿って走査させる加工速度(mm/s)を示す。この値が50以上であればガラス板は加工中に破壊せず良好に加工できるが、50未満のときは照射されるガラス板端面部と面内部に発生する大きな温度勾配によって大きな熱応力が発生し加工中にガラス板の破壊が生じる。 The conditions of the irradiation angle of the laser beam with respect to the glass plate end surface are such that the power · sin θ · speed −1 value is 50 or more. Here, Power is the intensity of the laser beam (W / cm 2 ), θ is the irradiation angle (°) of the laser beam to the glass plate end surface, and speed is the processing speed (mm) that scans the laser beam along the glass plate end surface. / s). If this value is 50 or more, the glass plate can be satisfactorily processed without breaking during processing, but if it is less than 50, a large thermal stress is generated due to a large temperature gradient generated on the irradiated glass plate end surface and inside the surface. Breaking of the glass plate occurs during processing.

さらに、power・cosθ・speed-1値が160〜260となるように照射する。この値が160〜260の場合に、ビーム照射後ガラス板端面部の形状はほぼ均一な円弧状となる。また、この値が160以下ではガラス板端面部の形状は殆ど変化せず角張ったままとなり、260以上では溶けすぎて不均一な端面形状となる。 Further, irradiation is performed so that the value of power · cos θ · speed −1 becomes 160 to 260. When this value is 160 to 260, the shape of the end surface of the glass plate after beam irradiation is a substantially uniform arc. When the value is 160 or less, the shape of the end face of the glass plate is hardly changed and remains angular, and when it is 260 or more, the glass plate is too melted to have a non-uniform end face shape.

本発明のガラスの加工方法について図面を用いて説明する。図1はレーザー照射によるガラス加工時の状態を表す断面図である。加工するときの雰囲気温度は、常温常圧である。ガラスGに対し、少なくとも一つの角部を有するように、ガラス端面に対し、斜めになるようにレーザー光Bを照射する。そして、レーザー光Bを固定した状態で、ガラスをスクロールさせるか、ガラスを固定した状態で、レーザー光Bをスキャンさせ、ガラス端面の加工を行っていく。   The processing method of the glass of this invention is demonstrated using drawing. FIG. 1 is a cross-sectional view showing a state during glass processing by laser irradiation. The atmosphere temperature when processing is normal temperature and normal pressure. The laser beam B is irradiated to the glass G so as to be inclined with respect to the glass end surface so as to have at least one corner. Then, the glass is scrolled with the laser beam B fixed, or the laser beam B is scanned with the glass fixed to process the glass end face.

実施例1
フロート法で得られるガラス転移温度が630℃のソーダ石灰珪酸塩ガラスよりなる300mm×300mm×2.8mm(厚さ)のガラス板の端面部に対して、COレーザーを表1の条件で照射してガラス板端面部の加工を行った。尚、該加工は25℃の室温雰囲気下で行われた。
Example 1
A CO 2 laser is irradiated under the conditions shown in Table 1 on the end face of a 300 mm × 300 mm × 2.8 mm (thickness) glass plate made of soda-lime silicate glass having a glass transition temperature of 630 ° C. obtained by the float process. Then, the glass plate end face was processed. The processing was performed in a room temperature atmosphere of 25 ° C.

Figure 2007145625
Figure 2007145625

照射中のガラス板の温度分布を赤外線放射温度計で測定したところ、ガラス板端面部軟化された部位から垂直方向に10mmの位置での温度は、ガラス転移温度から224℃低い値であった。   When the temperature distribution of the glass plate during irradiation was measured with an infrared radiation thermometer, the temperature at a position 10 mm in the vertical direction from the portion where the end surface of the glass plate was softened was 224 ° C. lower than the glass transition temperature.

得られたガラス板端面部の形状を観察したところ、ほぼ均一な円弧状端面となっていた。またこの端面部について、JIS R 1601「ファインセラミックスの曲げ強さ試験方法」に準拠した4点曲げ試験を行った。破壊荷重は、従来の研磨端面品が平均10kgf程度に対して平均30kgf程度と非常に高い値を示した。また破壊状況を確認したところ、それらは全て端面部から破壊せずにガラス面内部からの破壊であった。このことから、本実施例で加工されたガラス板の端面部の強度はそれ以上の値を示すものと思われる。   When the shape of the end surface portion of the obtained glass plate was observed, it was a substantially uniform arc-shaped end surface. Further, this end face part was subjected to a four-point bending test in accordance with JIS R 1601 “Fine ceramic bending strength test method”. The breaking load showed a very high value of about 30 kgf on average compared to about 10 kgf on average for conventional polished end face products. Moreover, when the destruction condition was confirmed, they were all destruction from the inside of a glass surface, without destroying from an end surface part. From this, it is considered that the strength of the end face portion of the glass plate processed in this example shows a value higher than that.

