JP2007114023A - Dynamic displacement measurement display control method, dynamic displacement measurement display control program, and dynamic displacement measurement display controller - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem wherein transition of dynamic deformation in a sample in a range far smaller than a moving displacement amount, such as deformations due to the acceleration of the sample cannot be displayed recognizably, because it is displayed in a range meeting the level of the moving displacement amount, in a conventional dynamic displacement measurement display control method, the problem wherein quantitative/qualitative dynamic analysis is difficult therein based on measurement display, and the problem wherein the risk of missing the important dynamic deformation of a small amplitude exists. <P>SOLUTION: The aforementioned problems are solved by this dynamic displacement measurement display control method of acquiring an actual displacement M (x, y, t) of a sample face, of acquiring a static displacement S (x, y) that is the deviation from the true plane of the facial shape of the sample in a motion stop time, of calculating an attitude displacement plane Z (x, y, t) that is a plane indicating the attitude of the sample under vibration, based on the M (x, y, t) and the S (x, y), of calculating dynamic deformation D (x, y, t) that is the value indicating the facial shape deformation accompanying the acceleration change of the sample, based on the M (x, y, t), the S (x, y) and the Z (x, y, t), and of summing up the Z (x, y, t), the S (x, y) and the D (x, y, t), multiplied respectively by an amplitude correction factor and displaying it. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a technique for measuring the displacement of the surface of a moving sample and displaying the measured value, and more particularly to a technique for measuring and displaying a dynamic shape of a target such as a MEMS optical scanner during high-speed operation. It is.

  As a technique for measuring the displacement of the surface of the moving sample, for example, a dynamic interference measurement method is publicly used. FIG. 8 shows a configuration example of a dynamic displacement measurement display control apparatus using a conventional strobe phase optical system. The strobe phase optical system spl is a Michelson-type interference optical system, which refracts at right angles from the light source 1 by the half mirror 2 and is reflected by the sample 3 to the imaging lens 7 and reflected from the light source 1 by the reference mirror 4 Then, the height of the reflection surface of the sample 3 is obtained using interference with the light that is refracted by the half mirror 2 and travels toward the imaging lens 7. This method will be described with reference to FIG. FIG. 9A shows an example of a MEMS device such as a MEMS optical scanner that vibrates as a sample. In FIG. 9 (a), the coherent light emitted from the strobe light source 1 is irradiated to the MEMS sample 3 and the reference mirror 4 by the half mirror 2. At this time, as shown in FIG. 9B, the strobe light source 1 emits light in synchronization with the vibration operating frequency of the MEMS, whereby an interference fringe image at an arbitrary time phase is obtained. The light intensity I (x, y) of the obtained interference fringes is as shown in equation (1).

  Here, a (x, y) and b (x, y) are constants determined by the state of the optical system, and φ (x, y) is the phase at the position (x, y) of the interference fringes. Since the phase φ (x, y) and the target height h (x, y) have the relationship shown in the equation (2), the height of the sample can be known by obtaining the phase of the interference fringes.

  Here, λ is a light source wavelength. As a method of obtaining the phase φ (x, y) with high accuracy by eliminating the influence of a (x, y), b (x, y) from the interference fringe intensity information in Eq. (1), the phase shift method or Fourier Conversion methods, heterodyne methods, and the like are known. FIG. 9 (c) shows a conventional display example of the result of measuring the displacement of the MEMS sample 3 by this dynamic interference measurement. The displacement of the MEMS sample 3 obtained from the strobe emission (1) in FIG. 9 (b) is a display example of the phase (1) in FIG. 9 (c), and the displacement of the MEMS obtained from the strobe emission (2) is shown in FIG. This is a display example of phase (2) in c). In this way, the displacement of the MEMS sample 3 obtained from a number of slightly different time phases is acquired over one period of vibration, and this is continuously displayed in time series to visually grasp the movement of the sample 3. Can do.

  According to the conventional display method of FIG. 9C, the change in the attitude of the MEMS accompanying the operation of the MEMS can be seen, but the dynamic deformation of the MEMS can hardly be discerned at a glance. This is because in such an example, the amount of displacement accompanying the change in the attitude of the MEMS is much larger than the dynamic deformation of the MEMS.

When the actual displacement, which is the surface height of the position (x, y) at the time t of the sample 3 measured by dynamic measurement, is expressed as M (x, y, t), the actual displacement M (x, y, t) It is considered that the three displacements shown in FIG. That is,
(a) A posture displacement plane Z (x, y, t) that is a plane showing the posture of the MEMS sample 3 during vibration. This is a deviation from the horizontal plane (x, y) plane.

  (b) Static displacement S (x, y), which is a value indicating the deviation of the surface shape of the MEMS sample 3 from the true plane when the motion is stopped. This is a deviation from the posture displacement plane Z (x, y, t), and is much smaller than the amplitude of the posture displacement plane Z (x, y, t) in the processing accuracy of a normal MEMS device.

  (c) Dynamic deformation D (x, y, t) which is a shape deformation accompanying the acceleration change of the MEMS sample 3. This is a deviation from the static displacement S (x, y), and the rigidity of a normal MEMS device is of a level smaller than the amplitude of the static displacement S (x, y).

