JP2007088011A - Transformer for noncontact power feed - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a transformer for noncontact power feed which can be used even in a clean or vacuum environment by suppressing the occurrence of dust and outgassing as much as possible. <P>SOLUTION: In the transformer for noncontact power feed, the primary side including a core 11 wound with a primary coil 12 and the secondary side including a core 21 wound with a secondary coil 22 are arranged in face to face with each other, with a gap formed between them, so that either the primary side or the secondary side may be positioned on the fixed body side and the other side on the mobile body side, and power is supplied from one to the other side. On the gap facing surface of either the primary-side core 11 or the secondary-side core 21, a projection 51 is formed to keep the spacing of the gap constant regardless whether power is fed or not. In order to suppress outgassing, the occurrence of dust, etc.; the peripheral surfaces of the cores 11 and 21 and coils 12 and 22 which are formed on the primary side and the secondary side, respectively, and the peripheral surface of the projection 51 are covered with a can seal 30. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a non-contact power supply transformer for supplying electric power to an electrical device such as an actuator or a sensor in a vacuum or clean space for a liquid crystal or semiconductor manufacturing apparatus using a high frequency transformer.

2. Description of the Related Art Conventionally, a non-contact power feeding technique in which power of a high frequency power source is transmitted by a high frequency transformer has been developed for power feeding to a moving body or power feeding to an electrical appliance in which connectors are frequently attached and detached.
For example, an electromagnetic induction type connector has been proposed as a technique using this type of contactless power supply transformer (see Patent Document 1).
FIG. 3 is a cross-sectional side view of an electromagnetic induction type connector described in Patent Document 1 showing the first prior art. 11 is a primary core, 12 is a primary coil, 21 is a secondary core, 22 is a secondary coil, 31 is a rubber cover, 34 is an electromagnetic shielding member, and 35 is a case.
3, the electromagnetic induction type connector has a primary coil unit M1 having a primary core 11 around which a primary coil 12 is wound, and a secondary coil unit having a secondary core 21 around which a secondary coil 22 is wound. And M2. Either one of the coil units M1 and M2 is disposed facing each other with a gap so that the other is on the fixed body side and the other is on the moving body side, and power is supplied from one to the other. In addition, the surface of these members is expanded and contracted so that the primary core 11 of the transformer, the coil 12, the shielding member 34, the case 35, or the surface layer for insulation treatment are not damaged when the connector is attached or detached. The rubber cover 31 is used as a possible sheet member. Further, an alignment mechanism is provided in which a convex portion 51 and a concave portion 52 for aligning the core between the primary coil unit M1 and the secondary coil unit M2 are provided. In addition, 42 is a cylindrical wall and 46 is a side wall.

FIG. 4 is a side sectional view of the electromagnetic induction type connector showing the second prior art, and is described in the prior art of Patent Document 1.
In FIG. 4, the connector is composed of a primary coil unit M1 and a secondary coil unit M2, and in the vicinity of the cylindrical body 11A of the primary core 11 and in the vicinity of the opening edge of the cylindrical wall 21A of the secondary core 21. In some cases, a permanent magnet 40 is provided, and the primary side and the secondary side of the transformer are joined close to each other by the attractive force of the permanent magnet 40.
JP 2003-68544 A (Specification, page 3, FIG. 1)

The connectors of the high-frequency transformer type shown in the prior art are assumed to be used in the atmosphere, so they are not designed for dust generation and outgas that can be used in a clean or vacuum environment. Considering the environmental and maintainability aspects, it has been difficult to apply to electrical equipment in a vacuum or clean space for liquid crystal and semiconductor manufacturing equipment.
The present invention has been made to solve the above problems, and an object of the present invention is to provide a contactless power supply transformer that can suppress dust generation and outgas emission as much as possible and can be used in a clean or vacuum environment.

