JP2007101846A - Method of forming pattern, method of forming color filter and color filter - Google Patents

Method of forming pattern, method of forming color filter and color filter Download PDF

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JP2007101846A
JP2007101846A JP2005290885A JP2005290885A JP2007101846A JP 2007101846 A JP2007101846 A JP 2007101846A JP 2005290885 A JP2005290885 A JP 2005290885A JP 2005290885 A JP2005290885 A JP 2005290885A JP 2007101846 A JP2007101846 A JP 2007101846A
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pattern
ink
region
photosensitive
partition wall
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JP4784244B2 (en
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Ryuichi Yamashita
竜一 山下
Yasumasa Akimoto
靖匡 秋本
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Toppan Inc
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Abstract

<P>PROBLEM TO BE SOLVED: To provide a method of forming pattern which does not require high-precision positioning control of ink filling and hardly causes color irregularity. <P>SOLUTION: The method of forming pattern comprises: a process of applying one kind of colored photosensitive inks with a uniform thickness on substantially whole surface of a substrate having a plurality of pattern regions divided by barrier walls of which only the upper part is ink-repellent; a process of filling the photosensitive ink into the pattern region by causing the photosensitive ink on the barrier walls to fall down to the pattern region; a process of performing pattern exposure of desired parts of the photosensitive ink; and a process of removing the photosensitive ink of either exposure parts or non-exposure parts by development after the pattern exposure process. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

カラーフィルタの着色パターンなどを形成するパターン形成方法に関する。   The present invention relates to a pattern forming method for forming a coloring pattern of a color filter.

カラーフィルタの着色パターン形成方法には従来から色々な方法が提案されている。ブラックマトリックスが形成されている基板上に感光性着色レジストを全面塗布し、フォトマスクを介してパターン露光し、非露光部を現像により除去する方法によるパターン形成方法（フォトリソ法：特許文献１参照）がある。また、撥インキ性のブラックマトリックスの間にインクジェット方式により、着色インクを充填し、その着色インクを硬化することによるパターン形成方法（インクジェット法：特許文献２参照）がある。
特開平９−３２３４７２号公報 特開２００１−８０７９４１号公報 Various methods have been proposed for forming a color filter coloring pattern. A pattern forming method in which a photosensitive colored resist is applied over the entire surface of a substrate on which a black matrix is formed, pattern exposure is performed through a photomask, and unexposed portions are removed by development (photolithographic method: see Patent Document 1). There is. Further, there is a pattern formation method (inkjet method: see Patent Document 2) by filling a colored ink between ink-repellent black matrices by an inkjet method and curing the colored ink.
JP-A-9-323472 JP 2001-807941 A

しかしながら、フォトリソ法では、露光の際の位置精度を完璧にすることは難しい。すなわち、隔壁と着色パターンの境目がぴったり合い、隙間が無いように形成することは難しく、隔壁の上に着色パターンが一部載った形状になる。この形状であると、高精細な仕様（隔壁幅が短くなる。隔壁ピッチが短くなる。）になると、着色パターンが隣の領域まではみ出してしまい、混色の原因となる可能性がある。
また、インクジェット法では、高精細な仕様になると、隔壁間に適量のインクを適当な位置に充填するのに高レベルの制御が必要になる。また、隔壁全体が撥インキ性であると、隔壁間の着色パターンが山型になり、色むらが生じる。
本発明は、上記のような混色の問題が生じずに、高レベルのインクの充填の位置制御が不要で色むらの少ないパターン形成方法を提供するものである。 However, with the photolithography method, it is difficult to achieve perfect position accuracy during exposure. In other words, it is difficult to form the boundary between the partition wall and the coloring pattern so that there is no gap, and a shape in which the coloring pattern is partially placed on the partition wall is obtained. With this shape, when a high-definition specification (the partition wall width is shortened and the partition wall pitch is shortened), the coloring pattern protrudes to the adjacent region, which may cause color mixing.
In addition, in the ink jet method, when the specification becomes high definition, a high level of control is required to fill an appropriate amount of ink between the partition walls at an appropriate position. Moreover, when the whole partition is ink-repellent, the coloring pattern between partition will become a mountain shape, and color unevenness will arise.
The present invention provides a pattern forming method that does not cause the above-described color mixing problem and does not require high-level ink filling position control and has less color unevenness.