  The actual displacement M (x, y, t), which is the displacement value of the surface of the MEMS sample 3 measured by dynamic interference measurement, includes all of the above (a), (b), and (c). However, if the displacement scales of the posture displacement plane, static displacement, and dynamic deformation are greatly different as in this example, the conventional display method as shown in FIG. Dynamic analysis is difficult, and there is a problem that an important dynamic deformation may be missed although the amplitude is small.

As a prior art regarding display of data with a wide range of measurement values, there is a method disclosed in Patent Document 1 below. This is a method of making it easy to see defects with small amplitudes by changing the color space of the color display indicating the measured values before and after a predetermined threshold. However, this method is effective when the measured values can be separated spatially, but like the displacement of the MEMS surface described above, the posture displacement plane Z (x, y, t) is the same space. It cannot be applied when large displacements and small displacements such as static displacements S (x, y) and dynamic deformations D (x, y, t) are superimposed.
Japanese Patent No. 3620799

  As described above, in the conventional dynamic displacement measurement display control method, the display is in a range that is commensurate with the magnitude of the movement displacement, so it is far more than the movement displacement, such as deformation due to acceleration of the sample. The dynamic deformation of the sample in a small range cannot be displayed in a recognizable manner, and quantitative and qualitative dynamic analysis is difficult from the measurement display. There was a problem of overlooking.

  With the conventional dynamic displacement measurement display control method, the transition of the dynamic deformation of the sample in a much smaller range than the amount of movement of the sample cannot be recognizable. The problem that qualitative dynamic analysis is difficult and that there is a risk that important dynamic deformation may be missed although the amplitude is small, as shown in FIG. 1, the displacement of the surface of the moving sample is measured, and the measurement is performed. A dynamic displacement measurement display control method for displaying a value, wherein the sample is a thin plate-like sample that is generally a plane, and the movement is a movement in which the plane of the sample vibrates at a predetermined period. To obtain the actual displacement M (x, y, t) which is the displacement value of the surface of the thin sample during movement (step S110 in FIG. 1), and the surface shape of the thin sample when the movement is stopped Static displacement S (x, y), which is a value indicating deviation from the true plane From the obtained step (step S100 in FIG. 1), the obtained actual displacement M (x, y, t) and the obtained static displacement S (x, y), A step (step S120 in FIG. 1) of calculating a posture displacement plane Z (x, y, t) that is a plane indicating the posture, the acquired actual displacement M (x, y, t), and the acquired static The thin plate after correcting the deviation of the surface shape of the thin plate sample from the true plane from the static displacement S (x, y) and the calculated posture displacement plane Z (x, y, t) A step of calculating a dynamic deformation D (x, y, t), which is a value indicating a surface shape deformation accompanying a change in acceleration of the sample, (step S130 in FIG. 1), and the calculated posture displacement plane Z (x, y, t), the obtained static displacement S (x, y) and the calculated dynamic deformation D (x, y, t), respectively, multiplied by an amplitude correction coefficient, and the display amount H Display amount calculation step for calculating (x, y, t) Step S140), and the dynamic displacement measurement display control method.

  That is, in the display amount calculation step of FIG. 1, various meaningful dynamic displacements can be displayed on the monitor by combining the externally set amplitude correction coefficients α, β, γ with various values. For example, as shown in Display Example 1 in FIG. 3, three displacement graphs are displayed with two of the measurement display amplitude correction coefficients α (x, y), β (x, y), and γ (x, y) set to zero. Thus, it is possible to quantitatively grasp each displacement. For example, as shown in Display Example 2 in FIG. 3, by setting α (x, y) so as to reduce only the scale of large posture displacement, dynamic deformation and static displacement can be displayed simultaneously with the posture displacement state. It is suitable for qualitatively grasping the relationship between the three displacements.

  Further, as shown in FIG. 4, the problem is that, in the static displacement acquisition step (step S402 in FIG. 4), the acquired actual displacement M (x, y, t) during movement at a plurality of points in time is calculated. (Step S402.5 in FIG. 4) can also be solved by the dynamic displacement measurement display control method that calculates and acquires the static displacement S (x, y).

  That is, it is assumed that the value of the acceleration applied to the sample 3 in each phase of the amplitude cycle and the value of the dynamic deformation resulting therefrom are in a proportional relationship, and the acceleration in a certain phase is the acceleration in the opposite phase. Since it is assumed that the absolute values are equal and opposite in direction, for example, as shown in FIG. 5, the average value of a pair of actual displacement M + and actual displacement M− having an antiphase relationship cancels dynamic deformation. The static displacement S (x, y) may be expressed. Therefore, if this method is used, the static displacement S (x, y) can be calculated from the actual displacement M (x, y, t) even in a situation where the sample 3 cannot be stopped. There is an advantage that the step of measuring the actual displacement M (x, y, t) in a stationary state can be omitted.

