JP2007093587A - Superconductive radiation detector and superconductive radiation analyzer using it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To perform accurate radiation detection and measurement by reducing external heat or noise by magnetic field environment, or by suppressing temperature rise of a superconductive radiation detector and a superconductive wire connecting it with a low-temperature initial amplifier because of heat generated in the low-temperature initial amplifier, and reducing the influence of magnetic noise while reducing the influence of radiant heat on the superconductive radiation detector or the low-temperature initial amplifier from the outside such as a liquid helium shield layer. <P>SOLUTION: The superconductive radiation detector 1 detecting radiation and the low-temperature initial amplifier 2 amplifying a signal detected by the detector 1 are fixed to a cooling head 104, a heat shield plate 6 is arranged above the detector 1 and the amplifier 2, and a superconductive shield film 7 consisting of a material which is laid in a superconductive state by the temperature of the heat shield plate 6 is provided at least between the amplifier 2 and the heat shield plate 6. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a superconducting radiation detection apparatus for detecting radiation and a superconducting radiation analysis apparatus using the same, and more particularly to a technique for reducing the influence of external heat on the superconducting radiation detection apparatus and enabling highly accurate radiation measurement. .

  A superconducting transition edge detector called TES (Transition Edge Sensor) has been developed as a superconducting radiation detector for detecting radiation such as electron beams, ions, and X-rays. This is a type of calorimeter that detects the energy of incident radiation by converting it into heat, and is known to be able to detect radiation with higher sensitivity and higher energy resolution than conventional radiation detectors using semiconductor detectors. It has been.

  FIG. 8 shows an example of the relationship of the resistance of TES to the absolute temperature of TES which is a superconducting radiation detector. In the relationship between the temperature and resistance of TES, the high-temperature side with electrical resistance is in the normal conduction state 119, the superconducting state 117 in which the electrical resistance becomes zero when the temperature is lowered below the critical temperature Tc, and the transition state that is an intermediate state thereof. There are 118. The region that is in this transition state is called a superconducting transition end, and in this region, the resistance of the TES greatly varies with a minute temperature change. As a result, a slight change in absolute temperature of several mK caused by the energy of the incident radiation causes a sudden resistance change in the TES biased to a constant voltage, and the value of the current flowing through the TES changes due to this resistance change. The energy of radiation can be detected by measuring the current change width.

  Then, a slight current change of about several μA flowing through the TES due to the radiation incidence is detected and signal amplified by using a SQUID (Superconducting Quantum Interference Device) amplifier as a low temperature first stage amplifier.

  Further, in order to drive the TES serving as the superconducting radiation detector, it must be maintained at a temperature at which the TES transition state is achieved. It is known that the SQUID amplifier, which is normally cooled to an extremely low temperature of about 100 mK and is a low-temperature first stage amplifier, uses an element utilizing superconductivity, and therefore needs to be cooled to at least about 4K. (For example, refer nonpatent literature 1).

FIG. 9 shows an example of an overall configuration diagram of a superconducting radiation detection apparatus using a TES serving as a superconducting radiation detector. The superconducting radiation detection device 114 is cooled with liquid nitrogen having an absolute temperature of 77 K inside the vacuum vessel exterior 100 that can be evacuated by a vacuum pump (not shown) for heat insulation from the outside. A liquid nitrogen tank 101 and a liquid helium tank 102 that is cooled with liquid helium having an absolute temperature of 4K are provided inside the liquid nitrogen tank 101. Further, a cooling head connected to the refrigerator 103 by a refrigerator 103 such as a dilution refrigerator using a mixture of ³ He and ⁴ He provided inside these insulated from the outside, or a refrigerator for adiabatic demagnetization 104 is cooled, for example, to an absolute temperature of 100 mK or less.

  FIG. 10 is a schematic configuration diagram enlarging the periphery of the sensor mounting portion 105 at the tip of the cooling head 104 of the superconducting radiation apparatus 114 of FIG.

  Metals connected to the liquid nitrogen tank 101 and the liquid helium tank 102 are provided up to the periphery of the sensor mounting portion 105, and the liquid nitrogen shield layer 106 and the liquid helium shield layer 107 are used. As a result, the periphery of the tip of the cooling head 104 is also configured to shield from the room temperature in the order of the vacuum vessel exterior 100, the liquid nitrogen shield layer 106, and the liquid helium shield layer 107 from the outside. Cooling can be performed so that the absolute temperature is 100 mK or less.

