JP2007112668A - Method and apparatus for manufacturing glass member - Google Patents

Method and apparatus for manufacturing glass member Download PDF

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JP2007112668A
JP2007112668A JP2005306454A JP2005306454A JP2007112668A JP 2007112668 A JP2007112668 A JP 2007112668A JP 2005306454 A JP2005306454 A JP 2005306454A JP 2005306454 A JP2005306454 A JP 2005306454A JP 2007112668 A JP2007112668 A JP 2007112668A
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glass tube
outer diameter
internal pressure
glass
control
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Taiichiro Yamashita
泰一郎 山下
Tetsuya Nakanishi
哲也 中西
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Sumitomo Electric Industries Ltd
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    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/018—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD] by glass deposition on a glass substrate, e.g. by inside-, modified-, plasma-, or plasma modified- chemical vapour deposition [ICVD, MCVD, PCVD, PMCVD], i.e. by thin layer coating on the inside or outside of a glass tube or on a glass rod
    • C03B37/01861—Means for changing or stabilising the diameter or form of tubes or rods

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  • Organic Chemistry (AREA)
  • Glass Melting And Manufacturing (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a glass member by which the outside diameter of a glass tube is stabilized over the whole length. <P>SOLUTION: In a process for letting a gas 4 for controlling the inner pressure flow in, a pressure control CP for adjusting the flow rate FQ of the gas 4 for controlling the inner pressure so that the inner pressure P<SB>in</SB>of the glass tube becomes the reference inner pressure set value P<SB>in</SB><SP>*</SP>is carried out in the end part regions 21, 22 of the glass tube 2, an outer diameter control CD for adjusting the flow rate of the gas 4 for controlling the inner pressure so that the outer diameter D of the glass tube becomes the reference outer diameter set value D<SP>*</SP>is carried out in the intermediate region 23 of the glass tube 2. The pressure control CP and the diameter control CD are carried out so that the flow rate of the gas 4 for controlling the inner pressure is not changed in an instant when the pressure control CP and the outer diameter control CD are switched to and from each other. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

本発明は、ガラス管の内面にガラス微粒子層またはガラス層を形成するに際し、ガラス管の外径を全長にわたり安定させることができるガラス部材の製造方法および製造装置に関する。   The present invention relates to a method and an apparatus for manufacturing a glass member that can stabilize the outer diameter of a glass tube over its entire length when forming a glass fine particle layer or a glass layer on the inner surface of the glass tube.

管形状のガラス部材、たとえば光ファイバ母材の製造方法として、内付けＣＶＤ（ＭＣＶＤ：Ｍｏｄｉｆｉｅｄ Ｃｈｅｍｉｃａｌ Ｖａｐｏｒ Ｄｅｐｏｓｉｔｉｏｎ）法によりガラス管内面にガラス層を形成する技術が知られている（たとえば、特許文献１等参照）。   As a method for manufacturing a tube-shaped glass member, for example, an optical fiber preform, a technique is known in which a glass layer is formed on the inner surface of a glass tube by an internal CVD (MCVD: Modified Chemical Vapor Deposition) method (for example, Patent Document 1). Etc.).

図５に示すように、この種のガラス管内面にガラス層を形成する装置９では、ガラス管９１をダミー管９２１，９２２を介してガラス管旋盤９３（ガラス管保持部９３１，９３２）に取り付け、これらの一体管の一方端側（上流側）から他方端側（下流側）に、ガラス原料含有ガス供給装置９０からガラス原料含有ガス９４１を流しつつ、熱源９５をガラス管９１に沿って初期位置ａからトラバースターン位置ｂまで相対的に移動させてガラス管９１を加熱し、その内面にガラス微粒子層（たとえば、エルビウム添加光ファイバ：ＥＤＦを作る場合）またはガラス層９６を形成する。ガラス原料含有ガス９４１が流されるガラス管には製品として有効な部分と有効でない部分がある。図５では、ガラス管９１が製品として有効な部分（通常、ガラス微粒子層またはガラス層９６が長さ方向に均一に形成される部分）であり、ダミー管９２１，９２２が有効でない部分である。   As shown in FIG. 5, in this type of apparatus 9 for forming a glass layer on the inner surface of a glass tube, the glass tube 91 is attached to a glass tube lathe 93 (glass tube holding portions 931 and 932) via dummy tubes 921 and 922. In addition, while the glass material-containing gas 941 is allowed to flow from the glass material-containing gas supply device 90 from one end side (upstream side) to the other end side (downstream side) of these integrated tubes, the heat source 95 is initially set along the glass tube 91. The glass tube 91 is heated by relatively moving from the position a to the traverse turn position b, and a glass fine particle layer (for example, when making an erbium-doped optical fiber: EDF) or a glass layer 96 is formed on the inner surface thereof. The glass tube in which the glass raw material-containing gas 941 is flowed includes a part that is effective as a product and a part that is not effective. In FIG. 5, the glass tube 91 is a portion that is effective as a product (usually a portion in which the glass fine particle layer or the glass layer 96 is uniformly formed in the length direction), and the dummy tubes 921 and 922 are portions that are not effective.

特許文献１には、ガラス管９１の内圧を調製してガラス管の外径を一定とすることが開示されている。この場合には、ガラス管９１内にはガラス原料含有ガス９４１の他、内圧調整用ガス供給装置９８から内圧調整用ガス９４２が供給される。
特開２００４−９９３４２ Patent Document 1 discloses that the inner pressure of the glass tube 91 is adjusted to make the outer diameter of the glass tube constant. In this case, in addition to the glass raw material containing gas 941, the internal pressure adjusting gas 942 is supplied from the internal pressure adjusting gas supply device 98 into the glass tube 91.
JP 2004-99342 A

ガラス管９１の端部領域９７１，９７２は、ガラス管の加熱を開始または終了する部分であるので、端部以外の部分（９７３）よりも温度が低くなる。このため、外径が変動しない。なお、図５では、端部領域９７１，９７２は、ガラス管９１の端部およびダミー管９２１，９２２の各端部を含む接合部分近傍の領域である。   Since the end regions 971 and 972 of the glass tube 91 are portions where the heating of the glass tube starts or ends, the temperature is lower than the portion (973) other than the end portion. For this reason, the outer diameter does not vary. In FIG. 5, end regions 971 and 972 are regions in the vicinity of the joint portion including the end portions of the glass tube 91 and the end portions of the dummy tubes 921 and 922.

