JP2007111653A - Flow passage-built-in substrate and fluid control method for flow passage-built-in substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a micro-chip built-in with a filter having a non-complex, small sized and compact constitution, capable of also reducing a cost, performing filtration while continuously throwing a fluid, having a high reaction or washing efficiency, capable of reducing an operation time and minimizing clogging of the filter to prolong a filter life, and a fluid control method for the micro-chip. <P>SOLUTION: A flow passage built-in substrate formed with a flow passage in a substrate is provided with a fluid introduction flow passage for introducing the fluid into the flow passage; a fluid discharge flow passage for discharging the fluid from the inside of the flow passage; and a filter arranged between the fluid introduction flow passage and the fluid discharge flow passage. The fluid introduction flow passage and the fluid discharge flow passage are formed such that the height positions are different in the substrate and the filter is arranged on a connection part between the fluid introduction flow passage and the fluid discharge flow passage in parallel to the fluid introduction flow passage. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  In the present invention, for example, solid-liquid reaction and solid-liquid separation using a solid phase carrier, filtration in a suspension or crushed liquid, separation and purification, etc. are performed on a substrate with respect to biopolymers, chemical substances and the like. TECHNICAL FIELD The present invention relates to a flow path built-in substrate including a filter in which a fine flow path is formed and a fluid control method for the flow path built-in substrate.

A method of affinity-separating predetermined components in biopolymers by binding active substances such as probes, ligands, and substrates to the surface of solid supports such as beads, or various chemical substances on the solid support of beads Filter separation is widely used as a method for performing a solid-liquid reaction in order to separate and purify the reaction product, or a method for filtering and separating a predetermined size in various suspensions.
In addition, a method of filtering a substance of a predetermined size in various suspensions, crushed liquids or solid liquids such as biomolecules and various synthetic reactants is also widely used.

  In these filter separations, there is a method in which a filter is installed inside the container so as to be orthogonal to the flow of the fluid, and the liquid to be filtered flows from the primary side (fluid introduction side) to the (secondary fluid discharge side). Generally adopted.

  In the method of flowing the liquid to be filtered from the primary side to the secondary side so as to be orthogonal to such a filter, the particles captured by the filter are captured on the filter surface or inside the filter, and depending on the amount of capture, The filter is clogged, the filtration resistance is increased, and the filter life is reduced.

  For this reason, in order to extend the filter life, the so-called “profile filter” that traps the trapped particles in a three-dimensional structure by continuously or intermittently reducing the pore size as it goes inside the filter. The so-called filter is also widely used.

  In addition, in order to remove the clogged particles in the filter, there is also a method of extending the filter life by performing a process of removing the clogged particles from the filter surface by performing reverse cleaning called “backwash”. Widely adopted.

  When such a conventional profile filter is used, if the particle size distribution of the filtered particles approximates the pore size distribution of the filter, an effect of extending the life of the filter can be expected.

  However, the particle size distribution of the filtered particles often differs depending on the filtrate to be flowed, and the filtration performance of the profile filter varies greatly depending on the filtrate. Therefore, it is difficult to always select the optimum profile filter.

  In addition, since the filter structure has a three-dimensional structure, the filter layer becomes thick and the filtration resistance increases.

On the other hand, in the backwash method, it is necessary to perform a backwash before the clogged particles stick to the cake and cannot be peeled off, and it is difficult to know the optimal timing for each suspension. In some cases, the cake may harden into a cake and cannot be peeled off.

Also, for backwashing, it is necessary to reversely flow the liquid from the secondary side to the primary side, and a pump for backflow is required, the device configuration is complicated, the size is increased, and the cost is increased. Will end up.
In view of such a current situation, the present invention is not a complicated configuration, is small and compact, can reduce costs, can be filtered while continuously introducing fluid, and therefore has high reaction or cleaning efficiency, An object of the present invention is to provide a flow path built-in substrate with a built-in filter and a fluid control method for the flow path built-in substrate capable of reducing the operation time and minimizing filter clogging and extending the filter life. .

The present invention has been invented in order to achieve the problems and objects in the prior art as described above, and the flow path built-in substrate of the present invention includes:
A substrate with a built-in channel in which a channel is formed in the substrate,
A fluid introduction channel for introducing fluid into the channel;
A fluid discharge flow path for discharging fluid from the flow path;
A filter disposed between the fluid introduction channel and the fluid discharge channel,
The fluid introduction channel and the fluid discharge channel are formed so that their height positions are different in the substrate,
The filter is disposed in a connection portion between the fluid introduction channel and the fluid discharge channel in parallel with the fluid introduction channel.

  By adopting such a configuration, the filter is disposed in a connection portion between the fluid introduction channel and the fluid discharge channel in parallel with the fluid introduction channel, so that the liquid containing particles is washed, When reaction and filtration are performed, various fluids such as a liquid to be filtered, a cleaning liquid, and a reaction liquid move along the filter surface on the surface of the filter.

  At this time, it is possible to perform filtration while rolling up the filtration particles deposited on the filter by the movement of the fluid.

  Thus, this reduces clogging of the filter and can extend the filter life.

  Further, in washing and reaction, the filtered particles on the filter are wound up by the fluid liquid and come into contact with the fluid liquid, so that the cleaning efficiency or reaction efficiency of the particles and the input specimen liquid is improved.

Further, in such a substrate with a built-in flow channel, as a method of providing a filter in the flow channel, a connecting portion between a fluid introduction flow channel and a fluid discharge flow channel formed so that the height positions in the substrate are different. In addition, it is only necessary to arrange the filter so as to sandwich it.
Therefore, in the method of installing the filter so as to be orthogonal to the flow path, it is possible to reduce the thickness of the substrate compared to the case where the thickness of the substrate is larger than the side of the filter. An embedded substrate can be provided.

  Moreover, the substrate with a built-in flow channel according to the present invention is characterized in that the connecting portion is an inner bent portion of a L-shaped flow channel in cross section.

In such a substrate with a built-in flow channel, as a method of providing a filter in the flow channel, a filter is provided at a bent portion of the L-shaped flow channel in cross section, which is a connection portion between the fluid introduction flow channel and the fluid discharge flow channel. Therefore, it is only necessary to dispose them so that the substrate with a built-in flow path can be provided with a simple and inexpensive manufacturing process.

Further, the substrate with a built-in flow path of the present invention is
The connecting portion is substantially circular in plan view,
The filter disposed in the connection portion is substantially circular in plan view,
The fluid introduction channel is arranged such that the fluid introduction direction is the same as the tangential direction of the circumference of the filter.

  With this configuration, the fluid introduction flow path is disposed so that the direction of introduction of the fluid is the same as the tangential direction of the circumference of the filter. It gradually moves to the center while turning around the circumference, passes through the filter, moves to the secondary side (fluid discharge side), and is filtered.

