JP2007057978A - Optical component and optical module - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an optical component and an optical module capable of favorably performing coupling between an light wave transmitting part and an optical element or between the light wave transmitting parts without requiring a complicated process. <P>SOLUTION: A sub-carrier 31 is provided with a face to be coupled with the light wave transmitting part and a face with a light receiving element 34 formed. As regards each face of the sub-carrier 31, among the face facing the face 38 on which light emitted from the light wave transmitting part is made incident and the face adjacent to it, at least a part of the faces except for the one with the light receiving element 34 formed is made to have such a parabolic shape such that the incident light is converged on the light receiving element 34, thereby forming a parabolic part 36. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an optical component and an optical module, and more particularly, to an optical component and an optical module that satisfactorily connect an optical element, a first light wave transmission unit, and the like to a second light wave transmission unit.

  In recent years, optical communication systems capable of transmitting large volumes of information at high speed have attracted attention because of the desire to transmit large volumes of information with the advancement of information technology. In such an optical communication system, an optical fiber is used as a transmission medium for constructing a high-speed and large-capacity communication network. As a technique for increasing the capacity of this optical fiber, a WDM (Wavelength Division Multiplexing) technique is used. Attention has been paid.

  In this WDM, for example, when an optical waveguide such as a planar lightwave circuit (PLC) and an optical carrier including an optical element such as a light receiving element are coupled with high accuracy and mounted on an optical module. There is.

  The mounting of such an optical submodule and an optical waveguide on an optical module is described in Patent Document 1. In Patent Document 1, an optical fiber and a semiconductor laser diode are connected to one end of an optical waveguide substrate, and a dielectric multilayer filter attached to a subcarrier is attached to the other end with a resin. .

Patent Document 2 describes the optical module shown in FIGS. 1 and 2.
1 and 2, the optical module 1 includes a silicon substrate 2 and an optical waveguide 3 formed on the silicon substrate 2. The optical module 1 is mounted with a light receiving element supporting carrier 4. The optical waveguide 3 includes a core 5 formed on the silicon substrate 2 and a clad 6 provided around the core 5. The core 5 is formed so that the waveguide pattern is Y-shaped when viewed from above.

  In Patent Document 2, the carrier 4 is formed in a prismatic shape from ceramic and is metallized on the outer surface. The carrier 4 has a light receiving element (general-purpose surface-type PD) 7 soldered to one side surface and a bottom surface soldered to the concave portion 8 of the silicon substrate 2. The light receiving element 7 is fixed to the carrier 4 in a state where the light receiving surface is orthogonal to the main surface (in-plane direction of the substrate surface) of the silicon substrate 2. Further, the fixing position of the light receiving element 7 is set so that the light receiving surface faces the end surface of the core 5 in a state where the carrier 4 is mounted on the silicon substrate 2.

  In the carrier 4, a side surface on which the light receiving element 7 is mounted and two side surfaces connected to the side surface are fitted to the bottom of the recess 8. The formation position and depth of the recess 8 are set so that the light receiving element 7 faces the tip of the branch path 5 in a state where the carrier 4 is fitted as described above. In Patent Document 2, the light receiving element 7 and the core 5 are coupled by fitting the carrier 4 into the recess 8 having the above depth.

Japanese Patent No. 2867859 Japanese Patent Laid-Open No. 10-20158

  Now, forming the concave portion 8 described in Patent Document 2 on the silicon substrate 2 can be performed with high accuracy in the past. However, in Patent Document 2, since the accuracy of the outer shape of the carrier 4 that is a subcarrier and the pattern formed on the carrier 4 are not obtained, in order to arrange the light receiving element 7 at a desired position of the carrier 4 with high accuracy, It took a complicated process and was difficult.

  That is, conventionally, alignment between the subcarrier and an optical element such as a light receiving element is performed using the outer shape of the subcarrier or an alignment mark formed in advance on the subcarrier. The subcarrier is usually a ceramic obtained by sintering a predetermined inorganic material, etc., but during this sintering, a manufacturing error due to heat treatment occurs due to thermal expansion or contraction, and this manufacturing error causes The external shape may change. Such a manufacturing error has an influence in the control with a small order. Therefore, when the optical element is formed on the subcarrier due to the outer shape of the subcarrier, the optical element has a variation in position due to the manufacturing error. Therefore, it is difficult to obtain accuracy due to the outer shape of the subcarrier.

  It is also conceivable to form an alignment mark in advance on the subcarrier and form an optical element based on the alignment mark. However, also in this case, the alignment mark shifts from a predetermined position due to a manufacturing error caused by heat treatment that occurs when the subcarrier is formed. Therefore, even when an optical element is mounted on the subcarrier based on the alignment mark, the position of the optical element varies, so that it is difficult to obtain accuracy even by the pattern of the alignment mark.

  As described above, conventionally, since it is difficult to accurately align the subcarrier and the optical element, the optical element provided in the subcarrier and, for example, the light wave transmission unit (waveguide, optical fiber, etc.) It was difficult to align the optical axis with high accuracy.

  In addition, even if the subcarriers are accurately arranged so that the optical axis of the optical element included in the subcarrier and the optical axis of the light wave transmission unit coincide with each other, deviation may occur when the subcarriers are bonded. . Therefore, as a result, the optical axes of the optical elements of the subcarrier and the light wave transmission unit are shifted, and it is difficult to perform highly accurate coupling.

  Furthermore, for example, when a light receiving element is formed on a subcarrier as an optical element, it is necessary to mount the light receiving element perpendicularly to the light beam from the light wave transmission unit, and it is difficult to mount using a plane mounting apparatus and element. .

  The problem regarding the above-described high-precision coupling is not limited to the coupling between the subcarrier and the light wave transmission unit, but also applies to the coupling between the light wave transmission units. For example, when coupling waveguides having different heights or waveguides having different optical axis positions, it has been desired to reduce the loss.

  The present invention has been made in view of such a problem, and the object thereof is not to require a complicated process, and is a combination of a light wave transmission unit and an optical element, or a light wave transmission unit and a light wave transmission unit. It is an object of the present invention to provide an optical component and an optical module that can be satisfactorily coupled.

