JP2007092145A - Apparatus for forming barrier film on inner surface of vessel, and method for manufacturing vessel with barrier film coated on inner surface - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an apparatus for forming a barrier film on an inner surface of a vessel, which is easily installed when treating a barrier film on the inner surface of the vessel having a recessed space in a bottom part. <P>SOLUTION: The apparatus for forming the barrier film comprises a bottomed external electrode 15 having a cavity 12 of the size for housing a vessel, an electric field adjusting member 16 interposed between an inner surface of a bottom part of the vessel and an outer surface of a bottom part of the external electrode, an air feed unit 17 as a matching means for matching the vessel with the pedal-shaped electric field adjusting member 16, an exhaust means which is mounted on an end face of the external electrode 15 on the side on which a mouth of the vessel is located via an insulating member 18 to evacuate the inside of the vessel via an exhaust pipe 14, a gas blowout unit 19 which is inserted in the vessel within the external electrode 15 from the exhaust pipe 14 side and has a gas flow passage 19a for blowing out a medium gas G for generating a barrier film, and an electric field providing means 21 composed of a matching unit 21a for providing the electric field to the internal electrode 20 between the external electrode 15 and the grounding electrode and a high frequency power supply 21b. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an apparatus for forming a barrier film on the inner surface of a plastic container and a method for producing an inner barrier film-coated plastic container.

  Plastic containers, such as PET bottles, have a barrier film on their inner surface, for example carbon like DLC (Diamond Like Carbon), to prevent the permeation of oxygen from the outside and the penetration of carbon dioxide from the inside (for example, carbonated drinking water). Attempts have been made to coat the membrane.

  As a method of coating a carbon film on the inner surface of such a plastic container, the present applicant has already filed and disclosed it in Patent Document 1. FIG. 7 of Patent Document 1 shows an external electrode having a size that surrounds a plastic container that is an object to be processed, and at least a mouth and a shoulder of the container when the plastic container is inserted. A spacer made of a dielectric material interposed between a part and the external electrode, an exhaust pipe attached via an insulating member to an end face of the external electrode on the side where the mouth of the container is located, and the external electrode An internal electrode inserted into the plastic container from the exhaust pipe side and connected to the ground side, an exhaust means attached to the exhaust pipe, and a gas supply means for supplying a medium gas to the internal electrode And a device for forming a carbon film on the inner surface of a plastic container provided with a high-frequency power source connected to the external electrode.

  In the carbon film forming apparatus described in Patent Document 1 having such a configuration, when a plastic container having a flat bottom portion, for example, a PET bottle is used as an object to be processed, not only the shoulder portion but also the entire inner surface of the PET bottle including the bottom portion. It is possible to coat a carbon film having a uniform film quality and a uniform film quality.

  However, in the carbon film forming apparatus described in Patent Document 1, for example, as shown in FIG. 13, when a pressure-resistant container 11 having a concave space (for example, a leg petaloid shape) 11 a at the bottom B is used as an object to be processed. Since the electric field strength at the bottom part decreases and the electric field strength at other parts increases, the carbon film coated on the inner surface of the PET bottle is thinned at the bottom part, and the film thickness increases at other parts. This results in a film thickness distribution. As a result, it may be difficult to provide an initial barrier property.

Therefore, as shown in FIGS. 11 and 12, the applicant of the present invention interposes a petal-like electric field adjustment member 10 similar to the leg petaloid shape between the container bottom B and the external electrode bottom 4 b, It was previously proposed to prevent the occurrence of film pressure distribution (Patent Document 2).
Here, in FIG. 11, reference numeral 1 is a film forming apparatus, 2 is a chamber, 3 is a base, 4 is an external electrode composed of an external electrode body 4a and an external electrode lower part 4b, 5 is an insulating member, 6 is an internal electrode, 7 is a dielectric member, 8 is a gas blow-out pipe for supplying a medium gas G, and 9 is an electrolyzing unit comprising a matching unit 9a and a high-frequency power source 9b.

JP 2003-286571 A JP-A-2005-194606

However, when installing the container, it is necessary to adjust the direction (phase) of the container to the petal-like electric field adjusting member 10 provided at the bottom part in advance by rotating left and right about the axis and the center.
Even if the direction (phase) is adjusted in advance, there is a possibility that the container 11 rotates when inserted into the film forming chamber 2 and cannot be normally stored. In such a case where the container cannot be normally stored, as shown in FIG. 13, when the pressure is reduced, the weak portion of the container is deformed, resulting in a problem that the container cannot be used.