請求項１に記載の発明は、
上部のみが撥インキ性である隔壁で区画された複数のパターン領域を有する基板の略全面に１種類の着色感光性インキを均一の厚さで塗布し、前記隔壁上の前記感光性インキが前記パターン領域に落ちることにより前記パターン領域に前記感光性インキが充填された後、前記感光性インキの所要部をパターン露光し、該露光の後に露光部あるいは非露光部のいずれかの前記感光性インキを現像により除去することを特徴とするパターン形成方法である。 The invention described in claim 1
One kind of colored photosensitive ink is applied to a substantially entire surface of a substrate having a plurality of pattern regions partitioned by a partition wall having an ink repellency only at an upper portion, and the photosensitive ink on the partition wall is After the photosensitive region is filled with the photosensitive ink by falling onto the pattern region, a required portion of the photosensitive ink is subjected to pattern exposure, and after the exposure, the photosensitive ink in either the exposed portion or the non-exposed portion. Is removed by development.

請求項２に記載の発明は、
前記隔壁の横断面の上部が山型となっていることを特徴とする請求項１に記載のパターン形成方法である。 The invention described in claim 2
The pattern forming method according to claim 1, wherein an upper portion of a cross section of the partition wall has a mountain shape.

請求項３に記載の発明は、
前記感光性インキの塗布にダイコーターを用いることを特徴とする請求項１あるいは２に記載のパターン形成方法である。 The invention according to claim 3
The pattern forming method according to claim 1, wherein a die coater is used for applying the photosensitive ink.

請求項４に記載の発明は、
前記感光性インキの塗布の最中、または、塗布の後であって、前記感光性インキの乾燥前に、前記基板に超音波振動を加え、前記隔壁上の前記感光性インキを前記パターン領域に落とすことを特徴とする請求項１乃至３のいずれかに記載のパターン形成方法である。 The invention according to claim 4
During the application of the photosensitive ink or after the application, and before the photosensitive ink is dried, ultrasonic vibration is applied to the substrate, and the photosensitive ink on the partition is applied to the pattern region. 4. The pattern forming method according to claim 1, wherein the pattern is dropped.

請求項５に記載の発明は、
前記パターン露光の際に用いるフォトマスクの光透過部の各領域が、前記パターン領域より大きく、かつ、前記パターン領域と周辺の前記隔壁を合わせた領域より小さく、該フォトマスクを介して、前記パターン領域と前記周辺の隔壁を合わせた領域を露光することを特徴とする請求項１乃至４のいずれかに記載のパターン形成方法である。 The invention described in claim 5
Each region of the light transmission part of the photomask used for the pattern exposure is larger than the pattern region and smaller than a region where the pattern region and the peripheral partition wall are combined, and the pattern is passed through the photomask. 5. The pattern forming method according to claim 1, wherein a region obtained by combining the region and the peripheral partition wall is exposed.

請求項６に記載の発明は、
請求項１乃至５のいずれかに記載のパターン形成方法を３色分行うことを特徴とするカラーフィルタの形成方法である。 The invention described in claim 6
6. A color filter forming method comprising performing the pattern forming method according to claim 1 for three colors.

請求項７に記載の発明は、
上部のみが撥インキ性である山型の隔壁と、該隔壁で区画されたパターン領域と、該パターン領域に配置されてある３色の着色パターンを有することを特徴とするカラーフィルタである。 The invention described in claim 7
It is a color filter characterized by having a mountain-shaped partition whose upper part is ink-repellent, a pattern region partitioned by the partition, and a colored pattern of three colors arranged in the pattern region.

請求項１の発明によれば、白抜け・混色や隔壁への乗り上げなく、容易に隔壁間にパターン形成することが可能である。   According to the first aspect of the present invention, it is possible to easily form a pattern between the partition walls without white spots / color mixture or climbing onto the partition walls.

請求項２の発明によれば、塗布時に隔壁上に乗っている感光性インキが容易に隔壁間のパターン形成領域に充填することが可能である。   According to the second aspect of the present invention, it is possible to easily fill the pattern forming region between the partition walls with the photosensitive ink on the partition walls during application.

請求項３の発明によれば、均一の膜厚で感光性インキを塗布することが出来るので、最終的に隔壁間のパターン領域に充填される感光性インキの量が一定となる。従って、複数の隔壁間にある複数のパターンの膜厚が、すべて、ほぼ同一とすることが可能となる。   According to the invention of claim 3, since the photosensitive ink can be applied with a uniform film thickness, the amount of the photosensitive ink finally filled in the pattern region between the partition walls becomes constant. Therefore, the film thicknesses of the plurality of patterns between the plurality of partition walls can all be substantially the same.

