JP2007041623A5 - - Google Patents

Description

Optical waveguide, optical waveguide array, and laser condensing device

The present invention relates to an optical waveguide that condenses laser light, an optical waveguide array, and a laser condensing device.

FIG. 14 shows an example of a schematic configuration of a conventional semiconductor laser condensing device. Semiconductor laser light (hereinafter referred to as “laser light”) emitted from the light emitting portion 12 of the active layer 14 of the semiconductor laser (laser diode or the like) is substantially elliptical in a plane perpendicular to the traveling direction of the laser light 2. The elliptical laser beam 2 has a major axis direction (fast axis direction) and a minor axis direction (slow axis direction). The ellipse becomes larger as the distance from the light emitting unit 12 becomes longer. Then, a semiconductor laser concentrator that increases the output of the laser light by condensing the laser light emitted from the semiconductor laser array having a plurality of light emitting portions arranged two-dimensionally in the major axis direction and the minor axis direction on the optical fiber. Optical devices are known.
For example, when a semiconductor laser is used as a light source of a laser processing apparatus, it is necessary to increase the output of laser light used for processing. However, the output intensity of laser light emitted from a single light emitting unit is limited. Therefore, the laser light emitted from the plurality of light emitting units is condensed using a lens group or the like to increase the output of the laser light.
As a technique of a conventional semiconductor laser condensing device, for example, in Japanese Patent Laid-Open No. 2000-98191, as shown in FIG. 14, a lens group and an optical fiber 30 are provided. Between them, lenses are arranged in the order of the long-axis direction collimating lens array 70, the long-axis direction condensing lens 80, and the short-axis direction condensing lens array 90 to condense the laser light onto the optical fiber 30 and output the laser light. It is proposed to increase

JP 2000-98191 A

In order to efficiently focus the laser beam emitted from the light emitting unit 12 of the semiconductor laser onto the optical fiber 30 and increase the output of the laser beam, the laser beam from more light emitting units is incident on the thinner optical fiber. The incident light is incident on the incident end face at a smaller incident angle and efficiently incident on the optical fiber without being reflected outside (closer to the incident end face at a right angle). It is necessary to enter at an angle.
Here, the laser light emitted from the light emitting unit 12 travels while spreading in the major axis direction and the minor axis direction. When condensing laser light that travels while spreading, the lens itself is required to have very high accuracy, and the lens arrangement position is also required to have very high accuracy.
In a conventional semiconductor laser condensing device (for example, Japanese Patent Application Laid-Open No. 2000-98191), in the long axis direction where the interval between the light emitting portions is relatively wide, the light is once converted into parallel light and then condensed. In the short axis direction where the interval between the light emitting parts is relatively narrow, the diameter of the lens is very small and it is difficult to arrange the lenses.

In a conventional semiconductor laser condensing device (for example, Japanese Patent Laid-Open No. 2000-98191), as shown in FIG. 14, each light emitting unit 12 (m, n) (m rows and n columns, FIG. 14) of the semiconductor laser array 10 In the example, laser light emitted from 5 rows and 16 columns is passed through the long-axis direction collimating lens array 70, passed through the long-axis direction condenser lens 80, and further passed through the short-axis direction condenser lens array 90. Thus, the light is incident on the optical fiber 30 (s, t) (s rows and t columns, in the example of FIG. 14, 1 row and 8 columns).
In all of the drawings, the coordinate axis is the Z axis as the traveling direction of the laser beam, the X axis as the fast axis direction (long axis direction), and the Y axis as the slow axis direction (short axis direction).
Note that all the drawings include portions described with dimensions different from the actual dimensions in order to facilitate explanation or to facilitate comparison and the like.

FIGS. 15A and 15B show the state of each lens and laser light in the configuration of FIG. 14 (conventional semiconductor laser condensing device). FIG. 15A shows two laser beams emitted from two light emitting units arranged in the minor axis direction and five lasers emitted from five light emitting units arranged in the major axis direction. A total of 10 laser beams of light are condensed on one optical fiber. 15A is a view of FIG. 14 viewed from the X-axis direction (viewed from above), and FIG. 15B is a view of FIG. 14 viewed from the Y-axis direction (viewed from the side). ).
In a commonly used semiconductor laser array, in the minor axis direction, the width of each light emitting portion 12 (Dw in FIG. 15A) is about 0.2 mm, and the distance between the light emitting portion and the light emitting portion (see FIG. Dp) in 15 (A) is about 0.2 mm. Therefore, the width (Din in FIG. 15A) when two light emitting portions adjacent in the minor axis direction are grouped is about 0.6 mm. Further, the divergence angle (θiny in FIG. 15A) in the minor axis direction of the laser light emitted from each light emitting portion is about 3.5 °.
Further, the interval between the light emitting portions adjacent to each other in the major axis direction (Dh in FIG. 15B) is about 1.75 mm, and the thickness of each light emitting portion (Dt in FIG. 15B) is about 0. 002 mm. Further, the divergence angle (θinx in FIG. 15B) in the major axis direction of the laser light emitted from each light emitting portion is about 40 °.

For example, two laser beams are condensed in the short axis direction and five laser beams are condensed in the long axis direction on the optical fiber 30. Further, the light is condensed so that the incident angle in the minor axis direction (θouty in FIG. 15A) is about 10 ° or less (with a smaller incident angle).
In this case, in order to condense most efficiently, in FIG. 15A, the short-axis direction condensing lens array 90 is arranged before the laser beams emitted from the light emitting units 12 adjacent in the short-axis direction overlap. There is a need. In the case of the above numerical values, the position where the laser beams overlap is a position of about 1.6 mm from the light emitting unit 12. In addition, since the divergence angle is large in the long axis direction, it is preferable that the light is parallel light at a position closer to the light emitting unit 12 (when the laser light having a larger width and a larger width is condensed, (Because the incident angle (θoutx) increases). Therefore, the long-axis direction collimating lens array 70 is disposed substantially adjacent to the light emitting unit 12.

  As described above, it is necessary to dispose the long-axis collimating lens array 70 and the short-axis condensing lens array 90 within a distance from the light emitting unit 12 to about 1.6 mm, which is actually very difficult to dispose. is there. 15A and 15B, the long-axis direction condensing lens 80 is disposed between the long-axis direction collimating lens array 70 and the short-axis direction condensing lens array 90; You may arrange | position between the lens array 90 and the optical fiber 30. However, since the distance to the long-axis direction condensing lens 80 and the optical fiber 30 becomes shorter in this case, it is the long-axis direction to the optical fiber 30. May increase the incident angle (θoutx in FIG. 15B) and reduce the light collection efficiency.

In this case, if the focal length (f90) of the short-axis direction condensing lens array 90 is set to the distance from the light emitting unit 12 to the short-axis direction condensing lens array 90 (in this case, about 1.6 mm), the short distance Since the light collection efficiency in the axial direction is almost optimal, the position of the optical fiber 30 is automatically determined from the short-axis direction light collection lens array 90 to the position of the focal length (f90). That is, the distance from the light emitting unit 12 to the optical fiber 30 (L in FIG. 15A) is about 3.2 mm.
However, for example, in order to make laser beams emitted from five light emitting units arranged at intervals of 1.75 mm in the major axis direction to have an incident angle in the major axis direction of less than 10 °, it is about 19.85 mm or more. A distance is required, and it is very difficult to collect a necessary number of laser beams.

Therefore, it is necessary to solve the following problems.
The distance between the short-axis direction condensing lens array 90 and the light emitting unit 12 is short. For this reason, it is difficult to appropriately arrange the long-axis direction collimating lens array 70 and the short-axis direction condensing lens array 90 within a predetermined distance. Further, the position of the optical fiber 30 is also a short distance from the light emitting unit 12, and if the incident angle (θoutx) in the major axis direction is set small, the number of laser beams that can be condensed in the major axis direction is reduced.
The present invention was devised in view of the above points, and an optical waveguide capable of condensing each laser beam emitted from a plurality of light emitting portions of a semiconductor laser array more efficiently and more easily. It is an object to provide a lens array and a laser condensing device.

As means for solving the above-mentioned problems, the first invention of the present invention is an optical waveguide as defined in claim 1.
If the optical waveguide according to claim 1 is used, since the dimension in the major axis direction on the laser beam emission surface is smaller than the dimension in the major axis direction on the laser beam incident surface, the optical waveguides are arranged in the major axis direction. If the laser beams from a plurality of light emitting units are incident, the incident laser beams can be collected in the major axis direction while being reflected in the optical waveguide.
For this reason, each laser beam radiate | emitted from the several light emission part of the semiconductor laser array can be efficiently condensed. Moreover, the optical waveguide can be easily realized.

Moreover, the 2nd-4th invention of this invention is an optical waveguide as described in Claims 2-4 .
If the optical waveguide of Claims 2-4 is used , each laser beam will inject into a corresponding 1st lens. Since the optical axis of each first lens is inclined toward the exit surface side of the optical waveguide, each laser beam can be collected on the exit surface side in the major axis direction. Further, not only the inclination of the optical axis but also the position of each first lens can be set more appropriately by setting the distance in the traveling direction and the distance in the long axis direction with respect to the corresponding laser light emitting part, thereby further appropriately They can be collected on the exit surface side in the long axis direction.
For this reason, each laser beam emitted from the plurality of light emitting portions of the semiconductor laser array can be condensed more efficiently without being reflected in the optical waveguide in the major axis direction or by reducing the reflection angle. . Moreover, the optical waveguide provided with the plurality of first lenses can be easily realized.

Moreover, the 5th-6th invention of this invention is an optical waveguide as described in Claims 5-6 .
In the optical waveguide according to claim 5-6, for the fourth invention, the optical axes of the first lens, without each inclined toward the exit surface of the optical waveguide, substantially parallel to the traveling direction of the laser beam is there. However, by appropriately setting the distance in the traveling direction and the distance in the major axis direction with respect to the corresponding laser light emitting portion ( the distance is different from that in the fourth invention ), the position of each first lens is set to the laser beam. Can be appropriately collected on the exit surface side in the major axis direction.
For this reason, each laser beam emitted from the plurality of light emitting portions of the semiconductor laser array can be condensed more efficiently without being reflected in the optical waveguide in the major axis direction or by reducing the reflection angle. . Moreover, the optical waveguide provided with the plurality of first lenses can be easily realized.

An eighth invention of the present invention is an optical waveguide array as set forth in the eighth aspect .
If the optical waveguide array according to claim 8 is used, a plurality of laser beams emitted from a plurality of laser light emitting units arranged in a major axis direction and a minor axis direction are arranged in a plurality of major axis groups in each major axis direction. It is possible to collect light more efficiently using the optical waveguide array . For example, in the case where there are a total of 20 laser light emitting units of 5 rows (long axis direction) and 4 columns (short axis direction) in the major axis direction and minor axis direction, a total of four laser light emitting units are provided for every five rows and one column. Light is collected by arranging optical waveguides in parallel. Further, it is easy to configure each optical waveguide smaller than the distance between the centers of the laser light emitting units arranged in the short axis direction and larger than the length of the laser light emitting unit in the short axis direction.