  In particular, when applied to an apparatus for continuously forming a barrier film on the inner surface of a container, since 1 to 20,000 pieces are processed per hour, the labor and time for adjusting the direction in advance and the time are reduced. There is a demand for eliminating such problems.

  In view of the above problems, the present invention, when processing a barrier film on the inner surface of a container having a concave space at the bottom, forms a barrier film such as a carbon film having a uniform thickness and good film quality on the entire inner surface including the bottom. An object of the present invention is to provide an apparatus for forming a barrier film on the inner surface of a container which can be formed and can be easily installed.

  The first invention of the present invention for solving the above-mentioned problem is that when a container having a concave space is inserted in the bottom, a bottomed external electrode having a cavity of a size surrounding the container, and the container An electric field adjusting member interposed between the inner side surface of the bottom and the outer side surface of the outer electrode bottom, matching means for matching the container and the electric field adjusting member, and the outer side on the side where the mouth of the container is located An exhaust means attached to the end face of the electrode via an insulating member and decompressing the inside of the container via an exhaust pipe; and a medium for generating a barrier film inserted into the container in the external electrode from the exhaust pipe side An apparatus for forming a barrier film on the inner surface of a container, comprising: a gas blowing portion for blowing gas; and an electric field applying means for applying an electric field between the external electrode and the ground electrode.

  According to a second invention, there is provided the barrier film forming apparatus on the inner surface of the container according to the first invention, wherein the electric field adjusting member has a shape substantially in close contact with the concave space at the bottom of the container.

  According to a third invention, in the first invention, the electric field adjusting member corresponds to the number of concave spaces in the bottom of the container, and the pin member is located in the concave space of the container when the container is inserted. Is a barrier film forming apparatus for the inner surface of a container.

  According to a fourth invention, in the first invention, the matching means is a rotating means formed by rotating the electric field adjusting member around one of the electric field adjusting members, or both of them. It is in the barrier film forming apparatus.

  According to a fifth invention, in the first invention, the matching means is a gas supply unit that is provided on a side wall on the bottom side of the external electrode and applies a gas flow toward the inner side surface of the external electrode bottom. In the apparatus for forming a barrier film on the inner surface of the container.

  According to a sixth invention, there is provided the barrier film forming apparatus on the inner surface of the container according to the first invention, wherein the electric field adjusting member is implanted by a needle-like conductive member in a substantially vertical axis direction.

  According to a seventh aspect of the present invention, in the first aspect of the invention, the electric field adjustment member is stretched around the inner surface of the side surface of the external electrode and the bottom portion of the external electrode while being densely packed with a conductive wire. The barrier film forming apparatus.

  An eighth invention is the container according to the first invention, wherein the electric field adjusting member is provided with a plurality of conductive members that move up and down in the vertical axis direction when the container is inserted. There is a barrier film forming device on the inner surface.

  A ninth invention is the barrier film on the inner surface of the container according to the eighth invention, wherein the conductive member is subdivided so as to be inserted into a concave space formed at the bottom of the container. In the forming device.

  According to a tenth aspect of the present invention, in any one of the first to ninth aspects, a barrier film forming device for an inner surface of a container, comprising a suction portion for sucking the bottom of the container at the bottom of the external electrode It is in.

  An eleventh aspect of the invention is a barrier film forming apparatus for an inner surface of a container according to any one of the first to tenth aspects, further comprising a chamber that supports the external electrode and shields electromagnetic waves.

  According to a twelfth aspect of the invention, in manufacturing the inner barrier film coating container using any one of the first to tenth barrier film forming apparatuses, (a) the bottom part which is the object to be processed is lowered by lowering the external electrode from the apparatus main body. A step of inserting a container having a concave space into the external electrode while matching the bottom of the concave space with a dielectric material, and (b) raising the external electrode after inserting the container, A step of inserting into the container from an exhaust pipe attached via an insulating member to the end face of the external electrode on the side where the mouth of the container is located; After exhausting through the exhaust pipe, a medium gas for generating a barrier film is blown into the container from the gas blowing section, and the inside of the exhaust pipe including the inside of the container is set to a predetermined gas pressure; In A step of applying an electric field between the external electrode and the ground electrode, generating plasma in the container positioned between them, dissociating the medium gas by the plasma, and coating a barrier film on the inner surface of the container And a method for producing an inner barrier film-coated container.

