JP2007085953A5 - - Google Patents
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- JP2007085953A5 JP2007085953A5 JP2005276897A JP2005276897A JP2007085953A5 JP 2007085953 A5 JP2007085953 A5 JP 2007085953A5 JP 2005276897 A JP2005276897 A JP 2005276897A JP 2005276897 A JP2005276897 A JP 2005276897A JP 2007085953 A5 JP2007085953 A5 JP 2007085953A5
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005276897A JP4860972B2 (en) | 2005-09-22 | 2005-09-22 | Vibration sensor, vacuum gauge using vibration sensor, and measurement method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005276897A JP4860972B2 (en) | 2005-09-22 | 2005-09-22 | Vibration sensor, vacuum gauge using vibration sensor, and measurement method |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2007085953A JP2007085953A (en) | 2007-04-05 |
JP2007085953A5 true JP2007085953A5 (en) | 2008-11-06 |
JP4860972B2 JP4860972B2 (en) | 2012-01-25 |
Family
ID=37973069
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005276897A Expired - Fee Related JP4860972B2 (en) | 2005-09-22 | 2005-09-22 | Vibration sensor, vacuum gauge using vibration sensor, and measurement method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4860972B2 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101963786B (en) * | 2010-08-06 | 2012-06-06 | 南京航空航天大学 | Photostrictive driver based vibration wireless driving control device and method |
KR101297514B1 (en) * | 2010-09-29 | 2013-08-16 | (주)엘지하우시스 | Vacuum insulation panel, and apparatus and method for evaluating internal vacuum level of the vacuum insulation panel using frequency response method |
CN102288361A (en) * | 2011-05-13 | 2011-12-21 | 华南理工大学 | Optical fibre vacuum sensor |
EP3108230B1 (en) * | 2014-02-17 | 2019-08-07 | Universität Basel | Measuring device and method for determining mass and/or mechanical properties of a biological system |
KR101459266B1 (en) * | 2014-08-01 | 2014-11-12 | 한국남부발전 주식회사 | Optical sensor module measuring generator stator vibration and vibration sensor appratus using thereof |
EP3495788A1 (en) * | 2017-12-08 | 2019-06-12 | Université de Bordeaux | Optical fiber based organic cantilever with integrated transduction |
CN110486562A (en) * | 2019-08-26 | 2019-11-22 | 浙江工业大学 | A kind of pipe vibration active control device |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02268203A (en) * | 1989-04-11 | 1990-11-01 | Brother Ind Ltd | Optical fiber sensor apparatus |
JP2797742B2 (en) * | 1991-03-25 | 1998-09-17 | 横河電機株式会社 | Vibration transducer |
JPH06102115A (en) * | 1992-09-22 | 1994-04-15 | Yokogawa Electric Corp | Vibration type pressure gauge |
JPH06167451A (en) * | 1992-11-30 | 1994-06-14 | Mitsubishi Electric Corp | Gas detection sensor |
JPH08145831A (en) * | 1994-11-15 | 1996-06-07 | Fuji Electric Co Ltd | Optical vibrator sensor |
-
2005
- 2005-09-22 JP JP2005276897A patent/JP4860972B2/en not_active Expired - Fee Related
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