In order to solve the above-mentioned problem, the invention of claim 1 is directed to either the primary side having a core wound with a primary coil or the secondary side having a core wound with a secondary coil on the fixed body side. In the non-contact power supply transformer in which a gap is provided so that the other is on the moving body side and power is supplied from one to the other, the gap between the primary core and the secondary core is opposed to the gap. Protrusions are provided on either side of the surface to keep the gap gap constant regardless of whether power is supplied or not, and the outer surfaces of the core, the protrusions, and the coil are outgassed or dusted. It is configured to be covered with a can seal, a fluororesin, or a TiN coating so as to suppress, and is characterized by being a transformer for a clean environment or a vacuum environment.
According to a second aspect of the present invention, in the contactless power supply transformer according to the first aspect, the protrusion is formed of a member of Kapton (registered trademark) or Kalrez (registered trademark).
The invention according to claim 3 is the contactless power supply transformer according to claim 1, wherein the primary side and the secondary side are opposed to each other so as to cancel the electromagnetic attractive force of the transformer during power supply. Each is provided with a permanent magnet, and the same poles of the magnets are arranged facing each other.
Further, the invention according to claim 4 is the contactless power supply transformer according to claim 1 or 3, wherein two of either the primary side or the secondary side of the transformer are arranged, and the other transformer Is provided so as to be sandwiched between one transformer through a gap.

According to invention of Claim 1 and Claim 2, the area and contact pressure of the contact surface which a transformer opposes can be made small. For this reason, dust generation or outgas emission is suppressed, and a long life can be expected.
According to the third aspect of the present invention, since the primary side and the secondary side of the transformer are not in direct contact, there is no dust generation or outgas emission due to contact, and a high clean environment can be realized.
Furthermore, the invention of claim 4 can be applied to a high-precision mechanism without distorting the precise mechanism because the electromagnetic force generated by the transformer is canceled out.
According to the above invention, electric power can be supplied to a vacuum for a liquid crystal or a semiconductor manufacturing apparatus, or an electrical appliance such as an actuator or a sensor in a clean space, with almost no decrease in cleanliness and vacuum.

  Embodiments of the present invention will be specifically described below with reference to the drawings. In addition, the description is abbreviate | omitted about the same component of this invention as a prior art, and a different point is demonstrated.

1A and 1B are non-contact power supply transformers according to a first embodiment of the present invention, in which FIG. 1A is a side sectional view and FIG. 1B is a front sectional view taken along line AA in FIG.
In the figure, 30 is a can seal, 40 is a permanent magnet, and 50 is a protrusion.
The features of the present invention are as follows.
That is, in the contactless power supply transformer, the gap interval is kept constant regardless of the presence or absence of power supply on either the gap facing surface side of the core 11 on the primary side or the core 21 on the secondary side. The point where the protrusion 51 is provided, the cores 11 and 21 provided on the primary side and the secondary side, the outer peripheral surfaces of the coils 12 and 22 and the outer peripheral surface of the protrusion 51 so as to suppress outgas or dust generation, etc. It is the point comprised so that it might be covered with.
Specifically, the projections 50 are arranged at three points on the circumference (positions of the vertices of equilateral triangles) so that the gap surface of the sealing material does not come into direct contact with each other, and are viewed from the axial direction as shown in FIG. And has a rectangular or trapezoidal or circular cross section, and is made of Kapton (registered trademark) or Kalrez (registered trademark) member. Here, “Kapton” is a registered trademark of EI DuPont de Nemours and Company, and “Kalrez” is a registered trademark of DuPont Dow Elastomers Limited Liability Corporation.
Further, as means for reducing the contact surface pressure of the gap-facing surface of the transformer, permanent magnets 40 are provided at equidistant positions from the center at intervals of 120 degrees at three locations on the primary side and the secondary side, respectively. The same poles are placed facing each other so that the secondary side and the secondary side generate a repulsive force. The repulsive force of the magnet is designed to balance the electromagnetic attractive force when the transformer is excited at the rated value, and cancels the electromagnetic attractive force of the transformer during power feeding.