  In the thirteenth aspect of the invention, in manufacturing the inner barrier film coating container using the eleventh barrier film forming apparatus, (a) the chamber and the external electrode are integrally lowered from the apparatus main body, and the bottom is the object to be processed. Inserting a container having a space into the external electrode while matching the dielectric material in the concave space at the bottom thereof, and (b) raising the chamber and the external electrode together after inserting the container, Inserting a gas blowing part into the interior of the container from an exhaust pipe attached via an insulating member to the end face of the external electrode on the side where the mouth of the container is located; and (c) gas inside and outside the container After exhausting through the exhaust pipe by the exhaust pipe means, a medium gas for generating a barrier film is blown out from the gas blow-out part into the container, and the inside of the exhaust pipe including the inside of the container is set to a predetermined gas pressure. And (d) applying an electric field between the external electrode and the ground electrode by the electric field applying means, generating a plasma in the container positioned between them, and dissociating the medium gas by the plasma. And a step of coating the inner surface of the container with a barrier film.

  According to the present invention, when forming a container having a concave space at the bottom, it is easy to mount the container in the external electrode, and the film forming process can be simplified.

  Hereinafter, the present invention will be described in detail with reference to the drawings. Note that the present invention is not limited to the embodiments. In addition, constituent elements in the following embodiments include those that can be easily assumed by those skilled in the art or those that are substantially the same.

A barrier film forming apparatus according to a first embodiment of the present invention will be described with reference to the drawings.
FIG. 1 is a schematic diagram illustrating a barrier film forming apparatus according to a first embodiment. As shown in FIG. 1, the barrier film forming apparatus according to the present embodiment has a cavity 12 having a size surrounding the container 11 when a container 11 having a concave space as shown in FIG. 13 is inserted, for example. A bottomed external electrode 15, an electric field adjusting member 16 interposed between the inner surface of the container bottom 11 and the outer surface of the outer electrode bottom 15 a, and the container 11 and the petal-shaped electric field adjusting member 16. Are attached to the end face of the external electrode 15 on the side where the mouth portion of the container 11 is located through an insulating member 18, and the inside of the container is connected via the exhaust pipe 14. An exhaust means (not shown) for decompressing (evacuating) and a gas flow inserted into the container 11 in the external electrode 15 from the exhaust pipe 14 side to blow out a medium gas G for generating a barrier film Road 19 And a gas field applying means 21 including a matching unit 21a for applying an electric field to the internal electrode 20 between the external electrode 15 and the ground electrode, and a high-frequency power source 21b. .

  The external electrode 15 is provided in a cylindrical chamber 22 composed of a chamber (upper part) 22-1 and a chamber (lower part) 22-2 having flanges 22a and 22b at the upper and lower ends. The cylindrical chamber 22 and the external electrode 15 can be divided into an external electrode (upper part) 15-1 on the upper side and an external electrode (lower part) 15-2 on the lower side, and are detachably attached. Yes. The disc-shaped insulating plate 24 is disposed between the base 23 and the bottom side of the external electrode (lower part) 15-2. The separation of the external electrode (upper part) 15-1 and the bottomed external electrode (lower part) 15-2 reduces the lowering stroke compared to the case where the entire external electrode is lowered when the container 11 is inserted. This is to make the device compact.

Here, the material of the chamber 22 is a cylindrical body having a rectangular or circular cross section, such as aluminum or stainless steel, covering the entire external electrode and shielding electromagnetic waves. Further, the chamber 22 is connected to the exhaust pipe 14 grounded to the ground, and has a ground potential. During the division, the chamber (lower part) 22-2 and the external electrode (lower part) 15-2 move up and down integrally.
In the present embodiment, the chamber is used to cover the entire external electrode and shield the electromagnetic wave, but this may not be used.

  The exhaust pipe 14 has an upper flange 14a and a lower portion 14b in the vertical direction, and a chamber (upper part) 22-1 is suspended from the lower flange 14b through the upper flange 22a of the chamber 22. The lid body 25 is attached to the upper flange 14a of the exhaust pipe 14.

  Here, the chamber 22 has a cylindrical shape and is made of a conductive material (a conductive member such as aluminum, stainless steel, copper, or brass), and also serves as an electromagnetic shield and a ground shield that functions as a high-frequency ground. Yes. Moreover, it is comprised from a solid material, a mesh, punching metal, etc. The shape is a cylindrical body such as a cylinder or a square.

  In addition, a conductive connector 26 and a vacuum seal (O-ring) 27 are interposed in divided portions that divide the cylindrical chamber 22 and the external electrode 15 respectively.

  The external electrode (lower part) 15-2, the insulating plate 24, and the base 23 are integrally moved up and down with respect to the external electrode (upper part) 15-1 by a pusher (not shown). (Upper part) The bottom of 15-1 is opened and closed, and the container is inserted before film formation, and the container is discharged after film formation. Here, the chamber (lower part) 22-2 is divided together with the base 23.