  Further, as shown in FIG. 6, when the subject has a plurality of individually vibrating planes, a plurality of regions corresponding to the plurality of individually vibrating planes in the posture displacement plane calculating step are provided. The target visual field is divided into a plurality of regions based on the region boundary setting data for setting the boundary, and the posture displacement plane Z (x, y, t) for each of the divided regions is calculated (step S620 in FIG. 6). This is solved by the displacement measurement display control method.

  That is, even when there are a plurality of individually oscillating planes in the sample 3, if the area boundary setting data can be obtained from a design drawing or the like, the posture displacement plane Z ( x, y, t), static displacement S (x, y), and dynamic deformation D (x, y, t) can be measured. Thus, even when the sample has a plurality of individually vibrating planes, there is an advantage that the entire movement of the individual planes and the relation between the movements of the plurality of planes can be grasped.

  Further, as shown in FIG. 6, the problem is that when the sample has a plurality of individually oscillating planes, the actual displacement M (x, y, t) obtained during the movement at the plurality of positions and at the plurality of time points obtained. The local boundary or temporal slope change rate is calculated, and the region boundary setting data is calculated from the spatial continuity of the local slope or temporal slope change rate (step S622 in FIG. 6). It is solved by the control method.

  In other words, when there are multiple individually vibrating planes in the sample 3, each region boundary setting data is not obtained from the design drawing etc., but it is desired from the distribution status of the actual displacement M (x, y, t). Area boundary setting data can be calculated, and based on this, the posture displacement plane Z (x, y, t), static displacement S (x, y), dynamic deformation D (x, y, There is an advantage that t) can be measured.

  Further, as shown in FIG. 6, the problem is that, when the sample has a plurality of individually oscillating planes, in the display amount calculation step, the calculated area is calculated for each of the divided areas. Of each of the obtained displacement displacement planes Z (x, y, t), the static displacement S (x, y) for each acquired region, and the dynamic deformation D (x, y, t) for each calculated region The display amount H (x, y, t) for each region obtained by adding the product obtained by multiplying each region by the amplitude correction coefficient is calculated (step S640 in FIG. 6), which is solved by the dynamic displacement measurement display control method.

  That is, even when there are multiple individually vibrating planes in the sample 3, the display amount H (x, y, t) can be acquired and displayed for each plane area, and visually displayed individually. There is an advantage that it is possible to grasp the whole of the relationship between the movement of the plane and the movement of the plurality of planes.

  The dynamic displacement measurement display control method according to the present invention presents the measurement apparatus user with three displacements, that is, a posture displacement plane, a static displacement S, and a dynamic deformation D having different displacement amounts and properties. There is an effect that a qualitative and quantitative relationship between these three displacements can be grasped visually and simply. In addition, the effect of reducing the risk of missing a small displacement can be displayed by superimposing the static displacement S and dynamic deformation D with a small displacement width superimposed on the displacement of the posture displacement plane with a large amplitude of displacement. is there.

  An embodiment of the dynamic displacement measurement display control method of the present invention will be described with reference to FIGS. Note that the computer processing in the present invention is executed by a computer program developed on the main storage device of the computer. The computer program is provided in a CD- format including an auxiliary storage device connected to the computer. Provided by being stored in a recording medium such as a portable storage device such as a ROM or a main storage device or an auxiliary storage device of another computer connected to a network. It is loaded and executed on a storage device.

  FIG. 1 shows an operation flowchart of the dynamic displacement measurement display control method of the first embodiment of the present invention. The present embodiment operates in the dynamic displacement measurement display control apparatus shown in FIG. The strobe phase optical system spl shown in FIG. 2 is the same as the strobe phase optical system spl shown in FIG. Further, since the personal computer pc and the monitor m have the same hardware as in FIG. 2 and FIG. 8, the part names in FIG. 8 are also used in the following description. In the present embodiment of FIG. 2, actual displacement acquisition means 21, static displacement acquisition means 22, posture displacement plane calculation means 23, dynamic deformation calculation means 24, display amount calculation means 25, display conversion are performed by software in the personal computer pc. A portion 261 is formed.

A specific example of the dynamic interference measurement of this embodiment is shown below. If the vibration of sample 3 is 100 kHz, for example, the period of 10 microseconds is decomposed into 24 phases (k = 0, 1, ..., 23), and strobe light emission with a width of 0.1 microseconds (k ) For 30 milliseconds. That is, interference fringes due to 3000 strobes are accumulated in each phase (k), and the signal processing circuit 9 in FIG. 2 outputs a fringe phase Φ (x, y) due to strobe light emission (k). Based on the fringe phase Φ _k (x, y) at this phase (k), the actual displacement acquisition means 1 in the personal computer pc acquires the actual displacement M _k (x, y, t) of the phase (k). In this strobe phase optical system spl, x and y are obtained as the actual displacement M _k (x, y, t) of the phase (k) with a resolution of 30 microns.

In the embodiment of FIG. 1, the process starts from the static displacement acquisition step of step S100. That is, the vibration motion of the sample 3 is stopped in step S101, and the interference fringe phase Φ _k (x, y) of the stationary sample is acquired from the signal processing circuit 9. The actual displacement acquisition means 21 in the personal computer pc acquires the actual displacement M _k (x, y, t) from the fringe phase Φ _k (x, y). That is, in step S102, the static displacement (initial shape) S of the sample could be acquired from the actual displacement M in the stationary state.

