JP2007046632A - Vibration isolating base device and vibration isolating system using it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an inexpensive vibration isolating base device with a simple mechanism, which has an excellent vibration diminishing effect and restricts excessive movement in a horizontal direction, and also provide a vibration isolating system using it. <P>SOLUTION: The vibration isolating base device is provided with: a vibration isolating base main body 10; and four leveling valves 100 respectively provided at positions substantially evenly divided by 90 degrees at a side face side of the vibration isolating base main body. Displacement in the horizontal direction of the vibration isolating base main body is detected by the leveling valves provided at the side face side of the vibration isolating base main body, and the movement in the horizontal direction is controlled by changing inner pressure of a fluid spring body in the horizontal direction to correct displacement in the horizontal direction according to the detected displacement data. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an anti-vibration table apparatus that is laid directly or indirectly on an object to be anti-vibrated and regulates the anti-vibration object and excessive movement in the horizontal direction, and an anti-vibration system using the same. .

  In particular, an anti-vibration table apparatus that can easily prevent horizontal movement caused by buckling of a fluid spring, etc., by an objective base of a medium / low-precision fluid spring type vibration isolation table used for pattern recognition and line inspection And a vibration isolation system using the same.

  2. Description of the Related Art Conventionally, for example, when making a memory or IC in a semiconductor manufacturing apparatus, a stepper provided with a printing apparatus to which a photographic technique is applied is used when forming a circuit on a wafer substrate. In actual use of the stepper, it is necessary to move the wafer substrate and the baking apparatus to a predetermined position quickly and accurately in order to increase the production efficiency.

  However, the more agile moving and stopping is, the more inevitably the stepper has the problem of vibration. In particular, in today's specifications where high integration of ICs is required, even if micro-vibration is not completely removed, circuit lines may be doubled or shorted (circuit doubles). ) Occurs. In order to solve such problems, various proposals have been made for a vibration isolation table device that removes fine vibrations of a stepper.

  For example, in order to remove a slight vibration from the floor in a precision instrument and maintain a fixed position, the vibration isolator apparatus has conventionally been provided with various fluid spring units (mainly fluid springs) in order to exert a vibration isolation function. The use of is proposed. More specifically, a vibration isolator using a diaphragm type, rolling diaphragm type, or bellows type fluid spring is used (for example, JP-A-10-205578).

  However, when a diaphragm type fluid spring is used as a vertical spring, there is a problem that a soft spring is formed in the vertical direction but a hard spring is formed in the horizontal direction.

  On the other hand, the bellows type fluid spring has relatively soft spring characteristics in the horizontal and vertical directions. However, this type of delicate spring characteristics (especially in the horizontal direction) are required. It is difficult to take a sufficiently satisfactory response. That is, in order to make the spring much softer in the horizontal direction, if the film rigidity is lowered or the film part is enlarged, there is a problem that positioning is not possible due to lack of stability. In other words, the bellows type fluid spring is easily buckled, and the base (objective stand) placed on the vibration isolation table having such a mechanism is easy to move in the horizontal direction. If the limit is exceeded, there is a risk of deviating from the control range in the horizontal direction.

  In order to solve such problems, Japanese Patent Application Laid-Open No. 8-4829 discloses a control device incorporating a displacement sensor, a calculation device, a pressure reducing valve, etc. in a high-accuracy vibration isolation table used for a stepper or an electron microscope. Proposals have been made for new techniques for performing feedback control using the.

However, the control method proposed in this publication is extremely complicated and very expensive.
Japanese Patent Laid-Open No. 10-205578 JP-A-8-4829

  The present invention was devised under such circumstances, and its purpose is a simple mechanism and an inexpensive device, which has an excellent vibration isolation effect and restricts excessive movement in the horizontal direction. An object of the present invention is to provide an anti-vibration table apparatus and an anti-vibration system using the same.

  In order to solve such a problem, the present invention is an anti-vibration table apparatus that is directly or indirectly laid on a vibration isolation object and restricts the vibration isolation object from moving in the horizontal direction. The anti-vibration table apparatus includes an anti-vibration table main body and four leveling valves respectively arranged at positions substantially equally divided by 90 degrees on the side surface side of the anti-vibration table main body. The vibration isolation base body includes a ceiling plate that directly or indirectly contacts a vibration isolation object, a hanging plate that hangs down from a peripheral edge of the ceiling plate, and a base portion that covers the ceiling plate and the hanging plate. A vertical fluid spring body is interposed between the inner surface of the ceiling plate and the base portion, and between the inner surface of the hanging plate and the base portion, the four leveling valves are provided. Four horizontal fluid spring bodies substantially equally divided by 90 degrees according to the arrangement position The horizontal displacement amount of the vibration isolation base body is detected by a leveling valve disposed on the side surface side of the vibration isolation base body, and the horizontal displacement amount is determined based on the detected displacement amount data. The movement in the horizontal direction is controlled by changing the internal pressure of the horizontal fluid spring body to be corrected.