  Therefore, it becomes possible for the liquid to be filtered to reach the entire filter or to effectively use the entire filtration surface of the filter.

  Also, the substrate with a built-in flow path of the present invention is provided with a plurality of the fluid introduction flow paths, at least one of which is arranged so that the direction of fluid introduction is the same as the tangential direction of the circumference of the filter. It is provided.

  With this configuration, the introduced fluid introduced from the plurality of fluid introduction channels gradually moves to the center while rotating around the circumference of the circular filter, and passes through the filter to the secondary side (fluid discharge). Side) and filtered.

  Therefore, the liquid to be filtered can be distributed evenly throughout the filter, and the entire filtration surface of the filter can be used more effectively.

  Moreover, the substrate with built-in channel according to the present invention is characterized in that the plurality of fluid introduction channels are arranged at positions parallel to each other in plan view.

  The introduction fluid introduced from a plurality of fluid introduction flow paths arranged in parallel in this way allows the liquid to be filtered to reach the entire filter more evenly, or the entire filtration surface of the filter can be used more effectively. Become.

  Moreover, the substrate with a built-in channel according to the present invention is characterized in that the plurality of fluid introduction channels are arranged at positions perpendicular to each other in plan view.

  With this configuration, the plurality of fluid introduction flow paths are arranged at positions perpendicular to each other in plan view, so that the flow on the filter changes, and the fluid in each flow path is a confluence. Since it collides on the filter and generates turbulent flow, it is possible to prevent particles from being deposited at a fixed position on the filter and to prevent clogging.

  In addition, due to such turbulent flow, the reaction efficiency or cleaning efficiency of the primary side (fluid introduction side) filtered particles and the introduced specimen liquid is improved.

  Moreover, the substrate with a built-in channel according to the present invention is characterized in that the plurality of fluid introduction channels are arranged at positions facing each other in plan view.

With this configuration, the plurality of fluid introduction channels are arranged at positions facing each other in plan view, so that the fluid in each channel collides on the filter that is the merging point, and the turbulent flow Therefore, it is possible to prevent particles from being deposited at a fixed position on the filter, and to prevent clogging.

  In addition, due to such turbulent flow, the reaction efficiency or cleaning efficiency of the primary side (fluid introduction side) filtered particles and the introduced specimen liquid is improved.

  Further, the flow path built-in substrate of the present invention is characterized in that a plurality of independent flow path built-in substrates are arranged in the same substrate.

  With such a configuration, a plurality of independent fluid control processes can be performed in parallel on the same substrate, and the processing efficiency can be improved.

  In the flow path built-in substrate of the present invention, fluid discharge flow paths are radially arranged from the center of the substrate area of the flow path built-in substrate toward the outer periphery of the substrate.

With such a configuration, the substrate is attached to the solid control device in processing such as the introduction of fluid into the fluid introduction channel of a plurality of independent channels and the discharge from the fluid discharge channel. By simply rotating, fluid control such as fluid input and discharge of a plurality of independent flow path built-in substrates is possible, so that the control device cost is low and control is possible at high speed.
Further, by rotating the substrate with a predetermined centrifugal force, the fluid and bubbles in the flow channel in the flow channel remaining on the inner wall of the flow channel with a meniscus or the like can be discharged to the maximum.

  In the flow path built-in substrate of the present invention, a stirrer is housed in at least one of the fluid introduction flow path and the fluid discharge flow path of the flow path built-in substrate.

  By adopting such a configuration, the stirrer is moved by the flow of the fluid on the filter by accommodating the stirrer in at least one of the fluid introduction channel and the fluid discharge channel, particularly in the filter filtration surface. Another agitation is triggered and by selecting the shape of the agitator, the agitation is spread over the entire filter surface.

  Further, the stirrer is made of a ferromagnetic material or a paramagnetic material, and an external magnetic field is provided to move the external magnetic field, whereby the stirrer can be moved and the internal fluid can be moved.

  Further, by moving the stirrer with an external magnetic field, it is possible to remove bubbles adhering to the inner wall of the flow path and the upper and lower sides of the filter. Furthermore, the fluid that remains in the discharge flow path by a meniscus or the like and is not discharged during or after the fluid is discharged can be forcibly discharged.

Further, the fluid control method for a flow path built-in substrate according to the present invention includes:
A flow path is formed in the substrate,
A fluid introduction channel for introducing fluid into the channel;
A fluid discharge flow path for discharging fluid from the flow path;
A filter disposed between the fluid introduction channel and the fluid discharge channel,
The fluid introduction channel and the fluid discharge channel are formed so that their height positions are different in the substrate,
The filter is disposed in a connection portion between the fluid introduction channel and the fluid discharge channel in parallel with the fluid introduction channel;
A fluid control method for a substrate with a built-in channel provided with a plurality of the fluid introduction channels,
When introducing a fluid from the plurality of fluid introduction flow paths into the flow path, the fluid is introduced from each of the fluid introduction flow paths asynchronously.

  As described above, when the fluid is introduced from the plurality of fluid introduction channels into the flow channel, the flow of the fluid from each of the fluid introduction channels is asynchronously performed, so that the flow on the filter changes, and the Therefore, it is possible to prevent the particles from being deposited at a certain position and to prevent clogging.

Further, the fluid control method for a flow path built-in substrate according to the present invention includes:
A flow path is formed in the substrate,
A fluid introduction channel for introducing fluid into the channel;
A fluid discharge flow path for discharging fluid from the flow path;
A filter disposed between the fluid introduction channel and the fluid discharge channel,
The fluid introduction channel and the fluid discharge channel are formed so that their height positions are different in the substrate,
The filter is disposed in a connection portion between the fluid introduction channel and the fluid discharge channel in parallel with the fluid introduction channel;
A fluid control method for a substrate with a built-in channel provided with a plurality of the fluid introduction channels,
When introducing a fluid from the plurality of fluid introduction channels into the channel, the introduction of fluids from the respective fluid introduction channels is performed in synchronization.

  Thus, when introducing fluid from a plurality of fluid introduction flow paths into the flow path, the fluids of the respective flow paths are synchronized with each other by introducing the fluids from the respective fluid introduction flow paths. It collides on the filter which is and produces turbulent flow.

  Further, the filtered particles on the filter can prevent the particles from accumulating at a fixed position on the filter due to turbulent flow, and can prevent clogging.

  In addition, due to such turbulent flow, the reaction efficiency or cleaning efficiency of the primary side (fluid introduction side) filtered particles and the introduced specimen liquid is improved.

  According to the present invention, the filter is disposed in the connection portion between the fluid introduction channel and the fluid discharge channel in parallel with the fluid introduction channel, so that the liquid containing particles is washed, reacted, and filtered. When performing the process, various fluids such as the liquid to be filtered, the cleaning liquid, and the reaction liquid move along the filter surface on the surface of the filter.

  At this time, it is possible to perform filtration while rolling up the filtration particles deposited on the filter by the movement of the fluid.