ガラス管９１の端部領域９７１，９７２では、外径を検出することが不可能な場合もある。
これらの場合に、端部で外径が所定の径となっていてもその内圧は端部以外においては大きすぎることや小さすぎることがある。このため熱源の移動の開始点から少し移動した点では急に外径が大きくなる（内圧が大きすぎる場合）ことや急に外径が小さくなる（内圧が小さすぎる場合）ことがある。この場合、外径を一定にするために内圧を調整する制御が働くが、急に変動した外径が落ち着くまでにはしばらくの時間を要し、その間に外径が大きくなりすぎることと小さくなりすぎることを繰り返すハンチングが生じることがある。 In the end regions 971 and 972 of the glass tube 91, it may be impossible to detect the outer diameter.
In these cases, even if the outer diameter is a predetermined diameter at the end, the internal pressure may be too large or too small except at the end. For this reason, the outer diameter may suddenly increase (when the internal pressure is too large) or suddenly decrease (when the internal pressure is too small) at a point where the heat source has moved slightly from the starting point. In this case, control to adjust the internal pressure works to keep the outer diameter constant, but it takes some time for the suddenly changing outer diameter to settle, and the outer diameter becomes too large and small during that time. Hunting that repeats too much may occur.

また、外径を一定とするための制御が働くことでガラス管の内圧がハンチングするとガラス管内の気流が乱れてガラス原料含有ガス９４１が逆流してガラス微粒子層またはガラス層９６がガラス管９１の内面に形成されることが乱されるおそれもある。   In addition, when the inner pressure of the glass tube is hunted by controlling the outer diameter to be constant, the air flow in the glass tube is disturbed and the glass raw material-containing gas 941 flows backward, so that the glass fine particle layer or the glass layer 96 is in the glass tube 91. There is also a possibility that the formation on the inner surface may be disturbed.

本発明の目的は、ガラス管の内面にガラス微粒子層またはガラス層を形成するに際し、ガラス管の外径を全長にわたり安定させることにある。
本発明の他の目的は、ガラス管の内面にガラス微粒子層またはガラス層を形成するに際し、ガラス管の外径を全長にわたり安定させ、かつガラス管の内面のガラス微粒子層またはガラス層厚を所望の値とすることにある。 An object of the present invention is to stabilize the outer diameter of the glass tube over the entire length when forming a glass fine particle layer or a glass layer on the inner surface of the glass tube.
Another object of the present invention is to stabilize the outer diameter of the glass tube over the entire length and form the glass particle layer or glass layer thickness on the inner surface of the glass tube when forming the glass particle layer or glass layer on the inner surface of the glass tube. It is in the value of.

本発明のガラス部材の製造方法は、ガラス管にガラス原料含有ガスを流しつつ前記ガラス管に沿って相対的に移動する熱源により前記ガラス管を加熱し、前記ガラス管の内面にガラス微粒子層またはガラス層を形成する工程と、当該工程に併せて前記ガラス管に内圧調整用ガスを流入させる工程とを有するものであって、
前記内圧調整用ガスを流入させる工程において、
前記ガラス管の一方の端部領域または双方の端部領域では、前記ガラス管の内圧が基準内圧設定値になるように前記内圧調整用ガスの流量を調整する圧力制御を行い、
前記ガラス管の一方の端部領域または双方の端部領域を除く領域では、前記ガラス管の外径が基準外径設定値になるように前記内圧調整用ガスの流量を調整する外径制御を行い、かつ、
前記圧力制御および前記外径制御が、一方から他方に切り換わる瞬間に前記内圧調整用ガスの流量が変化しないように前記圧力制御および前記外径制御を行う、
ことを特徴とする In the method for producing a glass member of the present invention, the glass tube is heated by a heat source that moves relatively along the glass tube while flowing a glass raw material-containing gas through the glass tube, and a glass fine particle layer or an inner surface of the glass tube is formed. A step of forming a glass layer, and a step of flowing an internal pressure adjusting gas into the glass tube in combination with the step,
In the step of introducing the internal pressure adjusting gas,
In one or both end regions of the glass tube, pressure control is performed to adjust the flow rate of the internal pressure adjusting gas so that the internal pressure of the glass tube becomes a reference internal pressure setting value,
In the region excluding one end region or both end regions of the glass tube, outer diameter control is performed to adjust the flow rate of the internal pressure adjusting gas so that the outer diameter of the glass tube becomes a reference outer diameter set value. Done and
The pressure control and the outer diameter control are performed so that the flow rate of the internal pressure adjusting gas does not change at the moment when the pressure control and the outer diameter control are switched from one to the other.
It is characterized by

本発明のガラス部材の製造方法では、前記圧力制御においては、前記熱源の位置の前記ガラス管の内圧の測定値と前記内圧設定値との偏差に基づき前記内圧調整用ガスの流量を調整し、前記外径制御においては、前記熱源の位置の前記ガラス管の外径の測定値と前記基準外径設定値との偏差に基づき前記内圧調整用ガスの流量を調整することができる。   In the method for producing a glass member of the present invention, in the pressure control, the flow rate of the internal pressure adjusting gas is adjusted based on a deviation between the measured value of the internal pressure of the glass tube at the position of the heat source and the set value of the internal pressure, In the outer diameter control, the flow rate of the inner pressure adjusting gas can be adjusted based on the deviation between the measured value of the outer diameter of the glass tube at the position of the heat source and the reference outer diameter setting value.

また、本発明のガラス部材の製造方法では、前記ガラス部材が光ファイバ母材である場合に、前記ガラス管の内面にガラス微粒子層またはガラス層を形成する工程を複数回行うことができる。
本発明のガラス部材の製造方法によれば、熱源がガラス管の端部に位置するときは前記熱源の位置のガラス管の外径によらず内圧を設定値とする。これにより、所定の内圧でガラス管の加熱およびガラス微粒子層またはガラス層の形成を開始することができる。したがって、ガラス管の温度が所定の温度近くとなったときに、急にガラス管の外径が変動することがない。そして内圧を所定の値としてガラス管の外径が一定となるように内圧を調整する制御に切り換える。切り換え時には流量が変化しないようにするので急な内圧の変動がない。それ以降は、内圧の調整により熱源により加熱されるガラス管の外径が一定となる。終了端では逆の動作を行い、切り換え時の流量を基準にして圧力が設定値になるように流量を下げるまたは上げる。 Moreover, in the manufacturing method of the glass member of this invention, when the said glass member is an optical fiber preform | base_material, the process of forming a glass fine particle layer or a glass layer in the inner surface of the said glass tube can be performed in multiple times.
According to the method for producing a glass member of the present invention, when the heat source is located at the end of the glass tube, the internal pressure is set as the set value regardless of the outer diameter of the glass tube at the position of the heat source. Thereby, heating of a glass tube and formation of a glass fine particle layer or a glass layer can be started with a predetermined internal pressure. Therefore, when the temperature of the glass tube becomes close to a predetermined temperature, the outer diameter of the glass tube does not change suddenly. Then, the control is switched to control for adjusting the internal pressure so that the outer diameter of the glass tube is constant with the internal pressure as a predetermined value. Since the flow rate is prevented from changing at the time of switching, there is no sudden fluctuation in internal pressure. Thereafter, the outer diameter of the glass tube heated by the heat source becomes constant by adjusting the internal pressure. At the end, the reverse operation is performed, and the flow rate is reduced or increased so that the pressure becomes a set value based on the flow rate at the time of switching.