  In order to achieve such an object, the present invention according to claim 1 is a substantially rectangular parallelepiped optical component made of a material that transmits light waves in a desired wavelength band. A first surface of the optical component that is coupled to a portion, a surface other than the second surface of the optical component that faces the first surface and the first surface, and a desired member is formed A parabolic parabolic portion formed on at least a part of a surface other than the third surface with respect to the third surface of the optical component and each surface of the optical component, the light wave transmitting portion A parabolic unit that collects incident light incident from the first surface onto a predetermined region of the third surface, and the incident light is incident on the parabolic unit. It is characterized by that.

  According to a second aspect of the present invention, there is provided a first surface of the optical component that is made of a material that transmits light waves in a desired wavelength band, is a substantially rectangular parallelepiped optical component, and is coupled to the light wave transmission unit. A third surface of the optical component, which is a surface other than the first surface and the second surface of the optical component facing the first surface, on which a desired member is formed, The first surface includes at least both a first region including at least a region on which light emitted from the light wave transmission unit is incident and a second region including at least a predetermined region on the third surface. As described above, with respect to the opening formed in the optical component and the wall surface of the opening formed inside the optical component, at least a part of the wall surface facing the first surface and the wall surface adjacent to the wall surface. A parabola-shaped parabola part formed in A parabolic unit that condenses incident light incident from the first surface onto the predetermined region of the third surface, the light being emitted from the light wave transmission unit; It is made to enter into a parabolic part.

  According to a third aspect of the present invention, there is provided a first surface of the optical component that is made of a material that is transparent to a light wave in a desired wavelength band, is a substantially rectangular parallelepiped optical component, and is coupled to the light wave transmission unit. A third surface of the optical component, which is a surface other than the first surface and the second surface of the optical component facing the first surface, on which a desired member is formed, A cavity connecting the first region of the first surface including at least a region where the light emitted from the light wave transmission unit is incident and the second region including at least a predetermined region of the third region; A parabolic parabolic portion formed inside the optical component, the light emitted from the light wave transmitting portion in the cavity, and the incident light incident from the first surface is A parabolic portion for condensing light on the predetermined area of the surface of the It is characterized in that is incident on the parabolic portion.

  The invention according to claim 4 is the invention according to any one of claims 1 to 3, further comprising a reflective film that is formed on the parabolic portion and includes a material that reflects at least the incident light. .

  The invention according to claim 5 is the invention according to claim 4, wherein the material is a material that transmits light of a predetermined wavelength in addition to reflecting the incident light.

  The invention described in claim 6 is the invention described in claim 4 or 5, characterized in that the material is a dielectric multilayer film.

  According to a seventh aspect of the present invention, in the invention according to any one of the first to sixth aspects, the desired member formed on the third surface is an optical element.

  The invention according to claim 8 is the invention according to any one of claims 1 to 6, wherein the desired member formed on the third surface is the other optical component, and the third surface is The third optical surface is in contact with the third surface of the other optical component.

  The invention according to claim 9 includes a substrate on which the light wave transmission unit is formed and the optical component according to any one of claims 1 to 8 mounted on the substrate, and is emitted from the light wave transmission unit. The light is incident from the first surface of the optical component, and the incident light is incident on the parabolic portion.

  A tenth aspect of the present invention is characterized in that, in the ninth aspect of the invention, the optical component is provided in plural, and the plural optical components are arranged in series or in parallel.

  The invention described in claim 11 is the invention described in claim 9 or 10, further comprising an optical element formed on the second surface side of the optical component on the substrate.

  As described above, according to the present invention, for each surface of the optical component, among the second surface opposite to the first surface on which the light emitted from the light wave transmitting portion is incident and the surface adjacent to the second surface. Since at least a part of the surface excluding the third surface has a parabolic shape so that the incident light is condensed on a predetermined region of the third surface and forms a parabolic portion, a complicated process is required. In addition, the coupling between the light wave transmission unit and the optical element, and the coupling between the light wave transmission unit and the light wave transmission unit can be performed satisfactorily.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In the drawings described below, components having the same function are denoted by the same reference numerals, and repeated description thereof is omitted.
(First embodiment)
FIG. 3A is a perspective view of a subcarrier according to the present embodiment, and FIG. 3B is a side view of the subcarrier of FIG.
3A and 3B, a substantially rectangular parallelepiped subcarrier 31 made of a material such as resin has a metal 32 and a marker 33 formed on the upper surface thereof. On the upper surface of the subcarrier 31, a light receiving element 34 in which the light receiving portion 35 is disposed on the upper surface side of the subcarrier 31 is formed, and the light receiving element 34 is connected to the metal 32. In this way, by connecting the metal 32 and the light receiving element 34, the light receiving element 34 exchanges signals with an external device via the metal 32. The material of the subcarrier 31 is not limited to the above resin and may be made of glass. The material of the subcarrier 31 is preferably made of a material that transmits light having a desired wavelength (the wavelength of light output from the light wave transmission unit to which the subcarrier 31 should be coupled).

  Such mounting of the light receiving element 34 on the subcarrier 31 is performed by image recognition using a marker 33 formed on the subcarrier 31 and a marker (not shown) formed on the mounting surface of the light receiving element 34. The position is adjusted and mounting is performed by a bonder.

  In the present specification, the “light wave transmission unit” refers to a means for transmitting light, such as a waveguide or an optical fiber.

  Of each surface of the subcarrier 31, at least a part of the surface excluding the surface on which the light receiving element 34 is formed among the surface facing the surface 38 on which the light emitted from the light wave transmission unit is incident and the surface adjacent to the surface. However, the incident light has a parabolic shape such that the incident light is condensed on the light receiving element 34, and the parabolic portion 36 is formed. A reflective film 37 is formed on the surface of the parabolic portion 36 by vapor deposition, sputtering, or the like. Note that when the subcarrier 31 is mounted on the substrate on which the light wave transmission unit is formed, the height of the parabolic unit 36 and the height of the light wave transmission unit are set so that the emitted light from the light wave transmission unit can enter the parabolic unit 36. Set.