Further, inside the liquid helium shield layer 107, a TES as the superconducting radiation detector 1 and a SQUID amplifier as the low temperature first stage amplifier 2 are fixed to the front end surface 4 of the cooling head 104.
In general, a low-temperature first-stage amplifier is called a SQUID amplifier having a configuration in which a plurality of SQUIDs are connected in series in order to sufficiently amplify.

  One side of the terminal of the TES which is the superconducting radiation detector 1 is connected to the SQUID amplifier serving as the low temperature first stage amplifier 2 by the superconducting wiring 5, and the other is provided in the room temperature region for applying a constant voltage bias to the superconducting radiation detector 1. A bias power supply (not shown) is connected by superconducting wiring through wiring such as copper.

  Here, since Joule heat generated in the TES that becomes the superconducting radiation detector 1 by incident radiation is a very small calorific value on the order of nW, it is necessary to cool the TES to an absolute temperature of about 100 mK as described above. In addition, a heat shield plate 6 is provided to shield the radiant heat from the liquid helium shield layer 107 that is cooled by using liquid helium having an absolute temperature of 4K to the TES and to cool the TES stably. .

  The heat shield plate 6 is a plate-like member provided between the TES which is the superconducting radiation detector 1 or the SQUID amplifier which is the low temperature first stage amplifier 2 and the liquid helium shield layer 107, and has high thermal conductivity and low specific heat. As a material, normal materials such as copper (Cu) and gold (Au) are used, and the vacuum vessel exterior 100, the liquid nitrogen shield layer 106, and the liquid helium shield layer so that radiation from the outside enters the superconducting radiation detector. Each of 107 is provided with a radiation transmitting film 8. The radiation transmissive film 8 is made of a thin film made of a material such as beryllium capable of transmitting X-ray or other radiation, and further plays a role of preventing external radiant heat and maintaining a pressure difference from the outside. . The heat shield plate 6 is cooled by being connected to a cooling head 104 cooled to an absolute temperature of 100 mK or less. In this way, the radiant heat from the outside is shielded to keep the TES or SQUID amplifier at a temperature at which it normally operates.

Furthermore, TES and SQUID using the superconducting phenomenon are easily influenced by characteristics by an external magnetic field. For example, in the TES, the current flowing through the TES is changed by an external magnetic field, which adversely affects characteristics such as a change in the temperature-resistance relationship of the TES. Therefore, in order to prevent the influence of an external magnetic field, a substrate using a superconducting material is provided on the cooling head, or the periphery of the TES is covered with a magnetic shield container (not shown) made of permalloy (iron nickel alloy) having a high magnetic shielding effect. I am doing so. (For example, see Patent Document 1)
In addition, it is known that SQUID is used in a high-sensitivity magnetic field detection device that detects a minute magnetic field generated from the brain with high sensitivity.
DAWOLLMAN et al, “High-resolution, energy-dispersive microcalorimeter spectrometer for X-ray microanalysis,”, J. Microscopy, Vol.188, Issue 03, Page 196-223, 1997 JP 2004-233059 A

  However, in order to prevent the influence of heat and magnetic field from the outside, the following problems remain.

  In a metal such as copper used for a heat shield plate provided to block radiant heat from the outside, thermal noise is generated due to irregular fluctuation of conduction electrons in the resistor. The current noise that generates magnetic noise due to the thermal noise is affected by TES and SQUID having high sensitivity to magnetism, and greatly affects the measurement accuracy. Further, it is known that the generated current noise is inversely proportional to the square root of the resistance value of the resistor.

  Accordingly, the resistance value of the heat shield plate connected to the cooling head cooled to an absolute temperature of 100 mK or less becomes a very small value and the generated magnetic noise becomes large. Therefore, the TES element which is a superconducting radiation detector and the low temperature first stage amplifier As a result, the characteristics of the SQUID amplifier are affected, and there is a problem that high-precision measurement cannot be performed. In particular, SQUID is known as a highly sensitive magnetic field detecting element, and the characteristics of SQUID are unstable due to a minute magnetic field.