本発明のガラス部材の製造装置は、
ガラス原料含有ガス供給装置と、熱源と、熱源相対移動装置とを備え、前記ガラス原料含有ガス供給装置により前記ガラス管にガラス原料含有ガスを流しつつ前記熱源相対移動装置により前記熱源を前記ガラス管に沿って相対的に移動させて前記ガラス管を加熱し、前記ガラス管の内面にガラス微粒子層またはガラス層を形成するものであって、
前記ガラス管内に内圧調整用ガスを供給する内圧調整用ガス供給装置と、
前記ガラス管の一方の端部領域または双方の端部領域の前記熱源の位置における前記ガラス管の内圧を測定するガラス管内圧センサと、
前記ガラス管の一方の端部領域または双方の端部領域を除く領域の前記熱源の位置における前記ガラス管の外径を測定するガラス管外径センサと、
前記熱源が前記ガラス管の一方の端部領域または双方の端部領域にあるときは前記ガラス管内圧センサによる測定値に基づき前記ガラス管の内圧が基準内圧設定値になるように、前記熱源の位置の前記ガラス管の内圧の測定値と前記基準内圧設定値との偏差に基づいて前記内圧調整用ガスの流量を調整する圧力制御を行い、
前記熱源が前記ガラス管の一方の端部領域または双方の端部領域を除く領域にあるときは前記ガラス管外径センサによる測定値に基づき前記ガラス管の外径が基準外径設定値になるように前記熱源の位置の前記ガラス管の外径の測定値と前記基準外径設定値との偏差に基づいて前記内圧調整用ガスの流量を調整する外径制御を行い、かつ、
前記圧力制御および前記外径制御が、一方から他方に切り換わる瞬間に、前記内圧調整用ガスの流量が変化しないように前記圧力制御および前記外径制御を行う、
制御装置と、
を備えたことを特徴とする。 The apparatus for producing a glass member of the present invention comprises:
A glass raw material containing gas supply device, a heat source, and a heat source relative movement device, wherein the glass raw material containing gas supply device causes the glass raw material containing gas to flow through the glass tube while the heat source relative movement device causes the heat source to move to the glass tube. The glass tube is heated by relatively moving the glass tube, and a glass fine particle layer or a glass layer is formed on the inner surface of the glass tube,
An internal pressure adjusting gas supply device for supplying an internal pressure adjusting gas into the glass tube;
A glass tube internal pressure sensor for measuring an internal pressure of the glass tube at the position of the heat source in one end region or both end regions of the glass tube;
A glass tube outer diameter sensor that measures an outer diameter of the glass tube at the position of the heat source in a region excluding one end region or both end regions of the glass tube;
When the heat source is in one end region or both end regions of the glass tube, the internal pressure of the glass tube is set to a reference internal pressure set value based on a measurement value by the glass tube internal pressure sensor. Performing pressure control to adjust the flow rate of the internal pressure adjusting gas based on the deviation between the measured value of the internal pressure of the glass tube at the position and the reference internal pressure setting value;
When the heat source is in one end region of the glass tube or in a region excluding both end regions, the outer diameter of the glass tube becomes a reference outer diameter setting value based on a measurement value by the glass tube outer diameter sensor. Performing outer diameter control to adjust the flow rate of the internal pressure adjusting gas based on the deviation between the measured value of the outer diameter of the glass tube at the position of the heat source and the reference outer diameter setting value, and
The pressure control and the outer diameter control are performed so that the flow rate of the internal pressure adjusting gas does not change at the moment when the pressure control and the outer diameter control are switched from one to the other.
A control device;
It is provided with.

本発明のガラス部材の製造装置では、前記制御装置は、前記圧力制御においては、前記熱源の位置の前記ガラス管の内圧の測定値と前記内圧設定値との偏差に基づき前記内圧調整用ガス流量を調整し、前記外径制御においては、前記熱源の位置の前記ガラス管の外径の測定値と前記基準外径設定値との偏差に基づき前記内圧調整用ガス流量を調整することができる。
また、本発明のガラス部材の製造装置では、前記ガラス部材が光ファイバ母材である場合に、前記ガラス管の内面にガラス微粒子層またはガラス層を形成する工程を複数回行うことができる。 In the glass member manufacturing apparatus of the present invention, the control device, in the pressure control, uses the internal pressure adjusting gas flow rate based on a deviation between the measured value of the internal pressure of the glass tube at the position of the heat source and the set value of the internal pressure. In the outer diameter control, the inner pressure adjusting gas flow rate can be adjusted based on the deviation between the measured value of the outer diameter of the glass tube at the position of the heat source and the reference outer diameter setting value.
Moreover, in the manufacturing apparatus of the glass member of this invention, when the said glass member is an optical fiber preform | base_material, the process of forming a glass fine particle layer or a glass layer in the inner surface of the said glass tube can be performed in multiple times.

本発明では、ガラス管の内面にガラス微粒子層またはガラス層を形成するに際し、ガラス管の端部領域では内圧測定値に基づく圧力制御を行い、ガラス管の端部領域を除く領域（中間領域）では外径測定値に基づく外径制御を行い、かつ圧力制御ＣＰと外径制御ＣＤとの切り換えの瞬間に、内圧調整用ガスの流量が急激に変化しないような制御を行う。これにより、ガラス管の内圧が急激に変化することはなく（したがって、ガラス原料含有ガスの定常的な流れが維持される）、ガラス管の外径を全長にわたり安定させることができる。
また、ガラス管の内圧も安定し、ガラス原料含有ガスの逆流もなく、ガラス微粒子層またはガラス層の形成が乱れるといった問題も生じない。 In the present invention, when the glass fine particle layer or the glass layer is formed on the inner surface of the glass tube, the end region of the glass tube performs pressure control based on the measured internal pressure, and the region excluding the end region of the glass tube (intermediate region) Then, the outside diameter control based on the outside diameter measurement value is performed, and at the moment of switching between the pressure control CP and the outside diameter control CD, control is performed so that the flow rate of the internal pressure adjusting gas does not change suddenly. Thereby, the internal pressure of the glass tube does not change abruptly (therefore, a steady flow of the glass raw material-containing gas is maintained), and the outer diameter of the glass tube can be stabilized over the entire length.
Further, the internal pressure of the glass tube is stable, there is no back flow of the glass raw material-containing gas, and there is no problem that the formation of the glass fine particle layer or the glass layer is disturbed.

以下、本発明の一実施形態を、ガラス部材をＭＣＶＤ法により製造する場合を例に説明する。なお、各図における各構成要素の寸法・形状等は実際のものと異なる。   Hereinafter, an embodiment of the present invention will be described by taking a case where a glass member is manufactured by an MCVD method as an example. In addition, the dimension, shape, etc. of each component in each drawing are different from actual ones.

以下の実施形態では、ガラス部材は光ファイバ母材であり、後述するようにガラス管の内面にガラス微粒子層またはガラス層を形成する工程が複数回行われる。   In the following embodiments, the glass member is an optical fiber preform, and a step of forming a glass fine particle layer or a glass layer on the inner surface of the glass tube is performed a plurality of times as will be described later.