実施例2
表1の記載の条件とした以外は実施例1と同条件で加工を行った。このときのガラス板端面部の軟化された部位から垂直方向に10mmの位置での温度は、ガラス転移温度から330℃低い値であった。得られたガラス板端面部の形状を観察したところ、ほぼ均一な円弧状端面となっており、強度も実施例1と同等であった。
Example 2
Processing was performed under the same conditions as in Example 1 except that the conditions described in Table 1 were used. At this time, the temperature at a position 10 mm in the vertical direction from the softened portion of the end surface portion of the glass plate was 330 ° C. lower than the glass transition temperature. When the shape of the end surface portion of the obtained glass plate was observed, it was a substantially uniform arc-shaped end surface, and the strength was the same as in Example 1.

実施例3
表1の記載の条件とした以外は実施例1と同条件で加工を行った。このときのガラス板端面部の軟化された部位から垂直方向に10mmの位置での温度は、ガラス転移温度から273℃低い値であった。得られたガラス板端面部の形状を観察したところ、ほぼ均一な円弧状端面となっており、強度も実施例1と同等であった。
Example 3
Processing was performed under the same conditions as in Example 1 except that the conditions described in Table 1 were used. At this time, the temperature at a position 10 mm in the vertical direction from the softened portion of the end surface of the glass plate was 273 ° C. lower than the glass transition temperature. When the shape of the end surface portion of the obtained glass plate was observed, it was a substantially uniform arc-shaped end surface, and the strength was the same as in Example 1.

比較例1
表1の記載の条件とした以外は実施例1と同条件で加工を行った。このときのガラス板端面部の軟化された部位から垂直方向に10mmの位置での温度は、ガラス転移温度から201℃低い値であった。得られたガラス板端面部の形状を観察したところ、溶けすぎてガラス板の面内部に膨れ上がった歪な形状となっていた。
Comparative Example 1
Processing was performed under the same conditions as in Example 1 except that the conditions described in Table 1 were used. At this time, the temperature at a position 10 mm in the vertical direction from the softened portion of the end face of the glass plate was 201 ° C. lower than the glass transition temperature. When the shape of the obtained glass plate end surface portion was observed, it was a distorted shape that melted too much and swollen into the surface of the glass plate.

比較例2
表1の記載の条件とした以外は実施例1と同条件で加工を行った。このときのガラス板端面部の軟化された部位から垂直方向に10mmの位置での温度は、ガラス転移温度から364℃低い値であった。得られたガラス板端面部の形状を観察したところ、ほとんど溶けておらず、角張った形状となっていた。また、加工中に破壊は起こらなかったが、約1時間後に破壊した。
Comparative Example 2
Processing was performed under the same conditions as in Example 1 except that the conditions described in Table 1 were used. At this time, the temperature at a position 10 mm in the vertical direction from the softened portion of the glass plate end face was 364 ° C. lower than the glass transition temperature. When the shape of the end surface portion of the obtained glass plate was observed, it was hardly melted and had an angular shape. Further, although no destruction occurred during the processing, it broke after about 1 hour.

比較例3
表1の記載の条件とした以外は実施例1と同条件で加工を行った。このときのガラス板端面部の軟化された部位から垂直方向に10mmの位置での温度は、ガラス転移温度から426℃低い値であったが、加工中にガラス板が破壊した。
Comparative Example 3
Processing was performed under the same conditions as in Example 1 except that the conditions described in Table 1 were used. At this time, the temperature at a position 10 mm in the vertical direction from the softened portion of the end surface of the glass plate was 426 ° C. lower than the glass transition temperature, but the glass plate was broken during processing.

レーザー照射によるガラス加工時の状態を表す断面図である。It is sectional drawing showing the state at the time of the glass processing by laser irradiation. ガラス板端面部の軟化された部位からガラス板の面内の垂直方向での10mmの位置を示す図である。It is a figure which shows the position of 10 mm in the orthogonal | vertical direction in the surface of a glass plate from the softened site | part of a glass plate end surface part.