  In addition, heat is generated when the output signal from the TES is amplified by the SQUID amplifier, and the heat increases the temperature of the TES and the superconducting wiring through the superconducting wiring that connects the TES and the SQUID amplifier. For the TES to be detected, there is a problem that thermal noise is generated and the measurement accuracy is lowered, and for the superconducting wiring, the superconducting state is changed to the normal conducting state, the thermal conductivity is increased, and the temperature of the TES is further increased.

  Therefore, the problem to be solved by the present invention is to suppress the temperature rise to the superconducting radiation detector and the superconducting wiring connecting them due to the influence of heat generated in the low temperature first stage amplifier, and to the superconducting radiation detector and the low temperature first stage amplifier. Highly accurate radiation detection measurement is possible by reducing noise caused by external heat and magnetic field environment, such as reducing the influence of magnetic noise while reducing the influence of external radiant heat such as a liquid helium shield layer. A superconducting radiation detection apparatus and a radiation analysis apparatus using the same are provided.

  In order to achieve the above object, the present invention provides the following means.

  The superconducting radiation detector of the present invention is fixed to a superconducting radiation detector that detects radiation, a low-temperature first-stage amplifier that amplifies a signal from the superconducting radiation detector, and a cooled cooling head. A superconducting radiation detection device for detecting radiation, wherein a heat shield plate is disposed above the low-temperature first-stage amplifier, and the low-temperature first-stage amplifier and the heat-shielding plate are connected to the cooling head. A superconducting shield film is provided between the shield plates.

  This superconducting shield film is cooled through at least one of a heat shield plate, a cooling head, and a low-temperature first-stage amplifier.

  Furthermore, a superconducting shield film is provided between the superconducting radiation detector and the heat shield plate.

  The superconducting radiation detector of the present invention is fixed to a superconducting radiation detector that detects radiation, a low-temperature first-stage amplifier that amplifies a signal from the superconducting radiation detector, and a cooled cooling head, and the superconducting radiation detector A superconducting radiation detection device for detecting radiation, above the superconducting wiring connecting the low-temperature first stage amplifier and the superconducting radiation detector. A heat shield plate connected to the cooling head is provided.

  The superconducting radiation detector of the present invention is fixed to a superconducting radiation detector that detects radiation, a low-temperature first-stage amplifier that amplifies a signal from the superconducting radiation detector, and a cooled cooling head, and the superconducting radiation detector A superconducting radiation detection device for detecting radiation, comprising a heat shield plate connected to the cooling head above the vessel, wherein the low temperature first stage is provided via a thermal buffer electrode terminal fixed to the cooling head. The amplifier and the superconducting radiation detector are connected by a superconducting wiring held in a superconducting state.

  Further, a heat shield plate connected to the cooling head is provided on the superconducting wiring and the heat buffer electrode terminal, and a superconducting shield film is provided between the superconducting wiring and the heat buffer electrode terminal and the heat shield plate. It is characterized by.

  Further, the superconducting radiation detector is a superconducting transition edge detector, and the low-temperature first stage amplifier is a plurality of superconducting quantum interference elements.

  Alternatively, the radiation analyzer of the present invention includes a housing, a primary radiation source that emits one of electron beams, ions, and X-rays contained in the housing, and the superconducting radiation detection device described above, By irradiating the sample from the primary radiation source, secondary radiation generated from the sample is detected by the superconducting radiation detection device, and the sample is analyzed.

  According to the superconducting radiation detector of the present invention, it is possible not only to prevent radiant heat from the outside to the superconducting radiation detector and the low temperature first stage amplifier, but also to reduce the influence of magnetic noise, and to the superconducting radiation detector and the low temperature first stage amplifier. Since heat intrusion from the outside can be reduced through the wiring to be connected, the operation of the superconducting radiation detector and the low-temperature first-stage amplifier is stabilized, and highly accurate radiation detection measurement can be performed with low noise. According to the superconducting radiation analyzer of the present invention, by using such a superconducting radiation detector, secondary radiation emitted from the sample by the primary radiation source can be stably and highly accurately detected and measured.

Embodiments of the present invention will be described with reference to the drawings.

  The present embodiment shown below has the same configuration as the overall configuration diagram of the superconducting radiation detection apparatus shown in FIG. 9 except for a part around the sensor mounting portion 105, and the same reference numerals are given to the same components. Detailed description will be omitted.