The ninth aspect of the present invention is an optical waveguide array as set forth in the ninth aspect .
In the optical waveguide array according to claim 9, for the eighth invention, further to reduce the minor axis dimension of the optical waveguides, arranging a plurality of optical waveguides each long axis group. For example, if there are a total of 20 laser light emitting units of 5 rows (long axis direction) and 4 columns (short axis direction) in the major axis direction and the minor axis direction, every five rows and one column per column Two optical waveguides are arranged in parallel, and a total of eight optical waveguides are arranged in parallel to collect light.
For this reason, since the emission surface of each optical waveguide can be reduced (it can be further reduced in the minor axis direction), it can be collected as a thinner laser beam.

The tenth aspect of the present invention is an optical waveguide array as set forth in the tenth aspect .
If the optical waveguide array according to claim 10 is used, the laser light incident in each optical waveguide can be easily totally reflected in the optical waveguide and can be condensed efficiently. In addition, by adopting an integrated structure in which the optical waveguide and the low refractive index member having a refractive index smaller than the refractive index of the optical waveguide are alternately arranged, each optical waveguide is made to correspond to the light emitting portion for each long axis group , It is not necessary to arrange them one by one, and the adjustment of the arrangement of the optical waveguides becomes easy.

An eleventh aspect of the present invention is a laser condensing device as set forth in the eleventh aspect .
If the laser condensing device according to claim 11 is used, a plurality of laser beams emitted from a plurality of laser light emitting units arranged in a major axis direction and a minor axis direction are first arranged in a major axis direction using an optical waveguide array. The light is condensed and incident on a plurality of optical fibers, and the laser light emitted from the plurality of optical fibers can be condensed by a condensing lens and used for processing or the like.
In this way, an optical waveguide array is used in place of the plurality of lens groups in the path until the laser light emitted from the light emitting unit enters the optical fiber.
Since it is possible to reduce errors, etc., by adjusting the processing accuracy of the optical waveguide (single unit) and the accuracy of the arrangement position, etc., rather than adjusting the processing accuracy of each lens group and the accuracy of the arrangement position. Light can be collected more efficiently and more easily, and the output of laser light can be increased.

If the lens array described in this embodiment is used, each laser beam is incident on the corresponding second lens. The laser focusing position is such that the optical axis of each second lens is on a predetermined straight line on a surface at a predetermined distance from a light emitting surface including a plurality of laser light emitting portions and on a predetermined straight line substantially parallel to the minor axis direction. Since it inclines in the direction of the laser condensing position, each laser beam can be condensed at the laser condensing position in the major axis direction. Further, not only the inclination of the optical axis but also the position of each second lens can be set more appropriately by setting the distance in the advancing direction and the distance in the long axis direction with respect to the corresponding laser emission part. They can be collected at the laser focusing position in the long axis direction.
Therefore, each laser beam emitted from the plurality of light emitting portions of the semiconductor laser array can be used in the major axis direction without using the major axis collimating lens array and the major axis direction condensing lens in the major axis direction. It can collect light efficiently. In addition, a lens array including the plurality of second lenses can be easily realized.

In the lens array described in the present embodiment, the optical axis of each second lens is substantially parallel to the traveling direction of the laser light without being inclined in the direction of the laser focusing position. However, by appropriately setting the distance in the traveling direction and the distance in the major axis direction for the position of each second lens with respect to the corresponding laser emission part, the laser beam can be appropriately set to the laser focusing position in the major axis direction. Can be collected.
Therefore, each laser beam emitted from the plurality of light emitting portions of the semiconductor laser array can be used in the major axis direction without using the major axis collimating lens array and the major axis direction condensing lens in the major axis direction. It can collect light efficiently. In addition, a lens array including the plurality of second lenses can be easily realized.

  Further, in the lens array described in the present embodiment, since the incident surface side of the laser beam is a convex portion, the incident surface is more diffused than the convex lens having a substantially flat incident surface side. Therefore, it is possible to further refract the laser light.

  Further, in the lens array described in the present embodiment, by partially changing the curvature of the curved surface of the lens convex portion, the influence of aberration can be reduced and the laser light can be collected more efficiently. In addition, it is easy to realize the lens array.

  Further, if the laser condensing device described in the present embodiment is used, a plurality of laser beams emitted from a plurality of laser light emitting units arranged in the long axis direction and the short axis direction are first converted into a long axis using a lens array. The light can be condensed more efficiently by condensing in the direction and condensing in the short axis direction using the short axis direction condensing lens in the long axis condensing path.

  Further, in the laser condensing device described in the present embodiment, a short-axis-direction width uniformizing lens (a lens that substantially uniforms the width of incident diffused laser light in the short-axis direction) is added. . Then, a plurality of laser beams emitted from a plurality of laser light emitting units arranged in the major axis direction and the minor axis direction are first condensed in the major axis direction using a lens array, and in the focusing path in the major axis direction More efficient by making the width in the short axis direction almost uniform with the uniform lens in the short axis direction, and condensing in the short axis direction using the short axis condensing lens in the long axis condensing path It can concentrate well.

  Further, the laser condensing device described in this embodiment further uses an optical fiber and a condensing lens. Laser light condensed in the major axis direction and the minor axis direction by the lens array and the minor axis direction condensing lens, or the lens array, the minor axis direction width uniformizing lens, and the minor axis direction condensing lens. It is possible to condense more efficiently and more easily by converging the laser light emitted from a plurality of optical fibers with a condensing lens. And the output of laser light can be increased.

The twelfth to thirteenth aspects of the present invention are optical waveguides as set forth in the twelfth to thirteenth aspects .
When the optical waveguide according to any one of claims 12 to 13 is used , a predetermined surface is covered with a total reflection member (evaporation, pasting, etc.), thereby suppressing a leakage amount of laser light from the surface covered with the total reflection member. Therefore, the light collection efficiency of the laser light can be further improved.

A fourteenth aspect of the present invention is an optical waveguide array as set forth in the fourteenth aspect .
When the optical waveguide array according to claim 14 is used, the leakage amount of laser light from the surface on which the layer of the total reflection member is formed is suppressed in each optical waveguide in the integrated optical waveguide array arranged in the short axis direction. Therefore, the condensing efficiency of the laser light in each optical waveguide can be further improved.

The seventh invention of the present invention is an optical waveguide as set forth in the seventh aspect .
If the optical waveguide according to claim 7 is used, the angle of refraction generated at the light propagation layer of the laser light of the optical waveguide and the incident surface of the optical fiber 30 can be adjusted appropriately, so that it enters the optical fiber. The amount of leakage of the emitted laser light can be suppressed, and the condensing efficiency of the laser light can be further improved.

The fifteenth aspect of the present invention is the laser condensing device as set forth in the fifteenth aspect .
If the laser condensing device according to claim 15 is used, the laser light can be collected more efficiently by using the optical waveguide capable of improving the condensing efficiency than the laser condensing device according to claim 11. The light can be emitted and can be realized more easily, and the output of the laser beam can be further increased.

Embodiments of the present invention will be described below with reference to the drawings. Hereinafter, [First Embodiment] to [Third Embodiment] will be described in order.
[First embodiment]
FIG. 1 shows a schematic configuration diagram of a first embodiment of a laser condensing device using a lens array of the present invention.
In the first embodiment shown in FIG. 1, the distance between the semiconductor laser array 10 and the optical fiber 30 can be made very large compared to the conventional laser focusing device shown in FIG. 14 (conventionally about 3.2 mm). However, in the first embodiment, it is several cm or more (in the example of the present embodiment, about 20 cm) according to the focal lengths of the short axis direction width uniformizing lens 50 and the short axis direction condenser lens 60. Can also be set). For this reason, the arrangement of each lens is easy and the incident angle to the optical fiber 30 can be reduced, so that the laser beam can be condensed more efficiently.

[overall structure]
The semiconductor laser array 10 includes a plurality of light emitting units 12 and two-dimensionally arranges semiconductor lasers having a single light emitting unit, or stacks or arranges array type semiconductor lasers having a plurality of light emitting units in a row. Alternatively, it is composed of a stack type semiconductor laser arranged two-dimensionally. In this embodiment, a stack type laser diode is used.
The lens array 40 is configured by arranging a plurality of lenses (second lenses) corresponding to each second group in the short axis direction of the light emitting units 12 (m, n) in the long axis direction. The lens array 40 condenses (bunches) a plurality of laser beams incident from the light emitting units 12 of the semiconductor laser array 10 in the major axis direction so as to gather on the incident surface of each optical fiber 30 with respect to the major axis direction. , Or aggregate).
In the following, “bundling” refers to collecting a plurality of laser beams without substantially reducing the diameter of each laser beam, and “aggregating” refers to reducing the diameter of each laser beam or reducing the diameter of the plurality of laser beams. Means to collect laser light. “Condensing” means increasing the output of laser light using a method of “bundling” or “aggregating”.

The short axis direction width uniformizing lens 50 converts the plurality of laser beams incident from the lens array 40 into laser beams having a substantially uniform width in the short axis direction for each laser beam. In the example shown in FIG. 1, the short-axis direction width uniform lens 50 is composed of a single (single) lens without being composed of a plurality of lenses.
The short-axis direction condensing lens 60 condenses the laser light incident from the short-axis direction width uniformizing lens 50 in the short-axis direction so as to be collected on the incident surface of each optical fiber 30 (in this case, the light is collected. ). The incident surface of the optical fiber 30 is on a predetermined straight line on a surface at a predetermined distance from the light emitting surface including the plurality of laser light emitting units 12 of the semiconductor laser array 10 and on a predetermined straight line substantially parallel to the minor axis direction (laser (Condensing position). In the example illustrated in FIG. 1, the short-axis direction condensing lens 60 is configured by a single (single) lens without being configured by a plurality of lenses.
Laser light collected in the major axis direction and the minor axis direction is incident on the optical fiber 30. And the condensing lens 100 condenses the laser beam radiate | emitted from the output surface of the optical fiber 30 bundled in arbitrary shapes to each predetermined position. Thereby, the output of the laser beam can be increased so that the plurality of laser beams emitted from the plurality of light emitting portions of the semiconductor laser array 10 can be condensed at a predetermined position and used for processing or the like. .