請求項４の発明によれば、隔壁上に乗っている感光性インキを隔壁間のパターン領域に落とすことを促進することが可能である。   According to the invention of claim 4, it is possible to promote the dropping of the photosensitive ink on the partition walls into the pattern region between the partition walls.

請求項５の発明によれば、感光性インキが隔壁間にほぼ充填され、隔壁上には感光性インキがほぼないので、少なくとも隔壁間のパターン領域を露光すればよい。すなわち、隔壁上の感光性インキの露光については、考慮する必要がない。よって、ラフなフォトマスクでラフなアライメントで感光性インキの露光が可能となる。   According to the fifth aspect of the present invention, the photosensitive ink is almost filled between the partition walls, and there is almost no photosensitive ink on the partition walls. Therefore, at least the pattern region between the partition walls may be exposed. That is, there is no need to consider the exposure of the photosensitive ink on the partition walls. Therefore, it is possible to expose the photosensitive ink with rough alignment using a rough photomask.

請求項６の発明によれば、白抜け・混色や隔壁の着色パターンの乗り上げのない３色の着色パターンからなるカラーフィルタの形成方法を提供することが可能である。また、隔壁として用いるブラックマトリックスの厚さを厚くすることが出来る。これまでは、着色パターンがブラックマトリックス上に乗り上げるので、ブラックマトリックスの厚さはできるだけ薄くする必要があった。一方、遮光性を確保するためにブラックマトリックス材の遮光成分（通常は、カーボン。）の含有率を限界まで高くしていた。そのため、感光性、現像適正、強度等に問題が生じやすかった。ブラックマトリックスを厚さ制限が緩和されるので、必要な特性をうることが容易になった。   According to the sixth aspect of the present invention, it is possible to provide a method for forming a color filter composed of three colored patterns without white spots / mixed colors and without running up the colored pattern of the partition walls. Moreover, the thickness of the black matrix used as a partition can be increased. Until now, since the colored pattern runs on the black matrix, the thickness of the black matrix has to be as thin as possible. On the other hand, in order to ensure light shielding properties, the content of the light shielding component (usually carbon) of the black matrix material has been increased to the limit. For this reason, problems such as photosensitivity, development appropriateness, and strength are likely to occur. Since the thickness limitation of the black matrix is relaxed, it is easy to obtain the necessary characteristics.

請求項７の発明によれば、白抜け・混色や隔壁の着色パターンの乗り上げのない３色の着色パターンからなるカラーフィルタを提供することが可能である。   According to the seventh aspect of the present invention, it is possible to provide a color filter composed of three colored patterns without white spots / mixed colors and without running up the colored pattern of the partition walls.

以下、カラーフィルタの着色パターンを形成する方法を例として図１を用いて説明する。
本発明において、基板とは、ガラスやプラスチックなどの基板である。
また、撥インキ性の隔壁とは、撥インキ剤を有する隔壁である。カラーフィルタの場合、感光性ブラック樹脂に撥インキ剤を混ぜたものを基板上に塗布し、フォトリソ法を用いることにより形成することができる。撥インキ剤としては、フッ素樹脂系のモノマー、オリゴマー、ポリマーを使用することができる。隔壁の上部のみを撥インキ性とするには、隔壁を２段構成とし、上段の隔壁に撥インキ剤を含ませ、下段の隔壁に撥インキ剤を含ませなければ良い。
隔壁の上部を山型にするには、隔壁の上部をやすりで削ればよい。また、バフ研磨、サンドブラスト、液体ホーニング等で削る方法もある。山型の具体的な形状としては、横断面が半円状であってもいいし、三角状であってもいい。
また、隔壁の上部を山型にするのに、隔壁を加熱させることにより変形（熱ダレ）させてもよい。この場合、下段の隔壁を熱ダレさせて形成し、その上部に撥インキ性の隔壁を通常の方法により形成すれば、自然と、隔壁の上部が山型になる。 Hereinafter, an example of a method for forming a color pattern of a color filter will be described with reference to FIG.
In the present invention, the substrate is a substrate such as glass or plastic.
The ink-repellent partition wall is a partition wall having an ink repellent agent. In the case of a color filter, it can be formed by applying a mixture of photosensitive black resin and an ink repellent agent on a substrate and using a photolithography method. As the ink repellent agent, fluorine resin monomers, oligomers, and polymers can be used. In order to make only the upper part of the partition wall ink-repellent, the partition wall has a two-stage structure, the upper partition wall contains an ink repellent agent, and the lower partition wall does not contain an ink repellent agent.
In order to make the upper part of the partition wall into a mountain shape, the upper part of the partition wall may be shaved with a file. There is also a method of shaving by buffing, sand blasting, liquid honing or the like. The specific shape of the mountain shape may be a semicircular cross section or a triangular shape.
Further, in order to make the upper part of the partition wall into a mountain shape, the partition wall may be deformed (heated) by heating. In this case, if the lower partition wall is formed by heat sagging and an ink-repellent partition wall is formed on the upper part by a normal method, the upper part of the partition wall naturally becomes a mountain shape.