  FIG. 1 is a schematic view showing a first embodiment of a superconducting radiation detection apparatus according to the present invention. The superconducting radiation detector 1 uses TES, and the low temperature first stage amplifier 2 uses a SQUID amplifier in which a plurality of SQUIDs are connected in series.

  Radiation from the outside of the superconducting radiation detection apparatus passes through the radiation transmissive film 8 provided on each of the vacuum vessel exterior 100, the liquid nitrogen shield layer 106, the liquid helium shield layer 107, and the heat shield plate 6 as in FIG. Thus, it is incident on the superconducting radiation detector 1. However, depending on the specifications of the refrigerator and the refrigerating capacity, the liquid nitrogen shield 106 may be unnecessary, or the system around the sensor mounting unit 105 may be accommodated in a vacuum without providing the vacuum vessel exterior 100. For example, not all shield layers and outer layers are required.

  The cooling head 104 connected to the refrigerator 103 such as a dilution refrigerator uses oxygen-free copper as a high thermal conductivity material to cool the superconducting radiation detector 1 and the low temperature first stage amplifier 2 to, for example, about 100 mK. Yes. Other materials such as brass and phosphor bronze may be used.

  As in FIG. 10, for example, the temperature of the cooling head 104 can be maintained by blocking heat from the outside by the vacuum vessel exterior 100, the liquid nitrogen shield layer 106, and the liquid helium shield layer 107. The first stage amplifier 2 is kept at a low temperature at which it operates. The cryogenic first stage amplifier 2 is mounted on a surface different from the superconducting radiation detector 1 and the front end surface 4 on the front end surface 4 of the cooled cooling head 104 using, for example, varnish.

  A heat shield plate 6 using oxygen-free copper as a high thermal conductivity material is provided on the front end surface 4 above the superconducting radiation detector 1 in order to prevent radiant heat from the outside such as the liquid helium shield layer 107, and a cooling head 104 is connected. As a result, the heat shield plate 6 is cooled by the cooling head 104.

    The connection to the superconducting radiation detector 1 and the low temperature first stage amplifier 2 is a material that transmits the signal of the superconducting radiation detector 1 with good S / N and makes it difficult to transfer the heat generated in the low temperature first stage amplifier 2 to the superconducting radiation detector 1. Is good. An example of this material is a superconducting material. In the superconducting state, since the resistance of the material becomes zero, the signal of the superconducting radiation detector 1 can be transmitted with good S / N, and the low temperature first stage amplifier 2 is generated by utilizing the fact that the thermal conductivity is remarkably reduced. It is possible to make it difficult to transfer heat to the superconducting radiation detector 1. In this embodiment, the superconducting wiring 5 made of aluminum that is in a superconducting state at about 1000 mK is used.

  In this embodiment, a thermal buffer (thermal anchor) electrode terminal 11 is fixed to the surface of the cooling head 104, and the superconducting radiation detector 1 and the low-temperature first stage amplifier 2 are connected via the thermal buffer (thermal anchor) electrode terminal 11. The superconducting wiring 5 is used for connection.

  In order to efficiently transmit the temperature of the cooling head 104, the electrode terminal 11 for thermal buffer (thermal anchor) is provided with a gold (Au) electrode having a low electrical resistance on a silicon substrate having a good thermal conductivity at a low temperature. What was provided was used. Silicon also has an effect of electrically insulating the cooling head 104. The electrode material may be a metal such as Cu in addition to Au. The electrode terminal 11 for thermal buffer (thermal anchor) is a material having high thermal conductivity at a low temperature, and may be any material having a low resistance at the bonding junction. Thereby, the heat buffer (thermal anchor) electrode terminal 11 cooled by the cooling head 104 prevents heat generated in the low-temperature first-stage amplifier 2 from being transmitted to the superconducting radiation detector 1 through the superconducting wiring 5. Further, by connecting the superconducting wire to the thermal buffer (thermal anchor) electrode terminal 11 in this manner, the S / of the signal to be transmitted is caused by the resistance generated when the superconducting wire 5 partially rises in temperature and becomes in the normal conducting state. There is also an effect of preventing N from being lowered.