[Schematic structure of lens array]
Next, the schematic structure of the lens array 40 will be described with reference to FIG. The lens array 40 is configured by arranging a plurality of lenses prepared for each minor axis direction (for example, a cylindrical lens (second lens) having a central axis substantially in the minor axis direction) in the major axis direction. Yes.
The lens array 40a shown in FIG. 2A shows an example in which a plurality of lenses 42a to 42e (second lenses) are formed on one lens substrate.
In the lens array 40b shown in FIG. 2B, an example in which the lenses 44a to 44e (second lenses) are stacked is shown. There are various configuration methods for the lens array 40.

[Arrangement of each component and condensing state of laser beam (outline)]
Next, referring to FIGS. 3A and 3B, the arrangement positions of the light emitting unit 12, the lens array 40, the short-axis direction width uniformizing lens 50, the short-axis direction condensing lens 60, the optical fiber 30, and the laser The light collection state will be described. FIG. 3A is a view as seen from the long axis (fast axis) direction and shows how laser light is refracted and condensed in the short axis (slow axis) direction. FIG. 3B is a diagram viewed from the short axis direction, and shows how laser light is refracted and condensed in the long axis (fast axis) direction.
Here, each light emitting unit 12 (m, n) of the semiconductor laser array 10 has a width in the short axis direction (Dw in FIG. 3A) of about 0.2 mm, and a distance in the short axis direction (FIG. 3). (Dp) in (A) is about 0.2 mm.
For this reason, in order to condense the laser light emitted from two light emitting units adjacent in the minor axis direction onto one optical fiber, the laser light having a width of Din (about 0.6 mm) at the time of emission. Is condensed on an optical fiber 80 (s, t) having a diameter of Dout (for example, 0.2 mm).

Next, using FIG. 3A, each laser beam emitted from each light emitting unit 12 (m, n) is condensed on the incident surface of the optical fiber 30 (s, t) in the minor axis direction. Will be explained. In FIG. 3A, the focal length of the short-axis direction width uniform lens 50 is (f50) (for example, 75 mm), and the focal length of the short-axis direction condenser lens 60 is (f60) (for example, 25 mm).
The short-axis-direction width uniformizing lens 50 is disposed at “a position at a distance of approximately (f50) from the light-emitting portion 12 (m, n)”, and the short-axis direction condensing lens 60 is disposed “the light-emitting portion 12 (m, n ) To approximately (f50 + f50 + f60) distance ”, and the optical fiber 30 (s, t) is disposed“ approximately (f50 + f50 + f60 + f60) distance position from the light emitting portion 12 (m, n) ”. At this time, the position of each position is slightly corrected due to an error. Further, in each laser beam emitted from the light emitting unit 12 (m, n), the spread angle in the minor axis direction is θiny (for example, 3.5 °). In addition, in the laser light incident on the optical fiber 30 (s, t), the incident angle in the minor axis direction is θouty (for example, 10 °).

In order to select the short-axis direction width uniformizing lens 50 and the short-axis direction condensing lens 60, the target optical fiber 30 (s, s,) is determined from Din, Dp, Dw, θiny in the light emitting unit 12 (m, n). If the short-axis-direction width uniformizing lens 50 and the short-axis-direction condenser lens 60 having the focal lengths of f50 and f60 satisfying the number (t), the diameter (Dout), and θouty in the short-axis direction of t) are selected. Good.
The incident surface of each optical fiber 30 (s, t) is on a straight line on a surface at a predetermined distance (in this case, a distance of f50 + f50 + f60 + f60) from the light-emitting surface including the plurality of light-emitting portions 12 (m, n), and It is on a straight line almost parallel to the minor axis direction. Hereinafter, the position where the incident surfaces of the optical fiber 30 (s, t) are arranged is referred to as “laser focusing position (the position of SP in FIG. 3A)”.
In this case, the lens array 40 has almost no influence in the minor axis direction, and thus the description thereof is omitted.

Each laser beam emitted from each light emitting unit 12 (m, n) has an angle of θiny (for example, an angle of 3.5 °) with respect to the Z-axis direction, gradually spreads, and eventually overlaps. When the laser beam overlapped in the minor axis direction passes through the minor axis direction width uniforming lens 50, the minor axis direction width uniforming lens 50 is disposed at the position of the focal length (f50). Becomes almost uniform. At this time, each laser beam that has passed through the minor axis width uniformizing lens 50 has a different angle with respect to the Z-axis direction, but each laser beam has a substantially uniform width and a substantially uniform width. The center of the width of each converted laser beam passes through the position of the focal point (F50 in FIG. 3A) of the short-axis direction width uniformizing lens 50.
Then, each laser beam that has passed through the short-axis direction width uniforming lens 50 passes through the short-axis direction condensing lens 60, and each laser beam has a substantially uniform width, and the short-axis direction condensing lens is from F50. Since it is disposed at the position of the focal length (F60), the light is condensed at a distance of f60 from the short-axis direction condenser lens 60 (focal length of the short-axis direction condenser lens 60).

Then, the incident surface of the optical fiber 30 (s, t) is disposed at a position where each laser beam is condensed by the short axis direction condenser lens 60 (a position at a distance of f60 from the short axis direction condenser lens 60). The focused laser beam is incident. At this time, the laser beam for each group in the minor axis direction is condensed for each group. For example, the laser light of the group of the light emitting unit 12 (1, 1) and the light emitting unit 12 (1, 2) is collected on the optical fiber (1, 1).
In FIG. 3A, the following expression is established.
Dout = (f60 / f50) * Din
θouty = arctan [(f50 / f60) * tan (θiny)]
Dout / Din = tan (θiny) / tan (θouty) = f60 / f50
For this reason, Dout and θouty are arbitrarily set by appropriately selecting the ratio between the focal length (f50) of the short-axis direction width uniformizing lens 50 and the focal length (f60) of the short-axis direction condenser lens 60. it can.
The laser beam is also focused in the “long-axis direction” at the “position where each laser beam is focused by the short-axis direction focusing lens 60 (laser focusing position)”.

Next, using FIG. 3B, each laser beam emitted from the light emitting unit 12 (m, n) is condensed on the incident surface of the optical fiber 30 (s, t) in the major axis direction. explain. In FIG. 3B, the focal length of each second lens (for example, 42a to 42e) of the lens array 40 is defined as (f). Further, in each laser beam emitted from the light emitting unit 12 (m, n), the spread angle in the major axis direction is θinx (for example, 40 °). Further, in the laser light incident on the optical fiber 30 (s, t), the incident angle in the major axis direction is θoutx (for example, 10 °). Further, the interval in the major axis direction of the light emitting unit 12 (m, n) is Dh (for example, 1.75 mm). Further, the thickness of each light emitting portion (Dt in FIG. 3B) is about 0.002 mm.
The lens array 40 satisfies the number (s), the diameter (Dout), and θoutx of the target optical fiber 30 (s, t) in the major axis direction from Dh and θinx in the light emitting unit 12 (m, n). Need to be formed and arranged.
In this case, the short-axis-direction width uniformizing lens 50 and the short-axis-direction condenser lens 60 have almost no influence in the long-axis direction, and thus description thereof is omitted.

In FIG. 3B, when the lens array 40 is arranged at a distance of the focal length (f) of the lens array 40 from the light emitting unit 12 (m, n), the width of the laser light that has passed through the lens array 40 is almost equal. It is made uniform and condensed as shown by 2a in FIG. 3 (B) (in this case, bundled). Further, the lens array 40 is arranged at a distance (S ₃ ) slightly longer than the focal length (f) of the lens array 40 from the light emitting unit 12 (m, n), and (1 / S ₃ ) + (1 / T ₃ ) = (1 / f) is established and S ₃ and T ₃ are set, and when the incident surface of the optical fiber 30 (s, t) is disposed at a distance of S ₃ + T ₃ from the light emitting portion 12, it passes through the lens array 40. The laser light thus collected is condensed (in this case, collected) as indicated by 2c to 2e in FIG.

In the lens array 40, when each laser beam emitted from each light emitting unit 12 (m, n) has an angle of θinx with respect to the Z-axis direction and gradually spreads and passes through the lens array 40, The lens array 40 has a substantially uniform width and is bundled at a predetermined position (2a in FIG. 3B) or aggregated at a predetermined position (2c to 2e in FIG. 3B). Each lens (second lens) is formed and arranged.
Each laser beam that has passed through the lens array 40 is condensed at a predetermined position after passing through the lens array 40.
The position where each laser beam is collected by the lens array 40 (a predetermined straight line (a straight line on a surface at a predetermined distance from a light emitting surface including a plurality of laser light emitting units) and a straight line substantially parallel to the minor axis direction ( Laser condensing position), and this position is also a position at a distance of f60 from the short-axis direction condensing lens 60), and the collected laser light is incident by placing the optical fiber 30 (s, t). To do. At this time, the laser beam for each group in the major axis direction (for each “second group” in FIG. 1) is collected for each group. For example, the laser light of the light emitting units 12 (1, 1), (2, 1), (3, 1), (4, 1), (5, 1) is collected in the optical fiber 30 (1, 1). Lighted.

Since the divergence angle in the major axis direction (θinx: 40 °, for example) is sufficiently larger than the divergence angle in the minor axis direction (θiny, eg, 3.5 °), the lens array 40 includes the light emitting section 12 (m , N) are preferably arranged closer to each other. In the example of FIGS. 3A and 3B, the light emitting unit 12 (m, n) is arranged at a position very close.
In the example of FIGS. 3A and 3B, two laser beams in the short axis direction and five laser beams in the long axis direction are collected on one optical fiber 30, for a total of 10 laser beams. The laser beam is condensed.
In the realized semiconductor laser condensing device, in order to obtain a target laser beam output, two laser beams are condensed in the minor axis direction and ten laser beams are condensed in the major axis direction, for a total of 20 A laser beam having a practical output was obtained by condensing the laser beam of the book.
Further, the number of optical fibers 30 (s, t) in the major axis direction (in this case, “s”, which determines the number of laser beams condensed in the major axis direction), and the optical fiber 30 ( The details of the focal length (f) of the lens array 40, the arrangement position of the lens array 40, and the formation position of each second lens are shown in FIG. 4 according to the diameters of s and t (in this case, “Dout”) and θoutx. explain.

[Structure (optical axis) and arrangement of each second lens in the lens array]
Next, in FIGS. 4A and 4B, FIGS. 5A and 5B, each second lens (here, in the lens array 40 (in this case, the lens array 40b shown in FIG. 2B)) is shown. Now, the structure (optical axis) and arrangement of the second lenses 42b and 42c) will be described in detail.
In the diagrams shown in FIGS. 4A and 4B, the optical axis of each second lens is substantially directed to the laser condensing position, and the position of each second lens is the traveling direction of the laser light (Z-axis direction). And moved in the long axis direction (X-axis direction) (the distance from the corresponding light emitting unit is set to the third predetermined distance).
5A and 5B, the optical axis of each second lens is substantially parallel to the traveling direction of the laser light, and the position of each second lens is determined according to the traveling direction of the laser light (Z-axis). Direction) and the long axis direction (X-axis direction) (the distance from the corresponding light emitting part is set to a fourth predetermined distance).