  Further, in this embodiment, a cylindrical spacer 28 made of a dielectric material having a hollow portion formed by combining a column and a truncated cone corresponding to the mouth and shoulder of the plastic container 11 inserted therein is provided on the outside. It is disposed inside the electrode (upper part) 15-1. The disk-shaped spacer 28 is fixed by a screw (not shown) screwed from an annular insulating member 18 placed thereon. When the container 11 is inserted from the bottom side of the external electrode 15 by inserting and fixing the columnar spacer 28 to the top of the external electrode 15 in this way, the mouth and shoulder of the container 11 are in the shape of a disk. The other outer periphery of the container 11 is located on the inner surface of the external electrode 15.

  Examples of the dielectric material constituting the electric field adjusting member 16 and the disk-shaped spacer 28 include plastic or ceramic. Various plastics can be used, and a fluorine-based resin such as polytetrafluoroethylene having a low high-frequency loss and excellent heat resistance is particularly preferable. As the ceramic, alumina, steatite with low high-frequency loss, or Macor (registered trademark) with high machinability is preferable.

  Moreover, as the electric field adjustment member 16, metals, such as aluminum, stainless steel, nickel, iron, can be used, for example. The electric field adjusting member is more preferably made of the same material as that constituting the external electrode 15.

  A high frequency power supply 21b that outputs high frequency power is connected to the external electrode 15 through a cable 21c and a power supply terminal 21d. The matching unit 21a is interposed in the cable 21c between the high-frequency power source 21a and the pre-feeding terminal 21d.

  The internal electrode 20 is disposed over the entire length in the longitudinal direction of the container in the container 11 inserted in the external electrode 15 and the disk-shaped spacer 28, and the upper end thereof is on the mouth side of the container 11. It also serves as the gas flow path 19a located at the position. The gas channel 19a is also used as a ground terminal.

  The gas blowing part 19 may be opened on the lower side wall of the internal electrode 20 so as to communicate with the gas flow path 19a. In this case, it is preferable that the gas blowout hole opens in a side region in a range from the bottom of the internal electrode 20 to 25% of the length inserted into the container 11. The diameter of the internal electrode 20 is set to be equal to or smaller than the diameter of the cap of the plastic container, and the length thereof is a length that can be inserted over almost the entire length of the container 11 in the longitudinal direction.

  The internal electrode 20 is made of a metal material having heat resistance such as tungsten or stainless steel, but may be made of aluminum. Further, if the surface of the internal electrode is smooth, the carbon film deposited on the surface may be easily peeled off. For this reason, it is preferable that the surface of the internal electrode 20 is previously sandblasted to increase the surface roughness and make it difficult to peel off the carbon film deposited on the surface.

In the present embodiment, the axis alignment of the container 11 and the petal-shaped electric field adjusting member 16 is performed by using the external electrode (lower part) 15-as shown in FIG. The air is supplied from an air supply port 17a formed on the side wall of No. 2, and the container is rotated.
In the present embodiment, the electric field adjusting member 16 has a petal shape that is substantially in close contact with the concave space 11a formed at the bottom of the container 11 as in the case shown in FIG.

  The air supply direction blows out along the tangential direction of the container 11 as shown in FIG. 3-2. Further, it is preferable to provide two or more outlets 17a along at least the outer peripheral direction.

  As a result, the concave space 11 a of the container 11 matches the petal-shaped electric field adjusting member 16. Thereby, accurate phase alignment at the time of container insertion becomes unnecessary, and simplification of the apparatus can be achieved.

  Further, in FIG. 3A, an air suction port 30 that is sucked by suction means (not shown) is provided at the bottom of the external electrode (lower part) 15-2 so as to positively discharge air from the bottom. . This is for ensuring the stability of the container.

  Next, a method for producing an inner surface barrier film-coated plastic container will be described using the barrier film forming apparatus shown in FIG.

The external electrode (lower part) 15-2 with the electric field adjusting member 16 fixed to the upper surface, the disk-like insulator 24 and the base 23 are removed by a pusher (not shown) to open the bottom side of the external electrode 15. Then, for example, the bottom as shown in FIG. 12 is inserted from the bottom of the container into the open external electrode 15-2 with the container 11 having a leg petaloid shape. At that time, air is supplied from the air supply unit 17 to facilitate matching with the electric field adjusting member 16.
In addition, by suctioning from the bottom through the air suction port 30, a stable flow from the top to the bottom is generated, and the container matching is further stabilized.