  With such a configuration, when light emitted from a light wave transmission unit (not shown) to which the subcarrier 31 is coupled is incident from the surface 38, the incident light is reflected on the reflection film 37 formed in the parabolic unit 36. Then, the light is condensed on the light receiving portion 35 of the light receiving element 34. As described above, when the parabolic portion 36 is provided on the side facing the surface 38 on which the light is incident, any light incident on the parabolic portion 36 is condensed and incident on the light receiving portion 35. Therefore, the parabolic part 36 plays a role of correcting a deviation of the optical axis between the light wave transmitting part to be coupled and the light receiving element 34.

At this time, it is preferable to set the shape of the subcarrier 31 and the position of the light receiving unit 35 so that the focal point of the light collected from the parabolic unit 36 is included in the light receiving surface of the light receiving unit 35. Even if it is not included in the light receiving surface of the unit 35, the focal point may not be included in the light receiving unit 35 as long as an appropriate amount of collected light can enter the light receiving unit 35.
The subcarrier 31 may be manufactured using a mold.

  In the present embodiment, the reflective film 37 may be made of a dielectric multilayer film or metal. The reflective film 37 may be made of a material having a light transmission function in addition to the light reflection function. As described above, if a dielectric multilayer film is used as the reflective film 37, the subcarrier can function as a WDM filter.

Below, the remarkable effect by this embodiment is demonstrated.
As a first effect, as described above, the subcarrier 31 itself has a function of correcting the shift of the optical axis when coupled with the light wave transmission unit, so that the mounting in the height direction and the horizontal direction is high. Does not require accuracy. That is, the above connection can be performed satisfactorily without positioning with high accuracy in the height direction and the lateral direction.

  In the present specification, the “vertical direction” is the optical axis direction of the light wave transmission unit coupled to the subcarrier 31, and the “lateral direction” is the in-plane direction of the substrate on which the light wave transmission unit is formed. In the direction perpendicular to the optical axis direction. Further, the “height direction” is a direction perpendicular to the substrate plane.

  FIGS. 4A and 4B are diagrams showing how the optical axis shift is corrected in the horizontal direction according to the present embodiment, and FIG. 4A is the optical axis shift in the horizontal direction. 4B is a side view of the subcarrier 31 as viewed from the side of the surface facing the incident surface of the subcarrier 31 in FIG. 4A.

  As shown in FIGS. 4A and 4B, the light 41 a emitted from the light wave transmission unit 40 enters from the surface 38 of the subcarrier 31. When the light 41a incident on the subcarrier 31 is incident on the parabolic portion 36, it is reflected by the reflective film 37 and becomes reflected light 41b. The reflected light 41 b is collected by the parabolic unit 36 and is incident on the light receiving unit 35 of the light receiving element 34.

  On the other hand, the light wave transmission unit 40 is moved in the horizontal direction at the same height. In FIGS. 4A and 4B, the moved light wave transmission unit is denoted by reference numeral 42. The light 43a emitted from the light wave transmission unit 42 also enters from the surface 38 of the subcarrier 31, and the light 43a enters the parabolic unit 36 and is reflected by the reflection film 37 to be reflected light 43b. The reflected light 43 b is collected by the parabolic unit 36 and is incident on the light receiving unit 35 of the light receiving element 34.

  As described above, if the light wave transmission unit is disposed on the surface 38 side of the subcarrier 31 and the light emitted from the light wave transmission unit is disposed so as to be incident on the parabolic unit 36 via the surface 38, the horizontal direction is sufficient. Regardless of the arrangement location, the light emitted from the light wave transmission unit is favorably incident on the light receiving unit 35. Therefore, even if complicated alignment control is not performed, the coupling between the light wave transmission unit and the light receiving element 34 is good.

FIG. 5 is a side view of the subcarrier 31 showing how the optical axis shift is corrected in the height direction according to the present embodiment.
As shown in FIG. 5, the light 52 a emitted from the light wave transmission unit 51 having a predetermined height enters from the surface 38 of the subcarrier 31. When the light 52a incident on the subcarrier 31 is incident on the parabolic portion 36, it is reflected by the reflective film 37 and becomes reflected light 52b. The reflected light 52 b is collected by the parabolic unit 36 and is incident on the light receiving unit 35 of the light receiving element 34.

  On the other hand, the height of the light wave transmission unit 51 is moved in the horizontal position as it is. In FIG. 5, the moved light wave transmission unit is denoted by reference numeral 53. The light 54a emitted from the light wave transmission part 53 also enters from the surface 38 of the subcarrier 31, and the light 54a enters the parabolic part 36 and is reflected by the reflection film 37 to become reflected light 54b. The reflected light 54 b is collected by the parabolic unit 36 and is incident on the light receiving unit 35 of the light receiving element 34.

Thus, if the light wave transmission unit is arranged on the side of the surface 38 of the subcarrier 31 and the emission light from the light wave transmission unit is arranged so as to enter the parabolic unit 36 via the surface 38, the height direction The light emitted from the light wave transmitting part is incident on the light receiving part 35 in any case. Therefore, even if complicated alignment control is not performed, the coupling between the light wave transmission unit and the light receiving element 34 is good. However, in the height direction, the height of the parabolic part 36 is the height h ₁ , so the light wave transmission part is higher than the height of the bottom surface of the subcarrier 31 and the height h ₁ is added to the bottom surface. Place it at a position lower than the height.

  As can be seen from the above, in the present embodiment, by arranging the subcarriers so that the light emitted from the light wave transmission unit is incident on the parabolic part via the incident surface of the subcarriers, Even if high-precision positioning is not performed, it is possible to satisfactorily combine the light wave transmission unit and an optical element such as a light receiving element. That is, the optical axis alignment between the optical element and the light wave transmission unit can be set accurately and with good reproducibility.

  Furthermore, since the subcarrier mounting accuracy is not required to be high at the time of the above-described good coupling, the above mounting can be performed very simply.

  The second effect is that the subcarrier other than the incident surface on which the light emitted from the light wave transmitting portion is incident, the surface facing the incident surface, and the surface in contact with the substrate when the subcarrier is mounted on the substrate. Since an optical element such as a light receiving element is provided on the surface (the upper surface of the subcarrier 31 in FIGS. 3A and 3B), the subcarrier is mounted in abutment with the waveguide portion when the subcarrier is mounted. An easy mounting method (mounting in close contact) can be adopted, and vertical mounting accuracy is not required.