撥インキ性隔壁を有する基板上に感光性の着色インキを均一の膜厚で塗布する方法としては、図１ a）、ｂ）に示すように、ダイコーターを用いればよい。本発明の場合、感光性の着色インキを塗布した後に、着色インキが隔壁間に最終的に充填されるように、ダイコーターから吐出されるインキの量をコントロールする。隔壁の上部は撥インキ性なので、隔壁の高さより盛り上がるようにしてインキを充填することができる。しかしながら、撥インキ力を超えて、隔壁の上部までインキが乗りあがるようにはしないようにインク量を調整する。また、隔壁がインキにより完全に埋もれてしまわないようにする。   As a method for applying a photosensitive colored ink with a uniform film thickness on a substrate having an ink-repellent partition wall, a die coater may be used as shown in FIGS. In the case of the present invention, after applying the photosensitive colored ink, the amount of ink discharged from the die coater is controlled so that the colored ink is finally filled between the partition walls. Since the upper part of the partition wall is ink-repellent, it can be filled with ink so as to rise from the height of the partition wall. However, the ink amount is adjusted so as not to exceed the ink repellency and prevent the ink from climbing up to the upper part of the partition wall. In addition, the partition walls should not be completely buried with ink.

隔壁の上部に感光性インキが若干残ってしまう場合には、基板を振動させて隔壁上の感光性インキを隔壁間のパターン領域に落とせばいい。基板を振動させるには超音波振動する定盤上に基板を載せて、基板を振動させればよい。   If a little photosensitive ink remains on the upper part of the partition wall, the substrate may be vibrated to drop the photosensitive ink on the partition wall into the pattern area between the partition walls. In order to vibrate the substrate, the substrate may be vibrated by placing the substrate on a surface plate that vibrates ultrasonically.

感光性インキは公知のインクジェット用感光硬化型のインキを用いることができる。また、公知のダイコート用感光硬化型のインキを用いても良い。   As the photosensitive ink, a publicly known photosensitive curable ink for ink jet can be used. Further, a known photosensitive curable ink for die coating may be used.

カラーフィルタの場合、感光性インキの着色固形成分は、通常２０％程度である。感光性インキの溶剤蒸発後に、所定の膜厚となるようにするためには、隔壁間に山盛りとなるように充填する。この場合、隔壁上の感光性インキが、隔壁間のパターン領域に落ちない場合がある。その場合、数回に分けて感光性インキの充填を少しづつ行う。その場合、隔壁上の感光性インキが、隔壁間のパターン領域に落ちやすくなる。   In the case of a color filter, the colored solid component of the photosensitive ink is usually about 20%. In order to obtain a predetermined film thickness after evaporation of the solvent of the photosensitive ink, the photosensitive ink is filled in a pile. In this case, the photosensitive ink on the partition may not fall into the pattern area between the partitions. In that case, the photosensitive ink is filled little by little in several steps. In that case, the photosensitive ink on the barrier ribs tends to fall into the pattern area between the barrier ribs.