  Further, in order to drive and control the low-temperature first-stage amplifier 2 and output a detection signal, the electrode terminal 9 fixed to the surface of the cooling head 104 and the low-temperature first-stage amplifier 2 are connected by the superconducting wiring 5, and the electrode terminal 9 is made of copper or the like. The wiring 10 made of the above material is used to connect to a control system device (not shown) provided in an external region at room temperature. The electrode terminal 9 uses a printed board such as a glass epoxy material, and the wiring 10 is joined by soldering. As a result, the electrode terminal 9 cooled by the cooling head 104 does not directly transmit the heat transmitted through the wiring 10 from the outside at normal temperature to the low-temperature first-stage amplifier 2 via the superconducting wiring 5.

  FIG. 2 is a schematic configuration diagram showing a second embodiment of the superconducting radiation detection apparatus according to the present invention.

  This embodiment has the same configuration as that of the first embodiment except for the periphery of the sensor mounting unit 105, and a detailed description thereof will be omitted.

  In this embodiment, a heat shield plate 12 is provided above the superconducting wiring 5. The heat seal plate 12 is connected by a cooling head 104 using oxygen-free copper having high thermal conductivity.

  Thereby, the radiation heat from the outside such as the liquid helium shield layer 107 to the superconducting wiring 5 is reduced, the heat generated in the superconducting wiring 5 due to the radiant heat is prevented from increasing the temperature of the superconducting radiation detector 1, and the superconducting wiring 5 When the temperature rises, the superconducting state is changed to the normal conducting state, and heat generated in the low-temperature first-stage amplifier 2 can be prevented from being transmitted to the superconducting radiation detector 1. Further, by keeping the superconducting wiring 5 in the superconducting state completely, the signal of the superconducting radiation detector 1 can be transmitted without lowering the S / N.

  FIG. 3 is a schematic configuration diagram illustrating a third embodiment of the superconducting radiation detection apparatus according to the present invention. Similar to the second embodiment, the third embodiment has the same configuration as that of the first embodiment except for the periphery of the sensor mounting unit 105, and a detailed description of the same components as those of the first embodiment is omitted. To do.

  The superconducting radiation detector 1 and the low temperature first stage amplifier 2 are mounted on the front end surface 4, and the heat conduction plate 6 connected to the cooling head 104 is provided above the superconducting radiation detector 1 and the low temperature first stage amplifier 2. A superconducting shield film 7 is provided between the amplifier 2 and the heat shield plate 6. In this embodiment, aluminum (Al) that becomes a superconducting state at about 1000 mK is used as the superconducting shield film 7.

  In this embodiment, an aluminum foil is attached to the heat shield plate 6 as the superconducting shield film 7. However, other superconductor foil such as niobium (Nb) is attached, vapor deposition / plating method, etc. The film forming means may be used. Further, even if the superconducting shield film 7 is not attached to the heat shield plate 6, the superconducting radiation detector 1 or the low-temperature first stage amplifier 2 and the heat shield plate 6 can be used as long as the superconducting shield film 7 is in a superconducting state. It may be provided between them. For example, it may be provided on the superconducting radiation detector 1 or the low temperature first stage amplifier 2 side. In that case, an insulating layer may be interposed so that the superconducting radiation detector 1 or the low-temperature first-stage amplifier 2 and the superconducting shield film 7 do not conduct. As a result, the superconducting shield film 7 is cooled by the superconducting radiation detector 1, the low-temperature first-stage amplifier 2, or the cooling head 104, so that the superconducting state is obtained and the magnetic shielding performance is enhanced.

  Thereby, the heat shield plate 6 can block the radiation heat to the superconducting radiation detector 1 or the low-temperature first-stage amplifier 2, and the magnetic noise generated by the thermal noise generated in the heat shield plate 6 can be reduced by the superconducting shield film 7. .

  FIG. 4 is a schematic configuration diagram showing a fourth embodiment of the superconducting radiation detection apparatus according to the present invention. Since the fourth embodiment is the same as the third embodiment except for the mounting portion of the distal end surface 4, detailed description thereof is omitted. Differences from the third embodiment are the following two points. The first point is that a thermal buffer (thermal anchor) electrode terminal 11 such as silicon is fixed on the surface of the cooling head 4, and the superconducting radiation detector 1 and the low-temperature first-stage amplifier 2 are connected via the thermal buffer (thermal anchor) electrode terminal 11. Are connected by the superconducting wiring 5. As a result, the heat generated in the low-temperature first-stage amplifier 2 is prevented from being transmitted to the superconducting radiation detector 1 through the superconducting wiring 5, and the resistance generated when the superconducting wiring 5 partially rises in temperature and enters the normal conducting state. There is also an effect that the S / N of the signal to be transmitted is not lowered.