図１は本発明のガラス部材の製造装置１を示す説明図である。図１において、製造装置１は、ガラス原料含有ガス供給装置１１と、ガラス管旋盤１２（ガラス管保持部１２１，１２２）と、熱源１３と、熱源相対移動装置１４と、内圧調整用ガス供給装置１５と、ガラス管内圧センサ１６（１６１，１６２）と、ガラス管外径センサ１７と、制御装置１８とを備えている。   FIG. 1 is an explanatory view showing a glass member manufacturing apparatus 1 according to the present invention. In FIG. 1, a manufacturing apparatus 1 includes a glass raw material containing gas supply device 11, a glass tube lathe 12 (glass tube holding portions 121 and 122), a heat source 13, a heat source relative movement device 14, and an internal pressure adjusting gas supply device. 15, a glass tube internal pressure sensor 16 (161, 162), a glass tube outer diameter sensor 17, and a control device 18.

ガラス管旋盤１２には、ガラス管保持部１２１，１２２により、両端にダミー管２０１，２０２が取り付けられたガラス管２が保持されている。   The glass tube lathe 12 holds the glass tube 2 with the dummy tubes 201 and 202 attached to both ends by the glass tube holding portions 121 and 122.

熱源１３は、酸水素バーナ、プラズマバーナ、高周波ヒータ、熱線ヒータ等である。ガラス管２にはガラス原料含有ガス３が流され、熱源１３は熱源移動装置１４によりガラス管２に沿って相対的に移動し、当該ガラス管２を加熱する。これにより、ガラス管２の内面にガラス微粒子層またはガラス層（３１）を形成する。なお、ガラス管２の内面にガラス微粒子層またはガラス層（３１）を形成する工程は、その厚みが所定値になるように複数回行われる。   The heat source 13 is an oxyhydrogen burner, a plasma burner, a high frequency heater, a hot wire heater, or the like. A glass raw material-containing gas 3 is caused to flow through the glass tube 2, and the heat source 13 is relatively moved along the glass tube 2 by the heat source moving device 14 to heat the glass tube 2. Thereby, a glass fine particle layer or a glass layer (31) is formed on the inner surface of the glass tube 2. In addition, the process of forming a glass fine particle layer or a glass layer (31) on the inner surface of the glass tube 2 is performed a plurality of times so that the thickness becomes a predetermined value.

内圧調整用ガス供給装置１５は、バルブ１５１を有しておりバルブ開度に応じて内圧調整用ガス４をガラス管２内（図１ではガラス管保持部１２２）に注入することができる。   The internal pressure adjusting gas supply device 15 has a valve 151 and can inject the internal pressure adjusting gas 4 into the glass tube 2 (the glass tube holding portion 122 in FIG. 1) according to the valve opening.

ガラス管内圧センサ１６１，１６２は、ガラス管２の端部領域２１，２２における内圧Ｐin1，Ｐin2を測定することができる。本発明における「ガラス管の端部領域」は、図１ではガラス管２の端部領域２１，２２に相当するが、ガラス管２とダミー管２０１，２０２の接合部近傍（ガラス管２の一部とダミー管２０１，２０２の一部）を本発明における「ガラス管の端部領域」としてもよいし、ガラス管２を含まないダミー管２０１，２０２の一部を本発明における「ガラス管の端部領域」としてもよい。なお、両端にダミー管２０１，２０２が取り付けられていない場合には、ガラス管２の製品とされる部分（有効部Ｅ）の両側を本発明における「ガラス管の端部領域」とすることができる。 The glass tube internal pressure sensors 161 and 162 can measure the internal pressures P in1 and P in2 in the end regions 21 and 22 of the glass tube 2. The “end region of the glass tube” in the present invention corresponds to the end regions 21 and 22 of the glass tube 2 in FIG. 1, but in the vicinity of the junction between the glass tube 2 and the dummy tubes 201 and 202 (one of the glass tube 2). And a part of the dummy tubes 201 and 202) may be used as “the end region of the glass tube” in the present invention, and a part of the dummy tubes 201 and 202 not including the glass tube 2 may be “glass tube It may be an “end region”. In addition, when the dummy tubes 201 and 202 are not attached to both ends, both sides of the portion (effective portion E) to be the product of the glass tube 2 may be set as “the end region of the glass tube” in the present invention. it can.

端部領域２１，２２の内圧をＰin（ｘ）とし、ガラス管２とダミー管２０１，２０２との全体長がＬであり、ガラス管保持部１２１からの端部２１，２２の位置がｘである場合において、ガラス管内圧センサ１６１，１６２の測定値がＰin1，Ｐin2であるときは、
Ｐin（ｘ）＝Ｐin1＋［（Ｌ−ｘ1）／Ｌ］×（Ｐin2−Ｐin1）
として求めることができる。
ガラス管外径センサ１７は、ガラス管２の端部領域２１，２２を除く領域の熱源１３の位置ｘにおけるガラス管２の外径Ｄ（ｘ）を測定することができる。図１において、ｘはガラス管保持部１２１からの距離である。ガラス管外径センサ１７として、具体的には撮像装置を用いた距離検出装置や、レーザ光源を用いた距離検出装置やＣＣＤを使用することができる。撮像装置を用いた距離検出装置では、ガラス管２を撮影し、撮影画像から画像処理（たとえば、ガラス管２の熱源１３を含む部分の形状認識等）によりガラス管２の太さを求めることができる。また、レーザ光源からガラス管２にレーザ光を照射し、出射光と反射光との位相差を測定することでレーザ光源距離（たとえば、結果的には、ガラス管２の中心軸とガラス管２の表面との距離）を検出することができる。 The internal pressure of the end regions 21 and 22 is P in (x), the entire length of the glass tube 2 and the dummy tubes 201 and 202 is L, and the positions of the end portions 21 and 22 from the glass tube holding part 121 are x. When the measured values of the glass tube internal pressure sensors 161 and 162 are P in1 and P in2 ,
P in (x) = P in1 + [(L−x 1 ) / L] × (P in2 −P in1 )
Can be obtained as
The glass tube outer diameter sensor 17 can measure the outer diameter D (x) of the glass tube 2 at the position x of the heat source 13 in the region excluding the end regions 21 and 22 of the glass tube 2. In FIG. 1, x is the distance from the glass tube holding part 121. Specifically, as the glass tube outer diameter sensor 17, a distance detection device using an imaging device, a distance detection device using a laser light source, or a CCD can be used. In the distance detection device using the imaging device, the glass tube 2 is photographed, and the thickness of the glass tube 2 is obtained from the photographed image by image processing (for example, shape recognition of a portion including the heat source 13 of the glass tube 2). it can. In addition, the laser light source is irradiated with laser light from the laser light source, and the phase difference between the emitted light and the reflected light is measured to thereby determine the laser light source distance (for example, the central axis of the glass tube 2 and the glass tube 2 as a result. Can be detected.