In the actual displacement acquisition step of the next step S110, first, the vibration motion of the sample is started in step S111. In step S112, the signal processing circuit 9 acquires the interference fringe phase Φ _k (x, y) of the sample in the operating state (phase k). In step S113, the actual displacement acquisition means 21 calculates the actual displacement M _k (x, y, t) of the operating state (phase k) from the fringe phase Φ _k (x, y). The above is repeated for all k = 0, 1,...

  In the posture displacement plane calculation step of the next step S120, the posture displacement plane calculation means 23 in step S121 is the difference between the actual displacement M (x, y, t) and the static displacement S (x, y) obtained previously. A certain M ′ = MS is calculated. This value represents the posture displacement due to the vibration motion in the vibration motion region (mirror region) of the sample 3, and should be almost zero in the surrounding stationary frame region. In step S122, the vibration motion region boundary (region boundary of the mirror part) in the sample is acquired from the design data of sample 3, and in step S123, the posture displacement plane calculating means 23 obtains the least square plane of M ′ in the region. This is the posture displacement plane Z.

  In the dynamic deformation calculation step of the next step S130, the dynamic deformation calculation means 24 performs the actual displacement M (x, y, t), static displacement S (x, y), and posture displacement plane Z obtained previously. Using (x, y, t), the dynamic deformation D = M′−Z = MSZ is calculated in step S131. That is, the dynamic deformation D (x, y, t) subtracts the contribution of the static displacement S (x, y) and the attitude displacement plane Z (x, y, t) from the actual displacement M (x, y, t). It is a thing.

  In the next display amount calculation step of step S140, the display amount calculation means 25 acquires the amplitude correction coefficients α, β, γ from the outside in step S141. For example, the setting of the amplitude correction coefficients α, β, γ can be changed interactively with the operator on the screen of the personal computer pc. As a setting method for α, β, and γ, the display amount calculation means 25 automatically calculates α, β, and γ values based on the maximum amplitude values of Z, S, and D, and sets them as defaults. You may do it. Next, in step S142, the display amount calculation means 25 calculates the display amount H = α * Z + β * S + γ * D.

  In the next display step of step S150, the display conversion unit 261 of the display means 26 converts the display amount H (x, y, t) passed from the display amount calculation means 25 in step S151 into a predetermined image, and monitors it. m is displayed on the display.

  FIG. 3 shows an example of a moving image displayed in the display step of this embodiment. In the display example 1 of FIG. 3, the amplitude correction coefficients α, β, and γ are displayed as zero. In this way, the movement of the posture displacement plane Z (x, y, t) alone, the shape of the static displacement S (x, y), and the movement of the dynamic deformation D (x, y, t) must be confirmed independently. Can do. In this case, the display is switched to a height display scale suitable for each displacement range.

  In the display example 2 in FIG. 3, by setting the amplitude correction coefficients to α = 1/100, β = 0, and γ = 1, the dynamic deformation D () with respect to the movement of the posture displacement plane Z (x, y, t). In this example, x, y, t) are highlighted 100 times and displayed together. As a result, it is possible to clearly see how the dynamic deformation D (x, y, t) is related to the movement of the posture displacement plane Z (x, y, t).

  FIG. 4 is an operation flow of the dynamic displacement measurement display control method of the second embodiment of the present invention. In this embodiment, as in the first embodiment, assuming that the vibration of the sample 3 is 100 kHz, for example, the period of 10 microseconds is decomposed into 24 phases (k = 0, 1,..., 23). In addition, 0.1 microsecond-wide strobe light emission (k) is repeated for 30 milliseconds. This embodiment also has the same hardware configuration as that of the first embodiment shown in FIG. 2, but the operation contents of the actual displacement acquisition means 21 and the static displacement acquisition means 22 are different from those of the first embodiment. That is, in the present embodiment, the static displacement acquisition step of Step S402 is realized in the actual displacement acquisition step of Step S400. Specifically, the actual displacement acquisition means 21 starts the vibration motion of the sample in step S401. Subsequently, the static displacement acquisition step of step S402 is performed as follows without stopping the motion of the sample 3. Is called.

First, in step S402.1, the signal processing circuit 9 acquires the interference fringes Φ ₅ (x, y) in the first operation state (for example, the vibration phase k = 5). Next, in step S402.2, the actual displacement acquisition means 21 calculates a displacement amount M + in the first operation state (k = 5). Next, in step S402.3, the actual displacement acquisition means 21 has an interference fringe Φ in the second operation state (vibration phase k = 17) which is in a phase opposite to the first operation state (in this example, the vibration phase k = 17). _{17 Get} (x, y). Next, in step S402.4, the actual displacement acquisition means 21 calculates the displacement amount M− in the second operation state (k = 17). In step S402.5, the static displacement acquisition means 22 calculates S = (M ++ M −) / 2, which is assumed to be the static displacement (initial shape) of the sample. The reason will be described below with reference to FIG.