FIG. 6 is a cross-sectional view of an optical module according to the present embodiment in which subcarriers are mounted on a substrate on which a light wave transmission unit is formed.
In FIG. 6, a step 61 is formed on a substrate 61 such as a silicon bench for forming an optical waveguide 62 as an optical wave transmission unit. An optical waveguide 62 having a clad 64 and a waveguide core 65 embedded in the clad 64 is formed on the step 63, and the end surface 69 of the step 63 on the subcarrier 31 side and the subcarrier 31 side of the optical waveguide 62 are formed. The end face 70 substantially coincides with the end face 70. The end surface 69 of the step 63 and the end surface 70 of the optical waveguide 62 are bonded to the surface 38 of the subcarrier 31 by a resin 66 such as an adhesive. The surface of the subcarrier 31 that faces the surface on which the light receiving element 34 is formed is bonded to the surface 68 of the substrate 61 with a resin 67 such as an adhesive. In the present embodiment, the subcarrier 31 may be fixed by using only the resin 66 without using the resin 67.

  In FIG. 6, the height of the waveguide core 65 from the surface 68 is set to be smaller than the height of the parabolic portion 36 from the surface 68. In this way, by setting the height of each waveguide core 65, the light emitted from the waveguide core 65 appropriately enters the parabolic portion 36.

  In the present embodiment, since high-precision positioning in the height direction and the lateral direction is not required, the surface 38 of the subcarrier 31 is set to the end surface after the light emitted from the waveguide core 65 enters the parabolic portion 36. The subcarrier 31 is mounted so as to abut against the end face 69 and the end face 70. At this time, since the end surface 69 and the end surface 70 substantially coincide with each other, the bonding area with the surface 38 of the subcarrier 31 can be increased, and the bonding effect can be enhanced. Further, even when the position of the subcarrier 31 is slightly shifted during this bonding, the optical axis is shifted by the parabolic portion 36 and the reflection film 37 as long as the emitted light from the waveguide core 65 is incident on the parabolic portion 36. Since the correction is performed, the waveguide core 65 and the light receiving element 34 are well coupled.

  In the present embodiment, a light receiving element is used as the optical element, but the present invention is not limited to this. For example, any optical element may be used as long as it is coupled to the light wave transmission unit, such as a light emitting element.

  3 (a) and 3 (b), the parabolic portion 36 is formed on the surface facing the surface 38. However, as shown in FIGS. 7 (a) and 7 (b), the parabolic portion 36 is also formed on the surface 38 side. 36 and the reflective film 37 may be formed.

  7 (a) and 7 (b), on the surface 38 side as well as the parabolic portion 36, the surface on which the light receiving element 34 is formed is removed from the surface facing the surface 73 and the surface adjacent to the surface 73. At least a part of the surface has a parabolic shape so that the incident light is condensed on the light receiving element 74, and forms a parabolic portion 71. A reflective film 72 is formed on the surface of the parabolic portion 71.

  In such a configuration, when the light incident from the surface 38 enters the parabolic part 36, the light is reflected and collected by the reflection film 37 and enters the light receiving part 35 of the light receiving element 34. On the other hand, when the light incident from the surface 73 is incident on the parabolic part 71, it is reflected and collected by the reflective film 72 and is incident on the light receiving part 75 of the light receiving element 74.

  Also in this case, by positioning the subcarrier so that the emitted light from the light wave transmission portion enters the parabolic portion via the subcarrier incident surface, high-precision positioning in the height direction and the lateral direction is not performed. However, it is possible to satisfactorily couple the light wave transmission unit and the optical element such as the light receiving element.

  In the present embodiment, the parabola part 36 and the parabola part 71 are formed on a part of the surface on which the parabola part 36 and the parabola part 71 are formed. Therefore, a parabolic portion may be formed on the entire surface. At this time, it is preferable to provide a region that is flat to some extent on the surface that is in contact with the substrate on which the subcarrier is mounted in consideration of the stability of the subcarrier during mounting.

  In the present embodiment, at least one parabolic portion is provided on at least a part of the surface on which the optical element is not formed with respect to the subcarrier, and the surface on which the optical element is formed and the optical element are formed. Light may be incident from a surface other than the surface facing the surface.

  In this embodiment, a reflective film is formed on the parabolic portion, but it may not be formed. However, it is preferable to form the reflective film on the parabolic portion because the reflectance of light incident on the parabolic portion can be further increased.

(Second Embodiment)
FIG. 8A is a perspective view of a subcarrier according to the present embodiment, FIG. 8B is a top view of the subcarrier shown in FIG. 8A, and FIG. FIG. 9 is a side view of the subcarrier shown in FIG.
8A to 8C, a subcarrier 81 made of a material such as resin has a marker 82 formed on the upper surface thereof. On the upper surface of the subcarrier 81, a light receiving element 83 in which the light receiving portion 84 is disposed on the upper surface side of the subcarrier 81 is formed. The material of the subcarrier 81 is not limited to the above resin and may be made of glass. The material of the subcarrier 81 is preferably made of a material that transmits light having a desired wavelength (the wavelength of light output from the light wave transmission unit to which the subcarrier 81 is to be coupled).

  Further, in the subcarrier 81, a region including at least a region of the surface 85, which is an incident surface, on which light emitted from the light wave transmission unit is incident and a region facing the light receiving unit 84 on the surface where the light receiving element 83 is formed. In addition, an opening 86 of the opening is formed. Regarding the wall surface of the opening 86, at least a part of the wall surface facing the surface 85 on which the light emitted from the light wave transmitting unit is incident and the wall surface adjacent to the wall surface are collected by the light incident on the light receiving element 83. It becomes a parabolic shape that shines, and forms a parabolic portion 87. A reflective film 88 is formed on the surface of the parabolic portion 87. It should be noted that when the subcarrier 81 is mounted on the substrate on which the light wave transmission unit is formed, the height of the parabolic unit 87 and the height of the light wave transmission unit are set so that the emitted light from the light wave transmission unit can enter the parabolic unit 87. Set.