  Further, as a preferred aspect of the present invention, the vertical fluid spring body interposed between the inner surface of the ceiling plate and the base portion is arranged mainly to support a load in the vertical direction, The horizontal fluid spring body interposed between the side surface and the base portion is configured to be arranged so as to mainly support a load in the horizontal direction.

  Moreover, as a preferable aspect of the present invention, the ceiling plate and the hanging plate are integrated to have a function as a floating portion, and the base portion has a function as a fixing portion.

  Further, as a preferred embodiment of the present invention, a substantially rectangular column body is formed by a hanging plate that hangs down from the peripheral edge of the ceiling plate, and a leveling valve in a substantially vertical direction with respect to the hanging plate constituting the substantially rectangular column body. It is comprised so that the detection site | part for detecting the displacement amount of may contact | abut.

  As a preferred aspect of the present invention, the internal space of the horizontal fluid spring body is communicated with an external pressure source so that a desired working fluid can enter and exit in conjunction with the leveling valve, and is detected by the leveling valve. It is configured to be controlled to a predetermined pressure according to the horizontal displacement amount.

  As a preferred aspect of the present invention, the vertical fluid spring body is a bellows, a rolling diaphragm, or a diaphragm, and the horizontal fluid spring body is a bellows, a rolling diaphragm, or a diaphragm.

  As a preferred aspect of the present invention, the vertical fluid spring body is a bellows or a rolling diaphragm, and the horizontal fluid spring body is a bellows.

  The vibration isolation system of the present invention is configured such that a plurality of the vibration isolation table devices described above are arranged on a plane, and a base is directly or indirectly mounted thereon.

  A semiconductor manufacturing apparatus according to the present invention includes a plurality of the above-described vibration isolation table devices arranged on a plane, and a base on which a substrate to be exposed is placed directly or indirectly. It is comprised so that it may become.

  The liquid crystal exposure apparatus of the present invention has a plurality of vibration isolation table devices described above arranged on a plane, and a base on which a substrate to be exposed is placed directly or indirectly. It is comprised so that it may become.

  In the vibration isolation system of the present invention, three of the vibration isolation table devices described above are arranged in a triangle by plane observation, and the surface of the hanging plate of each vibration isolation table device is along the X axis-Y axis direction by plane observation. It arrange | positions so that it may align, and it is comprised so that a base may be mounted directly or indirectly on this.

  In the semiconductor manufacturing apparatus of the present invention, three of the vibration isolation table devices described above are arranged in a triangle by planar observation, and the surface of the hanging plate of each vibration isolation table device is along the X axis-Y axis direction by plane observation. Arranged so as to be aligned, a base for placing a substrate to be exposed directly or indirectly is placed thereon.

  In the liquid crystal exposure apparatus of the present invention, three of the above-described vibration isolation table devices are arranged in a triangle by plane observation, and the surface of the hanging plate of each vibration isolation table device is along the X axis-Y axis direction by plane observation. Arranged so as to be aligned, a base for placing a substrate to be exposed directly or indirectly is placed thereon.

  An anti-vibration table apparatus of the present invention includes an anti-vibration table main body and four leveling valves respectively disposed at positions substantially equally divided by 90 degrees on the side surface side of the anti-vibration table main body. A horizontal fluid spring body is used to detect the amount of horizontal displacement of the vibration isolation table body by a leveling valve disposed on the side surface of the table body and to correct the amount of horizontal displacement based on the detected displacement amount data. Because it is configured to control the movement in the horizontal direction by changing the internal pressure, it is a simple mechanism and an inexpensive device that has excellent vibration isolation effects and regulates the movement in the horizontal direction For example, occurrence of problems such as buckling due to excessive movement in the horizontal direction can be prevented in advance.

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to FIGS.

  FIG. 1 is a front view of an anti-vibration table apparatus of the present invention having an anti-vibration table main body and four leveling valves, the right half piece showing a cross-sectional state of the anti-vibration table main body, and the left half piece. These are drawings in which members on the outer periphery are cut out as necessary so that the main part of the vibration isolation base body appears. However, the description of the leveling valves on the near side of the page and on the far side of the page is omitted.

  FIG. 2 is a plan view (a vibration isolation system diagram) showing a state in which three vibration isolation table devices (vibration isolation table main bodies) of FIG. FIG. 3 is a view corresponding to the front view of FIG. 2, in which a state where the base is placed is shown above the arranged vibration isolation table device and below the vibration isolation table device. Indicates a mounting table (the mounting table is not described in other related drawings). The description of the leveling valve is omitted. FIG. 4 is a front view showing a state in which the vibration isolation base body and the leveling valve disposed on the side surface side of the vibration isolation base body are combined as a system (however, the front side of the paper and the back side of the paper) The leveling valve is not shown in the table). FIG. 5 is a front view for explaining the leveling valve.

  Hereinafter, first, the configuration of the vibration isolation device 1 will be described in detail.