上記の着色インキの塗布は、例えば、赤について最初に行う。
赤の着色インキの塗布が終わったら、赤、緑、青のパターン領域のうち、赤のパターン領域のみをパターン露光する。露光においては、図１ ｃ）に示すようにフォトマスクを介してパターン露光する。この場合、フォトマスクの光透過部と赤のパターン領域を向かい合うように対向させる。光透過部の大きさは、パターン領域の大きさより若干大きくてよい。但し、混色を防ぐため、パターン領域と周辺の隔壁を合わせた領域より小さい必要がある。赤の感光性インキは撥インキ性の隔壁の上部には無いから、赤のパターン領域にある赤の感光性インキをすべて露光してよい。そのため、フォトマスクと基板とのアライメントは、高精度のものでなくて良く、ラフなアライメントでよい。現像することにより、図１ ｄ）のように、赤のパターン領域のみに赤パターンが形成される。 The above-described application of the colored ink is first performed for red, for example.
When the application of the red coloring ink is finished, only the red pattern area is subjected to pattern exposure among the red, green, and blue pattern areas. In exposure, pattern exposure is performed through a photomask as shown in FIG. In this case, the light transmission portion of the photomask and the red pattern region are opposed to each other. The size of the light transmission part may be slightly larger than the size of the pattern region. However, in order to prevent color mixing, the area needs to be smaller than the combined area of the pattern area and the peripheral partition wall. Since the red photosensitive ink does not exist on the upper part of the ink-repellent partition, all of the red photosensitive ink in the red pattern area may be exposed. Therefore, the alignment between the photomask and the substrate does not have to be highly accurate and may be rough alignment. By developing, a red pattern is formed only in the red pattern area as shown in FIG.

緑、青についても同様の工程を行うことにより、図１ ｅ）のように赤、緑、青の3色の着色パターンが撥インキ性隔壁間に形成される。   By performing the same process for green and blue, a colored pattern of three colors of red, green and blue is formed between the ink repellent partition walls as shown in FIG.

本実施形態については、カラーフィルタについて説明したが、感光性インキとしてＥＬ などの自発光性材料を用いて、ＥＬディスプレイを作成することもできる。   In the present embodiment, the color filter has been described, but an EL display can also be created using a self-luminous material such as EL as the photosensitive ink.

カラーフィルタ用の基板としてコーニング社のイーグル２０００（厚さ０．７ｍｍ）を使用し、感光硬化型のブラックマトリックス材を使用し、フォトリソ法を使用してブラックマトリックスパターン（幅１０μｍ）を形成した。このブラックマトリックスパターンの高さは１．９μｍとした。   Corning Eagle 2000 (thickness 0.7 mm) was used as the substrate for the color filter, a photosensitive curable black matrix material was used, and a black matrix pattern (width 10 μm) was formed using the photolithography method. The height of the black matrix pattern was 1.9 μm.

次に、このブラックマトリックスを加熱処理して硬化し、熱ダレを発生させ、ブラックマトリックスパターンの横断面形状を半円状とした。   Next, this black matrix was heated and cured to generate heat sagging, and the cross-sectional shape of the black matrix pattern was made semicircular.

さらに、撥インキ剤としてフッ素樹脂系のものを前記ブラックマトリックス材に０．５ｗｔ％添加し、上記ブラックマトリックスパターンが形成されている基板に乾燥厚さ０．１μｍになるように、ダイコーターで塗布した。溶剤乾燥後、アライメント露光して、上記のブラックマトリックスパターンの上に重なる形で厚さ０．１μｍの撥インク剤入りのブラックマトリックス層を形成した。この撥インク剤入りのブラックマトリックス層は、下地のブラックマトリックスパターンの上にほぼ均一の厚さで形成された。結果として、２層からなるブラックマトリックスの横断面の形状は半円状となった。   Furthermore, 0.5 wt% of a fluororesin-based ink repellent agent is added to the black matrix material and applied to the substrate on which the black matrix pattern is formed with a die coater so that the dry thickness is 0.1 μm. did. After drying the solvent, alignment exposure was performed to form a black matrix layer containing an ink repellent with a thickness of 0.1 μm so as to overlap the black matrix pattern. The black matrix layer containing the ink repellent agent was formed on the underlying black matrix pattern with a substantially uniform thickness. As a result, the shape of the cross section of the two-layer black matrix was semicircular.