  With such a configuration, when light emitted from a light wave transmission unit (not shown) to which the subcarrier 81 is coupled enters from the surface 85, the incident light is applied to the reflection film 88 formed in the parabolic unit 87. Then, the light is condensed on the light receiving portion 84 of the light receiving element 83. As described above, when the parabolic portion 87 is provided on the side facing the surface 85 on which the light is incident, any light incident on the parabolic portion 87 is condensed and incident on the light receiving portion 84. Therefore, as in the first embodiment, the parabolic unit 87 plays a role of correcting a shift of the optical axis between the light wave transmitting unit to be coupled and the light receiving element 83.

At this time, it is preferable to set the shape of the subcarrier 81 and the position of the light receiving unit 84 so that the focal point of the light collected from the parabolic unit 87 is included in the light receiving surface of the light receiving unit 84. Even if it is not included in the light receiving surface of the unit 84, the focal point may not be included in the light receiving unit 84 as long as an appropriate amount of collected light can enter the light receiving unit 84.
The subcarrier 81 may be manufactured using a mold.

  In the present embodiment, as shown in FIGS. 9A to 9C, a cavity 89 that connects the surface 85 and the surface on which the light receiving element 83 is formed may be formed. At this time, in the cavity 89, a parabolic portion 90 is formed on the side facing the surface 85 so that incident light from the surface 85 is collected on the light receiving element 83. A reflective film 91 is formed on the surface of the parabolic portion 90.

  9 (a) to 9 (c), when light emitted from a light wave transmission unit (not shown) to which the subcarrier 81 is coupled is incident from the surface 85, the incident light is When reflected by the reflective film 91 formed on the parabolic portion 90, the light is condensed on the light receiving portion 84 of the light receiving element 83.

  9A to 9C, the cavity 89 may be filled with a refractive index matching agent.

  As can be seen from the above, also in this embodiment, the same effect as that of the first embodiment can be obtained.

(Third embodiment)
In the present embodiment, the optical module mounted with subcarriers described in the first and second embodiments will be described.
FIG. 10 is a perspective view of an optical module on which the subcarrier according to the present embodiment is mounted.
In FIG. 10, a step 102 is formed on a substrate 101 such as a silicon bench for forming an optical waveguide 103 as an optical wave transmission unit. An optical waveguide 103 having a clad 104 and a waveguide core 105 embedded in the clad 104 is formed on the step 102. An end surface 106 of the step 102 on the subcarrier 31 side and the subcarrier 31 side of the optical waveguide 103 are formed. The end face 107 substantially coincides with the end face 107. The end surface 106 of the step 102 and the end surface 107 of the optical waveguide 103 are bonded to the surface 38 of the subcarrier 31 with a resin such as an adhesive. Further, the surface of the subcarrier 31 that faces the surface on which the light receiving element 34 is formed is bonded to the surface 108 of the substrate 101 with a resin such as an adhesive.

  In FIG. 10, the height of the waveguide core 105 from the surface 108 is set smaller than the height of the parabolic portion 36 from the surface 108. Thus, by setting the height of each waveguide core 105, the light emitted from the waveguide core 105 is appropriately incident on the parabolic portion 36. And since this incident light is condensed on the light receiving part 35 by the reflecting film 37 formed on the parabolic part 36, the optical waveguide 103 and the optical waveguide 103 can be obtained without performing high-precision positioning in the height direction and the lateral direction. The coupling with the light receiving element 34 can be performed satisfactorily.

  Moreover, you may use an optical fiber as shown in FIG. 11 as a light wave transmission part. In FIG. 11, a V-groove 111 for placing an optical fiber is formed in the step 102 of the substrate 101, and an optical fiber 112 is placed in the V-groove 111, and the sub-carrier 31 side of the step 102. The end face 106 of the optical fiber 112 substantially coincides with the end face 113 of the optical fiber 112 on the subcarrier 31 side. The end surface 107 of the step 102 and the end surface 113 of the optical fiber 112 are bonded to the surface 38 of the subcarrier 31 with a resin such as an adhesive.

  In FIG. 11, the height of the optical fiber 112 from the surface 108 is set to be smaller than the height of the parabolic portion 36 from the surface 108.

  In the present embodiment, as described in the first and second embodiments, in addition to the function of reflecting light of a predetermined wavelength on the reflection film 37 formed on the parabolic portion 36, the light of the predetermined wavelength is used. A material having a function of transmitting light may be used.

FIG. 12 is a perspective view of an optical module having a subcarrier on which a reflective film made of a material having reflection characteristics and transmission characteristics is formed according to the present embodiment.
In FIG. 12, the reflective film 123 formed on the parabolic portion 36 of the subcarrier 31 reflects a light having a first wavelength that is a predetermined wavelength and transmits a light having a second wavelength that is a predetermined wavelength. Is included. Therefore, if the light incident on the parabolic part 36 is light having the first wavelength, it is reflected and collected on the light receiving element 34. On the other hand, if the light incident on the parabolic part 36 is light of the second wavelength, it passes through the parabolic part 36 as it is.

  In FIG. 12, a step 121 for forming the light emitting element 122 is formed on the substrate 101. A light emitting element 122 is formed on the step 121. At this time, as can be seen from FIG. 13, the light 131 having the second wavelength emitted from the light emitting element 122 becomes the refracted light 132 at the parabolic portion 136, but this refracted light 132 is appropriately incident on the optical waveguide 103. Thus, the light emitting element 122 is disposed. Such an arrangement adjustment may be performed by adjusting the height of the step 121 from the surface 108. In other words, the height of the step 121 may be adjusted so that the refracted light 132 is appropriately incident on the optical waveguide 103.

  As can be seen from FIG. 13, when the light 133 having the first wavelength emitted from the optical waveguide 103 is incident on the parabolic portion 36, it is reflected by the reflective film 123 to become reflected light 134 and is condensed on the light receiving element 24. . On the other hand, when the light of the second wavelength emitted from the light emitting element 122 is incident on the parabolic portion 36, it is transmitted through the reflective film 123 and appropriately incident on the optical waveguide 103.