  Then, the external electrode (lower part) 15-2, the disk-shaped insulator 24, and the base 23 are attached to the external electrode (upper part) 15-1 side by a pusher (not shown). Thus, as shown in FIG. 2, the mouth and shoulder of the container 11 are accommodated in the cavity of the cylindrical spacer 28, and the other container part is accommodated in the external electrode 15, and the electric field adjusting member 16 is The space between the external electrode (lower part) 15-2 and the bottom part of the leg petaloid shape in the container is in close contact with the bottom part. At this time, the container 11 is communicated with the exhaust pipe 14 through its mouth.

  Next, the exhaust pipe 14 and the gas inside and outside the container 11 are exhausted through the branch exhaust pipe 14c by an exhaust means (not shown). Subsequently, the medium gas G for generating the barrier film is supplied to the gas flow path 19 a of the internal electrode 20, and is blown into the container 11 from the gas blowing portion 19 fitted to the bottom of the internal electrode 20. This medium gas G further flows toward the mouth of the container 11. Subsequently, the gas supply amount and the gas exhaust amount are balanced, and the inside of the container 11 is set to a predetermined gas pressure.

  Next, for example, high frequency power having a frequency of 13.56 MHz is supplied from the high frequency power source 21b to the external electrode 15 through the cable 21c, the matching unit 21a, and the power supply terminal 21d. At this time, plasma is generated between the external electrode 15 and the gas flow path 19a, the internal electrode 20, and the exhaust pipe 14, which are ground electrodes. Further, by placing the electric field adjusting member 16 in close contact with the bottom of the space between the external electrode (lower part) 15-2 of the external electrode 15 and the bottom of the leg petaloid shape in the container, It is possible to adjust the electric field intensity involved in plasma generation.

  By the generation of such plasma, the introduced medium gas G is dissociated by the plasma, and film-forming seed ions are deposited on the inner surface of the container 11 in the external electrode 15 to form a uniform barrier film having a uniform thickness. An inner barrier film-coated container is manufactured by coating the film.

  After the thickness of the carbon film reaches a predetermined thickness, the supply of the high frequency power from the high frequency power supply 21b is stopped, the supply of the medium gas is stopped, the residual gas is exhausted, and the exhaust of the gas is stopped. , Nitrogen, noble gas, air, or the like is supplied into the container 11 through the gas flow path 19a and the gas blowing portion 19 of the internal electrode 20, the inside and outside of the container 11 are returned to atmospheric pressure, and the inner barrier film-coated container 11 is taken out. . Thereafter, the container 11 is replaced according to the above-described order, and the next container coating operation is started.

  The medium gas is basically hydrocarbon, for example, alkanes such as methane, ethane, propane, butane, pentane and hexane; alkenes such as ethylene, propylene, butene, pentene and butadiene; alkynes such as acetylene; benzene, Aromatic hydrocarbons such as toluene, xylene, indene, naphthalene and phenanthrene; cycloparaffins such as cyclopropane and cyclohexane; cycloolefins such as cyclopentene and cyclohexene; oxygen-containing hydrocarbons such as methyl alcohol and ethyl alcohol; methyl Nitrogen-containing hydrocarbons such as amine, ethylamine and aniline can be used, and other carbon monoxide and carbon dioxide can also be used. In addition, a rare gas such as Ar or He may be mixed with the medium gas in order to stabilize plasma and optimize plasma characteristics.

As the barrier film forming gas, in addition to the medium gas, a mixed gas of siloxane and oxygen such as hexamethyldisiloxane for forming a SiO _x film can be used.

  The high frequency power is generally 13.56 MHz and 100 to 1000 W, but is not limited thereto. Moreover, the application of these electric powers may be continuous or intermittent (pulsed).

As described above, according to the first embodiment, when the barrier film is formed on the inner surface of the container 11 having the leg petaloid shape at the bottom, the external electrode (lower part) 15-2 of the external electrode 15 and the bottom of the leg petaloid shape. A carbon film having a uniform thickness and a good film quality is formed on the entire inner surface including the bottom by interposing the electric field adjusting member 16 made of a dielectric material having a petal shape in the concave space 11a between the two so as to be in close contact with the bottom. Such a barrier film can be coated.
In this close contact, matching with the container is facilitated, so that the film forming process can be simplified and the processing time can be shortened.

  Further, a cylindrical spacer 28 made of a dielectric material having a cavity 12 is inserted into and fixed to the upper portion of the external electrode 15, and at least the mouth portion of the container 11 is brought into contact with the inner surface of the cavity 28 in the cavity portion. By storing, not only the inner surface of the body part below the shoulder part of the container 11 but also the inner surface of the shoulder part from the mouth part of the container facing the spacer 28 made of the dielectric material has a uniform thickness and good film quality. A barrier film such as a carbon film can be coated.