  In general, it is assumed that the acceleration applied to the sample 3 in the phase with the amplitude period (FIG. 5A) is the same in absolute value as the acceleration in the opposite phase (FIG. 5B) and opposite in direction. Since the acceleration value and the value of the dynamic deformation resulting from this are assumed to be in a proportional relationship, as described above, a pair of actual displacement M + and actual displacement M- The average value may represent a static displacement S (x, y) that cancels the dynamic deformation. Under this assumption, the static displacement acquisition means 22 calculates the static displacement (initial shape) S of the sample from S = (M ++ M −) / 2 in step S402.5. If this method is used, the static displacement S (x, y) can be calculated from the actual displacement M (x, y, t) even when the sample 3 cannot be stopped. There is an advantage that the step of measuring the actual displacement M (x, y, t) in the state can be omitted.

After the static displacement acquisition step, the actual displacement acquisition means 21 acquires the interference fringes Φ _k (x, y) of the sample in the operating state (phase k) at all k = 0, 1,... 23 in step S403. In step S404, the actual displacement M _k (x, y, t) of the corresponding operation state (phase k) is calculated. Thus, the actual displacement acquisition step is completed.

  After this step, the posture displacement plane calculation step (step S420), dynamic deformation calculation step (step S430), display amount calculation step (step S440), and display step (step S450) in FIG. The same steps as the posture displacement plane calculation step (step S120), dynamic deformation calculation step (step S130), display amount calculation step (step S140), and display step (step S150) in FIG. Since there is, description is abbreviate | omitted.

  FIG. 6 is an operation flow of the dynamic displacement measurement display control method of the third embodiment of the present invention. This embodiment is applied when a sample has a plurality of individually vibrating planes. In this embodiment, the static displacement acquisition step in step S600 and the actual displacement acquisition step in step S610 are the same as the static displacement acquisition step in step S100 and the actual displacement acquisition step in step S110 described in the first embodiment. Therefore, explanation is omitted.

  When the sample has a plurality of individually vibrating planes, it is necessary to calculate the posture displacement plane Z (x, y, t) for each plane that vibrates individually in the posture displacement plane calculation step. That is, the region boundary is determined for each plane that vibrates individually, and the least square plane is obtained within the region. In many cases, the boundary of each plane that vibrates individually can be obtained from the sample design data, but in this example, the data distribution of the actual displacement M (x, y, t) and static displacement S (x, y) is analyzed. By doing this, the region boundary setting data of the plane that individually vibrates in the sample is obtained. This will be described with reference to FIG.

  In FIG. 7A, the entire region where the actual displacement M (x, y, t) of the sample 3 is acquired is defined as region 1. A case where there are two individually oscillating planes indicated by region 2 and region 3 is illustrated. This corresponds to the posture displacement plane calculation step for each plane that vibrates individually as step S620 in FIG. First, in step S621, the posture displacement plane calculating means 23 calculates the displacement difference M ′ = actual displacement M (x, y, t) −static displacement S (the entire region of the sample (the portion designated as region 1 in FIG. 7A)). x, y) is calculated. Next, in step S622, the posture displacement plane calculating means 23 performs region division for each independent moving part of the sample from the local inclination amount, inclination change rate, and spatial continuity of M ′. For example, the case of using the local inclination amount of M ′ will be described. When the height of the displacement difference M ′ with respect to the position in the x direction is a solid line as shown in FIG. 7B, the local inclination amount is as shown in FIG. When the height of the displacement difference M ′ in FIG. 7B is a broken line, the local inclination amount is the frequency indicated by the broken line in FIG. 7C. X giving such a peak of the inclination frequency is set as a region boundary setting x coordinate. If the region boundary setting x coordinate is obtained in this way for every y, the region boundaries of regions 2 and 3 in FIG. 7A can be set. In step S623, the least square plane of M ′ in the area is obtained for each such area, and this is set as the attitude displacement plane Z. Thus, a posture displacement plane Z (x, y, t) is obtained for each plane that vibrates.

  Step S630 is a dynamic deformation calculation step for each plane that vibrates individually. This is because the dynamic displacement calculation means 24 calculates the posture displacement plane Z (x, y, t) for each plane that vibrates individually in step S631. And obtained by calculating the dynamic deformation D = M′−Z = MSZ.

  Step S640 is a display amount calculation step for each plane that vibrates individually, and the display amount calculation means 25 acquires amplitude correction coefficients α, β, and γ for each plane that vibrates individually in step S641. For example, the amplitude correction coefficients α, β, and γ can be changed for each plane that individually vibrates interactively with the operator on the screen of the personal computer pc. As a setting method for α, β, and γ, the display amount calculation means 25 automatically calculates α, β, and γ values based on the maximum amplitude values of Z, S, and D, and sets them as defaults. You may do it. In step S642, the display amount calculation means 25 calculates the display amount H = α * Z + β * S + γ * D for each plane that vibrates individually.