(Description of the vibration isolation device 1)
The anti-vibration table apparatus 1 of the present invention is directly or indirectly laid on an object to be anti-vibrated, and (1) an anti-vibration action on the anti-vibration object and (2) an action that restricts excessive movement in the horizontal direction. That is, it has a function to express two actions.

  In particular, when the specification setting is made to reduce the natural frequency of the fluid spring so as to enhance the vibration isolation function of the vibration isolation table device, so-called buckling is likely to occur because it is easy to move in the horizontal direction. The function of the latter (2) is a function that prevents such buckling and restricts horizontal movement so as not to deviate from the horizontal control range.

  As shown in FIG. 1, the vibration isolation table device 1 according to the present invention is disposed at a position substantially equally divided by 90 degrees on the side surface side of the vibration isolation table main body 10 and the vibration isolation table main body 10. And two leveling valves 100. However, as described above, the description of the leveling valves on the near side of the sheet and on the far side of the sheet is omitted.

  Such an anti-vibration table apparatus 1 is laid directly or indirectly under the base 4 on which an object to be anti-vibrated is placed as shown in FIGS. 1 and 3, for example. For example, as shown in FIG. 2, three or more vibration isolation table devices 1 are usually used in consideration of the stability of placement, and are appropriately arranged at suitable positions.

  The four leveling valves 100 are leveling valves arranged at the left position, the front position, the right position, and the rear position in the plan view of FIG. 2 so that the control method for each valve described later can be easily understood. On the other hand, the subscripts L, F, R, and B are distinguished for convenience. Similarly, in order to facilitate understanding of the control method for each valve, which will be described later, the vibration isolation base body 10 disposed at the lower left position, the lower right position, and the rear center position in FIG. , CH2, and CH3.

  As shown in FIG. 1, the anti-vibration table main body 10 is directly or indirectly in contact with an object to be anti-vibrated, for example, a substantially square ceiling plate 11 and hangs down from the four corners of the ceiling plate 11, for example, A drooping plate 20 having a substantially square shape, and a base portion 30 that covers the ceiling plate 11 and the drooping plate 20 are provided. As shown in FIG. 1, a rubber bellows 70 with cloth, which is a preferred example of a vertical fluid spring body, is interposed between the inner surface of the ceiling plate 11 and the base portion 30. The rubber bellows 70 with cloth is arranged so as to support a load in the vertical direction.

  The rubber bellows 70 with cloth preferably has a multi-stage structure of 2 to 5 stages, particularly 2 to 4 stages, and more preferably 2 to 3 stages (a 3-stage bellows structure is shown in the drawing). . When the bellows structure is less than two stages, the spring constant in the lateral direction (XY direction in FIG. 2) increases, and there is a tendency that the natural frequency in the lateral direction of the vibration isolation table device increases. Further, if the number of steps exceeds 5 and becomes too large, there is a tendency that inconvenience that buckling easily occurs very easily.

  The rubber bellows 70 with a cloth used in the present invention is formed by, for example, pressing a cloth (preferably a cloth pre-formed into a predetermined shape) formed of a polyester into a semi-vulcanized rubber molded body on the surface of the rubber molded body. It can be manufactured by embedding and then vulcanizing. The thickness of the rubber bellows 70 with such cloth is 0.15 to 1.8 mm, preferably 0.4 to 1.5 mm. If this value exceeds 1.8 mm, the rigidity of the film increases and the hysteresis tends to increase. And the internal stress of the film | membrane which generate | occur | produces by repeated bending becomes large, and there exists a tendency for the problem that durability falls. Moreover, when this value is less than 0.15 mm, the base fabric (cloth) to be used becomes thin, so that (1) pressure resistance is lost, (2) the proportion of the base fabric thickness in the film thickness increases, so (3) It tends to be broken when it comes into contact with the projection, resulting in a problem that the durability is poor.

  By interposing such a cloth-filled rubber bellows 70 between the inner surface of the ceiling plate 11 and the base portion 30 as described above, a load in the vertical direction can be applied, and vibration isolation in the vertical direction is mainly performed. An effect can be expressed. By using such a rubber bellows 70 with cloth, the entire apparatus can be reduced in size.

  As shown in FIG. 1, the rubber bellows 70 with a substantially disc-shaped cloth is provided on the inner surface of the ceiling plate 11 via the first fixing members 75a and 75b and the second fixing members 76a and 76b. And the base portion 30. The working space S <b> 1 inside the cloth-filled rubber bellows 70 communicates with a fluid chamber 35 formed inside the base portion 30. By providing such a fluid chamber 35, the internal volume can be increased, and the spring constant and the natural frequency can be reduced. The fluid chamber 35 is not limited to the formation inside the apparatus. It can also be installed separately in communication with the outside of the apparatus.