符号の説明Explanation of symbols

G ガラス
B ガラス端面に照射されるレーザー光
1 軟化される部位
2 ガラス板端面部の軟化された部位からガラス板の面内の垂直方向での10mmの位置
G Glass B Laser light applied to the glass end face 1 Softened part 2 Position of 10 mm in the vertical direction in the plane of the glass plate from the softened part of the glass plate end face part

Claims (2)

レーザー光の照射による加熱でガラス板端部の少なくとも角部を軟化させ、その後該軟化部を固化させるガラス端面部の加工方法において、ガラス板表面に対して斜め方向からガラス板厚みよりも大きなビーム幅のレーザー光を該レーザー光の強度ピーク部がガラス板端面部に照射されるように照射し、該照射では前記レーザー光が[1]式、且つ[2]式の条件を満たすように照射されることを特徴とするガラス板端面部の加工方法。
Power・sinθ・speed-1 > 50 [1]
160 > Power・cosθ・speed-1 > 260 [2]
ここでPowerはレーザー光の強度(W/cm2)、θはレーザー光のガラス板端面部への照射角度(°)、speedはレーザー光をガラス板端面部に沿って走査させる加工速度(mm/s)である。
In the processing method of the glass end face part that softens at least the corner part of the glass plate end by heating by laser light irradiation and then solidifies the softened part, a beam larger than the glass plate thickness from an oblique direction with respect to the glass plate surface A laser beam having a width is irradiated so that the intensity peak portion of the laser beam is applied to the end surface portion of the glass plate, and in this irradiation, the laser beam is applied so that the conditions of the equations [1] and [2] are satisfied. The processing method of the glass plate end surface part characterized by being performed.
Power ・ sinθ ・ speed -1 > 50 [1]
160> Power ・ cosθ ・ speed -1 > 260 [2]
Here, Power is the intensity of the laser beam (W / cm 2 ), θ is the irradiation angle (°) of the laser beam to the glass plate end surface, and speed is the processing speed (mm) that scans the laser beam along the glass plate end surface. / s).
請求項1に記載のガラス板端面部の加工方法による端面加工工程を有するガラス基板の製造方法。 The manufacturing method of the glass substrate which has the end surface processing process by the processing method of the glass plate end surface part of Claim 1.
JP2005340211A 2005-11-25 2005-11-25 Method for processing glass plate by laser beam irradiation Pending JP2007145625A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005340211A JP2007145625A (en) 2005-11-25 2005-11-25 Method for processing glass plate by laser beam irradiation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005340211A JP2007145625A (en) 2005-11-25 2005-11-25 Method for processing glass plate by laser beam irradiation

Publications (1)

Publication Number Publication Date
JP2007145625A true JP2007145625A (en) 2007-06-14

Family

ID=38207481

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005340211A Pending JP2007145625A (en) 2005-11-25 2005-11-25 Method for processing glass plate by laser beam irradiation

Country Status (1)

Country Link
JP (1) JP2007145625A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009035433A (en) * 2007-07-31 2009-02-19 Asahi Glass Co Ltd Method and device for chamfering glass substrate, and chamfered glass substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009035433A (en) * 2007-07-31 2009-02-19 Asahi Glass Co Ltd Method and device for chamfering glass substrate, and chamfered glass substrate

Similar Documents

Publication Publication Date Title
JP5245819B2 (en) Method and apparatus for chamfering glass substrate
JP5416127B2 (en) High speed / low residual stress laser scoring of glass sheets
JP5256658B2 (en) Glass substrate chamfering method and apparatus, chamfered glass substrate
WO2013039230A1 (en) Method for cutting glass sheet
JP5314674B2 (en) Processing method of brittle material substrate
TW200920704A (en) Chamfering method for brittle substrate
TW200936290A (en) Method for chamfering/machining brittle material substrate and chamfering/machining apparatus
TWI414383B (en) Angle processing device
TW201529503A (en) Chamfering method of glass substrate and laser processing device
WO2016125609A1 (en) Method of cutting brittle material, device for cutting brittle material, method of manufacturing cut brittle material and cut brittle material
US20170283298A1 (en) Laser sintering system and method for forming high purity, low roughness, low warp silica glass
KR20090079342A (en) Glass cutting method utilizing a laser beam
JP2006273695A (en) Apparatus for and method of treating cut surface of glass plate
JP2001058281A (en) Scribing method using laser beam
JP4831003B2 (en) Repairing surface scratches on the surface of glass substrates by laser irradiation
JP6650113B2 (en) Circular glass plate and manufacturing method thereof
JP2007145625A (en) Method for processing glass plate by laser beam irradiation
JP5825551B2 (en) Glass plate cutting method and glass plate cutting device
JP5560096B2 (en) Laser processing method
JP2008247633A (en) Method for processing glass plate by laser beam irradiation
JP2008247634A (en) Method for processing glass plate by laser beam irradiation
KR100371011B1 (en) Cutting method of non-metal material and cutting apparatus
JP5884691B2 (en) Glass plate cutting method
JP2005324997A (en) Reinforced glass board with marking and its manufacturing method
JP2006124192A (en) Method for processing glass by laser beam irradiation and method for manufacturing glass substrate