  Thus, this reduces clogging of the filter and can extend the filter life.

  Further, in washing and reaction, the filtered particles on the filter are wound up by the fluid liquid and come into contact with the fluid liquid, so that the cleaning efficiency or reaction efficiency of the particles and the input specimen liquid is improved.

Further, according to the present invention, as a method of providing a filter in a flow path, a filter is provided at a connection portion between a fluid introduction flow path and a fluid discharge flow path formed so that their height positions are different in the substrate. It is only necessary to arrange so as to sandwich.
Therefore, in the method of installing the filter so as to be orthogonal to the flow path, it is possible to reduce the thickness of the substrate compared to the case where the thickness of the substrate is larger than the side of the filter. An embedded substrate can be provided.

  Hereinafter, embodiments (examples) of the present invention will be described in more detail with reference to the drawings.

  FIG. 1 is a cross-sectional view of an embodiment of a channel built-in substrate of the present invention.

  In FIG. 1, reference numeral 10 denotes a flow path substrate according to the present invention as a whole.

  The substrate 10 with a built-in channel according to the present invention can be used for solid-liquid reaction and solid-liquid separation using a solid phase carrier, filtration in a suspension, separation purification, etc. This is a substrate with a built-in flow channel in which a flow channel for performing the above is formed.

  That is, as shown in FIG. 1A, the flow path built-in substrate 10 of the present invention includes a substrate 12 that constitutes the main body of the flow path built-in substrate. A flow path 11 is formed in the substrate 12. The channel 11 includes a fluid introduction channel 16 and a fluid discharge channel 20.

  That is, a fluid introduction channel 16 formed from one side end portion 14 of the substrate 12 toward the central portion is formed in a substantially upper portion of the substrate 12. The fluid introduction channel 16 is for introducing a fluid into the channel 11 from an introduction port 18 opened at the side end 14 of the substrate 12.

  A fluid discharge channel 20 is formed below the substrate 12 in the fluid introduction channel 16 so that the height position in the substrate 12 is different from that of the fluid introduction channel 16. .

  That is, as shown in FIG. 1A, the fluid discharge channel 20 is configured to discharge the fluid from the channel 11 through the discharge port 24 at the lower end 22 of the substrate 12.

  A filter 28 is disposed in a connection portion 26 between the fluid introduction channel 16 and the fluid discharge channel 20 in parallel with the fluid introduction channel 16.

  In this case, as shown in FIG. 1A, the connecting portion 26 corresponds to the inner bent portion of the L-shaped channel in cross section.

  In this case, the fluid introduction channel 16 is. This is a flow path for introducing fluid, and the fluid introduction side with the filter 28 in between is called the primary flow path side. The fluid discharge channel 20 is a fluid discharge side, and the fluid discharge side across the filter 28 is called a secondary channel side.

  Thus, since the filter 28 is disposed in parallel to the fluid introduction flow path 16, the flow path of the flow path corresponds to the size of the filter as compared with the method of installing the filter so as to be orthogonal to the flow path. There is no need to change the height, and as a result, it is possible to reduce the thickness of the substrate, and it is possible to provide a channel-embedded substrate that is compact and easy to manufacture.

  In addition, since the filter is disposed in the connection portion 26 between the fluid introduction flow channel 16 and the fluid discharge flow channel 20, when performing washing, reaction, and filtration of the liquid containing particles, Various fluids such as cleaning liquid and reaction liquid move along the surface of the filter 28 on the surface of the filter 28. Since the filter surface and the fluid introduction flow channel surface are on the same surface, the fluid pool can be minimized.

  Further, by selecting the flow rate and the flow rate, it is possible to perform filtration while rolling up the filtered particles deposited on the filter 28 by this fluid movement.

  Accordingly, this reduces clogging of the filter 28, and the life of the filter 28 can be extended.

  In addition, in such a channel-embedded substrate 10, as a method of providing the filter 28 in the channel 11, as described later, the fluid introduction channel 16 formed so that the height position in the substrate 12 is different from that of the substrate 12. Since it is only necessary to arrange the filter 28 so as to be sandwiched in the connection portion 26 between the fluid discharge channel 20, an inexpensive channel built-in substrate can be provided.

  The flow path built-in substrate 10 of the present invention configured as described above is various, as shown in FIGS. 1B to 1E, for example, showing another embodiment of the flow path built-in substrate 10 of the present invention. The form of can be adopted.

  In the flow path built-in substrate 10 of the embodiment of FIG. 1B, a fluid introduction flow path 32 formed toward the central portion is also formed on the other side end portion 30 of the substrate 12.

  Further, in the substrate with built-in flow channel 10 of the embodiment of FIG. 1C, the fluid discharge flow channel 20 is formed so that the discharge port 24 is formed at the other side end 30 of the substrate 12. The fluid discharge channel 20 is formed in parallel with the.

  In addition, in the flow path built-in substrate 10 of the embodiment of FIG. 1D, the fluid discharge flow path 20 is provided on the side surface of the front or back substrate 12 with respect to the paper surface of FIG. The fluid discharge channel 20 is formed so that 24 is formed.

  Furthermore, in the flow path built-in substrate 10 of the embodiment of FIG. 1 (E), a fluid introduction flow path 32 formed toward the central portion is also formed at the other side end portion 30 of the substrate 12, The fluid discharge channel 20 is formed so that the discharge port 24 is formed on the side surface of the front or back substrate 12 with respect to the paper surface of FIG. .

Furthermore, as shown in FIG. 2, a plurality of fluid discharge channels 20 and filters 28 may be provided.
That is, in the flow path built-in substrate 10 of the embodiment of FIG. 2A, the discharge port 24 is formed on the side surface of the front or back substrate 12 with respect to the paper surface of FIG. The first fluid discharge channel 20A is formed.

Further, a second fluid discharge channel 20 </ b> B is formed in parallel with the fluid introduction channel 16 so that the discharge port 24 is formed at the other side end 30 of the substrate 12.
A first filter 28A is provided between the fluid introduction channel 16 and the first fluid discharge channel 20A. Furthermore, a second filter 28B is provided between the first fluid discharge channel 20A and the second fluid discharge channel 20B.

  In this case, filter clogging can be further reduced by changing the filter holes of the first filter 28A and the second filter 28B so that the hole diameter of the first filter 28A> the hole diameter of the second filter 28B. .

In the substrate 10 with built-in flow path of the embodiment of FIG. 2B, the discharge port 24 is formed on the side surface of the front or back substrate 12 with respect to the paper surface of FIG. As shown in FIG. 2B, one fluid discharge channel 20A, a second filter 28B, and a third filter 28C are formed in a staggered pattern.
Further, a fourth fluid discharge channel 20 </ b> D is formed in parallel with the fluid introduction channel 16 so that the discharge port 24 is formed at the other side end 30 of the substrate 12.