  A so-called rolling diaphragm or diaphragm may be used instead of the rubber bellows 70 with cloth. A rolling diaphragm is a diaphragm having a function of a working membrane (rolling working membrane). For example, a rolling diaphragm can be moved by rolling between a cylinder portion and a piston portion. Load is supported. The rolling operation membrane is a so-called `` diaphragm '' with a bottomed, generally cylindrical shape, which has a long stroke and deep convolution due to folding, and its effective pressure receiving area remains constant during operation. It is a substantially cylindrical diaphragm that is maintained. That is, the working membrane has a folded portion, and when pressure is applied to the rolling working membrane surface, most of the membrane surface is pressed against the cylinder wall and the piston wall, and the remaining folded bottom portion is maintained in a pressure balance by tensile stress due to pressure. It is like that.

  As shown in FIG. 1, a cloth-filled rubber bellows 80 is interposed between the inner side surface of the hanging plate 20 and the base portion 30 as a preferred example of the horizontal fluid spring body. This cloth-filled rubber bellows 80 has the same structure as the cloth-filled rubber bellows 70 described above, and is arranged to support a load in the horizontal direction.

  This cloth-filled rubber bellows 80 can receive a load in the horizontal direction, and can mainly exhibit a horizontal vibration isolation effect. It can also contribute to the miniaturization of the entire apparatus. Such a substantially bell-shaped cloth-filled rubber bellows 80, as shown in FIG. 1, is provided on the inside of the hanging plate 20 via the first fixing members 85a and 85b and the second fixing members 86a and 86b. It is fixed to the side surface and the base part 30, respectively. The working space S <b> 2 inside the rubber bellows 80 with cloth is communicated with the fluid chamber 36 through a vent hole 31 opened in the base portion 30. By providing such a fluid chamber 36, the internal volume can be increased, and the spring constant and the natural frequency can be reduced.

  In addition, the working space S2 inside the cloth-filled rubber bellows 80 in the present invention is not clearly shown in the drawing. However, as will be described later, a desired working fluid can enter and exit in conjunction with the leveling valve 100. Communicated with an external pressure source. This configuration is particularly important. And it is controlled to a predetermined pressure according to the amount of horizontal displacement detected by the leveling valve. This will be described in detail later.

  The thickness, the number of steps, and the manufacturing method of the cloth-filled rubber bellows 80 may be the same as those described for the cloth-filled rubber bellows 70. Further, a so-called rolling diaphragm or diaphragm can be used in place of the rubber bellows 80 with cloth.

  Further, in the embodiment of the present invention, four hanging plates 20 are suspended from the peripheral edge of the ceiling plate 11, and a cloth-filled rubber is provided between the inner surface of each hanging plate 20 and the base portion 30. The bellows 80 made from each are interposed. The rubber bellows 80 with cloth disposed on the side surface of one vibration isolation table device has a left side of the plan view in FIG. 2 so that the control method for each valve described later can be easily understood. L, F, R, and B subscripts are attached for convenience to leveling valves arranged at the forward position, the forward position, the rightward position, and the rearward position, respectively.

  In the vibration isolation table device 1 according to the present invention, as described above, the four leveling valves 100 are arranged at positions substantially equally divided by 90 degrees on the side surface side of the vibration isolation table main body 10 (see FIG. 2). That is, in the embodiment of the present invention, the hanging plate 20 that hangs down from the periphery of the ceiling plate 11 is formed in, for example, a substantially square shape, and the hanging plate 20 that hangs down forms a substantially rectangular column. . And it is comprised so that the detection site | part 101 for detecting the displacement amount of a leveling valve may contact | abut in the substantially perpendicular direction with respect to the drooping board which comprises this substantially square pillar (refer FIG. 1). The expression “substantially divided by 90 degrees equally” in the present invention does not require 90 degrees in a strict sense, but in a range where the effects of the present invention can be expressed. This is to the extent that angular deviation is acceptable. Further, the hanging plate 20 is not limited to a rectangular shape, and various forms can be adopted. Moreover, you may form a notch part etc. partially.

  Next, the structure and operation of the leveling valve 100 used in the present invention will be briefly described with reference to FIG.

  As shown in FIG. 5, the leveling valve 100 according to the present invention performs pressure control for leveling adjustment, and includes a valve body 110 including a main shaft operating bar 112 serving as a substantial action point (action point portion 191). An arm 190 having a fulcrum part 180 and a force point part 195 is provided so as to be attached to the valve main body 110 and to substantially move the main shaft operating bar 112 in the axial direction. Reference numeral 101 denotes the detection portion 101 that comes into contact with the hanging plate 20 as described above.

  In the arrangement relationship between FIG. 1 and FIG. 5, the arrangement valve body 110 is a vibration isolation base body so that the direction of the main axis α shown in FIG. 5 is the substantially horizontal direction in FIG. 1 (the horizontal axis direction in the drawing). 10 are arranged. Here, the term “substantially horizontal” means that the horizontal has an allowable range including the entire range in which the functions and effects of the present invention can be exhibited. Further, the structure and operation of the valve body 110 will be described in detail with reference to FIGS.