  As described above, according to this embodiment, it is possible to satisfactorily combine the plurality of optical elements and the light wave transmission unit with one optical component.

(Fourth embodiment)
Although the optical module using one subcarrier according to the present invention has been described in the third embodiment, the number of subcarriers is not limited to this. In the present embodiment, an optical module using a plurality of subcarriers will be described.
FIG. 14 is a perspective view of an optical module according to this embodiment in which two subcarriers are arranged in series.
In FIG. 14, in the optical module described in FIG. 10, the second subcarrier 141 is disposed on the side of the first subcarrier 31 facing the surface 38. The subcarrier 141 has the same configuration as the subcarrier 31.

  The subcarrier 31 and the subcarrier 141 are arranged such that light emitted from the parabolic portion 36 side of the subcarrier 31 is incident on the surface 38 of the subcarrier 141, and the light is parabolic portion of the subcarrier 141. Any arrangement may be used as long as it is incident on 36.

  The reflective film formed on the parabolic part 36 of the subcarrier 31 and the reflective film formed on the parabolic part 36 of the subcarrier 141 may be selected according to the design of the optical module. For example, when the light receiving element 34 formed on the subcarrier 31 receives light of the first wavelength, and the light receiving element 34 formed on the subcarrier 141 receives light of the second wavelength, the subcarrier For the reflective film formed on 31, a material is selected so that the light of the first wavelength is reflected and the light of the second wavelength is transmitted. On the other hand, for the reflective film formed on the subcarrier 141, a material that reflects light of the second wavelength may be selected.

  Further, the optical element (light receiving element in FIG. 14) formed on the subcarrier 31 and the optical element (light receiving element in FIG. 14) formed on the subcarrier 141 are set according to the design of the optical module. That's fine. For example, various combinations of the optical element of the subcarrier 31 and the optical element of the subcarrier 141, such as the light receiving element and the light receiving element, the light receiving element and the light emitting element, the light emitting element and the light receiving element, and the light emitting element and the light emitting element shown in FIG. Various combinations can be applied.

  In FIG. 14, two subcarriers are arranged in series. However, the number of subcarriers is not limited to this, and two or more subcarriers can be arranged in series according to the design.

In this embodiment, not only a plurality of subcarriers are arranged in series, but also a plurality of subcarriers can be arranged in parallel. FIG. 15 is a perspective view of an optical module according to the present embodiment, in which two subcarriers are arranged in parallel.
In FIG. 15, in the optical module described with reference to FIG. 10, the subcarrier 151 is arranged in parallel with the first subcarrier 31. The subcarrier 151 has the same configuration as the subcarrier 31.

In FIG. 15, the optical waveguide 103 has a waveguide core 152 embedded in the cladding 104 in addition to the waveguide core 105. Therefore, the waveguide core 105 is coupled to the subcarrier 31, and the waveguide core 152 is coupled to the subcarrier 151.
Even when such subcarriers are arranged in parallel, the optical elements formed on the respective subcarriers may be selected according to the design.

FIG. 16 is a perspective view of an optical transceiver using three subcarriers according to the present embodiment.
In FIG. 16, a V-groove 162 for placing an optical fiber is formed in a substrate 161 such as silicon, and an optical fiber 163 is placed in the V-groove 162. The optical fiber 163 is fixed to the V-groove 162 by a member 164 for fixing the optical fiber. In addition, the substrate 161 has a recess 165 for disposing the subcarrier. Subcarriers 166a to 166c each having a parabolic portion according to the present embodiment are mounted in the recess 165.

  The parabolic portion 169a of the subcarrier 166a is formed with a reflective film 170a that reflects light having a wavelength in the 1.55 μm band and transmits light having other wavelengths. In addition, the parabolic portion 169b of the subcarrier 166b is formed with a reflective film 170b that reflects light having a wavelength of 1.31 μm band and transmits light having other wavelengths. Further, the parabolic portion 169c of the subcarrier 166c is formed with a reflective film 170c that reflects light having a wavelength of 1.49 μm band and transmits light having other wavelengths.

  In FIG. 16, a 1.55 μm receiving light receiving element 167a is formed on the upper surface of the subcarrier 166a, in which a 1.55 μm light receiving portion 168a is disposed on the upper surface side of the subcarrier 166a. Further, on the upper surface of the subcarrier 166b, a 1.31 μm transmission light emitting element 167b in which a 1.31 μm light emitting portion 168b is disposed on the upper surface side of the subcarrier 166b is formed. Further, on the upper surface of the subcarrier 166c, a 1.49 μm receiving light receiving element 167c is formed in which a 1.49 μm light receiving portion 168c is disposed on the upper surface side of the subcarrier 166c.

  In such a configuration, light obtained by multiplexing light in the 1.49 μm band and 1.55 μm band enters the subcarrier 166a from the optical fiber 163. At this time, in the subcarrier 166a, the light in the 1.55 μm band out of the multiplexed light incident on the parabola 169a is reflected by the reflection film 170a and collected on the light receiving element 167a. The light that has not been reflected by the reflective film 170a enters the subcarrier 166b. Since most of this light is in the 1.49 μm band, reflection hardly occurs at the reflective film 170b, and the light is transmitted as it is and enters the subcarrier 170c. At this time, in the subcarrier 166c, the light in the 1.49 μm band out of the light incident on the parabola 169c is reflected by the reflection film 170c and collected on the light receiving element 167c.

  On the other hand, the 1.31 μm band light emitted from the light emitting element 167b is incident on the parabolic portion 169b, reflected by the reflective film 170b, and collected on the end face of the optical fiber 163.

  In FIG. 16, as long as the light emitted from the subcarrier 166a is incident on the parabolic portion 169b of the subcarrier 166b and the light emitted from the subcarrier 166b is incident on the parabolic portion 169c of the subcarrier 166c. Even without performing other advanced mounting control, the optical element formed on each subcarrier and the light wave transmission unit (optical fiber in FIG. 16) can be well coupled.