As shown in FIG. 2B, a first filter 28A is provided between the fluid introduction channel 16 and the first fluid discharge channel 20A. Furthermore, a second filter 28B is provided between the first fluid discharge channel 20A and the second fluid discharge channel 20B.
A third filter 28C is provided between the second fluid discharge channel 20B and the third fluid discharge channel 20C. Furthermore, a fourth filter 28D is provided between the third fluid discharge channel 20C and the fourth fluid discharge channel 20D.

  Also in this case, the clogging of the filter is performed by setting the filter hole of each filter to the hole diameter of the first filter 28A> the hole diameter of the second filter 28B> the hole diameter of the third filter 28C> the hole diameter of the fourth filter 28D. Can be further reduced.

  Further, as shown in FIG. 3A, the introduction port 18 of the fluid introduction channel 16 is opened at the top of the substrate 12, and the discharge port 24 of the fluid discharge channel 20 is opened at the bottom of the substrate 12. It can also be done.

  Further, as shown in FIG. 3B, the introduction port 18 of the fluid introduction channel 16 is opened at the top of the substrate 12, and the discharge port 24 of the fluid discharge channel 20 is opened at the top of the substrate 12. It can also be done.

  Further, the flow path 11 has a connection nozzle for connecting to a control mechanism for fluid input, discharge, pressurization, decompression and the like on the end face or in the middle thereof.

  That is, for example, as shown in FIGS. 3A and 3B, the introduction nozzle 13 is provided in the introduction port 18 of the fluid introduction flow channel 16, and the discharge nozzle 15 is provided in the discharge port 24 of the fluid discharge flow channel 20. Can be provided.

  As shown in FIG. 3, the fluid supply device 34 may be connected to the introduction nozzle 13 and the fluid discharge device 36 may be connected to the discharge nozzle 15, or these fluid supply devices 34, Either one of the fluid discharge devices 36 may be connected.

  In addition to introducing one type of fluid, a plurality of types of fluids can be introduced from these introduction nozzles 13.

  In this case, as a method of introducing a plurality of types of fluids, a method of connecting a fluid supply device 34 corresponding to each of a plurality of different introduction nozzles 13 or a method of connecting a plurality of fluid supply devices 34 via a control valve. For example, a method of connecting to one introduction nozzle 13 and introducing different fluids into the flow path 11 by opening and closing the valve can be used.

  As these fluid supply device 34 and fluid discharge device 36, for example, a fluid control device such as a fluid supply device, a fluid discharge device, a pressurization device, or a decompression device can be used.

FIG. 5 shows a top view of the flow path built-in substrate 10 of the present invention. As shown in FIG. 5, the arrangement of the fluid introduction channel 16 and the fluid discharge channel 20 is as follows.
A configuration in which a plurality of fluid introduction channels are arranged in parallel to each other in plan view;
A configuration in which a plurality of fluid introduction channels are arranged at right angles in plan view,
A configuration in which a plurality of fluid introduction channels are arranged at positions facing each other in plan view,
・ Combination of these arrangements,
Various forms can be adopted.

  In this case, the connecting portion 26 has a substantially circular shape in plan view, the filter 28 disposed in the connecting portion 26 has a substantially circular shape in plan view, and at least one fluid introduction channel 16 has It is desirable that the fluid introduction direction is the same as the tangential direction of the circumference of the filter 28.

  With this configuration, the introduced fluid introduced from the fluid introduction channel 16 gradually moves to the center while rotating around the circumference of the circular filter 28, and passes through the filter 28 to the secondary side (fluid discharge). Side) and filtered.

  Therefore, the liquid to be filtered spreads more uniformly over the entire filter 28, and the entire filtration surface of the filter 28 can be used more effectively.

  That is, in the flow path built-in substrate 10 of FIG. 5A, the connection portion 26 has a substantially circular shape in plan view, and the filter 28 disposed in the connection portion 26 has a substantially circular shape in plan view. .

  The fluid introduction channel 16 a is arranged so that the fluid introduction direction is the same as the tangential direction of the circumference of the filter 28. In addition, the fluid introduction channel 16 b is disposed at a position perpendicular to the fluid introduction channel 16 a in plan view, and the fluid introduction direction is disposed toward the center of the filter 28.

  5B, the fluid introduction passages 16a and 16b are parallel to each other so that the fluid introduction direction is the same as the tangential direction of the circumference of the filter 28. So as to be arranged on both sides of the filter 28 (in the vertical direction in FIG. 5B).

  Further, as shown in FIG. 5B, the fluid introduction channel 16c is opposed to the fluid introduction channels 16a and 16b, and the fluid introduction direction is in the center direction of the filter 28. It is arranged toward.

  Further, as shown in FIG. 6, a plurality of flow path built-in substrates 10 can be formed on one substrate 12.

  That is, in the flow path built-in substrate 10 in FIG. 6, a plurality of flow path built-in substrates 10 a and 10 b are arranged on one substrate 12.

  Further, in the flow path built-in substrate 10 of this embodiment, the fluid introduction flow paths 16 a and 16 b are parallel to each other so that the direction of introduction of the fluid is the same as the tangential direction of the circumference of the filter 28. As shown in FIG.

  Furthermore, the fluid introduction channel 16 c is disposed so as to face the fluid introduction channels 16 a and 16 b, and the fluid introduction direction is directed toward the center of the filter 28.

  In this embodiment, inlets 18a, 18b, and 18c are disposed in the fluid introduction channels 16a, 16b, and 16c, respectively.

Further, as shown in FIG. 7, a plurality of flow path built-in substrates 10 are formed on a single substrate 12, and the fluid inlets of the plurality of flow path built-in substrates 10 are shared. It is also possible.

  That is, in the flow path built-in substrate 10 of FIG. 7, a plurality of flow path built-in substrates 10 a and 10 b are arranged on one substrate 12.

  Further, in the flow path built-in substrate 10 of this embodiment, the fluid introduction flow paths 16 a and 16 b are parallel to each other so that the direction of introduction of the fluid is the same as the tangential direction of the circumference of the filter 28. As shown in FIG.

  Furthermore, the fluid introduction channel 16 c is disposed so as to face the fluid introduction channels 16 a and 16 b, and the fluid introduction direction is directed toward the center of the filter 28.

  The fluid introduction flow paths 16a and 16b of the flow path built-in substrate 10a and the fluid introduction flow path 16a of the flow path built-in substrate 10b are connected to each other by a shared flow path 16d. On the other hand, one common inlet 18e is provided.

  Further, the fluid discharge channels 20, 20 are arranged to face the fluid introduction channels 16 a, 16 b, and the fluid introduction direction is arranged toward the center direction of the filter 28.

  In addition, when arrange | positioning a several flow path built-in board | substrate on the one board | substrate 12, the arrangement number and arrangement position are not specifically limited, What is necessary is just to change suitably according to the filtration liquid etc. to process.