  Therefore, since the present embodiment is configured as described above, dust generation and outgas emission can be suppressed as much as possible, so when used for power supply to a moving body in a clean or vacuum environment or an electrical product where detachment frequently occurs, It is possible to provide a non-contact power supply transformer that can suppress dust generation and outgas emission as much as possible.

Next, a second embodiment will be described.
The second embodiment is different from the first embodiment as follows.
That is, two of either the primary side or the secondary side of the transformer are arranged, and the other transformer is provided so as to be sandwiched between the one transformer via a gap. In this example, two primary sides are arranged.
Further, as in the first embodiment, the primary side and the secondary side of the transformer are vacuum-supported by a resin mold or a can shield so as to cancel out the electromagnetic attractive force during power feeding. Similar to the first embodiment, the primary side and the secondary side are mechanically held at minute intervals by a gap holding mechanism (not shown) such as a protrusion or a permanent magnet.

  Therefore, since the present embodiment has the above-described configuration, it can be applied to a highly accurate mechanism without distorting a precise mechanism in order to cancel the electromagnetic force generated by the transformer.

In the present embodiment, the case where the cross-sectional shape of the transformer is a circular cross-section has been described. The basic configuration is the same.
In this embodiment, the protrusion made of the Kapton (registered trademark) or Kalrez (registered trademark) member is substantially provided between an arbitrary portion of the core and the can seal. A protrusion may be embedded in the seal itself.
In the present embodiment, the primary side, the secondary side core, the outer peripheral surface of the coil, and the outer peripheral surface of the protrusion are covered with the can seal, but instead, the fluororesin or TiN coating is used. It doesn't matter.

  If the contactless power supply transformer of the present invention is used, contactless power supply to electrical equipment in a vacuum is possible for contactless power supply devices that have been developed on the premise of operation in a normal atmospheric environment. Needless to say, it is frequently used in a semiconductor manufacturing apparatus for processing a semiconductor wafer in a vacuum chamber. In particular, it can be applied to non-contact power supply to an actuator, a sensor, a battery or the like mounted on a moving body.

BRIEF DESCRIPTION OF THE DRAWINGS It is a non-contact electric power supply transformer which shows 1st Example of this invention, Comprising: (a) is a side sectional view, (b) The front sectional view which follows the AA line Side sectional view of a transformer for contactless power feeding showing a second embodiment of the present invention Side sectional view of the electromagnetic induction type connector described in Patent Document 1 showing the first prior art It is a sectional side view of the electromagnetic induction type connector which shows 2nd prior art, and was described in the prior art of patent document 1

Explanation of symbols

11 Primary core 12 Primary coil 21 Secondary core 22 Secondary coil 30 Can seal 40 Permanent magnet 50 Projection

Claims (4)

A primary side having a core around which a primary coil is wound and a secondary side having a core around which a secondary coil is wound are arranged facing each other with a gap so that one side is on the fixed body side and the other side is on the moving body side. In a contactless power supply transformer that supplies power from one to the other,
Protrusions for maintaining the gap interval constant regardless of whether power is supplied or not are provided on either the gap-facing surface side of the primary side core or the secondary side core,
The outer periphery of the core, the protrusion, and the coil is configured to be covered with a can seal, a fluororesin, or a TiN coating so as to suppress outgas or dust generation,
Transformer for contactless power supply characterized by being a transformer for clean environment or vacuum environment.   2. The contactless power supply transformer according to claim 1, wherein the protrusion is made of a member of Kapton (registered trademark) or Kalrez (registered trademark).   A permanent magnet is provided in each of the opposed parts of the primary side and the secondary side so as to cancel the electromagnetic attractive force of the transformer during power feeding, and the same poles of the magnets are arranged facing each other. The contactless power supply transformer according to claim 1.   2. One of the primary side and the secondary side of the transformer is arranged in two, and the other transformer is provided so as to be sandwiched between one transformer through a gap. Or the transformer for non-contact electric power feeding of 3.

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