  Next, with reference to FIGS. 4A and 4B, details of the arrangement of the second lens 42 b corresponding to the light emitting unit 12 (2, 1) when the optical axis of the second lens is tilted will be described in detail. explain. FIG. 4A is an example of an arrangement that realizes a method of “bundling” laser beams, and FIG. 4B is an example of an arrangement that realizes a method of “aggregating” laser beams.

[Arrangement in which the optical axis is inclined and the laser beam is bundled (FIG. 4A)]
Hereinafter, a description will be given with reference to FIG.
The second lens 42c includes a straight line connecting the light emitting unit 12 (3, 1) and the laser condensing position (in this case, substantially the center of the incident surface of the optical fiber 30 (1, 1)), and the second lens 42c. Arrange them so that their optical axes (Kc) coincide. The distance from the corresponding light emitting unit 12 (3, 1) to the center (Cc) of the second lens 42c is arranged at a position where the focal length (f) of the second lens 42c is obtained.
Thereby, when the laser light emitted from the light emitting unit 12 (3, 1) passes through the second lens 42c, the laser light becomes a substantially uniform width. Further, the focal length (f) is selected in consideration of the diameter of the optical fiber 30 (1, 1) (because increasing the focal length (f) increases the width of the laser light after passing).

Next, the arrangement of the second lens 42b will be described.
First, in the optical fiber 30, the incident angle (θ) to the optical fiber 30 is set as follows from the numerical aperture (hereinafter referred to as NA) represented by the sine of the maximum light receiving angle that can be incident.
θ <arcsin (NA)
The center (Cb) of the second lens 42b corresponds to the corresponding light emitting unit 12 (2, 1), where (d) is the distance in the major axis direction of the light emitting unit 12 (2, 1) and the light emitting unit 12 (3, 1). Thus, the distance in the major axis direction (Lx1) and the distance in the laser beam traveling direction (Lz1) are set as follows.
Lx1 ＝ f * sinθ
Lz1 = f * cosθ

The distance (Mz1 + Nz1) to the incident surface of the optical fiber 30 (1, 1) is defined as follows, assuming that half of the width of the laser light that has passed through the second lens 42b and whose width is substantially uniform is (b). Set to.
Mz1 = d / tanθ
Nz1 = b / sinθ
The distance (L) from the light emitting unit 12 (3, 1) to the optical fiber 30 (1, 1) is the focal length (f50) of the short-axis direction width uniformizing lens 50, as shown in FIG. ) And the focal length (f60) of the short-axis direction condensing lens 60, so that f60, f50, θ, and the like are selected so that the following expression is established.
d / tan θ + b / sin θ = f60 + f60 + f50 + f50
The same setting can be made for the other light emitting units 12 (m, n).

[Arrangement in which the optical axis is tilted and the laser light is concentrated (FIG. 4B))
Hereinafter, a description will be given with reference to FIG.
The second lens 42c includes a straight line connecting the light emitting unit 12 (3, 1) and the laser condensing position (in this case, substantially the center of the incident surface of the optical fiber 30 (1, 1)), and the second lens 42c. Arrange them so that their optical axes (Kc) coincide. In addition, the distance from the corresponding light emitting unit 12 (3, 1) to the center (Cc) of the second lens 42c is arranged at a position where the distance (S) is longer than the focal length (f) of the second lens 42c. . Further, assuming that the distance from the center (Cc) of the second lens 42c to the incident surface of the optical fiber 30 (1, 1) is (T), f, S, and T are set so that the following equations are established.
1 / f = 1 / S + 1 / T
Since S + T = L, S and T are as follows.
S = [L-√ (L ² -4 * L * f)] / 2
T = [L + √ (L ² -4 * L * f)] / 2 (assuming S <T)
Thereby, when the laser light emitted from the light emitting unit 12 (3, 1) passes through the second lens 42c, the width is collected.

Next, the arrangement of the second lens 42b will be described.
First, the incident angle (θ) to the optical fiber 30 is set as follows.
θ <arcsin (NA)
The distance from the light emitting part 12 (2, 1) to the incident surface of the optical fiber 30 (1, 1) is (L ₁ ), and the distance from the light emitting part 12 (2, 1) to the center (Cb) of the second lens 42b Is (S ₁ ), and the distance from the center (Cb) of the second lens 42 b to the incident surface of the optical fiber 30 (1, 1) is (T ₁ ), the following equation is established.
L ₁ = d / sin θ
S ₁ = [L ₁ −√ (L ₁ ² −4 * L ₁ * f)] / 2
T ₁ = [L ₁ + √ (L ₁ ² −4 * L ₁ * f)] / 2

Further, the center (Cb) of the second lens 42b sets the distance (Lx2) in the major axis direction and the distance (Lz2) in the laser beam traveling direction from the corresponding light emitting section 12 (2, 1) as follows. To do.
Lx2 ＝ S ₁ * sinθ
Lz2 ＝ S ₁ * cosθ
And the distance (L) from the light emission part 12 (3, 1) to the entrance plane of optical fiber 30 (1, 1) is set as follows.
L = d / tanθ
The distance (L) from the light emitting unit 12 (3, 1) to the optical fiber 30 (1, 1) is the focal length (f50) of the short-axis direction width uniformizing lens 50, as shown in FIG. ) And the focal length (f60) of the short-axis direction condensing lens 60, so that f60, f50, θ, and the like are selected so that the following expression is established.
d / tan θ = f60 + f60 + f50 + f50
The same setting can be made for the other light emitting units 12 (m, n).

In the above, the focal length (f) of each second lens is set constant and the distance (S ₁ ) is set for each second lens. However, the distance (S ₁ ) is set constant and the focal length is set for each second lens. It is also possible to set (f).
In this case, the distance (S ₁ ) is constant, and the focal length (f) and the distance (T ₁ ) are set as follows.
f = S ₁ − (S ₁ ) ² / L ₁
T ₁ = L ₁ −S ₁
In this case, since the focal length (f) is different for each second lens, the curvature is different for each second lens. The farther the light emitting part is from the center (the greater the incident angle to the optical fiber), the greater the distance (L ₁ ), and the corresponding focal length (f) of the second lens increases, so that the curvature increases. Accordingly, since the effective diameter of the second lens can be made substantially constant by making the distance (S ₁ ) constant, the degree of freedom in designing the second lens is increased when there is a restriction on the interval between the second lenses. .

  As described above, in FIGS. 4A and 4B, the optical axis of each second lens is substantially different from the incident surface of the optical fiber 30 (that is, laser focusing) at a different angle for each second lens. It is configured to be inclined in the direction of (position). Further, the position of each second lens is the distance (Lz1, Lz2) in the traveling direction of the laser light, and the distance (Lx1, Lx2) in the long axis direction of the laser light is the focal length (f) of each second lens. And each laser light emitting section for each second lens based on an angle (θ) formed by a perpendicular line between the light emitting surface and a line connecting each second lens and the incident surface (laser focusing position) of the optical fiber. Is set to a predetermined distance (third predetermined distance).

  Next, with reference to FIGS. 5A and 5B, the light emitting unit 12 (2, 1) corresponding to the case where the optical axis of the second lens is made substantially parallel to the traveling direction of the laser light without being inclined is used. Details of the arrangement and the like of the second lens 42b will be described. 5A is an example of an arrangement that realizes a method of “bundling” laser beams, and FIG. 5B is an example of an arrangement that realizes a method of “aggregating” laser beams.

[Arrangement for bundling laser beams without tilting the optical axis (FIG. 5A)]
Hereinafter, differences from FIG. 4A will be described with reference to FIG.
The arrangement position of the second lens 42c is the same as the arrangement position of FIG.
Next, the arrangement of the second lens 42b will be described. The difference from FIG. 4A is that the optical axis (Kb) is made substantially parallel to the incident laser beam without being inclined.
When the cross section of the second lens is a perfect circle, the characteristic does not change even if the lens surface of the second lens rotates around the center of the perfect circle. Therefore, in the second lens having the inclined optical axis shown in FIG. 4A, if the optical axis is rotated so as to be substantially parallel to the traveling direction of the incident laser light, the optical axis The same effect as FIG. 4A can be realized without inclining. However, in this case, when the laser beam incident on the second lens reaches the exit surface, the incident angle with respect to the exit surface is not 0 (zero), and thus the laser beam is refracted on the exit surface. The refraction at the exit surface may be taken into consideration.

Next, the arrangement of the second lens 42b will be described.
First, the incident angle (θ) to the optical fiber 30 is set as follows.
θ <arcsin (NA)
From the refraction at the exit surface of the second lens 42b, the following equation is established.
ψ = arcsin [(n1 / n2) * sinθ] (n1: refractive index of the atmosphere, n2: refractive index of the second lens 42b)
With the distance from the center (Cb) of the second lens 42b to the center of the perfect circle including the second lens 42b as (k), the center (Cb) of the second lens 42b corresponds to the corresponding light emitting section 12 (2, From 1), the distance in the major axis direction (Lx3) and the distance in the laser beam traveling direction (Lz3) are set as follows.
Lx3 = (f + k) * sinψ
Lz3 = (f + k) * cosψ−k

With the distance from the light emitting part 12 (2, 1) to the exit surface of the second lens 42b as (a), half of the width of the laser beam that has passed through the second lens 42b and is substantially uniform in width (b) And Then, the distance (Mz3 + Nz3) to the incident surface of the optical fiber 30 (1, 1) is set as follows.
Mz3 = a + (d−a / tanψ) / tanθ
Nz3 = b / sinθ
The distance (L) from the light emitting unit 12 (3, 1) to the optical fiber 30 (1, 1) is the focal length (f50) of the short-axis direction width uniformizing lens 50, as shown in FIG. ) And the focal length (f60) of the short-axis direction condensing lens 60, so that f60, f50, θ, and the like are selected so that the following expression is established.
a + (d−a / tanψ) / tanθ + b / sinθ
= F60 + f60 + f50 + f50
The same setting can be made for the other light emitting units 12 (m, n).

[Arrangement in which laser beams are gathered without tilting the optical axis (FIG. 5B)]
Hereinafter, differences from FIG. 4B will be described with reference to FIG.
The arrangement position of the second lens 42c is the same as the arrangement position of FIG.
Next, the arrangement of the second lens 42b will be described. The difference from FIG. 4B is that the optical axis (Kb) is made substantially parallel to the incident laser light without being inclined.
If it is rotated with respect to FIG. 4B, the same effect as FIG. 4B can be realized without tilting the optical axis, as described above. Similarly, the refraction at the exit surface may be taken into consideration.