  Therefore, it is possible to manufacture an inner barrier film-coated container having excellent barrier properties that prevents permeation of oxygen from the outside and carbon dioxide from the inside (for example, carbonated drinking water).

Next, a second embodiment of the present invention will be described.
4A to 4C are schematic views of the electric field adjusting member according to the second embodiment. 5-1 to 5-2 are schematic views of the external electrode (lower part) on which the electric field adjusting member is installed.
The electric field adjustment member 31-1 according to the present embodiment corresponds to the number of the concave spaces 11 a at the bottom of the container, and the pin member 32 positioned in the concave space of the container 11 when the container 11 is inserted. A plurality of (5 in this embodiment) are erected on the pedestal 33.

  By installing the electric field adjusting member 31-1 inside the bottom of the external electrode (lower part) 15-2, accurate phase alignment at the time of inserting the container becomes unnecessary, and the apparatus can be simplified.

Further, during the film formation, an electric field from the plasma toward the external electrode is generated, but in addition to the electric field of only the external electrode (lower part) 15-2, it is orthogonal to the axis from the internal electrode to the external electrode (lower part) 15-2. An electric field is also generated in the direction in which the ions are incident, and the number of ions incident on the side surface of the bottom of the container 11 (the portion behind the concave space 11a in FIG. 13) increases.
Thereby, uniform film formation can be performed even on the container 11 having the complicated concave space 11a.

  Also, the electric field adjusting member 31-2 shown in FIG. 4-3 is a pin member 34 having a circular tip, thereby avoiding electric field concentration and preventing occurrence of abnormal discharge.

  In the present embodiment, the pin member 34 is installed in the vertical axis direction, but the present invention is not limited to this, and may be installed in an oblique direction.

  Further, the shape of the pin member 34 is not limited to the pin shape, and may be, for example, a bowl shape that is in close contact with the bottom shape of the container.

FIG. 5B shows that the electric field adjusting member 31-2 having the pin member 34 having a circular tip shown in FIG. 4C is installed inside the external electrode (lower part) 15-2 and is described above. The air supply port 17a for supplying air shown in the first embodiment is provided.
Then, when the container 11 is inserted, air blown obliquely downward is supplied, the container is rotated, and matching with the container 11 is further facilitated.
The pin is preferably in contact with the container, but may be positioned with some space.

Next, a third embodiment of the present invention will be described.
FIG. 6 is a schematic view of an external electrode (lower part) on which the electric field adjusting member according to the third embodiment is installed. As shown in FIG. 6, in the present embodiment, as the matching means, an electric field adjusting member (simplified in the drawing) 16 is rotated around one axis or both of them around the axis. The phase is adjusted by rotating.

  In the case of the first embodiment, the container is rotated, but in the present embodiment, the phase adjustment is performed by rotating the electric field adjusting member. In addition, the phase adjustment of the container is made more efficient by rotating the electric field adjustment member 16 while lowering the phase.

Next, a fourth embodiment of the present invention will be described.
7A and 7B are schematic views of the external electrode (lower part) on which the electric field adjusting member according to the fourth embodiment is installed. As shown in these drawings, in this embodiment, the electric field adjusting member is formed by flocking the bottom of the external electrode (lower part) 15-2 in a substantially vertical axis direction using a needle-like conductive member 41. is there.
In addition, the needle-like conductive member 41 is in contact with the entire bottom surface of the container so that the height a1 of the flocked needle-like conductive member 41 is slightly higher than the height a2 of the concave space 11a formed in the lower part of the container. It is possible. In addition, you may have a space, without contacting.
Moreover, you may make it have the unevenness | corrugation of the substantially same shape as the container concave space 11a.

Since only the container needs to be inserted, accurate phase alignment is not required, and the apparatus can be simplified.
The needle-like conductive member 41 may be a conductive wire such as a piano wire or a needle-like conductive rubber having flexibility or restoring property.
The needle-like conductive member 41 having flexibility or restorability forms a similar electrode structure in the concave space 11a of the container, so that the barrier film is uniformly formed.

Next, a fifth embodiment of the present invention will be described.
8A and 8B are schematic views of the external electrode (lower part) on which the electric field adjusting member according to the fifth embodiment is installed. As shown in these drawings, in this embodiment, the electric field adjusting member is stretched around the bottom of the external electrode (lower part) 15-2 while being densely packed with a flexible conductive wire.