  The second point is that a superconducting shield film 7 is also provided between the superconducting radiation detector 1 and the heat shield plate 6. Thereby, the magnetic noise generated by the thermal noise generated by the heat shield plate 6 can be reduced by the superconductive shield film 7 even for the superconducting radiation detector 1 by the heat shield plate 6, and more accurate measurement is possible. It becomes. Note that the superconducting shield film 7 is not provided between the radiation transmitting film 8 and the superconducting radiation detector 1 so that the radiation from the outside of the superconducting radiation detector enters the superconducting radiation detector 1.

  FIG. 5 is a schematic configuration diagram showing a fifth embodiment of the superconducting radiation detection apparatus according to the present invention.

  Except for the periphery of the sensor mounting unit 105, the configuration is the same as that of the second embodiment, and detailed description thereof is omitted. The difference from the second embodiment is that a heat shield plate 12 is disposed above the low temperature first-stage amplifier 2 and the superconducting wiring 5, and the superconducting shield film 7 is provided to shield the thermal noise from the heat shield plate 12. It is arranged.

  FIG. 6 is a schematic configuration diagram showing a sixth embodiment of the superconducting radiation detection apparatus according to the present invention.

  Except for the periphery of the sensor mounting unit 105, the configuration is the same as that of the first embodiment, and detailed description thereof is omitted. The difference from the first embodiment is that a heat shield plate 12 is disposed in front of the low temperature first stage amplifier 2 and a superconducting shield film 7 is disposed in order to shield thermal noise from the heat shield plate 12, and superconductivity. The wiring 5 is connected through a thermal buffer (thermal anchor) electrode terminal 11. The heat shield plate 12 may be provided so as to cover the superconducting wiring 5.

  FIG. 7 shows a schematic configuration diagram of a radiation analysis apparatus using the superconducting radiation detection apparatus using the superconducting radiation detector shown in the first to sixth embodiments. This example is an example used in combination with a Scanning Electron Microscope (SEM).

  The sample S is irradiated with an electron beam B emitted from an electron gun 108 serving as a primary radiation source provided in the housing 115. By irradiation of the primary radiation source, secondary electrons emitted from the sample S are detected by the secondary electron detector 116 provided in the housing 115, and image information on the sample surface can be obtained. The sensor mounting portion 105 of the superconducting radiation detection device 114 is inserted into the housing 115, and the superconducting radiation detector 1 is installed so as to approach the sample S in the housing 115. Then, the electron beam B is irradiated from the electron gun 108 onto the sample S, and characteristic X-rays, which are radiation emitted from the sample S, pass through the radiation transmitting film 8 provided in the superconducting radiation detection device 114 and are thus superconducting radiation detector 1. The sample can be detected by being incident on the element and subjected to elemental analysis or the like.

  In the second embodiment, a superconducting shield film may be provided on the heat shield plate 12 above the superconducting wiring 5 in order to prevent the influence of magnetic noise due to the thermal noise from the heat shield plate 12.

  In the radiation analyzer in this embodiment, the scanning electron microscope that irradiates a sample with an electron beam using an electron gun in this embodiment as a primary radiation source has been described. A primary source that emits either of the lines may be used.