Further, as shown in the flow path built-in substrate 10 of the embodiment of FIG. 8, a plurality of independent flow path built-in substrates 10 </ b> A to 10 </ b> C can be disposed in the same substrate 12.
That is, as shown in FIG. 8A, the flow path built-in substrate 10 of this embodiment includes independent flow paths including the fluid introduction flow path 16, the filter 28, and the fluid discharge flow path 20. A plurality of (three in this embodiment) independent rectangular channel-containing substrates 10 </ b> A to 10 </ b> C are disposed in the same substrate 12.

In this case, the number of a plurality of independent flow path built-in substrates and the number of flow paths provided in these independent flow path built-in substrates are not particularly limited, and any number of flow paths can be built. Further, the directionality of the flow path and the length type are not necessarily the same.
Thus, throughput can be improved by providing a plurality of independent flow path built-in substrates and a plurality of independent flow paths in the same substrate and performing independent parallel processing.

Furthermore, when a plurality of parallel processes are required in one unit of experimental operation, these can be processed simultaneously in the substrate, so that the throughput can be improved. In addition, the processed product of each process can be obtained at a predetermined position on the same substrate, so that process errors can be reduced.
Further, as shown in FIG. 8B, a plurality of independent flow path built-in substrates 10A to 10C can be connected to each other.

Further, as shown in the flow path built-in substrate 10 of the embodiment of FIG. 9, the fluid discharge flow paths can be radially arranged from the center of the substrate area of the flow path built-in substrate toward the outer periphery of the substrate.
That is, as shown in FIG. 9A, the flow path built-in substrate 10 of this embodiment includes independent flow paths including a fluid introduction flow path 16, a filter 28, and a fluid discharge flow path 20. A plurality (four in this embodiment) of independent divided circular flow path-embedded substrates 10A to 10E are disposed in the same substrate 12, and the whole is circular.

Independent flow paths including the fluid introduction flow paths 16, the filters 28, and the fluid discharge flow paths 20 are arranged radially.
Further, as shown in FIG. 9B, a plurality of independent divided circular channel-embedded substrates 10A to 10D can be connected to each other.
Furthermore, as shown in FIG. 9C, it is also possible to connect a plurality of independent fan-shaped flow path-embedded substrates 10A to 10D to each other and provide a circular hole 17 at the center thereof. .

Further, as shown in the flow path built-in substrate 10 in FIG. 10A, a plurality of (this embodiment) provided with independent flow paths including a fluid introduction flow path 16, a filter 28, and a fluid discharge flow path 20. In the example, four) independent triangular channel-embedded substrates 10A to 10D are arranged in the same substrate 12, and the whole is rectangular.
Has been.

And the independent flow path which consists of each fluid introduction flow path 16, the filter 28, and the fluid discharge flow path 20 is arrange | positioned radially from the board | substrate area center to the board | substrate outer periphery direction.
Further, as shown in FIG. 10B, a plurality of independent triangular channel-embedded substrates 10A to 10D can be connected to each other.
Furthermore, as shown in FIG. 10C, a plurality of independent triangular channel-embedded substrates 10A to 10D can be connected to each other, and a rectangular hole 17 can be provided at the center thereof. .

In addition to circles and squares, these substrates with independent flow paths may be fan-shaped or triangles that are equally divided into circles and squares, and these can be combined into circles and squares as necessary. Is also possible.
Further, when these substrates are rotated, for example, as shown in FIGS. 9C and 10C, a circular or square hole 17 is provided at the center of the substrate, and the hole 17 is rotated. It can also be used as a shaft mounting hole and rotated by a rotating shaft.

In addition, in this way, by arranging the fluid discharge channels radially from the center of the substrate area of the substrate with built-in channels toward the outer periphery of the substrate, the input device and the discharge receiving device for the input and discharge of the fluid The position of the apparatus and the substrate can be changed by rotating the substrate while rotating the substrate.
Further, it is technically simple to rotate and move the substrate rather than to move the apparatus, and the system can be made inexpensive with few failures.

  In addition, when the fluid is discharged, the fluid and bubbles remaining on the flow path wall can be discharged to the maximum by using a meniscus or the like by centrifugally rotating around the center of the substrate area.

Furthermore, although not shown, the stirrer can be accommodated in at least one of the fluid introduction channel and the fluid discharge channel of the channel-containing substrate 10.
As such a stirrer, a stirrer 19 having a shape as shown in FIG. 11 can be employed.

  That is, FIG. 11 is a perspective view of the stirrer 19 viewed from the upper surface of the flow path. As shown in FIG. 11A, the cylindrical stirrer 19, as shown in FIG. In addition, as shown in FIG. 11 (C), it is possible to employ a stirrer 19 composed of a plurality of (four in this embodiment) prismatic blade members 19a to 19c. it can.

In this case, it is preferable that the stirrer 19 is housed in at least one of the fluid introduction channel and the fluid discharge channel, particularly the upper surface, the lower surface, or the upper and lower surfaces of the filter filtration surface.
These stirrers are assembled or joined after the stirrer is stored in advance before assembling / joining the substrate 12 and the filter 28, or a stirrer having a cylindrical shape, a prismatic shape or the like, and its minimum diameter is the flow path width. Is smaller, the stirrer can be accommodated in a predetermined position by moving external energy so that the direction of the minimum diameter of the stirrer and the flow path width is the same.
With this configuration, the filter surface is rotationally moved by the fluid energy introduced from the fluid introduction flow path, and this movement causes another stirring, further stirring the fluid and enhancing the stirring effect. it can.
The shape of the stirrer 19 is not particularly limited, but commercially available various stirrer shapes can be used in addition to a cylinder, a prism, a cross, and the like.

  These stir bars 19 are preferably subjected to a surface treatment such as Teflon (registered trademark) or a protein adsorption reducing agent in the same manner as commercially available stir bars in order to prevent contamination.

In addition, the stirrer 19 can be moved and stirred in the flow path, on the filter, or on the lower surface of the filter by external energy such as light or a magnetic field.
For example, the inside of the stirrer 19 is made of a ferromagnetic or paramagnetic material, and a magnetic field movable outside the substrate is provided to move the external magnetic field and the stirrer is moved and stirred in the fluid. The stirring effect can be enhanced independently or in combination with the fluid energy.

  In addition, by moving the stirrer 19 by external energy transfer, it is possible to forcibly discharge the fluid and bubbles remaining on the flow path wall and the upper and lower sides of the filter with a meniscus when the fluid is discharged.

  The flow path-embedded substrate of the present invention configured as described above can be manufactured, for example, as shown in FIG.

  That is, as shown in FIG. 12A, the upper substrate 12a in which the fluid introduction channel 16 and the fluid discharge channel 20 on the discharge port 24 side where the discharge port 24 is formed is formed.