  Since it is only necessary to insert the container, accurate phase alignment is not required, the matching operation is easy and the apparatus can be simplified.

Next, a sixth embodiment of the present invention will be described.
9A to 9D are schematic views of the external electrode (lower part) on which the electric field adjusting member according to the sixth embodiment is installed. As shown in these drawings, in this embodiment, the electric field adjusting member is provided with a plurality of conductive members 45 that move up and down in the vertical axis direction when the container 11 is inserted.

In this embodiment, as shown in FIG. 9C, a conductive member 45 is constituted by a coil 45a and a rectangular conductive portion 45b provided at the tip of the coil 45a.
As shown in FIG. 9-4, the conductive portion 45b provided at the coil tip is rectangular, but the present invention is not limited to this, and may be triangular, circular, or the like.
Moreover, you may use a bellows, conductive rubber, etc. instead of a coil.

  Further, as shown in FIGS. 10-1 to 10-3, the data may be redistributed radially from the central axis. Any subdivision may be used as long as at least part of the subdivision can be inserted into the concave space 11a of the container 11 and matching can be performed according to the shape.

As described above in detail, according to the present invention, when a container having a concave space at the bottom is used as an object to be processed, a barrier film such as a carbon film having a uniform thickness and good film quality is formed on the entire inner surface including the bottom. An apparatus for forming a barrier film on the inner surface of a container that can be coated can be provided.

  In addition, according to the present invention, a plastic film having a concave space at the bottom, which is coated with a barrier film such as a carbon film having a uniform film thickness and good film quality on the inner surface including the bottom, and has an excellent barrier property against oxygen and carbon dioxide Can be provided.

1 is a schematic view of a barrier film forming apparatus according to Example 1. FIG. 1 is a schematic view of a barrier film forming apparatus according to Example 1. FIG. 1 is a schematic cross-sectional view of an external electrode (lower part) provided with an electric field adjusting member according to Example 1. FIG. FIG. 3 is a schematic plan view of an external electrode (lower part) provided with an electric field adjustment member according to Example 1. 6 is a schematic perspective view of an electric field adjustment member according to Embodiment 2. FIG. 6 is a schematic front view of an electric field adjustment member according to Embodiment 2. FIG. 6 is a schematic front view of another electric field adjustment member according to Embodiment 2. FIG. It is the cross-sectional schematic of the external electrode (lower part) which has arrange | positioned the electric field adjustment member which concerns on Example 2. FIG. It is the cross-sectional schematic of the external electrode (lower part) which has arrange | positioned the other electric field adjustment member which concerns on Example 2. FIG. It is the schematic of the external electrode (lower part) which has arrange | positioned the electric field adjustment member which concerns on Example 3. FIG. It is the cross-sectional schematic of the external electrode (lower part) which has arrange | positioned the electric field adjustment member which concerns on Example 4. FIG. It is the cross-sectional schematic of the external electrode (lower part) which has arrange | positioned the electric field adjustment member which concerns on Example 4. FIG. 10 is a schematic cross-sectional view of an external electrode (lower part) provided with an electric field adjusting member according to Example 5. FIG. 10 is a schematic cross-sectional view of an external electrode (lower part) provided with an electric field adjusting member according to Example 5. FIG. It is the cross-sectional schematic of the external electrode (lower part) which has arrange | positioned the electric field adjustment member which concerns on Example 6. FIG. It is the cross-sectional schematic of the external electrode (lower part) which has arrange | positioned the electric field adjustment member which concerns on Example 6. FIG. 10 is a schematic plan view of an electric field adjusting member according to Embodiment 6. FIG. 10 is a schematic front view of an electric field adjusting member according to Embodiment 6. FIG. It is the cross-sectional schematic of the external electrode (lower part) which has arrange | positioned the other electric field adjustment member which concerns on Example 6. FIG. It is the cross-sectional schematic of the external electrode (lower part) which has arrange | positioned the other electric field adjustment member which concerns on Example 6. FIG. 10 is a schematic plan view of another electric field adjustment member according to Embodiment 6. FIG. It is sectional drawing which shows the barrier film formation apparatus to the inner surface of a plastic container. It is a perspective view which shows the electric field adjustment member integrated in a barrier film forming apparatus. It is the schematic of the container which has concave space in a bottom part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 11 Container 12 Cavity 14 Exhaust pipe 15 External electrode 16 Electric field adjustment member G Medium gas for barrier film production | generation 19 Gas blowing part 20 Internal electrode 21 Electric field provision means

Claims (13)