次に、カラーフィルタ用の赤色レジストを、ダイコータを使用して、乾燥厚さが所定の色濃度になるように調整して塗布し、溶剤を揮発させた。そして、赤色パターン形成用のフォトマスクを使用し、ブラックマトリックスのアライメントマークを使用して、アライメント露光した。この際、フォトマスク上の赤色用パターンのサイズは、画素部の設計サイズ（＝ブラックマトリックス隔壁間の設計幅）にブラックマトリックスの幅を合算したサイズとした。露光機としては、アライメント精度±４μｍ（ブラックマトリックス幅の０．８倍）のものを使用した。   Next, a red resist for a color filter was applied using a die coater so that the dry thickness was adjusted to a predetermined color density, and the solvent was volatilized. Then, alignment exposure was performed using a photomask for forming a red pattern and using black matrix alignment marks. At this time, the size of the red pattern on the photomask was a size obtained by adding the width of the black matrix to the design size of the pixel portion (= design width between the black matrix partitions). As the exposure device, one having an alignment accuracy of ± 4 μm (0.8 times the black matrix width) was used.

未硬化の赤色レジストを、所定のアルカリ性現像液を使用して除去し、水洗・乾燥した。   The uncured red resist was removed using a predetermined alkaline developer, washed with water and dried.

次に、同様にして、緑色、青色の着色パターンについても形成し、カラーフィルタを形成した。   Next, green and blue coloring patterns were formed in the same manner to form a color filter.

本発明のパターン形成方法の工程説明図。Process explanatory drawing of the pattern formation method of this invention.

Claims (7)

上部のみが撥インキ性である隔壁で区画された複数のパターン領域を有する基板の略全面に１種類の着色感光性インキを均一の厚さで塗布し、前記隔壁上の前記感光性インキが前記パターン領域に落ちることにより前記パターン領域に前記感光性インキが充填された後、前記感光性インキの所要部をパターン露光し、該露光の後に露光部あるいは非露光部のいずれかの前記感光性インキを現像により除去することを特徴とするパターン形成方法。   One kind of colored photosensitive ink is applied to a substantially entire surface of a substrate having a plurality of pattern regions partitioned by a partition wall having an ink repellency only at an upper portion, and the photosensitive ink on the partition wall is After the photosensitive region is filled with the photosensitive ink by falling onto the pattern region, a required portion of the photosensitive ink is subjected to pattern exposure, and after the exposure, the photosensitive ink in either the exposed portion or the non-exposed portion. Is removed by development. 前記隔壁の横断面の上部が山型となっていることを特徴とする請求項１に記載のパターン形成方法。   The pattern forming method according to claim 1, wherein an upper portion of a cross section of the partition wall has a mountain shape. 前記感光性インキの塗布にダイコーターを用いることを特徴とする請求項１あるいは２に記載のパターン形成方法。   The pattern forming method according to claim 1, wherein a die coater is used for applying the photosensitive ink. 前記感光性インキの塗布の最中、または、塗布の後であって、前記感光性インキの乾燥前に、前記基板に超音波振動を加え、前記隔壁上の前記感光性インキを前記パターン領域に落とすことを特徴とする請求項１乃至３のいずれかに記載のパターン形成方法。   During the application of the photosensitive ink or after the application, and before the photosensitive ink is dried, ultrasonic vibration is applied to the substrate, and the photosensitive ink on the partition is applied to the pattern region. 4. The pattern forming method according to claim 1, wherein the pattern is dropped. 前記パターン露光の際に用いるフォトマスクの光透過部の各領域が、前記パターン領域より大きく、かつ、前記パターン領域と周辺の前記隔壁を合わせた領域より小さく、該フォトマスクを介して、前記パターン領域と前記周辺の隔壁を合わせた領域を露光することを特徴とする請求項１乃至４のいずれかに記載のパターン形成方法。   Each region of the light transmission part of the photomask used for the pattern exposure is larger than the pattern region and smaller than a region where the pattern region and the peripheral partition wall are combined, and the pattern is passed through the photomask. 5. The pattern forming method according to claim 1, wherein a region obtained by combining the region and the peripheral partition wall is exposed. 請求項１乃至５のいずれかに記載のパターン形成方法を３色分行うことを特徴とするカラーフィルタの形成方法。   6. A color filter forming method comprising performing the pattern forming method according to claim 1 for three colors. 上部のみが撥インキ性である山型の隔壁と、該隔壁で区画されたパターン領域と、該パターン領域に配置されてある３色の着色パターンを有することを特徴とするカラーフィルタ。   A color filter comprising a mountain-shaped partition wall having ink repellency only at an upper portion, a pattern region partitioned by the partition wall, and a three-color coloring pattern arranged in the pattern region.
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