Next, the arrangement of the second lens 42b will be described.
From the incident angle (θ) to the optical fiber 30, the following is set.
θ <arcsin (NA)
Further, the following equation is established from refraction at the exit surface of the second lens 42b.
ψ = arcsin [(n1 / n2) * sinθ]
Hereinafter, the description is omitted because it is similar to FIGS. 5A and 4B.
4A and 4B, the optical axis and the arrangement position of each second lens are appropriately set for each second lens. In FIGS. 5A and 5B, each second lens is set. However, only the optical axis may be appropriately set for each second lens.

In addition, the curvature of the convex portion on the incident surface side of the laser light of the second lens is made larger than that on the emitting surface side (in this example, the incident surface side is convex and the emitting surface side is substantially flat). It can be refracted greatly (at the time of incidence), and the diffusion of the incident laser light can be suppressed. For this reason, as shown in FIGS. 4A and 5A, when the light is condensed with a substantially uniform width, the width can be narrowed and the light can be incident on a thinner optical fiber.
In order to reduce the influence of aberration, the curvature of the curved surface of the convex portion of the second lens may be partially changed. In this case, the aberration can be reduced and the laser beam can be condensed more efficiently.

As described above, in FIGS. 5A and 5B, the optical axis of each second lens is set substantially parallel to the traveling direction of the laser light emitted from the light emitting unit. Further, the position of each second lens is the distance (Lz3, Lz4) in the traveling direction of the laser light, and the distance (Lx3, Lx4) in the major axis direction of the laser light is the focal length (f) of each second lens. And each laser light emitting section for each second lens based on an angle (θ) formed by a perpendicular line between the light emitting surface and a line connecting each second lens and the incident surface (laser focusing position) of the optical fiber. Is set to a predetermined distance (fourth predetermined distance).
In order to form the second lens described above, an ultra-precision machining apparatus is necessary. As the ultraprecision machining apparatus, a machining apparatus described in JP-A-7-1000075 or JP-A-7-299746 can be used.

[Second Embodiment]
In the second embodiment, the minor axis direction width uniformizing lens 50 is omitted from the first embodiment.
In the second embodiment shown in FIG. 6, the distance between the semiconductor laser array 10 and the optical fiber 30 can be greatly increased as compared with the conventional laser condensing device shown in FIG. 14 (as in the first embodiment). The same). For this reason, the arrangement of each lens is easy and the incident angle to the optical fiber 30 can be reduced, so that the laser beam can be condensed more efficiently.
Further, since the short-axis-direction width uniformizing lens 50 is omitted with respect to the first embodiment shown in FIG. 1, the configuration is simplified, and adjustment at the time of assembly, etc. Fine adjustment and the like) are easier than in the first embodiment.

[overall structure]
FIG. 6 shows a schematic configuration diagram of a second embodiment of a laser focusing apparatus using the lens array of the present invention.
6 is different from the first embodiment shown in FIG. 1 in that the short-axis-direction width uniformizing lens 50 is omitted and the number of optical fibers 30 is different. Here, the number of the optical fibers 30 can be variously changed according to the focal length (f60) of the short-axis direction condenser lens 60 and the like. Since others are the same as those of the first embodiment, description thereof will be omitted. [Schematic structure of the lens array] is also the same as that of the first embodiment, and a description thereof will be omitted.

[Arrangement of each component and condensing state of laser beam (outline)]
Next, the arrangement positions of the light emitting unit 12, the lens array 40, the short axis direction condensing lens 60, the optical fiber 30, and the condensing state of the laser light will be described with reference to FIG. FIG. 7A is a view as seen from the long axis (fast axis) direction, and shows how the laser light is refracted and condensed in the short axis (slow axis) direction. FIG. 7B is a view seen from the short axis (slow axis) direction, and shows how laser light is refracted and condensed in the long axis (fast axis) direction.
Next, using FIG. 7A, each laser beam emitted from each light emitting unit 12 (m, n) is condensed on the incident surface of the optical fiber 30 (s, t) in the minor axis direction. Will be explained. In FIG. 7A, the focal length of the short-axis direction condenser lens 60 is set to f60 (in this case, for example, 30 mm).
Then, the short-axis direction condensing lens 60 is arranged at a “position at a distance (S ₄ ) from the light emitting portion 12 (m, n)”, and the optical fiber 30 (m, n) is “from the short-axis direction condensing lens 60. placed in position "of the distance (T _4). At this time, S ₄ and T ₄ are set as follows. (In the example of FIG. 7, (S ₄ , T ₄ ) = (60 mm, 60 mm))
1 / S ₄ + 1 / T ₄ = 1 / f60
At this time, the position of each position is slightly corrected due to an error. Further, in each laser beam emitted from the light emitting unit 12 (m, n), the spread angle in the minor axis direction is θiny (for example, 3.5 °). In addition, in the laser light incident on the optical fiber 30 (s, t), the incident angle in the minor axis direction is θouty (for example, 10 °).

In order to select the short-axis direction condenser lens 60, the number of target optical fibers 30 (s, t) in the short-axis direction (from Din, Dp, Dw, θiny in the light emitting section 12 (m, n) ( The short-axis direction condensing lens 60 having a focal length (f60) satisfying t), the diameter (Dout), and θouty may be selected.
The incident surface of each optical fiber 30 (s, t) is on a straight line on a surface at a predetermined distance (in this case, a distance of S ₄ + T ₄ ) from the light emitting surface including the plurality of light emitting units 12 (m, n). And on a straight line substantially parallel to the minor axis direction. Hereinafter, the position where the incident surfaces of the optical fiber 30 (s, t) are arranged is referred to as a “laser focusing position”.
In this case, the lens array 40 has almost no influence in the minor axis direction, and thus the description thereof is omitted.

Each laser beam emitted from each light emitting unit 12 (m, n) has an angle of θiny (for example, an angle of 3.5 °) with respect to the Z-axis direction, gradually spreads, and eventually overlaps. Since the traveling direction of each laser beam is substantially parallel to the optical axis of the short-axis direction condensing lens 60, the laser light overlapping in the short-axis direction passes through the short-axis direction condensing lens 60 and is 1 / S _4. If + 1 / T ₄ = 1 / f60 is established, the light is condensed at a distance of S ₄ + T ₄ from the light emitting unit 12 (m, n).
Then, the incident surface of the optical fiber 30 (s, t) is located at a position where each laser beam is condensed by the short axis direction condenser lens 60 (a position at a distance S ₄ + T ₄ from the light emitting unit 12 (m, n)). And the focused laser beam is incident.
The laser beam is also focused in the “long-axis direction” at the “position where each laser beam is focused by the short-axis direction focusing lens 60 (laser focusing position)”.
Note that FIG. 7B is similar to FIG.

[Structure (optical axis) and arrangement of each second lens in the lens array]
[Arrangement to tilt the optical axis and bundle the laser beam]
[Arrangement that tilts the optical axis and collects laser light]
[Arrangement to bundle laser beams without tilting the optical axis]
[Arrangement for converging laser light without tilting the optical axis]
Since this is the same as in the first embodiment, description thereof is omitted.

◆ [Third embodiment]
In the third embodiment, the lens array 40 and the short-axis direction condenser lens 60 are further omitted from the second embodiment and replaced with the optical waveguide 20.
In the third embodiment shown in FIG. 8, the distance between the semiconductor laser array 10 and the optical fiber 30 can be greatly increased as compared with the conventional laser condensing device shown in FIG. 14 (as in the first embodiment). The same). For this reason, the arrangement of each lens is easy and the incident angle to the optical fiber 30 can be reduced, so that the laser beam can be condensed more efficiently.
Further, in contrast to the second embodiment shown in FIG. 6, the lens array 40 and the short-axis direction condenser lens 60 are omitted, and the optical waveguide 20 is provided instead, so the second embodiment. In addition, the configuration is further simplified, and adjustment during assembly (fine adjustment of the arrangement position of each lens, etc.) is easier than in the first and second embodiments.

[overall structure]
FIG. 8 shows a schematic configuration diagram of a third embodiment of a laser beam condensing device using the optical waveguide 20 (s, t) of the present invention.
In the third embodiment shown in FIG. 8, the light emitting section 12 (m, n) is divided into a plurality of first groups for each major axis direction, and laser light for each first group is sent to each optical waveguide 20 ( The light is condensed at s, t) and enters each optical fiber 30 (s, t). Since others are the same as those of the first embodiment, description thereof will be omitted.

[Schematic structure of optical waveguide]
Next, the schematic structure of the optical waveguide 20 will be described with reference to FIG. The optical waveguide 20 is configured by arranging a plurality of lenses (for example, cylindrical lenses 22a to 22e (first lenses) having a central axis substantially in the minor axis direction) in the major axis direction.
In the example of the optical waveguide 20 shown in FIG. 9, the surface on which the first lenses 22a to 22e are arranged is the laser light incident surface, and the surface facing the incident surface is the laser light emitting surface. In order to collect the incident laser light and emit it from the exit surface, in the example shown in FIG. 9, the dimension of the exit surface is larger than the dimension of the entrance surface in the major axis direction (X-axis direction). It is comprised so that it may become small (it is comprised by the taper shape). In the present embodiment, the dimensions of the entrance surface and the exit surface in the minor axis direction (Y-axis direction) are substantially the same, but the exit surface may be configured to have a smaller size.
The optical waveguide 20 can be made of various materials such as glass.

[Arrangement of each component and condensing state of laser beam (outline)]
Next, the arrangement positions of the light emitting unit 12, the optical waveguide 20, and the optical fiber 30 and the condensing state of the laser light will be described with reference to FIGS.
FIG. 10A is a view as seen from the long axis (fast axis) direction. When the laser light emitted from each light emitting unit 12 is incident on the incident surface of each optical waveguide 20, the laser light is incident on each optical waveguide 20, and the light is reflected while reflecting inside each optical waveguide 20 in the minor axis direction. The light travels from the waveguide 20 almost without leaking and reaches the light incident surface of the optical fiber 30 (arrives at the output surface of the optical waveguide 20).

FIG. 10B is a view as seen from the short axis (slow axis) direction, and shows how laser light is refracted and condensed in the long axis (fast axis) direction.
In FIG. 10B, the focal length of each of the first lenses 22a to 22e of the optical waveguide 20 (s, t) is assumed to be (f).
In FIG. 10B, the optical waveguide 20 (s, t) is moved from the light emitting portion 12 (m, n) to the position of the focal length (f) of the first lens of the optical waveguide 20 (s, t). When arranged, the laser light that has passed through the optical waveguide 20 (s, t) has a substantially uniform width and is condensed (bundled in this case) as indicated by 2a in FIG. 10B.
Further, the optical waveguide 20 (s, t) is disposed at a position (S ₆ ) slightly farther from the light emitting portion 12 (m, n) than the focal length (f) of the optical waveguide 20 (s, t). When S ₆ and T ₆ satisfying 1 / S ₆ + 1 / T ₆ = 1 / f) are set, and the incident surface of the optical fiber 30 (s, t) is arranged at a distance of S ₆ + T ₆ from the light emitting unit 12 The laser light that has passed through the optical waveguide 20 (s, t) is condensed (in this case, collected) as indicated by 2c to 2e in FIG.