  Further, the lower substrate 12b in which the fluid discharge channel 20 and the recess 38 for storing the filter 28 are formed is produced.

  Then, as shown in FIG. 12B, after the filter 28 is inserted into the recess 38, the upper substrate 12a and the lower substrate 12b may be joined (FIG. 12C). reference).

  In addition, when the discharge port 24 side is formed in the lower end of the board | substrate 12, of course, it is not necessary to form the fluid discharge flow path 20 in the upper board | substrate 12a side.

  As a method of joining the upper substrate 12a and the lower substrate 12b, for example, a method of joining each interface between the upper substrate 12a and the lower substrate 12b to be ultra-smooth and a smooth interface, or a method of joining with an adhesive , A method of heat welding, a method of welding by laser, a method of welding by ultrasonic vibration, a method of mechanical bonding with screws, etc., forming a part of the upper substrate 12a or the lower substrate 12b with a paramagnetic material, Any method such as joining them with magnets can be used.

Further, when the filter 28 is sandwiched, a gasket having rubber elasticity or the like can be sandwiched between the filter 28 and the like, if necessary, in order to improve the sealing performance.
In addition, a method of preventing liquid leakage by a sealing property due to rubber elasticity is possible by forming at least one of the upper substrate 12a and the lower substrate 12b with a material having rubber elasticity and joining them together.

  In this embodiment, the substrate 12 is composed of two layers of the upper substrate 12a and the lower substrate 12b. However, the substrate 12 can be composed of multilayer substrates.

  The material of the substrate 12 may be any material as long as it has mechanical strength and is easy to form a flow path, and either an inorganic material or an organic material can be used.

As an inorganic material constituting such a substrate 12, for example,
・ Iron, nickel, copper, zinc, aluminum, silicon, titanium, stainless steel, silica, alumina, titania,
・ Soda glass, borosilicate glass, quartz glass, etc.
-So-called silicone rubbers such as polydimethylsiloxane, polymethylvinylsiloxane, polymethylphenylsiloxane, polyfluorosiloxane,
Etc. can be used.

  Examples of the organic material constituting the substrate 12 include polyethylene, polypropylene, polystyrene, polymethyl methacrylate resin, liquid crystal polymer, polycarbonate, polyamide, polyimide, polyethylene terephthalate, polyethylene naphthalate, cycloolefin, polymethylpentene, poly Arylate, polysulfone, polyethersulfone, polyetheretherketone, polyethylene vinyl resin, crosslinked polyvinyl alcohol, polyglycolic acid, cellulose acetate resin, triacetyl cellulose resin, cellulose nitrate resin, epoxy resin, tetrafluoroethylene, fluorinated ethylene polypropylene Copolymer, tetrafluoroethylene perfluoroalkyl vinyl ether copolymer, tetrafluoroethylene ether Copolymers, polychlorotrifluoroethylene, and the like can be used.

  Further, as the organic material constituting the substrate 12, a rubber elastic body can also be used.

As such a rubber elastic body, for example,
・ Dimethylsiloxane, Polymethylvinylsiloxane, Polymethylphenylsilo ・ Styrene thermoplastic elastomer, Olefin thermoplastic elastomer, Polyester thermoplastic elastomer, Polyamide thermoplastic elastomer, Urethane thermoplastic elastomer, Polybudadiene thermoplastic elastomer , Fluorinated thermoplastic elastomers, PVC thermoplastic elastomers,
・ Ethylene ionomer, propylene ionomer, ethylenepropylene ionomer,
Etc. can be used.

On the other hand, the upper substrate 12a and the lower substrate 12b made of these materials are
-A method of integrally molding the substrate 12 on which the flow path 11 is formed by nanoimprint, press molding, injection molding, extrusion molding, etc., based on the above materials.-Formed based on the above materials. It is possible to form a flow path on a flat plate by nanoimprinting, mechanical cutting, etching, laser cutting, sandblast cutting, water jet cutting, or the like.
Further, when the upper substrate 12a and the lower substrate 12b are bonded, the bonding property is improved by performing plasma treatment, corona treatment, ion treatment, or the like on the upper substrate 12a and the lower substrate 12b in advance. be able to.

That is, for example, the substrate 12 made of polypropylene, polyethylene or the like having no polar group.
In the case of a substrate made of a fluorine-based material, a silicone resin material, or the like that is difficult to bond, by performing plasma treatment, corona treatment or ion treatment on the surface of these members in advance, it is possible to perform thermal adhesion bonding between these members. Become.

  In addition, as an adhesion method using an adhesive, it is preferable to use an epoxy or urethane acrylate type solventless adhesive from the viewpoint that a gap due to solvent volatilization cannot be formed. Further, if necessary, the photo-curing adhesive can be used by making the substrate 12 transparent.

  Further, as a laser welding method, the upper substrate 12a and the lower substrate 12b are made of a laser transmissive resin or a laser non-permeable resin, and the laser is transmitted from the laser transmissive resin side to a predetermined portion. Can be laser welded.

As the filter 28, various existing filters such as a glass filter, a nonwoven fabric filter, a membrane filter, a sintered filter of inorganic or organic particles, a filter with a straight hole, and the like can be used.
The straight hole filter can be obtained by various methods described in Japanese Patent Application No. 2005-148048.

  Among these, straight hole filters are particularly preferable, and since the pressure loss is small, it is possible to reduce the flow pressure of the channel fluid, and by using an arbitrary uniform hole filter, a solid hole filter can be used. The efficiency of liquid separation and affinity separation can be further increased.

It is also possible to perform a bead assay using a combination of a transparent substrate, a straight uniform pore filter, various probes, ligands, beads bound with a substrate, and a detection device.
These methods can be obtained by various methods described in Japanese Patent Application No. 2005-148048.

The thickness of the flow path 11 is not particularly limited, but is 25 mm ^{2 as a} cross-sectional area of the flow path.
Less than, preferably less than 10 mm ² , more preferably 5 mm ² or less.

In this case, when the thickness of the flow path 11 is 25 mm ² or more, it can be formed with an existing tube or the like, and in order to achieve the effects of the present invention, it is less than 25 mm ^2. desirable.

  The length of the flow path 11 is not particularly limited, but if it is too long, the movement of the fluid becomes difficult due to the resistance between the fluid flowing through the flow path 11 and the flow path wall, and thus a series of connections are made. The total length of the flow path 11 is preferably 5 m or less, more preferably 1 m or less, and even more preferably 50 cm or less.

  It is desirable that the cross section of the flow path 11 be as substantially circular or polygonal as possible in order to minimize the meniscus of the solution.

  In this case, the filter 28 is intended to capture a predetermined substance in the fluid flowing in the flow path 11 and filter a substance other than the predetermined substance. The filter 28 includes various existing filters, For example, a glass filter, a nonwoven fabric filter, a membrane filter, a sintered filter of inorganic or organic particles, a filter with a straight hole, and the like can be used.