(Description of the configuration of the valve body 110)
6 to 8 are sectional views showing the inside of the valve main body 110 of the leveling valve 100, and are drawings for explaining the operation.

  The valve body 110 shown in FIG. 6 is depicted in a state where the leveling valve 100 located on the left side shown in FIG. 1 is turned 90 degrees to the right, and the vertical direction of FIG. 6 corresponds to the horizontal direction of FIG. is doing.

  As shown in FIG. 6, the valve main body 110 has a main shaft operating bar 112, an exhaust valve mechanism portion, and a main valve mechanism portion that are arranged in the main shaft direction.

  The main valve mechanism section includes a main valve section 131 (O-ring in the illustrated example) formed on the valve stem 130, and a main valve seat section 141 (valve seat) formed on the main valve member 140 so as to face the main valve section 131. The valve is opened and closed by the separating operation. That is, the main valve mechanism section is connected to the primary side fluid F1 communicated with the primary side piping port 121 formed in the valve main body 110 and the secondary side communicated with the secondary side piping port 125 formed in the valve main body 110. An on / off action of circulation with the fluid F2 is achieved. The fixing ring 145 that presses and fixes the main valve member 140 from the inside is inserted in a state where a slight gap is formed with the outer surface of the valve stem 130. The secondary fluid F2 communicates with the internal space of the bellows 80 (see FIG. 6).

  The exhaust valve mechanism portion opens and closes by opening / closing the exhaust valve portion 135 having a curved tip formed on the valve rod 130 and the exhaust valve seat portion 114a (valve seat) formed on the exhaust valve member 114. To be done. That is, the exhaust valve mechanism portion circulates between the secondary side fluid F2 communicated with the secondary side piping port 125 formed in the valve body 110 and the external atmosphere F3 leading to the exhaust port 129 formed in the valve body 110. The on-off action is achieved.

In addition, the valve body 110 is formed with an internal space area P that is interposed when the primary side piping port 121 and the secondary side piping port 125 communicate with each other. The internal space area P is also an internal space area P that is interposed when the secondary side piping port 125 and the exhaust port 129 communicate with each other.
As described above, the valve stem 130 having the main valve portion 131 and the exhaust valve portion 135 and the main valve seat portion 141 are provided in the main shaft direction in the middle of communicating the internal space area P and the primary side piping port 121. A main valve member 140 provided is interposed.

  Since the main valve member 140 has a function as a valve seat, the main valve member 140 is in a fixed state, and a form in which a part of the valve stem 130 is inserted into the main valve member 140 is adopted. The valve stem 130 is urged in the main shaft direction (upward direction in the drawing) enabling sealing by a main valve spring 133 engaged with the lower flange 132 thereof.

  In the internal space area P, an exhaust valve member 114 having an exhaust valve seat portion 114a fixed to one end (the lower end in the drawing) of the main shaft operating bar 112 is formed. The exhaust valve member 114 and the spindle operating bar 112 are formed with communication holes through which the intermediate internal space P and the external atmosphere F3 (exhaust port 129) can communicate with each other as illustrated. Further, an exhaust spring 116 that biases the exhaust valve member 114 upward in the drawing is interposed between the exhaust valve member 114 and the main valve member 140 so as to separate the exhaust valve member 114 from the valve rod 130.

  The main shaft operating bar 112 is slidable in the main shaft direction (vertical direction in the drawing), and the extension line of the other end (upper portion) of the main shaft operating bar 112 is substantially the same as the operating point portion 191. The position is in contact with the arm 190.

  The primary side fluid F1 communicated with the primary side piping port 121 of the valve main body 110 is, for example, a fluid supplied via the fluid pressure source 102 and the pressure reducing valve 103 as shown in FIG. Total). On the other hand, the secondary side fluid F2 communicated with the secondary side piping port 125 communicates with the inside of the rubber bellows 80 as described above, and the internal pressure of the rubber bellows 80 is controlled. Yes. The overall configuration of the vibration isolation system will be described later.

  Hereinafter, an example of the operation of the valve body 110 having such a configuration will be described with reference to FIGS.

(Explanation of operation of valve body 110)
As shown in FIG. 6, when the arm 190 is in the neutral position, the main valve portion 131 is pushed upward from the main valve spring 133 and closed. Therefore, there is no fluid flow from the primary side fluid F1 to the secondary side fluid F2 via the internal space area P.

  At this time, the exhaust valve seat portion 114a (exhaust valve member 114) is pushed upward by the exhaust spring 116 and is not in contact with the exhaust valve portion 135 of the valve stem 130. Therefore, the secondary fluid F2 passes between the exhaust valve portion 135 and the exhaust valve seat portion 114a, and is discharged to the external atmosphere F3 that is the atmosphere via the exhaust port 129. By such an action, the pressure of the secondary fluid F2 decreases.

  Next, as shown in FIG. 7, when the arm 190 is pushed by an external force and the action point portion moves downward, the exhaust valve seat portion 114 a (exhaust valve member 114) is pushed downward and moves together with the spindle operating bar 112. .