制御装置１８は、熱源１３がガラス管２の端部領域２１，２２にあるときはガラス管内圧センサ１６による測定値に基づきガラス管２の内圧Ｐin（ｔ）が基準内圧設定値（Ｐin *）になるように内圧調整用ガス４の流量ＦＱ（ＦＰ（ｔ）＝ＦＱ）を調整する圧力制御ＣＰを行う。なお、熱源１３の移動は、時間ｔと位置ｘとに相関があるので、流量ＦＱは時間の関数ＦＰ（ｔ）または距離の関数ＦＰ（ｘ）で表される。ここでは、流量ＦＱはＦＰ（ｔ）で記すものとする。 When the heat source 13 is located in the end regions 21 and 22 of the glass tube 2, the control device 18 determines that the internal pressure P in (t) of the glass tube 2 is based on the measured value by the glass tube internal pressure sensor 16 and the reference internal pressure setting value (P in * ) A pressure control CP is performed to adjust the flow rate FQ (FP (t) = FQ) of the internal pressure adjusting gas 4 so as to be. Since the movement of the heat source 13 has a correlation between the time t and the position x, the flow rate FQ is expressed by a function FP (t) of time or a function FP (x) of distance. Here, the flow rate FQ is expressed as FP (t).

また、制御装置１８は、熱源１３がガラス管２の端部領域２１，２２を除く領域（中間領域２３）にあるときはガラス管外径センサ１７による測定値に基づき内圧調整用ガス４の流量ＦＱを、ガラス管２の外径Ｄ（ｘ）が基準外径設定値（Ｄ*）になるように内圧調整用ガス４の流量ＦＱ（ＦＰ（ｔ）＝ＦＱ）を調整する外径制御ＣＤを行う。なお、圧力制御ＣＰの場合と同様、この場合にも流量ＦＱは時間の関数ＦＤ（ｔ）または距離の関数ＦＤ（ｘ）で表される。ここでは、流量ＦＱはＦＤ（ｔ）で記すものとする。 In addition, when the heat source 13 is in a region (intermediate region 23) excluding the end regions 21 and 22 of the glass tube 2, the control device 18 controls the flow rate of the internal pressure adjusting gas 4 based on the measured value by the glass tube outer diameter sensor 17. The outer diameter control CD for adjusting the flow rate FQ (FP (t) = FQ) of the internal pressure adjusting gas 4 so that the outer diameter D (x) of the glass tube 2 becomes the reference outer diameter setting value (D * ). I do. As in the case of the pressure control CP, the flow rate FQ is also expressed in this case as a time function FD (t) or a distance function FD (x). Here, the flow rate FQ is expressed as FD (t).

さらに、制御装置１８は、圧力制御ＣＰおよび外径制御ＣＤが、一方から他方に切り換わる瞬間（内圧制御から外径制御ＣＤに切り換わる瞬間ｔ＝ｔch1，外径制御ＣＤから内圧制御に切り換わる瞬間ｔ＝ｔch2）に、内圧調整用ガス４の流量ＦＱが変化しないように圧力制御ＣＰおよび外径制御ＣＤを行う（ＦＰ（ｔch1）＝ＦＤ（ｔch1）、ＦＰ（ｔch2）＝ＦＤ（ｔch2））。この切り換えの瞬間は、温度または移動距離によって決まる。温度が上がってガラス管が柔らかくなって制御が効く状態となった時を切り換え時とすることができる。そのために必要な時間または熱源１３の移動距離を予め求め、その時間が経過したときまたは熱源１３が移動したときとすることもできる。 Further, the control device 18 switches the pressure control CP and the outer diameter control CD from one to the other (the moment t = t ch1 when the inner pressure control is switched to the outer diameter control CD, and the outer diameter control CD is switched to the inner pressure control. At the moment of change t = t ch2 ), pressure control CP and outer diameter control CD are performed so that the flow rate FQ of the internal pressure adjusting gas 4 does not change (FP (t ch1 ) = FD (t ch1 ), FP (t ch2 ) = FD (t ch2 )). The instant of switching is determined by temperature or travel distance. When the temperature rises and the glass tube becomes soft and the control becomes effective, it can be set as the switching time. For that purpose, the time required or the movement distance of the heat source 13 can be obtained in advance, and the time can be assumed to have elapsed or when the heat source 13 has moved.

これにより、ガラス管４の内圧が急激に変化することはなく、したがって、ガラス原料含有ガスの定常的な流れが維持される、ガラス管の外径を全長にわたり安定させることができる。また、ガラス原料含有ガスの流れが乱れず、ガラス微粒子層またはガラス層３１の形成が乱れることはない。   Thereby, the internal pressure of the glass tube 4 does not change abruptly. Therefore, the outer diameter of the glass tube in which the steady flow of the glass raw material-containing gas is maintained can be stabilized over the entire length. Further, the flow of the glass raw material-containing gas is not disturbed, and the formation of the glass fine particle layer or the glass layer 31 is not disturbed.

図２に制御装置１８の具体例を示す。制御装置１８は、圧力制御系１８１と、外径制御系１８２と、操作量出力部１８３とからなる。   FIG. 2 shows a specific example of the control device 18. The control device 18 includes a pressure control system 181, an outer diameter control system 182, and an operation amount output unit 183.

圧力制御ＣＰ系１８１は、差分器１８１１と圧力制御ＣＰコントローラ１８１２と加算器１８１３とからなる。差分器１８１１は、ガラス管端部センサ１６による測定値Ｐin（ｔ）と基準内圧設定値（Ｐin *）との偏差ΔＰinを圧力制御ＣＰコントローラ１８１２に送出する。圧力制御ＣＰコントローラ１８１２では、制御量ＣＰ（ΔＰin，ｔ）を算出して、加算器１８１３に送出する。加算器１８１３は、圧力制御ＣＰ用基準流量ＦＰｂと、制御量ＣＰ（ΔＰin，ｔ）とを加算し、これをガス流量ＦＰ（ｔ）として操作量出力部１８３に送出する。 The pressure control CP system 181 includes a differencer 1811, a pressure control CP controller 1812, and an adder 1813. The differentiator 1811 sends a deviation ΔP in between the measured value P in (t) measured by the glass tube end sensor 16 and the reference internal pressure setting value (P in * ) to the pressure control CP controller 1812. The pressure control CP controller 1812 calculates a control amount CP (ΔP in , t) and sends it to the adder 1813. The adder 1813 adds the reference flow rate FPb for the pressure control CP and the control amount CP (ΔP in , t), and sends this to the operation amount output unit 183 as the gas flow rate FP (t).