In addition, it is also possible to perform affinity separation by separating the particle carrier and the filter by incorporating particles in the flow path upstream from the filter 28 and binding the particles with a probe or a ligand.
In addition, in the case where a plurality of types of filters are provided as in the embodiment of FIG. 2A or FIG. 2B, particles are incorporated in the flow path on the upstream side of each filter. Is possible. The particles contained in each flow path divided by the filter can be incorporated with different probes and ligands for each flow path, or with different particle sizes depending on the filter pore size. is there.
In a particle substrate in which different probes and ligand particles are incorporated in different flow paths, the substrate can be made transparent and combined with a detection device to perform a multiple bead assay.

  A fluid control method for a flow path built-in substrate using the flow path built-in substrate of the present invention configured as described above will be described below with reference to FIGS.

  In FIG. 13, similarly to the substrate 10 with a built-in channel in FIG. 5A, the connection portion 26 has a substantially circular shape in plan view, and the filter 28 disposed in the connection portion 26 is substantially in plan view. It is circular.

  The fluid introduction channel 16 a is arranged so that the fluid introduction direction is the same as the tangential direction of the circumference of the filter 28. In addition, the fluid introduction channel 16 b is disposed at a position perpendicular to the fluid introduction channel 16 a in plan view, and the fluid introduction direction is disposed toward the center of the filter 28.

  In the fluid control method for a flow path built-in substrate in FIG. 13, in the flow path built-in substrate 10 configured as described above, when the fluid is introduced into the flow path 11 from the plurality of fluid introduction flow paths 16 a and 16 b, The introduction of fluid from the fluid introduction channels 16a and 16b is performed asynchronously (with different phases).

  That is, first, any fluid such as a suspension, a reaction liquid, and a cleaning liquid is continuously introduced into the flow path 11 through the fluid introduction flow path 16a.

  Accordingly, as shown by an arrow A in FIG. 13, the fluid is filtered while drawing a vortex toward the center while circulating on the filter 28, and the filtered deposit is deposited around the filter center.

  Next, the fluid is introduced from the fluid introduction channel 16b asynchronously (with a different phase) from the introduction of the fluid in the fluid introduction channel 16a, and continuously in the channel 11 as shown by the arrow B in FIG. To introduce.

As a result, a complicated turbulent flow is generated on the filter surface, and the fluid from the fluid introduction channel 16a and the fluid from the fluid introduction channel 16b collide and can be efficiently stirred.
Further, by setting the flow rate of the fluid from the fluid introduction channel 16a and the fluid from the fluid introduction channel 16b to a certain level or more, deposits near the center of the filter 28 are removed, and the cleaning or reaction effect is achieved by rolling up the deposit. As a result, the clogging of the filter 28 is reduced and the life of the filter is extended.
Furthermore, the turbulent flow can be changed by changing the fluid flow rate from the fluid introduction flow channel 16a and the fluid input flow rate from the fluid introduction flow channel 16b, thereby enabling more efficient stirring.

  As described above, when the fluid is introduced into the flow path 11 from the plurality of fluid introduction flow paths 16a and 16b, the introduction of the fluid from the respective fluid introduction flow paths 16a and 16b is performed at different times (with different phases). ), The flow on the filter 28 is changed, and particles can be prevented from being deposited at a fixed position on the filter 28, and clogging can be prevented.

  14, the fluid introduction channels 16a and 16b are arranged so that the direction of fluid introduction is the same as the tangential direction of the circumference of the filter 28 and parallel to each other. In addition, the filter 28 is disposed on both sides of the filter 28 (in the vertical direction in FIG. 14).

  Furthermore, as shown in FIG. 14, the fluid introduction channel 16b is disposed so as to face the fluid introduction channel 16a.

  In the fluid control method for a flow path built-in substrate in FIG. 14, when a fluid is introduced into a flow path from a plurality of fluid introduction flow paths 16a and 16b in the flow path built-in substrate 10 thus configured, The introduction of fluid from the introduction flow path is performed synchronously.

  That is, a fluid such as a suspension, a reaction liquid, and a cleaning liquid is continuously introduced into the flow path 11 through the fluid introduction flow paths 16a and 16b.

  As a result, as shown by an arrow C in FIG. 14, the fluid introduced from the fluid introduction channel 16a is introduced while drawing a vortex toward the center while circulating around the filter 28, and the fluid introduction channel. The fluid introduced from 16b is introduced while drawing a vortex toward the center in the opposite direction as shown by arrow D in FIG.

  As described above, when the fluid is introduced from the plurality of fluid introduction channels 16a and 16b into the channel 11, the introduction of the fluid from the respective fluid introduction channels 16a and 16b is performed synchronously, thereby introducing the fluid. The fluids in the flow paths 16a and 16b collide on the filter 28, which is a confluence, to generate turbulent flow and enable efficient stirring.

In addition, by setting the input flow rate to a certain level or more, the filtered particles on the filter 28 can prevent the particles from accumulating at a certain position on the filter 28 due to the turbulent flow, thereby preventing clogging. can do.
In addition, more efficient agitation can be achieved by changing the flow rate of the fluid from the fluid introduction channel 16a and the fluid flow rate from the fluid introduction channel 16b.

  In addition, due to such turbulent flow, the reaction efficiency or cleaning efficiency of the primary side (fluid introduction side) filtered particles and the introduced specimen liquid is improved.

  With this configuration, a part of the flow path 11 is closed, and at the end of the flow path 11 of the flow path built-in substrate 10, for example, a fluid supply device, a fluid discharge device, a pressurization device, or a reduced pressure By simply connecting a fluid control device such as a device and operating the fluid control device, the fluid in the flow channel 11 can be accurately moved along the flow channel through the predetermined flow channel, and the filtered liquid. The filter 28 can be filtered, the clogging of the filter can be prevented, the life of the filter 28 can be extended, the configuration is not complicated, and the cost can be reduced.

  The substrate with a built-in channel thus obtained can be used for mixing, reaction, separation and detection of various reagents, compounds and biomolecules.

  In particular, by introducing particles bound with various probes and ligands into the channel, solid-liquid reaction, solid-liquid separation, affinity separation, bead assay, etc. can be performed.

Examples of probes, ligands, and substrates that bind to these particles include nucleic acids, polynucleic acids, antigens, hormones, peptides, proteins with molecular weight of 500 to 1,000,000, antibodies, sugar chains, polysaccharides, cells, aptamers, viruses, enzymes Various affinity tag capture substances, coenzymes such as biotin, or chemical substances having or possibly having a specific physiological activity can be used.
Examples of the nucleic acid include DNA, c-DNA, oligo DNA, RNA, mRNA, micro RNA, antisense RNA, miRNA, siRNA, and stRNA.