  When the exhaust valve seat part 114a moves to a position where it comes into contact with the exhaust valve part 135, the communication between the pressure chamber of the secondary side fluid F2 and the exhaust port 129 is cut off. It is no longer released into an external atmosphere F3. That is, the pressure drop of the secondary fluid F2 stops. The state shown in FIG. 7 (position of the arm 190) showing this state is in a balanced state as a valve, and flows into the secondary side of the fluid, and the external atmosphere F3 that is the atmosphere through the exhaust port 129 of the secondary side fluid F2. There is no release.

  Next, as shown in FIG. 8, when the arm 190 is pushed further downward, the exhaust valve seat portion 114 a (exhaust valve member 114) and the exhaust valve portion 135 are integrated with each other via the main shaft operating bar 112. The bar 130 is moved downward.

  Then, since the main valve seat part 141 and the main valve part 131 that have been in close contact with each other are separated, the pressure chamber of the primary fluid F1 and the pressure chamber of the secondary fluid F2 are slightly spaced from the outer surface of the valve stem 130. The primary side fluid F1 flows into the secondary side fluid F2 and the pressure on the secondary side rises. At this time, since the exhaust valve seat portion 114a and the exhaust valve portion 135 remain integrated and the exhaust valve is in a closed state, the primary fluid F1 is discharged from the exhaust port 129 to the external atmosphere F3 that is the atmosphere. There is nothing.

  When the fluid is thus supplied to the secondary side and the pressure of the secondary side fluid F2 increases, the internal pressure of the rubber bellows 80 (see FIG. 4) communicating with the secondary side fluid F2 acts to increase.

  As shown in FIG. 2 and FIG. 4, the internal pressure of each rubber bellows 80 arranged at the position corresponding to the leveling valve is adjusted and controlled via the leveling valves respectively arranged on the four side surfaces of the vibration isolation base body 10. By doing so, it is possible to prevent the vibration isolation base body from excessively moving in the horizontal direction and causing buckling.

  The leveling valve 100 senses the amount of movement of the vibration isolation base body 10 in the horizontal direction while its detection part is in contact with the hanging plate 20 and, depending on the amount of movement, appropriately applies an operating pressure to the inside of the rubber bellows 80. It acts to supply or reduce fluid. As a vibration isolation object, for example, a base plate (base) such as a liquid crystal exposure apparatus or a semiconductor manufacturing apparatus is exemplified as a suitable example. A schematic overall view of the liquid crystal exposure apparatus is shown in FIG. In FIG. 9, a plate stage 210 and a liquid crystal substrate 211 are disposed on a base 200 (same as a leveling object) that is desired to maintain a horizontal arrangement, and a projection lens system 212, a mask stage 213, a mask 214, And a light source 215 is disposed. In addition, a plurality of vibration isolation table devices of the present invention are arranged at predetermined positions below the base 200.

(Configuration and operation explanation of vibration isolation system using vibration isolation device of the present invention)
A vibration isolation system using the vibration isolation device of the present invention is based on the following requirements.

  That is, (1) the vibration isolation table device has a substantially quadrangular prism shape and is provided with a leveling valve that can detect the horizontal movement of the side surface (the hanging plate) with respect to each side surface (the hanging plate). (2) A horizontal fluid spring body is disposed inside the side surface of the vibration isolation table device, and the horizontal displacement amount of the vibration isolation table main body is detected via the leveling valve. The internal pressure of the horizontal fluid spring body can be changed to correct the amount of horizontal displacement based on the data. (3) A plurality of vibration isolation table devices are arranged on a plane. The surface of the hanging plate of each vibration isolation table device is arranged so as to be aligned along the X-axis-Y-axis direction by plane observation (for example, observation looking downward from above), more preferably vibration isolation. When three base devices are arranged in a triangle by plane observation In addition, the surface of the hanging plate of each vibration isolation table device is arranged so as to be aligned along the X-axis-Y-axis direction in a planar observation, and the base is placed directly or indirectly thereon. .

  An example of a specific control method will be described with respect to the arrangement of the vibration isolation device shown in FIG. In the plan view of FIG. 2, so-called XY axis display and two display methods of east-west-south-north display are shown for the convenience described in Table 1. The Y axis (+) corresponds to the north, the Y axis (−) corresponds to the south, the X axis (+) corresponds to the east, and the X axis (−) corresponds to the west.

As shown in Table 1,
(1) As a correction method when moving too much in the + Y direction, increase the internal pressure of the bellows at the front position F (+) for all the vibration isolation base bodies of CH1 to CH3, respectively. Control the internal pressure to be low (-).

  (2) As a correction method in the case of moving too much in the -Y direction, the internal pressure of the bellows at the rear position B is increased (+) for all the vibration isolation base bodies CH1 to CH3, respectively, and the bellows at the front position F The internal pressure is controlled to be low (−).