[Structure (optical axis) and arrangement of each first lens in the optical waveguide]
Next, in FIGS. 11A and 11B, details of the structure (optical axis) and arrangement of each first lens (here, the first lenses 22b and 22c) in the optical waveguide 20 will be described.
When the optical axis of each first lens is tilted, the optical axis of each first lens is directed substantially in the direction of the exit surface of the optical waveguide 20, and the position of each first lens is set in the direction in which the laser light travels (Z-axis direction). ) In the major axis direction (X-axis direction) (the distance from the corresponding light emitting unit is set to the first predetermined distance).
11A and 11B, the optical axis of each first lens is substantially parallel to the traveling direction of the laser light, and the position of each first lens is determined according to the traveling direction of the laser light (Z-axis). Direction) and the long axis direction (X-axis direction).
FIG. 11A and FIG. 5A are the same in that the optical axis (Kb) is not inclined and is substantially parallel to the incident laser beam. In FIG. 5A, when the incident laser beam is emitted, it is refracted on the emission surface, but in FIG. 11A as well, it is refracted on the emission surface. At this time, the angle after refraction is set so as not to exceed arcsin (NA). In addition, as described above, when the cross section of the first lens is a perfect circle, the characteristic does not change even if it rotates around the center of the perfect circle.
Therefore, FIG. 11A is almost the same as FIG. 4A, and FIG. 11B is almost the same as FIG. 4B.

[Arrangement in which the optical axis is tilted and the laser beams are bundled] is substantially the same as FIG. 4A, and [Arrangement in which the optical axis is inclined and the laser beams are concentrated ] is substantially the same as FIG. 4B. Therefore, explanation is omitted.
In this case, the optical axis of each first lens is configured to be inclined in the direction of the incident surface of the optical fiber 30 (that is, the exit surface of the optical waveguide) at a different angle for each first lens. Further, the position of each first lens is the distance (Lz1, Lz2) in the traveling direction of the laser light, and the distance (Lx1, Lx2) in the major axis direction of the laser light is the focal length (f) of each first lens. And an angle between a line connecting each first lens and the incident surface of the optical fiber (the exit surface of the optical waveguide) and a perpendicular to the light emitting surface (θ indicating an angle between the exit surface and each first lens). Based on this, for each first lens, a predetermined distance (first predetermined distance) is set with respect to each laser emitting unit.

[Arrangement for bundling laser beams without tilting the optical axis (FIG. 11A)] is substantially the same as FIG. 4A, and [Arrangement for gathering laser beams without tilting the optical axis] (FIG. 11B)] is substantially the same as FIG.
In this case, in FIGS. 11A and 11B, the optical axis of each first lens is set substantially parallel to the traveling direction of the laser light emitted from the light emitting unit. Further, the position of each first lens is the distance (Lz5, Lz6) in the traveling direction of the laser light, and the distance (Lx5, Lx6) in the major axis direction of the laser light is the focal length (f) of each first lens, And an angle between a line connecting each first lens and the incident surface of the optical fiber (the exit surface of the optical waveguide) and a perpendicular to the light emitting surface (θ indicating an angle between the exit surface and each first lens). Based on this, for each first lens, a predetermined distance (second predetermined distance) is set with respect to each laser emitting unit.

In the present embodiment, the first lens is provided on the incident surface of the optical waveguide. However, the first lens may not be provided. In this case, the laser light incident on the optical waveguide does not refract and travel toward the exit surface, but travels toward the exit surface while reflecting inside the optical waveguide.
In the case of this configuration, in order to reduce the reflection angle and improve the light collection efficiency (in order to reduce the incident angle from each light emitting part), the length of the optical waveguide is increased in the traveling direction of the laser light. To do.

[Other configurations using optical waveguides]
Next, an example of an optical waveguide in which the optical waveguides shown in FIG. 10A are integrated will be described with reference to FIGS. FIGS. 12A and 12B are both viewed from the long axis direction, and are illustrated with dimensions different from those in FIG. 10A for easy understanding.
In FIG. 12A, the dimension in the minor axis direction of each optical waveguide 20 (s, t) is smaller than the distance between the centers in the minor axis direction of the light emitting section 12 (m, n), and the light emitting section 12 (m , N) is set larger than the length in the minor axis direction. Thereby, in the minor axis direction, the laser light emitted from one light emitting unit 12 (m, n) is converted into one optical waveguide 20 (s, t) corresponding to the light emitting unit 12 (m, n). ). Further, the optical waveguides 20 (s, t) do not interfere with each other in the minor axis direction.

  Furthermore, the gap between each optical waveguide 20 (s, t) is filled with a low refractive index member 25 having a smaller refractive index than that of the optical waveguide 20 (s, t), and a plurality of light guides arranged in the minor axis direction. The waveguide 20 (s, t) has an integral structure. Thereby, since the size of the optical waveguide can be increased (in the minor axis direction), it is easier to hold the first lens when it is processed, and the processing can be performed more easily. Further, when the laser condensing device is arranged at a predetermined position and the arrangement position is finely adjusted, it is not necessary to make fine adjustment for each optical waveguide, and it is convenient because it can be finely adjusted in a lump. .

In FIG. 12B, the dimension in the minor axis direction of each optical waveguide 20 (s, t) is set to be smaller than the length in the minor axis direction of the light emitting portion 12 (m, n). Thereby, in the minor axis direction, two or more laser beams emitted from one light emitting unit 12 (m, n) corresponding to the light emitting unit 12 (m, n) (see FIG. 12B). In the example, it is possible to appropriately enter the two optical waveguides 20 (s, t). The optical waveguides 20 (s, t) are set so as not to interfere with each other in the minor axis direction. Thereby, the diameter (dn) of the optical fiber 30 can be made smaller.
Further, the gaps between the optical waveguides 20 (s, t) are filled with low refractive index members 25 and 25a having a refractive index smaller than that of the optical waveguides 20 (s, t), and a plurality of arrays are arranged in the minor axis direction. The integrated optical waveguide 20 is the same as that shown in FIG.
Note that it is preferable that the portion of the low refractive index member 25a facing each optical waveguide 20 (s, t) is as thin as possible in order to efficiently condense the laser light.

Next, another effect (reducing the diameter of a cable in which a plurality of optical fibers are bundled) when the diameter of the optical fiber 30 is reduced will be described with reference to FIGS.
FIG. 13A is a cross section of a cable in which 19 optical fibers 30 are bundled. In general, since the cross section of the optical fiber 30 is a circle, as shown in FIG. 13A, the optical fibers are bundled in a state of being arranged without a gap. In this example, the number of bundled optical fibers in the diameter direction is five.
FIG. 13B is a graph showing the “total number of optical fibers” and the “number in the diameter direction” when a plurality of optical fibers are bundled. From the graph, even if the total number of optical fibers is doubled, the number in the diameter direction is smaller than twice. Accordingly, when the laser beams emitted from the plurality of light emitting units 12 are condensed on the plurality of optical fibers 30, for example, as shown in FIG. 12B rather than using 200 optical fibers by the method shown in FIG. ) Using 400 optical fibers (in this case, the diameter of each optical fiber is about half), the diameter of the cable bundled with all the optical fibers becomes smaller, and the beam radius and divergence angle (half angle) The Beam Parameter Product (beam quality) expressed by the product of is improved, and handling is easy.

[Fourth embodiment]
In the fourth embodiment, in contrast to the third embodiment, the side surface (surface intersecting the minor axis direction) of each optical waveguide 20 is covered with a total reflection member 100y that totally reflects the laser light (FIG. 16). . As a result, the laser light incident in the optical waveguide 20 does not leak outside the optical waveguide 20 in the minor axis direction, and all the incident laser light reaches the emission surface. For this reason, the light collection efficiency in the minor axis direction can be further improved.
As a method of covering with the total reflection member 100y, for example, silver or the like is vapor-deposited, or a metal plate such as silver whose surface is mirror-finished is pasted. The total reflection member 100y may be made of any material as long as the laser beam can be totally reflected. Moreover, what kind of thickness may be sufficient (it is not limited to a film | membrane form and plate shape).

[overall structure]
The overall configuration is the same as that of the third embodiment shown in FIG. Hereinafter, differences from the third embodiment will be described.
[Configuration of optical waveguide and condensing state of laser beam]
FIG. 17A shows an example in which a plurality of optical waveguides 20 according to the fourth embodiment are arranged. Similar to the third embodiment described with reference to FIG. 12, an optical waveguide 20 is arranged for each laser light emitting unit 12 in the minor axis direction, and a gap layer between each optical waveguide 20 and the optical waveguide 20 in the minor axis direction is And a layer of a total reflection member 100y that totally reflects the laser light.

In the example of FIG. 17A, the gap layer is formed by sandwiching the gap member 110 with the total reflection member 100y. In this case, since the laser beam is not incident on the gap member 110, the gap member 110 may be made of any material. In this case, the total reflection member 100y may be formed or pasted on the surface of the gap member 110, or may be formed or pasted on the surface of the optical waveguide 20.
Further, the gap layer may be formed only by the total reflection member 100y, or the total reflection member 100y may be sandwiched between the gap members 110. When the gap member 110 is configured to sandwich the total reflection member 100y, the gap member 110 may have any refractive index as long as the gap light can pass the laser beam.
As described above, it is sufficient that at least the layer of the total reflection member 100y that totally reflects the laser light is formed in the gap layer between the optical waveguide 20 and the optical waveguide 20 in the minor axis direction.

In the third embodiment shown in FIG. 17B (the layer of the gap between the optical waveguide 20 and the optical waveguide 20 is constituted by the low refractive index member 25), the laser beam travel direction (Z-axis direction). When a laser beam having a relatively large angle in the minor axis direction (Y-axis direction) is generated (when a laser beam having an angle as shown by laser beam 2β in FIG. 17B is generated), the incident light within the optical waveguide 20 May leak to the outside.
However, in the fourth embodiment (FIG. 17A) in which the layer of the total reflection member 100y is formed in the gap layer between the optical waveguide 20 and the optical waveguide 20, in the laser beam traveling direction (Z-axis direction). On the other hand, even when a laser beam having a relatively large angle in the minor axis direction (Y-axis direction) (laser beam 2β in FIG. 17A) is generated, it does not leak outside the incident optical waveguide 20, Propagation to the exit surface of the optical waveguide 20 can be ensured. For this reason, the light collection efficiency in the minor axis direction can be further improved.