一方、外径制御ＣＤ系１８２は、差分器１８２１と外径制御ＣＤコントローラ１８２２と加算器１８２３とからなる。差分器１８２１は、ガラス管外径センサ１７による測定値Ｄin（ｔ）と基準外径設定値（Ｄ*）との偏差ΔＤを外径制御ＣＤコントローラ１８２２に送出する。外径制御ＣＤコントローラ１８２２では、制御量ＣＤ（ΔＤ，ｔ）を算出して、加算器１８２３に送出する。加算器１８２３は、外径制御ＣＤ用基準流量ＦＤｂと、制御量ＣＤ（ΔＤ，ｔ）とを加算し、これをガス流量ＦＤ（ｔ）として操作量出力部１８３に送出する。 On the other hand, the outer diameter control CD system 182 includes a differencer 1821, an outer diameter control CD controller 1822, and an adder 1823. The differentiator 1821 sends a deviation ΔD between the measured value D in (t) measured by the glass tube outer diameter sensor 17 and the reference outer diameter setting value (D * ) to the outer diameter control CD controller 1822. The outer diameter control CD controller 1822 calculates the control amount CD (ΔD, t) and sends it to the adder 1823. The adder 1823 adds the reference flow rate FDb for outer diameter control CD and the control amount CD (ΔD, t), and sends this to the operation amount output unit 183 as the gas flow rate FD (t).

操作量出力部１８３は、連動スイッチ１８３１を備えており、加算器１８１３，加算器１８２３の何れかからのガス流量値を選択し、これを内圧調整用ガス４の流量設定値として内圧調整用ガス供給装置１５に送出する。   The manipulated variable output unit 183 includes an interlocking switch 1831, selects a gas flow rate value from either the adder 1813 or the adder 1823, and uses this as the flow rate setting value of the internal pressure adjusting gas 4. It is sent to the supply device 15.

制御装置１８は、熱源１３がガラス管２の端部領域２１から中間領域２３に移行する瞬間（ｔ＝ｔch1）において、ＦＰ（ｔch1）＝ＦＤ（ｔch1）とし、熱源１３がガラス管２の中間領域２３から端部領域２２に移行する瞬間（ｔ＝ｔch2）において、ＦＤ（ｔch2）＝ＦＰ（ｔch2）とする。 The controller 18 sets FP (t ch1 ) = FD (t ch1 ) at the moment (t = t ch1 ) when the heat source 13 moves from the end region 21 to the intermediate region 23 of the glass tube 2, and the heat source 13 is the glass tube. FD (t ch2 ) = FP (t ch2 ) at the moment (t = t ch2 ) of transition from the second intermediate region 23 to the end region 22.

圧力制御ＣＰにおいて、ガラス管２の端部２１，２２におけるガラス管内圧Ｐinの測定値が内圧設定値Ｐin *に一致するように、内圧調整用ガス供給装置１５を制御して内圧調整用ガス４の流量ＦＱを調整する。ガラス管内圧Ｐinは、ガラス管内圧センサ１６１，１６２の測定値の差分から、ガラス管２の端部２１，２２の圧力を測定することができる。 In the pressure control CP, the internal pressure adjusting gas supply device 15 is controlled so that the measured value of the glass tube internal pressure P in at the ends 21 and 22 of the glass tube 2 coincides with the internal pressure set value P in * . The flow rate FQ of the gas 4 is adjusted. Glass pipe internal pressure P in from the difference between the measured value of the glass pipe pressure sensor 161 may measure the pressure of the end portions 21 and 22 of the glass tube 2.

また、制御装置１８は、外径制御ＣＤにおいて、熱源１３の位置ｘのガラス管２の外径Ｄ（ｘ）の測定値が基準外径設定値Ｄ*に一致するように、内圧調整用ガス供給装置１５を制御して内圧調整用ガス４の流量ＦＱを調整する。 Further, in the outer diameter control CD, the control device 18 adjusts the inner pressure adjusting gas so that the measured value of the outer diameter D (x) of the glass tube 2 at the position x of the heat source 13 matches the reference outer diameter setting value D *. The supply device 15 is controlled to adjust the flow rate FQ of the internal pressure adjusting gas 4.

すなわち、制御装置１８は、圧力制御ＣＰと外径制御ＣＤとの切り換えに際し、内圧調整用ガス４の流量ＦＱが切り換えの前と後とで変化しないように、内圧調整用ガス供給装置１５を制御して、内圧調整用ガス４の流量ＦＱを調整している。   That is, the control device 18 controls the internal pressure adjusting gas supply device 15 so that the flow rate FQ of the internal pressure adjusting gas 4 does not change before and after switching when switching between the pressure control CP and the outer diameter control CD. Thus, the flow rate FQ of the internal pressure adjusting gas 4 is adjusted.

図３（Ａ）に、本実施形態による処理を行った場合の、圧力制御ＣＰから外径制御ＣＤに切り換わるときの内圧調整用ガス４の流量ＦＱを示す。図３（Ａ）では、圧力制御ＣＰから外径制御ＣＤに切り換われる時刻ｔch1および外径制御ＣＤから圧力制御ＣＰに切り換われる瞬間に内圧調整用ガス４の流量ＦＱが変化しないような制御が行われている様子が示されている。なお、図３（Ｂ）に本実施形態による処理を行わない場合の、内圧調整用ガス４の流量ＦＱを参考に示す。 FIG. 3A shows the flow rate FQ of the inner pressure adjusting gas 4 when the pressure control CP is switched to the outer diameter control CD when the processing according to the present embodiment is performed. In FIG. 3A, the flow rate FQ of the internal pressure adjusting gas 4 does not change at the time t ch1 when the pressure control CP is switched to the outer diameter control CD and the moment when the pressure control CP is switched to the pressure control CP. It shows how control is taking place. FIG. 3B shows the flow rate FQ of the internal pressure adjusting gas 4 when the process according to the present embodiment is not performed.

本発明のガラス部材の製造方法の実施形態を、製造装置１を用いた場合を例に、図４のフローチャートを参照して説明する。
制御が開始されると、まず制御装置１８は圧力制御ＣＰを行う（Ｓ１０１）。圧力制御ＣＰでは、ガラス管２の熱源１３の位置ｘにおける内圧Ｐinを測定し、ガラス管２の端部の内圧Ｐinの測定値に基づき前記内圧調整用ガス４の流量ＦＱを調整する。 An embodiment of the glass member manufacturing method of the present invention will be described with reference to the flowchart of FIG.
When the control is started, the control device 18 first performs pressure control CP (S101). In the pressure control CP, measure the internal pressure P in the position x of the glass tube 2 of the heat source 13, to adjust the flow rate FQ of the pressure regulating gas 4 based on the measured value of the internal pressure P in the end of the glass tube 2.

すなわち、圧力制御ＣＰにおいては、熱源１３の位置ｘ（すなわち、基準時刻からの経過時間ｔ）におけるガラス管１２の端部領域２１におけるガラス管内圧Ｐinの測定値が内圧設定値Ｐin *に一致するように内圧調整用ガス４の流量ＦＱ（＝ＦＰ（ｔ））の調整が行われる。具体的には、熱源１３の位置ｘ（すなわち、基準時刻からの経過時間ｔ）における内圧Ｐinの測定値と内圧設定値Ｐin *との偏差ΔＰinに基づき内圧調整用ガス４の流量ＦＱが決定される。 That is, in the pressure control CP, the position x of the heat source 13 (i.e., the elapsed time t from the reference time) measurement of the glass pipe pressure P in the end region 21 of the glass tube 12 in the internal pressure set value P in * The flow rate FQ (= FP (t)) of the internal pressure adjusting gas 4 is adjusted so as to match. Specifically, the flow rate FQ of the internal pressure adjusting gas 4 based on the deviation ΔP in between the measured value of the internal pressure P in and the internal pressure set value P in * at the position x of the heat source 13 (that is, the elapsed time t from the reference time). Is determined.