  Step S650 is a display step for each plane that vibrates individually or for the entire sample. The display conversion unit 261 forming the display unit 26 acquires display mode parameters such as the number and position of planes interactively displayed with the operator, for example, and displays the display amount H on the display in the display mode in step S651. To do. As a result, even if there are multiple individually vibrating planes in the sample 3, the display amount H (x, y, t) for each plane area can be displayed for each individually vibrating plane or for the entire sample. It is possible to visually grasp the entire relationship between the movement of individual planes and the movement of multiple planes.

  Regarding the above embodiment, the following additional notes are disclosed.

(Additional remark 1) It is the dynamic displacement measurement display control method which measures the displacement of the surface of the moving sample, and displays the measured value,
When the sample is a thin plate sample that is generally a plane, and the movement is a movement in which the plane of the sample vibrates at a predetermined period,
An actual displacement acquisition step for acquiring an actual displacement M (x, y, t) that is a displacement value of the surface of the moving thin plate sample by the measurement;
A static displacement acquisition step of acquiring a static displacement S (x, y) that is a value indicating a deviation from a true plane of the surface shape of the thin plate sample when the motion is stopped;
From the acquired actual displacement M (x, y, t) and the acquired static displacement S (x, y), a posture displacement plane Z ( x, y, t) posture displacement plane calculation step for calculating,
From the obtained actual displacement M (x, y, t), the obtained static displacement S (x, y) and the calculated attitude displacement plane Z (x, y, t), the thin plate shape The motion for calculating the dynamic deformation D (x, y, t), which is a value indicating the surface shape deformation accompanying the change in acceleration of the thin plate sample after correcting the deviation of the surface shape of the sample from the true plane. A dynamic deformation calculation step;
Amplitude correction is performed on each of the calculated posture displacement plane Z (x, y, t), the acquired static displacement S (x, y), and the calculated dynamic deformation D (x, y, t). A display amount calculating step for calculating a display amount H (x, y, t) obtained by adding the product multiplied by a coefficient;
A dynamic displacement measurement display control method characterized by comprising:

  (Supplementary Note 2) In the static displacement acquisition step, the static displacement S (x, y) is calculated and acquired by calculating the acquired actual displacement M (x, y, t) during the movement at a plurality of time points. The dynamic displacement measurement display control method according to appendix 1, wherein:

(Appendix 3) In the case where the sample has a plurality of individually vibrating planes, in the posture displacement plane calculation step,
The target visual field is divided into a plurality of regions based on region boundary setting data for setting a plurality of region boundaries corresponding to the plurality of individually vibrating planes, and the posture displacement plane Z (x, y, for each of the divided regions The dynamic displacement measurement display control method according to appendix 1 or 2, wherein t) is calculated.

  (Supplementary Note 4) When the sample has a plurality of individually oscillating planes, the local inclination or temporal inclination of the actual displacement M (x, y, t) obtained during the movement at the plurality of positions and the plurality of time points obtained. The dynamic displacement measurement display control method according to supplementary note 3, wherein a change rate is calculated, and the region boundary setting data is calculated from spatial continuity of the local gradient or temporal gradient change rate.

(Supplementary Note 5) When the sample has a plurality of individually vibrating planes, in the display amount calculation step,
For each of the divided areas, the calculated posture displacement plane Z (x, y, t) for each calculated area and the static displacement S (x, y) for each acquired area are calculated. The display amount H (x, y, t) for each region is calculated by adding the dynamic deformation D (x, y, t) for each region multiplied by the amplitude correction coefficient for each region. The dynamic displacement measurement display control method according to appendices 3 to 4.

(Appendix 6) A dynamic displacement measurement display control device that measures the displacement of the surface of a moving sample and displays the measured value.
When the sample is a thin plate sample that is generally a plane, and the movement is a movement in which the plane of the sample vibrates at a predetermined period,
An actual displacement acquisition means for acquiring an actual displacement M (x, y, t) which is a displacement value of the surface of the moving thin plate sample by the measurement;
A static displacement acquisition means for acquiring a static displacement S (x, y) that is a value indicating a deviation from a true plane of the surface shape of the thin plate sample when the movement is stopped;
From the acquired actual displacement M (x, y, t) and the acquired static displacement S (x, y), a posture displacement plane Z ( attitude displacement plane calculating means for calculating (x, y, t);
From the obtained actual displacement M (x, y, t), the obtained static displacement S (x, y) and the calculated attitude displacement plane Z (x, y, t), the thin plate shape The motion for calculating the dynamic deformation D (x, y, t), which is a value indicating the surface shape deformation accompanying the change in acceleration of the thin plate sample after correcting the deviation of the surface shape of the sample from the true plane. A mean deformation calculation means;
Amplitude correction is performed on each of the calculated posture displacement plane Z (x, y, t), the acquired static displacement S (x, y), and the calculated dynamic deformation D (x, y, t). Display amount calculation means for calculating a display amount H (x, y, t) obtained by adding the product multiplied by a coefficient;
A dynamic displacement measurement display control device characterized by comprising:

(Appendix 7) A dynamic displacement measurement display control information processing program for measuring a displacement of the surface of a moving sample and causing a computer to execute a dynamic displacement measurement display control for displaying the measured value,
When the sample is a thin plate sample that is generally a plane, and the movement is a movement in which the plane of the sample vibrates at a predetermined period,
An actual displacement acquisition step for acquiring an actual displacement M (x, y, t) that is a displacement value of the surface of the moving thin plate sample by the measurement;
A static displacement acquisition step of acquiring a static displacement S (x, y) that is a value indicating a deviation from a true plane of the surface shape of the thin plate sample when the motion is stopped;
From the acquired actual displacement M (x, y, t) and the acquired static displacement S (x, y), a posture displacement plane Z ( x, y, t) posture displacement plane calculation step for calculating,
From the obtained actual displacement M (x, y, t), the obtained static displacement S (x, y) and the calculated attitude displacement plane Z (x, y, t), the thin plate shape The motion for calculating the dynamic deformation D (x, y, t), which is a value indicating the surface shape deformation accompanying the change in acceleration of the thin plate sample after correcting the deviation of the surface shape of the sample from the true plane. A dynamic deformation calculation step;
Amplitude correction is performed on each of the calculated posture displacement plane Z (x, y, t), the acquired static displacement S (x, y), and the calculated dynamic deformation D (x, y, t). A display amount calculating step for calculating a display amount H (x, y, t) obtained by adding the product multiplied by a coefficient;
A dynamic displacement measurement display control information processing program characterized by causing a computer to execute.

(Supplementary note 8) A computer-readable recording medium recording a dynamic displacement measurement display control information processing program for measuring a displacement of the surface of a moving sample and causing a computer to execute a dynamic displacement measurement display control for displaying the measured value Because
When the sample is a thin plate sample that is generally a plane, and the movement is a movement in which the plane of the sample vibrates at a predetermined period,
An actual displacement acquisition step for acquiring an actual displacement M (x, y, t) that is a displacement value of the surface of the moving thin plate sample by the measurement;
A static displacement acquisition step of acquiring a static displacement S (x, y) that is a value indicating a deviation from a true plane of the surface shape of the thin plate sample when the motion is stopped;
From the acquired actual displacement M (x, y, t) and the acquired static displacement S (x, y), a posture displacement plane Z ( x, y, t) posture displacement plane calculation step for calculating,
From the acquired actual displacement M (x, y, t), the acquired static displacement S (x, y) and the calculated attitude displacement plane Z (x, y, t), the thin plate shape The motion for calculating the dynamic deformation D (x, y, t), which is a value indicating the surface shape deformation accompanying the change in acceleration of the thin plate sample after correcting the deviation of the surface shape of the sample from the true plane. A dynamic deformation calculation step;
Amplitude correction is performed on each of the calculated posture displacement plane Z (x, y, t), the acquired static displacement S (x, y), and the calculated dynamic deformation D (x, y, t). A display amount calculating step for calculating a display amount H (x, y, t) obtained by adding the product multiplied by a coefficient;
A computer-readable recording medium on which a dynamic displacement measurement display control information processing program is recorded.

  The dynamic displacement measurement display control method of the present invention is suitable for precise displacement observation of a micro high-speed moving body such as a MEMS device, and can be used by simultaneously presenting three displacements with different displacement amounts and properties to the measurement device user. Enables users to easily and visually grasp the qualitative and quantitative relationship between the three displacements, for example, in the MEMS device application industries such as IT equipment, AV equipment, and automotive parts that apply MEMS devices. There is a possibility that.

Operation Flow Diagram of Dynamic Displacement Measurement Display Control Method of First Embodiment Configuration diagram of the dynamic displacement measurement display control apparatus of the first embodiment of the present invention Example displayed in the display step of the first embodiment of the present invention Operation flow diagram of dynamic displacement measurement display control method of second embodiment of the present invention Example of calculating the static displacement S (x, y) in the second embodiment of the present invention Operation flow diagram of dynamic displacement measurement display control method of third embodiment of the present invention Example of calculation of region boundary setting data of individually vibrating plane in sample in the third embodiment of the present invention Configuration example of a dynamic displacement measurement display controller using a conventional strobe phase optical system spl Dynamic displacement measurement method and display method by conventional strobe phase optical system spl Analysis of displacement factors contributing to displacement measured as actual displacement M (x, y, t)

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Light source 2 Half mirror 3 Sample 4 Reference mirror 5 Piezo stage 6 Sample position and orientation control stage 7 Imaging lens 8 CCD camera
9 Signal processing circuit
21 Actual displacement acquisition means
22 Static displacement acquisition means
23 Attitude displacement plane calculation means
24 Dynamic deformation calculation means
25 Display amount calculation means
26 Display means
261 Display converter
spl Strobe phase optical system pc PC m monitor
M (x, y, t) Actual displacement
Z (x, y, t) Posture displacement plane
S (x, y) Static displacement
D (x, y, t) Dynamic deformation α, β, γ Amplitude correction factor
H (x, y, t) Display amount

Claims (5)