[Fifth embodiment]
In the fifth embodiment, in contrast to the third embodiment or the fourth embodiment, the optical waveguide 20a is composed of at least a first lens portion, and the laser light that has passed through the first lens portion. A light propagation layer in which the light travels is formed in the cavity. Since the laser beam is refracted when it passes through the first lens and reaches the cavity, the position of the first lens is adjusted in consideration of the angle of refraction.
18A to 18C show an example in which the light propagation layer of the optical waveguide 20a is formed in a cavity with respect to the fourth embodiment. The formation method of the cavity is not limited to these, and various formation methods are conceivable.
The method for forming a cavity for the third embodiment is the same as the method for forming the cavity according to the fourth embodiment, and a description thereof will be omitted.

[overall structure]
The overall configuration is the same as that of the third embodiment shown in FIG. Hereinafter, differences from the third embodiment will be described.
[Configuration of optical waveguide and condensing state of laser beam in short axis direction]
FIG. 18C shows an example in which a plurality of optical waveguides 20a according to the fifth embodiment are arranged. Even if a laser beam (laser beam 2β in FIG. 18C) having a relatively large angle in the minor axis direction (Y axis direction) with respect to the laser beam traveling direction (Z axis direction) is generated, it is incident There is no leakage outside the optical waveguide 20a (in this example, the optical waveguide 20a of the first lens portion and the space 120 up to the optical fiber 30 covered with the total reflection member 100y), and the space 120 from the optical waveguide 20a. Can be reliably transmitted to the end portion of the optical fiber (to the incident surface of the optical fiber 30). For this reason, the light collection efficiency in the minor axis direction can be further improved as in the fourth embodiment.

[Condensing state of laser beam in the long axis direction]
Next, the condensing state of the laser beam in the major axis direction will be described with reference to FIG. 19 for the fifth embodiment. FIG. 19A is a diagram for explaining a condensing state of laser light in the long axis direction according to the fifth embodiment, and FIG. 19B is a diagram illustrating the third embodiment and the fourth embodiment. It is a figure explaining the condensing state of the laser beam in a major axis direction.
First, FIG. 19A will be described. The space (cavity) 120 portion is the atmosphere in this example, and the refractive index is n1. Further, assuming that the refractive index of the optical fiber 30 is n2, normally, the refractive index n1 <the refractive index n2. One of the laser beams traveling in the space (cavity) 120 is defined as laser light 2α, and the angle formed by the laser light 2α and the longitudinal direction of the optical fiber 30 is defined as θ1. The angle between the traveling direction of the laser light 2α incident on the optical fiber 30 and the longitudinal direction of the optical fiber 30 is defined as θ2.

  In this case, since refractive index n1 <refractive index n2, θ1> θ2. For this reason, the amount of leakage of the laser light incident on the optical fiber 30 from the optical fiber 30 to the outside is suppressed. That is, the light collection efficiency in the long axis direction (X-axis direction) can be further improved.

In the third embodiment and the fourth embodiment, for example, a gap may be provided between the optical waveguide 20 and the optical fiber 30 as shown in FIG. (When the exit surface of the optical waveguide 20 and the incident surface of the optical fiber 30 are in complete contact with no gap, the refraction shown in FIG. 19B does not occur. The refractive index n3 is preferably set to be smaller than the refractive index n2.)
When a gap is provided, the gap is the atmosphere, and the refractive index is n1. If the refractive index of the optical waveguide 20 is n3 and the refractive index of the optical fiber 30 is n2, the refractive index n1 <the refractive index n2 and the refractive index n1 <the refractive index n3 are usually satisfied.

  Then, one of the laser beams traveling in the optical waveguide 20 is set as the laser beam 2α, and the angle formed between the laser beam 2α and the longitudinal direction of the optical fiber 30 is set to θ1 as in FIG. An angle between the traveling direction of the laser light 2α incident on the optical fiber 30 and the longitudinal direction of the optical fiber 30 is defined as θ20. In addition, an angle formed between the laser beam emitted from the exit surface of the optical waveguide 20 and the longitudinal direction of the optical fiber 30, and an angle formed between the laser beam incident on the entrance surface of the optical fiber 30 and the longitudinal direction of the optical fiber 30. Is θ3.

In this case, since refractive index n1 <refractive index n3, θ1 <θ3. Also, since refractive index n1 <refractive index n2, θ3> θ20.
Comparing FIGS. 19A and 19B, since θ1 <θ3, it can be easily understood that θ2 <θ20. That is, the fifth embodiment (FIG. 19A) can further improve the light collection efficiency in the major axis direction (X-axis direction).

As described above, in the fourth embodiment and the fifth embodiment, the layer of the total reflection member 100y in the optical waveguides 20 and 20a is formed on the surface intersecting with the minor axis direction (Y axis direction). In the fifth embodiment, the total reflection member 100y may be formed on the surface of the optical waveguides 20 and 20a that intersects the long axis direction (X-axis direction).
When the total reflection member 100y is formed on the surface of the optical waveguides 20 and 20a that intersects the long axis direction (X-axis direction), the leakage amount of the laser light incident on the optical waveguides 20 and 20a in the long axis direction is suppressed. Therefore, the light collection efficiency in the long axis direction (X axis direction) can be further improved.

The optical waveguide, lens array, and laser condensing device of the present invention are not limited to the configuration, shape, arrangement, etc. described in the present embodiment, and various modifications, additions, and deletions can be made without changing the gist of the present invention. Is possible.
The optical waveguide, lens array, and laser condensing device of the present invention can be applied to various devices using laser light, such as a laser processing device.
The numerical values used in the description of the present embodiment are examples, and are not limited to these numerical values.
Further, the shape, size, and the like of each lens are not limited to those described in the embodiments and drawings. Each lens used in the present invention may be a flat surface or a curved surface as long as one surface is a curved surface.
The optical waveguide described in this embodiment is configured to collect laser light emitted from a plurality of light emitting units in the long axis direction, but collects laser light emitted from the plurality of light emitting units in the short axis direction. It is also possible to adopt a configuration that emits light.
Further, the above (≧), the following (≦), the greater (>), the less (<), etc. may or may not include an equal sign.

As described above, the optical waveguide according to any one of claims 1 to 7, 12 and 13, the optical waveguide array according to any one of claims 8 to 10 and 14, and the laser according to claim 11 or 15. If the condensing device, the lens array described in this embodiment, or the laser condensing device described in this embodiment is used, each laser beam emitted from a plurality of light emitting units of the semiconductor laser array can be more efficiently used. An optical waveguide that can collect light and can be realized more easily can be provided.

It is a schematic block diagram of 1st Embodiment of the laser condensing apparatus of this invention. 2 is a diagram illustrating a schematic structure of a lens array 40. FIG. In 1st Embodiment, it is a figure explaining a mode that the arrangement position of each lens and the laser beam which passed each lens are condensed. It is a figure explaining the arrangement position of each 2nd lens at the time of making the optical axis of each 2nd lens in lens array 40 incline. It is a figure explaining the arrangement position of each 2nd lens in case the optical axis of each 2nd lens in the lens array 40 is not inclined. It is a schematic block diagram of 2nd Embodiment of the laser condensing apparatus of this invention. In 2nd Embodiment, it is a figure explaining a mode that the arrangement position of each lens and the laser beam which passed each lens are condensed. It is a schematic block diagram of 3rd Embodiment of the laser condensing apparatus of this invention. 2 is a diagram illustrating a schematic structure of an optical waveguide 20. FIG. In 3rd Embodiment, it is a figure explaining a mode that the arrangement position of the optical waveguide 20 and a laser beam are condensed in an optical waveguide. It is a figure explaining the arrangement position of each 1st lens in case the optical axis of each 1st lens in the optical waveguide 20 is not inclined. It is a figure explaining the arrangement | sequence of an optical waveguide and the low refractive index member which has a refractive index smaller than the refractive index of an optical waveguide being inserted | pinched between each optical waveguide, and setting it as an integral structure. It is a figure explaining the other effect at the time of making the diameter of an optical fiber small. It is a figure explaining schematic structure of the conventional semiconductor laser condensing device. In the conventional semiconductor laser condensing apparatus, it is a figure explaining a mode that the arrangement position of each lens and the laser beam which passed each lens are condensed. In the fourth embodiment, the configuration of the optical waveguide 20 will be described. In 4th Embodiment, it is a figure explaining a mode that a laser beam is condensed in the optical waveguide 20 and the total reflection member 100y. In 5th Embodiment, it is a figure explaining a mode that a laser beam is condensed with the structure of the optical waveguide 20a, and the said optical waveguide 20a and the total reflection member 100y. FIG. 10 is a diagram for explaining an angle (θ2) formed by a laser beam incident on an optical fiber 30 and a longitudinal direction of the optical fiber 30 in the fifth embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Semiconductor laser array 12 Light emission part 20 Optical waveguide 22a-22e 1st lens 25, 25a Low refractive index member 30 Optical fiber 40, 40a, 40b Lens array 42a-42e, 44a-44e 2nd lens 50 Uniform short axis direction width Lens 60 Short-axis direction condensing lens 70 Long-axis direction collimating lens array 80 Long-axis direction condensing lens 90 Short-axis direction condensing lens array

Claims (15)