熱源１３が端部領域２１に存在しているときには上記の制御が継続して行われる（Ｓ１０２の「ＹＥＳ」）が、熱源１３が端部領域２１に存在しなくなったとき（中央領域２３に到達したとき：Ｓ１０２の「ＮＯ」））は、外径制御ＣＤを行う（Ｓ１０３）。圧力制御ＣＰから外径制御ＣＤに切り換わる瞬間（ｔch1）に、内圧調整用ガス４の流量ＦＱが変化しないように圧力制御ＣＰおよび外径制御ＣＤを行う（ＦＰ（ｔch1）＝ＦＤ（（ｔch1））。 When the heat source 13 is present in the end region 21, the above control is continuously performed ("YES" in S102), but when the heat source 13 is no longer present in the end region 21 (reach the central region 23). When “NO” in S102)), the outer diameter control CD is performed (S103). At the moment of switching from the pressure control CP to the outer diameter control CD (t ch1 ), the pressure control CP and the outer diameter control CD are performed so that the flow rate FQ of the inner pressure adjusting gas 4 does not change (FP (t ch1 ) = FD ( (T ch1 )).

外径制御ＣＤでは、ガラス管２の熱源１３の位置ｘにおける外径Ｄ（ｘ）を測定し、熱源１３の位置ｘにおけるガラス管２の外径Ｄ（ｘ）の測定値に基づき内圧調整用ガス４の流量ＦＱを調整する。すなわち、外径制御ＣＤにおいては、熱源１３の位置ｘにおけるガラス管２の外径Ｄ（ｘ）の測定値が基準外径設定値Ｄ*に一致するように内圧調整用ガス４の流量ＦＱ（＝ＦＤ（ｔ））の調整が行われる。具体的には、熱源１３の位置ｘ（すなわち、基準時刻からの経過時間ｔ）における外径Ｄの測定値と基準外径設定値Ｄ*との偏差ΔＤに基づき内圧調整用ガス４の流量ＦＱが決定される。 In the outer diameter control CD, the outer diameter D (x) at the position x of the heat source 13 of the glass tube 2 is measured, and the inner pressure is adjusted based on the measured value of the outer diameter D (x) of the glass tube 2 at the position x of the heat source 13. The flow rate FQ of the gas 4 is adjusted. That is, in the outer diameter control CD, the flow rate FQ (internal pressure adjusting gas 4) so that the measured value of the outer diameter D (x) of the glass tube 2 at the position x of the heat source 13 matches the reference outer diameter setting value D *. = FD (t)) is adjusted. Specifically, the flow rate FQ of the internal pressure adjusting gas 4 based on the deviation ΔD between the measured value of the outer diameter D and the reference outer diameter setting value D * at the position x of the heat source 13 (that is, the elapsed time t from the reference time). Is determined.

熱源１３が中間領域２３に存在しているときには上記の制御が継続して行われる（Ｓ１０４の「ＹＥＳ」）が、熱源１３が中間領域２３に存在しなくなったとき（端部領域２２に到達したとき：Ｓ１０４の「ＮＯ」））は、圧力制御ＣＤを行う（Ｓ１０５）。外径制御ＣＤから圧力制御ＣＰに切り換わる瞬間（ｔch2）に、内圧調整用ガス４の流量ＦＱが変化しないように圧力制御ＣＰおよび外径制御ＣＤを行う（ＦＰ（ｔch2）＝ＦＤ（（ｔch2））。 When the heat source 13 exists in the intermediate region 23, the above control is continuously performed ("YES" in S104), but when the heat source 13 no longer exists in the intermediate region 23 (the end region 22 has been reached). When: “NO” in S104)), pressure control CD is performed (S105). At the moment (t ch2 ) when switching from the outer diameter control CD to the pressure control CP, the pressure control CP and the outer diameter control CD are performed so that the flow rate FQ of the inner pressure adjusting gas 4 does not change (FP (t ch2 ) = FD ( (T ch2 )).

この後、トラバースターンを行うかが判断され、トラバースターンを行うとき（Ｓ１０５の「ＹＥＳ」）は、熱源の温度を下げるか、熱源の動作を停止して、ガラス層形成のために移動するときの速度よりも高速で開始点まで熱源を移動させる（この間、ガラス微粒子層またはガラス層は形成されない）。
この後、ステップＳ１０１に処理を戻すが、トラバースターンを行わないとき（Ｓ１０５の「ＮＯ」）は処理を終了する。 Thereafter, it is determined whether a traverse turn is to be performed, and when the traverse turn is to be performed (“YES” in S105), the temperature of the heat source is lowered or the operation of the heat source is stopped and moved to form a glass layer. The heat source is moved to the starting point at a speed higher than the speed of (No glass fine particle layer or glass layer is formed during this time).
Thereafter, the process is returned to step S101, but when the traverse turn is not performed (“NO” in S105), the process ends.

本発明のガラス部材の製造装置の一実施形態を示す説明図である。It is explanatory drawing which shows one Embodiment of the manufacturing apparatus of the glass member of this invention. 図１の製造装置における制御装置の具体例を示す図である。It is a figure which shows the specific example of the control apparatus in the manufacturing apparatus of FIG. （Ａ）は本実施形態による処理を行った場合の、圧力制御から外径制御に切り換わるときの内圧調整用ガスの流量を示す図、（Ｂ）に本実施形態による処理を行わない場合の、内圧調整用ガスの流量を示す図である。(A) is the figure which shows the flow volume of the gas for internal pressure adjustment at the time of switching from pressure control to outer diameter control when the process by this embodiment is performed, (B) When the process by this embodiment is not performed It is a figure which shows the flow volume of the gas for internal pressure adjustment. 本発明のガラス部材の製造方法を示すフローチャートである。It is a flowchart which shows the manufacturing method of the glass member of this invention. 従来のガラス部材の製造装置を示す説明図である。It is explanatory drawing which shows the manufacturing apparatus of the conventional glass member.