Specific examples of proteins having a molecular weight of 500 to 1,000,000 include synthetic peptides, membrane proteins, nuclear receptors, enzymes, avidin, lectins, kinases, phosphatases, hormones, transcription factors, transport proteins, cytokines, lymphokines, antibodies, Alternatively, those having a bioluminescence function such as luciferin, luciferase, aequorin, fluorescent protein and the like can be mentioned.
Specific examples of lipids include phosphatidic acid, phosphatidylinositol mannoside, urushiol, and various gangliosides.

  Aptamers are functional nucleic acids capable of binding to proteins, enzymes, pigments, amino acids, nucleotides, growth factors, gene expression regulators, cell adhesion molecules, individual organisms, etc., and specifically, aptamers, elastase aptamers , Activated puttin C, NS3 protease aptamer of hepatitis C virus, and the like.

  Affinity tag capture substances include glutathione for enzyme (GST) substrate tag, amylose for maltose binding protein tag, anti-FLAG monoclonal antibody for FLAG peptide tag of DYKDDDDK sequence, nickel complex for histidine hexamer tag, cobalt complex, manganese complex, Examples include PAO (paraaminophenylarsine oxide) for thioredoxin tags, streptavidin for biotin ligase protein tag (trade name “Avitag” AVITAG), calmodulin for calmodulin-binding peptide fusion protein tag, and the like.

  The preferred embodiment of the present invention has been described above, but the present invention is not limited to this, and various modifications can be made without departing from the object of the present invention.

FIG. 1 is a cross-sectional view of an embodiment of a channel built-in substrate of the present invention. FIG. 2 is a cross-sectional view of an embodiment of the flow path built-in substrate of the present invention. FIG. 3 is a top view of an embodiment of the flow path built-in substrate of the present invention. FIG. 4 is a cross-sectional view of an embodiment for explaining the use state of the flow path built-in substrate of the present invention. FIG. 5 is a top view of an embodiment of the flow path built-in substrate of the present invention. FIG. 6 is a top view of an embodiment of the flow path built-in substrate of the present invention. FIG. 7 is a top view of the embodiment of the substrate with a built-in channel according to the present invention. FIG. 8 is a top view of an embodiment of the flow path built-in substrate of the present invention. FIG. 9 is a top view of an embodiment of the flow path-embedded substrate of the present invention. FIG. 10 is a top view of an embodiment of the flow path-embedded substrate of the present invention. FIG. 11 is a perspective view of the stirring bar 19 viewed from the upper surface of the flow path of the flow path built-in substrate of the present invention. FIG. 12 is a cross-sectional view of an example illustrating a method for manufacturing a substrate with a built-in channel according to the present invention. FIG. 13 is a top view for explaining a fluid control method for a flow path built-in substrate using the flow path built-in substrate of the present invention. FIG. 14 is a top view for explaining a fluid control method for a flow path built-in substrate using the flow path built-in substrate of the present invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Flow path built-in board | substrate 10a, 10b Flow path built-in board | substrate 11 Flow path 12 Board | substrate 12a Upper board | substrate 12b Lower board | substrate 13 Introducing nozzle 14 Side edge 15 Discharge nozzle 16 Fluid introduction flow paths 16a, 16b, 16c Fluid introduction flow path 16d Flow path 16e Introduction port 18 Introduction ports 18a, 18b, 18c Introduction port 20 Fluid discharge channel 22 Lower end 24 Discharge port 26 Connection portion 28 Filter 30 Side end 32 Fluid introduction channel 34 Fluid supply device 36 Fluid discharge device 38 Recess

Claims (12)

A substrate with a built-in channel in which a channel is formed in the substrate,
A fluid introduction channel for introducing fluid into the channel;
A fluid discharge flow path for discharging fluid from the flow path;
A filter disposed between the fluid introduction channel and the fluid discharge channel,
The fluid introduction channel and the fluid discharge channel are formed so that their height positions are different in the substrate,
A channel-embedded substrate, wherein the filter is disposed in a connection portion between the fluid introduction channel and the fluid discharge channel in parallel with the fluid introduction channel.   The flow path-embedded substrate according to claim 1, wherein the connection portion is an inner bent portion of a flow path having an L shape in cross section. The connecting portion is substantially circular in plan view,
The filter disposed in the connection portion is substantially circular in plan view,
3. The flow path built-in substrate according to claim 1, wherein the fluid introduction flow path is disposed so that a direction of introducing the fluid is the same as a tangential direction of a circumference of the filter.   A plurality of the fluid introduction flow paths are provided, and at least one of the fluid introduction flow paths is disposed so that the fluid introduction direction is the same as the tangential direction of the circumference of the filter. 4. The flow path built-in substrate according to 3.   5. The flow path built-in substrate according to claim 4, wherein the plurality of fluid introduction flow paths are arranged at positions parallel to each other in plan view.   6. The flow path built-in substrate according to claim 4, wherein the plurality of fluid introduction flow paths are arranged at positions perpendicular to each other in plan view.   7. The flow path built-in substrate according to claim 4, wherein the plurality of fluid introduction flow paths are arranged at positions facing each other in plan view.   8. The substrate with a built-in channel according to claim 1, wherein a plurality of independent substrates with a built-in channel are disposed in the same substrate.   9. The flow path built-in substrate according to claim 1, wherein fluid discharge flow paths are radially arranged from the center of the substrate area of the flow path built-in substrate toward the outer periphery of the substrate.   10. The flow path built-in substrate according to claim 1, wherein a stirrer is accommodated in at least one of the fluid introduction flow path and the fluid discharge flow path of the flow path built-in substrate. A flow path is formed in the substrate,
A fluid introduction channel for introducing fluid into the channel;
A fluid discharge flow path for discharging fluid from the flow path;
A filter disposed between the fluid introduction channel and the fluid discharge channel,
The fluid introduction channel and the fluid discharge channel are formed so that their height positions are different in the substrate,
The filter is disposed in a connection portion between the fluid introduction channel and the fluid discharge channel in parallel with the fluid introduction channel;
A fluid control method for a substrate with a built-in channel provided with a plurality of the fluid introduction channels,
A fluid control method for a microchip, wherein when introducing a fluid from the plurality of fluid introduction channels into the channel, the fluids are introduced asynchronously from the respective fluid introduction channels. A flow path is formed in the substrate,
A fluid introduction channel for introducing fluid into the channel;
A fluid discharge flow path for discharging fluid from the flow path;
A filter disposed between the fluid introduction channel and the fluid discharge channel,
The fluid introduction channel and the fluid discharge channel are formed so that their height positions are different in the substrate,
The filter is disposed in a connection portion between the fluid introduction channel and the fluid discharge channel in parallel with the fluid introduction channel;
A fluid control method for a substrate with a built-in channel provided with a plurality of the fluid introduction channels,
A fluid control method for a substrate with a built-in channel, wherein when introducing a fluid from the plurality of fluid introduction channels into the channel, the introduction of the fluid from each fluid introduction channel is performed synchronously.

Images