  (3) As a correction method when moving too much in the + X direction, the internal pressure of the bellows at the left position L is increased (+) for all the vibration isolation base bodies of CH1 to CH3, respectively. Control the internal pressure of the bellows to be low (-).

  (4) As a correction method when moving too much in the −X direction, the internal pressure of the bellows at the right position R is increased (+) and the left position L for all the vibration isolation base bodies CH1 to CH3. The internal pressure of the bellows is controlled to be low (−).

  (5) As a correction method when moving too far in the northeast direction, increase the internal pressure of the bellows at the left position L and the front position F for all the vibration isolation base bodies of CH1 to CH3 (+), right The internal pressure of the bellows at the side position R and the rear position B is controlled to be lowered (-).

  (6) As a correction method when moving too much in the northwest direction, the internal pressures of the bellows at the right position R and the front position F are increased (+) and left for all the vibration isolation base bodies of CH1 to CH3, respectively. The internal pressure of the bellows at the side position L and the rear position B is controlled to be lowered (−).

  (7) As a correction method when moving too far in the southeast direction, increase the internal pressure of the bellows at the left position L and the rear position B for all the vibration isolation main bodies of CH1 to CH3 (+), right The internal pressure of the bellows at the forward position R and the forward position F is controlled to be low (−).

  (8) As a correction method when moving too far in the southwest direction, increase the internal pressure of the bellows at the right position R and the rear position B for all the vibration isolation base bodies of CH1 to CH3 (+), left The internal pressure of the bellows at the forward position L and the forward position F is controlled to be low (−).

  (9) As a correction method when rotating in the clockwise direction too much, the internal pressure of the bellows at the front position F is increased (+) and the internal pressure of the bellows at the rear position B is lowered for the main body of the vibration isolator of CH1. (-) For the CH2 anti-vibration table main body, increase the internal pressure of the bellows at the rear position B (+) and lower the internal pressure of the bellows at the front position F (-). Control is performed such that the internal pressure of the bellows at the left position L is increased (+) and the internal pressure of the bellows at the right position R is decreased (−).

  (10) As a correction method in the case of excessive rotation in the counterclockwise direction, the internal pressure of the bellows at the rear position B is increased (+) and the internal pressure of the bellows at the front position F is lowered for the main body of the vibration isolator of CH1. (-) For the main body of the vibration isolation table at CH2, increase the internal pressure of the bellows at the front position F (+), and decrease the internal pressure of the bellows at the rear position B (-). The internal pressure of the bellows at the right position R is increased (+), and the internal pressure of the bellows at the left position L is decreased (−).

  As described above in detail, the vibration isolation table apparatus of the present invention includes the vibration isolation table main body and the four leveling units arranged at positions substantially equally divided by 90 degrees on the side surface side of the vibration isolation table main body. And a horizontal displacement amount of the vibration isolation table body is detected by a leveling valve disposed on the side surface side of the vibration isolation table body, and the horizontal displacement amount is determined based on the detected displacement amount data. Since it is configured to control the movement in the horizontal direction by changing the internal pressure of the horizontal fluid spring body to be corrected, it is a simple mechanism and an inexpensive device with excellent vibration isolation effect, The movement in the direction can be restricted, and for example, occurrence of problems such as buckling due to excessive movement in the horizontal direction can be prevented.

  The vibration isolator apparatus of the present invention is a vibration isolator apparatus for suppressing fine vibrations from the floor and self-excited vibrations generated from the apparatus main body in precision instruments and the like, and is used for vibration isolation while using various precision instrument drive devices. Can be widely used in industries that require

FIG. 1 is a front view of an anti-vibration table apparatus of the present invention having an anti-vibration table main body and four leveling valves, the right half piece showing a cross-sectional state of the anti-vibration table main body, and the left half piece. These are drawings in which members on the outer periphery are cut out as necessary so that the main part of the vibration isolation base body appears. FIG. 2 is a plan view (a vibration isolation system diagram) showing a state in which three vibration isolation table devices (vibration isolation table main bodies) of FIG. FIG. 3 is a view corresponding to the front view of FIG. 2, in which a state where the base is placed is shown above the arranged vibration isolation table device and below the vibration isolation table device. Is a mounting table. The description of the leveling valve is omitted. FIG. 4 is a front view showing a state in which the vibration isolation base body and the leveling valve disposed on the side surface side of the vibration isolation base body are combined as a system (however, the front side of the paper and the back side of the paper) The leveling valve is not shown in the table). FIG. 5 is a front view for explaining the leveling valve. FIG. 6 is a cross-sectional view showing the inside of the valve body of the leveling valve, and is a drawing for explaining the operation. FIG. 7 is a cross-sectional view showing the inside of the valve body of the leveling valve, and is a drawing for explaining the operation. FIG. 8 is a cross-sectional view showing the inside of the valve body of the leveling valve, and is a drawing for explaining the operation. FIG. 9 is a schematic overall perspective view of the liquid crystal exposure apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Vibration isolator apparatus 10 ... Vibration isolator main body 11 ... Ceiling board 20 ... Drooping board 30 ... Base part 70 ... Vertical direction fluid spring 80 ... Horizontal direction fluid spring 100 ... Leveling valve 112 ... Main shaft action bar 114 ... Exhaust valve Member 114a ... Exhaust valve seat part 116 ... Exhaust spring 121 ... Primary side pipe port 125 ... Secondary side pipe port 129 ... Exhaust port 130 ... Valve rod 131 ... Main valve part 133 ... Main valve spring 135 ... Exhaust valve part 140 ... Main Valve member 141 ... main valve seat part 180 ... fulcrum part (fulcrum)
190 ... arm 191 ... site of action (point of action)
195 ... Power point part (power point)