符号の説明Explanation of symbols

１ 製造装置
１１ ガラス原料含有ガス供給装置
１２ ガラス管旋盤
１３ 熱源
１４ 熱源相対移動装置
１５ 内圧調整用ガス供給装置
１６（１６１，１６２） ガラス管内圧センサ
１７ ガラス管外径センサ
１８ 制御装置
３１ ガラス微粒子層またはガラス層
２１，２２ 端部領域
２３ 中間領域
１２１，１２２ ガラス管保持部
１８１ 圧力制御系
１８２ 外径制御系
１８３ 操作量出力部
２０１，２０２ ダミー管
１８１１, １８２１ 差分器
１８１２ 圧力制御ＣＰコントローラ
１８１３，１８２３ 加算器
１８２２ 外径制御ＣＤコントローラ







DESCRIPTION OF SYMBOLS 1 Manufacturing apparatus 11 Glass raw material containing gas supply apparatus 12 Glass tube lathe 13 Heat source 14 Heat source relative movement apparatus 15 Internal pressure adjustment gas supply apparatus 16 (161, 162) Glass tube internal pressure sensor 17 Glass tube outer diameter sensor 18 Control apparatus 31 Glass particulate Layer or glass layer 21, 22 end region 23 intermediate region 121, 122 glass tube holding unit 181 pressure control system 182 outer diameter control system 183 manipulated variable output unit 201, 202 dummy tube 1811, 1821 differentiator 1812 pressure control CP controller 1813 , 1823 Adder 1822 Outer diameter control CD controller







Claims (2)

ガラス管にガラス原料含有ガスを流しつつ前記ガラス管に沿って相対的に移動する熱源により前記ガラス管を加熱し、前記ガラス管の内面にガラス微粒子層またはガラス層を形成する工程と、当該工程に併せて前記ガラス管に内圧調整用ガスを流入させる工程とを有するガラス部材の製造方法であって、
前記内圧調整用ガスを流入させる工程において、
前記ガラス管の一方の端部領域または双方の端部領域では、前記ガラス管の内圧が基準内圧設定値になるように前記内圧調整用ガスの流量を調整する圧力制御を行い、
前記ガラス管の一方の端部領域または双方の端部領域を除く領域では、前記ガラス管の外径が基準外径設定値になるように前記内圧調整用ガスの流量を調整する外径制御を行い、かつ、
前記圧力制御および前記外径制御が、一方から他方に切り換わる瞬間に前記内圧調整用ガスの流量が変化しないように前記圧力制御および前記外径制御を行う、
ことを特徴とするガラス部材の製造方法。 A step of heating the glass tube with a heat source that moves relatively along the glass tube while flowing a glass raw material-containing gas through the glass tube, and forming a glass fine particle layer or a glass layer on the inner surface of the glass tube; In addition to the step of causing the internal pressure adjusting gas to flow into the glass tube,
In the step of introducing the internal pressure adjusting gas,
In one or both end regions of the glass tube, pressure control is performed to adjust the flow rate of the internal pressure adjusting gas so that the internal pressure of the glass tube becomes a reference internal pressure setting value,
In the region excluding one end region or both end regions of the glass tube, outer diameter control is performed to adjust the flow rate of the internal pressure adjusting gas so that the outer diameter of the glass tube becomes a reference outer diameter set value. Done and
The pressure control and the outer diameter control are performed so that the flow rate of the internal pressure adjusting gas does not change at the moment when the pressure control and the outer diameter control are switched from one to the other.
The manufacturing method of the glass member characterized by the above-mentioned. ガラス原料含有ガス供給装置と、熱源と、熱源相対移動装置とを備え、前記ガラス原料含有ガス供給装置により前記ガラス管にガラス原料含有ガスを流しつつ前記熱源相対移動装置により前記熱源を前記ガラス管に沿って相対的に移動させて前記ガラス管を加熱し、前記ガラス管の内面にガラス微粒子層またはガラス層を形成するガラス部材の製造装置であって、
前記ガラス管内に内圧調整用ガスを供給する内圧調整用ガス供給装置と、
前記ガラス管の一方の端部領域または双方の端部領域の前記熱源の位置における前記ガラス管の内圧を測定するガラス管内圧センサと、
前記ガラス管の一方の端部領域または双方の端部領域を除く領域の前記熱源の位置における前記ガラス管の外径を測定するガラス管外径センサと、
前記熱源が前記ガラス管の一方の端部領域または双方の端部領域にあるときは前記ガラス管内圧センサによる測定値に基づき前記ガラス管の内圧が基準内圧設定値になるように、前記熱源の位置の前記ガラス管の内圧の測定値と前記基準内圧設定値との偏差に基づいて前記内圧調整用ガスの流量を調整する圧力制御を行い、
前記熱源が前記ガラス管の一方の端部領域または双方の端部領域を除く領域にあるときは前記ガラス管外径センサによる測定値に基づき前記ガラス管の外径が基準外径設定値になるように前記熱源の位置の前記ガラス管の外径の測定値と前記基準外径設定値との偏差に基づいて前記内圧調整用ガスの流量を調整する外径制御を行い、かつ、
前記圧力制御および前記外径制御が、一方から他方に切り換わる瞬間に、前記内圧調整用ガスの流量が変化しないように前記圧力制御および前記外径制御を行う、
制御装置と、
を備えたことを特徴とするガラス部材の製造装置。

A glass raw material containing gas supply device, a heat source, and a heat source relative movement device, wherein the glass raw material containing gas supply device causes the glass raw material containing gas to flow through the glass tube while the heat source relative movement device causes the heat source to move to the glass tube. A glass member manufacturing apparatus that heats the glass tube by relatively moving the glass tube to form a glass fine particle layer or a glass layer on the inner surface of the glass tube,
An internal pressure adjusting gas supply device for supplying an internal pressure adjusting gas into the glass tube;
A glass tube internal pressure sensor for measuring an internal pressure of the glass tube at the position of the heat source in one end region or both end regions of the glass tube;
A glass tube outer diameter sensor that measures an outer diameter of the glass tube at the position of the heat source in a region excluding one end region or both end regions of the glass tube;
When the heat source is in one end region or both end regions of the glass tube, the internal pressure of the glass tube is set to a reference internal pressure set value based on a measurement value by the glass tube internal pressure sensor. Performing pressure control to adjust the flow rate of the internal pressure adjusting gas based on the deviation between the measured value of the internal pressure of the glass tube at the position and the reference internal pressure setting value;
When the heat source is in one end region of the glass tube or in a region excluding both end regions, the outer diameter of the glass tube becomes a reference outer diameter setting value based on a measurement value by the glass tube outer diameter sensor. Performing outer diameter control to adjust the flow rate of the internal pressure adjusting gas based on the deviation between the measured value of the outer diameter of the glass tube at the position of the heat source and the reference outer diameter setting value, and
The pressure control and the outer diameter control are performed so that the flow rate of the internal pressure adjusting gas does not change at the moment when the pressure control and the outer diameter control are switched from one to the other.
A control device;
An apparatus for producing a glass member, comprising:

JP2005306454A 2005-10-20 2005-10-20 Method and apparatus for manufacturing glass member Withdrawn JP2007112668A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017065967A (en) * 2015-09-30 2017-04-06 株式会社フジクラ Method for manufacturing glass and method for manufacturing optical fiber preform

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017065967A (en) * 2015-09-30 2017-04-06 株式会社フジクラ Method for manufacturing glass and method for manufacturing optical fiber preform

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