When a container having a concave space at the bottom is inserted, a bottomed external electrode having a cavity of a size surrounding the container,
An electric field adjusting member interposed between an inner surface of the container bottom and an outer surface of the outer electrode bottom;
Matching means for matching the container and the electric field adjusting member;
An exhaust means attached to the end face of the external electrode on the side where the mouth of the container is located via an insulating member, and decompressing the interior of the container via an exhaust pipe;
A gas blowing part inserted from the exhaust pipe side into the container in the external electrode, for blowing out a medium gas for generating a barrier film,
An apparatus for forming a barrier film on the inner surface of a container, comprising: an electric field applying means for applying an electric field between the external electrode and the ground electrode. In claim 1,
An apparatus for forming a barrier film on an inner surface of a container, wherein the electric field adjusting member has a shape that is in close contact with the concave space at the bottom of the container. In claim 1,
The electric field adjusting member corresponds to the number of concave spaces in the bottom of the container, and when the container is inserted, a pin member located in the concave space of the container is provided upright. A device for forming a barrier film on the inner surface. In claim 1,
An apparatus for forming a barrier film on the inner surface of a container, wherein the matching means is a rotating means obtained by rotating an electric field adjusting member around one of the electric field adjusting members. In claim 1,
An apparatus for forming a barrier film on an inner surface of a container, wherein the matching means is a gas supply unit that is provided on a side wall on a bottom side of the external electrode and applies a gas flow toward an inner side surface of the external electrode bottom. In claim 1,
An apparatus for forming a barrier film on the inner surface of a container, wherein the electric field adjusting member is formed by flocking a needle-like conductive member in a substantially vertical axis direction. In claim 1,
An apparatus for forming a barrier film on an inner surface of a container, wherein the electric field adjusting member is stretched while being densely packed with a conductive wire on the inner surfaces of the outer electrode side surface and the outer electrode bottom portion. In claim 1,
An apparatus for forming a barrier film on the inner surface of a container, wherein the electric field adjusting member is provided with a plurality of conductive members that move up and down in the vertical axis direction when the container is inserted. In claim 8,
An apparatus for forming a barrier film on an inner surface of a container, wherein the conductive member is subdivided so as to be inserted into a concave space formed at the bottom of the container. In any one of Claims 1 thru | or 9,
An apparatus for forming a barrier film on the inner surface of a container, comprising a suction part for sucking the bottom of the container at the bottom of the external electrode. In any one of Claims 1 thru | or 10,
An apparatus for forming a barrier film on the inner surface of a container, comprising a chamber for supporting the external electrode and shielding electromagnetic waves. In manufacturing an inner barrier film-coated container using the barrier film forming apparatus for the inner surface of any one of claims 1 to 10,
(A) lowering the external electrode from the apparatus body, and inserting a container having a concave space in the bottom that is the object to be processed into the external electrode while matching the concave space in the bottom with a dielectric material;
(B) After inserting the container, the external electrode is raised, and the gas blowing part is connected to the inside of the container from an exhaust pipe attached via an insulating member to the end face of the external electrode on the side where the mouth of the container is located. Inserting into,
(C) After exhausting the gas inside and outside the container through the exhaust pipe by the exhaust pipe means, a medium gas for generating a barrier film is blown out from the gas blowing section into the container, and the inside of the exhaust pipe including the inside of the container is predetermined. Setting the gas pressure;
(D) An electric field is applied between the external electrode and the ground electrode by an electric field applying means, a plasma is generated in the container positioned between them, and the medium gas is dissociated by the plasma to form an inner surface of the container And a coating method for the barrier film. In manufacturing an inner surface barrier film-coated container using the barrier film forming device on the inner surface of the container according to claim 11,
(A) A step of lowering the chamber and the external electrode as a unit from the apparatus main body, and inserting a container having a concave space in the bottom, which is an object to be processed, into the external electrode while matching the dielectric material in the concave space at the bottom. When,
(B) After inserting the container, the chamber and the external electrode are raised together, and then the gas blowing part is attached to the end face of the external electrode on the side where the mouth of the container is located via an insulating member Inserting the exhaust pipe into the container;
(C) After exhausting the gas inside and outside the container through the exhaust pipe by the exhaust pipe means, a medium gas for generating a barrier film is blown out from the gas blowing section into the container, and the inside of the exhaust pipe including the inside of the container is predetermined. Setting the gas pressure;
(D) An electric field is applied between the external electrode and the ground electrode by an electric field applying means, a plasma is generated in the container positioned between them, and the medium gas is dissociated by the plasma to form an inner surface of the container And a coating method for the barrier film.

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