(Fifth embodiment)
By using the parabola part according to the present invention described above, the desired connection between the desired member and the desired member without requiring a complicated process can be applied to the connection between the light wave transmission part and the light wave transmission part.
FIG. 17 is a diagram illustrating a state in which optical waveguides having different heights according to the present embodiment are coupled by an optical component having a parabolic portion.

  In FIG. 17, a step 172 for forming an optical waveguide 174 as a light wave transmitting portion is formed on a substrate 171 such as silicon. An optical waveguide 174 having a clad 175 and a waveguide core 176 embedded in the clad 175 is formed on the step 172. Further, the substrate 171 is further provided with a step 173 for forming an optical waveguide 177 as a light wave transmission portion. An optical waveguide 177 having a clad 178 and a waveguide core 179 embedded in the clad 178 is formed on the step 173. The height of the step 173 is higher than the height of the step 172. That is, the optical waveguide 177 is formed at a position higher than the optical waveguide 174. A substantially rectangular parallelepiped optical component 180 made of a material such as resin is mounted between the step 172 and the step 173 on the substrate 171.

  The optical component 180 is disposed so that the surface 183 of the optical component faces the end surface of the waveguide core 176. For each surface of the optical component 180, at least one of the surfaces excluding the surface 184 on which the optical component 185 is formed among the surfaces facing the surface 183 on which the light emitted from the optical waveguide 174 is incident and the surfaces adjacent thereto. The parabolic portion is formed such that the incident light is collected on the surface on which the optical component 185 is formed, and the parabolic portion 181 is formed. A reflective film 182 is formed on the surface of the parabolic portion 181. Note that the height of the parabolic portion 181 and the height of the waveguide core 176 are set so that light emitted from the waveguide core 176 can enter the parabolic portion 181 when the optical component 180 is mounted on the substrate 171.

  An optical component 185 is formed on the surface 184 of the optical component 180. The optical component 185 is formed with a parabolic portion 181 and a reflective film 182. The surface 186 of the optical component 185 and the end surface of the waveguide core 179 are opposed to each other.

  The material of the optical components 180 and 185 is not limited to the above resin and may be made of glass. The material of the optical components 180 and 185 is preferably made of a material that transmits light of a desired wavelength (the wavelength of light output from the light wave transmission unit to which the optical component is to be coupled).

  In such a configuration, light emitted from the waveguide core 176 enters the parabolic portion 181 of the optical component 180, is reflected by the reflective film 182, and is collected on the surface 184. The light condensed on the surface 184 enters the optical component 185. The light incident on the optical component 185 is incident on the parabolic portion 181 of the optical component 185, reflected by the reflective film 182 of the optical component 185, and incident on the end face of the waveguide core 179.

  As described above, also in this embodiment, the same effects as those in the first to fourth embodiments can be obtained. That is, the light wave transmission unit and the light wave transmission unit can be well coupled without performing a complicated process.

  In FIG. 17, the surface 186 of the optical component 185 (the surface coupled to the waveguide core 179) is directed in the direction opposite to the surface 183 of the optical component, but the present invention is not limited to this. In the present embodiment, it is important to connect each optical component so that the surfaces where the parabolic portion is not formed and which is not the surface where light is input and output are in contact with each other in the present embodiment. The surface on which light is input and output may be in any direction. For example, as shown in FIG. 18, the surface 183 that is the light input / output surface of the optical component 180 and the surface 186 that is the light input / output surface of the optical component 185 may be directed in the same direction.

(Sixth embodiment)
In this embodiment, optical elements such as light receiving elements and light emitting elements provided on the subcarrier are sealed with a sealing structure such as a cap. FIGS. 19A and 19B are diagrams showing a structure in which a cap 190 is put on the light receiving element 34 of the subcarrier according to the embodiment of the present invention described in FIG.

  19A and 19B, the surface of the subcarrier 31 on which the light receiving element 34 is formed is made of glass so as to cover the light receiving element 34 as a means for protecting the light receiving element 34 from moisture. A cap 190 is formed. Thus, since the light receiving element 34 is sealed by the cap 190, it is possible to protect the light receiving element from moisture or the like and to ensure reliability as an optical element.

  In the present embodiment, the material constituting the cap 190 is glass, but the material is not limited to this. For example, Si or the like can be used as long as it does not allow moisture to pass through or can suppress the amount of moisture passing therethrough. Any material may be used.

  That is, the purpose of using the cap in the present embodiment is to protect the optical element from a predetermined factor (in the above case, moisture), and therefore, the material of the cap may be selected according to the predetermined factor whose influence is to be reduced. . For example, when it is desired to protect the light receiving element 34 from ultraviolet rays, a material that absorbs or reflects ultraviolet rays may be selected as the material of the cap 190.

(Seventh embodiment)
In the present embodiment, of the incident surface of the incident light from the light wave transmission unit of the subcarrier, at least a region where the incident light is incident is inclined with respect to the incident surface. 20A and 20B are views showing a structure in which an inclined surface 200 is formed on the surface 38 of the subcarrier according to the embodiment of the present invention described in FIG.

  In the present specification, “inclined surface” refers to a surface in which at least a predetermined region of one surface of an optical component such as a subcarrier is inclined. For example, in FIG. 20B, a surface inclined by an angle θ with respect to the virtual surface 201 that is the same surface as the surface 38 becomes the inclined surface 200.

  In FIGS. 20A and 20B, an inclined surface 200 is formed on the surface 38 of the subcarrier 31 at least in a region where incident light from a light wave transmission unit (not shown) is incident. In this way, by forming the inclined surface 200 on the surface 38 that is the incident surface of the subcarrier 31, incident light is incident at a predetermined angle with respect to the normal direction of the inclined surface 200. Therefore, it is possible to prevent or reduce the light incident from the light wave transmission unit from being reflected by the surface 38 of the subcarrier 31.

  In this embodiment, instead of forming the inclined surface 200 on the surface 38 in order to prevent reflection of incident light on the subcarrier or reduce reflection, the end surface of the light wave transmission unit may be an inclined end surface. You may combine the surface 200 and the said diagonal end surface.