An optical waveguide that enters a plurality of laser beams traveling in an elliptical shape from an incident surface, collects the incident laser beams in a predetermined direction, and emits the light from the emission surface,
Each of the plurality of laser beams is emitted from a plurality of laser light emitting units arranged in the major axis direction and the minor axis direction of the ellipse,
The optical waveguide is formed of a material having the same refractive index, along with more of the major axis dimension of the exit surface is formed smaller than the size of the long axis direction of the incident surface, the dimension of the minor axis direction is the incident It is formed approximately equal to the length in the minor axis direction of the laser light incident on the surface,
The dimension in the major axis direction of the incident surface of the optical waveguide is a length corresponding to a plurality of laser light emitting units arranged in the major axis direction,
A plurality of laser beams emitted from a plurality of laser emitting parts arranged in the long axis direction is incident from the incident surface, and guiding the plurality of laser light supplied confined in the longitudinal direction and short axis direction emission Emanating from the surface,
An optical waveguide characterized by that. An optical waveguide that enters a plurality of laser beams traveling in an elliptical shape from an incident surface, collects the incident laser beams in a predetermined direction, and emits the light from the emission surface,
Each of the plurality of laser beams is emitted from a plurality of laser light emitting units arranged in the major axis direction and the minor axis direction of the ellipse,
The optical waveguide is formed of a material having the same refractive index, and the dimension in the minor axis direction is substantially equal to the length in the minor axis direction of the laser beam incident on the incident surface. Confined to the minor axis direction,
The number of the plurality of laser emission units arranged in the major axis direction, and the interval in the major axis direction between the centers of the respective laser emission units are confirmed in advance,
A plurality of first light beams are refracted in the major axis direction and focused in the major axis direction on the incident surface of the optical waveguide on which the laser beam is incident, corresponding to each laser light emitting unit. A lens is provided,
The optical axis of each first lens is inclined substantially in the direction of the exit surface of the optical waveguide at a different angle for each first lens so that each of the incident laser beams is guided to the exit surface of the optical waveguide. Formed ,
An optical waveguide characterized by that.   An optical waveguide that enters a plurality of laser beams traveling in an elliptical shape from an incident surface, collects the incident laser beams in a predetermined direction, and emits the light from the emission surface,
  Each of the plurality of laser beams is emitted from a plurality of laser light emitting units arranged in the major axis direction and the minor axis direction of the ellipse,
  The optical waveguide is formed of a material having the same refractive index, and the dimension in the minor axis direction is substantially equal to the length in the minor axis direction of the laser beam incident on the incident surface. Confined to the minor axis direction,
  The number of the plurality of laser emission units arranged in the major axis direction, and the interval in the major axis direction between the centers of the respective laser emission units are confirmed in advance,
  A plurality of first light beams are refracted in the major axis direction and focused in the major axis direction on the incident surface of the optical waveguide on which the laser beam is incident, corresponding to each laser light emitting unit. A lens is provided,
  The optical axis of each first lens is inclined substantially in the direction of the exit surface of the optical waveguide at a different angle for each first lens so that each of the incident laser beams is guided to the exit surface of the optical waveguide. Formed,
  The optical waveguide is formed such that the dimension in the major axis direction of the exit surface is smaller than the dimension in the major axis direction of the incident surface.
An optical waveguide characterized by that. An optical waveguide according to claim 2 or 3 ,
The position of each first lens in the optical waveguide is the distance in the traveling direction of the laser light and the major axis direction from each laser light emitting portion to the center of the corresponding first lens when viewed from the short axis direction side. Are positioned by setting each distance to a predetermined distance,
The distance in the traveling direction and the distance in the major axis direction are based on the focal length of each first lens and the angle formed by the line connecting the exit surface and each first lens and the traveling direction of the laser beam. Set for each first lens,
An optical waveguide characterized by that. An optical waveguide that enters a plurality of laser beams traveling in an elliptical shape from an incident surface, collects the incident laser beams in a predetermined direction, and emits the light from the emission surface,
Each of the plurality of laser beams is emitted from a plurality of laser light emitting units arranged in the major axis direction and the minor axis direction of the ellipse,
The optical waveguide is formed of a material having the same refractive index, and the dimension in the minor axis direction is substantially equal to the length in the minor axis direction of the laser beam incident on the incident surface. Confined to the minor axis direction,
The number of the plurality of laser emission units arranged in the major axis direction, and the interval in the major axis direction between the centers of the respective laser emission units are confirmed in advance,
A plurality of first light beams are refracted in the major axis direction and focused in the major axis direction on the incident surface of the optical waveguide on which the laser beam is incident, corresponding to each laser light emitting unit. A lens is provided,
The optical axis of each first lens is formed so as to be substantially parallel to the traveling direction of each incident laser beam ,
The position of each first lens in the optical waveguide is the distance in the traveling direction of the laser light and the major axis direction from each laser light emitting portion to the center of the corresponding first lens when viewed from the short axis direction side. Are positioned by setting each distance to a predetermined distance,
The distance in the traveling direction and the distance in the major axis direction are based on the focal length of each first lens and the angle formed by the line connecting the exit surface and each first lens and the traveling direction of the laser beam. Set for each first lens,
An optical waveguide characterized by that.   An optical waveguide that enters a plurality of laser beams traveling in an elliptical shape from an incident surface, collects the incident laser beams in a predetermined direction, and emits the light from the emission surface,
  Each of the plurality of laser beams is emitted from a plurality of laser light emitting units arranged in the major axis direction and the minor axis direction of the ellipse,
  The optical waveguide is formed of a material having the same refractive index, and the dimension in the minor axis direction is substantially equal to the length in the minor axis direction of the laser beam incident on the incident surface. Confined to the minor axis direction,
  The number of the plurality of laser emission units arranged in the major axis direction, and the interval in the major axis direction between the centers of the respective laser emission units are confirmed in advance,
  A plurality of first light beams are refracted in the major axis direction and focused in the major axis direction on the incident surface of the optical waveguide on which the laser beam is incident, corresponding to each laser light emitting unit. A lens is provided,
  The optical axis of each first lens is formed so as to be substantially parallel to the traveling direction of each incident laser beam,
  The position of each first lens in the optical waveguide is the distance in the traveling direction of the laser light and the major axis direction from each laser light emitting portion to the center of the corresponding first lens when viewed from the short axis direction side. Are positioned by setting each distance to a predetermined distance,
  The distance in the traveling direction and the distance in the major axis direction are based on the focal length of each first lens and the angle formed by the line connecting the exit surface and each first lens and the traveling direction of the laser beam. Set for each first lens,
  The optical waveguide is formed such that the dimension in the major axis direction of the exit surface is smaller than the dimension in the major axis direction of the incident surface.
An optical waveguide characterized by that.   The optical waveguide according to any one of claims 2 to 6,
  In each optical waveguide, a light propagation layer in which the laser light that has passed through the first lens travels is formed in the cavity.
An optical waveguide characterized by that. An optical waveguide array using a plurality of optical waveguides according to any one of claims 1 to 7 ,
In the optical waveguide, a plurality of laser beams traveling while extending in an elliptical shape are incident from an incident surface, and the incident laser beams are collected in a predetermined direction and emitted from an emission surface,
Each of the plurality of laser beams is emitted from a plurality of laser light emitting units arranged in the major axis direction and the minor axis direction of the ellipse,
The number of the plurality of laser emitting parts arranged in a longitudinal direction and short axis direction, and the short axial spacing to the spacing of the longitudinal direction between the approximate center of each laser light emitting portion has been confirmed in advance,
A plurality of said laser light emitting portion is divided into a plurality of long axis group of the long axis direction each,
The plurality of optical waveguides are arranged side by side in the minor axis direction so that the incident surface of each optical waveguide corresponds to the laser light emitting section of each major axis group,
An optical waveguide array characterized by the above. The optical waveguide array according to claim 8, wherein
Instead of making the dimension in the minor axis direction of each optical waveguide approximately equal to the length in the minor axis direction of the laser light incident on the incident surface of the optical waveguide,
Minor axis dimension of each optical waveguide is, is set smaller than the length of the minor axis direction of the laser light emitting unit, the laser light emitting portion of the long axis groups, at least two or more optical waveguides minor axis direction Arranged in the
An optical waveguide array characterized by the above. The optical waveguide array according to claim 8 or 9 , wherein
Between the optical waveguides and the optical waveguide sandwiched a low refractive index member having a refractive index smaller than the refractive index of the optical waveguide, is an integral structure by arranging and the low refractive index member and the optical waveguide are alternately ing,
An optical waveguide array characterized by the above. A plurality of laser beams traveling in an elliptical shape are incident from an incident surface, and the plurality of incident laser beams are condensed in a predetermined direction and emitted from the emission surface. An optical waveguide array using a plurality of the optical waveguides described above, or an optical waveguide array according to any one of claims 8 to 10, an optical fiber, and a condenser lens,
Each of the plurality of laser beams is emitted from a plurality of laser light emitting units arranged in the major axis direction and the minor axis direction of the ellipse,
The number of the plurality of laser emitting parts arranged in a longitudinal direction and short axis direction, and the short axial spacing to the spacing of the longitudinal direction between the approximate center of each laser light emitting portion has been confirmed in advance,
A laser condensing device that condenses laser light emitted from a plurality of laser light emitting units,
Dividing a plurality of the laser emitting unit to a plurality of long axis group of the long axis direction each,
An optical waveguide is arranged corresponding to the laser light emitting part of each long axis group ,
An incident surface of an optical fiber is disposed on the exit surface of each optical waveguide,
Each of the exit surface of the optical fiber are bundled into a desired shape, and the condensing lens is disposed on the exit surface side of the optical fiber bundled into an arbitrary shape,
A plurality of the laser beams emitted from the plurality of laser light emitting portion, by focusing on each of the long axis group using the optical waveguide is incident on the optical fiber, and is emitted from the exit surface of the optical fiber condensing the laser beam with the condenser lens,
A laser condensing device. An optical waveguide used in the optical waveguide according to any one of claims 1 to 7 , or the optical waveguide array according to any one of claims 8 to 10 , wherein
Wherein in the optical waveguide, wherein the minor axis direction and intersecting plane, the laser beam is covered by a total reflection member for totally reflecting,
An optical waveguide characterized by that. An optical waveguide used in the optical waveguide according to any one of claims 1 to 7 or 12, or the optical waveguide array according to any one of claims 8 to 10 ,
In the optical waveguide, a surface intersecting the long axis direction, the laser beam is covered by a total reflection member for totally reflecting,
An optical waveguide characterized by that. The optical waveguide array according to claim 8 or 9 , wherein
Wherein in the minor axis direction, the layer of the gap between the optical waveguides and the optical waveguide, to form a layer of the total reflection member for totally reflecting at least said laser beam, by arranging a layer of the said waveguide gap alternately With an integrated structure,
An optical waveguide array characterized by the above. The optical beam according to claim 12 or 13, wherein a plurality of laser beams traveling in an elliptical shape are incident from an incident surface, and the incident laser beams are condensed in a predetermined direction and emitted from an emission surface. An optical waveguide array using a plurality of waveguides, or an optical waveguide array according to claim 14, an optical fiber, and a condenser lens,
Each of the plurality of laser beams is emitted from a plurality of laser light emitting units arranged in the major axis direction and the minor axis direction of the ellipse,
The number of the plurality of laser emitting parts arranged in a longitudinal direction and short axis direction, and the short axial spacing to the spacing of the longitudinal direction between the approximate center of each laser light emitting portion has been confirmed in advance,
A laser condensing device that condenses laser light emitted from a plurality of laser light emitting units,
Dividing a plurality of the laser emitting unit to a plurality of long axis group of the long axis direction each,
An optical waveguide is arranged corresponding to the laser light emitting part of each long axis group ,
An incident surface of an optical fiber is disposed on the exit surface of each optical waveguide,
Each of the exit surface of the optical fiber are bundled into a desired shape, and the condensing lens is disposed on the exit surface side of the optical fiber bundled into an arbitrary shape,
A plurality of the laser beams emitted from the plurality of laser light emitting portion, by focusing on each of the long axis group using the optical waveguide is incident on the optical fiber, and is emitted from the exit surface of the optical fiber condensing the laser beam with the condenser lens,
A laser condensing device.