It is a dynamic displacement measurement display control method for measuring the displacement of the surface of a moving sample and displaying the measured value,
When the sample is a thin plate sample that is generally a plane, and the movement is a movement in which the plane of the sample vibrates at a predetermined period,
An actual displacement acquisition step for acquiring an actual displacement M (x, y, t) that is a displacement value of the surface of the moving thin plate sample by the measurement;
A static displacement acquisition step of acquiring a static displacement S (x, y) that is a value indicating a deviation from a true plane of the surface shape of the thin plate sample when the motion is stopped;
From the acquired actual displacement M (x, y, t) and the acquired static displacement S (x, y), a posture displacement plane Z ( x, y, t) posture displacement plane calculation step for calculating,
From the obtained actual displacement M (x, y, t), the obtained static displacement S (x, y) and the calculated attitude displacement plane Z (x, y, t), the thin plate shape The motion for calculating the dynamic deformation D (x, y, t), which is a value indicating the surface shape deformation accompanying the change in acceleration of the thin plate sample after correcting the deviation of the surface shape of the sample from the true plane. A dynamic deformation calculation step;
Amplitude correction is performed on each of the calculated posture displacement plane Z (x, y, t), the acquired static displacement S (x, y), and the calculated dynamic deformation D (x, y, t). A display amount calculating step for calculating a display amount H (x, y, t) obtained by adding the product multiplied by a coefficient;
A dynamic displacement measurement display control method characterized by comprising:   In the static displacement obtaining step, the static displacement S (x, y) is calculated and obtained by calculating the obtained actual displacement M (x, y, t) during the movement at a plurality of time points. The dynamic displacement measurement display control method according to claim 1. In the case of having a plurality of individually vibrating planes in the sample, in the posture displacement plane calculation step,
Calculate the local inclination or temporal inclination change rate of the actual displacement M (x, y, t) during the movement of the acquired multiple positions and multiple time points, and spatial continuity of the local inclination or temporal inclination change rate 3. The dynamic displacement measurement display control according to claim 1, wherein the target visual field is divided into a plurality of regions based on the characteristics, and a posture displacement plane Z (x, y, t) for each of the divided regions is calculated. Method. A dynamic displacement measurement display control information processing program for causing a computer to execute a dynamic displacement measurement display control for measuring a displacement of a moving sample surface and displaying the measured value,
When the sample is a thin plate sample that is generally a plane, and the movement is a movement in which the plane of the sample vibrates at a predetermined period,
An actual displacement acquisition step of acquiring an actual displacement M (x, y, t) that is a displacement value of the surface of the moving thin plate sample by the measurement;
A static displacement acquisition step for acquiring a static displacement S (x, y) that is a value indicating a deviation from a true plane of the surface shape of the thin plate sample when the motion is stopped;
From the acquired actual displacement M (x, y, t) and the acquired static displacement S (x, y), a posture displacement plane Z (which is a plane indicating the posture during vibration of the thin plate sample) x, y, t) posture displacement plane calculation step for calculating,
From the acquired actual displacement M (x, y, t), the acquired static displacement S (x, y) and the calculated attitude displacement plane Z (x, y, t), the thin plate shape The motion for calculating the dynamic deformation D (x, y, t), which is a value indicating the surface shape deformation accompanying the change in acceleration of the thin plate sample after correcting the deviation of the surface shape of the sample from the true plane. A dynamic deformation calculation step;
Amplitude correction is performed on each of the calculated posture displacement plane Z (x, y, t), the acquired static displacement S (x, y), and the calculated dynamic deformation D (x, y, t). A display amount calculating step for calculating a display amount H (x, y, t) obtained by adding the product multiplied by a coefficient;
An information processing program for display control of dynamic displacement, characterized by causing a computer to execute. It is a dynamic displacement measurement display control device that measures the displacement of the surface of a moving sample and displays the measured value.
When the sample is a thin plate sample that is generally a plane, and the movement is a movement in which the plane of the sample vibrates at a predetermined period,
An actual displacement acquisition means for acquiring an actual displacement M (x, y, t) which is a displacement value of the surface of the moving thin plate sample by the measurement;
A static displacement acquisition means for acquiring a static displacement S (x, y) that is a value indicating a deviation from a true plane of the surface shape of the thin plate sample when the movement is stopped;
From the acquired actual displacement M (x, y, t) and the acquired static displacement S (x, y), a posture displacement plane Z ( attitude displacement plane calculating means for calculating (x, y, t);
From the obtained actual displacement M (x, y, t), the obtained static displacement S (x, y) and the calculated attitude displacement plane Z (x, y, t), the thin plate shape The motion for calculating the dynamic deformation D (x, y, t), which is a value indicating the surface shape deformation accompanying the change in acceleration of the thin plate sample after correcting the deviation of the surface shape of the sample from the true plane. A mean deformation calculation means;
Amplitude correction is performed on each of the calculated posture displacement plane Z (x, y, t), the acquired static displacement S (x, y), and the calculated dynamic deformation D (x, y, t). Display amount calculation means for calculating a display amount H (x, y, t) obtained by adding the product multiplied by a coefficient;
A dynamic displacement measurement display control device characterized by comprising:

Images