It is the schematic block diagram which showed the superconducting radiation detector periphery of 1st Example of the superconducting radiation apparatus by invention. It is the schematic block diagram which showed the superconducting radiation detector periphery of 2nd Example of the superconducting radiation apparatus by this invention. It is the schematic block diagram which showed the superconducting radiation detector periphery of 3rd Example of the superconducting radiation apparatus by this invention. It is the schematic block diagram which showed the superconducting radiation detector periphery of 4th Example of the superconducting radiation apparatus by this invention. It is the schematic block diagram which showed the superconducting radiation detector periphery of 5th Example of the superconducting radiation apparatus by this invention. It is the schematic block diagram which showed the superconducting radiation detector periphery of 6th Example of the superconducting radiation apparatus by this invention. It is a schematic block diagram of the superconducting radiation analyzer using the superconducting radiation apparatus by this invention. It is a figure which shows an example of the temperature-resistance curve of TES. It is a schematic whole block diagram of a superconducting radiation apparatus. It is a schematic block diagram around the superconducting radiation detector of the conventional superconducting radiation apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Superconducting radiation detector 2 Low temperature first stage amplifier 4 Front end surface 5 Superconducting wiring 6 and 12 Heat shield plate 7 Superconducting shield film 8 Radiation transmission film 9 Electrode terminal 10 Wiring 11 Electrode terminal 103 for thermal buffer (thermal anchor) Refrigerator 104 Cooling head 105 Sensor mounting part 108 Electron gun (primary radiation source)
114 Superconducting radiation detector 115 Case 116 Secondary electron detector 117 Normal state 118 Transition state 119 Superconducting state

Claims (10)

A superconducting radiation detector for detecting radiation and a low-temperature first-stage amplifier for amplifying a signal from the superconducting radiation detector,
Fixed to the cooled cooling head,
A heat shield plate connected to the cooling head above the superconducting radiation detector;
A superconducting radiation detection device for detecting radiation comprising:
A superconducting radiation detection apparatus comprising: a heat shield plate disposed above the low temperature first stage amplifier; and a superconducting shield film provided at least between the low temperature first stage amplifier and the heat shield plate. The superconducting radiation detection apparatus according to claim 1,
The superconducting radiation detection apparatus, wherein the superconducting shield film is cooled through at least one of the heat shield plate, the cooling head, and the low-temperature first-stage amplifier and is in a superconducting state. The superconducting radiation detection apparatus according to claim 1,
A superconducting radiation detection apparatus comprising a superconducting shield film between the superconducting radiation detector and the heat shield plate. In the superconducting radiation detection apparatus according to claim 3,
The superconducting radiation detection apparatus, wherein the superconducting shield film is cooled through at least one of the heat shield plate, the cooling head, and the low-temperature first-stage amplifier and is in a superconducting state. A superconducting radiation detector for detecting radiation and a low-temperature first-stage amplifier for amplifying a signal from the superconducting radiation detector,
Fixed to the cooled cooling head,
A heat shield plate connected to the cooling head above the superconducting radiation detector;
A superconducting radiation detection device for detecting radiation comprising:
In the superconducting radiation detection apparatus comprising a heat shield plate connected to the cooling head above the superconducting wiring connecting the low-temperature first stage amplifier and the superconducting radiation detector,
A superconducting radiation detection apparatus comprising a superconducting shield film between the superconducting wiring and the heat shield plate. A superconducting radiation detector for detecting radiation and a low-temperature first-stage amplifier for amplifying a signal from the superconducting radiation detector,
Fixed to the cooled cooling head,
A heat shield plate connected to the cooling head above the superconducting radiation detector;
A superconducting radiation detection device for detecting radiation comprising:
A thermal buffer electrode terminal fixed to the cooling head, and a superconducting wiring held in a superconducting state connecting the low temperature first stage amplifier and the superconducting radiation detector via the thermal buffer electrode terminal. A superconducting radiation detector. The superconducting radiation detection apparatus according to claim 6,
A heat shield plate connected to the cooling head above the superconducting wiring;
A superconducting radiation detection apparatus comprising a superconducting shield film between the superconducting wiring and the heat shield plate. The superconducting radiation detection apparatus according to any one of claims 1, 5, and 6,
The superconducting radiation detector is characterized in that the superconducting radiation detector is a superconducting transition edge detector. The superconducting radiation detection apparatus according to any one of claims 1, 5, and 6,
The superconducting radiation detection apparatus, wherein the low-temperature first-stage amplifier is a plurality of superconducting quantum interference elements. A superconducting radiation detection apparatus according to any one of claims 1 to 9, comprising a housing, a primary radiation source that emits one of electron beams, ions, and X-rays contained in the housing.
A radiation analysis apparatus characterized in that secondary radiation generated from a sample is detected by the superconducting radiation detection apparatus by irradiation of the sample from the primary radiation source, and the sample is analyzed.

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