  In the present specification, “(forming an optical element, an optical waveguide, etc.)” includes forming an optical element, an optical waveguide, etc. on a substrate by a semiconductor process. It also includes disposing an element or an optical waveguide on a substrate. That is, as a result, the optical element and the optical waveguide are present on the substrate.

It is a perspective view which shows the conventional optical module. It is the sectional view on the AA 'line of FIG. (A) is the perspective view of the subcarrier based on one Embodiment of this invention, (b) is the side view which looked at the subcarrier of (a) from the arrow direction P. (A) is a perspective view which shows a mode that the shift | offset | difference of the optical axis in the horizontal direction which concerns on one Embodiment of this invention is shown, (b) is opposite to the entrance plane of the subcarrier of (a). It is a side view of a subcarrier seen from the surface side to perform. It is a figure which shows a mode that the shift | offset | difference of the optical axis in the height direction based on one Embodiment of this invention is correct | amended. It is sectional drawing of the optical module which mounted the subcarrier based on one Embodiment of this invention in the board | substrate with which the lightwave transmission part was formed. (A) is the perspective view of the subcarrier based on one Embodiment of this invention, (b) is the side view which looked at the subcarrier of (a) from the arrow direction Q. (A) is a perspective view of a subcarrier according to an embodiment of the present invention, (b) is a top view of the subcarrier shown in (a), and (c) is shown in (a). It is the side view seen from the arrow direction R of the shown subcarrier. (A) is a perspective view of a subcarrier according to an embodiment of the present invention, (b) is a top view of the subcarrier shown in (a), and (c) is shown in (a). It is the side view seen from the arrow direction R of the shown subcarrier. It is a perspective view of the optical module which mounted the subcarrier based on one Embodiment of this invention. It is a perspective view of the optical module which mounted the subcarrier based on one Embodiment of this invention. It is a perspective view of the optical module which mounted the subcarrier based on one Embodiment of this invention. It is the side view which looked at the optical module of FIG. 12 from the arrow direction S. It is a perspective view of the optical module which mounted the subcarrier based on one Embodiment of this invention. It is a perspective view of the optical module which mounted the subcarrier based on one Embodiment of this invention. It is a perspective view of the optical module which mounted the subcarrier based on one Embodiment of this invention. It is a figure which shows a mode that the optical waveguide from which height differs based on one Embodiment of this invention is couple | bonded by the optical component which has a parabolic part. It is a figure which shows a mode that the optical waveguide from which height differs based on one Embodiment of this invention is couple | bonded by the optical component which has a parabolic part. (A) is the perspective view of the subcarrier which has a cap based on one Embodiment of this invention, (b) is the side view which looked at the subcarrier of (a) from the arrow direction P. (A) is a perspective view of the subcarrier in which the inclined surface based on one Embodiment of this invention was formed, (b) is a top view of the subcarrier shown to (a).

Explanation of symbols

31, 81 Subcarrier 32 Wiring 33, 82 Marker 34, 83 Light receiving element 35, 84 Light receiving part 36, 61, 87, 90 Parabolic part 37, 62, 88, 91 Reflecting film 38, 63, 85 Surface 86 Opening 89 Cavity

Claims (11)

It is made of a material that is transparent to light waves in a desired wavelength band, and is a substantially rectangular parallelepiped optical component,
A first surface of the optical component coupled to a light wave transmission unit;
A third surface of the optical component which is a surface other than the first surface and the second surface of the optical component facing the first surface, on which a desired member is formed;
For each surface of the optical component, a parabolic parabolic portion formed on at least a part of the surface other than the third surface, the light emitted from the light wave transmitting unit, A parabolic unit that collects incident light incident from a surface on a predetermined region of the third surface;
The optical component, wherein the incident light is incident on the parabolic portion. It is made of a material that is transparent to light waves in a desired wavelength band, and is a substantially rectangular parallelepiped optical component,
A first surface of the optical component coupled to a light wave transmission unit;
A third surface of the optical component which is a surface other than the first surface and the second surface of the optical component facing the first surface, on which a desired member is formed;
At least both of a first region including at least a region where light emitted from the light wave transmission unit is incident on the first surface and a second region including at least a predetermined region on the third surface. Including an opening formed in the optical component;
About the wall surface of the opening formed inside the optical component, a parabola-shaped parabola part formed on at least a part of a wall surface facing the first surface and a wall surface adjacent to the wall surface, A parabolic unit that collects incident light incident from the first surface on the predetermined region of the third surface, which is light emitted from the light wave transmission unit;
The optical component, wherein the incident light is incident on the parabolic portion. It is made of a material that is transparent to light waves in a desired wavelength band, and is a substantially rectangular parallelepiped optical component,
A first surface of the optical component coupled to a light wave transmission unit;
A third surface of the optical component which is a surface other than the first surface and the second surface of the optical component facing the first surface, on which a desired member is formed;
A cavity connecting the first region of the first surface including at least a region into which light emitted from the light wave transmission unit is incident, and a second region including at least a predetermined region of the third region; ,
A parabolic parabolic portion formed inside the optical component, in the cavity,
A parabolic unit that is a light emitted from the light wave transmission unit and collects incident light incident from the first surface on the predetermined region of the third surface;
The optical component, wherein the incident light is incident on the parabolic portion.   The optical component according to any one of claims 1 to 3, further comprising a reflection film formed on the parabolic portion and including a material that reflects at least the incident light.   The optical component according to claim 4, wherein the material is a material that transmits light of a predetermined wavelength in addition to reflecting the incident light.   6. The optical component according to claim 4, wherein the material is a dielectric multilayer film.   The optical component according to claim 1, wherein the desired member formed on the third surface is an optical element. The desired member formed on the third surface is the other optical component,
The optical component according to claim 1, wherein the third surface is in contact with the third surface of the other optical component. A substrate on which a lightwave transmission part is formed;
The optical component according to any one of claims 1 to 8, mounted on the substrate,
The light emitted from the light wave transmission unit is incident from the first surface of the optical component, and the incident light is incident on the parabolic unit. The optical component is a plurality,
The optical module according to claim 9, wherein the plurality of optical components are arranged in series or in parallel. The optical module according to claim 9, further comprising an optical element formed on the second surface side of the optical component on the substrate.

Images