Claims (13)

An anti-vibration table device that is laid directly or indirectly on an object to be anti-vibrated, and that regulates the anti-vibration object and the movement in the horizontal direction,
The anti-vibration table device includes an anti-vibration table main body and four leveling valves respectively disposed at positions substantially equally divided by 90 degrees on the side surface side of the anti-vibration table main body,
The vibration isolation base body includes a ceiling plate that directly or indirectly contacts a vibration isolation object, a hanging plate that hangs down from a peripheral edge of the ceiling plate, and a base portion that covers the ceiling plate and the hanging plate. ,
Between the inner surface of the ceiling plate and the base portion, a vertical fluid spring body is interposed,
Between the inner surface of the drooping plate and the base portion, four horizontal fluid spring bodies are disposed that are substantially equally divided by 90 degrees according to the arrangement position of the four leveling valves,
The horizontal displacement amount of the vibration isolation base body is detected by a leveling valve disposed on the side surface side of the vibration isolation base body, and the horizontal displacement amount is corrected based on the detected displacement amount data. An anti-vibration table apparatus characterized by controlling movement in a horizontal direction by changing an internal pressure of a directional fluid spring body. The vertical fluid spring body interposed between the inner surface of the ceiling board and the base is mainly arranged to support a load in the vertical direction,
2. The vibration isolation table device according to claim 1, wherein the horizontal fluid spring body interposed between the inner surface of the hanging plate and the base portion is disposed so as to mainly support a horizontal load.   3. The vibration isolation table device according to claim 1, wherein the ceiling plate and the hanging plate are integrated to have a function as a floating portion, and the base portion has a function as a fixing portion.   A substantially rectangular column body is formed by a hanging plate that hangs down from the peripheral edge of the ceiling plate, and detection for detecting the amount of displacement of the leveling valve in a direction substantially perpendicular to the hanging plate that constitutes the substantially rectangular column body. The vibration isolator apparatus according to any one of claims 1 to 3, wherein the parts are in contact with each other.   The internal space of the horizontal fluid spring body communicates with an external pressure source so that a desired working fluid can enter and exit in conjunction with the leveling valve, and according to the amount of horizontal displacement detected by the leveling valve. The vibration isolation table device according to any one of claims 1 to 4, wherein the vibration isolation table device is controlled to a predetermined pressure. The vertical fluid spring body is a bellows, a rolling diaphragm, or a diaphragm,
The vibration isolator apparatus according to any one of claims 1 to 5, wherein the horizontal fluid spring body is a bellows, a rolling diaphragm, or a diaphragm. The vertical fluid spring body is a bellows or a rolling diaphragm,
The vibration isolator apparatus according to any one of claims 1 to 5, wherein the horizontal fluid spring body is a bellows.   A vibration isolation system in which a plurality of vibration isolation table devices according to any one of claims 1 to 7 are arranged on a plane, and a base is placed directly or indirectly thereon.   A plurality of vibration isolation table devices according to any one of claims 1 to 7 are arranged on a plane, and a base for placing a substrate to be exposed directly or indirectly is placed thereon. A semiconductor manufacturing apparatus.   A plurality of vibration isolation table devices according to any one of claims 1 to 7 are arranged on a plane, and a base for placing a substrate to be exposed directly or indirectly is placed thereon. A liquid crystal exposure apparatus.   5. Three anti-vibration table devices according to claim 4 are arranged in a triangle by plane observation, and are arranged so that the surface of the hanging plate of each anti-vibration table device is aligned along the X-axis / Y-axis direction by plane observation. And a vibration isolation system in which a base is placed directly or indirectly on this.   5. Three anti-vibration table devices according to claim 4 are arranged in a triangle by plane observation, and are arranged so that the surface of the hanging plate of each anti-vibration table device is aligned along the X-axis / Y-axis direction by plane observation. And a base for mounting a substrate to be exposed directly or indirectly on the semiconductor manufacturing apparatus.   5. Three anti-vibration table devices according to claim 4 are arranged in a triangle by plane observation, and are arranged so that the surface of the hanging plate of each anti-vibration table device is aligned along the X-axis / Y-axis direction by plane observation. And a liquid crystal exposure apparatus in which a base for placing a substrate to be exposed directly or indirectly is placed thereon.

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